Crystal edge exposure apparatus and exposure machine

Abstract

An edge exposure apparatus and exposure machine are disclosed. The edge exposure apparatus includes: multiple LED light source modules with different light source wavelengths for emitting exposure beams; a focusing module, corresponding to each LED light source module and located in the optical path of the corresponding exposure beam, for focusing the light to a focal position; optical fibers, each corresponding to a focusing module, with their input ends located at the focal position of the corresponding focusing module; and an optical fiber combiner, with its input end connected to the output end of each optical fiber. The multiple LED light source modules have different light source wavelengths, enabling the provision of different wavelengths of light according to different process requirements and different wafer types, thus improving the integration and versatility of the edge exposure apparatus. Furthermore, by first focusing the light to the focal position through the focusing module and then homogenizing the focused beam formed by the focusing module through the optical fiber combiner, the light source utilization rate of the edge exposure apparatus is improved, while simultaneously enhancing the stability and process accuracy of the apparatus, thereby improving its exposure performance.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing, and in particular to a crystal edge exposure device and an exposure machine. Background Technology

[0002] In the semiconductor manufacturing field, optical exposure technology is a core process for achieving high-precision pattern transfer. As process nodes continue to shrink, higher demands are placed on the resolution, uniformity, and versatility of the edge exposure equipment used for exposure.

[0003] Currently, the versatility of the light source in mainstream crystal edge exposure equipment cannot meet the process requirements, and there are problems such as low light source utilization and low exposure uniformity, which makes the exposure performance of crystal edge exposure equipment unable to meet the process requirements.

[0004] Therefore, improving the light source utilization and exposure performance of crystal edge exposure devices has become an urgent problem to be solved. Utility Model Content

[0005] The problem solved by this utility model embodiment is to provide a crystal edge exposure device to improve the light source utilization and exposure performance of the crystal edge exposure device.

[0006] To address the aforementioned problems, this utility model provides a crystal edge exposure device, comprising: multiple LED light source modules for emitting exposure beams, wherein the light source wavelengths of the multiple LED light source modules are all different; a focusing module, corresponding one-to-one with each of the LED light source modules and located in the optical path of the exposure beam emitted by the corresponding LED light source module, the focusing module being used to converge the beam emitted by the LED light source module to a focusing position; optical fibers, each corresponding one-to-one with the focusing module, the input end of the optical fiber being located at the focusing position of the corresponding focusing module, the optical fiber being used to conduct the light focused by the focusing module; and an optical fiber combiner, the input end of the optical fiber combiner being connected to the output end of each of the optical fibers.

[0007] Optionally, the focusing module includes: a reflector bowl having a connected light outlet and a light inlet, the inner wall of the reflector bowl having a light-reflecting surface, and the light-reflecting surface being parabolic; the light outlet being located on the side of the reflector bowl away from the focal point of the parabolic surface, and the light inlet being located on the side of the reflector bowl closer to the focal point of the parabolic surface, with the center position of the light inlet perpendicularly mapped onto the focal plane of the light-reflecting surface as the center mapping position; and a focusing lens disposed on the reflector bowl and covering the light outlet, the focusing lens being used to converge the light emitted through the light outlet to a focused position. The focal point of the condenser lens is located at the focal point of the exposure beam emitted by the LED light source module after passing through the condenser module; the LED light source module is disposed inside the corresponding reflector bowl, the light source of the LED light source module is located at the center mapping position of the focal plane of the light reflecting surface, and the exposure beam emitted by the LED light source module is emitted parallel to the outside of the reflector bowl through the light outlet; the input end of the optical fiber is located at the focal point of the corresponding condenser lens, and the focal point is located at the focal point of the exposure beam emitted by the LED light source module after passing through the condenser module.

[0008] Optionally, the crystal edge exposure device further includes: a heat-conducting plate; one end of the reflector bowl away from the light outlet is disposed on the heat-conducting plate, and the light inlet of the reflector bowl exposes the heat-conducting plate; the LED light source module is disposed on the heat-conducting plate at the light inlet position.

[0009] Optionally, the crystal edge exposure device further includes: a heat-conducting plate, the heat-conducting plate having a first side and a second side disposed opposite to each other; the reflector bowl and the LED light source module are both disposed on the first side of the heat-conducting plate; the crystal edge exposure device further includes: a heat sink, disposed on the second side of the heat-conducting plate.

[0010] Optionally, the heat sink includes: a fan disposed on the second surface and located in the central region of the second surface; and heat dissipation fins disposed on the second surface and arranged sequentially around the fan.

[0011] Optionally, the heat dissipation fins and the heat-conducting plate are an integral structure.

[0012] Optionally, the reflector bowl includes a reflector bowl body and a boss. The reflector bowl body has a light inlet at one end facing the heat-conducting plate, and the inner wall of the reflector bowl body has a light-reflecting surface. The boss is connected to the end of the reflector bowl body facing the heat-conducting plate and is fixed to the heat-conducting plate. The boss has a mounting opening communicating with the light inlet. The LED light source module is located in the mounting opening, and the height of the LED beads in the LED light source module is equal to the height of the boss.

[0013] Optionally, the reflector bowl may be a reflector bowl made of metal, a reflector bowl made of fused silica, or a reflector bowl made of calcium fluoride.

[0014] Optionally, the inner wall of the reflective bowl has a reflective coating, and the surface of the reflective coating is the light-reflecting surface.

[0015] Optionally, the reflector bowl further includes: an inner platform disposed on the inner wall at the light outlet position; an outer platform disposed on the inner wall at the light outlet position, the inner platform being disposed on the side of the outer platform away from the light outlet, and a gap being formed between the outer platform and the inner platform; and the condensing lens being fixed in the gap.

[0016] Optionally, the distance between the inner platform and the outer platform along the axial direction of the light-reflecting surface ranges from 2 mm to 5 mm.

[0017] Optionally, the focusing lens includes an incident surface facing the light outlet, and the incident surface has an anti-reflection coating.

[0018] Optionally, the crystal edge exposure device further includes: a light box, the light box including a top wall and a bottom wall disposed opposite to each other, the bottom wall of the light box having a through light-emitting hole, the light-emitting hole corresponding one-to-one with the focusing module, and the light-emitting hole being located at the focusing position of the corresponding focusing module; the top wall of the light box having a through window; the crystal edge exposure device further includes: a heat-conducting plate, the heat-conducting plate being disposed on the top wall outside the light box and covering the window; the LED light source module and the focusing module are both located inside the light box, and the LED light source module and the focusing module are both disposed on the heat-conducting plate exposed by the window; the input end of the optical fiber is connected to the corresponding light-emitting hole.

[0019] Optionally, the heat-conducting plate includes a first side and a second side arranged opposite to each other; the focusing module and the LED light source module are both disposed on the first side of the heat-conducting plate; the crystal edge exposure device further includes: a heat sink disposed on the second side of the heat-conducting plate; and a dust cover disposed on the top wall outside the light box and covering the heat sink.

[0020] Accordingly, this utility model embodiment also provides an exposure machine, including the crystal edge exposure device described in any embodiment of this utility model.

[0021] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0022] This utility model provides a crystal edge exposure device, comprising: multiple LED light source modules for emitting light beams, wherein the light source wavelengths of the multiple LED light source modules are different; a focusing module, corresponding one-to-one with the LED light source modules and located in the optical path of the exposure light beam emitted by the corresponding LED light source module, the focusing module being used to converge the exposure light beam emitted by the LED light source module to a focusing position; optical fibers corresponding one-to-one with the focusing modules, the input end of the optical fibers being located at the focusing position of the corresponding focusing module, the optical fibers being used to conduct the light focused by the focusing module; and an optical fiber combiner, the input end of the optical fiber combiner being connected to the output end of each of the optical fibers. Employing multiple LED light source modules with different wavelengths allows the crystal edge exposure device to provide exposure beams of different wavelengths according to different process requirements or wafer types, which is beneficial to improving the integration and versatility of the device. Furthermore, by first focusing the exposure beam emitted by the LED light source modules to the focal point using a focusing module, and then receiving the focused light by the optical fiber, the divergence angle of the beam is reduced, ensuring that the light emitted by the LED light source modules is fully received by the optical fiber, thereby improving the light source utilization rate of the crystal edge exposure device. In addition, the input end of the fiber optic combiner is connected to the output end of each of the optical fibers. When multiple LEDs are used... When the LED light source module emits light, the focusing module forms a focused beam, which is then homogenized by an optical fiber combiner. This homogenization process treats the light from multiple LED light source modules with different wavelengths, forming a uniform light field in the optical fiber combiner before it is emitted onto the object to be exposed. This improves the exposure uniformity of the crystal edge exposure device, thereby enhancing its stability and process accuracy, and ultimately improving its exposure performance. In summary, by employing the crystal edge exposure device provided in this embodiment, different wavelengths of light can be emitted according to different process requirements while simultaneously improving the exposure performance of the crystal edge exposure device.

[0023] In an optional embodiment, the focusing module includes: a reflector bowl having a light outlet and a light inlet, the inner wall of the reflector bowl having a light-reflecting surface, and the light-reflecting surface being parabolic; the light outlet being located on the side of the reflector bowl away from the focal point of the parabolic surface; the light inlet being located on the side of the reflector bowl closer to the focal point of the parabolic surface; and the center position of the light inlet being perpendicularly mapped onto the focal plane of the light-reflecting surface as the center mapping position; a focusing lens disposed on the reflector bowl and covering the light outlet; the focusing lens being used to converge the light emitted through the light outlet to the focusing position; the focal position of the focusing lens being the focusing position of the exposure beam emitted by the LED light source module after passing through the focusing module; the LED light source module being disposed inside the corresponding reflector bowl; the light source of the LED light source module being located at the center mapping position of the focal plane of the light-reflecting surface; and the exposure beam emitted by the LED light source module being emitted parallel to the outside of the reflector bowl through the light outlet. The light-reflecting surface is parabolic, and the light source of the LED light source module is located at the center of the focal plane of the light-reflecting surface. This allows the exposure beam emitted by the LED light source module to be emitted parallel to the condenser lens through the light outlet. This facilitates the projection of the beam reflected from the reflector bowl onto the condenser lens. Furthermore, the condenser lens covers the light outlet, maximizing the integration and focusing of the exposure beam emitted by the LED light source module, effectively suppressing beam divergence and escape, and thus further improving the light source utilization rate of the crystal edge exposure device. At the same time, using the reflector bowl and condenser lens as the condenser module helps reduce the complexity of the optical path, thereby improving the integration and reducing the size of the crystal edge exposure device.

[0024] Accordingly, this utility model embodiment provides an exposure machine, which includes the crystal edge exposure device described in this utility model embodiment. Since the crystal edge exposure device integrates an LED light source module, a focusing module, an optical fiber and an optical fiber combiner that can provide multiple wavelengths, it can emit light of different wavelengths according to different process requirements while improving the exposure performance of the crystal edge exposure device, thereby improving the working performance of the exposure machine. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a crystal edge exposure apparatus according to an embodiment of the present invention;

[0026] Figure 2 yes Figure 1 A schematic diagram of the structure of a focusing lens in one embodiment of the crystal edge exposure apparatus shown;

[0027] Figure 3 yes Figure 1 A schematic diagram of the structure of an LED light source module in one embodiment of the crystal edge exposure apparatus shown;

[0028] Figure 4 yes Figure 1 A schematic diagram of the heat sink in one embodiment of the crystal edge exposure apparatus shown.

[0029] Figure 5 yes Figure 1 A cross-sectional view of the reflector bowl in one embodiment of the crystal edge exposure apparatus shown;

[0030] Figure 6 yes Figure 1 A schematic diagram of the overall structure of an embodiment of the crystal edge exposure apparatus shown. Detailed Implementation

[0031] As can be seen from the background technology, how to improve the utilization rate of light sources and lighting performance has become an urgent problem to be solved.

[0032] To address the aforementioned technical problems, this utility model provides a crystal edge exposure device, comprising: multiple LED light source modules for emitting exposure beams, wherein the light source wavelengths of the multiple LED light source modules are all different; a focusing module, corresponding one-to-one with each of the LED light source modules and located in the optical path of the exposure beam emitted by the corresponding LED light source module, the focusing module being used to converge the exposure beam emitted by the LED light source module to a focusing position; optical fibers, each corresponding one-to-one with the focusing module, the input end of the optical fiber being located at the focusing position of the corresponding focusing module, the optical fiber being used to conduct the light focused by the focusing module; and an optical fiber combiner, the input end of the optical fiber combiner being connected to the output end of each of the optical fibers.

[0033] Employing multiple LED light source modules with different wavelengths allows the crystal edge exposure device to provide exposure beams of different wavelengths according to different process requirements or wafer types, which improves the integration and versatility of the device. Furthermore, by first focusing the exposure beam emitted by the LED light source modules to the focal point using a focusing module, and then receiving the focused light by the optical fiber, the divergence angle of the beam is reduced, ensuring that the light emitted by the LED light source modules is fully received by the optical fiber, thereby improving the light source utilization rate of the crystal edge exposure device. In addition, the input end of the fiber optic combiner is connected to the output end of each of the optical fibers, allowing for the use of multiple... When the LED light source module emits light, the focusing module forms a focused beam, which is then homogenized by an optical fiber combiner. This homogenization process applies light from multiple LED light source modules with different wavelengths, creating a uniform light field that is then emitted onto the object to be exposed. This improves the exposure uniformity of the crystal edge exposure device, thereby enhancing its stability and process accuracy, and ultimately improving its exposure performance. In summary, by employing the crystal edge exposure device provided in this embodiment, different wavelengths of light can be emitted according to different process requirements while simultaneously improving the exposure performance of the crystal edge exposure device.

[0034] To make the above-mentioned objectives, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0035] Figure 1 This is a schematic diagram of the structure of a crystal edge exposure apparatus according to an embodiment of the present invention. Figure 2 yes Figure 1 A schematic diagram of the condenser lens in one embodiment of the crystal edge exposure apparatus is shown. Figure 3 yes Figure 1 The diagram shows a structural schematic of an LED light source module in one embodiment of the crystal edge exposure apparatus. Figure 4 yes Figure 1 The diagram shows a schematic of the heat sink in one embodiment of the crystal edge exposure apparatus. Figure 5 yes Figure 1 A cross-sectional view of the reflector bowl in one embodiment of the crystal edge exposure apparatus shown. Figure 6 yes Figure 1 A schematic diagram of the overall structure of an embodiment of the crystal edge exposure apparatus shown.

[0036] It should be noted that, Figure 5 The focal plane of the light-reflecting surface of the reflector bowl is represented by a dashed line.

[0037] refer to Figures 1 to 6The crystal edge exposure apparatus includes: multiple LED light source modules 10 for emitting exposure beams, wherein the light source wavelengths of the multiple LED light source modules 10 are different; a focusing module 20, corresponding one-to-one with the LED light source modules 10 and located in the optical path of the exposure beam emitted by the corresponding LED light source module 10, wherein the focusing module 20 is used to converge the exposure beam emitted by the LED light source module 10 to a focusing position 21; an optical fiber 30 corresponding one-to-one with the focusing module 20, wherein the input end 31 of the optical fiber 30 is located at the focusing position 21 of the corresponding focusing module 20, wherein the optical fiber 30 is used to conduct the light focused by the focusing module 20; and an optical fiber combiner 40, wherein the input end 41 of the optical fiber combiner 40 is connected to the output end 32 of each of the optical fibers 30.

[0038] In this embodiment, multiple LED light source modules 10 with different wavelengths are used, enabling the crystal edge exposure device to provide exposure beams of different wavelengths according to different process requirements or different wafer types, which is beneficial to improving the integration and versatility of the crystal edge exposure device. Furthermore, the exposure beam emitted by the LED light source modules 10 is first focused to the focal position 21 by the focusing module 20, and then the focused light is received by the optical fiber 30, which helps to reduce the beam divergence angle and ensures that the light emitted by the LED light source modules 10 is fully received by the optical fiber 30, thereby improving the light source utilization rate of the crystal edge exposure device. In addition, the input end 41 of the fiber optic combiner 40 is connected to the output end 32 of each of the optical fibers 30. When multiple LED light source modules 10 emit light, the focusing module 20 forms a focused beam, which is then homogenized by the fiber optic combiner 40. This homogenization process homogenizes the light provided by the multiple LED light source modules 10 with different wavelengths. After forming a uniform light field in the fiber optic combiner 40, the light is emitted onto the object to be exposed (e.g., wafer 500). This improves the exposure uniformity of the crystal edge exposure device, thereby enhancing its stability and process accuracy, and ultimately improving its exposure performance. In summary, by using the crystal edge exposure device provided in this embodiment, different wavelengths of light can be emitted according to different process requirements while simultaneously improving the exposure performance of the crystal edge exposure device.

[0039] The LED light source module 10 is used as a light source to emit an exposure beam.

[0040] It should be noted that, compared to mercury lamp light sources, using LED light sources helps to reduce the cost of the light source.

[0041] As an example, each LED light source module 10 is used to emit ultraviolet light.

[0042] In exposure-related applications, ultraviolet light has the characteristics of short wavelength and high resolution, which is beneficial for reducing the minimum resolvable feature size in the photolithography process, improving the illumination effect of the crystal edge exposure device, and thus improving the accuracy of the exposure pattern. In addition, ultraviolet light sources can shorten the exposure time, thereby improving the working efficiency of the crystal edge exposure device. Furthermore, ultraviolet light sources have the characteristics of long service life and low heat radiation generated during operation, which is beneficial for improving the service life and reliability of the crystal edge exposure device.

[0043] It should be noted that the multiple LED light source modules 10 have different light source wavelengths, thus enabling them to emit ultraviolet light of different wavelengths according to different process requirements.

[0044] It should also be noted that the LED light source module 10 should be selected based on the actual exposure requirements and the wavelength requirements. For example, the light source wavelength of the LED light source module 10 may include any one of 193nm, 248nm, and 365nm.

[0045] In other embodiments, the LED light source module may also be used to emit other types of light, depending on the actual application scenario.

[0046] The focusing module 20 is used to converge the exposure beam emitted by the LED light source module 10 to the focusing position 21.

[0047] Continue to refer to Figure 1 , Figure 2 and Figure 5 In this embodiment, the focusing module 20 includes: a plurality of reflector bowls 200, each reflector bowl 200 having a connected light outlet 201 and a light inlet 204, the inner wall of each reflector bowl 200 having a light reflecting surface 202, and the light reflecting surface 202 being a parabola, the light outlet 201 being located on the side of the reflector bowl 200 away from the focal point of the parabola, and the light inlet 204 being located on the side of the reflector bowl 200 close to the focal point of the parabola; and a focusing lens 210, disposed on the reflector bowl 200 and covering the light outlet 201, the focusing lens 210 being used to converge the light emitted through the light outlet 201 to a focusing position 21, the focal point of the focusing lens 210 being the focusing position 21.

[0048] The focusing lens 210 covers the light outlet 201, which integrates and focuses the exposure beam from the LED light source module 10 to the greatest extent, effectively suppressing the problem of beam divergence and escape, and thus helping to further improve the light source utilization rate of the crystal edge exposure device.

[0049] As an example, such as Figure 1As shown, the condenser lens 210 covers the light outlet 201, and the diameter of the condenser lens 210 is equal to that of the light outlet 201 of the reflector bowl 200, effectively suppressing resource waste and helping to reduce costs. In other embodiments, the diameter of the condenser lens can also be smaller or larger than the diameter of the light outlet of the reflector bowl.

[0050] In this embodiment, the reflector bowl 200 and the condenser lens 210 form a condenser module 20, which helps to reduce the complexity of the optical path, thereby improving the integration of the crystal edge exposure device and reducing the size of the crystal edge exposure device.

[0051] In other embodiments, the focusing module may also be composed of other optical elements.

[0052] The reflector bowl 200 is used to reflect the exposure beam emitted by the LED light source module 10 and to make the exposure beam emitted by the LED light source module 10 exit in parallel.

[0053] In this embodiment, the position where the center of the light inlet 204 is vertically mapped onto the focal plane 203 of the light reflecting surface 202 is the center mapping position; the LED light source module 10 is disposed inside the corresponding reflector bowl 200, the light source of the LED light source module 10 is located at the center mapping position of the focal plane 203 of the light reflecting surface 202, and the exposure beam emitted by the LED light source module 10 is emitted parallel to the outside of the reflector bowl 200 through the light outlet 201.

[0054] The light-reflecting surface 202 of the reflector bowl 200 is a parabolic surface. Therefore, the light source of the LED light source module 10 is located at the center mapping position of the focal plane 203 of the light-reflecting surface 202, so that the exposure beam emitted by the LED light source module 10 can be emitted parallel to the outside of the reflector bowl 200 through the light outlet 201.

[0055] The light-reflecting surface 202 is used to reflect the exposure beam emitted by the LED light source module 10 to form a reflected beam, which helps to improve the orderliness of light in the transmission process, reduce the divergence angle of light, effectively suppress light source waste, and thus help to improve the light source utilization rate of the crystal edge exposure device.

[0056] Parallel beam emission ensures that all beams reflected from the reflector bowl 200 are projected onto the condenser lens 210. This effectively suppresses the problem of some beams not being projected onto the condenser lens 210 due to excessive divergence angle of the beam reflected from the reflector bowl 200. Consequently, it facilitates the maximum integration and focusing of the exposure beam emitted from the LED light source module 10, effectively suppressing beam divergence and escape, and further improving the light source utilization rate of the crystal edge exposure device. Furthermore, according to Fresnel's equation, parallel incident beams onto the condenser lens 210 reduce reflectivity, effectively suppressing Fresnel reflection loss on the surface of the condenser lens 210, thereby improving beam transmittance and further enhancing the light source utilization rate of the crystal edge exposure device.

[0057] In other embodiments, the light source of the LED light source module may also be located at other positions on the light-reflecting surface.

[0058] As an example, the reflector bowl 200 may be made of metal, fused silica, or calcium fluoride. The reflector bowl 200 has high reflectivity and low absorptivity, which improves its compatibility with the LED light source module 10, enhances its reflection effect on the light emitted by the LED light source module 10, effectively suppresses light absorption during reflection, reduces light loss during reflection, and improves the light source utilization rate of the crystal edge exposure device.

[0059] In other embodiments, the reflector bowl may also be made of other materials.

[0060] In this embodiment, the inner wall of the reflective bowl 200 has a reflective coating (not shown in the figure), the surface of the reflective coating is the light reflecting surface 202, and the reflective coating includes a metal reflective film or a full-dielectric reflective film.

[0061] The metal reflective film and the all-dielectric reflective film have the characteristics of high reflectivity and low absorptivity. The reflective coating is used to improve the reflectivity of the reflector bowl 200 for the light emitted by the LED light source module 10 and reduce the absorption effect, which is beneficial to improving the reflection efficiency of the reflector bowl 200 and improving the light source utilization rate of the crystal edge exposure device.

[0062] As an example, when the reflective coating includes a metal reflective film, the metal reflective film includes an aluminum film, a silver film, a gold film, or a platinum film; or, when the reflective coating includes a fully dielectric reflective film, the fully dielectric reflective film includes one or any stack of multiple layers of tantalum pentoxide film, silicon dioxide film, and titanium dioxide film.

[0063] In other embodiments, the reflective coating may also be a reflective film made of other materials.

[0064] The condenser lens 210 is used to focus the light beam reflected by the reflector bowl 200.

[0065] In this embodiment, the focusing lens 210 includes a lens made of calcium fluoride.

[0066] The condenser lens 210 of the calcium fluoride lens has a wide-band projection capability for the light emitted by the LED light source module 10, which is beneficial to improving the transmittance of the light beam reflected by the reflector bowl 200 and reducing the light loss during the transmission of the condenser lens 210, thereby improving the light source utilization rate of the crystal edge exposure device. Moreover, the calcium fluoride lens has the characteristics of high laser damage threshold and good thermal stability, which is beneficial to improving the durability of the condenser lens 210 under high power and high temperature conditions, enabling the condenser lens 210 to meet the process requirements of high power and high temperature light sources, and thus improving the versatility and reliability of the crystal edge exposure device.

[0067] As an example, the calcium fluoride material of the condensing lens 210 described in this embodiment has a purity of 99.99999%. In other embodiments, the condensing lens may also be a calcium fluoride lens of other purities or a lens of other materials.

[0068] refer to Figure 2 In this embodiment, the focusing lens 210 includes an incident surface 212 facing the light outlet 201, and the incident surface 212 has an anti-reflection film 213.

[0069] The antireflection film 213 is used to increase the transmittance of the light beam reflected by the reflector bowl 200 after it comes into contact with the incident surface 212. This is beneficial to further improve the transmittance of the light beam reflected by the reflector bowl 200 by the condenser lens 210, further reduce the light loss during the transmission of the condenser lens 210, and improve the light source utilization rate of the crystal edge exposure device.

[0070] As an example, the antireflective film 213 in this embodiment is made of one or more layers selected from magnesium fluoride film, silicon dioxide film, and aluminum oxide film. In other embodiments, the antireflective film may also be made of other materials.

[0071] The optical fiber 30 is used to conduct light focused by the focusing module 20.

[0072] Continue to refer to Figure 1In this embodiment, the input end 31 of the optical fiber 30 is located at the focal point 211 of the corresponding focusing lens 210. The position of the focal point 211 is the focusing position 21 where the light emitted by the LED light source module 10 is focused by the focusing module 20.

[0073] As an example, the input end 31 of the optical fiber 30 and the focusing position 21 are located at the same position, which helps to improve the accuracy of the optical fiber 30 in receiving the light beam, effectively suppresses the light beam scattering caused by delayed light beam reception, and helps to improve the integrity of the light beam received by the optical fiber 30, thereby improving the light source utilization rate of the crystal edge exposure device. Moreover, the light beam focused by the condenser lens 210 is directly received by the optical fiber 30, which helps to shorten the light beam transmission path, simplify the optical path design, thereby reducing the complexity of the optical path, and thus helping to improve the integration of the crystal edge exposure device and reduce the size of the crystal edge exposure device.

[0074] In other embodiments, the input end of the optical fiber may be located in other locations.

[0075] refer to Figure 1 as well as Figure 5 In this embodiment, the crystal edge exposure device further includes: a heat-conducting plate 50; one end of the reflector bowl 200 away from the light outlet 201 is disposed on the heat-conducting plate 50, and the light inlet 204 of the reflector bowl 200 exposes the heat-conducting plate 50; the LED light source module 10 is disposed on the heat-conducting plate 50 at the position of the light inlet 204.

[0076] The heat-conducting plate 50 is used to conduct heat, thereby improving the heat dissipation of the crystal edge exposure device.

[0077] The LED light source module 10 continuously generates heat during operation. The heat conduction plate 50 is used to conduct heat, so that the temperature of the LED light source module 10 is kept within the allowable range of the process. This effectively suppresses the problem of damage to the LED light source module 10 or poor working performance due to excessive temperature, thereby reducing the replacement frequency of the LED light source module 10 and improving the reliability of the crystal edge exposure device.

[0078] In this embodiment, the LED light source module 10 is disposed on the heat-conducting plate 50 and connected by direct contact, which helps to improve the heat conduction efficiency of the heat-conducting plate 50 and effectively suppresses excessive heat retention in the LED light source module 10 due to conduction delay, so that the temperature of the LED light source module 10 is kept within the allowable range of the process.

[0079] In other embodiments, the LED light source module can also be connected to the heat-conducting plate in other ways. For example, the LED light source module can also be fixed to the heat-conducting plate by means of other connectors.

[0080] In this embodiment, the heat-conducting plate 50 includes a first surface 51 and a second surface 52 disposed opposite to each other; the focusing module 20 and the LED light source module 10 are both disposed on the first surface 51 of the heat-conducting plate 50; the crystal edge exposure device further includes: a heat sink 60 (e.g., Figure 4 As shown in the figure, it is disposed on the second surface 52 of the heat-conducting plate.

[0081] The heat generated by the LED light source module 10 is directly transferred to the heat sink 60 through the heat conduction plate 50 and then dissipated. This facilitates unidirectional heat conduction, effectively suppresses heat backflow and disordered diffusion, thereby improving the heat conduction efficiency of the heat conduction plate 50, reducing thermal resistance during conduction, and effectively suppressing damage to the device caused by excessively high local temperatures. This also helps to improve the stability and reliability of the crystal edge exposure device.

[0082] In this embodiment, the heat-conducting plate 50 is made of aluminum alloy. Aluminum alloy has good thermal conductivity, which helps to improve the heat conduction efficiency of the heat-conducting plate 50, thereby reducing the thermal resistance during conduction and effectively suppressing the problem of device damage caused by excessively high local temperatures. This is beneficial to improving the reliability of the crystal edge exposure device. In other embodiments, the heat-conducting plate can also be a ceramic heat-conducting plate, a stainless steel heat-conducting plate, or a heat-conducting plate made of other high thermal conductivity materials.

[0083] The radiator 60 is used to dissipate the heat conducted by the heat-conducting plate 50.

[0084] refer to Figure 4 The heat sink 60 includes: a fan 61 disposed on the second surface 52 and located in the central region of the second surface 52; and heat dissipation fins 62 disposed on the second surface 52 and arranged sequentially around the fan 61.

[0085] The fan 61 is used to dissipate the heat conducted by the heat-conducting plate 50.

[0086] The fan 61 is located in the central area of ​​the second surface 52. The fan 61 accelerates air circulation to dissipate the heat conducted by the heat-conducting plate 50, which helps to improve the uniformity of heat dissipation and effectively suppresses the problem of device damage caused by excessive local temperature. This keeps the temperature of the LED light source module 10 within the process allowable range, effectively suppresses damage to the LED light source module 10 due to excessive temperature, thereby reducing the replacement frequency of the LED light source module 10 and improving the reliability of the crystal edge exposure device.

[0087] The heat dissipation fins 62 are used to increase the contact area between the heat sink 60 and the air, which helps to increase the rate of heat diffusion into the air, thereby improving the heat dissipation efficiency of the heat sink 60, effectively suppressing the problem of device damage caused by excessive local temperature, and helping to improve the stability and reliability of the crystal edge exposure device.

[0088] refer to Figure 4 As an example, the heat dissipation fins 62 are arranged evenly around the fan 61, and the distance between adjacent heat dissipation fins 62 is equal. This helps to improve the uniformity of heat dissipation of the heat sink 60, effectively suppress the problem of device damage caused by excessive local temperature, and help to improve the stability and reliability of the crystal edge exposure device.

[0089] In other embodiments, the heat dissipation fins may be configured in other ways.

[0090] In this embodiment, the heat dissipation fins 62 and the heat conduction plate 50 are an integral structure, which effectively suppresses the problem of accidental displacement or breakage of the heat dissipation fins 62 causing damage to other devices, and helps to improve the structural stability of the heat sink 60, thereby helping to improve the reliability of the crystal edge exposure device.

[0091] In other embodiments, the heat dissipation fins may also be connected to the heat-conducting plate in other ways.

[0092] refer to Figure 5 In this embodiment, the reflector bowl 200 includes a reflector bowl body 205 and a boss 206. The reflector bowl body 205 has a light inlet 204 at one end facing the heat-conducting plate 50, and the inner wall of the reflector bowl body 205 has a light-reflecting surface 202. The boss 206 is connected to the end of the reflector bowl body 205 facing the heat-conducting plate 50 and is fixed to the heat-conducting plate 50. The boss 206 has a mounting port 207 communicating with the light inlet 204. The LED light source module is located in the mounting port 207.

[0093] As an example, the boss 206 is fixedly disposed with the heat-conducting plate 50. The boss 206 facilitates the installation of the reflector bowl 200 on the heat-conducting plate 50 and helps to improve the stability of the reflector bowl 200. It effectively suppresses the deviation of the reflection angle of the light emitted by the LED light source module 10 caused by the accidental displacement of the reflector bowl 200, thereby helping to improve the reliability of the crystal edge exposure device.

[0094] In this embodiment, the LED light source module 10 is located in the mounting port 207, which helps save space, improves the integration of the crystal edge exposure device, and reduces the size of the crystal edge exposure device. In other embodiments, the LED light source module can also be disposed in other structures.

[0095] In this embodiment, the light source of the LED light source module 10 is located at the center mapping position of the focal plane 203 of the light reflecting surface 202. Specifically, the light source of the LED light source module 10 includes: a plurality of lamp beads 100 (e.g., Figure 3 As shown, the LED beads 100 are evenly distributed circumferentially along the central mapping position at the focal plane 203 of the light reflecting surface 202.

[0096] refer to Figure 3 As an example, the LED light source module 10 of a single wavelength has three LED beads 100. The LED beads 100 are evenly distributed circumferentially on the focal plane 203 of the light reflecting surface 202 along the central mapping position. This helps to improve the uniformity of the exposure beam emitted by the light source module 10, reduce the probability that the non-uniform beam deviates from the predetermined path and does not exit in parallel after being reflected by the edge area of ​​the reflector bowl 200, effectively suppress the problem of beam scattering, and thus help to improve the light source utilization rate of the crystal edge exposure device.

[0097] refer to Figure 3 As an example, the number of LED light source modules 10 with a single wavelength is three.

[0098] It should be noted that in this embodiment, the height of the LED light source module 10's lamp bead 100 is equal to the height of the boss 206, which helps to ensure that the lamp bead 100 is located at the focal plane 203 of the parabola.

[0099] In other embodiments, the height of the LED light source module's LED beads is not equal to the height of the boss.

[0100] In this embodiment, the reflector bowl 200 further includes: an inner platform 220 (e.g., Figure 5 As shown), it is disposed on the inner wall of the light outlet 201; the outer platform 221 (as shown) Figure 5 As shown), the inner platform 220 is disposed on the inner wall at the position of the light outlet 201, and the outer platform 221 is disposed on the side away from the light outlet 201. There is a gap 222 between the outer platform 221 and the inner platform 220; the condensing lens 210 is fixed in the gap 222.

[0101] The inner platform 220 and the outer platform 221 are disposed on the inner wall at the light outlet 201, such that the gap 222 for fixing the condenser lens 210 is located at the light outlet 201. This increases the contact area between the condenser lens 210 and the reflected light beam, effectively suppressing the problem that the light emitted by the LED light source module 10 fails to enter the condenser lens 210 after reflection, thereby reducing the waste of light source during focusing and improving the light source utilization rate of the crystal edge exposure device. The gap 222 is used to fix the condenser lens 210, preventing accidental displacement or deflection of the condenser lens 210 during operation, effectively suppressing the problem of path deviation of the light beam during focusing, and improving the reliability of the crystal edge exposure device.

[0102] In other embodiments, the condenser lens may be located in other positions.

[0103] In this embodiment, the distance between the inner platform 220 and the outer platform 221 along the axial direction of the light reflecting surface 202 (not shown in the figure) ranges from 2 mm to 5 mm. If the distance between the inner platform 220 and the outer platform 221 is too large, it may cause the condenser lens 210 to undergo unexpected displacement or loosening during use, thereby causing the focal point 211 to shift, which in turn causes the focusing position 21 of the condenser module 20 to shift, resulting in some light beams not being received by the optical fiber 30, thus leading to a decrease in the utilization rate of the light source. If the distance between the inner platform 220 and the outer platform 221 is too small, it may cause the thickness of the condenser lens 210 to be too thin, resulting in low rigidity of the condenser lens 210, which may easily lead to deformation or breakage of the condenser lens 210.

[0104] It should be noted that the light reflecting surface 202 of the reflector bowl 200 is a parabola, therefore, the light reflecting surface 202 has an axis.

[0105] refer to Figure 6In this embodiment, the crystal edge exposure device further includes: a lamp box 70, which includes a top wall 71 and a bottom wall 72 disposed opposite to each other. The bottom wall 72 of the lamp box 70 has a through light-emitting hole 73, which corresponds one-to-one with the focusing module 20. The light-emitting hole 73 is located at the focusing position 21 of the corresponding focusing module 20. The top wall 71 of the lamp box 70 has a window (not shown in the figure) that penetrates the top wall 71. The crystal edge exposure device further includes: a heat-conducting plate 50, which is disposed on the top wall 71 of the lamp box 70 and covers the window. The LED light source module 10 and the focusing module 20 are both located inside the lamp box 70, and the LED light source module 10 and the focusing module 20 are both disposed on the heat-conducting plate 50 exposed by the window. The input end 31 of the optical fiber 30 is connected to the corresponding light-emitting hole 73.

[0106] The light box 70 is used to carry the LED light source module 10 and the focusing module 20, and also helps to protect the LED light source module 10 and the focusing module 20.

[0107] The light-emitting aperture 73 helps to improve the accuracy of the position of the input end 31 of the optical fiber 30, effectively suppresses the waste of light source caused by the focus position 21 and the input end 31 of the optical fiber 30 not being in the same position due to accidental displacement, and helps to improve the light source utilization rate of the crystal edge exposure device.

[0108] The window provides space for fixing the reflector bowl 200 and the heat-conducting plate 50.

[0109] refer to Figure 6 In this embodiment, the heat-conducting plate 50 includes a first surface 51 and a second surface 52 disposed opposite to each other; the focusing module 20 and the LED light source module 10 are both disposed on the first surface 51 of the heat-conducting plate 50; the crystal edge exposure device further includes: a heat sink 60 disposed on the second surface 52 of the heat-conducting plate 50; and a dust cover 80 disposed on the top wall 71 outside the light box 70 and covering the heat sink 60.

[0110] The dust cover 80 is used to prevent external impurities from entering the heat sink 60, effectively suppressing the problem of reduced heat dissipation effect of the heat sink 60 due to contamination of the heat sink 60 by external impurities; and the dust cover 80 is also used to prevent external impurities from entering the interior of the light box 70 through the heat sink 60, effectively suppressing the problem of external impurities contaminating the LED light source module 10 and the focusing module 20, thereby reducing the possibility of interference with the lighting effect of the crystal edge exposure device and improving the reliability of the crystal edge exposure device.

[0111] In other embodiments, the crystal edge exposure apparatus may not be equipped with a dust cover.

[0112] refer to Figure 6 The wafer 500 includes a central region 510 and an edge region 520 surrounding the central region. The wafer edge exposure device is used to expose the edge region 520 of the wafer 500, thereby realizing wafer edge exposure (WEE).

[0113] As an example, photoresist at the edge of the wafer is removed by exposing the wafer edge.

[0114] Accordingly, this utility model embodiment provides an exposure machine, which includes the crystal edge exposure device described in this utility model embodiment.

[0115] Because this crystal edge exposure device integrates an LED light source module, a focusing module, an optical fiber, and an optical fiber combiner that can provide multiple wavelengths, it can emit light of different wavelengths according to different process requirements while improving the exposure performance of the crystal edge exposure device, thereby improving the working performance of the exposure machine.

[0116] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A crystal edge exposure apparatus characterized by comprising: include: Multiple LED light source modules are used to emit exposure beams, and the light source wavelengths of the multiple LED light source modules are all different; A focusing module corresponds one-to-one with the LED light source module and is located in the optical path of the exposure beam emitted by the corresponding LED light source module. The focusing module is used to converge the exposure beam emitted by the LED light source module to the focusing position. The optical fiber corresponds one-to-one with the focusing module, with the input end of the optical fiber located at the focusing position of the corresponding focusing module, and the optical fiber is used to conduct the light focused by the focusing module. An optical fiber combiner, wherein the input end of the optical fiber combiner is connected to the output end of each of the optical fibers.

2. The crystal edge exposure apparatus according to claim 1, wherein The focusing module includes: a reflector bowl having a connected light outlet and a light inlet, the inner wall of the reflector bowl having a light-reflecting surface, the light-reflecting surface being parabolic, the light outlet being located on the side of the reflector bowl away from the focal point of the parabolic surface, the light inlet being located on the side of the reflector bowl closer to the focal point of the parabolic surface, and the center position of the light inlet being perpendicularly mapped onto the focal plane of the light-reflecting surface as the center mapping position; and a focusing lens disposed on the reflector bowl and covering the light outlet, the focusing lens being used to converge the light emitted through the light outlet to the focusing position, the focal point of the focusing lens being the focusing position; The LED light source module is disposed inside the corresponding reflector bowl. The light source of the LED light source module is located at the center mapping position of the focal plane of the light reflecting surface. The exposure beam emitted by the LED light source module is emitted parallel to the outside of the reflector bowl through the light outlet. The input end of the optical fiber is located at the focal point of the corresponding condenser lens, and the focal point is the position where the exposure beam emitted by the LED light source module passes through the focusing position of the condenser module.

3. The crystal edge exposure apparatus according to claim 2, wherein The crystal edge exposure device further includes: a heat-conducting plate; The end of the reflector bowl furthest from the light outlet is disposed on the heat-conducting plate, and the light inlet of the reflector bowl exposes the heat-conducting plate; The LED light source module is mounted on the heat-conducting plate at the light inlet.

4. The crystal edge exposure apparatus according to any one of claims 1 to 3, wherein The crystal edge exposure apparatus further includes a heat-conducting plate, which has a first side and a second side arranged opposite to each other. Both the LED light source module and the focusing module are disposed on the first surface of the heat-conducting plate; The crystal edge exposure device further includes a heat sink disposed on the second surface of the heat-conducting plate.

5. The crystal edge exposure apparatus according to claim 4, wherein The heat sink includes: a fan disposed on the second surface and located in the central region of the second surface; and heat dissipation fins disposed on the second surface and arranged sequentially around the fan.

6. The crystal edge exposure apparatus according to claim 5, wherein The heat dissipation fins and the heat-conducting plate are an integral structure.

7. The crystal edge exposure apparatus according to claim 3, wherein The reflective bowl includes a reflective bowl body and a boss. The reflective bowl body has a light inlet at one end facing the heat-conducting plate. The inner wall of the reflective bowl body has a light-reflecting surface. The boss is connected to the end of the reflective bowl body facing the heat-conducting plate and is fixed to the heat-conducting plate. The boss has a mounting opening that communicates with the light inlet. The LED light source module is located in the mounting port, and the height of the LED beads in the LED light source module is equal to the height of the boss.

8. The crystal edge exposure apparatus according to claim 2, wherein The reflector bowl includes a reflector bowl made of metal, a reflector bowl made of fused silica, or a reflector bowl made of calcium fluoride.

9. The crystal edge exposure apparatus as described in claim 2, characterized in that, The inner wall of the reflective bowl has a reflective coating, and the surface of the reflective coating is the light-reflecting surface.

10. The crystal edge exposure apparatus as described in claim 2, characterized in that, The reflector bowl further includes: an inner platform disposed on the inner wall at the light outlet position; and an outer platform disposed on the inner wall at the light outlet position, wherein the inner platform is disposed on the side of the outer platform away from the light outlet, and there is a gap between the outer platform and the inner platform; The condenser lens is fixed in the gap.

11. The crystal edge exposure apparatus as claimed in claim 10, characterized in that, Along the axial direction of the light-reflecting surface, the distance between the inner platform and the outer platform ranges from 2 mm to 5 mm.

12. The crystal edge exposure apparatus as described in claim 2, characterized in that, The focusing lens includes an incident surface facing the light outlet, and the incident surface has an anti-reflection coating.

13. The crystal edge exposure apparatus according to any one of claims 1 to 3, characterized in that, The crystal edge exposure device further includes: a light box, the light box including a top wall and a bottom wall arranged opposite to each other, the bottom wall of the light box having a through light-emitting hole, the light-emitting hole corresponding one-to-one with the light-concentrating module, and the light-emitting hole being located at the focusing position of the corresponding light-concentrating module, the top wall of the light box having a through window; The crystal edge exposure device further includes a heat-conducting plate, which is disposed on the top wall outside the light box and covers the window; Both the LED light source module and the focusing module are located inside the light box, and both the LED light source module and the focusing module are disposed on the heat-conducting plate exposed by the window; The input end of the optical fiber is connected to the corresponding output aperture.

14. The crystal edge exposure apparatus as described in claim 13, characterized in that, The heat-conducting plate includes a first side and a second side arranged opposite to each other; the focusing module and the LED light source module are both disposed on the first side of the heat-conducting plate; The crystal edge exposure device further includes: a heat sink disposed on the second surface of the heat-conducting plate; and a dust cover disposed on the top wall outside the lamp box and covering the heat sink.

15. An exposure machine, characterized in that, Includes the crystal edge exposure apparatus as described in any one of claims 1 to 14.

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