Electrical contact structure, contactor, and electrical connection device

Abstract

An electrical contact structure for an electrical connection device according to the present invention is configured such that, for each contactor (12) accommodated in an accommodation section (17) of a housing part (60), one end has a tip part (121) and the other end has a hook part (123) formed into a fishhook shape that engages with a hooked part (175) inside of the housing part (60), the electrical contact structure having: a first biasing member (41) that supports the lower side of the tip part (121) of the contactor (12); one or a plurality of second biasing members (42) provided between the outer peripheral surface (127) of the hook part (123) of the contactor (12) and the inner wall surface (174) of the housing part (60). When an electrode terminal (82) of an inspection object and the tip part (121) come into contact with each other, the tip part (121) receives a contact load downward such that the entire contactor (12) moves downward, thereby facilitating replacement of the biasing members and ensuring favorable contact properties while reducing the scrubbing amount.

Description

Electrical Contact Structure, Contact, and Electrical Connection Device

[0001] The present invention relates to an electrical contact structure, a contact, and an electrical connection device, and can be applied to an electrical connection device such as an inspection socket used for an energization test of a test object, for example.

[0002] Conventionally, for a packaged semiconductor device (semiconductor device), electrical characteristic inspections called package tests, final tests, etc. are performed. For such inspections, an inspection socket capable of mounting a semiconductor device is used.

[0003] Patent Document 1 discloses an example of an inspection socket. In the inspection socket, a plurality of contacts are housed, and a structure including a rod-shaped elastomer is disclosed in order to simultaneously hold the arranged plurality of contacts and give elasticity to the contacts.

[0004] Japanese Patent Application Laid-Open No. 2009-103563

[0005] By the way, conventional inspection sockets have the following problems.

[0006] When the electrode terminal of a semiconductor device is brought into contact with a contact, if an overdrive is applied, the tip of the contact scrubs the surface of the electrode terminal. Regarding the design of the tip radius of the contact (that is, the R diameter or the arc diameter), the scrub amount and the contact property are in a trade-off relationship, and it is very difficult to achieve both a small scrub amount and good contact property.

[0007] For example, the smaller the tip radius of the contact, the better the contact property between the electrode terminal and the contact tip. However, since the scrub amount required by the customer is very small, the tip radius of the contact has to be increased, and it is difficult to maintain a small scrub amount and good contact property.

[0008] Further, due to the repeated use of the inspection socket, among the contact, the elastomer, and the housing, the life of the elastomer is the shortest and the number of replacements of the elastomer is large. However, since the conventional inspection socket has a structure in which the elastomer cannot be removed unless the contact is removed, the maintenance work load is large and the work time is long.

[0009] Therefore, in view of the above-mentioned problems, the present invention aims to provide an electrical contact structure, a contact, and an electrical connection device that can reduce the amount of scrubbing without changing the shape of the tip of the contact, ensure good contact performance, and facilitate the replacement of the biasing member.

[0010] To solve these problems, the first invention provides an electrical contact structure for an electrical connection device having a housing portion on a substrate having connection wiring to an inspection device, which accommodates an object to be inspected and houses a plurality of contacts that make electrical contact with the electrode terminals of the object to be inspected and the connection wiring, wherein the housing portion comprises a receiving portion that accepts the mounting of the object to be inspected from one side, and a storage portion that houses a plurality of contacts provided on the connection wiring in a space around the receiving portion that is open on the other side, and each contact housed in the storage portion has a tip portion at one end that contacts the electrode terminal, and a hook portion at the other end that is formed in the shape of a fishhook and engages with a hooked portion inside the housing portion, and has a first biasing member that supports the other side of the tip portion of the contact, and one or more second biasing members provided between the outer circumferential surface of the hook portion of the contact and the inner wall surface of the housing portion, wherein when the electrode terminal of the object to be inspected and the tip portion of the contact come into contact, the tip portion receives a contact load on the other side, and the entire contact moves to the other end side while the hook portion engages with the hooked portion.

[0011] The second aspect of the present invention relates to a contact that is housed in a housing provided on a substrate having connection wiring to an inspection device, and which electrically contacts the electrode terminals of an object to be inspected housed in the housing with the connection wiring, wherein one end has a tip that contacts the electrode terminal, and the other end has a hook that is shaped like a fishhook and engages with a hooked portion inside the housing, and when the electrode terminals of the object to be inspected housed in the housing and the tip of the contact come into contact, the tip receives a contact load on the other side, and the hook engages with the hooked portion.

[0012] The third aspect of the present invention is an electrical connection device having a housing portion on a substrate having connection wiring to an inspection device, which houses an object to be inspected and a plurality of contacts that make electrical contact with the electrode terminals and connection wiring of the object to be inspected, characterized in that it has the electrical contact structure of the first aspect of the present invention.

[0013] According to the present invention, the amount of scrubbing can be reduced without changing the shape of the tip of the contactor, good contact performance can be ensured, and the biasing member can be easily replaced.

[0014] This is a configuration diagram showing an electrical contact structure according to an embodiment. This is a perspective view showing the overall configuration of the inspection socket according to an embodiment. This is a plan view of the inspection socket according to an embodiment. This is a cross-sectional view taken along the line A-A in Figure 3. This is a perspective view showing the housing structure of the contactor of the embodiment. This is an explanatory diagram illustrating the amount of scrubbing of the contactor housed in the space of the embodiment. This is an explanatory diagram illustrating the relationship between the sliding part and the slidable part of the contactor of the embodiment. This is a configuration diagram showing an electrical contact structure according to a modified embodiment. This is a configuration diagram showing the configuration of the contactor according to a modified embodiment (part 1). This is a configuration diagram showing the configuration of the contactor according to a modified embodiment (part 2).

[0015] (A) In the following main embodiments, embodiments of the electrical contact structure, contactor and electrical connection device according to the present invention will be described in detail with reference to the drawings.

[0016] In the following, the "electrical connection device" according to the present invention electrically connects a semiconductor testing device (tester) and an object under test when testing the electrical characteristics of the object under test, and includes, for example, a test socket. In this embodiment, an example of application to a test socket is given.

[0017] The "contactor" according to the present invention includes contact pins, probes, etc., housed in an electrical connection device. This embodiment illustrates the case in which the contactor is housed in an inspection socket.

[0018] (A-1) Diagram 2 of the inspection socket configuration is a perspective view showing the overall configuration of the inspection socket according to the embodiment. Figure 3 is a plan view of the inspection socket according to the embodiment, and Figure 4 is a cross-sectional view taken along the line A-A in Figure 3.

[0019] In Figure 2, the test socket 1, which serves as an electrical connection device, comprises a test socket mounting substrate 10 and a housing portion 60 provided on the first surface (e.g., the top surface) of the test socket mounting substrate 10, which houses a semiconductor chip as the object to be tested 8 in its central part and also houses a plurality of contacts 12 inside.

[0020] The test socket 1 is used, for example, when performing electrical testing of semiconductor chips such as IC packages, and is used as a test IC socket or test socket. For example, the test socket 1 is connected to a semiconductor testing device with a semiconductor chip (the object to be tested 8) mounted on it, and is used for package testing, final testing, etc.

[0021] The inspection socket mounting substrate 10 is, for example, a wiring board formed of an electrical insulating material. A wiring pattern made of a conductive metal material is formed on the first surface of the inspection socket mounting substrate 10, for example, by printed wiring technology. The housing portion 60 is fixed to the first surface of the inspection socket mounting substrate 10 on which the wiring pattern is formed.

[0022] The wiring pattern on the first surface of the inspection socket mounting substrate 10 includes a first wiring pattern 11 that connects to a plurality of contacts 12 and a second wiring pattern 16 that connects to the GND contact portion 2.

[0023] The first wiring pattern 11 is a strip-shaped wiring pattern formed at a position corresponding to the position of the contact 12, extending to the outside of the housing portion 60 and connecting to a wiring pattern that connects to the inspection device side. In the example shown in Figure 3, three first wiring patterns 11 are arranged at predetermined intervals from each side of the housing portion 60.

[0024] The second wiring pattern 16 is a pattern formed at a position corresponding to the location of the GND contact portion 2 that electrically contacts the GND terminal 81 of the object under test 8, and is connected to a wiring pattern that connects to the GND side. In the example in Figure 3, a case is illustrated in which one second wiring pattern 16 extends to the outside from one side of the housing portion 60.

[0025] The housing portion 60 is made of an insulating material and has an opening (hereinafter also referred to as the "housing portion") 14 in its center that allows the object to be inspected 8 to be attached and detached. That is, the housing portion 60 comprises an opening (housing portion) 14 that accepts the attachment of the object to be inspected 8 from one side (the upper side in Figure 3), and a storage portion which is a space 17 surrounding the opening (housing portion) 14 and open on the other side (the lower side in Figure 3), and which houses a plurality of contacts 12 provided on the first wiring pattern 11.

[0026] When the object to be inspected 8 is attached to the housing portion 60, the object to be inspected 8 is pushed into the opening 14, and the object to be inspected 8 is fixed and held in the recess at the bottom of the opening 14.

[0027] The housing portion 60 has a rectangular opening 14 surrounded by a space 17 inside, and multiple contacts 12 are housed in this space 17. Multiple contacts 12 are arranged in the space 17 surrounding the opening 14, and a first biasing member 41 and a second biasing member 42 are provided to prevent the contacts 12 from coming off and to provide elasticity. Details of the structure of the contacts 12 and the housing structure that houses the contacts 12 will be described later.

[0028] The example in Figure 3 shows a case where three contacts 12 are housed on each of the four sides of an opening 14 that has a square or rectangular shape in plan view, but the structure is not limited to that shown in Figure 3. The number and position of the contacts 12 can be designed to correspond to the number and position of the electrode terminals 82 of the object under inspection 8.

[0029] The opening 14 has a rectangular shape (square or rectangle) in plan view, and the area around the opening is tapered (the diameter decreases from the top to the bottom). Furthermore, the bottom of the opening 14 is a recess surrounded by a vertical wall connected to the tapered surface 14a, for mounting the object to be inspected 8. In this way, the tapered surface 14a makes it easy to attach and detach the object to be inspected 8, and the recess at the bottom ensures that the object to be inspected 8 is securely fixed and held in place.

[0030] The bottom surface of the opening 14 has a hole 18 for housing the GND contact portion 2. The GND contact portion 2 housed in the hole 18 is connected to the second wiring pattern 16 of the inspection socket mounting substrate 10.

[0031] The contactor 12 connects to the first wiring pattern 11 on the inspection socket mounting substrate 10 and also makes electrical contact with the electrode terminals 82 of the object under test 8 mounted in the opening 14. This enables electrical conductivity between the semiconductor inspection device and the object under test 8 via the contactor 12, making electrical inspection possible.

[0032] (A-2) Contact, Housing, and Electrical Contact Structure Figure 1 is a configuration diagram showing the electrical contact structure according to the embodiment. Figure 5 is a perspective view showing the housing structure of the contact according to the embodiment.

[0033] In Figures 1 and 5, the electrical contact structure according to the embodiment includes a housing structure formed in the space 17 of the housing portion 60, a contact element 12 provided in the space 17, and a first biasing member 41 and a second biasing member 42 in the space 17.

[0034] In Figure 5, the housing structure for the contactor 12 is formed in the space 17 of the housing portion 60. The space 17 houses the same number of contactors 12 as the number of electrode terminals 82 of the object to be inspected 8. In order to bring the electrode terminals 82 of the object to be inspected 8 into contact with the tip portions 121 of the contactor 12 when the object to be inspected 8 is mounted, the housing portion 60 is provided with slits 19 that allow the tip portions 121 of the contactor 12 housed in the space 17 to protrude.

[0035] The slits 19 are provided at positions corresponding to the positions of the electrode terminals 82 of the object under inspection 8. The number of slits 19 is the same as the number of electrode terminals 82 (i.e., the number of contacts 12). The opening shape of the slits 19 in plan view is approximately rectangular, but the opening shape in plan view is not limited as long as the tip portion 121 of the contact 12 can protrude.

[0036] On the surface of the housing portion 60, the slits 19 are spaced apart from adjacent slits 19. In other words, there is a partition between two adjacent slits 19. On the other hand, the inside of the housing portion 60 is an open space along one side of the rectangular opening 14. In the space 17 inside the housing portion 60, a plurality of contacts 12 are arranged, and the first biasing member 41 and the second biasing member 42 are configured to press down on the plurality of contacts 12 simultaneously.

[0037] In Figure 1, the contact element 12 is a plate-shaped member formed of a conductive material such as metal. The contact element 12 has an elongated shape in the longitudinal direction (left-right direction in Figure 1). Here, the contact element 12, which is housed in the space 17, contacts the first biasing member 41 at one end in the longitudinal direction (left side in Figure 1) and the second biasing member 42 at the other end (right side in Figure 1), thereby preventing detachment and providing elasticity during contact.

[0038] The contactor 12 has a tip portion 121 that contacts the electrode terminal 82 of the object to be inspected 8, a sliding portion 122 that slides against the sliding portion 172 which is the inner wall surface when in contact, a hook portion 123 having a hook tip portion 128 and a second biasing receiving portion 127, a height fixing portion 124 that restricts the height of the tip portion 121 that protrudes from the slit 19 when in contact, a wiring contact portion 125 that contacts the first wiring pattern 11 on the inspection socket mounting substrate 10, and a first biasing receiving portion 126.

[0039] On the other hand, the structure of the space 17 housing the contactor 12 will be described. The space 17 has a slit opening 170 which is the opening of the slit 19, a wiring-side opening 171, a sliding portion 172 which is the inner wall of the space 17, a first biasing support portion 173, a second biasing support portion 174, a hooked portion 175 which is a member with a substantially L-shape in side view, and a fixed support portion 176.

[0040] The first biasing member 41 and the second biasing member 42 are each rod-shaped elastic members formed from a synthetic resin such as elastomer or synthetic rubber. The cross-section is not limited to a circle, but may be elliptical, square, rectangular, etc. The first biasing member 41, a single rod-shaped member, is provided to hold down a plurality of contacts 12 housed in the space 17, preventing the plurality of contacts 12 from coming off simultaneously and giving the contacts 12 elasticity. The second biasing member 42 is similar.

[0041] The first biasing member 41 is located on the tip portion 121 side of the contactor 12 and is provided in contact with the first biasing receiving portion 126 on the lower side of the contactor 12 (i.e., the first wiring pattern 11 side). As a result, when the object to be inspected 8 is mounted, the tip portion 121 receives a pressing load from above to below (i.e., from the electrode terminal 82 side of the object to be inspected 8 towards the first wiring pattern 11 side), and a reaction force (elastic force) is applied from below to above (i.e., from the first wiring pattern 11 side towards the electrode terminal 82 side of the object to be inspected 8), thereby maintaining stable contact.

[0042] The second biasing member 42 is located on the hook portion 123 side of the contactor 12 and is provided to contact the second biasing support portion 174, which is the inner wall surface of the space 17, and the second biasing receiving portion 127 of the hook portion 123. In this way, the second biasing member 42 applies force to the hook portion 123, preventing the contactor 12 from coming loose and ensuring that the contactor 12 makes contact with the first wiring pattern 11.

[0043] For the sake of explanation, the tip portion 121 side of the contact element 12 in the longitudinal direction will be called the "front end," the hook portion 123 side will be called the "rear end," the first biasing member 41 will be called the "front biasing member," and the second biasing member 42 will be called the "rear biasing member."

[0044] The hook portion 123 is formed in a fishing hook shape that is substantially J-shaped in side view, and is locked to the hooked portion 175 formed in a substantially L-shape within the space 17. The tip portion 121 of the contact 12 is located on the side of the slit opening 170. Also, the first biasing member 41 is provided below the tip portion 121 of the contact 12, and the second biasing member 42 is provided sandwiched between the outer surface of the hook portion 123 of the contact 12 and the inner wall surface of the space 17 (the second biasing support portion 174). Further, the wiring contact portion 125 of the contact 12 is on the first wiring pattern 11.

[0045] Before the test object 8 is mounted and before over-driving, the first biasing member 41 is supported by the first biasing support portion 173 provided on the lower surface side of the space 17, and is in contact with the first biasing receiving portion 126 of the contact 12 which is slightly curved. By being supported by the first biasing support portion 173, the first biasing member 41 causes the tip portion 121 to project from the slit opening 191.

[0046] At this time, the height fixing portion 124 which is the shoulder of the tip portion 121 of the contact 12 is supported by the fixing support portion 176 which is the ceiling surface within the space 17, and since the hook portion 123 is hooked on the hooked portion 175, the height of the tip portion 121 protruding from the slit 19 can be adjusted. Also, the contact 12 can be prevented from coming off.

[0047] Also, the sliding portion 122 of the contact 12 is in contact with the slidable portion 172 which is the inner wall surface of the space 17. Here, the slidable portion 172 can be a wall surface perpendicular to the first wiring pattern 11, and by making the sliding portion 122 a flat surface, the sliding portion 122 and the slidable portion 172 are in surface contact with each other.

[0048] Further, the second biasing member 42 such as an elastomer is provided sandwiched between the hook portion 123 of the contact 12 and the second biasing support portion 174. The hook portion 123 is applied with a force from the second biasing member 42 supported by the second biasing support portion 174, and the hook tip portion 128 of the hook portion 123 is in a state of contacting the vertical surface of the substantially L-shaped hooked portion 175.

[0049] In this way, at the rear end of the contact element 12, force is applied to the hook portion 123 from the second biasing member 42, causing the hook portion 123 and the hooked portion 175 to tightly engage. On the other hand, at the front end of the contact element 12, the sliding portion 122 and the sliding portion 172 are in surface contact, thus maintaining a stable position for the contact element 12. Furthermore, it is possible to prevent the contact element 12 from coming off.

[0050] Next, we will explain the state of the contactor 12 when the object to be inspected 8 is overdriven after being mounted on the inspection socket 1.

[0051] In Figure 1, during overdrive, the electrode terminals 82 of the object under inspection 8 come into contact with the tip portion 121 protruding from the slit 19, causing the tip portion 121 to be pushed downward. As a result, the contact element 12 moves downward, and the first biasing member 41 undergoes elastic deformation due to the pushing load.

[0052] At this time, the tip portion 121 of the contact element 12 is pushed downward, which releases the contact between the height fixing portion 124 and the fixing support portion 176, and at the rear end of the contact element 12, the contact between the hook tip portion 128 and the hooked portion 175 is released.

[0053] Furthermore, at the rear end of the contact element 12, the hook portion 123 is hooked onto the hooked portion 175, so at the front end of the contact element 12, the sliding portion 122 of the contact element 12 slides downward over the hooked portion 172, drawing an arc around the hook portion 123 that is hooked onto the hooked portion 175.

[0054] As the tip 121 of the contactor 12 moves in an arc around the hook portion 123, the boundary point 122a between the tip 121 and the sliding portion 122 comes into contact with the sliding portion 172, causing the entire contactor 12 to be pushed toward the rear end (towards the second biasing member 42). In other words, the entire contactor 12 is pushed toward the rear end. This boundary point 122a is also called the "sliding projection."

[0055] Furthermore, although the entire contact element 12 is pushed towards the rear end, the support between the second biasing member 42 and the second biasing support part 174 becomes stronger, which prevents the contact element 12 from coming loose.

[0056] Here, before overdrive, the wiring contact portion 125 is in contact with the first wiring pattern 11 on the inspection socket mounting board 10. Furthermore, after overdrive, the entire contact 12 is pushed towards the rear end and receives force from the second biasing member 42, so the wiring contact portion 125 makes stronger contact with the first wiring pattern 11.

[0057] The above points will be explained using Figure 6. Figure 6 is an explanatory diagram illustrating the scrub amount, overdrive amount, and biasing force in the contactor 12 of the embodiment.

[0058] As illustrated in Figure 6, after the object to be inspected 8 is attached, the entire contact element 12 is pushed towards the rear end, causing the second biasing member 42 to be strongly pressed against the second biasing support part 174, and the second biasing member 42 to deform significantly.

[0059] As a result, the biasing force of the second biasing member 42 also increases, but as shown in Figure 6, the biasing force F1 on the contactor 12 acts toward the wiring contact portion 125 that is in contact with the first wiring pattern 11. Therefore, the wiring contact portion 125 comes into stronger contact with the first wiring pattern 11.

[0060] Next, the amount of scrubbing of the contactor 12 housed in the space 17 of the embodiment will be explained with reference to Figure 6.

[0061] As illustrated in Figure 6, when the object to be inspected 8 is attached and the tip 121 of the contactor 12 is pressed in, and overdrive (OD) is applied, the tip 121 slides against the electrode terminal 82.

[0062] Figure 6 shows the scrub amount S when the OD value is overdriven. In this embodiment, when the tip portion 121 moves downward due to the pressing load, the sliding portion 122 slides downward, and when the boundary point 122a comes into contact with the sliding portion 172, the entire contactor 12 is pushed toward the rear end, so the position of the tip portion 121 can be moved toward the rear end, and the scrub amount can be reduced.

[0063] Here, the biasing force F2 of the first biasing member 41 on the contact 12 acts toward the tip portion 121 of the contact 12, so that good contact between the electrode terminal 82 of the object to be inspected 8 and the tip portion 121 can be achieved.

[0064] In other words, conventionally, in order to ensure contact, it was necessary to increase the tip radius (R diameter) of the tip portion 121. However, increasing the tip radius (R diameter) of the tip portion 121 increases the amount of scrubbing, making it difficult to achieve a small amount of scrubbing while ensuring contact.

[0065] In contrast, the housing structure of this embodiment comprises a contact element 12, a first biasing member 41, and a second biasing member 42. The contact element 12 has a hook portion 123 formed in the shape of a roughly J-shaped fishhook, and the second biasing member 42 is located between the outer surface of the hook portion 123 and the inner wall surface of the second biasing support portion 174. During overdrive, the boundary point 122a of the sliding portion 112 pushes the entire contact element 12 toward the rear end. As a result, the amount of scrubbing can be reduced while maintaining good contact performance.

[0066] Figure 7 is an explanatory diagram illustrating the relationship between the sliding portion 122 and the sliding portion 172 of the contactor 12 in the embodiment.

[0067] In Figure 7, if the angle between the sliding part 172 and the sliding part 122 before overdrive is θ, the larger the angle θ, the greater the contact element 12 can be moved to the rear end, and the amount of scrubbing can be reduced. Also, the larger the angle θ, the smaller the tip radius (R diameter) of the tip part 121 can be, and the better the contact performance can be. In other words, the larger the angle θ, the smaller the amount of scrubbing can be and the better the contact performance can be.

[0068] Conversely, the smaller the angle θ, the smaller the movement of the contact element 12 to the rear end, and the larger the scrubbing amount. Also, the larger the angle θ, the larger the tip radius (R diameter) of the tip portion 121 can be.

[0069] In this way, by adjusting the angle between the sliding portion 122 and the sliding portion 172 of the contact element 12, the amount of scrubbing and the contact between the electrode terminal 82 and the contact element 12 can be adjusted.

[0070] Furthermore, the boundary point 122a between the sliding portion 122 and the tip portion 121 can be adjusted to increase the angle θ by slightly curving the sliding portion 122. In other words, by appropriately designing the degree of curvature of the sliding portion 122, the angle θ at the boundary point 122a can be adjusted, and as a result, the amount of scrubbing and the degree of contact can be adjusted.

[0071] (A-3) Method for replacing the first biasing member and the second biasing member Next, the method for replacing the first biasing member 41 and the second biasing member 42 will be explained with reference to Figure 6.

[0072] First, when removing the first biasing member 41 and the second biasing member 42, the wiring-side opening 171 of the space 17 is open, so the first biasing member 41 is removed from the wiring-side opening 171. Then, with the contact 12 moved to the front end, the second biasing member 42 is removed from the wiring-side opening 171.

[0073] In this way, since the hook portion 123, which is roughly J-shaped like a fishhook, is supported so as to catch on the hooked portion 175, the first biasing member 41 and the second biasing member 42 can be removed without removing the housing contact 12.

[0074] Next, when attaching the first biasing member 41 and the second biasing member 42, the second biasing member 42 is inserted through the wiring-side opening 171 and mounted between the outer surface of the hook portion 123 of the contact 12 and the second biasing support portion 174. Then, after moving the contact 12 to the rear end, the first biasing member 41 is inserted through the wiring-side opening 171 and mounted below the first biasing receiving portion 126 of the contact 12.

[0075] In this way, the hook portion 123, which has a roughly J-shaped fishhook shape, is supported so as to catch on the hooked portion 175, so that the first biasing member 41 and the second biasing member 42 can be attached without removing the contact 12.

[0076] (A-4) Effects of the Embodiment As described above, according to this embodiment, a first biasing member 41 is provided on the lower side of the tip portion 121 of the contact element 12, and a second biasing member 42 is provided on the outer surface side of the hook portion 123 of the contact element 12. When overdrive occurs, the sliding portion 122 slides, and the contact element 12 is moved toward the rear end at the boundary point 122a between the sliding portion 122 and the tip portion 121. This makes it possible to reduce the amount of scrubbing without changing the tip shape of the tip portion 121, and to ensure good contact performance.

[0077] Furthermore, according to this embodiment, since the hook portion 123, which has a roughly J-shaped fishhook shape, is supported so as to catch on the hooked portion 175, the first biasing member 41 and the second biasing member 42 can be attached and detached without removing the contactor 12.

[0078] (B) Other Embodiments Although various modified embodiments have been mentioned in the embodiments described above, the present invention can also be applied to the following modified embodiments.

[0079] (B-1) Figure 8 is a configuration diagram showing an electrical contact structure according to a modified embodiment.

[0080] The electrical contact structure in Figure 8 illustrates a case where multiple (for example, two in Figure 8) second biasing members 42-1 and 42-2 are provided. In this example, two second biasing members 42-1 and 42-2, made of elastomer, are arranged in series toward the rear end of the contactor 12. For example, if the amount of contactor 12 bites into one elastomer is 30%, increasing the number of elastomers to two can reduce the total bite to 15%. Note that three or more second biasing members 42 can be arranged in series toward the rear end; for example, when three elastomers are arranged in series in the above example, the total bite can be reduced to 10%. In this way, by reducing the bite of one second biasing member 42 (elastomer), the lifespan of the second biasing member 42 can be extended. In other words, the frequency of replacement can be reduced.

[0081] (B-2) Figure 9 is a configuration diagram showing the configuration of the contactor in a modified embodiment.

[0082] Figures 9(A), 9(B), and 9(C) show modified examples of the hook portion 123, which is the rear end of the contact element 12. Except for the configuration of the rear end of the contact element 12, the modifications are basically the same as those described above.

[0083] In Figure 9(A), the contact element 12A has a second biasing receiving portion 127A of the hook portion 123 that is curved to match the outer shape of the second biasing member 42. This makes the engagement between the contact element 12A and the second biasing member 42 stronger at the rear end of the contact element 12A. Because the engagement with the second biasing member 42 is strong, when overdriven, the downward sliding of the sliding portion 122 and the pushing of the boundary point 122a toward the rear end can firmly move the entire contact element 12 toward the rear end. In addition, because the engagement is strong, the contact element 12 can not be prevented from falling off.

[0084] In Figure 9(B), the contact element 12B has an arc shape in a side view of the second biasing receiving portion 127B of the hook portion 123. Also, in Figure 9(C), the second biasing receiving portion 127C of the contact element 12C has a straight outer shape and is not curved in a side view. In Figure 1, the second biasing receiving portion 127 is slightly curved to adjust the engagement with the second biasing member 42, but the second biasing receiving portion 127B may be an arc shape as in Figure 9(B), or the second biasing receiving portion 127C may be straight as in Figure 9(C). In these cases as well, the same effect can be obtained as long as the second biasing member 42 can support the rear end of the contact element 12.

[0085] (B-3) Figure 10 is a configuration diagram showing the configuration of the contactor in a modified embodiment.

[0086] Figures 10(A) and 10(B) show modified examples of the sliding portion 122 and tip portion 121, which are the front ends of the contact element 12. Except for the configuration of the front end of the contact element 12, the modifications are basically the same as those of the embodiments described above.

[0087] In Figure 10(A), the contact element 12D has a reduced width in the side view of the sliding portion 122D, leaving a portion where the sliding portion 122D slides against the slidable portion 172, i.e., the boundary point 122a as a sliding projection. Even with this configuration, during overdrive, the boundary point 122a of the sliding projection slides downward, and the entire contact element 12D can be moved towards the rear end. Note that by reducing the width in the side view of the sliding portion 122D, the contact portion of the first biasing receiving portion 126D with the first biasing member 41 is reduced (the contact area is reduced), but as long as they are supported by each other, the same effect as in the embodiment described above can be obtained.

[0088] In Figure 10(B), the contact element 12E has an outer surface of the sliding portion 122E that slides against the sliding portion 172, which is arc-shaped when viewed from the side. In Figure 1, the sliding portion 122 is a plane parallel to the sliding portion 172, but as in Figure 10(B), the same effect as in the embodiment described above can be obtained by giving the outer surface of the sliding portion 122E a curve.

[0089] 1: Inspection socket, 2: GND contact part, 8: Object to be inspected, 10: Base plate for mounting inspection socket, 11: First wiring pattern, 12, 12A, 12B, 12C, 12D, 12E: Contacts, 14: Opening, 14a: Tapered surface, 16: Second wiring pattern, 17: Space, 18: Hole, 19: Slit, 41: First biasing member, 42 (42-1, 42-2): Second biasing member, 60: Housing part, 81: GND terminal, 82: Electrode terminal, 112: Sliding part, 121: Tip Part, 122 (122D, 122E): sliding part, 122a: boundary point, 123: hook part, 124: height fixing part, 125: wiring contact part, 126, 126D: first biasing receiving part, 127, 127A, 127B, 127C: second biasing receiving part, 128: hook tip part, 170: slit opening, 171: wiring side opening, 172: sliding part, 173: first biasing support part, 174: second biasing support part, 175: hooked part, 176: fixed support part, 191: slit opening.

Claims

1. An electrical contact structure for an electrical connection device having a housing portion on a circuit board having connection wiring to an inspection device, which accommodates an object to be inspected and houses a plurality of contacts that make electrical contact with the electrode terminals of the object to be inspected and the connection wiring, wherein the housing portion comprises a receiving portion that accepts the mounting of the object to be inspected from one side, and a storage portion that houses a plurality of contacts provided on the connection wiring in a space around the receiving portion that is open on the other side, and each of the contacts housed in the storage portion has a tip portion at one end that contacts the electrode terminal, and a hook portion at the other end that is formed in the shape of a fishhook and engages with a hooked portion in the housing portion, and has a first biasing member that supports the other side of the tip portion of the contact, and one or more second biasing members provided between the outer peripheral surface of the hook portion of the contact and the inner wall surface of the housing portion, An electrical contact structure characterized in that when the electrode terminals of the object to be inspected and the tip of the contactor come into contact, the tip receives a contact load on the other side, and the entire contactor moves to the other end side while the hook portion engages with the hooked portion.

2. The electrical contact structure according to claim 1, wherein the contactor has a sliding portion at one end that is continuous with the tip portion and slides against the sliding portion which is the inner wall surface of the housing portion, and when the tip portion receives a contact load on the other side and the sliding projection at the boundary between the tip portion and the sliding portion comes into contact with the sliding portion, the sliding projection pushes the entire contactor toward the other end.

3. The electrical contact structure according to claim 1, characterized in that the tip receives a contact load on the other side, and the contact moves to the other end side, thereby adjusting the amount of slippage of the tip with respect to the surface of the electrode terminal to be small.

4. The electrical contact structure according to claim 1, characterized in that the hook portion of the contactor has a second biasing support portion that supports one of the second biasing members among the one or more second biasing members.

5. The electrical contact structure according to claim 4, characterized in that the second biasing support portion of the hook-shaped hook portion is straight, arc-shaped, or curved to match the outer shape of the second biasing member.

6. A contact that is housed in a housing provided on a circuit board having connection wiring to an inspection device, and which electrically contacts the electrode terminals of an object to be inspected housed in the housing with the connection wiring, wherein one end has a tip that contacts the electrode terminals, and the other end has a hook that is shaped like a fishhook and engages with a hooked portion inside the housing, and when the electrode terminals of the object to be inspected housed therein and the tip of the contact make contact, the tip receives a contact load on the other side, and the hook engages with the hooked portion.

7. An electrical connection device having a housing portion on a circuit board having connection wiring to an inspection device, which houses an object to be inspected and a plurality of contacts that make electrical contact with the electrode terminals of the object to be inspected and the connection wiring, characterized in that it has the electrical contact structure described in any one of claims 1 to 6.

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