Alignment accuracy measurement method, measurement device, and computer-readable storage medium
By using the reference frame and limiting posts of the transparent substrate as a reference in the photon counting CT detector packaging process, rotating the product and performing system coordinate transformation, the problem of alignment accuracy between the CZT crystal and the heat sink was solved, achieving efficient and accurate positioning and error avoidance.
CN122217154APending Publication Date: 2026-06-16SKY CHIP INTERCONNECTION TECH CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SKY CHIP INTERCONNECTION TECH CO LTD
- Filing Date
- 2026-02-03
- Publication Date
- 2026-06-16
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Figure CN122217154A_ABST
Abstract
The application discloses a kind of measurement methods of alignment accuracy, measuring device and computer readable storage medium, in which the measurement method of alignment accuracy includes: with the reference frame line of transparent substrate and limit post as reference, the first surface of product to be detected is towards transparent substrate and is fixed on transparent substrate;Determine the first relative position information of first feature point on second surface and reference frame line set position;Rotating product to be detected and transparent substrate, determine the second relative position information of second feature point on first surface and reference frame line set position, wherein, second surface is oppositely arranged with first surface;Determine the alignment accuracy of first feature point and second feature point using first relative position information and second relative position information.The method improves the efficiency of measuring alignment accuracy, avoids the cumulative error caused by multiple clamping.
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