Spray head particle cleaning detection integrated device and method
By integrating cleaning and testing of particulate matter from spray heads, the problem of time-consuming and labor-intensive cleaning and testing of spray heads has been solved, achieving efficient cleaning and testing and ensuring the quality of spray head products.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-06-04
- Publication Date
- 2026-07-24
AI Technical Summary
Existing technologies for cleaning and inspecting spray heads consume a lot of time and effort, are difficult to adapt to spray heads with complex structures, and have insufficient inspection accuracy.
This invention provides an integrated device for cleaning and detecting particulate matter from a spray head. It integrates the detection and cleaning processes, simulates the actual use scenario of the spray head by heating, and combines gas flushing and particulate matter detection to achieve a cycle of cleaning and detection.
It improves testing accuracy, reduces production costs, simplifies operating procedures, enhances production and processing convenience, and ensures the quality of shower head products upon delivery.
Smart Images
Figure CN122448696A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of thin film deposition equipment processing, and in particular to an integrated device and method for cleaning and detecting particulate matter in a spray head. Background Technology
[0002] The spray head is a core component in semiconductor thin film deposition equipment. In the thin film deposition process, it is used to uniformly spray gas onto the wafer surface to grow a thin film on the wafer surface.
[0003] The core performance indicators of a spray head include the uniformity and purity of the gas spray. To ensure the purity of the sprayed gas, the spray head products need to be cleaned and tested for particulate matter after processing to ensure that the particulate matter inside the spray head is within acceptable limits.
[0004] The relevant technologies use high-purity water for cleaning, followed by laser scanning, CCD camera imaging, and water extraction for testing. However, when the internal flow channels of the spray head are tortuous and the structure is complex, the above cleaning and testing processes consume a lot of time and effort and are difficult to adapt well. Summary of the Invention
[0005] This application provides an integrated device and method for cleaning and detecting particulate matter in a spray head, which integrates the detection and cleaning processes, reducing production costs while ensuring the accuracy of cleaning and detection.
[0006] In a first aspect, this application provides an integrated device for cleaning and detecting particulate matter from a spray head, comprising: a support mechanism including a base, a first valve, and a second valve, wherein the base is used to place the spray head, the base has an open opening, the spray head is placed on the base and the opening is sealed, and the first valve and the second valve are connected to the opening; a temperature control mechanism including a heating plate and a power supply, the heating plate being able to contact the spray head for heating; a ventilation mechanism for venting air to the spray head; a particulate matter detector connected to the second valve; and a drive mechanism for driving the support mechanism or the temperature control mechanism so that the heating plate and the spray head have a movement state of approaching and moving away.
[0007] To achieve the above technical solution, the integrated device first performs a cleaning phase: after placing the spray head, the second valve is closed and the first valve is opened. The drive mechanism is operated to bring the spray head into contact with the heating plate. The temperature control mechanism is operated to heat the spray head to a first predetermined temperature and maintain it. The ventilation mechanism is operated to introduce air into the inlet of the spray head. The gas flows into the opening after rinsing the internal flow channel of the spray head. During this process, the particulate matter inside the spray head is purged and flows out through the first valve. Then, the detection phase is performed: the heating of the heating plate is stopped, and the ventilation mechanism continues to introduce gas to purge and cool the heating plate. After the gas temperature drops to a second predetermined temperature, the second valve is opened and the first valve is closed. The gas enters the particulate matter detector, and the operator records the data to detect and record the particulate matter inside the spray head. In this application, the spray head is heated to a first predetermined temperature to simulate the actual use scenario of the spray head, effectively improving the detection accuracy. It is understood that in some cases, particulate matter adheres strongly to the internal flow channels of the spray head at low temperatures, making it difficult to remove using conventional methods such as high-purity water cleaning or ultrasonic cleaning. If no particulate matter is detected at high temperatures, it is highly likely that no particulate matter will be present in actual applications, thus ensuring the quality of the shipped spray head products. Furthermore, the cleaning and detection stages can be cyclical to ensure the accuracy of cleaning and detection. For example, if the first detection finds particulate matter exceeding the range, simply continue the cleaning stage for a period before resuming the detection stage for a second detection. This application achieves integrated cleaning and detection through the switching between the first and second valves, eliminating the need for cumbersome spray head movement and improving production convenience.
[0008] As one of the optional embodiments of this solution, the driving mechanism includes a support rod, a support plate sliding on the support rod, and a driving component, wherein the driving component is connected to the bottom surface of the support plate.
[0009] As one of the optional embodiments of this solution, the drive mechanism further includes an adapter seat, which includes a base plate, intermediate columns and a top ring. The base plate is detachably connected to the moving end of the drive component, the intermediate columns are fixed to the surface of the base plate, the top ring is connected to one end of the multiple intermediate columns away from the base plate, and the top ring is bolted to the support plate.
[0010] To achieve the above technical solution, a specific driving mechanism is proposed. In some examples, the driving component can be a pneumatic cylinder or an electric cylinder. The driving component drives the base to move, and the base is stably raised and lowered under the guidance of the support rod. The design of the adapter seat makes it easier to assemble and disassemble the pneumatic cylinder and the base, improving the convenience of operation and maintenance. On the other hand, the pneumatic cylinder and the base form a surface contact through the adapter seat, thereby ensuring the horizontality of the support plate movement and ensuring the accuracy of the spray head and the heating plate fit.
[0011] As one optional embodiment of this solution, a connecting mechanism is also included. The connecting mechanism is used to fix the ventilation mechanism and the temperature control mechanism. The connecting mechanism includes a connecting plate, a guide rod, and a connecting bolt. The connecting plate is located above the base. The guide rod passes through the connecting plate and is connected to the heating plate. The cylindrical part of the connecting bolt passes through the connecting plate and is bolted to the heating plate. The end part of the connecting bolt is located above the heating plate.
[0012] To achieve the above technical solution, an installation structure for the heating plate is proposed. The bottom end of the connecting bolt is bolted to the heating mechanism, which not only fixes the heating plate but also facilitates its disassembly. The guide rod provides stable and precise guidance and positioning for the heating plate to ensure that the bottom surface of the heating plate is horizontal, thereby ensuring that the heating plate and the spray head surface are accurately aligned and the heating effect is guaranteed.
[0013] As one of the optional embodiments of this solution, the connecting mechanism further includes a buffer spring, which is sleeved on the outside of the connecting bolt. One end of the buffer spring abuts against the heating plate, and the other end of the buffer spring abuts against the connecting plate.
[0014] To achieve the above technical solution, after the base moves upward and contacts the heating plate, the base continues to move upward. At this time, the heating plate compresses the buffer spring, making the contact between the base and the heating plate tighter, thereby further ensuring heat conduction, improving the accuracy and efficiency of heating, and reducing the damage caused by excessive squeezing between the heating plate and the spray head surface.
[0015] As one of the optional embodiments of this solution, the guide rod is detachably connected to the heating plate.
[0016] By implementing the above technical solution, the heating plate can be detached from the guide rod and the heating plate can be detached from the connecting bolts. This makes the overall disassembly and maintenance of the heating plate more convenient and allows for easier adaptation to different spray head models, thus improving compatibility.
[0017] As one of the optional embodiments of this solution, the ventilation mechanism includes an air intake main pipe, multiple branch pipes connected to the air intake main pipe, and an air intake connector. Each air intake main pipe is equipped with an air intake valve. The air intake connector is connected to the air inlet of the spray head and is detachably connected to the connecting plate.
[0018] On the other hand, this application provides an integrated method for cleaning and detecting particulate matter in a spray head, based on any of the above-mentioned integrated devices for cleaning and detecting particulate matter in a spray head, comprising the following steps: S1. Place the spray head, open the first valve, close the second valve, and operate the drive mechanism to move the base upward until the base is in contact with the heating plate; S2. Start the heating plate to heat the spray head until it reaches the first predetermined temperature and maintain it. S3. Operate the ventilation mechanism to ventilate the spray head, and the cleaning time is the first predetermined time. S4. Turn off the heating plate, continue to ventilate until the spray head cools down to the second predetermined temperature, then open the second valve and close the first valve; S5. After the second predetermined ventilation time, record the data from the particulate matter detector.
[0019] As one of the optional embodiments of this solution, the ventilation and recording procedure in step S5 is repeated at least three times, with a time interval between adjacent repeated operations. If the particle detection result in each data recording is lower than the standard requirement range, the operation is terminated and the product is marked as qualified.
[0020] As one of the optional embodiments of this solution, if any recorded data exceeds the standard requirement range, then steps S1-S5 are repeated.
[0021] One of the above technical solutions has the following advantages or beneficial effects: In this application, the spray head is heated to a first predetermined temperature to simulate the actual use scenario of the spray head, which effectively improves the detection accuracy. The cleaning stage and the detection stage can be cycled to ensure the accuracy of cleaning and detection. The cleaning and detection can be integrated by switching between the first valve and the second valve, without the need to move the spray head in a cumbersome way, thus improving the convenience of production and processing. Attached Figure Description
[0022] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.
[0023] Figure 1 This is a front view of the integrated cleaning and detection device provided in the embodiments of this application; Figure 2 This is an overall structural diagram of the integrated cleaning and testing device provided in the embodiments of this application; Figure 3 This is a top view of the integrated cleaning and detection device provided in the embodiments of this application; Figure 4 This is a cross-sectional view provided in the embodiments of this application, mainly used to illustrate the connecting mechanism; Figure 5 This is a cross-sectional view provided in the embodiments of this application, mainly used to illustrate the load-bearing mechanism; Figure 6 This is a flowchart illustrating the steps of an integrated cleaning and detection method in another embodiment of this application.
[0024] Reference numerals: 1. Bearing mechanism; 11. Base; 111. Second positioning post; 12. First valve; 13. Second valve; 10. Opening; 2. Temperature control mechanism; 21. Heating plate; 22. Power supply; 23. Temperature sensor; 3. Ventilation mechanism; 31. Main intake pipe; 32. Branch pipe; 33. Intake connector; 34. Intake valve; 4. Particulate matter detector; 5. Drive mechanism; 51. Support rod; 52. Support plate; 521. Groove; 522. First positioning post; 53. Drive component; 54. Adapter seat; 541. Base plate; 542. Intermediate post; 543. Top ring; 6. Connecting mechanism; 61. Connecting plate; 62. Guide rod; 63. Connecting bolt; 64. Buffer spring; 100. Framework. Detailed Implementation
[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.
[0026] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the term "and / or" in this document is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Furthermore, the character " / " in this document, unless otherwise specified, generally indicates that the preceding and following related objects have an "or" relationship.
[0027] The following is in conjunction with the appendix Figures 1 to 6 This application will be further described below.
[0028] Reference Figure 1 and Figure 2 In one aspect, this application provides an integrated device for cleaning and detecting particulate matter from a spray head, comprising: a supporting mechanism 1, a temperature control mechanism 2, a particulate matter detector 4, a ventilation mechanism 3, and a driving mechanism 5. These mechanisms are mounted on a frame 100, which in some examples is a square aluminum alloy frame 100 with a tabletop.
[0029] Reference Figures 1-3The supporting mechanism 1 includes a base 11, a first valve 12, and a second valve 13. The base 11 is used to place the spray head and has an open opening 10. The spray head is placed on the base 11 and the opening 10 is sealed. The first valve 12 and the second valve 13 are connected to the opening 10. The temperature control mechanism 2 includes a heating plate 21 and a power supply 22. The heating plate 21 can be in close contact with the spray head to raise the temperature. The ventilation mechanism 3 is used to ventilate the spray head. The particulate matter detector 4 is connected to the second valve 13. The drive mechanism 5 is used to drive the supporting mechanism 1 or the temperature control mechanism 2 so that the heating plate 21 and the spray head have a movement state of approaching and moving away.
[0030] To achieve the above technical solution, the integrated device first performs a cleaning stage: after placing the spray head product, close the second valve 13 and open the first valve 12. Operate the drive mechanism 5 to make the spray head contact the heating plate 21. Operate the temperature control mechanism 2 to heat the spray head to the first predetermined temperature and maintain it. Operate the ventilation mechanism 3 to introduce air into the inlet of the spray head. The gas flushes the internal flow channel of the spray head and flows into the opening 10. During this process, the particulate matter inside the spray head is purged and flows out through the first valve 12. Then, the detection stage is performed: stop heating the heating plate 21, and the ventilation mechanism 3 continues to introduce gas to purge and cool the heating plate 21. After the gas temperature drops to the second predetermined temperature, open the second valve 13 and close the first valve 12. The gas enters the particulate matter detector 4, and the operator records the data to detect and record the particulate matter inside the spray head. In this application, the spray head is heated to a first predetermined temperature to simulate the actual use scenario of the spray head, effectively improving the detection accuracy. It is understood that in some cases, particulate matter adheres strongly to the internal flow channels of the spray head at low temperatures, making it difficult to remove by conventional methods such as high-purity water cleaning or ultrasonic cleaning. If no particulate matter is detected at high temperatures, it is highly likely that no particulate matter will be present in actual applications, thus ensuring the quality of the shipped spray head products. Furthermore, the cleaning and detection stages can be cyclical to ensure the accuracy of cleaning and detection. For example, if the first detection finds particulate matter exceeding the range, the cleaning stage can be continued for a period of time before resuming the detection stage for a second detection. This application achieves integrated cleaning and detection through the switching of the first valve 12 and the second valve 13, eliminating the need for cumbersome movement of the spray head and improving the convenience of production and processing.
[0031] As one optional embodiment of this solution, the drive mechanism 5 includes a support rod 51, a support plate 52 sliding on the support rod 51, and a drive component 53, with the drive component 53 connected to the bottom surface of the support plate 52. Specifically, four support rods 51 are arranged in a rectangular pattern and fixed to the frame 100. Linear bearings are provided at the four corners of the support plate 52, and each support rod 51 slides in a corresponding linear bearing.
[0032] In some examples, the drive element 53 is a cylinder, while in other examples, the drive element 53 may be an electric cylinder or other structure with linear reciprocating drive function.
[0033] As one optional embodiment of this solution, the drive mechanism 5 further includes an adapter 54, which includes a base plate 541, intermediate columns 542, and a top ring 543. The base plate 541 is detachably connected to the moving end of the drive member 53, the intermediate columns 542 are fixed to the surface of the base plate 541, and the top ring 543 is connected to one end of the multiple intermediate columns 542 away from the base plate 541. The top ring 543 is bolted to the support plate 52. Specifically, the drive member 53 is fixed to the frame 100, and the moving end of the drive member 53 is bolted to the adapter 54 via a plate.
[0034] This application proposes a specific drive mechanism 5. In some examples, the drive component 53 drives the base 11 to move. The base 11 is stably raised and lowered under the guidance of the support rod 51. The design of the adapter 54 makes it easier to assemble and disassemble the cylinder and the base 11, improving the convenience of operation and maintenance. On the other hand, the adapter 54 forms a surface contact between the cylinder and the base 11, thereby ensuring the horizontality of the support plate 52 movement, reducing the deformation of the support plate 52, and ensuring the accurate contact between the spray head and the heating plate 21.
[0035] Reference Figure 2 and Figure 3 The support plate 52 is provided with a groove 521. The shape of the groove 521 matches the outer contour of the bottom surface of the spray head product so that the base 11 is installed in the groove 521. A first positioning post 522 is provided inside the groove 521. The base 11 is inserted into the first positioning post 522. A second positioning post 111 is provided inside the base 11. The second positioning post 111 is inserted into the spray head.
[0036] To achieve the above technical solution, the cooperation of the first positioning post 522 and the second positioning post 111 ensures the accuracy of the spray head placement. It can be understood that the connection between the spray head and the air inlet connector 33 needs to ensure the angle in the circumferential direction. The position of the air inlet connector 33 is fixed, so it is necessary to ensure the uniqueness of the spray head position. The first positioning post 522 and the second positioning post 111 can effectively ensure the accuracy of the spray head placement.
[0037] In some examples, the opening 10 inside the base 11 is set as an inclined surface, and the bottom part is designed as a flat surface. However, in some alternative examples, the opening 10 inside the base 11 can be set as an arc-shaped surface, and the bottom surface can be designed as an arc-shaped surface to facilitate the smooth flow of gas.
[0038] Reference Figure 2 and Figure 4As one optional embodiment of this solution, a connecting mechanism 6 is also included. The connecting mechanism 6 is used to fix the ventilation mechanism 3 and the temperature control mechanism 2. The connecting mechanism 6 includes a connecting plate 61, a guide rod 62, and a connecting bolt 63. The connecting plate 61 is located above the base 11. The guide rod 62 passes through the connecting plate 61 and is connected to the heating plate 21. The cylindrical part of the connecting bolt 63 passes through the connecting plate 61 and is bolted to the heating plate 21. The end part of the connecting bolt 63 is located above the heating plate 21. The guide rod 62 and the heating plate 21 are detachably connected.
[0039] Specifically, the connecting plate 61 is fixedly connected to the top of multiple support rods 51 by bolts. Three guide rods 62 are provided, and linear bearings are installed at the corresponding positions of the three guide rods 62 on the connecting plate 61. The guide rods 62 are inserted through the linear bearings to ensure the accuracy of their vertical movement. The bottom end of the guide rod 62 is bolted to the heating plate 21. In some examples, the surface of the heating plate 21 has grooves, and the guide rod 62 is inserted into these grooves, with bolts passing through the bottom surface of the heating plate 21 and bolted to the guide rod 62. Six connecting bolts 63 are also provided, three evenly arranged in the inner ring and three evenly arranged in the outer ring. The cylindrical portion of the connecting bolt 63 passes through the connecting plate 61 and is bolted to the heating plate 21. The end of the connecting bolt 63 is larger than the diameter of the through hole, allowing the heating plate 21 to be suspended vertically on the connecting plate 61. Furthermore, when the heating plate 21 moves upward, the connecting bolts 63 can be lifted, preventing hard contact that could damage the spray head.
[0040] To achieve the above technical solution, an installation structure for the heating plate 21 is proposed. The bottom end of the connecting bolt 63 is bolted to the heating mechanism, which not only fixes the heating plate 21 but also facilitates its disassembly. The guide rod 62 provides stable and precise guidance and positioning for the heating plate 21, ensuring that the bottom surface of the heating plate 21 is horizontal, thereby ensuring accurate contact between the heating plate 21 and the spray head surface and guaranteeing the heating effect. The heating plate 21 can be detached from the guide rod 62 and the connecting bolt 63, which makes the overall disassembly and maintenance of the heating plate 21 more convenient and allows for easier adaptation to different spray head models, improving compatibility.
[0041] As one of the optional embodiments of this solution, the connecting mechanism 6 also includes a buffer spring 64, which is sleeved on the outside of the connecting bolt 63. One end of the buffer spring 64 abuts against the heating plate 21, and the other end of the buffer spring 64 abuts against the connecting plate 61.
[0042] To achieve the above technical solution, after the base 11 moves upward and contacts the heating plate 21, the base 11 continues to move upward. At this time, the heating plate 21 compresses the buffer spring 64, making the contact between the base 11 and the heating plate 21 tighter, thereby further ensuring heat conduction, improving the accuracy and efficiency of heating, and reducing the damage caused by excessive squeezing between the heating plate 21 and the spray head surface.
[0043] Reference Figure 2 and Figure 5 As one of the optional embodiments of this solution, the ventilation mechanism 3 includes an air intake main pipe 31, multiple branch pipes 32 connected to the air intake main pipe 31, and an air intake connector 33. Each air intake main pipe 31 is equipped with an air intake valve 34, and the air intake connector 33 is connected to the air inlet of the spray head. The air intake connector 33 is detachably connected to the connecting plate 61.
[0044] The ventilation mechanism 3 is equipped with multiple independent branch pipes 32, which allows the ventilation mechanism 3 to adapt to more cleaning needs. For example, it can independently introduce independent types of gas into the spray head to adapt to the needs of different models of spray heads, or it can simultaneously provide multiple gases into the spray head to achieve the cleaning needs of mixed gases, and they do not affect each other.
[0045] Reference Figure 5 The temperature control mechanism 2 also includes a temperature sensor 23, which is mounted on the connecting plate 61. The temperature measuring end of the temperature sensor 23 passes through the heating plate 21 to contact and detect the real-time temperature of the spray head.
[0046] Reference Figure 6 On the other hand, this application provides an integrated method for cleaning and detecting particulate matter in a spray head, based on any of the above-mentioned integrated devices for cleaning and detecting particulate matter in a spray head, comprising the following steps: S1. Place the spray head, open the first valve 12, close the second valve 13, and operate the drive mechanism 5 to move the base 11 upward until the base 11 is in contact with the heating plate 21. S2. Start the heating plate 21 to heat the spray head until it reaches the first predetermined temperature and maintains it. S3. Operate the ventilation mechanism to ventilate the spray head 3, and the cleaning time is the first predetermined time. S4. Close the heating plate 21, continue to ventilate until the spray head cools down to the second predetermined temperature, open the second valve 13, and close the first valve 12; S5. After the second predetermined ventilation time, record the data from the particulate matter detector 4.
[0047] In step S2, the first predetermined temperature is 130~335℃, which can simulate a wide range of operating conditions. The heating time is 20~50 minutes.
[0048] In step S3, the first predetermined time is set to 6 hours, and the purging pressure is 0.5 MPa.
[0049] In step S4, the second predetermined temperature is set to 20~40℃. This is to avoid damage to the particulate matter detector 4. In some examples, the cooling time is 2 hours. In step S5, the second predetermined time is set to 10 minutes, and the interval between two adjacent detections is 30 to 60 seconds.
[0050] As one of the optional embodiments of this solution, the ventilation and recording procedure in step S5 is repeated at least three times, with a time interval between adjacent repeated operations. If the particle detection result in each data recording is lower than the standard requirement range, the operation is terminated and the product is marked as qualified.
[0051] As one of the optional embodiments of this solution, if any recorded data exceeds the standard requirement range, then steps S1-S5 are repeated.
[0052] To ensure sufficient cleaning of the spray heads within the first predetermined time without excessive redundancy, the first predetermined time was determined through the following experiment: At least N products of the same specification were selected, where N is greater than or equal to 10. These were cleaned for 1 hour, 2 hours, 3 hours, and so on. Particulate matter was measured on each product, and the particulate matter content of the N products was determined. A graph was created with time on the x-axis and particulate matter content on the y-axis. If the particulate matter content of all products from the Nth product onwards is below the standard requirement, and the rate of decrease between adjacent points is less than 5%, then the cleaning time for the N products is determined as the first predetermined time T. For example, if the particulate matter content is below the standard requirement after the 6th hour, and the rate of decrease between adjacent points is less than 5%, then the first predetermined cleaning time is designed to be 6 hours.
[0053] The above description is only a partial implementation of the embodiments of this application and is not intended to limit the application in any way. The protection scope of the embodiments of this application is not limited thereto. Any simple modifications, equivalent changes and alterations that can be easily conceived by those skilled in the art within the technical scope disclosed in the embodiments of this application should be included within the protection scope of the embodiments of this application.
Claims
1. An integrated device for cleaning and detecting particulate matter in a spray head, characterized in that, include: The support mechanism (1) includes a base (11), a first valve (12) and a second valve (13). The base (11) is used to place the spray head. The base (11) has an open opening (10). The spray head is placed on the base (11) and the opening (10) is sealed. The first valve (12) and the second valve (13) are connected to the opening (10). The temperature control mechanism (2) includes a heating plate (21) and a power supply (22). The heating plate (21) can be in close contact with the spray head to raise the temperature. Ventilation mechanism (3) is used to ventilate the spray head; A particulate matter detector (4) is connected to the second valve (13); and, The driving mechanism (5) is used to drive the bearing mechanism (1) or the temperature control mechanism (2) so that the heating plate (21) and the spray head have a movement state of approaching and moving away.
2. The gas disperser particulate matter detection device as described in claim 1, characterized in that, The drive mechanism (5) includes a support rod (51), a support plate (52) sliding on the support rod (51), and a drive member (53), wherein the drive member (53) is connected to the bottom surface of the support plate (52).
3. The gas disperser particulate matter detection device as described in claim 2, characterized in that, The drive mechanism (5) further includes an adapter (54), which includes a base plate (541), intermediate columns (542), and a top ring (543). The base plate (541) is detachably connected to the moving end of the drive component (53). The intermediate columns (542) are fixed to the surface of the base plate (541). The top ring (543) is connected to one end of the multiple intermediate columns (542) away from the base plate (541). The top ring (543) is bolted to the support plate (52).
4. The gas disperser particulate matter detection device as described in claim 1, characterized in that, It also includes a connecting mechanism (6), which is used to fix the ventilation mechanism (3) and the temperature control mechanism (2). The connecting mechanism (6) includes a connecting plate (61), a guide rod (62) and a connecting bolt (63). The connecting plate (61) is located above the base (11). The guide rod (62) passes through the connecting plate (61) and is connected to the heating plate (21). The cylindrical part of the connecting bolt (63) passes through the connecting plate (61) and is bolted to the heating plate (21). The end part of the connecting bolt (63) is located above the heating plate (21).
5. The gas disperser particulate matter detection device as described in claim 4, characterized in that, The connecting mechanism (6) also includes a buffer spring (64), which is sleeved on the outside of the connecting bolt (63). One end of the buffer spring (64) abuts against the heating plate (21), and the other end of the buffer spring (64) abuts against the connecting plate (61).
6. The gas disperser particulate matter detection device as described in claim 5, characterized in that, The guide rod (62) is detachably connected to the heating plate (21).
7. The gas disperser particulate matter detection device as described in claim 4, characterized in that, The ventilation mechanism (3) includes an air intake main pipe (31), multiple branch pipes (32) connected to the air intake main pipe (31), and an air intake connector (33). Each air intake main pipe (31) is equipped with an air intake valve (34). The air intake connector (33) is connected to the air inlet of the spray head. The air intake connector (33) is detachably connected to the connecting plate (61).
8. A method for integrated cleaning and detection of particulate matter from a spray head, based on the integrated cleaning and detection device for particulate matter from a spray head according to any one of claims 1-7, characterized in that, Includes the following steps: S1. Place the spray head, open the first valve (12), close the second valve (13), operate the drive mechanism (5) to move the base (11) upward until the base (11) is in contact with the heating plate (21); S2. Start the heating plate (21) to heat the spray head until it reaches the first predetermined temperature and maintain it; S3. Operate the ventilation mechanism (3) to ventilate the spray head, and the cleaning time is the first predetermined time. S4. Close the heating plate (21), continue to ventilate until the spray head cools down to the second predetermined temperature, open the second valve (13), and close the first valve (12); S5. After the second predetermined ventilation time, record the data from the particulate matter detector (4).
9. The integrated method for cleaning and detecting particulate matter from a spray head as described in claim 8, characterized in that, The ventilation and recording procedure in step S5 is repeated at least three times, with a time interval between each repeated operation. If the particle detection result in each data recording is lower than the standard requirement range, the operation is terminated and the product is marked as qualified.
10. The integrated method for cleaning and detecting particulate matter in a spray head as described in claim 9, characterized in that, If any record contains data that exceeds the standard requirements, then repeat steps S1-S5.