Fluorinated organophosphonic acid modified quantum optical microcavity devices and methods of making the same

Abstract

This application provides a quantum optical microcavity device modified with fluorinated organophosphonic acid and its fabrication method, relating to the fields of organic chemistry and optical engineering. The quantum optical microcavity device includes a microcavity body and a fluorinated organophosphonic acid monolayer attached to the surface of the microcavity body. A hydrophobic fluorinated organophosphonic acid monolayer is formed on the surface of the microcavity body through a chemical reaction between a mixed solution containing fluorinated organophosphonic acid molecules and the surface of the microcavity body. Since the active head groups of the fluorinated organophosphonic acid can form chemical bonds with –OH and Si–O–Si on the surface of silica through reaction, the adsorption of water molecules from the air onto the –OH and Si–O–Si on the surface of the silica microcavity body can be effectively suppressed, thus improving the Q-value stability of the whispering-gallery mode quantum optical microcavity device.

Description

Technical Field

[0001] This application relates to the fields of organic chemistry and optical engineering, and in particular to a quantum optical microcavity device modified with fluorinated organophosphonic acid and its preparation method. Background Technology

[0002] A quantum optical microcavity is a miniature device used to study the interaction between light and matter at the quantum level. By setting up a ring-shaped microcavity, light is continuously reflected along the inner wall of the microcavity, creating a whispering gallery effect, hence it is also called a whispering-gallery mode quantum optical microcavity. Whispering-gallery mode quantum optical microcavities can confine light within the microcavity through total internal reflection, thus forming a resonant mode. Whispering-gallery mode quantum optical microcavities have a high quality factor (Q value) and a small mode volume, and a high-density energy light field can be obtained within the cavity.

[0003] High-Q quantum optical microcavities can be fabricated using materials such as silicon dioxide, silicon nitride, lithium niobate, and aluminum nitride. The inherent low optical loss of materials like silicon dioxide can be leveraged to provide extremely high Q values ​​for chip-based systems. However, when air is used as a cladding layer in silicon dioxide microcavities, the surface becomes susceptible to the influence of water molecules in the air, causing the Q value of newly fabricated ultra-high Q silicon dioxide microcavity devices to decrease by more than an order of magnitude.

[0004] To reduce the influence of water molecules in the air, hydroxyl groups on the surface of silica microcavities can be modified into self-assembled monolayers using fluorosilanes or fluorocarboxylic acids. However, in addition to hydroxyl groups, the silicon-oxygen-silicon bonds on the silica surface can also adsorb water molecules through hydrogen bonds. Fluorosilanes and fluorocarboxylic acids cannot protect the exposed silicon-oxygen-silicon bonds, thus reducing the stability of the Q-value of the whispering-gallery mode quantum optical microcavities. Summary of the Invention

[0005] In view of this, embodiments of this application provide a quantum optical microcavity device modified with fluorinated organophosphonic acid and its fabrication method to solve the problem of low Q-value stability in whispering-gallery mode quantum optical microcavities.

[0006] According to a first aspect of this application, a quantum optical microcavity device modified with fluorinated organophosphonic acid is provided, comprising: The microcavity body is a whispering-gallery mode quantum optical microcavity structure; A fluoroorganophosphonic acid monolayer is attached to the surface of the microcavity body via chemical bonds; the fluoroorganophosphonic acid monolayer is used to inhibit water adsorption on the surface of the microcavity body. The fluoroorganophosphonic acid monolayer is obtained by a chemical reaction between a mixed solution and the surface of the microcavity body; the mixed solution is formed by mixing fluoroorganophosphonic acid molecules with an organic solvent.

[0007] In some embodiments, the fluoroorganophosphonic acid molecule is F5BnPA or HF. 13 DPA, HF 17 DPA or HF 21 One or more combinations of DPA.

[0008] In some embodiments, F5BnPA is 2,3,4,5,6-pentafluorobenzylphosphonic acid, and the structural formula of F5BnPA is as follows: ; The HF 13 DPA is 1 H 1 H ,2 H ,2 H - Perfluorooctylphosphonic acid, the HF 13 The structural formula of DPA is: ; The HF 17 DPA is 1 H 1 H ,2 H ,2 H - Perfluorodecylphosphonic acid, the HF 17 The structural formula of DPA is: ; The HF 21 DPA is 1 H 1 H ,2 H ,2 H - Perfluorododecylphosphonic acid, the HF 21 The structural formula of DPA is: .

[0009] In some embodiments, the surface material of the microcavity body is an inorganic silicon oxide compound.

[0010] In some embodiments, the whispering-gallery mode quantum optical microcavity structure of the microcavity body includes any one of microsphere, microdisk, microwedge, microring, microbottle, and microbubble types.

[0011] In some embodiments, the organic solvent is one or more combinations of toluene, methanol, ethanol, isopropanol, diethyl ether, acetonitrile, acetone, dichloromethane, chloroform, ethyl acetate, butyl acetate, and butyl butyrate.

[0012] According to a second aspect of this application, a method for fabricating a fluorinated organophosphonic acid-modified quantum optical microcavity device is provided, for fabricating the fluorinated organophosphonic acid-modified quantum optical microcavity device described in the first aspect; the method includes: The microcavity body was fabricated according to the whispering-gallery mode quantum optical microcavity structure; Clean the microcavity body and perform surface treatment; The microcavity body is immersed in a mixed solution to carry out a chemical reaction, wherein the mixed solution is formed by mixing fluoroorganophosphonic acid molecules with an organic solvent; The microcavity body after the reaction is cleaned and vacuum dried to obtain a quantum optical microcavity device modified with fluorinated organophosphonic acid.

[0013] In some embodiments, the surface treatment employs an oxygen plasma surface treatment method, wherein the surface treatment power is 50~150W and the surface treatment time is 5~30min.

[0014] In some embodiments, the reaction temperature of the chemical reaction is 20~100℃, and the reaction time of the chemical reaction is 0.5~24h.

[0015] In some embodiments, the solute concentration in the mixed solution is 10. -3 ~1mol / L.

[0016] In some embodiments, fabricating a microcavity body according to a whispering-gallery mode quantum optical microcavity structure includes: fabricating the microcavity body using micro-nano fabrication or thermal melting.

[0017] In some embodiments, cleaning the microcavity body and performing surface treatment includes: The microcavity body is rinsed, soaked, or ultrasonically cleaned with a cleaning solution, wherein the cleaning solution includes one or more combinations of deionized water, ethanol, acetone, or isopropanol. The microcavity body after the reaction is cleaned and vacuum dried, including: The microcavity body after reaction is cleaned by rinsing, soaking, or ultrasonic cleaning using the cleaning solution.

[0018] Using the above technical solution, this application provides a quantum optical microcavity device modified with fluorinated organophosphonic acid and its fabrication method. The quantum optical microcavity device includes a microcavity body and a fluorinated organophosphonic acid monolayer attached to the surface of the microcavity body. A hydrophobic fluorinated organophosphonic acid monolayer is formed on the surface of the microcavity body through a chemical reaction between a mixed solution containing fluorinated organophosphonic acid molecules and the surface of the microcavity body. Since the active head groups of the fluorinated organophosphonic acid can form chemical bonds with –OH and Si–O–Si on the surface of silica through reaction, the adsorption of water molecules from the air onto the –OH and Si–O–Si on the surface of the silica microcavity body can be effectively suppressed, thus improving the Q-value stability of the whispering-gallery mode quantum optical microcavity device.

[0019] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, specific embodiments of this application are given below. Attached Figure Description

[0020] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram illustrating the reaction mechanism of the chemical reaction between fluorinated organophosphonic acid molecules and the surface of silica microcavities, as provided in the embodiments of this application. Figure 2 A schematic diagram illustrating the chemical bond connection between fluoroorganophosphonic acid molecules and silicon dioxide is provided for embodiments of this application; Figure 3 This is a schematic diagram of the fabrication process of the fluorinated organophosphonic acid-modified quantum optical microcavity device provided in the embodiments of this application. Detailed Implementation

[0021] The present application will be described in detail below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in the embodiments of the present application can be combined with each other.

[0022] In this embodiment, a quantum optical microcavity is a miniature device used to study the interaction between light and matter at the quantum level. By setting a microcavity with a ring-like whispering-gallery pattern structure, light is continuously reflected along the inner wall of the microcavity, forming a whispering-gallery effect, hence it is also called a whispering-gallery mode quantum optical microcavity. The whispering-gallery mode quantum optical microcavity can confine light within the microcavity through total internal reflection, thereby forming a resonant mode. The whispering-gallery mode quantum optical microcavity has a high quality factor (Q value) and a small mode volume, and a high-density energy light field can be obtained within the cavity.

[0023] High-Q quantum optical microcavities can be fabricated using materials such as silicon dioxide, silicon nitride, lithium niobate, and aluminum nitride. The inherent low optical loss of materials like silicon dioxide can be leveraged to provide extremely high Q values ​​for chip-based systems. However, when air is used as a cladding layer in silicon dioxide microcavities, the surface becomes susceptible to the influence of water molecules in the air, causing the Q value of newly fabricated ultra-high Q silicon dioxide microcavity devices to decrease by more than an order of magnitude.

[0024] To reduce the influence of water molecules in the air, in some embodiments, the hydroxyl groups on the surface of the silica microcavity can be modified into a self-assembled monolayer using fluorosilanes, fluorocarboxylic acids, etc. However, in addition to hydroxyl groups, the silicon-oxygen-silicon bonds on the silica surface can also adsorb water molecules through hydrogen bonds, and fluorosilanes and fluorocarboxylic acids cannot protect the exposed silicon-oxygen-silicon bonds, thus reducing the stability of the Q value of the whispering-gallery mode quantum optical microcavity.

[0025] To address the issue of low Q-value stability in whispering-gallery mode quantum optical microcavities, this application provides a quantum optical microcavity device modified with a fluorinated organophosphonic acid in some embodiments. The fluorinated organophosphonic acid-modified quantum optical microcavity device comprises a microcavity body and a fluorinated organophosphonic acid monolayer.

[0026] The microcavity body is a whispering-gallery mode quantum optical microcavity structure used to form quantum optical microcavity devices. The whispering-gallery mode quantum optical microcavity structure of the microcavity body includes any one of the following: microsphere, microdisk, microwedge, microring, microbottle, and microbubble.

[0027] In some embodiments, the surface material of the microcavity body is an inorganic silicon oxide compound. For example, the microcavity body can be a microdisk-type quantum optical microcavity made of an inorganic silicon oxide compound material such as silicon dioxide.

[0028] Fluorinated organophosphonic acid monolayers are chemically bonded to the surface of the microcavity bulk to suppress water adsorption on the microcavity bulk surface. These monolayers are obtained by reacting a mixture of organophosphonic acid molecules and an organic solvent with the microcavity bulk surface.

[0029] like Figure 1 As shown, a hydrophobic fluoroorganophosphonic acid monolayer can be formed on the surface of a silica microcavity through an interfacial chemical reaction between a fluoroorganophosphonic acid solution and a silica whispering-gallery mode quantum optical microcavity. This serves as a self-assembled monolayer. The active head group of the fluoroorganophosphonic acid is a phosphonic acid group, such as... Figure 2 As shown, phosphonic acid groups can form chemical bonds with both –OH and Si–O–Si on the surface of silica through reactions, effectively suppressing the adsorption of water molecules from the air onto the –OH and Si–O–Si surfaces of the silica microcavities. Furthermore, since phosphonic acid groups can react not only with -OH but also with Si–O–Si, they can improve the coverage of hydrophobic molecules.

[0030] In some embodiments, the fluoroorganophosphonic acid molecule is F5BnPA or HF. 13 DPA, HF 17 DPA or HF 21 One or more combinations of DPA.

[0031] F5BnPA is 2,3,4,5,6-pentafluorobenzylphosphonic acid, and its structural formula is as follows: ; HF 13 DPA is 1 H 1 H ,2 H ,2 H -Perfluorooctylphosphonic acid, HF 13 The structural formula of DPA is: ; HF 17 DPA is 1 H 1 H ,2 H ,2 H -Perfluorodecylphosphonic acid, HF 17 The structural formula of DPA is: ; HF 21 DPA is 1 H 1 H ,2 H ,2 H - Perfluorododecylphosphonic acid, HF 21 The structural formula of DPA is: .

[0032] In some embodiments, the organic solvent is one or more combinations of toluene, methanol, ethanol, isopropanol, diethyl ether, acetonitrile, acetone, dichloromethane, chloroform, ethyl acetate, butyl acetate, and butyl butyrate.

[0033] Based on the fluorinated organophosphonic acid-modified quantum optical microcavity devices described in the above embodiments, some embodiments of this application also provide a method for fabricating fluorinated organophosphonic acid-modified quantum optical microcavity devices, used to fabricate fluorinated organophosphonic acid-modified quantum optical microcavity devices. For example... Figure 3 As shown, the method includes: S1. Fabricate the microcavity body according to the whispering-gallery mode quantum optical microcavity structure; S2. Clean the microcavity body and perform surface treatment; S3. Immerse the microcavity body in the mixed solution to carry out a chemical reaction; S4. The microcavity body after the reaction is cleaned and vacuum dried to obtain a quantum optical microcavity device modified with fluorinated organophosphonic acid.

[0034] To fabricate quantum optical microcavity devices modified with fluorinated organophosphonic acids, the microcavity body can first be fabricated according to the whispering-gallery mode quantum optical microcavity structure. In some embodiments, when fabricating the microcavity body according to the whispering-gallery mode quantum optical microcavity structure, micro-nano fabrication or thermal fusion fabrication can be used.

[0035] After the microcavity body is prepared, it can be cleaned. During cleaning, the microcavity body can be subjected to one or more steps of rinsing, immersion, or ultrasonic cleaning using a cleaning solution. The cleaning solution used in the cleaning process includes one or more combinations of deionized water, ethanol, acetone, or isopropanol.

[0036] During the cleaning process of the microcavity body, surface treatment can also be performed on the microcavity body. In some embodiments, the surface treatment adopts an oxygen plasma surface treatment method, with a treatment power of 50~150W and a treatment time of 5~30min.

[0037] After cleaning and surface treatment, the microcavity body is immersed in a mixed solution for a chemical reaction. The mixed solution is formed by mixing fluoroorganophosphonic acid molecules with an organic solvent, and the solute concentration in the solution can be 10. -3 ~1 mol / L. In some embodiments, the reaction temperature of the chemical reaction is 20~100℃, and the reaction time is 0.5~24 h.

[0038] The reacted microcavity body is then cleaned and vacuum dried to obtain a quantum optical microcavity device modified with fluorinated organophosphonic acid. Similarly, when cleaning and vacuum drying the reacted microcavity body, a cleaning solution can be used to perform one or more steps of rinsing, immersion, or ultrasonic cleaning.

[0039] The following describes in detail the preparation method of quantum optical microcavity devices modified with fluorinated organophosphonic acids through several specific examples. It should be understood that the method may also include other embodiments, which will not be shown one by one.

[0040] Example 1 This embodiment provides a method for fabricating a hydrophobic microsphere cavity device on a silica surface modified with F5BnPA. The specific steps are as follows: S101. Using a carbon dioxide laser with an output wavelength of 1550nm to melt fiber tapers to sinter silica microspheres with a diameter of 60μm; S102. Transfer the glass slide containing at least one silica microsphere obtained in step S101 to a beaker, and clean it with deionized water, ethanol, acetone, isopropanol and ethanol in sequence for 5 minutes using ultrasonic cleaning. After heating, dry it with high-pressure nitrogen. S103. Transfer the glass slide containing at least one silica microsphere obtained in step S102 to a plasma cleaner, set the power to 80W, set the processing time to 15min, introduce oxygen at an appropriate flow rate and start the process, and remove the glass slide from the plasma cleaner after the process is completed. S104. Weigh 1.31g F5BnPA (262.0718g / mol) into a 50mL beaker, add 5mL toluene, stir thoroughly to form a solution with a concentration of 1mol / L, and pour an appropriate volume of the solution into a glass petri dish. S105. Place the glass slide containing at least one silica microsphere obtained in step S103 into the glass culture dish containing F5BnPA toluene solution obtained in step S104. Place the glass culture dish in an oven, set the temperature to 65°C, maintain the temperature for 20 hours, cool to room temperature, and remove it. S106. Rinse and clean the glass slide carrying at least one silica microsphere obtained in step S105 with ethanol, and then place it in a vacuum drying oven for drying to obtain a silica surface hydrophobic microsphere cavity device modified with F5BnPA.

[0041] The F5BnPA-modified hydrophobic microsphere cavity device on the silica surface prepared based on the above embodiments can form a hydrophobic F5BnPA monolayer on the microcavity body surface through a chemical reaction between a mixed solution containing F5BnPA molecules and the surface of the silica microsphere structure. The active head groups of F5BnPA can form chemical bonds with –OH and Si–O–Si on the silica surface through reaction, which can effectively inhibit the adsorption of water molecules in the air to –OH and Si–O–Si on the silica microcavity body surface, thereby improving the Q-value stability of the whispering-gallery mode quantum optical microcavity device.

[0042] Example 2 This embodiment provides an HF 13 The fabrication method of DPA-modified hydrophobic microsphere cavity device on silica surface is as follows: S201. Using a carbon dioxide laser with an output wavelength of 1550nm to melt fiber tapers to sinter silica microspheres with a diameter of 60μm; S202. Transfer the glass slide containing at least one silica microsphere obtained in step S201 to a beaker, and clean it with deionized water, ethanol, acetone, isopropanol and ethanol in sequence for 5 minutes using ultrasonic cleaning. After heating, dry it with high-pressure nitrogen. S203. Transfer the glass slide containing at least one silica microsphere obtained in step S202 to a plasma cleaner, set the power to 100W, set the processing time to 10min, introduce oxygen at an appropriate flow rate and start the process, and remove the glass slide from the plasma cleaner after the process is completed. S204, weigh out 2.14g of HF 13 Add DPA (428.0860 g / mol) to a 50 mL beaker, add 5 mL of butyl acetate, stir thoroughly to form a 1 mol / L solution, and pour an appropriate volume of the solution into a glass petri dish. S205. Place the glass slide containing at least one silica microsphere obtained in step S203 into the slide containing HF obtained in step S204. 13 In a glass culture dish containing DPA butyl acetate solution, the glass culture dish was placed in an oven, the temperature was set to 60℃, and the temperature was maintained for 12 hours before being cooled to room temperature and removed. S206. Rinse and clean the glass slide containing at least one silica microsphere obtained in step S205 with ethanol, then place it in a vacuum drying oven to dry, and obtain HF. 13 Hydrophobic microsphere cavity device with DPA-modified silica surface.

[0043] HF prepared based on the above embodiments 13 DPA-modified silica surface hydrophobic microsphere cavity devices can be used with HF-containing... 13 The chemical reaction between the mixed solution of DPA molecules and the surface of the microcavity body of the silica microsphere structure forms a hydrophobic HF on the surface of the microcavity body. 13 DPA monolayer. HF 13 The active head group of DPA can react with –OH and Si–O–Si on the surface of silica to form chemical bonds, which can effectively inhibit the adsorption of water molecules in the air on the –OH and Si–O–Si on the surface of the silica microcavity, and improve the Q value stability of the whispering-gallery mode quantum optical microcavity device.

[0044] Example 3 This embodiment provides an HF 17 The fabrication method of DPA-modified hydrophobic microsphere cavity device on silica surface is as follows: S301. Using a carbon dioxide laser with an output wavelength of 1550nm to melt fiber tapers to sinter silica microspheres with a diameter of 60μm; S302. Transfer the glass slide containing at least one silica microsphere obtained in step S301 to a beaker, and clean it with deionized water, ethanol, acetone, isopropanol and ethanol in sequence for 5 minutes using ultrasonic cleaning. After heating, dry it with high-pressure nitrogen. S303. Transfer the glass slide containing at least one silica microsphere obtained in step S302 to a plasma cleaner, set the power to 100W, set the processing time to 10min, introduce oxygen at an appropriate flow rate and start the processing, and remove the glass slide from the plasma cleaner after the processing is completed. S304, Weigh out 2.64g of HF 17 Add DPA (528.1016 g / mol) to a 50 mL beaker, add 5 mL of butyl acetate, stir thoroughly to form a 1 mol / L solution, and pour an appropriate volume of the solution into a glass petri dish. S305. Place the glass slide containing at least one silica microsphere obtained in step S303 into the slide containing HF obtained in step S304. 17 In a glass culture dish containing DPA butyl acetate solution, the glass culture dish was placed in an oven, the temperature was set to 60℃, and the temperature was maintained for 12 hours before being cooled to room temperature and removed. S306. Rinse and clean the glass slide containing at least one silica microsphere obtained in step S305 with ethanol, then place it in a vacuum drying oven to dry, and obtain HF. 17 Hydrophobic microsphere cavity device with DPA-modified silica surface.

[0045] HF prepared based on the above embodiments 17 DPA-modified silica surface hydrophobic microsphere cavity devices can be used with HF-containing... 17 The chemical reaction between the mixed solution of DPA molecules and the surface of the microcavity body of the silica microsphere structure forms a hydrophobic HF on the surface of the microcavity body. 17 DPA monolayer. HF 17 The active head group of DPA can react with –OH and Si–O–Si on the surface of silica to form chemical bonds, which can effectively inhibit the adsorption of water molecules in the air on the –OH and Si–O–Si on the surface of the silica microcavity, and improve the Q value stability of the whispering-gallery mode quantum optical microcavity device.

[0046] Example 4 This embodiment provides an HF 21 The fabrication method of DPA-modified hydrophobic microsphere cavity device on silica surface is as follows: S401. Using a carbon dioxide laser with an output wavelength of 1550nm to melt fiber tapers to sinter silica microspheres with a diameter of 60μm. S402. Transfer the glass slide containing at least one silica microsphere obtained in step S401 to a beaker, and clean it with deionized water, ethanol, acetone, isopropanol and ethanol in sequence for 5 minutes using ultrasonic cleaning. After heating, dry it with high-pressure nitrogen. S403. Transfer the glass slide containing at least one silica microsphere obtained in step S402 to a plasma cleaner, set the power to 100W, set the processing time to 10min, introduce oxygen at an appropriate flow rate and start the process, and remove the glass slide from the plasma cleaner after the process is completed. S404, weigh out 3.14g of HF. 21 Add DPA (628.1172 g / mol) to a 50 mL beaker, add 5 mL of butyl acetate, stir thoroughly to form a 1 mol / L solution, and pour an appropriate volume of the solution into a glass petri dish. S405. Place the glass slide containing at least one silica microsphere obtained in step S403 into the slide containing HF obtained in step S404. 21 In a glass culture dish containing DPA butyl acetate solution, the glass culture dish was placed in an oven, the temperature was set to 60℃, and the temperature was maintained for 12 hours before being cooled to room temperature and removed. S406. Rinse and clean the glass slide containing at least one silica microsphere obtained in step S405 with ethanol, then place it in a vacuum drying oven to dry, and obtain HF. 21 Hydrophobic microsphere cavity device with DPA-modified silica surface.

[0047] HF prepared based on the above embodiments 21 DPA-modified silica surface hydrophobic microsphere cavity devices can be used with HF-containing... 21 The chemical reaction between the mixed solution of DPA molecules and the surface of the microcavity body of the silica microsphere structure forms a hydrophobic HF on the surface of the microcavity body. 21 DPA monolayer. HF 21 The active head group of DPA can react with –OH and Si–O–Si on the surface of silica to form chemical bonds, which can effectively inhibit the adsorption of water molecules in the air on the –OH and Si–O–Si on the surface of the silica microcavity, and improve the Q value stability of the whispering-gallery mode quantum optical microcavity device.

[0048] By applying the technical solutions of the above embodiments, the quantum optical microcavity device modified with fluorinated organophosphonic acid and its fabrication method described in the above embodiments include a microcavity body and a fluorinated organophosphonic acid monolayer connected to the surface of the microcavity body. A hydrophobic fluorinated organophosphonic acid monolayer is formed on the surface of the microcavity body through a chemical reaction between a mixed solution containing fluorinated organophosphonic acid molecules and the surface of the microcavity body. Since the active head groups of the fluorinated organophosphonic acid can form chemical bonds with –OH and Si–O–Si on the surface of silica through reaction, the adsorption of water molecules in the air to –OH and Si–O–Si on the surface of the silica microcavity body can be effectively suppressed, thus improving the Q-value stability of the whispering-gallery mode quantum optical microcavity device.

[0049] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0050] The embodiments described above are merely examples of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these modifications and improvements all fall within the protection scope of this application.

Claims

1. A quantum optical microcavity device modified with a fluorinated organophosphonic acid, characterized in that, include: The microcavity body is a whispering-gallery mode quantum optical microcavity structure; A fluoroorganophosphonic acid monolayer is attached to the surface of the microcavity body via chemical bonds; the fluoroorganophosphonic acid monolayer is used to inhibit water adsorption on the surface of the microcavity body. The fluoroorganophosphonic acid monolayer is obtained by a chemical reaction between a mixed solution and the surface of the microcavity body; the mixed solution is formed by mixing fluoroorganophosphonic acid molecules with an organic solvent.

2. The quantum optical microcavity device modified with fluorinated organophosphonic acid according to claim 1, characterized in that, The fluoroorganophosphonic acid molecule is F5BnPA or HF. 13 DPA, HF 17 DPA or HF 21 One or more combinations of DPA.

3. The quantum optical microcavity device modified with fluorinated organophosphonic acid according to claim 2, characterized in that, The F5BnPA is 2,3,4,5,6-pentafluorobenzylphosphonic acid, and the structural formula of the F5BnPA is as follows: ; The HF 13 DPA is 1 H 1 H ,2 H ,2 H - Perfluorooctylphosphonic acid, the HF 13 The structural formula of DPA is: ; The HF 17 DPA is 1 H 1 H ,2 H ,2 H - Perfluorodecylphosphonic acid, the HF 17 The structural formula of DPA is: ; The HF 21 DPA is 1 H 1 H ,2 H ,2 H - Perfluorododecylphosphonic acid, the HF 21 The structural formula of DPA is: .

4. The quantum optical microcavity device modified with fluorinated organophosphonic acid according to claim 1, characterized in that, The surface material of the microcavity body is an inorganic silicon oxide compound.

5. The quantum optical microcavity device modified with fluorinated organophosphonic acid according to claim 1, characterized in that, The whispering-gallery mode quantum optical microcavity structure of the microcavity body includes any one of the following: microsphere, microdisk, microwedge, microring, microbottle, and microbubble.

6. The quantum optical microcavity device modified with fluorinated organophosphonic acid according to claim 1, characterized in that, The organic solvent is one or more combinations of toluene, methanol, ethanol, isopropanol, diethyl ether, acetonitrile, acetone, dichloromethane, chloroform, ethyl acetate, butyl acetate, and butyl butyrate.

7. A method for fabricating a quantum optical microcavity device modified with a fluorinated organophosphonic acid, characterized in that, The method is used to prepare the fluoroorganophosphonic acid-modified quantum optical microcavity device according to any one of claims 1-6; the method includes: The microcavity body was fabricated according to the whispering-gallery mode quantum optical microcavity structure; Clean the microcavity body and perform surface treatment; The microcavity body is immersed in a mixed solution to carry out a chemical reaction, wherein the mixed solution is formed by mixing fluoroorganophosphonic acid molecules with an organic solvent; The microcavity body after the reaction is cleaned and vacuum dried to obtain a quantum optical microcavity device modified with fluorinated organophosphonic acid.

8. The method for fabricating a quantum optical microcavity device modified with fluorinated organophosphonic acid according to claim 7, characterized in that, The surface treatment employs an oxygen plasma surface treatment method, with a treatment power of 50~150W and a treatment time of 5~30min.

9. The method for fabricating a quantum optical microcavity device modified with fluorinated organophosphonic acid according to claim 7, characterized in that, The reaction temperature of the chemical reaction is 20~100℃, and the reaction time is 0.5~24h.

10. The method for fabricating a quantum optical microcavity device modified with fluorinated organophosphonic acid according to claim 7, characterized in that, The solute concentration in the mixed solution is 10. -3 ~1mol / L.

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