Solid-state imaging device and method for manufacturing the same

Abstract

To provide a solid-state imaging element capable of securing a high reliability, and to provide a method of manufacturing such a solid-state imaging element.SOLUTION: A solid-state imaging element 1 comprises a semiconductor substrate 2, a first element part 3, and a second element part 4. The first element part 3 has a light-receiving unit 31 and a transfer unit 32. The second element part 4 has a capacitance unit 101. The transfer unit 32 has a first transfer electrode 81, a second transfer electrode 82, and an insulating layer 92. The capacitance unit 101 has: a first capacitance electrode 111 and a second capacitance electrode 112 overlapping each other; and an insulating layer 122. A part of the first transfer electrode 81 overlaps a part of the second transfer electrode 82. The insulating layer 92 includes a first portion 92A located between the part of the first transfer electrode 81 and the part of the second transfer electrode 82. The insulating layer 122 includes a second portion 122A located between the first capacitance electrode 111 and the second capacitance electrode 112. A thickness T1 of the first portion 92A is larger than a thickness T2 of the second portion 122A.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a solid-state imaging device and a method for manufacturing a solid-state imaging device. [Background technology]

[0002] As a conventional solid-state imaging device, a monolithic CCD-CMOS is described in Non-Patent Documents 1 and 2. The monolithic CCD-CMOS is a solid-state imaging device in which a CCD section that generates and transfers electric charges in response to incident light, and a CMOS section that processes digital signals in response to the electric charges, are formed on a single semiconductor substrate. [Prior art documents] [Non-patent literature]

[0003] [Non-Patent Document 1] Lee, Hyun Jung. "Charge-Coupled CMOS TDI Imager." Proceedings of the 2017 International Image Sensor Workshop, Hiroshima, Japan. Vol. 30. 2017. [Non-patent document 2] De Moor, Piet, et al."Enhanced time delay integration imaging using embedded CCD in CMOStechnology." 2014 IEEE International Electron Devices Meeting. IEEE, 2014. Summary of the Invention [Problem to be solved by the invention]

[0004] In the monolithic CCD-CMOS described in Non-Patent Documents 1 and 2, multiple transfer electrodes are arranged on the same layer in the CCD section, with gaps formed between adjacent transfer electrodes. This can lead to charges being trapped in areas of the semiconductor substrate corresponding to the gaps, preventing proper charge transfer. Furthermore, as monolithic CCD-CMOS devices become smaller, the proximity of a capacitive section to other circuit sections in the CMOS section can increase parasitic capacitance or cause crosstalk between the capacitive section and other circuit sections.

[0005] An object of the present invention is to provide a solid-state imaging device that can ensure high reliability, and a method for manufacturing such a solid-state imaging device. [Means for solving the problem]

[0006] The solid-state imaging device of the present invention comprises a semiconductor substrate, a first element section formed on the semiconductor substrate, and a second element section formed on the semiconductor substrate, the first element section having a light receiving section that generates charges in response to incidence of light and a transfer section that transfers the charges, the second element section being configured to perform at least one of transmitting a signal to the first element section and receiving a signal from the first element section, and having at least one capacitance section, the transfer section having a first transfer electrode and a second transfer electrode aligned in the charge transfer direction, and a first insulating layer that insulates the first transfer electrode and the second transfer electrode from each other, and Each capacitance section has a first capacitance electrode and a second capacitance electrode that overlap each other when viewed in the thickness direction of the semiconductor substrate, and a second insulating layer that insulates the first capacitance electrode and the second capacitance electrode from each other, wherein when viewed in the thickness direction of the semiconductor substrate, a portion of the first transfer electrode overlaps with a portion of the second transfer electrode, the first insulating layer includes a first portion located between a portion of the first transfer electrode and a portion of the second transfer electrode, and the second insulating layer includes a second portion located between the first capacitance electrode and the second capacitance electrode, and the thickness of the first portion of the first insulating layer is greater than the thickness of the second portion of the second insulating layer.

[0007] In the solid-state imaging device, when viewed from the thickness direction of the semiconductor substrate, a portion of the first transfer electrode overlaps a portion of the second transfer electrode. This reduces the likelihood of a gap forming between the first transfer electrode and the second transfer electrode when viewed from the thickness direction of the semiconductor substrate. This reduces charge trapping in the transfer section, enabling appropriate charge transfer. Furthermore, in the solid-state imaging device, the thickness of the first portion of the first insulating layer is greater than the thickness of the second portion of the second insulating layer. This allows the thickness of the insulating layer between the first transfer electrode and the second transfer electrode to be increased, thereby improving the withstand voltage characteristics between the first transfer electrode and the second transfer electrode. As a result, a high voltage can be applied to the transfer section, improving the saturation charge amount and charge transfer efficiency in the transfer section. Meanwhile, the thickness of the insulating layer between the first capacitive electrode and the second capacitive electrode can be reduced, allowing the capacitive section to be miniaturized (reduced in mounting area) while maintaining a desired capacitance value. This allows for a larger distance between the capacitive section and other circuit sections, thereby preventing an increase in parasitic capacitance and crosstalk between the capacitive section and other circuit sections. Therefore, the solid-state imaging device can ensure high reliability.

[0008] In the solid-state imaging device of the present invention, the first insulating layer may be formed integrally with the second insulating layer, which ensures high reliability with a simpler structure.

[0009] In the solid-state imaging device of the present invention, the thickness of the first portion of the first insulating layer may be at least twice the thickness of the second portion of the second insulating layer. This configuration can further improve the voltage resistance characteristics between the first transfer electrode and the second transfer electrode. This makes it possible to apply a higher voltage to the transfer section, further improving the saturation charge amount and charge transfer efficiency in the transfer section.

[0010] In the solid-state imaging device of the present invention, the first element section may have an amplifier section that converts the charges transferred by the transfer section into an analog signal, and the second element section may have a converter section that converts the analog signal into a digital signal. With this configuration, the charges transferred by the transfer section can be converted into a digital signal that is less susceptible to noise.

[0011] In the solid-state imaging device of the present invention, the second element section may have a generating section that generates a drive signal for driving the first element section. With this configuration, the drive signal for driving the first element section can be generated inside the solid-state imaging device, and therefore the voltage value of the drive signal supplied to the first element section from outside the solid-state imaging device can be reduced.

[0012] In the solid-state imaging device of the present invention, the operating voltage of the first element section may be higher than the operating voltage of the second element section. This configuration can improve the saturation charge amount and charge transfer efficiency in the transfer section.

[0013] A method for manufacturing a solid-state imaging element of the present invention is a method for manufacturing the solid-state imaging element, comprising the steps of: preparing a semiconductor substrate; forming a first transfer electrode and a first capacitance electrode on the semiconductor substrate; forming a first insulating layer on at least the first transfer electrode and a second insulating layer on at least the first capacitance electrode; adjusting the thickness of at least one of the above-mentioned portion of the first insulating layer and the above-mentioned portion of the second insulating layer so that the thickness of the portion of the first insulating layer located on the first transfer electrode is greater than the thickness of the portion of the second insulating layer located on the first capacitance electrode; and forming a second transfer electrode and a second capacitance electrode on the semiconductor substrate.

[0014] According to the above-described method for manufacturing a solid-state imaging device, the thickness of the portion of the first insulating layer located above the first transfer electrode is adjusted to be greater than the thickness of the portion of the second insulating layer located above the first capacitance electrode. This allows the thickness of the insulating layer located between the first transfer electrode and the second transfer electrode in the manufactured solid-state imaging device to be increased, thereby improving the voltage resistance characteristics between the first transfer electrode and the second transfer electrode. As a result, a high voltage can be applied to the transfer section, thereby improving the saturation charge amount and charge transfer efficiency in the transfer section. Meanwhile, the thickness of the insulating layer located between the first capacitance electrode and the second capacitance electrode can be reduced, thereby achieving a smaller capacitance section while maintaining a desired capacitance value. As a result, the distance between the capacitance section and other circuit sections can be increased, thereby preventing an increase in parasitic capacitance and crosstalk between the capacitance section and other circuit sections. Therefore, according to the above-described method for manufacturing a solid-state imaging device, a solid-state imaging device with high reliability can be obtained.

[0015] In the method for manufacturing a solid-state imaging device of the present invention, in the steps of forming the first insulating layer and the second insulating layer, the first insulating layer and the second insulating layer may be formed simultaneously and integrally. With this configuration, the first insulating layer and the second insulating layer are formed simultaneously and integrally, thereby improving the manufacturing efficiency of the solid-state imaging device.

[0016] In the method for manufacturing a solid-state imaging device of the present invention, in the step of adjusting the thickness of at least one of the portion of the first insulating layer and the portion of the second insulating layer, the thickness of the portion of the second insulating layer may be reduced by performing an etching process on the second insulating layer. With this configuration, the thickness of the portion of the second insulating layer located above the first capacitor electrode can be more reliably reduced by the etching process.

[0017] In the method for manufacturing a solid-state imaging device of the present invention, in the step of adjusting the thickness of at least one of the portion of the first insulating layer and the portion of the second insulating layer, the thickness of the portion of the first insulating layer may be increased by performing a film formation process on the first insulating layer. With this configuration, the thickness of the portion of the first insulating layer located above the first transfer electrode can be more reliably increased by the film formation process. [Effects of the Invention]

[0018] According to the present invention, it is possible to provide a solid-state imaging device that can ensure high reliability, and a method for manufacturing such a solid-state imaging device. [Brief explanation of the drawings]

[0019] [Figure 1] FIG. 1 is a schematic plan view of a solid-state imaging device according to an embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view of the solid-state imaging device of FIG. [Figure 3] FIG. 3 is an enlarged view showing the detailed configuration of a first element portion and a second element portion. [Figure 4] FIG. 2 is a cross-sectional view of the solid-state imaging device of FIG. [Figure 5] 5A to 5C are cross-sectional views for explaining a method for manufacturing the solid-state imaging device of FIG. [Figure 6] 5A to 5C are cross-sectional views for explaining a method for manufacturing the solid-state imaging device of FIG. [Figure 7] 5A to 5C are cross-sectional views for explaining a method for manufacturing the solid-state imaging device of FIG. [Figure 8] 5A to 5C are cross-sectional views for explaining a method for manufacturing the solid-state imaging device of FIG. [Figure 9] 5A to 5C are cross-sectional views for explaining a method for manufacturing the solid-state imaging device of FIG. [Figure 10] 5A to 5C are cross-sectional views for explaining a method for manufacturing the solid-state imaging device of FIG. [Figure 11] 5A to 5C are cross-sectional views for explaining a method for manufacturing the solid-state imaging device of FIG. [Figure 12] FIG. 10 is a schematic plan view of a solid-state imaging device according to a first modified example. [Figure 13] FIG. 10 is a schematic plan view of a solid-state imaging device according to a second modified example. DETAILED DESCRIPTION OF THE INVENTION

[0020] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In each drawing, the same or corresponding parts are designated by the same reference numerals, and overlapping parts are omitted.

[0021] As shown in FIGS. 1 to 3, the solid-state imaging device 1 includes a semiconductor substrate 2, a first element section 3, and a second element section 4. The first element section 3 and the second element section 4 are formed on a single semiconductor substrate 2. The second element section 4 is configured to receive signals from the first element section 3. The first element section 3 is, for example, a CCD (Charge Coupled Device) section. The second element section 4 is, for example, a CMOS (Complementary Metal Oxide Semiconductor) section. That is, the solid-state imaging device 1 is, for example, a monolithic CCD-CMOS. Hereinafter, the thickness direction of the semiconductor substrate 2 will be referred to as the Z direction, a direction perpendicular to the Z direction will be referred to as the X direction, and a direction perpendicular to both the Z direction and the X direction will be referred to as the Y direction.

[0022] The semiconductor substrate 2 has, for example, a rectangular shape when viewed from the Z direction. The longitudinal direction of the semiconductor substrate 2 is along the X direction. The semiconductor substrate 2 has a base 10 and a semiconductor layer 20 stacked in the Z direction.

[0023] The base 10 is a semiconductor substrate, and may be, for example, a silicon substrate. In this embodiment, the base 10 has a P-type conductivity. The base 10 is formed in a rectangular plate shape (a rectangular parallelepiped shape). The base 10 has a pair of surfaces 10a and 10b perpendicular to the Z direction. The thickness of the base 10 is, for example, about 300 μm. The semiconductor layer 20 is formed on the surface 10a of the base 10. The semiconductor layer 20 is, for example, an epitaxially grown layer containing silicon. The thickness of the semiconductor layer 20 is, for example, about 10 μm.

[0024] The first element unit 3 includes a light receiving unit 31, a transfer unit 32, and an amplifier unit 33. The light receiving unit 31 generates charges in response to incidence of light hν. The light hν is incident on the light receiving unit 31 from the wiring layer 50 side, which will be described later. The light receiving unit 31 includes a plurality of pixels 310 arranged two-dimensionally along the X and Y directions. The plurality of pixels 310 arranged along the X direction constitute a pixel column. The transfer unit 32 transfers charges generated in the light receiving unit 31. The transfer unit 32 transfers charges along the X direction for each pixel column. The amplifier unit 33 converts the charges transferred by the transfer unit 32 into an analog signal (signal voltage). The amplifier unit 33 includes a plurality of amplifiers 330. Each amplifier 330 is electrically connected to a corresponding pixel column via wiring W1. The analog signal converted by the amplifier unit 33 is transmitted to the second element unit 4.

[0025] The second element section 4 includes a conversion section 41, a drive section 42, a multiplexer section 43, and an output section 44. The conversion section 41 converts analog signals transmitted from the first element section 3 into digital signals. The conversion section 41 includes a plurality of ADCs (Analog-to-Digital Converters) 410. The plurality of ADCs 410 are aligned in the Y direction. The pitch (distance between centers) between adjacent ADCs 410 in the Y direction is equal to the pitch between adjacent pixels 310 in the Y direction. The pitch between the ADCs 410 is, for example, several μm to several tens of μm. Each ADC 410 is electrically connected to a corresponding amplifier 330 via a wiring W2.

[0026] The driver 42 generates a signal for driving the converter 41. The driver 42 includes, for example, a phase-locked loop (PLL) and a timing generator. The driver 42 is electrically connected to the converter 41 via wiring W3. The multiplexer 43 generates a single digital signal by bundling multiple digital signals converted by the converter 41. The multiplexer 43 is electrically connected to the converter 41 via wiring W4. The output unit 44 converts the digital signal from the multiplexer 43 into a differential voltage signal and outputs it to the outside. The output unit 44 includes, for example, an LVDS (Low Voltage Differential Signaling) unit. The output unit 44 is electrically connected to the multiplexer 43 via wiring W5.

[0027] The first element unit 3 is electrically connected to the generation unit 61 via wiring W6. The generation unit 61 generates a drive signal for driving the first element unit 3. The generation unit 61 is formed outside the solid-state imaging device 1. The drive signal generated by the generation unit 61 may be, for example, an operating voltage applied to the first element unit 3. The operating voltage includes, for example, a transfer voltage applied to the transfer unit 32.

[0028] The second element section 4 is electrically connected to the generator 62 via wiring W7. The generator 62 generates a drive signal for driving the second element section 4. The generator 62 is formed outside the solid-state imaging device 1. The drive signal generated by the generator 62 may be, for example, an operating voltage applied to the second element section 4. The operating voltage of the first element section 3 may be higher than the operating voltage of the second element section 4. The operating voltage of the first element section 3 may be, for example, approximately 10 V, and the operating voltage of the second element section 4 may be, for example, approximately 3.3 V. A wiring layer 50 is formed on the semiconductor layer 20. The wiring layer 50 includes various wirings and electrodes of the solid-state imaging device 1. The wirings W1, W2, W3, W4, W5, W6, and W7 may be formed in the wiring layer 50, for example.

[0029] As shown in FIG. 4, the semiconductor layer 20 includes a semiconductor region 21. The semiconductor region 21 has a P-type conductivity. The portion of the semiconductor layer 20 where the first element portion 3 is to be formed includes a semiconductor region 22 and a plurality of semiconductor regions 23. The semiconductor region 22 has an N-type conductivity and is formed on the semiconductor region 21. Each of the semiconductor regions 23 has an N-type conductivity. - It has a conductivity type of "N - "N-type" means that the concentration of N-type impurities is lower than that of "N-type." Each semiconductor region 23 is formed in semiconductor region 22 along the surface of semiconductor region 22 opposite semiconductor region 21.

[0030] The light receiving section 31 includes a PN junction region formed in the semiconductor layer 20. Specifically, the PN junction region is formed in the boundary between the semiconductor region 21 and the semiconductor region 22. When light hν is incident on the PN junction region formed in the semiconductor layer 20, an electric charge is generated.

[0031] The transfer section 32 has a charge transfer region 70, multiple transfer electrodes 80, and multiple insulating layers 90. The charge transfer region 70 is formed in the semiconductor layer 20. The charge transfer region 70 includes a semiconductor region 22 and a semiconductor region 23, and transfers charges generated in the light-receiving section 31. The charge transfer region 70 includes multiple first transfer regions 71 and multiple second transfer regions 72. The first transfer region 71 is a region of the semiconductor region 22 located between two semiconductor regions 23 aligned in the X direction, and overlaps with a first transfer electrode 81 (described later) in the Z direction. The first transfer region 71 does not include the semiconductor region 23. The second transfer region 72 is a region including the semiconductor region 23, and overlaps with a second transfer electrode 82 (described later) in the Z direction. The first transfer region 71 and the second transfer region 72 are alternately arranged in the charge transfer direction (X direction). The semiconductor region 22 has N-type conductivity, and the semiconductor region 23 has N-type conductivity. - Therefore, the impurity concentration of the first transfer region 71 is higher than the impurity concentration of the second transfer region 72.

[0032] The multiple transfer electrodes 80 are arranged on the charge transfer region 70 and are aligned in the charge transfer direction (X direction). The multiple transfer electrodes 80 include multiple first transfer electrodes 81 and multiple second transfer electrodes 82. The first transfer electrodes 81 and the second transfer electrodes 82 transfer charges generated in the light receiving unit 31 in the X direction. The first transfer electrodes 81 and the second transfer electrodes 82 transfer charges for each pixel column extending along the X direction. The first transfer electrode 81 is arranged on the first transfer region 71, and the second transfer electrode 82 is arranged on the second transfer region 72. The first transfer electrodes 81 and the second transfer electrodes 82 are aligned alternately in the X direction. The first transfer electrodes 81 and the second transfer electrodes 82 are formed of, for example, polysilicon. The first transfer electrodes 81 and the second transfer electrodes 82 are electrically connected to the generation unit 61 via, for example, wiring formed in the wiring layer 50.

[0033] The first transfer electrode 81 has a flat plate shape extending along the X and Y directions. The first transfer electrode 81 is located away from the semiconductor layer 20. The first transfer electrode 81 has a pair of surfaces 81a and 81b facing each other in the Z direction. The surfaces 81a and 81b are aligned along the X and Y directions. The surface 81a is located farther from the semiconductor layer 20 than the surface 81b. When viewed from the Z direction, the first transfer electrode 81 has a pair of overlapping portions A1 that overlap with parts (overlapping portions A2) of the second transfer electrode 82. The pair of overlapping portions A1 are both end portions of the first transfer electrode 81 in the X direction.

[0034] The second transfer electrode 82 includes a first portion 83 and a pair of second portions 84. The first portion 83 has a flat shape extending along the X and Y directions. The first portion 83 is located away from the semiconductor layer 20. The first portion 83 has a pair of surfaces 83a and 83b facing each other in the Z direction. The surfaces 83a and 83b are aligned along the X and Y directions. The surface 83a is located farther from the semiconductor layer 20 than the surface 83b. The distance from the semiconductor layer 20 to the surface 83b in the Z direction is the same as the distance from the semiconductor layer 20 to the surface 81b.

[0035] The second portion 84 is located farther from the semiconductor layer 20 in the Z direction than the first portion 83. The second portion 84 is formed so as to be bent in an XZ cross-sectional view. The second portion 84 has portions along the Y direction and the Z direction and portions along the X direction and the Y direction. The portions of the second portion 84 along the Y direction and the Z direction are continuous with corresponding ends of the first portion 83 in the X direction. The second portion 84 has an overlapping portion A2. The overlapping portion A2 is a portion that overlaps with the overlapping portion A1 of the first transfer electrode 81 when viewed from the Z direction. The overlapping portion A2 is located on the surface 81a side of the first transfer electrode 81 in the Z direction. In this embodiment, when viewed from the Z direction, no gap is formed between the first transfer electrode 81 and the second transfer electrode 82.

[0036] A plurality of insulating layers 90 are formed on the semiconductor layer 20. The plurality of insulating layers 90 are stacked in the Z direction. Each insulating layer 90 is made of, for example, silicon oxide. The silicon oxide is, for example, SiO2. In FIG. 4, for convenience of explanation, only insulating layers 91 and 92 of the plurality of insulating layers 90 are shown by dashed lines. In an actual solid-state imaging device 1, the plurality of insulating layers 90 may be integrated to the extent that the boundaries between the insulating layers 90 are not visible. The insulating layer 91 extends between the semiconductor layer 20 and the transfer electrode 80. The insulating layer 91 has a uniform thickness, and the thickness of the portion of the insulating layer 91 between the semiconductor layer 20 and the first transfer electrode 81 is the same as the thickness of the portion between the semiconductor layer 20 and the second transfer electrode 82.

[0037] An insulating layer (first insulating layer) 92 is formed on the insulating layer 91. The insulating layer 92 extends continuously along the surface 81a of the first transfer electrode 81. The insulating layer 92 is located between the first transfer electrode 81 and the second transfer electrode 82, and insulates the first transfer electrode 81 and the second transfer electrode 82 from each other. The insulating layer 92 includes a first portion 92A located between the overlapping portion A1 of the first transfer electrode 81 and the overlapping portion A2 of the second transfer electrode 82.

[0038] The second element section 4 has a capacitance section 101. The capacitance section 101 may be included in, for example, the conversion section 41, the drive section 42, the multiplexer section 43, or the output section 44, or may be included in another circuit section of the second element section 4. The capacitance section 101 has a first capacitance electrode 111, a second capacitance electrode 112, and an insulating layer 122, which will be described later. The capacitance section 101 is, for example, a PIP (poly-insulator-poly) capacitance.

[0039] The second element section 4 includes a semiconductor layer 20, a first capacitance electrode 111, a second capacitance electrode 112, multiple electrodes 113, and multiple insulating layers 120. The first capacitance electrode 111 and the second capacitance electrode 112 are disposed on the semiconductor layer 20. The first capacitance electrode 111 and the second capacitance electrode 112 are formed of, for example, polysilicon. The first transfer electrode 81 and the second transfer electrode 82 are electrically connected to the generation section 62 via, for example, wiring formed in the wiring layer 50. The first capacitance electrode 111 and the second capacitance electrode 112 have a flat plate shape extending along the X and Y directions. The first capacitance electrode 111 is located between the semiconductor layer 20 and the second capacitance electrode 112. When viewed from the Z direction, the first capacitance electrode 111 and the second capacitance electrode 112 overlap each other.

[0040] The first capacitor electrode 111 is located away from the semiconductor layer 20. The first capacitor electrode 111 has a pair of surfaces 111a and 111b facing each other in the Z direction. The surfaces 111a and 111b are aligned along the X and Y directions. The surface 111a is located farther from the semiconductor layer 20 than the surface 111b.

[0041] A plurality of electrodes 113 are disposed on the semiconductor layer 20 and are aligned in the X direction. Each electrode 113 is formed of, for example, polysilicon. Each electrode 113 is electrically connected to the generation unit 62 via, for example, wiring formed in the wiring layer 50. Each electrode 113 has a flat plate shape extending along the X and Y directions. Each electrode 113 may be, for example, a gate electrode of a field effect transistor (FET). Each electrode 113 is positioned away from the semiconductor layer 20. Each electrode 113 has a pair of surfaces 113a and 113b facing each other in the Z direction. The surfaces 113a and 113b are aligned along the X and Y directions. The surface 113a is positioned farther from the semiconductor layer 20 than the surface 113b. The distance from the semiconductor layer 20 to the surface 113b in the Z direction is the same as the distance from the semiconductor layer 20 to the surface 111b.

[0042] A plurality of insulating layers 120 are formed on the semiconductor layer 20. The plurality of insulating layers 120 are stacked in the Z direction. Each insulating layer 120 is made of, for example, silicon oxide. The silicon oxide is, for example, SiO2. In FIG. 4, for convenience of explanation, only insulating layers 121 and 122 of the plurality of insulating layers 120 are shown by dashed lines. In an actual solid-state imaging device 1, the plurality of insulating layers 120 may be integrated to the extent that the boundaries between the insulating layers 120 are not visible. The insulating layer 121 extends between the semiconductor layer 20 and the first capacitor electrode 111 and the electrode 113. The insulating layer 121 has a uniform thickness, and the thickness of the portion of the insulating layer 121 between the semiconductor layer 20 and the first capacitor electrode 111 is the same as the thickness of the portion between the semiconductor layer 20 and the electrode 113. The insulating layer 121 is formed integrally with the insulating layer 91.

[0043] The insulating layer (second insulating layer) 122 is formed on the insulating layer 121. The insulating layer 122 extends continuously along the surface 111a of the first capacitor electrode 111. The insulating layer 122 is located between the first capacitor electrode 111 and the second capacitor electrode 112, and insulates the first capacitor electrode 111 and the second capacitor electrode 112 from each other. The insulating layer 122 is formed integrally with the insulating layer 92. The insulating layer 122 includes a second portion 122A located between the first capacitor electrode 111 and the second capacitor electrode 112.

[0044] The thickness T1 of the first portion 92A of the insulating layer 92 is greater than the thickness T2 of the second portion 122A of the insulating layer 122. That is, the distance between the overlapping portion A1 of the first transfer electrode 81 and the overlapping portion A2 of the second transfer electrode 82 is greater than the distance between the first capacitance electrode 111 and the second capacitance electrode 112. The thickness T1 may be two or more times the thickness T2, or five or more times the thickness T2. The thickness T1 may be, for example, 10 nm or more and 100 nm or less. The thickness T2 may be, for example, 5 nm or more and 20 nm or less.

[0045] An example of the operation of the solid-state imaging device 1 configured as described above will be described. In the solid-state imaging device 1, when light hν is incident on the light-receiving section 31, charges are generated in each pixel 310 of the light-receiving section 31. The charges are transferred to the amplifier section 33 by the transfer section 32. Here, a charge transfer method will be described with reference to FIG. 4. In this embodiment, a two-phase driving method is used as the charge transfer method. In the following description, the first transfer regions 71 shown in FIG. 4 will be referred to as first transfer regions 71A and 71B, and the second transfer regions 72 will be referred to as second transfer regions 72A and 72B. The first transfer electrode 81 on the first transfer region 71A will be referred to as the first transfer electrode 81A, and the first transfer electrode 81 on the first transfer region 71B will be referred to as the first transfer electrode 81B. Similarly, the second transfer electrode 82 on the second transfer region 72A will be referred to as the second transfer electrode 82A, and the second transfer electrode 82 on the second transfer region 72B will be referred to as the second transfer electrode 82B.

[0046] First, the value of the voltage (hereinafter referred to as voltage P1) applied to the first transfer electrode 81A and the second transfer electrode 82A is increased to an appropriate value (for example, approximately 5 V). The first transfer region 71A has a higher impurity concentration than the second transfer region 72A. Therefore, when the same magnitude of voltage P1 is applied to the first transfer electrode 81A and the second transfer electrode 82A, the potential well formed below the first transfer electrode 81A is deeper than the potential well formed below the second transfer electrode 82A. Due to this potential difference, charges generated in the light receiving section 31 flow from the second transfer region 72A into the first transfer region 71A and are stored in the first transfer region 71A.

[0047] Next, the value of the voltage P1 applied to the first transfer electrode 81A and the second transfer electrode 82A is reduced, while the value of the voltage (hereinafter referred to as voltage P2) applied to the first transfer electrode 81B and the second transfer electrode 82B is increased to an appropriate value (for example, approximately 5 V). As a result, the potential wells below the first transfer electrode 81B and the second transfer electrode 82B become deeper than the potential well below the first transfer electrode 81A. In this embodiment, the first transfer region 71B has a higher impurity concentration than the second transfer region 72B, and therefore the potential well below the first transfer electrode 81B is deeper than the potential well below the second transfer electrode 82B. Therefore, when the value of voltage P2 is higher than the value of voltage P1, the potential well becomes deeper in stages from the first transfer region 71A toward the first transfer region 71B. As a result, the charge stored in the first transfer region 71A passes through the second transfer region 72B and is transferred to the first transfer region 71B. Thereafter, the above transfer method is repeated for the other first transfer electrodes 81 and second transfer electrodes 82, thereby transferring the charges in the X direction.

[0048] The charges transferred by the first transfer electrodes 81 and the second transfer electrodes 82 are sent to the amplifier unit 33. In this embodiment, charges are sent to the amplifier 330 for each pixel column extending along the X direction. The charges are converted into analog signals in the amplifier unit 33. The analog signals converted by the amplifier unit 33 are converted into digital signals in the conversion unit 41. The multiple digital signals converted by the conversion unit 41 are bundled in the multiplexer unit 43 to generate one digital signal. This digital signal is converted into a differential voltage signal in the output unit 44 and output to the outside.

[0049] A manufacturing method of the solid-state imaging device 1 will be described with reference to FIGS. 5 to 11. First, as shown in FIG. 5, a semiconductor substrate 2 is prepared. Next, a film formation process is performed on the semiconductor substrate 2, thereby forming an insulating layer 91 and an insulating layer 121 on the surface of the semiconductor substrate 2. The insulating layer 91 and the insulating layer 121 are simultaneously and integrally formed. Next, as shown in FIG. 6, an electrode layer 85 is formed on the surface of the insulating layer 91, and an electrode layer 115 is formed on the surface of the insulating layer 121. The electrode layer 85 is formed from the material of the first transfer electrode 81, and the electrode layer 115 is formed from the material of the first capacitor electrode 111. The electrode layer 85 and the electrode layer 115 are simultaneously and integrally formed. Next, as shown in FIG. 7, an etching process is performed on the electrode layer 85 and the electrode layer 115, thereby forming the first transfer electrode 81 and the first capacitor electrode 111.

[0050] 8, an insulating layer 92 is formed on the first transfer electrode 81, and an insulating layer 122 is formed on the first capacitor electrode 111. In this embodiment, the insulating layer 92 is formed so as to cover the entire first transfer electrode 81, and the insulating layer 122 is formed so as to cover the entire first capacitor electrode 111. The insulating layer 92 and the insulating layer 122 are formed simultaneously and integrally. The insulating layer 92 and the insulating layer 122 may be formed by performing an oxidation treatment on the surfaces of the first transfer electrode 81 and the first capacitor electrode 111. For example, when the material of the first transfer electrode 81 and the first capacitor electrode 111 is polysilicon, the insulating layer 92 and the insulating layer 122 made of silicon oxide may be formed on the surfaces of the first transfer electrode 81 and the first capacitor electrode 111, respectively, by an oxidation treatment.

[0051] 9, the thickness of at least one of the portion 92B and the portion 122B is adjusted so that the thickness of the portion 92B of the insulating layer 92 located on the first transfer electrode 81 is greater than the thickness of the portion 122B of the insulating layer 122 located on the first capacitance electrode 111. In this embodiment, the insulating layer 122 is subjected to an etching process to reduce the thickness of the portion 122B.

[0052] 10, an electrode layer 86 is formed on the surfaces of the insulating layers 91 and 92, and an electrode layer 116 is formed on the surfaces of the insulating layers 121 and 122. The electrode layer 86 is formed from the material of the second transfer electrode 82, and the electrode layer 116 is formed from the material of the second capacitor electrode 112 and the electrode 113. The electrode layer 86 and the electrode layer 116 are formed simultaneously and integrally. Then, as shown in FIG. 11, the electrode layer 86 and the electrode layer 116 are etched to form the second transfer electrode 82, the second capacitor electrode 112, and the electrode 113. When the second transfer electrode 82 is formed, the portion 92B located between the overlapping portion A1 of the first transfer electrode 81 and the overlapping portion A2 of the second transfer electrode 82 corresponds to the first portion 92A. When the second capacitor electrode 112 is formed, the portion 122B corresponds to the second portion 122A. Next, a plurality of insulating layers 90 are further formed on the second transfer electrode 82 and the insulating layer 92, and a plurality of insulating layers 120 are further formed on the second capacitance electrode 112, the electrode 113 and the insulating layer 122, thereby obtaining a solid-state imaging element 1.

[0053] As described above, in the solid-state imaging device 1, when viewed from the Z direction, the overlapping portion A1 of the first transfer electrode 81 overlaps the overlapping portion A2 of the second transfer electrode 82. This makes it difficult for a gap to form between the first transfer electrode 81 and the second transfer electrode 82 when viewed from the Z direction. This prevents charge trapping in the transfer section 32, enabling appropriate charge transfer. Furthermore, in the solid-state imaging device 1, the thickness T1 of the first portion 92A of the insulating layer 92 is greater than the thickness T2 of the second portion 122A of the insulating layer 122. This allows the thickness T1 of the insulating layer located between the first transfer electrode 81 and the second transfer electrode 82 to be increased, thereby improving the voltage resistance characteristics between the first transfer electrode 81 and the second transfer electrode 82. As a result, a high voltage can be applied to the transfer section 32, thereby improving the saturation charge amount and charge transfer efficiency in the transfer section 32. On the other hand, the thickness T2 of the insulating layer located between the first capacitance electrode 111 and the second capacitance electrode 112 can be reduced, thereby realizing a miniaturization of the capacitance section 101 (reducing the mounting area) while maintaining a desired capacitance value. Specifically, since the distance between the first capacitance electrode 111 and the second capacitance electrode 112 is narrowed, the areas of the first capacitance electrode 111 and the second capacitance electrode 112 can be reduced. As a result, it is possible to increase the distance between the capacitance section 101 and other circuit sections (e.g., MOSFETs, resistors, or other capacitance sections), thereby suppressing an increase in parasitic capacitance and the occurrence of crosstalk between the capacitance section 101 and other circuit sections. Therefore, the solid-state imaging device 1 can ensure high reliability.

[0054] In the solid-state imaging device 1, the insulating layer 92 is formed integrally with the insulating layer 122. This configuration ensures high reliability with a simpler structure.

[0055] In the solid-state imaging device 1, the thickness T1 of the first portion 92A of the insulating layer 92 may be at least twice the thickness T2 of the second portion 122A of the insulating layer 122. This configuration can further improve the voltage resistance characteristics between the first transfer electrode 81 and the second transfer electrode 82. This makes it possible to apply a higher voltage to the transfer section 32, thereby further improving the saturation charge amount and charge transfer efficiency in the transfer section 32.

[0056] In the solid-state imaging device 1, the first element section 3 has an amplifier section 33 that converts the charges transferred by the transfer section 32 into an analog signal, and the second element section 4 has a conversion section 41 that converts the analog signal into a digital signal. With this configuration, the charges transferred by the transfer section 32 can be converted into a digital signal that is less susceptible to the effects of noise.

[0057] In the solid-state imaging device 1, the operating voltage of the first element section 3 may be higher than the operating voltage of the second element section 4. With this configuration, the saturation charge amount and charge transfer efficiency in the transfer section 32 can be improved.

[0058] According to the manufacturing method of the solid-state imaging device 1, the thickness of the portion 92B of the insulating layer 92 located on the first transfer electrode 81 is adjusted to be greater than the thickness of the portion 122B of the insulating layer 122 located on the first capacitance electrode 111. This allows the thickness T1 of the insulating layer located between the first transfer electrode 81 and the second transfer electrode 82 in the manufactured solid-state imaging device 1 to be increased, thereby improving the voltage resistance characteristics between the first transfer electrode 81 and the second transfer electrode 82. As a result, a high voltage can be applied to the transfer section 32, thereby improving the saturation charge amount and charge transfer efficiency of the transfer section 32. Meanwhile, the thickness T2 of the insulating layer located between the first capacitance electrode 111 and the second capacitance electrode 112 can be reduced, thereby achieving a miniaturization of the capacitance section 101 while maintaining a desired capacitance value. As a result, the distance between the capacitance section 101 and other circuit sections can be increased, thereby suppressing an increase in parasitic capacitance and crosstalk between the capacitance section 101 and other circuit sections. Therefore, according to the manufacturing method of the solid-state imaging device 1, a solid-state imaging device 1 with high reliability can be obtained.

[0059] In the manufacturing method of the solid-state imaging device 1, the insulating layer 92 and the insulating layer 122 are simultaneously and integrally formed. According to this configuration, the insulating layer 92 and the insulating layer 122 are simultaneously and integrally formed, so that the manufacturing efficiency of the solid-state imaging device 1 can be improved.

[0060] In the manufacturing method of the solid-state imaging device 1, in the step of adjusting the thickness of at least one of the portion 92B of the insulating layer 92 and the portion 122B of the insulating layer 122, an etching process is performed on the insulating layer 122, thereby reducing the thickness of the portion 122B of the insulating layer 122. According to this configuration, the thickness of the portion 122B can be more reliably reduced by the etching process. [Variations]

[0061] The present invention is not limited to the above embodiment. For example, as shown in FIG. 12, the second element unit 4 may have a generator 61 that generates a drive signal for driving the first element unit 3. That is, in the modified example shown in FIG. 12, the generator 61 is formed inside the solid-state imaging device 1. The drive signal generated by the generator 61 is transmitted to the first element unit 3. In this modified example, the second element unit 4 is configured to transmit signals to and receive signals from the first element unit 3. In this modified example, for example, an operating voltage is first applied to the generator 61 via wiring W7 from a generator 62 formed outside the solid-state imaging device 1. The operating voltage applied to the generator 61 is boosted in the generator 61 and applied to the first element unit 3 via wiring W6 as the operating voltage for the first element unit 3. In this modified example, the capacitance unit 101 may be formed in the generator 61.

[0062] 12, the second element section 4 has a generation section 61 that generates a drive signal for driving the first element section 3. With this configuration, the drive signal for driving the first element section 3 can be generated inside the solid-state imaging device 1, and therefore the voltage value of the drive signal supplied to the first element section 3 from outside the solid-state imaging device 1 can be reduced.

[0063] 13, the second element unit 4 may include only the generation unit 61. The drive signal generated by the generation unit 61 is transmitted to the first element unit 3. That is, in this modification, the second element unit 4 is configured to transmit a signal to the first element unit 3. In this modification, the capacitance unit 101 is formed in the generation unit 61. Even in this configuration, the drive signal for driving the first element unit 3 can be generated inside the solid-state imaging device 1, thereby reducing the voltage value of the drive signal supplied to the first element unit 3 from outside the solid-state imaging device 1. Furthermore, the configuration of the solid-state imaging device 1 can be simplified. The second element unit 4 only needs to be configured to transmit a signal to the first element unit 3 and / or receive a signal from the first element unit 3.

[0064] In the manufacturing method of the solid-state imaging device 1, in the step of adjusting the thickness of at least one of the portion 92B and the portion 122B, the thickness of the portion 92B may be increased by performing a film formation process on the insulating layer 92. According to this configuration, the thickness of the portion 92B can be more reliably increased by the film formation process.

[0065] The insulating layer 91 and the insulating layer 121 may be formed at different times or may be formed separately. Similarly, the insulating layer 92 and the insulating layer 122 may be formed at different times or may be formed separately. Furthermore, the electrode layer 85 and the electrode layer 115 may be formed at different times or may be formed separately. That is, the formation timing of the first transfer electrode 81 may be different from the formation timing of the first capacitor electrode 111. Similarly, the electrode layer 86 and the electrode layer 116 may be formed at different times or may be formed separately. That is, the formation timing of the second transfer electrode 82 may be different from the formation timing of the second capacitor electrode 112 and the electrode 113.

[0066] The thickness of the insulating layer 91 may be different from the thickness of the insulating layer 121. Furthermore, the thicknesses of the insulating layer 91 and the insulating layer 121 may not be uniform. For example, the thickness of the portion of the insulating layer 91 between the semiconductor layer 20 and the first transfer electrode 81 may be different from the thickness of the portion between the semiconductor layer 20 and the second transfer electrode 82. Furthermore, the thickness of the portion of the insulating layer 121 between the semiconductor layer 20 and the first capacitor electrode 111 may be different from the thickness of the portion between the semiconductor layer 20 and the electrode 113.

[0067] The second element section 4 may have one capacitance section 101 or may have multiple capacitance sections 101. When the second element section 4 has multiple capacitance sections 101, for example, each of the conversion section 41, the drive section 42, the multiplexer section 43, the output section 44, and the generation section 61 may include one or more capacitance sections 101.

[0068] The P-type and N-type conductivity types may be reversed relative to those described above. For example, the semiconductor region 22 may have a P-type conductivity and the semiconductor region 23 may have a P-type conductivity. + The conductivity type may be "P + "N-type" means that the concentration of P-type impurities is higher than that of "P-type." The charge transfer method in the transfer section 32 is not limited to the two-phase drive method, and may be other methods such as a three-phase drive method or a four-phase drive method.

[0069] The overlapping portion A2 of the second transfer electrode 82 may be located on the surface 81b side of the first transfer electrode 81 in the Z direction. In this case, the second portion 84 of the second transfer electrode 82 is located so as to be inserted between the first transfer electrode 81 and the semiconductor layer 20. In this modification, in the manufacturing process of the solid-state imaging device 1, the first transfer electrode 81 is formed after the second transfer electrode 82 is formed.

[0070] In the above embodiment, the full frame transfer (FFT) method has been described as an example of a method for transferring charges generated in the light receiving section 31. However, the charge transfer method may also be, for example, a frame transfer (FT) method or an interline (IT) method. When the full frame transfer method or the frame transfer method is adopted as the charge transfer method, the region of the semiconductor layer 20 constituting the light receiving section 31 also functions as the transfer section 32. On the other hand, when the interline (IT) method is adopted as the charge transfer method, a region of the semiconductor layer 20 other than the region constituting the light receiving section 31 functions as the transfer section 32. Furthermore, in the above embodiment, the front-illuminated solid-state imaging element 1 in which light hν is incident from the wiring layer 50 side has been described as an example. However, the solid-state imaging element 1 may also be a back-illuminated solid-state imaging element in which light hν is incident from the front surface 10b side of the base 10. In the back-illuminated solid-state imaging element 1, a portion of the base 10 directly below the light receiving section 31 may be removed or thinned, and the light hν may enter the light receiving section 31 through the removed or thinned portion. [Explanation of symbols]

[0071] 1...solid-state imaging element, 2...semiconductor substrate, 3...first element portion, 4...second element portion, 31...light receiving portion, 32...transfer portion, 33...amplifier portion, 41...conversion portion, 61...generation portion, 81, 81A, 81B...first transfer electrode, 82, 82A, 82B...second transfer electrode, 92A...first portion, 122A...second portion, 92...insulating layer (first insulating layer), 92B, 122B...portion, 101...capacitance portion, 111...first capacitance electrode, 112...second capacitance electrode, 122...insulating layer (second insulating layer), hν...light.

Claims

1. a semiconductor substrate; a first element portion formed on the semiconductor substrate; a second element portion formed on the semiconductor substrate, the first element portion has a light receiving portion that generates charges in response to incidence of light and a transfer portion that transfers the charges; the second element unit is configured to perform at least one of transmitting a signal to the first element unit and receiving a signal from the first element unit, and has at least one capacitance unit; The transfer unit first transfer electrodes and second transfer electrodes arranged alternately in the charge transfer direction; a first insulating layer that insulates the first transfer electrode and the second transfer electrode from each other; The at least one capacitance section is a first capacitance electrode and a second capacitance electrode overlapping each other when viewed in a thickness direction of the semiconductor substrate; a second insulating layer that insulates the first capacitance electrode and the second capacitance electrode from each other; When viewed from the thickness direction of the semiconductor substrate, a portion of the first transfer electrode overlaps a portion of the second transfer electrode, the first insulating layer includes a first portion located between the portion of the first transfer electrode and the portion of the second transfer electrode; the second insulating layer includes a second portion located between the first capacitance electrode and the second capacitance electrode; A solid-state imaging device, wherein the thickness of the first portion of the first insulating layer is greater than the thickness of the second portion of the second insulating layer.

2. 2. The solid-state imaging device according to claim 1, wherein the first insulating layer is formed integrally with the second insulating layer.

3. The thickness of the first portion of the first insulating layer is 10 nm or more and 100 nm or less, the second portion of the second insulating layer has a thickness of 5 nm or more and 20 nm or less; 3. The solid-state imaging device according to claim 1, wherein the thickness of the first portion of the first insulating layer is at least twice the thickness of the second portion of the second insulating layer.

4. the first element unit has an amplifier unit that converts the charges transferred by the transfer unit into an analog signal; 4. The solid-state imaging device according to claim 1, wherein the second element portion has a conversion portion that converts the analog signal into a digital signal.

5. 5. The solid-state imaging device according to claim 1, wherein the second element section has a generating section that generates a drive signal for driving the first element section.

6. 6. The solid-state imaging device according to claim 1, wherein an operating voltage of the first element portion is higher than an operating voltage of the second element portion.

7. A method for manufacturing a solid-state imaging device according to any one of claims 1 to 6, comprising: providing the semiconductor substrate; forming the first transfer electrode and the first capacitance electrode on the semiconductor substrate; forming a first layer that will become the first insulating layer at least on the first transfer electrode, and forming a second layer that will become the second insulating layer at least on the first capacitance electrode; forming the first insulating layer and the second insulating layer by adjusting the thickness of at least one of the first layer and the second layer so that the thickness of the portion of the first layer located on the first transfer electrode is larger than the thickness of the portion of the second layer located on the first capacitance electrode; forming the second transfer electrode and the second capacitance electrode on the semiconductor substrate.

8. The method for manufacturing a solid-state imaging device according to claim 7 , wherein in the steps of forming the first layer and forming the second layer, the first layer and the second layer are formed simultaneously and integrally.

9. 9. The method for manufacturing a solid-state imaging device according to claim 7, wherein in the step of forming the first insulating layer and the second insulating layer, the thickness of the portion of the second layer is reduced by performing an etching process on the second layer.

10. 10. A method for manufacturing a solid-state imaging element according to claim 7, wherein in the step of forming the first insulating layer and the second insulating layer, a film formation process is performed on the first layer to increase the thickness of the portion of the first layer.

Images