Multiplexing surface acoustic wave sensor with delay line coding

Abstract

To provide a multiplexing surface acoustic wave (SAW) device for simultaneous excitation of SAW sensors or simultaneous sensing of multiple analytes, targets or bio-agents.SOLUTION: A SAW device includes a plurality of SAW sensors arranged in an array. Each sensor has a delay line and each of the delay lines is different in length. The sensors of the multiplexing SAW device are simultaneously excited to generate an array of surface acoustic waves propagating along the delay lines of each SAW sensor. Since the length of each delay line is different for each SAW sensor, the propagation time of the surface acoustic waves varies on the basis of at least a portion of length variation. A compressed pulse train can be generated with a specific time delay according to the length difference of delay lines. A phase or other information of the compressed pulse can be extracted.SELECTED DRAWING: Figure 1A

Description

Technical Field

[0001] Cross - Reference to Related Applications This application claims the benefit of priority of U.S. Provisional Patent Application No. 62 / 529,725, filed Jul. 7, 2017, which includes Appendix A, “APPARATUS AND METHOD FOR FREQ UENCY MODULATION SURFACE ACOUSTIC WAVE S ENSOR” and Appendix B, “BULK ACOUSTIC WAVE(S)AND / OR SURFACE ACOUSTIC WAVE(S)”, and the entire contents thereof are incorporated herein by reference.

[0002] Generally, the present disclosure relates to devices and methods for simultaneously identifying, detecting, measuring, or sensing multiple analytes using surface acoustic wave (SAW) or bulk acoustic wave (BAW) sensors. More specifically, the present disclosure relates to multiplexed SAW and / or BAW sensor devices capable of simultaneously detecting multiple target materials using SAW and / or BAW sensors having delay lines of different lengths.

Background Art

[0003] Surface acoustic wave (SAW) sensors and / or bulk acoustic wave (BAW) sensors are elements or devices for identifying, detecting, sensing, or measuring various physical, chemical, or biological components or changes in components in various types of chemical or biological materials, such as in liquid media and organic or inorganic gases. There is a pressing need for sensors that are point - of - care (<30 minutes time - to - result), portable, multiplexed, highly sensitive and specific without any sample processing (able to simultaneously screen multiple target analytes from biological fluids). . [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] A SAW sensor is a passive electronic device. The input electrical signal is applied to the pad. A lanceducer converts electrical signals into mechanical signals called surface acoustic waves (SAWs). The response of a signal corresponds to the characteristic changes (phase, amplitude, and frequency or delay) of a mechanical wave. For example... If, the received signal (R X ) and / or the amplitude, phase, frequency, or time between pulses of the excitation signal This is a variation in at least one of the delays. For example, in a multiplexed SAW measurement system (mu The (six-plexing SAW measurement system) uses multiple pulses for mutual and / or excitation signals. This may include phase detection that can determine the phase corresponding to each of the Saw cells. The difference in the length of the delay lines between the sensors causes the received signal (R X A time delay occurs between the pulses. The time domain shift between pulses in a compressed pulse train is associated with a specific SAW sensor. It corresponds to the phase shift. Phase shift is, for example, in a software program or This can be determined using field-programmable gate array (FPGA) hardware.

[0005] In one embodiment, the present disclosure relates to a piezoelectric substrate and a device attached to the piezoelectric substrate and disposed on the surface of the piezoelectric substrate. We provide a SAW device that includes multiple surface acoustic wave (SAW) sensors, and multiple SAW The W sensor has a first delay line configured to propagate a first surface acoustic wave. A SAW sensor and a second delay line configured to propagate a second surface acoustic wave are provided. It includes a second SAW sensor, and the length of the first delay line is longer than the length of the second delay line.

[0006] In this embodiment, the first SAW sensor detects a first surface acoustic wave along a first delay line. A first transducer for transmission and the propagation of a first surface acoustic wave along a first delay line. It includes a second transducer for receiving a first surface acoustic wave in response to the propagation.

[0007] In one embodiment, the first SAW sensor includes a transducer positioned on a substrate and The transducer comprises a reflector positioned on the substrate opposite the transducer, and The transducer transmits the first surface acoustic wave along the first delay line, and the transducer transmits the first surface acoustic wave The first surface acoustic wave is received after the acoustic wave has been reflected by the reflector and propagated twice along the first delay line. do.

[0008] In this embodiment, the reflector is the first reflector, and the first SAW sensor is the transducer The system further comprises a second reflector positioned on the substrate near the first reflector relative to the visor, The lanceduce responds to the fact that it is reflected by the second reflector and propagates twice along the first delay line. It is then configured to receive the first surface acoustic wave.

[0009] In this embodiment, the first reflector is configured to reflect surface acoustic waves having a first frequency. The second reflector is configured to reflect surface acoustic waves having a second frequency. .

[0010] In this embodiment, the first SAW sensor comprises a first pair of electrical contacts and a second S The AW sensor is equipped with a second pair of electrical contacts, and the first and second pairs of electrical contacts are electrically They are connected electrically.

[0011] In this embodiment, each of the SAW sensors is configured to receive an excitation signal.

[0012] In the embodiment, the excitation signal is a pulse voltage, a sinusoidal electrical signal, frequency modulation, or linear frequency. Numerical modulation, hyperbolic frequency modulation, orthogonal frequency coding, random modulation, continuous phase modulation, frequency Multiple shift keys, multi-frequency shift keys, phase shift keys, wavelet modulation or broadband It includes at least one of the frequency band signals.

[0013] In this embodiment, each of the SAW sensors is configured to simultaneously receive excitation signals. ru.

[0014] In this embodiment, the device communicates with each of the first SAW sensor and the second SAW sensor. It further includes one or more processors, one or more of which are connected to a first SAW sensor and The received signal is generated based at least partially on the signal received from the second SAW sensor. It is configured to do so.

[0015] In one embodiment, one or more processors further base at least partially on the received signal It is configured to determine or monitor at least one analyte.

[0016] In one embodiment, one or more processors generate pulses corresponding to the excitation signal, and a first SAW At least two of the pulses corresponding to the sensor or the pulses corresponding to the second SAW sensor. By detecting variations in amplitude, phase, frequency, or time delay between two, at least It is configured to determine, monitor, or identify another analyte.

[0017] In one embodiment, the received signal comprises a compressed pulse train having multiple pulses.

[0018] In this embodiment, multiple pulses of the compressed pulse train correspond to the first SAW sensor. Includes pulse 1 and a second pulse corresponding to the second SAW sensor.

[0019] In the embodiment, the timing of the first pulse is at least part of the length of the first delay line Based on the target, the timing of the second pulse is at least partially based on the length of the second delay line. Ku.

[0020] In the embodiment, multiple pulses in the compressed pulse train include pulses corresponding to excitation signals. ru.

[0021] In this embodiment, the piezoelectric substrate is 36°Y quartz, 36°YX lithium tantalite, and Langasite, Langate, Langanite, Lead Zirconate Titanate, Cadmium Sulfide, Be Among lurinite, lithium iodate, lithium tetraborate, or bismuth germanium oxide It comprises at least one of the following.

[0022] In one embodiment, the piezoelectric substrate comprises a piezoelectric crystal layer.

[0023] In one embodiment, the piezoelectric crystal layer has a thickness greater than the Love wave penetration depth on the non-piezoelectric substrate. El.

[0024] In one embodiment, the device is positioned on the first delay line to adhere to or react with the analyte. It further includes a detection area configured as follows.

[0025] In this embodiment, the device uses surface acoustic waves as a function of the analyte added to the detection region. The system further includes a detector for measuring the phase response.

[0026] In one embodiment, the detection region is biologically sensitive for capturing analytes from a liquid medium. It has an interface.

[0027] In one embodiment, the detection region is a chemically sensitive field for absorbing analytes from a liquid medium. It has a surface.

[0028] In one embodiment, the device further includes a waveguide layer on the first delay line.

[0029] In one embodiment, the waveguide layer is at least one of polymer, SiO2, or ZnO It is equipped with.

[0030] In this embodiment, the first surface acoustic wave corresponding to the first SAW sensor is 100 MHz Higher than, higher than 300MHz, higher than 500MHz, or higher than 1000MHz It also has a high frequency range.

[0031] In one embodiment, the present disclosure relates to the steps of generating an excitation signal and surface acoustic wave (SAW) device A step of transmitting an excitation signal to a SAW device, wherein the SAW device propagates a first surface acoustic wave. A first SAW sensor including a first delay line configured to cause a second surface acoustic wave, and a second surface acoustic wave sensor. A second SAW sensor is provided, which includes a second delay line configured to propagate the first delay The length of the extension is longer than the length of the second delay line, and the output signal of the SAW device is... The receiving step, wherein the output signal is the length of the first delay line, the second delay line, or the first Analytes exposed to at least one of the SAW sensor or the second SAW sensor A step that shows at least one of the following, and at least part of the output signal of the SAW device The present invention provides a method that includes the step of determining or monitoring an analyte based on its characteristics.

[0032] In one embodiment, the disclosure provides a step of receiving an excitation signal and a first SA of a SAW device. Step 1: Generate a first surface acoustic wave to propagate across the first delay line of the W sensor. and the second delay line of the second SAW sensor of the SAW device A step of generating surface acoustic waves, wherein the length of the first delay line is equal to the length of the second delay line. The step is longer, and the step receives the first surface acoustic wave after propagation across the first delay line. Steps include receiving the second surface acoustic wave after propagation across the second delay line, and receiving the received At least one of the first surface acoustic wave, the received second surface acoustic wave, or the excitation signal The present invention provides a method that includes the step of generating a signal based at least partially on the present invention.

[0033] In the embodiment, the first SAW sensor is configured to reflect the first surface acoustic wave. The step of receiving the first surface acoustic wave, which is provided with a reflector, is that the first surface acoustic wave is reflected It is done after that.

[0034] In the embodiment, the second SAW sensor is configured to reflect the second surface acoustic wave. The step of receiving the second surface acoustic wave, which is provided with a reflector, is that the second surface acoustic wave is reflected It is done after that.

[0035] In one embodiment, the present disclosure relates to the steps of generating an excitation signal and surface acoustic wave (SAW) device A step of transmitting an excitation signal to a SAW device, wherein the SAW device propagates a first surface acoustic wave. A first SAW sensor including a first delay line configured to cause a second surface acoustic wave, and a second surface acoustic wave sensor. A second SAW sensor is provided, which includes a second delay line configured to propagate the first delay Step and excitation in a SAW device where the length of the extension is longer than the length of the second delay line. The steps of receiving a signal and generating a first surface acoustic wave to propagate across a first delay line The steps involve generating a second surface acoustic wave for propagation across a second delay line. The steps include: a step of receiving a first surface acoustic wave after propagation across a first delay line, The steps include receiving a second surface acoustic wave after propagation across a second delay line, and the received first At least one of the surface acoustic waves or the received second surface acoustic wave contains at least a portion A step of generating a signal based on a target, wherein the signal is a first delay line, a second delay line Length, or exposure to at least one of the first SAW sensor or the second SAW sensor A step that shows at least one of the analytes produced, and at least one of the generated signals The method also includes the step of determining or monitoring the analyte based on a partial basis. .

[0036] In one embodiment, the disclosure provides a sample medium containing an analyte with at least a portion of a SAW device. An exposure step in which the SAW device propagates a first surface acoustic wave in response to an excitation signal. A first SAW sensor including a first delay line configured to carry a signal, and in response to an excitation signal A second SAW sensor including a second delay line configured to propagate a second surface acoustic wave. The device is equipped with a first delay line whose length is longer than the second delay line, and the first delay line or the second At least one of the sensitive regions of the delay line is less sensitive to the first surface acoustic wave or the second surface acoustic wave. A step that reacts to the analyte in such a way that one side changes, and a SAW device Steps include receiving a signal corresponding to the output and identifying the first pulse of the received signal. Step, where the first pulse corresponds to the first SAW sensor, and received A step of identifying the second pulse of the signal, wherein the second pulse is identified by the second SAW sensor A step corresponding to the step of identifying a third pulse of the received signal, Step, where the third pulse corresponds to the excitation signal, and the first pulse, second pulse or third pulse At least two of the pulses, with respect to phase, frequency, amplitude, or timing A step to determine one, and a division based at least in part on the step to determine. The present invention provides a method comprising the steps of identifying or monitoring precipitates.

[0037] In one embodiment, the step of identifying or monitoring the analyte is performed using a first pulse, the second pulse, Amplitude, phase, frequency, or time between at least two of the two pulses or the third pulse. The method includes a step of determining the variability in at least one of the delays.

[0038] In one embodiment, the disclosure is routed sequentially to different delay lines via a multiplexer. A step of sequentially generating excitation signals, wherein the same or different multiplexed signals are sent to the receiving electronic device. The present invention provides a method that includes the step of generating responses that are sequentially routed via a kusa.

[0039] A surface acoustic wave (SAW) device consists of a piezoelectric substrate and a device attached to the piezoelectric substrate. It includes a plurality of SAW sensors arranged on the surface. The plurality of SAW sensors are first SAW The system includes a vise and a second SAW device. The first SAW sensor detects the first surface acoustic wave. It includes a first delay line configured to propagate. The second SAW sensor is a second surface ray It includes a second delay line configured to propagate the wave. The length of the first delay line is equal to the length of the second delay line. The length of the first delay line is longer than the length of the extension line, or the length of the second delay line is longer than the length of the first delay line.

[0040] The devices described in the preceding paragraph also include other features described here that are not covered in this paragraph. Any combination of the following features may also be included. In one embodiment, the first SAW sensor is the first A first transducer for transmitting a first surface acoustic wave along the delay line, and a first A second method for receiving the first surface acoustic wave in response to the propagation of the first surface acoustic wave along the delay line. It further includes the transducer.

[0041] Any device mentioned in the preceding paragraph also has other features described in this paragraph. This may also include any combination of the following features: In one embodiment, the first SAW sensor is , a transducer positioned on the substrate, and a component positioned on the substrate opposite the transducer It may further include a reflected material. The transducer is along the first delay line The transducer is configured to transmit surface acoustic waves, and the transducer further transmits the first surface acoustic wave The first surface acoustic wave is received after it has been reflected by a reflector and propagated twice along the first delay line. It is configured as follows. In one embodiment, the reflector is the first reflector, and the first SAW sensor A second reflector positioned on the substrate near the first reflector relative to the transducer. It further includes: The transducer reflects off the second reflector and passes along the first delay line twice. It is configured to receive the first surface acoustic wave as it propagates. In one embodiment, The first reflector is configured to reflect surface acoustic waves having a first frequency, and the second The reflector is configured to reflect surface acoustic waves having a second frequency.

[0042] Any device mentioned in the preceding paragraph also has other features described in this paragraph. This may also include any combination of the following features: In one embodiment, the first SAW sensor is The first SAW sensor includes a pair of electrical contacts, and the second SAW sensor includes a second pair of electrical contacts. The first and second pairs of electrical contacts are electrically connected. In one embodiment, Each of the SAW sensors is configured to receive an excitation signal. In one embodiment, The excitation signal can be a pulsed voltage, a sinusoidal electrical signal, frequency modulation, linear frequency modulation, or hyperbolic frequency. Modulation, orthogonal frequency coding, random modulation, continuous phase modulation, frequency shift key, multiplication Among frequency shift keys, phase shift keys, wavelet modulation, or broadband frequency signals It includes at least one of the following. In one embodiment, each of the SAW sensors simultaneously receives an excitation signal. It is configured to receive.

[0043] Any device mentioned in the preceding paragraph also has other features described in this paragraph. Any combination of the following features may also be included. In one embodiment, the SAW device is One or more processors that communicate with each of the first SAW sensor and the second SAW sensor, further Includes. One or more processors receive from the first SAW sensor and the second SAW sensor. It may be configured to generate a received signal based at least partially on the signal. In the embodiment, one or more processors further perform at least partially based on the received signal It is configured to determine or monitor at least one analyte. In one embodiment, Furthermore, one or more processors send pulses corresponding to the excitation signal to the first SAW sensor. Between at least two of the corresponding pulses or pulses corresponding to the second SAW sensor By detecting variations in amplitude, phase, frequency, or time delay, at least one It is configured to identify the analyte.

[0044] Any device mentioned in the preceding paragraph also has other features described in this paragraph. Any combination of the following features may also be included. In one embodiment, the received signal is a plurality of Includes a compressed pulse train having pulses. In one embodiment, a plurality of pulses in the compressed pulse train are A first pulse corresponding to the first SAW sensor, and a second pulse corresponding to the second SAW sensor Includes pulses. In one embodiment, the timing of the first pulse is slightly less than the length of the first delay line. Based on, at least partially, the timing of the second pulse is at least the length of the second delay line. Partially based. In one embodiment, multiple pulses of the compressed pulse train correspond to the excitation signal. Includes pulses.

[0045] Any device mentioned in the preceding paragraph also has other features described in this paragraph. Any combination of the following features may also be included. In one embodiment, the piezoelectric substrate is 36°Y Quartz, 36°YX Lithium Tantalite, Langasite, Langateite, Langanite, Lead zirconate titanate, cadmium sulfide, berinite, lithium iodate, lithium tetraborate It contains at least one of thium or bismuth germanium oxide. In one embodiment, The piezoelectric substrate includes a piezoelectric crystal layer. In one embodiment, the piezoelectric crystal layer is bonded to the non-piezoelectric substrate. It includes a thickness greater than the wave penetration depth.

[0046] Any device mentioned in the preceding paragraph also has other features described in this paragraph. Any combination of the following features may also be included. In one embodiment, the SAW device is The detection region further includes a detection region located at a delay line 1 and configured to adhere to or react with the analyte. In one embodiment, the detection region is biologically sensitive for capturing analytes from a liquid medium. It includes an interface. In one embodiment, the detection region is a chemical for absorbing the analyte from the liquid medium. Includes an analytically sensitive interface. In one embodiment, the SAW device is an analytically sensitive interface added to the sensing region. Further includes a detector for measuring the phase response of surface acoustic waves as a function of the material. In this configuration, the SAW device further includes a waveguide layer on the first delay line. In one embodiment, The wave layer comprises at least one of a polymer, SiO2, or ZnO. In one embodiment, The first surface acoustic wave corresponding to the first SAW sensor is higher than 100 MHz, 30 Includes frequencies higher than 0MHz, higher than 500MHz, or higher than 1000MHz. nothing.

[0047] As described here, the method involves the steps of generating an excitation signal and surface acoustic wave (SAW) The process may include the step of sending an excitation signal to the device. The SAW device is a first surface A first SAW sensor having a first delay line configured to propagate elastic waves, and A second SAW sensor having a second delay line configured to propagate surface acoustic waves 2 This includes: The length of the first delay line is longer than the length of the second delay line, or the length of the second delay line is longer than the length of the second delay line. It is longer than the length of the first delay line. The method is to receive the output signal of the SAW device step Further includes the length of the first delay line, the second delay line, or the first SAW sequence. At least one of the analytes exposed to the sensor or the second SAW sensor Here is another example. The method involves analyzing the analyte based at least partially on the output signal of the SAW device. The process further includes the step of determining or monitoring the following.

[0048] As described here, the method involves the steps of receiving an excitation signal and the SAW device Generates a first surface acoustic wave to propagate across the first delay line of a SAW sensor. The method may include steps. The method is to connect the second delay line of the second SAW sensor of the SAW device to The process may further include the step of generating a second surface acoustic wave for propagation over the first The length of the delay line is longer than the length of the second delay line, or the length of the second delay line is longer than the length of the first delay line. It is longer than the length of the first delay line. The method involves receiving the first surface acoustic wave after propagation across the first delay line. The steps include: a step of receiving a second surface acoustic wave after propagation across a second delay line. The method includes the received first surface acoustic wave, the received second surface acoustic wave, or excitation. The step of generating a signal based at least partially on at least one of the signals It also includes.

[0049] The method described in the preceding paragraph is also one of the other steps or features described here in this paragraph. Any combination of the following steps or features described below may also be included. In one embodiment, the first The SAW sensor includes a reflector configured to reflect a first surface acoustic wave, the first The step of receiving surface acoustic waves is performed after the first acoustic wave has been reflected. In one embodiment The second SAW sensor includes a reflector configured to reflect the second surface acoustic wave. The step of receiving the second surface acoustic wave is performed after the second acoustic wave has been reflected.

[0050] The method described here also involves the step of generating an excitation signal and surface acoustic waves (SA). W) The step of sending an excitation signal to the device may include the SAW device, Table 1 A first SAW sensor including a first delay line configured to propagate surface acoustic waves, and A second SAW sensor including a second delay line configured to propagate surface acoustic waves 2 Includes. The length of the first delay line is longer than the length of the second delay line, or the length of the second delay line is It is longer than the length of the first delay line. The method involves receiving the excitation signal in the SAW device. Steps include generating a first surface acoustic wave for propagation across a first delay line. The steps include generating a second surface acoustic wave to propagate across a second delay line, and The steps include receiving a first surface acoustic wave after propagation across a delay line 1, and receiving a second surface acoustic wave across a second delay line The steps include receiving a second surface acoustic wave after propagation, and receiving the received first surface acoustic wave or A signal is generated based at least partially on at least one of the received second elastic waves. The steps include the following: The signal is the length of the first delay line, the second delay line, or the first Analytes exposed to at least one of the SAW sensor or the second SAW sensor The method is based at least one of the following on the generated signal. The process further includes the step of determining or monitoring the analyte.

[0051] The method described here also involves the steps of generating multiple excitation signals and the excitation signals This may include the step of sequentially transmitting to one or more SAW devices. SAW device section includes one or more delay lines and includes one or more excitation signals. Connected to the partition, the multiplexer connects to a second SAW device partition with one or more delay lines. Connect to the excitation signal section, etc. Each SAW device section is the same or a different SAW device. The chair may also have one or more delay lines of the same or different lengths. The method is SAW section The step further includes sequentially receiving signals corresponding to the output of the image. Multiplexer routing is used to determine whether an image is active.

[0052] According to the technique described here, the method also involves a small number of SAW devices in a sample medium containing the analyte. This may include a step in which at least part of the device is exposed. The SAW device responds to the excitation signal to the first A first SAW sensor having a first delay line configured to propagate surface acoustic waves, It has a second delay line configured to propagate a second surface acoustic wave in response to an excitation signal. Includes a second SAW sensor. The length of the first delay line is longer than the length of the second delay line, The length of the second delay line is longer than the length of the first delay line. At least one of the sensitive regions is at least the first surface acoustic wave or the second surface acoustic wave. The method is configured to react with the analyte so that one of them changes. The steps include receiving a signal corresponding to the output of the signal, and receiving the first pulse and second pulse of the received signal. The process further includes the step of identifying a pulse and a third pulse. The first pulse is the first S Compatible with AW sensors. The second pulse corresponds to the second SAW sensor. The third pulse This corresponds to the excitation signal. The method is to use one of the first pulse, the second pulse, or the third pulse. Determine at least two of the following: phase, frequency, amplitude, or timing. The steps of identifying the analyte and determining the analyte based at least in part on the aforementioned determination step. This further includes the step of monitoring.

[0053] The method described in the preceding paragraph is also one of the other steps or structures described here in this paragraph. The following steps or any combination of configurations described below may also be included. In one embodiment, the part The step of identifying or monitoring precipitates is performed using the first pulse, the second pulse, or the third pulse. at least two of the amplitude, phase, frequency, or time delay of the rhythms It includes a step to determine the variability in one instance.

[0054] The embodiments of any SAW device or method disclosed herein are not limited to any one. Without including any configuration or element of any arrangement or embodiment disclosed in this application, Or any of the details herein shall form novel arrangements and embodiments Or interchangeably combined with any other configuration, component or detail of any embodiment. It is possible to combine them.

[0055] In particular, conditional words such as "can," "could," "might," or "may" Unless otherwise specified or understood within the context in which it is used, Generally, other embodiments do not include specific configurations, elements, and / or steps. The form of application conveys that it includes. Therefore, such conditional language is common. any configuration, elements, and / or steps required for one or more embodiments The fact that, or one or more embodiments are provided by user input or prompting, Or otherwise, these components, elements and / or steps may be any particular implementation The logic needed to determine whether something is included or is intended to be executed in a given state is necessary. It is intended to mean including.

[0056] The terms "to have," "to include," and "to possess" are synonymous and encompass all forms without restrictions. It is used in this context and does not exclude additional elements, components, behaviors, actions, etc. Also, the term "or" is used For example, when used to combine a list of elements, the term "or" refers to the elements in the list. In its comprehensive sense (and not in its exclusionary sense), it means one, part, or all of the above. It is used. Alternatively, the term "and / or" in relation to a list of two or more items is used in the following context. All interpretations of, any one item in the list, all items in the list and the list This covers any combination of items in [the relevant section]. Furthermore, the term "each" used here refers to [the relevant section]. In addition to having the general meaning of, the term “each” refers to any part of a set of elements to which it applies. It can mean a collection. In addition, the words "here," "above," "below," and words with similar meanings. When used in this application, this refers to the application as a whole, not to any particular part of it. Refer to the application.

[0057] Unless the context clearly requires otherwise, throughout the description and claims The words "preparation" and "to prepare" have an inclusive meaning, in contrast to an exclusionary or exclusive meaning. In other words, it is interpreted as meaning "including without limitation." Therefore, the terms “connected,” “joined,” “attached,” or any variation thereof The form means any connection or combination, either direct or indirect, between two or more elements. The combination or connection can be physical, logical, or a combination thereof.

[0058] The words in the above detailed explanation, whether singular or plural, are also used where the context allows. This can include both singular and plural items. The word "or" in relation to a list of two or more items is a separate word. All of the following interpretations, any one of the items in the list, all of the items in the list and It covers any combination of items in the list. Or, it covers lists of two or more items. The term "and / or" means any one of the items in the list, all of the following interpretations of the word. This covers all items in the list, as well as any combination of items in the list.

[0059] Depending on the embodiment, any particular operation or behavior of any of the algorithms described herein may be Events or functions can be executed in different orders and can be added, merged, or completely excluded. (In non-restrictive examples, not all of these are necessarily required for algorithmic practice.) In certain embodiments, the operation, behavior, function, or event may be, for example, a multithreaded process. Processing, interrupt handling, or through multiple processors or processor cores, or other parallel processes In architecture, execution is possible simultaneously rather than sequentially.

[0060] Various descriptive logical blocks and modules will be described in relation to the embodiments disclosed herein. The rules, routines, and algorithm steps are provided as electronic hardware, or electronic hardware. This can be achieved as a combination of hardware and executable software. This compatibility is explicitly stated. To that end, various descriptive components, blocks, modules, and steps are used. The above outlines the functionality. Such functionality is provided as hardware, and Whether it runs as software on hardware depends on the entire system. It depends on the specific use and design constraints given to the body. The functionality described depends on each specific use. While this can be done in various ways, the decision to do so would deviate from the scope of disclosure. It should not be interpreted in a way that leads to liberation.

[0061] Furthermore, various descriptive logical blocks will be described in relation to the embodiments disclosed herein. And the module is a processor device, digital, to perform the functions described here. Signal processors (DSPs), application-specific integrated circuits (ASICs), field programmers Multi-gate array (FPGA) or other programmable logic devices, discrete Gate or transistor logic, discrete gate hardware components Or it may be carried out or executed by a machine such as any combination thereof. Processor device While a microprocessor can be used, alternatively, a processor device is a controller. This may include a microcontroller or a combination thereof. This may include electrical circuits configured to process computer executable instructions. In this configuration, the processor device processes logic without processing computer executable instructions. Processor, including FPGA or other programmable device that performs operations. The device also includes combinations of computing devices, such as DSPs and microcontrollers. A combination of processors, multiple microprocessors, and one or more microprocessors used in conjunction with a DSP core. It can also be implemented as a processor, or any other such configuration. Here, mainly digital While I've explained the Tal technology, processor devices can also primarily include analog components. For example, some or all of the signal processing algorithms described here are analog circuit configurations or This can be implemented in mixed analog and digital circuit configurations. The computing environment is Without limiting ourselves, some examples include microprocessors and mainframe processors. Computers, digital signal processors, portable computing devices, device controllers Any computer system including a calculator or computer system based on a computing engine in an electrical appliance. This may include a type of computer system.

[0062] Methods, processes, routines, or algorithms described herein in relation to the embodiments disclosed herein The elements are hardware, and software modules executed by processor devices. It can be directly embodied in one or a combination of the two. The software module is RAM memory, flash memory, ROM memory, EPROM memory, EEPROM memory Recycle, register, hard disk, removable disk, CD-ROM, or any other It can reside in a non-temporary computer-readable storage medium of a certain format. An example storage medium is a professional The data processor device can read information from and write information to the storage medium. It can be coupled to the processor device in this way. Alternatively, the storage medium can be coupled to the processor device. It can be integrated with the chair. The processor device and storage medium can reside in the ASIC. Yes, it is possible. ASICs can reside on the user terminal. Alternatively, a processor device... The storage medium can reside as a separate component on the user terminal.

[0063] Furthermore, the processing of various components of the illustrated system involves multiple machines, networks, and It can be distributed across other computing resources. Moreover, it can be distributed across two or more systems. The components may be combined with fewer components. Various types of the illustrated system The components are a dedicated computer hardware system and / or computing data This can be done on one or more virtual machines, not on a single device.

[0064] The range provided here is understood to be a complete abbreviation of all values ​​within that range. For example, the range from 1 to 50 is 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12 , 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 3 9, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49 or 50, and further For example, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8 and 1.9 Any number, a group consisting of all the intervening decimals between the aforementioned integers, It is understood to include combinations or subranges. With respect to a subrange, any endpoint of the range Specifically, we can consider "nested subranges" that expand from there. For example, 1 to 50 The nested subranges of the example range are 1 to 10, 1 to 20, and 1 in one direction. From 30 and 1 to 40, or 50 to 40, 50 to 30, 50 to 20 in the other direction And it may have 50 to 10.

[0065] Any of the above patents and applications, as well as other documents, including any of those listed in the attached documents, are included. References are incorporated herein by reference. Aspects of this disclosure may be referenced as necessary to the various references mentioned above. Further embodiments of this disclosure are provided by modifying them to adopt the systems, functions, and concepts of the present disclosure. It is possible.

[0066] The details of the system are included in this disclosure, but they are significantly altered in the specific embodiment. May be modified. As described above, specific configurations or aspects used when describing certain configurations or aspects of this disclosure Technical terms are any specific features or structures of this disclosure to which the technical terms are associated. Or it should be used to indicate that it is being redefined here to be limited to a specific aspect. There is no such thing. Generally, the terms used in the following claims are as described in the section on detailed explanation above. If such terms are not clearly defined, this disclosure will not be limited to the specific examples disclosed in the specification. It should not be interpreted in such a way as to determine the scope of this disclosure. Therefore, the actual scope of this disclosure is as disclosed. This includes not only examples, but also all equivalent methods of performing or implementing this disclosure under the claims. nothing.

[0067] Separating words such as the phrase "at least one of X, Y, or Z" are not specifically listed. If not, the item, term, etc., must be X, Y, or Z, or any combination thereof (not limited to Typical examples are used to show that can be X, Y, and / or Z. It is understood in context. Therefore, such a delimiter is a particular embodiment of X. It is necessary that at least one Y or at least one Z exists. It is generally not intended to indicate that, and should not be indicated.

[0068] Unless otherwise specified, articles such as "a" or "an" imply that the item being described includes one or more items. It should generally be interpreted as such. Therefore, "a device configured in such a way," etc. The phrase is intended to include one or more devices as described. One or more devices can also be configured together to perform the details described. It is possible. For example, "a processor configured to perform details A, B and C" is a detailed Executes detail A in conjunction with a second processor configured to execute details B and C. It may include a first processor configured to do so.

[0069] The above detailed description illustrates, describes, and indicates novel configurations so as to apply to various embodiments. However, this does not deviate from the intent of this disclosure, and does not describe the device or algorithm described. It can be understood that various omissions, substitutions, and changes may occur in the form and details. Thus, in the specific embodiments described herein, some configurations may be used or implemented separately from others. Since it is possible, all of the configurations and benefits described here can be embodied in a form that does not provide them. It is possible. The scope of the specific embodiments disclosed herein is not limited to the foregoing description, but rather to the attached. As shown in the claims. All of the meaning and scope equivalent to the claims. The changes will come to fall within those ranges. [Brief explanation of the drawing]

[0070] [Figure 1A] Figure 1A shows a surface acoustic wave (SAW) device according to an exemplary embodiment. [Figure 1B] Figure 1B shows the time-domain excitation signal and received signal corresponding to the SAW device of Figure 1A according to an exemplary embodiment. [Figure 2A] Figure 2A shows a surface acoustic wave (SAW) device according to an exemplary embodiment. [Figure 2B] Figure 2B shows the time-domain excitation signal and received signal corresponding to the SAW device in Figure 2A according to an exemplary embodiment. [Figure 3-1] Figure 3A shows a block diagram of a multiplexed SAW measurement system according to an exemplary embodiment. Figure 3B shows a block diagram of a multiplexed SAW measurement system according to an exemplary embodiment. [Figure 3-2] Figure 3C shows a block diagram of a multiplexed SAW measurement system according to an exemplary embodiment. [Figure 4] Figure 4 shows a diagram of a SAW device according to an exemplary embodiment. [Figure 5] Figure 5 shows graphs of the excitation and reception signals corresponding to the SAW device in Figure 4 according to an exemplary embodiment. [Figure 6] Figure 6 shows a graph of the compressed pulse train corresponding to the received signal in Figure 5. [Figure 7] Figure 7 shows the real-time phase shift of the detection and reference channels according to an exemplary embodiment. [Figure 8] Figure 8 is a block diagram of a multiplexed SAW device according to an exemplary embodiment. [Figure 9] Figure 9 is a flowchart illustrating an embodiment of processing performed by a multiplexed SAW device according to an exemplary embodiment. [Figure 10] Figure 10 is a flowchart illustrating an embodiment of processing performed by a multiplexed SAW device according to an exemplary embodiment. [Figure 11] Figure 11 is a flowchart illustrating an embodiment of processing performed by a multiplexed SAW device according to an exemplary embodiment. [Figure 12] Figure 12 is a flowchart illustrating an embodiment of processing performed by a multiplexed SAW device according to an exemplary embodiment. [Modes for carrying out the invention]

[0071] Surface acoustic wave (SAW) sensors or bulk acoustic wave (BAW) sensors are used for liquids, solids, Analytes (sometimes called target materials) present in a gaseous or biological medium. ) is used to determine or monitor. The SAW sensor is located on the surface of the SAW sensor. It may include receptors configured to bind to one or more analytes. When a sample medium containing material is placed on the SAW sensor, physical contact occurs between the analyte and the receptor. A physical, chemical, or electrical reaction occurs. The resulting changes determine the content of the analyte. It is used for setting or monitoring.

[0072] SAW devices include a piezoelectric substrate and an input interdigital on a portion of the surface of the piezoelectric substrate. Transducer (IDT) (sometimes called transmitting IDT) and other parts of the piezoelectric substrate This may include the output IDT (sometimes called the received IDT) in minutes. The transmitted IDT is, It can be excited by an excitation signal. For example, the excitation signal can be any pulse voltage or sine wave, without limitation. Waveelectric signals, frequency modulation, linear frequency modulation, hyperbolic frequency modulation, quadrature frequency coding, Random modulation, continuous phase modulation, frequency shift key, multi-frequency shift key, phase shift It can include a variety of signals, including key, wavelet modulation, and broadband signals. This is due to the piezoelectric effect. The transmitted IDT is the space between IDTs in the direction of the received IDT (generally called a delay line). It generates surface acoustic waves that propagate along the delay line. The wavelength of the surface acoustic waves is the wavelength of the waves that propagate along the delay line. Later, it may change due to physical, chemical, or electrical reactions between the analyte and the receptor. Surface acoustic waves reach the receiving IDT, and the receiving IDT converts the acoustic waves into electrical signals through the piezoelectric effect. Which received signal should it be converted to?

[0073] In one embodiment, the receptor (also called the sensitive layer) is placed on the delay line. The responsive layer is exposed to analytes such as certain gases, chemical materials, or biological materials. In this case, as the surface acoustic wave propagates along the delay line, the sensitive layer modulates the surface acoustic wave or To induce this change, quantifiable changes occur in the sensitive layer. For example, the phase of surface acoustic waves. The velocity, amplitude, or frequency can be modified as the surface acoustic wave propagates through the sensitive layer.

[0074] The characteristics of the analyte can be quantified by comparing the excitation signal and the received signal. Example For example, the change in velocity or amplitude of a surface acoustic wave, compared to the excitation signal, is the amplitude of the received signal. It can respond to changes in frequency, phase shift, or time delay. Therefore, the SAW sensor is Advantageously, it can influence the propagation of SAW and lead to changes in the output electrical signal. It provides the ability to measure almost any physical or chemical interference.

[0075] Furthermore, as the surface acoustic waves propagate along the delay line, the received signal is compared to the excitation signal. There is a noticeable and measurable delay in the number. This delay is at least partially proportional to the length of the delay line. This can be caused by... Therefore, in one embodiment, multiple SAW sensors are used, each with different characteristics It has a delay line of a certain length. The length of the delay line affects the delay of the received signal, so multiple Each of the signals received by the SAW sensor may have a different delay. Therefore, in one example, SA The W device utilizes multiple SAW sensors (with different delay line lengths) simultaneously. It is possible to measure the number of analytes.

[0076] In one embodiment, the receiving IDT is replaced by a reflector. Surface acoustic waves pass through the delay line. It passes, reflects off reflective surfaces, and returns via delay lines before arriving back at the transmitted IDT.

[0077] Regarding biosensors, proteins, antibodies, antigens, deoxyribonucleic acid ("DNA"), Ribonucleic acid ("RNA"), biomolecules such as bacteria, animal cells, viruses or tissues, and their If toxins produced from these substances bind to the surface of the biosensor, the surface mass of the sensor will change. This causes signal drift in the sensor. As a result, the biosensor targets The material content can be determined or monitored.

[0078] One-way SAW sensor Figure 1A is a diagram of a surface acoustic wave (SAW) device 100 according to one embodiment. W device 100 consists of a piezoelectric substrate (not shown) and different lengths 112, 114, 116, 11 SAW sensors 102, 104, 106, 108, 11 have delay lines 126 and 8, 120. Includes an array of 0. In one example here, the SAW device 100 is connected to the sensor 102. I will explain this further. However, this does not apply to some of the other SAW sensors 104, 106, 108, 110 or All of these are similar to or different components or configurations as described with respect to the SAW sensor 102. It may have.

[0079] The SAW sensor 102 is located on a substrate and is a transmitting interface that excites surface acoustic waves onto a piezoelectric substrate. Includes a digital transducer (IDT) 122. The SAW sensor 102 also has a board. The receiver IDT124 detects the surface acoustic waves after propagation, and IDT122,124 are connected to the receiver. It also includes two pairs of electrical contacts 132, 134 for electrically connecting to the gaseous components.

[0080] SAW device 100 is 36°Y quartz, 36°YX lithium tantalite, 128° YX Lithium Niovate, Langasite, Langate, Langanite, Zir Titanate Lead conate, cadmium sulfide, berinite, lithium iodate, lithium tetraborate, or acid It may include various piezoelectric substrates, such as one or more combinations of bismuth germanium. In this embodiment, the SAW device 100 includes a plurality of SAW sensors 102, 104, 106, A single piezoelectric substrate to which 108 and 110 are attached is used. In one embodiment, SAW One or more of sensors 102, 104, 106, 108, and 110 utilize different piezoelectric substrates. It is possible (for example, the first SAW sensor 102 is mounted on the first piezoelectric substrate, The second SAW sensor 104 is mounted on the second piezoelectric substrate.

[0081] The transmitter IDT122 (sometimes called the input IDT) converts the excitation signal into surface acoustic waves. In exchange, the surface acoustic waves are propagated through the substrate along the delay line 126. The excitation signal is transmitted to the piezoelectric substrate. The excitation signal is then transmitted to hardware such as a waveform generator, as described here. It can be generated by, without limitation, pulse voltage, sinusoidal electrical signal, frequency variable Tone modulation, linear frequency modulation, hyperbolic frequency modulation, orthogonal frequency coding, random modulation, continuous position Phase modulation, frequency shift key, multi-frequency shift key, phase shift key, wavelet It may include a variety of signals, including modulation. In one embodiment, the transmission of the SAW device 100 Each IDT122 is simultaneously excited by a single excitation signal. For example, the excitation signal is RF It is receivable by the switch and is transmitted over part or all of the transmitter IDT122. Synchronize them. In one embodiment, SAW sensors 102, 104, 106, 108, 11 At least some of the 0s are not excited simultaneously. For example, SAW sensors 102, 104, Two or more of 106, 108, and 110 can be excited sequentially.

[0082] The transmitter IDT122 is excited via the electrical contact 132 (e.g., contact pad). It is possible to receive an excitation signal. For example, the SAW sensor 102 is capable of receiving an excitation signal. It may include one pair of electrical contacts 132. The pair of electrical contacts 132 may be connected to a voltage source, etc. Positive and includes negative components. For example, to generate surface acoustic waves, a voltage source is used, an electrical contour Through contact 132, a positive contact and a negative contact are connected to the positive voltage of the excitation source. Transmitter IDT1 includes a negative contact for connection (e.g., the system's electrical ground). It connects to 22.

[0083] The transmitting IDT array is excited when (for example, when a voltage or excitation signal is applied) ), along the delay line 126 of each SAW sensor 102, 104, 106, 108, 110 It generates multiple surface acoustic waves that propagate through the plate. As a non-limiting example, the first surface acoustic wave The wave is generated and transmitted along the first delay line corresponding to the SAW sensor 102, and on the second surface The elastic wave is generated and transmitted along a second delay line corresponding to the SAW sensor 104, and a third Surface acoustic waves are generated and transmitted along a third delay line corresponding to the SAW sensor 106, The surface acoustic waves of 4 are generated and transmitted along the fourth delay line corresponding to the SAW sensor 108. The fifth surface acoustic wave is generated and transmitted along the fifth delay line corresponding to the SAW sensor 110. Surface acoustic waves can have various frequencies. For example, the frequency of surface acoustic waves is approximately 5 0, 100, 150, 200, 250, 300, 350, 400, 500, 600, 70 It can be 0, 800, 900, or 1000 MHz (+ / - approximately 25 MHz). Similarly, Table The frequencies of surface acoustic waves are: less than 100 MHz, greater than 100 MHz, and greater than 300 MHz. It may be greater than 500MHz or greater than 1000MHz.

[0084] In some cases, the frequency of surface acoustic waves is at least partially dependent on the type or composition of the piezoelectric substrate. It can depend. For example, the frequency of surface acoustic waves excites pure or leaky transverse wave mode generation. Piezoelectric substrates (non-specific examples: 36°Y quartz, 36°YX lithium tantalite, langa cyanoacrylate) T, Langateite, Langaneite, Lead Zirconate Titanate, Cadmium Sulfide, Berlinite SA containing lithium iodate, lithium tetraborate, and bismuth germanium oxide. The frequency can be higher than 100MHz for the W sensor.

[0085] In one embodiment, the SAW device 100 propagates through the substrate and its surface elasticity It includes a thin waveguide layer (not shown) that limits the wave.

[0086] The received IDT124 (sometimes called the output IDT) is after a finite delay of a certain time. For example, surface acoustic waves propagate from the transmitting IDT122 through the delay line to the receiving IDT124. The receiver IDT124 receives the (later) surface acoustic waves. Convert the surface acoustic waves (after propagating along line 126) into a received signal (e.g., an electrical signal). As described here, in one embodiment, the surface acoustic waves of the SAW device 100 However, due to the different delay line lengths of 112, 114, 116, 118, and 120, they occur at different times. In between, it is possible to arrive at or reach the corresponding receiving IDT124. For example, transmitting IDT1 Each of the 22 can simultaneously transmit surface acoustic waves along the delay line 126. 112, 114, 116, 118, 120 are SAW sensors 102, 104, 106, 1 Since it can differ for 08 and 110, surface acoustic waves reach the corresponding receiver IDT124. Before that, it requires different periods of time to propagate across the corresponding delay line 126. Therefore The various delays of the received signal (or pulse of the received signal) are different for the SAW sensors 102, 10 Based at least in part on the variation in length between delay lines 126 at 4, 106, 108, and 110. It can disappear.

[0087] The SAW device 100 has electrical contacts 132, 13 on each side of the delay line 126. It may include an array of 4 (for example, contact pads). For example, the SAW sensor 102 has 2 It may include a pair of electrical contacts 132, 134, each pair having positive and negative components. Positive and negative components are found in, to give a few examples, within a voltage source or a phase detection integrated circuit. It can be used for IDT electrical connections with internal or external electrical components. For example, it can generate surface acoustic waves. To achieve this, the voltage source is connected to the positive voltage of the excitation source through the electrical contact 132. Positive contact for and negative contact for connecting to negative voltage (for example, system It is connected to the transmitter IDT122, which includes the electrical ground. Similarly, it propagates through the board. To receive surface acoustic waves later, the receiving IDT124 is (RF switch or RF amplifier) Two contacts (positive and negative) for connecting to the positive and negative electrodes of an external measurement system (such as) It includes or is connected to a negative ().

[0088] In one embodiment, the number of contacts 132, 134 is the number of SAW sensors 102, 104, It increases proportionally to the increase in the numbers 106, 108, and 110. For example, SAW devices 100 is represented as including five SAW sensors 102, 104, 106, 108, and 110. However, any number of SAs (for example, 1, 2, 3, 4, 5, 6, 7, 8, 9, 10 or more) A W sensor is available. Therefore, the number of contacts increases with the number of SAW sensors. Since it increases proportionally, the size or number of contacts is proportional to the size of the SAW device 100. This can be a limiting factor.

[0089] Therefore, although not shown in Figure 1A, in one embodiment, a multiplexed SAW device Some or each of the contacts of 100 SAW sensors 102, 104, 106, 108, 110 Codes 132 and 134 are both joined or connected. This is advantageous as it allows for redundancy. Miniaturization of SAW device 100 (for example, cost increases proportionally to chip size) (By) reducing costs, or the number of possible SAW sensors 102, 104, 106, 108, 110 This allows for an increase in the number of detectable analytes. Each positive contact pad of the transmitting IDT can be coupled together, and each negative contact pad of the transmitting IDT The contact pads of the receiving IDT can also be coupled together. Similarly, each corresponding positive terminal of the receiving IDT The negative contact pads can be coupled together. This connection is (multilayer metal coating and SAW device 100 (such as in piezoelectric substrates having common contact pads) which can occur on the body or can occur outside the SAW device 100 (such as by an external printed circuit board (PCB)). The connection of common contact pads (e.g., positive to positive, negative to negative) contributes to the miniaturization of the chip of the SAW device 100. For example, referring to FIG. 1A, the total number of contacts of the SAW device 100 for external connections can be reduced to four types (e.g., positive and

[0090] negative contacts for the transmitting IDT 122 and positive and negative contacts for the receiving IDT 124). The total number of contacts can be reduced to four regardless of the number of SAW sensors in the SAW device 100. It should be noted that the SAW sensors 102, 104, 106, 108, 110 are arranged in a sequence format where the lengths 112, 114, 116, 118, 120 of the delay lines gradually increase from the first sensor 102 to the last sensor 110, but the SAW sensors 102, 104,

[0091] 106,108,110 can be arranged in any order (e.g., not in the order corresponding to the lengths 112, 114, 116, 118, 120 of the delay lines). Further, although the lengths 112, 114, 116, 118, It becomes biologically active. Similarly, the sensor interacts with the fluid through bonding to a chemically sensitive interface. It is possible to detect certain chemical substances.

[0092] In one embodiment, a delay line 126 (or a guide positioned on or near the delay line) The wave layer, sensitive layer, or detection area is affected by a medium (such as a liquid) (biological or chemical). This leads to the adhesion mechanism of analytes (such as target analytes). For example, Figure 1A shows SAW sensors. Fluid cells covering at least a portion of the array of S106 (for example, a portion of the delay line 126) It is configured to indicate 128 and to transmit the analyte to the delay line 126 or the detection area.

[0093] In one embodiment, the sensitive layer is used to send SAW messages between the transmitting IDT122 and the receiving IDT124. It is attached to each surface of the sensor (for example, on delay line 126). The sensitive layer is an element (indefinite Typical examples: gases, chemical materials, biological materials) exposed to the sensitive layer, which is affected by the propagating waves (for example) For example, it is modified to cause quantifiable changes (such as amplitude, velocity, etc.). If variations in the excitation signal and received signal are detected in terms of amplitude, phase, frequency, or time delay, It can be measured by doing so.

[0094] In one example, a single SAW device was used to simultaneously detect and monitor multiple analytes. Alternatively, it would be desirable to measure. For example, detecting multiple analytes is possible. For example, in biological materials such as in the diagnosis of infectious diseases or the detection of volatile organic compounds... This can be beneficial. In one embodiment, as described here, multiple analytes are SA It can be simultaneously detected and measured by the W device 100. For example, each SAW sensor 10 Different delay line lengths of 2, 104, 106, 108, 110, 112, 114, 116, 1 18, 120, advantageously, SAW sensors 102, 104, 106, 108, A time delay occurs between the received signals associated with 110. The time delay separates each of them. By delaying the received signal in such a way, the SAW device 100 has an advantage. For example, it enables testing of one or more analytes in a sample medium. For example, the received signal is It can be combined with a compressed pulse train. Each pulse in the compressed pulse train is in response to the difference in the length of the delay line. It has a corresponding specific time delay. In one embodiment, the phase or other information of the compressed pulse train It can be extracted.

[0095] Figure 1B shows a time domain corresponding to the SAW device 100 in Figure 1A according to one embodiment. Excitation signal (T X )156, 158 and received signal (R X ) shows 140 and 150. Here's the explanation As will be shown, the SAW device 100 in Figure 1A has five SAW sensors 102, 104, 1 Includes arrays 06, 108, and 110, each with different lengths 112, 114, 116, and 11 It has 8,120 delay lines 126. For example, the length of each delay line is given by the following equation 1: Delay line length = L1 + (nl) * ΔL It can be determined from, where L1 is the length of the shortest delay line (e.g., length 112), and n All SAW sensors 102, 104, 106, 108, and 110 are from the shortest delay line to the longest The number corresponding to the sequence number of the SAW sensor when classified as a delay line (for example, the shortest delay line 1) For a SAW sensor 102 having 12, n-=1 and the following shortest delay line 114 is present. For a SAW sensor, n-=2 and the SAW sensor 110 has the longest delay line 120. For which n -= 5), and ΔL130 is the SAW sensors 102, 104, 106, 108, 110 when ordered by the length of the delay lines, the delay between subsequent SAW sensors which is the difference in the length of the delay lines. However, each of the lengths 112, 114, 116, 118, 120 of the delay lines is different by a factor of ΔL130 in the illustrated example, but the delay line 126 may have any length and it is not necessary to increase it in a side-by-side or other pattern, which should be noted. Thus, Equation 1 for determining the length of the delay lines results in being able to vary depending on the length of a particular delay line. Alternatively, equations for

[0096] X determining each of the lengths 112, 114, 116, 118, 120 of the delay lines may not be available. In some embodiments, the length of the delay lines is stored in memory. In some embodiments, the X length of the delay lines is predetermined. Continuing to refer to FIGS. 1A and 1B, the excitation signal (T X ) 156 is received by the SAW device 10 0 and each of the SAW sensors 102, 104, 106, 108, 1 ( X ) 10 is excited simultaneously. In this example, the excitation signal (T X

[0097] ​​)156 excites the array of the transmitting IDT122 and each SAW sensor 10 Surface acoustic waves propagating along delay lines 126 at 2, 104, 106, 108 and 110 It generates rays. The receiving IDT124 receives the propagated surface acoustic waves and processes those surface acoustic waves. Received signal (R X ) Change pulses 140, 150 to 141, 142, 143, 144, 145 Replace. As explained here, each SAW sensor 102, 104, 106, 108, 11 The delay lines of 0 have different lengths: 112, 114, 116, 118, and 120. Therefore, the surface The elastic waves will reach various receivers IDT124 at various times. , received signal (R X ) Individual pulses 141, 142, 143, 144, 145 of 140 are , different delay lines 126 corresponding to different lengths 112, 114, 116, 118, 120 The delay varies depending on the period. Received signal (R X ) 140 individual pulses 141, 142, This time delay between 143, 144, and 145 is due to SAW sensors 102, 104, and 106 This also occurs when 108 and 110 are excited simultaneously.

[0098] In other words, SAW sensors 102, 104, 106, 108, and 110 are connected to delay line 126 Due to propagation delays of different lengths of 112, 114, 116, 118, and 120, electrical signals This generates pulse trains 141, 142, 143, 144, and 145. Regarding the example in Figure 1B, Excitation pulse (T X )156 and received signal (R X )140 first pulse 141 (for example, the most Between the pulse 141) corresponding to the SAW sensor 102 having a short delay line 126 of length 112 Time delay (T d )136 is given by the following equation 2: T d =L1 / v This is given by, where L1 is the length of the delay line of the shortest delay line (e.g., length 112). Here, v is the surface acoustic wave velocity, and the surface acoustic wave velocity (v) of a wave is (for example, through a substrate) This is the speed at which surface acoustic waves propagate in a specific space.

[0099] Received signal (R X ) The subsequent pulses 141, 142, 143, 144, and 145 of 140 Time delay between each (ΔT d )138 is given by the following equation 3: ΔT d =ΔL / v Given by, where ΔL130 is given by SAW sensors 102, 104, 106, 108, The length of the delay lines between subsequent SAW sensors when 110 is ordered by the length of the delay lines. This is the difference between the two, where v is the surface acoustic wave velocity.

[0100] The time delay between the first pulse 141 and the excitation signal 156 (T d )136 in various ways It is measurable. For example, time delay (T d )136 is the center, start and end, This can correspond to the time difference between each pulse. In one example, the time delay (T d )136 is Pal This can correspond to the time difference between the corresponding regions of S141 and S156. Time delay (ΔT d ) 138 can be determined using similar techniques.

[0101] As a non-limiting example, the sensor has a minimum delay line length (L) of 4 mm (for example, SAW sensor). The sensor 102 has a delay length of 112 and is mounted on a 36° LiTaO3 piezoelectric substrate. Surface acoustic waves traveling through a 36° LiTaO3 piezoelectric substrate travel at a speed of 4212 m / sec. It has a degree (v). Therefore, the delay line with the shortest length (L1) 112 is a unidirectional SAW sensor. This will delay the first pulse 141 by approximately 0.95 μs. Furthermore, approximately 0.3 With a delay line length difference (ΔL) of 130 mm, the received signal (R X )140 each received pulse 1 Time delay (ΔT) between 41, 142, 143, 144, and 145 d ) is approximately 71 ns.

[0102] In one embodiment, SAW sensors 102, 104, 106, 108, and 110 are multiple Received signal (R X ) Generate 140 and 150 at a constant period (T p ) 152, 154 (For example, between 10, 20, 30, 40, 50, 100, 200, 400 or 500 μs) It is continuously excited at intervals. In examples like these, the received signal (R X )140, 150( For example, pulses 141, 142, 143, 144, 14 in received signals 140, 150 5) For example, a received signal with reduced reception noise (R X ) may be averaged to determine In one embodiment, a time delay (for example, T d ΔT d ) is on the order of ns to μs It is possible.

[0103] Bidirectional SAW sensor Figure 2A is a diagram of a surface acoustic wave (SAW) device 200 according to one embodiment. The SAW device 200 includes a piezoelectric substrate (not shown) and SAW sensors 202, 204, 20 Includes 6, 208, and 210, and each SAW sensor 202, 204, 206, 208, and 210 The delay lines have different lengths: 212, 214, 216, 218, and 220. In one example here, The SAW device 200 will be described in relation to sensor 202. Other SAW sensors 204, 202 Each of 6, 208, and 210 is similar to or different from those described with respect to the SAW sensor 202. It may have such components or configurations.

[0104] The SAW sensor 202 transmits surface acoustic waves to a piezoelectric substrate and detects the reflected SAW. It may include a transmit / receive IDT222. The SAW sensor 202 also transmits / receives SAW IDT222. A reflector 224 that reflects back towards DT222, and a pair of electrical connectors for IDT electrical connection. This may also include the Contact 232.

[0105] SAW device 200 is 36°Y quartz, 36°YX lithium tantalite, 128° YX Lithium Niovate, Langasite, Langate, Langanite, Zir Titanate Lead conate, cadmium sulfide, berinite, lithium iodate, lithium tetraborate, or acid It may include various piezoelectric substrates, such as one or more combinations of bismuth germanium. In this embodiment, the multiplexed SAW device 200 has multiple SAW sensors 202, 204, 2 A single piezoelectric substrate is used, where 06, 208, and 210 are present. In one embodiment, SAW One or more of sensors 202, 204, 206, 208, and 210 utilize different piezoelectric substrates. (For example, the first SAW sensor 202 is located on the first piezoelectric substrate, and the second SAW sensor (Nsa 204 is present on the second piezoelectric substrate).

[0106] The transmitter / receiver IDT222 converts the excitation signal into a surface acoustic wave, and then transmits that surface acoustic wave to the surface The elastic wave is transmitted to the piezoelectric substrate so that it propagates through the substrate along the delay line 226. The term includes, without limitation, pulse voltages, frequency-modulated signals, sinusoidal electrical signals, etc. It may include a variety of signals. In one embodiment, the SAW sensor 2 in the SAW device 200 Each of the transmission IDTs 02, 204, 206, 208, and 210 can, for example, synchronize transmissions. An RF switch is used to simultaneously excite the sensor with an excitation signal. In one embodiment, a SAW sensor At least some of 202, 204, 206, 208, and 210 are not excited simultaneously. For example, SAW sensors 202 and 204 may be excited sequentially.

[0107] The transmit / receive IDT222 is an electrical contact 232 (e.g., a contact pad). The excitation signal can be received via the ray. For example, the SAW sensor 202 receives the excitation signal. It may include a pair of electrical contacts 232 for verification. The pair of electrical contacts 232 is Connect the transmitter / receiver IDT222 to an internal or external electrical component such as a voltage source. It includes positive and negative components that can be used for the purpose of generating surface acoustic waves. The voltage is connected to the positive voltage of the excitation source via the electrical contact 232. Negative contact for connecting to a negative voltage (e.g., the electrical ground of the system) It is connected to the transmit / receive IDT222, which includes the RF switch. Contact 232 is also connected to the RF switch. It can also be used to connect to the positive and negative electrodes of an external measurement system (such as an RF amplifier). That is the case.

[0108] When the transmit / receive IDT array is excited, each SAW sensor 202, 204, 206 , an array of surface acoustic waves propagates through the substrate along delay lines 208 and 210 226. Surface acoustic waves can have various frequencies. For example, the frequency of surface acoustic waves is approximately 5 0, 100, 150, 200, 250, 300, 350, 400, 500, 600, 70 It can be 0, 800, 900, or 1000 MHz (+ / - approximately 25 MHz). Similarly, Table The frequency of surface acoustic waves can be less than 100 MHz, or greater than 100 MHz, up to 300 MHz. It may be greater than z, greater than 500MHz, or greater than 1000MHz It's fine.

[0109] In some cases, the frequency of surface acoustic waves is at least partially dependent on the type or composition of the piezoelectric substrate. It can depend. For example, the frequency of surface acoustic waves excites pure or leaky transverse wave mode generation. Piezoelectric substrates (non-specific examples: 36°Y quartz, 36°YX lithium tantalite, langa cyanoacrylate) T, Langateite, Langaneite, Lead Zirconate Titanate, Cadmium Sulfide, Berlinite SA containing lithium iodate, lithium tetraborate, and bismuth germanium oxide. The frequency can be higher than 100MHz for the W sensor 206.

[0110] In one embodiment, the multiplexed SAW device 200 displays as it propagates through the substrate. It includes a thin waveguide layer (not shown) that limits surface acoustic waves.

[0111] The transmitting / receiving IDT222 also reflects surface acoustic waves at reflector 224, and those surface acoustic waves The surface acoustic waves that propagate through the substrate and return are also received. The transmitter / receiver IDT222 transmits The transmitted elastic waves are converted into received signals. In one embodiment, each of the multiple surface elastic waves is a separate Multiple transmission / reception IDTs arrive at or reach each other at the same time. For example, as described above, Each of the transmitting and receiving IDTs can simultaneously transmit surface acoustic waves to the substrate. The delay line lengths for 202, 204, 206, 208, 210 are 212, 214, 216, 218 and 220 are different for each SAW sensor 202, 204, 206, 208, and 210. Therefore, surface acoustic waves propagate over different delay line lengths, and the variation in delay line lengths Based on this, it arrives at each of the transmit / receive IDTs at various times. The compressed pulse train is the received signal It can be generated from. The pulses in the compressed pulse train correspond to a specific time difference corresponding to the difference in the length of the delay line. There may be a delay. In one embodiment, the phase or other information of the compressed pulse train may be extracted.

[0112] The SAW device 200 has electrical contacts 232 (for example, on each side of the delay line 226) Includes an array of contact pads. For example, SAW sensors 202, 204, 206, 20 Each of 8 and 210 may include a pair of electrical contacts 232, each pair having a positive and negative configuration. It has elements. Positive and negative components include, to give a few examples, a voltage source or a phase detection integration. It can be used for IDT electrical connections with internal or external electrical components such as circuits. For example, Table To generate surface acoustic waves, the voltage is the positive voltage of the excitation source through the electrical contact 232. Positive contact for connecting to a voltage and negative contact for connecting to a negative voltage (for example) It is connected to the transmit / receive IDT222, which includes the system's electrical ground. Similarly, the transmit The positive and negative contacts of the receiving IDT222 are connected to (an RF switch or RF amplifier, etc.) It can be connected to the positive and negative electrodes of an external measurement system.

[0113] In one embodiment, the number of contacts 232 is SAW sensors 202, 204, 206, The number increases proportionally to the increase in the numbers 208 and 210. For example, SAW device 200 The five SAW sensors 202, 204, 206, 208, and 210 are shown, but are optional. A number of SAW sensors (e.g., 1, 2, 3, 4, 5, 6, 7, 8, 9, 10 or more) It is available. Therefore, the number of contacts required increases as the number of SAW sensors increases. Since it can increase proportionally, the size or number of contacts is limited by the size of the device. It can be a contributing factor.

[0114] Therefore, although not shown in Figure 2A, in one embodiment, a multiplexed SAW device Some or individual contacts of SAW sensors 202, 204, 206, 208, and 210 of the 200 The pads are joined or connected together. This is advantageous for the SAW device. Miniaturization by 200, cost reduction (for example, since cost increases proportionally with chip size). , or it becomes possible to increase the number of possible SAW sensors (therefore, the detectable analytes (Increase the number). For example, the positive contact pads of both the transmit / receive IDT are connected. They can be coupled, and the negative contact pads of both the transmitting and receiving IDTs can also be coupled together. This connection is used in piezoelectric substrates (such as those with multilayer metal coating and common contact pads). This can occur in the SAW device 200 itself, or (external print cycle) This can occur when the SAW device 200 is separated from the circuit board (PCB). The connections between sensors (e.g., positive to positive, negative to negative) contribute to miniaturization of the sensor chip. For example, The number of contacts for external connections is the SAW sensor in the multiplexed SAW device 200. Regardless of the number (202, 204, 206, 208, 210), there are two types (for example, sending The number of contacts (positive and negative) for the received IDT can be reduced.

[0115] Each SAW sensor has different delay line lengths 212. According to 214, 216, 218, and 220, surface acoustic waves are transmitted / received at separate times. The signal will reach IDT222. Therefore, the received signals from each SAW sensor will be The delay lines are delayed by various times based on the variation in their lengths. The compressed pulse train is delayed by the delay lines. It can be generated with a specific time delay due to the difference in length. The phase or other information of the compressed pulse is extracted. It may be released.

[0116] SAW sensors 202, 204, 206, 208, and 210 have delay line lengths 212 and 21 4, 216, 218, 220 are sequences that gradually increase from the first sensor to the last sensor. They are arranged in a standard format, but SAW sensors 202, 204, 206, 208, 21 0 corresponds to any order (for example, delay line lengths 212, 214, 216, 218, 220). It should be noted that they can be arranged in any order (not necessarily in the order they are to be placed). Furthermore, each SAW sensor The delay lines for 202, 204, 206, 208, and 210 are 212, 214, 216, and 21 8,220 differs in the illustrated example, but in one embodiment, one or more of the delay line lengths are the same It's fine as is.

[0117] In one embodiment, the delay line 226 is a layer of aluminum or gold, or a polymer, S It includes a waveguide layer containing iO2 or ZnO. The delay line is an anti-fluid that couples with the analyte. By binding to a layer of receptors such as bodies, proteins, aptamers, or ligands It becomes biologically active. Similarly, the sensor interacts with the fluid through bonding to a chemically sensitive interface. It is possible to detect certain chemical substances.

[0118] In one embodiment, a delay line 226 (or a waveguide layer, sensitive layer, or other layer positioned on the delay line) The detection area is determined by the medium (such as a liquid) and the fractionation of (such as a biological or chemical analyte). This leads to the mechanism of precipitate adhesion. For example, Figure 2A shows SAW sensors 202 and 204. At least a portion of the array 206, 208, and 210 (for example, a portion of delay line 226) The fluid cell 228 is shown to overturn, allowing the analyte to be transmitted to the delay line 226 or the detection area. It is composed of the following.

[0119] In one embodiment, the sensitive layer is SAW between the transmit / receive IDT 222 and the reflector 224. On the surface of each of the sensors 202, 204, 206, 208, and 210 (for example, delay line 226 The sensitive layer is exposed to elements (non-limited examples: gases, chemical materials, biological materials). The sensitive layer brings about quantifiable changes in the propagating wave (for example, amplitude, velocity, etc.). The input and output are changed accordingly. The changes are, for example, in terms of amplitude, phase, frequency, or time delay. It can be measured by detecting variations in the force-electrical signal.

[0120] In one example, a single SAW device was used to simultaneously detect and monitor multiple analytes. Alternatively, it would be desirable to measure it. For example, a single SAW device is more time-efficient. The rate can be high. Furthermore, detecting multiple analytes can be difficult, to give a few examples, This may be beneficial for biological materials such as the diagnosis of infectious diseases or the detection of volatile organic compounds. In one embodiment, as described here, multiple analytes are analyzed by the SAW device 200. They can be detected or measured simultaneously. For example, each SAW sensor 202, 204, 206, The different delay line lengths are 212, 214, 216, 218, and 220, respectively. Advantageously, it is associated with SAW sensors 202, 204, 206, 208, and 210. A time delay occurs between the received signals. The received signals are separated by the time delay. By delaying the reaction time, the SAW device 200 can advantageously test multiple analytes. This makes it possible. For example, the received signal can be combined with a compressed pulse train. Each pulse has a specific time delay corresponding to the difference in the length of the delay lines. In one embodiment, The phase or other information of the compressed pulse train can be extracted.

[0121] Figure 2B shows the time domain corresponding to the SAW device 200 in Figure 2A according to one embodiment. Excitation signal (T X )256, 258 and received signal (R X ) shows 240, 250. Here's the explanation As will be shown, the SAW device 200 in Figure 2A has five SAW sensors 202, 204, 2 Includes arrays 06, 208, and 210, each with different lengths of 212, 214, 216, and 21 It has 8,220 delay lines and 226 delay lines. For example, the length of each delay line is given by equation 4 below: L2+(nl)*ΔL2 It can be determined from, where L2 is the length of the shortest delay line (e.g., length 212), and n All SAW sensors 202, 204, 206, 208, and 210 are from the shortest delay line to the longest The number corresponding to the sequence number of the SAW sensor when classified as a delay line (for example, the shortest delay line 2) For a SAW sensor 202 having 12, n-=1 and the following shortest delay line 214 is present. For a SAW sensor, n-=2 and the SAW sensor 210 has the longest delay line 220. For n-=5, ΔL is SAW sensor 202, 204, 206, 208 , the delay lines between subsequent SAW sensors when 210 is ordered by the length of the delay lines It is the difference in length. However, the lengths of the delay lines are 212, 214, 216, 218, and 220 respectively. In the illustrated example, it differs depending on the factor of ΔL2230, but the delay line 226 can be any length It is acceptable to have them, and it is important to note that this does not require increasing them in a parallel or other pattern. Therefore, Equation 4 for determining the length of the delay line is given by the length of a particular delay line. The result is that it can change depending on the length of the delay line 212, 214, 21 In some cases, formulas for determining 6, 218, and 220 may not be available.

[0122] Referring again to Figures 2A and 2B, the excitation signal (T X )256 is SAW device 20 Received by 0, and each of SAW sensors 202, 204, 206, 208, and 210 is the same It is excited at times. In this example, the excitation signal (T X )256 is a pulse voltage. However, As explained here, the excitation signal (T X )256 can be 1 or more of various signals. For example , excitation signal (T X )256 is a frequency-modulated signal that covers the frequency spectrum. It is possible. In one embodiment, the frequency-modulated signal is advantageously used for fixed-frequency excitation. It is possible to provide a power gain higher than the electromotive force.

[0123] Excitation signal (T X )256 is a transmit / receive IDT222 that generates an array of surface acoustic waves The array is excited. Surface acoustic waves reach each SAW sensor 202 before reaching the reflector 224. It propagates along delay lines 226 of 204, 206, 208, and 210. Reflector 224 is on the surface Surface acoustic waves are reflected or echoed back along the delay line. Surface acoustic waves are (for example, surface acoustic waves The transmit / receive IDT222 generates the received signal (by converting it into an electrical signal). Before being received, it propagates again through delay line 226. In one example, the reflected delay line SAW A sensor (for example, a SAW sensor with a reflector) has multiple IDTs (for example, a transmitting IDT and It should be noted that this may include a single IDT (and received IDT) or a single IDT that transmits and receives.

[0124] The transmitter / receiver IDT222 receives the propagated surface acoustic waves and converts those surface acoustic waves into a received signal. (R X Convert pulses 240, 250 to pulses 241, 242, 243, 244, and 245. As explained here, the delay of each SAW sensor 202, 204, 206, 208, 210 The lengths of the lines are 212, 214, 216, 218, and 220. Therefore, the surface acoustic waves are This results in various reception IDT222s being reached at various times. Signal (R X ) The individual pulses 241, 242, 243, 244, and 245 of 240 are delay lines 226 different periods corresponding to different lengths of 212, 214, 216, 218, 220 Each of these is delayed. Received signal (R X ) 240 individual pulses 241, 242, 243, This time delay between 244 and 245 corresponds to SAW sensors 202, 204, 206, and 208. This also occurs when 210 is excited simultaneously.

[0125] In other words, SAW sensors 202, 204, 206, 208, and 210 are connected to delay line 226 Due to propagation delays of different lengths 212, 214, 216, 218, and 220, electrical signals This generates pulse trains 241, 242, 243, 244, and 245. Regarding the example in Figure 2B, Excitation pulse (T X )256 and received signal (R X ) 240 first pulse 241 (for example, the most Between the pulse 241) corresponding to the SAW sensor 202 having a short delay line 226 212 Time delay (T d )236 is given by the following equation 5: T d =2*L2 / v This is given by, where L2 is the length of the delay line of the shortest delay line (e.g., length 212). Here, v is the surface acoustic wave velocity. Surface acoustic waves propagate through the delay line twice, so the length of the delay line... Even if the time delay (T d )236 is a SAW sensor (with a one-way SAW sensor) Vice 100 time delay (T d ) This is twice 136 (see, for example, Figures 1B and 2B).

[0126] Received signal (R X ) The subsequent pulses 241, 242, 243, 244, and 245 of 240 Time delay between each (ΔT d )238 is given by the following equation 6: ΔT d = 2 * ΔL² / v Given by, where ΔL2 is given by SAW sensors 202, 204, 206, 208, 2 The length of the delay lines between successive SAW sensors when 10 is ordered by the length of the delay lines. This is the difference, where v is the surface acoustic wave velocity. Surface acoustic waves propagate through the delay line twice, so the delay Even if the length of the lines is the same, the difference in time delay (ΔT) d )238 has a (one-way SAW sensor) (Do) The difference in time delay (ΔT) of SAW device 100 d This is twice 138.

[0127] The time delay (T) between the first pulse 241 and the excitation signal 256 d )236 is done in various ways It is measurable. For example, time delay (T d )236 is the center, start and end, This can correspond to the time difference between each pulse. In one example, the time delay (T d )236 is Pal This can correspond to the time difference between the corresponding regions of S241 and S256. Time delay (ΔT d ) 238 can be determined using similar techniques.

[0128] As a non-limiting example, the sensor has a minimum delay line length (L) of 4 mm (for example, SAW sensor). The sensor 202 has a delay length of 212 and is mounted on a 36° LiTaO3 piezoelectric substrate. Surface acoustic waves traveling through a 36° LiTaO3 piezoelectric substrate are 4212 m / sec. It has surface acoustic wave velocity (v). Therefore, the delay line with the shortest length (L2) 212 is unidirectional S. This will delay the first pulse 241 to the AW sensor by approximately 1.9 μs. Furthermore, As shown in Figure 2A, with a delay line length difference of approximately 0.3 mm (ΔL2) 230, the received signal (R X ) Time delay between each received pulse 241, 242, 243, 244, 245 of 240 (ΔT d )238 is approximately 142ns.

[0129] In one embodiment, SAW sensors 202, 204, 206, 208, and 210 are multiple Received signal (R X ) Generate 240 and 250 at a constant period (T p ) 252, 254 (For example, between 10, 20, 30, 40, 50, 100, 200, 400 or 500 μs) It is continuously excited at intervals. In examples like these, the received signal (R X)240, 250( For example, pulses 241, 242, 243, 244, 24 in received signals 240, 250 5) For example, a received signal with reduced reception noise (R X ) may be averaged to determine In one embodiment, a time delay (for example, T d ΔT d ) is on the order of ns to μs It could be.

[0130] Figures 3A to 3B show block diagrams of a multiplexed SAW measurement system according to one embodiment. The multiplexed SAW measurement system 300A in Figure 3A includes a waveform generator 360 and a first amplifier 362. , SAW sensor array 364, second amplifier 366, inverse convolution module 368, Includes filter module 370 and phase detection module 372. Multiplexed SAW measurement in Figure 3B The 300B system further includes an RF switch 376.

[0131] The waveform generator 360 generates an excitation signal. For example, the excitation signal is (for example, Figure 1A and Pulse voltage, frequency modulated signal (e.g., linear frequency modulation, bipolar) as shown in 2B It may include curved frequency modulation, chirp signals, etc. In one embodiment, the waveform generator is A controller that may contain one or more hardware processors (a non-specific example: a start button) It is controllable by [the specified method]. The waveform generator 360 generates any one signal of a large number of frequencies. It is possible. For example, waveform generator 360 can produce approximately 50, 100, 150, 200, 2 50, 300, 350, 400, 500, 600, 700, 800, 900 or 1000 It can generate signals with frequencies of MHz (+ / - approximately 25 MHz). Additionally or alternatively, waveform The generator can produce frequency-modulated signals that cover the frequency spectrum. One example... Therefore, the frequency spectrum has a higher power gain than the fixed frequency spectrum.

[0132] The first amplifier 362 amplifies the excitation signal generated by the waveform generator 360. In this embodiment, the amplifier 362 is a radio frequency amplifier (RF amplifier).

[0133] The amplified excitation signal is applied to array 364 of the SAW sensor. Ray364 could be similar to any of the SAW sensors described here. For example, The SAW sensor array 364 is configured such that the SAW sensor transmits the IDT on the opposite side of the received IDT. A SAW sensor having a transmit delay line, as described in relation to Figure 1A (for example). This may include: The array 364 of SAW sensors may also include, additionally or alternatively, SAW sensors that reflect To include the transmit / receive IDT on the opposite side of the object (for example, as described with respect to Figure 2A) ) May include a SAW sensor having a reflection delay line. As described here, array 364 Each SAW sensor may have a delay line of different lengths. The excitation signal is the SAW sensor's... The SAW sensor array 364, received by I364, is described with respect to Figures 1B and 2B. The received signal (R X ) Received signals such as 140, 240 (R X ) generates.

[0134] In one embodiment, as shown in Figure 3B, the system 300B has each of the SAW sensors The RF switch 376 may be included to simultaneously apply the excitation signal. For example, the RF switch 376 can synchronize the excitation signal with the sensor array 364. Synchronizing with Array 364 results in the resulting phase (as described below). The detection method can provide more accurate measurements compared to asynchronous excitation of the sensor array 364. ru.

[0135] The second amplifier 366 receives the received signal (R) generated by the array 364 of the SAW sensor. X The received signal (R) is amplified. In one embodiment, amplifier 366 is an RF amplifier. X ) deconvolves the signal 368 and matches the filter to generate a compressed pulse train. It is further processed with 370.

[0136] The inverse convolution of the signal 368 is, for example, a physical or that has affected the surface acoustic wave during propagation. It can be used to reverse the effects of chemical interference. For example, (e.g., ambient temperature, viscosity) Physical or chemical interference (related to stress, pressure, velocity, etc.) affects the propagation of surface acoustic waves. This can have an effect, thereby altering the received signal. (For example, regarding Figure 4) (As clarified) In some cases, the reference channel is not associated with the analyte being measured. It can be used to measure physical or chemical interference. To measure or determine physicochemical interference... By doing so, the received signal is processed to remove the changes caused by interference. It is adjustable during the reverse convolution 368.

[0137] As explained here, the received signal (R X ) is an array of 364 SAW sensors Each pulse contains multiple pulses or signals corresponding to the signal. A pulse is a pulse and / or an excitation Determine the variation in at least one of the amplitude, phase, frequency, or time delay between the triggering signal and the triggering signal. It can be used for this purpose. For example, the multiplexed SAW measurement systems 300A and 300B can be used for this purpose. A phase detector capable of determining the phase 374 corresponding to each of multiple pulses with respect to the excitation signal. Includes output 372. For example, the difference in the length of the delay line between SAW sensors determines the received signal (R X A time delay occurs between pulses in a compressed pulse train. The time domain shift between pulses in a compressed pulse train is This corresponds to the phase shift associated with a specific SAW sensor. Phase shift is, for example, so Software programming, field-programmable gate array (FPGA) hardware A. This can be determined using a hardware processor, etc.

[0138] As a result, systems 300A and 300B provide the effect of simultaneous excitation and detection. . Received sensor signal (R) in a matched filter system X ) Measurement involves multiple target objects or raw This enables the simultaneous detection of physical agents. Therefore, each sensor is specific to It can indicate the presence of individual reacting substances. The indication of the amount of substance present is measured. This can be provided by a phase change of the signal. Therefore, as a whole, the sensor chip (e.g., SAW device 100, SAW device 200, SAW sensor array 364) are multiple The detector is configured with a number of individual sensor elements, and the detector performs various multi- It is possible to identify multiple substances simultaneously.

[0139] Figure 4 shows a diagram of a SAW device 400 according to one embodiment. SAW device 400 This includes multiple SAW sensors 402, 4, which have reflection delay lines 420, 427, 410, 417. Includes 04. SAW device 400 has two delay lines that act as detection channel 480. It includes the immobilization of biomaterials (such as antibodies) on the surface of the delay line to capture specific analytes. The SAW device 400 also measures any environmental influences such as temperature and stress. To that end, it also includes two delay lines that act as reference channel 482. Here is an example: Next, the SAW device 400 will be described in relation to the sensor 402. The other SAW sensor 4 Each of 04 has components similar to or different from those described with respect to the SAW sensor 402. It may have a configuration.

[0140] SAW sensor 402 or detection channel 480 has two IDTs 483 and 484, and two The delay lines 420, 427, and the four reflectors 424, 425, 421, 423, and the detection area A428 is included. As shown in the figure, in one embodiment (non-limiting example: the excitation signal is broadband) If it is in the region, the delay line may have multiple reflectors. For example, delay line 420 is the first It includes a reflector 424 and a second reflector 425. The first reflector 424 is expressed at a first frequency. It can be configured to reflect surface acoustic waves, and the second reflector reflects a second frequency (e.g., the first It can be configured to reflect surface acoustic waves at a frequency different from that of the surface. In one example, a single The integration of multiple reflectors in the delay line is advantageous in that it improves the performance of the matched filter. The SAW sensor 404 or reference channel 482 is connected to two IDTs 485 and 486, and 2 Two delay lines 410, 417, four reflectors 414, 415, 411, 413, and reference E Includes rear 429. As shown in the figure, the reference channel and sensing channel of the SAW device 400. All delay lines on the channel have different lengths of 412, 419, 416, and 418.

[0141] In one example, detection channel 480 has the same or similar configuration as delay line 226 in Figure 2A. It is possible. For example, the detection channel 480 may detect analytes attached to the detection area 428 or It is available for measurement. Surface acoustic waves are detected in detection channel 480 with delay line 420. , transmitted along 427. Analytes such as biomaterials may be placed in detection area 428. As surface acoustic waves propagate along the delay line, the analyte modulates the wave (for example). (Modification of phase, frequency, amplitude, etc.). The SAW sensor 402 is used for modulated surface acoustic waves. It can generate a corresponding received signal. And the received signal will be determined by the material being analyzed. The received signal can be compared with the excitation signal to determine if it has been modulated. Furthermore, the analyte The characteristics can be determined at least partially based on the modulation of the received signal.

[0142] In one example, reference channel 482 is a physical channel not associated with the analyte being measured. Alternatively, it can be used to measure chemical interference. For example, physical or chemical interference can be used on a surface. This can affect the propagation of elastic waves, thereby altering the received signal. (e.g., physicochemical interference) For example, measuring or determining (related to ambient temperature, viscosity, stress, pressure, velocity, etc.) By doing so, the received signal is free from any alterations that may have been caused by interference. It is adjustable.

[0143] For example, SAW sensors are particularly sensitive to ambient temperature fluctuations and stress or strain applied to the piezoelectric substrate. It may be sensitive to the viscosity of biological fluids (such as whole blood, serum, and urine). Therefore, the reference channel 482 can be used together with the detection channel 480. The surface acoustic waves of L480, as described above, affect the analyte and, furthermore, the environmental, chemical, or physical influences. It will be modulated or altered by the interaction. In one example, the reference channel 482 is on the surface The elastic waves are not modulated depending on the analyte, but are modulated by the same interference as the detection channel. It can be used in this way. And the received signal resulting from the detection channel is reference channel It can be modified to compensate for the interference determined in channel 482.

[0144] Figure 5 shows the excitation signal (T) corresponding to the SAW device 400 in Figure 4 according to one embodiment. X ) 556 and received signal (R X )Graph 500 of 540 is shown. As above, SAW device S400 includes two SAW sensors 402 and 404 having reflection delay lines. Vice 400 has two channels (detection channel 480 and reference channel 482). The detection channels 420 and 427 are (anti) for capturing specific analytes on the surface of the delay line. This corresponds to the location where biomaterials (such as the body) are immobilized. Reference channels 410 and 417 are for temperature It is for measuring arbitrary environmental influences such as temperature and stress. Each channel corresponds It has delay lines 420, 427, 410, and 417, each of which has lengths 412, 419 416 and 418 are different.

[0145] In this example, the SAW device 400 has a center frequency of 520 MHz and a bandwidth of 56 MHz. Chirp signal (T X Excited at 556. Generated by SAW device 400. The response signal (R X )540 is for eight reflectors (for example, for each of the four delay lines) It contained coded information from two reflectors. The length of the shortest delay line (L) (for example) For example, the length of 419 in Figure 4 is approximately 5.4 mm, and the difference in length (ΔL) between reflectors is approximately 0.4 It is mm. Therefore, the response signal (R X The first peak or pulse of 540 is an excitation signal. No.(T X After )556 was transmitted, approximately 2.63μs (T d It was received at ). Furthermore, approximately 0.2μs delay (ΔT d ) exists between each subsequent peak.

[0146] Figure 6 shows the received signal (R) from Figure 5. X )540 corresponding compressed pulse train (R X ) 640 graphics This shows F600. In this example, the deconvolution and alignment described in Figures 3A-3B are performed. The filter processing is a compressed pulse train (R X Actual results for the signal in Figure 5 to generate 640 This was done. As shown in the figure, a compressed pulse train (R X )640 has 8 peaks or pulses 64 It has 1, 642, 643, 644, 645, 646, 647, and 648, each of which is shown in Figure 4. For each of the reflectors 421, 423, 424, 425, 411, 413, 414, and 415 I will comply.

[0147] Examples of non-restrictive bidirectional Figure 7 shows the real-time detection channel 780 and reference channel 782 according to an exemplary embodiment. Graph 100 of the time phase shift is shown. As a non-restrictive example, see Figure 4, SAW The array is a 36° Y-cut X-propagating lithium tantalum array with a thickness of 500 μm and a diameter of 100 mm. Manufactured on a LiTaO3 wafer using standard photolithography techniques. The AW device 400 was excited with an excitation signal having a frequency of 525 MHz. The wafer was, First, it is washed in a barrel-type asher and then treated with 1% hydrofluoric acid (HF). It was immersed in it. Then, photoresist was added to the wafer and photolithography was performed. Next, metallization of titanium (10nm) / aluminum (70nm) and The IDT, aluminum waveguide, and reflector are patterned using a futo-off process. The wafer was then diced into individual dies.

[0148] Figure 7 shows the device with phosphate-buffered saline (PBS) buffer and 10 pg of human chorionic villi. Sexual gonadotropin (HCG), along with 100 pg of HCG at 0 seconds, 1 minute, and 5 minutes. This shows the real-time response when implemented. Sensors 402 and 404 (see, for example, Figure 4). This refers to the RF reader and RF switch as waveform generators, as described in Figures 3A and 3B. Measurements were taken using a switch. The SAW device 400 consists of an RF reader and a SAW sensor 402. The RF reader is connected via an RF switch that synchronizes the transmit and receive signals between it and the 404. The RF reader uses linear frequency modulation with a center frequency of 520 MHz and a bandwidth of 56 MHz. I provided the sharp signal.

[0149] The data acquisition system measured all four channels simultaneously. The data was collected at a rate of 56MHz. Real-time recording using a 12-bit A / D converter and a desktop computer. Then, deconvolution and matching filters are performed using a software program to phase The shifts were extracted.

[0150] The SAW device 400 was treated with oxygen plasma to activate the surface, and the entire device The body was coated with silane PEG-600 biotin (Nanocs). The detection channel was delayed. The central area of ​​the extension (for example, approximately 1.5 mm x 1 mm) is treated with Neutraavidin, followed by... Biotinylated anti-HCG (human chorionic gonadotropin) antibody immobilized. Excess anti-HCG G was washed away with HPLC water. Then, the polydimethylsiloxane (PDMS) solution was used. Body cells (approximately 1.5 mm wide, 4 mm long, and 0.25 mm thick) are placed on top for liquid introduction. It was mounted in the section. Phase shift of both detection channel 780 and reference channel 782 and A difference of 784 was recorded.

[0151] Block diagram Figure 8 is a block diagram 800 of a multiplexed SAW device according to an exemplary embodiment. As shown, the SAW device 802 has multiple SAW sensors 810, 812, and 814. It may include. The SAW device 802 is capable of receiving the excitation signal 806. For example, the excitation signal The signal can be transmitted directly or indirectly from the waveform generator, as described here. (See Figure 8) In one embodiment, the excitation signal is transmitted to one or more contacts of the SAW device 802. It is transmitted to. In one embodiment, the excitation signal is transmitted to an RF switch (not shown). The RF switch connects one or more SAW sensors 810, 812, 814 of the SAW device 802. The transmission of the excitation signal can be synchronized across the range. In one embodiment, SAW device 802 It has a built-in RF switch (not shown).

[0152] As explained here, multiple SAW sensors 810, 812, and 814 receive excitation signals 80 Receives 6 and generates electrical signals 820, 822, and 824. Hardware processor 80 4 receives electrical signals 820, 822, and 824, as described here, and receives the received signal 80 Generate 8. For example, the received signal 808 may contain a compressed pulse train, and the pulses Each corresponds to at least one of the SAW sensors 810, 812, and 814. In this configuration, the SAW device 802 includes an internal hardware processor.

[0153] Flowchart Figure 9 shows how to determine one or more analytes using multiple SAW sensors with delay lines of different lengths. To determine or monitor the processes 900 performed by the multiplexed SAW device This is a flowchart illustrating an embodiment. Those skilled in the art will see that the elements outlined in process 900 are (P One or more computing devices or configurations of a multiplexed SAW device (such as a processor) Depending on the element, by other computing devices, in software, etc. It should be clear that it can be carried out in this manner. Therefore, process 900 is carried out by the processor Since this is logically related to something that is generally performed, the embodiments described below are It should not be interpreted as being limited.

[0154] In block 902, process 900 generates an excitation signal. In one embodiment, the excitation signal This is generated by hardware such as waveform generators, as described here. In this configuration, the excitation signal is generated by software. As explained here, in a certain reality In this application, the excitation signal can be a pulsed voltage, a sinusoidal electrical signal, or a frequency-modulated signal, without limitation. Linear frequency modulation, hyperbolic frequency modulation, orthogonal frequency coding, random modulation, continuous phase Modulation, frequency shift key, multi-frequency shift key, phase shift key, or wavelet It includes at least one of a variety of signals, including modulated signals.

[0155] In block 904, process 900 sends an excitation signal to the SAW device. Excitation signal This can be transmitted to the SAW device directly or indirectly (e.g., through other elements). Example For example, in one embodiment, the excitation signal is an S such as the positive and negative contacts of a SAW device. It is transmitted to one or more contacts of the AW device. In one embodiment, the excitation signal is RF The signal is transmitted to the switch. The RF switch then transmits the signal to one or more SAW sensors on the SAW device. This allows us to synchronize the transmission of the excitation signal.

[0156] In block 906, process 900 receives an output signal from the SAW device. In this configuration, the signal indicates a difference of 1 or more in the length of the delay line of the SAW sensor of the SAW device. For example, as described here, a SAW device may include multiple SAW sensors. Each SAW sensor includes delay lines of different lengths. The excitation signal propagates across the delay lines. Consequently, signals received after propagation across the delay lines are each time-delayed from one another. For example, time delay corresponds to the difference in the length of the delay line. In one embodiment, a SAW device The signal received from the device consists of multiple parts, each part relating to each SAW sensor of the SAW device. It handles sequentially time-delayed signals. For example, the signals may include compressed pulse signals. Each pulse corresponds to a different SAW sensor, and the time difference between pulses corresponds to the SAW sensor This corresponds to the difference in the length of the delay lines.

[0157] In one embodiment, the signal received from the SAW device is added to the SAW device. This indicates one or more analytes in the sample. For example, each SAW sensor in a SAW device is S Receptors configured to bind to one or more analytes on the surface of the AW sensor (sensitive layer and It may include (also known as) when a sample medium containing one or more analytes is placed on the SAW sensor. In some cases, a physical, chemical, or electrical reaction occurs between the analyte and the receptor. Chemical or electrical reactions correspond to physical, chemical, or electrical reactions. As the surface acoustic wave propagates along the delay line, (for example, in terms of phase, frequency, or amplitude) (and) can be changed. Therefore, the signal received from the SAW device is the analyte and the receptor. One or more analytes can be shown by responding to physical, chemical, or electrical reactions between them. ru.

[0158] In block 908, process 900 processes the output signal of the SAW device at least partially. Based on this, one or more analytes introduced into the SAW sensor can be determined or monitored. As explained below, the output signal is a signal that has a difference of 1 or more in phase, frequency, amplitude, etc. This may include the part of the number. Phase, frequency, amplitude, etc. between parts of the output signal and / or excitation signal. The difference can be analyzed to determine or monitor one or more analytes.

[0159] The various blocks described here can be performed in various orders, and process 900 can be performed as desired. Therefore, it is understood that one or more blocks can be performed simultaneously and / or their order can be changed. Furthermore, as part of process 900, fewer, more, or different blocks are used. It is also understood that this is possible. For example, process 900 is a process of processes 1000, 1100, and 1200. It may include blocks similar to those in the image (see, for example, Figure 10).

[0160] Figure 10 shows a plurality of SAW sensors having different delay lines of different lengths. To generate the received signal using a SAW device, this is performed by a multiplexed SAW device. This is a flowchart showing an embodiment of the process 1000. Those skilled in the art will know about process 1000. The elements outlined are SAW devices having multiple SAW sensors or hardware processors. One of the multiplexed SAW devices (such as hardware or other processors) is determined by the chair. The above computing device or component may cause other computing devices This can be implemented in hardware, software, or other forms, such as by using S. It should be clear that this is the case. Therefore, process 1000 is generally implemented by the processor. Since they are logically related as being performed, the embodiments described below are limited in scope. It should not be interpreted in that way.

[0161] In block 1002, process 1000 receives the excitation signal. In one embodiment, The 1000, as explained here, can be accessed directly from hardware such as a waveform generator. It receives the excitation signal indirectly. The excitation signal is a pulse voltage (for example, T X 156, T X 256), chirp signal (T X 556) Sine wave electrical signal, frequency modulation Linear frequency modulation, hyperbolic frequency modulation, orthogonal frequency coding, random modulation, frequency Signals covering the spectrum, continuous phase modulation, frequency shift key, multi-frequency shift key - At least one of a variety of signals, including phase-shift key or wavelet modulation. Includes. In one embodiment, process 1000 includes one or more IDTs of one or more SAW sensors, etc. The SAW device receives the excitation signal.

[0162] In one embodiment, the excitation signal is a SAW such as the positive and negative contacts of a SAW device. It is received at one or more contacts of the device. In one embodiment, the excitation signal is R It is received at the F switch. The RF switch may or may not be included in the SAW device. It is not necessary. The RF switch provides excitation signals across one or more SAW sensors in the SAW device. The transmission of the numbers can be synchronized.

[0163] In block 1004, process 1000 generates multiple surface acoustic waves. For example, 1 or more Each of the above IDTs can convert the excitation signal into a surface acoustic wave. Process 1000 (for example, One or more IDTs transmit surface acoustic waves across the delay lines of multiple SAW sensors. In one embodiment, each of the SAW sensors includes a delay line of a different length. The delay lines are one or more of the same or approximately the same length.

[0164] In block 1006, the SAW device is configured to reflect surface acoustic waves. This includes the reflective material described above. For example, each of the multiple SAW sensors is such that each of them includes a reflective material. It may include a bidirectional sensor array. Reflectors may be on the substrate opposite to the IDT. Surface resilience The wave is transmitted from the IDT and propagates through the substrate before reaching the reflector. Surface acoustic waves are generated (or reflected) by surface acoustic waves, thereby causing the surface acoustic waves to be reflected away from the reflector. It propagates to the IDT (e.g., transmitting IDT, receiving IDT, etc.). Therefore, in one embodiment In this embodiment, surface acoustic waves propagate multiple times through the substrate or along the delay line. It should be noted that SAW devices do not contain reflective material. Instead, SAW devices The sensor is designed so that surface acoustic waves propagate once through the substrate before being received, for example, by an IDT. It may include a unidirectional sensor array.

[0165] In block 1008, process 1000 receives multiple surface acoustic waves. In one embodiment So, using a SAW sensor including a bidirectional sensor array, surface acoustic waves are delayed to a delay line. It is received by the IDT after propagating twice across the network. In one embodiment, a one-way sensor Surface acoustic waves, such as those transmitted by SAW sensors including arrays, propagate once across the delay line. It is then received by IDT. As explained here, this is due to the different lengths of the delay lines. Therefore, the propagation times of each surface acoustic wave are different.

[0166] In block 1010, process 1000 processes the received surface acoustic waves at least partially. Based on this, a received signal is generated. For example, process 1000 converts each of the propagated waves into an electrical signal. It can be converted to this. For example, a propagated wave can be received by multiple IDTs. Multiple IDTs can convert propagated surface acoustic waves into electrical or other signals. In this state, each of the electrical or other signals is combined into a single signal (called the received signal). In one embodiment, the process 1000 generates a compressed pulse train, and one or more of the pulses are SA Supports different SAW sensors for the W device. For example, each pulse corresponds to a different SAW sensor. It is possible to do so. Additionally or alternatively, each pulse differs based on the length of the corresponding delay line. This may include a time delay. In one embodiment, the electrical signal corresponding to each SAW sensor is compressed They are combined in a pulse train. In one embodiment, signal processing software compresses Separate the signals or pulses in the sequence.

[0167] The various blocks described here can be performed in various orders, and if desired, process 10 It is understood that 00 may perform one or more blocks simultaneously and / or change their order. Furthermore, as part of process 1000, fewer, more, or different blocks may be used. It is also understood that this is possible. For example, process 1000 is, for example, a SAW device is unidirectional Since it includes a sensor array, it may not include block 1006. Additionally or alternatively Process 1000 may include blocks similar to those of processes 900, 1100, and 1200. .

[0168] Figure 11 shows how to analyze one or more analytes using multiple SAW sensors with delay lines of different lengths. Process 110 performed by the multiplexed SAW device for determination or monitoring. This is a flowchart showing an embodiment of 0. Those skilled in the art will understand that the elements outlined for process 1100 are , one or more multiplexed SAW devices (such as hardware processors or other processors) Computing devices or components of other computing devices It should be clear that this can be implemented in various forms, such as hardware and software. Therefore, process 1100 is logically performed as is generally done by the processor. As related to the above, the embodiments described below should not be interpreted as being limited. .

[0169] In block 1102, similar to block 902 of process 900, process 1100 is an excitation signal A signal is generated. In one embodiment, the excitation signal is generated by a waveform generator as described herein. These are generated by hardware, etc. In one embodiment, the excitation signal is generated by software It is generated by A. As described here, in one embodiment, the excitation signal is limited Without any effort, pulse voltage, sinusoidal electrical signal, frequency modulation, linear frequency modulation, hyperbolic frequency modulation Tuning, quadrature frequency coding, random modulation, continuous phase modulation, frequency shift key, multi Among a variety of signals, including frequency shift key, phase shift key, or wavelet modulation, It must include at least one.

[0170] In block 1104, similar to block 904 of process 900, process 1100 is SA An excitation signal is sent to the W device. The excitation signal is then transmitted to the SAW device (through other elements). It can be transmitted directly or indirectly. For example, in one embodiment, the excitation signal is transmitted via SAW device It is transmitted to one or more contacts of the SAW device, such as the positive and negative contacts of the S. In this embodiment, the excitation signal is transmitted to the RF switch. The RF switch is a SAW device. The transmission of excitation signals can be synchronized across one or more SAW sensors on the chair.

[0171] In block 1106, similar to block 1002 of process 1000, process 1100 is encouraged The signal is received. In one embodiment, process 1100 generates a waveform as described here. The excitation signal is received directly or indirectly from hardware, such as from a device. Without needing to generate pulse voltage, sinusoidal electrical signals, frequency modulation, linear frequency modulation, or hyperbolic frequency Modulation, orthogonal frequency coding, random modulation, continuous phase modulation, frequency shift key, multiplication Among various signals, including frequency shift key, phase shift key, or wavelet modulation It includes at least one. In one embodiment, the process 1100 is one of one or more SAW sensors The excitation signal is received in the above-mentioned SAW devices such as IDT.

[0172] In one embodiment, the process 1100 is an S of one or more SAW sensors such as one or more IDTs An excitation signal is received in the AW device. In one embodiment, the excitation signal is received by the SAW device. Received at one or more contacts of a SAW device, such as the positive and negative contacts of a chair. In one embodiment, the excitation signal is transmitted in an RF switch. The RF switch may or may not be included in the SAW device. The transmission of excitation signals can be synchronized across one or more SAW sensors.

[0173] In block 1108, similar to block 1004 of process 1000, process 1100 is multiple It generates a number of surface acoustic waves. For example, each of the one or more IDTs converts the excitation signal into a surface acoustic wave. It can be replaced. Process 1100 (for example, 1 or more IDTs) can replace multiple SAW sensors. Surface acoustic waves are transmitted across the delay line. In one embodiment, each of the SAW sensors is different It includes delay lines of a certain length. In one embodiment, one or more delay lines are of the same or substantially the same length. That is the case.

[0174] In block 1110, similar to block 1006 of process 1000, the SAW device , including one or more reflectors configured to reflect surface acoustic waves. For example, multiple SAWs Each sensor may include a bidirectional sensor array in which each includes a reflector. The reflector is It can occur on the substrate opposite the IDT. Surface acoustic waves are transmitted from the IDT and reach the reflector. It propagates through the substrate before reaching its destination. Reflectors generate echoes of surface acoustic waves (or reflect the waves). (Irradiation), and as a result, surface acoustic waves are transmitted from the reflector to the IDT (e.g., transmitted IDT, received IDT) They propagate through the substrate or other means. Therefore, in some embodiments, surface acoustic waves propagate through the substrate or via the slower speeds. It propagates multiple times along the extension. In one embodiment, the SAW device does not contain reflectors. It should be noted that, instead, a SAW sensor is used when surface acoustic waves propagate once through the substrate. After transmission, it may include, for example, a one-way sensor array that is received together with the IDT.

[0175] In block 1112, similar to block 1008 of process 1000, process 1100 is multiplied It receives a number of surface acoustic waves. In one embodiment, a SAW sensor including a bidirectional sensor array. Similarly, surface acoustic waves are received by the IDT after propagating twice across the delay line. In one embodiment, such as a SAW sensor including a unidirectional sensor array, surface acoustic waves are used. It propagates once across the delay line and is then received by the IDT. As explained here, Due to the different lengths of the delay lines, the propagation times of each surface acoustic wave differ.

[0176] In block 1114, similar to block 1010 of process 1000, process 1100 is, The received signal is generated based at least partially on the received surface acoustic waves. For example, processing The 1100 can convert each propagated wave into an electrical signal. For example, propagated The wave can be received by multiple IDTs. The multiple IDTs then transmit the propagated surface acoustic wave. It can be converted into an electrical or other signal. In one embodiment, each of the electrical or other signals is (received It is combined into a single signal (called a signal signal). In one embodiment, the process 1100 is pressure Generates a reduced pulse train, where one or more pulses correspond to different SAW sensors on the SAW device. For example, each pulse may correspond to a different SAW sensor. Additionally or alternatively, the pulses may correspond to different SAW sensors. Each may contain different time delays based on the length of the corresponding delay line.

[0177] In block 1116, similar to block 906 of process 900, process 1100 is SA A signal is received from the W device. In one embodiment, the signal is received from the SAW device's SAW This indicates a difference of 1 or more in the length of the delay line of the signal. For example, as explained here, SAW devices The system may include multiple SAW sensors. Each SAW sensor includes a delay line of a different length. As the excitation signal propagates across the delay line, the signal received after propagation across the delay line Each number is time-delayed from the others. For example, the time delay corresponds to the difference in the length of the delay lines. In one embodiment, the signal received from the SAW device includes multiple parts, and each part This corresponds to the time-delayed signal associated with each SAW sensor in the SAW device. The signal may include compressed pulse signals, and each pulse may be transmitted to a different SAW sensor. Correspondingly, the time difference between pulses corresponds to the difference in the length of the delay line of the SAW sensor.

[0178] In one embodiment, the signal received from the SAW device is added to the SAW device. This indicates one or more analytes in the sample. For example, each SAW sensor in a SAW device is S Receptors configured to bind to one or more analytes on the surface of the AW sensor (sensitive layer and It may include (also known as) when a sample medium containing one or more analytes is placed on the SAW sensor. In some cases, a physical, chemical, or electrical reaction occurs between the analyte and the receptor. Chemical or electrical reactions correspond to physical, chemical, or electrical reactions. As the surface acoustic wave propagates along the delay line, (for example, in terms of phase, frequency, or amplitude) (and) can be changed. Therefore, the signal received from the SAW device is the analyte and the receptor. One or more analytes can be shown by responding to physical, chemical, or electrical reactions between them. ru.

[0179] In block 1118, similar to block 908 of process 900, process 1100 is SA One or more signals are introduced to the SAW sensor based at least partially on the output signal of the W device. Determine or monitor the analyte. As described here, the output signal has phase, frequency The signal may include a portion having a difference of 1 or more in amplitude, etc. Output signal and / or excitation Differences in phase, frequency, amplitude, etc., between parts of a signal determine or monitor one or more analytes. It can be analyzed in a ring-like manner.

[0180] The various blocks described here can be performed in various orders, and process 1100 is desired Therefore, it is understood that one or more blocks can be performed simultaneously and / or their order can be changed. Furthermore, as part of process 1100, fewer, more, or different blocks may be used. It is also understood that this is possible. For example, process 1100 is process 1000, 1100, 12 It may contain blocks similar to or different from those in 00.

[0181] Figure 12 shows the process of analyzing one or more analytes using multiple SAW sensors with delay lines of different lengths. Process 120 performed by the multiplexed SAW device for determination or monitoring. This is a flowchart showing an embodiment of 0. Those skilled in the art will understand that the elements outlined for process 1200 are , one or more computing devices of a multiplexed SAW device (such as a processor) This is implemented by components, other computing devices, and in software, etc. It should be clear that this is possible. Therefore, process 1200 is generally performed by the processor. Since they are logically related as being executed in a specific way, the embodiments described below are limited in scope. It should not be interpreted as an object.

[0182] In block 1202, block 1106 of process 1100 and block 9 of process 900 Similar to 06, process 1200 receives a signal from the SAW device. In one embodiment, The signal indicates a difference of 1 or more in the length of the delay line of the SAW sensor of the SAW device. For example, As described here, a SAW device may include multiple SAW sensors. The signal contains delay lines of different lengths. As the excitation signal propagates across the delay lines, Signals received after propagation along the extension are each time-delayed from one another. For example, The delay corresponds to the difference in the length of the delay line. In one embodiment, received from a SAW device The signal consists of multiple parts, each part associated with each SAW sensor of the SAW device. It responds to time-delayed signals.

[0183] In block 1204, process 1200 identifies or determines one or more pulses of the received signal. For example, the received signal may include a compressed pulse train as described here. Each of the Russ can correspond to a different surface acoustic wave propagating across delay lines of different lengths. Therefore, because the delay lines are of different lengths, each pulse is compressed at a different time. It occurs in the Russian sequence.

[0184] In block 1206, process 1200 processes each identified pulse of the received signal into 1 or more Compare it to one of the other pulses or excitation signals above. As a non-limiting example, a SAW device It includes multiple SAW sensors, each with a delay line of a different length. Some also include receptors configured to bind to one or more analytes. The body (which may contain one or more analytes) comes into contact with one or more receptors on the SAW sensor. The sample medium containing one or more analytes is introduced into the SAW sensor. When placed on the receptor, a physical, chemical, or electrical reaction occurs between the analyte and the receptor. The excitation signal is introduced into the SAW device using a waveform generator. When installed in a chair, each SAW sensor generates surface acoustic waves from its excitation signal. They are excited simultaneously in such a way. Surface acoustic waves are generated along the delay line when the sample medium is 1 or more minutes. Depending on whether or not precipitates are present, the propagation is different, and some surface acoustic waves have different phases, frequencies, and amplitudes. It can be modified. Each identified pulse is at least one of the modified surface acoustic waves. Corresponding. Therefore, in block 1206, process 1200 processes the pulse or excitation signal. It is possible to compare the phase, frequency, amplitude, etc., of each component.

[0185] In block 1208, based at least partially on the comparison in step 1206 The process 1200 determines the phase, frequency, amplitude, etc. between one or more pulses or excitation signals. The above differences are determined. For example, SAW devices or systems have multiple pulses relative to each other. This may include phase detection capable of determining the phase corresponding to each of the s and / or excitation signals. For example, The difference in the length of the delay lines between SAW sensors causes the received signal (RX There is a time delay between the pulses. This occurs. The time domain shift between pulses in a compressed pulse train is associated with certain SAW sensors. It corresponds to the applied phase shift. Phase shift is, for example, in a software program or This can be determined using FPGA (Field Programmable Gate Array) hardware. .

[0186] In block 1210, process 1200 is the contents of the sample medium introduced into the SAW device. Determine or monitor the presence of the analyte in the sample, as described here. In such cases, it will form a physical, chemical, or electrical reaction with the receptor. This ultimately alters at least one pulse of the received signal. For example, surface acoustic waves. Changes in velocity or amplitude are compared to the excitation signal, affecting the amplitude, frequency, and phase of the received signal. It can accommodate changes in speed or time delay. It compares a pulse with other pulses or with an excitation signal. By doing so, the process 1200 determines which surface acoustic waves propagate over the delay. It is possible to determine whether it has been changed in that way (if so). Using this information, processing This allows for the identification of analytes present in a sample, or the monitoring of analytes in a sample. This is possible. For example, process 1200 identifies surface acoustic waves as described here. Regarding how it may have been altered by physical, chemical, or electrical reactions: A local or remote database containing this information may be used. Process 1200 is which Once it is determined that the surface acoustic wave (or pulse) has changed, the changes are stored in a database. The changes identified in are matched or compared. In one example, the process is determined It may include a learning configuration that allows the database to be updated based on the results.

[0187] The resulting system produces the effect of simultaneous excitation of multiple analytes, targets or It enables the simultaneous detection of biological drugs. Therefore, the SAW sensor is specific It is possible to indicate the presence of individual substances that react with it. The indication of the amount of substance present is measured This can be provided by a phase change of a constant signal. Therefore, as a whole, the sensor chip (e.g., (SAW device 100, SAW device 200, SAW sensor array 364) A detector is configured with multiple individual sensor elements, and the detector performs various tests during a single test procedure. It is possible to identify multiple substances simultaneously.

[0188] The various blocks described here can be performed in various orders, and process 1200 is desired Therefore, it is understood that one or more blocks can be performed simultaneously and / or their order can be changed. Furthermore, as part of process 1200, fewer, more, or different blocks may be used. It is also understood that they can be. For example, process 1200 is process 900, 1000, 110 It may contain blocks similar to or different from those with a value of 0.

[0189] The various embodiments described herein are surface acoustic wave, SAW sensors and / or SAW devices. See S, but any of the embodiments described herein are bulk acoustic wave, BAW sensor and / or suitable for BAW devices, or combinations of BAW and SAW sensors or devices. It is understood that this is possible. Therefore, the embodiments described herein are for surface acoustic waves. It should not be limited.

Claims

1. 1. A surface acoustic wave (SAW) device comprising: A piezoelectric substrate; a plurality of SAW sensors attached to the piezoelectric substrate and arranged on a surface of the piezoelectric substrate; Equipped with The plurality of SAW sensors include a first SAW sensor comprising a first delay line configured to propagate a first surface acoustic wave, the first SAW sensor comprising a transducer positioned on the piezoelectric substrate and a reflector positioned on the piezoelectric substrate opposite the transducer, the transducer transmitting a first surface acoustic wave along a first delay line, the transducer receiving the first surface acoustic wave after it has reflected off the reflector and propagated twice along the first delay line, the first delay line comprising a waveguiding layer that restricts propagation of the first surface acoustic wave, and a sensitive layer attached to a surface of the first delay line of each of the plurality of SAW sensors; A second SAW sensor comprising a second delay line configured to propagate a second surface acoustic wave, the first delay line having a length greater than a length of the second delay line. The SAW device comprising:

2. The first SAW sensor comprises: a first transducer for transmitting the first surface acoustic wave along the first delay line; a second transducer for receiving the first surface acoustic wave in response to propagation of the first surface acoustic wave along the first delay line; The SAW device of claim 1 , comprising:

3. 2. The SAW device of claim 1, wherein the reflector is a first reflector, and the first SAW sensor further comprises a second reflector positioned on the piezoelectric substrate proximate the first reflector with respect to the transducer, the transducer being configured to receive the first surface acoustic wave in response to reflecting off the second reflector and propagating twice along the first delay line.

4. 4. The SAW device of claim 3, wherein the first reflector is configured to reflect a surface acoustic wave having a first frequency and the second reflector is configured to reflect a surface acoustic wave having a second frequency.

5. 2. The SAW device of claim 1, wherein the first SAW sensor comprises a first pair of electrical contacts and the second SAW sensor comprises a second pair of electrical contacts, the first and second pairs of electrical contacts being electrically connected.

6. The SAW device of claim 1 , wherein each of the SAW sensors is configured to receive an excitation signal.

7. 7. The SAW device of claim 6, wherein the excitation signal comprises at least one of a pulse voltage, a sinusoidal electrical signal, a frequency modulation, a linear frequency modulation, a hyperbolic frequency modulation, an orthogonal frequency coding, a random modulation, a continuous phase modulation, a frequency shift keyed, a multi-frequency shift keyed, a phase shift keyed, a wavelet modulation, or a broadband frequency signal, or each of the SAW sensors is configured to simultaneously receive the excitation signal.

8. one or more processors in communication with each of the first SAW sensor and the second SAW sensor, the one or more processors configured to generate a received signal based at least in part on a plurality of signals received from the first SAW sensor and the second SAW sensor; 2. The SAW device of claim 1, wherein the plurality of signals are transmitted from a first transducer as a first SAW along the first delay line and received by a second transducer in response to propagation of the first SAW along the first delay line.

9. The SAW device of claim 8 , wherein the one or more processors are further configured to determine, monitor, or identify at least one analyte based at least in part on the received signals.

10. 10. The SAW device of claim 9, wherein the one or more processors are configured to determine, monitor, or identify the at least one analyte by detecting variations in amplitude, phase, frequency, or time delay between at least two of a pulse corresponding to an excitation signal, a pulse corresponding to the first SAW sensor, or a pulse corresponding to the second SAW sensor.

11. The SAW device of claim 8 , wherein the received signal comprises a pulse train having a plurality of pulses.

12. The plurality of pulses of the pulse train The SAW device of claim 11 comprising a first pulse corresponding to the first SAW sensor and a second pulse corresponding to the second SAW sensor.

13. 13. The SAW device of claim 12, wherein a timing of the first pulse is based at least in part on the length of the first delay line and a timing of the second pulse is based at least in part on the length of the second delay line.

14. The SAW device of claim 11 , wherein the plurality of pulses in the pulse train includes a pulse corresponding to an excitation signal.

15. 2. The sensor of claim 1, wherein the piezoelectric substrate comprises at least one of 36°Y quartz, 36°YX lithium tantalite, langasite, langatate, langanite, lead zirconate titanate, cadmium sulfide, berlinite, lithium iodate, lithium tetraborate, or bismuth germanium oxide.

16. The sensor of claim 1 , wherein the piezoelectric substrate comprises a piezoelectric crystal layer (e.g., a piezoelectric crystal layer having a thickness greater than a Love wave penetration depth in a non-piezoelectric substrate).

17. The SAW device of claim 1 , further comprising a sensing region located in the first delay line and configured to attach to or react with an analyte.

18. 18. The sensor of claim 17, further comprising a detector for measuring a phase response of a surface acoustic wave as a function of an analyte added to the sensing region, the sensing region comprising a biologically sensitive interface for capturing the analyte from a liquid medium, or the sensing region comprising a biologically sensitive interface for wicking up the analyte from a liquid medium.

19. 10. The sensor of claim 1, wherein the waveguiding layer comprises at least one of a polymer, SiO2, or ZnO.

20. The sensor of claim 1 , wherein the first surface acoustic wave corresponding to the first SAW sensor has a frequency greater than 100 MHz, greater than 300 MHz, greater than 500 MHz, or greater than 1000 MHz.

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