Imaging optics for projection lithography

Abstract

An imaging optic (10) for projection lithography serves to image an object field (5), in which a reticulum to be imaged can be arranged, onto an image field (11), in which a substrate to be exposed can be arranged. The imaging optic (10) has a plurality of mirrors (M1 to M8) for guiding imaging light (16) along an imaging beam path from the object field (5) to the image field (11). The image-side numerical aperture of the imaging optic (10) is greater than 0.75. The optical conductivity of the imaging optic (10) is greater than 45 mm. 2 The result is an imaging optic whose usability for a projection exposure system is improved.

Description

The invention relates to an imaging optics system for projection lithography. Furthermore, the invention relates to an optical system comprising such an imaging optics system, a projection exposure system comprising such an optical system, a method for producing a micro- or nanostructured component using such a projection exposure system, and a micro- or nanostructured component produced using this method. Imaging optics or projection optics of the type mentioned at the outset are known from DE 10 2021 205 775 A1, WO 2016 / 188934 A1, DE 10 2016 218 996 A1, WO 2018 / 010960 A1, DE 10 2015 209 827 A1, DE 10 2012 212 753 A1, US 2010 / 0149509 A1 and US 4,964,706. It is an object of the present invention to further develop an imaging optics of the type mentioned at the outset in such a way that its usability for a projection exposure system is improved. According to a first aspect, the object is achieved according to the invention by an imaging optic having the features specified in claim 1. According to the invention, it was recognized that an imaging optic with a large image-side numerical aperture enables high resolution in structural imaging. This is particularly important when the imaging optic is used as an EUV imaging optic when used with EUV imaging light with a wavelength in the range between 5 nm and 30 nm. The image-side numerical aperture can be at least 0.8 and can also be greater than 0.8. The image-side numerical aperture can be 0.82, 0.83, 0.84, or even 0.85. The imaging optic can have good aberration correction. The optical conductance of the imaging optics can be greater than 50 mm2, greater than 55 mm2, greater than 60 mm2, greater than 65 mm2, greater than 70 mm2, greater than 75 mm2, greater than 80 mm2, and even greater. The optical conductance (etendue) is usually less than 100 mm2. A distance value according to claim 2 results in a comparatively compact imaging optics, so that a projection exposure system with such an imaging optics can be accommodated, in particular, on exactly one floor of a typical industrial hall. The distance between the object plane and the image plane can be a maximum of 2300 mm and can be, for example, 2271 mm or 2159 mm. A mirror diameter according to claim 3 reduces the manufacturing requirements for the last mirror in the imaging beam path. The diameter of the last mirror can be a maximum of 1200 mm, can be 1175 mm, can be 1150 mm, can be 1146 mm, and can even be 1140 mm. A mirror surface according to claim 4 accordingly results in an imaging optic with comparatively low manufacturing costs. The total mirror surface can be less than 3.4 m2, less than 3.3 m2, 3.28 m2, less than 3.2 m2, less than 3.1 m2, 3 m2, less than 3 m2, less than 2.9 m2, less than 2.8 m2, and 2.77 m2. Mirror extensions according to claims 5 or 6 have proven advantageous for realizing a comparatively compact imaging optics. A working distance according to claim 7 avoids installation space conflicts between the second-to-last mirror in the imaging beam path and image-field-side components of the projection exposure system. The working distance can be 78 mm, can be greater than 80 mm, can be greater than 90 mm, and can be 100 mm. A linear pupil obscuration according to claim 8 avoids throughput losses of the imaging optics. The pupil obscuration can be 22%, can be 20%, can be less than 20%, can be less than 19%, can be 18.7%, can be less than 18%, can be 17.7%, or can be 17.6%. A definition of linear pupil obscuration can be found in US Pat. No. 6,894,834 B2. At least one GI mirror according to claim 9 enables imaging optics with high total transmission. A minimum angle of incidence on the at least one GI mirror can be greater than 70°. If the imaging optics has more than one GI mirror, a minimum angle of incidence on all GI mirrors can be greater than 70°. The angle of incidence on at least one GI mirror or on all GI mirrors can be greater than 74°. The imaging optics can have four GI mirrors, six GI mirrors, or even seven GI mirrors. At least two GI mirrors according to claim 10 can be arranged directly adjacent to each other in an imaging beam path of the imaging optics. The distance between the reflection surfaces of adjacent GI mirrors can be greater than 100 mm and can be, for example, 130 mm. A total transmission according to claim 11 leads to a high throughput of the imaging optics. The total transmission can be greater than 5.0%, greater than 5.5%, greater than 6.0%, greater than 6.5%, or greater than 7.0%. The total transmission is usually less than 10%. An object-image offset according to claim 12 enables a compact imaging optics. The object-image offset can be 3600 mm, can be 3500 mm, can be less than 3500 mm, can be less than 3400 mm, can be less than 3300 mm, can be less than 3200 mm, can be less than 3100 mm, and can be 3080 mm. The largest installation space dimension of the imaging optics, i.e. the dimension of a cuboid in which the reflection surfaces of the imaging optics can be accommodated, can be 3800 mm. A distance according to claim 13 avoids space conflicts between the first mirror in the beam path of the imaging optics and image-side components of the projection exposure system. The distance can be 600 mm. The imaging EUV optics can have an accessible entrance pupil in a beam path of imaging light in front of the object field at a distance between 1 m and 4 m in front of the object field. The position of such an entrance pupil can be approximately the same in a meridional plane and in a sagittal plane perpendicular to it. The imaging EUV optics can have a pupil plane in the beam path between the object field and the image field. The pupil or aperture plane can be located on one of the mirrors of the imaging EUV optics, in particular on an NI mirror. The advantages of an optical system according to claim 14, a projection exposure apparatus according to claim 15, a manufacturing method according to claim 16 and a micro- or nanostructured component according to claim 17 correspond to those already explained above with reference to the projection optics according to the invention. The EUV light source of the projection exposure system can be designed to produce a useful wavelength that is at most 13.5 nm, less than 13.5 nm, less than 10 nm, less than 8 nm, less than 7 nm, and, for example, 6.7 nm or 6.9 nm. A useful wavelength less than 6.7 nm, and especially in the range of 6 nm, is also possible. The projection exposure system can be used to produce a semiconductor component, for example a memory chip. The invention is explained in more detail below using exemplary embodiments with reference to the drawings. These show: Fig. 1 shows a schematic meridional section of a projection exposure system for EUV projection lithography; Fig. 2 shows, also in a meridional section, an embodiment of an imaging optics used as a projection lens in the projection exposure system according to Fig. 1, wherein an imaging beam path is shown for principal rays, an upper and a lower coma ray, and optionally for intermediate individual rays of several selected field points; Figs. 3 to 16 show further embodiments of the imaging optics in a representation similar to Fig. 2. In the following, the essential components of a projection exposure system 1 for microlithography are first described by way of example with reference to Fig. 1. The description of the basic structure of the projection exposure system 1 and its components is not intended to be limiting. One embodiment of an illumination system 2 of the projection exposure system 1 has, in addition to a light or radiation source 3, an illumination optics 4 for illuminating an object field 5 in an object plane 6. In an alternative embodiment, the light source 3 can also be provided as a separate module from the rest of the illumination system. In this case, the illumination system does not include the light source 3. An object to be structured, arranged in the object field 5 and in the form of a lithography mask or a reticle 7, is exposed. The reticle 7 is held by a reticle holder 8. The reticle holder 8 can be displaced, in particular in a scanning direction, via a reticle displacement drive 9. For illustrative purposes, a Cartesian xyz coordinate system is shown in Figure 1. The x-direction runs perpendicular to the drawing plane. The y-direction runs horizontally, and the z-direction runs vertically. The scanning direction in Figure 1 runs along the y-direction. The z-direction runs perpendicular to the object plane 6. The projection exposure system 1 comprises a projection optics or imaging optics 10. The projection optics 10 serves to image the object field 5 into an image field 11 in an image plane 12. The image plane 12 runs parallel to the object plane 6. Alternatively, an angle other than 0° between the object plane 6 and the image plane 12 is also possible. Designs of the imaging optics 10 used in the projection exposure system 1 are explained below with reference to Fig. 2 ff. A structure on the reticle 7 is imaged onto a light-sensitive layer of a wafer 13 arranged in the image plane 12 in the region of the image field 11. The wafer 13 is held by a wafer holder 14. The wafer holder 14 can be displaced, in particular along the y-direction, via a wafer displacement drive 15. When the projection exposure system 1 is designed as a scanner, this y-displacement direction is also referred to as the scan direction. The displacement of the reticle 7, on the one hand, via the reticle displacement drive 9, and the displacement of the wafer 13, on the other hand, via the wafer displacement drive 15, can be synchronized with each other. A width, i.e., the x-extension orthogonal to the scanning direction y, of the image field 11 is identical to the maximum x-width of a contiguously exposing area on the wafer 13. Many projection exposure systems, especially for EUV and DUV wavelengths, use a width of approximately 26 mm. A maximum length, i.e. the y-extension parallel to the scanning direction of the region that can be exposed contiguously on the wafer 13, is independent of the y-length of the image field 11, but is linked to the maximum y-extension of the reticle 7 in the scanning direction and / or the maximum y-displacement distance of the reticle displacement drive 9. In contrast to the width of the image field 13, its length has no effect on the maximum extent of the contiguously exposing area on the wafer 13. The length of the image field 13 is therefore an internal design parameter of the projection exposure system 1. The larger the length of the image field 13, the longer a point on the wafer 13 is exposed, assuming otherwise identical parameters. Any fluctuations in the projection exposure system 1 are then averaged over a longer period of time, resulting in a more stable exposure process and thus increasing the yield of the resulting structured wafers. An advantageous embodiment of the projection optics 10 thus has an image field 13 with a large length, i.e., a large y-extension. Such a larger length of the image field 13 leads to a more challenging optical design of the projection optics 10. The degree of challenge can be well described by the light conductance, also referred to as etendue. For a rectangular field with dimensions h and w, which emits light rays with a maximum angle of α to the normal, the light conductance is given by . At the image plane 12, h and w correspond to the length and width of the image field 13, respectively, and sin α is the image-side numerical aperture NA of the radiation (α: maximum beam angle). The light conductance is a conserved quantity and therefore results in the same value at the object plane 6 if the dimensions of the object field 5 and the value there for the object-side numerical aperture or the maximum beam angle α are inserted into the equation instead. In addition, reference is made to US 6,198,793 B1 . The radiation source 3 is an EUV radiation source. The radiation source 3 emits, in particular, EUV radiation 16, which is also referred to below as useful radiation, illumination radiation, imaging radiation, illumination light, or imaging light. The useful radiation has, in particular, a wavelength in the range between 5 nm and 30 nm. The radiation source 3 can be a plasma source, for example, an LPP source (laser produced plasma, plasma generated using a laser) or a DPP source (gas discharged produced plasma, plasma generated by gas discharge). It can also be a synchrotron-based radiation source. The radiation source 3 can be a free-electron laser (FEL). The radiation source can be a tin-based or xenon-based EUV radiation source. The illumination radiation 16 emanating from the radiation source 3 is focused by a collector 17. The collector 17 can be a collector with one or more ellipsoidal and / or hyperboloidal reflection surfaces. The at least one reflection surface of the collector 17 can be exposed to the illumination radiation 16 at grazing incidence (GI), i.e., at angles of incidence greater than 45°, or at normal incidence (NI), i.e., at angles of incidence less than 45°. The collector 17 can be structured and / or coated, on the one hand, to optimize its reflectivity for the useful radiation and, on the other hand, to suppress stray light. After the collector 17, the illumination radiation 16 propagates through an intermediate focus in an intermediate focal plane 18. The intermediate focal plane 18 can represent a separation between a radiation source module, comprising the radiation source 3 and the collector 17, and the illumination optics 4. The illumination optics 4 comprises a first facet mirror 19. If the first facet mirror 19 is arranged in a plane of the illumination optics 4 that is optically conjugate to the object plane 6, it is also referred to as a field facet mirror. The first facet mirror 19 comprises a plurality of individual first facets 20, which are also referred to below as field facets. Only a few of these facets are shown in Fig. 1 as examples. The first facets 20 can be designed as macroscopic facets, in particular as rectangular facets or as facets with an arcuate or partially circular edge contour. The first facets 20 can be designed as flat facets or, alternatively, as convexly or concavely curved facets. As is known, for example, from DE 10 2008 009 600 A1, the first facets 20 themselves can also be composed of a plurality of individual mirrors, in particular a plurality of micromirrors. The first facet mirror 19 can, in particular, be designed as a microelectromechanical system (MEMS system). For details, reference is made to DE 10 2008 009 600 A1. Between the intermediate focus in the intermediate focal plane 18 and the first facet mirror 19, there is a deflection mirror US in the beam path of the illumination optics 4, which can be designed as a plane mirror, but alternatively can also have a bundle-forming effect. In the beam path of the illumination optics 4, a second facet mirror 21 is arranged downstream of the first facet mirror 19. If the second facet mirror 21 is arranged in a pupil plane of the illumination optics 4, it is also referred to as a pupil facet mirror. The second facet mirror 21 can also be arranged at a distance from a pupil plane of the illumination optics 4. In this case, the combination of the first facet mirror 19 and the second facet mirror 21 is also referred to as a specular reflector. Specular reflectors are known from US 2006 / 0132747 A1, EP 1 614 008 B1, and US 6,573,978. The second facet mirror 21 comprises a plurality of second facets 22. In the case of a pupil facet mirror, the second facets 22 are also referred to as pupil facets. The second facets 22 can also be macroscopic facets, which can, for example, be round, rectangular, or hexagonal, or alternatively facets composed of micromirrors. Reference is also made to DE 10 2008 009 600 A1 in this regard. The second facets 22 may have planar or alternatively convex or concave curved reflection surfaces. The illumination optics 4 thus form a double-faceted system. This basic principle is also known as a honeycomb condenser (fly's eye integrator). It may be advantageous to arrange the second facet mirror 21 not exactly in a plane that is optically conjugated to a pupil plane of the projection optics 10. In particular, the pupil facet mirror 22 can be arranged tilted relative to a pupil plane of the projection optics 10, as described, for example, in DE 10 2017 220 586 A1. With the aid of the second facet mirror 21 and, if necessary, with an imaging optical assembly in the form of a transmission optic, which is not shown in Fig. 1, the individual first facets 20 are imaged into the object field 5. The transmission optics can comprise exactly one mirror, but alternatively also two or more mirrors arranged one behind the other in the beam path of the illumination optics 4. The transmission optics can, in particular, comprise one or two mirrors for normal incidence (NI mirrors, normal incidence mirrors) and / or one or two mirrors for grazing incidence (GI mirrors, grazing incidence mirrors). In the embodiment shown in Fig. 1, the illumination optics 4 has exactly three mirrors after the collector 17, namely the deflection mirror US, the first facet mirror 19, and the second facet mirror 21. If the transmission optics are omitted after the second facet mirror 21, the second facet mirror 21 is the last bundle-forming or actually the last mirror for the illumination radiation 16 in the beam path in front of the object field 5. An example of an illumination optics 4 without transmission optics is disclosed in Fig. 2 of WO 2019 / 096654 A1. The imaging of the first facets 20 by means of the second facets 22 or with the second facets 22 and a transmission optics into the object plane 6 is usually only an approximate imaging. Each of the pupil facets 22 is assigned to exactly one of the field facets 20 to form a respective illumination channel for illuminating the object field 5. This can, in particular, result in illumination according to the Köhler principle. The far field is divided into a plurality of object fields 5 using the field facets 20. The field facets 20 generate a plurality of images of the intermediate focus on the pupil facets 22 assigned to them. The field facets 20 are each imaged onto the reticle 7 by an associated pupil facet 22, superimposed on one another, to illuminate the object field 5. The illumination of the object field 5 is, in particular, as homogeneous as possible. It preferably has a uniformity error of less than 2%. Field uniformity can be achieved by superimposing different illumination channels. By arranging the pupil facets, the illumination of the entrance pupil of the projection optics 10 can be geometrically defined. By selecting the illumination channels, in particular the subset of the pupil facets that guide light, the intensity distribution in the entrance pupil of the projection optics 10 can be adjusted. This intensity distribution is also referred to as the illumination setting or illumination pupil fill. A likewise preferred pupil uniformity in the area of ​​defined illuminated sections of an illumination pupil of the illumination optics 4 can be achieved by redistributing the illumination channels. Further aspects and details of the illumination of the object field 5 and in particular of the entrance pupil of the projection optics 10 are described below. The projection optics 10 may, in particular, have a homocentric entrance pupil. This may be accessible. The projection optics 10 are approximately telecentric in the x-direction on the object side. An entrance pupil is located more than 7 m from the object plane 6 in the x-direction. In the y-direction, the entrance pupil EP is located approximately 750 mm in the beam path in front of the object field 5. In one variant, the projection optics has an entrance pupil EP (cf. Fig. 1 ), which is located in the x-direction and also in the y-direction in the range between 1500 mm and 3500 mm in the beam path in front of the object field 5 and in particular in the range between 1800 mm and 2200 mm or also between 2000 mm and 3500 mm. An arrangement plane of this entrance pupil is shown in Fig. 1 at EP. If the pupil facet mirror 21 is therefore arranged in the beam path of the illumination or imaging light 16 approximately 2 m in front of the object field 5, the pupil facet mirror 21 satisfies the position condition “arrangement in the region of the entrance pupil of the projection optics”. If the entrance pupil is inaccessible, an arrangement plane of the pupil facet mirror 21 can be imaged into the entrance pupil with the aid of further components of the illumination optics 4. The entrance pupil of the projection optics 10 cannot usually be precisely illuminated with the pupil facet mirror 21. When the projection optics 10 images the center of the pupil facet mirror 21 telecentrically onto the wafer 13, the aperture rays often do not intersect at a single point. However, a surface can be found in which the pairwise determined spacing of the aperture rays is minimized. This surface represents the entrance pupil or a surface conjugate to it in spatial space. In particular, this surface exhibits a finite curvature. It is possible that the projection optics 10 have different entrance pupil positions for the tangential and sagittal beam paths. In this case, an imaging element, in particular an optical component of the transmission optics, should be provided between the second facet mirror 21 and the reticle 7. With the help of this optical element, the different positions of the tangential entrance pupil and the sagittal entrance pupil can be taken into account. In the arrangement of the components of the illumination optics 4 shown in Fig. 1, the pupil facet mirror 21 is arranged tilted relative to the object plane 5. The second facet mirror 21 is further tilted relative to an arrangement plane defined by the first facet mirror 19. With the aid of the projection exposure system 1, at least a portion of the reticle 7 in the object field 5 is imaged onto a region of a light-sensitive layer on the wafer 13 in the image field 11 for the lithographic production of a micro- or nanostructured component, in particular a semiconductor component, for example a microchip. Depending on the design of the projection exposure system 1 as a scanner or as a stepper, the reticle 7 and the wafer 13 are moved in a temporally synchronized manner in the y-direction, continuously in scanner mode or stepwise in stepper mode. Depending on the design, individual components or component assemblies described above, for example, the EUV collector 17, the illumination optics 4, or the projection optics 10, can also be components of a mask inspection device or a mask metrology device. A mask inspection system is generally known from US 10,042,248 B2, DE 102 20 815 A1, and WO 2012 / 101 269 A1. The projection optics or imaging optics of such a mask inspection device or mask metrology device can be designed such that a magnifying projection or imaging takes place from the object field 5 into the image field 11. The projection optics 10 comprises a plurality of mirrors which are numbered consecutively in Fig. 2 ff. according to their order in the beam path of the projection exposure system 1 in the embodiments of the projection optics shown below. In the example shown in Fig. 2, the projection optics 10 comprises eight mirrors M1 to M8. Alternatives with four, five, six, or a different number of mirrors Mi are also possible, as will become clear from the following description of further embodiments. The projection optics 10 are obscured optics. The last mirror M8 in the imaging beam path of the projection optics 10 has a passage opening 23 for the illumination radiation 16 guided in the imaging beam path between the mirrors M6 and M7. The projection optics 10 has an image-side numerical aperture of 0.75. Depending on the design of the projection optics 10, the image-side numerical aperture can range, for example, between 0.55 and 0.9, in particular between 0.7 and 0.88. The image-side numerical aperture of the projection optics 10 can also assume other values ​​depending on the design. Reflection surfaces of the mirrors Mi can be designed as freeform surfaces without a rotational symmetry axis. Alternatively, the reflection surfaces of the mirrors Mi can be designed as aspherical surfaces with exactly one rotational symmetry axis of the reflection surface shape. The mirrors Mi, like the mirrors of the illumination optics 4, can have highly reflective coatings for the illumination radiation 16. These coatings can be designed as multilayer coatings, e.g., with alternating layers of molybdenum and silicon. A ruthenium coating is also possible, particularly for coating mirrors for grazing incidence (GI mirrors). The projection optics 10 is anamorphic. It has different magnifications βx, βy in the x- and y-directions. The two magnifications βx, βy of the projection optics 10 are (βx, βy) = (+ / - 4, + / - 8). The projection optics 10 according to Fig. 2 has a magnification βx of +4.0 and a magnification βy of -8.0. Thus, there is an imaging reduction by a factor of 4 in the x-direction and an imaging reduction by a factor of 8 in the y-direction. The sign convention of the magnification β is such that with a negative magnification there is no intermediate image, not even in the form of a caustic, between the object field 5 and the image field 11, whereas with a positive magnification there is actually an intermediate image, possibly in the form of a caustic. An alternative design of the projection optics 10 can, for example, lead to an image inversion in the x-direction, i.e., in the direction perpendicular to the y-scan direction. The image scale βx in the x-direction would then be -4.00. In the y-scan direction, this design of the projection optics can then lead to a reduction of 4:1, this time without image inversion (βy = +4.00). Other magnifications are also possible. Magnifications with the same sign and / or absolutely identical in the x and y directions are also possible. The image field 11 has an x-extension of 26 mm and a y-extension of 1.0 mm. The x / y aspect ratio of the image field 11 is 26. Depending on the design of the projection optics 10, this aspect ratio can range, for example, between 2 and 50. The image field 11 can be partially annular. Alternatively, the image field 11 can also be rectangular. Further details of the projection optics 10 are described below with reference to Fig. 2. The projection optics 10 has four NI mirrors (normal incidence mirrors), namely mirrors M1, M4, M7, and M8, in the imaging beam path of the projection optics 10. The imaging light 16 is impinged on these NI mirrors M1, M4, M7, and M8 at angles of incidence less than 45°. The maximum angle of incidence of the imaging light 16 impinging on the respective NI mirror can be less than 40°, less than 35°, less than 30°, less than 25°, less than 20°, less than 15°, and less than 10°. The remaining mirrors M2, M3, M5, and M6 of the projection optics 10 are GI mirrors (grazing incidence mirrors). For these mirrors M2, M3, M5, and M6, the angles of incidence of the illumination light 16 on the mirrors are each greater than 45°. The minimum angle of incidence hitting the respective GI mirror can be greater than 50°, greater than 55°, greater than 60°, greater than 65°, greater than 70°, greater than 75°, and even greater than 80°. Mirrors M2 and M3 on the one hand, and M5 and M6 on the other, are each arranged as pairs of GI mirrors arranged directly behind one another. The deflection effects of GI mirrors M2 and M3 add to each other. The deflection effects of GI mirrors M5 and M6 add to each other. The deflection effects of mirrors M2 and M3 on the one hand and M5 and M6 on the other hand are opposite to each other. Depending on the design of the projection optics 10, there may be fewer or more than four GI mirrors. Information on reflection from a GI mirror (grazing incidence mirror) can be found in WO 2012 / 126867 A . Further information on the reflectivity of NI mirrors (normal incidence mirrors) can be found in DE 101 55 711 A . Mirrors M1 to M7 have no aperture and are each used for reflection in a continuous, continuous area. The last mirror M8 in the imaging beam path of projection optics 10, which defines the image-side numerical aperture, has the aperture 23 for the imaging light 16 in the portion of the imaging beam path between mirrors M6 and M7. Projection optics 10 is thus an obscured optic. Mirror M8 is used for reflection around the aperture 23. Figure 2 shows the calculated reflection surfaces of mirrors M1 to M8. The effective reflection surfaces of mirrors M1 to M8 are supported in a known manner by mirror bodies (not shown). The actual effective reflection surfaces of mirrors M1 to M8 include the reflection surfaces actually used for reflecting the imaging light 16 as well as a polishing overflow edge. The projection optics 10 has an image-side numerical aperture of 0.75. The object plane 6 and the image plane 12 are approximately parallel to each other. The distance between the object plane 6 and the image plane 12 for the projection optics 10 is 2300 mm. The last mirror M8 in the imaging beam path of the projection optics 10 has a diameter of 1160 mm. The object-to-image offset dOIS is 1650 mm. The object-to-image offset dOIS is measured between a central field point of object field 5 and a central field point of image field 11 perpendicular to a normal N to object plane 6. The object-image offset dOIS is smaller than the distance between object plane 6 and image plane 12. Along the y-direction, a space in which the projection optics 10 with all mirrors M1 to M8 can be accommodated has an extension of 2934 mm. The maximum optical mirror diameter of the mirrors M1 to M8 is 1170 mm. The total optically used mirror surface of all mirrors M1 to M8 is 2.20 m2. The pupil obscuration resulting from the aperture 23, which is shaded by an obscuration diaphragm of the projection optics 10, amounts to 25.5%. This obscuration value represents a linear pupil obscuration, i.e., a ratio of the sine of a minimum angle of incidence of the imaging light 16 onto the image field 11 to the image-side numerical aperture. This obscuration definition is in accordance with that of US Pat. No. 6,894,834 B2. A minimum angle of incidence of the imaging light 16 on the GI mirrors M2, M3, M5, M6 is 67.4°. One y-dimension of the image field 11 is 1.0 mm. For the image field, the projection optics 10 has an RMS value for the scan-integrated wavefront error of 8.75 mλ. The mean wavefront error RMS (scanned wavefront deviation) is a measure of the imaging quality of the projection optics 10. The mirrors M1 to M8 have a coating that optimizes their reflectivity for the imaging light 16. This can be a ruthenium coating, a molybdenum coating, or a molybdenum coating with a top layer of ruthenium. The mirrors M2, M3, M5, and M6 for grazing incidence can have a coating with, for example, a layer of molybdenum or ruthenium. These highly reflective layers, particularly those of the mirrors M1, M4, M7, and M8 for normal incidence, can be designed as multilayers, with successive layers being made of different materials. Alternating material layers can also be used. A typical multilayer can have fifty bilayers, each consisting of a layer of molybdenum and a layer of silicon. A multilayer can be provided with an additional cover layer, for example of ruthenium. A first intermediate image plane is present in the projection optics 10 in the beam path between the mirrors M2 and M3. A further intermediate image plane is present in the beam path between the mirrors M5 and M6. In the region of the passage opening 23, there is no intermediate image plane in the projection optics 10. The number of intermediate image planes differs from the number of intermediate images in the meridional plane according to Fig. 2 and the number of intermediate images in the plane perpendicular thereto. Such projection optics with different numbers of intermediate images in mutually perpendicular planes are generally known from WO 2016 / 166080 A1 and DE 10 2015 226 531 A1. The mirrors M1 to M8 are designed as freeform surfaces that cannot be described by a rotationally symmetric function. Other designs of the projection optics 10 are also possible, in which at least one of the mirrors M1 to M8 is designed as a rotationally symmetric asphere. All mirrors M1 to M8 can also be designed as such aspheres. A freeform surface can be described by the following freeform surface equation (Equation 1): The parameters of this equation (1) are:Z is the sagittal angle of the freeform surface at the point x, y, where x2+ y2= r2. r is the distance to the reference axis of the freeform surface equation (x = 0; y = 0). In the freeform surface equation (1), C1, C2, C3... denote the coefficients of the freeform surface series expansion in the powers of x and y. In the case of a conical base surface, cx, cy is a constant corresponding to the vertex curvature of a corresponding asphere. Thus, cx = 1 / Rx and cy = 1 / Ry. kx and ky each correspond to a conical constant of a corresponding asphere. Equation (1) thus describes a biconical freeform surface. An alternative freeform surface can be generated from a rotationally symmetric reference surface. Such freeform surfaces for reflection surfaces of the mirrors of projection optics in projection exposure systems for microlithography are known from US 2007-0058269 A1. Alternatively, freeform surfaces can also be described using two-dimensional spline surfaces. Examples include Bezier curves or non-uniform rational basis splines (NURBS). Two-dimensional spline surfaces can be described, for example, by a network of points in an xy-plane and their corresponding z-values, or by these points and their associated gradients. Depending on the type of spline surface, the complete surface is obtained by interpolation between the network points using, for example, polynomials or functions that have certain properties regarding their continuity and differentiability. Examples include analytic functions. The optical design data of the reflection surfaces of the mirrors M1 to M8 (= M01 to M08) of the projection optics 10 can be found in the following tables. The first of these tables specifies the vertex radii (radius x = Rx, radius y = Ry) and refractive power values ​​(power x, power y) for the optical surfaces of the optical components. Negative radius values ​​indicate concave curves toward the incident illumination light 16 at the intersection of the respective surface with the observed plane (xz, yz), which is spanned by a surface normal at the vertex with the respective curvature direction (x, y). The two radii, radius x and radius y, can explicitly have different signs. The vertices on each optical surface are defined as points of incidence of a guide beam which goes from an object field center along a symmetry plane x=0, i.e. the drawing plane of Fig. 2 (meridional plane) to the image field 11. The refractive powers Powerx (Px), Powery (Py) at the vertices are defined as: AOI refers to the angle of incidence of the guide beam to the surface normal. The second table shows the amount by which the respective mirror was decentered (Dy) in the y-direction, translated (Dz) in the z-direction, and tilted (αx, αy, αz) starting from a reference surface. This corresponds to a parallel translation and a tilt during the freeform surface design process. Translation occurs in mm in the y- and z-direction, and tilting occurs around the x-axis, the y-axis, and the z-axis. The angle of rotation is given in degrees. It is decentered first, then tilted. The reference surface for decentering is always the first surface of the specified optical design data. Decentering in the y- and z-direction is also specified for object field 5 (reticle). In addition to the values ​​assigned to the individual mirrors M1 to M8, this table also includes the object plane (reticle) as the first surface, the image plane (wafer) as the last surface and a diaphragm surface (designated “diaphragm”) as the arrangement plane for an aperture or diaphragm.Obscuration aperture tabulated. The third table (Tables 3a to 3c) lists the freeform surface coefficients Cn for mirrors M1 to M8, assigned to the polynomials xk and y1, respectively. Coefficients Cn that are not tabulated have the value 0. The projection optics 10 has an aperture in the imaging beam path of the projection optics 10 between the object field 5 and the image field 11. The aperture is arranged in the region of a pupil plane of the projection optics 10. The pupil plane of the projection optics 10 is located, as in the following embodiments, between the second-to-last mirror in the light path from object field 5 to image field 13 and the last mirror. In the embodiment shown in Fig. 2, the pupil plane is therefore located between mirrors M7 and M8. A possible arrangement plane of the aperture is illustrated in Fig. 2 and also in the following embodiments by a graduation line running parallel to the y-axis and intersecting the principal ray of the central field point. In the embodiment shown in Fig. 2, as well as in the following embodiments, the pupil plane of the projection optics 10 is located in a multi-passage region. In the embodiment shown in Fig. 2, the aperture arranged in the region of the pupil plane is intended to limit rays from mirror M7 to mirror M8 in a controlled manner. However, rays from mirror M6 to mirror M7 also pass through this region, which rays are not intended to be influenced by the aperture. These two requirements can be met by section-wise partial apertures, as described, for example, in DE 10 2015 209 827 B4. The diaphragm serves both as an aperture diaphragm to specify an outer pupil boundary and as an obscuration diaphragm to specify an inner pupil boundary in the pupil plane of the projection optics 10. The fourth table specifies the boundary of the aperture as a polygon in local xy coordinates. The aperture is also decentered and tilted as described above. In this table, the coordinates are given in two columns. The first column (consisting of an x ​​and a y coordinate) contains the coordinates of the vertices 1 to N / 2 of the polygon, while the second column contains the coordinates of the vertices N / 2+1 to N. Each row thus contains four numbers: xi, yi, xi+N / 2, yi+N / 2. Radii of the surfaces Table 1 to Fig. 2 Table 1 to Fig. 2 M01-4006.680385660.00049917-1856.175493600.00107748 M023618.16673054-0.0000804712360.96046183-0.00002356 M03-11219.576427630.00004700-3348.496414740.00015748 M04-2928.240445340.00067213-2154.837137840.00091336 M05-4577.720298770.00013923-5018.676557420.00012700 M06-23057.996725330.0000243619160.58475887-0.00002932 M0747040.46039551-0.00004252570.68814538-0.00350454 M08-927.174670700.00215709-773.730633860.00258488 Decentering (location, angle) of the surfaces Table 2 to Fig. 2 Table 2 to Fig. 2 Reticle0.0000000000.0000000000.000000000 M010.000000000-195.8148895492033.615382170 M020.000000000-670.373109961809.918050357 M030.000000000-1341.532615292319.107178270 M040.000000000-2920.111915340346.331447688 M050.000000000-2214.835535687595.970716857 M060.000000000-1948.835967540913.731595688 M07-0.000000000-1412.0862733062166.623949948 Aperture-0.000000000-1425.3317810402135.706008967 M080.000000000-1649.9482717731611.401501851 Wafer-0.000000000-1649.9314994022300.142798936 Reticle0.0000000000.0000000000.000000000 M01-7.8483171860.0000000000.000000000 M0252.490460591180.0000000000.000000000 M03197.5947635960.0000000000.000000000 M04-80.748063893180.0000000000.000000000 M05214.7794970970.0000000000.000000000 M0658.438195838180.0000000000.000000000 M07-23.190701940-0.000000000-0.000000000 Aperture0.920445862180.000000000-0.000000000 M08-11.596048609180.000000000-0.000000000 Wafer-0.001395279-0.0000000000.000000000 Freeform coefficients of the surfaces Table 3a to Fig. 2 Table 3a to Fig. 2 C7x 2 y1.0653346508e-081.4461716190e-07-1.1809180613e-07 C9y 38.3689536427e-09-5.1915916938e-074.8607313572e-08 C10x 49.0960350955e-122.9902673183e-11-5.310493 8816e-11 C12x 2 y 24.2229152526e-12-2.2103207766e-106.7773967044e-11 C14y 4-4.5670895684e-111.5779870279e-091.0274235356e-11 C16x4y1.5383904528e-141.2520206910e-132.3277989952e-14 C18x 2 y 33.3962274594e-141.2859911540e-13-2.6872924395e-14 C20y 5-1.1011725767e-13-5.0061062614e-12-4.9868491435e-14 C21x 69.7497329881e-183.0058664855e-17-4.2117563196e-18 C23x 4 y 25.5032363315e-182.8265265435e-167.8699410921e-18 C25x 2 y 48.8002876136e-17-6.0708065840e-16-2.2383474271e-17 C27y 6-1.9792825961e-162.0141312299e-142.3246512666e-17 C29x 6 y-1.3252955939e-219.1673193122e-203.0299968990e-20 C31x 4 y 31.7032221659e-20-2.0176840978e-19-1.5801943165e-20 C33x 2 y 5-1.5062534986e-223.9936037539e-18-2.4240344076e-19 C35y 7-9.0451625967e-19-1.1465533212e-16-1.0823445032e-18 C36x 8-6.5511100512e-25-6.5050217596e-22-1.3418607736e-24 C38x 6 y 25.5192917020e-231.2537921452e-21-2.8925625216e-23 C40x 4 y 43.6867444261 e-221.1535745562e-20-1.5516483392e-22 C42x 2 y 67.0463939401e-223.4479758791e-201.7763153523e-22 C44y 8-6.0072553834e-215.2295515287e-193.7817026852e-21 C46x 8 y-3.3078414482e-264.2146114767e-24-8.9229775082e-26 C48x 6 y 3-1.1105289730e-24-7.3282404640e-242.3654903034e-25 C50x 4 y 5-2.1001231166e-24-4.9073144135e-232.5120514892e-24 C52x 2 y 71.2652013766e-232.0212134498e-222.0334825818e-23 C54y 9-1.7028159875e-237.1436864727e-214.6059184826e-23 C55x 10-1.1447451947e-283.2696666193e-276.4938321415e-28 C57x 8 y 2-9.3819960427e-28-8.1817384627e-272.1024623565e-28 C59x 6 y 4-5.2205299688e-27-5.9959152694e-262.4505594060e-27 C61x 4y-2.8772860651e-26-1.5348263493e-241.1645869064e-26 C63x 2 y 46.9928643467e-26-1.0224716813e-23-9.2636084413e-26 C65y 101.3070289284e-25-8.6307205387e-23-1.8163215698e-25 C67x 10 y6.0150973109e-319.8507572943e-30-1.6339268994e-30 C69x 8 y 22.3498091459e-293.4343336070e-28-4.7643515233e-30 C71x 6 y 51.3946537420e-281.9675622000e-27-2.7322820956e-29 C73x 4 y 71.1724698585e-281.5061545167e-26-2.9779300789e-28 C75x 2 y 9-4.3538761247e-287.4826088128e-26-1.6524006261e-27 C77y 118.0112347611e-28-3.3878847281e-25-3.4925199902e-27 C78x 121.6699611618e-331.2413276392e-32-3.7448016123e-33 C80x 10 y 21.8459795980e-321.4690766573e-31-1.2948404572e-33 C82x 8 y 48.2959685816e-329.1825568647e-31-4.7702231116e-32 C84x 6 y 65.5137216781e-312.3731279421e-29-4.4002421522e-31 C86x 4 y 81.6988708211e-302.4495273894e-28-1.0686960606e-30 C88x 2 y 10-4.8759407919e-306.0486974398e-285.1654298469e-30 C90y 12-5.1361410770e-309.0573525984e-279.4349203242e-30 C92x 12 y-9.2162798520e-36-3.9809339286e-341.6944993107e-35 C94x 10 y 3-2.8043586182e-34-5.3606286726e-335.8985138820e-35 C96x 8 y 5-2.4886755154e-33-4.4394893003e-322.1305062773e-34 C98x 6 y 7-9.0044089527e-33-2.0306519651e-311.7161539480e-33 C100x 4 y 9-1.7484051684e-33-3.2983873869e-301.7502864223e-32 C102x 2 y 111.8082260968e-32-1.2245913695e-291.1369110826e-31 C104y 13-5.5516530550e-32-2.6268472670e-291.6759180877e-31 C105x 14-1.3383186771e-38-1.2133484208e-387.0795384965e-39 C107x 12 y 2-2.1070060344e-37-1.7644588958e-362.3510542095e-38 C109x 10 y 4-1.1378511736e-36-1.1364550348e-356.1222686783e-37 C111x 8 y 6-5.5608051599e-36-1.9704038574e-344.8967119502e-36 C113x 6 y 8-3.1697169485e-35-3.3546338188e-333.3631774094e-35 C115x 4 y 10-4.9460265405e-35-7.2874182071e-338.6158550940e-35 C117x 2 y 122.8967033984e-342.6563293748e-32-9.3608616954e-35 C119y 14-3.5884593290e-35-3.3540396614e-31-1.4617705163e-34 C121x 14 y7.3315208272e-413.2274237130e-39-6.7416810308e-41 C123x 12 y 31.9049619977e-395.3025296416e-38-4.5906183161e-40 C125x 10 y 52.1445652161e-385.5223377731e-37-1.5609316047e-39 C127x 8 y 71.2067622105e-373.0236751385e-36-2.0042434452e-39 C129x 6 y 92.9687316746e-371.8091767266e-352.2067564225e-38 C131x 4 y 11-1.7767920928e-373.0152057991e-34-5.9026040368e-37 C133x 2 y 131.8330111563e-396.9830419269e-34-4.3634939406e-36 C135y 151.2764508327e-363.2618045683e-33-4.5170862415e-36 C136x 166.5543866274e-44-8.8824123133e-43-3.3378058692e-46 C138x 14 y 21.4031176344e-421.8564307268e-41-2.1766390266e-43 C140x 12 y 41.0136095953e-411.4526391026e-40-4.4839947481e-42 C142x 10 y 64.4195948139e-411.6799001666e-39-3.5265561431e-41 C144x 8 y 82.3821595583e-401.9442874760e-38-1.8892564816e-40 C146x 6 y 109.0241520708e-402.0021200870e-37-1.3492507584e-39 C148x 4 y 121.0734453169e-40-1.3057955527e-36-3.2418662006e-39 C150x 2 y 14-7.6539325729e-39-5.3400516709e-36-3.2017434143e-39 C152y 164.6229922758e-39-1.2253536019e-35-3.0342552965e-39 C154x 16 y-2.8092739635e-46-1.1988614950e-441.3109864534e-46 C156x 14 y 3-6.9237707704e-45-2.7275983701 e-431.8772051980e-45 C158x 12 y 5-9.3297637522e-44-3.3547854125e-427.3092396128e-45 C160x 10 y 7-6.7212583658e-43-2.6293784473e-41-1.7825104861e-44 C162x 8 y 2-2.6907944141e-42-8.7921467062e-41-3.8628317011e-43 C164x 6 y 11-4.9491462853e-42-1.1411298482e-39-5.6239775556e-42 C166x 4 y 138.1828381843e-42-6.0664235437e-391.2533199038e-41 C168x 2 y 15-1.4444130729e-415.0486671950e-398.1179232184e-41 C170y 17-5.5617713217e-422.0509484730e-385.9580756555e-41 C171x 18-1.7923082169e-494.9696525193e-48-1.5138455231e-50 C173x 16 y 2-4.9870001466e-48-1.0300623847e-468.4449993048e-49 C175x 14 y 4-4.7290087934e-47-1.0050348286e-451.6650242719e-47 C177x 12 y 6-2.4794289271e-46-1.0801236820e-441.4208393483e-46 C179x 10 y 8-1.0450097720e-45-9.1491154122e-445.8913128408e-46 C181x 8 y 10-4.9098868371e-45-8.3149988344e-432.7728553464e-45 C183x 6 y 12-1.1992074465e-44-3.4368184980e-421.5277416642e-44 C185x 4 y 142.5712778219e-447.4150651543e-416.0502538526e-44 C187x 2 y 167.4015484262e-446.8415890307e-411.4743837433e-43 C189y 18-6.5030612936e-44-2.9410932492e-431.0844521379e-43 C191x 18 y4.1587282680e-522.0196469070e-50-1.0034453891e-52 C193x 16 y 31.0362391528e-506.2210292864e-49-3.0170639714e-51 C195x 14 y 51.6383660231e-498.6881992987e-48-1.4500172505e-50 C197x 12 y 71.3826543122e-488.1963275814e-477.7535530629e-50 C199x 10 y 97.5258372129e-484.4366324123e-469.6576637540e-49 C201x 8 y 112.1634417067e-471.0169650227e-451.4024282434e-47 C203x 6 y 133.5548815852e-472.8068921810e-441.4790726622e-46 C205x 4 y 15-1.1242609740e-46-2.5065803394e-43-1.7474035830e-46 C207x 2 y 172.5380472575e-46-2.0555699957e-43-4.8784753359e-46 C209y 19-1.3208848964e-46-6.3460395662e-44-2.4987538635e-46 C210x 202.0824710975e-55-8.0332735130e-541.2768925709e-56 C212x 18 y 27.2749220733e-542.4633949757e-52-1.1853012787e-54 C214x 16 y 48.6955734686e-533.2129468152e-51-2.4954214163e-53 C216x 14 y 65.7852342994e-523.5109905440e-50-2.1855037888e-52 C218x 12 y 82.5855075103e-512.7537359142e-49-8.3385986869e-52 C220x 10 y 101.0480306790e-501.4419082136e-48-9.8258364942e-52 C222x 8 y 123.3883199838e-501.2254236066e-471.9732855800e-50 C224x 6 y 146.8282656224e-50-3.7235098739e-472.6272610901e-49 C226x 4 y 16-4.4761262658e-492.9295809908e-46-7.1371885115e-49 C228x 2 y 181.5554922107e-498.1767399435e-47-1.1506309074e-48 C230y 20-7.5847276723e-501.0294146950e-46-6.1544699543e-49 Tabelle 3b zu Fig. 2 Tabelle 3b zu Fig. 2 C7x 2 y7.6859845336e-096.5896290795e-08-5.3388914957e-08 C9y 3-4.1648300149e-071.0624129168e-07-1.2523689114e-08 C10x 43.9630957493e-142.9206745991e-111.6729376128e-10 C12x 2 y 2-7.2483941669e-12-5.4492380456e-11-1.5903763335e-11 C14y 4-1.1137661386e-09-1.6106352567e-10-1.2682239053e-11 C16x 4 y-3.0052018022e-15-5.2241526899e-145.0615630807e-13 C18x 2 y 3-5.1104507064e-13-8.4538135717e-141.3369335133e-13 C20y 5-3.3456471054e-127.1032904880e-132.0181524891e-13 C21x 62.2006848670e-19-3.2854306087e-18-5.0340170979e-16 C23x 4 y 2-9.7653685836e-178.2860768637e-171.5571966210e-15 C25x 2 y 41.6646710128e-173.5400058054e-16-1.7185228959e-15 C27y 66.2895586347e-14-2.7642442493e-157.7038311663e-16 C29x 6 y-5.2257442562e-211.4873487765e-20-4.5403683395e-18 C31x 4 y 3-7.1304794768e-204.3086901965e-198.6966309794e-18 C33x 2 y 51.4618021953e-17-2.2693961680e-18-2.4529358276e-18 C35y 7-7.1819331360e-169.5347001704e-18-3.2380214855e-17 C36x 8-3.5932654787e-26-1.0778529585e-221.1101138417e-20 C38x 6 y 2-8.1882623492e-231.0206915357e-225.0350882674e-21 C40x 4 y 4-3.9973174511e-22-1.2593907271e-216.7368301946e-20 C42x 2 y 6-5.4246050717e-192.4365347307e-201.9821468104e-19 C44y 8-1.1028936764e-17-6.1855116403e-212.0661970083e-19 C46x 8 y-2.7713789281e-268.4665954431e-251.7768668413e-22 C48x 6 y 3-2.3796192596e-244.3280145318e-24-5.4360566814e-22 C50x 4 y 5-2.3753286269e-221.2307804299e-23-1.4739911726e-21 C52x 2 y 41.0642504684e-20-3.6850769195e-22-1.3555684173e-21 C54y 95.5250196061e-196.5670651315e-228.7387470352e-22 C55x 10-1.9577854672e-298.2804987761e-27-8.6214178875e-25 C57x 8 y 2-1.6632677090e-28-1.3100961041e-26-2.3012570332e-24 C59x 6 y 4-4.5795694181e-26-7.1469561296e-26-2.1035965757e-23 C61x 4 y 66.1835668086e-24-2.0344370752e-25-1.2877533341e-23 C63x 2 y 45.6365167157e-22-1.5029581497e-24-6.5022334826e-24 C65y 101.3751085708e-20-9.4243075628e-24-1.7445236477e-23 C67x 10 y 31.7043199812e-31-7.0448552646e-29-2.5238598546e-26 C69x 8 y 32.0925874476e-29-1.7951458669e-289.2069405350e-26 C71x 6 y 94.7766112459e-27-1.5490672844e-273.7007985913e-25 C73x 4 y 72.7513181365e-257.5723614019e-272.8405977746e-25 C75x 2 y 9-1.5683718647e-244.4693903993e-261.3829985673e-25 C77y 11-1.7913294759e-22-1.1620647974e-256.0619634007e-26 C78x 128.0641769403e-35-1.0888480963e-313.3959846493e-29 C80x 10 y 21.4184693632e-335.9307274416e-31-4.3221197354e-29 C82x 8 y 41.0555576013e-305.0491745873e-302.4892639937e-27 C84x 6 y 69.3582456651e-291.6133561194e-294.9916849642e-27 C86x 4 y 8-1.4428147759e-272.9457745093e-296.4198192014e-28 C88X 2 y 10-2.6321818863e-252.4838693229e-28-7.2784988637e-28 C90y 12-7.4104579587e-241.2187886390e-272.8822379916e-28 C92x 12 y-7.9463311145e-371.2020984363e-331.6732842797e-30 C94x 10 y 3-6.3240590805e-351.7931772253e-34-8.8971260261e-30 C96x 8 y 5-1.4523366029e-322.3059538834e-32-4.8178779796e-29 C98x 6 y 7-2.6068968887e-30-2.1199776528e-32-8.3261785553e-29 C100x 4 y 9-1.4130434290e-28-1.4376962907e-30-2.3259335457e-29 C102x 2 y 11-9.3116975536e-28-5.2675904145e-303.7346562917e-31 C104y 133.9033484201e-271.7594187778e-29-2.9684468875e-30 C105x 14-1.2853261744e-405.0267957153e-37-2.9577773980e-34 C107x 12 y 2-1.0026950449e-39-1.0649359899e-351.2218930518e-32 C109x 10 y 4-5.0718888992e-36-1.0873336535e-34-1.3524859895e-31 C111x 8 y 6-1.1232831170e-33-5.7178123112e-34-4.5185453273e-31 C113x 6 y 8-7.4262335102e-32-9.0938350335e-34-2.8426325815e-31 C115x 4 y 10-5.3254762890e-31-7.1091532751e-343.5159230524e-32 C117x 2 y 125.9410853602e-29-4.8191525921e-332.3427230871e-32 C119y 142.1490711146e-27-1.2271264773e-317.3575540218e-33 C121x 14 y2.1453006723e-42-7.5856810876e-39-5.4069323419e-35 C123x 12 y 32.3526576450e-405.8247152723e-384.5166091093e-34 C125x 10 y 5-4.9945373539e-381.8005566464e-372.9045681704e-33 C127x 8 y 7-2.7176352876e-369.7416370820e-378.1762300007e-33 C129x 6 y 93.7126138589e-341.2822271892e-357.6450194196e-33 C131x 4 y 112.9306290183e-321.1758126843e-346.3261927297e-34 C133x 2 y 134.8709524529e-312.9784291175e-34-2.4614143114e-34 C135y 151.3861413027e-29-1.4822807161e-331.0613954644e-35 C136x 161.1121022817e-46-1.9665584144e-44-1.6422755355e-38 C138x 14 y 2-3.4241576294e-457.6029523103e-41-5.0896736622e-37 C140x 12 y 48.2080752704e-429.1647687140e-403.3661664496e-36 C142x 10 y 63.2315929844e-397.1012516149e-391.5546391602e-35 C144x 8 y 84.4725796816e-371.9515712400e-381.5972835097e-35 C146x 6 y 102.2938507028e-357.0076600484e-39-1.8482697063e-35 C148x 4 y 123.0908840698e-34-2.7731758988e-37-7.3975745864e-37 C150x 2 y 14-5.4572269864e-33-4.9076874314e-371.4982885666e-36 C152y 16-2.9611290259e-318.5101721615e-36-8.7427845015e-38 C154x 16 y-3.3219768914e-481.2170261338e-448.5707016242e-40 C156x 14 y 3-1.0931940439e-45-7.6074698927e-43-1.1265275124e-38 C158x 12 y 52.4878228563e-43-5.8926847962e-42-8.5877947813e-38 C160x 10 y 75.8454349256e-41-3.5631538189e-41-3.4036182140e-37 C162x 8 y 94.7054324902e-39-1.0139165721e-40-5.0181457417e-37 C164x 6 y 111.1630827362e-37-9.0429592281e-40-1.8002325184e-37 C166x 4 y 13-9.3866369101e-37-3.6058982113e-39-2.3991348626e-38 C168x 2 y 15-6.9139082111e-35-6.3574814308e-39-5.6724526105e-39 C170y 17-3.6732135150e-336.3545887321e-381.0404332800e-40 C171x 18-1.5946545899e-52-5.6353519190e-484.7749599200e-43 C173x 16 y 2-2.0755046857e-50-1.3153020257e-467.9238375120e-42 C175x 14 y 4-5.8949481855e-48-1.7452933417e-45-2.4638568201e-41 C177x 12 y 6-6.4686776052e-46-2.1562857163e-44-8.5357661379e-43 C179x 10 y 8-3.8865742251e-43-8.9486455243e-44-3.4982513811e-40 C181x 8 y 10-4.2392746655e-41-1.1358926163e-431.4740113018e-39 C183x 6 y 12-1.9241772675e-392.1669093839e-421.2269576924e-39 C185x 4 y 14-3.0227573055e-381.8124779743e-411.3156966570e-40 C187x 2 y 161.1605433093e-378.7475098889e-421.2886820459e-41 C189y 189.5704803271e-36-3.3279671281e-402.5877448542e-43 C191x 18 y2.3765772963e-543.0756592566e-50-5.3052979230e-45 C193x 16 y 32.0244979987e-512.8929374001e-481.0884225171e-43 C195x 14 y 5-1.1571324074e-493.2305156757e-479.8199623684e-43 C197x 12 y 7-8.4960270633e-472.4604739270e-465.3702667935e-42 C199x 10 y 9-1.3078414926e-449.7911978844e-461.1874880882e-41 C201x 8 y 11-8.6347408838e-432.8313331846e-451.4234132254e-42 C203x 6 y 13-2.3367181824e-411.6765055235e-44-2.8960461830e-42 C205x 4 y 15-1.7024656426e-401.4099330170e-44-2.7521747765e-43 C207x 2 y 173.4816249592e-393.1926969189e-45-1.6005849804e-44 C209y 193.1894297242e-37-1.0773983299e-42-7.9654877831e-46 C210x 201.9853139623e-588.2497686422e-54-3.8468765769e-48 C212x 18 y 26.7137836740e-56-4.3214188061e-52-3.3844273324e-47 C214x 16 y 41.9879934108e-53-8.5336342265e-51-1.2427260681e-46 C216x 14 y 6-2.7762860778e-51-7.9398046528e-50-6.2945458787e-45 C218x 12 y 8-5.3432670810e-49-5.2413967948e-49-6.5226946375e-45 C220x 10 y 10-7.3309310973e-47-1.7609238916e-48-2.5908540015e-44 C222x 8 y 12-3.2721739846e-45-9.6795463127e-48-7.2840005177e-45 C224x 6 y 14-8.1902844841e-44-4.5461561722e-472.5083512326e-45 C226x 4 y 16-1.4360294538e-43-2.4320659512e-462.1183410533e-46 C228x 2 y 186.6200536275e-425.4104079133e-468.3284657671e-48 C230y 201.3004132104e-395.2571755413e-456.0950783830e-49 Tabelle 3c zu Fig. 2 Tabelle 3c zu Fig. 2 C7x 2 y9.0760812980e-07-1.9953220712e-08 C9y 3-5.0341194974e-072.7580060282e-08 C10x 45.0678258772e-10-1.7076205061e-11 C12x 2 y 21.5629791664e-09-9.2873082744e-11 C14y 44.2159891958e-09-3.5842336781e-11 C16x 4 y1.7287652026e-12-5.4897060825e-14 C18x 2 y 37.8757060986e-12-9.6255063710e-15 C20y 5-9.3802938359e-122.7394429046e-14 C21x 67.9980434295e-16-4.4862993477e-17 C23x 4 y 29.8657359349e-15-1.9563265014e-16 C25x 2 y 44.2517330988e-15-2.4300415087e-16 C27y 65.0378798893e-14-7.0434584471e-17 C29x 6 y6.6551774106e-18-5.9496990499e-20 C31x 4 y 32.7083378432e-17-9.5529702306e-20 C33x 2 y 51.0108519953e-166.4987053875e-21 C35y 7-1.6759976132e-163.5833648943e-20 C36x 82.7170336448e-21-4.8302333976e-23 C38x 6 y 23.5717264978e-20-3.6989413305e-22 C40x 4 y 41.7412363572e-19-7.0973055635e-22 C42x 2 y 6-1.1738182186e-19-5.3807231028e-22 C44y 89.2221359829e-19-1.2685345876e-22 C46x 8 y2.2226939865e-23-1.6510862829e-25 C48x 6 y 32.6012216321e-22-2.5301749107e-25 C50x 4 y 54.2100312536e-22-2.0103452507e-25 C52x 2 y 71.1516444484e-216.3429883679e-26 C54y 9-3.9183804927e-215.5503174720e-26 C55x 107.7350495280e-27-1.6744729220e-28 C57x 8 y 22.5960057504e-25-3.1789616421e-28 C59x 6 y 41.3584514302e-24-1.0439359405e-27 C61x 4 y 63.8586354172e-24-1.0973769741e-27 C63x 2 y 8-3.4621159638e-24-5.1152936243e-28 C65y 102.1168106446e-23-2.4624744467e-28 C67x 10 y1.2412909819e-281.2002647103e-31 C69x 8 y 3-1.0679130391e-28-4.7515607323e-31 C71x 6 y 5-6.9236173265e-272.5514838635e-31 C73x 4 y 7-3.6366283595e-268.3485521767e-31 C75x 2 y 91.7822882550e-251.1360696804e-31 C77y 11-8.3646142602e-27-8.5538359178e-32 C78x 12-2.3030882179e-32-2.5997888336e-35 C80x 10 y 2-1.4443072560e-30-2.9679220926e-33 C82x 8 y 4-1.7334031788e-29-1.1418475406e-32 C84x 6 y 6-1.2105965948e-28-2.3475474642e-32 C86x 4 y 88.8418292190e-29-2.3096643898e-32 C88x 2 y 10-3.8169976968e-28-1.0750454141e-32 C90y 12-7.0004968628e-28-3.8046049385e-35 C92x 12 y2.5566924013e-343.2632930918e-37 C94x 10 y 32.8657794582e-32-8.4146763217e-37 C96x 8 y 53.2437476153e-31-9.8091768849e-36 C98x 6 y 72.5858906439e-30-2.3402832372e-35 C100x 4 y 94.8741331663e-30-1.9627570249e-35 C102x 2 y 11-1.6709802807e-29-2.1263861974e-36 C104y 13-1.1840612733e-292.3710510007e-36 C105x 149.1980196636e-371.1870850696e-40 C107x 12 y 25.1704054715e-359.9980031630e-39 C109x 10 y 46.9933270198e-347.6460820656e-38 C111x 8 y 65.5936344692e-332.2236603508e-37 C113x 6 y 82.1477674955e-323.2147357198e-37 C115x 4 y 10-1.6642245427e-322.4175537248e-37 C117x 2 y 129.4446096038e-338.2202689240e-38 C119y 141.3579363052e-31-2.8613322970e-39 C121x 14 y3.0344093944e-39-4.9985505699e-42 C123x 12 y 3-1.2166146319e-37-2.1009996035e-42 C125x 10 y 5-2.8201915712e-362.4501031099e-41 C127x 8 y 7-3.9032714017e-351.5699944410e-40 C129x 6 y 9-3.0598497382e-342.9307409634e-40 C131x 4 y 11-4.2985980887e-341.9982504581e-40 C133x 2 y 131.4093438990e-333.5006487784e-41 C135y 153.8339571948e-34-1.3321133521e-41 C136x 16-7.1106433575e-42-1.6609355138e-45 C138x 14 y 2-5.8048054129e-40-6.3949339048e-44 C140x 12 y 4-1.0444863905e-38-5.4375872688e-43 C142y 10 y 6-9.9455932601e-38-1.8424193286e-42 C144x 8 y 8-6.9017345213e-37-3.4488672366e-42 C146x 6 y 10-1.9478720444e-36-3.6901481018e-42 C148x 4 y 122.3782018620e-36-2.1808399702e-42 C150x 2 y 14-2.4114497498e-36-5.6883202470e-43 C152y 16-6.3957292592e-361.1605410512e-44 C154x 16 y-4.6646753879e-441.2923927597e-47 C156x 14 y 3-7.0908000951e-437.0825288761e-48 C158x 12 y 59.7999971495e-43-1.0621724789e-47 C160x 10 y 72.2326934537e-40-5.6639966964e-46 C162x 8 y 93.4907648844e-39-1.8748168586e-45 C164x 6 y 112.3423565095e-38-2.3661332599e-45 C166x 4 y 131.7892783358e-38-1.2587127969e-45 C168x 2 y 15-5.5366215316e-38-2.1974128037e-46 C170y 17-3.3686073466e-394.6427754919e-47 C171x 183.4587836695e-475.4935986710e-51 C173x 16 y 24.9049103174e-452.5375668627e-49 C175x 14 y 41.0813090326e-432.2406000445e-48 C177x 12 y 61.1308619732e-428.7115158771e-48 C179x 10 y 88.8560302898e-422.0017509975e-47 C181x 8 y 105.3471474864e-412.8031216592e-47 C183x 6 y 121.0001831219e-402.3854951500e-47 C185x 4 y 14-1.1497153686e-401.1549961028e-47 C187x 2 y 161.7319142569e-402.3550596336e-48 C189y 181.7400581235e-40-6.8167634699e-50 C191x 18 y8.9331792826e-49-2.2775697642e-53 C193x 16 y 33.1479338324e-47-7.8814321020e-53 C195x 14 y 54.4436940511e-46-3.9810792385e-52 C197x 12 y 71.8411711783e-454.6514814819e-52 C199x 10 y 9-8.6245560271e-455.1706100413e-51 C201x 8 y 11-1.8921412057e-431.1279314218e-50 C203x 6 y 13-9.9461490318e-431.0788327159e-50 C205x 4 y 15-3.4841336858e-434.7195666280e-51 C207x 2 y 178.4245185963e-437.8345286922e-52 C209y 19-4.7174321566e-43-8.4775908485e-53 C210x 20-8.8733873967e-54-1.7772732091e-56 C212x 18 y 2-2.059958051 le-50-6.9406837307e-55 C214x 16 y 4-5.5880988554e-49-6.0992579186e-54 C216x 14 y 6-6.5996757043e-48-2.6311864041e-53 C218x 12 y 8-5.7898956124e-47-7.0275301675e-53 C220x 10 y 10-4.4875060968e-46-1.2109690759e-52 C222x 8 y 12-2.3369938279e-45-1.3431703663e-52 C224x 6 y 14-2.8092232366e-45-9.4536443436e-53 C226x 4 y 162.1570622097e-45-3.8606120676e-53 C228x 2 y 18-6.0865592858e-45-6.3991274902e-54 C230y 20-3.9068148812e-462.2630706897e-55 C232x 20 y-5.8774929583e-542.8380128496e-59 C234x 18 y 3-2.5028237444e-522.1870250040e-58 C236x 16 y 5-4.5596582324e-511.2898603170e-57 C238x 14 y 7-3.4676368085e-501.6777649799e-57 C240x 12 y 9-9.8129321465e-50-5.1613931469e-57 C242x 10 y 112.1943504301e-49-2.2526925230e-56 C244x 8 y 135.8115989897e-48-3.4787714046e-56 C246x 6 y 152.1075411922e-47-2.6410717999e-56 C248x 4 y 171.3708560922e-48-9.6986830539e-57 C250x 2 y 191.7898281142e-47-1.4492014585e-57 C252y 215.8768650958e-487.9581452016e-59 C253x 22-4.9377790923e-582.9222626582e-62 C255x 20 y 23.2543122286e-561.0397163880e-60 C257x 18 y 41.1036554864e-549.3843959807e-60 C259x 16 y 61.2886745806e-534.4476134489e-59 C261x 14 y 81.5363009961e-521.3431515297e-58 C263x 12 y 101.5271157999e-512.7189042793e-58 C265x 10 y 121.2603068447e-503.7332152309e-58 C267x 8 y 145.2260732805e-503.4200272451e-58 C269x 6 y 163.8906931534e-502.0490720174e-58 C271x 4 y 181.4642324129e-507.2099627646e-59 C273x 2 y 201.7329982830e-509.9947949720e-60 C275y 22-6.6299282132e-51-4.2060368887e-61 C277x 22 y1.9022638174e-59-2.5528349107e-65 C279x 20 y 39.1769617244e-58-2.7878061101e-64 C281x 18 y 51.8589294805e-56-1.7160029344e-63 C283x 16 y 71.7536661441e-55-4.3859685743e-63 C285x 14 y 98.1631522303e-55-3.2281740659e-63 C287x 12 y 111.7490879637e-541.1139398753e-62 C289x 10 y 13-1.9580456170e-543.3767644862e-62 C291x 8 y 15-8.1394068093e-534.1424674366e-62 C293x 6 y 17-1.2519914952e-522.6599896747e-62 C295x 4 y 19-1.1290143637e-528.5758712213e-63 C297x 2 y 21-3.7023375798e-521.1975952741e-63 C299y 23-8.6278782811e-53-1.3895896328e-65 C300x 242.0451287521e-63-2.2531543148e-68 C302x 221.1545110014e-61-7.2101665333e-67 C304x 20 y 43.1223664989e-60-6.7158670516e-66 C306x 18 y 65.1530063062e-59-3.4384095104e-65 C308x 16 y 82.7930229615e-58-1.1448073825e-64 C310x 14 y 10-2.5578576422e-58-2.6254590915e-64 C312x 12 y 12-1.6380259859e-56-4.2441148924e-64 C314x 10 y 14-1.4943418207e-55-4.8134939080e-64 C316x 8 y 16-4.0627989018e-55-3.7464602037e-64 C318x 6 y 18-4.4025270831e-55-1.9535984570e-64 C320x 4 y 202.9135349164e-56-6.0598105348e-65 C322x 2 y 227.9299686710e-55-7.4895430974e-66 C324y 242.3570408558e-552.5972070951e-67 Koordinaten des Blendenrandes Tabelle 4 zu Fig. 2 Tabelle 4 zu Fig. 2 -372.613091-61.168088373.272631-72.712612 -371.868632-55.334746373.186011-78.414410 -370.849694-49.467260372.821520-84.063337 -369.558379-43.570773372.179597-89.655265 -367.997266-37.650564371.261191-95.186318 -366.169395-31.712029370.067757-100.652879 -364.078242-25.760645368.601245-106.051594 -361.727703-19.801952366.864085-111.379380 -359.122062-13.841520364.859166-116.633419 -356.265978-7.884923362.589822-121.811154 -353.164449-1.937717360.059802-126.910284 -349.8227953.994582357.273246-131.928750 -346.2466339.906517354.234660-136.864727 -342.44185115.792704350.948882-141.716605 -338.41458321.647849347.421055-146.482980 -334.17118627.466752343.656594-151.162631 -329.71821433.244322339.661156-155.754509 -325.06239338.975582335.440608-160.257715 -320.21059544.655679331.000999-164.671490 -315.16980850.279892326.348528-168.995190 -309.94711755.843640321.489520-173.228276 -304.54967161.342483316.430393-177.370296 -298.98466766.772127311.177638-181.420872 -293.25932072.128423305.737795-185.379685 -287.38084477.407363300.117425-189.246460 -281.35643182.605074294.323094-193.020962 -275.19323287.717808288.361350-196.702978 -268.89833492.741938282.238703-200.292310 -262.47874597.673950275.961608-203.788768 -255.941369102.510439269.536446-207.192165 -249.292992107.248106262.969507-210.502302 -242.540264111.883757256.266980-213.718975 -235.689676116.414307249.434933-216.841961 -228.747548120.836778242.479302-219.871021 -221.720014125.148292235.405885-222.805894 -214.613006129.346074228.220330-225.646299 -207.432243133.427433220.928132-228.391933 -200.183218137.389757213.534625-231.042472 -192.871192141.230490206.044986-233.597573 -185.501179144.947126198.464232-236.056874 -178.077943148.537187190.797221-238.419998 -170.605990151.998217183.048664-240.686554 -163.089562155.327774175.223120-242.856141 -155.532639158.523431167.325011-244.928351 -147.938933161.582776159.358626-246.902773 -140.311898164.503421151.328129-248.778992 -132.654730167.283008143.237568-250.556598 -124.970380169.919221135.090880-252.235182 -117.261561172.409787126.891901-253.814345 -109.530766174.752487118.644373-255.293696 -101.780279176.945159110.351950-256.672859 -94.012191178.985698102.018201-257.951469 -86.228421180.87206393.646621-259.129180 -78.430732182.60227785.240632-260.205664 -70.620746184.17443976.803590-261.180612 -62.799970185.58673168.338788-262.053741 -54.969807186.83743859.849463-262.824790 -47.131577187.92496151.338801-263.493524 -39.286533188.84784542.809940-264.059735 -31.435877189.60480334.265978-264.523247 -23.580770190.19473725.709979-264.883912 -15.722347190.61676817.144976-265.141613 -7.861723190.8702498.573984-265.296268 0.000000190.9547870.000000-265.347825 7.861723190.870249-8.573984-265.296268 15.722347190.616768-17.144976-265.141613 23.580770190.194737-25.709979-264.883912 31.435877189.604803-34.265978-264.523247 39.286533188.847845-42.809940-264.059735 47.131577187.924961-51.338801-263.493524 54.969807186.837438-59.849463-262.824790 62.799970185.586731-68.338788-262.053741 70.620746184.174439-76.803590-261.180612 78.430732182.602277-85.240632-260.205664 86.228421180.872063-93.646621-259.129180 94.012191178.985698-102.018201-257.951469 101.780279176.945159-110.351950-256.672859 109.530766174.752487-118.644373-255.293696 117.261561172.409787-126.891901-253.814345 124.970380169.919221-135.090880-252.235182 132.654730167.283008-143.237568-250.556598 140.311898164.503421-151.328129-248.778992 147.938933161.582776-159.358626-246.902773 155.532639158.523431-167.325011-244.928351 163.089562155.327774-175.223120-242.856141 170.605990151.998217-183.048664-240.686554 178.077943148.537187-190.797221-238.419998 185.501179144.947126-198.464232-236.056874 192.871192141.230490-206.044986-233.597573 200.183218137.389757-213.534625-231.042472 207.432243133.427433-220.928132-228.391933 214.613006129.346074-228.220330-225.646299 221.720014125.148292-235.405885-222.805894 228.747548120.836778-242.479302-219.871021 235.689676116.414307-249.434933-216.841961 242.540264111.883757-256.266980-213.718975 249.292992107.248106-262.969507-210.502302 255.941369102.510439-269.536446-207.192165 262.47874597.673950-275.961608-203.788768 268.89833492.741938-282.238703-200.292310 275.19323287.717808-288.361350-196.702978 281.35643182.605074-294.323094-193.020962 287.38084477.407363-300.117425-189.246460 293.25932072.128423-305.737795-185.379685 298.98466766.772127-311.177638-181.420872 304.54967161.342483-316.430393-177.370296 309.94711755.843640-321.489520-173.228276 315.16980850.279892-326.348528-168.995190 320.21059544.655679-331.000999-164.671490 325.06239338.975582-335.440608-160.257715 329.71821433.244322-339.661156-155.754509 334.17118627.466752-343.656594-151.162631 338.41458321.647849-347.421055-146.482980 342.44185115.792704-350.948882-141.716605 346.2466339.906517-354.234660-136.864727 349.8227953.994582-357.273246-131.928750 353.164449-1.937717-360.059802-126.910284 356.265978-7.884923-362.589822-121.811154 359.122062-13.841520-364.859166-116.633419 361.727703-19.801952-366.864085-111.379380 364.078242-25.760645-368.601245-106.051594 366.169395-31.712029-370.067757-100.652879 367.997266-37.650564-371.261191-95.186318 369.558379-43.570773-372.179597-89.655265 370.849694-49.467260-372.821520-84.063337 371.868632-55.334746-373.186011-78.414410 372.613091-61.168088-373.272631-72.712612 373.081459-66.962308-373.081459-66.962308 Mirrors M1, M3, M4, M5, and M8 have negative radius values, thus they are essentially concave mirrors. Mirrors M2 and M7 have positive radius values, thus they are essentially convex mirrors. Mirror M6 of the projection optics 10 shown in Fig. 2 has Rx and Ry radius values ​​with different signs. This mirror M6 therefore essentially has the shape of a saddle surface. The boundary of a diaphragm surface (see also Table 4 for Fig. 2) is formed by the intersection points on the diaphragm surface of all rays of the illumination light 3, which propagate toward the diaphragm surface at the field center with a full image-side telecentric aperture. When the diaphragm is designed as an aperture diaphragm, the boundary is an inner boundary. The aperture can be located in a single plane or be three-dimensional. The aperture's dimensions can be smaller in the scanning direction (y) than in the cross-scan direction (x). The projection optics 10 is designed for an illumination light 16 wavelength of 13.5 nm. The projection optics 10 is at least approximately telecentric on the image side. Further data on the projection optics 10 are summarized in Table 5 below. Table 5 for Fig. 2 Table 5 for Fig. 2 Numerical aperture =0.75 1 / βx =4.00 1 / βy =-8.00 Track length = 2300 mm Object-Image Shift = 1650 mm Width of the installation space = 2934 mm Total optically used mirror surface = 2.20 m 2 Linear pupillary obscuration =25.5% Minimum angle on grazing incidence mirror =67.4° Scan slot length on wafer =1.0 mm Scan-integrated wavefront RMS = 8.75 mλ Transmittance = 6.31% Light conductivity = 45.9 mm 2 Mirror with maximum diameter =M4 Maximum optical mirror diameter = 1153 mm Mirror with maximum area=M8 The transmission is the total transmission of the projection optics 10, i.e. a multiplication of the transmissions of all mirrors of the projection optics 10. The specified transmission value applies to a compromise design of respective highly reflective coatings on the mirrors M1 to M8, which also includes transmission losses via a protective layer as well as a compromise design of a broadband reflection layer on the penultimate mirror M7 with regard to, on the one hand, a high average reflectivity and, on the other hand, a small reflectivity variation. Fig. 3 shows a further embodiment of a projection optics or imaging optics 24 that can be used instead of the projection optics 10 in the projection exposure system 1. Components and functions that correspond to those already explained above with reference to Figs. 1 and 2 have the same reference numerals and will not be discussed in detail again. The projection optics 24 has an image-side numerical aperture of 0.75. The projection optics 24 has a total of nine mirrors M1 to M9. Mirrors M1, M8, and M9 are designed as normal incidence mirrors (NI mirrors). Mirrors M2 to M7 are designed as grazing incidence mirrors (GI mirrors) for the illumination light 16. The projection optics 24 has exactly six grazing incidence mirrors. The mirrors M2 to M7, i.e. the six GI mirrors of the projection optics 24, reflect the imaging light 16 in such a way that the angles of reflection of the individual rays of the imaging light 16 on these GI mirrors M2 to M7 add up, thus reinforcing their deflection effect. The projection optics 24 has a first intermediate image plane in the imaging beam path between the mirrors M3 and M4 and a further intermediate image plane in the imaging beam path between the mirrors M5 and M6. A total mirror surface of all mirrors M1 to M9 in the projection optics 24 is less than 3 m2. All mirrors M1 to M9 have a maximum reflection surface extension, perpendicular to the yz meridional plane, of less than 1000 mm. The z-distance between the last mirror M8 in the imaging beam path of the projection optics 24 and the image plane 12 is 78 mm. The projection optics 24 thus provides a good build space clearance between the mirror M8 and the wafer 13, given the typical substrate thickness of the mirror M8. The distance between the object plane 6 and the image plane 12 in the projection optics is 24 2159 mm. The optical design data for the projection optics 24 are shown in Tables 1 to 4 below, which in turn correspond in terms of basic structure to Tables 1 to 4 for the embodiment according to Fig. 2. Further data of the projection optics 24 are listed in Table 5 below. Radii of the surfaces Table 1 to Fig. 3 Table 1 to Fig. 3 M01-4634.777667180.00042337-1386.688818020.00141503 M029328.81860424-0.000214391229.59941046-0.00162655 M03-29467.307643540.00006775-4739.812215940.00042121 M04-1811.380056710.00110413-8953.604610350.00022337 M05-1486.258715780.00039344-5349.511782360.00010931 M06-1098.180925690.000388712086.85172981-0.00020455 M07-1987.493938550.00016660-5120.206318210.00006467 M082742.39683457-0.00019247295.99369237-0.00178325 M09-711.377491190.00281145-632.138719310.00316386 Decentering (location, angle) of the surfaces Table 2 to Fig. 3 Table 2 to Fig. 3 Reticle0.0000000000.0000000000.000000000 M010.000000000-224.5598495042043.061020347 M020.000000000-436.4617768301217.961574310 M030.000000000-823.967199813831.132753464 M040.000000000-2151.536618668380.780440020 M050.000000000-3593.757176478300.574352419 M060.000000000-4095.991898630444.009397094 M070.000000000-4529.890721916816.012888877 M080.000000000-4865.2113053752035.915569173 Aperture0.000000000-4842.6759955721980.359926841 M090.000000000-4674.9900607411566.968679916 Wafer0.000000000-4674.9900511742158.998958897 αx[°]αy[°]αz[°] Reticle0.0000000000.0000000000.000000000 M01-4.0655078050.0000000000.000000000 M02240.2732611930.000000000-0.000000000 M03211.844224942-0.000000000-0.000000000 M04190.960810242-0.000000000-0.000000000 M05173.622050622-0.000000000-0.000000000 M06151.726416790-0.000000000-0.000000000 M07122.380712044-0.000000000-0.000000000 M0818.7243895800.000000000-0.000000000 Aperture180.480559009-0.000000000-0.000000000 M09191.039596433-0.000000000-0.000000000 Wafer-0.0000009260.000000000180.000000000 Freeform coefficients of the surfaces Table 3a to Fig. 3 Table 3a to Fig. 3 C2y1.1867791045e-048.4764450090e-042.3678709483e-04 C7x 2 y-2.5578346697e-08-1.3773872562e-07-8.6003718242e-08 C9y 3-5.1120168228e-086.4779863340e-081.7478993485e-08 C10x 4-1.6406060643e-119.5535103329e-11-1.6014568839e-10 C12x 2 y 24.8027861497e-11-1.9989472664e-10-1.1634340940e-10 C14y 4-1.2160462403e-113.2419511658e-11-6.0677665857e-12 C16x4y1. 1712747724e-134.7518847656e-13-1.5345920666e-13 C18x 2 y 37.2814412808e-141.6214380502e-122.7435036089e-13 C20y 5-8.6372590510e-14-5.1659279354e-12-3.1227190765e-14 C21x 63.1183613809e-171.7730081913e-171.9730290244e-16 C23x 4 y 21.5326376626e-16-6.1240277950e-166.3503420332e-16 C25x 2 y 4-6.3818420178e-179.3432141380e-15-7.1563000935e-16 C27y 63.7575614219e-179.7680714143e-175.5145879854e-17 C29x 6 y-1.0868468360e-19-9.8777193821e-193.9671155005e-19 C31x 4 y 3-1.6958768847e-19-2.0765944861e-18-1.6605215835e-18 C33x 2 y 5-9.2060976534e-193.9924734736e-171.4993316150e-18 C35y 74.8223087245e-19-9.1291538394e-17-1.3689234119e-19 C36x 8-1.0474930938e-221.1197040556e-214.4161834968e-23 C38x 6 y 2-5.4962380379e-22-2.6124966336e-21-1.5145755283e-21 C40x 4 y 4-2.9213820479e-21-5.3927233693e-204.4450704892e-21 C42x 2 y 6-2.0127158073e-213.1201835642e-19-3.4541993225e-21 C44y 8-9.1966310367e-21-3.4226365384e-191.8877030386e-21 C46x 8 y5.6609838226e-256.1471102111e-24-3.8747889556e-25 C48x 6 y 31.4790730584e-242.7804575690e-235.6301650325e-24 C50x 4 y 5-3.6264976305e-23-2.9615369519e-22-1.4495011122e-23 C52x 2 y 7-1.7523323221e-222.5119449568e-211.9712013268e-23 C54y 97.5032305109e-241.5414310248e-21-4.9408446693e-25 C55x 101.4183920827e-28-6.6097308547e-285.1959205978e-27 C57x 8 y 29.2628601749e-272.5257707599e-263.7546056792e-27 C59x 6 y 41.3626215185e-254.4401787758e-25-3.4238961450e-26 C61x 4 y 63.4112380628e-25-3.7904531078e-247.5641940400e-26 C63x 2 y 8-1.7435102790e-25-1.2195144520e-23-2.3612710950e-26 C65y 101.6306874222e-24-1.1181736805e-23-3.2939290288e-26 C67x 10 y-1.3556925266e-29-5.1147020126e-29-9.9520703053e-30 C69x 8 y 3-6.5393719303e-29-4.6268786870e-28-4.5728896387e-29 C71x 6 y 51.1110325479e-27-2.4563304090e-281.7459860172e-28 C73x 4 y 79.3009625752e-27-1.9409242825e-26-1.5276090536e-28 C75x 2 y 92.0108959807e-26-1.9131018312e-25-2.3271404375e-28 C77y 11-3.6496342115e-281.4710102081e-26-5.8354763197e-29 C78x 124.7274635917e-338.9540941865e-33-4.6601279962e-32 C80x 10 y 2-9.6761662560e-321.6891278685e-32-5.3229639842e-32 C82x 8 y 4-3.5073987836e-30-1.8742796855e-302.8245840853e-31 C84x 6 y 6-1.8834227735e-292.4833307812e-29-3.2027660667e-31 C86x 4 y 8-5.7208107584e-304.1740673556e-28-7.5051093674e-31 C88x 2 y 106.3856917937e-298.7945951725e-28-3.7993809378e-31 C90y 12-1.6897115176e-283.6321945776e-277.7380127934e-31 C92x 12 y2.2001494044e-343.3177600435e-347.2885116832e-35 C94x 10 y 32.1293883696e-333.5741596179e-332.8444016147e-34 C96x 8 y 5-1.2167089072e-323.5609529572e-32-4.4447496188e-34 C98x 6 y 7-2.2392738186e-312.5740394499e-31-1.1463348182e-33 C100x 4 y 9-9.5184273153e-312.9132718807e-303.7246357161e-34 C102x 2 y 11-1.4331679087e-308.0931031012e-305.4143316884e-33 C104y 13-2.5581777554e-31-6.6221112019e-30-1.5490391353e-34 C105x 14-1.2065589535e-37-6.1432737589e-382.5359062114e-37 C107x 12 y 22.5060341233e-37-1.0421632037e-364.6364820406e-37 C109x 10 y 45.4803594076e-35-4.2566922155e-36-4.3992604794e-37 C111x 8 y 64.9808585422e-34-1.4366760056e-34-1.9928672133e-36 C113x 6 y 89.5151394247e-34-4.2772392955e-331.7536999769e-37 C115x 4 y 10-2.6058348613e-33-2.5863031311e-321.7985432692e-35 C117x 2 y 12-6.2913244218e-33-6.9531050150e-32-8.4918947129e-37 C119y 141.0219164039e-32-2.9069269176e-31-6.8665345329e-36 C121x 14 y-2.3214606662e-39-1.1970588465e-39-2.8520015962e-40 C123x 12 y 3-3.3966738037e-38-1.4996792380e-38-4.5860429131e-42 C125x 10 y 5-5.8880438145e-39-2.8739054268e-37-2.1633137151e-39 C127x 8 y 72.8438233432e-36-2.2373198252e-36-3.8273949803e-39 C129x 6 y 91.9877979824e-35-2.2670054443e-352.9562843279e-38 C131x 4 y 115.7264305051e-35-1.1373768512e-34-2.9051439941e-38 C133x 2 y 136.6762813691e-35-1.9686125951e-34-2.8495939195e-38 C135y 152.3826395737e-352.5416895850e-344.1015460187e-39 C136x 161.5434693272e-421.9669786595e-43-7.5170902597e-43 C138x 14 y 28.2096383137e-426.5704285507e-42-1.7492867570e-42 C140x 12 y 4-5.1456307736e-408.2605041217e-41-1.3845057594e-42 C142x 10 y 6-7.3044467900e-391.0605807457e-39-4.7885042501e-42 C144x 8 y 8-2.8638777540e-382.2770227722e-384.9314519822e-41 C146x 6 y 101.0831078876e-382.2566510130e-37-6.4150243785e-41 C148x 4 y 122.6549084647e-371.1056367951e-36-6.1154496124e-41 C150x 2 y 143.3206602943e-372.9376941024e-36-2.2452938952e-41 C152y 16-3.7940131987e-371.0681031494e-354.1063822893e-41 C154x 16 y1.5589208787e-441.6390396219e-454.1883494073e-46 C156x 14 y 33.0244561208e-432.2412199709e-44-3.5761855148e-45 C158x 12 y 51.3889283906e-427.2689721252e-43-6.4132693014e-45 C160x 10 y 7-1.7948111225e-417.8489936620e-426.4958613419e-44 C162x 8 y 9-2.1946932845e-406.6316220967e-41-5.2996206592e-44 C164x 6 y 11-9.6440411477e-405.2275582782e-401.1093252415e-44 C166x 4 y 13-2.1105038082e-391.6476718747e-392.0679206478e-44 C168x 2 y 15-2.0300011236e-391.5213208025e-391.3467802875e-43 C170y 17-1.0366444106e-39-3.6267250887e-39-4.5398394867e-44 C171x 18-1.2102420868e-473.9372352739e-501.0433507548e-48 C173x 16 y 2-1.2700315092e-46-1.2879701226e-472.5395592294e-48 C175x 14 y 42.7691775535e-45-2.2625190694e-46-1.1705853170e-47 C177x 12 y 66.1863973635e-44-3.9087990703e-454.0039954198e-47 C179x 10 y 83.8948800857e-43-5.1941656393e-44-2.4398788992e-47 C181x 8 y 105.8121893033e-43-7.0807944024e-434.5084150933e-47 C183x 6 y 12-2.9799577885e-42-4.4323619455e-422.2159817756e-47 C185x 4 y 14-1.2127418319e-41-1.9577123172e-413.0435827095e-46 C187x 2 y 16-1.0522898968e-41-4.7820909347e-41-8.2586214510e-48 C189y 188.6338658814e-42-1.5104070662e-40-5.0748485189e-47 C191x 18 y-6.4155106656e-500.0000000000e+000.0000000000e+00 C193x 16 y 3-1.5334360732e-480.0000000000e+000.0000000000e+00 C195x 14 y 5-1.3151693313e-470.0000000000e+000.0000000000e+00 C197x 12 y 74.1721563637e-470.0000000000e+000.0000000000e+00 C199x 10 y 91.2498304409e-450.0000000000e+000.0000000000e+00 C201x 8 y 118.2178084202e-450.0000000000e+000.0000000000e+00 C203x 6 y 132.642913 8466e-440.0000000000e+000.0000000000e+00 C205x 4 y 154.6986066864e-440.0000000000e+000.0000000000e+00 C207x 2 y 173.8880744736e-440.0000000000e+000.0000000000e+00 C209y 192.467073 8299e-440.0000000000e+000.0000000000e+00 C210x 205.8393735246e-530.0000000000e+000.0000000000e+00 C212x 18 y 28.6787062045e-520.0000000000e+000.0000000000e+00 C214x 16 y 4-7.0715564622e-510.0000000000e+000.0000000000e+00 C216x 14 y 6-2.9644257557e-490.0000000000e+000.0000000000e+00 C218x 12 y 8-2.7146246030e-480.0000000000e+000.0000000000e+00 C220x 10 y 10-8.9552232303e-480.0000000000e+000.0000000000e+00 C222x 8 y 126.8174874961e-480.0000000000e+000.0000000000e+00 C224x 6 y 141.2161242285e-460.0000000000e+000.0000000000e+00 C226x 4 y 162.9963062736e-460.0000000000e+000.0000000000e+00 C228x 2 y 182.0063639883e-460.0000000000e+000.0000000000e+00 C230y 20-1.1446847496e-460.0000000000e+000.0000000000e+00 C232x 20 y1.4647756268e-550.0000000000e+000.0000000000e+00 C234x 18 y 34.1095576957e-540.0000000000e+000.0000000000e+00 C236x 16 y 55.1684306734e-530.0000000000e+000.0000000000e+00 C238x 14 y 76.4719186616e-530.0000000000e+000.0000000000e+00 C240x 12 y 9-3.3695146543e-510.0000000000e+000.0000000000e+00 C242x 10 y 11-3.2995618479e-500.0000000000e+000.0000000000e+00 C244x 8 y 13-1.5152826649e-490.0000000000e+000.0000000000e+00 C246x 6 y 15-3.8482285461e-490.0000000000e+000.0000000000e+00 C248x 4 y 17-5.8139130050e-490.0000000000e+000.0000000000e+00 C250x 2 y 19-4.2629352150e-490.0000000000e+000.0000000000e+00 C252y 21-3.0987688940e-490.0000000000e+000.0000000000e+00 C253x 22-1.5936227687e-580.0000000000e+000.0000000000e+00 C255x 20 y 2-3.0184142775e-570.0000000000e+000.0000000000e+00 C257x 18 y 48.5667531964e-580.0000000000e+000.0000000000e+00 C259x 16 y 67.2144103652e-550.0000000000e+000.0000000000e+00 C261x 14 y 89.3923082577e-540.0000000000e+000.0000000000e+00 C263x 12 y 104.8536263706e-530.0000000000e+000.0000000000e+00 C265x 10 y 126.5301387079e-530.0000000000e+000.0000000000e+00 C267x 8 y 14-4.2785380608e-520.0000000000e+000.0000000000e+00 C269x 6 y 16-2.1299204401e-510.0000000000e+000.0000000000e+00 C271x 4 y 18-3.8905138963e-510.0000000000e+000.0000000000e+00 C273x 2 y 20-2.1292398662e-510.0000000000e+000.0000000000e+00 C275y 227.7022404006e-520.0000000000e+000.0000000000e+00 C277x 22 y-1.4093164747e-610.0000000000e+000.0000000000e+00 C279x 20 y 3-4.4667494524e-600.0000000000e+000.0000000000e+00 C281x 18 y 5-7.5816555561e-590.0000000000e+000.0000000000e+00 C283x 16 y 7-3.3145925578e-580.0000000000e+000.0000000000e+00 C285x 14 y 93.1300113595e-570.0000000000e+000.0000000000e+00 C287x 12 y 114.9624885561e-560.0000000000e+000.0000000000e+00 C289x 10 y 133.1072185337e-550.0000000000e+000.0000000000e+00 C291x 8 y 151.1033698340e-540.0000000000e+000.0000000000e+00 C293x 6 y 172.3180088640e-540.0000000000e+000.0000000000e+00 C295x 4 y 193.0715984219e-540.0000000000e+000.0000000000e+00 C297x 2 y 212.0366337217e-540.0000000000e+000.0000000000e+00 C299y 231.6049466377e-540.0000000000e+000.0000000000e+00 C300x 241.8838206678e-640.0000000000e+000.0000000000e+00 C302x 22 y 24.3300408947e-630.0000000000e+000.0000000000e+00 C304x 20 y 42.2708281005e-620.0000000000e+000.0000000000e+00 C306x 18 y 6-6.3829006140e-610.0000000000e+000.0000000000e+00 C308x 16 y 8-1.2595344945e-590.0000000000e+000.0000000000e+00 C310x 14 y 10-9.1575689676e-590.0000000000e+000.0000000000e+00 C312x 12 y 12-2.7661789069e-580.0000000000e+000.0000000000e+00 C314x 10 y 142.3072526788e-580.0000000000e+000.0000000000e+00 C316x 8 y 164.4896667266e-570.0000000000e+000.0000000000e+00 C318x 6 y 181.4152123858e-560.0000000000e+000.0000000000e+00 C320x 4 y 202.0871617988e-560.0000000000e+000.0000000000e+00 C322x 2 y 29.6826382911e-570.0000000000e+000.0000000000e+00 C324y 24-1.7719022601e-570.0000000000e+000.0000000000e+00 Tabelle 3b zu Fig. 3 Tabelle 3b zu Fig. 3 C2y-7.0582708665e-064.6208655496e-042.4228168451e-03 C7x 2 y-3.1365416587e-08-6.0891872457e-08-2.4732459005e-07 C9y 36.6362266621e-09-4.8171539757e-088.7896656985e-08 C10x 4-4.6958346677e-114.7965165931e-121.6199600636e-11 C12x 2 y 21.2687868558e-11-3.5646908876e-11-2.5226635676e-10 C14y 4-7.3890289258e-12-6.9285874454e-113.6871518693e-10 C16x 4 y3.9249923875e-142.0602281899e-151.6181926562e-13 C18x 2 y 3-2.5831980923e-14-7.2571277103e-14-1.5737521879e-12 C20y 53.9816930604e-15-8.6521666914e-141.2980337296e-12 C21x 61.1113829193e-168.5613839358e-18-4.6739996888e-17 C23x 4 y 2-5.4304413932e-17-3.4038909173e-172.7230842796e-16 C25x 2 y 43.4431380507e-17-1.0109132648e-162.8928626739e-15 C27y 67.1837693103e-19-1.3213846071e-16-5.4303997967e-15 C29x 6 y-6.7612599300e-20-3.6015728024e-20-6.1034607846e-20 C31x 4 y 39.5169846856e-20-4.9397556534e-203.0321552924e-18 C33x 2 y 5-5.0092882536e-20-1.3618984942e-19-2.0420776643e-17 C35y 7-6.0625250756e-21-3.6827097970e-193.0639839902e-17 C36x 8-9.6979522667e-231.4876794074e-233.8737205765e-23 C38x 6 y 21.4403278719e-22-2.7801583564e-23-1.5040882009e-21 C40x 4 y 4-2.7925406061e-22-1.8261394888e-22-1.6427144176e-21 C42x 2 y 6-3.4187603703e-23-5.3447522767e-223.3547265311e-19 C44y 8-6.7250727946e-24-5.2132002665e-22-4.2499584519e-19 C46x 8 y2.9172106825e-254.6518680765e-26-1.6521403117e-25 C48x 6 y 3-6.3511526076e-25-6.3535216691e-251.2560756387e-23 C50x 4 y 5-1.0385711243e-25-4.0023586281e-24-4.4906023216e-24 C52x 2 y 7-3.7726357543e-26-2.9603047261e-24-2.7410239831e-21 C54y 91.7724703373e-259.8193244650e-242.3443910155e-20 C55x 102.8041594228e-28-1.1937019344e-289.2103912473e-28 C57x 8 y 2-6.6485352638e-28-2.2710572649e-28-5.0899146167e-27 C59x 6 y 44.0313151881e-28-3.4111829156e-273.8073778300e-26 C61x 4 y 61.2566063580e-28-9.8238721124e-27-1.5041902458e-24 C63x 2 y 88.3962997281e-286.6817310129e-27-6.0157352326e-24 C65y 103.5117769929e-28-6.1810681821e-28-2.6562872514e-22 C67x 10 y-4.7713066397e-318.0149819520e-311.0715353333e-29 C69x 8 y 32.1394823837e-305.0289004557e-30-8.5747971353e-29 C71x 6 y 52.7584110555e-306.7841912410e-29-1.0501395070e-28 C73x 4 y 75.0455370235e-302.2774109450e-281.2435400791e-26 C75x 2 y 91.0458082275e-304.1524563847e-312.3927143549e-25 C77y 11-9.9086515797e-31-4.5534202716e-28-1.3727199490e-24 C78x 12-1.3412839875e-331.6724311038e-33-7.6790203084e-33 C80x 10 y 22.9545855788e-332.2022748501e-331.1754477907e-31 C82x 8 y 43.2818103854e-337.2960675644e-32-7.6673478884e-31 C84x 6 y 61.2340014617e-325.4360700532e-31-1.9097257134e-29 C86x 4 y 83.4442998061e-331.0949693241e-306.2247313541e-28 C88x 2 y 10-2.4061241197e-33-6.3026865191e-31-4.2579183694e-27 C90y 12-4.6409002771e-33-7.0019991957e-312.7151528874e-26 C92x 12 y3.7065907310e-36-2.4851831483e-36-6.5209689599e-35 C94x 10 y 3-4.1033334540e-36-1.1403512205e-357.2998172690e-34 C96x 8 y 5-3.7655426731e-36-2.4108288622e-347.5378036405e-33 C98x 6 y 7-2.9744628023e-35-2.1546429824e-335.1525486033e-32 C100x 4 y 9-2.1873254057e-35-5.3570439191e-33-7.7270072621e-30 C102x 2 y 11-1.0640150596e-351.6773223782e-33-1.0120975182e-29 C104y 131.8296915136e-368.9838647120e-331.9422892369e-28 C105x 147.1637933021e-39-7.0219454101e-393.7312283950e-38 C107x 12 y 2-9.3939676581e-39-4.3165671151e-39-7.2997271846e-37 C109x 10 y 4-1.8212599353e-38-4.2916763750e-37-9.5670789571e-38 C111x 8 y 6-1.0970660002e-37-6.2488804428e-362.9288949711e-34 C113x 6 y 8-1.0171269511e-37-2.5263588481e-35-4.7347745374e-33 C115x 4 y 10-7.7140226209e-38-4.5380933588e-35-2.0302091994e-32 C117x 2 y 126.4847053983e-393.2946642056e-351.6682871815e-30 C119y 143.1420050092e-382.8543594637e-35-4.8106563892e-30 C121x 14 y-9.0988673260e-422.6333810311e-422.0455349299e-40 C123x 12 y 3-4.5657952522e-42-2.0831601050e-41-3.7953707938e-39 C125x 10 y 5-6.4790209903e-41-1.3616951247e-39-5.9856028971e-38 C127x 8 y 7-5.3969804595e-41-1.1768187317e-384.1265487161e-38 C129x 6 y 9-4.3861597466e-41-1.0189895187e-383.7457467866e-35 C131x 4 y 11-2.3790007402e-41-2.8480666981e-381.1838328277e-33 C133x 2 y 134.9398853446e-412.1386279665e-38-1.8963618818e-32 C135y 153.3875005001e-41-5.0789046458e-383.2112959952e-32 C136x 16-1.7418743433e-441.4296407729e-44-9.2698563252e-44 C138x 14 y 21.3515096463e-44-1.3792370559e-442.7249979747e-42 C140x 12 y 4-8.7409965895e-457.2646341413e-433.4795948775e-41 C142x 10 y 62.7197218698e-431.6160097743e-41-1.3347085592e-39 C144x 8 y 83.4127613295e-431.2138498494e-40-4.2879472904e-40 C146x 6 y 103.3778144467e-433.7571502196e-404.3914783645e-37 C148x 4 y 122.0795512096e-435.7193034704e-401.3272045294e-35 C150x 2 y 145.0216895986e-46-6.4808598953e-402.1400477987e-35 C152y 16-5.4517815067e-44-3.4243314960e-40-1.4605481501e-34 C154x 16 y6.9004062205e-49-2.7530892263e-49-2.5308999578e-46 C156x 14 y 3-5.1278501606e-494.1915994448e-477.8867535976e-45 C158x 12 y 52.2349048134e-465.9157797196e-451.6361287209e-43 C160x 10 y 76.1655001926e-461.1144321692e-43-1.3989912725e-42 C162x 8 y 97.2685820227e-465.0655033103e-43-6.8204774609e-41 C164x 6 y 115.5268491250e-461.1050153400e-42-6.2386532276e-39 C166x 4 y 133.5523961364e-461.9763229226e-427.6713457286e-38 C168x 2 y 15-1.4790298532e-46-2.3318914797e-426.7470099199e-37 C170y 17-1.2663067429e-46-4.7329221881e-436.8849513299e-37 C171x 181.5251904243e-50-1.1895820352e-509.7703604701e-50 C173x 16 y 2-3.5002447306e-503.4495939684e-50-4.4917369399e-48 C175x 14 y 41.0856815373e-49-1.1231424102e-49-1.1840515772e-46 C177x 12 y 68.5016969755e-501.5578060609e-471.8695080853e-45 C179x 10 y 85.7455482345e-491.7489105738e-463.8874039097e-44 C181x 8 y 102.2317778915e-495.0391857785e-46-6.7473407090e-44 C183x 6 y 124.0637982123e-499.5881154911e-462.2910495071e-41 C185x 4 y 141.1576453054e-492.0877109077e-45-1.9675382062e-40 C187x 2 y 16-1.1368643967e-49-2.4659009226e-45-2.7572412113e-39 C189y 18-6.8058730502e-50-1.3684698004e-46-1.7700233401e-39 Tabelle 3c zu Fig. 3 Tabelle 3c zu Fig. 3 C2y1.4941450337e-039.9886759456e-032.0272481017e-03 C7x 2 y-6.9799739698e-08-2.3231992336e-06-2.5611221389e-08 C9y 38.1563290709e-08-4.5526179935e-071.3468152540e-08 C10x 4-4.7830771838e-112.4912110104e-09-4.0337786306e-11 C12x 2 y 2-1.8238715975e-106.2939600379e-09-1.1604563585e-10 C14y 4-9.7717447826e-113.9624032825e-09-4.0155609186e-11 C16x 4 y-1.8757068456e-13-5.2278854982e-12-6.1128247804e-14 C18x 2 y 31.4928841037e-13-2.5407721501e-11-4.9338648082e-14 C20y 52.2384470694e-132.5263065981e-112.7853348380e-14 C21x 62.4376450592e-161.4028355816e-15-1.9437519176e-16 C23x 4 y 2-7.6164759371e-164.3501928858e-14-4.3373856883e-16 C25x 2 y 4-8.0012067228e-167.1319038971e-14-4.4491946814e-16 C27y 6-3.9399160623e-161.3456899553e-13-1.1735451413e-16 C29x 6 y1.5469463525e-18-5.4569768154e-17-7.9322962471e-21 C31x 4 y 35.9342323830e-19-3.9193274630e-16-2.3311337317e-19 C33x 2 y 51.5115957886e-18-7.8942000973e-16-5.5366417024e-20 C35y 78.9799538692e-197.0357358833e-174.6794446256e-20 C36x 8-7.1550944604e-228.6856924196e-20-2.8578655121e-22 C38x 6 y 22.3162014459e-211.1563670067e-18-1.6096891882e-21 C40x 4 y 4-3.7685805708e-214.0924134042e-18-2.4806939606e-21 C42x 2 y 6-4.1419962890e-212.2639547521e-18-1.6361000580e-21 C44y 8-1.7402157650e-21-2.8037152698e-18-2.6522057362e-22 C46x 8-6.1353615149e-24-1.0318850778e-21-3.3860925394e-25 C48x 6 y 31.1782622899e-23-5.9103284341e-21-7.3482789250e-25 C50x 4 y 56.4853777269e-24-2.5171597385e-20-1. 1944378858e-24 C52x 2 y 76.8393506159e-24-8.1806450304e-20-3.9640814232e-25 C54y 92.1994119220e-248.5806957048e-201.8770721593e-25 C55x 10-1.9613478372e-26-4.9279515768e-25-9.6409776608e-28 C57x 8 y 2-6.3952567015e-26-1.3659481421e-232.8069720459e-28 C59x 6 y 4-3.3500254560e-26-8.5883200352e-233.9260348259e-27 C61x 4 y 6-2.8067915732e-26-1.1754825510e-225.9244652046e-27 C63x 2 y 8-7.0533953286e-28-1.1623957074e-212.3908807124e-27 C65y 10-3.3395318517e-271.2676708834e-21-8.5922555386e-28 C67x 10 y-5.7462644932e-293.6244347788e-27-5.8712041820e-31 C69x 8 y 3-8.5607097405e-299.6685742132e-26-4.1211679760e-30 C71x 6 y 51.0575885370e-282.9640285745e-246.7572952912e-30 C73x 4 y 7-5.7795808459e-292.2856918938e-231.7920941961e-29 C75x 2 y 92.0200850038e-292.7198945187e-237.7764345466e-30 C77y 115.2389076864e-29-1.4876877644e-23-5.4619314388e-31 C78x 123.4289002355e-313.1107465258e-29-2.9718128704e-33 C80x 10 y 23.7851702756e-318.0187967981e-28-7.9774775986e-32 C82x 8 y 41.4647984593e-306.5560032544e-27-2.9576472457e-31 C84x 6 y 62.7817967815e-301.2946003154e-26-5.0694466927e-31 C86x 4 y 83.0776775155e-317.1063272029e-26-4.0943771673e-31 C88x 2 y 10-5.6963987009e-312.8930187189e-25-1.4104743383e-31 C90y 12-1.8938629233e-31-1.9190026797e-25-1.3259968256e-33 C92x 12 y1.9062193695e-339.6513517870e-329.6639014628e-36 C94x 10 y 3-1.1021761546e-33-6.0365103458e-304.7642889329e-35 C96x 8 y 5-8.8248932382e-33-2.2099271211e-28-1.0158645373e-34 C98x 6 y 7-8.6099227012e-34-2.0277585810e-27-4.2065403940e-34 C100x 4 y 92.5006032908e-33-7.1806335799e-27-4.1502533985e-34 C102x 2 y 111.3055158931e-33-5.8442203240e-27-9.7412715511e-35 C104y 13-1.8762329334e-342.1575732688e-271.0432579208e-35 C105x 14-3.3942357246e-36-7.7770213348e-343.2587046420e-38 C107x 12 y 23.9080521137e-36-2.6633568088e-327.9634084902e-37 C109x 10 y 4-2.3091490780e-35-2.5154512119e-313.6796161001e-36 C111x 8 y 6-9.4222941918e-35-6.8888842925e-318.3509163649e-36 C113x 6 y 8-5.2160094330e-351.0654836047e-309.9026061005e-36 C115x 4 y 10-4.1683239878e-36-1.1719270227e-296.1099759849e-36 C117x 2 y 125.2234520862e-36-4.5773308465e-291.6707769147e-36 C119y 141.8001246132e-362.0459057281e-29-7.5416976562e-39 C121x 14 y-2.0355759472e-38-9.5805310233e-36-1.2902857540e-40 C123x 12 y 31.0393194542e-381.0698750335e-34-7.1222452685e-40 C125x 10 y 51.4405418890e-378.7761563600e-33-2.3675638453e-42 C127x 8 y 77.5974429753e-381.0510133566e-313.8632145462e-39 C129x 6 y 96.8234930992e-395.3769372018e-317.3912380473e-39 C131x 4 y 11-2.6422781081e-381.3110466138e-304.9685399340e-39 C133x 2 y 13-1.5970656378e-388.3434109639e-318.3547490258e-40 C135y 155.0756238512e-40-1.9010841703e-31-7.8300094830e-41 C136x 161.8502741369e-411.5795373794e-38-3.5440598288e-43 C138x 14 y 2-8.0536618421e-418.0324336457e-37-6.6261365339e-42 C140x 12 y 41.2491133003e-408.1307824781e-36-3.4579743861e-41 C142x 10 y 61.1895121533e-391.5750183255e-35-9.4789993977e-41 C144x 8 y 81.2285280892e-39-1.9989982497e-34-1.4681268768e-40 C146x 6 y 103.7183206632e-40-1.0995384161e-33-1.3182114397e-40 C148x 4 y 12-1.3482917868e-421.1311627802e-33-6.6272112646e-41 C150x 2 y 14-3.9779432742e-414.9246801197e-33-1.5290413892e-41 C152y 16-1.5869799889e-41-1.2854055941e-331.0765314027e-44 C154x 16 y8.0942399591e-441.3905032024e-408.3203828565e-46 C156x 14 y 31.1355345770e-44-2.7957465272e-395.0836931428e-45 C158x 12 y 5-7.1710697308e-43-2.1623905178e-374.9080104982e-45 C160x 10 y 7-5.6594365757e-43-3.4121265852e-36-1.7776679313e-44 C162x 8 y 9-3.4255996327e-43-2.2067122878e-35-6.1458138926e-44 C164x 6 y 115.1903880107e-44-7.8576498652e-35-7.5228161562e-44 C166x 4 y 132.8534831957e-43-1.4787394518e-34-3.7599093984e-44 C168x 2 y 151.8228123313e-43-7.9459975005e-35-4.6627797033e-45 C170y 173.0568540895e-449.5843521809e-364.6570189954e-46 C171x 18-4.0425300740e-47-1.6331988127e-431.9403313004e-48 C173x 16 y 24.1858452974e-46-1.5224324846e-413.4997552644e-47 C175x 14 y 4-1.8925591901e-48-1.7728457147e-402.0449445802e-46 C177x 12 y 6-5.1375756567e-455.4221895436e-416.5306207483e-46 C179x 10 y 8-8.5622661200e-451.1266887962e-381.2424670018e-45 C181x 8 y 10-5.9291954096e-458.2770111089e-381.4618769597e-45 C183x 6 y 12-1.0972264946e-452.1354274098e-371.0663255645e-45 C185x 4 y 14-3.8362505082e-46-9.7447405668e-384.5499453820e-46 C187x 2 y 16-1.7330565063e-46-3.4678891232e-379.0218048720e-47 C189y 18-1.8326306120e-473.9091257425e-38-7.0335229250e-50 C191x 18 y0.0000000000e+004.0877315396e-46-3.3138018814e-51 C193x 16 y 30.0000000000e+008.4439190528e-44-2.2894510431e-50 C195x 14 y 50.0000000000e+003.3014898813e-42-4.2107287693e-50 C197x 12 y 70.0000000000e+006.4276517458e-411.4949082042e-50 C199x 10 y 90.0000000000e+005.3957398643e-402.3430961425e-49 C201x 8 y 110.0000000000e+002.3560815333e-394.7036369646e-49 C203x 6 y 130.0000000000e+006.5641424210e-394.3460824339e-49 C205x 4 y 150.0000000000e+001.0019747834e-381.7435466245e-49 C207x 2 y 170.0000000000e+005.0871567751e-391.7179032171e-50 C209y 190.0000000000e+00-2.1103624029e-40-1.7619150267e-51 C210x 200.0000000000e+009.1864208653e-50-6.8456729684e-54 C212x 18 y 20.0000000000e+001.6011424408e-46-1.2176450369e-52 C214x 16 y 40.0000000000e+002.3255063739e-45-7.7978543945e-52 C216x 14 y 60.0000000000e+00-6.1772474108e-45-2.8095726988e-51 C218x 12 y 80.0000000000e+00-3.3161320286e-43-6.2750196722e-51 C220x 10 y 100.0000000000e+00-2.6710205579e-42-9.0806403550e-51 C222x 8 y 120.0000000000e+00-1.0958384538e-41-8.6509051614e-51 C224x 6 y 140.0000000000e+00-1.8175567705e-41-5.3526411718e-51 C226x 4 y 160.0000000000e+008.2424328605e-42-1.9905607347e-51 C228x 2 y 180.0000000000e+001.6586663019e-41-3.4721536168e-52 C230y 200.0000000000e+003.2637788034e-43-8.5946201714e-55 C232x 20 y0.0000000000e+00-3.5541936052e-507.2792521757e-57 C234x 18 y 30.0000000000e+00-1.6528309445e-485.6800149899e-56 C236x 16 y 50.0000000000e+00-3.3179863573e-471.4564400166e-55 C238X 14 y 70.0000000000e+00-6.3968251654e-461.3719342308e-55 C240x 12 y 90.0000000000e+00-6.9686839901e-45-3.2485334868e-55 C242x 10 y 110.0000000000e+00-3.8095788409e-44-1.2497329551e-54 C244x 8 y 130.0000000000e+00-1.2634630583e-43-1.8172426610e-54 C246x 6 y 150.0000000000e+00-2.9505621946e-43-1.3600145798e-54 C248x 4 y 170.0000000000e+00-3.7196666819e-43-4.5780721636e-55 C250x 2 y 190.0000000000e+00-2.1242136306e-43-3.7848468297e-56 C252y 210.0000000000e+00-5.2409780597e-473.9250568530e-57 C253x 220.0000000000e+001.7056550528e-531.3674546826e-59 C255x 20 y 20.0000000000e+00-4.8412084116e-522.4547863131e-58 C257x 18 y 40.0000000000e+00-1.0199794672e-501.7064261325e-57 C259x 16 y 60.0000000000e+001.0263109101e-496.8086165456e-57 C261x 14 y 80.0000000000e+004.5462154334e-481.7329436825e-56 C263x 12 y 100.0000000000e+004.4679500160e-472.9582949643e-56 C265x 10 y 120.0000000000e+002.2027549746e-463.4643332099e-56 C267x 8 y 140.0000000000e+006.3174612488e-462.7901100554e-56 C269x 6 y 160.0000000000e+006.9538950984e-461.5067771779e-56 C271x 4 y 180.0000000000e+00-4.2750386545e-464.9691150677e-57 C273x 2 y 200.0000000000e+00-6.3639133062e-467.7526159651e-58 C275y 220.0000000000e+00-4.7843271898e-475.0807948099e-60 C277x 22 y0.0000000000e+002.5264956818e-55-7.1903154610e-63 C279x 20 y 30.0000000000e+001.1250701358e-53-6.4976019738e-62 C281x 18 y 50.0000000000e+001.6954396912e-52-2.1797420937e-61 C283x 16 y 70.0000000000e+002.6200002580e-51-4.1513628906e-61 C285x 14 y 90.0000000000e+003.4909509458e-50-2.2642537452e-61 C287x 12 y 110.0000000000e+002.5005089646e-498.4592837152e-61 C289x 10 y 130.0000000000e+009.8963209664e-492.3005605047e-60 C291x 8 y 150.0000000000e+002.7207753179e-482.7457552088e-60 C293x 6 y 170.0000000000e+005.5284769828e-481.7676915400e-60 C295x 4 y 190.0000000000e+005.7997683794e-485.2120133129e-61 C297x 2 y 210.0000000000e+004.4471104642e-483.9940459227e-62 C299y 230.0000000000e+009.4791140242e-50-3.4668213634e-63 C300x 240.0000000000e+00-1.1454878613e-58-1.2898844877e-65 C302x 22 y 20.0000000000e+00-2.2434115115e-57-2.3068975394e-64 C304x 20 y 40.0000000000e+00-3.2885159852e-56-1.7095700271e-63 C306x 18 y 60.0000000000e+00-7.1757249443e-55-7.4135146557e-63 C308x 16 y 80.0000000000e+00-2.2358198384e-53-2.0978417058e-62 C310x 14 y 100.0000000000e+00-2.8469741073e-52-4.0907659979e-62 C312x 12 y 120.0000000000e+00-1.7154731450e-51-5.646888083 1e-62 C314x 10 y 140.0000000000e+00-6.2385213652e-51-5.5716985611e-62 C316x 8 y 160.0000000000e+00-1.3181843125e-50-3.9019642009e-62 C318x 6 y 180.0000000000e+00-9.0625596584e-51-1.8754175344e-62 C320x 4 y 200.0000000000e+008.8973693663e-51-5.5686556237e-63 C322x 2 y 220.0000000000e+001.6198973212e-50-7.9847470770e-64 C324y 240.0000000000e+001.0342974142e-51-1.1499149973e-65 Coordinates of the aperture edge Table 4 for Fig. 3 Table 4 for Fig. 3 -277.146351-42.018727277.409974-52.506428 -276.753767-36.763967277.280132-57.731436 -276.188014-31.507147276.975377-62.938547 -275.449661-26.252099276.495448-68.123750 -274.539322-21.002581275.840184-73.283052 -273.457659-15.762267275.009534-78.412492 -272.205384-10.534744274.003576-83.508164 -270.783271-5.323503272.822528-88.566237 -269.192163-0.131940271.466767-93.582968 -267.4329825.036648269.936838-98.554720 -265.50675010.179065268.233467-103.477977 -263.41459415.292210266.357567-108.349353 -261.15777020.373080264.310245-113.165600 -258.73767025.418768262.092804-117.923616 -256.15584130.426455259.706745-122.620445 -253.41399635.393411257.153764-127.253282 -250.51402840.316985254.435747-131.819468 -247.45801645.194605251.554768-136.316492 -244.24823650.023766248.513077-140.741982 -240.88716754.802027245.313096-145.093705 -237.37749059.527000241.957405-149.369559 -233.72209064.196346238.448738-153.567570 -229.92405668.807760234.789971-157.685883 -225.98667073.358963230.984109-161.722759 -221.91340377.847693227.034283-165.676568 -217.70790082.271691222.943733-169.545779 -213.37397286.628689218.715805-173.328958 -208.91557690.916403214.353939-177.024762 -204.33679995.132514209.861661-180.631929 -199.64184299.274668205.242574-184.149271 -194.834997103.340456200.500349-187.575675 -189.920630107.327417195.638720-190.910089 -184.903159111.233022190.661472-194.151522 -179.787036115.054677185.572436-197.299036 -174.576725118.789716180.375483-200.351743 -169.276684122.435403175.074511-203.308803 -163.891345125.988930169.673444-206.169414 -158.425102129.447426164.176222-208.932815 -152.882289132.807958158.586795-211.598280 -147.267170136.067544152.909115-214.165115 -141.583924139.223164147.147131-216.632658 -135.836636142.271771141.304783-219.000273 -130.029286145.210311135.385994-221.267351 -124.165744148.035738129.394666-223.433305 -118.249760150.745034123.334677-225.497574 -112.284967153.335225117.209869-227.459616 -106.274871155.803406111.024050-229.318909 -100.222854158.146752104.780990-231.074953 -94.132173160.36254298.484413-232.727266 -88.005959162.44816692.137998-234.275385 -81.847223164.40114585.745376-235.718867 -75.658854166.21914179.310127-237.057291 -69.443626167.89996372.835782-238.290255 -63.204203169.44157866.325821-239.417380 -56.943141170.84211559.783673-240.438312 -50.662901172.09987053.212720-241.352720 -44.365852173.21330946.616294-242.160302 -38.054281174.18107239.997688-242.860785 -31.730403175.00197233.360149-243.453927 -25.396367175.67500226.706894-243.939517 -19.054271176.19933420.041103-244.317384 -12.706167176.57432113.365935-244.587387 -6.354078176.7994996.684526-244.749430 0.000000176.8745890.000000-244.803450 6.354078176.799499-6.684526-244.749430 12.706167176.574321-13.365935-244.587387 19.054271176.199334-20.041103-244.317384 25.396367175.675002-26.706894-243.939517 31.730403175.001972-33.360149-243.453927 38.054281174.181072-39.997688-242.860785 44.365852173.213309-46.616294-242.160302 50.662901172.099870-53.212720-241.352720 56.943141170.842115-59.783673-240.438312 63.204203169.441578-66.325821-239.417380 69.443626167.899963-72.835782-238.290255 75.658854166.219141-79.310127-237.057291 81.847223164.401145-85.745376-235.718867 88.005959162.448166-92.137998-234.275385 94.132173160.362542-98.484413-232.727266 100.222854158.146752-104.780990-231.074953 106.274871155.803406-111.024050-229.318909 112.284967153.335225-117.209869-227.459616 118.249760150.745034-123.334677-225.497574 124.165744148.035738-129.394666-223.433305 130.029286145.210311-135.385994-221.267351 135.836636142.271771-141.304783-219.000273 141.583924139.223164-147.147131-216.632658 147.267170136.067544-152.909115-214.165115 152.882289132.807958-158.586795-211.598280 158.425102129.447426-164.176222-208.932815 163.891345125.988930-169.673444-206.169414 169.276684122.435403-175.074511-203.308803 174.576725118.789716-180.375483-200.351743 179.787036115.054677-185.572436-197.299036 184.903159111.233022-190.661472-194.151522 189.920630107.327417-195.638720-190.910089 194.834997103.340456-200.500349-187.575675 199.64184299.274668-205.242574-184.149271 204.33679995.132514-209.861661-180.631929 208.91557690.916403-214.353939-177.024762 213.37397286.628689-218.715805-173.328958 217.70790082.271691-222.943733-169.545779 221.91340377.847693-227.034283-165.676568 225.98667073.358963-230.984109-161.722759 229.92405668.807760-234.789971-157.685883 233.72209064.196346-238.448738-153.567570 237.37749059.527000-241.957405-149.369559 240.88716754.802027-245.313096-145.093705 244.24823650.023766-248.513077-140.741982 247.45801645.194605-251.554768-136.316492 250.51402840.316985-254.435747-131.819468 253.41399635.393411-257.153764-127.253282 256.15584130.426455-259.706745-122.620445 258.73767025.418768-262.092804-117.923616 261.15777020.373080-264.310245-113.165600 263.41459415.292210-266.357567-108.349353 265.50675010.179065-268.233467-103.477977 267.4329825.036648-269.936838-98.554720 269.192163-0.131940-271.466767-93.582968 270.783271-5.323503-272.822528-88.566237 272.205384-10.534744-274.003576-83.508164 273.457659-15.762267-275.009534-78.412492 274.539322-21.002581-275.840184-73.283052 275.449661-26.252099-276.495448-68.123750 276.188014-31.507147-276.975377-62.938547 276.753767-36.763967-277.280132-57.731436 277.146351-42.018727-277.409974-52.506428 277.365243-47.267530-277.365243-47.267530 Table 5 to Fig. 3 Table 5 to Fig. 3 Numerical aperture =0.75 1 / βx=-4.20 1 / βy =-8.00 Track length = 2159mm Object-Image Shift = 4675 mm Width of the installation space = 5170 mm Optically used total mirror surface = 2.87 m 2 Linear pupil obscuaration =29.0% Minimum angle of grazing incidence mirror = 67.8° Scan slot length on the wafer = 1.2 mm Scan-integrated wavefront RMS = 12.92 mλ Transmittance=6.37% Light conductivity=55.1 mm 2 Mirror with maximum diameter =M4 Maximum optical mirror diameter = 1195 mm Mirror with maximum area = M9 The above parameter “Numerical Aperture” in Table 5 is the image-side numerical aperture. In Table 5 above, “Tracklength” refers to the distance between the object plane 6 and the image plane 12. “Object-Image Shift” refers to the object-image offset. The parameter “Width of the build space” refers to the build space extension along the y-coordinate. The parameter “Scan slit length on the wafer” refers to the y-extension of the image field 11. Fig. 4 shows a further embodiment of a projection optics or imaging optics 25 that can be used instead of the projection optics 10 in the projection exposure system 1. Components and functions that correspond to those already explained above with reference to Figs. 1 to 3 have the same reference numerals and will not be discussed in detail again. The basic structure of the projection optics 25 corresponds to that of the projection optics 24 according to Fig. 3 . The projection optics 25 has a linear pupil obscuration of 18.7%. On all GI mirrors M2 to M7 of the projection optics 25, the angles of incidence of the illumination light 16 are greater than 70°. The largest mirror of the projection optics 25 has a diameter of 1150 mm. The optical design data for the projection optics 25 are shown in the following Tables 1 to 5, which in turn correspond in terms of basic structure to Tables 1 to 5 for the embodiment according to Fig. 3. Radii of the surfaces Table 1 to Fig. 4 Table 1 to Fig. 4 M01-4226.530667750.00046590-1668.364492940.00118029 M025684.66517603-0.000351821685.09807851-0.00118687 M0334105.42898165-0.00005860-6053.952649090.00033014 M04-3385.098554910.00059082-6083.061676940.00032878 M05-1718.416955430.00024749-7094.692788790.00005995 M06-1080.690130420.00043870-37866.401398860.00001252 M07-2041.588770190.00017760-15527.956435530.00002335 M086521.98694381-0.00008516319.33501551-0.00173931 M09-854.123747330.00234158-770.941008040.00259423 Decentering (location, angle) of the surfaces Table 2 to Fig. 4 Table 2 to Fig. 4 Retikel0.0000000000.0000000000.000000000 M010.000000000-255.3501913572221.391725508 M020.000000000-561.9225723381254.437257053 M030.000000000-1145.422853514763.929394449 M040.000000000-2552.620067132315.613333003 M050.000000000-3387.359688643332.888467759 M060.000000000-3850.571796150520.834067450 M070.000000000-4175.742008290900.287074778 M080.000000000-4498.9369118922327.607680288 Blende0.000000000-4473.4442397392215.024790375 M090.000000000-4356.7605234671699.716316427 Wafer0.000000000-4356.7605249432417.483280766 Retikel0.0000000000.0000000000.000000000 M01-5.5168948410.0000000000.000000000 M02236.2301139100.000000000-0.000000000 M03208.861334489-0.000000000-0.000000000 M04188.242835547-0.000000000-0.000000000 M05168.364926593-0.000000000-0.000000000 M06144.255089994-0.000000000-0.000000000 M07116.676673305-0.000000000-0.000000000 M0812.7586003370.000000000-0.000000000 Blende179.149533580-0.000000000-0.000000000 M09186.379300227-0.000000000-0.000000000 Wafer0.0000001180.000000000180.000000000 Freiformkoeffizienten der Flächen Tabelle 3a zu Fig. 4 Tabelle 3a zu Fig. 4 C2y7.9433687134e-059.0342656777e-042.8238564730e-04 C7x 2 y5.6821921951e-09-2.5623451782e-08-6.1310329838e-08 C9y 3-2.8571335245e-081.1056961633e-071.4450561712e-08 C10x 47.0837793021e-128.0181657446e-11-1.8759321431e-11 C12x 2 y 24.9878823308e-11-2.7071146269e-101.1854446602e-11 C14y 4-2.8102670585e-114.4865385050e-11-1.4549829698e-11 C16x 4 y1.9827114446e-141.1244012028e-14-4.7091483552e-14 C18x 2 y 34.5781108860e-14-2.4165125078e-14-1.3534221679e-14 C20y 5-1.1015825801e-13-1.3804589949e-125.1672859476e-15 C21x 63.1838730304e-183.8561675416e-171.4244555701e-17 C23x 4 y 21.4078889222e-17-6.1417961739e-162.1770982901e-17 C25x 2 y 43.1373834480e-17-2.2225317178e-15-2.8193506955e-18 C27y 6-4.2933315114e-169.7171159155e-15-6.9208262736e-18 C29x 6 y-2.4432090018e-201.2440517769e-19-2.0606288835e-20 C31x 4 y 31.3790453085e-20-2.1588554610e-18-7.0199292554e-20 C33x 2 y 5-4.4626054313e-20-9.4578817649e-19-1.8811304191e-20 C35y 7-3.6247719370e-194.8042050280e-179.1801731460e-20 C36x 8-9.0865462028e-251.8107771766e-23-4.8083583092e-23 C38x 6 y 24.6278574222e-231.7059372515e-21-1.7756487625e-22 C40x 4 y 41.0169147173e-215.1868147909e-21-1.2761529208e-23 C42x 2 y 64.1107501867e-219.3386801676e-203.0871085003e-22 C44y 81.4816904775e-201.4173029550e-19-2.1888590458e-22 C46x 8 y3.2422260390e-268.3356234216e-25-1.7470251566e-25 C48x 6 y 3-9.7408436134e-251.9475759165e-241.1684118880e-25 C50x 4 y 5-7.3395545731e-24-2.6629457318e-235.5619666520e-25 C52x 2 y 7-1.1878509378e-239.4919569563e-23-9.0478664553e-25 C54y 92.7906561961e-236.9627362400e-22-3.8106179023e-25 C55x 101.1406414350e-28-1.3055454746e-282.6832286927e-28 C57x 8 y 27.6683514315e-288.0610524372e-271.8350634380e-28 C59x 6 y 4-8.8727030510e-27-3.0105553964e-269.1135724417e-28 C61x 4 y 6-7.5797700476e-26-2.9536266667e-25-1.3471970350e-27 C63x 2 y 8-3.6464773639e-25-1.1660287962e-23-1.3269197711e-27 C65y 10-6.1135215858e-25-2.3812344816e-231.6265733944e-27 C67x 10 y-8.0582645947e-31-1.3683600907e-295.3824764002e-31 C69x 8 y 31.8233596838e-29-2.3327317582e-29-2.3547122725e-32 C71x 6 y 52.7060087022e-28-7.8164715339e-30-3.1047501798e-30 C73x 4 y 79.5360850950e-284.5343065005e-27-2.6443211126e-30 C75x 2 y 96.0220776516e-28-1.7680299153e-269.1806653057e-30 C77y 11-1.9507380777e-27-1.9770858584e-251.9353593313e-30 C78x 12-2.0034725742e-33-5.4192286739e-34-1.7240508356e-33 C80x 10 y 2-2.7086122272e-32-1.3736351574e-31-3.4992058773e-34 C82x 8 y 43.7881005842e-32-1.8665252138e-31-3.7222832758e-33 C84x 6 y 69.4135903777e-31-2.5187683344e-30-5.6810289450e-33 C86x 4 y 85.6925702306e-303.8912380091e-292.0728332938e-32 C88x 2 y 102.2439611067e-297.7889410636e-288.3331744840e-34 C90y 122.5928358897e-291.1647435964e-27-1.1652082855e-32 C92x 12 y1.7654486983e-354.3626111027e-35-4.9935808731e-36 C94x 10 y 3-1.7867901597e-344.3092308386e-352.1154958144e-36 C96x 8 y 5-5.5004938335e-336.5166680939e-344.3723562392e-36 C98x 6 y 7-3.1703988015e-32-3.2099099195e-323.8312679616e-35 C100x 4 y 9-6.7385688662e-32-2.1448594511e-31-2.1787561182e-35 C102x 2 y 11-2.0850729826e-322.2889883923e-30-5.0991379501e-35 C104y 139.2366596004e-321.0770906811e-291.2239031385e-36 C105x 141.9710809044e-389.0225549246e-39-1.8328230017e-40 C107x 12 y 23.8758489185e-376.3681049664e-37-2.2152298341e-39 C109x 10 y 41.0579039451e-361.3079582391e-366.3629611732e-40 C111x 8 y 6-7.6504671262e-365.7221663533e-365.5416297773e-38 C113x 6 y 8-5.0569443535e-351.3368525270e-34-2.8645594554e-38 C115x 4 y 10-2.6530457778e-34-2.8859435187e-33-8.6156386966e-38 C117x 2 y 12-9.3500904076e-34-2.5425768488e-323.8504624167e-38 C119y 14-8.5560609380e-34-1.5967087767e-324.0465779440e-38 C121x 14 y-2.0250394071e-406.7864611284e-412.8679004285e-41 C123x 12 y 35.6518160048e-40-1.3539826650e-40-1.4874864146e-41 C125x 10 y 56.3257898395e-38-8.6012543936e-391.6983757485e-41 C127x 8 y 75.6116712669e-374.5612037142e-38-1.2103645482e-40 C129x 6 y 91.9728050318e-361.7268405081e-36-8.2576375185e-41 C131x 4 y 112.9571315222e-36-2.8282864856e-361.7535663575e-40 C133x 2 y 133.3867560197e-37-9.9702639841e-351.0215354049e-40 C135y 15-2.6649206486e-36-2.1064692083e-34-3.0834261585e-41 C136x 16-1.2011702338e-43-2.3860397495e-449.1547407538e-45 C138x 14 y 2-3.1419383210e-42-7.3312955761e-439.7287435088e-45 C140x 12 y 4-1.9560836788e-412.4696583887e-432.8244851867e-44 C142x 10 y 62.6553776592e-421.9518868134e-41-1.2275145823e-43 C144x 8 y 83.5179478620e-40-3.0265585870e-40-8.4721386111e-44 C146x 6 y 101.4845685213e-39-3.7284840317e-401.488680923 1e-43 C148x 4 y 127.8796071151e-396.1497212638e-381.0141921581e-43 C150x 2 y 142.5388252484e-382.8058153573e-37-1.1999359604e-43 C152y 161.9947087795e-383.3533478222e-39-5.7894438099e-44 C154x 16 y1.3729151893e-45-3.8188536732e-46-4.6395383840e-47 C156x 14 y 34.1505192755e-451.2183654615e-456.1519764099e-47 C158x 12 y 5-4.1619848303e-432.8865868608e-44-2.4918206242e-47 C160x 10 y 7-5.4481801306e-421.2271205006e-431.1725098717e-46 C162x 8 y 9-2.8154368939e-41-2.9474259429e-422.2222488489e-46 C164x 6 y 11-7.1294875007e-41-1.7845190678e-41-8.8687794732e-47 C166x 4 y 13-8.2686499093e-411.9309583110e-40-2.9987299266e-46 C168x 2 y 15-8.2485742251e-431.2567028129e-39-5.3428089352e-48 C170y 174.8045932869e-411.2227717978e-396.7949797807e-47 C171x 184.5205744662e-490.0000000000e+000.0000000000e+00 C173x 16 y 21.4915338494e-470.0000000000e+000.0000000000e+00 C175x 14 y 41.4073586543e-460.0000000000e+000.0000000000e+00 C177x 12 y 64.1290944482e-460.0000000000e+000.0000000000e+00 C179x 10 y 8-7.8490253689e-460.0000000000e+000.0000000000e+00 C181x 8 y 10-6.5641504252e-450.0000000000e+000.0000000000e+00 C183x 6 y 12-2.3567998426e-440.0000000000e+000.0000000000e+00 C185x 4 y 14-1.4415906903e-430.0000000000e+000.0000000000e+00 C187x 2 y 16-4.2644970988e-430.0000000000e+000.0000000000e+00 C189y 18-3.0024314778e-430.0000000000e+000.0000000000e+00 C191x 18 y-5.5936575644e-510.0000000000e+000.0000000000e+00 C193x 16 y 3-4.5220835542e-500.0000000000e+000.0000000000e+00 C195x 14 y 51.5460333385e-480.0000000000e+000.0000000000e+00 C197x 12 y 72.9088358196e-470.0000000000e+000.0000000000e+00 C199x 10 y 92.0638574504e-460.0000000000e+000.0000000000e+00 C201x 8 y 117.5622659464e-460.0000000000e+000.0000000000e+00 C203x 6 y 131.5062657124e-450.0000000000e+000.0000000000e+00 C205x 4 y 151.4349319701e-450.0000000000e+000.0000000000e+00 C207x 2 y 17-6.4447109247e-470.0000000000e+000.0000000000e+00 C209y 19-5.4278617991e-460.0000000000e+000.0000000000e+00 C210x 20-9.6710244826e-550.0000000000e+000.0000000000e+00 C212x 18 y 2-3.8591272070e-530.0000000000e+000.0000000000e+00 C214x 16 y 4-4.7988096627e-520.0000000000e+000.0000000000e+00 C216x 14 y 6-2.5078378807e-510.0000000000e+000.0000000000e+00 C218x 12 y 8-4.1535714524e-510.0000000000e+000.0000000000e+00 C220x 10 y 109.7059191266e-510.0000000000e+000.0000000000e+00 C222x 8 y 123.8295396569e-500.0000000000e+000.0000000000e+00 C224x 6 y 141.7305662554e-490.0000000000e+000.0000000000e+00 C226x 4 y 161.4676647598e-480.0000000000e+000.0000000000e+00 C228x 2 y 184.0176082839e-480.0000000000e+000.0000000000e+00 C230y 202.5896774582e-480.0000000000e+000.0000000000e+00 C232x 20 y1.2714204873e-560.0000000000e+000.0000000000e+00 C234x 18 y 31.5807861627e-550.0000000000e+000.0000000000e+00 C236x 16 y 5-2.9989785331e-540.0000000000e+000.0000000000e+00 C238x 14 y 7-8.0917450732e-530.0000000000e+000.0000000000e+00 C240x 12 y 9-7.4569995805e-520.0000000000e+000.0000000000e+00 C242y 10 y 11-3.6621029205e-510.0000000000e+000.0000000000e+00 C244x 8 y 13-1.0456581668e-500.0000000000e+000.0000000000e+00 C246x 6 y 15-1.7287462285e-500.0000000000e+000.0000000000e+00 C248x 4 y 17-1.4026765354e-500.0000000000e+000.0000000000e+00 C250x 2 y 191.1422098029e-510.0000000000e+000.0000000000e+00 C252y 213.5735354910e-510.0000000000e+000.0000000000e+00 C253x 229.0214942309e-610.0000000000e+000.0000000000e+00 C255x 20 y 24.1954546147e-590.0000000000e+000.0000000000e+00 C257x 18 y 46.4284038790e-580.0000000000e+000.0000000000e+00 C259x 16 y 64.6250694497e-570.0000000000e+000.0000000000e+00 C261x 14 y 81.6755448887e-560.0000000000e+000.0000000000e+00 C263x 12 y 102.5396955676e-560.0000000000e+000.0000000000e+00 C265y 10 y 121.4105439494e-560.0000000000e+000.0000000000e+00 C267x 8 y 141.3511824189e-550.0000000000e+000.0000000000e+00 C269x 6 y 16-2.9629909138e-550.0000000000e+000.0000000000e+00 C271x 4 y 18-6.3131764939e-540.0000000000e+000.0000000000e+00 C273x 2 y 20-1.6223394864e-530.0000000000e+000.0000000000e+00 C275y 22-9.6868689766e-540.0000000000e+000.0000000000e+00 C277x 22 y-1.2411177718e-620.0000000000e+000.0000000000e+00 C279x 20 y 3-1.9895404515e-610.0000000000e+000.0000000000e+00 C281x 18 y 52.3412146766e-600.0000000000e+000.0000000000e+00 C283x 16 y 79.2322628065e-590.0000000000e+000.0000000000e+00 C285x 14 y 91.0620309986e-570.0000000000e+000.0000000000e+00 C287x 12 y 116.5794640418e-570.0000000000e+000.0000000000e+00 C289x 10 y 132.4913882504e-560.0000000000e+000.0000000000e+00 C291x 8 y 155.8536170911e-560.0000000000e+000.0000000000e+00 C293x 6 y 178.3175149014e-560.0000000000e+000.0000000000e+00 C295x 4 y 195.8611128334e-560.0000000000e+000.0000000000e+00 C297x 2 y 21-6.8440948530e-570.0000000000e+000.0000000000e+00 C299y 23-1.0608264817e-560.0000000000e+000.0000000000e+00 Tabelle 3b zu Fig. 4 Tabelle 3b zu Fig. 4 C2y2.6065739088e-044.8929789376e-06-5.0848899939e-04 C7x 2 y-5.7325742060e-08-3.6686923237e-08-1.5304159684e-07 C9y 3-1.0001462614e-085.2173813058e-089.9555116750e-08 C10x 4-1.3964836049e-11-5.3971413575e-111.3262093260e-12 C12x 2 y 2-5.6112102729e-126.2162013450e-11-8.1410088341e-11 C14y 4-1.7362647379e-11-6.2504241333e-12-2.9916878200e-11 C16x 4 y3.7737605998e-154.2557347392e-16-7.3184186073e-14 C18x 2 y 3-2.7509627479e-143.6568891036e-14-2.6888960374e-13 C20y 5-7.2060666454e-151.0397475635e-135.3748642790e-13 C21x 61.7106119333e-173.8546214471e-182.3635269305e-18 C23x 4 y 2-3.8160281115e-171.3743275520e-16-1.0028287507e-16 C25x 2 y 42.9939049097e-172.9576375233e-16-1.7953820886e-16 C27y 62.0764798670e-173.1788200471e-163.6738493527e-15 C29x 6 y-6.9486378247e-204.6740131349e-20-1.7695706376e-19 C31x 4 y 38.6072308719e-202.6319241295e-196.0703418537e-19 C33x 2 y 54.8032905177e-201.3202809513e-185.5917811903e-18 C35y 77.0805568089e-206.6262092993e-182.0237899997e-17 C36x 8-1.2279211977e-227.3852669489e-247.3995871676e-24 C38x 6 y 21. 1629102483e-225.1238130484e-23-5.6855208783e-22 C40x 4 y 4-1.0284023758e-221.5070938314e-216.6622244716e-21 C42x 2 y 6-3.6672183264e-231.6319115369e-20-1.2012296324e-20 C44y 8-1.3226660057e-221.3269445441e-20-6.2447171641e-19 C46x 8 y2.8463401005e-252.1817641098e-252.0947798347e-25 C48x 6 y 3-1.1805369568e-251.1158324316e-24-3.5050989707e-24 C50x 4 y 5-4.1457115343e-261.6490567524e-23-5.3867512803e-23 C52x 2 y 7-7.6050369619e-25-1.4042800864e-23-1.6855357452e-21 C54y 9-1.1797928467e-25-2.0244965395e-22-7.8803540456e-22 C55x 104.7696905303e-28-1.6198259397e-283.0316057898e-29 C57x 8 y 22.1922306156e-288.0244277990e-283.8377961534e-27 C59x 6 y 41.9673834990e-271.5542893485e-26-5.5479492296e-26 C61x 4 y 62.1068615299e-271.1698891768e-26-1.7193213286e-24 C63x 2 y 83.1317941049e-27-5.3627671250e-254.6455619372e-24 C65y 101.6112090267e-27-9.5709625035e-258.2337298810e-23 C67x 10 y-7.5769222704e-31-1.0014353570e-30-1.2909670754e-30 C69x 8 y 31.5408221294e-307.0002963455e-304.7985605707e-29 C71x 6 y 52.8822942268e-306.4586337836e-29-5.0579110936e-28 C73x 4 y 79.9974351042e-30-1.2244924159e-281.2680001779e-26 C75x 2 y 91.4017180570e-291.0767556766e-272.0716076268e-25 C77y 113.5162879785e-314.3531712302e-279.9461840417e-26 C78x 12-1.4183025509e-334.9232630968e-34-1.8540075354e-34 C80x 10 y 2-1.3965548829e-33-1.6970901919e-33-2.6298212403e-32 C82x 8 y 4-1.3201622881e-322.2167824536e-322.1080747420e-31 C84x 6 y 6-2.5122234640e-32-1.2828448950e-311.5127631851e-29 C86x 4 y 8-1.3129841643e-323.4397390513e-302.4496325298e-28 C88x 2 y 10-1.8390681022e-322.5512116121e-29-3.6640878883e-28 C90y 12-1.3794382760e-324.5750752617e-29-7.7597010159e-27 C92x 12 y9.6428647015e-373.2120019859e-362.6882645418e-36 C94x 10 y 3-1.1439786767e-357.1096230710e-36-4.7615381388e-34 C96x 8 y 5-4.7816054318e-35-2.7381613770e-343.9118223838e-33 C98x 6 y 7-7.8880672250e-351.3096275690e-341.6898579733e-31 C100x 4 y 9-1.0305737368e-341.5113616431e-32-1.0019898386e-30 C102x 2 y 11-1.1831275732e-345.5123977164e-32-1.5657019647e-29 C104y 13-2.1273600818e-356.9633223124e-32-8.1411377253e-30 C105x 142.2555155987e-39-7.9742997253e-406.2945925859e-40 C107x 12 y 23.3135035082e-391.8413627555e-386.4335580463e-38 C109x 10 y 42.9732703389e-38-2.6454997859e-39-2.9307770432e-36 C111x 8 y 61. 1728486647e-37-2.7220029294e-371.6442694123e-35 C113x 6 y 81.8961575224e-37-1.4357385833e-36-1.1370583514e-33 C115x 4 y 105.7267639032e-38-7.6258029556e-35-1.5746421742e-32 C117x zy 12-6.7319526858e-39-3.6181545261e-34-6.1559919612e-33 C119y 142.7680743051e-38-5.9384972080e-344.1098718059e-31 C121x 14 y1.4007906356e-42-3.2602271064e-42-9. 1771797205e-43 C123x 12 y 34.2050935666e-416.3448565850e-411.4953942957e-39 C125x 10 y 52.9907763806e-406.0666078781e-40-3.9539481088e-39 C127x 8 y 78.9885102350e-405.6893047991e-39-9.1356478325e-37 C129x 6 y 91.1914871083e-39-5.8532933939e-38-1.3174610232e-35 C131x 4 y 119.0249748575e-40-6.2237716541e-371.5525719073e-35 C133x 2 y 135.4836149901e-40-2.3592520034e-366.0027397413e-34 C135y 151.2103690119e-40-3.0802122093e-364.6699794189e-34 C136x 16-1.3806837219e-458.1129109923e-46-5.8708204628e-46 C138x 14 y 24.3642017272e-45-1.0112435848e-44-1. 1738655727e-44 C140x 12 y 41.1475522671e-431.3767256599e-431.5803362542e-41 C142x 10 y 67.0960627824e-435.1640007010e-42-1.5953835404e-40 C144x 8 y 81.6533875815e-425.2427582119e-42-7.0747913689e-39 C146x 6 y 101.9405817073e-42-2.0245611242e-40-1.2756275949e-38 C148x 4 y 121.5713669689e-42-1.5197639855e-394.9419629992e-37 C150x 2 y 148.9754096768e-43-5.3466051810e-391. 1399314927e-36 C152y 161.5177504927e-43-5.4603162822e-39-9.2524015650e-36 C154x 16 y-1.8743620317e-484.2716144726e-489.2488292077e-49 C156x 14 y 32.3452774940e-48-7.5971472412e-47-1.7287944647e-46 C158x 12 y 51.1758355175e-469.2312307079e-466.3999106711e-44 C160x 10 y 75.4452493004e-464.8018814326e-45-1.4482539721e-42 C162x 8 y 99.9762759854e-46-3.6007509052e-45-2.2438807744e-42 C164x 6 y 111.0894575376e-45-2.1688005833e-43-2.4743642458e-41 C166x 4 y 138.7011082546e-46-1.3140651331e-421.7987990013e-39 C168x 2 y 154.5900970596e-46-4.5638004783e-42-7. 1449785955e-39 C170y 177.2415615545e-47-3.0926040203e-42-1.2597347629e-38 Tabelle 3c zu Fig. 4 Tabelle 3c zu Fig. 4 C2y2.7359323847e-023.1113196983e-016.4584512410e-02 C7x 2 y-1.3367734509e-07-8.8556170803e-074.8980125771e-08 C9y 31.6357610736e-083.7846342248e-065.7456410227e-08 C10x 41.1926875339e-107.2441618954e-10-1.2124430553e-11 C12x 2 y 2-9.3834684601e-118.8193866835e-10-5.4772159181e-11 C14y 4-4.1790762693e-112.4750506414e-08-3.4201302006e-11 C16x 4 y9.8047572377e-147.4670565042e-134.8534015108e-14 C18x 2 y 31.0815316302e-13-7.3674104226e-121.2384815018e-13 C20y 51.2221148482e-131.9402768996e-106.9766638184e-14 C21x 67.2757535677e-172.1602184227e-16-3.0068584586e-17 C23x 4 y 2-3.5267799928e-161.1697864289e-14-1.2828588717e-16 C25x 2 y 4-7.3373646511e-16-5.8129234240e-14-1.7983707029e-16 C27y 6-3.5167471692e-161.6683096173e-12-7.7688692839e-17 C29x 6 y9.1035419477e-19-4.8222580981e-185.8368528395e-20 C31x 4 y 32.2095615249e-181.3059753078e-162.2203427506e-19 C33x 2 y 52.2003405462e-18-7.4887074902e-162.7489305457e-19 C35y 78.3991626921e-191.3694356821e-141.1500909026e-19 C36x 8-1.0090634993e-217.1285361033e-22-4.2737649843e-23 C38x 6 y 2-3.3397759432e-212.7910601521e-20-2.5942703946e-22 C40x 4 y 4-5.8711914635e-213.1315537764e-18-5.0600950119e-22 C42x 2 y 6-3.3751042713e-218.7977976282e-18-4.6260683259e-22 C44y 8-1.7796111398e-218.8070286561e-17-1.0663416702e-22 C46x 8 y2.5147434583e-24-6.6980454854e-237.7033504069e-26 C48x 6 y 37.6371975639e-24-2.4651201950e-214.9724326575e-25 C50x 4 y 5-8.3135030697e-241.7055198835e-208.7718173713e-25 C52x 2 y 77.2954886861e-243.8791001738e-197.4232811211e-25 C54y 96.3242317607e-243.9719423706e-192.2308370431e-25 C55x 101.1178967874e-273.4228874531e-25-9.9449402639e-29 C57x 8 y 2-1.4299968064e-261.6186042828e-24-5.1349357215e-28 C59x 6 y 49.6331725432e-26-5.0030646168e-23-1.3562189013e-27 C61x 4 y 6-2.9501634165e-26-6.1739643720e-22-1.6875770199e-27 C63x 2 y 8-8.5972608608e-265.3093287436e-21-8.1936862639e-28 C65y 10-3.0989851171e-261.0432784129e-21-1.4079210619e-28 C67x 10 y7.7825692078e-305.7612004717e-27-1.2592043001e-31 C69x 8 y 3-4.6745379515e-285.8071122052e-26-5.1919315998e-31 C71x 6 y 52.1214530367e-28-4.4785151724e-26-1.1678181395e-30 C73x 4 y 76.7769307238e-28-1.5525337154e-23-1.1672636493e-30 C75x 2 y 94.4245962887e-283.6315376682e-23-3.8345399929e-31 C77y 111.0676052740e-28-6.6140949425e-25-1.9381080728e-31 C78x 123.5960938823e-32-8.3274994596e-301.1191278067e-34 C80x 10 y 21.2934384417e-30-2.3639087137e-291.1189554205e-34 C82x 8 y 4-1.3077346365e-305.2782074873e-28-1.0355606598e-33 C84x 6 y 6-3.1663044587e-301.3445931387e-26-2.3813477095e-33 C86x 4 y 8-2.2543623034e-30-1.6292030242e-25-3.0426143690e-33 C88x 2 y 10-9.6541531520e-311.1744632878e-25-2.9767111005e-33 C90y 12-2.2325327349e-31-1.8781616694e-26-1.4367189190e-33 C92x 12 y-1.1016353080e-33-1.7114978665e-312.1889808038e-36 C94x 10 y 37.7571603193e-33-1.0101438984e-301.3842454812e-35 C96x 8 y 51.1253933933e-32-3.9298038796e-304.0847384282e-35 C98x 6 y 75.5464146717e-332.3698404826e-286.4082024124e-35 C100x 4 y 91.4190131650e-33-9.0712286227e-285.4634901983e-35 C102x 2 y 115.2467876972e-344.7118328170e-292.1938072838e-35 C104y 132.6635591200e-34-7.7389224359e-294.1076269499e-36 C105x 14-3.7580911797e-371.0989377931e-34-1.6132468754e-39 C107x 12 y 2-1.9492301685e-35-5.6434209716e-35-1.0261992722e-38 C109x 10 y 4-2.3361916460e-35-1.0860351856e-34-2.5236979174e-38 C111x 8 y 6-3.1306859571e-36-1.3860899274e-31-4.7471660096e-38 C113x 6 y 89.2013937816e-361.8416650649e-30-5.5991812736e-38 C115x 4 y 104.5439252228e-36-2.6762095244e-30-2.9978106627e-38 C117x 2 y 121.3800375084e-36-4.2749574299e-31-2.5360960990e-39 C119y 14-1.4632625636e-37-1.9611787867e-314.6799330693e-39 C121x 14 y1.4359563383e-382.7870734798e-36-1.0608322032e-41 C123x 12 y 3-1.3097453192e-381.2726882957e-35-7.7376363928e-41 C125x 10 y 5-6.8832908778e-381.7367955993e-34-2.7100501927e-40 C127x 8 y 7-6.8210002723e-38-1.3315624006e-33-5.1310535842e-40 C129x 6 y 9-3.3381334450e-386.2493516547e-33-5.7808648969e-40 C131x 4 y 11-3.0711785174e-39-5.0899964612e-33-3.8586838830e-40 C133x 2 y 13-2.1267616037e-391.5428139992e-33-1.2651585993e-40 C135y 15-5.5832565763e-42-3.4353116934e-34-1.7316392703e-41 C136x 161.2478358393e-42-8.2260571793e-406.5826003637e-45 C138x 14 y 28.6907304238e-415.4594204895e-394.9221093553e-44 C140x 12 y 42.3830220344e-40-4.4977722304e-381.4265989106e-43 C142x 10 y 62.6819162260e-401.8702240170e-363.0433522277e-43 C144x 8 y 81. 1852075398e-40-4.1617060244e-364.7682509094e-43 C146x 6 y 101.4380445954e-415.0822292406e-364.4335909295e-43 C148x 4 y 12-1.2563300828e-41-1.3698711801e-351.9278772325e-43 C150x 2 y 143.0923047051e-436.7981388463e-362.2207717156e-44 C152y 162.8180259096e-443.7332289683e-37-1.6044854396e-44 C154x 16 y-5.7575200869e-44-2.9735550646e-413.6153677332e-47 C156x 14 y 3-1.9445312565e-43-1.2777919979e-403.1270101702e-46 C158x 12 y 5-2.8671957092e-43-2.2673955497e-391.2828412643e-45 C160x 10 y 7-2.3711158442e-433.2221875213e-392.9075008910e-45 C162x 8 y 9-2.8056468335e-441.1645351469e-384.0268265886e-45 C164x 6 y 111.5863862872e-441.6222019242e-383.5571044913e-45 C166x 4 y 131.3814938279e-448.8417089416e-391.9728316280e-45 C168x 2 y 156.3881220893e-46-9.8568576178e-395.7315398817e-46 C170y 172.3666963006e-481.7384324439e-396.8930587499e-47 C171x 180.0000000000e+002.5565996505e-45-2.0034526320e-50 C173x 16 y 20.0000000000e+00-9.1237604095e-44-1.8455427277e-49 C175x 14 y 40.0000000000e+005.6409953203e-43-7.0839085424e-49 C177x 12 y 60.0000000000e+00-1.9028270860e-41-1.8150420280e-48 C179x 10 y 80.0000000000e+00-6.4025080891e-41-3.4084687827e-48 C181x 8 y 100.0000000000e+003.8533671551e-41-4.3189508319e-48 C183x 6 y 120.0000000000e+001.3455739820e-40-3.3754144684e-48 C185x 4 y 140.0000000000e+002.1350143238e-40-1.4633734213e-48 C187x 2 y 160.0000000000e+001.2897858646e-41-3.1412934740e-49 C189y 180.0000000000e+001.3218608956e-425.3653090942e-51 C191x 18 y0.0000000000e+002.0171760632e-46-7.1829787316e-53 C193x 16 y 30.0000000000e+001.1471610114e-45-6.9444999225e-52 C195x 14 y 50.0000000000e+001.2465129382e-44-3.2737483988e-51 C197x 12 y 70.0000000000e+00-3.8742855023e-44-8.6388674060e-51 C199x 10 y 90.0000000000e+00-3.0639027419e-43-1.4105993135e-50 C201x 8 y 110.0000000000e+00-3.4149984491e-43-1.5105931000e-50 C203x 6 y 130.0000000000e+00-3.6909372195e-43-1.0857263315e-50 C205x 4 y 150.0000000000e+00-3.2789618887e-43-5.1133230107e-51 C207x 2 y 170.0000000000e+001.6044511558e-43-1.3077106477e-51 C209y 190.0000000000e+002.9533362095e-44-1.4425065556e-52 C210x 200.0000000000e+001.0021610185e-503.2291262760e-56 C212x 18 y 20.0000000000e+001.0095408789e-483.5026858904e-55 C214x 16 y 40.0000000000e+00-3.8802979042e-481.6259841015e-54 C216x 14 y 60.0000000000e+003.6853624321e-474.8539359614e-54 C218x 12 y 80.0000000000e+002.5437489544e-461.0588541990e-53 C220x 10 y 100.0000000000e+005.9569026334e-461.6335535688e-53 C222x 8 y 120.0000000000e+003.3045373275e-461.6994023851e-53 C224x 6 y 140.0000000000e+00-1.1301898396e-461. 1442668979e-53 C226x 4 y 160.0000000000e+00-8.5463127733e-464.6216880882e-54 C228x 2 y 180.0000000000e+008.3161888735e-471.0374978103e-54 C230y 200.0000000000e+00-1.0490557395e-475.7703058267e-56 C232x 20 y0.0000000000e+00-6.5092877053e-527.8641616107e-59 C234x 18 y 30.0000000000e+00-6.4858843267e-518.2296222046e-58 C236x 16 y 50.0000000000e+00-8.0851520445e-504.4102483557e-57 C238x 14 y 70.0000000000e+00-2.1139860098e-491.3320210573e-56 C240x 12 y 90.0000000000e+00-6.1917684413e-492.4816930748e-56 C242x 10 y 110.0000000000e+001.1475619323e-483.0687295219e-56 C244x 8 y 130.0000000000e+003.9138365548e-482.6245241996e-56 C246x 6 y 150.0000000000e+005.8995901833e-481.5647051244e-56 C248x 4 y 170.0000000000e+001.0334358735e-476.3522309228e-57 C250x 2 y 190.0000000000e+002.5017278554e-481.4205843033e-57 C252y 210.0000000000e+00-1.5977674955e-491.4868941428e-58 C253x 220.0000000000e+00-8.5257057536e-56-2.5592645923e-62 C255x 20 y 20.0000000000e+00-5.7607781183e-54-3.2122214967e-61 C257x 18 y 40.0000000000e+00-2.4745093052e-53-1.7904466735e-60 C259x 16 y 60.0000000000e+00-1.6962973086e-52-6.3078897303e-60 C261x 14 y 80.0000000000e+00-2.7654593759e-51-1.5848819714e-59 C263x 12 y 100.0000000000e+00-1.8524563477e-50-2.8590285497e-59 C265x 10 y 120.0000000000e+00-3.8756844952e-50-3.6273320490e-59 C267x 8 y 140.0000000000e+00-5.5059582223e-50-3.2139298276e-59 C269x 6 y 160.0000000000e+00-7.5444511222e-50-1.9245773714e-59 C271x 4 y 180.0000000000e+00-2.5645450512e-50-7.3164726820e-60 C273x 2 y 200.0000000000e+00-1.1223809716e-51-1.6276267117e-60 C275y 220.0000000000e+009.4849406164e-52-1.3481222765e-61 C277x 22 y0.0000000000e+00-1.3714011560e-58-2.9677316243e-65 C279x 20 y 30.0000000000e+00-9.0817566213e-57-3.0362182084e-64 C281x 18 y 50.0000000000e+006.0122197882e-56-1.7716187487e-63 C283x 16 y 70.0000000000e+00-9.0875847699e-56-5.6939282856e-63 C285x 14 y 90.0000000000e+00-8.8878233379e-54-1.0669065299e-62 C287x 12 y 110.0000000000e+00-5.3555876304e-53-1.2044816487e-62 C289x 10 y 30.0000000000e+00-1.2376944466e-52-8.3223547321e-63 C291x 8 y 150.0000000000e+00-2.0814828518e-52-2.8475892176e-63 C293x 6 y 170.0000000000e+00-2.9015078128e-527.7139805307e-65 C295x 4 y 190.0000000000e+00-1.7401691373e-523.9227854548e-64 C297x 2 y 210.0000000000e+00-3.5717561820e-532.1720802320e-64 C299y 230.0000000000e+008.5710920951e-552.1703072249e-65 Coordinates of the aperture edge Table 4 to Fig. 4 Table 4 to Fig. 4 -337.98512329.122461337.95101816.078002 -337.65636135.641528337.5883769.563728 -337.09744542.150900336.9960443.061989 -336.30905248.644769336.174967-3.421929 -335.29215355.117245335.126422-9.882852 -334.04799761.562374333.852012-16.315720 -332.57808767.974158332.353654-22.715588 -330.88417374.346584330.633563-29.077624 -328.96822780.673652328.694241-35.397122 -326.83243286.949413326.538451-41.669498 -324.47916993.167998324.169201-47.890299 -321.91100999.323663321.589718-54.055207 -319.130703105.410818318.803428-60.160045 -316.141181111.424063315.813933-66.200781 -312.945545117.358218312.624987-72.173532 -309.547075123.208349309.240479-78.074565 -305.949226128.969787305.664409-83.900303 -302.155629134.638142301.900873-89.647320 -298.170101140.209318297.954045-95.312342 -293.996638145.679514293.828164-100.892245 -289.639421151.045228289.527522-106.384050 -285.102818156.303257285.056451-111.784920 -280.391379161.450687280.419314-117.092152 -275.509833166.484892275.620500-122.303175 -270.463084171.403518270.664416-127.415539 -265.256200176.204479265.555476-132.426912 -259.894400180.885937260.298104-137.335071 -254.383042185.446291254.896724-142.137896 -248.727601189.884161249.355756-146.833363 -242.933655194.198371243.679613-151.419536 -237.006856198.387931237.872697-155.894561 -230.952911202.452019231.939394-160.256660 -224.777554206.389969225.884072-164.504124 -218.486526210.201249219.711077-168.635306 -212.085546213.885450213.424730-172.648616 -205.580288217.442271207.029325-176.542516 -198.976361220.871506200.529125-180.315514 -192.279285224.173038193.928360-183.966160 -185.494477227.346824187.231230-187.493040 -178.627229230.392890180.441898-190.894776 -171.682695233.311323173.564489-194.170019 -164.665880236.102267166.603096-197.317451 -157.581628238.765910159.561770-200.335780 -150.434615241.302487152.444528-203.223739 -143.229343243.712266145.255347-205.980088 -135.970133245.995548137.998167-208.603615 -128.661129248.152658130.676887-211.093135 -121.306291250.183940123.295369-213.447491 -113.909400252.089752115.857434-215.665561 -106.474060253.870460108.366865-217.746257 -99.003705255.526432100.827405-219.688529 -91.501600257.05803193.242754-221.491372 -83.970851258.46561585.616578-223.153828 -76.414415259.74952577.952499-224.674990 -68.835103260.91009070.254105-226.054010 -61.235597261.94761462.524946-227.290099 -53.618457262.86237954.768537-228.382538 -45.986133263.65464046.988361-229.330678 -38.340980264.32462239.187872-230.133947 -30.685266264.87251831.370498-230.791852 -23.021191265.29849023.539644-231.303986 -15.350894265.60266515.698696-231.670027 -7.676474265.7851337.851027-231.889744 0.000000265.8459490.000000-231.962999 7.676474265.785133-7.851027-231.889744 15.350894265.602665-15.698696-231.670027 23.021191265.298490-23.539644-231.303986 30.685266264.872518-31.370498-230.791852 38.340980264.324622-39.187872-230.133947 45.986133263.654640-46.988361-229.330678 53.618457262.862379-54.768537-228.382538 61.235597261.947614-62.524946-227.290099 68.835103260.910090-70.254105-226.054010 76.414415259.749525-77.952499-224.674990 83.970851258.465615-85.616578-223.153828 91.501600257.058031-93.242754-221.491372 99.003705255.526432-100.827405-219.688529 106.474060253.870460-108.366865-217.746257 113.909400252.089752-115.857434-215.665561 121.306291250.183940-123.295369-213.447491 128.661129248.152658-130.676887-211.093135 135.970133245.995548-137.998167-208.603615 143.229343243.712266-145.255347-205.980088 150.434615241.302487-152.444528-203.223739 157.581628238.765910-159.561770-200.335780 164.665880236.102267-166.603096-197.317451 171.682695233.311323-173.564489-194.170019 178.627229230.392890-180.441898-190.894776 185.494477227.346824-187.231230-187.493040 192.279285224.173038-193.928360-183.966160 198.976361220.871506-200.529125-180.315514 205.580288217.442271-207.029325-176.542516 212.085546213.885450-213.424730-172.648616 218.486526210.201249-219.711077-168.635306 224.777554206.389969-225.884072-164.504124 230.952911202.452019-231.939394-160.256660 237.006856198.387931-237.872697-155.894561 242.933655194.198371-243.679613-151.419536 248.727601189.884161-249.355756-146.833363 254.383042185.446291-254.896724-142.137896 259.894400180.885937-260.298104-137.335071 265.256200176.204479-265.555476-132.426912 270.463084171.403518-270.664416-127.415539 275.509833166.484892-275.620500-122.303175 280.391379161.450687-280.419314-117.092152 285.102818156.303257-285.056451-111.784920 289.639421151.045228-289.527522-106.384050 293.996638145.679514-293.828164-100.892245 298.170101140.209318-297.954045-95.312342 302.155629134.638142-301.900873-89.647320 305.949226128.969787-305.664409-83.900303 309.547075123.208349-309.240479-78.074565 312.945545117.358218-312.624987-72.173532 316.141181111.424063-315.813933-66.200781 319.130703105.410818-318.803428-60.160045 321.91100999.323663-321.589718-54.055207 324.47916993.167998-324.169201-47.890299 326.83243286.949413-326.538451-41.669498 328.96822780.673652-328.694241-35.397122 330.88417374.346584-330.633563-29.077624 332.57808767.974158-332.353654-22.715588 334.04799761.562374-333.852012-16.315720 335.29215355.117245-335.126422-9.882852 336.30905248.644769-336.174967-3.421929 337.09744542.150900-336.9960443.061989 337.65636135.641528-337.5883769.563728 337.98512329.122461-337.95101816.078002 338.08335922.599415-338.08335922.599415 Table 5 to Fig. 4 Table 5 to Fig. 4 Numerical aperture =0.75 1 / βx =-4.20 1 / βy =-8.00 Track length = 2417 mm Object-Image Shift =4357 mm Width of the installation space = 4944 mm Total optically used mirror surface = 3.67 m 2 Linear pupil obscuration =18.7% Minimum angle on grazing incidence mirror = 69.8° Scan slot length on wafer =1.2 mm Scan-integrated wavefront RMS = 7.97 mλ Transmittance = 6.73% Light conductivity = 55.1 mm 2 Mirror with maximum diameter = M9 Maximum optical mirror diameter = 1152 mm Mirror with maximum area = M9 Fig. 5 shows a further embodiment of a projection optics or imaging optics 26, which can be used instead of the projection optics 10 in the projection exposure system 1. Components and functions corresponding to those already explained above with reference to Figs. 1 to 4 bear the same reference numerals and will not be discussed in detail again. The basic structure of the projection optics 26 corresponds to that of the projection optics 24 according to Fig. 3 . A distance between the used reflection surface of the mirror M8 and the image plane 12 is greater than 100 mm in the projection optics 26. The projection optics 26 has a high overall transmission. The maximum mirror diameter of projection optics 26 is 1150 mm. This maximum mirror diameter is the last mirror M9 in the imaging beam path of projection optics 26, which defines the image-side numerical aperture. The optical design data for the projection optics 26 are shown in the following Tables 1 to 5, which in turn correspond in terms of basic structure to Tables 1 to 5 for the embodiment according to Fig. 4. Radii of the surfaces Table 1 to Fig. 5 Table 1 to Fig. 5 M01-5345.308481130.00036602-1656.277790130.00118126 M0211556.14478814-0.000173071632.46171126-0.00122514 M03-47043.265350510.00004240-6464.155028590.00030854 M04-2223.523186620.00089947-9524.793571080.00020998 M05-1728.485606890.00036576-5695.039669500.00011101 M06-1262.655865810.000317252459.80129155-0.00016285 M07-2269.339302370.00014309-5713.856660200.00005683 M083341.27588865-0.00014654356.14762535-0.00137475 M09-859.046990760.00232816-767.337462310.00260642 Decentering (location, angle) of the surfaces Table 2 to Fig. 5 Table 2 to Fig. 5 Retikel0.0000000000.0000000000.000000000 MO10.000000000-260.7216092222366.468715230 M020.000000000-584.4529177871401.941006633 M030.000000000-1071.716520466946.749900156 M040.000000000-2544.974539849409.027132009 M050.000000000-4056.110040595302.416336414 M060.000000000-4584.073779485441.185167104 M070.000000000-5149.691035722880.717871156 M080.000000000-5546.6065604772334.632222506 Blende0.000000000-5518.9449852252271.645932577 M090.000000000-5300.4747850471774.182312218 Wafer0.000000000-5300.4748269222491.924867842 αx[°]αy[°]αz[°] Retikel0.000000000.0000000000.000000000 M01-6.1332784510.0000000000.000000000 M02237.2486329870.000000000-0.000000000 M03211.551224728-0.000000000-0.000000000 M04192.043528394-0.000000000-0.000000000 M05174.654564112-0.000000000-0.000000000 M06153.711672940-0.000000000-0.000000000 M07123.709651999-0.000000000-0.000000000 M0819.4895510500.000000000-0.000000000 Blend180.507708599-0.000000000-0.000000000 M09191.854778437-0.000000000-0.000000000 Wafer0.0000033430.000000000180.000000000 Freiformkoeffizienten der flächen Table 3a in Fig. 5 Table 3a in Fig. 5 C2y1.0217955020e-047.5782594674e-041.9496717281e-04 C7x 2 y-1.9817970405e-08-1.0546559515e-07-5.6608365958e-08 C9y 3-3.4724846611e-089.4474529108e-087.6200623601e-09 C10x 4-9.4274870260e-125.8552631689e-11-1.0531327765e-10 C12x 2 y 23.1525554379e-11-1.7174872336e-10-6.8598958494e-11 C14y 4-1.3486687791e-11-1.2814883407e-11-5.5012364187e-12 C16x 4 y6.6157183413e-142.4951831291e-13-8.3108393271e-14 C18x 2 y 34.3832893078e-146.1650984775e-131.0506710142e-13 C20y 5-5.7173265788e-14-1.5881072764e-12-7.2109287929e-16 C21x 61.3952134737e-172.7432259304e-186.7593777552e-17 C23x 4 y 27.3188992047e-17-1.2690155017e-162.2765502476e-16 C25x 2 y 4-1.5239395544e-172.7105873762e-15-1.7876358164e-16 C27y 62.4030109967e-171.2020384415e-15-7.9849038430e-18 C29x 6 y-5.5580981691e-20-2.9777119706e-191.5051848018e-19 C31x 4 y 3-1.4705833777e-19-3.8188364936e-19-3.5789244176e-19 C33x 2 y 5-2.4717273686e-199.4018478399e-182.2597784675e-19 C35y 78.1911405476e-19-2.0327047368e-17-2.3077803944e-20 C36x 8-4.2217664589e-234.2633660608e-222.3523621954e-22 C38x 6 y 2-4.0049670167e-22-7.0171964139e-22-2.4836350684e-22 C40x 4 y 4-2.3951660459e-21-1.3454084027e-206.2629518227e-22 C42x 2 y 6-3.6739644932e-216.3661156000e-20-6.3578192990e-22 C44y 8-3.6534930107e-21-1.3004825024e-191.3467416670e-22 C46x 8 y5.7662831135e-258.9232368910e-25-2.2569026279e-25 C48x 6 y 34.8179988256e-241.8476399156e-246.0068720092e-25 C50x 4 y 5-7.8920288232e-24-9.9885325345e-23-2.2896528317e-24 C52x 2 y 7-8.9084019630e-234.4693590112e-222.6503659488e-24 C54y 9-3.7409452003e-236.0292382089e-224.6037460362e-25 C55x 102.7444274975e-286.3635340358e-28-6.1922656390e-29 C57x 8 y 28.1923605013e-277.5137156943e-27-1.2047361391e-28 C59x 6 y 48.8048716386e-269.9458787025e-26-5.0812303793e-27 C61x 4 y 63.3306178393e-25-5.1301909690e-259.5317170855e-27 C63x 2 y 83.6331050635e-25-2.4251903253e-251.8818358274e-27 C65y 102.1823147478e-254.1974962732e-247.4625032814e-28 C67x 10 y-1.1067135000e-29-2.6250075964e-33-3.1860798055e-31 C69x 8 y 3-1.3712544889e-28-1.6033100195e-29-5.4489110267e-30 C71x 6 y 5-1.9834661820e-286.8600644518e-281.9238990163e-29 C73x 4 y 73.0197838372e-272.1455710589e-28-5.0287564970e-30 C75x 2 y 98.3769530523e-27-1.7064630973e-26-1.3211103154e-29 C77y 111.4358608557e-27-3.6242943055e-26-7.1598846554e-30 C78x 12-2.9207333238e-33-6.3728960271e-33-1.1277733918e-33 C80x 10 y 2-1.1104040312e-31-1.5547251491e-32-3.5637538968e-34 C82x 8 y 4-1.6307740743e-30-4.8508486055e-312.9691272738e-32 C84x 6 y 6-1.0324437829e-299.1672207713e-31-1.3067373209e-32 C86x 4 y 8-2.5959132164e-291.6452047295e-29-6.7430273552e-32 C88x 2 y 10-2.0350235350e-29-1.1888503911e-29-7.7524615964e-32 C90y 12-1.0277194404e-29-1.2835940603e-28-1.4817071470e-32 C92x 12 y1.3351964513e-34-1.5695652559e-352.3017025436e-36 C94x 10 y 32.2369569175e-333.9383082474e-352.6925704650e-35 C96x 8 y 51.0834356217e-32-1.8881534411e-33-2.1690095645e-35 C98x 6 y 7-2.8735585366e-32-2.0431529247e-32-8.2575956054e-35 C100x 4 y 9-2.9045288093e-316.4732358017e-32-9.4508261650e-35 C102x 2 y 11-4.6907620277e-315.5441679818e-311.1907969575e-34 C104y 13-4.4167634906e-321.0653979546e-30-1.1415862149e-35 C105x 142.2299370784e-381.5992272988e-383.3258478416e-39 C107x 12 y 29.9717617411e-379.5640556183e-40-1.7413990249e-39 C109x 10 y 41.7807947960e-351.3298891995e-36-3.1604224133e-38 C111x 8 y 61.5454891328e-346.2223093903e-36-1.1299219647e-37 C113x 6 y 86.4734276744e-34-7.6099129313e-35-3.8170882377e-38 C115x 4 y 101.1713553711e-33-1.5216626604e-348.2141760179e-37 C117x 2 y 127.4614196487e-346.8642198475e-342.6897305970e-37 C119y 143.4604293724e-347.1206725239e-342.1721080684e-37 C121x 14 y-1.0521935070e-395.3218644903e-41-7.9272538475e-42 C123x 12 y 3-2.1787376452e-385.8985064908e-41-4.4518475351e-41 C125x 10 y 5-1.7540238317e-37-1.0264559166e-40-7.8239987469e-41 C127x 8 y 7-1.8529140380e-379.7198827039e-38-1.8060829601e-40 C129x 6 y 93.5536244262e-362.0549114042e-371.0868339451e-39 C131x 4 y 111.4657871010e-35-1.4816556545e-36-5.9758147612e-41 C133x 2 y 131.6573235789e-35-1.0339977276e-355.9693291709e-40 C135y 158.7104896066e-37-2.5136854823e-351.9265499146e-40 C136x 16-1.1488855071e-43-7.1940938578e-45-1.6299756002e-46 C138x 14 y 2-5.8908111731e-424.3000213646e-441.7550426087e-44 C140x 12 y 4-1.1964330692e-40-1.2415943585e-42-7.0969726257e-44 C142x 10 y 6-1.2839203608e-39-2.0783335008e-41-1.3866583506e-43 C144x 8 y 8-7.5226091131e-391.0514114904e-409.6280413033e-43 C146x 6 y 10-2.2849374738e-385.8645708505e-40-1.4623580047e-42 C148x 4 y 12-3.2150634310e-382.1809331691e-39-1.0569615310e-42 C150x 2 y 14-1.8349268442e-38-1.1929916874e-38-1.1977620316e-42 C152y 16-8.7617791255e-391.3836827022e-38-5.8767832256e-43 C154x 16 y5.4356068350e-45-7.6456952518e-478.5843639475e-48 C156x 14 y 31.3084321691e-43-5.6330915194e-463.9600501486e-47 C158x 12 y 51.4482543362e-427.1426880689e-45-2.2817533130e-46 C160x 10 y 75.3791960518e-42-1.0524725367e-437.2515659406e-46 C162x 8 y 9-1.4497654525e-41-1.0230643436e-42-7.8704170735e-46 C164x 6 y 11-1.6353999665e-40-1.3891227485e-42-1.3067027595e-45 C166x 4 y 13-4.2863688166e-402.1093361012e-41-1.9755548350e-45 C168x 2 y 15-3.7328833643e-406.2871971591e-41-2.3686152642e-45 C170y 17-1.3444626767e-412.7631310600e-40-8.4528389493e-46 C171x 183.8322315003e-490.0000000000e+000.0000000000e+00 C173x 16 y 22.1949904302e-470.0000000000e+000.0000000000e+00 C175x 14 y 44.9005260583e-460.0000000000e+000.0000000000e+00 C177x 12 y 66.1137712340e-450.0000000000e+000.0000000000e+00 C179x 10 y 84.5379309052e-440.0000000000e+000.0000000000e+00 C181x 8 y 101.9523574783e-430.0000000000e+000.0000000000e+00 C183x 6 y 124.5884978674e-430.0000000000e+000.0000000000e+00 C185x 4 y 145.3202550872e-430.0000000000e+000.0000000000e+00 C187x 2 y 162.9128959170e-430.0000000000e+000.0000000000e+00 C189y 181.4995356730e-430.0000000000e+000.0000000000e+00 C191x 18-1.7774191922e-500.0000000000e+000.0000000000e+00 C193x 16 y 3-4.7631265030e-490.0000000000e+000.0000000000e+00 C195x 14 y 5-6.6204874851e-480.0000000000e+000.0000000000e+00 C197x 12 y 7-3.9979269008e-470.0000000000e+000.0000000000e+00 C199x 10 y 9-3.3165193780e-470.0000000000e+000.0000000000e+00 C201x 8 y 117.5836729036e-460.0000000000e+000.0000000000e+00 C203x 6 y 133.7959014762e-450.0000000000e+000.0000000000e+00 C205x 4 y 157.3232449953e-450.0000000000e+000.0000000000e+00 C207x 2 y 175.2191413716e-450.0000000000e+000.0000000000e+00 C209y 191.9882477003e-460.0000000000e+000.0000000000e+00 C210x 20-7.4676443319e-550.0000000000e+000.0000000000e+00 C212x 18 y 2-4.6748457311e-530.0000000000e+000.0000000000e+00 C214x 16 y 4-1.1278455291e-510.0000000000e+000.0000000000e+00 C216x 14 y 6-1.5734402758e-500.0000000000e+000.0000000000e+00 C218x 12 y 8-1.3898361330e-490.0000000000e+000.0000000000e+00 C220x 10 y 10-7.6829018707e-490.0000000000e+000.0000000000e+00 C222x 8 y 12-2.5712133691e-480.0000000000e+000.0000000000e+00 C224x 6 y 14-4.8980779851e-480.0000000000e+000.0000000000e+00 C226x 4 y 16-4.8969448199e-480.0000000000e+000.0000000000e+00 C228x 2 y 18-2.6900202279e-480.0000000000e+000.0000000000e+00 C230y 20-1.4776240245e-480.0000000000e+000.0000000000e+00 C232x 20 y3.3361842981e-560.0000000000e+000.0000000000e+00 C234x 18 y 39.6505344415e-550.0000000000e+000.0000000000e+00 C236x 16 y 51.5956185008e-530.0000000000e+000.0000000000e+00 C238x 14 y 71.3121720573e-520.0000000000e+000.0000000000e+00 C240x 12 y 94.0028474729e-520.0000000000e+000.0000000000e+00 C242x 10 y 11-1.1535710648e-510.0000000000e+000.0000000000e+00 C244x 8 y 13-1.3364801298e-500.0000000000e+000.0000000000e+00 C246x 6 y 15-4.4386509264e-500.0000000000e+000.0000000000e+00 C248x 4 y 17-6.7995008192e-500.0000000000e+000.0000000000e+00 C250x 2 y 19-4.1428895258e-500.0000000000e+000.0000000000e+00 C252y 21-2.2136436116e-510.0000000000e+000.0000000000e+00 C253x 226.4324198091e-610.0000000000e+000.0000000000e+00 C255x 20 y 24.3337458247e-590.0000000000e+000.0000000000e+00 C257x 18 y 41.1204719335e-570.0000000000e+000.0000000000e+00 C259x 16 y 61.7064703900e-560.0000000000e+000.0000000000e+00 C261x 14 y 81.7188189236e-550.0000000000e+000.0000000000e+00 C263x 12 y 101. 1487609583e-540.0000000000e+000.0000000000e+00 C265x 10 y 124.9747780082e-540.0000000000e+000.0000000000e+00 C267x 8 y 141.3513034080e-530.0000000000e+000.0000000000e+00 C269x 6 y 162.1609599871e-530.0000000000e+000.0000000000e+00 C271x 4 y 181.9315537175e-530.0000000000e+000.0000000000e+00 C273x 2 y 201.0886710850e-530.0000000000e+000.0000000000e+00 C275y 226.1640252542e-540.0000000000e+000.0000000000e+00 C277x 22 y-2.7386919505e-620.0000000000e+000.0000000000e+00 C279x 20 y 3-8.3607564373e-610.0000000000e+000.0000000000e+00 C281x 18 y 5-1.5839473937e-590.0000000000e+000.0000000000e+00 C283x 16 y 7-1.6391577221e-580.0000000000e+000.0000000000e+00 C285x 14 y 9-8.0030089863e-580.0000000000e+000.0000000000e+00 C287x 12 y 11-4.7652453001e-580.0000000000e+000.0000000000e+00 C289x 10 y 131.4995441731e-560.0000000000e+000.0000000000e+00 C291x 8 y 158.2888054314e-560.0000000000e+000.0000000000e+00 C293x 6 y 172.0821753828e-550.0000000000e+000.0000000000e+00 C295x 4 y 192.6544057789e-550.0000000000e+000.0000000000e+00 C297x 2 y 211.4296564540e-550.0000000000e+000.0000000000e+00 C299y 231.0904879827e-560.0000000000e+000.0000000000e+00 Tabelle 3a zu Fig. 5 Tabelle 3a zu Fig. 5 C2y1.9060940925e-054.6467008227e-042.5425189408e-03 C7x 2 y-3.2603252167e-08-5.4996051458e-08-1.7094778431e-07 C9y 34.7598742958e-09-4.4678052527e-082.5045241070e-08 C10x 4-3.7233744410e-111.6138928295e-127.2024952246e-12 C12x 2 y 29.9729053646e-12-2.9553971088e-11-1.3381464667e-10 C14y 4-5.0125579916e-12-6.0784864571e-112.0670655532e-10 C16x 4 y2.3736273322e-14-2.2831736605e-168.0994765148e-14 C18x 2 y 3-1.3385101323e-14-5.8369787545e-14-7.7087175508e-13 C20y 51.5513857083e-15-7.2677119146e-146.5766453613e-13 C21x 64.8431201782e-173.7015755447e-18-2.1567590359e-17 C23x 4 y 2-2.4777116680e-17-2.5193040863e-171.1218336007e-17 C25x 2 y 41.7214167265e-17-8.5531562749e-171.8950368641e-15 C27y 6-6.6625398035e-19-1.1837229437e-16-2.5797517941e-15 C29x 6 y-1.7508955646e-20-2.0851215399e-20-1.2853536716e-20 C31x 4 y 34.0043768540e-20-5.3342467387e-201.1163167033e-18 C33x 2 y 5-3.2793367941e-20-1.7531776748e-19-9.8771084375e-18 C35y 7-7.4843915881e-22-2.7350452254e-19-1.4272990525e-17 C36x 85.9021795458e-24-1.8966157949e-233.7353865479e-23 C38x 6 y 24.1407038908e-23-2.8412845765e-23-4.7134847967e-22 C40x 4 y 4-1.5731137038e-22-1.6555326286e-227.1691650249e-22 C42x 2 y 6-3.3866767674e-23-3.2705635036e-221.4647226204e-19 C44y 82.9156331174e-23-7.4685373060e-26-5.3850883044e-20 C46x 8 y1.3763234757e-264.2547787224e-261.3722581126e-25 C48x 6 y-2.796922573 1e-25-1.5421688440e-252.9659196589e-24 C50x 4 y 5-4.6808056470e-26-5.0152310604e-255.7019301428e-24 C52x 2 y 71.1140517110e-258.7797952270e-25-8.5737764337e-22 C54y 93.2688031986e-262.5180864840e-241.3480805718e-20 C55x 10-1.6538110353e-281.0884912117e-287.1098587444e-29 C57x 8 y 2-1.7880915173e-28-1.2990863914e-291.6951019566e-28 C59x 6 y 42.5535359309e-28-3.4358551147e-28-3.8174727009e-26 C61x 4 y 65.1546416223e-284.2377587380e-28-9.0502999471e-25 C63x 2 y 83.9830095411e-28-4.1830071170e-27-5.6946361462e-24 C65y 10-2.0222071260e-28-1.7741743789e-26-1.3564194382e-22 C67x 10 y3.1752218586e-312.4511978871e-311.5654010375e-30 C69x 8 y 36.9559578857e-316.4425772847e-311.0551779622e-29 C71x 6 y 51.0198652360e-303.4765566764e-301.3964128803e-28 C73x 4 y 71.5594549960e-301.4833877123e-303.0505471590e-27 C75x 2 y 9-3.8589543235e-31-9.9861656946e-295.0769975454e-26 C77y 11-1.7366364839e-31-1.0630650697e-28-8.9707944529e-25 C78x 126.3541922711e-34-8.6288781223e-35-6.6080171165e-34 C80x 10 y 27.4328258481e-344.0965858069e-346.9366495114e-33 C82x 8 y 45.0246137652e-345.5514330640e-331.6001157643e-31 C84x 6 y 61.5820971613e-331.8902449861e-323.5713356550e-30 C86x 4 y 8-2.1432475827e-33-8.7425424774e-331.2303648891e-28 C88x 2 y 10-1.2073280230e-338.2850812133e-338.4218274875e-28 C90y 121.1838196826e-332.0498268388e-311.4193349755e-26 C92x 12 y-1.2013982951e-37-9.7174238815e-37-9.1998012901e-36 C94x 10 y 3-6.6688133779e-37-1.2137498951e-36-1.1626427333e-34 C96x 8 y 5-2.4377753249e-371.1458272183e-35-4.9936549329e-34 C98x 6 y 7-6.7239891564e-36-2.3513996064e-35-1.3567930347e-32 C100x 4 y 9-8.4412885736e-362.4430787314e-34-5.7592793873e-31 C102x 2 y 111.4790040695e-362.8017917007e-33-1.6549035194e-29 C104y 132.3639758729e-361.7482122217e-338.0712667722e-29 C105x 14-9.0097298979e-40-1.6231526243e-402.4840767349e-39 C107x 12 y 2-1.9172940583e-39-2.3774532247e-39-8.0878206589e-39 C109x 10 y 4-1.8406906133e-39-1.4645673584e-38-4.0348943641e-37 C111x 8 y 6-8.4048846649e-39-7.9781385266e-38-1.4832113793e-35 C113x 6 y 8-1.3821937147e-38-2.2589629838e-37-5.5823736983e-34 C115x 4 y 10-1.2061260712e-398.0514032828e-37-1.3076587678e-32 C117x 2 y 123.3730031169e-394.7116257702e-361.6942447612e-31 C119y 144.3983312905e-405.6502157622e-37-1.8549028592e-30 C121x 14 y-1.1556861647e-421.4668003060e-422.6026062511e-41 C123x 12 y 3-1.8688640000e-42-9.9445779542e-434.3068388430e-40 C125x 10 y 5-5.5293524594e-42-7.3686026037e-418.7021993889e-40 C127x 8 y 7-9.9639576569e-42-3.3393187408e-401.8509309012e-37 C129x 6 y 92.8786652881e-42-4.2321181454e-40-5.2025102799e-37 C131x 4 y 111.5795209466e-41-5.6884138608e-391.9465976408e-34 C133x 2 y 13-1.1075479606e-42-3.0234597649e-38-1.4177149904e-33 C135y 15-2.8569926199e-42-1.1496554290e-388.7605316348e-33 C136x 164.9037017520e-462.8998395960e-46-2.9770577570e-45 C138x 14 y 28.3832611383e-464.715098203 1e-45-3.3152647154e-45 C140x 12 y 4-8.0304103090e-461.8927785361e-445.3460875390e-43 C142x 10 y 6-4.0690109811e-45-2.3019637674e-432.0257974186e-41 C144x 8 y 81.4259802414e-452.4405070042e-441.2202413498e-39 C146x 6 y 102.5189435323e-44-2.0243796105e-425.2084020647e-38 C148x 4 y 121.3284197535e-44-2.9584266541e-41-1.1495992546e-36 C150x 2 y 14-2.1344149059e-45-1.1255547644e-407.7398723203e-36 C152y 16-3.6702203827e-45-2.4331855892e-41-7.1937749172e-36 C154x 16 y1.1026514113e-48-6.1301150429e-49-2.8325721203e-47 C156x 14 y 31.2978684512e-481.3367140389e-47-6.1350465988e-46 C158x 12 y 54.6303590316e-49-2.2221146525e-48-1.6637234126e-45 C160x 10 y 7-2.7398590838e-48-1.7591918289e-46-3.3837826548e-43 C162x 8 y 91.0603093682e-477.3219213833e-46-9.7361705839e-42 C164x 6 y 111.0205934504e-47-4.5592762838e-45-1.9266239558e-40 C166x 4 y 134.5750185644e-48-3.6666128226e-442.6525575053e-39 C168x 2 y 15-1.7747089928e-49-1.0741394954e-43-1.7813738799e-38 C170y 17-1.6406680687e-48-1.5820422830e-44-2.7978930074e-38 Tabelle 3c zu Fig. 5 Tabelle 3c zu Fig. 5 C2y1.5067235978e-031.0121508409e-022.0370223685e-03 C7x 2 y-4.8278815482e-08-1.7064577846e-06-1.8652369329e-08 C9y 35.9528419998e-08-3.8917077804e-079.2901327587e-09 C10x 4-3.1091290797e-111.4354315864e-09-2.2290485357e-11 C12x 2 y 2-1.0549389196e-103.7184282066e-09-6.6932221514e-11 C14y 4-5.7898971551e-111.6639672722e-09-2.2427714492e-11 C16x 4 y-1.0821351100e-13-2.6125520346e-12-2.9518068685e-14 C18x 2 y 38.9239200738e-14-1.1435605245e-11-2.4482979595e-14 C20y 51. 1978180374e-131.3878575657e-111.4726044069e-14 C21x 61.1069705622e-167.5284711181e-16-6.9546714654e-17 C23x 4 y 2-3.7580997820e-161.6858906960e-14-1.7022658551e-16 C25x 2 y 4-3.7681002078e-161.8841116063e-14-1.7238010691e-16 C27y 6-1.6886186843e-164.4725162980e-14-4.5044842204e-17 C29x 6 y6.0058860535e-19-1.9788400983e-17-1.6589467201e-20 C31x 4 y 32.6918392677e-19-1.3900584523e-16-9.9256095143e-20 C33x 2 y 55.4854174435e-19-2.6380794421e-16-3.6811977074e-20 C35y 73.0036980272e-199.7230721357e-171.6109636260e-20 C36x 8-3.0778823153e-221.9613473231e-20-9.1967869461e-23 C38x 6 y 24.4956332328e-223.3661920750e-19-3.8675391375e-22 C40x 4 y 4-1.1677385765e-211.2981995582e-18-6.1344743667e-22 C42x 2 y 6-9.3116854378e-224.4178853183e-19-3.9931262597e-22 C44y 8-4.2196890205e-221.1633405620e-18-7.1361021406e-23 C46x 8 y-1.9520771907e-24-1.7825012828e-227.4590424118e-26 C48x 6 y 32.0218120153e-242.0893388839e-223.6584467598e-25 C50x 4 y 57.6365313547e-254.4822858313e-216.5906705575e-25 C52x 2 y 72.0155468863e-24-1.4151678335e-204.6056193811e-25 C54y 99.2426382813e-251.0779036906e-218.9825228753e-26 C55x 10-2.7049939586e-27-5.3764702687e-26-1.5313771087e-28 C57x 8 y 2-8.5303185764e-27-4.4288047856e-24-7.7520094408e-28 C59x 6 y 44.0520921299e-27-5.1375524937e-23-7.6962326717e-28 C61x 4 y 6-1.0342008348e-26-1.2018619470e-22-3.2611950742e-28 C63x 2 y 8-9.6390431531e-27-1.5279932963e-22-3.4407069091e-28 C65y 10-2.6644281117e-27-1.6650218259e-22-1.5426143644e-28 C67x 10 y4.1656104566e-30-2.2542864844e-27-1.5421947751e-30 C69x 8 y 31.2952132949e-30-6.4309360734e-26-8.7178427539e-30 C71x 6 y 55.2610673105e-29-4.5272975934e-25-1.9542383721e-29 C73x 4 y 71.5568185549e-293.0568911454e-25-1.8434300613e-29 C75x 2 y 96.9222449483e-303.7965745503e-24-7.6354708197e-30 C77y 115.2508044423e-307.5148174754e-25-5.8388115829e-31 C78x 122.9352273224e-324.4761939456e-302.7504860531e-34 C80x 10 y 23.1224922536e-321.7719114056e-288.8489176063e-34 C82x 8 y 4-1.2282280298e-313.0742023021e-27-7.7187174363e-33 C84x 6 y 66.2390280114e-321.6241942268e-26-2.4657046096e-32 C86x 4 y 81.6567771074e-313.0374893222e-26-2.2468651675e-32 C88x 2 y 106.7270469882e-321.9062685198e-26-5.4747433574e-33 C90y 125.5787651906e-332.2566801163e-261.9970931608e-34 C92x 12 y1.7348060890e-358.6693713054e-321.1017525350e-35 C94x 10 y 3-2.6366544282e-341.5615884257e-307.9927980214e-35 C96x 8 y 5-1.2207940220e-331.4259209585e-292.3981919464e-34 C98x 6 y 7-9.3974748282e-342.4161770833e-293.3509827999e-34 C100x 4 y 9-1.8411539987e-34-1.6385198146e-282.3615066273e-34 C102x 2 y 11-9.7222096667e-35-5.6341243616e-288.0158320228e-35 C104y 13-3.5870011445e-35-8.2203091713e-295.0782947011e-36 C105x 14-1.5426026352e-37-7.7297348461e-35-3.9395069640e-39 C107x 12 y 23.5007315335e-39-3.7379360949e-33-2.3710498651e-38 C109x 10 y 41.0558682151e-36-9.8015086869e-32-1.3889321093e-38 C111x 8 y 66.1082628186e-37-8.5240470587e-311.1708038179e-37 C113x 6 y 8-1.1205837622e-36-2.9482855794e-302.4846033343e-37 C115x 4 y 10-1.4890232920e-36-3.8533621955e-301.5658032913e-37 C117x 2 y 12-4.9830357620e-37-1.5074954766e-302.2870870771e-38 C119y 14-2.7213260601e-38-1.7329629497e-30-3.9921776276e-39 C121x 14 y-8.1476974499e-41-2.1150870554e-36-5.8674151561e-41 C123x 12 y 32.0456504641e-39-2.6199415738e-35-4.9595739469e-40 C125x 10 y 58.9333933470e-39-1.9116480721e-34-1.8236657103e-39 C127x 8 y 71.3444054468e-38-1.1146825055e-34-3.3908689103e-39 C129x 6 y 98.2466098711e-394.6539945763e-33-3.4321018173e-39 C131x 4 y 112.7095390109e-392.4986360769e-32-1.9187636131e-39 C133x 2 y 131.5069384831e-395.3055668081e-32-5.3192575005e-40 C135y 153.5637507742e-403.7845435724e-33-2.6145249354e-41 C136x 163.5158023232e-439.3236103276e-401.6515385884e-44 C138x 14 y 2-1.7450321469e-435.6739877530e-381.2323497854e-43 C140x 12 y 4-2.6126752517e-421.9625321264e-362.22019093 1 1e-43 C142x 10 y 6-6.2462285576e-422.3359621760e-35-2.8548992690e-43 C144x 8 y 8-7.9940766754e-421.2221370578e-34-1.4995593212e-42 C146x 6 y 102.1533873281e-422.9353192718e-34-1.8687263302e-42 C148x 4 y 121.3730283125e-422.8555786688e-34-8.6809180339e-43 C150x 2 y 14-1.0684879253e-421.1686355196e-34-1.0274843283e-43 C152y 16-6.7746188483e-437.4734025810e-351.8617648225e-44 C154x 16 y-1.9828463282e-462.8469424824e-412.0451303321e-46 C156x 14 y 3-5.5981475188e-451.6695454238e-401.9469647070e-45 C158x 12 y 5-1.8909213651e-44-1.5943282827e-398.4288373877e-45 C160x 10 y 7-5.0373860919e-44-3.9220636797e-381.9588163308e-44 C162x 8 y 9-6.3521773551e-44-2.6803832743e-372.6327904030e-44 C164x 6 y 11-2.0961108882e-44-9.1013827466e-372.1022781206e-44 C166x 4 y 13-3.5163110953e-45-2.0284220614e-369.7656417454e-45 C168x 2 y 15-2.2243641826e-46-3.0171727684e-362.2682342903e-45 C170y 174.3280628309e-46-9.9206814802e-388.9746286202e-47 C171x 180.0000000000e+00-6.2930814489e-45-4.8992501416e-50 C173x 16 y 20.0000000000e+00-4.9887587958e-43-4.3915214465e-49 C175x 14 y 40.0000000000e+00-2.3029303330e-41-1.3344327557e-48 C177x 12 y 60.0000000000e+00-3.5594705340e-40-1.1267215587e-48 C179x 10 y 80.0000000000e+00-2.4965121543e-392.7520332958e-48 C181x 8 y 100.0000000000e+00-8.9561075702e-397.4752222562e-48 C183x 6 y 120.0000000000e+00-1.6171561720e-386.8170018548e-48 C185x 4 y 140.0000000000e+00-1.2994326425e-382.4380074969e-48 C187x 2 y 160.0000000000e+00-7.7400256939e-391.7795048959e-49 C189y 180.0000000000e+00-1.7600166019e-39-6.3719831195e-50 C191x 18 y0.0000000000e+00-2.5992904744e-46-4.5859645116e-52 C193x 16 y 30.0000000000e+003.4573508913e-46-4.8164629695e-51 C195x 14 y 50.0000000000e+007.9241980785e-44-2.3731827253e-50 C197x 12 y 70.0000000000e+001.2287647161e-42-6.5678491373e-50 C199x 10 y 90.0000000000e+008.4795744630e-42-1.1022032459e-49 C201x 8 y 110.0000000000e+003.0809445970e-41-1.1597625678e-49 C203x 6 y 130.0000000000e+006.3569815748e-41-7.6632896118e-50 C205x 4 y 150.0000000000e+008.9396802166e-41-3.0328621291e-50 C207x 2 y 170.0000000000e+009.4695568572e-41-5.9896666651e-51 C209y 190.0000000000e+003.2308810889e-42-1.8932767516e-52 C210x 200.0000000000e+002.1671508129e-507.8323225982e-56 C212x 18 y 20.0000000000e+002.2975335032e-488.0853469710e-55 C214x 16 y 40.0000000000e+001.4580063404e-463.2262437347e-54 C216x 14 y 60.0000000000e+002.8639017455e-455.8827375916e-54 C218x 12 y 80.0000000000e+002.5445177236e-442.1266865448e-54 C220x 10 y 100.0000000000e+001.2095853772e-43-1.0077709971e-53 C222x 8 y 120.0000000000e+003.2381344647e-43-1.8240558216e-53 C224x 6 y 140.0000000000e+004.7021219181e-43-1.2904497171e-53 C226x 4 y 160.0000000000e+003.4984770474e-43-3.5811377233e-54 C228x 2 y 180.0000000000e+003.1356586790e-43-7.4293549944e-56 C230y 200.0000000000e+003.2943592724e-441.1790304250e-55 C232x 20 y0.0000000000e+001.4414031700e-515.9409911706e-58 C234x 20 y0.0000000000e+00-1.0643381854e-506.7947991979e-57 C236x 16 y 50.0000000000e+00-8.9204299408e-493.7254847103e-56 C238x 14 y 70.0000000000e+00-1.4978917696e-471.1880266395e-55 C240x 12 y 90.0000000000e+00-1.1841257102e-462.3834820144e-55 C242x 10 y 110.0000000000e+00-5.2557944916e-463.1239808026e-55 C244x 8 y 130.0000000000e+00-1.3509419513e-452.7066471696e-55 C246x 6 y 150.0000000000e+00-2.0112465690e-451.5266584003e-55 C248x 4 y 170.0000000000e+00-1.9405075818e-455.2437648137e-56 C250x 2 y 190.0000000000e+00-1.2259965970e-458.9467218336e-57 C252y 210.0000000000e+00-5.7328262724e-472.2697509879e-58 C253x 220.0000000000e+004.5015323763e-58-6.0560676282e-62 C255x 20 y 20.0000000000e+00-2.4199860585e-54-7.0533923659e-61 C257x 18 y 40.0000000000e+00-3.5458011772e-52-3.4666159353e-60 C259x 16 y 60.0000000000e+00-9.2526560914e-51-9.2029229805e-60 C261x 14 y 80.0000000000e+00-1.0279654878e-49-1.3148362910e-59 C263x 12 y 100.0000000000e+00-6.1209672949e-49-7.2696240632e-60 C265x 10 y 120.0000000000e+00-2.1608733468e-485.7969467865e-60 C267x 8 y 140.0000000000e+00-4.5864821084e-481.1878437505e-59 C269x 6 y 160.0000000000e+00-5.6893963826e-486.9452241910e-60 C271x 4 y 180.0000000000e+00-4.3582604738e-481.0448712686e-60 C273x 2 y 200.0000000000e+00-5.4321276683e-48-3.2562600201e-61 C275y 220.0000000000e+00-6.2130713063e-49-1.1189874791e-61 C277x 22 y0.0000000000e+00-4.3081190619e-57-3.4608506543e-64 C279x 20 y 30.0000000000e+001.8640482630e-56-4.2637434630e-63 C281x 18 y 50.0000000000e+003.1715045989e-54-2.5501376380e-62 C283x 16 y 70.0000000000e+006.5122094037e-53-9.1202623313e-62 C285x 14 y 90.0000000000e+006.0831985979e-52-2.1135190718e-61 C287x 12 y 110.0000000000e+003.2503601602e-51-3.3056384734e-61 C289x 10 y 130.0000000000e+001.0614857134e-50-3.5494088311e-61 C291x 8 y 150.0000000000e+002.0982404919e-50-2.6119584123e-61 C293x 6 y 170.0000000000e+002.3617274562e-50-1.2815064075e-61 C295x 4 y 190.0000000000e+001.457087073 1e-50-3.8628330641e-62 C297x 2 y 210.0000000000e+00-2.5190337058e-51-5.7444098361e-63 C299y 230.0000000000e+00-1.0049849611e-51-1. 1270259404e-64 Coordinates of the aperture edge Table 4 to Fig. 5 Table 4 to Fig. 5 -335.832321-55.944109336.173870-68.691330 -335.338633-49.555984336.020660-75.040876 -334.630589-43.164458335.650972-81.367957 -333.709018-36.774142335.064634-87.667748 -332.574854-30.389557334.261639-93.935443 -331.229131-24.015125333.242166-100.166277 -329.672986-17.655155332.006593-106.355550 -327.907660-11.313844330.555507-112.498647 -325.934503-4.995268328.889716-118.591059 -323.7549811.296619327.010259-124.628400 -321.3706887.557987324.918410-130.606424 -318.78335513.785130322.615682-136.521035 -315.99486519.974466320.103828-142.368300 -313.00726426.122536317.384838-148.144457 -309.82277832.226005314.460934-153.845918 -306.44382438.281650311.334562-159.469274 -302.87302444.286363308.008386-165.011295 -299.11321750.237141304.485270-170.468930 -295.16746956.131077300.768272-175.839298 -291.03907961.965351296.860628-181.119694 -286.73158567.737218292.765739-186.307572 -282.24876373.443995288.487156-191.400547 -277.59462879.083045284.028570-196.396384 -272.77342584.651764279.393794-201.292991 -267.78962490.147567274.586757-206.088410 -262.64790395.567867269.611488-210.780811 -257.353137100.910064264.472112-215.368483 -251.910378106.171526259.172833-219.849828 -246.324831111.349574253.717936-224.223349 -240.601837116.441469248.111771-228.487648 -234.746843121.444393242.358753-232.641414 -228.765376126.355442236.463352-236.683421 -222.663017131.171604230.430089-240.612515 -216.445374135.889755224.263530-244.427614 -210.118049140.506647217.968280-248.127696 -203.686618145.018900211.548978-251.711797 -197.156600149.423001205.010290-255.179003 -190.533437153.715302198.356900-258.528444 -183.822469157.892026191.593508-261.759293 -177.028918161.949276184.724819-264.870755 -170.157869165.883046177.755537-267.862070 -163.214258169.689247170.690355-270.732501 -156.202864173.363719163.533950-273.481337 -149.128295176.902266156.290975-276.107887 -141.994988180.300676148.966053-278.611478 -134.807200183.554756141.563765-280.991455 -127.569016186.660357134.088650-283.247176 -120.284338189.613402126.545199-285.378014 -112.956898192.409912118.937846-287.383356 -105.590257195.046032111.270971-289.262606 -98.187810197.518051103.548892-291.015183 -90.752798199.82242095.775869-292.640524 -83.288309201.95577387.956098-294.138089 -75.797295203.91494080.093717-295.507358 -68.282576205.69696172.192807-296.747843 -60.746857207.29910464.257393-297.859084 -53.192734208.71887556.291446-298.840656 -45.622709209.95403248.298893-299.692174 -38.039204211.00260140.283616-300.413294 -30.444570211.86288432.249461-301.003720 -22.841100212.53347424.200243-301.463203 -15.231042213.01326516.139749-301.791547 -7.616612213.3014618.071749-301.988610 0.000000213.3975800.000000-302.054308 7.616612213.301461-8.071749-301.988610 15.231042213.013265-16.139749-301.791547 22.841100212.533474-24.200243-301.463203 30.444570211.862884-32.249461-301.003720 38.039204211.002601-40.283616-300.413294 45.622709209.954032-48.298893-299.692174 53.192734208.718875-56.291446-298.840656 60.746857207.299104-64.257393-297.859084 68.282576205.696961-72.192807-296.747843 75.797295203.914940-80.093717-295.507358 83.288309201.955773-87.956098-294.138089 90.752798199.822420-95.775869-292.640524 98.187810197.518051-103.548892-291.015183 105.590257195.046032-111.270971-289.262606 112.956898192.409912-118.937846-287.383356 120.284338189.613402-126.545199-285.378014 127.569016186.660357-134.088650-283.247176 134.807200183.554756-141.563765-280.991455 141.994988180.300676-148.966053-278.611478 149.128295176.902266-156.290975-276.107887 156.202864173.363719-163.533950-273.481337 163.214258169.689247-170.690355-270.732501 170.157869165.883046-177.755537-267.862070 177.028918161.949276-184.724819-264.870755 183.822469157.892026-191.593508-261.759293 190.533437153.715302-198.356900-258.528444 197.156600149.423001-205.010290-255.179003 203.686618145.018900-211.548978-251.711797 210.118049140.506647-217.968280-248.127696 216.445374135.889755-224.263530-244.427614 222.663017131.171604-230.430089-240.612515 228.765376126.355442-236.463352-236.683421 234.746843121.444393-242.358753-232.641414 240.601837116.441469-248.111771-228.487648 246.324831111.349574-253.717936-224.223349 251.910378106.171526-259.172833-219.849828 257.353137100.910064-264.472112-215.368483 262.64790395.567867-269.611488-210.780811 267.78962490.147567-274.586757-206.088410 272.77342584.651764-279.393794-201.292991 277.59462879.083045-284.028570-196.396384 282.24876373.443995-288.487156-191.400547 286.73158567.737218-292.765739-186.307572 291.03907961.965351-296.860628-181.119694 295.16746956.131077-300.768272-175.839298 299.11321750.237141-304.485270-170.468930 302.87302444.286363-308.008386-165.011295 306.44382438.281650-311.334562-159.469274 309.82277832.226005-314.460934-153.845918 313.00726426.122536-317.384838-148.144457 315.99486519.974466-320.103828-142.368300 318.78335513.785130-322.615682-136.521035 321.3706887.557987-324.918410-130.606424 323.7549811.296619-327.010259-124.628400 325.934503-4.995268-328.889716-118.591059 327.907660-11.313844-330.555507-112.498647 329.672986-17.655155-332.006593-106.355550 331.229131-24.015125-333.242166-100.166277 332.574854-30.389557-334.261639-93.935443 333.709018-36.774142-335.064634-87.667748 334.630589-43.164458-335.650972-81.367957 335.338633-49.555984-336.020660-75.040876 335.832321-55.944109-336.173870-68.691330 336.110933-62.324142-336.110933-62.324142 Table 5 to Fig. 5 Table 5 to Fig. 5 Numerical aperture = 0.75 1 / βx =-4.20 1 / βy =-8.00 Track length = 2492 mm Object-Image Shift = 5300 mm Width of the installation space = 5907 mm Total optically used mirror surface = 3.84 m 2 Linear pupil obscuration =28.9% Minimum angle on grazing incidence mirror = 66.4° Scan slot length on wafer =1.2 mm Scan-integrated wavefront RMS = 10.58 mλ Transmittance=7.03% Light conductivity=55.1 mm 2 Mirror with maximum diameter =M4 Maximum optical mirror diameter = 1338 mm Mirror with maximum area =M9 Fig. 6 shows a further embodiment of a projection optics or imaging optics 27, which can be used instead of the projection optics 10 in the projection exposure system 1. Components and functions corresponding to those already explained above with reference to Figs. 1 to 5 bear the same reference numerals and will not be discussed in detail again. The projection optics 27 has a total of eleven mirrors M1 to M11 in the imaging beam path between the object field 5 and the image field 11. The mirrors M1, M10, and M11 are designed as normal incidence mirrors (NI mirrors). The mirrors M2 to M9 are designed as grazing incidence mirrors (GI mirrors) of the illumination light 16. The projection optics 27 has exactly eight grazing incidence mirrors. Mirrors M2 to M8, i.e. seven of the eight GI mirrors of the projection optics 27, reflect the imaging light 16 in such a way that the angles of reflection of the individual rays on the respective mirrors M2 to M8 add up, thus reinforcing their deflection effect. The subsequent GI mirror M9 is a so-called counter mirror and reflects the imaging light 16 in such a way that a deflection effect is created that counteracts the deflection effect of mirrors M2 to M8, thus having a subtractive effect on the deflection effect of the GI mirrors M2 to M8. According to the rules for the surrounding effect of the mirrors, which are mentioned in connection with the projection optics designs of DE 10 2019 219 209 A1, the projection optics 27 has the following sequence of deflecting effects for mirrors M1 to M11: LRRRRRRRLOR. A first intermediate image plane of the projection optics 27 according to Fig. 6 lies in the region of a reflection at mirror M5. A further intermediate image plane of the projection optics 27 lies in the region of a reflection at mirror M7. The projection optics 27 have good aberration correction. The RMS value for the scan-integrated wavefront error is less than 10 mλ, less than 8 mλ, and especially less than 6 mλ, and for the projection optics 27, it has a value of 5.13 mλ. The scan-integrated distortion of the projection optics 27 is a maximum of 0.03 nm and changes by a maximum of 0.04 nm over the scan, i.e., across the y-coordinate in image field 13. The distance between the object plane 6 and the image plane 12 in the projection optics 27 is less than 2300 mm and amounts to 2272 mm. The extension of the used reflection surfaces of the mirrors M1 to M10 perpendicular to the meridional plane, i.e. in the x-direction, is less than 1000 mm for all these mirrors M1 to M10. Each of the adjacent GI mirrors M2 to M9 has reflection surfaces with a distance between them that is greater than 130 mm. A linear pupil obscuration of the projection optics 27 is less than 20%. On the GI mirrors M2 to M8, the angles of incidence of all individual rays of the imaging light 16 are each greater than 70°. The optical design data for the projection optics 27 are shown in the following Tables 1 to 5, which in turn correspond in terms of basic structure to Tables 1 to 5 for the embodiment according to Fig. 5. Radii of the surfaces Table 1 to Fig. 6 Table 1 to Fig. 6 MO1-4507.517084390.00043515-1865.376416920.00105151 M0237342.30943113-0.000053564617.94469459-0.00043308 M03-24103.876087480.00008297333965.51387576-0.00000599 M04-4960.738132820.00010435-22194.001236940.00002332 M05-1417.819759340.00029505-4608.209907240.00009078 M06-997.100844400.00053783-1665.866657760.00032192 M07-2689.795154260.00018613-7484.363018740.00006689 M083251.21140951-0.00012276-3929.102088450.00010158 M09-4624.860894260.000061631972.61016680-0.00014450 M108735.63328801-0.00022895429.91045160-0.00465213 M11-932.381913680.00214504-790.249219180.00253085 Decentering (location, angle) of the surfaces Table 2 for Fig. 6 Table 2 for Fig. 6 Reticle0.0000000000.0000000000.000000000 MO10.000000000209.0057657832170.607869694 M020.000000000667.8844133641142.823826641 M030.0000000001187.762707847710.920036550 M040.0000000001928.111948692362.058449293 M050.0000000002464.660547334278.586246631 M060.0000000003033.110725840422.211098607 M070.0000000003337.077895833707.381367772 M080.0000000003414.854620482983.699514877 M090.0000000003379.1449517351224.759649723 obs110.0000000003504.6689827951542.222579899 M100.0000000003745.3783727882151.000896075 Blende0.0000000003713.1772470972073.314390972 M11-0.0000000003495.9702192761549.293739103 Wafer0.0000000003495.7361133772272.324752666 Retikel0.000000000.0000000000.000000000 M019.2797550980.0000000000.000000000 M02-52.829784319180.0000000000.000000000 M03147.5252680800.0000000000.000000000 M04-17.036573517180.0000000000.000000000 M05182.66842743,4 0.0000000000.000000000 M0628.676084597180.0000000000.000000000 M07238.7259771780.0000000000.000000000 M0886.352843205180.0000000000.000000000 M0983.4262843520.0000000000.000000000 obs11-10.3074146950.000000000180.000000000 M10-22.0438830480.000000000180.000000000 Blende178.120254750-0.0000000000.000000000 M11168.752250505-0.0000000000.000000000 Wafer0.0185514580.000000000180.000000000 Freiformkoeffizienten der Flächen Tabelle 3a zu Fig. 6 Tabelle 3a zu Fig. 6 C7x 2 y-5.4906812436e-09-2.8620470805e-082.1399292790e-08 C9y 31.3515772659e-089.7408417811e-084.2134847040e-09 C10x 48.5832741308e-121.1382434098e-103.1868214659e-11 C12x 2 y 23.8846342406e-11-1.1286287878e-101.2875254621e-11 C14y 4-2.3288421745e-111.2181731930e-10-1.0408558423e-11 C16x 4 y-4.2578558800e-144.8217160759e-14-1.3156399247e-14 C18x 2 y 3-5.6154733601e-141.7579836395e-15-7.9374917410e-15 C20y 52.4188798489e-141.3098445650e-139.3504641593e-15 C21x 66.5221351674e-189.9526909267e-17-5.1542336125e-18 C23x 4 y 23.3917787671e-172.1792423811e-161.6985444505e-18 C25x 2 y 4-1.3877435675e-173.2135349041e-166.7810870544e-19 C27y 6-5.4629022535e-183.2783102592e-16-2.7103796232e-17 C29x 6 y1.6398973683e-20-2.1469936571e-20-1.2219909236e-20 C31x 4 y 31.0851215578e-195.1850765366e-197.9818617495e-20 C33x 2 y 52.4552254958e-191.0375203339e-18-2.1287727038e-20 C35y 76.1951307890e-191.9673311893e-182.5723099281e-20 C36x 8-7.1180314575e-26-3.4265825372e-22-5.2465267780e-22 C38x 6 y 2-1.2505839204e-228.2001061336e-22-4.6178708402e-23 C40X 4 y 4-1.1045941837e-211.6480448224e-211.8409300083e-23 C42x 2 y 6-1.6707831309e-215.2055476241e-219.6012578645e-23 C44y 86.8720495098e-216.5496817560e-219.5664112911e-23 C46x 8 y-3.4485999339e-257.4735768965e-25-1.3969259037e-25 C48x 6 y 3-3.5590012345e-242.7222674971e-241.9212255166e-25 C50x 4 y 5-1.1964431875e-232.6509013254e-243.2264728583e-25 C52x 2 y 7-1.1864950377e-235.8140174270e-245.2997978493e-25 C54y 9-6.1343748832e-23-2.7465362337e-23-3.2793594623e-25 C55x 10-2.3572190309e-294.4279155640e-273.1833870112e-27 C57x 8 y 25.2626425609e-28-5.8739679233e-271.4081206658e-27 C59x 6 y 45.2905978674e-26-4.6263891202e-262.4371136042e-27 C61x 4 y 62.4634264552e-25-1.0122435573e-252.4420903773e-27 C63x 2 y 81.5111180083e-25-1.2724383857e-25-2.0806642323e-27 C65y 10-5.5190527895e-25-2.3052034852e-25-1.7724357130e-27 C67x 10 y7.0945332351e-30-8.9396070288e-302.2590652222e-30 C69x 8 y 39.9230609305e-29-1.8107288300e-291.9464341437e-30 C71x 6 y 55.4140338944e-28-1.3568978456e-281.0471762598e-29 C73x 4 y 71.3050576253e-27-3.6718829446e-281.7669473873e-30 C75x 2 y 91. 1859478644e-27-2.0862229060e-28-6.3364674811e-30 C77y 113.5672950899e-278.6974549513e-284.8681496307e-30 C78x 127.7376968241e-34-2.9543165556e-32-1.5171457922e-32 C80x 10 y 21.4723485209e-327.9692044224e-32-1.1518512174e-32 C82x 8 y 4-1.0223672266e-309.1460919482e-31-3.7955042070e-32 C84x 6 y 6-9.2432542733e-302.4620100526e-30-6.4860668867e-32 C86x 4 y 8-2.2267738121e-293.2869088458e-30-4.9891315399e-32 C88x 2 y 10-7.2146278339e-304.8321514593e-301.4638654774e-32 C90y 122.7888278565e-291.1607608365e-291.1501380308e-32 C92x 12 y-8.4652583941e-351.3011495885e-34-2.0404876730e-35 C94x 10 y 3-1.5660058040e-334.0736010043e-34-5.4268163924e-35 C96x 8 y 5-1.2135446533e-322.4893074530e-33-2.1922186825e-34 C98x 6 y 7-4.3680326905e-329.6700786997e-33-3.3286685336e-34 C100x 4 y-8.7778459202e-321.5801530399e-32-7.1695710681e-37 C102x 2 y 11-6.3374814617e-321.6794344745e-328.0933033182e-35 C104y 13-1.2521752715e-311.2566029960e-32-4.7535682076e-35 C105x 14-1.2133797249e-382.2037087871e-374.5584921288e-38 C107x 12 y 2-3.7560792142e-37-2.2748110907e-375.0654674701e-38 C109x 10 y 41.0247787540e-35-8.4914846401e-362.6535152292e-37 C111x 8 y 61.6285531344e-34-3.1754534473e-355.2576742125e-37 C113x 6 y 87.1445209680e-34-5.0613720194e-358.3416315849e-37 C115x 4 y 101.1481033831e-33-5.0286613336e-355.8111924001e-37 C117x 2 y 121.8532966500e-34-8.1808861239e-35-3.3711327311e-39 C119y 14-9.7330563416e-34-2.1930910136e-34-2.5247001288e-38 C121x 14 y6.3424629263e-40-8.4511338381e-401.3989202381e-40 C123x 12 y 31.4545660049e-38-4.0787779477e-395.2669362921e-40 C125x 10 y1.4750802930e-37-2.3803866364e-382.0176919527e-39 C127x 8 y 77.2530588200e-37-1.2581106748e-375.0164592391e-39 C129x 6 y 91.9994745054e-36-2.8228490342e-373.7552756406e-39 C131x 4 y 113.5096780198e-36-3.8715473695e-37-2.9073591148e-40 C133x 2 y 131.9885465434e-36-5.5768628431e-37-4.8596341842e-40 C135y 152.7279467335e-36-8.6227769578e-373.6549925009e-40 C136x 161.0341794638e-43-9.0896253880e-43-4.3015276568e-45 C138x 14 y 23.8515002819e-42-1.5748169758e-428.0513626092e-44 C140x 12 y 4-5.3756884142e-413.9396837084e-41-5.9928923600e-43 C142x 10 y 6-1.5187860429e-392.0111596064e-40-9.1234684339e-43 C144x 8 y 8-1.0355451150e-383.6686156972e-40-1.5503197685e-42 C146x 6 y 10-2.9495888158e-382.2256445919e-40-5.2160065281e-42 C148x 4 y 12-3.5726211595e-38-1.7061459782e-40-4.2537942735e-42 C150x 2 y 14-1.4777479543e-39-3.2590004871e-40-1.2592950153e-42 C152y 162.3229418700e-385.7322266404e-40-4.5937489316e-43 C154x 16 y-2.9109691696e-453.6158979396e-45-4.7852090090e-46 C156x 14 y 3-7.9390702312e-442.0783909504e-44-2.2843745145e-45 C158x 12 y 5-9.9112988777e-431.1518355582e-43-8.9599961803e-45 C160x 10 y 7-6.3658521729e-427.7978862946e-43-2.9354454772e-44 C162x 8 y 9-2.2652480667e-412.2675269740e-42-4.0040411912e-44 C164x 6 y 11-5.2783985992e-413.1099052484e-42-1.8330822052e-44 C166x 4 y 13-8.1870356029e-413.4525428993e-422.3249910293e-45 C168x 2 y 15-3.6906533458e-415.5862847826e-421.0368350005e-45 C170y 17-3.4740896771e-411.1420151444e-41-1.6602752994e-45 C171X 18-5.2614049461e-492.6166703927e-48-3.2105095388e-49 C173x 16 y 2-2.1093608431e-471.4657857102e-47-1.2627110885e-48 C175x 14 y 41.2200467162e-46-7.7005948906e-47-1.3237813359e-48 C177x 12 y 67.7012869492e-45-5.6039242406e-46-7.9622706898e-48 C179x 10 y 87.5606063431e-44-8.7726817442e-46-2.6729292899e-47 C181x 8 y 103.2251049282e-433.5177394268e-46-1.6158966473e-47 C183x 6 y 126.8153191653e-433.5727287524e-451.4978630205e-47 C185x 4 y 146.6791894859e-439.9522798676e-451.9010192970e-47 C187x 2 y 16-3.5419929268e-441.9777550715e-441.0367070681e-47 C189y 18-3.6499835170e-433.2002423217e-443.5209398306e-48 C191x 18 y7.4307062573e-51-6.1708171643e-517.1201425806e-52 C193x 16 y 32.3599319310e-49-4.7671865404e-504.0702437288e-51 C195x 14 y 53.4789236636e-48-2.5882378404e-491.6307301623e-50 C197x 12 y 72.7844805726e-47-1.9581259966e-486.2919995648e-50 C199x 10 y 91.2676584765e-46-7.4963154354e-481.2021840473e-49 C201x 8 y 113.6000311627e-46-1.2016930597e-471.0706838814e-49 C203x 6 y 137.4966407908e-46-5.5650983714e-483.4421453969e-50 C205x 4 y 151.0265220916e-451.0735089118e-47-3.6151354535e-51 C207x 2 y 173.6865739119e-462.7955735744e-479.4659383437e-52 C209y 192.2778837294e-463.9740408933e-473.4944696248e-51 C210x 201.4661833370e-54-3.6515090826e-546.0799655272e-55 C212x 18 y 26.0179395790e-53-3.4098453747e-533.0892789560e-54 C214x 16 y 42.2020655540e-53-1.2382933556e-537.0719822749e-54 C216x 14 y 6-1.9975931714e-502.9317062813e-523.1512910050e-53 C218x 12 y 8-2.7034605292e-49-1.4441233921e-511. 1276406016e-52 C220x 10 y 10-1.5959287820e-48-9.2250098099e-511.6246205627e-52 C222x 8 y 12-4.9258906913e-48-1.5529862944e-508.6510609852e-53 C224x 6 y 14-8.3623104472e-48-9.4671207057e-51-1.7109247518e-53 C226x 4 y 16-6.9282799015e-483.9238486575e-51-4.2843204014e-53 C228x 2 y 189.1554954701e-491.5054046891e-50-2.8483663099e-53 C230y 203.3947097201e-481.9364723926e-50-8.8174271834e-54 C232x 20 y-8.0545819100e-570.0000000000e+000.0000000000e+00 C234x 18 y 3-2.9463360596e-550.0000000000e+000.0000000000e+00 C236x 16 y 5-4.9880707420e-540.0000000000e+000.0000000000e+00 C238x 14 y 7-4.7764865363e-530.0000000000e+000.0000000000e+00 C240x 12 y 9-2.7134877912e-520.0000000000e+000.0000000000e+00 C242x 10 y 11-9.5021762740e-520.0000000000e+000.0000000000e+00 C244x 8 y 13-2.3163109702e-510.0000000000e+000.0000000000e+00 C246x 6 y 15-4.4153984421e-510.0000000000e+000.0000000000e+00 C248x 4 y 17-5.3260104055e-510.0000000000e+000.0000000000e+00 C250x 2 y 19-1.5186263157e-510.0000000000e+000.0000000000e+00 C252y 21-5.4120929418e-520.0000000000e+000.0000000000e+00 C253x 22-1.7162554609e-600.0000000000e+000.0000000000e+00 C255x 20 y 2-7.0598381430e-590.0000000000e+000.0000000000e+00 C257x 18 y 4-3.8870483440e-580.0000000000e+000.0000000000e+00 C259x 16 y 62.0600165487e-560.0000000000e+000.0000000000e+00 C261x 14 y 83.7683141349e-550.0000000000e+000.0000000000e+00 C263x 12 y 102.9204322438e-540.0000000000e+000.0000000000e+00 C265x 10 y 121.2224358925e-530.0000000000e+000.0000000000e+00 C267x 8 y 142.9643474864e-530.0000000000e+000.0000000000e+00 C269x 6 y 164.2620669932e-530.0000000000e+000.0000000000e+00 C271x 4 y 183.0684582460e-530.0000000000e+000.0000000000e+00 C273x 2 y 20-6.1587664428e-540.0000000000e+000.0000000000e+00 C275y 22-1.4041159479e-530.0000000000e+000.0000000000e+00 Tabelle 3b zu Fig. 6 Tabelle 3b zu Fig. 6 C7x 2 y-2.9743212410e-081.1669526010e-07-9.9566541665e-08 C9y 3-1.1790460879e-081.5012282786e-072.0365341565e-07 C10x 4-5.7761645674e-11-9.3038156313e-111.1580183909e-11 C12x 2 y 12-9.1085834899e-12-2.3865527927e-103.2804469821e-10 C14y 4-7.6428644817e-12-5.7593484308e-112.2874520939e-10 C16x 4 y5.3104708410e-151.2218639414e-13-1.1173480940e-13 C18x 2 y 3-1.6663624783e-146.4436694851e-15-2.1908686826e-13 C20y 5-4.4872430791e-142.0563869090e-137.7863286308e-13 C21x 6-5.5965290088e-174.2737060074e-18-1.9103930590e-17 C23x 4 y 2-4.0258942654e-176.7085608237e-17-2.8042494650e-16 C25x 2 y 4-1.6182986253e-16-5.2156569699e-16-2.6963555052e-15 C27y 6-5.4317969200e-177.4780265610e-161.8518275094e-14 C29x 6 y-2.4297626819e-20-7.3918089927e-21-4.1100461542e-19 C31x 4 y 2-3.2243466425e-196.4869125987e-19-5.0796007532e-19 C33x 2 y 12-4.2100782546e-19-2.7219117168e-18-1.8416989442e-17 C35y 7-2.6921487409e-19-9.6298260970e-196.1712077395e-17 C36x 8-1.4805222159e-221.3881181131e-22-2.6077830893e-22 C38x 6 y 2-3.3061851102e-22-5.5722925801e-22-1. 1478262672e-21 C40x 4 y 4-1.2071131557e-213.7344917406e-211.0903814609e-20 C42x 2 y 12-1.5919684503e-21-2.5935609685e-21-3.5306248157e-19 C44y 8-3.6334959123e-224.8163145020e-20-2.3430530914e-18 C46x 8 y-2.8724265419e-255.2127642374e-25-2.0090514023e-24 C48x 6 y 9-1.3807819542e-24-2.8855983174e-246.2470357967e-24 C50x 4 y 2-1.5920167278e-24-3.5522871182e-242.9367411513e-22 C52x 2 y 42.7824631143e-24-4.1286300319e-239.9789198932e-22 C54y 96.5716292975e-254.4620713577e-22-2.4334788059e-20 C55x 101.1793152250e-27-1.6603894342e-272.9910320778e-27 C57x 8 y 9-1.8745740320e-272.4770352644e-272.1874128864e-27 C59x 6 y 43.8921124360e-271.0271603152e-265.5659509955e-26 C61x 4 y2.5896495845e-263.4546938966e-264.0407638210e-24 C63x 2 y 42.7541505502e-26-7.4895050830e-256.0730415119e-23 C65y 104.6486642726e-27-2.0234395665e-234.7393252957e-22 C67x 10 y-1.2671624695e-30-3.3603146563e-303.3946075712e-29 C69x 8 y 93.6551256712e-301.2741478749e-31-1.2183951246e-28 C71x 6 y 54.0105186971e-291.4348440310e-28-3.8214097655e-27 C73x 4 y 7-2.1320046540e-292.4530639143e-27-5.1910452835e-26 C75x 2 y 12-1.7012583588e-28-2.5912399575e-27-2.7181368303e-25 C77y 11-2.1661184209e-291.5788042638e-263.1308943279e-24 C78x 12-3.8794948602e-337.9732476824e-33-2.4491864286e-32 C80x 10 y 21.4236436724e-32-1.9536542596e-325.0729416317e-32 C82x 8 y 4-8.5278174028e-34-2.5943990180e-31-1.4638609904e-30 C84x 6 y 6-4.7639205340e-31-2.5140290628e-30-4.0024422982e-29 C86x 4 y-1.5824794963e-302.5127992990e-29-6.9438429070e-28 C88x 2 y 10-1.4920733060e-301.0609093062e-28-9.3430386273e-27 C90y 12-2.6197064063e-313.4435745585e-27-7.5977211512e-26 C92x 12 y1.9958533177e-352.0371471987e-35-2.8544801140e-34 C94x 10 y 36.9839029681e-358.2256749663e-351.3326476307e-33 C96x 8 y 5-9.8724683568e-34-4.9875487853e-344.0602905710e-32 C98x 6 y 7-3.8550538797e-33-4.3006861496e-327.2086227775e-31 C100x 4 y 9-3.8760570445e-33-1.0875202483e-311.0533526459e-29 C102x 2 y 11-1.0933947654e-34-8.2170757362e-326.5505210697e-29 C104y 13-1.1108911231e-33-2.3951842627e-29-1.6372595460e-28 C105x 141.5023683821e-38-2.8837447732e-381.1654750762e-37 C107x 12 y 21.5339290412e-381.2214596522e-37-5.9407222047e-37 C109x 10 y 4-7.2556981322e-372.2051838875e-361.4581808004e-35 C111x 8 y 9-3.1428080411e-364.0656954549e-353.7400650213e-34 C113x 6 y 93.6746626925e-36-1.4514714201e-345.3186350290e-33 C115x 4 y 102.6602955455e-35-1.1430107941e-337.6957134709e-32 C117x 2 y 122.6455146133e-35-1.0341222950e-328.9765313229e-31 C119y 141.7171842631e-36-1.9852265747e-318.1046540698e-30 C121x 14 y-9.5454501493e-41-9.1004149722e-411.8669447938e-39 C123x 12 y 3-1.3111613876e-39-9.7180633844e-40-6.4656490397e-39 C125x 10 y 5-3.2492178895e-40-8.0446588250e-39-2.8401847250e-37 C127x 8 y 72.5778585468e-382.3074223659e-37-5.6787489490e-36 C129x 6 y 99.6862180917e-381.7122924558e-36-9.6964248746e-35 C131x 4 y 111.4198795257e-378.7165228781e-36-1.3731821621e-33 C133x 2 y 137.9033616571e-388.6444703416e-35-8.8267936933e-33 C135y 153.2159406333e-383.0301440246e-33-1.2836859040e-32 C136x 16-4.1799757307e-445.5470501457e-44-2.4327713922e-43 C138x 14 y 2-9.9293913954e-43-3.5055738352e-435.6795738109e-42 C140x 12 y 4-2.6088118082e-42-9.0011339751e-42-7.8041185433e-41 C142x 10 y 63.6558718605e-41-2.1975490647e-40-2.5907106256e-39 C144x 8 y 81.6307453081e-40-3.0354043988e-40-3.4492383421e-38 C146x 6 y 102.4121241652e-40-1.0822530237e-39-3.7052356167e-37 C148x 4 y 127.5832151280e-415.1655238719e-38-3.3668494381e-36 C150x 2 y 14-4.7712208927e-41-2.9808785016e-37-4.1363215279e-35 C152y 168.1898379387e-41-5.4224204392e-36-4.6614104106e-34 C154x 16 y-1.7914463671e-472.6219246633e-46-6.7406154625e-45 C156x 14 y 31.0745318060e-454.9483843686e-451.3849571217e-44 C158x 12 y 52.3672435687e-446.5950866356e-441.0507358382e-42 C160x 10 y 71.3982432669e-43-1.6454478847e-442.4422757510e-41 C162x 8 y 92.6207616947e-43-6.8749824020e-424.3573254069e-40 C164x 6 y 11-2.2355380277e-43-4.4243194354e-417.1938790763e-39 C166x 4 y 13-1.0368134641e-42-3.9448944413e-401.0148934213e-37 C168x 2 y 15-7.6783452477e-43-4.3475300868e-396.2209814134e-37 C170y 17-1.4289565589e-43-9.6679301947e-382.1799617249e-36 C171X 184.2172877123e-50-4.5999961053e-50-8.4918585026e-50 C173x 16 y 22.7632292455e-488.7646418103e-50-2.6660270257e-47 C175x 14 y 42.9615958122e-471.4095824660e-472.1303141272e-46 C177x 12 y 66.9533736552e-472.5960843498e-461.0083670376e-44 C179x 10 y 81.2580608026e-464.0258994551e-451.5121267402e-43 C181x 8 y 10-1.4499661590e-46-2.1913257520e-451.4987175240e-42 C183x 6 y 12-1.9968423374e-455.0870429755e-433.8494428986e-42 C185x 4 y 14-3.1618141043e-45-2.8637217241e-42-1.1244621519e-40 C187x 2 y 16-1.9306947554e-457.2417391616e-41-6.7248071772e-41 C189y 18-1.0973515672e-456.2867454061e-408.8178608872e-39 C191x 18 y6.5396283418e-52-3.7227476638e-521.0552257331e-50 C193x 16 y 31.6418735069e-50-9.7840216332e-51-5.5226791191e-51 C195x 14 y 56.3541612661e-50-1.4086384587e-49-1.5737677567e-48 C197x 12 y 7-2.9488771309e-51-2.0819014149e-48-4.2297440300e-47 C199x 10 y 9-6.6384533886e-501.7117795430e-47-8.4108204360e-46 C201x 8 y 11-8.7340769288e-49-2.3536950753e-46-1.3161083760e-44 C203x 6 y 13-3.3794979372e-481.6585896223e-45-2.4077286939e-43 C205x 4 y 15-3.7739974962e-48-2.2730128523e-45-3.1376510905e-42 C207x 2 y 17-2.2621793666e-48-2.6033476490e-43-1.7739511987e-41 C209y 19-2.0504906586e-48-1.5043068131e-42-8.2324014343e-41 C210x 202.9729027928e-566.5392523495e-571.0400911778e-54 C212x 18 y 22.5665265344e-541.2914326528e-545.0688635446e-53 C214x 16 y 41.8305533014e-535.9048056185e-54-2.3334066894e-52 C216x 14 y 62.6949792440e-536.4827067278e-52-1.5871998639e-50 C218x 12 y 8-7.9412087474e-53-6.2093963098e-51-3.0019143464e-49 C220x 10 y 10-7.4635451348e-535.8917062884e-50-2.9663927702e-48 C222x 8 y 12-7.8992068765e-52-3.9920713110e-49-1.6751448770e-47 C224x 6 y 14-1.8932192889e-51-9.7725220791e-496.2830370114e-46 C226x 4 y 16-1.6926026743e-511.4551817943e-471.1044715202e-44 C228x 2 y 18-1.1080519579e-512.9706261427e-465.1777437080e-44 C230y 20-1.3290009055e-511.3213567197e-451.5639696981e-43 Tabelle 3c zu Fig. 6 Tabelle 3c zu Fig. 6 C7x 2 y-2.2583427273e-073.2603536654e-07-1.7809062944e-07 C9y 3-2.4937890146e-071.2075191284e-07-5.5449409275e-07 C10x 4-2.7604245893e-10-9.9059231472e-121.8340855307e-10 C12x 2 y 127.5029657395e-101.3006241223e-10-1.8776631637e-10 C14y 42.0411734490e-09-4.2578668008e-103.1695339636e-09 C16x 4 y2.7089336126e-127.7963418655e-139.1924443256e-13 C18x 2 y 122.9604914321e-122.2806657290e-12-8.4062295181e-12 C20y 5-1.0538908242e-111.1780365674e-12-1.5497481901e-11 C21x 61.5079039672e-151.3731594322e-155.1375745348e-16 C23x 4 y 2-3.8268989722e-15-5.6596891033e-163.0044111688e-15 C25x 2 y 4-1.5925460444e-14-4.7357074162e-152.7786610353e-14 C27y 65.7443303797e-14-5.0192551505e-151.0320491988e-13 C29x 6 y-6.4907264647e-182.5815613732e-18-1.2537950454e-16 C31x 4 y 21.7721139035e-178.1088372807e-181.5152992482e-17 C33x 2 y 121.0516696556e-172.4335919192e-17-2.4994477780e-16 C35y 7-4.2367818599e-161.8742493029e-17-6.4626231672e-16 C36x 8-1.9790651519e-21-3.7297103437e-22-1.9937685216e-20 C38x 6 y 54.4671851217e-204.4416525080e-211.2808675600e-18 C40x 4 y 4-3.5783540320e-19-2.3074518274e-201.1868123407e-18 C42x 2 y 12-3.6810994877e-19-8.0317937642e-202.2223523144e-18 C44y 8-1.6120907041e-18-7.4294521176e-204.4634439564e-18 C46x 8 y-5.8952745126e-24-2.5643127892e-221.3626516363e-19 C48x 6 y 3-6.2677765086e-22-4.5472742168e-229.5275948210e-20 C50x 4 y 25.2729738680e-21-1.2667389413e-22-2.1349837174e-20 C52x 2 y 4 y 7-5.3146553748e-211.7321854182e-22-3.4009727950e-20 C54y 9-7.7543304773e-204.4329147910e-22-3.7761969738e-20 C55x 10-2.0220949220e-26-8.2430405929e-25-8.2696838067e-23 C57x 8 y 9-9.9476709059e-257.9550764118e-25-8.3801447293e-22 C59x 6 y 9-2.9732066369e-25-1.4165507036e-24-6.1293175573e-22 C61x 4 y-9.6192974055e-23-5.0357207821e-24-3.3986000622e-22 C63x 2 y 4-4.7801748744e-22-3.6143725729e-241.1143051844e-22 C65y 103.8488098249e-21-2.6636248396e-242.5637188152e-22 C67x 10 y1.1633077144e-272.0553778352e-26-7.2993111092e-23 C69x 8 y 35.3130487964e-287.8092197405e-26-9.7463020183e-23 C71x 6 y 5-3.7950237003e-256.9649735804e-26-1.8028641070e-23 C73x 4 y-3.1970284862e-244.4985879891e-261.2100152852e-23 C75x 2 y 121.9744203576e-237.4877000695e-263.7846278667e-24 C77y 118.0529486335e-24-3.8570691968e-273.7021518228e-25 C78x 121.1917501879e-30-9.8752514860e-304.2992035129e-26 C80x 10 y 23.8104209071e-29-8.7324378606e-291.9698140459e-25 C82x 8 y 46.5870610060e-291.1072079650e-286.1248408303e-26 C84x 6 y 9-2.5668882606e-274.4898404363e-281.4260194168e-25 C86x 4 y5.0451106137e-263.0231520136e-285.5209855977e-26 C88x 2 y 103.7210706409e-26-2.8291958354e-28-7.6694768789e-27 C90y 12-1.4985393954e-241.1799079069e-28-5.4267512901e-27 C92x 12 y-3.4360790309e-32-1.9579754596e-302.3489611165e-26 C94x 10 y-1.2519494177e-31-6.4993540167e-304.5655337160e-26 C96x 8 y 55.8368416973e-30-8.6344719593e-302.0766631374e-26 C98x 6 y 92.0355894366e-28-3.2871797707e-30-4.8231081572e-28 C100x 4 y 97.2410692567e-28-5.8789687504e-30-3.0896219799e-27 C102x 2 y 11-1.0511088659e-26-5.7778528810e-30-8.0614338926e-28 C104y 133.0292650627e-276.5687956675e-31-4.2288869819e-28 C105x 14-2.3752290315e-354.4117399744e-34-1.3925769921e-30 C107x 12 y 2-1.3865738299e-33-4.0642441567e-334.2938174170e-29 C109x 10 y 4-1.1031027525e-32-1.4972667663e-321.0974830981e-28 C111x 8 y 61.9901597007e-31-3.1479666481e-322.7365432035e-29 C113x 6 y 82.1359875696e-30-4.3813517717e-32-1.9980314610e-29 C115x 4 y 10-2.6347434362e-292.1987266229e-321.5358324849e-30 C117x 2 y 122.5362014369e-294.7894869577e-325.7414864141e-30 C119y 142.8724504885e-28-1.1043121970e-325.0298631861e-30 C121x 14 y3.7109464306e-377.8609300320e-35-4.3585419843e-30 C123x 12 y 3-7.1835760919e-362.6352918694e-34-1.1157189511e-29 C125x 10 y 5-8.9265460486e-355.5122228336e-34-7.6537882973e-30 C127x 8 y 7-4.2727281659e-343.1077514111e-34-1.6916986850e-30 C129x 6 y 9-7.7493125572e-322.0025162379e-345.0781248592e-31 C131x 4 y 111.3598770977e-313.4105108224e-343.8266216097e-31 C133x 2 y 131.9868959635e-301.9929808506e-345.1120636337e-32 C135y 15-5.7255501104e-31-5.7540968126e-361.7689442883e-32 C136x 162.3246815032e-401.0110462801e-38-1.7971119701e-33 C138x 14 y 22.2137070948e-384.1245751594e-37-2.8546060197e-32 C140x 12 y 42.6295502198e-379.7445831762e-37-5.3567168422e-32 C142x 10 y 6-5.7486188917e-371.8227251188e-36-3.1307656696e-32 C144x 8 y 8-1.4833510285e-342.1790538480e-36-3.0897401190e-33 C146x 6 y 108.0108216738e-351.0174531698e-361.8356912931e-34 C148x 4 y 124.4033944109e-33-3.9109690279e-36-1.1135425536e-33 C150x 2 y 141.5205780887e-33-3.2164413545e-36-6.7202110715e-34 C152y 16-3.2734777829e-324.1141432347e-37-4.9853253256e-34 C154x 16 y-1.3899627952e-42-1.4510896345e-394.3065956474e-34 C156x 14 y 32.8501763734e-40-4.8757883722e-391.3807699201e-33 C158x 12 y 54.9297769128e-39-1.6683113585e-381.2503179330e-33 C160x 10 y 7-1.0696287374e-37-1.6893351909e-384.8778928309e-34 C162x 8 y 95.1246042309e-37-1.9180181678e-393.9097351556e-35 C164x 6 y 116.4172505170e-36-1.1505729315e-38-5.6889581626e-35 C166x 4 y 13-1.8643239025e-356.0973735129e-39-2.3717918281e-35 C168x 2 y 15-1.3915343875e-343.9814202146e-39-2.9846763301e-37 C170y 17-4.9790616017e-357.3710531432e-413.8498384393e-37 C171x 18-1.1754781632e-45-4.8950233838e-433.1991000688e-37 C173x 16 y 2-1.4620859423e-43-1.0263205358e-414.8212461829e-36 C175x 14 y 4-1.1973827387e-43-2.6297001948e-419.6683129831e-36 C177x 12 y 6-4.8610130990e-41-7.1698224547e-417.3249206985e-36 C179x 10 y 81.3729073927e-39-5.4630511310e-412.3284408806e-36 C181x 8 y 101.3078608494e-38-9.0568912989e-412.4415702694e-37 C183x 6 y 12-3.0322931666e-387.0570533339e-411.7850077411e-37 C185x 4 y 14-3.7447495950e-378.6165432601e-411.0461974863e-37 C187x 2 y 16-9.6746884169e-377.9015618161e-413.8734365192e-38 C189y 182.2206700197e-36-1.6674601491e-413.1155838405e-38 C191x 18 y-3.2622843319e-481.0390977991e-44-1.7574842150e-38 C193x 16 y 3-2.6966951427e-453.1703815542e-44-6.8297594733e-38 C195x 14 y 5-7.6390888727e-442.0023067787e-43-7.6331296851e-38 C197x 12 y 79.6000238233e-433.4608029275e-43-4.1316687972e-38 C199x 10 y 91.3773971949e-413.0116057249e-46-1.0793118376e-38 C201x 8 y 119.3233731621e-422.4307616317e-431.0991194106e-39 C203x 6 y 13-3.4603293884e-40-2.2210807820e-431.9677360507e-39 C205x 4 y 15-1.4837854866e-39-4.3630944226e-435.6552874711e-40 C207x 2 y 17-2.6207997042e-39-3.8810087026e-43-2.2949675171e-40 C209y 191.6446205635e-387.2134890653e-44-2.0200469947e-40 C210x 202.0579861606e-514.9550731854e-48-1.6817985996e-41 C212x 18 y 21.3022809814e-498.2090732998e-47-2.7562829785e-40 C214x 16 y 4-3.3442172275e-472.5403117121e-46-6.1879506543e-40 C216x 14 y 64.9539090620e-471.2336561753e-45-5.5962771516e-40 C218x 12 y 85.1220173454e-459.2558635719e-46-2.6591835342e-40 C220x 10 y 101. 1871663003e-441.3272401374e-45-6.2366047643e-41 C222x 8 y 12-4.2448751645e-44-1.3388781555e-46-1.4076426400e-41 C224x 6 y 14-8.2127021386e-431.9456364581e-46-9.3462088321e-42 C226x 4 y 16-1.3835338680e-426.0740788357e-46-3.0409955259e-42 C228x 2 y 18-3.7831067355e-425.5657775813e-464.5984698294e-43 C230y 203.8013209610e-41-9.6790526056e-473.9852995147e-43 Tabelle 3d zu Fig. 6 Tabelle 3d zu Fig. 6 C7x 2 y-1.1955466973e-061.6234770629e-08 C9y 31.7561354837e-06-2.9295575799e-08 C10x 46.0091449778e-10-1.6833853598e-11 C12x 2 y 124.2029123983e-10-6.5986235698e-11 C14y 42.2717516937e-09-5.9546240077e-12 C16x 4 y-1.2577606465e-122.3517253673e-14 C18x 2 y 12-3.9045760236e-12-8.3062253058e-15 C20y 51.3855612955e-11-4.3568923415e-14 C21x 68.3003004699e-16-3.1928479762e-17 C23x 4 y 27.4449071765e-15-1.5088677696e-16 C25x 2 y 4-1.7522189575e-15-1.3735421435e-16 C27y 68.3540743948e-14-1.5509684900e-17 C29x 6 y-6.1664940934e-183.2898675970e-20 C31x 4 y 3-2.2903209017e-172.3471536698e-20 C33x 2 y 5-8.5156374590e-17-6.2444288080e-20 C35y 75.5686652387e-16-6.4905623013e-20 C36x 82.7850069030e-21-3.0327304289e-23 C38x 6 y 24.3287043064e-20-2.4191919266e-22 C40x 4 y 45.3496969059e-20-4.0537412298e-22 C42x 2 y 6-9.2180952850e-19-2.3488836760e-22 C44y 82.0583922825e-18-2.8039314199e-23 C46x 8 y-2.4408214589e-236.8497446710e-26 C48x 6 y 35.5721662794e-236.7487458963e-26 C50x 4 y 57.9253270300e-22-5.2761346352e-26 C52x 2 y 7-3.9487459387e-21-1.9057348707e-25 C54y 99.3393791545e-21-9.7478720992e-26 C55x 103.6153522928e-28-1.3062165189e-28 C57x 8 y 22.2616189509e-25-6.2796764898e-28 C59x 6 y 41.5416211268e-24-1.6790154831e-27 C61x 4 y7.7433840460e-24-1.7539250411e-27 C63x 2 y 8-8.3577512834e-24-6.9744889975e-28 C65y 102.2566180112e-22-2.2089551776e-29 C67x 10 y-4.2064108554e-28-8.0241974113e-32 C69x 8 y 3-6.6803576081e-273.2660218169e-31 C71x 6 y 5-2.2749776172e-264.5628959880e-31 C73x 4 y 78.8965636655e-262.3133659960e-31 C75x 2 y 9-4.5582445095e-25-4.5561777103e-32 C77y 111.8548502745e-24-1.1670677450e-31 C78x 122.3688875544e-312.6819538008e-34 C80x 10 y 2-2.4454727226e-301.8052734441e-33 C82x 8 y 4-3.7155312734e-297.5973025161e-33 C84x 6 y 6-3.2293275103e-281.2092335860e-32 C86x 4 y 89.1583036091e-288.3529659221e-33 C88x 2 y 10-5.3137423478e-271.7993697631e-33 C90y 12-5.1468113258e-27-4.8132455089e-34 C92x 12 y7.0963863682e-335.2491295166e-37 C94x 10 y1.7361742823e-31-3.3894464652e-37 C96x 8 y 51.3062557351e-30-2.8650551548e-36 C98x 6 y 7-6.7018505909e-31-7.2534734365e-36 C100x 4 y-2.5436705841e-30-9.0216355844e-36 C102x 2 y 118.3285503620e-30-5.0538260442e-36 C104y 13-1.2592851188e-28-5.4206953873e-37 C105x 14-3.1206900324e-36-1.5957934986e-39 C107x 12 y 23.5243981171e-35-1.7331594633e-38 C109x 10 y 43.9448954347e-34-7.9922496326e-38 C111x 8 y 66.8860094541e-33-1.6752453704e-37 C113x 6 y 81.4883044645e-32-1.8076801014e-37 C115x 4 y 10-8.8311043098e-32-9.3652125583e-38 C117x 2 y 124.3487838732e-31-1.8452524972e-38 C119y 14-1.0511007278e-312.0107483976e-39 C121x 14 y-1.0116134017e-37-1.7241625915e-42 C123x 12 y 3-3.1985842602e-36-2.8253941961e-43 C125x 10 y 5-3.2530405836e-351.2954989727e-41 C127x 8 y 7-1.0019505170e-344.9246187054e-41 C129x 6 y 91.9655905241e-347.4333406142e-41 C131x 4 y 11-6.1879954497e-356.6621563915e-41 C133x 2 y 131.2453884636e-332.8712834032e-41 C135y 156.2237241065e-332.1507254885e-42 C136x 163.3964441413e-414.7191649614e-45 C138x 14 y 21.7837698030e-406.6487018084e-44 C140x 12 y 44.0201349554e-393.6759726491e-43 C142x 10 y 6-7.5445481115e-399.7257705538e-43 C144x 8 y 8-4.8628439976e-371.4191399375e-42 C146x 6 y 102.6287688771e-371.1385788171e-42 C148x 4 y 124.9737527285e-364.5236826787e-43 C150x 2 y 14-2.0856584651e-357.1064157436e-44 C152y 163.9325544255e-35-6.8146080703e-45 C154x 16 y7.3352652528e-434.5125051143e-48 C156x 14 y 33.2439264265e-411.3732203846e-47 C158x 12 y 54.0836787576e-401.5375388648e-48 C160x 10 y 72.3223664334e-39-1.4933280612e-46 C162x 8 y 92.8042704606e-39-3.7572456538e-46 C164x 6 y 11-1.3255325572e-38-4.5798586100e-46 C166x 4 y 132.5185855681e-38-3.4076999203e-46 C168x 2 y 15-1.9045109409e-37-1.2946229008e-46 C170y 177.6029009786e-38-1.2222462256e-47 C171x 18-2.0704956351e-46-1.0967976377e-50 C173x 16 y 2-5.2169444483e-45-1.7841338343e-49 C175x 14 y 4-1.2323600021e-43-1.1129303033e-48 C177x 12 y 6-1.0947949724e-42-3.5186127588e-48 C179x 10 y 8-1.9815977702e-44-6.4775501822e-48 C181x 8 y 101.4050403150e-41-7.1246904750e-48 C183x 6 y 12-6.1844165467e-41-4.5310039281e-48 C185x 4 y 142.2578223229e-42-1.4894591947e-48 C187x 2 y 16-4.7953641342e-40-2.1493587869e-49 C189y 183.4799844112e-419.0135520499e-51 C191x 18 y-2.8990201621e-48-6.7147900621e-54 C193x 16 y 3-1.7684270375e-46-4.1175485404e-53 C195x 14 y 5-2.6671432883e-45-8.7451738201e-53 C197x 12 y 7-2.0346222488e-441.4785581741e-52 C199x 10 y 9-6.2642776827e-448.2476050887e-52 C201x 8 y 11-3.2960156918e-441.4294244181e-51 C203x 6 y 133.4201487702e-431.3956844206e-51 C205x 4 y 15-2.7921356322e-438.6254028456e-52 C207x 2 y 171.2899359982e-422.8776468609e-52 C209y 191. 1944173727e-422.7982291339e-53 C210x 206.9287069722e-521.4628867474e-56 C212x 18 y 23.9092871496e-502.6085741899e-55 C214x 16 y 41.0783063919e-481.8092766513e-54 C216x 14 y 61.2967548923e-476.6487024755e-54 C218x 12 y 84.5178145236e-471.4760862198e-53 C220x 10 y 109.6157180065e-472.0613251582e-53 C222x 8 y 12-5.1533616342e-461.8098694013e-53 C224x 6 y 142.9412504221e-459.5224021448e-54 C226x 4 y 16-1.1832593758e-452.6956946932e-54 C228x 2 y 181.0838296353e-443.6856687763e-55 C230y 208.6594868786e-45-2.1210617611e-57 C232x 20 y3.2424636652e-545.6193627791e-60 C234x 18 y 33.6157196861e-525.1914881452e-59 C236x 16 y 56.7676157900e-511.7980474203e-58 C238x 14 y 76.8533658296e-501.5017294298e-58 C240x 12 y 92.4340249420e-49-4.8300192670e-58 C242x 10 y 111.1667821202e-48-1.6286634960e-57 C244x 8 y 13-2.9140644770e-48-2.2944477815e-57 C246x 6 y 155.4960081775e-48-1.9417112202e-57 C248x 4 y 17-4.0660834644e-48-1.0495569603e-57 C250x 2 y 192.5204274586e-47-3.1800689862e-58 C252y 212.2295798332e-47-3.3201166684e-59 C253x 22-6.7672594046e-58-9.8277592056e-63 C255x 20 y 2-8.1500157593e-56-1.8214352008e-61 C257x 18 y 4-2.9713564204e-54-1.3670568415e-60 C259x 16 y 6-4.6901128806e-53-5.6628039386e-60 C261x 14 y 8-2.3844234343e-52-1.4612939708e-59 C263x 12 y 10-1. 1325706382e-51-2.4645278547e-59 C265x 10 y 121.0068326198e-51-2.7680539675e-59 C267x 8 y 14-6.2103933560e-51-2.0360792873e-59 C269x 6 y 167.3378188876e-53-9.3640730888e-60 C271x 4 y 18-6.9789590552e-51-2.4774598784e-60 C273x 2 y 202.0921258050e-50-3.5844529585e-61 C275y 222.0605326473e-50-1.2246880907e-62 Koordinaten des Blendenrandes Tabelle 4 zu Fig. 6 Tabelle 4 zu Fig. 6 -380.26467269.074627380.58053656.800471 -379.70238075.121006380.33139650.578417 -378.87305481.103287379.80985444.303716 -377.77911087.018877379.01576037.979514 -376.42333392.865284377.94947631.609073 -374.80884898.640113376.61188425.195766 -372.939088104.341060375.00438418.743074 -370.817763109.965916373.12889712.254575 -368.448833115.512561370.9878495.733942 -365.836479120.978965368.584159-0.815071 -362.985084126.363192365.921220-7.388639 -359.899204131.663396363.002873-13.982875 -356.583552136.877826359.833382-20.593843 -353.042982142.004826356.417400-27.217566 -349.282471147.042839352.759936-33.850034 -345.307104151.990403348.866322-40.487209 -341.122061156.846157344.742177-47.125033 -336.732603161.608834340.393370-53.759422 -332.144060166.277265335.825981-60.386275 -327.361815170.850372331.046270-67.001463 -322.391294175.327168326.060638-73.600826 -317.237947179.706753320.875597-80.180169 -311.907240183.988305315.497736-86.735247 -306.404633188.171080309.933690-93.261761 -300.735570192.254405304.190114-99.755343 -294.905467196.237671298.273656-106.211543 -288.919692200.120328292.190932-112.625819 -282.783559203.901885285.948506-118.993518 -276.502313207.581895279.552869-125.309864 -270.081122211.159963273.010421-131.569940 -263.525068214.635731266.327457-137.768673 -256.839144218.008882259.510157-143.900816 -250.028245221.279133252.564568-149.960934 -243.097170224.446235245.496603-155.943383 -236.050620227.509970238.312028-161.842304 -228.893197230.470147231.016459-167.651604 -221.629409233.326604223.615360-173.364945 -214.263673236.079205216.114035-178.975741 -206.800317238.727836208.517633-184.477148 -199.243590241.272408200.831146-189.862058 -191.597661243.712852193.059408-195.123102 -183.866633246.049118185.207100-200.252649 -176.054540248.281177177.278754-205.242811 -168.165362250.409014169.278756-210.085448 -160.203023252.432630161.211353-214.772183 -152.171403254.352040153.080657-219.294418 -144.074339256.167269144.890652-223.643356 -135.915629257.878353136.645204-227.810036 -127.699042259.485336128.348067-231.785369 -119.428315260.988269120.002890-235.560188 -111.107161262.387206111.613230-239.125308 -102.739270263.682207103.182557-242.471594 -94.328312264.87333094.714264-245.590038 -85.877937265.96063786.211679-248.471843 -77.391783266.94418677.678070-251.108518 -68.873469267.82403469.116657-253.491975 -60.326603268.60023460.530619-255.614625 -51.754781269.27283551.923099-257.469482 -43.161589269.84188143.297213-259.050255 -34.550603270.30741134.656054-260.351447 -25.925391270.66945626.002697-261.368432 -17.289516270.92804117.340202-262.097531 -8.646534271.0831858.671622-262.536072 0.000000271.1348980.000000-262.682434 8.646534271.083185-8.671622-262.536072 17.289516270.928041-17.340202-262.097531 25.925391270.669456-26.002697-261.368432 34.550603270.307411-34.656054-260.351447 43.161589269.841881-43.297213-259.050255 51.754781269.272835-51.923099-257.469482 60.326603268.600234-60.530619-255.614625 68.873469267.824034-69.116657-253.491975 77.391783266.944186-77.678070-251.108518 85.877937265.960637-86.211679-248.471843 94.328312264.873330-94.714264-245.590038 102.739270263.682207-103.182557-242.471594 111.107161262.387206-111.613230-239.125308 119.428315260.988269-120.002890-235.560188 127.699042259.485336-128.348067-231.785369 135.915629257.878353-136.645204-227.810036 144.074339256.167269-144.890652-223.643356 152.171403254.352040-153.080657-219.294418 160.203023252.432630-161.211353-214.772183 168.165362250.409014-169.278756-210.085448 176.054540248.281177-177.278754-205.242811 183.866633246.049118-185.207100-200.252649 191.597661243.712852-193.059408-195.123102 199.243590241.272408-200.831146-189.862058 206.800317238.727836-208.517633-184.477148 214.263673236.079205-216.114035-178.975741 221.629409233.326604-223.615360-173.364945 228.893197230.470147-231.016459-167.651604 236.050620227.509970-238.312028-161.842304 243.097170224.446235-245.496603-155.943383 250.028245221.279133-252.564568-149.960934 256.839144218.008882-259.510157-143.900816 263.525068214.635731-266.327457-137.768673 270.081122211.159963-273.010421-131.569940 276.502313207.581895-279.552869-125.309864 282.783559203.901885-285.948506-118.993518 288.919692200.120328-292.190932-112.625819 294.905467196.237671-298.273656-106.211543 300.735570192.254405-304.190114-99.755343 306.404633188.171080-309.933690-93.261761 311.907240183.988305-315.497736-86.735247 317.237947179.706753-320.875597-80.180169 322.391294175.327168-326.060638-73.600826 327.361815170.850372-331.046270-67.001463 332.144060166.277265-335.825981-60.386275 336.732603161.608834-340.393370-53.759422 341.122061156.846157-344.742177-47.125033 345.307104151.990403-348.866322-40.487209 349.282471147.042839-352.759936-33.850034 353.042982142.004826-356.417400-27.217566 356.583552136.877826-359.833382-20.593843 359.899204131.663396-363.002873-13.982875 362.985084126.363192-365.921220-7.388639 365.836479120.978965-368.584159-0.815071 368.448833115.512561-370.9878495.733942 370.817763109.965916-373.12889712.254575 372.939088104.341060-375.00438418.743074 374.80884898.640113-376.61188425.195766 376.42333392.865284-377.94947631.609073 377.77911087.018877-379.01576037.979514 378.87305481.103287-379.80985444.303716 379.70238075.121006-380.33139650.578417 380.26467269.074627-380.58053656.800471 380.55791962.966847-380.55791962.966847 Table 5 to Fig. 6 Table 5 to Fig. 6 Numerical aperture = 0.75 1 / βx =-4.30 1 / βy =-8.00 Tracklerngth = 2272 mm Object-Image Shift = 3496 mm Width of the installation space = 4144 mm Total optically used mirror surface = 3.22 m 2 Linear pupil obscuration =20.0% Minimum angle on grazing incidence mirror = 68.8° Scan slot length on wafer =1.0 mm Scan-integrated wavefront RMS = 5.13 mλ Transmittance = 4.97% Light conductivity = 45.9 mm 2 Mirror with maximum diameter = M11 Maximum optical mirror diameter = 1185 mm Mirror with maximum area = M11 Fig. 7 shows a further embodiment of a projection optics or imaging optics 28 that can be used instead of the projection optics 10 in the projection exposure system 1. Components and functions that correspond to those already explained above with reference to Figs. 1 to 6 have the same reference numerals and will not be discussed in detail again. In terms of its basic structure, particularly as regards the sequence of the NI and GI mirrors, the projection optics 28 corresponds to the projection optics 24 to 26 according to Figs. 3 to 5 . The projection optics 28 have a small object image offset of 3078 mm. In the y-direction, the projection optics 28 has a build volume extension of approximately 3800 mm. A linear pupil obscuration of the projection optics 28 is 17.7%. Apart from mirror M9, which has a diameter of 1340 mm, all other mirrors M1 to M8 have a maximum diameter of 1090 mm, i.e. a maximum diameter that is less than 1100 mm. The optical design data for the projection optics 28 are shown in the following Tables 1 to 5, which in turn correspond in terms of basic structure to Tables 1 to 5 for the embodiment according to Fig. 6. Radii of the surfaces Table 1 to Fig. 7 Table 1 to Fig. 7 M01-3802.682309600.00051971-1676.544344460.00117879 M025483.71632352-0.000364722835.91067088-0.00070524 M0318684.94740962-0.00010699-2989.833796190.00066861 M04-3383.149367010.00059117-4060.551734540.00049254 M05-1427.800447930.00027721-12631.869313150.00003133 M06-1083.217264660.00054773-12409.939139900.00004781 M07-3364.797798690.00010658-24172.363759640.00001484 M085654.07862778-0.00008764356.62812090-0.00138952 M09-940.334641780.00212690-845.481305910.00236552 Decentering (location, angle) of the surfaces Table 2 for Fig. 7 Table 2 for Fig. 7 Reticle0.0000000000.0000000000.000000000 MO10.000000000-211.7685884952043.850270272 M020.000000000-453.2734348521033.239965232 M030.000000000-824.655034184625.644321190 M040.000000000-1657.202547503324.949427783 M050.000000000-2388.917736285299.442295454 M060.000000000-2659.117881455389.495249706 M070.000000000-2927.383260251742.919549874 M080.000000000-3211.9891988092202.749671139 Blende0.000000000-3190.8323814762094.229942531 M090.000000000-3077.8292643561514.602704235 Wafer0.000000000-3077.8292746962293.565169279 Retikel0.0000000000.0000000000.000000000 M01-3.7622136790.0000000000.000000000 M02242.1109187070.000000000-0.000000000 M03213.760072293-0.000000000-0.000000000 M04190.927455698-0.000000000-0.000000000 M05171.782081940-0.000000000-0.000000000 M06144.383927868-0.000000000-0.000000000 M07114.116041672-0.000000000-0.000000000 M0811.0319049990.000000000-0.000000000 Blende180.025296781-0.000000000-0.000000000 M09185.515952880-0.000000000-0.000000000 Wafer0.0000007610.000000000180.000000000 Freiformkoeffizienten der Flächen Tabelle 3a zu Fig. 7 Tabelle 3a zu Fig. 7 C2y9.5417099532e-066.5515825209e-051.3627140482e-03 C7x 2 y-2.0298418785e-096.0537765927e-08-1.0336865576e-07 C9y 3-6.3369275900e-08-1.5335707358e-074.0924749314e-08 C10x 45.4770030422e-121.5218484183e-106.9609966853e-11 C12x 2 y 24.7374095242e-11-1.1012810328e-103.4753920982e-11 C14y 4-7.0084802009e-111.0390020126e-091.7948304117e-11 C16x 4 y4.4871335983e-141.3486786517e-14-7.6431485379e-14 C18x 2 y 3-3.7418640834e-14-2.7558457279e-135.7309716683e-14 C20y 52.5122502544e-13-1.6022786070e-12-1.6594984255e-13 C21x 61.3486716692e-173.0992318862e-161.3204895377e-16 C23x 4 y 26.4181864949e-175.6105304127e-161.4974107576e-17 C25x 2 y 4-1.7896395315e-17-1.4186829797e-15-3.0645038225e-16 C27y 61.3951251031e-16-1.6756783349e-142.5169959529e-17 C29x 6 y-3.3901576563e-215.5598896526e-21-3.0809774216e-19 C31x 4 y 31.9533575220e-191.1318488414e-18-3.9538690912e-20 C33x 2 y 5-2.6142703533e-193.6013493960e-18-8.1981637023e-19 C35y 7-1.0305564352e-171.6370228946e-161.5275620766e-18 C36x 8-6.9774455104e-23-6.1409494865e-222.1994260238e-22 C38x 6 y 2-1.3209138162e-24-4.9756496816e-214.6205695735e-22 C40x 4 y 44.9388480250e-22-2.9003648609e-21-2.4016454256e-21 C42x 2 y 64.2207028861e-21-2.0739241881e-208.0903923838e-21 C44y 8-4.7119907239e-21-6.073 6448311 e-20-2.0021739798e-22 C46x 8 y-1.4224326099e-25-3.8867135911e-246.4253536051e-25 C48x 6 y 32.0496082385e-244.3647471232e-23-7.1767000513e-25 C50x 4 y 52.9149154798e-234.4617738601e-241.4064089107e-23 C52x 2 y 72.3326250338e-22-2.1519176397e-22-2.5490959217e-24 C54y 96.3340375869e-22-6.3032963173e-21-3.1909151375e-23 C55x 101.6412835344e-272.3655656576e-26-4.6330471202e-27 C57x 8 y 26.2199641829e-276.3125283437e-26-6.0401479582e-27 C59x 6 y 4-1.5284239944e-264.6329645955e-25-1.8619839817e-26 C61x 4 y 6-1.1774911038e-25-5.6118685473e-255.5100786685e-27 C63x 2 y 8-8.2095364062e-26-2.0979319362e-24-1.3550146566e-25 C65y 101.1786446772e-241.4543640188e-236.2368116810e-26 C67x 10 y2.3042617805e-301.1060736124e-28-1.8603010522e-29 C69x 8 y 3-1.2690709309e-28-7.1752951091e-28-7.8356822268e-29 C71x 6 y 5-1.2304806553e-27-3.0830735729e-271.4257059468e-28 C73x 4 y 7-6.4646886429e-27-2.5558657972e-27-2.3266662206e-28 C75x 2 y 9-2.7913031664e-261.3406738181e-272.6651275626e-28 C77y 11-4.7322941952e-261.5692879871e-253.8758860884e-28 C78x 12-3.0259838305e-32-2.6240770911e-313.3669772270e-32 C80x 10 y 2-2.3215184671e-31-1.3002546389e-304.5427428194e-32 C82x 8 y 4-2.0968186451e-31-4.7116799621e-306.3715396971e-31 C84x 6 y 65.6152373773e-30-1.3506071588e-29-1.3370748853e-31 C86x 4 y 81.9585526407e-294.1338991245e-291.5447308244e-31 C88x 2 y 10-1.6417647672e-291.3598758369e-281.7715149238e-30 C90y 12-1.3096266250e-28-4.9511702069e-28-1.4222272578e-30 C92x 12 y-4.6961878571e-35-8.5562843876e-342.4561205080e-34 C94x 10 y 33.0010189295e-332.6041370579e-331.0497230108e-33 C96x 8 y 53.8643490830e-325.3214868361e-32-8.4084668790e-34 C98x 6 y 71.9181088269e-311.8579412442e-31-1.4113743413e-33 C100x 4 y 97.3820796829e-31-2.1302414198e-323.8110108259e-33 C102x 2 y 112.2346898309e-30-1.1389814452e-32-7. 1793087240e-33 C104y 132.9313621726e-30-2.9790910004e-30-2.3327973364e-33 C105x 144.0363794382e-371.7384783976e-36-2.2327505550e-37 C107x 12 y 24.8699251551e-361.5006706086e-35-6.9769314109e-37 C109x 10 y 41.8615060227e-353.9064324716e-35-3.2524124598e-36 C111x 8 y 6-5.9858669253e-359.8351430558e-35-6.2929976375e-36 C113x 6 y 8-9.0033463110e-346.1161793104e-344.2340176639e-36 C115x 4 y 10-2.0257697341e-33-1.8560509345e-33-1.1639717854e-35 C117x 2 y 121.3919620359e-33-4.0997357132e-33-7.7524139767e-36 C119y 147.5536790067e-339.8092879552e-331.5669344721e-35 C121x 14 y8.6585331053e-403.8147566092e-39-2.2113299928e-39 C123x 12 y 3-3.9802623291e-38-2.7635922074e-39-4.7319376700e-39 C125x 10 y 5-7.0573650593e-37-3.0732882372e-37-3.2369999666e-39 C127x 8 y 7-4.3632468652e-36-2.5962442810e-364.8927258227e-39 C129x 6 y 9-1.6339904111e-35-3.6688103143e-36-4.3677257194e-40 C131x 4 y 11-5.1906394048e-352.7405708502e-36-1.4552973720e-38 C133x 2 y 13-1.2437333344e-34-1.4944526402e-377.3279384866e-38 C135y 15-1.3387394143e-344.9758846189e-35-7.1904906076e-41 C136x 16-3.9222810546e-42-6.2099817158e-428.8479263127e-43 C138x 14 y 2-6.6787042738e-41-7.6469251336e-417.0447073770e-42 C140x 12 y 4-4.1890103739e-40-2.7401057466e-403.0471760946e-42 C142x 10 y 6-7.1879381682e-40-2.651184413 1e-402.0516724232e-41 C144x 8 y 81.2481451256e-38-3.6738257703e-396.3657552814e-41 C146x 6 y 108.2226128660e-38-1.0310194253e-38-3.4835759574e-41 C148x 4 y 121.3834344058e-374.8688271026e-381.2979931070e-40 C150x 2 y 14-4.4784190497e-384.5265576741e-38-4.0013226600e-41 C152y 16-2.7136171024e-37-1. 1197700703e-37-8.6704077851e-41 C154x 16 y-1.0589637012e-44-7.5362593426e-451.1550357168e-44 C156x 14 y 33.1872127367e-436.1623608924e-441.3204179494e-44 C158x 12 y 57.8524400426e-428.8926314701e-43-7.8780066834e-45 C160x 10 y 76.2563270900e-411.1243372693e-411.1446308319e-43 C162x 8 y 92.7160222248e-404.3303417060e-41-4.9891565536e-44 C164x 6 y 118.6326416756e-402.6979724938e-417.6917703919e-44 C166x 4 y 132.3662007049e-391.2073602563e-42-1.3914613211e-43 C168x 2 y 154.7486588888e-39-3.5844082430e-41-2.6887447089e-43 C170y 174.3217036991e-39-5.9780970285e-407.1061716168e-44 C171x 182.7623589434e-479.1915197278e-48-1.5871119630e-48 C173x 16 y 26.2423465049e-461.5072043399e-46-2.2670885739e-47 C175x 14 y 45.1532665633e-458.4648187549e-46-2.6213347097e-48 C177x 12 y 62.4435336759e-441.4841662763e-456.2825779178e-47 C179x 10 y 8-4.4130287717e-443.3543085069e-45-2.5973986371e-46 C181x 8 y 10-1.0726150609e-424.0133070749e-44-1.5207555306e-46 C183x 6 y 12-4.5504957441e-421.6962778827e-444.8416135090e-47 C185x 4 y 14-6.3003864371e-42-4.3467299427e-43-3.6046988188e-46 C187x 2 y 161.1708474623e-43-7.6194890532e-442.9117024598e-46 C189y 186.3603352114e-424.9814134123e-432.0282905753e-46 C191x 18 y8.0933777208e-501.2843748784e-51-2.4090983449e-50 C193x 16 y 3-1.5049200541e-48-3.1633585014e-49-4.1656167504e-50 C195x 14 y 5-5.4168428400e-47-1.8601824261e-481.1420770169e-49 C197x 12 y 7-5.4709338706e-46-1.8129707326e-47-2.4698262992e-49 C199x 10 y 9-2.9217930812e-45-9.9253733005e-47-4.1154667764e-49 C201x 8 y 11-1.0249512568e-44-2.4853712494e-461.6454246930e-49 C203x 6 y 13-2.9051940083e-44-1.3917513900e-46-1.8011644755e-49 C205x 4 y 15-7.0038929246e-44-4.2988589016e-466.9139162754e-49 C207x 2 y 17-1.2103492360e-438.6049268773e-461.6340455645e-49 C209y 19-9.5116874022e-443.0753858722e-45-2.7199327519e-49 C210x 20-1.3710634246e-520.0000000000e+000.0000000000e+00 C212x 18 y 2-3.9477017457e-510.0000000000e+000.0000000000e+00 C214x 16 y 4-3.9016260711e-500.0000000000e+000.0000000000e+00 C216x 14 y 6-2.7427111270e-490.0000000000e+000.0000000000e+00 C218x 12 y 8-5.6155946653e-490.0000000000e+000.0000000000e+00 C220x 10 y 105.7263332623e-480.0000000000e+000.0000000000e+00 C222x 8 y 124.9758847478e-470.0000000000e+000.0000000000e+00 C224x 6 y 141.5620742661e-460.0000000000e+000.0000000000e+00 C226x 4 y 161.8845540945e-460.0000000000e+000.0000000000e+00 C228x 2 y 183.6261261208e-470.0000000000e+000.0000000000e+00 C230y 20-9.5434607481e-470.0000000000e+000.0000000000e+00 C232x 20 y-3.7378527256e-550.0000000000e+000.0000000000e+00 C234x 18 y 33.6531867271e-540.0000000000e+000.0000000000e+00 C236x 16 y 52.2489109861e-520.0000000000e+000.0000000000e+00 C238x 14 y 72.8271813895e-510.0000000000e+000.0000000000e+00 C240x 12 y 91.8630437565e-500.0000000000e+000.0000000000e+00 C242x 10 y 117.6811831759e-500.0000000000e+000.0000000000e+00 C244x 8 y 132.3494028499e-490.0000000000e+000.0000000000e+00 C246x 6 y 156.0538700319e-490.0000000000e+000.0000000000e+00 C248x 4 y 171.2975985717e-480.0000000000e+000.0000000000e+00 C250x 2 y 191.9609888971e-480.0000000000e+000.0000000000e+00 C252y 211.3515695784e-480.0000000000e+000.0000000000e+00 C253x 224.5307266574e-580.0000000000e+000.0000000000e+00 C255x 20 y 21.6126361396e-560.0000000000e+000.0000000000e+00 C257x 18 y 41.8207133568e-550.0000000000e+000.0000000000e+00 C259x 16 y 61.6212272040e-540.0000000000e+000.0000000000e+00 C261x 14 y 86.9812481064e-540.0000000000e+000.0000000000e+00 C263x 12 y 10-4.9321865349e-540.0000000000e+000.0000000000e+00 C265x 10 y 12-2.3589957002e-520.0000000000e+000.0000000000e+00 C267x 8 y 14-1.3013078078e-510.0000000000e+000.0000000000e+00 C269x 6 y 16-3.2511219449e-510.0000000000e+000.0000000000e+00 C271x 4 y 18-3.5309833715e-510.0000000000e+000.0000000000e+00 C273x 2 y 20-1.1497059107e-510.0000000000e+000.0000000000e+00 C275y 228.4418802881e-520.0000000000e+000.0000000000e+00 C277x 22 y9.5543174757e-610.0000000000e+000.0000000000e+00 C279x 20 y 3-2.3432275510e-600.0000000000e+000.0000000000e+00 C281x 18 y 5-5.1032815430e-580.0000000000e+000.0000000000e+00 C283x 16 y 7-7.9011524987e-570.0000000000e+000.0000000000e+00 C285x 14 y 9-6.3433937678e-560.0000000000e+000.0000000000e+00 C287x 12 y 11-3.1330516751e-550.0000000000e+000.0000000000e+00 C289x 10 y 13-1.0848390661e-540.0000000000e+000.0000000000e+00 C291x 8 y 15-3.0135746513e-540.0000000000e+000.0000000000e+00 C293x 6 y 17-7.1067628931e-540.0000000000e+000.0000000000e+00 C295x 4 y 19-1.3652266995e-530.0000000000e+000.0000000000e+00 C297x 2 y 21-1.8230274021e-530.0000000000e+000.0000000000e+00 C299y 23-1.1152516062e-530.0000000000e+000.0000000000e+00 C300x 24-8.9089126736e-640.0000000000e+000.0000000000e+00 C302x 22 y 2-3 .8285250311 e-620.0000000000e+000.0000000000e+00 C304x 20 y 4-4.8241201929e-610.0000000000e+000.0000000000e+00 C306x 18 y 6-5.0562011601e-600.0000000000e+000.0000000000e+00 C308x 16 y 8-3.0485598116e-590.0000000000e+000.0000000000e+00 C310x 14 y 10-6.7215647348e-590.0000000000e+000.0000000000e+00 C312x 12 y 124.1740006315e-580.0000000000e+000.0000000000e+00 C314x 10 y 144.4214006311e-570.0000000000e+000.0000000000e+00 C316x 8 y 161.8044962932e-560.0000000000e+000.0000000000e+00 C318x 6 y 183.7531323771e-560.0000000000e+000.0000000000e+00 C320x 4 y 203.7416853717e-560.0000000000e+000.0000000000e+00 C322x 2 y 221.5159558804e-560.0000000000e+000.0000000000e+00 C324y 24-3.5463069485e-570.0000000000e+000.0000000000e+00 C326x 24 y-1.0384225029e-660.0000000000e+000.0000000000e+00 C328x 22 y 3-4.1767650791e-660.0000000000e+000.0000000000e+00 C330x 20 y 54.7999573834e-640.0000000000e+000.0000000000e+00 C332x 18 y 79.1715045882e-630.0000000000e+000.0000000000e+00 C334x 16 y 98.8320196169e-620.0000000000e+000.0000000000e+00 C336x 14 y 115.2217447998e-610.0000000000e+000.0000000000e+00 C338x 12 y 132.0968830928e-600.0000000000e+000.0000000000e+00 C340x 10 y 156.4426127361e-600.0000000000e+000.0000000000e+00 C342x 8 y 171.6575222605e-590.0000000000e+000.0000000000e+00 C344x 6 y 193.5858101128e-590.0000000000e+000.0000000000e+00 C346x 4 y 216.2165111577e-590.0000000000e+000.0000000000e+00 C348x 2 y 237.3946214879e-590.0000000000e+000.0000000000e+00 C350y 254.0550130917e-590.0000000000e+000.0000000000e+00 C351x 267.8556754080e-700.0000000000e+000.0000000000e+00 C353x 24 y 23.9996051710e-680.0000000000e+000.0000000000e+00 C355x 22 y 45.5653675279e-670.0000000000e+000.0000000000e+00 C357x 20 y 66.5717742604e-660.0000000000e+000.0000000000e+00 C359x 18 y 84.9419909964e-650.0000000000e+000.0000000000e+00 C361x 16 y 101.9417811152e-640.0000000000e+000.0000000000e+00 C363x 14 y 121.5325673338e-650.0000000000e+000.0000000000e+00 C365x 12 y 14-4.8990238138e-630.0000000000e+000.0000000000e+00 C367x 10 y 16-3.1795036533e-620.0000000000e+000.0000000000e+00 C369x 8 y 18-1.0313503272e-610.0000000000e+000.0000000000e+00 C371x 6 y 20-1.8425289055e-610.0000000000e+000.0000000000e+00 C373x 4 y 22-1.7080633894e-610.0000000000e+000.0000000000e+00 C375x 2 y 24-7.6902662432e-620.0000000000e+000.0000000000e+00 C377y 262.6897625673e-630.0000000000e+000.0000000000e+00 Tabelle 3b zu Fig. 7 Tabelle 3b zu Fig. 7 C2y-2.9534119456e-04-3.8857999176e-04-2.9282602121e-03 C7x 2 y-9.0599785255e-08-1.2871101984e-09-1.4769778439e-07 C9y 3-1.4042273278e-081.0264792387e-071.1008481774e-07 C10x 4-4.4184351095e-11-4.3658352020e-112.0206049336e-11 C12x 2 y 2-1.2137210395e-111.6287922044e-10-1.5844980531e-10 C14y 4-8.2725342585e-11-1.7486286109e-101.5973179751e-10 C16x 4 y-2.5174978730e-149.4788286118e-14-4.9499160802e-14 C18x 2 y 3-2.0596601911e-13-7.0338342092e-13-9.0643785983e-13 C20y 5-1.0139411511e-135.1385130329e-141.0133815773e-14 C21x 6-4.1575789169e-171.4220999425e-178.2233419176e-18 C23x 4 y 2-2.4170270984e-16-8.8168649745e-161.5506544195e-16 C25x 2 y 4-3.9936271705e-16-3.2398629382e-16-3.2885912245e-16 C27y 68.9053536245e-17-1.4757302547e-152.0280127672e-14 C29x 6 y-1.2524695953e-19-4.3308422263e-19-4.9895259411e-20 C31x 4 y 3-8.1955185357e-19-1.2905250581e-181.9025240618e-18 C33x 2 y 51.1720210823e-19-4.9369344803e-18-2.1237184931e-17 C35y 75.8296067863e-19-7.2550189907e-185.5115389725e-17 C36x 8-8.0450629138e-23-1.3038942571e-224.4226786733e-23 C38x 6 y 2-8.8507643760e-22-2.2081866484e-215.5216029445e-22 C40x 4 y 4-4.5010099980e-22-1.8891988109e-201.1171961305e-20 C42x 2 y 61.7719840628e-21-7.8498208610e-20-2.9689365790e-19 C44y 82.6285817625e-22-5.7912969972e-19-2.6454293354e-18 C46x 8 y-1.2532662119e-25-1.2993626791e-245.5279899104e-26 C48x 6 y 3-4.0606190914e-25-1.8233663644e-23-1.5280429007e-24 C50x 4 y 53.6040841126e-24-2.5781494230e-221.5488227673e-22 C52x 2 y 72.5377311330e-24-3.1407500412e-217.0047896023e-21 C54y 9-3.0106765136e-24-4.0230985473e-21-7.9955008624e-20 C55x 102.6169542295e-281.2271473759e-28-2.5307031440e-28 C57x 8 y 23.9889688325e-28-1.2947134411e-27-1.8403445725e-27 C59x 6 y 46.4549050450e-272.7533557560e-26-5.6314283110e-26 C61x 4 y 61.0842537957e-26-3.7419511053e-24-1.1017805116e-24 C63x 2 y 8-4.0327201058e-27-1.8757086717e-237.8491804913e-23 C65y 10-5.8901796476e-276.9390429166e-231.6437439713e-21 C67x 10 y-3.1869737023e-30-3.8537944556e-31-3.9771525687e-30 C69x 8 y 3-4.6396951402e-302.5506026285e-28-1.4212954411e-29 C71x 6 y 5-4.8822772361e-302.4319884245e-273.1069703802e-29 C73x 4 yy 7-3.6036490720e-302.3847465410e-26-9.8646201430e-26 C75x 2 y 9-2.4803614737e-293.0302253203e-25-3.6435965700e-24 C77y 113.6117924080e-309.7898534343e-252.5924976825e-23 C78x 12-4.3727349750e-34-4.4697093549e-331.5381438742e-33 C80x 10 y 2-1.9432492387e-321.1842712459e-31-1.7256983880e-32 C82x 8 y 4-8.7759185864e-322.5633022647e-30-1.3352869498e-32 C84x 6 y 6-3.7746815309e-329.1608299721e-293.6463323710e-29 C86x 4 y 8-8.8873419493e-329.9393881360e-281.0862663590e-27 C88x 2 y 10-4.8808568388e-325.3268427786e-272.6895665468e-27 C90y 122.0644750917e-326.2970994427e-28-5.9721066834e-25 C92x 12 y8.5740181205e-363.1242298042e-353.0786859825e-35 C94x 10 y 3-5.1463157199e-35-3.2909907400e-341.2018101966e-34 C96x 8 y 51.0176958331e-344.7116126193e-32-1.0818011170e-32 C98x 6 y 71.3935288192e-341.0547347637e-307.1729744748e-32 C100x 4 y 9-1.6448906509e-341.1743459521e-293.5679627955e-29 C102x 2 y 11-2.1799522429e-352.7074190575e-297.3311920963e-28 C104y 134.9783505943e-36-5.1715969793e-29-3.4749135650e-27 C105x 14-7.3168410771e-392.9161470131e-38-4.6875639474e-39 C107x 12 y 26.9456101613e-38-5.7522855855e-371.4828452993e-37 C109x 10 y 47.8226614225e-376.4451690793e-362.7169529652e-36 C111x 8 y 61.4079901241e-361.1525201575e-34-1.6840361738e-34 C113x 6 y 84.5043347038e-379.2122669456e-33-1.3921260243e-32 C115x 4 y 101.5134275109e-375.8469317028e-32-4.1792778162e-31 C117x 2 y 121.0537079640e-372.8927027717e-32-4.1406360464e-30 C119y 14-5.4841414940e-38-3.6472165563e-311. 1274137340e-28 C121x 14 y-1.8366881863e-41-1.3495584392e-40-1.2199011707e-40 C123x 12 y 36.7303135729e-402.1463906420e-39-1.2013682017e-39 C125x 10 y 52.2181596629e-39-1.8631410820e-376.7727369760e-38 C127x 8 y 79.7654202746e-409.3869618915e-372.4166590641e-36 C129x 6 y 9-8.2224093046e-404.0531674680e-35-2.6049810925e-35 C131x 4 y 113.9400129995e-409.8567944975e-35-4.7760004167e-33 C133x 2 y 131.7314406081e-40-1.0817676429e-34-6.1166356923e-32 C135y 15-9.8360613364e-41-1.0791670203e-331.0017261654e-31 C136x 163.4230456263e-44-1.0087157115e-435.3499827857e-45 C138x 14 y 2-3.4420564501e-441.8106167311e-42-4.4931448058e-43 C140x 12 y 4-6.2206132608e-43-8.5424738277e-41-1.4797312597e-41 C142x 10 y 6-3.5300245156e-42-9.8819770922e-402.1472529247e-40 C144x 8 y 8-8.7486124987e-425.7509371652e-394.4767844007e-38 C146x 6 y 10-6.0191344027e-423.9470119201e-382.4316644896e-36 C148x 4 y 12-1.7835752408e-42-4.0815099597e-387.3205011190e-35 C150x 2 y 14-3.4533499445e-43-3.2498035119e-395.9505364835e-34 C152y 16-5.2477880650e-44-9.8778103528e-37-1. 1376873494e-32 C154x 16 y2.5854732016e-471.7789123091e-462.4136345640e-46 C156x 14 y 3-1.4363880423e-45-1.4208448756e-445.2982627049e-45 C158x 12 y 5-8.7170532473e-45-5.1458991402e-43-1.3537449432e-43 C160x 10 y 7-2.2807958911e-444.4731428671e-43-9.8547604739e-42 C162x 8 y 9-2.2529588051e-44-1.6262025442e-41-3.2446275174e-40 C164x 6 y 11-1.2533542774e-44-1.5007306610e-40-3.3456703393e-39 C166x 4 y 13-6.4945111547e-459.3512738737e-411.0621200418e-37 C168x 2 y 15-1.4934732070e-458.8769527828e-408.0585906120e-37 C170y 171.3685265004e-463.6975124273e-392.6818436119e-35 C171x 18-4.7956025239e-501.6993895976e-49-4.9378979474e-52 C173x 16 y 2-1.1226737713e-49-1.7352001098e-484.9842776830e-49 C175x 14 y 4-2.8779600416e-48-1.2228073252e-462.4453586970e-47 C177x 12 y 6-1.9777399028e-474.9311738611e-472.6469500732e-46 C179x 10 y 8-3.1648314989e-47-1.4726159369e-45-5.0330868411e-44 C181x 8 y 10-2.0833066494e-47-9.5162577513e-44-3.3882684302e-42 C183x 6 y 12-1.2569292619e-47-3.2517651591e-43-1.7428473609e-40 C185x 4 y 14-8.020431823 1e-481.4732622594e-42-4.6704854208e-39 C187x 2 y 16-1.8153272054e-48-3.4034332044e-43-2.3205877159e-38 C189y 183.1497128109e-491.4959601226e-414.8271885133e-37 C191x 18 y-5.2860356641e-538.6337296326e-52-1.8710685365e-52 C193x 16 y 35.0115730375e-52-2.5994019541e-50-7.8805138899e-51 C195x 14 y 5-3.2619218112e-511.3748043773e-492.3653326099e-50 C197x 12 y 7-1.3427000480e-50-1.2163506453e-481.0393205209e-47 C199x 10 y 9-1.3319802084e-505.1725934702e-486.7283024724e-46 C201x 8 y 11-7.0677970395e-51-1.7679141888e-462.3929661997e-44 C203x 6 y 13-5.1876238023e-512.4900269083e-468.3181351362e-43 C205x 4 y 15-3.6362306070e-518.9826502979e-461.6459409628e-41 C207x 2 y 17-7.4443472634e-52-1.6118314438e-456.3124149738e-41 C209y 191.9422227272e-521.6585611737e-44-2.2634333365e-39 Tabelle 3c zu Fig. 7 Tabelle 3c zu Fig. 7 C2y2.4701302740e-022.6953397215e-015.7893744866e-02 C7x 2 y-6.2642768447e-08-6.7143054673e-073.4831550564e-08 C9y 31.5714983903e-083.6212612160e-064.5572076693e-08 C10x 43.5374517758e-116.9774529896e-10-2.1526344394e-11 C12x 2 y 2-4.2970525427e-111.6680628750e-10-4.5275581774e-11 C14y 4-2.7420907311e-111.8029946489e-08-3.6235996484e-11 C16x 4 y-9.3925365240e-148.9057842165e-133.1998327334e-14 C18x 2 y 37.0955802173e-15-4.4566371528e-128.0376065687e-14 C20y 58.5342978489e-141.1546341390e-104.7034395516e-14 C21x 62.0663617922e-166.8885393097e-16-3.4136951047e-17 C23x 4 y 25.2959818755e-171.4415984924e-14-9.7670432261e-17 C25x 2 y 4-3.8255483138e-161.3480254192e-14-1.3183384171e-16 C27y 6-3.7470014765e-161.1204689658e-12-4.4894408520e-17 C29x 6 y3.1014750668e-19-5.5201818884e-183.8206710241e-20 C31x 4 y 31.1812099017e-187.9968963171e-171.3263451267e-19 C33x 2 y 53.1764146119e-18-3.9316666391e-161.4727249617e-19 C35y 71.4838498221e-189.5444954567e-151.0633641339e-19 C36x 8-6.2607848769e-228.7358619957e-21-3.9953848754e-23 C38x 6 y 2-3.0589173229e-21-5.8287095706e-20-1.6195378011e-22 C40x 4 y 4-1.4540989337e-208.6492251947e-19-3.1529370416e-22 C42x 2 y 6-1.3308570527e-20-2.3032401984e-18-2.1916647469e-22 C44y 8-3.6424405565e-214.2418110358e-17-2.0241430934e-23 C46x 8 y3.2765070846e-246.5846655150e-232.6825680750e-26 C48x 6 y 33.2776888043e-23-1.3164959476e-212.1145250437e-25 C50x 4 y 53.4584952849e-23-2.4686006016e-213.6508169295e-25 C52x 2 y 71.8951155370e-238.4828648644e-204.0705992477e-25 C54y 91.5401726557e-24-6.0530709881e-20-1.3091646793e-25 C55x 108.0772987118e-27-1.1087937124e-25-6.4645624383e-29 C57x 8 y 2-3.1369671084e-262.3321840121e-24-3.2074959371e-28 C59x 6 y 45.7214191654e-26-4.0522629033e-24-8.7161971599e-28 C61x 4 y 68.6307540244e-26-1.9123564758e-22-7.8692791804e-28 C63x 2 y 89.3046029078e-261.4457804765e-21-3.5725274581e-28 C65y 102.1389482489e-26-1.8732928620e-21-3.2064411305e-28 C67x 10 y2.9853375770e-29-7.1606798176e-281.0416816482e-31 C69x 8 y 3-4.3218530354e-283.4608097529e-26-1.3161784716e-31 C71x 6 y 5-4.6530965469e-283.4457114928e-25-3.4508825473e-31 C73x 4 yy 7-6.0415943015e-28-1.3698557145e-24-2.0389588631e-31 C75x 2 y 9-4.4294048500e-287.7743902614e-24-3.5361370472e-31 C77y 11-4.2301342247e-29-1.0786603642e-231.0349443563e-30 C78x 12-1.9059313621e-312.9355670287e-301.1076427564e-34 C80x 10 y 21.0870155679e-30-5.4177549750e-294.9710330256e-34 C82x 8 y 4-4.1481562744e-315.9931454889e-292.4482663946e-33 C84x 6 y 6-2.0720830048e-305.0253879445e-272.2891708935e-33 C86x 4 y 83.9854416609e-311.3983401043e-26-4.8618361985e-34 C88x 2 y 10-1.6537546724e-31-2.9871041318e-27-2.1795242809e-33 C90y 12-2.0207285761e-31-2.8401397819e-261.4167991201e-34 C92x 12 y-9.2727950722e-34-1.5732310971e-332.2140998254e-37 C94x 10 y 38.3399011289e-33-4.9700559670e-315.1841146128e-36 C96x 8 y 51.9778539226e-32-4.5611220768e-301.6939748306e-35 C98x 6 yy 73.2872756656e-331.8923676394e-312.8505907760e-35 C100x 4 y 94.8162850258e-332.4515467454e-282.0964232023e-35 C102x 2 y 116.0124376566e-33-2.4173232578e-287.0233163953e-36 C104y 131.3649039091e-332.0512318049e-29-3.0278372142e-36 C105x 142.6202362261e-36-5.1080747947e-35-1.2839922865e-39 C107x 12 y 2-2.5428602977e-351.0658180432e-33-9.1820756641e-39 C109x 10 y 4-5.2610134964e-351.4320458438e-33-3.8472216125e-38 C111x 8 y 66.6828323997e-35-3.4033980474e-32-6.7985515215e-38 C113x 6 y 84.6706933003e-35-4.7287738977e-31-5.5686213303e-38 C115x 4 y 10-2.1631862407e-351.0495970387e-30-1.2350286647e-38 C117x 2 y 12-2.0891056317e-35-1.5470356535e-301.2133790595e-38 C119y 14-3.9302624965e-364.5674633589e-312.2866687571e-39 C121x 14 y1.2933718674e-383.1000868019e-37-2.7472800352e-42 C123x 12 y 3-3.4934138600e-383.9014592324e-36-3.3556350757e-41 C125x 10 y 5-4.9194794192e-37-8.6307858702e-36-1.2979093073e-40 C127x 8 y 7-4.4931277015e-372.0934596582e-34-2.7580216218e-40 C129x 6 y 9-4.1114629834e-38-3.6946821248e-33-3.1997325018e-40 C131x 4 y 119.7311896456e-38-9.0448551453e-34-1.8206374527e-40 C133x 2 y 134.2556991376e-38-6.5070744966e-33-3.8514383756e-41 C135y 157.0718647675e-399.3869547253e-349.7615524446e-42 C136x 16-2.0651466540e-415.9927430648e-406.3286949076e-45 C138x 14 y 22.4854164279e-40-1.8272601557e-385.4210109805e-44 C140x 12 y 41.4238140724e-39-9.2014451298e-382. 50265 5 8151 e-43 C142x 10 y 67.7308545689e-40-8.8631091871e-375.6348307135e-43 C144x 8 y 8-6.9405356476e-403.0280620670e-366.8288785466e-43 C146x 6 y 10-8.8974128519e-40-8.1907778064e-364.0399086075e-43 C148x 4 y 12-3.8171068169e-40-9.1463572385e-364.3334808104e-44 C150x 2 y 14-6.8816213898e-41-1.8306023857e-35-8.6984049757e-44 C152y 16-8.6772611100e-42-6.6090965842e-36-2.2106728339e-44 C154x 16 y-6.6880534579e-44-8.4041975174e-421.4715045471e-47 C156x 14 y 3-8.7347825417e-43-3.3493398300e-411.6173262421e-46 C158x 12 y 51.9327102901e-429.9300873961e-407.0552049958e-46 C160x 10 y 76.6868802624e-42-4.2142548335e-391.8085770083e-45 C162x 8 y 96.9169106330e-421.5006506939e-382.7731226373e-45 C164x 6 y 113.2930712794e-421.2388999930e-392.4636353757e-45 C166x 4 y 138.5228307154e-437.4710835771e-381.1741769364e-45 C168x 2 y 159.1918718612e-44-2.8734149634e-382.2623705684e-46 C170y 177.2845120681e-45-5.1973967229e-38-1.5713623105e-47 C171x 187.0528391746e-47-4.0549727735e-45-2.3790142727e-50 C173x 16 y 2-7.5237890409e-462.6306548301e-43-2.3412647922e-49 C175x 14 y 4-8.8140417711e-452.3997510166e-42-1.1876921895e-48 C177x 12 y 6-1.8014844033e-442.8991830598e-41-3.2135270791e-48 C179x 10 y 8-1.9132185426e-449.8067952361e-41-5.1688981634e-48 C181x 8 y 10-1.2799622406e-441.3113087496e-40-4.8884768714e-48 C183x 6 y 12-4.4910856611e-45-2.0482930115e-40-2.4579268661e-48 C185x 4 y 14-9.4577712964e-464.3235819757e-40-3.1124129310e-49 C187x 2 y 16-8.0552439624e-47-1.2030185168e-403.2488011732e-49 C189y 18-3.8408681882e-48-1.2441106435e-408.8139291671e-50 C191x 18 y-1.0155848241e-501.4804381506e-46-4.2423646452e-53 C193x 16 y 36.3208307104e-481.1421612798e-45-4.8870060799e-52 C195x 14 y 51.6948322707e-47-6.7418182427e-45-2.3957483807e-51 C197x 12 y 71.8312559066e-471.4417863084e-43-7.0795185332e-51 C199x 10 y 91.3580582074e-471.1579996941e-42-1.3458723604e-50 C201x 8 y 117.7546041734e-486.7926638690e-43-1.6017904274e-50 C203x 6 y 132.1668169077e-48-1.3415405095e-42-1.1543199930e-50 C205x 4 y 154.1076538918e-495.8539532574e-43-4.7721824051e-51 C207x 2 y 173.1334182235e-50-8.8539752673e-43-8.8643675658e-52 C209y 199.5811188824e-522.2871762688e-43-7.3571560559e-54 C210x 200.0000000000e+001.1437711607e-505.8956670172e-56 C212x 18 y 20.0000000000e+00-2.5420043913e-486.5044023030e-55 C214x 16 y 40.0000000000e+00-3.2425836639e-473.6298403210e-54 C216x 14 y 60.0000000000e+00-3.3376451877e-461. 1390850544e-53 C218x 12 y 80.0000000000e+00-1.3338845167e-452.2470181761e-53 C220x 10 y 100.0000000000e+003.0875725619e-452.8594779967e-53 C222x 8 y 120.0000000000e+00-3.0927123498e-452.2660648943e-53 C224x 6 y 140.0000000000e+006.7062299171e-461.0235683518e-53 C226x 4 y 160.0000000000e+004.6694596439e-451.6130568071e-54 C228x 2 y 180.0000000000e+00-2.1394733829e-45-7.1723369176e-55 C230y 200.0000000000e+001.9893725576e-45-2.0966844836e-55 C232x 20 y0.0000000000e+00-1.6875910524e-517.5276373088e-59 C234x 18 y 30.0000000000e+00-2.3639966377e-509.4896528527e-58 C236x 16 y 50.0000000000e+00-7.1364819483e-505.1899785123e-57 C238x 14 y 70.0000000000e+00-2.3619284158e-481.7266458720e-56 C240x 12 y 90.0000000000e+00-2.0852557681e-473.8276809408e-56 C242x 10 y 110.0000000000e+00-5.0788148791e-485.7193932228e-56 C244x 8 y 130.0000000000e+00-3.5369667819e-475.5431792503e-56 C246x 6 y 150.0000000000e+00-8.4872090884e-493.4012248262e-56 C248x 4 y 170.0000000000e+001.6753978277e-471.2646787257e-56 C250x 2 y 190.0000000000e+008.7119719776e-492.3341370446e-57 C252y 210.0000000000e+003.9097779365e-481. 1307265769e-58 C253x 220.0000000000e+009.7765793007e-58-9.5285398887e-62 C255x 20 y 20.0000000000e+001.2037403610e-53-1.1665808146e-60 C257x 18 y 40.0000000000e+002.2031013312e-52-7.1323573016e-60 C259x 16 y 60.0000000000e+001.5920149454e-51-2.5417934061e-59 C261x 14 y 80.0000000000e+00-4.7734885741e-51-5.8819472033e-59 C263x 12 y 100.0000000000e+00-9.7231087156e-50-9.2892211570e-59 C265x 10 y 120.0000000000e+004.5586879327e-50-9.9664885055e-59 C267x 8 y 140.0000000000e+00-2.5902675069e-50-6.9818626088e-59 C269x 6 y 160.0000000000e+00-1.7600454490e-49-3.0020435786e-59 C271x 4 y 180.0000000000e+00-1.0903432360e-49-6.0907935433e-60 C273x 2 y 200.0000000000e+00-1.3731453507e-515.4592451499e-61 C275y 220.0000000000e+002.7292950391e-512.6567681579e-61 C277x 22 y0.0000000000e+001.0913284181e-56-7.6839847671e-65 C279x 20 y 30.0000000000e+002.2841324819e-55-1.0683333924e-63 C281x 18 y 50.0000000000e+001.3050291709e-54-6.4451701957e-63 C283x 16 y 70.0000000000e+001.0844881531e-53-2.3792211660e-62 C285x 14 y 90.0000000000e+005.9847690597e-53-5.9633238131e-62 C287x 12 y 110.0000000000e+00-9.6809747862e-53-1.0521039004e-61 C289x 10 y 130.0000000000e+005.6157678001e-52-1.2845139635e-61 C291x 8 y 150.0000000000e+005.0065329214e-52-1.0527133043e-61 C293x 6 y 170.0000000000e+00-4.0768222077e-52-5.6853188416e-62 C295x 4 y 190.0000000000e+00-3.7347489288e-52-1.9405307246e-62 C297x 2 y 210.0000000000e+00-4.9272356326e-53-3.5346331852e-63 C299y 230.0000000000e+001.5932048348e-54-2.3509954770e-64 C300x 240.0000000000e+001.5449216673e-619.0040141893e-68 C302x 22 y 20.0000000000e+004.9179830919e-601.2151533724e-66 C304x 20 y 40.0000000000e+00-3.7086497492e-588.0974508054e-66 C306x 18 y 60.0000000000e+00-2.5134127766e-573.2239557449e-65 C308x 16 y 80.0000000000e+006.2927244653e-568.5164888506e-65 C310x 14 y 100.0000000000e+005.6839753442e-551.5851561282e-64 C312x 12 y 120.0000000000e+004.4924591104e-552.1168138841e-64 C314x 10 y 140.0000000000e+005.9621928581e-551.9845581185e-64 C316x 8 y 160.0000000000e+001.1622587417e-541.2655178501e-64 C318x 6 y 180.0000000000e+002.7019547671e-545.2632360799e-65 C320x 4 y 200.0000000000e+001.8643111642e-541.2294585770e-65 C322x 2 y 220.0000000000e+00-1.1722738022e-566.6017433743e-67 C324y 240.0000000000e+00-1.1883264316e-56-1.2827070116e-67 C326x 24 y0.0000000000e+00-3.0110885554e-623.6457833139e-71 C328x 22 y 30.0000000000e+00-8.6475037785e-615.5575844305e-70 C330x 20 y 50.0000000000e+00-6.7703223283e-603.6617071445e-69 C332x 18 y 70.0000000000e+00-7.1441787908e-601.4844983377e-68 C334x 16 y 90.0000000000e+003.0105505148e-584.1109283990e-68 C336x 14 y 110.0000000000e+001.8728802069e-578.2848268423e-68 C338x 12 y 130.0000000000e+006.1547358791e-581. 1997629028e-67 C340x 10 y 150.0000000000e+00-5.0818891408e-571.2356918578e-67 C342x 8 y 170.0000000000e+00-1.5087485960e-578.8310347653e-68 C344x 6 y 190.0000000000e+001.2815347387e-564.3103766925e-68 C346x 4 y 210.0000000000e+009.4623738998e-571.3742071414e-68 C348x 2 y 230.0000000000e+003.8601823085e-582.4704510722e-69 C350y 250.0000000000e+00-5.3789846246e-591.8612299329e-70 C351x 260.0000000000e+00-1.3063422408e-66-3.9289769091e-74 C353x 24 y 20.0000000000e+00-1.9878591206e-64-5.8222810874e-73 C355x 22 y 40.0000000000e+00-2.5871931138e-63-4.2105529490e-72 C357x 20 y 60.0000000000e+00-9.4080711163e-63-1.8496623898e-71 C359x 18 y 80.0000000000e+003.0814315884e-62-5.4846819873e-71 C361x 16 y 100.0000000000e+005.4175675967e-61-1.1671424890e-70 C363x 14 y 120.0000000000e+002.1361557291e-60-1.8465183243e-70 C365x 12 y 140.0000000000e+00-1.1236953007e-60-2.1488859106e-70 C367x 10 y 160.0000000000e+00-1.1161040854e-59-1.8071564461e-70 C369x 8 y 180.0000000000e+00-5.0571710485e-60-1.0726218266e-70 C371x 6 y 200.0000000000e+001.5213748460e-59-4.3606995886e-71 C373x 4 y 220.0000000000e+001.1070302982e-59-1.1058638363e-71 C375x 2 y 240.0000000000e+005.3439478970e-61-1.3249665254e-72 C377y 260.0000000000e+00-4.7094334674e-62-4.304107963 5e-74 Koordinaten des Blendenrandes Tabelle 4 zu Fig. 7 Tabelle 4 zu Fig. 7 -389.83124223.813786389.8632498.261325 -389.44590331.597566389.5088410.509323 -388.81536439.374882388.907127-7.215854 -387.94058247.136917388.058133-14.906571 -386.82263054.874791386.962136-22.555507 -385.46267562.579664385.619678-30.155663 -383.86195370.242855384.031572-37.700380 -382.02175677.855948382.198905-45.183350 -379.94343285.410912380.123037-52.598623 -377.62837792.900182377.805598-59.940620 -375.078054100.316727375.248484-67.204124 -372.293996107.654081372.453841-74.384275 -369.277831114.906349369.424057-81.476551 -366.031293122.068181366.161744-88.476742 -362.556246129.134735362.669720-95.380924 -358.854699136.101627358.950997-102.185425 -354.928829142.964883355.008760-108.886796 -350.781001149.720890350.846361-115.481791 -346.413794156.366364346.467305-121.967344 -341.830024162.898320341.875250-128.340556 -337.032773169.314052337.074000-134.598682 -332.025404175.611115332.067508-140.739135 -326.811585181.787313326.859875-146.759471 -321.395294187.840676321.455354-152.657395 -315.780823193.769444315.858345-158.430754 -309.972763199.572038310.073393-164.077534 -303.975990205.247042304.105181-169.595853 -297.795636210.793167297.958522-174.983953 -291.437060216.209231291.638340-180.240189 -284.905810221.494131285.149661-185.363021 -278.207589226.646820278.497588-190.351003 -271.348223231.666286271.687283-195.202768 -264.333623236.551535264.723947-199.917021 -257.169757241.301573257.612798-204.492528 -249.862617245.915391250.359052-208.928109 -242.418196250.391953242.967904-213.222631 -234.842465254.730187235.444514-217.375002 -227.141344258.928973227.793996-221.384174 -219.320692262.987138220.021406-225.249137 -211.386286266.903452212.131741-228.968922 -203.343810270.676627204.129934-232.542606 -195.198845274.305317196.020858-235.969310 -186.956863277.788119187.809331-239.248208 -178.623219281.123578179.500120-242.378528 -170.203153284.310194171.097952-245.359553 -161.701783287.346429162.607523-248.190627 -153.124108290.230710154.033506-250.871154 -144.475012292.961445145.380561-253.400600 -135.759265295.537030136.653340-255.778490 -126.981528297.955858127.856493-258.004405 -118.146359300.216332118.994677-260.077981 -109.258223302.316879110.072551-261.998906 -100.321499304.255961101.094779-263.766913 -91.340483306.03209192.066032-265.381773 -82.319407307.64384582.990982-266.843299 -73.262436309.08988173.874299-268.151332 -64.173683310.36895164.720651-269.305741 -55.057216311.47991655.534695-270.306420 -45.917062312.42175946.321082-271.153280 -36.757215313.19359937.084447-271.846254 -27.581644313.79470027.829414-272.385287 -18.394297314.22447918.560595-272.770339 -9.199108314.4825169.282593-273.001380 0.000000314.5685560.000000-273.078396 9.199108314.482516-9.282593-273.001380 18.394297314.224479-18.560595-272.770339 27.581644313.794700-27.829414-272.385287 36.757215313.193599-37.084447-271.846254 45.917062312.421759-46.321082-271.153280 55.057216311.479916-55.534695-270.306420 64.173683310.368951-64.720651-269.305741 73.262436309.089881-73.874299-268.151332 82.319407307.643845-82.990982-266.843299 91.340483306.032091-92.066032-265.381773 100.321499304.255961-101.094779-263.766913 109.258223302.316879-110.072551-261.998906 118.146359300.216332-118.994677-260.077981 126.981528297.955858-127.856493-258.004405 135.759265295.537030-136.653340-255.778490 144.475012292.961445-145.380561-253.400600 153.124108290.230710-154.033506-250.871154 161.701783287.346429-162.607523-248.190627 170.203153284.310194-171.097952-245.359553 178.623219281.123578-179.500120-242.378528 186.956863277.788119-187.809331-239.248208 195.198845274.305317-196.020858-235.969310 203.343810270.676627-204.129934-232.542606 211.386286266.903452-212.131741-228.968922 219.320692262.987138-220.021406-225.249137 227.141344258.928973-227.793996-221.384174 234.842465254.730187-235.444514-217.375002 242.418196250.391953-242.967904-213.222631 249.862617245.915391-250.359052-208.928109 257.169757241.301573-257.612798-204.492528 264.333623236.551535-264.723947-199.917021 271.348223231.666286-271.687283-195.202768 278.207589226.646820-278.497588-190.351003 284.905810221.494131-285.149661-185.363021 291.437060216.209231-291.638340-180.240189 297.795636210.793167-297.958522-174.983953 303.975990205.247042-304.105181-169.595853 309.972763199.572038-310.073393-164.077534 315.780823193.769444-315.858345-158.430754 321.395294187.840676-321.455354-152.657395 326.811585181.787313-326.859875-146.759471 332.025404175.611115-332.067508-140.739135 337.032773169.314052-337.074000-134.598682 341.830024162.898320-341.875250-128.340556 346.413794156.366364-346.467305-121.967344 350.781001149.720890-350.846361-115.481791 354.928829142.964883-355.008760-108.886796 358.854699136.101627-358.950997-102.185425 362.556246129.134735-362.669720-95.380924 366.031293122.068181-366.161744-88.476742 369.277831114.906349-369.424057-81.476551 372.293996107.654081-372.453841-74.384275 375.078054100.316727-375.248484-67.204124 377.62837792.900182-377.805598-59.940620 379.94343285.410912-380.123037-52.598623 382.02175677.855948-382.198905-45.183350 383.86195370.242855-384.031572-37.700380 385.46267562.579664-385.619678-30.155663 386.82263054.874791-386.962136-22.555507 387.94058247.136917-388.058133-14.906571 388.81536439.374882-388.907127-7.215854 389.44590331.597566-389.5088410.509323 389.83124223.813786-389.8632498.261325 389.97057016.032217-389.97057016.032217 Table 5 to Fig. 7 Table 5 to Fig. 7 Numerical aperture=0.80 1 / βx =-4.20 1 / βy =-8.00 Track length = 2294mm Object-Image Shift=3078 mm Width of the installation space = 3801 mm Total optically used mirror surface = 3.74 m 2 Linear pupil obscuration=17.7% Minimum angle on grazing incidence mirror = 67.4° Scan slot length on wafer = 0.9 mm Scan-integrated wavefront RMS = 10.46 mλ Transmittance = 6.40% Light conductivity = 47.0mm 2 Mirror with maximum diameter =M9 Maximum optical mirror diameter = 1340 mm Mirror with maximum area = M9 Fig. 8 shows a further embodiment of a projection optics or imaging optics 29, which can be used instead of the projection optics 10 in the projection exposure system 1. Components and functions corresponding to those already explained above with reference to Figs. 1 to 7 bear the same reference numerals and will not be discussed in detail again. In terms of its basic structure, particularly as regards the sequence of the NI and GI mirrors, the projection optics 29 corresponds to the projection optics 24 to 26 according to Figs. 3 to 5 . The projection optics 29 has a total mirror surface of 2.77 m2. The diameter of the last mirror M9 in the imaging beam path, which defines the image-side numerical aperture, is 1146 mm. Only two other mirrors of the projection optics 29 have a diameter greater than 1000 mm: mirrors M4 and M5. The projection optics 29 has an object image offset of 3600 mm. The y-extension of the installation space of the projection optics 29 is 4200 mm. On all GI mirrors M2 to M7, the angles of incidence of the individual rays of the imaging light 16 are greater than 70°. The optical design data for the projection optics 29 are shown in the following Tables 1 to 5, which in turn correspond in terms of basic structure to Tables 1 to 5 for the embodiment according to Fig. 7. Radii of the surfaces Table 1 to Fig. 8 Table 1 to Fig. 8 MO1-4018.937181600.00048759-1483.149510340.00132125 M024392.36391162-0.000455341908.21678507-0.00104810 M039349.33638963-0.00021329-4068.643786300.00049012 M04-2070.487758430.00096596-4573.285687560.00043732 M05-1261.774296480.00029291-2914.543827300.00012681 M06-1155.110888230.000394432412.89280351-0.00018883 M07-4464.827583930.00010402-16139.205443910.00002878 M086657.52101562-0.00007720322.16705959-0.00159534 M09-822.104227150.00243278-703.271150370.00284385 Decentering (location, angle) of the surfaces Table 2 for Fig. 8 Table 2 for Fig. 8 Retikel0.0000000000.0000000000.000000000 MO10.000000000-210.9361171941927.930586909 M020.000000000-421.6058723351022.518166353 M030.000000000-745.673214010673.798191117 M040.0000000001672.598187409309.653366139 M050.0000000002984.337922753338.668612351 M060.0000000003182.494801988443.691728685 M070.0000000003499.530534171886.114402300 M080.0000000003825.9730948472179.871997638 Blende0.0000000003807.0746366062134.970969879 M090.0000000003601.2120739051645.860137428 Wafer0.0000000003601.2120728082299.941072097 Retikel0.0000000000.0000000000.000000000 MO1-3.4272440590.0000000000.000000000 M02242.0000517600.000000000-0.000000000 M03214.273015689-0.000000000-0.000000000 M04190.090175327-0.000000000-0.000000000 M05165.404630026-0.000000000-0.000000000 M06138.850713955-0.000000000-0.000000000 M07114.893180710-0.000000000-0.000000000 M0818.4935797010.000000000-0.000000000 Blend178.392357391-0.000000000-0.000000000 M09191.412904408-0.0000000000.000000000 Wafer-0.0000000990.000000000180.000000000 Freiformkoeffizienten der flächen Table 3a in Fig. 8 Tabelle 3a in Fig. 8 C2y-4.5154134727e-04-2.3469483077e-03-2.0517212509e-04 C7x 2 y1.3799774994e-08-8.6646855164e-08-1.2670029300e-07 C9y 3-2.7053994266e-082.3051319318e-072.6085601027e-08 C10x 43.4864210899e-121.1895711425e-10-1.2916232569e-10 C12x 2 y 24.7883241701e-11-2.5356593270e-10-3.5381053438e-11 C14y 4-6.7915028103e-116.7159835354e-10-7.0549970600e-11 C16x 4 y6.9115599495e-147.9344223191e-14-1.3002988682e-13 C18x 2 y 31.3046201408e-13-2.6814135759e-13-3.3344176195e-14 C20y 5-8.5742004487e-142.5393652799e-121.5047796689e-13 C21x 61.8132824966e-171.0326578231e-16-1.6088728412e-18 C23x 4 y 29.3110593791e-17-2.0330795026e-161.7517418540e-16 C25x 2 y 42.2295085132e-16-3.0899814262e-152.8161876918e-16 C27y 6-3.9094894670e-168.7999443494e-15-3.2228373229e-16 C29x 6 y-2.9624681813e-206.0969936465e-191.5742020894e-19 C31x 4 y 3-3.4165034431e-194.1928902736e-185.7546154449e-19 C33x 2 y 5-1.6020762989e-18-6.7672937341e-18-2.7403545244e-19 C35y 7-6.1913563433e-182.5371287228e-172.4810310689e-19 C36x 8-4.3009495006e-23-3.7224479722e-241.3193811812e-21 C38x 6 y 2-1.2146312691e-21-2.4284464798e-219.1869230059e-22 C40x 4 y 4-1.3216092696e-20-2.0079936058e-218.0242536899e-22 C42x 2 y 6-2.8868823124e-20-3.0757965494e-203.0681357481e-22 C44y 83.4727832736e-206.2455821702e-20-1.6948598820e-21 C46x 8 y-1.3888433461e-25-1.1087309773e-23-7.6979833071e-25 C48x 6 y 39.1114048716e-24-7.8569813498e-23-1.5707572126e-24 C50x 4 y 52.0410530622e-22-2.6515059810e-22-1.7952486821e-23 C52x 2 y 73.4504339919e-22-6.8998595513e-23-1.8718133970e-23 C54y 99.3331240802e-22-3.7466177873e-221.5632895970e-23 C55x 105.8264328521e-281.0680792269e-27-1.7811170074e-26 C57x 8 y 24.4418062811e-261.8709899561e-26-1.8371917108e-27 C59x 6 y 45.8685515301e-256.2900830010e-25-5.5260010670e-26 C61x 4 y 64.0428534022e-242.3053720330e-24-2.2995862268e-25 C63x 2 y 87.2544337327e-245.1001001105e-24-2.2396073762e-25 C65y 10-1.8627915935e-24-3.7869777421e-244.1664402724e-26 C67x 10 y1.8773818200e-301.7391154527e-282.5785302743e-29 C69x 8 y 32.3664739984e-291.6386264310e-27-2.1916350994e-29 C71x 6 y 5-8.8120761885e-277.5752956568e-27-1.5087100647e-28 C73x 4 y 7-4.8679785197e-261.4908714782e-261.5873753241e-28 C75x 2 y 9-2.9171839688e-26-1.8435472857e-274.6788110125e-28 C77y 11-9.2475208576e-269.8273816659e-26-6.3578099177e-28 C78x 12-1.2372291850e-32-8.2359337452e-331.8651475329e-31 C80x 10 y 2-1.1349741084e-30-4.8976301122e-315.5536573728e-33 C82x 8 y 4-1.7258577477e-29-1.1150322577e-29-1.1029859146e-31 C84x 6 y 6-1.2661568381e-28-8.4521337470e-294.5103399103e-30 C86x 4 y 8-7.5034565698e-28-2.3831680101e-281.5366592509e-29 C88x 2 y 10-1.0340844133e-27-4.7622094845e-281.2284358322e-29 C90y 12-2.0711994021e-281.2805534825e-27-4.7087349456e-30 C92x 12 y1.5687591768e-34-1.7721008970e-33-3.1014481427e-34 C94x 10 y 3-6.2373594174e-33-2.8027312327e-32-6.2423527903e-34 C96x 8 y 51.5483516540e-31-1.3893530503e-314.0249104721e-33 C98x 6 y 72.3523600236e-30-3.9341975697e-312.1517518330e-32 C100x 4 y 95.7277253825e-30-3.1159814075e-313.0668422509e-32 C102x 2 y 11-4.7309825709e-311.5725925616e-311.9527201823e-33 C104y 135.3190075400e-30-1.8840450731e-304.0082910652e-32 C105x 141.9999736498e-373.6612781106e-37-1.2852734940e-36 C107x 12 y 21.8625065766e-351.0150131665e-35-8.8679050045e-37 C109x 10 y 44.0937009939e-341.4189577916e-346.5452261837e-36 C111x 8 y 62.1871934343e-331.2770851818e-33-3.8293179886e-36 C113x 6 y 81.8064545086e-325.8308887473e-33-1.9671024643e-34 C115x 4 y 108.904008971 1e-321.3483783948e-32-4.8047721636e-34 C117x 2 y 129.5163646874e-321.7148071746e-32-2.7453578580e-34 C119y 143.9968719391e-32-9.1474038555e-322.3947395233e-34 C121x 14 y-5.9197200312e-391.1915406151e-382.0056509685e-39 C123x 12 y 31.3429656686e-372.6144742161e-379.3549274564e-39 C125x 10 y 5-7.9705609220e-371.6688850966e-361.2119934597e-38 C127x 8 y 7-4.7566543099e-355.3133977993e-36-2.8202153147e-37 C129x 6 y 9-2.9555134258e-349.8942588241e-36-1.1419136156e-36 C131x 4 y 11-3.4115619053e-34-5.8041940576e-37-1.5920991332e-36 C133x 2 y 133.0043864473e-34-5.9654071052e-35-3.1450336120e-37 C135y 15-1.4518077739e-34-2.0060330152e-34-1.5542664154e-36 C136x 16-2.2669872640e-42-3.7050190697e-425.8190714164e-42 C138x 14 y 2-1.7604699425e-40-9.6139015944e-419.7778660978e-42 C140x 12 y 4-7.1852819954e-39-1.3333767780e-39-2.3290221956e-41 C142x 10 y 6-3.5694165535e-38-1.1157857139e-38-2.5438440620e-40 C144x 8 y 8-1.3988031724e-37-6.9036095108e-382.3595656681e-40 C146x 6 y 10-1.8578424483e-36-2.2203130191e-373.3044218896e-39 C148x 4 y 12-6.8329043252e-36-3.7101646555e-376.4761160900e-39 C150x 2 y 14-5.7829977543e-36-5.1500934817e-372.3540022863e-39 C152y 16-3.0327864314e-363.1536352850e-36-7.4474756072e-39 C154x 16 y1.0086099415e-43-4.7801139719e-44-7.4439107853e-45 C156x 14 y 3-1.3247169539e-42-1.2535354082e-42-4.0567688829e-44 C158x 12 y 5-1.0581118778e-41-1.0280958190e-41-3.5941800878e-43 C160x 10 y 74.6802410492e-40-4.0622323807e-413.0160287862e-43 C162x 8 y 95.9101448208e-39-9.5254082055e-418.3295357500e-42 C164x 6 y 112.0369367439e-38-1.6009388835e-402.6164760930e-41 C166x 4 y 137.7278469201e-397.3264219250e-403.0636839766e-41 C168x 2 y 15-2.7738022723e-382.6678615519e-393.6645627756e-42 C170y 17-1.8558057374e-391.5457196264e-383.2116267849e-41 C171x 181.7920549476e-471.5050536902e-47-1.5468902190e-47 C173x 16 y 25.8285297037e-464.3664635784e-46-4.2082310993e-47 C175x 14 y 48.5115585869e-447.1396005216e-45-6.6360113623e-47 C177x 12 y 65.9885656534e-435.8197381805e-446.2642208306e-46 C179x 10 y 8-1.2871129412e-434.0237836298e-433.5193016480e-45 C181x 8 y 108.4635302131e-421.7451010915e-425.5989178952e-45 C183x 6 y 121.3008438782e-403.9956286109e-42-1.8668593680e-45 C185x 4 y 143.4028882084e-407.3447358472e-42-1.6472784172e-44 C187x 2 y 162.3236216152e-401.3012202770e-41-8.3157473018e-47 C189y 181.3342999924e-40-2.7367735747e-411.3378413703e-43 C191x 18 y-1.0207202058e-488.4749678547e-501.2808955905e-50 C193x 16 y 35.8077680477e-482.4101412238e-485.5795993561e-50 C195x 14 y 51.9155758700e-462.4251454729e-471.1487709689e-48 C197x 12 y 7-2.0420828220e-451.2461833243e-464.4118258771e-48 C199x 10 y 9-5.8801944247e-443.5131542076e-46-8.8416684954e-48 C201x 8 y 11-3.8379088742e-437.8783477627e-46-8.7496893784e-47 C203x 6 y 13-8.0725480204e-43-1.3005265727e-46-2.2112175396e-46 C205x 4 y 152.2777626941e-43-1.8809431649e-44-2.0879933535e-46 C207x 2 y 171.3642084975e-42-3.5477131510e-446.0589831409e-48 C209y 193.1150672853e-43-3.0710356148e-43-2.7131769053e-46 C210x 20-9.7238023468e-53-2.0990055760e-531.7881337720e-53 C212x 18 y 26.2244605824e-51-7.5668543292e-526.8007196237e-53 C214x 16 y 4-6.4795127870e-49-1.5597059222e-502.7835708443e-52 C216x 14 y 6-7.3500685399e-48-1.3566260901e-492.3718789902e-51 C218x 12 y 81.0561069121e-48-9.6735223460e-492.0672438315e-51 C220x 10 y 101.3935489487e-46-5.0994914190e-48-3.4389878405e-50 C222x 8 y 12-5.9183419941e-46-1.5900750273e-47-1.6800284579e-49 C224x 6 y 14-5.8759436827e-45-3.3626901490e-47-3.1755042674e-49 C226x 4 y 16-1.0895814535e-44-9.9999102701e-47-2.3720083394e-49 C228x 2 y 18-6.0420159409e-45-1.5463043169e-46-2.040952673 1e-50 C230y 20-3.6271336805e-45-5.2901357673e-46-1.0699850711e-48 C232x 20 y6.5066144727e-540.0000000000e+000.0000000000e+00 C234x 18 y33.5883572600e-540.0000000000e+000.0000000000e+00 C236x 16 y 5-1.2554272984e-510.0000000000e+000.0000000000e+00 C238x 14 y 7-3.9291622735e-520.0000000000e+000.0000000000e+00 C240x 12 y 93.0920865759e-490.0000000000e+000.0000000000e+00 C242x 10 y 113.4037415320e-480.0000000000e+000.0000000000e+00 C244x 8 y 131.4036590829e-470.0000000000e+000.0000000000e+00 C246x 6 y 151.7882262548e-470.0000000000e+000.0000000000e+00 C248x 4 y 17-2.0224831315e-470.0000000000e+000.0000000000e+00 C250x 2 y 19-4.0657554547e-470.0000000000e+000.0000000000e+00 C252y 21-1.1993464324e-470.0000000000e+000.0000000000e+00 C253x 223.4476847868e-580.0000000000e+000.0000000000e+00 C255x 20-8.9164135874e-560.0000000000e+000.0000000000e+00 C257x 18 y 43.0095733910e-540.0000000000e+000.0000000000e+00 C259x 16 y 65.6043605073e-530.0000000000e+000.0000000000e+00 C261x 14 y 81.0577796520e-520.0000000000e+000.0000000000e+00 C263x 12 y 10-1.8565828245e-510.0000000000e+000.0000000000e+00 C265x 10 y 12-6.3851909502e-510.0000000000e+000.0000000000e+00 C267x 8 y 142.8646801344e-500.0000000000e+000.0000000000e+00 C269x 6 y 161.6496731045e-490.0000000000e+000.0000000000e+00 C271x 4 y 182.1651564380e-490.0000000000e+000.0000000000e+00 C273x 2 y 209.5216640304e-500.0000000000e+000.0000000000e+00 C275y 225.9365092137e-500.0000000000e+000.0000000000e+00 C277x 22 y-2.5763539154e-590.0000000000e+000.0000000000e+00 C279x 20 y 3-1.5185069914e-580.0000000000e+000.0000000000e+00 C281x 18 y 53.9021323419e-570.0000000000e+000.0000000000e+00 C283x 16 y 73.8261381227e-560.0000000000e+000.0000000000e+00 C285x 14 y 9-8.0340059088e-550.0000000000e+000.0000000000e+00 C287x 12 y 11-1.5482417739e-530.0000000000e+000.0000000000e+00 C289x 10 y 13-1.0178422530e-520.0000000000e+000.0000000000e+00 C291x 8 y 15-2.8792653271e-520.0000000000e+000.0000000000e+00 C293x 6 y 17-1.8724587024e-520.0000000000e+000.0000000000e+00 C295x 4 y 195.7103061156e-520.0000000000e+000.0000000000e+00 C297x 2 y 217.3740209529e-520.0000000000e+000.0000000000e+00 C299y 232.4116787617e-520.0000000000e+000.0000000000e+00 C300x 24-7.1069443833e-640.0000000000e+000.0000000000e+00 C302x 22 y 24.9639600645e-610.0000000000e+000.0000000000e+00 C304x 20 y 4-7.6110938928e-600.0000000000e+000.0000000000e+00 C306x 18 y 6-2.5022667861e-580.0000000000e+000.0000000000e+00 C308x 16 y 8-1.1784885084e-570.0000000000e+000.0000000000e+00 C310x 14 y 107.8314032807e-570.0000000000e+000.0000000000e+00 C312x 12 y 127.7623584646e-560.0000000000e+000.0000000000e+00 C314x 10 y 141.0658888608e-550.0000000000e+000.0000000000e+00 C316x 8 y 16-7.6428928500e-550.0000000000e+000.0000000000e+00 C318x 6 y 18-2.7284845949e-540.0000000000e+000.0000000000e+00 C320x 4 y 20-2.4424763355e-540.0000000000e+000.0000000000e+00 C322x 2 y 22-7.5066454477e-550.0000000000e+000.0000000000e+00 C324y 24-5.1246575146e-550.0000000000e+000.0000000000e+00 C326x 24 y5.8107327830e-650.0000000000e+000.0000000000e+00 C328x 22 y 36.0959498572e-640.0000000000e+000.0000000000e+00 C328C330x 20 y 5-4.6833484115e-630.0000000000e+000.0000000000e+00 C332x 18 y 7-1.2983671045e-610.0000000000e+000.0000000000e+00 C334x 16 y 97.1880048060e-610.0000000000e+000.0000000000e+00 C336x 14 y 113.4303365375e-590.0000000000e+000.0000000000e+00 C338x 12 y 133.3571591288e-580.0000000000e+000.0000000000e+00 C340x 10 y 151.5192414730e-570.0000000000e+000.0000000000e+00 C342x 8 y 173.0343985814e-570.0000000000e+000.0000000000e+00 C344x 6 y 192.1370223353e-580.0000000000e+000.0000000000e+00 C346x 4 y 21-7.6464399281e-570.0000000000e+000.0000000000e+00 C348x 2 y 23-7.5201061503e-570.0000000000e+000.0000000000e+00 C350y 25-2.5835841988e-570.0000000000e+000.0000000000e+00 C351x 266.0637782145e-700.0000000000e+000.0000000000e+00 C353x 24 y 2-1.3747103076e-660.0000000000e+000.0000000000e+00 C355x 22 y 47.2025340331e-660.0000000000e+000.0000000000e+00 C357x 20 y 65.9647982484e-640.0000000000e+000.0000000000e+00 C359x 18 y 84.8249154241e-630.0000000000e+000.0000000000e+00 C361x 16 y 10-8.7584385526e-630.0000000000e+000.0000000000e+00 C363x 14 y 12-2.8226291808e-610.0000000000e+000.0000000000e+00 C365x 12 y 14-1.2305362519e-600.0000000000e+000.0000000000e+00 C367x 10 y 16-3.8988486807e-610.0000000000e+000.0000000000e+00 C369x 8 y 181.0162984824e-590.0000000000e+000.0000000000e+00 C371x 6 y 202.3680206828e-590.0000000000e+000.0000000000e+00 C373x 4 y 221.2282521797e-590.0000000000e+000.0000000000e+00 C375x 2 y 246.1611410663e-610.0000000000e+000.0000000000e+00 C377y 261.2658364107e-600.0000000000e+000.0000000000e+00 C379x 26-5.7201009365e-710.0000000000e+000.0000000000e+00 C381x 24 y 3-8.2625784483e-700.0000000000e+000.0000000000e+00 C383x 22 y 5-4.5887069813e-700.0000000000e+000.0000000000e+00 C385x 20 y 71.3306419668e-670.0000000000e+000.0000000000e+00 C387x 18 y 92.9324996422e-670.0000000000e+000.0000000000e+00 C389x 16 y 11-2.8385929552e-650.0000000000e+000.0000000000e+00 C391x 14 y 13-4.1338207879e-640.0000000000e+000.0000000000e+00 C393x 12 y 15-2.6736760792e-630.0000000000e+000.0000000000e+00 C395x 10 y 17-8.9047152593e-630.0000000000e+000.0000000000e+00 C397x 8 y 19-1.2351120995e-620.0000000000e+000.0000000000e+00 C399x 6 y 217.7999022257e-630.0000000000e+000.0000000000e+00 C401x 4 y 234.0860495486e-620.0000000000e+000.0000000000e+00 C403x 2 y 253.3178993608e-620.0000000000e+000.0000000000e+00 C405y 271. 1677550723e-620.0000000000e+000.0000000000e+00 C406x 281.2453494173e-760.0000000000e+000.0000000000e+00 C408x 26 y 21.5609993322e-720.0000000000e+000.0000000000e+00 C410x 24 y 43.1122667885e-720.0000000000e+000.0000000000e+00 C412x 22 y 6-5.8011652470e-700.0000000000e+000.0000000000e+00 C414x 20 y 8-7.0824132561e-690.0000000000e+000.0000000000e+00 C416x 18 y 10-1.1254699133e-680.0000000000e+000.0000000000e+00 C418x 16 y 123.2633527254e-670.0000000000e+000.0000000000e+00 C420x 14 y 142.5612614653e-660.0000000000e+000.0000000000e+00 C422x 12 y 166.6634237406e-660.0000000000e+000.0000000000e+00 C424x 10-3.8400709011e-660.0000000000e+000.0000000000e+00 C426x 8 y 20-5.2153302111e-650.0000000000e+000.0000000000e+00 C428x 6 y 22-7.8849489341e-650.0000000000e+000.0000000000e+00 C430x 4 y 24-5.4941824088e-660.0000000000e+000.0000000000e+00 C432x 2 y 262.0847434248e-650.0000000000e+000.0000000000e+00 C434y 287.0058902235e-660.0000000000e+000.0000000000e+00 Tabelle 3b zu Fig. 8 Tabelle 3b zu Fig. 8 C2y3.3342734949e-04-1.4300215533e-03-3.3141153777e-03 C7x 2 y-1.2150552330e-07-1.0590271102e-07-3.7054460593e-07 C9y 32.3546314605e-08-2.4004734646e-07-4.0382026962e-07 C10x 4-5.8594548203e-11-8.9108819868e-123.1773742429e-11 C12x 2 y 21.0935025539e-10-4.8298224270e-11-3.2991959042e-10 C14y 4-8.5249076693e-12-8.8445022979e-102.6189340551e-09 C16x 4 y1.7601446843e-13-5.1279800635e-148.9716634646e-14 C18x 2 y 3-5.7298874842e-14-3.3365483706e-13-1.9121476144e-12 C20y 51.0311990171e-14-3.8044770422e-12-1.0246741400e-11 C21x 68.3515544940e-171.6185356352e-17-3.1024859695e-17 C23x 4 y 2-2.7684504209e-16-1.3802376820e-161.3732655260e-15 C25x 2 y 47.2467279606e-17-1.7181365469e-155.7854292852e-15 C27y 6-4.4870054015e-17-1.8567453656e-143.6035292936e-13 C29x 6-3.8547589848e-19-3.5705213085e-20-6.2207764443e-19 C31x 4 y 32.0817419228e-19-6.5158510196e-192.8900383919e-18 C33x 2 y 2-4.3517980447e-19-1.0823360407e-17-2.9858298429e-16 C35y 71.9749666475e-19-1.0723233352e-16-2.1256861911e-14 C36x 8-1.7624753871e-22-5.9702045148e-231.3424236435e-22 C38x 6 y 23.9049422684e-22-5.4800513511e-23-4.4927579359e-21 C40x 4 y 4-1.9614346222e-21-4.3172458868e-213.7061587886e-20 C42x 2 y 26.7450632264e-22-8.6798900281e-201.0217128248e-18 C44y 84.3328961421e-22-7.6629703078e-19-2.0755678641e-16 C46x 8 y7.6235749834e-252.0303596931e-252.3637755854e-24 C48x 6 y 3-2.0592826830e-24-4.0616828457e-25-1.0876482074e-23 C50x 4 y 58.5097149569e-24-2.5035532002e-234.5928683595e-21 C52x 2 y 48.8816963593e-24-3.5705782419e-226.3680653494e-19 C54y 9-4.6913115811e-24-2.9439288211e-214.9578102013e-17 C55x 104.9504563929e-285.4207434896e-28-1.1623004209e-27 C57x 8 y 2-2.9835765997e-29-5.5618744927e-285.8471800735e-28 C59x 6 y 33.7913886784e-26-1.0470217238e-26-1.8844294345e-24 C61x 4 y 67.7158179997e-262.7878024994e-25-1.7718856906e-22 C63x 2 y 42.7282087201e-264.5437490674e-24-2.2223398688e-20 C65y 106.8099296982e-273.4651656651e-23-9.0060825672e-19 C67x 10 y-8.4980126807e-31-3.0114053656e-30-2.0176735123e-29 C69x 8 y 34.2525175573e-29-1.4035926300e-291.0014632579e-27 C71x 6 y 51.0907717048e-28-2.2878209832e-29-1.4560300888e-26 C73x 4 y 69.0617191589e-302.5816268845e-271.1307660347e-24 C75x 2 y 45.0984157774e-293.3254551263e-26-3.9288625152e-22 C77y 111.6835017559e-283.1769055503e-25-4.1452386009e-20 C78x 12-1.7142674863e-33-5.0934353218e-331.2793491894e-32 C80x 10 y 28.5560233548e-331.7146617156e-33-1.2925348600e-32 C82x 8 y 4-1.2769241316e-311.1645476915e-311.8429975367e-29 C84x 6 y 6-9.9870248624e-31-1.5777263018e-301.1442041799e-27 C86x 4 y 6-1.4558691619e-30-8.2752854355e-292.6406902335e-25 C88x 2 y 10-4.7898234306e-31-7.9320566459e-283.7147289021e-23 C90y12-2.4706786683e-32-4.7360702337e-271.9936626458e-21 C92x 12 y-7.1399327274e-361.8301979691e-352.0350934284e-34 C94x 10 y 3-2.0784167236e-341.7082908753e-34-1.9239614114e-32 C96x 8 y 5-1.9959919576e-332.6785498147e-33-6.3234380974e-31 C98x 6 y-4.2539634926e-33-4.7122365884e-32-6.8261626680e-29 C100x 4 y 6-4.7826680445e-33-1.1630523582e-30-1.0015248795e-26 C102x 2 y 11-4.2989247292e-33-1.2752956759e-29-6.2112533521e-25 C104y 13-3.3767496104e-33-8.9228935830e-29-1.8085670744e-23 C105x 145.5478309259e-392.9387593844e-38-9.4479440994e-38 C107x 12 y 21.5665659084e-381.5110311786e-387.2799322779e-37 C109x 10 y 4-6.3148295643e-372.4994581911e-374.4656294701e-34 C111x 8 y 21.1599656428e-36-5.2164175783e-364.4128098453e-33 C113x 6 y 37.5611315192e-361.3132183251e-352.8278453262e-30 C115x 4 y 106.8485001840e-36-7.5916510327e-347.2370270647e-29 C117x 2 y 12-4.9650042078e-36-4.7637977607e-32-1.0430705005e-26 C119y 14-5.2589232386e-36-3.9841165595e-31-8. 1724024666e-25 C121x 14 y1.3933376912e-40-5.6666699159e-41-1.2719944103e-39 C 123x 12 y 33.9404859569e-40-8.1854446387e-403.2337159305e-38 C125x 10 y 58.8931726137e-39-3.0555816427e-386.2518327118e-36 C127x 8 y 24.1046975181e-38-1.0787086322e-37-7.2117183934e-34 C129x 6 y 37.5658253925e-386.6932317311e-36-3.1980590853e-32 C131x 4 y 118.7629947183e-387.4092477615e-353.0763625059e-30 C133x 2 y 134.8076369344e-384.6622888468e-346.4654649227e-28 C135y 153.1756611875e-382.6392739424e-333.1266055964e-26 C136x 16-3.1848576853e-45-9.8137715008e-444.4421648578e-43 C138x 14 y 2-2.5707674083e-43-1.3672800592e-431.9054861846e-41 C140x 12 y 44.3391133009e-42-9.7835477497e-42-6.9527047672e-39 C 142x 10 y 63.3954951213e-41-1.9584791228e-405.3191797466e-38 C144x 8 y 86.8196494358e-416.3624727979e-401.0222861469e-35 C146x 6 y 101.3062450522e-404.1773171953e-38-4.0954011431e-35 C148x 4 y 121.4432622357e-405.7823950465e-37-9.7788166375e-32 C150x 2 y 141.9509394675e-406.6401228986e-36-1.3301953177e-29 C152y 169.3284670172e-414.3386210089e-35-5.3070977889e-28 C154x 16 y-7.2132606533e-468.4304169416e-479.3582907432e-46 C156x 14 y 3-1.2207925356e-457.7158186260e-468.1962737957e-43 C158x 12 y 5-2.7505256963e-464.3886458589e-445.2052298267e-41 C160x 10 y 7-7.5635508213e-449.1347036870e-43-6.4479343435e-40 C162x 8 y 9-1.9857464222e-43-2.8184593326e-42-3.7299108568e-38 C164x 6 y 11-3.9982102062e-43-8.0619766145e-413.2546939510e-36 C166x 4 y 13-2.9170921030e-431.8973212394e-391.4099772979e-33 C168x 2 y 152.0177900171e-443.7736713536e-381.5341286379e-31 C170y 17-6.5072921667e-442.5510931891e-375.3122174097e-30 C171x 18-4.8439890417e-501.7859745727e-49-1.0892726921e-48 C173x 16 y 2-4.1296857924e-492.7721267466e-49-2.0399239504e-46 C175x 14 y 4-2.8926075886e-482.9190632302e-476.2031294716e-45 C177x 12 y 6-1.1853223947e-461.1597657918e-45-2.4459406302e-43 C179x 10 y 8-4.2648911106e-461.0142364574e-44-2.9753883927e-41 C181x 8 y 10-1.1610608229e-45-1.1840043709e-431.0172033138e-39 C183x 6 y 12-1.7186164398e-45-1.5498045673e-42-5.2560104847e-38 C185x 4 y 14-1.6471131747e-452.5410939396e-42-1.1302024502e-35 C187x 2 y 16-1.2158988465e-451.1859965217e-40-1.0524802385e-33 C189y 18-5.0217423597e-468.1592924784e-40-3.2329020279e-32 C191x 18 y1.2288617120e-51-4.6264602843e-532.1407888705e-50 C193x 16 y 35.0334928946e-511.9998031948e-517.6302498117e-49 C195x 14 y 5-4.6997592654e-502.2255128775e-49-2.4018902657e-46 C197x 12 y 7-2.1971698426e-495.5474120142e-481.2758259333e-44 C199x 10 y 9-8.2391554071e-492.0318514579e-47-4.3068240801e-44 C201x 8 y 11-1.8257350105e-48-5.9685159296e-46-5.7577720982e-42 C203x 6 y 13-2.4365858320e-48-5.1856783575e-453.6784136464e-40 C205x 4 y 15-2.7369829486e-48-4.1144149756e-464.8450144377e-38 C207x 2 y 17-2.5404559834e-482.0321074594e-434.0342555863e-36 C209y 19-5.2826409583e-491.4136219035e-421.1127823412e-34 C210x 201.1457078648e-55-1.3775606428e-554.1977872214e-55 C212x 18 y 23.6623171237e-54-6.6350126065e-56-1.5471614648e-52 C214x 16 y 4-6.7555046215e-547.6549367131e-541.5127891858e-50 C216x 14 y 6-2.9761127727e-534.9877315516e-522.1438916949e-49 C218x 12 y 8-1.7452051121e-527.8757492887e-51-4.9171997480e-47 C220x 10 y 10-5.1666234212e-52-2.5046927863e-511.1828839448e-45 C222x 8 y 12-1.0279475980e-51-8.8996099119e-49-5.8753858799e-45 C224x 6 y 14-1.2651253523e-51-5.6727684046e-48-7.3925906840e-43 C226x 4 y 16-1.6982946723e-51-3.2276311073e-48-8.8685875480e-41 C228x 2 y 18-1.6456494469e-511.4961319558e-46-6.6808670220e-39 C230y 20-7.3521256768e-531.0458018443e-45-1.6694870846e-37 Tabelle 3c zu Fig. 8 Tabelle 3c zu Fig. 8 C2y6.8782912594e-041.0981823357e-022.1219987449e-03 C7x 2 y-4.9613143129e-08-1.3227409368e-061.2752444162e-08 C9y 32.8611791484e-08-1.1240382398e-066.4574907089e-09 C10x 41.0833632980e-109.4246110028e-10-2.6195031618e-11 C12x 2 y 2-9.0889256414e-113.9064844804e-09-8.7717046328e-11 C14y 4-3.5475925343e-118.7585428227e-09-3.6490433904e-11 C16x 4 y3.1386699742e-13-1.6528193481e-124.0987058425e-15 C18x 2 y 37.8990795121e-14-1.9540405066e-111.3055567273e-14 C20y 57.6271494548e-14-6.0858589272e-127.1512833647e-15 C21x 6-5.7680823298e-161.0274068454e-15-7.2093629191e-17 C23x 4 y 28.1158854117e-172.0345220555e-14-2.3332746163e-16 C25x 2 y 4-3.6148410896e-166.0579239488e-14-2.6864116058e-16 C27y 6-1.3421898465e-161.6023851868e-13-8.1902460892e-17 C29x 6 y-1.1650653654e-18-1.4021777049e-171.3880200577e-20 C31x 4 y 31.3641774012e-18-1.1378704645e-16-2.5533776538e-20 C33x 2 y 58.6409267783e-19-5.7346375131e-16-1.4583138334e-20 C35y 71.9776039000e-19-1.5745880621e-15-1.2186185953e-20 C36x 84.5234433173e-229.9696458825e-21-1.5110665386e-22 C38x 6 y 2-1.5430407779e-211.9935372363e-19-6.3585714002e-22 C40x 4 y 41.8049066477e-213.1292117983e-18-1.1737716160e-21 C42x 2 y 68.3964161854e-221.7255464519e-17-9.2043006587e-22 C44y 8-7.0656818602e-224.2496390815e-18-1.4245666764e-22 C46x 8 y-2.9435022134e-23-8.0659225184e-236.3537154276e-26 C48x 6 y 3-5.7723497451e-23-3.2887522859e-216.5746098802e-25 C50x 4 y 5-7.0930397596e-23-1.5236940983e-201.9020834472e-24 C52x 2 y 7-6.4468171409e-248.5576285782e-211.5539360536e-24 C54y 96.6074454031e-248.2707936566e-195.2764320557e-25 C55x 10-7.9801118077e-274.2478639015e-265.8045148930e-29 C57x 8 y 2-1.5089769302e-25-1.8701718897e-249.4712686805e-29 C59x 6 y 4-1.0785436267e-25-1.5033070200e-222.7494804942e-27 C61x 4 y 6-2.6786048737e-25-2.2594111522e-217.8245783583e-27 C63x 2 y 4-1.4629959565e-25-1.0851881619e-205.5782281813e-27 C65y 10-2.3957302671e-26-9.4578945670e-22-5.7281296755e-28 C67x 10 y1.2886856522e-272.0825978393e-27-1.5374069297e-30 C69x 8 y 32.4755823151e-271.8248185022e-25-1.3038682914e-29 C71x 6 y 56.6353180966e-272.2201311374e-24-5.0198590244e-29 C73y 4 y 74.7789362218e-2713561314663e-23.-72174616286e-29 C75x 2 y 97.9198462166e-281.4238853277e-23-3.6977791002e-29 C77y 11-5.1790523615e-29-2.5495696853e-22-8.2169215303e-30 C78x 121.2343942325e-30-2.0998260053e-30-1.5812141985e-33 C80x 10 y 25.3704506971e-305.0055471222e-29-1.6615337650e-32 C82x 8 y 4-2.7056988732e-305.8518305317e-27-9.2749703294e-32 C84x 6 y 3-4.2794533977e-301.4010715151e-25-2.2797903331e-31 C86x 4 y 61.6340820295e-301.3219634071e-24-3.0219605156e-31 C88x 2 y 102.2327057584e-304.3218383102e-24-1.4178639904e-31 C90y 125.7908272294e-314.3585996147e-251.6482992330e-34 C92x 12 y-3.3813592066e-32-9.3310632345e-321.9006584192e-35 C94x 10 y 3-6.6371758470e-32-8.5304512682e-301.7729080489e-34 C96x 8 y 5-2.1007388142e-31-1.5277992451e-288.0860341109e-34 C98x 6 y 3-3.1598616036e-31-1.4407547822e-271.6783110278e-33 C100x 4 y 6-1.4328811789e-31-8.3776693185e-271.5630638807e-33 C102x 2 y 11-2.0394664751e-32-1.4342366410e-265.9138160621e-34 C104y 13-4.6241076275e-344.8595825100e-269.2418161389e-35 C105x 14-3.7972082792e-357.5992487577e-353.9607835670e-40 C107x 12 y 2-1.1456986121e-348.2307927728e-341.0474051585e-37 C109x 10 y 42.1263303473e-35-1.1264529530e-319.0945139979e-37 C111x 8 y 27.5939365547e-34-4.7093664342e-302.6980438672e-36 C113x 6 y 36.8024156950e-34-6.8673213741e-294.7944099516e-36 C115x 4 y 102.1277046205e-34-4.4425248589e-284.7245444665e-36 C117x 2 y 12-3.0064671485e-36-1.0842858517e-271.6698577625e-36 C119y 14-7.4974411979e-36-9.3215402766e-296.4371909904e-39 C121x 14 y5.7975690296e-371.9422880844e-36-1.5249973542e-40 C123x 12 y 31.2954274931e-362.4398578571e-34-1.7099909575e-39 C125x 10 y 52.2797334943e-365.8238244071e-33-8.7567131643e-39 C127x 8 y 87.3065260974e-367.1013664034e-32-2.2382027574e-38 C129x 6 y 36.5013918159e-366.1772281633e-31-3.0839545261e-38 C131x 4 y 111.9436707907e-363.0828060426e-30-2.1339554741e-38 C133x 2 y 132.7992321494e-375.1704817644e-30-6.5042625387e-39 C135y 152.5432243560e-38-5.4351250305e-30-7.5538788850e-40 C136x 165.8867359711e-40-1.7087094579e-393.0541610562e-44 C138x 14 y 26.4971659754e-40-7.0115688597e-38-5.3505621672e-43 C140x 12 y 42.8801293329e-391.8733236130e-37-6.6357866320e-42 C142x 10 y 6-2.0454981692e-388.9476082595e-35-2.3673737667e-41 C144x 8 y 8-3.5837547317e-381.9853136950e-33-4.8087947894e-41 C146x 6 y 10-2.3768455927e-381.9484321346e-32-6.5109030965e-41 C148x 4 y 12-6.3093886701e-399.2829664236e-32-4.8932203213e-41 C150x 2 x 14-5.3803333271e-401.7888511821e-31-1.3651193581e-41 C152y 161.3088407302e-431.2147567738e-32-1.2956208691e-43 C154x 16 y-5.2672487706e-42-2.2871103036e-418.4323183241e-46 C156x 14 y 3-1.5272193307e-41-4.4692853161e-391.1443633809e-44 C158x 12 y 51.2850701347e-41-1.3643978728e-376.5917088664e-44 C160x 10 y 7-2.7029214424e-41-2.0817065294e-361.9348881914e-43 C162x 8 y 2-6.1384816834e-41-2.2740310329e-353.3765683542e-43 C164x 6 y 11-2.8985624310e-41-1.7298502295e-343.4858838530e-43 C166x 4 y 13-3.7985904884e-42-6.9890235595e-341.9424853867e-43 C168x 2 y 15-9.6728857997e-43-1.0494805223e-335.0414299596e-44 C170y 17-1.6822991975e-432.6793845724e-344.6149902442e-45 C171x 18-5.1054221309e-452.7642682686e-44-2.3697484795e-49 C173x 16 y 29.8832420799e-451.9112924937e-421.4633241120e-48 C175x 14 y 4-6.9018054379e-444.6209240851e-413.0429991390e-47 C177x 12 y 61.2301344492e-43-7.0591395805e-401.3818626276e-46 C179x 10 y 84.8339366326e-43-3.3280488886e-383.2181330847e-46 C181x 8 y 104.9585976613e-43-4.666525050 g e-375.1059189616e-46 C183x 6 y 122.4357931580e-43-3.3301524484e-365.4819297433e-46 C185x 4 y 144.3805643063e-44-1.2381875571e-353.2740704636e-46 C187x 2 y 164.8541644288e-45-1.9671436529e-357.4654085774e-47 C189y 184.1104776209e-46-1.0525189919e-368.4621696696e-49 C191x 181.8462385187e-478.0069283559e-47-3.2540588947e-51 C193x 16 y 37.3716296582e-474.9932439407e-44-5.2305683616e-50 C195x 14 y 5-3.0194296212e-461.9109232761e-42-3.4210185909e-49 C197x 12 y 7-6.0889885143e-463.7098839153e-41-1.1312123451e-48 C199x 10 y 9-6.2516287100e-464.9388718951e-40-2.3064529191e-48 C201x 8 y 11-6.0641866846e-464.8902383488e-39-3.057210093 5e-48 C203x 6 y 13-3.8169287469e-463.0523268742e-38-2.5423489287e-48 C205x 4 y 15-7.0596788286e-479.9722592803e-38-1.1990795410e-48 C207x 2 y 17-6.6024909098e-481.3230594120e-37-2.7407374272e-49 C209y 19-4.2912681932e-491.2193313534e-38-2.0923661929e-50 C210x 202.0108232649e-50-3.1196307523e-498.9781250804e-55 C212x 18 y 2-9.8006695899e-50-2.8831608208e-47-1.7664439022e-54 C214x 16 y 44.9312605520e-49-1.1525137578e-45-8.7483719501e-53 C216x 14 y 69.0940739071e-49-5.7309081840e-45-5.2825640325e-52 C218x 12 y 8-3.5938825168e-502.9008400991e-43-1.4540837192e-51 C220x 10 y 10-4.5620484109e-496.4261369694e-42-2.6082492823e-51 C222x 8 y 124.4438913143e-516.2869972182e-41-3.3609324095e-51 C224x 6 y 141.8685317532e-493.4611987061e-40-2.9237548273e-51 C226x 4 y 163.7363644631e-501.0529620417e-39-1.4290907873e-51 C228x 2 y 183.1587157351e-511.4305818158e-39-2.7317188582e-52 C230y 201.7462516097e-527.1212396223e-41-3.4270300799e-54 C232x 20 y0.0000000000e+001.5384924171e-518.6012013373e-57 C234x 18 y 30.0000000000e+00-2.9816755670e-491.5938510388e-55 C236x 16 y 50.0000000000e+00-1.4210641306e-471.1891381409e-54 C238x 14 y 70.0000000000e+00-3 .7729720437e-464.4241410287e-54 C240x 12 y 90.0000000000e+00-6.3918307188e-451.0210232347e-53 C242x 10 y 110.0000000000e+00-7.8885115917e-441.5961218413e-53 C244x 8 y 130.0000000000e+00-6.6215245232e-431.7170923215e-53 C246x 6 y 150.0000000000e+00-3.3379373476e-421.2046117555e-53 C248x 4 y 170.0000000000e+00-8.9843262469e-424.9614175383e-54 C250x 2 y 190.0000000000e+00-1.0610463875e-411.0195455407e-54 C252y 210.0000000000e+00-2.7651324176e-426.8062448732e-56 C253x 220.0000000000e+002.3727786637e-54-2.0458733952e-60 C255x 20 y 20.0000000000e+002.6026605756e-52-1.4450620665e-60 C257x 18 y 40.0000000000e+001.3675098812e-501.3973646510e-58 C259x 16 y 60.0000000000e+001.7947065968e-491.2316279398e-57 C261x 14 y 80.0000000000e+00-6.0374640275e-494.1340775389e-57 C263x 12 y 100.0000000000e+00-4.767905063 1e-478.5594375232e-57 C265x 10 y 120.0000000000e+00-6.4769520354e-461.2599305082e-56 C267x 8 y 140.0000000000e+00-4.7298961220e-451.3352263945e-56 C269x 6 y 160.0000000000e+00-2.1116684044e-449.5772988440e-57 C271x 4 y 180.0000000000e+00-5.4976855585e-443.9148613258e-57 C273x 2 y 200.0000000000e+00-6.6388159353e-446.3497133809e-58 C275y 220.0000000000e+00-4.2583543721e-458.2834141846e-60 C277x 22 y0.0000000000e+00-2.4273859856e-56-1.4876240213e-62 C279x 20 y 30.0000000000e+003.8898396793e-55-3.0936655468e-61 C281x 18 y 50.0000000000e+002.6908213874e-53-2.6296535747e-60 C283x 16 y 70.0000000000e+001.7240764085e-51-1.1012391897e-59 C285x 14 y 90.0000000000e+004.4625321100e-50-2.8512946413e-59 C287x 12 y 110.0000000000e+007.1954454866e-49-5.0551025048e-59 C289x 10 y 130.0000000000e+007.7274371224e-48-6.4500744148e-59 C291x 8 y 150.0000000000e+005.3113079042e-47-5.8829261263e-59 C293x 6 y 170.0000000000e+002.1878784173e-46-3.5875691447e-59 C295x 4 y 190.0000000000e+004.9593485384e-46-1.3162644849e-59 C297x 2 y 210.0000000000e+005.2818253676e-46-2.4635550544e-60 C299y 230.0000000000e+001.7969003065e-46-1.4892339435e-61 C300x 240.0000000000e+00-1.1348850740e-592.6177592400e-66 C302x 22 y 20.0000000000e+00-1.3566627790e-574.0174881968e-66 C304x 20 y 40.0000000000e+00-8.5648169864e-56-9.1155272836e-65 C306x 18 y 60.0000000000e+00-1.4920324966e-54-1.5847282085e-63 C308x 16 y 80.0000000000e+00-8.2648107796e-54-6.7304201931e-63 C310x 14 y 100.0000000000e+001.5066211116e-52-1.6526720552e-62 C312x 12 y 120.0000000000e+003.3123745716e-51-2.8355480427e-62 C314x 10 y 140.0000000000e+003.0559667322e-50-3.4568067010e-62 C316x 8 y 160.0000000000e+001.7443694018e-49-2.9983154862e-62 C318x 6 y 180.0000000000e+006.6793679453e-49-1.7846109327e-62 C320x 4 y 200.0000000000e+001.5840289040e-48-6.1559835136e-63 C322x 2 y 220.0000000000e+001.8075229449e-48-8.3951150596e-64 C324y 240.0000000000e+001.9543689825e-49-1.1136020815e-65 C326x 24 y0.0000000000e+001.4459226932e-611.5186885329e-68 C328x 22 y 30.0000000000e+005.1403601414e-603.4601260694e-67 C330x 20 y 50.0000000000e+003.0550712609e-583.3345232664e-66 C332x 18 y 70.0000000000e+001.1341925356e-571.5683483086e-65 C334x 16 y 90.0000000000e+00-1.1875450302e-554.5445183019e-65 C336x 14 y 110.0000000000e+00-3.2261327881e-549.0150139316e-65 C338x 12 y 130.0000000000e+00-4.5830056946e-531.3044593497e-64 C340x 10 y 150.0000000000e+00-4.0682769561e-521.4179437444e-64 C342x 8 y 170.0000000000e+00-2.2896913188e-511.1287283555e-64 C344x 6 y 190.0000000000e+00-7.8625716242e-516.1023360945e-65 C346x 4 y 210.0000000000e+00-1.5312476273e-502.0208088862e-65 C348x 2 y 230.0000000000e+00-1.4919045503e-503.4752253123e-66 C350y 250.0000000000e+00-5.4526477262e-511.9479240572e-67 C351x 260.0000000000e+002.9719934281e-65-1.4648736005e-72 C353x 24 y 20.0000000000e+003.5352626139e-634.1935125366e-72 C355x 22 y 40.0000000000e+002.4751127807e-61-2.3714730433e-71 C357x 20 y 60.0000000000e+004.1174384436e-608.5867661472e-70 C359x 18 y 80.0000000000e+003.8216478851e-595.1296494495e-69 C361x 16 y 100.0000000000e+00-1.1169873251e-581.5467580892e-68 C363x 14 y 120.0000000000e+00-6.1439510606e-573.2608018792e-68 C365x 12 y 140.0000000000e+00-6.3425191163e-564.7497213095e-68 C367x 10 y 160.0000000000e+00-3.5421389158e-554.6476784898e-68 C369x 8 y 180.0000000000e+00-1.5937927413e-543.1691530815e-68 C371x 6 y 200.0000000000e+00-6.5169750682e-541.5258024866e-68 C373x 4 y 220.0000000000e+00-1.7894083127e-534.3274392418e-69 C375x 2 y 240.0000000000e+00-2.3547754790e-534.4810565451e-70 C377y 260.0000000000e+00-4.8469128972e-545.7721674164e-72 C379x 26 y0.0000000000e+00-3.3660240732e-67-6.9693615802e-75 C381x 24 y 30.0000000000e+00-2.1173725539e-65-1.7002605259e-73 C383x 22 y 50.0000000000e+00-1.5422601348e-63-1.8444197149e-72 C385x 20 y 70.0000000000e+00-2.8035606524e-62-9.6970884169e-72 C387x 18 y 90.0000000000e+00-1.0166432275e-61-3.1353626964e-71 C389x 16 y 110.0000000000e+004.4116325012e-60-6.9332061757e-71 C391x 14 y 130.0000000000e+001.0344155177e-58-1.1176850995e-70 C393x 12 y 150.0000000000e+001.1982477051e-57-1.3774450258e-70 C395x 10 y 170.0000000000e+008.7119308828e-57-1.3137727902e-70 C397x 8 y 190.0000000000e+004.0732016559e-56-9.3041784845e-71 C399x 6 y 210.0000000000e+001.1901199444e-55-4.5189104016e-71 C401x 4 y 230.0000000000e+002.0251767079e-55-1.3631452928e-71 C403x 2 y 250.0000000000e+001.8311253746e-55-2.1679637442e-72 C405y 270.0000000000e+006.4026067877e-56-1.1440083092e-73 C406x 280.0000000000e+00-2.8867373419e-71-1.0480198317e-79 C408x 26 y 20.0000000000e+00-2.7574464563e-69-1.2430890881e-77 C410x 24 y 40.0000000000e+00-1.6780642306e-671.6725893243e-77 C412x 22 y 60.0000000000e+002.6906955586e-66-9.7575159233e-77 C414x 20 y 80.0000000000e+006.7968653368e-65-1.1813570410e-75 C416x 18 y 100.0000000000e+008.7348614760e-64-4.6394440536e-75 C418x 16 y 120.0000000000e+003.4168889413e-63-1.3343139684e-74 C420x 14 x 140.0000000000e+00-6.9782646266e-62-2.5907506294e-74 C422x 12 y 160.0000000000e+00-1.3632968050e-60-3.0473330439e-74 C424x 10 y 180.0000000000e+00-1.0843139151e-59-2.0991876290e-74 C426x 8 y 200.0000000000e+00-4.4010444984e-59-8.8312846705e-75 C428x 6 y 220.0000000000e+00-8.7983962155e-59-2.4974127143e-75 C430x 4 y 240.0000000000e+00-5.9542638016e-59-3.2270861214e-76 C432x 2 y 260.0000000000e+006.6022683850e-594.5946885753e-77 C434y 280.0000000000e+003.3561515889e-59-4.3040404087e-79 Koordinaten des Blendenrandes Tabelle 4 zu Fig. 8 Tabelle 4 zu Fig. 8 -348.092800-50.506223347.744258-62.466929 -347.920747-44.546252347.225231-68.457362 -347.517159-38.606641346.477788-74.447586 -346.881848-32.692370345.503261-80.432392 -346.014877-26.808322344.303183-86.406589 -344.916554-20.959268342.879281-92.365024 -343.587437-15.149859341.233467-98.302608 -342.028329-9.384613339.367836-104.214339 -340.240273-3.667911337.284654-110.095322 -338.2245471.996012334.986365-115.940794 -335.9826647.603070332.475583-121.746134 -333.51636413.149330329.755096-127.506883 -330.82761418.631012326.827862-133.218749 -327.91861024.044494323.697008-138.877620 -324.79177429.386311320.365829-144.479562 -321.44976034.653152316.837785-150.020821 -317.89545839.841864313.116492-155.497817 -314.13199844.949446309.205717-160.907144 -310.16274849.973051305.109370-166.245555 -305.99132754.909984300.831488-171.509958 -301.62159559.757696296.376232-176.697404 -297.05765964.513788291.747867-181.805076 -292.30386669.176003286.950752-186.830278 -287.36479973.742230281.989329-191.770427 -282.24526478.210492276.868109-196.623037 -276.95028382.578949271.591660-201.385716 -271.48507486.845890266.164596-206.056153 -265.85503891.009727260.591566-210.632111 -260.06573295.068995254.877246-215.111419 -254.12285799.022341249.026324-219.491965 -248.032223102.868526243.043497-223.771690 -241.799737106.606419236.933458-227.948583 -235.431370110.234992230.700886-232.020677 -228.933137113.753315224.350442-235.986042 -222.311075117.160555217.886755-239.842786 -215.571214120.455964211.314419-243.589048 -208.719562123.638875204.637985-247.223001 -201.762074126.708695197.861953-250.742847 -194.704633129.664899190.990767-254.146819 -187.553032132.507020184.028814-257.433184 -180.312952135.234653176.980415-260.600238 -172.989945137.847443169.849828-263.646314 -165.589419140.345084162.641242-266.569781 -158.116629142.727319155.358781-269.369048 -150.576662144.993933148.006501-272.042568 -142.974431147.144751140.588391-274.588839 -135.314669149.179635133.108376-277.006407 -127.601920151.098478125.570315-279.293875 -119.840537152.901200117.978008-281.449898 -112.034679154.587744110.335192-283.473195 -104.188315156.158068102.645547-285.362546 -96.305224157.61214694.912695-287.116799 -88.389000158.94995887.140204-288....

Claims

[1] Imaging optics (10; 24; 25; 26; 27; 28; 29; 30; 31; 32; 33; 34; 35; 36; 37) for projection lithography for imaging an object field (5) in which a reticulum (7) to be imaged can be arranged, into an image field (11) in which a substrate (13) to be exposed can be arranged, - with a plurality of mirrors (M1 to M8; M1 to M9; M1 to M10, M1 to M11) for guiding imaging light (16) along an imaging beam path from the object field (5) to the image field (11), - with an image-side numerical aperture greater than 0.75, - with a light conductivity greater than 45 mm 2 . [2] Imaging optics according to claim 1, characterized by a distance between an object plane (6) in which the object field (5) is arranged and an image plane (12) in which the image field (11) is arranged, which is less than 2500 mm. [3] Imaging optics according to claim 1 or 2, characterized bya final mirror (M9; M10; M11) in the imaging beam path in front of the image field (11), whose diameter is less than 1300 mm. [4] Imaging optics according to any one of claims 1 to 3, characterized by a total reflective surface area of ​​all mirrors used, which is less than 3.5 m² 2 . [5] Imaging optics according to any one of claims 1 to 4, characterized by , that all mirrors in the imaging beam path before the last mirror along a maximum installation space extent (y) of the imaging optics have an extent that is less than 1000 mm. [6] Imaging optics according to any one of claims 1 to 5, characterized by , that all mirrors perpendicular to a meridional plane (yz) of the imaging optics have an extent that is less than 1000 mm. [7] Imaging optics according to any one of claims 1 to 6, characterized bya working distance between a reflective surface of a mirror (M8; M9; M10) in the imaging beam path and the image field (11) which is greater than 75 mm. [8] Imaging optics according to any one of claims 1 to 7, characterized by a linear pupillary obscuration that is less than 25%. [9] Imaging optics according to any one of claims 1 to 8, characterized by at least one GI level (M2, M3, M5, M6; M2 to M7; M2 to M9; M2 to M8). [10] Imaging optics according to claim 9, characterized by at least two GI mirrors. [11] Imaging optics according to any one of claims 1 to 10, characterized by a total transmission greater than 4.8%. [12] Imaging optics according to any one of claims 1 to 11, characterized by an object-image offset (d OIS ), which is smaller than 4000 mm. [13] Imaging optics according to any one of claims 1 to 12, characterized bya distance between a reflective surface of the first mirror (M1) in the imaging beam path and the image plane (12) that is greater than 500 mm. [14] Optical system - with an illumination optic (4) for illuminating the object field (5) with the imaging light (16), - with an imaging optic (10; 24; 25; 26; 27; 28; 29; 30; 31; 32; 33; 34; 35; 36; 37) according to one of claims 1 to 13. [15] Projection exposure system with an optical system according to claim 14 and with an EUV light source (3). [16] Method for manufacturing a structured component comprising the following process steps: - Providing a reticule (7) and a wafer (13), - Projecting a structure on the reticulum (7) onto a photosensitive layer of the wafer (13) using the projection exposure system according to claim 15, - Creating a micro- or nanostructure on the wafer (13). [17] Structured component manufactured according to a method according to claim 16.

Images