Data updating method of radio frequency power supply, radio frequency power supply and radio frequency plasma power supply system

Abstract

This application discloses a data update method for an RF power supply, an RF power supply, and an RF plasma power supply system. The data update method includes the following steps: identifying one or more functional components in the RF power supply that require data updates; acquiring update data corresponding to the one or more functional components; optimizing the update data to reduce the computational load and data processing volume per unit time required for data updates; rewriting the original data in the one or more functional components based on the optimized update data; and / or adding update data corresponding to the one or more functional components based on the update data. This application shortens the update time of the RF power supply and improves its update efficiency by first identifying the functional components that need updating, then acquiring the update data, and optimizing the update data.

Description

Technical Field

[0001] This application relates to the field of radio frequency power supply technology, and in particular to a data update method for radio frequency power supply, radio frequency power supply and radio frequency plasma power supply system. Background Technology

[0002] Radio frequency (RF) power supplies, as power electronic devices that convert AC mains power into high-frequency AC power, are widely used in semiconductor manufacturing, plasma processing, medical equipment, communications, and many other fields. Their operational stability and functional versatility directly affect the performance and product quality of downstream equipment. As the application scenarios for RF power supplies continue to expand, user requirements for their functionality are becoming increasingly complex, necessitating regular data updates to optimize functions, fix vulnerabilities, and adapt to new application scenarios.

[0003] Currently, common RF power supply version updates use firmware to completely overwrite all data. However, the actual data that needs to be updated in an RF power supply version update is limited. As a result, the RF power supply not only updates the data that needs to be updated, but also updates duplicate data during the version update process, wasting resources and causing the RF power supply to take a long time to update, which affects the working efficiency of the RF power supply. Summary of the Invention

[0004] The purpose of this application is to provide a data update method for an RF power supply, an RF power supply, and an RF plasma power supply system, which can shorten the update time of the RF power supply and improve the update efficiency of the RF power supply.

[0005] This application discloses a data update method for an RF power supply, used to update the data of various functional components of the RF power supply. The data update method includes the following steps: Step S1: Identify one or more functional components in the RF power supply that require data updates; Step S2: Obtain the data to be updated corresponding to the one or more functional components to be updated; Step S3: Optimize the data to be updated to reduce the amount of computation required for data updates and the amount of data processed per unit time; Step S4: Based on the optimized data to be updated, rewrite the original data in the one or more functional components to be updated; and / or, based on the data to be updated, add new data to be updated corresponding to the one or more functional components to be updated.

[0006] Optionally, in step S1, the data to be updated only refers to the functional component data of the RF power supply, without changing the core data and user setting data of the RF power supply. Step S3 specifically includes: The same data parts in the data to be updated of multiple functional components are merged, transmitted and written to the memory of the RF power supply in a unified manner to avoid the repeated transmission and writing of the same data. Step S4 specifically includes: The processor compares the current version number of each functional component with the target version number corresponding to the data to be updated; For functional components whose version numbers have changed, the original data of the functional component is rewritten according to the data to be updated; and / or, for newly added functional components for which corresponding data is not stored in the memory, the corresponding stored data of the functional component is added according to the data to be updated, thereby completing the data update of the RF power supply.

[0007] Optionally, the data optimization process in step S3 includes setting data update priorities, specifically: setting the same data portion in the data to be updated of each functional component as the first priority, and prioritizing its transmission and writing; setting the remaining non-identical data portion as the second priority, and executing them sequentially thereafter.

[0008] Optionally, the data optimization process in step S3 includes data merging and priority setting, specifically: merging the identical data parts in the data to be updated of multiple functional components and marking them as the first priority, which are then prioritized for transmission and writing; marking the different non-identical data parts in the data to be updated of each functional component as the second priority, which are then executed sequentially after the first priority data is updated; marking data that has little or no impact on the operation of the RF power supply as the third priority, which are then executed sequentially after the second priority data is updated or updated synchronously in the background during normal operation of the RF power supply.

[0009] Optionally, in step S2, the processor uses a partitioning judgment method to quickly identify the data to be updated. Specifically, the multiple functional components of the RF power supply are partitioned according to the data similarity, and the functional components with high data similarity are divided into the same judgment area. Alternatively, the partitioning is dynamically adjusted according to the actual operation verification results of the RF power supply, and the data similarity of each functional component is statistically analyzed in real time. The partitioning of functional components whose data similarity changes is adjusted.

[0010] Optionally, in step S2, the specific data to be updated is processed using a segmented comparison and precise update method, specifically: the original data and the data to be updated of the functional components are both segmented according to a preset length, the differences between the original data and the data to be updated are compared segment by segment, and only the segmented data with differences are extracted as precise update data.

[0011] Optionally, the RF power supply also includes at least one interface and a sensor; The interface includes a regular network port and a fast transfer port. The regular network port is used to connect to external devices, and the data transmission capacity of the regular network port is greater than that of the fast transfer port. The fast transfer port is connected to a sensor and is used to transmit at least a portion of the sensor's raw data. In step S4, the processor obtains data marked with first priority from the data to be updated from the server through the fast transfer port, and rewrites the original data in the one or more functional components to be updated based on the data marked with first priority; and / or adds new data to be updated corresponding to the one or more functional components to be updated; and The processor obtains data marked as second priority from the data to be updated from an external computer via the ordinary network port, and rewrites the original data in one or more functional components to be updated based on the data marked as second priority; and / or adds new data to be updated corresponding to the one or more functional components to be updated.

[0012] Optionally, the RF power supply is equipped with a dedicated update control circuit. The dedicated update control circuit is electrically connected to the processor, memory, and interface, and is used to independently undertake the transmission, segmentation, comparison, and writing operations of the data to be updated, which is separate from the processor's regular operation tasks. The dedicated update control circuit integrates a data cache unit for temporarily storing the data to be updated and the difference segment data.

[0013] This application also discloses an RF power supply, which includes a memory, a processor, and multiple functional components. The processor is configured to execute the data update method of the RF power supply as described above. At least one of the functional components is connected to the RF power supply motherboard via a cold-plug method. The memory stores the original data, user setting data, and initial setting data corresponding to each functional component.

[0014] This application also discloses a radio frequency plasma power supply system, which includes a radio frequency power supply, a matching unit, and a plasma chamber as described above; the power signal of the radio frequency power supply is output to the matching unit, and the matching unit performs impedance matching on the power signal and then transfers the power signal to the load of the plasma chamber.

[0015] Compared to existing methods that involve completely rewriting data via firmware updates for RF power supplies, this application employs a selective data update scheme. Data is rewritten or added only to the functional components requiring updates. Before updating, the functional components to be updated are identified, and the necessary data is obtained based on these changes. This significantly reduces the amount of data and optimizes the data to be updated, further accelerating the RF power supply update process and improving its efficiency. This not only shortens data transmission and writing time and improves update efficiency but also reduces downtime for RF power supply updates, avoiding economic losses such as production interruptions caused by equipment downtime. Ultimately, this improves the efficiency of RF power supply updates and saves resources. Attached Figure Description

[0016] The accompanying drawings, which form part of the specification, are used to provide a further understanding of the embodiments of this application and illustrate the implementation methods of this application, together with the textual description, to explain the principles of this application. Obviously, the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any creative effort. In the drawings: Figure 1 This is a schematic flowchart of the data update method according to the first embodiment of this application; Figure 2 This is a schematic flowchart of the data update method according to the second embodiment of this application; Figure 3 This is a schematic flowchart of the data update method according to the third embodiment of this application; Figure 4 This is a schematic flowchart of the data update method according to the fourth embodiment of this application; Figure 5 This is a schematic flowchart of the data update method according to the fifth embodiment of this application; Figure 6 This is a schematic diagram of the radio frequency power supply module according to the sixth embodiment of this application; Figure 7 This is a schematic diagram of the radio frequency power supply module according to the seventh embodiment of this application; Figure 8 This is a schematic diagram of the radio frequency power supply module according to the eighth embodiment of this application; Figure 9 This is a schematic diagram of the radio frequency plasma power supply system according to the ninth embodiment of this application.

[0017] Among them, 100 is the radio frequency power supply; 110 is the memory; 120 is the processor; 130 is the functional component; 131 is the first functional component; 132 is the second functional component; 133 is the FPGA; 140 is the interface; 141 is the fast transfer port; 142 is the ordinary network port; 150 is the sensor; 160 is the dedicated update control circuit; 200 is the external device; 210 is the server / cloud; 300 is the radio frequency plasma power supply system; 310 is the matching unit; and 320 is the plasma chamber. Detailed Implementation

[0018] It should be understood that the terminology, specific structural and functional details used herein are merely for describing particular embodiments and are representative. However, this application may be implemented in many alternative forms and should not be construed as being limited to the embodiments set forth herein.

[0019] The present application will now be described in detail with reference to the accompanying drawings and optional embodiments.

[0020] like Figure 1 As shown in the figure, as an embodiment of this application, a data update method for an RF power supply is disclosed. The data update method is used to update the data of various functional components of the RF power supply, and the data update method includes the following steps: Step S1: Identify one or more functional components in the RF power supply that require data updates; Step S2: Obtain the data to be updated corresponding to the one or more functional components to be updated; Step S3: Optimize the data to be updated to reduce the amount of computation required for data updates and the amount of data processed per unit time; Step S4: Based on the optimized data to be updated, rewrite the original data in the one or more functional components to be updated; and / or, based on the data to be updated, add new data to be updated corresponding to the one or more functional components to be updated.

[0021] In this embodiment, a simple data compression method is used to compress the data to be updated, reducing the data transmission volume, the processor's computational load, and the amount of data processed per unit time. Based on the optimized data to be updated, the original data in the functional components to be updated is rewritten. The processor of the RF power supply receives the optimized data to be updated and rewrites the original operating parameter data in the power amplifier module and the original threshold data in the fault diagnosis module, respectively, completing the data update of the two functional components. If there are new functional components (as in this embodiment, no new ones are added), the corresponding stored data is added based on the data to be updated, realizing accurate data update of the functional components to be updated in the RF power supply, avoiding the redundancy of rewriting all data, and reducing the computational load and improving the update efficiency through simple optimization.

[0022] like Figure 2 As shown, as a second embodiment of this application, it is a further refinement of the first embodiment described above. In step S1, the data to be updated only refers to the functional component data of the RF power supply, without changing the core data and user setting data of the RF power supply. Step S3 specifically includes: S31: Merge the identical data parts in the data to be updated of multiple functional components, transmit them uniformly and write them into the memory of the RF power supply, so as to avoid the repeated transmission and writing of the same data. Step S4 specifically includes: S41: The processor compares the current version number of each functional component with the target version number corresponding to the data to be updated; S42: For functional components whose version numbers have changed, rewrite the original data of the functional component according to the data to be updated; and / or, for newly added functional components for which corresponding data is not stored in the memory, add the corresponding stored data of the functional component according to the data to be updated, thereby completing the data update of the RF power supply.

[0023] In this embodiment, taking the data update of the power amplification module, signal processing module, and voltage detection module of the RF power supply as an example, these three modules are first identified as functional components to be updated. It is clarified that the data to be updated only applies to the data of these three functional components, without changing the core data of the RF power supply (such as factory initial control parameters) and user-defined data (such as custom power thresholds). The data to be updated for the three functional components is obtained through an external device. If the data to be updated for the power amplification module and the signal processing module contain the same basic parameter data (such as data transmission protocol parameters), the data to be updated for the voltage detection module is independent parameter data. The processor merges the identical data portions (i.e., basic parameter data shared by the power amplifier module and signal processing module) from the data to be updated of multiple functional components, transmits them uniformly, and writes them into the memory of the RF power supply. This avoids repeated transmission and writing of the same data, reducing the amount of computation required for data updates and the amount of data processed per unit time. The processor compares the current version number of each functional component with the target version number corresponding to the data to be updated. For functional components whose version numbers have changed (the version numbers of all three functional components to be updated have changed), the original data of each functional component is rewritten according to the data to be updated. In this embodiment, no new functional components are added, so no data addition operation is performed. The data synchronization update of the three functional components is completed. Through the data merging optimization method and version number comparison step, redundant data transmission is further reduced, the efficiency of synchronous update of multi-functional components is improved, and the accidental modification of core data and user-defined data is avoided.

[0024] like Figure 3 As shown, the third embodiment of this application is a further refinement of the first embodiment described above. The data optimization processing in step S3 includes setting a data update priority. Step S3 includes: S31': Optimize the data to be updated by setting the same data parts in the data to be updated of each functional component as the first priority and the other non-identical data parts as the second priority, thereby optimizing the data to be updated. Specifically, the same data portion in the data to be updated for each functional component is set as the first priority, and its transmission and writing are performed first; the remaining non-identical data portions are set as the second priority, and are executed sequentially thereafter.

[0025] The optimization process in step S3 can also be achieved by setting an update order for the updated data. Data that is identical across multiple functional components is prioritized and transmitted / written first. The remaining, different data for each functional component is prioritized and updated sequentially after the data with the highest priority is updated. By prioritizing the basic configuration data common to all components and transmitting and updating it first, while prioritizing the independent data for each component and updating it sequentially after the data with the highest priority is updated, the device processes data more systematically, avoids lag, and further reduces the amount of data processed per unit time.

[0026] In step S2, the processor uses a partitioning judgment method to quickly identify the data to be updated. Specifically, the multiple functional components of the RF power supply are partitioned according to the data similarity. Functional components with high data similarity are divided into the same judgment area. Alternatively, the partitioning is dynamically adjusted according to the actual operation verification results of the RF power supply. The data similarity of each functional component is statistically analyzed in real time, and the partitioning of functional components whose data similarity changes is adjusted.

[0027] Once the functional components to be updated are identified, a "zoning judgment" method is used to find them. For example, if there are 5 components: power regulation, current detection, temperature control, frequency regulation, and alarm, components with similar data (power regulation and current detection) are grouped into one zone, and the remaining 3 are grouped into another zone. The device checks both zones simultaneously to quickly identify the components to be updated (e.g., 2 in the first zone, 2 in the second zone, the alarm module does not need to be updated). The update data of these 4 components to be updated is obtained, and it is found that they have some common basic configuration data, and the rest is their own independent data. By grouping functional components with high data similarity into the same judgment area, for example, dividing functions A and B into area 1, and functions C, D, and E into area 2, the processor performs parallel judgment on multiple judgment areas simultaneously, replacing the method of judging each functional component one by one, quickly filtering out the functional components that need to be updated and their corresponding data in each area, further shortening the identification time of the data to be updated.

[0028] Furthermore, the partitioning logic has two selectable methods: Method 1: Pre-set partitions based on the operator's experience, and classify functional components with historical data similarity higher than a preset threshold into the same area; Method 2: Dynamically adjust partitions based on the actual operation verification results of the RF power supply, and statistically analyze the data similarity of each functional component in real time. Adjust the partitions for functional components whose data similarity changes to ensure the rationality of the partitions and the efficiency of the judgment.

[0029] Based on the partition judgment, the data to be updated in each region is packaged. Specifically, for each judged region, the data to be updated corresponding to all functional components that need to be updated in that region is integrated and packaged to form the update data package for that region. For example, the data to be updated for functions A and B in region 1 is packaged into data package 1. During the update, the update data package of each region is synchronously transmitted to all functional components in that region, so as to realize the synchronous data update of multiple functional components in the same region and further shorten the update time.

[0030] like Figure 4 As shown, the fourth embodiment of this application is a further refinement of the first embodiment described above. The data optimization processing in step S3 includes data merging processing and priority setting. Step S3 includes: S31”: Merge the identical data parts in the data to be updated of multiple functional components and mark them as the first priority, and execute the transmission and writing first; mark the different non-identical data parts in the data to be updated of each functional component as the second priority, and execute them in sequence after the first priority data is updated; mark the data that has little or no impact on the operation of the RF power supply as the third priority, and execute them in sequence after the second priority data is updated or update and optimize them synchronously in the background during the normal operation of the RF power supply.

[0031] In this embodiment, identical data portions in the data to be updated of multiple functional components are merged and uniformly marked as first priority, and their transmission and writing are performed first. Different non-identical data portions in the data to be updated of each functional component are marked as second priority, and are executed sequentially after the first priority data is updated. By merging identical data, duplicate transmission and writing are reduced, and processing resources are reasonably allocated by setting priorities, thus improving update efficiency and shortening update time.

[0032] Generally, the first priority is the same data portion after merging, and the same data segment that has a greater impact on the operation of the RF power supply is selected first; the second priority is the data that has a greater impact on the operation of the RF power supply among the different data; the third priority is the data that has a smaller impact or no impact on the operation of the RF power supply; among them, the data with the third priority can be left unupdated, or updated synchronously in the background during the normal operation of the RF power supply, so as to avoid affecting the normal operation of the RF power supply and minimize the time consumed by active update.

[0033] like Figure 5 As shown, as the fifth embodiment of this application, it is a further refinement of the second embodiment described above. The radio frequency power supply further includes at least one interface and a sensor. The interface includes a regular network port and a fast transfer port. The regular network port is used to connect to external devices, and the data transmission capacity of the regular network port is greater than that of the fast transfer port. The fast transfer port is connected to a sensor and is used to transmit at least a portion of the sensor's raw data. Step S4 includes the following steps: S41: The processor obtains data marked with first priority from the data to be updated from the server through the fast transfer port, and rewrites the original data in the one or more functional components to be updated according to the data marked with first priority; and / or, adds new data to be updated corresponding to the one or more functional components to be updated; and S42: The processor obtains data marked as second priority from the data to be updated from the external computer through the ordinary network port, and rewrites the original data in the one or more functional components to be updated according to the data marked as second priority; and / or adds data to be updated corresponding to the one or more functional components to be updated.

[0034] In this embodiment, different interfaces can be used to obtain data updates at different levels. When obtaining update data, the first priority update data is obtained by the processor from the server through the fast transfer port; the second priority update data is obtained from the external device through the ordinary network port. During the update in step S4, the first priority data obtained from the fast transfer port and the second priority data obtained from the ordinary network port are used to modify or add data to the functional components to be updated.

[0035] like Figure 6 As shown, the sixth embodiment of this application is a further improvement and refinement of any of the above embodiments. In step S2, the specific data to be updated is processed using a segmented comparison and precise update method. Specifically, the original data and the data to be updated of the functional component are both segmented according to a preset length. The differences between the original data and the data to be updated are compared segment by segment. Only the segments with differences are extracted as precise update data. Based on the precise update data, the corresponding original data segments in the functional component to be updated are rewritten. The data update is achieved by using an "overwrite copy" method. There is no need to clear the original data first. The precise update data is directly copied to overwrite the corresponding difference segments in the original data, avoiding repeated updates of the entire data segment and greatly reducing the amount of updated data and update time.

[0036] Furthermore, the RF power supply is equipped with a dedicated update control circuit. This dedicated update control circuit is electrically connected to the processor, memory, and interface, and is used to independently handle the transmission, segmentation, comparison, and writing of the data to be updated, separated from the processor's regular operation tasks. The dedicated update control circuit integrates a data cache unit for temporarily storing the data to be updated and the difference segmented data. The dedicated update control circuit is connected to the processor, memory, and interface, and is specifically responsible for data update-related tasks, such as transmitting update data, segmenting data, comparing data differences, and writing data. In this way, the processor does not need to perform these tasks and can only focus on its regular operation tasks. The dedicated update control circuit includes at least one temporary storage unit (data cache unit) for temporarily storing update data and those different segmented data. When needed, the dedicated circuit directly retrieves the data from here to complete the update and further optimize the update process.

[0037] like Figure 7 As shown, as the seventh embodiment of this application, a radio frequency power supply 100 is disclosed. The radio frequency power supply 100 adopts the data update method of the radio frequency power supply 100 as described in any of the above embodiments, which can realize efficient, accurate and stable data update, and improve the operational stability and maintainability of the equipment.

[0038] Specifically, the RF power supply 100 includes a memory 110, a processor 120, and multiple functional components 130. The memory 110 is used to store the original data, data to be updated, user setting data, and initial setting data corresponding to each functional component 130. The memory 110 has a dedicated storage area for storing data of different functional components 130 to avoid data confusion. At the same time, it has a dedicated data storage area for user setting data and initial setting data to ensure that these data are not rewritten during the update process, thus ensuring the stability of user habits and initial device parameters. The processor 120 establishes a stable communication connection with the memory 110, each functional component 130, and the interface 140, enabling fast reading and writing of data and control of the operation and data update process of each functional component 130.

[0039] The multiple functional components 130 include, but are not limited to, FPGA, sensors, power amplification modules, control modules, fault diagnosis modules, etc. Each functional component 130 is used to implement different functions of the RF power supply 100, such as signal processing, data detection, power amplification, operation control, fault diagnosis, etc.

[0040] Furthermore, at least one of the functional components 130 is connected to the mainboard of the RF power supply 100 via a cold-plug method. The cold-plug method means that the functional component 130 can be replaced without disassembling the entire device while the RF power supply 100 is running normally or powered off. This method is characterized by its ease of operation and lack of impact on the overall operation of the device. Functional components 130 connected via the cold-plug method can be flexibly replaced and upgraded according to actual application needs. It allows for rapid addition of data to new functional components 130 and optimization of existing functional components 130, enhancing the expandability and maintainability of the RF power supply 100 and extending the device's lifespan.

[0041] For example, the sensor module of the RF power supply 100 is connected to the motherboard by a cold plug-in method. When it is necessary to replace the sensor with a more accurate one, the original sensor can be directly unplugged and the new sensor can be inserted. Then, the data update method of any of the above embodiments can be used to obtain the data to be updated corresponding to the new sensor. The relevant data can be added or rewritten in the memory 110 to complete the replacement and update of the sensor. There is no need to disassemble the entire RF power supply 100. The operation is simple and efficient.

[0042] like Figure 8 As shown, this eighth embodiment of the present application is a further improvement on the above-described eighth embodiment. The radio frequency power supply includes an interface 140, which includes a regular network port 142 and a fast transfer port 141. The regular network port 142 is used to connect to an external device 200, and the data transmission capacity of the regular network port 142 is greater than that of the fast transfer port 141. The fast transfer port 141 is connected to a sensor 150 and is used to transmit at least a portion of the original data from the sensor 150. During the update process, only one interface 140 is selected to connect to the external device 200 for data update, and simultaneous writing of data to both interfaces 140 is prohibited. The processor 120 monitors the usage status of the interfaces 140 in real time. If it detects that one interface 140 is transmitting and writing data, it will prohibit the other interface 140 from connecting to the external device 200 until the update operation of the current interface 140 is completed, ensuring the security and integrity of data writing and avoiding data corruption or other problems caused by simultaneous writing of data to both interfaces 140.

[0043] Specifically, the processor obtains data marked with a first priority from the data to be updated from the server through the fast transfer port, and rewrites the original data in one or more functional components to be updated based on the data marked with the first priority; and / or, adds data to be updated corresponding to the one or more functional components to be updated; the processor obtains data marked with a second priority from the data to be updated from an external computer through the ordinary network port, and rewrites the original data in one or more functional components to be updated based on the data marked with the second priority; and / or, adds data to be updated corresponding to the one or more functional components to be updated.

[0044] The fast transfer port is used to transmit the data processed by the FPGA and some of the original data from the sensor 150. The ordinary network port is used to connect to the external device 200, and the data transmission capacity of the ordinary network port is greater than that of the fast transfer port. In step S2, the processor 120 obtains the data to be updated from the external device 200 through the interface 140. The external device 200 includes an external computer or an external server. In this embodiment, after determining the functional components 130 to be updated, the processor 120 needs to obtain the update data corresponding to these functional components 130 to provide data support for subsequent rewriting or addition operations.

[0045] like Figure 9 As shown, as the ninth embodiment of this application, a radio frequency plasma power supply system 300 is disclosed. The system includes a radio frequency power supply 100, a matching unit 310 and a plasma chamber 320 as described in the above embodiments, which can achieve stable power output and improve the system's operational stability and working efficiency.

[0046] Specifically, the RF power supply 100 described in the above embodiment can achieve efficient, accurate, and stable data updates for each functional component 130, ensuring the stable operation of the RF power supply 100 and providing a stable power signal for the entire system. The matching unit 310 is used to perform impedance matching on the power signal output by the RF power supply 100. Since there may be a mismatch between the output impedance of the RF power supply 100 and the input impedance of the plasma chamber 320 load, it can cause power signal reflection, affecting power transmission efficiency and system stability. The matching unit 310 adjusts its own impedance parameters to match the output impedance of the RF power supply 100 with the input impedance of the plasma chamber 320 load, reducing power reflection, improving power transmission efficiency, and ensuring that the power signal can be stably transmitted to the plasma chamber 320 load.

[0047] It should be noted that the inventive concept of this application can form many embodiments, but due to the limited space of the application documents, they cannot all be listed. Therefore, without conflict, the embodiments described above or the technical features can be arbitrarily combined to form new embodiments. After the embodiments or technical features are combined, the original technical effect will be enhanced.

[0048] The above description, in conjunction with specific optional embodiments, provides a further detailed explanation of this application and should not be construed as limiting the specific implementation of this application to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of this application, and all such modifications or substitutions should be considered within the scope of protection of this application.

Claims

1. A data update method for an RF power supply, used to update the data of various functional components of the RF power supply, characterized in that, The data update method includes the following steps: Step S1: Identify one or more functional components in the RF power supply that require data updates; Step S2: Obtain the data to be updated corresponding to the one or more functional components to be updated; Step S3: Optimize the data to be updated to reduce the amount of computation required for data updates and the amount of data processed per unit time; Step S4: Based on the optimized data to be updated, rewrite the original data in the one or more functional components to be updated; and / or, based on the data to be updated, add new data to be updated corresponding to the one or more functional components to be updated.

2. The data update method for radio frequency power supply as described in claim 1, characterized in that, In step S1, the data to be updated only refers to the functional component data of the RF power supply, without changing the core data of the RF power supply or the user setting data. Step S3 specifically includes: The same data parts in the data to be updated of multiple functional components are merged, transmitted and written to the memory of the RF power supply in a unified manner to avoid the repeated transmission and writing of the same data. Step S4 specifically includes: The processor compares the current version number of each functional component with the target version number corresponding to the data to be updated; For functional components whose version numbers have changed, the original data of the functional component is rewritten according to the data to be updated; and / or, for newly added functional components for which corresponding data is not stored in the memory, the corresponding stored data of the functional component is added according to the data to be updated, thereby completing the data update of the RF power supply.

3. The data update method for radio frequency power supply as described in claim 1, characterized in that, The data optimization process in step S3 includes setting data update priorities, specifically: setting the same data parts in the data to be updated of each functional component as the first priority, and performing transmission and writing first; setting the remaining different data parts as the second priority, and performing them sequentially thereafter.

4. The data update method for radio frequency power supply as described in claim 2, characterized in that, The data optimization process in step S3 includes data merging and priority setting. Specifically, it involves merging identical data parts in the data to be updated from multiple functional components and marking them as the first priority, which are then prioritized for transmission and writing. Different non-identical data parts in the data to be updated from each functional component are marked as the second priority, and are then executed sequentially after the first priority data is updated. Data that has little or no impact on the operation of the RF power supply is marked as the third priority, and is then executed sequentially after the second priority data is updated or updated synchronously in the background during normal operation of the RF power supply.

5. The data update method for radio frequency power supply as described in claim 1, characterized in that, In step S2, the processor uses a partitioning judgment method to quickly identify the data to be updated. Specifically, the multiple functional components of the RF power supply are partitioned according to the data similarity. Functional components with high data similarity are divided into the same judgment area. Alternatively, the partitioning is dynamically adjusted according to the actual operation verification results of the RF power supply. The data similarity of each functional component is statistically analyzed in real time, and the partitioning of functional components whose data similarity changes is adjusted.

6. The data update method for radio frequency power supply as described in claim 1, characterized in that, In step S2, the specific data to be updated is processed using a segmented comparison and precise update method. Specifically, the original data and the data to be updated of the functional components are both segmented according to a preset length. The differences between the original data and the data to be updated are compared segment by segment, and only the segmented data with differences are extracted as precise update data.

7. The data update method for radio frequency power supply as described in claim 3, characterized in that, The radio frequency power supply also includes at least one interface and a sensor; The interface includes a regular network port and a fast transfer port. The regular network port is used to connect to external devices, and the data transmission capacity of the regular network port is greater than that of the fast transfer port. The fast transfer port is connected to a sensor and is used to transmit at least a portion of the sensor's raw data. In step S4, the processor obtains data marked as first priority from the data to be updated from the server through the fast transfer port, and rewrites the original data in the one or more functional components to be updated according to the data marked as first priority; and / or adds data to be updated corresponding to the one or more functional components to be updated. as well as The processor obtains data marked as second priority from the data to be updated from an external computer via the ordinary network port, and rewrites the original data in one or more functional components to be updated based on the data marked as second priority; and / or adds new data to be updated corresponding to the one or more functional components to be updated.

8. The data update method for radio frequency power supply as described in claim 1, characterized in that, The radio frequency power supply is equipped with a dedicated update control circuit, which is electrically connected to the processor, memory and interface. It is used to independently undertake the transmission, segmentation, comparison and writing operations of the data to be updated, and is separated from the processor's regular operation tasks. The dedicated update control circuit integrates a data cache unit for temporarily storing the data to be updated and the difference segment data.

9. A radio frequency power supply, characterized in that, The device includes a memory, a processor, and multiple functional components. The processor is configured to execute the data update method for the radio frequency power supply according to any one of claims 1 to 8. At least one of the functional components is connected to the radio frequency power supply motherboard via a cold-plug method. The memory stores the original data, user-defined data, and initial setting data corresponding to each functional component.

10. A radio frequency plasma power supply system, characterized in that, It includes the radio frequency power supply, matching unit, and plasma chamber as described in claim 9; the power signal of the radio frequency power supply is output to the matching unit, and the matching unit performs impedance matching on the power signal and then transmits the power signal to the load of the plasma chamber.

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