Compounds, compositions, methods for the preparation of the compounds, and uses of the compounds

Abstract

This invention relates to organometallic compounds, compositions comprising the organometallic compound, lithography methods using the organometallic compound, an optical element, optically active device or optical or semiconductor device obtainable by the lithography methods, hard masks obtainable by the lithography method, uses of the compounds or compositions, a method for the preparation of the compound.