Wafer transfer cassette fixing mechanism for wafer loader

By using components such as a second cylinder, fixing pin, through slot, pressure block, and positioning hole in the wafer loader, combined with the design of rubber bumps and magnetic rings, the problem of wobbling and falling off the wafer transfer box when it is opened is solved, and more stable wafer transfer is achieved.

CN224538705UActive Publication Date: 2026-07-21FICO SEMICONDUCTOR (ZHANGJIAGANG) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
FICO SEMICONDUCTOR (ZHANGJIAGANG) CO LTD
Filing Date
2025-06-19
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

Existing wafer transfer box fixing mechanisms pose a risk of the wafer box being pulled or falling off when opened, resulting in wafer damage.

Method used

The system employs components such as a second cylinder, fixing pins, through slots, pressure blocks, wafer transfer boxes, positioning holes, fixing slots, connecting plates, and rubber bumps. Positioning and fixing are achieved through positioning holes and fixing pins. The second cylinder and pressure blocks apply reverse compression, and the rubber bumps increase friction. A magnetic ring attracts the fixing pins to improve connection stability.

Benefits of technology

This effectively prevents the wafer transfer box from shaking and falling out when opened, enhances connection stability, avoids wafer damage, and improves the safety of the transfer process.

✦ Generated by Eureka AI based on patent content.

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    Figure CN224538705U_ABST
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Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, especially for a wafer transfer box fixing mechanism for wafer loader, including object table and mesa, the bottom of object table is equipped with mesa, the bottom fixedly connected with fixed frame of mesa, the bottom fixedly connected with the fixed frame limit seat, the inside slide connection of limit seat has the guide rail, the bottom fixedly connected with the fixed plate of limit seat rear of fixed frame, the right side fixedly connected with first air cylinder of fixed plate, the top fixedly connected with the fixed pin of mesa that penetrates object table, in the utility model, through the positioning hole and fixed pin that set up can carry out positioning and fixed effect to wafer transfer box, through the second air cylinder, briquetting, fixed groove and connecting plate that set up carry out reverse extrusion fixed to wafer transfer box, rubber salient point can strengthen the friction between briquetting and connecting plate, effectively avoided wafer transfer box to be opened and pulled when appearing the phenomenon of shaking and falling off.
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