Connection structure for connecting the coating substrate rotary device to the vacuum processing chamber and coating device

Abstract

This divisional application provides a connection structure and a coating apparatus for connecting a coating substrate rotation device and a vacuum processing chamber. The coating substrate rotation device includes a substrate frame for loading substrates. The substrate frame includes a first substrate loading portion and a second substrate loading portion connected vertically at a distance via a first connecting portion. The space formed between the first connecting portion, the first substrate loading portion, and the second substrate loading portion is used to accommodate the substrate. The connection structure is disposed on the side of the second substrate loading portion away from the first substrate loading portion, and is used to connect the second substrate loading portion and the vacuum processing chamber. The connection structure of this invention makes the connection between the coating substrate rotation device and the vacuum processing chamber more convenient, faster, and more stable.

Description

[0001] This application is a divisional application of the invention patent application filed on December 19, 2023, with application number 202311762518.4 and title "Substrate Frame and Coating Apparatus". Technical Field

[0002] This invention belongs to the technical field of vacuum coating equipment, and in particular relates to a connection structure for connecting a coating substrate rotation device and a vacuum processing chamber, as well as a coating device. Background Technology

[0003] In the evaporation coating process, the substrate is typically first loaded onto a rotatable substrate holder with the substrate's surface to be coated facing the coating source, followed by vacuum coating. In existing technologies, the substrate holder is often designed as a coating umbrella structure with multiple substrate loading positions; each loading position has a cutout area to ensure that the substrate's surface to be coated can receive the coating material emitted from the coating source. However, conventional substrate holders are generally only suitable for loading substrates with a diameter of 0.5 meters or less and a weight not exceeding 100 kg. Using conventional substrate holders to load ultra-large and ultra-heavy substrates often presents technical problems such as difficult substrate installation and low equipment operational stability. Summary of the Invention

[0004] In view of the shortcomings of the prior art described above, the purpose of this invention is to provide a connection structure and a coating device for connecting a coating substrate rotary device and a vacuum processing chamber that are easy to install and have a more stable connection.

[0005] To achieve the above and other related objectives, the present invention provides a connection structure for connecting a coating substrate rotation device and a vacuum processing chamber, comprising a substrate frame for loading a substrate, the substrate frame including a first substrate loading part and a second substrate loading part connected vertically at a distance by a first connecting part, the space formed between the first connecting part, the first substrate loading part and the second substrate loading part for accommodating the substrate; the connection structure is disposed on the side of the second substrate loading part away from the first substrate loading part, for connecting the second substrate loading part and the vacuum processing chamber; A fourth opening is provided at the middle position of the second substrate loading part. The connection structure includes a second connecting part, a cover plate, and a base plate. The second connecting part has a flange distributed circumferentially and extending radially outward along the second substrate loading part at one end near the second substrate loading part. The upper surface of the flange is detachably overlapped with the lower surface of the peripheral area of ​​the fourth opening. The cover plate is provided on the side of the second substrate loading part near the second connecting part, and the base plate is provided on the side of the second substrate loading part away from the second connecting part. The second connecting part, the base plate, and the cover plate form an overlapping area on the side of the flange near the fourth opening. The second connecting part and the second substrate loading part are detachably connected by a first fastener passing through the overlapping area.

[0006] Preferably, a hole is provided through the overlapping area formed by the second connecting part, the chassis and the cover plate, and the first fastener is detachably installed in the hole.

[0007] Preferably, the second connecting portion includes: A first mounting base is connected to the second substrate loading part. The first mounting base has a first hollow area inside. The first mounting base has a plurality of first protrusions at the end of the first hollow area away from the second substrate loading part, and a first notch is formed between adjacent first protrusions. The second mounting base is disposed at the end of the first mounting base away from the second substrate loading portion. The second mounting base has a second hollow region inside. The second mounting base has a plurality of second protrusions at the end of the second hollow region near the second substrate loading portion, and a second notch is formed between adjacent second protrusions. The first protrusion and the second protrusion are vertically aligned with each other, the first mounting base and the second mounting base are coaxially arranged, and in the axial direction of the first mounting base and the second mounting base, the cross-sectional area of ​​the first protrusion is smaller than the cross-sectional area of ​​the second notch, and the relative mating surfaces of the first protrusion and the second protrusion are shaped to match.

[0008] Furthermore, the contact surfaces of the first protrusion and the second protrusion are inclined surfaces.

[0009] Furthermore, the first notch and the second notch are vertically aligned and embedded with wedge-shaped blocks, and a pressure ring is provided above the wedge-shaped blocks. The pressure ring is movably installed on the inner wall of the second mounting base, and a detachable second fastener is provided between the pressure ring and the wedge-shaped blocks so that the first mounting base will not be relatively displaced from the second mounting base.

[0010] Furthermore, a lifting ring for lifting assembly is also installed at the top of the first mounting base.

[0011] Preferably, the second connecting part includes a bearing housing, which is connected to the drive shaft via a first gear set, and the drive shaft is connected to the power source via a second gear set.

[0012] Preferably, the first substrate loading portion includes a first opening and a first edge. The first opening is formed by the first edge and is used to expose the surface of the substrate to be processed. The first edge is provided with at least one first mating position. The first connecting portion is provided with at least one second mating position at one end near the first substrate loading portion. The first connecting portion and the first substrate loading portion are connected by mating the first mating position and the second mating position. The space formed by the first substrate loading portion, the second substrate loading portion and the first connecting portion is used to accommodate the substrate.

[0013] Furthermore, one of the corresponding first docking positions and the second docking positions is provided with a second opening, and the other of the first docking positions and the second docking positions is provided with a first hook member. The second opening includes a communicating second opening insertion area and a second opening hooking area. The first hook member is provided with a second opening hooking position and a second opening insertion position along the direction from the first substrate loading portion to the second substrate loading portion. The second opening hooking position passes through the second opening insertion area and enters the second opening hooking area, so that the second opening hooking is located at the edge of the second opening hooking area to achieve a detachable connection.

[0014] Furthermore, the second opening is disposed on the first mating position, the first hook is disposed at the end of the first connecting part, the second opening insertion area and the second opening hook area are interconnected, and the interconnected second opening insertion area and the second opening hook area are distributed circumferentially along the first substrate loading part to achieve rotational hooking, and the diameter of the second opening insertion area is larger than the diameter of the second opening hook area. The first mounting member includes a first limiting frustum, and the second opening mounting position and the second opening insertion position are sequentially arranged on the first limiting frustum along the direction from the first substrate loading portion to the second substrate loading portion. The first limiting frustum is located at one end of the first connecting portion near the first substrate loading portion, and the diameter of the side of the first limiting frustum away from the first connecting portion is greater than the diameter of the connection between the first limiting frustum and the first connecting portion. The second opening hook position matches the second opening hook area, and the first limiting frustum passes through the second opening insertion area and enters the second opening hook area, so that the second opening hook position matches the edge of the second opening hook area to achieve a detachable connection.

[0015] Furthermore, both the first mating position and the second mating position are uniformly arranged along the circumference of the first substrate loading portion.

[0016] Preferably, at least one third mating position is provided at the end of the first connecting portion away from the first substrate loading portion, and at least one fourth mating position is provided on the surface of the second substrate loading portion along the circumferential direction. The end of the first connecting portion away from the first substrate loading portion and the second substrate loading portion are connected in a detachable manner through the mating between the third mating position and the fourth mating position.

[0017] Furthermore, one of the corresponding third docking positions and the fourth docking positions is provided with a third opening, and the other of the third docking positions and the fourth docking positions is provided with a second hooking member. The third opening includes a communicating third opening insertion area and a third opening hooking area. The second hooking member is provided with a third opening hooking position and a third opening insertion position along the direction from the second substrate loading part to the first substrate loading part. The third opening hook position passes through the third opening insertion area and enters the third opening hook area, so that the third opening hook is located at the edge of the third opening hook area to achieve a detachable connection.

[0018] Furthermore, the third opening is disposed on the fourth mating position, the second hook is disposed on the third mating position, the third opening insertion area and the third opening hook area are interconnected, and the interconnected third opening insertion area and the third opening hook area are distributed circumferentially along the second substrate loading part to achieve rotational hooking, and the diameter of the third opening insertion area is larger than the diameter of the third opening hook area. The second connector includes a second limiting frustum. The third opening hook position and the third opening insertion position are sequentially arranged on the second limiting frustum along the direction from the second substrate loading portion to the first substrate loading portion. The second limiting frustum is located at the end of the first connecting portion away from the first substrate loading portion. The diameter of the side of the second limiting frustum away from the first connecting portion is larger than the diameter of the connection between the second limiting frustum and the first connecting portion. The third opening hook position matches the third opening hook area. The second limiting truncated cone passes through the third opening insertion area and enters the third opening hook area, so that the edge of the third opening hook position matches the edge of the third opening hook area to achieve detachable hooking.

[0019] Furthermore, the second substrate loading portion is circumferentially concentrically provided with multiple sets of third opening hook areas and at least one set of the third opening insertion areas. The multiple sets of third opening hook areas are arranged radially along the second substrate loading portion, and the third opening hook areas arranged radially along the second substrate loading portion are connected to the corresponding third opening insertion areas.

[0020] Furthermore, both the third and fourth mating positions are uniformly arranged along the circumference of the second substrate loading portion.

[0021] The present invention also provides a coating apparatus, including a coating source, the aforementioned coating substrate rotation device, and the connection structure, wherein the coating substrate rotation device is used to fix the substrate during coating.

[0022] The present invention provides a connection structure for connecting a coating substrate rotation device to a vacuum processing chamber and a coating device, which has the following advantages: 1. The connection structure of the present invention, by placing the bottom of the second connection part in the space between the cover plate and the chassis arranged vertically on the second substrate loading part, and installing a detachable first fastener inside the hole in the overlapping area of ​​the second connection part, the cover plate and the chassis, can stably connect the second connection part and the second substrate loading part together, and at the same time achieve detachability.

[0023] 2. The connection structure of the present invention forms a detachable overlap area by means of the upper surface of the flange and the lower surface of the periphery of the fourth opening, so that the weight of the substrate, the first substrate loading part and the second substrate loading part mainly acts on the aforementioned overlap area, further making the first fastener mainly bear the positioning function rather than the load-bearing function, effectively suppressing the biting phenomenon during assembly and disassembly, and improving the stability of substrate loading and equipment operation. Attached Figure Description

[0024] Figure 1 The diagram shows the overall structure of the substrate frame of the present invention. Figure 2 The diagram shows the connection structure between the second connecting part and the second substrate loading part in the substrate rotation device of the present invention. Figure 3 The diagram shown is a structural schematic of the second substrate loading section of the present invention. Figure 4 The diagram shows a cross-sectional structure of the first and second mounting bases of the present invention after assembly. Figure 5 The diagram shows the assembly structure of the first mounting base and the second mounting base in the substrate frame of the present invention. Figure 6 The diagram shown is a structural schematic of the first mounting base in the substrate frame of the present invention. Figure 7The diagram shows a structural schematic of the second mounting base in the substrate frame of the present invention. Figure 8 The diagram shows the structural schematics of both ends of the first connecting portion in the substrate frame of the present invention. Figure 9 The diagram shown is a structural schematic of the first substrate loading section in the substrate frame of the present invention. Detailed Implementation

[0025] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

[0026] It should be understood that the structures, proportions, sizes, etc., illustrated in the accompanying drawings are merely for illustrative purposes to aid those skilled in the art and to facilitate understanding and reading. They are not intended to limit the scope of the invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of the invention, should still fall within the scope of the technical content disclosed herein. Furthermore, the terms such as "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and not intended to limit the scope of the invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the invention.

[0027] This embodiment provides a connection structure for connecting a coating substrate rotation device to a vacuum processing chamber and a coating device. The connection structure in this application connects the coating substrate rotation device to the vacuum processing chamber. The coating substrate rotation device includes a substrate holder for loading substrates. The substrate holder in this application connects a first substrate loading section and a second substrate loading section together via a first connecting portion, so that the space formed between the first substrate loading section, the first connecting portion, and the second substrate loading section can support and accommodate the substrate, achieving stable placement of heavy-duty substrates. The connection structure is installed on the side of the second substrate loading section away from the first substrate loading section, and is used to connect the second substrate loading section and the vacuum processing chamber.

[0028] like Figures 1 to 9As shown, a substrate holder is provided for loading a substrate 1. The substrate holder includes: a first substrate loading part 2 for supporting the substrate 1; a second substrate loading part 3 disposed at a distance above the first substrate loading part 2; a first connecting part 4 installed between the first substrate loading part 2 and the second substrate loading part 3 for connecting the first substrate loading part 2 and the second substrate loading part 3, the space formed between the first connecting part 4, the first substrate loading part 2 and the second substrate loading part 3 for accommodating the substrate 1; and a connecting structure disposed on the side of the second substrate loading part 3 away from the first substrate loading part 2 for connecting the second substrate loading part 3 and a vacuum processing chamber such as a vacuum coating chamber of the substrate 1.

[0029] A fourth opening 32 is provided at the middle position of the second substrate loading part 3. The connecting structure includes a second connecting part 5, a cover plate 34, and a base plate 33. The second connecting part 5 has a flange 56 that is circumferentially distributed and extends radially outward along the second substrate loading part 3 at one end near the second substrate loading part 3. The upper surface of the flange 56 is detachably overlapped with the lower surface of the peripheral area of ​​the fourth opening 32. The cover plate 34 is provided on the side of the second substrate loading part 3 near the second connecting part 5. The second connecting part 5 and the cover plate 34 form an overlapping area on the side of the flange 56 near the fourth opening 32. A hole is provided through this overlapping area, and a detachable first fastener 35 is installed in the hole to connect the second connecting part 5 and the second substrate loading part 3 together. A chassis 33 is provided on the side of the second substrate loading part 3 away from the second connecting part 5. The second connecting part 5, the chassis 33 and the cover plate 34 form an overlapping area on the side of the flange 56 near the fourth opening 32. A hole is provided through the overlapping area. A detachable first fastener 35 is installed in the hole to connect the second connecting part 5 and the second substrate loading part 3 together.

[0030] Specifically, by placing the bottom of the second connecting part 5 in the space between the cover plate 34 and the chassis 33 arranged vertically on the second substrate loading part 3, and installing a detachable first fastener 35 inside the hole in the overlapping area of ​​the second connecting part 5, the cover plate 34, and the chassis 33, the second connecting part 5 and the second substrate loading part 3 can be stably connected together, while also achieving detachability. In addition, since the upper surface of the flange 56 and the lower surface of the area surrounding the fourth opening 32 form a detachable overlap area, the weight of the substrate 1, the first substrate loading part 2, and the second substrate loading part 3 mainly acts on the aforementioned overlap area, further enabling the first fastener 35 to mainly undertake a positioning function rather than a load-bearing function, effectively suppressing the biting phenomenon during assembly and disassembly, and improving the stability of substrate loading and equipment operation.

[0031] In some embodiments, the second connecting portion 5 includes: a first mounting base 51 connected to the second substrate loading portion 3, the first mounting base 51 having a first hollow region 511 inside, and the first mounting base 51 having a plurality of first protrusions 512 on the outer sidewall of the first hollow region 511 away from the second substrate loading portion 3, with a first notch 513 formed between adjacent first protrusions 512.

[0032] The second mounting base 52 is disposed at the end of the first mounting base 51 away from the second substrate loading part 3. The second mounting base 52 has a second hollow region 521 inside. The inner sidewall of the second mounting base 52 near the second substrate loading part 3 has a plurality of second protrusions 522, and a second notch 523 is formed between adjacent second protrusions 522.

[0033] The first protrusion 512 and the second protrusion 522 are vertically corresponding to each other, and the first mounting base 51 and the second mounting base 52 are coaxially arranged. In the axial direction of the first mounting base 51 and the second mounting base 52, the cross-sectional area of ​​the first protrusion 512 is smaller than the cross-sectional area of ​​the second notch 523, and the relative mating surfaces of the first protrusion 512 and the second protrusion 522 are matched in shape.

[0034] In this embodiment, since the cross-sectional area of ​​the first protrusion 512 is smaller than the cross-sectional area of ​​the second notch 523, the first protrusion 512 is then placed directly below the second protrusion 522 by passing the first protrusion 512 through the second notch 523. This causes the first protrusion 512 at the bottom of the first mounting base 51 to be attached to the direct underside of the second protrusion 522 of the second mounting base 52, so that the first protrusion 512 and the second protrusion 522 are stacked together, thereby fixing the first mounting base 51 and the second mounting base 52 together.

[0035] Furthermore, the first notch 513 and the second notch 523 are vertically aligned and embedded with wedge blocks 53. A pressure ring 54 is provided above the wedge blocks 53. The pressure ring 54 is installed on the inner wall of the second mounting base 52. A detachable second fastener 55 is provided between the pressure ring 54 and the wedge blocks 53. The first protrusion 512 corresponds to the second protrusion 522, and the wedge blocks 53 are provided between the first notch 513 and the second notch 523. The wedge blocks 53 and the pressure ring 54 are fixed together by the second fastener 55, thereby achieving a stable connection between the first mounting base 51 and the second mounting base 52, so that the first mounting base 51 will not have relative displacement with the second mounting base 52, including radial displacement and axial displacement.

[0036] After the first mounting base 51 and the second mounting base 52 are stacked and attached together by multiple first protrusions 512 and second protrusions 522, wedge blocks 53 are installed at the positions of the first notch 513 and the second notch 523, and the pressure ring 54 and the wedge blocks 53 on the inner wall of the second mounting base 52 are fixed together by the second fastener 55. Thus, the wedge blocks 53 limit the first notch 513 and the second notch 523, so that the first mounting base 51 and the second mounting base 52 will not have radial displacement after fixed installation, thus ensuring the stability of the first mounting base 51 and the second mounting base 52 after installation.

[0037] In traditional substrate frame structures, the main body of the substrate frame used to support the substrate and its rotational transmission mechanism are usually fixed with screws to bear the load. However, this method is not suitable for heavy-duty substrates such as those weighing more than 1 ton, for the following reasons: First, screws are subject to load fatigue after use; if the threads are damaged, the main body of the substrate frame and the substrate may fall. Second, because the screw threads need to bear the load, they are prone to biting during later assembly and disassembly. In this application, after the first protrusion 512 and the second protrusion 522 are attached at an angle, a wedge block 53 is inserted into the first notch 513 and the second notch 523, and the wedge block 53 is fixed to the pressure ring 54 by the second fastener 55. This achieves a stable connection between the first mounting base 51 and the second mounting base 52, and facilitates disassembly. After installation, the first mounting base 51 and the second mounting base 52 will not experience radial displacement during the driving process, effectively solving the problems caused by the screw fixing in the prior art.

[0038] In some embodiments, the contact surfaces of the first protrusion 512 and the second protrusion 522 are inclined surfaces, which increases the contact area and makes it less likely for the first protrusion 512 and the second protrusion 522 to slip off. Moreover, it helps to maximize the contact area within the same space, reduce pressure, and facilitate the concentric fit of the components during assembly.

[0039] In some other embodiments, a lifting ring 57 for lifting assembly is also installed at the top of the first mounting base 51, so as to facilitate the lifting of the second connecting part 5 through the lifting ring 57.

[0040] In some other embodiments, the second connecting part 5 further includes a bearing housing mounted on the top of the second mounting base 52. The bearing housing is connected to the drive shaft via a first gear set, and the drive shaft is connected to the power source via a second gear set.

[0041] In this application, the second mounting base of the first mounting base adopts a snap-fit ​​structure for assembly. By passing the first protrusion of the first mounting base through the second notch of the second mounting base, and then adjusting the first mounting base, the first protrusion of the first mounting base and the second protrusion of the second mounting base are brought together, thereby fixing the first mounting base and the second mounting base. With the help of wedge blocks, it is further fixed, achieving a stable connection while being easy to disassemble. This structure can achieve adjustable clamping of substrates of various diameters. Moreover, the inclined placement of the first and second protrusions is beneficial to maximizing the contact area within the same space, reducing pressure, and improving the concentricity of component assembly.

[0042] like Figures 1 to 9 As shown, the first connecting part and the first substrate loading part are connected by a first mating position and a second mating position, which ensures stable connection and enables detachable loading to meet different loading requirements.

[0043] Further, the first substrate loading portion 2 includes a first opening 21 and a first edge 22. The first opening 21 is disposed inside the first edge 22 and is used to expose the surface of the substrate 1 to be processed. The surface of the first edge 22 is provided with at least one first mating position. The first connecting portion 4 is provided with at least one second mating position at one end near the first substrate loading portion 2. The first connecting portion 4 and the first substrate loading portion 2 are connected through the mating of the first mating position and the second mating position. The space formed by the first substrate loading portion 2, the second substrate loading portion 3, and the first connecting portion 4 is used to accommodate the substrate 1. The first connecting portion 4 is provided with at least one third mating position at one end away from the first substrate loading portion 2. The second substrate loading portion 3 is provided with at least one fourth mating position 31 along the circumferential direction. The end of the first connecting portion 4 away from the first substrate loading portion 2 and the second substrate loading portion 3 are connected in a detachable manner through the mating of the third mating position and the fourth mating position.

[0044] In this embodiment, one end of the first substrate loading part 2 and the first connecting part 4 are fixedly connected together by a first mating position and a second mating position. The other end of the first connecting part 4 is detachably connected to the second substrate loading part 3 by a third mating position and a fourth mating position. Thus, the first substrate loading part 2 and the second substrate loading part 3 are connected together by the first connecting part 4, and the space formed between the first substrate loading part 2, the second substrate loading part 3, and the first connecting part 4 is used to accommodate and place the substrate 1. The first opening 21 on the first substrate loading part 2 exposes the surface of the substrate 1 to be processed, facilitating processing of the substrate 1. The entire structure uses a detachable connection. Compared with the screw fixing in the prior art, the fixing method of this application is more stable and less prone to biting during disassembly and assembly.

[0045] It should be noted that the first opening 21 can be hollow or notched, and the first edge 22 can be a closed ring or a ring with a notch. This solution does not impose any special restrictions on this, and will not be elaborated here.

[0046] In some embodiments, one of the corresponding first mating position and the second mating position is provided with a second opening 23, and the other of the corresponding first mating position and the second mating position is provided with a first hook member 42. The second opening 23 includes a communicating second opening insertion area 231 and a second opening hook area 232. The first hook member 42 is provided with a second opening hook position 422 and a second opening insertion position 421 along the direction from the first substrate loading part 2 to the second substrate loading part 3. The second opening hook position 422 passes through the second opening insertion area 231 and enters the second opening hook area 232, so that the second opening hook position 422 matches the edge of the second opening hook area 232 to achieve a detachable connection.

[0047] In this solution, one end of the first connecting part 4 and the first substrate loading part 2 are connected through a first opening 23 and a first hook 42 that match each other. While ensuring the support of the substrate, it is easy to realize the detachable connection between the first connecting part 4 and the first substrate loading part 2, making it more convenient to use and meeting different installation requirements.

[0048] It should be noted that the second opening 23 can be hollow or notched. The edge of the second opening 23 can be a closed ring or a ring with a notch. This solution does not impose any special restrictions on this, and will not be elaborated here.

[0049] Furthermore, the second opening 23 is disposed on the first mating position, the first hook member 42 is disposed on the second mating position, the second opening insertion area 231 and the second opening hook area 232 are interconnected, and the interconnected second opening insertion area 231 and the second opening hook area 232 are distributed circumferentially along the first substrate loading part 2 to achieve rotational hooking, and the diameter of the second opening insertion area 231 is larger than the diameter of the second opening hook area 232.

[0050] The first mounting member 42 includes a first limiting frustum 423, a second opening mounting position 421 and a second opening insertion position 422, which are sequentially arranged on the first limiting frustum 423 along the direction from the first substrate loading part 2 to the second substrate loading part 3. The first limiting frustum 423 is located at one end of the first connecting part 4 near the first substrate loading part 2. The diameter of the side of the first limiting frustum 423 away from the first connecting part 4 is larger than the diameter of the connection between the first limiting frustum 423 and the first connecting part 4.

[0051] The second opening hook position 422 matches the second opening hook area 232. The first limiting frustum 423 passes through the second opening penetration area 231 and enters the second opening hook area 232, so that the second opening hook position 422 matches the edge of the second opening hook area 232 to achieve a detachable connection.

[0052] Specifically, when it is necessary to fix one end of the first connecting part 4 to the first substrate loading part 2, the first limiting frustum 423 of the first hook member 42 is inserted into the second opening 23. The first limiting frustum 423 first passes through the second opening insertion area 231 and then enters the second opening hook area 232, and matches the edge of the second opening hook area 232, thereby connecting the first limiting frustum 423 at the end of the first connecting part 4 to the first substrate loading part 2. Since the connection is achieved by matching the first limiting frustum 423 and the second opening hook area 232, it is convenient to disassemble.

[0053] In some other embodiments, the first mating position and the second mating position are both uniformly arranged along the circumference of the first substrate loading portion 2, so as to match the first opening 21 on the first substrate loading portion 2, so as to facilitate the exposure of the substrate 1 for processing, and at the same time facilitate the rotational hanging installation.

[0054] In some embodiments, one of the corresponding third mating positions and the fourth mating position is provided with a third opening 31, and the other of the corresponding third mating positions and the fourth mating position is provided with a second hook member 41. The third opening 31 includes a communicating third opening insertion area 311 and a third opening hook area 312. The second hook member 41 is provided with a third opening hook position 412 and a third opening insertion position 411 along the direction from the second substrate loading portion 3 to the first substrate loading portion 2.

[0055] The third opening hook position 412 passes through the third opening insertion area 311 and enters the third opening hook area 312, so that the edge of the third opening hook position 412 matches the edge of the third opening hook area 312 to achieve a detachable connection.

[0056] In this embodiment, the connection between the second substrate loading part 3 and the end of the first connecting part 4 is achieved by matching the corresponding third and fourth docking positions with the third opening 31 and the second hook 41, respectively. Since the third opening 31 and the second hook 41 are detachably connected, the first connecting part 4 and the second substrate loading part 3 can be detachably connected to achieve the detachable loading of the substrate 1.

[0057] Furthermore, the third opening 31 is disposed on the fourth mating position, the second hook member 41 is disposed on the third mating position, the third opening penetration area 311 and the third opening hook area 312 are interconnected, and the interconnected third opening penetration area 311 and the third opening hook area 312 are distributed circumferentially along the second substrate loading part 3, and the diameter of the third opening penetration area 311 is larger than the diameter of the third opening hook area 312.

[0058] The second connector 41 includes a second limiting frustum 413, a third opening connector 412 and a third opening insertion position 411, which are sequentially arranged on the second limiting frustum 413 along the direction from the second substrate loading part 3 to the first substrate loading part 2. The second limiting frustum 413 is located at the end of the first connecting part 4 away from the first substrate loading part 2. The diameter of the side of the second limiting frustum 413 away from the first connecting part 4 is larger than the diameter of the connection between the second limiting frustum 413 and the first connecting part 4. The third opening hook position 412 matches the third opening hook area 312. The second limiting truncated cone 413 passes through the third opening insertion area 311 and enters the third opening hook area 312 so that the edge of the third opening hook position 412 matches the edge of the third opening hook area 312 to achieve detachable hooking.

[0059] Since the connection method between the other end of the first connecting part 4 and the second substrate loading part 3 is similar to the connection method between one end of the first connecting part 4 and the first substrate loading part 2 described above, it will not be repeated here.

[0060] In some embodiments, the third and fourth mating positions are evenly arranged along the circumference of the second substrate loading portion 3. This facilitates a rotary connection between the first connecting portion 4 and the second substrate loading portion 3.

[0061] In some other embodiments, the second substrate loading portion 3 is circumferentially concentrically provided with multiple sets of third opening hook areas 312 and at least one set of third opening insertion areas 311. The multiple sets of third opening hook areas 312 are arranged radially along the second substrate loading portion 3, and the third opening hook areas 312 arranged radially along the second substrate loading portion 3 are connected to the third opening insertion areas 311.

[0062] In this embodiment, by providing multiple sets of third opening hook areas 312, it is convenient to match substrates of different diameters through multiple sets of third opening hook areas 312, thereby increasing versatility. Correspondingly, different second hook members 41 are used to match the third opening hook areas 312 to achieve the support of substrates of different diameters. Moreover, the multiple sets of third opening hook areas 312 are arranged radially along the second substrate loading part 3, which facilitates the selection of the third opening hook area 312 that matches the third opening hook position 412 of the second limiting frustum 413 of the second hook member 41 after the second hook member 41 enters through the third opening insertion area 311, so as to quickly realize the installation of the first connecting part 4 and the second substrate loading part 3.

[0063] This invention also provides a coating apparatus, including a coating source, the aforementioned coating substrate rotation device, and a connecting structure. The coating substrate rotation device serves as a substrate holder for fixing the substrate during coating, and the connecting structure provides a stable and convenient connection between the coating substrate rotation device and the vacuum processing chamber. By fixing the substrate and connecting structure and ensuring communication with the vacuum processing chamber, the stability of the substrate during coating is guaranteed. Since the working principles of the substrate holder and connecting structure have been described above, they will not be repeated here.

[0064] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A connection structure for connecting a coating substrate rotation device and a vacuum processing chamber, used to connect the coating substrate rotation device and the vacuum processing chamber, characterized in that, The coating substrate rotation device includes a substrate frame for loading substrates. The substrate frame includes a first substrate loading part and a second substrate loading part that are connected vertically and horizontally by a first connecting part. The space formed between the first connecting part, the first substrate loading part and the second substrate loading part is used to accommodate the substrate. A connecting structure is provided on the side of the second substrate loading part away from the first substrate loading part for connecting the second substrate loading part and the vacuum processing chamber. A fourth opening is provided at the middle position of the second substrate loading part. The connection structure includes a second connecting part, a cover plate, and a base plate. The second connecting part has a flange distributed circumferentially and extending radially outward along the second substrate loading part at one end near the second substrate loading part. The upper surface of the flange is detachably overlapped with the lower surface of the peripheral area of ​​the fourth opening. The cover plate is provided on the side of the second substrate loading part near the second connecting part, and the base plate is provided on the side of the second substrate loading part away from the second connecting part. The second connecting part, the base plate, and the cover plate form an overlapping area on the side of the flange near the fourth opening. The second connecting part and the second substrate loading part are detachably connected by a first fastener passing through the overlapping area.

2. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 1, characterized in that, A hole is provided through the overlapping area formed by the second connecting part, the chassis and the cover plate, and the first fastener can be detachably installed in the hole.

3. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 1, characterized in that, The second connecting part includes: A first mounting base is connected to the second substrate loading part. The first mounting base has a first hollow area inside. The first mounting base has a plurality of first protrusions at the end of the first hollow area away from the second substrate loading part, and a first notch is formed between adjacent first protrusions. The second mounting base is disposed at the end of the first mounting base away from the second substrate loading portion. The second mounting base has a second hollow region inside. The second mounting base has a plurality of second protrusions at the end of the second hollow region near the second substrate loading portion, and a second notch is formed between adjacent second protrusions. The first protrusion and the second protrusion are vertically aligned with each other, the first mounting base and the second mounting base are coaxially arranged, and in the axial direction of the first mounting base and the second mounting base, the cross-sectional area of ​​the first protrusion is smaller than the cross-sectional area of ​​the second notch, and the relative mating surfaces of the first protrusion and the second protrusion are shaped to match.

4. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 3, characterized in that, The mating surfaces of the first protrusion and the second protrusion are inclined surfaces.

5. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 3, characterized in that, The first notch and the second notch are vertically aligned and embedded with wedge-shaped blocks. A pressure ring is provided above the wedge-shaped blocks. The pressure ring is movably installed on the inner wall of the second mounting base. A detachable second fastener is provided between the pressure ring and the wedge-shaped blocks so that the first mounting base will not be relatively displaced from the second mounting base.

6. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 3, characterized in that, The top of the first mounting base is also equipped with a lifting ring for lifting and assembling.

7. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 1, characterized in that, The second connecting part includes a bearing housing, which is connected to the drive shaft via a first gear set, and the drive shaft is connected to the power source via a second gear set.

8. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 1, characterized in that, The first substrate loading portion includes a first opening and a first edge. The first opening is formed by the first edge and is used to expose the surface of the substrate to be processed. The first edge is provided with at least one first mating position. The first connecting portion is provided with at least one second mating position at one end near the first substrate loading portion. The first connecting portion and the first substrate loading portion are connected by mating the first mating position and the second mating position. The space formed by the first substrate loading portion, the second substrate loading portion and the first connecting portion is used to accommodate the substrate.

9. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 8, characterized in that, One of the corresponding first docking position and the second docking position is provided with a second opening, and the other of the first docking position and the second docking position is provided with a first hook member. The second opening includes a communicating second opening insertion area and a second opening hooking area. The first hook member is provided with a second opening hooking position and a second opening insertion position along the direction from the first substrate loading part to the second substrate loading part. The second opening hooking position passes through the second opening insertion area and enters the second opening hooking area so that the second opening hooking is located at the edge of the second opening hooking area to achieve a detachable connection.

10. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 9, characterized in that, The second opening is disposed on the first docking position, the first hook is disposed at the end of the first connecting part, the second opening insertion area and the second opening hook area are interconnected, and the interconnected second opening insertion area and the second opening hook area are distributed circumferentially along the first substrate loading part to achieve rotational hooking, and the diameter of the second opening insertion area is larger than the diameter of the second opening hook area. The first mounting member includes a first limiting frustum, and the second opening mounting position and the second opening insertion position are sequentially arranged on the first limiting frustum along the direction from the first substrate loading portion to the second substrate loading portion. The first limiting frustum is located at one end of the first connecting portion near the first substrate loading portion, and the diameter of the side of the first limiting frustum away from the first connecting portion is greater than the diameter of the connection between the first limiting frustum and the first connecting portion. The second opening hook position matches the second opening hook area, and the first limiting frustum passes through the second opening insertion area and enters the second opening hook area, so that the second opening hook position matches the edge of the second opening hook area to achieve a detachable connection.

11. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 8, characterized in that, Both the first mating position and the second mating position are uniformly arranged along the circumference of the first substrate loading portion.

12. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 1, characterized in that, The first connecting portion has at least one third mating position at the end away from the first substrate loading portion, and the second substrate loading portion has at least one fourth mating position along the circumferential direction on its surface. The end of the first connecting portion away from the first substrate loading portion and the second substrate loading portion are connected in a detachable manner through the mating between the third mating position and the fourth mating position.

13. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 12, characterized in that, One of the corresponding third docking positions and the fourth docking positions is provided with a third opening, and the other of the third docking positions and the fourth docking positions is provided with a second hooking member. The third opening includes a connected third opening insertion area and a third opening hooking area. The second hooking member is provided with a third opening hooking position and a third opening insertion position along the direction from the second substrate loading part to the first substrate loading part. The third opening hook position passes through the third opening insertion area and enters the third opening hook area, so that the third opening hook is located at the edge of the third opening hook area to achieve a detachable connection.

14. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 13, characterized in that, The third opening is disposed on the fourth mating position, the second hook is disposed on the third mating position, the third opening insertion area and the third opening hook area are interconnected, and the interconnected third opening insertion area and the third opening hook area are distributed circumferentially along the second substrate loading part to achieve rotational hooking, and the diameter of the third opening insertion area is larger than the diameter of the third opening hook area. The second connector includes a second limiting frustum. The third opening hook position and the third opening insertion position are sequentially arranged on the second limiting frustum along the direction from the second substrate loading portion to the first substrate loading portion. The second limiting frustum is located at the end of the first connecting portion away from the first substrate loading portion. The diameter of the side of the second limiting frustum away from the first connecting portion is larger than the diameter of the connection between the second limiting frustum and the first connecting portion. The third opening hook position matches the third opening hook area. The second limiting truncated cone passes through the third opening insertion area and enters the third opening hook area, so that the edge of the third opening hook position matches the edge of the third opening hook area to achieve detachable hooking.

15. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 14, characterized in that, The second substrate loading portion is circumferentially concentrically provided with multiple sets of third opening hook areas and at least one set of the third opening insertion areas. The multiple sets of third opening hook areas are arranged radially along the second substrate loading portion, and the third opening hook areas arranged radially along the second substrate loading portion are connected to the corresponding third opening insertion areas.

16. The connection structure for connecting the coating substrate rotary device and the vacuum processing chamber as described in claim 12, characterized in that, Both the third and fourth docking positions are uniformly arranged along the circumference of the second substrate loading portion.

17. A coating apparatus, characterized in that, The coating source includes the coating substrate rotation device and the connection structure as described in any one of claims 1 to 16, wherein the coating substrate rotation device is used to fix the substrate during coating.

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