A purification system and purification method of zirconium tetrachloride

Abstract

This invention relates to the field of non-ferrous metal metallurgy, and particularly to a zirconium tetrachloride purification system and method. The zirconium tetrachloride purification system includes a purification furnace; a vacuum collection tank connected to the furnace via a first pipeline, on which an exhaust valve is installed, and a discharge port at the bottom of the vacuum collection tank; a circulating cooling water system connected to the vacuum collection tank; a filter connected to the vacuum collection tank via a second pipeline, on which a first pneumatic valve is installed; a tail gas spray tower connected to the filter via a third pipeline; and a control system electrically connected to the exhaust valve and the first pneumatic valve. This zirconium tetrachloride purification system and method solves the problems of low control accuracy and inherent dangers in existing zirconium tetrachloride purification methods.

Description

Technical Field

[0001] This application relates to the field of non-ferrous metal metallurgy technology, and in particular to a purification system and method for zirconium tetrachloride. Background Technology

[0002] The production of nuclear-grade sponge zirconium requires extremely high purity of the raw material, zirconium tetrachloride, necessitating the effective removal of chloride impurities from low-boiling-point metals such as titanium, aluminum, and iron through a distillation process. Currently, this distillation impurity removal process generally relies on manual observation and adjustment of the exhaust valve, employing an intermittent operation mode for impurity separation.

[0003] However, the above-mentioned operating methods suffer from problems such as low control precision and poor process stability. Operators relying solely on experience to control the exhaust valve can lead to the release of large amounts of zirconium tetrachloride vapor along with impurities, resulting in significant material losses. Furthermore, the emitted mixed gas is highly corrosive and readily reacts with moisture to generate toxic hydrogen chloride gas, posing a serious threat to the health and safety of operators. Summary of the Invention

[0004] In view of this, the purpose of this application is to provide a purification system and method for zirconium tetrachloride, so as to solve the problems of low control accuracy and danger in the existing purification methods for zirconium tetrachloride.

[0005] According to a first aspect of the present invention, a zirconium tetrachloride purification system is provided, wherein the zirconium tetrachloride purification system comprises: a purification furnace; a vacuum collection tank connected to the purification furnace via a first pipeline, wherein an exhaust valve is provided on the first pipeline, and a discharge port is provided at the bottom of the vacuum collection tank; a circulating cooling water system connected to the vacuum collection tank; a filter connected to the vacuum collection tank via a second pipeline, wherein a first pneumatic valve is provided on the second pipeline; a tail gas spray tower connected to the filter via a third pipeline; and a control system electrically connected to the exhaust valve and the first pneumatic valve.

[0006] Preferably, the zirconium tetrachloride purification system further includes a vacuum pump, which is connected to the vacuum collection tank via a fourth pipeline. A second pneumatic valve is installed on the fourth pipeline, and the second pneumatic valve is electrically connected to the control system.

[0007] Preferably, there are multiple first pipelines, which are arranged circumferentially at intervals on the top of the vacuum collection tank, and multiple exhaust valves are correspondingly arranged on the multiple first pipelines.

[0008] Preferably, the exhaust valve is a pneumatic ball valve, and the spacing between adjacent exhaust valves is equal.

[0009] Preferably, the vacuum collection tank includes: a sealed tank body connected to the first pipeline; and a circulating water jacket fitted onto the sealed tank body. The circulating water jacket has an inlet and an outlet. The inlet is located at the lower part of the circulating water jacket, and the outlet is located at the upper part of the circulating water jacket. The inlet and the outlet are located on opposite sides of the circulating water jacket, and the circulating cooling water system is connected to the inlet and the outlet.

[0010] According to a second aspect of the present invention, a method for purifying zirconium tetrachloride is provided, wherein the method utilizes the zirconium tetrachloride purification system described above, and the method includes the following steps: Step 1, turning on the circulating cooling water system to adjust the temperature of the vacuum collection tank, and turning on the vacuum pump and the second pneumatic valve to adjust the pressure of the vacuum collection tank; Step 2, starting the purification furnace, and monitoring the temperature and pressure of the purification furnace in real time through the control system; Step 3, collecting the zirconium-rich solid material generated by gas sublimation in the vacuum collection tank, while simultaneously treating the tail gas.

[0011] Preferably, step three includes: when the temperature of the purification furnace reaches a preset temperature and the pressure of the purification furnace reaches a first preset pressure, controlling the exhaust valve and the first pneumatic valve to open and close simultaneously, repeating this several times, each time opening for 0.1 to 2 seconds, continuing to repeat until the pressure of the purification furnace is lower than a second preset pressure, then stopping the repetition, and repeating the cycle until the temperature of the purification furnace reaches the preset temperature again and the pressure of the purification furnace reaches the first preset pressure again, until a single round of impurity removal is completed.

[0012] Preferably, the preset temperature includes a first temperature and a second temperature, the first temperature being in the range of 140℃-200℃ and the second temperature being in the range of 195℃-250℃. The purification method for zirconium tetrachloride further includes: step four, adjusting the preset temperature in step three from the first temperature to the second temperature, and then performing step three again.

[0013] Preferably, when the first pneumatic valve is repeatedly opened and closed, the plurality of the first pneumatic valves perform operations in a preset order.

[0014] Preferably, the purification method for zirconium tetrachloride further includes: step five, opening the outlet of the vacuum collection tank to collect zirconium-rich solid material.

[0015] The zirconium tetrachloride purification system and method of this invention include a vacuum collection tank connected to a purification furnace via a first pipeline. An exhaust valve is installed on the first pipeline, allowing control of gas flow between the purification furnace and the vacuum collection tank by opening and closing the valve. A circulating cooling water system is connected to the vacuum collection tank to cool it, causing the titanium tetrachloride, aluminum trichloride, and zirconium tetrachloride vapors entering the tank to sublimate on the tank walls. An outlet is located at the bottom of the vacuum collection tank to recover the sublimated zirconium-rich solid material, reducing material loss. A filter is connected to the vacuum collection tank via a second pipeline, on which a first pneumatic valve is installed. A tail gas spray tower is connected to the filter via a third pipeline, enabling tail gas treatment of the gas entering the vacuum collection tank. The control system is electrically connected to the exhaust valve and the first pneumatic valve to precisely control gas flow, avoiding manual operation. This effectively solves the problems of low control precision and inherent dangers in existing zirconium tetrachloride purification methods.

[0016] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the zirconium tetrachloride purification system according to the present invention.

[0019] Figure reference numerals: 1-Purification furnace; 2-Vacuum collection tank; 20-Discharge port; 21-Sealed tank body; 22-Circulating water jacket; 221-Inlet; 222-Outlet; 3-Filter; 4-Tail gas spray tower; 5-Vacuum pump; 60-Exhaust valve; 61-First pneumatic valve; 62-Second pneumatic valve; 100-First pipeline; 200-Second pipeline; 300-Third pipeline; 400-Fourth pipeline. Detailed Implementation

[0020] The following detailed embodiments are provided to help the reader gain a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and / or systems described herein will be apparent after understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein; changes that will be apparent after understanding the disclosure of this application are possible, except for operations that must occur in a specific order. Furthermore, for clarity and brevity, descriptions of features known in the art may be omitted.

[0021] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many feasible ways of implementing the methods, apparatus, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0022] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, it may be directly "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, or there may be one or more other elements in between. In contrast, when an element is described as being "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly on" another element, or "directly covering" another element, there may be no other elements in between.

[0023] As used herein, the term “and / or” includes any one of the relevant items listed and any combination of any two or more items.

[0024] Although terms such as “first,” “second,” and “third” may be used herein to describe individual components, assemblies, regions, layers, or parts, these components, assemblies, regions, layers, or parts are not limited by these terms. Rather, these terms are used only to distinguish one component, assembly, region, layer, or part from another. Therefore, without departing from the teachings of the examples described herein, the first component, assembly, region, layer, or part referred to as the second component, assembly, region, layer, or part may also be referred to as the second component, assembly, region, layer, or part.

[0025] For ease of description, spatial relation terms such as “above,” “upper,” “below,” and “lower” are used herein to describe the relationship between one element and another, as shown in the accompanying drawings. Such spatial relation terms are intended to include not only the orientation depicted in the drawings but also different orientations of the device during use or operation. For example, if the device in the drawings is flipped, an element described as being “above” or “upper” relative to another element will subsequently be “below” or “lower” relative to that other element. Therefore, the term “above” includes both “above” and “below” orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relation terms used herein will be interpreted accordingly.

[0026] The terminology used herein is for the purpose of describing various examples only and is not intended to limit the examples. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0027] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.

[0028] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application.

[0029] like Figure 1 As shown, according to a first aspect of the present invention, a zirconium tetrachloride purification system is provided, the zirconium tetrachloride purification system comprising a purification furnace 1, a vacuum collection tank 2, a circulating cooling water system, a filter 3, a tail gas spray tower 4, and a control system.

[0030] In the following description, reference will be made to Figure 1 The specific structure of the components of the zirconium tetrachloride purification system and the connection relationship of the components are described in detail.

[0031] like Figure 1As shown, in this embodiment, the vacuum collection tank 2 is connected to the purification furnace 1 via a first pipeline 100. An exhaust valve 60 is installed on the first pipeline 100, which controls the flow of gas between the purification furnace 1 and the vacuum collection tank 2 by opening and closing the exhaust valve 60. A circulating cooling water system is connected to the vacuum collection tank 2 to cool it, causing the titanium tetrachloride, aluminum trichloride, and zirconium tetrachloride vapors entering the vacuum collection tank 2 to sublimate on the wall surface. An outlet 20 is provided at the bottom of the vacuum collection tank 2 to recover the sublimated zirconium-rich solid material in the vacuum collection tank 2, thereby reducing material loss. A filter 3 is connected to the vacuum collection tank 2 via a second pipeline 200, on which a first pneumatic valve 61 is installed. A tail gas spray tower 4 is connected to the filter 3 via a third pipeline 300, thereby enabling tail gas treatment of the gas entering the vacuum collection tank 2. The control system is electrically connected to the exhaust valve 60 and the first pneumatic valve 61 to precisely control the gas flow, thereby replacing manual operation, effectively improving control accuracy and ensuring the safety of operators.

[0032] Preferred, such as Figure 1 As shown, in this embodiment, the zirconium tetrachloride purification system may further include a vacuum pump 5, which is electrically connected to the control system. The vacuum pump 5 can be connected to the vacuum collection tank 2 via a fourth pipeline 400 to provide negative pressure to the vacuum collection tank 2. A second pneumatic valve 62 is provided on the fourth pipeline 400, and the second pneumatic valve 62 is electrically connected to the control system. Preferably, the control system can be a DCS or a PLC to control the opening and closing of the exhaust valve 60, the first pneumatic valve 61, and the second pneumatic valve 62.

[0033] Preferred, such as Figure 1 As shown, in this embodiment, there can be multiple first pipes 100. The bottom ends of the multiple first pipes 100 are connected to the top of the purification furnace 1, and the top ends of the multiple first pipes 100 are connected to the bottom of the vacuum collection tank 2. The multiple first pipes 100 can be arranged circumferentially at intervals on the top of the vacuum collection tank 2. The number of exhaust valves 60 can be equal to the number of first pipes 100, and the multiple exhaust valves 60 can be correspondingly arranged on the multiple first pipes 100.

[0034] Furthermore, preferably, such as Figure 1 As shown, in this embodiment, the exhaust valve 60 can be a corrosion-resistant pneumatic ball valve. Multiple exhaust valves 60 can be positioned at the same height, with equal spacing between adjacent exhaust valves 60.

[0035] Preferred, such as Figure 1As shown, in this embodiment, the vacuum collection tank 2 may include a sealed tank body 21 and a circulating water jacket 22. The sealed tank body 21 is connected to the first pipeline 100. After the raw material in the purification furnace 1 is heated to generate gas, the gas can enter the vacuum collection tank 2 through the first pipeline 100. The circulating water jacket 22 is fitted onto the sealed tank body 21. The circulating water jacket 22 is provided with an inlet 221 and an outlet 222. Preferably, the inlet 221 is located at the lower part of the circulating water jacket 22, and the outlet 222 is located at the upper part of the circulating water jacket 22, with the inlet 221 and outlet 222 located on opposite sides of the circulating water jacket 22. The circulating cooling water system is connected to the inlet 221 and outlet 222 to continuously regulate the temperature of the sealed tank body 21. Because the temperature of the sealed container 21 is lower than that of the gas, the gas will sublimate when it comes into contact with the inner wall of the sealed container 21, thereby recovering the zirconium tetrachloride that was carried out during the removal of impurities.

[0036] Preferred, such as Figure 1 As shown, in this embodiment, the gas in the vacuum collection tank 2, after condensation, flows through the second pipeline 200 to the filter 3, which can be a bag filter. The bag filter can effectively capture solid dust in the gas, and then the gas is transported to the tail gas scrubbing tower 4 through the third pipeline 300 for alkaline absorption treatment. The tail gas scrubbing tower 4 can purify corrosive gases to avoid environmental pollution.

[0037] During operation, the zirconium tetrachloride purification system removes low-boiling-point impurities such as titanium, aluminum, and iron from the raw materials in purification furnace 1 through distillation. Zirconium tetrachloride is then recovered from the mixed gas via vacuum collection tank 2 to reduce material loss. The resulting exhaust gas is treated by filter 3 and exhaust gas scrubbing tower 4, thus preventing environmental pollution. Throughout the process, gas flow is controlled by a pneumatic valve operated by the control system, replacing manual operation and effectively improving control precision while ensuring operator safety.

[0038] In addition, such as Figure 1 As shown, according to a second aspect of the present invention, a method for purifying zirconium tetrachloride is provided, wherein the method applies the zirconium tetrachloride purification system described above, and the method includes the following steps: Step 1: Turn on the circulating cooling water system to adjust the temperature of the vacuum collection tank 2, and turn on the vacuum pump 5 and the second pneumatic valve 62 to adjust the pressure of the vacuum collection tank 2. Step 2: Start purification furnace 1 and monitor the temperature and pressure of purification furnace 1 in real time through the control system; Step 3: Collect the zirconium-rich solid material generated by gas sublimation in vacuum collection tank 2, and treat the tail gas at the same time.

[0039] Preferably, in this embodiment, during step one, the circulating cooling water system can be turned on first to cool the vacuum collection tank 2. Specifically, the temperature of the vacuum collection tank 2 can be reduced to below 10°C. Then, the exhaust valve 60 and the first pneumatic valve 61 are closed, and the second pneumatic valve 62 is opened to reduce the pressure of the vacuum collection tank 2 to below -0.06 MPa. After that, the pump is stopped and the second pneumatic valve 62 is closed. The vacuum collection tank 2 can be equipped with a temperature sensor and a pressure sensor electrically connected to the control system to monitor the temperature and pressure inside the vacuum collection tank 2 in real time.

[0040] Preferably, in this embodiment, during step two, the purification furnace 1 is started and heated according to a preset program, and the temperature and pressure of the purification furnace 1 are monitored in real time by a control system. Specifically, a temperature sensor and a pressure sensor electrically connected to the control system may also be installed inside the purification furnace 1 to monitor the temperature and pressure inside the purification furnace 1 in real time.

[0041] Preferably, in this embodiment, step three includes: when the temperature of the purification furnace 1 reaches a preset temperature and the pressure of the purification furnace 1 reaches a first preset pressure (which can be 0.1 MPa), controlling the exhaust valve 60 and the first pneumatic valve 61 to open and close simultaneously. This is repeated several times, with each opening lasting 0.1 to 2 seconds, until the pressure of the purification furnace 1 falls below a second preset pressure (which can be 0.05 MPa), at which point the repetition stops. The cycle continues until the temperature of the purification furnace 1 reaches the preset temperature again and the pressure of the purification furnace 1 reaches the first preset pressure again, until a single round of impurity removal is completed.

[0042] Specifically, in this embodiment, when the temperature of the purification furnace 1 reaches 180°C and the pressure reaches 0.1 MPa, the control system initiates a purification process. The control system simultaneously opens the exhaust valve 60 and the first pneumatic valve 61, and closes them after 0.3 seconds. This process is repeated every 5 seconds until the pressure of the purification furnace 1 drops below 0.05 MPa. During this process, the gas in the purification furnace 1 is drawn into the vacuum collection tank 2 under the negative pressure for sublimation, and the waste gas flows to the filter 3 through the second pipeline 200. Preferably, a fan can be installed on the third pipeline 300 to promote the flow of waste gas. After a period of time, when the temperature in the purification furnace 1 reaches 180°C and the pressure reaches 0.1 MPa again, the control system again controls the exhaust valve 60 and the first pneumatic valve 61 to start opening and closing repeatedly, thus completing a cycle until a single round of purification is completed. The criterion for determining whether a single round of impurity removal is complete can be that the pressure inside the purification furnace 1 cannot reach the first preset pressure again at a preset temperature, thus indicating that impurities with boiling points corresponding to that temperature have been removed. Alternatively, it can be determined by pre-setting a number of cycles; once the preset number of cycles is reached, the single round of impurity removal is considered complete.

[0043] Furthermore, preferably, such as Figure 1 As shown, in this embodiment, when the first pneumatic valve 61 is repeatedly opened and closed, the multiple first pneumatic valves 61 can perform operations sequentially according to a preset order. For example, the multiple first pneumatic valves 61 include a first pneumatic valve No. 1, a second pneumatic valve No. 2, and a third pneumatic valve No. 3. The first pneumatic valve No. 1 is opened for 0.3 seconds and then closed, and the second pneumatic valve No. 2 is opened after a 5-second interval; the second pneumatic valve No. 2 is opened for 0.3 seconds and then closed, and the third pneumatic valve No. 3 is opened for 0.3 seconds and then closed, and the first pneumatic valve No. 1 is opened after a 5-second interval, and this cycle continues. This configuration can effectively reduce the carryover of the main product, zirconium tetrachloride, thereby reducing material loss.

[0044] In a more preferred embodiment, the preset temperature can be the impurity vaporization and enrichment temperature, which may include a first temperature and a second temperature. The first temperature can be in the range of 140℃-200℃ (inclusive), and the second temperature can be in the range of 195℃-250℃ (inclusive), corresponding to the boiling points of different impurities.

[0045] Preferably, in this embodiment, the purification method for zirconium tetrachloride further includes: step four, adjusting the preset temperature in step three from the first temperature to the second temperature, and then executing step three again. Specifically, this can be achieved by further heating the purification furnace 1 to 250°C, and then initiating a second round of impurity removal. The control system manipulates the exhaust valve 60 and the first pneumatic valve 61 to repeatedly open and close in the manner described in step three. During this process, the opening time, opening interval, and values ​​of the first preset pressure and the second preset pressure of the exhaust valve 60 and the first pneumatic valve 61 can be adjusted.

[0046] In a further preferred embodiment, the zirconium tetrachloride purification method further includes: step five, opening the outlet 20 of the vacuum collection tank 2 to collect the zirconium-rich solid material. Specifically, after purification, the zirconium-rich solid material formed by the sublimation of the mixed gas is collected in the vacuum collection tank 2, and the operator can collect it by opening the outlet 20. The collected zirconium-rich solid material accounts for approximately 2%-5% of the total feed amount, and the operator can then return the collected zirconium-rich solid material to the previous process for further processing.

[0047] During use, the zirconium tetrachloride purification method combines temperature triggering, short-time pulsed exhaust, rapid negative pressure suction, and low-temperature condensation, significantly improving the direct recovery rate of zirconium tetrachloride. The extremely short exhaust window and the directional push of rapid negative pressure suction selectively remove impurity gases accumulated on the surface, minimizing the carryover of the main product, zirconium tetrachloride. This purification method reduces the loss rate of zirconium tetrachloride during impurity removal from over 15% in traditional methods to less than 5%, while simultaneously ensuring stable product quality and fundamentally improving the operating environment.

[0048] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The scope of protection of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A purification system for zirconium tetrachloride, characterized by, The zirconium tetrachloride purification system includes: Purification furnace; A vacuum collection tank is connected to the purification furnace through a first pipeline, the first pipeline is equipped with an exhaust valve, and the bottom of the vacuum collection tank is equipped with a discharge port. A circulating cooling water system is connected to the vacuum collection tank; The filter is connected to the vacuum collection tank via a second pipeline, and a first pneumatic valve is installed on the second pipeline. The exhaust gas scrubbing tower is connected to the filter via a third pipeline; and The control system is electrically connected to the exhaust valve and the first pneumatic valve.

2. The purification system of zirconium tetrachloride according to claim 1, characterized by, The zirconium tetrachloride purification system also includes a vacuum pump, which is connected to the vacuum collection tank via a fourth pipeline. A second pneumatic valve is installed on the fourth pipeline, and the second pneumatic valve is electrically connected to the control system.

3. The purification system of zirconium tetrachloride according to claim 2, characterized by, There are multiple first pipelines, which are arranged circumferentially at intervals on the top of the vacuum collection tank, and multiple exhaust valves are correspondingly installed on the multiple first pipelines.

4. The zirconium tetrachloride purification system according to claim 3, characterized in that, The exhaust valve is a pneumatic ball valve, and the spacing between adjacent exhaust valves is equal.

5. The zirconium tetrachloride purification system according to claim 3, characterized in that, The vacuum collection container includes: A sealed tank, connected to the first pipeline; and A circulating water jacket is fitted onto the sealed tank. The circulating water jacket has an inlet and an outlet. The inlet is located at the lower part of the circulating water jacket, and the outlet is located at the upper part of the circulating water jacket. The inlet and the outlet are located on opposite sides of the circulating water jacket. The circulating cooling water system is connected to the inlet and the outlet.

6. A method for purifying zirconium tetrachloride, characterized in that, The method for purifying zirconium tetrachloride uses the zirconium tetrachloride purification system according to any one of claims 3 to 5, and the method for purifying zirconium tetrachloride includes the following steps: Step 1: Turn on the circulating cooling water system to adjust the temperature of the vacuum collection tank, and turn on the vacuum pump and the second pneumatic valve to adjust the pressure of the vacuum collection tank; Step 2: Start the purification furnace and monitor the temperature and pressure of the purification furnace in real time through the control system; Step 3: Collect the zirconium-rich solid material generated by gas sublimation in the vacuum collection tank, and treat the tail gas at the same time.

7. The method for purifying zirconium tetrachloride according to claim 6, characterized in that, Step three includes: when the temperature of the purification furnace reaches a preset temperature and the pressure of the purification furnace reaches a first preset pressure, controlling the exhaust valve and the first pneumatic valve to open and close simultaneously, repeating several times, each time opening for 0.1 to 2 seconds, continuing to repeat until the pressure of the purification furnace is lower than the second preset pressure, then stopping the repetition, and repeating the cycle until the temperature of the purification furnace reaches the preset temperature again and the pressure of the purification furnace reaches the first preset pressure again, until a single round of impurity removal is completed.

8. The method for purifying zirconium tetrachloride according to claim 7, characterized in that, The preset temperature includes a first temperature and a second temperature. The first temperature ranges from 140℃ to 200℃, and the second temperature ranges from 195℃ to 250℃. The purification method for zirconium tetrachloride further includes: Step four: After adjusting the preset temperature in step three from the first temperature to the second temperature, execute step three again.

9. The method for purifying zirconium tetrachloride according to claim 7, characterized in that, When the first pneumatic valve is repeatedly opened and closed, multiple first pneumatic valves perform operations in a preset order.

10. The method for purifying zirconium tetrachloride according to claim 8, characterized in that, The purification method for zirconium tetrachloride further includes: Step 5: Open the outlet of the vacuum collection tank to collect the zirconium-rich solid material.

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