A high-purity specialty gas storage device

Abstract

This utility model belongs to the field of high-purity specialty gas storage technology, specifically a high-purity specialty gas storage device, including a tank. A diaphragm valve is installed on the exhaust pipe, and a pressure regulator is connected to the other end of the diaphragm valve. A pressure gauge and a flow meter are installed on the pressure regulator, and a particulate filter is connected to the other end of the pressure regulator. A gas guide pipe is connected to a high-purity specialty gas pipeline in the laboratory. High-purity specialty gas enters the diaphragm valve from the exhaust pipe, then enters the pressure regulator from the diaphragm valve, and then the depressurized high-purity specialty gas enters the particulate filter from the pressure regulator. The particulate filter filters the high-purity specialty gas, removing metal ions from the gas. This structure can effectively reduce the precipitation of metal ions and purify trace metal ions in the gas, ensuring the purity of the high-purity specialty gas and improving the storage effect of high-purity specialty gases.

Description

Technical Field

[0001] This utility model relates to the field of high-purity specialty gas storage technology, specifically a high-purity specialty gas storage device. Background Technology

[0002] Applications of high-purity specialty gases include electronics manufacturing, semiconductor production, photovoltaic industry, chemical processes, and laboratory analysis. As core basic materials such as mixed gases, protective gases, and fuels, storage equipment is required when storing high-purity specialty gases.

[0003] Chinese patent CN 221881151 U discloses a high-purity specialty gas storage device, including an outer protective assembly and a specialty gas tank. The specialty gas tank is installed inside the outer protective assembly. The outer protective assembly includes a support base, fixed feet, casters, a support rod, an adjusting and fixing component, a handle, and a top frame. The fixed feet are fixedly connected to one end of the bottom of the support base, the casters are fixedly connected to the other end of the bottom of the support base, the support rod is fixedly connected to the top of the support base, the adjusting and fixing component is slidably connected to the inner side of the support rod, the handle is fixedly connected to the outer side of the support rod, and the top frame is fixedly connected to the top of the support rod. This high-purity specialty gas storage device, through the arrangement of the support base, support rod, and handle, provides external protection for the specialty gas tank, avoiding direct collisions with the tank and improving safety.

[0004] Existing storage devices are prone to metal ion precipitation in the tank during long-term storage of high-purity specialty gases, which affects the purity of the gas and results in poor storage performance. Therefore, a high-purity specialty gas storage device is proposed to address this problem. Utility Model Content

[0005] In order to overcome the shortcomings of the existing technology and solve the problems existing in the existing technology, this utility model proposes a high-purity special gas storage device.

[0006] The technical solution adopted by this utility model to solve its technical problem is a high-purity special gas storage device, including a tank body. An inlet pipe is installed on the top plate of the tank body, and a check valve is installed on the inlet pipe. An exhaust pipe is installed on the top plate of the tank body, and a purification component is installed on the exhaust pipe. The purification component includes a diaphragm valve, which is installed on the exhaust pipe. A pressure regulator is connected to the other end of the diaphragm valve. A pressure gauge and a flow meter are installed on the pressure regulator. A particulate filter is connected to the other end of the pressure regulator, and a gas guide pipe is connected to the other end of the particulate filter. The tank body is made of ultra-high purity L... -EP stainless steel. The lower end of the tank is equipped with a transport assembly. By connecting the gas guide pipe to the high-purity specialty gas pipeline in the laboratory, the high-purity specialty gas enters the diaphragm valve from the exhaust pipe, then enters the pressure regulator from the diaphragm valve, and then the depressurized high-purity specialty gas enters the particulate filter from the pressure regulator. The particulate filter filters the high-purity specialty gas and removes metal ions from the gas. This structure can effectively reduce the precipitation of metal ions and purify trace metal ions in the gas, ensuring the purity of the high-purity specialty gas and improving the storage effect of high-purity specialty gas.

[0007] Preferably, the transport component includes a base on which the tank is placed. Legs are mounted on the bottom side of the base. Two pulleys are rotatably mounted on the side wall of the base via wheel frames. A handle is mounted on the base. Two fixed rods are fixedly mounted on the base and connected by a connecting rod. A first clamping plate is fixedly mounted on the two fixed rods. Two sliding grooves are formed on the base, and sliders are fitted into the grooves. Sliding rods are mounted on the sliders and connected by a connecting rod. A second clamping plate is fixedly mounted on the two sliding rods. Two threaded holes are symmetrically formed on the second clamping plate, and screws are fitted into the threaded holes. One end of the screw is rotatably mounted on the first clamping plate, and the other end is fitted with a knob. By pushing the handle, the two pulleys roll on the ground, enabling convenient movement of the transport component and the tank. After the transport component and the tank are moved to their destination, the base is leveled, and the four legs support the base, ensuring its stability. This structure allows for convenient handling of the tank and prevents collisions during transport, thus improving the protection of the storage equipment.

[0008] The advantages of this utility model are:

[0009] 1. This utility model connects a gas delivery pipe to a high-purity specialty gas pipeline in the laboratory. The high-purity specialty gas enters the diaphragm valve from the exhaust pipe, then enters the pressure regulator from the diaphragm valve, and then the depressurized high-purity specialty gas enters the particulate filter from the pressure regulator. The particulate filter filters the high-purity specialty gas and removes metal ions from the gas. This structure can effectively reduce the precipitation of metal ions and purify trace metal ions in the gas, ensuring the purity of the high-purity specialty gas and improving the storage effect of high-purity specialty gases.

[0010] 2. This utility model enables convenient movement of the transport components and the tank by pushing the handle and having two pulleys roll on the ground. After the transport components and the tank are moved to the destination, the base is laid flat and supported by four legs to ensure the stability of the base. This structure allows for convenient handling of the tank and avoids collisions during transport, thus improving the protection of the storage equipment. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a first-person perspective 3D structural diagram;

[0013] Figure 2 This is a schematic diagram of the three-dimensional structure of the purification component;

[0014] Figure 3 This is a schematic diagram of the three-dimensional structure of the transport component;

[0015] Figure 4 This is a schematic diagram of the three-dimensional structure of the sliding rod;

[0016] Figure 5 This is a schematic diagram of the three-dimensional structure at the clamping plate.

[0017] In the diagram: 1. Tank body; 2. Inlet pipe; 201. Check valve; 3. Exhaust pipe; 301. Diaphragm valve; 302. Pressure regulator; 303. Pressure gauge; 304. Flow meter; 305. Particulate filter; 306. Air guide pipe; 4. Base; 401. Leg; 402. Pulley; 403. Handle; 404. Fixing rod; 405. First clamping plate; 406. Slide groove; 407. Slider; 408. Sliding rod; 409. Second clamping plate; 410. Screw; 411. Knob. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0019] Please see Figure 1-2 As shown, a high-purity special gas storage device includes a tank 1. An inlet pipe 2 is installed on the top plate of the tank 1, and a check valve 201 is installed on the inlet pipe 2. An exhaust pipe 3 is installed on the top plate of the tank 1, and a purification component is installed on the exhaust pipe 3. The purification component includes a diaphragm valve 301, which is also installed on the exhaust pipe 3. A pressure regulator 302 is connected to the other end of the diaphragm valve 301. A pressure gauge 303 and a flow meter 304 are installed on the pressure regulator 302, and the other end of the pressure regulator 302 is connected to a particle... The filter 305 and particulate filter 305 are connected to a gas guide pipe 306 at the other end. The tank body 1 is made of ultra-high purity 316L-EP stainless steel. A transport component is installed at the lower end of the tank body 1. During operation, existing storage equipment is prone to metal ion precipitation in the tank body 1 during long-term storage of high-purity special gases, which affects the purity of the high-purity special gases and results in poor storage effect. High-purity special gases are introduced into the tank body 1 through the gas inlet pipe 2. The check valve 201 is a Swagelok SS-4C-HP model. The check valve 201 is an automatic valve that is not manually operated. Its working principle relies entirely on the fluid dynamics characteristics to achieve automatic opening and closing. After high-purity special gases are introduced into the tank body 1, the tank body 1 safely stores the high-purity special gases. The material of the tank body 1 is ultra-high purity 316L-EP stainless steel, which can effectively reduce the precipitation of metal ions.

[0020] Applications of high-purity specialty gases include electronics manufacturing, semiconductor production, photovoltaic industry, chemical processes, and laboratory analysis. They serve as core materials for mixtures, protective gases, and fuels. In laboratory applications, the gas delivery pipe 306 is connected to a high-purity specialty gas pipeline within the laboratory. By rotating the handwheel on the diaphragm valve 301 (model GEMÜ R690), a manually operated valve, the gas operates by rotating the handwheel to compress the elastic diaphragm for sealing. Once the internal passage of the diaphragm valve 301 is opened, the high-purity specialty gas enters the diaphragm valve 301 from the exhaust pipe 3, and then flows from the diaphragm valve 301 into the pressure regulator 302 (model Swagelok). The KPR-D pressure reducer 302 is a manually adjustable component that operates on the principle of throttling. Its function is to reduce the pressure of incoming high-pressure gas to the required working value and stabilize it within a certain pressure range. By rotating the handwheel on pressure reducer 302, the pressure of the high-purity specialty gas is reduced to the required working value according to the laboratory's requirements. During this process, pressure gauge 303 and flow meter 304 monitor the pressure and flow rate of the high-purity specialty gas in real time. Pressure gauge 303 is a Parker 79H, and flow meter 304 is an Emerson. After CMFS (Compressor-Controlled Gas Filter), the depressurized high-purity specialty gas enters the particulate filter 305 from the pressure reducer 302. The particulate filter 305 is a Parker+HDFK-3 model. The particulate filter 305 filters the high-purity specialty gas, removing metal ions from the gas to ensure that the purity of the high-purity specialty gas meets the working requirements of the laboratory. Finally, the high-purity specialty gas is transported to the high-purity specialty gas pipeline in the laboratory through the gas guide pipe 306. This structure can effectively reduce the precipitation of metal ions and purify trace metal ions in the gas, ensuring the purity of the high-purity specialty gas and improving the storage effect of high-purity specialty gas.

[0021] Please see Figure 3-5As shown, the transport assembly includes a base 4, on which a tank 1 is placed. A bracket 401 is installed on the bottom side of the base 4. Two pulleys 402 are rotatably installed on the side wall of the base 4 via wheel frames. A handle 403 is installed on the base 4. Two fixed rods 404 are fixedly installed on the base 4 and are fixedly connected by a connecting rod. A first clamping plate 405 is fixedly installed on the two fixed rods 404. Two sliding grooves 406 are opened on the base 4. A slider 407 is assembled in the sliding groove 406. A sliding rod 408 is installed on the slider 407 and is fixedly connected by a connecting rod. A second clamping plate 409 is fixedly installed on the two sliding rods 408. Two threaded holes are symmetrically opened on the second clamping plate 409. A screw 410 is assembled in the threaded hole. One end of the screw 410 is rotatably installed on the first clamping plate 405, and a knob 411 is installed on the other end of the screw 410. During operation, existing storage devices require handling when storing high-purity specialty gases. These devices are prone to bumps and knocks, resulting in poor protection. To address this, before handling, the tank 1 is placed on the base 4, positioned between the first clamping plate 405 and the second clamping plate 409. Then, two knobs 411 are slightly rotated, causing the two screws 410 to rotate. The second clamping plate 409 on the screws 410 moves horizontally towards the first clamping plate 405, thus clamping and fixing the tank 1. The screws 410 are self-locking; when the thread helix angle is less than the friction angle, sliding friction causes the screws 410 to self-lock, preventing the second clamping plate 409 from driving the screws 410 in the opposite direction. At this point, the tank 1 is fixedly installed on the base 4.

[0022] During the handling of tank 1, by pushing handle 403, two pulleys 402 roll on the ground, realizing the convenient movement of the transport component and tank 1 as a whole. After the transport component and tank 1 are moved to the destination, the base 4 is laid flat, and four legs 401 support the base 4, ensuring the stability of the base 4. This structure can facilitate the handling of tank 1 and avoid collisions during the handling process, which helps to improve the protection of the storage equipment.

[0023] Working principle: In existing storage devices, during long-term storage of high-purity specialty gases, metal ions easily precipitate from tank 1, affecting the purity of the specialty gas and resulting in poor storage performance. High-purity specialty gas is introduced into tank 1 through inlet pipe 2. The check valve 201 is a Swagelok model. SS-4C-HP, check valve 201 is a non-manually operated automatic valve. Its working principle relies entirely on fluid dynamics to achieve automatic opening and closing. After high-purity specialty gas is introduced into tank 1, tank 1 safely stores the high-purity specialty gas. The material of tank 1 is ultra-high purity 316L-EP stainless steel, which can effectively reduce the precipitation of metal ions. The applications of high-purity specialty gases include electronics manufacturing, semiconductor production, photovoltaic industry, chemical processes, laboratory analysis, etc., serving as core basic materials such as mixed gases, protective gases, and fuels. When used in the laboratory, the gas delivery pipe 306 is connected to the high-purity specialty gas pipeline in the laboratory, and the diaphragm valve 301 is operated by turning the handwheel on the diaphragm valve 301. The diaphragm valve 301 is model GEMÜ. R690, diaphragm valve 301 is a manually operated valve. Its working principle is to achieve a seal by rotating a handwheel to compress the elastic diaphragm. After opening the internal passage of diaphragm valve 301, high-purity specialty gas enters diaphragm valve 301 from exhaust pipe 3, and then enters pressure regulator 302. Pressure regulator 302 is a Swagelok KPR-D model. Pressure regulator 302 is a manually adjustable component that operates on the principle of throttling. Its function is to reduce the pressure of the incoming high-pressure gas to the required working value and stabilize it within a certain pressure range. By rotating the handwheel on pressure regulator 302, the pressure of the high-purity specialty gas is reduced to the required working value according to the laboratory's working requirements. During this process, pressure gauge 303 (Parker 79H) and flow meter 304 (Emerson) monitor the pressure and flow rate of the high-purity specialty gas in real time. After CMFS (Compressor-Controlled Gas Filter), the depressurized high-purity specialty gas enters the particulate filter 305 from the pressure reducer 302. The particulate filter 305 is a Parker+HDFK-3 model. The particulate filter 305 filters the high-purity specialty gas, removing metal ions from the gas to ensure that the purity of the high-purity specialty gas meets the working requirements of the laboratory. Finally, the high-purity specialty gas is transported to the high-purity specialty gas pipeline in the laboratory through the gas guide tube 306. This structure can effectively reduce the precipitation of metal ions and purify trace metal ions in the gas, ensuring the purity of the high-purity specialty gas and improving the storage effect of high-purity specialty gas.Existing storage devices require handling during the storage of high-purity specialty gases, which can lead to damage from impacts and compromises in protection. To address this, before handling, the tank 1 is placed on the base 4, positioned between the first clamping plate 405 and the second clamping plate 409. A slight rotation of two knobs 411 rotates two screws 410, causing the second clamping plate 409 on the screws 410 to move horizontally towards the first clamping plate 405. This clamping and securing of the tank 1 by the first and second clamping plates 405 and 409 is achieved. The screws 410 are self-locking. When the thread helix angle is less than the friction angle, sliding friction causes the screw 410 to self-lock, preventing the second clamping plate 409 from driving the screw 410 in the opposite direction. At this time, the tank 1 is fixedly installed on the base 4. During the handling of the tank 1, by pushing the handle 403, the two pulleys 402 roll on the ground, realizing the convenient overall movement of the transport component and the tank 1. After the transport component and the tank 1 are moved to the destination, the base 4 is leveled, and the four legs 401 support the base 4, ensuring the stability of the base 4. This structure allows for convenient handling of the tank 1 and avoids collisions during handling, which helps to improve the protection of the storage equipment.

[0024] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A high-purity special gas storage device, characterized by: Includes a tank (1), an air inlet pipe (2) is installed on the top plate of the tank (1), a check valve (201) is installed on the air inlet pipe (2), an exhaust pipe (3) is installed on the top plate of the tank (1), and a purification component is installed on the exhaust pipe (3); The purification assembly includes a diaphragm valve (301), which is installed on the exhaust pipe (3). The other end of the diaphragm valve (301) is connected to a pressure regulator (302). The pressure regulator (302) is equipped with a pressure gauge (303) and a flow meter (304). The other end of the pressure regulator (302) is connected to a particulate filter (305). The other end of the particulate filter (305) is connected to a duct pipe (306). The tank (1) is made of ultra-high purity 316L-EP stainless steel. A transport assembly is installed at the lower end of the tank (1).

2. The high-purity special gas storage device according to claim 1, characterized in that: The transport assembly includes a base (4), on which a tank (1) is placed, a stand (401) is installed on the bottom side of the base (4), two pulleys (402) are rotatably installed on the side wall of the base (4) via a wheel frame, and a handle (403) is installed on the base (4).

3. The high-purity special gas storage device according to claim 2, characterized in that: Two fixing rods (404) are fixedly installed on the base (4). The two fixing rods (404) are fixedly connected by a connecting rod. A first clamping plate (405) is fixedly installed on the two fixing rods (404).

4. A high-purity special gas storage device according to claim 2, characterized in that: The base (4) has two sliding grooves (406), and a slider (407) is installed in the sliding groove (406). A sliding rod (408) is installed on the slider (407), and the two sliding rods (408) are fixedly connected by a connecting rod.

5. A high-purity special gas storage device according to claim 3, characterized in that: A second clamping plate (409) is fixedly installed on the two sliding rods (408). Two threaded holes are symmetrically opened on the second clamping plate (409), and a screw (410) is assembled in the threaded hole.

6. A high-purity special gas storage device according to claim 5, characterized in that: One end of the screw (410) is rotatably mounted on the first clamping plate (405), and the other end of the screw (410) is equipped with a knob (411).

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