Automatic optical film thickness scanning surveying instrument

Abstract

The utility model provides an automatic optical film thickness scanning surveying instrument, and belongs to the technical field of optical spectrum instruments. The automatic optical film thickness scanning surveying instrument comprises a shell; the test platform is arranged above the shell, and the test platform is used for placing an object to be tested; the horizontal slide rail assembly is arranged in the shell and is used for driving the test platform to move horizontally; the supporting rod is arranged on the shell, a longitudinal sliding rail assembly is arranged on the supporting rod, a collimating lens barrel is arranged on the longitudinal sliding rail assembly, an optical fiber is installed in the collimating lens barrel, and the longitudinal sliding rail assembly is used for driving the collimating lens barrel to move longitudinally; wherein the horizontal slide rail assembly and the longitudinal slide rail assembly are used for adjusting the relative position between the test platform and the collimating lens barrel, so as to adjust the placing space of an object to be tested. According to the automatic optical film thickness scanning surveying instrument, the height of the collimating lens cone is adjusted according to the size of an object to be measured, and the optical film thickness scanning surveying instrument is convenient to use.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of optical spectrum instruments, in particular to an automatic optical thin film thickness scanning mapping instrument. BACKGROUND

[0002] The optical thin film thickness scanning mapping instrument is a precision instrument for accurately measuring and mapping the thickness distribution of optical thin films, which is developed by using the interference principle of thin film reflected light. The instrument uses light with the widest wavelength range of 200-1700nm to vertically incident on the surface of the thin film. As long as the thin film has a certain degree of transmission, the thickness of the thin film can be calculated according to the reflected interference spectrum fitting. The maximum mapping range of the thickness can reach 5nm-250um.

[0003] The existing optical thin film thickness scanning mapping instrument fixes and installs the collimating mirror support on the shell, and completes the test by horizontally moving the test platform of the measured object. However, since the collimating mirror support is fixedly installed on the shell, the collimating mirror cannot be adjusted in the Z-axis direction. Therefore, the size of the measured object needs to be adjusted to a fixed range before the test can be started. If the material strength of the measured object is high and the hardness is large, it is difficult to adjust the size of the measured object, which makes the optical thin film thickness scanning mapping instrument inconvenient to use.

[0004] In order to solve the above problems, an automatic optical thin film thickness scanning mapping instrument is designed. CONTENT OF THE INVENTION

[0005] The present disclosure aims to overcome the shortcomings of the prior art and provide an automatic optical thin film thickness scanning mapping instrument, which can adjust the height of the collimating lens barrel according to the size of the measured object, and facilitate the use of the optical thin film thickness scanning mapping instrument.

[0006] To achieve the above-mentioned purposes, the present disclosure adopts the following technical solutions:

[0007] An automatic optical thin film thickness scanning mapping instrument comprises:

[0008] a shell;

[0009] a test platform arranged above the shell, the test platform being used for placing a measured object;

[0010] a horizontal slide rail assembly arranged in the shell, the horizontal slide rail assembly being used for driving the test platform to move horizontally;

[0011] a support rod arranged on the shell, a longitudinal slide rail assembly being arranged on the support rod, a collimating lens barrel being arranged on the longitudinal slide rail assembly, an optical fiber being arranged in the collimating lens barrel, and the longitudinal slide rail assembly being used for driving the collimating lens barrel to move longitudinally;

[0012] The horizontal slide rail assembly and the longitudinal slide rail assembly are used to adjust the relative position between the test platform and the collimator barrel, so as to adjust the placement space of the to-be-tested article.

[0013] In an example embodiment of the present disclosure, the housing is provided with a mounting seat extending in the axial direction, the horizontal slide rail assembly and the support rod are sequentially arranged at the top end of the mounting seat, the top end of the horizontal slide rail assembly extends out of the housing and is connected with the test platform, and the top end of the support rod extends out of the housing and is connected with the longitudinal slide rail assembly.

[0014] In an example embodiment of the present disclosure, the support rod comprises a support rod body.

[0015] The support rod body is arranged at the top end of the mounting seat, the top end of the support rod body extends out of the housing and is connected with the longitudinal slide rail assembly, and the optical fiber extends into the housing along the support rod body and is connected with the spectrometer.

[0016] In an example embodiment of the present disclosure, a plurality of buckles for fixing the optical fiber are arranged at intervals on the support rod body.

[0017] In an example embodiment of the present disclosure, a support rod rear plate is detachably arranged on the side wall of the support rod body away from the longitudinal slide rail assembly, and a support rod upper cover is arranged at the top end of the support rod body, and the support rod rear plate and the support rod upper cover are used to protect the optical fiber.

[0018] In an example embodiment of the present disclosure, the longitudinal slide rail assembly comprises:

[0019] A guide rail is arranged on the side wall of the support rod and extends in the longitudinal direction.

[0020] A sliding block is slidably arranged on the guide rail, and the collimator barrel is mounted on the sliding block.

[0021] A motor is arranged at the top end of the support rod, one end of a lead screw is connected with the output end of the motor, and the other end of the lead screw passes through the sliding block and is threadedly connected with the sliding block.

[0022] In an example embodiment of the present disclosure, a connecting block is arranged on the sliding block, and the collimator barrel is arranged on the connecting block.

[0023] In an example embodiment of the present disclosure, a rotary motor is arranged on the horizontal slide rail assembly, and the test platform is arranged on the rotary motor.

[0024] In an example embodiment of the present disclosure, a front cover is arranged at one end of the housing, and a rear cover is arranged at the other end of the housing.

[0025] In one example embodiment of the present disclosure, the optical fiber is a Y-type optical fiber.

[0026] Advantages of the present disclosure:

[0027] The present disclosure provides an automatic optical film thickness scanning profiler, which adjusts the horizontal position of the measured object through a horizontal sliding rail assembly, adjusts the height of the collimator barrel through a longitudinal sliding rail assembly, and adjusts the placement space of the measured object through the cooperation of the longitudinal sliding rail assembly and the horizontal sliding rail assembly, so that the test of the optical film thickness scanning profiler is more flexible, the use of the optical film thickness scanning profiler is facilitated, and the test efficiency of the optical film thickness scanning profiler is improved. BRIEF DESCRIPTION OF DRAWINGS

[0028] The accompanying drawings, which are incorporated into and form a part of the specification, illustrate one embodiment consistent with the present disclosure and, together with the description, serve to explain the principles of the disclosure. Obviously, the drawings in the following description are only some embodiments of the present disclosure, and other drawings can be obtained from these drawings without creative labor for those skilled in the art.

[0029] Figure 1 For an embodiment of the present disclosure, a schematic structural diagram of an automatic optical film thickness scanning profiler is shown in the figure.

[0030] Figure 2 For an embodiment of the present disclosure, a side view of an automatic optical film thickness scanning profiler is shown in the figure.

[0031] Figure 3 For an embodiment of the present disclosure, a top view of an automatic optical film thickness scanning profiler is shown in the figure.

[0032] Figure 4 For an embodiment of the present disclosure, a sectional view of an automatic optical film thickness scanning profiler is shown in the figure.

[0033] Explanation of reference signs:

[0034] 1, housing; 2, test platform; 3, horizontal sliding rail assembly; 4, support rod; 5, longitudinal sliding rail assembly; 6, collimator barrel; 7, mounting seat; 8, support rod body; 9, buckle; 10, support rod back plate; 11, support rod upper cover; 12, guide rail; 13, sliding block; 14, motor; 15, lead screw; 16, connecting block; 17, rotary motor; 18, front cover; 19, rear cover. DETAILED DESCRIPTION

[0035] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations can be implemented in any

[0036] Although relative terms such as "upper," "lower," are used herein to describe one component's relationship to another component of a figure, such terminology is used herein for convenience only and is not intended to limit the scope of the disclosure in any way. It is to be understood that, when a figure is inverted, such relative terms as "upper" and "lower" are to be construed as "lower" and "upper," respectively, and vice versa. When a structure is "on" or "under" another structure, it can mean that the structure is formed integrally with the other structure or that the structure is "directly" on or under the other structure, or that the structure is "indirectly" on or under the other structure by way of another structure.

[0037] The terms "one," "a," "an," "the," and "said" are used to indicate that there is one or more of something / constituent / part, etc.; the terms "include" and "has" are used to indicate an open-ended inclusion of something / constituent / part, etc. in the description and are not meant to exclude additional elements / constituents / etc.; the terms "first," "second," and "third," etc. are used only as labels, and are not meant to constitute a limitation on the number of something.

[0038] The embodiment of the present disclosure provides an automatic optical film thickness scanning profiler, referring to Figures 1 to 4 , comprising: a shell 1; a test platform 2 arranged above the shell 1, the test platform 2 being used for placing an object to be measured; a horizontal sliding rail assembly 3 arranged in the shell 1, the horizontal sliding rail assembly 3 being used for driving the test platform 2 to move horizontally; a support rod 4 arranged on the shell 1, the support rod 4 being provided with a longitudinal sliding rail assembly 5, the longitudinal sliding rail assembly 5 being provided with a collimating lens barrel 6, the collimating lens barrel 6 being installed with an optical fiber, and the longitudinal sliding rail assembly 5 being used for driving the collimating lens barrel 6 to move longitudinally; wherein the horizontal sliding rail assembly 3 and the longitudinal sliding rail assembly 5 are used for adjusting the relative position between the test platform 2 and the collimating lens barrel 6, so as to adjust the placement space of the object to be measured.

[0039] In the embodiment of the present application, the automatic optical film thickness scanning profiler is composed of a housing 1, a test platform 2, a horizontal slide rail assembly 3, a support rod 4, a longitudinal slide rail assembly 5 and a collimating lens barrel 6. The test platform 2 is installed above the housing 1 and connected with the horizontal slide rail assembly 3 installed in the housing 1. The test object is placed on the test platform 2. The horizontal slide rail assembly 3 can drive the test platform 2 and the test object on it to move horizontally. The longitudinal slide rail assembly 5 is installed on the housing 1 through the support rod 4. The collimating lens barrel 6 with an optical fiber is installed on the longitudinal slide rail assembly 5. The longitudinal slide rail assembly 5 can drive the collimating lens barrel 6 to move longitudinally. The relative position between the test object and the collimating lens barrel 6 is adjusted through the horizontal slide rail assembly 3 and the longitudinal slide rail assembly 5 to complete the detection of the test object.

[0040] Compared with the existing optical film thickness scanning profiler, the automatic optical film thickness scanning profiler adjusts the horizontal position of the test object through the horizontal slide rail assembly, adjusts the height of the collimating lens barrel through the longitudinal slide rail assembly, and adjusts the placement space of the test object through the cooperation of the longitudinal slide rail assembly and the horizontal slide rail assembly, so that the test of the optical film thickness scanning profiler is more flexible, the use of the optical film thickness scanning profiler is more convenient, and the test efficiency of the optical film thickness scanning profiler is improved.

[0041] In an embodiment of the present application, referring to Figure 1 and Figure 4 , the housing 1 is provided with an installation seat 7 extending in the axial direction. The horizontal slide rail assembly 3 and the support rod 4 are sequentially arranged at the top end of the installation seat 7. The top end of the horizontal slide rail assembly 3 extends out of the housing 1 and is connected with the test platform 2. The top end of the support rod 4 extends out of the housing 1 and is connected with the longitudinal slide rail assembly 5. In this way, the horizontal slide rail assembly 3 and the longitudinal slide rail assembly 5 can be arranged coaxially, which facilitates the cooperation between the horizontal slide rail assembly 3 and the longitudinal slide rail assembly 5 and facilitates the detection of the test object.

[0042] In an embodiment of the present application, referring to Figure 1 , a guide groove extending in the axial direction is formed in the top wall of the housing 1. The top end of the horizontal slide rail assembly 3 extends out of the housing 1 through the guide groove and is connected with the test platform 2. In this way, the movement range of the test platform 2 can be limited.

[0043] In an embodiment of the present application, referring to Figure 1 , Figure 3 and Figure 4 , a track is arranged on the inner wall at the top end of the housing 1. The top end of the horizontal slide rail assembly 3 extends out of the housing 1 through the track and is connected with the track. In this way, the movement of the horizontal slide rail assembly 3 can be buffered to avoid collision between the horizontal slide rail assembly 3 and the housing 1.

[0044] In an embodiment of the present application, referring toFigure 4 The support rod 4 comprises a support rod body 8; the support rod body 8 is arranged at the top end of the mounting base 7, the top end of the support rod body 8 extends out of the shell 1 and is connected with the longitudinal slide rail assembly 5, and the optical fiber extends along the support rod body 8 into the shell 1 and is connected with the spectrometer. In this way, the optical fiber can be guided, the spectrometer and the collimator tube 6 in the shell 1 are conveniently connected with the optical fiber, and the to-be-detected object is conveniently detected.

[0045] In an embodiment of the present disclosure, referring to Figure 4 A plurality of buckles 9 for fixing the optical fiber are arranged on the support rod body 8 at intervals. In this way, the optical fiber can be fixed, the optical fiber is prevented from being damaged due to abrasion, and the service life of the optical fiber is improved.

[0046] In an embodiment of the present disclosure, referring to Figure 4 A support rod rear plate 10 is detachably arranged on the side wall of the support rod body 8 away from the longitudinal slide rail assembly 5, and a support rod upper cover 11 is arranged at the top end of the support rod body 8, and the support rod rear plate 10 and the support rod upper cover 11 are used for protecting the optical fiber. In this way, the optical fiber can be protected, and the optical fiber is prevented from being damaged.

[0047] In an embodiment of the present disclosure, referring to Figure 2 The longitudinal slide rail assembly 5 comprises a guide rail 12 arranged on one side wall of the support rod 4 and extending in the longitudinal direction, a sliding block 13 slidingly arranged on the guide rail 12, and a collimator tube 6 mounted on the sliding block 13, a motor 14 arranged at the top end of the support rod 4, a lead screw 15 having one end connected with the output end of the motor 14 and the other end penetrating through the sliding block 13 and being threadedly connected with the sliding block 13. In this way, the distance of the collimator tube 6 moving up and down can be accurately controlled, the relative position of the collimator tube 6 and the to-be-detected object is conveniently adjusted, and the to-be-detected object is conveniently detected.

[0048] It can be understood that a limiting block is arranged on the guide rail 12 and is rotationally connected with the lead screw 15 to limit the sliding block 13.

[0049] In an embodiment of the present disclosure, referring to Figures 1 to 4 A connecting block 16 is arranged on the sliding block 13, and the collimator tube 6 is arranged on the connecting block 16. In this way, the collimator tube 6 is conveniently mounted on the longitudinal slide rail assembly 5, and the height of the collimator tube 6 is conveniently adjusted by the longitudinal slide rail assembly 5.

[0050] In an embodiment of the present disclosure, referring to Figure 3 A rotating motor 17 is arranged on the horizontal slide rail assembly 3, and the test platform 2 is arranged on the rotating motor 17. In this way, the horizontal angle of the to-be-detected object is adjusted, and the to-be-detected object is conveniently detected.

[0051] Optionally, the angle positioning accuracy of the rotary motor 17 is ±0.01°.

[0052] In one embodiment of the present disclosure, referring to Figure 4 The horizontal slide rail assembly 3 comprises a motor, a guide rail, a sliding block, and a lead screw. The motor and the guide rail are sequentially arranged at the top end of the mounting base 7. The sliding block is slidingly arranged on the guide rail. The lead screw is connected at one end to the output end of the motor and is rotatably connected at the other end to the top end of the mounting base 7 through the sliding block and is threadedly connected with the sliding block. The rotary motor 17 is arranged at the top end of the sliding block. The output shaft of the rotary motor 17 extends out of the housing 1 and is connected with the test platform 2.

[0053] In one embodiment of the present disclosure, referring to Figure 1 , Figure 2 and Figure 4 One end of the housing 1 is provided with a front cover 18, and the other end of the housing 1 is provided with a rear cover 19. In this way, the optical components of the housing 1 can be protected.

[0054] In one embodiment of the present disclosure, the optical fiber is a Y-shaped optical fiber. In this way, the detection accuracy and sensitivity of the optical fiber can be improved.

[0055] In one embodiment of the present disclosure, the automatic optical thin film thickness scanning mapping instrument further comprises a host computer software. The host computer software calculates the film thickness, reflectivity, refractive index, and extinction coefficient by analyzing the reflection interference spectrum of the object to be measured.

[0056] In one embodiment of the present disclosure, referring to Figures 1 to 4 The working process of the automatic optical thin film thickness scanning mapping instrument is briefly described as follows:

[0057] In use, first, the motor 14 is started to move the collimator lens barrel 6 to the highest position. Then, the object to be measured is placed on the test platform 2. The horizontal slide rail assembly 3 is started to adjust the horizontal position of the object to be measured. The object to be measured is moved below the collimator lens barrel 6. The rotary motor 17 is started to adjust the horizontal angle of the object to be measured. The motor 14 is started again to adjust the height of the collimator lens barrel 6. After the collimator lens barrel 6 is moved to an appropriate height, the object to be measured is detected.

[0058] Other embodiments of the present disclosure will be readily apparent to those skilled in the art upon considering the specification and practicing the present utility model as disclosed herein. The present application is intended to cover any variations, uses, or adaptive changes of the present disclosure that follow the general principles of the present disclosure and include common knowledge or conventional technical means in the technical field of the present disclosure not disclosed by the present disclosure. The specification and examples are only considered as exemplary, and the true scope and spirit of the present disclosure are indicated by the appended claims.

Claims

1. An automated optical film thickness mapping scanner, comprising: The utility model relates to a kind of test platform and collimating lens barrel, including: Shell (1); Test platform (2), it is above the shell (1), the test platform (2) is used to place the article to be tested; Horizontal slide rail assembly (3), it is in the shell (1), the horizontal slide rail assembly (3) is used to drive the test platform (2) horizontal movement; Supporting rod (4), it is on the shell (1), longitudinal slide rail assembly (5) is provided on the supporting rod (4), collimating lens barrel (6) is provided on the longitudinal slide rail assembly (5), optical fiber is installed in the collimating lens barrel (6), the longitudinal slide rail assembly (5) is used to drive the collimating lens barrel (6) longitudinal movement; Wherein, the horizontal slide rail assembly (3) and the longitudinal slide rail assembly (5) are used to adjust the relative position between the test platform (2) and the collimating lens barrel (6), to adjust the placement space of the article to be tested.

2. The automated optical film thickness sweep mapper of claim 1, wherein, The shell (1) is provided with mounting seat (7) extending along the axis, the horizontal slide rail assembly (3) and the supporting rod (4) are sequentially arranged at the top of the mounting seat (7), the top of the horizontal slide rail assembly (3) extends out of the shell (1) and is connected with the test platform (2), the top of the supporting rod (4) extends out of the shell (1) and is connected with the longitudinal slide rail assembly (5).

3. The automated optical film thickness sweep mapper of claim 2, wherein, The supporting rod (4) includes supporting rod main body (8); The supporting rod main body (8) is arranged at the top of the mounting seat (7), the top of the supporting rod main body (8) extends out of the shell (1) and is connected with the longitudinal slide rail assembly (5), and the optical fiber extends into the shell (1) along the supporting rod main body (8) and is connected with the spectrometer.

4. The automated optical film thickness sweep mapper of claim 3, wherein, A plurality of buckles (9) for fixing the optical fiber are arranged on the supporting rod main body (8) at intervals.

5. The automated optical film thickness sweep mapper of claim 4, wherein, The side wall of the supporting rod main body (8) away from the longitudinal slide rail assembly (5) is detachably provided with a supporting rod back plate (10), and the top of the supporting rod main body (8) is provided with a supporting rod upper cover (11), and the supporting rod back plate (10) and the supporting rod upper cover (11) are used to protect the optical fiber.

6. The automated optical film thickness sweep mapper of claim 1, wherein, The longitudinal slide rail assembly (5) includes: Guide rail (12), it is on the side wall of the supporting rod (4), and the guide rail (12) extends longitudinally; Sliding block (13), it is slidably arranged on the guide rail (12), and the collimating lens barrel (6) is mounted on the sliding block (13); Motor (14), it is arranged at the top of the supporting rod (4), one end of lead screw (15) is connected with the output end of the motor (14), the other end of the lead screw (15) penetrates through the sliding block (13) and is threadedly connected with the sliding block (13).

7. The automated optical film thickness sweep mapper of claim 6, wherein, The sliding block (13) is provided with a connecting block (16), and the collimating lens barrel (6) is arranged on the connecting block (16).

8. The automated optical film thickness sweep mapper of claim 1, wherein, The horizontal slide rail assembly (3) is provided with a rotating motor (17), and the test platform (2) is arranged on the rotating motor (17).

9. The automated optical film thickness sweep mapper of claim 1, wherein, One end of the shell (1) is provided with a front cover (18), and the other end of the shell (1) is provided with a rear cover (19).

10. The automated optical film thickness sweep mapper of claim 1, wherein, The optical fiber is Y-shaped optical fiber.

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