Semiconductor device

Abstract

A semiconductor device includes a substrate including an active region extending in a first direction, a sheet pattern disposed on the active region, a first gate electrode surrounding the sheet pattern and extending in a second direction, a first source / drain pattern disposed on a first side of the sheet pattern, a second source / drain pattern disposed on a second side of the sheet pattern opposite the first side, a power wiring on a lower surface of the substrate, wherein the power wiring extends in the first direction, and includes a first portion having a first width in the second direction and a second portion having a second width in the second direction that is less than the first width, and a lower wiring disposed below the power wiring, wherein the lower wiring does not overlap with the second portion of the power wiring in a third direction perpendicular to the lower surface of the substrate.