heater

JP1829821SActive Publication Date: 2026-06-22COORSTEK GK
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
COORSTEK GK
Filing Date
2026-01-30
Publication Date
2026-06-22

Smart Images

  • Figure 0001829821000001
    Figure 0001829821000001
  • Figure 0001829821000002
    Figure 0001829821000002
  • Figure 0001829821000003
    Figure 0001829821000003
Patent Text Reader

Abstract

This product is a heater used, for example, in the manufacturing process of semiconductor wafers. A heater element 3 is provided inside a glass pipe 1, and the heater element 3 is connected to a metal rod 2 to form a terminal portion 5. In addition, a reinforcing rod 4 made of glass is attached to reinforce the glass pipe 1.
Need to check novelty before this filing date? Find Prior Art