A large-flow ultra-low concentration TOC detection electrode structure

Abstract

This invention provides a high-flow-rate, ultra-low concentration TOC detection electrode structure, including an electrode base with a mounting groove for mounting the electrode structure body. The electrode structure body includes an outer electrode cylinder, an inner electrode core disposed inside the outer electrode cylinder, and an electrode spacer between the outer electrode cylinder and the inner electrode core. The electrode base has an inlet pipe and an outlet pipe communicating with the outer electrode cylinder. The electrode spacer has an annular inlet channel in its center, and at least two inlet holes communicating with the inlet channel are provided near the outlet pipe end of the electrode spacer. Each inlet hole corresponds to a guide groove that directs liquid into the inlet hole. This invention provides stable and uniform water flow, enabling the detection of ultra-low concentration TOC solutions with more accurate test results.

Description

Technical Field

[0001] This utility model relates to the field of TOC detection technology, and in particular to a high-flow-rate, ultra-low-concentration TOC detection electrode structure. Background Technology

[0002] Because the semiconductor industry requires ultra-low TOC concentrations in purified water, conductivity-based TOC detection converts the solution's conductivity into TOC. Ultra-low TOC implies low conductivity. Extremely low conductivity cannot be accurately detected using conventional electrode structures because the conductivity of ultrapure water is extremely low, and fluctuations in conductivity at low concentrations are not significant. Therefore, it is usually necessary to increase the rate of water replacement within the electrode to amplify the conductivity change and achieve low-concentration detection. However, increasing the flow rate easily creates turbulence, resulting in a significant difference in water velocity between the center and edges of the flow channel. This leads to test instability, affecting test results and making it difficult to guarantee accuracy. Utility Model Content

[0003] To address the problems of the prior art, this invention provides a high-flow-rate, ultra-low-concentration TOC detection electrode structure. Under high-flow-rate conditions, the water flow is stable and uniform, resulting in more accurate test results. It is suitable for testing TOC solutions with lower concentrations.

[0004] The technical solution adopted is as follows: A high-flow-rate, ultra-low concentration TOC detection electrode structure includes an electrode base with a mounting groove for mounting the electrode structure body. The electrode structure body includes an outer electrode cylinder, an inner electrode core disposed inside the outer electrode cylinder, and an electrode spacer between the outer electrode cylinder and the inner electrode core. The electrode base has an inlet pipe and an outlet pipe communicating with the outer electrode cylinder. The electrode spacer has an annular inlet channel in the middle and at least two inlet holes communicating with the inlet channel at the end of the electrode spacer near the outlet pipe.

[0005] Furthermore, the electrode base sidewall is provided with an inlet pipe connector at the inlet pipe, the electrode base is provided with a first through hole for inserting the inlet pipe connector, and the outer electrode cylinder is provided with a second through hole connected to the first through hole.

[0006] Furthermore, the upper end of the electrode base is provided with a liquid outlet pipe connector at the liquid outlet pipe, the electrode base is provided with a third through hole for the liquid outlet pipe connector to be inserted, and the outer electrode cylinder is provided with a fourth through hole connected to the third through hole.

[0007] Furthermore, a guide opening is provided between the third through hole and the fourth through hole.

[0008] Furthermore, the upper end face of the electrode spacer is provided with six liquid inlet holes evenly arranged in the circumferential direction.

[0009] Furthermore, the liquid inlet channel is equipped with guide grooves that correspond one-to-one with the liquid inlet holes.

[0010] Furthermore, a temperature sensor is installed inside the internal electrode core.

[0011] Furthermore, the lower end of the outer electrode cylinder is provided with an electrode retaining ring for positioning.

[0012] Furthermore, a sealing seat is provided on the lower end face of the electrode base, and the sealing seat is located at the lower end of the inner electrode core.

[0013] Furthermore, the second through hole is aligned with the guide groove.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: This invention provides a high-flow-rate, ultra-low concentration TOC detection electrode structure, including an electrode base, an inlet pipe and an outlet pipe disposed on the electrode base. The electrode structure body is disposed in the mounting groove of the electrode base. The electrode structure body includes an inner electrode core and an outer electrode cylinder sleeved outside the inner electrode core. An electrode spacer is disposed between the inner electrode core and the outer electrode cylinder. An inlet channel is provided in the middle of the electrode spacer. At least two inlet holes are provided on the end face near the outlet pipe. A guide groove is provided at the corresponding position of the inlet hole in the inlet channel. The inlet hole is provided for diversion. Liquid flows in from the inlet pipe and flows out from the inlet hole through the inlet channel. Under a high flow rate, laminar flow is generated through the inlet hole and finally converges together. The overall water flow is more stable and uniform, and the test structure is less likely to generate turbulence and affect the conductivity, which is convenient for testing low concentration TOC solutions. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a cross-sectional view of the present invention; Figure 3 This is a disassembly diagram of the present invention; Figure 4 This is a top view of the electrode spacer; The components include: electrode base 1, electrode structure body 2, outer electrode cylinder 201, inner electrode core 202, electrode spacer 203, liquid inlet pipe 3, liquid outlet pipe 4, liquid inlet channel 5, liquid inlet hole 6, guide groove 7, liquid inlet pipe connector 8, first through hole 9, second through hole 10, liquid outlet pipe connector 11, third through hole 12, fourth through hole 13, guide port 14, temperature sensor 15, electrode retaining ring 16, sealing seat 17, wire 18, and mounting hole 19. Detailed Implementation

[0016] The present invention will be further described below with reference to specific embodiments.

[0017] refer to Figure 1 , 2 3, 4, A high-flow-rate ultra-low concentration TOC detection electrode structure includes an electrode base 1. The electrode base 1 has a mounting groove for mounting an electrode structure body 2. The electrode structure body 2 includes an outer electrode cylinder 201, an inner electrode core 202 disposed inside the outer electrode cylinder 201, and an electrode spacer 203 disposed between the outer electrode cylinder 201 and the inner electrode core 202. The electrode base 1 has an inlet pipe 3 and an outlet pipe 4 communicating with the outer electrode cylinder 201. The electrode spacer 203 has an annular inlet channel 5 in its middle. The electrode spacer 203 has at least two inlet holes 6 communicating with the inlet channel 5 on one end face near the outlet pipe 4. The electrode spacer 203 has a mounting hole 19 in its center for the inner electrode core 202 to pass through.

[0018] Preferably, the upper end face of the electrode spacer 203 is provided with six liquid inlet holes 6 evenly arranged in the circumferential direction, and the liquid inlet channel 5 is provided with a guide groove 7, which corresponds one-to-one with the liquid inlet holes 6. Multiple liquid inlet holes 6 are provided for diversion to ensure that the fluid is more stable under high flow rate.

[0019] The electrode base 1 has an inlet pipe connector 8 located on its side wall at the inlet pipe 3. The electrode base 1 has a first through hole 9 for inserting the inlet pipe connector 8, and the outer electrode cylinder 201 has a second through hole 10 connected to the first through hole. The inlet pipe 3 is located at the center of the inlet pipe connector 8. The inlet pipe 3 is installed on the electrode base 1, allowing liquid to flow into the outer electrode cylinder 201. The second through hole 9 is aligned with the guide groove 7, ensuring the inlet pipe 3 is aligned with the guide groove 7 of any one of the inlet holes 6. The guide groove 7 limits the movement of the inlet pipe 3. Liquid flows through the inlet channel and exits from multiple inlet holes 6. Under high flow conditions, the liquid flowing from each inlet hole 6 converges, flows through the channel between the outer electrode cylinder 201 and the inner electrode core 202, and exits from the outlet pipe 4. With multiple inlet holes for 6-way flow, compared to overall inflow, multiple small holes for air / liquid inflow, compared to a large inlet, can effectively reduce the Reynolds number (Re), avoid turbulence, and form a more stable and uniform laminar flow state. In this laminar flow state, the water velocity near the center of the water flow channel in the effective detection surface is not significantly different from the water velocity on both sides, which can ensure the stability of the conductivity reading by the electrode and enable the testing of liquids with low TOC concentration.

[0020] The electrode base 1 has an outlet pipe connector 11 at its upper end, located at the outlet pipe 4. The electrode base 1 has a third through hole 12 for inserting the outlet pipe connector 11, and the outer electrode cylinder 201 has a fourth through hole 13 connected to the third through hole. The outlet pipe 4 is located at the center of the outlet pipe connector 11. The outlet pipe connector 11 facilitates the installation of the outlet pipe on the electrode base 1, and the third and fourth through holes allow liquid to flow out from the outlet pipe 4. Preferably, a guide port 14 is provided between the third and fourth through holes. The outlet port is designed with a guide to ensure no dead volume inside the outer electrode cylinder, thereby ensuring that the water inside the outer electrode cylinder can be replaced in a timely manner.

[0021] The inner electrode core 202 is equipped with a temperature sensor 15 to monitor the internal temperature of the inner electrode core 202 during operation.

[0022] The lower end of the outer electrode cylinder 201 is provided with an electrode retaining ring 16 for positioning. The electrode retaining ring 16 is used for positioning during the installation of the outer electrode cylinder 201 and is snapped into the mounting groove.

[0023] The electrode base 1 has a sealing seat 17 on its lower end face. The sealing seat 17 is located at the lower end of the inner electrode core 202. Below the sealing seat 17, the wire 18 of the temperature sensor 15 is also provided. The sealing seat 17 is provided to seal and prevent the internal liquid from flowing out.

[0024] The liquid inlet hole 6 is a complete circular hole, located at the middle of the upper end face of the inner electrode core 202. That is, the distance between the liquid inlet hole 6 and the outer wall of the inner electrode core is approximately equal to the distance between the liquid inlet hole 6 and the inner wall of the outer electrode cylinder.

[0025] The above description is only an optional embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A high-flow-rate, ultra-low concentration TOC detection electrode structure, characterized in that: The electrode base (1) is provided with a mounting groove for mounting an electrode structure body (2). The electrode structure body (2) includes an outer electrode cylinder (201), an inner electrode core (202) located inside the outer electrode cylinder (201), and an electrode spacer (203) located between the outer electrode cylinder (201) and the inner electrode core (202). The electrode base (1) is provided with an inlet pipe (3) and an outlet pipe (4) communicating with the outer electrode cylinder (201). The electrode spacer (203) is provided with an annular inlet channel (5) in the middle. The electrode spacer (203) is provided with at least two inlet holes (6) communicating with the inlet channel (5) at the end near the outlet pipe (4).

2. The high-flow-rate, ultra-low-concentration TOC detection electrode structure as described in claim 1, characterized in that: The electrode base (1) has an inlet pipe connector (8) on its side wall at the inlet pipe (3). The electrode base (1) has a first through hole (9) for inserting the inlet pipe connector (8). The outer electrode cylinder (201) has a second through hole (10) connected to the first through hole.

3. The high-flow-rate, ultra-low concentration TOC detection electrode structure as described in claim 1, characterized in that: The electrode base (1) is provided with a liquid outlet pipe connector (11) at the upper end of the liquid outlet pipe (4). The electrode base (1) is provided with a third through hole (12) for the liquid outlet pipe connector (11) to be inserted. The outer electrode cylinder (201) is provided with a fourth through hole (13) connected to the third through hole.

4. The high-flow-rate, ultra-low-concentration TOC detection electrode structure as described in claim 3, characterized in that: A guide opening (14) is provided between the third through hole (12) and the fourth through hole (13).

5. The high-flow-rate, ultra-low-concentration TOC detection electrode structure as described in claim 1, characterized in that: The upper end face of the electrode spacer (203) is provided with six liquid inlet holes (6) evenly arranged in the circumferential direction.

6. The high-flow-rate, ultra-low concentration TOC detection electrode structure as described in claim 5, characterized in that: The liquid inlet channel (5) is provided with a guide groove, which corresponds one-to-one with the liquid inlet hole (6).

7. The high-flow-rate, ultra-low concentration TOC detection electrode structure as described in claim 1, characterized in that: The internal electrode core (202) is equipped with a temperature sensor (15).

8. The high-flow-rate, ultra-low-concentration TOC detection electrode structure as described in claim 1, characterized in that: The lower end of the outer electrode cylinder (201) is provided with an electrode retaining ring (16) for positioning.

9. The high-flow-rate, ultra-low-concentration TOC detection electrode structure as described in claim 1, characterized in that: The lower end face of the electrode base (1) is provided with a sealing seat (17), which is located at the lower end of the inner electrode core (202).

10. The large flow ultra-low concentration TOC detection electrode structure of claim 2, wherein: The second through hole (10) is aligned with the guide groove (7).

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