Tft substrate glass passage humidification chamber and control method

Abstract

This application discloses a humidification chamber and control method for a TFT substrate glass channel, belonging to the field of special glass manufacturing technology. The humidification chamber includes a chamber body with an internal cavity containing a platinum channel cooling section; a humidifying gas supply system including several steam emission pipes, each with a humidifying gas inlet and multiple jet holes located within the cavity; an exhaust system including exhaust ports located on the outer wall of the chamber, connecting the cavity to the external space and connected to a pressure regulating valve; and a control system connected to the humidifying gas supply system and the pressure regulating valve. This application can effectively suppress crystallization on the inner wall of the platinum channel, improve the yield of the substrate glass, and has the advantages of good sealing, precise control, safety, and easy maintenance.

Description

Technical Field

[0001] This application belongs to the field of special glass manufacturing technology, specifically relating to a TFT substrate glass channel humidification chamber and its control method. Background Technology

[0002] TFT substrate glass is a key material for liquid crystal displays (LCDs). Its production process requires precise temperature control and homogenization of the molten glass through platinum channels. The cooling section of the platinum channels is responsible for reducing the molten glass from high temperatures to the viscosity and temperature required for forming, making it a crucial factor in determining glass quality. However, during cooling, volatile components in the molten glass (such as boron oxide and silicon oxide) easily volatilize and condense on the relatively cool inner walls of the platinum channels. In a dry environment, these condensates react with the platinum walls, forming crystal nuclei, which leads to crystallization (devitrification) in the glass. Crystallization defects severely damage the optical uniformity and mechanical strength of the glass, significantly reducing product yield.

[0003] To address these issues, existing technologies attempt to introduce water vapor around the platinum channel to increase ambient humidity and inhibit volatile condensation. However, current humidification methods generally suffer from the following shortcomings: First, uneven humidification; simply introducing steam at one or more points cannot create a stable and uniform high-humidity environment around the channel, leaving localized areas at risk of crystallization. Second, poor control precision; the lack of real-time monitoring and feedback adjustment of humidity and temperature makes it difficult to adapt to dynamic changes in different production conditions. Third, insufficient sealing; the connection between the platinum channel and the external structure is difficult to seal effectively, leading to moisture leakage and fluctuations in environmental parameters. Fourth, poor safety; the lack of pressure safety control measures poses safety hazards. Fifth, inconvenient maintenance; the complex overall structure makes repairing or replacing the internal platinum channel cumbersome, impacting production efficiency.

[0004] Therefore, how to provide a device that can create a stable, uniform, and controllable humidification environment, while also possessing high sealing performance, safety, and ease of maintenance, has become a technical problem that urgently needs to be solved in this field. Summary of the Invention

[0005] The purpose of this invention is to provide a humidification chamber and control method for a TFT substrate glass channel, so as to overcome the technical problems of uneven humidification, insufficient sealing and inconvenient maintenance in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: This invention provides a TFT substrate glass channel humidification chamber, comprising: The chamber contains a cavity with a platinum channel cooling section. A humidifying gas supply system includes several steam emission pipes, each of which is provided with a humidifying gas inlet and multiple jet holes, the jet holes being located within a receiving cavity; The exhaust system includes an exhaust port disposed on the outer wall of the chamber, the exhaust port connecting the accommodating cavity to the external space, and the exhaust port being connected to a pressure regulating valve for maintaining a slight positive pressure within the accommodating cavity; The control system is connected to the humidifying gas supply system and the pressure regulating valve.

[0007] According to one embodiment of the present invention, the room body is a modular structure, including a detachable door panel, and the door panel is provided with an observation window.

[0008] According to one embodiment of the present invention, the system further includes an access control interlock switch, which is disposed between the door panel and the room body and connected to the control system, for sending a signal to the control system when the door panel is opened.

[0009] According to one embodiment of the present invention, a high-temperature sealing structure is further included, which is disposed at the connection between the chamber body and the platinum channel cooling section.

[0010] According to one embodiment of the present invention, the high-temperature sealing structure includes an insulation plate and a ceramic fiber seal. One side of the insulation plate is in contact with the inner wall of the accommodating cavity, and the ceramic fiber seal is disposed on the other side of the insulation plate. The ceramic fiber seal is in contact with the outer wall of the platinum channel cooling section.

[0011] According to one embodiment of the present invention, the humidifying gas supply system further includes a preheating net disposed inside the steam emission pipe.

[0012] According to one embodiment of the present invention, a nozzle is provided at the jet hole.

[0013] According to one embodiment of the present invention, the plurality of vapor emission pipes include a plurality of first pipes disposed on the inner wall of the top and bottom of the accommodating cavity, and a plurality of second pipes disposed on the side wall of the accommodating cavity, wherein the first pipes are horizontally disposed, and the axial direction of the second pipes is parallel to the axial direction of the platinum channel cooling section.

[0014] According to one embodiment of the present invention, the system further includes a sensor and a safety relief valve disposed on the chamber body, wherein the sensor is connected to the control system and is used to detect environmental parameters within the accommodating cavity.

[0015] The present invention also provides a control method for a TFT substrate glass channel humidification chamber, used to control the TFT substrate glass channel humidification chamber of the above embodiments: The target environmental parameters within the containment cavity are preset according to the production process, including the target humidity value and the target pressure value; Obtain the actual environmental parameters inside the accommodating cavity, including the actual humidity value and the actual pressure value; The actual humidity value is compared with the target humidity value, and the output parameters of the steam generator are adjusted through the control system based on the comparison result. The actual pressure value is compared with the target pressure value, and the opening of the pressure regulating valve is adjusted by the control system according to the comparison result to maintain the pressure in the accommodating cavity at a slightly positive pressure.

[0016] Compared with the prior art, the present invention has the following beneficial technical effects: This invention provides a humidification chamber for TFT substrate glass channels. By setting up a chamber with an internal accommodating cavity, the cooling section of the platinum channel is enclosed in an independent space, effectively solving the problem of insufficient sealing caused by moisture diffusion to the outside. The humidifying gas supply system uses several steam emission pipes with multiple jet holes, allowing the humidifying gas to be sprayed evenly from multiple points, forming a uniform and stable high-humidity environment within the accommodating cavity, avoiding the risk of crystallization caused by uneven local humidity. The exhaust system has exhaust ports on the outer wall of the chamber and is connected to a pressure regulating valve. By maintaining a slight positive pressure within the accommodating cavity, it prevents the infiltration of dry external air and ensures the stability of the humidification environment. The control system is connected to the humidifying gas supply system and the pressure regulating valve, providing the hardware foundation for subsequent precise adjustment. The overall structure is compact and rationally laid out, facilitating maintenance and operation of the internal platinum channel.

[0017] This invention also provides a control method for a humidification chamber in a TFT substrate glass channel. By pre-setting target humidity and pressure values ​​according to the production process, a precise control benchmark is provided for the humidification process. After obtaining the actual humidity and pressure values ​​within the humidification chamber, the actual humidity value is compared with the target humidity value. Based on the comparison result, the output parameters of the steam generator are adjusted by the control system to dynamically regulate the humidification amount, ensuring that the humidity within the humidification chamber is always maintained within the process requirements. The actual pressure value is compared with the target pressure value. Based on the comparison result, the opening of the pressure regulating valve is adjusted by the control system to adjust the exhaust volume in real time to maintain a slightly positive pressure state within the humidification chamber, preventing external air intrusion and interference with the humidification environment. This method, through a closed-loop feedback control mechanism, achieves precise control of the environmental parameters within the humidification chamber, effectively overcoming the shortcomings of poor control precision in existing technologies and ensuring the stability and reliability of the humidification effect. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the TFT substrate glass channel humidification chamber in an embodiment of the present invention.

[0019] Figure 2This is a schematic diagram of the humidification chamber of the TFT substrate glass channel in an embodiment of the present invention.

[0020] Figure 3 This is a schematic diagram of a steam emission pipe in an embodiment of the present invention.

[0021] Figure 4 This is a flowchart of the TFT substrate glass channel humidification chamber control method in an embodiment of the present invention.

[0022] In the diagram, 1. Room body; 101. Observation window; 102. Door panel; 103. Air conditioner; 2. Platinum channel cooling section; 3. Humidifying gas inlet; 31. Steam emission pipe; 310. Preheating net; 311. Jet nozzle; 312. Nozzle; 4. Exhaust port; 41. Pressure regulating valve; 5. High-temperature sealing structure; 6. Sensor; 7. Safety pressure relief valve; 8. Fluid glass. Detailed Implementation

[0023] In the production of TFT substrate glass, the cooling section of the platinum channel is prone to condensation and crystallization of glass volatiles due to dry environment, which seriously affects product yield. Existing humidification methods suffer from uneven humidification, poor sealing, and low control precision, making it difficult to meet the requirements of high-end glass production.

[0024] Based on the above background, this invention proposes a humidification chamber for TFT substrate glass channels and its control method. The chamber is enclosed to form an independent accommodating cavity, and a steam emission pipe with multiple jet nozzles is used to achieve uniform humidification. A pressure regulating valve maintains a slight positive pressure within the cavity. This solution effectively solves the technical problems of unstable humidification environment and unreliable sealing in existing technologies, providing a uniform and controllable high-humidity protection environment for the platinum channel cooling section.

[0025] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0027] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installed," "equipped with," "sleeved / connected," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a number" means two or more, unless otherwise explicitly specified.

[0029] Example 1 This embodiment provides a humidification chamber for a TFT substrate glass channel, as shown in the reference. Figure 1 As shown, the humidification room includes a room body 1, a humidification gas supply system, an exhaust system, and a control system.

[0030] The chamber 1 contains a platinum channel cooling section 2. During the substrate glass production process, the high-temperature molten glass 8 flows through the platinum channel cooling section 2, where it is cooled to the viscosity and temperature required for molding. The chamber 1 adopts a closed structure design, completely enclosing the platinum channel cooling section 2 within an independent cavity, isolating the cavity from the external environment and providing a sealed space foundation for establishing a subsequent humidification environment. The airtightness of the chamber 1 ensures that the humidifying gas does not diffuse outward, while also preventing the intrusion of dry external air, which is a prerequisite for maintaining a stable environment within the cavity.

[0031] The humidifying gas supply system includes several vapor emission pipes 31. Each vapor emission pipe 31 is equipped with a humidifying gas inlet 3 and multiple jet holes 311, which are located within the containment cavity. Humidifying gas supplied by an external gas source enters the vapor emission pipe 31 through the humidifying gas inlet 3, and is then uniformly ejected into the containment cavity through the multiple jet holes 311 distributed along the pipe. The arrangement of multiple jet holes 311 allows the humidifying gas to be released at multiple points within the containment cavity, avoiding the phenomenon of excessively high or low humidity caused by single-point injection. This creates a uniform and stable high-humidity environment around the platinum channel cooling section 2, thereby effectively suppressing the condensation and crystallization of volatiles in the molten glass 8 on the inner wall of the channel. The arrangement of several vapor emission pipes 31 can further optimize gas distribution and ensure uniform humidity throughout the containment cavity.

[0032] The exhaust system includes an exhaust port 4 located on the outer wall of the chamber 1. The exhaust port 4 connects the accommodating cavity to the external space and is connected to a pressure regulating valve 41. Gas within the accommodating cavity can be discharged to the external space through the exhaust port 4. The pressure regulating valve 41 is used to adjust the exhaust flow rate, thereby controlling the gas pressure within the accommodating cavity. With continuous input of humidifying gas, adjusting the opening of the pressure regulating valve 41 maintains a slightly positive pressure within the accommodating cavity, higher than the external atmospheric pressure. This slightly positive pressure environment effectively prevents dry external air from seeping into the accommodating cavity through tiny gaps, avoiding interference from the external environment with the humidity within the cavity and ensuring the stability and reliability of the humidification effect.

[0033] The control system is connected to the humidifying gas supply system and the pressure regulating valve 41. As the command center of the humidification chamber, the control system can receive external commands or preset parameters and send control signals to the humidifying gas supply system and the pressure regulating valve 41 to achieve coordinated regulation of the humidifying gas supply and exhaust volume. The control system provides the hardware foundation for subsequent precise control of the environmental parameters within the humidification chamber, enabling the humidification chamber to operate automatically.

[0034] Example 2 This embodiment further defines the structure of the chamber 1 based on Embodiment 1. (Refer to...) Figure 2 As shown, the chamber 1 has a modular structure, assembled from multiple detachable modules, including a door panel 102. The door panel 102 is detachable and can be connected to the main body of chamber 1 via a quick-lock mechanism or high-precision bolts, facilitating rapid opening and closing. An observation window 101 is provided on the door panel 102, allowing operators to observe the operation of the platinum channel cooling section 2 within the accommodating cavity in real time without opening the door panel 102. The observation window 101 is made of quartz glass, which has excellent high-temperature resistance and optical transparency, maintaining clear light transmission even in high-temperature and high-humidity environments, preventing fogging on the glass surface due to temperature differences or moisture from affecting the observation effect. When inspection or maintenance of the platinum channel cooling section 2 is required, the door panel 102 can be quickly removed, opening chamber 1 to enter the accommodating cavity, facilitating convenient operation. The detachable design of the door panel 102 significantly improves maintenance efficiency and reduces equipment downtime.

[0035] As a further improvement, this embodiment also includes an access control interlock switch. The access control interlock switch is located between the door panel 102 and the chamber 1 and is connected to the control system. When the door panel 102 or the observation window 101 is opened, the access control interlock switch immediately sends a signal to the control system. Upon receiving this signal, the control system can trigger an alarm device to alert the operator and automatically adjust the output parameters of the humidifying gas supply system, such as reducing the humidifying gas supply or suspending humidification, to prevent sudden changes in the high humidity environment inside the chamber and excessive moisture leakage due to door opening. In large-scale production systems, the access control interlock switch can be directly connected to the DCS central control room for remote monitoring and alarm functions. This design effectively avoids environmental fluctuations and safety risks caused by door opening during misoperation or maintenance, ensuring operational standardization and equipment safety.

[0036] Example 3 This embodiment, based on embodiment 1, further includes a high-temperature sealing structure 5. (Refer to...) Figure 1 As shown, the high-temperature sealing structure 5 is located at the connection between the chamber 1 and the platinum channel cooling section 2, specifically at the inlet end where the platinum channel cooling section 2 enters the chamber 1 and the outlet end where it exits the chamber 1. Since the platinum channel cooling section 2 needs to penetrate the chamber 1, the annular gap between it and the chamber 1 is the main channel for moisture leakage and also a potential path for external dry air to enter the cavity. The high-temperature sealing structure 5 fills this connection, effectively blocking the communication path between the cavity and the external space, preventing the humidifying gas from leaking out, and simultaneously preventing external air from infiltrating, ensuring the sealing of the cavity.

[0037] The high-temperature sealing structure 5 specifically includes an insulation board and a ceramic fiber seal. The insulation board is made of high-temperature resistant insulation material. One side of the insulation board contacts the inner wall of the accommodating cavity, and the other side is equipped with a ceramic fiber seal, which contacts the outer wall of the platinum channel cooling section 2. The insulation board serves as thermal insulation, reducing heat conduction from the high-temperature platinum channel cooling section 2 to the chamber 1, thus preventing excessively high local temperatures in the chamber 1. The ceramic fiber seal is a flexible sealing material woven from high-purity ceramic fibers, possessing excellent high-temperature resistance and elastic compression characteristics. It can adapt to the thermal expansion and deformation of the platinum channel cooling section 2 at high temperatures, maintaining tight contact with the outer wall of the channel at all times, ensuring reliable sealing during long-term use.

[0038] This composite sealing structure forms two lines of defense: the first is an insulation board, which provides heat insulation and initial sealing; the second is a ceramic fiber sealant, which provides flexible compensation and final sealing. The two seals work together to ensure airtightness under high-temperature conditions, while the flexible material absorbs thermal expansion displacement, preventing seal failure due to thermal stress. This significantly improves the sealing reliability and service life of the humidifier in high-temperature environments.

[0039] Example 4 This embodiment further optimizes the humidifying gas supply system based on Embodiment 1. (Refer to...) Figure 3 As shown, the humidifying gas supply system also includes a preheating mesh 310, which is installed inside the steam emission pipe 31. Humidifying gas supplied by an external gas source enters the steam emission pipe 31 through the humidifying gas inlet 3 and first flows through the preheating mesh 310 for preheating. The preheating mesh 310 is made of a metal material with good thermal conductivity and has a large heat exchange surface area, enabling it to quickly transfer heat to the flowing humidifying gas. The heat source for the preheating mesh 310 can be heat conducted by external heating elements within the pipe.

[0040] The preheating effect of the preheating mesh 310 raises the temperature of the humidifying gas to near the temperature inside the containment cavity, preventing condensation from forming due to a large temperature difference between the low-temperature humidifying gas and the high-temperature environment when the gas is directly ejected. Condensation affects the uniformity of humidification, leading to excessively high humidity in some areas or water droplets forming. It may even drip onto the surface of the platinum channel cooling section 2, causing localized temperature fluctuations and thermal stress, which negatively impacts the uniform cooling of the molten glass 8. The preheating mesh 310 effectively avoids this problem, ensuring that the humidifying gas entering the containment cavity remains in a dry vapor state at all times.

[0041] As a further improvement, a nozzle 312 is provided at the jet orifice 311. The nozzle 312 is installed at the jet orifice 311 of the steam emission pipe 31, and can guide and atomize the ejected humidifying gas. The inner orifice shape and size of the nozzle 312 are optimized to allow the humidifying gas to be ejected at high speed in a finer particle state, evenly diffusing to all areas within the containment cavity. The orifice diameter of the nozzle 312 can be selected according to actual process requirements; for example, the orifice diameter of the nozzle 312 can be 2mm to accommodate humidifying gases of different flow rates and pressures. Through the atomization effect of the nozzle 312, the humidifying gas is more evenly distributed within the containment cavity, ensuring full contact with all parts of the platinum channel cooling section 2, further improving the uniformity and stability of the humidification effect.

[0042] The preheating mesh 310 ensures that the humidifying gas enters the containment cavity in a dry vapor state, while the nozzle 312 ensures that the vapor is evenly diffused throughout the cavity. The combination of the two significantly improves the performance of the humidifying gas supply system, providing a stable, uniform, and non-condensing high-humidity protective environment for the platinum channel cooling section 2.

[0043] Example 5 This embodiment, based on Embodiment 1, further defines the arrangement of the steam emission pipe 31. (Refer to...) Figure 1 and Figure 3As shown, the vapor emission pipes 31 include multiple first pipes disposed on the inner walls of the top and bottom of the receiving cavity, and multiple second pipes disposed on the side walls of the receiving cavity. In a specific implementation, two first pipes are disposed on the top inner wall and two on the bottom inner wall, and one second pipe is disposed on each of the side walls, for a total of six vapor emission pipes 31 distributed within the receiving cavity. The first pipes are horizontally arranged, with their axial direction perpendicular to the axial direction of the platinum channel cooling section 2, so that humidifying gas is sprayed from above and below the platinum channel cooling section 2 in a direction perpendicular to the channel axial direction onto the channel surface; the axial direction of the second pipes is parallel to the axial direction of the platinum channel cooling section 2, so that humidifying gas is evenly sprayed from the side along the length of the channel, covering the entire axial range of the channel. The vapor emission pipes 31 can be installed on the inner wall of the receiving cavity by means of fixed brackets to ensure the stability of the pipe position and the accuracy of the spray direction, and to avoid pipe displacement due to airflow impact or vibration.

[0044] This three-dimensional, surrounding pipe layout allows humidifying gas to cover the entire outer surface of the platinum channel cooling section 2 from multiple directions and angles. The first pipe provides vertical spray coverage, focusing on humidifying the top and bottom areas of the channel; the second pipe provides lateral coverage, uniformly humidifying the areas on both sides of the channel. The vertical and lateral jet airflows converge and complement each other within the containment cavity, forming a three-dimensional humidifying airflow field. This ensures that every surface of the platinum channel cooling section 2 is in a uniform and stable high-humidity environment, completely eliminating humidification dead zones. Simultaneously, the multi-pipe layout increases the total supply and distribution density of humidifying gas, resulting in a faster and more uniform humidity response within the containment cavity, effectively suppressing the tendency for volatiles in the molten glass 8 to condense locally on the inner wall of the channel. Through this all-around, multi-angle humidifying gas spray, the ambient humidity around the platinum channel cooling section 2 remains highly uniform, providing reliable humidification assurance for the production of high-quality substrate glass.

[0045] Example 6 This embodiment, based on embodiment 1, adds a sensor 6 and a safety relief valve 7. (Refer to...) Figure 1 As shown, sensor 6 is mounted on the chamber 1, specifically on its side wall or top, with its sensing end extending into the cavity to detect environmental parameters within the cavity in real time. Sensor 6 includes a temperature and humidity sensor and a pressure sensor. The temperature and humidity sensor detects the temperature and humidity within the cavity, while the pressure sensor detects the gas pressure. Sensor 6 is connected to the control system, converting the real-time collected environmental parameter data into electrical signals and transmitting them to the control system, providing a real-time and accurate data basis for the control system's adjustment decisions. The accuracy and response speed of sensor 6 directly affect the adjustment effect of the control system; therefore, a high-precision, fast-response industrial-grade sensor is selected to ensure timely detection of minute fluctuations in environmental parameters within the cavity.

[0046] The safety relief valve 7 is installed on the chamber 1, typically at the top or upper side wall, and communicates with the accommodating cavity. The safety relief valve 7 has a set safety pressure threshold, which is slightly higher than the upper limit of the normal operating micro-positive pressure range, but lower than the maximum pressure that the chamber 1 structure can withstand. When the pressure inside the accommodating cavity exceeds the set safety threshold due to abnormal conditions (such as exhaust system failure, pressure regulating valve 41 malfunction, excessive humidifying gas input, or control system failure), the safety relief valve 7 automatically opens, quickly discharging excess gas to the external space and rapidly reducing the pressure inside the accommodating cavity. Once the pressure inside the cavity returns to below the safety threshold, the safety relief valve 7 automatically closes, restoring the accommodating cavity to a sealed state. This process is entirely completed by the mechanical structure of the safety relief valve 7 itself, without the need for control system intervention. Even in the event of control system failure, it can still operate reliably, forming a final safety line independent of the control system.

[0047] Sensor 6 and safety relief valve 7 together constitute the monitoring and safety protection system of the humidification chamber. Sensor 6 is responsible for monitoring environmental parameters during daily operation, providing data support for the precise adjustment of the control system; safety relief valve 7, as a passive safety device, is automatically triggered in extreme abnormal situations to prevent excessive pressure from damaging the structure of chamber 1 or endangering the safety of operators. The real-time monitoring function of sensor 6 can also provide early warning or proactive adjustment through the control system when the pressure rises abnormally but has not yet reached the trigger threshold of safety relief valve 7, eliminating the abnormality in its early stages. The coordinated work of the two ensures both precise control of the humidification chamber's daily operation and guarantees equipment and personnel safety in extreme situations, significantly improving the overall reliability and safety of the humidification chamber.

[0048] Example 7 This embodiment provides a control method for a humidification chamber in a TFT substrate glass channel, which is based on the humidification chamber described in the above embodiment. (Refer to...) Figure 4 As shown, this control method achieves precise regulation of the environmental parameters within the accommodative cavity through the coordinated operation of the control system and various actuators.

[0049] Before humidification, the target environmental parameters within the condensation chamber, including target humidity and target pressure values, must be preset according to the production process requirements. The setting of target values ​​is based on factors such as the type of glass being produced, the drawing amount, and the forming temperature requirements. Different types of substrate glass have different requirements for the humidity and pressure of the cooling section environment. Therefore, it is necessary to make personalized settings according to the specific production process parameters to ensure that the humidification environment is precisely matched with the production process.

[0050] Before starting the humidification chamber, high-purity nitrogen can be introduced into the cavity for purging. Nitrogen purging removes existing air and impurities from the cavity, preventing adverse reactions between air impurities and the molten glass or platinum channels at high temperatures. It also provides a clean foundation for establishing a pure, high-humidity environment. After purging, the steam generator is started, and humidifying gas with a set dew point value is introduced into the cavity through the humidifying gas supply system.

[0051] After the humidification chamber starts operating, the control system continuously acquires actual environmental parameters within the humidification chamber via sensor 6, including actual humidity, actual temperature, and actual pressure. Sensor 6 collects data in real time and transmits it to the control system as input for control adjustment. The control system compares the actual humidity value with the preset target humidity value and calculates the deviation. Based on the comparison result, the control system sends adjustment commands to the steam generator to adjust its output parameters. When the actual humidity is lower than the target humidity, the control system increases the output of the steam generator, raises the dew point setpoint of the humidifying gas, and / or increases the intake air flow; when the actual humidity is higher than the target humidity, the control system decreases the output of the steam generator and reduces the supply of humidifying gas. Through this closed-loop feedback adjustment mechanism, the humidity within the humidification chamber is always maintained within the allowable fluctuation range of the target value.

[0052] Simultaneously, the control system compares the actual pressure value with the preset target pressure value and calculates the deviation. Based on the comparison result, the control system sends an adjustment command to the pressure regulating valve 41, adjusting the opening of the pressure regulating valve 41. When the actual pressure is higher than the target pressure, the control system increases the opening of the pressure regulating valve 41, accelerating the exhaust speed and reducing the pressure inside the cavity; when the actual pressure is lower than the target pressure, the control system decreases the opening of the pressure regulating valve 41, slowing down the exhaust speed and increasing the pressure inside the cavity. Through continuous adjustment, the pressure inside the containment cavity is always maintained at a slightly positive pressure state, that is, higher than the external atmospheric pressure but not exceeding the safety threshold. The maintenance of the slightly positive pressure can refer to a specific value, such as about 30 Pa, to ensure effective prevention of external dry air infiltration without placing excessive burden on the structure of the chamber 1.

[0053] During normal operation, the molten glass 8 continuously flows through the platinum channel cooling section 2. The control system monitors environmental parameters in real time and dynamically adjusts the supply and exhaust of humidifying gas to ensure that the platinum channel cooling section 2 is always in an optimal humidification and protection environment. When the ambient temperature fluctuates, the control system can also adjust the temperature inside the cavity through the air conditioner 103. The air conditioner 103 is connected to the chamber 1 and supplies temperature-controlled air into the cavity, forming a circulation through the bottom return air vent to achieve precise control of the cavity temperature.

[0054] When operators need to open door 102 for maintenance or observation, the access control interlock switch immediately sends a signal to the control system the moment door 102 is opened. Upon receiving this signal, the control system automatically triggers the alarm to alert the operator and simultaneously adjusts the output parameters of the humidifying gas supply system, such as reducing the humidifying gas supply or suspending humidification, to prevent sudden changes in the high humidity environment inside the containment cavity and the leakage of large amounts of moisture due to door opening. The access control interlock switch is directly connected to the DCS central control room, enabling remote monitoring and alarm functions to ensure operational safety.

[0055] When the pressure inside the containment chamber rises abnormally due to abnormal conditions such as exhaust system malfunction, pressure regulating valve 41 failure, or excessive humidifying gas input, the control system first detects the pressure rise trend through sensor 6 and attempts to regulate it by increasing the opening of pressure regulating valve 41. If the pressure continues to rise and exceeds the set safety threshold of safety relief valve 7, safety relief valve 7 automatically opens to release pressure, quickly discharging excess gas to the external space. It automatically closes after the pressure inside the chamber returns to below the safety threshold. This process does not require intervention from the control system and can still operate reliably even if the control system completely fails, forming a last line of defense independent of the control system.

[0056] This control method achieves precise control of humidity, pressure, and temperature within the humidification chamber through a complete process of preset target values, real-time monitoring, and closed-loop feedback adjustment, ensuring the stability and reliability of the humidification environment. All components work collaboratively: sensor 6 provides the data foundation, the control system performs decision-making calculations, the steam generator regulates humidity, pressure regulating valve 41 regulates pressure, air conditioner 103 regulates temperature, the access control interlock ensures operational safety, and the safety relief valve 7 provides passive safety protection. This multi-layered collaborative control mechanism effectively suppresses crystallization on the inner wall of the platinum channel cooling section 2, significantly improving the product quality and production yield of the substrate glass, while simultaneously ensuring equipment operation safety and operator safety.

[0057] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A TFT substrate glass channel humidification chamber, characterized in that, include: The room body (1) has an internal cavity containing a platinum channel cooling section (2); The humidifying gas supply system includes several steam emission pipes (31), each of which is provided with a humidifying gas inlet (3) and multiple jet holes (311), the jet holes (311) being located within the accommodating cavity; The exhaust system includes an exhaust port (4) disposed on the outer wall of the chamber (1), the exhaust port (4) connecting the accommodating cavity to the external space, and the exhaust port (4) being connected to a pressure regulating valve (41), the pressure regulating valve (41) being used to maintain a slight positive pressure in the accommodating cavity; The control system is connected to the humidifying gas supply system and the pressure regulating valve (41).

2. The TFT substrate glass channel humidification chamber according to claim 1, characterized in that, The room body (1) is a modular structure, including a detachable door panel (102), and the door panel (102) is provided with an observation window (101).

3. The TFT substrate glass channel humidification chamber according to claim 2, characterized in that, It also includes an access control interlock switch, which is located between the door panel (102) and the room body (1) and connected to the control system, and is used to send a signal to the control system when the door panel (102) is opened.

4. The TFT substrate glass channel humidification chamber according to claim 1, characterized in that, It also includes a high-temperature sealing structure (5), which is disposed at the connection between the chamber (1) and the platinum channel cooling section (2).

5. The TFT substrate glass channel humidification chamber according to claim 4, characterized in that, The high-temperature sealing structure (5) includes an insulation board and a ceramic fiber seal. One side of the insulation board is in contact with the inner wall of the accommodating cavity, and the other side of the insulation board is provided with the ceramic fiber seal. The ceramic fiber seal is in contact with the outer wall of the platinum channel cooling section (2).

6. The TFT substrate glass channel humidification chamber according to claim 1, characterized in that, The humidifying gas supply system also includes a preheating net (310), which is installed inside the steam emission pipe (31).

7. The TFT substrate glass channel humidification chamber according to claim 6, characterized in that, A nozzle (312) is provided at the air jet hole (311).

8. The TFT substrate glass channel humidification chamber according to claim 1, characterized in that, The plurality of steam emission pipes (31) include a plurality of first pipes disposed on the inner wall of the top and bottom of the accommodating cavity, and a plurality of second pipes disposed on the side wall of the accommodating cavity. The first pipes are horizontally disposed, and the axial direction of the second pipes is parallel to the axial direction of the platinum channel cooling section (2).

9. The TFT substrate glass channel humidification chamber according to claim 1, characterized in that, It also includes a sensor (6) and a safety relief valve (7) installed on the chamber (1). The sensor (6) is connected to the control system and is used to detect environmental parameters inside the accommodating cavity.

10. A method for controlling a humidification chamber in a TFT substrate glass channel, characterized in that, For controlling the humidification chamber of the TFT substrate glass channel according to any one of claims 1 to 9, comprising: The target environmental parameters within the containment cavity are preset according to the production process, including the target humidity value and the target pressure value; Obtain the actual environmental parameters inside the accommodating cavity, including the actual humidity value and the actual pressure value; The actual humidity value is compared with the target humidity value, and the output parameters of the steam generator are adjusted through the control system based on the comparison result. The actual pressure value is compared with the target pressure value, and the opening of the pressure regulating valve (41) is adjusted by the control system according to the comparison result to maintain the pressure in the accommodating cavity as a slight positive pressure.

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