Apparatus and method for precise assembly of an ecr ion source

Abstract

The application relates to a device and a method for precise assembly of an ECR ion source, which comprises a support, a sliding rail device, a measuring head, a motor device and a control system; the top of the support is provided with the sliding rail device, the sliding rail device is provided with the measuring head, the measuring head is provided with two Hall piece grooves for mounting Hall pieces, the Hall pieces are used for measuring the magnetic field intensity at the corresponding positions of a plasma arc cavity of the ECR ion source; the sliding rail device is further provided with a grating ruler, a reference origin switch, a positive limit switch and a negative limit switch; the control system is electrically connected with the motor device, the grating ruler, the reference origin switch, the positive limit switch and the negative limit switch, the motor device is electrically connected with the sliding rail device, the control system is used for controlling the motor device to work, thereby controlling the movement and rotation of the measuring head in a three-dimensional space through the sliding rail device, determining the magnetic field intensity in any direction, and determining the assembly of related components of the ECR ion source based on the magnetic field intensity, and the application can be widely used in the field of precise assembly.

Description

Technical Field

[0001] This invention relates to the field of precision assembly, and in particular to an apparatus and method for precision assembly of ECR ​​ion sources. Background Technology

[0002] An ECR (electron cyclotron resonance) ion source is a magnetically confined plasma device. Feeding microwaves resonate with electrons in the input gas within a suitable magnetic field within the plasma arc cavity, generating plasma. Simultaneously, the magnetic field confines the plasma, ionizing the ions to higher charge states. Finally, a high voltage is applied to the plasma arc cavity, allowing the ion beam to be extracted from the ion source through electrodes.

[0003] The performance of an ECR ion source is closely related to its magnetic field structure, and the physical processes within it are significantly affected by the magnetic field. Therefore, the influence of the magnetic field must be fully considered during the assembly process of the ECR ion source to ensure the stable performance of the integrated ECR ion source. Specifically, the magnetic field of an ECR ion source is a composite magnetic field formed by the superposition of an axial magnetic mirror field and a radial hexapole magnetic field, exhibiting a complex distribution in three-dimensional space. Due to errors in manufacturing and simulation calculations, the relevant components of the ECR ion source must rely on the accurate magnetic field distribution obtained from measurements to assemble correctly and efficiently. Furthermore, due to the unique nature of the ECR ion source's magnetic field, the installation of its components requires not only the magnetic field strength at a single point, but also the magnetic field strength and direction variations along a complex curve. Therefore, a precise magnetic field measurement and positioning system must be established to guide the assembly of the ECR ion source. Summary of the Invention

[0004] To address the aforementioned problems, the present invention aims to provide an apparatus and method for the precise assembly of an ECR ion source, which can accurately measure the magnetic field strength on any curve in three-dimensional space, and accurately measure the three-dimensional magnetic field configuration of the ECR ion source.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: On the one hand, it provides a device for precise assembly of an ECR ion source, including a support, a slide rail device, a measuring head, a motor device, and a control system;

[0006] The top of the support is equipped with the slide rail device, and the slide rail device is equipped with the measuring head. The measuring head is equipped with two Hall plate slots for mounting Hall plates. The Hall plates are used to measure the magnetic field strength at the corresponding position of the plasma arc cavity of the ECR ion source. The slide rail device is also equipped with a grating ruler, a reference origin switch, a positive limit switch, and a negative limit switch. The grating ruler is used to measure the actual linear displacement of the support, the reference origin switch is used to determine the zero point position of the mechanical coordinate system, and the positive and negative limit switches are used to prevent the device from overtravel. The control system is electrically connected to the motor device, the grating ruler, the reference origin switch, the positive limit switch, and the negative limit switch. The motor device is electrically connected to the slide rail device. The control system is used to initialize and return to zero based on the signals sent by the reference origin switch, the positive limit switch, and the negative limit switch; and to control the operation of the motor device based on the preset target position and the data measured by the grating ruler, thereby controlling the movement and rotation of the measuring head in three-dimensional space through the slide rail device, determining the magnetic field strength in any direction, and determining the assembly of ECR ​​ion source related components based on the magnetic field strength.

[0007] Furthermore, the slide rail device includes an X-direction slide rail, a Y-direction slide rail, and a Z-direction slide rail; The X-direction slide rail is fixedly mounted on the top of the bracket. The Y-direction slide rail is slidably mounted on the X-direction slide rail. The X-direction slide rail is also equipped with the grating ruler, the reference origin switch, the positive limit switch, and the negative limit switch. The Z-direction slide rail is slidably mounted on the Y-direction slide rail. A guide rod is slidably mounted on the Z-direction slide rail. The guide rod is parallel to the X-direction slide rail, and the measuring head is mounted on the guide rod.

[0008] Furthermore, the two Hall plate slots are arranged in any direction on the measuring head.

[0009] Furthermore, one of the Hall plate slots is arranged parallel to the Z direction, and the other Hall plate slot is arranged perpendicular to the Z direction.

[0010] Furthermore, the measuring head is also equipped with several pressure sensors or position sensors.

[0011] Furthermore, the motor device includes a first motor, a second motor, a third motor, a fourth motor, an incremental encoder, and a servo driver; The first motor is electrically connected to the X-direction slide rail and is used to control the sliding of the Y-direction slide rail on the X-direction slide rail; the second motor is electrically connected to the Y-direction slide rail and is used to control the sliding of the Z-direction slide rail on the Y-direction slide rail; the third motor is electrically connected to the Z-direction slide rail and is used to control the sliding of the guide rod on the Z-direction slide rail; the fourth motor is electrically connected to the guide rod and is used to control the rotation of the measuring head. The shaft ends of the first motor, the second motor, the third motor, and the fourth motor are all equipped with incremental encoders, which are used to feed back the actual rotation angle and speed of the motor rotor. The servo driver is electrically connected to the first motor, the second motor, the third motor, the fourth motor, and the incremental encoder respectively, and is used to drive the movement of the first motor, the second motor, the third motor, and the fourth motor based on the instructions of the control system and the signals fed back by the incremental encoder.

[0012] Furthermore, the control system includes: The controller is used to generate the target trajectory based on the processing path planning, including the target position sequence, velocity, and acceleration; The human-machine interface is used to input and preset the measurement start position, measurement end position and measurement step size of the measuring head, select the measurement mode of the measuring head, and display the measured magnetic field data and curves and the equipment operation alarm status in real time. The motion controller is used to initialize and return to zero based on the signals sent by the reference origin switch, positive limit switch and negative limit switch; send the generated target trajectory to the servo driver; generate speed commands based on the target position and the position measured by the grating ruler and send them to the servo driver; and compensate when the deviation between the target position and the position measured by the grating ruler exceeds a preset threshold. The assembly determination module is used to determine the assembly of relevant components of the ECR ion source based on the magnetic field strength.

[0013] On the other hand, a method for precise assembly of an ECR ion source is provided, comprising: The device is powered on, and the support is placed on one side of the ECR ion source body for initialization and zeroing. The control system controls the measuring head to move into the ECR ion source through the motor and slide rail devices. The "tool setting" function is achieved through multiple contact approaches, so that the coordinates of the measuring head and the mechanical coordinates of the entire device used for the precise assembly of the ECR ion source are spatially related. Select the measurement mode of the measuring head in the human-computer interaction interface, and freely set the measurement start position, measurement end position and measurement step size of the measuring head; Based on the selected measurement mode, the control system controls the operation of the measuring head through the motor and slide rail devices to determine the magnetic field strength. After the measurement is completed, magnetic field data and curves are automatically generated. Based on the generated magnetic field data and curves, the control system determines the assembly of relevant components of the ECR ion source.

[0014] Furthermore, the device is powered on, and the support is placed on one side of the ECR ion source body for initialization and zeroing, including: The control system drives a slide rail or guide rod in a certain direction to move in a preset direction via a motor device until the negative limit switch or the reference origin switch is triggered. When the control system detects that the reference origin switch has been triggered, it continues to drive a slide rail or guide rod in a certain direction to move a certain distance in the preset direction to get away from the reference origin switch, and then reverses to approach the reference origin switch again. During the process of approaching the reference origin switch, wait for the grating ruler to output the first pulse signal as the zero point; When the control system detects a pulse signal, it stops immediately and defines the current position as the mechanical origin of the corresponding axis, thus completing the establishment of the coordinate system.

[0015] Furthermore, based on the selected measurement mode, the control system controls the operation of the measuring head through a motor and a slide rail device to determine the magnetic field strength, including: The controller generates the target trajectory based on the processing path planning; The motion controller sends the target position sequence in the target trajectory to the servo driver at interpolation cycles; The servo driver estimates the speed based on the signal fed back from the incremental encoder and adjusts the output current to control the speed of the first motor, the second motor, the third motor and the fourth motor based on the speed command sent by the motion controller. The first, second, third, and fourth motors move based on the servo driver, enabling the Hall plate on the measuring head to measure the magnetic field strength at the corresponding position of the plasma arc cavity of the ECR ion source. The motion controller calculates the deviation between the target position and the position measured by the grating ruler, and generates a speed command, which is then sent to the servo driver. The motion controller continuously monitors the deviation between the target position and the position measured by the grating ruler. If the deviation exceeds a preset threshold, an alarm will be triggered or the machine will be stopped.

[0016] The present invention has the following advantages due to the adoption of the above technical solutions: 1. This invention enables the measurement of the magnetic field of an ECR ion source on any curve.

[0017] 2. This invention can simultaneously measure magnetic field changes in two directions in a single measurement.

[0018] 3. This invention can guide the accurate assembly of ECR ​​ion sources, thereby ensuring the performance of ECR ​​ion sources.

[0019] 4. Since electrons move around magnetic field lines in a magnetic field, non-closed magnetic field lines will cause electron loss. Through the measurements of this invention, it is possible to determine which regions of the plasma arc cavity have a magnetic field perpendicular to the cavity surface, where a large number of electrons will be lost. Therefore, the plasma arc cavity must be cooled more intensely in these areas. This invention can provide the magnetic field configuration of the ECR ion source, thereby guiding the design of the plasma arc cavity.

[0020] In summary, this invention can be widely applied in the field of precision assembly. Attached Figure Description

[0021] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Throughout the drawings, the same reference numerals denote the same parts. In the drawings: Figure 1 This is a schematic diagram of the device structure provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of a measuring head structure provided in an embodiment of the present invention; Figure 3 This is a side cross-sectional view of an ECR ion source provided in an embodiment of the present invention; Figure 4 This is provided by an embodiment of the present invention. Figure 3 A schematic diagram showing the actual measurement results of the central axial magnetic field; Figure 5 This is the distance provided by an embodiment of the present invention. Figure 3 A schematic diagram of the actual measurement results of the radial magnetic field on a circle at a certain distance from the central axis. Detailed Implementation

[0022] Exemplary embodiments of the invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the invention and to fully convey the scope of the invention to those skilled in the art.

[0023] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0024] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0025] For ease of description, spatial relative terms may be used in the text to describe the relationship of one element or feature relative to another element or feature as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "above," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure.

[0026] Currently, due to errors in processing and simulation calculations, the components of an ECR ion source must rely on accurately measured magnetic field distributions for correct and efficient assembly. Furthermore, due to the unique nature of the ECR ion source's magnetic field, the installation of its components requires not just the magnetic field strength at a single point, but rather the magnetic field strength and direction variations along a complex curve. Therefore, a precise magnetic field measurement and positioning system is necessary to guide the assembly of the ECR ion source. This invention provides a device for the precise assembly of an ECR ion source, including a support, a slide rail device, a measuring head, a motor device, and a control system. The top of the support is equipped with a slide rail device, on which a measuring head is mounted. The measuring head has two Hall plate slots for mounting Hall plates, which measure the magnetic field strength at the corresponding position of the plasma arc cavity of the ECR ion source. The slide rail device also includes a grating ruler, a reference origin switch, a positive limit switch, and a negative limit switch. The grating ruler measures the actual linear displacement of the support, the reference origin switch determines the zero point position of the mechanical coordinate system, and the positive limit switch... Switches and negative limit switches are used to prevent the device from operating beyond its travel range. The control system is electrically connected to the motor assembly, grating ruler, reference origin switch, positive limit switch, and negative limit switch. The motor assembly is electrically connected to the slide rail assembly. The control system is used for initialization and zeroing based on signals sent by the reference origin switch, positive limit switch, and negative limit switch. It also controls the operation of the motor assembly based on a pre-set target position and data measured by the grating ruler, thereby controlling the movement and rotation of the measuring head in three-dimensional space via the slide rail assembly. This determines the magnetic field strength in any direction and, based on the magnetic field strength, determines the assembly of related components of the ECR ion source. This invention can determine which regions of the plasma arc cavity have a magnetic field perpendicular to the cavity surface, where a large amount of electrons are lost. Therefore, the plasma arc cavity must be cooled more intensely in these areas. This invention can provide the magnetic field configuration of the ECR ion source, thereby guiding the design of the plasma arc cavity.

[0027] Example 1 like Figure 1 , Figure 2 As shown, this embodiment provides a device for precise assembly of an ECR ion source, including a support 1, a slide rail device 2, a measuring head 3, a motor device 4, and a control system.

[0028] A slide rail device 2 is mounted on the top of the support 1. A measuring head 3 is connected to the slide rail device 2 via a guide rod. The measuring head 3 has two Hall plate slots 5 for mounting Hall plates. The Hall plates are used to measure the magnetic field strength at the corresponding position of the plasma arc cavity of the ECR ion source. The measuring head 3 is also equipped with several pressure sensors or position sensors 6. The pressure sensors are used to collect the pressure at the corresponding position of the plasma arc cavity of the ECR ion source, and the position sensors are used to collect the coordinates at the corresponding position of the plasma arc cavity of the ECR ion source. The slide rail device 2 is also equipped with a grating ruler, a reference origin switch, a positive limit switch, and a negative limit switch. The grating ruler is used to measure the actual linear displacement of the support 1, providing higher precision position feedback; the reference origin switch is used to determine the zero point position of the mechanical coordinate system; the positive and negative limit switches are used to prevent the device from overtravel and ensure safety.

[0029] The control system is electrically connected to the motor device 4, the grating ruler, the reference origin switch, the positive limit switch, and the negative limit switch. The motor device 4 is electrically connected to the slide rail device 2. The control system is used to initialize and return to zero based on the signals sent by the reference origin switch, the positive limit switch, and the negative limit switch; and to control the operation of the motor device 4 based on the preset target position and the data measured by the grating ruler. Then, through the slide rail device 2, the control system controls the movement and rotation of the measuring head 3 in three-dimensional space via the guide rod to determine the magnetic field strength in any direction, and determines the assembly of the ECR ion source related components based on the magnetic field strength.

[0030] In a preferred embodiment, the slide rail device 2 includes an X-direction slide rail, a Y-direction slide rail, and a Z-direction slide rail. The X-direction slide rail is fixedly mounted on the top of the bracket 1. The Y-direction slide rail is slidably mounted on the X-direction slide rail. The X-direction slide rail is also provided with a grating ruler, a reference origin switch, a positive limit switch, and a negative limit switch. The Z-direction slide rail is slidably mounted on the Y-direction slide rail. A guide rod is slidably mounted on the Z-direction slide rail, and the guide rod is parallel to the X-direction slide rail.

[0031] In a preferred embodiment, the two Hall plate slots 5 are arranged on the measuring head 3 in any direction, for example, one Hall plate slot 5 is arranged parallel to the Z direction and the other Hall plate slot 5 is arranged perpendicular to the Z direction.

[0032] In a preferred embodiment, there are 12 pressure sensors or position sensors 6, one of which is set every 30° along the circumference to increase the accuracy of data acquisition.

[0033] In a preferred embodiment, the reference origin switch may be a proximity switch or a photoelectric switch.

[0034] In a preferred embodiment, the motor device 4 includes a first motor, a second motor, a third motor, a fourth motor, an incremental encoder, and a servo driver. The first motor is electrically connected to the X-direction slide rail and is used to control the sliding of the Y-direction slide rail on the X-direction slide rail. The second motor is electrically connected to the Y-direction slide rail and is used to control the sliding of the Z-direction slide rail on the Y-direction slide rail. The third motor is electrically connected to the Z-direction slide rail and is used to control the sliding of the guide rod on the Z-direction slide rail. The fourth motor is electrically connected to the guide rod and is used to control the rotation of the measuring head 3. Incremental encoders are provided at the shaft ends of the first, second, third, and fourth motors. The incremental encoders are used to feedback the actual rotation angle and speed of the motor rotor and output A / B / Z phase pulse signals. The servo driver is electrically connected to the first, second, third, and fourth motors and the incremental encoder, respectively, and is used to drive the movement of the first, second, third, and fourth motors based on the commands of the control system and the signals fed back by the incremental encoders.

[0035] Specifically, the first motor, the second motor, the third motor, and the fourth motor are high-precision servo motors.

[0036] In a preferred embodiment, such as Figure 3 The diagram shows the structure of the ECR ion source into which the measuring head 3 is inserted. The magnetic field of the ECR ion source is a ring structure, with a through hole in the middle for inserting an insulator. A plasma arc cavity is located inside the insulating cylinder. The injection end (left side) of the plasma arc cavity has a gas inlet and a microwave waveguide port, while the lead-out end (right side) has a lead-out electrode. During measurement, the plasma arc cavity is first removed, and the measuring head 3 is inserted into the ECR ion source from the injection end (left side) of the plasma arc cavity.

[0037] In a preferred embodiment, the control system includes a controller, a human-machine interface, a motion controller, and an assembly determination module.

[0038] The controller is used to generate the target trajectory based on the processing path planning, including parameters such as the target position sequence, velocity, and acceleration.

[0039] The human-machine interface is used to input and preset the measurement start position, measurement end position and measurement step size of the measuring head 3, select the measurement mode of the measuring head 3, and display the measured magnetic field data and curves and the equipment operation alarm status in real time. The measurement modes include single-direction step measurement mode, preset measurement trajectory mode and linear measurement or circular interpolation measurement mode.

[0040] The motion controller is used to initialize and return to zero based on signals sent by the reference origin switch, positive limit switch, and negative limit switch; send the generated target trajectory to the servo driver; generate speed commands based on the target position and the position measured by the grating ruler and send them to the servo driver; and compensate when the deviation between the target position and the position measured by the grating ruler exceeds a preset threshold.

[0041] The assembly determination module is used to determine the assembly of ECR ​​ion source components based on magnetic field strength.

[0042] In a preferred embodiment, such as Figure 4 As shown Figure 3 A schematic diagram of the actual measurement results of the central axial magnetic field, as shown below. Figure 5 The distance shown is Figure 3 A schematic diagram showing the actual measurement results of the radial magnetic field on a circle at a certain distance from the central axis, based on... Figure 4 and Figure 5 The measurement results confirm that, in order to achieve efficient coupling between the microwave and the plasma of the ECR ion source, the microwave waveguide port of the ECR ion source is located at... Figure 4 The extraction electrode of the ECR ion source is located inside the axial position corresponding to the injection magnetic field peak; to efficiently extract the ion beam and reduce electron bombardment of the plasma electrode, the extraction electrode is positioned inside the axial position corresponding to the injection magnetic field peak. Figure 4 The centerline of the plasma arc cavity of the ECR ion source is located inside the axial position corresponding to the peak of the extracted magnetic field. To ensure that the extracted ion beam is located on the centerline of the magnetic field, the centerline of the plasma arc cavity extraction end is located on the line where the radial magnetic field strength is 0, while ensuring that the hexapole magnetic field within the plasma arc cavity is uniformly distributed as much as possible. Therefore, if the N-pole or S-pole magnetic field is too strong, the insulating cylinder on this side needs to be slightly thickened, and vice versa.

[0043] Example 2 This embodiment provides a method for precise assembly of an ECR ion source, including the following steps: 1) Power on the device and place the support 1 on one side of the ECR ion source body. Perform initialization and homing. Taking the X-axis as an example, the Y, Z, and R axes (i.e., the rotation direction of the measuring head 3) are described similarly. 1.1) The control system drives the Y-direction slide rail to move slowly in the X-direction slide rail in a preset direction (such as the negative direction) through the motor device 4 until the negative limit switch or the reference origin switch is triggered.

[0044] 1.2) When the control system detects that the reference origin switch has been triggered, it continues to drive the Y-direction slide rail to move a certain distance on the X-direction slide rail in the preset direction to get away from the reference origin switch, and then reverses to approach the reference origin switch again at a lower speed.

[0045] 1.3) During the process of approaching the reference origin switch, wait for the grating ruler to output the first Z-phase pulse signal (one pulse per millimeter or per revolution) as the precisely defined "zero point".

[0046] 1.4) When the control system captures the Z-phase pulse signal, it stops immediately and defines the position at this time as the machine origin (Machine Zero) of the X-axis, thus completing the establishment of the coordinate system.

[0047] 2) The automatic "tool setting" program of the measuring head 3 is started. The control system controls the measuring head 3 to run into the ECR ion source through the motor device 4 and the slide rail device 2. The "tool setting" function is achieved through multiple contact approaches, so that the coordinates of the measuring head 3 and the mechanical coordinates of the entire device used for the precise assembly of the ECR ion source are established in space. Among them, the grating ruler is a guarantee device for position closed-loop feedback. The pressure sensor and position sensor built into the measuring head 3 detect pressure signals and position signals during multiple contacts with the ECR ion source, thereby establishing the positional relationship between the measuring head 3 and the ECR ion source.

[0048] 3) Select the measurement mode of the measuring head 3 in the human-computer interaction interface (single-direction step measurement mode, preset measurement trajectory mode, and linear measurement or circular interpolation measurement mode), and freely set the measurement start position, measurement end position and measurement step size of the measuring head 3, where the step size is millimeters.

[0049] Specifically, the unidirectional step measurement mode is as follows: The experimenter can select to measure only one direction, X, Y, Z or R, through the operation interface. For the straight line direction, the measurement start position, measurement end position and measurement step size are set.

[0050] The preset measurement trajectory mode is: The researchers provided the spatial coordinates of the magnetic field of the ECR ion source based on the designed magnetic field distribution curve. This magnetic field distribution curve consists of one or more three-dimensional array tables. The program sends position commands to the motor in sequence according to the tables, thereby realizing trajectory measurement.

[0051] The linear measurement or circular interpolation measurement modes are as follows: In linear measurement mode, the X, Y, Z, and R axes move sequentially to the target point, while in circular interpolation measurement mode, the X, Y, Z, and R axes move simultaneously to the target point.

[0052] 4) Based on the selected measurement mode, the control system controls the operation of the measuring head 3 through the motor device 4 and the slide rail device 2 to determine the magnetic field strength, specifically: 4.1) The controller generates the target trajectory (including target position sequence, velocity, acceleration and other parameters) according to the processing path planning.

[0053] 4.2) The motion controller sends the target position sequence to the servo driver at an interpolation period (e.g., 1ms to 10ms).

[0054] 4.3) The servo driver estimates the speed based on the signal fed back from the incremental encoder, and adjusts the output current to control the speed of the first motor, the second motor, the third motor and the fourth motor based on the speed command sent by the motion controller.

[0055] 4.4) The first motor, the second motor, the third motor and the fourth motor move based on the servo driver, so that the Hall plate on the measuring head 3 measures the magnetic field strength at the corresponding position of the plasma arc cavity of the ECR ion source.

[0056] 4.5) The motion controller calculates the deviation between the target position and the position measured by the grating ruler, and uses PID or more advanced algorithms (such as feedforward + PID, adaptive control) to generate speed commands and send them to the servo driver.

[0057] 4.6) The motion controller continuously monitors the deviation between the target position and the position measured by the grating ruler. If the deviation exceeds the preset threshold, an alarm will be triggered or the machine will be stopped.

[0058] 4.7) When the deviation value exceeds the preset threshold, the motion controller performs compensation.

[0059] Specifically, the compensation strategies include pitch error compensation, thermal expansion compensation, and backlash compensation. Pitch error compensation corrects guide rail manufacturing errors by applying offsets at different positions based on pre-calibrated grating ruler data; thermal expansion compensation dynamically adjusts position commands based on temperature sensor data; and backlash compensation automatically increases a small amount of stroke during reversal to offset mechanical backlash.

[0060] 4.8) During the measurement process, activate the safety protection mechanism, including limit switch hardware protection, software limit (SoftLimit) and origin loss detection.

[0061] Specifically, the limit switch hardware protection means that when the grating ruler or motion controller fails, the positive and negative limit switches physically cut off the drive enable to prevent collisions; the software limit is set in the motion controller by virtual travel boundaries, which trigger deceleration or stopping in advance of the hardware limit; the origin loss detection means that if the system is unexpectedly powered off or illegally moved, causing the origin to shift, it will be forced to return to zero after restarting.

[0062] 5) After the measurement is completed, magnetic field data and curves are automatically generated. Based on the generated magnetic field data and curves, the control system determines the assembly of relevant components of the ECR ion source.

[0063] The above embodiments are only used to illustrate the present invention. The structure, connection method and manufacturing process of each component can be varied. All equivalent transformations and improvements made on the basis of the technical solution of the present invention should not be excluded from the protection scope of the present invention.

Claims

1. A device for precise assembly of an ECR ion source, characterized in that, Includes a support frame, slide rail assembly, measuring head, motor assembly, and control system; The top of the support is equipped with the slide rail device, and the slide rail device is equipped with the measuring head. The measuring head is equipped with two Hall plate slots for mounting Hall plates. The Hall plates are used to measure the magnetic field strength at the corresponding position of the plasma arc cavity of the ECR ion source. The slide rail device is also equipped with a grating ruler, a reference origin switch, a positive limit switch, and a negative limit switch. The grating ruler is used to measure the actual linear displacement of the support, the reference origin switch is used to determine the zero point position of the mechanical coordinate system, and the positive and negative limit switches are used to prevent the device from overtravel. The control system is electrically connected to the motor device, the grating ruler, the reference origin switch, the positive limit switch, and the negative limit switch. The motor device is electrically connected to the slide rail device. The control system is used to initialize and return to zero based on the signals sent by the reference origin switch, the positive limit switch, and the negative limit switch; and to control the operation of the motor device based on the preset target position and the data measured by the grating ruler, thereby controlling the movement and rotation of the measuring head in three-dimensional space through the slide rail device, determining the magnetic field strength in any direction, and determining the assembly of ECR ​​ion source related components based on the magnetic field strength.

2. The apparatus for precise assembly of an ECR ion source as described in claim 1, characterized in that, The slide rail device includes an X-direction slide rail, a Y-direction slide rail, and a Z-direction slide rail; The X-direction slide rail is fixedly mounted on the top of the bracket. The Y-direction slide rail is slidably mounted on the X-direction slide rail. The X-direction slide rail is also equipped with the grating ruler, the reference origin switch, the positive limit switch, and the negative limit switch. The Z-direction slide rail is slidably mounted on the Y-direction slide rail. A guide rod is slidably mounted on the Z-direction slide rail. The guide rod is parallel to the X-direction slide rail, and the measuring head is mounted on the guide rod.

3. The apparatus for precise assembly of an ECR ion source as described in claim 1, characterized in that, The two Hall plate slots are arranged in any direction on the measuring head.

4. The apparatus for precise assembly of an ECR ion source as described in claim 3, characterized in that, One of the Hall plate slots is arranged parallel to the Z-direction, and the other Hall plate slot is arranged perpendicular to the Z-direction.

5. The apparatus for precise assembly of an ECR ion source as described in claim 1, characterized in that, The measuring head is also equipped with several pressure sensors or position sensors.

6. The apparatus for precise assembly of an ECR ion source as described in claim 2, characterized in that, The motor assembly includes a first motor, a second motor, a third motor, a fourth motor, an incremental encoder, and a servo driver; The first motor is electrically connected to the X-direction slide rail and is used to control the sliding of the Y-direction slide rail on the X-direction slide rail; the second motor is electrically connected to the Y-direction slide rail and is used to control the sliding of the Z-direction slide rail on the Y-direction slide rail; the third motor is electrically connected to the Z-direction slide rail and is used to control the sliding of the guide rod on the Z-direction slide rail. The fourth motor is electrically connected to the guide rod and is used to control the rotation of the measuring head; The shaft ends of the first motor, the second motor, the third motor, and the fourth motor are all equipped with incremental encoders, which are used to feed back the actual rotation angle and speed of the motor rotor. The servo driver is electrically connected to the first motor, the second motor, the third motor, the fourth motor, and the incremental encoder respectively, and is used to drive the movement of the first motor, the second motor, the third motor, and the fourth motor based on the instructions of the control system and the signals fed back by the incremental encoder.

7. The apparatus for precise assembly of an ECR ion source as described in claim 6, characterized in that, The control system includes: The controller is used to generate the target trajectory based on the processing path planning, including the target position sequence, velocity, and acceleration; The human-machine interface is used to input and preset the measurement start position, measurement end position and measurement step size of the measuring head, select the measurement mode of the measuring head, and display the measured magnetic field data and curves and the equipment operation alarm status in real time. The motion controller is used to initialize and return to zero based on the signals sent by the reference origin switch, positive limit switch and negative limit switch; send the generated target trajectory to the servo driver; generate speed commands based on the target position and the position measured by the grating ruler and send them to the servo driver; and compensate when the deviation between the target position and the position measured by the grating ruler exceeds a preset threshold. The assembly determination module is used to determine the assembly of relevant components of the ECR ion source based on the magnetic field strength.

8. A method for precise assembly of an ECR ion source, characterized in that, include: The device is powered on, and the support is placed on one side of the ECR ion source body for initialization and zeroing. The control system controls the measuring head to move into the ECR ion source through the motor and slide rail devices. The "tool setting" function is achieved through multiple contact approaches, so that the coordinates of the measuring head and the mechanical coordinates of the entire device used for the precise assembly of the ECR ion source are established in space. Select the measurement mode of the measuring head in the human-computer interaction interface, and freely set the measurement start position, measurement end position and measurement step size of the measuring head; Based on the selected measurement mode, the control system controls the operation of the measuring head through the motor and slide rail devices to determine the magnetic field strength. After the measurement is completed, magnetic field data and curves are automatically generated. Based on the generated magnetic field data and curves, the control system determines the assembly of relevant components of the ECR ion source.

9. A method for precise assembly of an ECR ion source as described in claim 8, characterized in that, The device is powered on, and the support is placed on one side of the ECR ion source body for initialization and zeroing, including: The control system drives a slide rail or guide rod in a certain direction to move in a preset direction via a motor device until the negative limit switch or the reference origin switch is triggered. When the control system detects that the reference origin switch has been triggered, it continues to drive a slide rail or guide rod in a certain direction to move a certain distance in the preset direction to get away from the reference origin switch, and then reverses to approach the reference origin switch again. During the process of approaching the reference origin switch, wait for the grating ruler to output the first pulse signal as the zero point; When the control system detects a pulse signal, it stops immediately and defines the current position as the mechanical origin of the corresponding axis, thus completing the establishment of the coordinate system.

10. A method for precise assembly of an ECR ion source as described in claim 8, characterized in that, Based on the selected measurement mode, the control system controls the operation of the measuring head through a motor and a slide rail device to determine the magnetic field strength, including: The controller generates the target trajectory based on the processing path planning; The motion controller sends the target position sequence in the target trajectory to the servo driver at interpolation cycles; The servo driver estimates the speed based on the signal fed back from the incremental encoder and adjusts the output current to control the speed of the first motor, the second motor, the third motor and the fourth motor based on the speed command sent by the motion controller. The first, second, third, and fourth motors move based on the servo driver, enabling the Hall plate on the measuring head to measure the magnetic field strength at the corresponding position of the plasma arc cavity of the ECR ion source. The motion controller calculates the deviation between the target position and the position measured by the grating ruler, and generates a speed command, which is then sent to the servo driver. The motion controller continuously monitors the deviation between the target position and the position measured by the grating ruler. If the deviation exceeds a preset threshold, an alarm will be triggered or the machine will be stopped.

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