Reset compensation type three-optical-axis linear displacement laser interferometer calibration method and device

A technology of laser interferometer and laser interference, which is applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of large Abbe error, unequal optical path, and inconsistent influence, etc., and achieve the effect of small Abbe error

CN103499280BActive Publication Date: 2015-04-22HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2015-04-22

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Abstract

The invention provides a reset compensation type three-optical-axis linear displacement laser interferometer calibration method and a reset compensation type three-optical-axis linear displacement laser interferometer calibration device, and belongs to the laser measurement technology. A measuring light beam of a laser interferometer to be calibrated passes through a middle through hole of a three-axis hollow laser interference mirror group, and is parallelly arranged in the center position of three parallel standard measuring light beams distributed in a regular triangular prism side edge form, the vertical distance from the standard measuring light beams to the measuring light beam of the laser interferometer to be calibrated is very small, the air refractive index average value of the three standard measuring light beams is approximate to the air refractive index value of the measuring light beam of the laser interferometer to be calibrated, three light beam position detectors respectively measure the derivative displacement of the three standard measuring light beams relative to a target reflecting mirror in a plane vertical to the standard measuring light beams in any two-dimensional directions, a micro inching device measures the derivative displacement average value according to the three light beam position detectors, the real-time reset compensation is carried out on the derivative displacement of the target reflecting mirror, and the incidence position of the measuring light beams on the reflecting surface of the target reflecting mirror is enabled not to be changed.
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Description

technical field

[0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique

[0002] Laser interferometry linear displacement technology is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronics equipment, nanotechnology industrial equipment and national defense equipment. In order to ensure the accuracy of laser interferometer measurement of linear displacement , requires a scientific and effective linear displacement laser interferometer calibration method and device. The general idea of ​​calibrating a linear displacement laser interferometer is to use a linear displacement laser interferometer with a higher level of precision for calibration. When the accuracy of the two is similar, it is called comparison. In the actual calibration work, most of the linear displacement laser interfe...

Examples

Embodiment Construction

[0027] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0028] A return compensation type three-axis axis displacement laser interferometer calibration device, including a standard laser interferometer laser 1, three receivers 7, 8, 9 arranged at positions that can receive the interference signal of the standard laser interferometer, and wires connecting the three The receivers 7, 8, and 9 are respectively connected to the standard laser interferometer signal processing system 10; on the output optical path of the standard laser interferometer laser 1, there are three through-holes 14 that allow the calibrated laser interferometer measurement beam 13 to pass through. Axis hollow standard laser interference mirror group 2; three-axis hollow standard laser interference mirror group 2 is equipped with a guide rail 20 on one side, the moving table 19 is fitted on the guide rail 20, and a fla...