flexible unit

Abstract

The flexible unit (10) includes: a base member (12); a worktable unit (14) configured to move relative to the base member along an XY plane in which the vertical direction is defined as the Y direction and the direction perpendicular to the Y direction is defined as the X direction; a flexible mechanism (16) installed between the base member and the worktable unit in a manner that allows it to move relative to the base member and the worktable unit in the X and Y directions; and a pressing part (156) provided on the base member and pressing the worktable unit upward.

Description

Technical Field

[0001] This disclosure relates to a flexible unit. Background Technology

[0002] For example, Japanese Patent Application Publication No. 2002-172582 discloses a flexible unit comprising a base member, a worktable unit, and a flexible mechanism. The worktable unit is movably arranged relative to the base member along the XY plane. The flexible mechanism is installed between the base member and the worktable unit to enable movement relative to the base member and the worktable unit in the X and Y directions. In the flexible unit, the worktable unit can be locked when it returns to its original position relative to the base member. Summary of the Invention

[0003] The goal is to provide a better flexible unit.

[0004] The purpose of this invention is to solve the above-mentioned problems.

[0005] The present disclosure is a flexible unit comprising: a base member; a worktable unit configured to move relative to the base member along an XY plane, wherein the vertical direction is defined as the Y direction and the direction perpendicular to the Y direction is defined as the X direction; a flexible mechanism mounted between the base member and the worktable unit in a manner that allows it to move relative to the base member and the worktable unit in the X and Y directions; and a pressing part disposed on the base member and pressing the worktable unit upward.

[0006] According to the present invention, a better flexible unit can be provided.

[0007] The above-mentioned objectives, features, and advantages will be readily understood from the following description of embodiments with reference to the accompanying drawings. Attached Figure Description

[0008] Figure 1 This is a perspective view of the flexible unit involved in the first embodiment.

[0009] Figure 2 This is an exploded perspective view of the flexible unit involved in the first embodiment.

[0010] Figure 3 This is an exploded perspective view of the flexible unit involved in the first embodiment.

[0011] Figure 4 This is a longitudinal sectional view of the flexible unit involved in the first embodiment.

[0012] Figure 5 It is along Figure 4 The cross section view of the VV line is omitted.

[0013] Figure 6 It is along Figure 4 A longitudinal section view of line VI-VI.

[0014] Figure 7 It is along Figure 6 The cross section view of line VII-VII is omitted.

[0015] Figure 8 This is an operational illustration of the flexible unit involved in the first embodiment.

[0016] Figure 9 This is a diagram illustrating the operation of the flexible unit.

[0017] Figure 10 This is a cross-sectional illustration of the flexible unit according to the second embodiment.

[0018] Figure 11 This is a cross-sectional illustration of the flexible unit according to the third embodiment.

[0019] Figure 12 This is a partial omitting of the operational description of the flexible unit involved in the third embodiment.

[0020] Figure 13 This is a partial omitting of the operational description of the flexible unit involved in the third embodiment.

[0021] Figure 14 This is a partial omitting of the operational description of the flexible unit involved in the third embodiment.

[0022] Figure 15 This is a cross-sectional illustration of the flexible unit according to the fourth embodiment. Detailed Implementation

[0023] Furthermore, the aforementioned conventional flexible units are sometimes configured so that the Y-direction is vertical. In this case, when the stage unit is not locked relative to the base member (the unlocked state of the stage unit), the stage unit may sometimes move downward (in the direction of gravity) relative to the base member due to its own weight. Thus, even without an external force applied to the stage unit, the stage unit may sometimes shift downward relative to the base member from its origin position due to its own weight. This disclosure addresses the issue of suppressing the movement of the stage unit relative to the base member due to gravity.

[0024] (First Implementation)

[0025] Regarding the flexible unit 10 in the first embodiment of the present invention, while referring to the attached drawing... Figure 1 The following explanation will be provided. The flexible unit 10 is, for example, a device used to correct positional offset (center offset) during workpiece assembly. Specifically, as... Figure 1As shown, in the flexible unit 10, for example, a robot arm (not shown) is connected to the base component 12, and a chuck (not shown) for gripping the workpiece is mounted on the worktable unit 14.

[0026] In this embodiment, an example of arranging the flexible unit 10 with the Y1 direction facing downwards (in the direction of gravity) will be described. Furthermore, the X direction is perpendicular to the Y direction. The Z direction is perpendicular to both the X and Y directions.

[0027] In the unlocked state, the worktable unit 14 can move relative to the base member 12 along the XY plane. Furthermore, in the unlocked state (not locked relative to the worktable support member 48), the worktable body 50 of the worktable unit 14 can tilt relative to the worktable support member 48 about a first axis Ax1 in the X direction (horizontal direction). Moreover, in the unlocked state, the worktable body 50 can tilt relative to the worktable support member 48 about a second axis Ax2 in the Y direction (vertical direction).

[0028] Such a flexible unit 10, for example, can easily correct center offset even if it occurs during workpiece assembly where a workpiece is inserted into a designated hole, because the table unit 14 can move in the XY direction and the table body 50 can tilt relative to the table support 48. Furthermore, the application of the flexible unit 10 is not limited to the example of inserting a workpiece into a hole. Additionally, the flexible unit 10 can also be used in a configuration where the Z direction is set to the direction of gravity. The configuration of the flexible unit 10 will be described in detail below.

[0029] like Figures 1-4 As shown, the flexible unit 10 includes a base component 12, a worktable unit 14, a pair of flexible mechanisms 16, a first origin reset mechanism 18, a second origin reset mechanism 20, a pressing mechanism 22, and a tilt suppression part 24.

[0030] like Figures 2-4 As shown, the base component 12 has a first base portion 26 and a second base portion 28. The first base portion 26 is a plate-shaped component extending in the X and Y directions. Viewed from the Z direction, the first base portion 26 is formed with chamfered corners. At each corner of the first base portion 26, mounting holes 30 are formed for mounting the first base portion 26 to a robot hand (not shown). At the center of the first base portion 26, a first through hole 32 is formed (see reference). Figure 3 and Figure 4 The shape and size of the first base part 26 can be appropriately set.

[0031] like Figure 2 and Figure 4As shown, the second base portion 28 is mounted on the surface of the first base portion 26 facing the Z1 direction. A second through hole 34 is formed in the center of the second base portion 28. That is, the second base portion 28 is formed in an annular shape (e.g., circular). The second through hole 34 communicates with the first through hole 32.

[0032] like Figure 4 As shown, the second base portion 28 includes a first base plate 36, an intermediate component 38, a second base plate 40, and a clamping component 42. The first base plate 36, the intermediate component 38, the second base plate 40, and the clamping component 42, when overlapped in this order in the Z1 direction, are secured by multiple fastening components 44 (see reference 44). Figure 2 It is fixed to the first base portion 26. The fastening member 44 is, for example, a threaded member. Each of the first base plate 36, the intermediate member 38, the second base plate 40, and the clamping member 42 is formed in an annular shape.

[0033] like Figure 4 As shown, a first base plate 36 is disposed on the Z1-oriented surface of the first base portion 26. An intermediate member 38 is disposed on the Z1-oriented surface of the first base plate 36. The thickness of the intermediate member 38 along the Z direction is larger than the thickness of the first base plate 36 along the Z direction. The inner diameter of the intermediate member 38 is larger than the inner diameter of the first base plate 36. A second base plate 40 is disposed on the Z1-oriented surface of the intermediate member 38. The inner diameter of the second base plate 40 is the same as the inner diameter of the first base plate 36. That is, a space 46 is formed between the first base plate 36 and the second base plate 40.

[0034] like Figure 2 and Figure 4 As shown, a plurality of receiving components 126 constituting the first origin reset mechanism 18 are provided on the Z1-oriented surface of the second base plate 40. The configuration of the receiving components 126 will be described later. The clamping component 42 fixes the plurality of receiving components 126 relative to the second base plate 40.

[0035] like Figures 1-4 As shown, the worktable unit 14 is movably configured relative to the base member 12 along the XY plane. The worktable unit 14 has a worktable support 48 and a worktable body 50.

[0036] like Figures 2-4 As shown, the workbench support 48 has a first support member 52, a support plate 54, and a second support member 56. The first support member 52 is formed in a block shape. The first support member 52 includes a first support body 58, a first shaft portion 60, and a pair of connecting protrusions 62.

[0037] A first origin reset mechanism 18, a second origin reset mechanism 20, and a tilt suppression part 24 are installed on the first support body 58. Figure 3 and Figure 4 As shown, the first shaft portion 60 protrudes from the first support body 58 toward the first base portion 26 (Z2 direction). The first shaft portion 60 is inserted into the second through hole 34 of the second base portion 28. The first shaft portion 60 is located at the center of the first support body 58 in the X direction (see reference). Figure 3 A central protrusion 64 protruding in the Z2 direction is provided at the center of the end face of the first shaft portion 60.

[0038] like Figure 2 and Figure 4 As shown, a pair of connecting protrusions 62 protrude from the outer periphery of the surface of the first support body 58 facing the Z1 direction. The pair of connecting protrusions 62 are arranged at intervals in the X direction. The pair of connecting protrusions 62 support the worktable body 50.

[0039] like Figure 4 As shown, the support plate 54 is formed in an annular shape. The support plate 54 is disposed in the second through hole 34 of the second base portion 28. In other words, the support plate 54 is disposed in the space 46 between the first base plate 36 and the second base plate 40. A central protrusion 64 is inserted into the hole 66 on the inner side of the support plate 54.

[0040] The second support member 56 has a second support body 68, a second shaft portion 70, and a bearing 72. The second support body 68 covers the inner peripheral end of the support plate 54 from the Z2 direction. The second support body 68 and the support plate 54 are fixed to the first shaft portion 60 by a plurality of fastening members 74. The fastening members 74 are, for example, threaded members. The support plate 54 is clamped by the first shaft portion 60 and the second support body 68.

[0041] The second shaft portion 70 protrudes from the second support body 68 in the Z2 direction. The second shaft portion 70 is inserted into the first through hole 32 of the first base portion 26. The second shaft portion 70 is located at the center of the second support body 68.

[0042] Bearing 72 is, for example, a rolling bearing. Bearing 72 can also be a sliding bearing. Bearing 72 has an inner ring 76, a plurality of rolling elements 78, and an outer ring 80. The inner ring 76 is fixed to the outer circumferential surface of the second shaft portion 70. The plurality of rolling elements 78 are located between the inner ring 76 and the outer ring 80 and are arranged circumferentially along the second shaft portion 70. The outer ring 80 is a hollow roller portion 82 in which the second shaft portion 70 is internally disposed. The roller portion 82 is configured to rotate relative to the second shaft portion 70.

[0043] The worktable support 48 has a shaft portion 84 formed by a first shaft portion 60 and a second support member 56. The shaft portion 84 is located at the center of the worktable unit 14 in the X direction. The shaft portion 84 is inserted into a through hole 86 in the base member 12. The through hole 86 is formed by a first through hole 32 and a second through hole 34. An appropriate gap is formed between the outer peripheral surface of the shaft portion 84 and the inner peripheral surface of the base member 12 to allow the worktable unit 14 to move relative to the base member 12 in the X and Y directions.

[0044] A pair of flexible mechanisms 16 are provided on the support plate 54 of the worktable support section 48. In other words, the pair of flexible mechanisms 16 are installed between the worktable unit 14 and the base member 12 so that they can move relative to the base member 12 and the worktable unit 14 in the X and Y directions. One flexible mechanism 16 is installed between the first base plate 36 and the support plate 54. The other flexible mechanism 16 is installed between the second base plate 40 and the support plate 54. Hereinafter, one flexible mechanism 16 is sometimes referred to as "first flexible mechanism 16a" and the other flexible mechanism 16 is sometimes referred to as "second flexible mechanism 16b".

[0045] The first flexible mechanism 16a has a plurality of balls 88 and a plate-shaped retainer 90. The balls 88 are, for example, steel balls. The balls 88 are in contact with the plane of the first base plate 36 facing the Z1 direction and the plane of the support plate 54 facing the Z2 direction.

[0046] The cage 90 rotatably supports a plurality of balls 88. The cage 90 is formed in an annular shape. The outer diameter of the cage 90 is smaller than the inner diameter of the intermediate component 38. The inner diameter of the cage 90 is larger than the inner diameter of the first base plate 36.

[0047] The movement of the first flexible mechanism 16a along the XY plane is limited by a first stop 92. The first stop 92 is mounted on the plane of the support plate 54 facing the Z2 direction by a fastening member (not shown). The first stop 92 is formed in annular shape. The first stop 92 is located inside the cage 90 of the first flexible mechanism 16a. The outer diameter of the first stop 92 is smaller than the inner diameter of the cage 90 of the first flexible mechanism 16a.

[0048] The second flexible mechanism 16b has the same configuration as the first flexible mechanism 16a. Therefore, a detailed description of the configuration of the second flexible mechanism 16b is omitted. Furthermore, the plurality of balls 88 of the second flexible mechanism 16b are in contact with the plane of the second base plate 40 facing the Z2 direction and the plane of the support plate 54 facing the Z1 direction.

[0049] The movement of the second flexible mechanism 16b along the XY plane is limited by a second stop 94. The second stop 94 is mounted on the plane of the support plate 54 facing the Z1 direction by a fastening member (not shown). The second stop 94 is formed in an annular shape. The second stop 94 is located inside the cage 90 of the second flexible mechanism 16b. The outer diameter of the second stop 94 is smaller than the inner diameter of the cage 90 of the second flexible mechanism 16b.

[0050] The shaft portion 84 of the worktable unit 14 extends toward the base component 12 via the holes 17 of a pair of flexible mechanisms 16.

[0051] like Figures 2-4 As shown, the worktable body 50 has a first worktable body portion 96 and a second worktable body portion 98. The first worktable body portion 96 is formed in a ring shape. The first worktable body portion 96 extends in the Y direction. Figure 1 and Figure 5 As shown, the first worktable body 96 is positioned between a pair of connecting protrusions 62 of the worktable support 48. That is, the pair of connecting protrusions 62 are located on both sides of the first worktable body 96 in the X direction.

[0052] like Figure 2 , Figure 3 and Figure 5 As shown, the first worktable body 96 is supported relative to a pair of connecting protrusions 62 in a tilting manner by a pair of first pins 100. The first pins 100 are inserted across the first connecting hole 102 of the connecting protrusion 62 and the first through hole 104 of the first worktable body 96.

[0053] The first connecting hole 102 passes through the connecting protrusion 62 in the X direction. A first insertion hole 104 is formed in the portion of the first worktable body 96 adjacent to the first connecting hole 102. The first pin 100 passes through the first fixing member 106 (see reference). Figure 5 The first pin 100 is fixed relative to the connecting protrusion 62. The first worktable body 96 is not fixed relative to the first worktable body 96. The first worktable body 96 tilts about the first axis Ax1 of the first pin 100. The first axis Ax1 extends in the X direction.

[0054] like Figures 2-4 As shown, the second worktable body 98 includes a connecting part 108 and a worktable plate 110. The connecting part 108 is inserted into the inside of the first worktable body 96 (see reference). Figure 1 , Figure 4 and Figure 5 The connecting part 108 is supported relative to the first worktable body 96 in a tilting manner by a pair of second pins 112. The second pins 112 are inserted across the second through hole 114 of the first worktable body 96 and the second connecting hole 116 of the connecting part 108.

[0055] A pair of second through holes 114 are provided in the portion of the first worktable body 96 facing each other in the Y direction. That is, the second through holes 114 penetrate the first worktable body 96 in the Y direction. A second connecting hole 116 is formed in the connecting portion 108 adjacent to the second through holes 114. The second pin 112 passes through the second fixing member 117 (see reference). Figure 4 The second pin 112 is fixed relative to the connecting part 108. The second worktable body 98 is not fixed relative to the first worktable body 96. The second worktable body 98 tilts about the second axis Ax2 of the second pin 112. The second axis Ax2 extends along the Y direction. The second axis Ax2 extends in a direction perpendicular to the first axis Ax1.

[0056] The worktable 110 is located at the Z1 end of the connecting portion 108. The worktable 110 extends further outward than the connecting portion 108. A plurality of mounting holes 118 for mounting a chuck component (not shown) are formed in the worktable 110.

[0057] The first origin reset mechanism 18 is capable of locking the worktable unit 14 relative to the base member 12 when it has returned to the origin position. The first origin reset mechanism 18 has a plurality of origin reset sections 120. In this embodiment, the first origin reset mechanism 18 has three origin reset sections 120. The three origin reset sections 120 are arranged at equal intervals (e.g., 120° intervals) in the circumferential direction of the axis 84 of the worktable support section 48.

[0058] The origin reset section 120 includes a first cylinder section 122, a first holding section 124, and a receiving member 126. For example... Figure 4 As shown, the first cylinder 122 is, for example, a fluid pressure cylinder that operates based on fluid pressure. Specifically, the first cylinder 122 is an air pressure cylinder that operates based on air pressure. The configuration of the first cylinder 122 can be appropriately set. The same applies to the second cylinder 136, the third cylinder 152, and the fourth cylinder 178, which will be described later.

[0059] The first cylinder portion 122 has a first cylinder bore 128, a first piston portion 130, a first cover member 132, and a first force-applying member 134. The first cylinder bore 128 is formed on the outer periphery of the first support body 58 in a manner that extends in the Z direction. The first cylinder bore 128 opens on the Z2-oriented surface of the first support body 58.

[0060] The first piston portion 130 slides in the Z direction on the inner surface of the first cylinder bore 128. A first cover member 132 is mounted on the first support body 58 to block the Z2 direction opening of the first cylinder bore 128. A first force-applying member 134 is mounted between the first piston portion 130 and the first cover member 132. The first force-applying member 134 applies force to the first piston portion 130 in the Z1 direction. The first force-applying member 134 is, for example, a compression coil spring. The first force-applying member 134 can also be a rubber component, etc.

[0061] The first retaining portion 124 protrudes from the first piston portion 130 in the Z2 direction. The first retaining portion 124 passes through the first cover member 132. At the end of the first retaining portion 124 in the protruding direction (Z2 direction), a first retaining surface 124a is provided. The first retaining surface 124a is a conical convex surface.

[0062] The receiving component 126 is mounted on the second base portion 28 to face the first holding portion 124. The receiving component 126 has a concave first receiving surface 126a that can contact the Z2 direction end of the first holding portion 124. The first receiving surface 126a is a conical concave surface.

[0063] In such a first origin reset mechanism 18, when the worktable unit 14 is in the unlocked state, the first holding part 124 is in the unlocked position. Figure 4 (The position of the first holding part 124 is shown). In this state, since the first holding surface 124a is not pressed by the first piston part 130 toward the first receiving surface 126a, the worktable unit 14 can move relative to the base member 12 along the XY plane.

[0064] With the worktable unit 14 locked by the first origin reset mechanism 18, air is supplied to the first cylinder 122, causing the first piston 130 to move in the Z2 direction. As a result, since the first holding surface 124a presses against the first receiving surface 126a, the worktable unit 14 returns to its origin position relative to the base member 12 and is locked. That is, in the locked state, the worktable unit 14 cannot move relative to the base member 12 along the XY plane.

[0065] In this embodiment, the first force-applying member 134 applies force to the first piston portion 130 in the direction opposite to the first receiving surface 126a. As a result, when a pressure of less than or equal to the minimum operating pressure of the pressure reducing valve (not shown) is applied to the first cylinder portion 122, excessive pressing force (origin reset force) from the first holding portion 124 to the receiving member 126 can be suppressed.

[0066] like Figure 2 and Figure 4As shown, the second origin reset mechanism 20 can lock the worktable unit 14 relative to the worktable support 48 when it has returned to the origin position. Figure 4 As shown, the second origin reset mechanism 20 includes a second cylinder portion 136 and a second holding portion 138. The second cylinder portion 136 has a second cylinder bore 140, a second piston portion 142, a second cover member 144, and a second force application member 146. The second cylinder bore 140 is formed in the central portion of the first support body 58 in a manner extending in the Z direction. The second cylinder bore 140 opens on the Z1-oriented surface of the first support body 58.

[0067] The second piston portion 142 slides in the Z direction on the inner surface of the second cylinder bore 140. A second cover portion 144 is mounted on the first support body 58 to block the Z1 direction opening of the second cylinder bore 140. A second force-applying member 146 is mounted between the second piston portion 142 and the second cover portion 144. The second force-applying member 146 applies force to the second piston portion 142 in the Z2 direction. The second force-applying member 146 is, for example, a compression coil spring. The second force-applying member 146 can also be a rubber component, etc.

[0068] The second retaining part 138 includes a rod portion 148 and a retaining body 150. The rod portion 148 protrudes from the second piston portion 142 in the Z1 direction. The rod portion 148 passes through the second cover member 144. The retaining body 150 is mounted on the protruding end of the rod portion 148. The retaining body 150 is formed in a flat plate shape. The retaining body 150 has a flat second retaining surface 150a facing the Z1 direction. The second retaining surface 150a can press the second receiving surface 110a of the worktable plate 110 facing the Z2 direction in the Z1 direction.

[0069] In this second origin reset mechanism 20, when the worktable body 50 is in the unlocked state, the second holding part 138 is in the unlocked position. Figure 4 (The position of the second holding part 138 shown). In this state, since the second holding surface 150a is not pressed by the second piston part 142 toward the second receiving surface 110a, the worktable body 50 can tilt about the first axis Ax1 and about the second axis Ax2.

[0070] With the worktable body 50 locked by the second origin reset mechanism 20, air is supplied to the second cylinder 136, causing the second piston 142 to move in the Z1 direction. As a result, since the second holding surface 150a presses against the second receiving surface 110a, the worktable body 50 returns to its origin position relative to the worktable support 48 and is locked. That is, in the locked state, the worktable body 50 cannot tilt relative to the worktable support 48 about the first axis Ax1, nor can it tilt about the second axis Ax2.

[0071] In this embodiment, the second force-applying member 146 applies force to the second piston portion 142 in the direction opposite to the second receiving surface 110a. As a result, when a pressure of less than or equal to the minimum operating pressure of the pressure reducing valve (not shown) is applied to the second cylinder portion 136, excessive pressing force (origin reset force) from the second holding portion 138 on the worktable body 50 can be suppressed.

[0072] like Figure 6 As shown, the pressing mechanism 22 is disposed on the base member 12 and presses the worktable unit 14 in the Y2 direction (upward). The pressing mechanism 22 has a pair of third cylinder parts 152, a connecting member 154, and a pressing part 156. The pair of third cylinder parts 152 are disposed on the first base member 26. The pair of third cylinder parts 152 are arranged in the X direction. The third cylinder part 152 has a third cylinder bore 158, a third piston part 160, a third cover member 162, a third force-applying member 166, and a rod part 164.

[0073] A third cylinder bore 158 is formed in the first base portion 26 extending in the Y direction. The third cylinder bore 158 opens on the side surface of the first base portion 26 in the Y1 direction. A third piston portion 160 slides on the inner surface of the third cylinder bore 158 in the Y direction. A third cover member 162 is mounted on the first base portion 26 to block the Y1 end of the third cylinder bore 158. A third force-applying member 166 is provided in the third cylinder bore 158 to apply force to the third piston portion 160 in the Y1 direction. The third force-applying member 166 is, for example, a compression coil spring. The third force-applying member 166 may also be a rubber component, etc. A rod portion 164 protrudes from the third piston portion 160 in the Y1 direction. The rod portion 164 passes through the third cover member 162.

[0074] The connecting member 154 connects the Y1-direction ends of a pair of rods 164 to each other. The pressing part 156 extends in the Y direction. The Y1-direction end of the pressing part 156 is fastened relative to the connecting member 154 by a plurality of fastening members 167. The fastening members 167 are, for example, threaded members.

[0075] like Figure 7 As shown, the pressing part 156 is inserted into the guide groove 172 formed in the first base part 26. The guide groove 172 communicates with the first through hole 32 (see reference). Figure 6 The guide groove 172 includes a first groove portion 174 and a second groove portion 176. The second groove portion 176 communicates with the first groove portion 174 and is open in the Z2 direction of the first base portion 26. The X-direction dimension of the first groove portion 174 is larger than the X-direction dimension of the second groove portion 176.

[0076] The pressing part 156 includes a first portion 168 disposed in the first groove 174 and a second portion 170 disposed in the second groove 176. The X-direction dimension of the first portion 168 is larger than the X-direction dimension of the second groove 176. This prevents the pressing part 156 from disengaging from the guide groove 172 in the Z2 direction. Figure 6 As shown, a flat pressing surface 156a is provided on the end face of the pressing part 156 in the Y2 direction. The pressing surface 156a contacts the outer peripheral surface 82a of the roller part 82.

[0077] like Figure 4 As shown, the tilt suppression unit 24 suppresses the tilting of the worktable body 50 relative to the worktable unit 14 due to gravity. The tilt suppression unit 24 has a fourth cylinder part (tilt suppression cylinder part) 178 and a contact part 180. The fourth cylinder part 178 includes a fourth cylinder bore 182, a fourth piston part 184, a fourth cover part 186, and a fourth force application part (tilt suppression force application part) 188.

[0078] The fourth cylinder bore 182 is formed at the end of the first support body 58 in the Y1 direction, extending in the Z direction. The fourth cylinder bore 182 opens on the Z1-facing surface of the first support body 58.

[0079] The fourth piston portion 184 slides in the Z direction on the inner surface of the fourth cylinder bore 182. A fourth cover component 186 is mounted on the first support body 58 to block the Z1 direction opening of the fourth cylinder bore 182. A fourth force-applying component 188 is mounted between the fourth piston portion 184 and the fourth cover component 186. The fourth force-applying component 188 applies force to the fourth piston portion 184 in the Z2 direction. In other words, the fourth force-applying component 188 applies force to the contact portion 180 in a direction separating it from the worktable body 50. The fourth force-applying component 188 is, for example, a compression coil spring. The fourth force-applying component 188 can also be a rubber component, etc.

[0080] The contact portion 180 protrudes from the fourth piston portion 184 in the Z1 direction. The contact portion 180 penetrates the fourth cover member 186. A contact surface 180a is provided at the protruding end of the contact portion 180. The contact surface 180a is a curved surface that protrudes in an arc shape in the Z1 direction. The contact surface 180a is opposite to the end of the first worktable main body portion 96 in the Y1 direction.

[0081] Furthermore, when the flexible unit 10 is configured with the Y1 direction as the gravity direction and the worktable unit 14 is in the unlocked state, the worktable unit 14 tends to move downward relative to the base member 12 due to its own weight. In this embodiment, since the pressing part 156 presses the roller part 82 of the worktable unit 14 in the Y2 direction (upward), it is possible to suppress the worktable unit 14 from shifting downward relative to the base member 12 from the origin position.

[0082] Specifically, in this embodiment, by supplying air to each of the pair of third piston portions 160, the pair of third piston portions 160 are pressed upward. As a result, the pressing portion 156 is pushed upward by the third piston portions 160, thus pressing the roller portion 82 of the worktable unit 14 upward.

[0083] When the third piston portion 160 moves upward along the third cylinder bore 158, the third force-applying member 166 is compressed, resulting in a spring force acting on the third piston portion 160. This spring force increases as the upward movement of the third piston portion 160 increases. Therefore, with the worktable unit 14 at its origin (a state where the weight of the worktable unit 14 is balanced by the pressing force generated by the pressing portion 156), the third piston portion 160 can be positioned at the middle of its stroke.

[0084] Additionally, when the flexible unit 10 is configured with the Y1 direction set as the gravity direction, and the worktable body 50 is in the unlocked state, such as Figure 8 As shown, the worktable unit 14 is prone to tilting relative to the worktable support 48 due to its own weight, causing the upper end of the worktable body 50 to protrude more in the Z1 direction than the lower end.

[0085] In this embodiment, such as Figure 9 As shown, by supplying air to the fourth piston 184 of the tilt suppression unit 24, the fourth piston 184 is moved in the Z1 direction. As a result, since the contact surface 180a presses against the lower end of the worktable body 50 in the Z1 direction, tilting of the worktable body 50 relative to the worktable support 48 due to its own weight can be suppressed. That is, even when the flexible unit 10 is arranged with the Y1 direction set as the gravity direction, tilting of the worktable body 50 relative to the worktable support 48 due to its own weight can be suppressed.

[0086] When the fourth piston section 184 moves in the Z1 direction, the fourth force-applying member 188 is compressed, resulting in a spring force acting on the fourth piston section 184. This spring force increases as the amount of movement of the fourth piston section 184 in the Z1 direction increases. Therefore, with the worktable body 50 in its origin position (a state where the weight of the worktable body 50 is balanced by the pressing force generated by the contact section 180), the fourth piston section 184 can be positioned at the middle of its stroke.

[0087] Furthermore, with the worktable body 50 supported by the contact portion 180, the contact portion 180 and the fourth piston portion 184 can move in the Z2 direction. Therefore, for example, with the worktable body 50 supported by the worktable support portion 48, when an external force is applied to the worktable body 50, the worktable body 50 can tilt about the first axis Ax1, causing the upper end of the worktable body 50 to protrude further in the Z1 direction than the lower end.

[0088] According to this embodiment, since the flexible unit 10 has a pressing portion 156 provided on the base member 12 and pressing the worktable unit 14 upward, it is possible to suppress the worktable unit 14 from moving downward relative to the base member 12 due to its own weight. Therefore, a better flexible unit 10 can be provided.

[0089] (Second Implementation)

[0090] Next, the flexible unit 10A according to the second embodiment will be described. In the flexible unit 10A according to this embodiment, the same reference numerals are used for the same constituent elements as those in the flexible unit 10 of the first embodiment, and detailed descriptions thereof are omitted. In the flexible unit 10A, the same configuration as the flexible unit 10 can achieve the same effect.

[0091] Figure 10 This is a cross-sectional view illustrating the flexible unit 10A according to the second embodiment. Figure 10 As shown, the flexible unit 10A includes a control device 200 for controlling the movement of the third cylinder section 152. In the flexible unit 10A, each of the third cylinder sections 152 is provided with an exhaust port 201 that communicates with the outside through a portion 203 of the third cylinder bore 158 that is further in the Y2 direction than the third piston section 160. The exhaust port 201 can discharge air from this portion 203 of the third cylinder bore 158 to the outside. The control device 200 includes a valve 202, a control unit (controller) 204, a position sensor 206, and a pressure sensor 208.

[0092] Valve 202 is provided in the supply and discharge flow path 212 communicating with the pressure chamber 210 of each third piston portion 160. The pressure chamber 210 is provided between the third piston portion 160 and the third cover member 162. In other words, the pressure chamber 210 is located below the third piston portion 160. Valve 202 can steplessly control the pressure of the fluid in the pressure chamber 210. Furthermore, the fluid can be, for example, air, but oil can also be used.

[0093] Valve 202 is, for example, a servo valve. Valve 202 controls the flow rate of fluid supplied to the pressurization chamber 210. Valve 202 includes an outlet 214, a supply port 216, and a discharge port 218. The outlet 214 communicates with the supply and discharge flow path 212. Fluid (compressed fluid) is supplied to the supply port 216 from a supply source not shown. The discharge port 218 communicates with outside air. Valve 202 supplies fluid to the pressurization chamber 210 by connecting the supply port 216 to the outlet 214. Valve 202 discharges fluid from the pressurization chamber 210 to the outside by connecting the outlet port 214 to the discharge port 218. Valve 202 is not limited to a servo valve; it can also be an electro-pneumatic regulator.

[0094] Position sensor 206 detects the position of pressing part 156. Position sensor 206 is provided on the first base part 26. The detection signal of position sensor 206 is output to control unit 204. Pressure sensor 208 detects the pressure of pressurization chamber 210. Pressure sensor 208 is provided, for example, in supply and discharge flow path 212. The detection signal of pressure sensor 208 is output to control unit 204.

[0095] The control unit 204 includes an arithmetic unit 220 and a storage unit 222. The arithmetic unit 220 is composed of a processor, such as a CPU (Central Processing Unit) or a GPU (Graphics Processing Unit). That is, the arithmetic unit 220 is composed of processing circuitry.

[0096] The arithmetic unit 220 includes a position acquisition unit 224, a pressure acquisition unit 226, and a valve control unit 228. The position acquisition unit 224, pressure acquisition unit 226, and valve control unit 228 can be implemented by the arithmetic unit 220 executing a program stored in the storage unit 222. Alternatively, at least a portion of the position acquisition unit 224, pressure acquisition unit 226, and valve control unit 228 may be implemented using integrated circuits such as ASICs (Application Specific Integrated Circuits) or FPGAs (Field-Programmable Gate Arrays). Furthermore, at least a portion of the position acquisition unit 224, pressure acquisition unit 226, and valve control unit 228 may be constructed using electronic circuits containing discrete components.

[0097] Storage unit 222 comprises volatile memory (not shown) and non-volatile memory (not shown). Examples of volatile memory include RAM (Random Access Memory). This volatile memory serves as the processor's working memory, temporarily storing data required for processing or computation. Examples of non-volatile memory include ROM (Read-Only Memory) and flash memory. This non-volatile memory serves as storage memory, storing programs, tables, mappings, etc. At least a portion of storage unit 222 may also include a processor, integrated circuit, or the like described above.

[0098] The position acquisition unit 224 acquires the position of the worktable unit 14 based on the signal detected by the position sensor 206. The pressure acquisition unit 226 acquires the pressure of the pressurization chamber 210 based on the signal detected by the pressure sensor 208.

[0099] Valve control unit 228 controls the operation of valve 202. Valve control unit 228 provides feedback on the operation of control valve 202 to position the worktable unit 14 at a predetermined origin position. Valve control unit 228 provides feedback on the operation of control valve 202 based on the position acquired by position acquisition unit 224. Valve control unit 228 provides feedback on the operation of control valve 202 based on the pressure acquired by pressure acquisition unit 226.

[0100] Specifically, the valve control unit 228 includes a position control unit 230 and a pressure control unit 232. The position control unit 230 calculates the offset of the worktable unit 14 relative to the origin position based on a predetermined origin position signal and a position signal corresponding to the position of the worktable unit 14 acquired by the position acquisition unit 224. Furthermore, the origin position signal is stored in the storage unit 222. Based on this offset, the position control unit 230 calculates the pressure (set pressure) required in the pressurization chamber 210 to position the worktable unit 14 at the origin position. The position control unit 230 outputs a set pressure signal corresponding to the set pressure.

[0101] The pressure control unit 232 calculates and outputs a control signal for the valve 202 based on a set pressure signal and a pressure signal corresponding to the pressure in the pressurized chamber 210 acquired by the pressure acquisition unit 226. The control signal output from the pressure control unit 232 is supplied to the valve 202 via a power amplifier (not shown). The valve 202 changes its opening degree based on the control signal supplied from the power amplifier.

[0102] When the worktable unit 14 is positioned lower than the origin, the valve control unit 228 controls the operation of the valve 202 to increase the opening degree of the valve 202. As a result, the pressure in the pressure chamber 210 increases, causing the third piston 160 to move upward relative to the base member 12. Consequently, as the worktable unit 14 moves upward relative to the base member 12, its position approaches the origin.

[0103] On the other hand, when the worktable unit 14 is positioned above the origin, the valve control unit 228 controls the operation of the valve 202 to reduce the opening degree of the valve 202. As a result, the pressure in the pressure chamber 210 decreases, causing the third piston 160 to move downwards relative to the base member 12. Consequently, as the worktable unit 14 moves downwards relative to the base member 12, its position approaches the origin.

[0104] In this embodiment, the valve control unit 228 provides feedback on the operation of the control valve 202 to keep the worktable unit 14 at the origin position. Therefore, even if the position of the worktable unit 14 deviates from the origin position without any external force being applied to it, the valve control unit 228 can return the position of the worktable unit 14 to the origin position.

[0105] (Third implementation method)

[0106] Next, the flexible unit 10B according to the third embodiment will be described. In the flexible unit 10B according to this embodiment, the same reference numerals are used for the same constituent elements as those in the flexible unit 10 according to the first embodiment, and detailed descriptions thereof are omitted. In the flexible unit 10B, the same configuration as the flexible unit 10 can achieve the same effect.

[0107] Figure 11 This is a cross-sectional view illustrating the flexible unit 10B according to the third embodiment. (See diagram below.) Figure 11 As shown, the flexible unit 10B has a pressing mechanism 22a that replaces the pressing mechanism 22 described above.

[0108] The pressing mechanism 22a has a pair of slide valves 252a and 252b, a connecting flow path 254, a switching valve 256, a connecting component 154, and a pressing part 156. The pair of slide valves 252a and 252b are arranged in the X direction.

[0109] The slide valve 252a includes a valve bore 258, a sleeve 260, a top cover 262, a retaining ring 264, a valve core 266, a stem 268, an inlet port 270, an outlet port 272, an air port 274, and a connecting passage 276. The valve bore 258 extends along the Y direction. The valve bore 258 opens in the base member 12 on a side surface (the downward-facing side surface) facing the Y1 direction. The sleeve 260 is formed in a cylindrical shape. The sleeve 260 is made of metal, for example, but is not limited thereto. The sleeve 260 is disposed in the valve bore 258.

[0110] A top cover 262 is disposed at the end of the valve hole 258 in the Y1 direction. The top cover 262 prevents the sleeve 260 from disengaging in the Y1 direction. A through hole 278 is formed in the top cover 262 through which the rod portion 268 passes. A guide portion 280 is provided on the inner circumferential surface of the through hole 278. The guide portion 280 guides the rod portion 268 so that the rod portion 268 can move smoothly relative to the top cover 262 in the Y direction. A retaining ring 264 prevents the top cover 262 from disengaging from the valve hole 258. A valve chamber 282 is formed inside the sleeve 260.

[0111] A valve core 266 is disposed in a valve chamber 282. The valve core 266 slides in the Y direction on the inner circumferential surface of the sleeve 260. The valve core 266 is made of metal, for example, but is not limited thereto. The valve core 266 divides the valve chamber 282 into a first chamber 284 and a second chamber 286. The first chamber 284 is located below the valve core 266 (in the Y1 direction). In other words, the first chamber 284 is formed between the valve core 266 and the top cover 262. In the first chamber 284, a force-applying member 288 is disposed that applies force upwards (in the Y2 direction) to the valve core 266. The second chamber 286 is located above the valve core 266 (in the Y2 direction). In the second chamber 286, a force-applying member 290 applies force downwards (in the Y1 direction) to the valve core 266. Each force-applying member 288, 290 is, for example, a compression coil spring. An annular groove 292 is formed in the middle portion of the valve core 266 in the Y direction.

[0112] A rod 268 extends downward (in the Y1 direction) from the valve core 266. The rod 268 passes through the insertion hole 278 of the top cover 262. At the extended end of the rod 268, an external thread 296 is provided, which engages with the internal thread 294 formed in the connecting member 154. A position adjusting nut 298 and a fixing nut 300 are screwed onto the external thread 296. The position adjusting nut 298 can adjust the position of the valve core 266 within the valve chamber 282 so that, when the worktable unit 14 is placed at the origin, the valve core 266 is located at a predetermined reference position. The fixing nut 300 prevents the position adjusting nut 298 from loosening.

[0113] Each of the inlet port 270, outlet port 272, air port 274, and connecting passage 276 is formed to communicate with each other through a hole formed in the first base portion 26 and a hole formed in the sleeve 260. The inlet port 270 allows fluid to be introduced into the valve chamber 282. The outlet port 272 can communicate with the annular groove 292. The air port 274 communicates with the second chamber 286. The inlet port 270, outlet port 272, and air port 274 are arranged in this order facing the Y2 direction.

[0114] The connecting passage 276 connects the first chamber 284 to the annular groove 292. A variable throttling section 301 is provided in the connecting passage 276. The variable throttling section 301 can change the flow path cross-sectional area of ​​the connecting passage 276.

[0115] Slide valve 252b is constructed in essentially the same manner as slide valve 252a. Slide valve 252b lacks the inlet port 270, outlet port 272, connecting passage 276, and variable throttling section 301 found in slide valve 252a. A pair of slide valves 252a and 252b are interconnected via a connecting flow passage 254. The connecting flow passage 254 connects the connecting passage 276 of one slide valve 252a to the first chamber 284 of the other slide valve 252b. A position adjusting nut 298 is not provided on the stem portion 268 of slide valve 252b. Furthermore, an annular groove 292 is not provided on the valve core 266 of slide valve 252b.

[0116] Switch valve 256 switches the supply and discharge flow path 302, which is connected to inlet port 270. Switch valve 256 has outlet port 304 and supply port 306. Outlet port 304 is connected to supply and discharge flow path 302. Fluid (compressed fluid) from a supply source (not shown) is supplied to supply port 306. In the open state of switch valve 256, fluid from the supply source is guided to inlet port 270 via supply and discharge flow path 302. In the closed state of switch valve 256, the fluid supply from the supply source to supply and discharge flow path 302 is stopped.

[0117] The switching valve 256 is opened when the flexible unit 10B is used and closed when the flexible unit 10B is not used. When closed, the switching valve 256 remains in the closed state. This allows for energy consumption reduction of the flexible unit 10B. In particular, when the sleeve 260 is made of metal, closing the switching valve 256 when the flexible unit 10B is not used minimizes fluid leakage (air leakage).

[0118] The flexible unit 10B includes a control unit 308 that controls the operation of the switching valve 256. The control unit 308 includes an arithmetic unit (not shown) and a storage unit (not shown). The arithmetic unit may be configured as a processor such as a CPU or GPU. That is, the arithmetic unit is composed of processing circuitry. In the flexible unit 10B, the switching valve 256 may also be configured to allow manual switching between an open and closed valve state.

[0119] Next, the operation of the flexible unit 10B will be explained. Figures 12-14 This is a partially omitted operational illustration of the flexible unit 10B according to the third embodiment. When the worktable unit 14 is located above the origin position, as... Figure 11 and Figure 12 As shown, in slide valve 252a, the inlet port 270 is closed by the valve core 266. Additionally, in each slide valve 252a, the outlet port 272 communicates with the annular groove 292. Furthermore, the air port 274 communicates with the second chamber 286.

[0120] Therefore, the fluid in the first chamber 284 of the slide valve 252a is discharged to the outside via the connecting passage 276, the annular groove 292, and the discharge port 272. Similarly, the fluid in the first chamber 284 of the slide valve 252b is discharged to the outside via the connecting flow passage 254, the connecting passage 276, the annular groove 292, and the discharge port 272. Thus, the valve core 266 moves downward relative to the base member 12 under the force of the force-applying member 290. Consequently, since the worktable unit 14 moves downward relative to the base member 12, it can be brought closer to the origin position.

[0121] When the workbench unit 14 is located below the origin, such as Figure 13 As shown, in slide valve 252a, inlet port 270 communicates with an annular groove 292, and outlet port 272 is closed by valve core 266. Furthermore, air port 274 communicates with second chamber 286. Thus, fluid supplied from a supply source (not shown) to inlet port 270 is guided to first chamber 284 via an annular groove 292 and connecting passage 276. Additionally, fluid introduced from inlet port 270 of slide valve 252a into annular groove 292 and connecting passage 276 of slide valve 252a is guided to first chamber 284 of slide valve 252b via connecting flow path 254 (see reference). Figure 11 ).

[0122] As a result, the pressure in the annular groove 292 and the first chamber 284 increases in the slide valve 252a, and the pressure in the first chamber 284 increases in the slide valve 252b, causing the valve core 266 to move upward relative to the base member 12. As a result, since the worktable unit 14 moves upward relative to the base member 12, it is possible to bring the worktable unit 14 closer to the origin position.

[0123] In this embodiment, by adjusting the position nut 298, the valve core 266 is adjusted to become the position at the origin of the worktable unit 14. Figure 14 The position is shown. In this case, the valve core 266 of the slide valve 252a closes the inlet port 270 and the outlet port 272 at the origin position. In other words, the annular groove 292 of the slide valve 252a is not connected to both the inlet port 270 and the outlet port 272. Thus, the first chamber 284 of each slide valve 252a, 252b is sealed.

[0124] In this state, the weight of the worktable unit 14, etc., is balanced by the force generated by the fluid (compressed air) sealed in the first chamber 284 of the pair of slide valves 252a, 252b, and the worktable unit 14 stops at the origin position. Here, the weight of the worktable unit 14, etc., includes the weight of the worktable unit 14 and the weight of the chuck component (hand) mounted on the worktable unit 14.

[0125] In this flexible unit 10B, since the fluid flows through the variable throttling section 301 as it flows through the connecting passage 276, the vibration of the base component 12 during fluid supply and discharge to the first chamber (pressurization chamber) 284 can be suppressed. The flow path cross-sectional area (throttling capacity) of the variable throttling section 301 can be adjusted according to the weight of the worktable unit 14.

[0126] Furthermore, without using the flexible unit 10B, the control unit 308 closes the switching valve 256 to seal the supply and discharge flow path 302.

[0127] In this embodiment, the valve core 266 of the slide valve 252a and the pressing part 156 are connected by the connecting member 154. Therefore, even if the position of the worktable unit 14 deviates from the origin position without any external force being applied to it, the position of the worktable unit 14 can be returned to the origin position by means of the slide valve 252a.

[0128] (Fourth Implementation)

[0129] Next, the flexible unit 10C according to the fourth embodiment will be described. In the flexible unit 10C according to this embodiment, the same reference numerals are used for the same constituent elements as those in the flexible units 10, 10A, and 10B according to the first to third embodiments, and their detailed descriptions are omitted. In the flexible unit 10C, the same configuration as that in the flexible units 10, 10A, and 10B can achieve the same effect.

[0130] Figure 15 This is a cross-sectional view illustrating the flexible unit 10C according to the fourth embodiment. (See diagram below.) Figure 15As shown, the flexible unit 10C has a pressing mechanism 22b that replaces the pressing mechanism 22 described above.

[0131] The pressing mechanism 22b includes a pair of third cylinder sections 152, a slide valve 400, a switching valve 256, a connecting member 154, and a pressing part 156. Each of the third cylinder sections 152 is provided with the aforementioned exhaust port 201. The slide valve 400 is located in the X direction of the third cylinder section 152.

[0132] The spool valve 400 includes a valve port 258, a sleeve 260, a top cover 262, a retaining ring 264, a valve core 266, a stem 268, an inlet port 270, an outlet port 272, an air port 274, an exhaust port 275, and a connecting passage 276. The external thread 296 of the stem 268 engages with the internal thread 294 formed in the connecting member 154. A position adjusting nut 298 and a fixing nut 300 are screwed onto the external thread 296. A variable throttling section 301 is provided in the connecting passage 276. The connecting passage 276 is connected to the supply and discharge flow passages 212. The supply and discharge flow passages 212 communicate with the pressurization chambers 210 of each of the third cylinder sections 152.

[0133] The switching valve 256 connects to the supply and discharge flow path 302 via the inlet port 270. The flexible unit 10C includes a control unit 308 that controls the operation of the switching valve 256.

[0134] In this flexible unit 10C, when the worktable unit 14 is located above the origin, the inlet port 270 is closed by the valve core 266. Thus, the fluid in the pressurized chamber 210 of each of the third cylinder sections 152 is discharged to the outside via the supply and discharge flow path 212, the connecting path 276, the annular groove 292, and the discharge port 272.

[0135] As a result, in each of the third cylinder sections 152, due to the decrease in pressure in the pressurization chamber 210, the third piston section 160 moves downward relative to the base member 12. Consequently, as the worktable unit 14 moves downward relative to the base member 12, the position of the worktable unit 14 approaches the origin position.

[0136] On the other hand, when the worktable unit 14 is located below the origin position, in the slide valve 400, the inlet port 270 communicates with the annular groove 292, and the outlet port 272 is closed by the valve core 266. Thus, fluid supplied from a supply source (not shown) to the inlet port 270 is guided via the annular groove 292, the connecting passage 276, and the supply and discharge flow paths 212 to the pressurization chambers 210 of each third cylinder 152. As a result, in each third cylinder 152, due to the increased pressure in the pressurization chambers 210, the third piston 160 moves upward relative to the base member 12. Consequently, as the worktable unit 14 moves upward relative to the base member 12, the position of the worktable unit 14 approaches the origin position.

[0137] In this embodiment, the valve core 266 of the slide valve 400 closes the inlet port 270 and the outlet port 272 at the origin position of the worktable unit 14. In other words, the annular groove 292 of the slide valve 400 is not connected to either the inlet port 270 or the outlet port 272. As a result, the pressure chamber 210 of each third cylinder section 152 is sealed.

[0138] In this state, the weight of the worktable unit 14, etc., is balanced by the force generated by the fluid (compressed air) sealed in the pressurized chamber 210 of the pair of third cylinders 152, and the worktable unit 14 stops at the origin position.

[0139] With this configuration, it can achieve the same effect as the flexible units 10, 10A, and 10B mentioned above.

[0140] Regarding the above-described embodiments, the following notes are further disclosed.

[0141] (Note 1)

[0142] The flexible units 10, 10A, 10B, and 10C disclosed herein include: a base member 12; a worktable unit 14 configured to move relative to the base member along an XY plane, in which the vertical direction is defined as the Y direction and the direction perpendicular to the Y direction is defined as the X direction; a flexible mechanism 16 mounted between the base member and the worktable unit in a manner that allows it to move relative to the base member and the worktable unit in the X and Y directions; and a pressing part 156 disposed on the base member and pressing the worktable unit upward.

[0143] With this configuration, since the flexible unit has a pressing part that is provided on the base member and presses the worktable unit upward, it is possible to suppress the worktable unit from moving downward relative to the base member due to its own weight. Therefore, a better flexible unit can be provided.

[0144] (Note 2)

[0145] In the flexible unit described in Appendix 1, the worktable unit may have a shaft portion 84 located at the center of the worktable unit in the X direction, the shaft portion extending toward the base member via the hole portion 17 of the flexible mechanism, and the pressing portion pressing the shaft portion upward.

[0146] With this configuration, it is possible to suppress the worktable unit being pressed by the pressing part from tilting circumferentially along the axis due to its own weight.

[0147] (Note 3)

[0148] In the flexible unit described in Appendix 2, the worktable unit may have a hollow roller portion 82, in which the shaft portion is disposed internally and is rotatably disposed relative to the shaft portion, and the pressing portion presses the roller portion upward in a state of contact with the outer peripheral surface 82a of the roller portion.

[0149] With this configuration, since the pressing part is in contact with the outer peripheral surface of the roller part, the frictional resistance between the pressing part and the worktable unit can be relatively small. Therefore, for example, the worktable unit can move smoothly relative to the base member along the Y direction.

[0150] (Note 4)

[0151] The flexible unit described in Appendix 3 may also include a cylinder 152 for pushing the pressing part upward.

[0152] With this configuration, the cylinder can press the worktable unit upward by pushing the pressing part upward.

[0153] (Note 5)

[0154] The flexible unit described in Appendix 4 may include a force-applying component 166 for applying downward force to the pressing part.

[0155] With this configuration, the piston of the cylinder can be positioned in the middle of its stroke when the weight of the worktable unit is balanced with the pressing force generated by the pressing part.

[0156] (Note 6)

[0157] In any of the flexible units described in Appendices 1 to 5, the worktable unit may include: a worktable support 48; a worktable body 50, which is tiltable about an axis along the X direction and is disposed on the worktable support; and a tilt suppression part 24, which is disposed on the worktable support and suppresses the tilting of the worktable body relative to the worktable unit due to gravity.

[0158] With this configuration, by setting the flexible units in the Y direction as the up-down direction, it is possible to suppress the tilting of the main body of the worktable relative to the worktable units due to its own weight.

[0159] (Note 7)

[0160] In the flexible unit described in Appendix 6, the tilt suppression part may press the lower end of the worktable body in the opposite direction to the worktable support part.

[0161] With this configuration, tilting caused by the weight of the workbench body can be easily suppressed.

[0162] (Note 8)

[0163] The flexible unit described in Appendix 7 may include: a contact portion 180 that contacts the worktable body; and a tilt-suppressing cylinder portion 178 for pushing the contact portion toward the worktable body.

[0164] With this configuration, the tilt suppression cylinder can press the lower end of the worktable body in the opposite direction to the worktable support by pushing the contact part.

[0165] (Note 9)

[0166] The flexible unit described in Appendix 8 may include a tilt-suppressing force-applying member 188, which applies force to the contact portion in the direction of separation from the worktable body.

[0167] With this configuration, the piston of the tilt suppression cylinder can be positioned in the middle of its stroke when the weight of the worktable body is balanced with the pressing force generated by the contact part.

[0168] (Postscript 10)

[0169] The flexible unit described in any of Appendices 1 to 9 may include: a cylinder for moving the pressing part relative to the base member in the Y direction; a valve 202 for controlling the flow rate of fluid supplied to and discharged from the pressurization chamber 210 of the cylinder; and a valve control unit 228 for controlling the operation of the valve, the valve control unit providing feedback control of the valve operation so that the worktable unit is located at the origin position when no external force is applied to the worktable unit.

[0170] With this configuration, even if the position of the worktable unit deviates from the origin position without any external force applied to it, the valve control unit can return the position of the worktable unit to the origin position.

[0171] (Postscript 11)

[0172] In the flexible unit described in Appendix 10, there may be a position acquisition unit 224 that acquires the position of the worktable unit relative to the base member in the vertical direction based on a signal detected by the position sensor 206, and the valve control unit controls the valve operation based on the position acquired by the position acquisition unit.

[0173] With this configuration, the position of the worktable unit can be returned to the origin position with greater accuracy.

[0174] (Postscript 12)

[0175] In the flexible unit described in Appendix 10, there may be a pressure acquisition unit 226 that acquires the pressure of the pressurization chamber based on a signal detected by a pressure sensor 208, and the valve control unit controls the operation of the valve based on the pressure acquired by the pressure acquisition unit.

[0176] With this configuration, the position of the worktable unit can be returned to the origin position with greater accuracy.

[0177] (Postscript 13)

[0178] The flexible unit described in any of the notes 1 to 9 may have the following characteristics:

[0179] Slide valves 252a and 252b, each slide valve having a valve chamber 282 disposed on the base component and a valve core 266 movable in the Y direction within the valve chamber; and a connecting component 154 connecting the valve core and the pressing part.

[0180] With this configuration, the valve core of the slide valve and the pressing part are connected by a connecting component. Therefore, even if the position of the worktable unit deviates from the origin position without any external force applied to it, the position of the worktable unit can be returned to the origin position by adjusting the position of the valve core of the slide valve.

[0181] (Postscript 14)

[0182] In the flexible unit described in Appendix 13, the valve chamber may include: a first chamber 284 located below the valve core; and a second chamber 286 located above the valve core. A force-applying member 290 is disposed in the second chamber, which applies downward force to the valve core. When the worktable unit is located above the origin position without external force applied to it, fluid in the first chamber is discharged to the outside of the first chamber, thereby causing the valve core to move downward relative to the base member by the force of the force-applying member. When the worktable unit is located below the origin position without external force applied to it, fluid is supplied to the first chamber, thereby causing the valve core to move upward relative to the base member while pressing the force-applying member.

[0183] With this configuration, the workbench unit can be returned to its original position using a simple setup.

[0184] (Postscript 15)

[0185] In the flexible unit described in Appendix 14, the valve core may have an annular groove 292 formed therein, and the slide valve may have: an inlet port 270 for introducing fluid into the valve chamber; an outlet port 272 that communicates with the annular groove; and a connecting passage 276 that connects the first chamber to the annular groove. When the worktable unit is located above the origin position without any external force applied to it, the inlet port is closed by the valve core, and the fluid in the first chamber is discharged from the outlet port via the connecting passage and the annular groove. As a result, the valve core moves downward relative to the base member by the force applied by the force member. When the worktable unit is located below the origin position without any external force applied to it, the outlet port is closed by the valve core, and the fluid is introduced into the first chamber from the inlet port via the annular groove and the connecting passage. As a result, the valve core moves upward relative to the base member while pressing the force applied by the force member.

[0186] With this configuration, the workbench unit can be returned to its original position using a simple setup.

[0187] Although this disclosure has been described in detail, it is not limited to the embodiments described above. Various additions, substitutions, modifications, and partial deletions can be made to these embodiments without departing from the spirit of this disclosure or the spirit of this disclosure derived from the content described in the claimed scope and its equivalents. Furthermore, these embodiments can also be implemented in combination. For example, in the above embodiments, the order of the various actions or the order of the various processes is shown as an example and is not limited to these. Similarly, the use of numerical values ​​or formulas in the description of the above embodiments is also relevant.

Claims

1. A flexible unit (10, 10A, 10B, 10C), characterized in that, have: Base component (12); The worktable unit (14) is configured to move relative to the base component along an XY plane in which the vertical direction is defined as the Y direction and the direction perpendicular to the Y direction is defined as the X direction. A flexible mechanism (16) is mounted between the base component and the worktable unit in a manner that allows it to move relative to the base component and the worktable unit in the X and Y directions; and The pressing part (156) is provided on the base component and presses the worktable unit upward.

2. The flexible unit according to claim 1, characterized in that, The worktable unit has a shaft portion (84) located at the center of the worktable unit in the X direction. The shaft extends toward the base component via the hole (17) of the flexible mechanism. The pressing part presses the shaft part upwards.

3. The flexible unit according to claim 2, characterized in that, The worktable unit has a hollow roller section (82) in which the shaft section is disposed internally and is rotatably disposed relative to the shaft section. The pressing part presses the roller part upward in a state of contact with the outer peripheral surface (82a) of the roller part.

4. The flexible unit according to claim 3, characterized in that, It has a cylinder (152) for pushing the pressing part upward.

5. The flexible unit according to claim 4, characterized in that, It includes a force-applying component (166) for applying downward force to the pressing part.

6. The flexible unit according to any one of claims 1 to 5, characterized in that, The workbench unit is equipped with: Workbench support (48); The worktable body (50) is tiltably mounted on the worktable support about an axis along the X direction; and Tilting suppression part (24) is provided on the worktable support part and suppresses the tilting of the worktable body relative to the worktable unit due to gravity.

7. The flexible unit according to claim 6, characterized in that, The tilt-inhibiting part presses the lower end of the worktable body in the opposite direction to the worktable support part.

8. The flexible unit according to claim 7, characterized in that, have: Contact portion (180), which contacts the worktable body; and Tilting suppression cylinder (178) is used to push the contact portion toward the worktable body.

9. The flexible unit according to claim 8, characterized in that, It is equipped with a tilt-inhibiting force-applying component (188) that applies force to the contact portion in the direction of separation from the worktable body.

10. The flexible unit according to claim 1, characterized in that, have: A cylinder portion for moving the pressing portion relative to the base component in the Y direction; Valve (202), which controls the flow rate of fluid supplied to and discharged from the pressurized chamber (210) of the cylinder; and Valve control unit (228) controls the operation of the valve. The valve control unit provides feedback control over the valve's operation so that the worktable unit remains at its origin position when no external force is applied to it.

11. The flexible unit according to claim 10, characterized in that, The system includes a position acquisition unit (224) that acquires the position of the worktable unit relative to the base component in the vertical direction based on a signal detected by a position sensor (206). The valve control unit controls the valve's operation based on the position obtained by the position acquisition unit.

12. The flexible unit according to claim 10, characterized in that, It includes a pressure acquisition unit (226) that acquires the pressure of the pressurization chamber based on a signal detected by a pressure sensor (208). The valve control unit controls the valve's operation based on the pressure acquired by the pressure acquisition unit.

13. The flexible unit according to claim 1, characterized in that, have: A slide valve (252a, 252b) having a valve chamber (282) disposed in the base component and a valve core (266) movable in the Y direction within the valve chamber; and A connecting component (154) connects the valve core and the pressing part.

14. The flexible unit according to claim 13, characterized in that, The valve chamber includes: The first chamber (284) is located below the valve core; and The second chamber (286) is located above the valve core. A force-applying component (290) is provided in the second chamber, which applies downward force to the valve core. When the worktable unit is positioned above its origin without any external force applied, the fluid in the first chamber is discharged to the outside of the first chamber, causing the valve core to move downward relative to the base component under the force of the force-applying component. When the worktable unit is located below the origin position without any external force applied to it, fluid is supplied to the first chamber, causing the valve core to move upward relative to the base component while pressing the force-applying component.

15. The flexible unit according to claim 14, characterized in that, An annular groove (292) is formed in the valve core. The slide valve has: An inlet port (270) is used to introduce fluid into the valve chamber; Discharge port (272) which is capable of communicating with the annular groove; as well as Connecting path (276), which connects the first chamber to the annular groove. When the worktable unit is positioned above the origin without any external force applied, the inlet port is closed by the valve core, and the fluid in the first chamber is discharged from the outlet port via the connecting passage and the annular groove. Consequently, the valve core moves downward relative to the base component under the force of the force-applying component. When the worktable unit is located below the origin position without any external force applied to it, the valve core closes the discharge port and fluid is introduced into the first chamber from the inlet port via the annular groove and the connecting path, thereby the valve core moves upward relative to the base component while pressing the force-applying component.

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