Plasma cavity arc suppression method, device, and radio frequency power system
The method and device improve arc suppression accuracy in plasma chambers by using reflection coefficient analysis to halt and restore power output, addressing inefficiencies in existing systems.
KR102999491B1Active Publication Date: 2026-08-03SHENZHEN CSL VACUUM SCI & TECH CO LTD
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Patent Information
- Application Number
- KR1020247029932
- Authority / Receiving Office
- KR · KR
- Patent Type
- Patents
- Current Assignee / Owner
- Priority Date
- 2022-05-18
- Filing Date
- 2023-05-17
- Publication Date
- 2026-08-03
- Estimated Expiration
- 2043-05-17
AI Technical Summary
Technical Problem
Existing radio frequency power systems suffer from low accuracy in arc suppression within plasma chambers, leading to reduced product yield and electromagnetic interference, and existing suppression methods are costly and inefficient.
Method used
A method and device that utilize reflection coefficient analysis to accurately detect arcs by comparing instantaneous and average reflection coefficients with a set threshold, freezing system parameters via a state machine to halt power output during arcs, and restoring power output after arc extinction.
Benefits of technology
Achieves high-precision arc suppression by accurately determining arc occurrence and extinction, reducing system complexity and costs while maintaining efficient operation.
✦ Generated by Eureka AI based on patent content.
Abstract
The present application relates to a plasma cavity arc suppression method, apparatus, and radio frequency power system. The method comprises the steps of: obtaining a reflection coefficient within a plasma cavity through arc detection sampling—the reflection coefficient includes an instantaneous reflection coefficient and an average reflection coefficient—; comparing the absolute value of the difference between the instantaneous reflection coefficient and the average reflection coefficient with a set reflection coefficient threshold; if it is determined that an arc has occurred within the plasma cavity based on the comparison result, freezing the operating parameters of the final corresponding reduction node of the radio frequency power system via a state machine, stopping the arc detection sampling, and instructing the control module of the PID controller to cut off the power output of the output terminal docked to the plasma cavity via the control module of the PID controller; and, after the arc within the plasma cavity has disappeared, instructing the control module of the PID controller to restore the power output of the output terminal and restore the arc detection sampling according to the operating parameters. High-precision arc suppression processing within the cavity has been achieved.
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