Capacitor structure and electronic equipment

Abstract

The embodiment of the utility model relates to the technical field of capacitors, and discloses a capacitor structure and electronic equipment, and the capacitor structure comprises a fixed polar plate assembly and a movable polar plate which moves along the displacement direction. The fixed polar plate assembly comprises two first fixed polar plates and a second fixed polar plate; the first fixed polar plates and the second fixed polar plates are arranged on the same plane perpendicular to the displacement direction, and the two first fixed polar plates are symmetrically arranged on the two sides of the second fixed polar plates; the movable polar plate and the fixed polar plate assembly are oppositely arranged; the length of the first fixed polar plate in the displacement direction and the length of the second fixed polar plate in the displacement direction are both greater than the stroke amount of the movable polar plate in the displacement direction; a first gap is formed between one first fixed pole plate and the second fixed pole plate, a second gap is formed between the other first fixed pole plate and the second fixed pole plate, and the extending directions of the first gap and the second gap are different from the displacement direction. According to the embodiment, capacitance deviation caused by torsion of the movable polar plate is counteracted, the accuracy of capacitance detection is improved, and then the accuracy of position detection is improved.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of capacitor technology, and in particular to a capacitor structure and electronic equipment. Background Art

[0002] Displacement detection is currently in widespread demand in production and everyday life, for example in electronic devices like cameras. Capacitive detection solutions, with their low cost and high accuracy, have found widespread application in displacement detection. Capacitive detection generally allows for detection by varying the area, distance, or medium. The area-variable approach offers high sensitivity and flexibility, making it a popular choice.

[0003] However, capacitance detection by changing the area places high demands on the position of the two plates of the capacitor, requiring the two substrates to be set parallel to each other. If there is a twist between the two plates, it will lead to inaccurate capacitance detection and affect the accuracy of displacement detection. Utility Model Content

[0004] The purpose of the embodiments of the present application is to provide a capacitor structure and an electronic device, so as to offset the capacitance deviation caused by the torsion of the moving electrode plate, improve the accuracy of capacitance detection, and further improve the accuracy of position detection.

[0005] To solve the above technical problems, an embodiment of the present application provides a capacitor structure, comprising: a fixed electrode assembly, a moving electrode moving along a displacement direction;

[0006] The fixed electrode plate assembly includes two first fixed electrode plates and a second fixed electrode plate; the first fixed electrode plate and the second fixed electrode plate are arranged perpendicular to the displacement direction and on the same plane, and the two first fixed electrode plates are symmetrically arranged on both sides of the second fixed electrode plate; the moving electrode plate and the fixed electrode plate assembly are arranged opposite to each other; the length of the first fixed electrode plate in the displacement direction and the length of the second fixed electrode plate in the displacement direction are both greater than the stroke of the moving electrode plate in the displacement direction; there is a first gap between one of the first fixed electrode plate and the second fixed electrode plate, and there is a second gap between the other first fixed electrode plate and the second fixed electrode plate, and the extension directions of the first gap and the second gap are different from the displacement direction.

[0007] An embodiment of the present application also provides an electronic device, including: a processing unit and the above-mentioned capacitor structure; the processing unit is respectively connected to the moving electrode plate, the first fixed electrode plate, and the second fixed electrode plate; the processing unit obtains a first capacitor based on the first fixed electrode plate and the moving electrode plate, and the processing unit obtains a second capacitor based on the second fixed electrode plate and the moving electrode plate; the processing unit determines the position of the moving electrode plate based on the first capacitor and the second capacitor.

[0008] In some embodiments, there are multiple fixed electrode plate assemblies; the multiple fixed electrode plate assemblies are on the same plane and arranged perpendicular to the displacement direction.

[0009] In some embodiments, in two adjacent fixed electrode plate assemblies, the first fixed electrode plate of one fixed electrode plate assembly is adjacent to and integrally arranged with the first fixed electrode plate of the other fixed electrode plate assembly.

[0010] In some embodiments, in one of the fixed electrode plates, the two first fixed electrode plates and the second fixed electrode plates together form a rectangular parallelepiped.

[0011] In some embodiments, in one of the fixed electrode plate assemblies, the lengths of the first gap and the second gap in the displacement direction are equal to the length of the cuboid in the displacement direction; the lengths of the first gap and the second gap in the target direction are equal to half the width of the cuboid in the target direction; the target direction is a direction perpendicular to the displacement direction and parallel to the surface of the fixed electrode plate assembly close to the moving electrode plate.

[0012] In some embodiments, in one of the fixed plate assemblies, the first gap and the second gap are V-shaped.

[0013] In some embodiments, when there are multiple fixed plate assemblies, the multiple first gaps and the multiple second gaps are W-shaped.

[0014] The technical solution provided by the embodiments of the present application has at least the following advantages:

[0015] This embodiment arranges the fixed electrode plate assembly into a structure in which two first fixed electrode plates are symmetrically arranged on the second fixed electrode plate, and the first fixed electrode plate and the second fixed electrode plate are arranged on the same plane perpendicular to the displacement direction. The length of the first fixed electrode plate in the displacement direction and the length of the second fixed electrode plate in the displacement direction are both greater than the stroke of the moving electrode plate in the displacement direction. The extension directions of the first gap and the second gap between the first fixed electrode plate and the second fixed electrode plate are different from the displacement direction. Therefore, when the moving electrode plate is twisted, the effects of the twisting on the capacitance between the moving electrode plate and the two first fixed electrode plates can offset each other, and the effects of the twisting on the capacitance between the moving electrode plate and the second fixed electrode plate can also offset each other, thereby offsetting the capacitance deviation caused by the twisting of the moving electrode plate, improving the accuracy of capacitance detection, and further improving the accuracy of position detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] One or more embodiments are exemplarily illustrated by pictures in the corresponding drawings. These exemplifications do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings are represented as similar elements. Unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0017] Figure 1 It is a structural diagram of a capacitor structure of related technology;

[0018] Figure 2A A top view of a capacitor structure that generates torsion in the related art;

[0019] Figure 2B A front view of a capacitor structure that generates torsion in the related art;

[0020] Figure 3 is a structural diagram of a capacitor structure according to an embodiment of the present application;

[0021] Figure 4 This is a schematic diagram of a capacitor structure generating torsion according to an embodiment of the present application;

[0022] Figure 5 2 is a schematic structural diagram of a capacitor structure according to an embodiment of the present application. DETAILED DESCRIPTION

[0023] As known from the background technology, the use of Figure 1 The capacitor structure shown in the figure realizes capacitance detection. The capacitor structure includes a first plate 1, a second plate 2, and a third plate 3. The first plate 1 and the second plate 2 are triangular structures. The first plate 1 and the second plate 2 can be spliced together into a rectangle. The third plate 3 is arranged opposite to the first plate 1 and the second plate 3. The capacitance between the third plate 3 and the first plate 1 is C1, and the capacitance between the third plate 3 and the second plate 2 is C2. Taking the upward movement of the third plate 3 as an example, C1 linearly decreases and C2 linearly increases. The influence of the uncertainty of the plate spacing can be eliminated by the relationship (C1-C2) / (C1+C2). However, during the operation of the capacitive sensor, if the third plate 3 is generated relative to the first plate 1 and the second plate 2, Figure 2A 、 Figure 2B The torsion shown, where Figure 2A A top view of a capacitor structure that is twisted in the related art. Figure 2B This is a front view of the torsion of the capacitor structure in the related art. The torsion will cause the equivalent distance between the third plate 3 and the first plate 1 to increase, and the equivalent distance between the third plate 3 and the second plate 2 to decrease. The relationship (C1-C2) / (C1+C2) cannot offset the influence of the plate spacing. Still using this relationship will cause serious errors in the determined stroke of the third plate 3, affecting the position detection accuracy.

[0024] Therefore, this embodiment sets the fixed electrode plate assembly as a structure in which two first fixed electrode plates are symmetrically arranged on the second fixed electrode plate, and the first fixed electrode plate and the second fixed electrode plate are arranged perpendicular to the displacement direction and on the same plane. The length of the first fixed electrode plate in the displacement direction and the length of the second fixed electrode plate in the displacement direction are both greater than the stroke of the moving electrode plate in the displacement direction. The extension direction of the first gap and the second gap between the first fixed electrode plate and the second fixed electrode plate are different from the displacement direction. Therefore, when the moving electrode plate is twisted, the influence of the twisting on the capacitance between the moving electrode plate and the two first fixed electrode plates can offset each other, and the influence of the twisting on the capacitance between the moving electrode plate and the second fixed electrode plate can also offset each other, thereby offsetting the capacitance deviation caused by the twisting of the moving electrode plate, improving the accuracy of capacitance detection, and thereby improving the accuracy of position detection.

[0025] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, each embodiment of the present application will be described in detail below with reference to the accompanying drawings. However, it will be understood by those skilled in the art that in each embodiment of the present application, many technical details are proposed to enable the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the present application can be implemented. The division of the following embodiments is for convenience of description and should not constitute any limitation on the specific implementation of the present application. The various embodiments can be combined and referenced with each other under the premise of no contradiction.

[0026] An embodiment of the present application relates to a capacitor structure, the specific structural diagram is as follows Figure 3 As shown, the capacitor structure includes: a fixed electrode plate assembly (not shown) and a moving electrode plate 20 that moves along the displacement direction. In the figure, the moving electrode plate 20 reciprocates up and down, and the moving electrode plate 20 is set with a fixed stroke amount. The moving electrode plate 20 reciprocates along the displacement direction within the fixed stroke amount.

[0027] Specifically, the fixed electrode plate assembly includes two first fixed electrode plates 101 and a second fixed electrode plate 102; the first fixed electrode plate 101 and the second fixed electrode plate 102 are arranged perpendicular to the displacement direction and are arranged on the same plane, and the two first fixed electrode plates 101 are symmetrically arranged on both sides of the second fixed electrode plate 102; the dynamic electrode plate 20 is arranged opposite to the fixed electrode plate assembly; the length of the first fixed electrode plate 101 in the displacement direction and the length of the second fixed electrode plate 102 in the displacement direction are both greater than the stroke of the dynamic electrode plate 20 in the displacement direction; there is a first gap L1 between one first fixed electrode plate 101 and the second fixed electrode plate 102, and there is a second gap L2 between the other first fixed electrode plate 101 and the second fixed electrode plate 102, and the extension directions of the first gap L1 and the second gap L2 are different from the displacement direction.

[0028] Specifically, the length of the first fixed electrode plate 101 in the displacement direction and the length of the second fixed electrode plate 102 in the displacement direction are both greater than the length of the moving electrode plate 20 in the displacement direction, thereby ensuring that the facing area of the moving electrode plate 20 and the first fixed electrode plate 101 and the second fixed electrode plate 102 continuously changes during the reciprocating motion of the moving electrode plate 20 along the displacement direction.

[0029] Specifically, in this embodiment, the two first fixed pole plates 101 are of the same size and shape and are symmetrically arranged on both sides of the second fixed pole plate 102. Therefore, the first gap L1 between one first fixed pole plate 101 and the second fixed pole plate 102 and the second gap L2 between the other first fixed pole plate 101 and the second fixed pole plate 102 are also the same in shape and size, and the first gap L1 and the second gap L2 are symmetrical along the central axis of the second fixed pole plate 102, and the direction of the central axis of the second fixed pole plate 102 is the same as the displacement direction of the moving pole plate 20.

[0030] Specifically, the extension directions of the first gap L1 and the second gap L2 are different from the displacement direction, that is, there is an angle between the first gap L1 and the displacement direction, and there is also a symmetrical angle between the second gap L2 and the displacement direction; when the moving electrode plate 20 moves along the displacement direction, the capacitance between the two first fixed electrodes 101 and the moving electrode plate 20, and the capacitance between the second fixed electrode plate 102 and the moving electrode plate 20 both change. According to the change in capacitance, the displacement of the moving electrode plate 20 can be determined, thereby performing position detection.

[0031] like Figure 4 As shown in FIG. 1 , the capacitor structure of this embodiment is twisted. When the dynamic plate 20 is twisted as shown in FIG. 1 , the capacitor structure of this embodiment is twisted. Figure 4 During the torsion shown, the dotted line is the central axis of the second fixed electrode plate 102, and the dynamic electrode plate 20 rotates around the dotted line as the axis. The distance between point A and the first fixed electrode plate 101 is large, and the distance between point D and the other first fixed electrode plate 101 is small. The relationship between points A, B, C, and D in the dynamic electrode plate 20 and the fixed electrode plate assembly is large-medium-large-medium-small-small. For points A and D, their opposite positions are both the first fixed electrode plate 101, so the effects of the torsion cancel each other out. Similarly, the effects of the torsion at points B and C also cancel each other out, and it can be approximately considered that the equivalent distances between the two first fixed electrode plates 101 and the dynamic electrode plate 20 and the equivalent distance between the second fixed electrode plate 102 and the dynamic electrode plate 20 are equal to the equivalent distance between point O on the central axis and the dynamic electrode plate 20, thereby compensating for the effects of the torsion and improving the accuracy of capacitance detection.

[0032] Specifically, if Figure 3 As shown, in a fixed electrode plate assembly, two first fixed electrode plates 101 and a second fixed electrode plate 102 together form a rectangular parallelepiped.

[0033] Specifically, in a fixed electrode assembly, the length of the first gap L1 and the second gap L2 in the displacement direction is equal to the length of the cuboid in the displacement direction; the length of the first gap L1 and the second gap L2 in the target direction is equal to half the width of the cuboid in the target direction; the target direction is perpendicular to the displacement direction and parallel to the surface of the fixed electrode assembly close to the moving electrode 20.

[0034] In one embodiment, in a fixed plate assembly, the extending directions of the first gap L1 and the second gap L2 are straight lines, such as Figure 3 As shown, from bottom to top, the distance between the first gap L1 and the second gap L2 increases linearly, and the first gap L1 and the second gap L2 are V-shaped. Specifically, the first gap L1 extends from the midpoint of the bottom side of the cuboid to the left vertex of the cuboid in a straight line, and the second gap L2 extends from the midpoint of the bottom side of the cuboid to the right vertex of the cuboid in a straight line. In this embodiment, by setting the extension direction of the first gap L1 and the second gap L2 to a straight line, when the moving electrode 20 moves along the displacement direction, the change in the facing area shows a linear change trend, and the change in the relationship (C1-C2) / (C1+C2) is only related to the change in the facing area. The relationship (C1-C2) / (C1+C2) can not only offset the influence of the plate spacing, but also show a linear change trend with the change in the facing area, thereby further improving the accuracy of capacitance detection and further improving the accuracy of position detection.

[0035] In other embodiments, the extension direction of the first gap L1 and the second gap L2 can be a curve, and the distance between the first gap L1 and the second gap L2 only needs to gradually increase from bottom to top. For example, the first gap L1 and the second gap L2 are U-shaped.

[0036] The following description will be made by taking the capacitance between the two first fixed electrode plates 101 and the moving electrode plate 20 as the first capacitance C1 and the capacitance between the second fixed electrode plate 102 and the moving electrode plate 20 as the second capacitance C2 as an example.

[0037] like Figure 3 As shown, when the moving electrode plate 20 is not twisted, the distance between the moving electrode plate 20 and the first fixed electrode plate 101 and the second fixed electrode plate 102 is d. According to the capacitance formula, the first capacitance C1 = 2εS1 / 4πkd and the second capacitance C2 = εS2 / 4πkd are calculated, where ε is the dielectric constant of the medium, k is the electrostatic force constant, S1 is the facing area of the first fixed electrode plate 101 and the moving electrode plate 20, and S2 is the facing area of the second fixed electrode plate 102 and the moving electrode plate 20. Then, the relationship (C1-C2) / (C1+C2) is calculated, (C1-C2) / (C1+C2) = (2S1-S2) / (2S1+S2).

[0038] like Figure 4As shown, when the moving electrode plate 20 is twisted, the distance between the moving electrode plate 20 and the second fixed electrode plate 102 is d, the equivalent distance between point A of the moving electrode plate 20 and one first fixed electrode plate 101 is d+x, and the equivalent distance between point D of the moving electrode plate 20 and the other first fixed electrode plate 101 is dx, where x is the twisted distance of the moving electrode plate 20. According to the capacitance formula, the first capacitance C1 = εS1 / 4πk(dx) + εS1 / 4πk(d+x) and the second capacitance C2 = εS2 / 4πkd can be calculated, where ε is the dielectric constant, k is the electrostatic force constant, S1 is the facing area between the first fixed electrode plate 101 and the moving electrode plate 20, and S2 is the facing area between the second fixed electrode plate 102 and the moving electrode plate 20. The relationship (C1-C2) / (C1+C2) is then calculated as follows:

[0039] (C1-C2) / (C1+C2)=[εS1 / 4πk(dx)+εS1 / 4πk(d+x)-εS2 / 4πkd] / (εS1 / 4πk(dx)+εS1 / 4πk(d+x)+εS2 / 4πkd)=[2S1d 2 -S2(d 2 -x 2 )] / [2S1d 2 +S2(d 2 -x 2 )].

[0040] According to the relationship (C1-C2) / (C1+C2), it can be seen that in the case of torsion, when the torsion distance x of the moving plate 20 is much smaller than d, the relationship (C1-C2) / (C1+C2) is close to the case where no torsion occurs, and the influence of the torsion of the moving plate 20 on the relationship (C1-C2) / (C1+C2) can be ignored; and in the capacitor structure, the torsion distance x of the moving plate 20 is generally much smaller than the value of d. Therefore, in this embodiment, through the above-mentioned capacitor structure, when the moving plate 20 is torsioned by a small distance, the relationship (C1-C2) / (C1+C2) can offset the influence of the plate spacing, thereby improving the accuracy of capacitance detection, and further improving the accuracy of position detection.

[0041] However, when the torsion distance x of the moving electrode plate 20 is large, the accuracy of using only one fixed electrode plate assembly will also decrease, and there may be some situations where it cannot fully compensate. Therefore, to further solve the problem of poor capacitance detection accuracy caused by large torque, this embodiment provides multiple fixed electrode plate assemblies in a single capacitor structure.

[0042] like Figure 5 , which is a schematic structural diagram of the capacitor structure of this embodiment, a plurality of fixed plate assemblies are arranged on the same plane and perpendicular to the displacement direction.

[0043] In this embodiment, by providing multiple fixed electrode plate assemblies, as many fixed electrode plate assemblies as possible can be provided when the space for providing the capacitor structure is determined, and the space occupied by each fixed electrode plate assembly in the arrangement direction is as small as possible. In the event that the dynamic electrode plate 20 is twisted, the twist between the dynamic electrode plate 20 and each fixed electrode plate assembly will be significantly reduced relative to the overall twist, thereby further eliminating the capacitance deviation caused by the twisting of the dynamic electrode plate 20 and each fixed electrode plate assembly, thereby improving the accuracy of the overall capacitance detection and the accuracy of the position detection. It is worth mentioning that the more fixed electrode plate assemblies there are, the closer the dynamic electrode plate 20 and each fixed electrode plate assembly are to a parallel state, and the better the effect of eliminating the capacitance deviation caused by the twisting.

[0044] In one embodiment, in two adjacent fixed plate assemblies, the first fixed plate 101 of one fixed plate assembly is adjacent to and integrally arranged with the first fixed plate 101 of the other fixed plate assembly. Figure 5 As shown, two adjacent first fixed electrode plates 101 are merged into one first fixed electrode plate 101, thereby simplifying the manufacturing process of the capacitor structure.

[0045] Specifically, if Figure 5 As shown, the extension direction of the first gap L1 and the second gap L2 is a straight line. When there are multiple fixed plate assemblies, the multiple first gaps L1 and the multiple second gaps L2 are W-shaped. The W-shaped fixed plate assembly can further improve the compensation effect. In this embodiment, by setting the extension direction of the first gap L1 and the second gap L2 to a straight line and providing multiple fixed plate assemblies, when the moving electrode 20 moves along the displacement direction, the change in the facing area tends to change linearly, and the provision of multiple fixed plate assemblies offsets the effect of torsion on the capacitance. The change in the relationship (C1-C2) / (C1+C2) is as much as possible related only to the change in the facing area, so that the relationship (C1-C2) / (C1+C2) tends to change linearly with the change in the facing area, thereby further improving the accuracy of capacitance detection and further improving the accuracy of position detection.

[0046] On the other hand, an embodiment of the present application also provides an electronic device, including: a processing unit and the capacitor structure of the above embodiment; the processing unit is respectively connected to the moving electrode plate, the first fixed electrode plate, and the second fixed electrode plate; the processing unit obtains a first capacitor based on the first fixed electrode plate and the moving electrode plate, and the processing unit obtains a second capacitor based on the second fixed electrode plate and the moving electrode plate; the processing unit determines the position of the moving electrode plate based on the first capacitor and the second capacitor.

[0047] Specifically, the electronic device of this embodiment further includes a base, and the fixed electrode assembly is disposed on the base and is integrally formed with the base.

[0048] It is not difficult to find that this embodiment is an electronic device corresponding to the above embodiment, and this embodiment can be implemented in conjunction with the above embodiment. The relevant technical details mentioned in the above embodiment are still valid in this embodiment, and to reduce repetition, they are not repeated here. Accordingly, the relevant technical details mentioned in this embodiment can also be applied to the above embodiment.

[0049] In addition, in order to highlight the innovative part of this application, this embodiment does not introduce units that are not closely related to solving the technical problems raised by this application, but this does not mean that there are no other units in this embodiment.

[0050] The division of various components above is only for the purpose of clear description. During implementation, they can be combined into one component or some components can be split and decomposed into multiple components. As long as they include the same logical relationship, they are all within the scope of protection of this patent.

[0051] Those skilled in the art will appreciate that the above embodiments are specific embodiments for implementing the present application, and that in actual applications, various changes may be made thereto in form and detail without departing from the spirit and scope of the present application.

Claims

1. A capacitor structure, characterized in that: include: A fixed electrode assembly and a moving electrode moving along the displacement direction; The fixed electrode assembly includes two first fixed electrode plates and a second fixed electrode plate; the first fixed electrode plate and the second fixed electrode plate are arranged perpendicular to the displacement direction and arranged on the same plane, and the two first fixed electrode plates are symmetrically arranged on both sides of the second fixed electrode plate; the moving electrode plate is arranged opposite to the fixed electrode assembly; The length of the first fixed electrode plate in the displacement direction and the length of the second fixed electrode plate in the displacement direction are both greater than the stroke of the moving electrode plate in the displacement direction; there is a first gap between one of the first fixed electrode plate and the second fixed electrode plate, and there is a second gap between the other first fixed electrode plate and the second fixed electrode plate, and the extension directions of the first gap and the second gap are different from the displacement direction.

2. The capacitor structure according to claim 1, wherein: There are multiple fixed electrode plate assemblies; the multiple fixed electrode plate assemblies are on the same plane and arranged perpendicular to the displacement direction.

3. The capacitor structure according to claim 2, wherein: In two adjacent fixed electrode plate assemblies, the first fixed electrode plate of one fixed electrode plate assembly is adjacent to and integrally arranged with the first fixed electrode plate of the other fixed electrode plate assembly.

4. The capacitor structure according to any one of claims 1 to 3, characterized in that: In one of the fixed electrode plate assemblies, the two first fixed electrode plates and the two second fixed electrode plates together form a rectangular parallelepiped.

5. The capacitor structure according to claim 4, characterized in that: In one of the fixed electrode plate assemblies, the lengths of the first gap and the second gap in the displacement direction are equal to the length of the cuboid in the displacement direction; the lengths of the first gap and the second gap in the target direction are equal to half the width of the cuboid in the target direction; the target direction is a direction perpendicular to the displacement direction and parallel to the surface of the fixed electrode plate assembly close to the moving electrode plate.

6. The capacitor structure according to claim 1, wherein: In one of the fixed plate assemblies, the first gap and the second gap are V-shaped.

7. The capacitor structure according to claim 3, wherein: When there are multiple fixed plate assemblies, the multiple first gaps and the multiple second gaps are W-shaped.

8. The capacitor structure according to claim 1, wherein: The first fixed electrode plate and the moving electrode plate form a first capacitor, and the second fixed electrode plate and the moving electrode plate form a second capacitor.

9. An electronic device, characterized in that: include: A processing unit, a capacitor structure according to any one of claims 1 to 8; wherein the processing unit is respectively connected to the moving electrode plate, the first fixed electrode plate, and the second fixed electrode plate; The processing unit obtains a first capacitance according to the first fixed electrode plate and the moving electrode plate, and obtains a second capacitance according to the second fixed electrode plate and the moving electrode plate; the processing unit determines the position of the moving electrode plate according to the first capacitance and the second capacitance.

10. The electronic device according to claim 9, characterized in that Also includes: base; The fixed electrode plate assembly is arranged on the base and is integrally formed with the base.

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