High vacuum furnace temperature control method and system based on partitioned thermal field reconstruction

Abstract

The application discloses a high-vacuum furnace temperature control method and system based on partitioned thermal field reconstruction, and relates to the technical field of furnace temperature feedback control. The method comprises the following steps: dividing a coating processing area of a photovoltaic cell in a high-vacuum furnace according to a temperature difference distribution, and determining a plurality of processing sub-areas; performing metal deposition rate analysis, and determining a standard deposition rate curve; based on the temperature control parameter threshold values of a plurality of heating elements in the high-vacuum furnace, taking the approximation of the standard deposition rate curve as the target, performing temperature control parameter optimization according to the plurality of processing sub-areas, and generating an optimal temperature control parameter scheme; controlling the high-vacuum furnace to coat the cell to be processed according to the optimal temperature control parameter scheme, and performing feedback regulation according to a preset PID control mechanism. The technical problems that the temperature control of the high-vacuum furnace is uneven during the coating process, and the processing precision is low and the coating quality is unstable in the prior art are solved, and the technical effects that the coating quality and the processing precision are improved through multi-point temperature control optimization are achieved.

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