A circulating silicon wafer receiving mechanism

Abstract

The utility model relates to a circulating silicon wafer material receiving mechanism, including support, surface sets up sliding rod, rotatably be provided with pulley on the sliding rod, conveying component sets up on the support, the conveying component includes two sprocket setting on the support, the chain around two sprocket setting and the motor of connecting sprocket, movable bottom plate, connects the chain, material box sets up on the movable bottom plate, wherein, the movable bottom plate opens the limit hole, the pin shaft of chain extends and goes into the limit hole, the rotation axis of pulley is perpendicular to the length direction of chain, the movable bottom plate sets up at least two, the utility model discloses all material box reciprocating circulation movement on the support along the same path, can set up two and above material box on the support and work simultaneously without producing interference, greatly promote the work efficiency of material receiving mechanism.

Description

Technical Field

[0001] This utility model relates to the field of material receiving equipment technology, and in particular to a circulating silicon wafer receiving mechanism. Background Technology

[0002] In automated silicon wafer production, the finished silicon wafers are transferred and stacked in the material box of the receiving mechanism by a robotic arm for easy packaging.

[0003] The existing receiving mechanism has two slide rails arranged in the same direction. The wafer cassettes are slidably connected to the receiving mechanism via these rails. The two cassettes move back and forth on the receiving mechanism; one cassette receives silicon wafers transferred by the robotic arm, while the other cassette, filled with wafers, performs the packaging process. In actual production, the time it takes for the cassette to receive and fill with wafers differs from the packaging process. Often, one cassette completes its operation while waiting for the other to complete, reducing the efficiency of the receiving mechanism.

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a circulating silicon wafer receiving mechanism to improve the efficiency of the receiving mechanism.

[0006] The technical solution of this utility model is as follows:

[0007] The circulating silicon wafer receiving mechanism includes:

[0008] The bracket has a sliding rod on its surface; a pulley is rotatably mounted on the sliding rod.

[0009] A conveying assembly is mounted on the support frame; the conveying assembly includes two sprockets mounted on the support frame, a chain wound around the two sprockets, and a motor connected to the sprockets;

[0010] Movable base plate, connected to the chain;

[0011] The material box is mounted on the movable base plate;

[0012] The movable base plate has a limiting hole; the pin of the chain extends into the limiting hole; the rotation axis of the pulley is perpendicular to the length direction of the chain; and at least two movable base plates are provided.

[0013] A further technical solution is that one of the movable base plates is connected to two pins; the two pins are set on one link of the chain.

[0014] A further technical solution is that a limiting waist-shaped groove is also provided on the movable base plate; one of the two pins on one of the links extends into the limiting hole, and the other pin extends into the limiting waist-shaped groove.

[0015] A further technical solution is that a connecting rod is also provided on the movable base plate; the connecting rod passes through the bracket and is forked; a universal ball wheel is provided on the fork; the universal ball wheel abuts against the surface of the bracket away from the movable base plate through ball bearings.

[0016] A further technical solution is that the connecting rod passes through the movable base plate; a nut is threaded onto the connecting rod; and the nut is located on the surface of the movable base plate away from the bracket.

[0017] A further technical solution is that a pad is provided on the surface of the movable base plate away from the bracket; the material box is connected to the movable base plate through the pad.

[0018] A further technical solution is that an annular groove is formed on the bracket; the connecting rod passes through the bracket along the groove.

[0019] A further technical solution is that at least two universal ball wheels are provided on the connecting rod; the two universal ball wheels are symmetrically arranged around the axis of the connecting rod.

[0020] A further technical solution is to provide a universal ball wheel on the surface of the bracket near the movable base plate around the axis of rotation of the sprocket.

[0021] A further technical solution is to have a notch at the end of the material box away from the support.

[0022] The beneficial technical effects of this utility model are as follows:

[0023] (1) In the circulating silicon wafer receiving mechanism of this utility model, the material box is set on the support via a conveying assembly. The chain inside the conveying assembly rotates, driving the material box to move back and forth on the support. When the moving material box approaches the unloading position of the silicon wafer, it receives and accepts the silicon wafer; when the moving material box moves away from the unloading position of the silicon wafer, it packages the accepted silicon wafer. All the material boxes move back and forth on the support along the same path. Two or more material boxes can be set on the support to work simultaneously without interference, which greatly improves the working efficiency of the receiving mechanism.

[0024] (2) Furthermore, a connecting rod is also provided on the movable base plate. A universal ball wheel is installed on the connecting rod to abut against the back of the bracket. The connecting rod enhances the stability of the connection between the movable base plate and the bracket, and reduces the pressure on the pin.

[0025] (3) Furthermore, the support is also equipped with pulleys and omnidirectional ball wheels. The omnidirectional ball wheels provide rolling support for the movable base plate, reducing the friction between the movable base plate and the support. Attached Figure Description

[0026] Figure 1 A three-dimensional structural schematic diagram of a circulating silicon wafer receiving mechanism according to an embodiment of the present disclosure is shown in the front view.

[0027] Figure 2 A partially enlarged view of a circulating silicon wafer receiving mechanism according to an embodiment of the present disclosure is shown at point A.

[0028] Figure 3 A three-dimensional structural schematic diagram of a circulating silicon wafer receiving mechanism according to an embodiment of the present disclosure is shown in the rear view.

[0029] Figure 4 A side view of the connecting rod in a circulating silicon wafer receiving mechanism according to an embodiment of the present disclosure is shown.

[0030] Marked in the attached diagram:

[0031] 1. Bracket; 11. Slide rail; 2. Conveying assembly; 21. Sprocket; 22. Motor; 23. Chain; 231. Chain link; 232. Pin; 3. Movable base plate; 31. Limiting hole; 32. Limiting slot; 33. Pad; 4. Connecting rod; 41. Nut; 42. Fork; 5. Pulley; 51. Slide rod; 6. Material box; 7. Universal ball wheel. Detailed Implementation

[0032] To make the objectives, features, and advantages of this utility model more apparent and understandable, please refer to the accompanying drawings. It should be noted that the structures, proportions, sizes, etc., depicted in the accompanying drawings are merely for illustrative purposes and to aid those skilled in the art in understanding and reading the content disclosed herein. They are not intended to limit the implementation conditions of this utility model and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0033] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0034] The circulating silicon wafer receiving mechanism includes a support 1 with a slide bar 51 on its surface. A pulley 5 is rotatably mounted on the slide bar 51. The rotation axis of the pulley 5 is perpendicular to the length direction of the chain 23. This reduces the friction between the movable base plate 3 and the support 1. A conveying assembly 2 is mounted on the support 1. The conveying assembly 2 includes two sprockets 21 mounted on the support 1, a chain 23 surrounding the two sprockets 21, and a motor 22 connected to the sprockets 21. The motor 22 drives the sprockets 21 to rotate, which in turn drives the chain 23 to rotate. A movable base plate 3 is connected to the chain 23. The movable base plate 3 has a limiting hole 31. The pin 232 of the chain 23 extends and enters the limiting hole 31. The rotation of the chain 23 drives the movable base plate 3 to move back and forth on the support 1. The rotation of the chain 23 in the conveying assembly 2 drives the material box 6 to move back and forth on the support 1. When the moving material box 6 approaches the silicon wafer unloading position, it receives and holds the silicon wafer; when the moving material box 6 moves away from the silicon wafer unloading position, it packages the received silicon wafer. The material box 6 is mounted on the movable base plate 3 and moves synchronously with the movable base plate 3. At least two movable base plates 3 are provided. All material boxes 6 move along the same path on the support 1. Two or more material boxes 6 can be mounted on the support 1 to work simultaneously without interference, greatly improving the working efficiency of the receiving mechanism.

[0035] A movable base plate 3 is connected to two pins 232, which are mounted on a link 231 of the chain 23. The two pins 232 distribute stress and enhance the stability of the connection between the movable base plate 3 and the chain 23.

[0036] Preferably, the movable base plate 3 also has a limiting slot 32. Two pins 232 on a link 231 have one pin 232 extending into the limiting hole 31 and the other pin 232 extending into the limiting slot 32. The length of the limiting slot 32 provides room for the pin 232 extending into it, allowing for a certain assembly error between the pin 232 and the limiting slot 32.

[0037] A connecting rod 4 is also provided on the movable base plate 3. The connecting rod 4 passes through the bracket 1 and has a fork 42. An annular groove 11 is formed on the bracket 1. The connecting rod 4 passes through the bracket 1 along the groove 11. A universal ball wheel 7 is provided on the fork 42. The universal ball wheel 7 abuts against the surface of the bracket 1 away from the movable base plate 3 through ball bearings. The connecting rod 4 enhances the connection stability between the movable base plate 3 and the bracket 1 and reduces the pressure on the pin 232.

[0038] Preferably, the connecting rod 4 passes through the movable base plate 3. A nut 41 is threaded onto the connecting rod 4. The nut 41 is located on the surface of the movable base plate 3 away from the bracket 1. The nut 41 engages with the universal ball wheel 7 on the fork 42 to limit the position between the bracket 1 and the movable base plate 3.

[0039] More preferably, a pad 33 is provided on the surface of the movable base plate 3 away from the support 1. The material box 6 is connected to the movable base plate 3 via the pad 33. The pad 33 supports the material box 6 to form a gap between the material box 6 and the pad 33 to accommodate part of the connecting rod 4 and the nut 41.

[0040] The connecting rod 4 is equipped with at least two omnidirectional ball wheels 7. The two omnidirectional ball wheels 7 are symmetrically arranged around the axis of the connecting rod 4. The two omnidirectional ball wheels 7 work together to provide more stable support for the movable base plate 3.

[0041] Preferably, a universal ball wheel 7 is also provided on the surface of the bracket 1 near the movable base plate 3 around the pivot of the sprocket 21. When the movable base plate 3 rotates around the sprocket 21, the universal ball wheel 7 rolls to support the movable base plate 3, reducing the friction between the movable base plate 3 and the bracket 1.

[0042] The specific workflow of this utility model is as follows:

[0043] During material receiving, motor 22 drives sprocket 21 to rotate. The rotating sprocket 21 drives chain 23, movable base plate 3 mounted on chain 23, and material box 6 to move. Material box 6 moves cyclically along chain 23 on support 1. After one material box 6 moves to the receiving position, it opens to receive silicon wafers. After the material box 6 is full of silicon wafers, motor 22 is started again. Motor 22 drives all material boxes 6 to move until another empty material box 6 moves to the receiving position. At this time, the material box 6 full of silicon wafers moves out of the receiving position, and the silicon wafers in the material box 6 can be packaged.

[0044] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A circulating silicon wafer receiving mechanism, characterized in that, The circulating silicon wafer receiving mechanism includes: a support frame with a slide bar on its surface; and a pulley rotatably mounted on the slide bar. A conveying assembly is mounted on the support frame; the conveying assembly includes two sprockets mounted on the support frame, a chain wound around the two sprockets, and a motor connected to the sprockets; Movable base plate, connected to the chain; The material box is mounted on the movable base plate; The movable base plate has a limiting hole; the pin of the chain extends into the limiting hole; the rotation axis of the pulley is perpendicular to the length direction of the chain; and at least two movable base plates are provided.

2. The endless silicon wafer receiving mechanism of claim 1, wherein: One of the movable base plates is connected to two of the pins; the two pins are disposed on a link of the chain.

3. The endless silicon wafer receiving mechanism of claim 2, wherein: The movable base plate is also provided with a limiting waist-shaped groove; one of the two pins on one of the links extends into the limiting hole, and the other pin extends into the limiting waist-shaped groove.

4. The circulating silicon wafer receiving mechanism as described in claim 1, characterized in that: The movable base plate is also provided with a connecting rod; the connecting rod passes through the bracket and is provided with a fork; the fork is provided with a universal ball wheel; the universal ball wheel abuts against the surface of the bracket away from the movable base plate through ball bearings.

5. The circulating silicon wafer receiving mechanism as described in claim 4, characterized in that: The connecting rod passes through the movable base plate; a nut is threaded onto the connecting rod; the nut is located on the surface of the movable base plate away from the bracket.

6. The circulating silicon wafer receiving mechanism as described in claim 5, characterized in that: A pad is provided on the surface of the movable base plate away from the bracket; the material box is connected to the movable base plate through the pad.

7. The circulating silicon wafer receiving mechanism as described in claim 4, characterized in that: The bracket has an annular groove; the connecting rod passes through the bracket along the groove.

8. The circulating silicon wafer receiving mechanism as described in claim 4, characterized in that: The connecting rod is provided with at least two universal ball wheels; the two universal ball wheels are symmetrically arranged around the axis of the connecting rod.

9. The circulating silicon wafer receiving mechanism as described in claim 1, characterized in that: Around the axis of rotation of the sprocket, a universal ball wheel is provided on the surface of the bracket near the movable base plate.

10. The circulating silicon wafer receiving mechanism as described in claim 1, characterized in that: The material box has a notch at the end furthest from the support.

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