Carrier transfer capsule

Abstract

The present application provides a carrier transfer cabin, comprising a housing, a carrier structure and a plurality of static electricity dissipating elements. The housing defines an accommodation space. The carrier structure is located in the accommodation space. The carrier structure comprises a first set of carrier racks, which comprises a plurality of first carrier units and a plurality of first support units, wherein one of the first support units is carried by at least one first carrier unit. The first carrier units and the first support units are respectively located on two sides of the accommodation space to carry carriers. The static electricity dissipating elements are electrically connected to the first carrier units to dissipate static electricity of the carrier structure.

Description

Technical Field

[0001] This invention relates to a carrier transport cabin, and more particularly to a transport cabin for transporting large-sized carriers. Background Technology

[0002] When transporting semiconductor wafers (hereinafter referred to as "wafers"), they are typically housed in sealed containers to prevent dust and debris from adhering to them. Front-opening unified pods (FOUPs) as specified by the Semiconductor Equipment and Materials International (SEMI) are generally used for wafer transport. Currently, for large-sized, thin rectangular wafers (e.g., 600mm x 600mm and above), the industry has not developed storage or transfer chambers, but instead relies on manual handling and transfer of the products (i.e., "wafers"). However, manual handling during transport can easily lead to abnormally low wafer yields. Summary of the Invention

[0003] According to one aspect, in some embodiments, a carrier transport chamber includes at least a shell, a support structure, and a plurality of static dissipation elements. The shell defines a receiving space. The support structure is located within the receiving space. The support structure includes a first set of support frames having a plurality of first support units and a plurality of first support units, wherein one first support unit is supported by at least one first support unit. The first support units and the first support units are respectively located on opposite sides of the receiving space for carrying a carrier. The static dissipation elements are electrically connected to the first support units to dissipate static electricity from the support structure.

[0004] According to another aspect, in some embodiments, a carrier transport cabin includes at least a shell and a support structure. The shell defines a receiving space. The support structure is located within the receiving space. The support structure includes a first set of support frames and an auxiliary support frame. The first set of support frames has a plurality of first support units and a plurality of first support units. One of the first support units is supported by at least one first support unit. The first support units and the first support units are respectively located on both sides of the receiving space for carrying a carrier. The auxiliary support frame is arranged parallel to the middle of the first set of support frames. The auxiliary support frame has auxiliary support units for assisting in carrying the carrier. Attached Figure Description

[0005] Some aspects of embodiments of the invention will become readily apparent from the following detailed description when read in conjunction with the accompanying drawings. It should be noted that the various structures may not be drawn to scale, and the dimensions of the various structures may be arbitrarily increased or decreased for clarity of explanation.

[0006] Figure 1 This diagram shows a perspective view of a carrier transport chamber according to some embodiments of the present invention.

[0007] Figure 2 show Figure 1 The diagram shows a three-dimensional exploded view of the carrier transport cabin.

[0008] Figure 3 show Figure 2 The diagram shows a partially enlarged and exploded view of the carrier transport cabin.

[0009] Figure 4 show Figure 2 The diagram shows a partial assembly of the carrier transport cabin, omitting the shell and static dissipation components.

[0010] Figure 5 show Figure 4 The diagram shown is a bottom-view perspective of a partial assembly of the carrier transport cabin, with the main frame omitted.

[0011] Figure 6 show Figure 5 The diagram shows a partial assembly of the carrier transport cabin, with the electrostatic dissipation element attached.

[0012] Figure 7 show Figure 1 The diagram shows a top view of the carrier transfer chamber in use, omitting the top cover and showing the carrier placed inside the carrier transfer chamber.

[0013] Figure 8 show Figure 1 The diagram shows a front view of the carrier transfer chamber in use, omitting the front cover portion, and the carrier is placed in the carrier transfer chamber.

[0014] Figure 9 show Figure 1 The diagram shows a side view of the carrier transfer chamber in use, omitting the right side cover portion, and the carrier is placed inside the carrier transfer chamber.

[0015] Figure 10 Showing a front-view stereoscopic diagram of the loading port.

[0016] Figure 11 show Figure 6 The diagram shows the electrostatic dissipation path of the carrier transport cabin.

[0017] Figure 12 This diagram shows an exploded perspective view of a carrier transport compartment according to some embodiments of the present invention.

[0018] Figure 13 show Figure 12 The diagram shows a partially enlarged and exploded view of the carrier transport cabin.

[0019] Figure 14 show Figure 12 The diagram shows a top view of the carrier transfer chamber in use, omitting the top cover and showing the carrier placed inside the carrier transfer chamber.

[0020] Figure 15 show Figure 12 The diagram shows a side view of the carrier transfer chamber in use, omitting the right side cover portion, and the carrier is placed inside the carrier transfer chamber.

[0021] Figure 16 This diagram shows an exploded perspective view of a carrier transport compartment according to some embodiments of the present invention.

[0022] Figure 17 show Figure 16 A partially enlarged schematic diagram of the carrier transport cabin.

[0023] Figure 18 show Figure 16 The diagram shows a front view of the carrier transfer chamber in use, omitting the front cover portion, and the carrier is placed in the carrier transfer chamber.

[0024] Figure 19 show Figure 16 The diagram shows a side view of the carrier transfer chamber in use, omitting the right side cover portion, and the carrier is placed inside the carrier transfer chamber. Detailed Implementation

[0025] Common reference numerals are used throughout the drawings and embodiments to indicate the same or similar components. Embodiments of the invention will be more readily understood from the following detailed description taken in conjunction with the accompanying drawings.

[0026] The following disclosure provides numerous different embodiments or instances for implementing various features of the provided subject matter. Specific examples of components and arrangements are described below to illustrate specific aspects of the invention. Of course, these components, values, operations, materials, and arrangements are merely examples and are not intended to be limiting. For example, in the description provided herein, the formation of a first feature over or on a second feature may include embodiments where the first and second features are formed or disposed in direct contact, and may also include embodiments where additional features may be formed or disposed between the first and second features such that the first and second features are not in direct contact. Furthermore, reference numerals and / or letters may be repeated in the various instances provided herein. This repetition is for simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations discussed.

[0027] In the semiconductor industry, when carrier (e.g., "wafer") sizes increase to 600mm x 600mm or larger, current front-opening wafer cassettes (FOUPs) are insufficient to support them. Even with larger FOUPs, their plastic material still limits their load-bearing capacity. Currently, carriers (e.g., "wafers") are handled manually. However, manual handling easily leads to electrostatic discharge (ESD) on the carriers (e.g., "wafers"), causing abnormally low yields. This is because static electricity is easily generated and remains in the carriers (e.g., "wafers"), handling workers, and the cassette during manufacturing and handling. If the carriers (e.g., "wafers") come into contact with each other, or with statically charged handling workers or the cassette, they can be damaged by ESD, resulting in reduced yields.

[0028] The present invention provides a transport chamber capable of carrying and transporting large-sized carriers (e.g., “wafers”). In some embodiments, the transport chamber further includes an electrostatic dissipation element to dissipate static electricity from the carrier (e.g., “wafers”) and / or the transport chamber.

[0029] Figure 1 This diagram shows a perspective view of a carrier transport chamber 1 according to some embodiments of the present invention. Figure 2 show Figure 1 The exploded three-dimensional diagram of the carrier transport cabin 1 shown in the figure. Figure 3 show Figure 2 The diagram shows a partially enlarged exploded view of the carrier transport cabin 1. Figure 4 show Figure 2The diagram shows a partial assembly of the carrier transfer chamber 1, omitting the shell 2 and the static dissipation element 4. The carrier transfer chamber 1 includes at least a main frame 10, a shell 2, a load-bearing structure 3, multiple static dissipation elements 4, and a base frame 5.

[0030] like Figure 1 , Figure 2 and Figure 4 As shown, the main frame 10 is the primary support structure of the carrier transfer chamber 1, forming the cubic or cuboid shape of the carrier transfer chamber 1. In an embodiment, the main frame 10 includes 12 (or fewer or more than 12) frame strips 11, which are generally located on the 12 sides of the cubic or cuboid shape to provide structural strength for the carrier transfer chamber 1. Each frame strip 11 is generally a rectangular strip or rectangular column, and its material may include metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)) or non-metal (e.g., plastic). The frame strips 11 are connected to each other to form the skeleton of the carrier transfer chamber 1. That is, four frame strips 11 can define an opening.

[0031] like Figure 1 and Figure 2As shown, the housing 2 is connected to or attached to the main frame 10 to define the receiving space 27. In an embodiment, the housing 2 includes an upper cover portion 21, a lower cover portion 22, a left cover portion 23, a right cover portion 24, a rear cover portion 25, and a front cover portion 26 to define the receiving space 27. In an embodiment, the upper cover portion 21, the lower cover portion 22, the left cover portion 23, the right cover portion 24, the rear cover portion 25, and the front cover portion 26 cover the main frame 10. That is, the upper cover portion 21, the lower cover portion 22, the left cover portion 23, the right cover portion 24, the rear cover portion 25, and the front cover portion 26 may be in contact with or connected to each other. However, in other embodiments, the upper cover portion 21, the lower cover portion 22, the left cover portion 23, the right cover portion 24, the rear cover portion 25, and the front cover portion 26 may be located in an opening defined by the frame strip 11. That is, the upper cover portion 21, the lower cover portion 22, the left cover portion 23, the right cover portion 24, the rear cover portion 25, and the front cover portion 26 may not contact each other, but only contact or connect to the frame strip 11. Furthermore, the upper cover portion 21, the lower cover portion 22, the left cover portion 23, the right cover portion 24, the rear cover portion 25, and the front cover portion 26 are generally rectangular plates, and their materials may include metals (e.g., aluminum, aluminum alloy, or steel (stainless steel)) or non-metals (e.g., plastic). In other words, the material of the housing 2 may include metals (e.g., aluminum, aluminum alloy, or steel (stainless steel)) or non-metals (e.g., plastic). Furthermore, the housing 2 (including the upper cover portion 21, the lower cover portion 22, the left cover portion 23, the right cover portion 24, the rear cover portion 25, and the front cover portion 26) can be connected or attached to the frame strip 11 of the main frame 10 by means of locking, snapping, welding, or bonding.

[0032] like Figure 1 , Figure 2 and Figure 4As shown, the supporting structure 3 is located within the accommodating space 27 of the housing 2, and its material may include metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)). The supporting structure 3 includes a first set of supporting frames 31, a first auxiliary supporting frame 33, a second set of supporting frames 32, a first auxiliary supporting frame 34, multiple side supports 12, multiple rear supports 14, and multiple fixing elements 8. The side supports 12 are located on the left and right sides of the accommodating space 27, for example, between the upper and lower frame strips 11 on the left and right sides of the main frame 10. In an embodiment, the side supports 12 include four side supports 12, of which two side supports 12 are located between the upper and lower frame strips 11 on the left side of the main frame 10, and the other two side supports 12 are located between the upper and lower frame strips 11 on the right side of the main frame 10. That is, the upper end of each side support 12 is connected to the upper frame strips 11 on the left and right sides of the main frame 10, and its lower end is connected to the lower frame strips 11 on the left and right sides of the main frame 10. Each side support 12 is generally a rectangular strip or rectangular column, and its material may include metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)). Furthermore, the side support 12 can be connected or attached to the frame strip 11 of the main frame 10 by means of locking, snapping, welding, or bonding. In an embodiment, the left cover portion 23 and the right cover portion 24 can contact or be attached to the side support 12.

[0033] The rear support column 14 is located on the rear side of the receiving space 27, for example, between the upper and lower frame strips 11 on the rear side of the main frame 10. In an embodiment, the rear support column 14 includes three rear support columns 14, wherein the upper end of each rear support column 14 is connected to the upper frame strip 11 on the rear side of the main frame 10, and its lower end is connected to the lower frame strip 11 on the rear side of the main frame 10. Each rear support column 14 is generally a rectangular strip or a rectangular column, and its material may include metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)). Furthermore, the rear support column 14 can be connected or attached to the frame strips 11 of the main frame 10 by means of locking, snapping, welding, or bonding. In an embodiment, the rear cover portion 25 can contact or be attached to the rear support column 14.

[0034] The first set of support frames 31 has multiple first support units 311 and multiple first support units 312, wherein one first support unit 312 is supported by at least one first support unit 311. The first support units 312 and the first support units 311 are respectively located on the left and right sides of the accommodating space 27, for supporting the carrier 72. Figures 7 to 9In one embodiment, the first support unit 311 includes four first support units 311, each of which is located on each side pillar 12. Each first support unit 311 is generally a block structure, and its material may include metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)). Figure 3 As shown, each first support unit 311 has a first end 3111, a second end 3112, a support surface 3113, and a support through hole 3114. The first end 3111 of the first support unit 311 can be connected or attached to the side support column 12 by means of locking, snapping, welding, or bonding. In an embodiment, the side support column 12 can be omitted, therefore, the first end 3111 of the first support unit 311 can contact or be attached to the left cover portion 23 and the right cover portion 24. The second end 3112 of the first support unit 311 is suspended relative to the first end 3111. The support surface 3113 is the top surface of the second end 3112. The support surface 3113 of the first support unit 311 is substantially coplanar and is used to support the carrier 72 ( Figure 8 The bottom surface of the first support unit 311 is located on both the left and right sides. The bearing through hole 3114 extends through the second end 3112 of the first support unit 311, allowing the first support unit 312 to pass through and support the first support unit 312.

[0035] In this embodiment, the first support unit 312 includes two first support units 312, each of which is supported by a bearing through hole 3114 of two first bearing units 311, and one end of each first support unit 312 is connected to the corresponding rear support column 14. Each first support unit 312 is generally a cylindrical structure. Figure 3 As shown, each of the first support units 312 includes a hollow cylinder 3121 and a covering layer 3122, wherein the covering layer 3122 covers the outer peripheral surface of the hollow cylinder 3121. The hollow cylinder 3121 may be made of metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)), and the covering layer 3122 may be made of plastic (e.g., polyvinyl chloride, PVC). In other embodiments, each of the first support units 312 may be a solid cylinder, and the covering layer 3122 may be omitted.

[0036] like Figure 1 , Figure 2 and Figure 4As shown, the fixing element 8 includes a plurality of first fixing elements 81, a plurality of second fixing elements 82, a first auxiliary fixing element 83, and a second auxiliary fixing element 84. The fixing element 8 is a screw. Each first fixing element 81 is inserted into each first support unit 312 and connected (e.g., locked or snapped) to the corresponding rear support column 14, such that the first support unit 312 contacts the corresponding rear support column 14. That is, the length of the first fixing element 81 is slightly greater than the length of the first support unit 312 (see reference). Figure 3 In other embodiments, the rear support pillar 14 may be omitted, and therefore, the first fastening element 81 may be directly connected (e.g., locked or snapped) to the rear cover portion 25 of the housing 2. Furthermore, it is understood that the first fastening element 81 may be omitted, and the outer peripheral surface of the rear end of the first support unit 312 may be threaded and directly locked to the corresponding rear support pillar 14. Alternatively, the rear end of the first support unit 312 may be directly snapped to the corresponding rear support pillar 14. In other embodiments, the rear support pillar 14 may be omitted, and therefore, the first support unit 312 may be directly connected (e.g., locked or snapped) to the rear cover portion 25 of the housing 2.

[0037] like Figure 2 and Figure 4 As shown, the first auxiliary support frame 33 is arranged parallel to the middle of the first set of support frames 31. That is, the first auxiliary support frame 33 is located in the middle of the two sides of the first support unit 311 and is parallel to the first support unit 311. The first auxiliary support frame 33 has a first auxiliary support unit 332 for supporting the carrier 72 ( Figure 7 and Figure 8 The first auxiliary support unit 332 is located at the middle part of the bottom surface of the carrier 72. In an embodiment, one end of the first auxiliary support unit 332 is connected to the corresponding rear support column 14. The first auxiliary support unit 332 is generally cylindrical. Similar to the first support unit 312, the first auxiliary support unit 332 also includes a hollow cylinder and a covering layer, wherein the covering layer covers the outer peripheral surface of the hollow cylinder. The hollow cylinder can be made of metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)), and the covering layer can be made of plastic (e.g., polyvinyl chloride, PVC). In other embodiments, the first auxiliary support unit 332 can be a solid cylinder, and the covering layer can be omitted. In an embodiment, the length of the first auxiliary support unit 332 is greater than or equal to that of the carrier 72. Figure 7 Half the length of the first auxiliary support unit 332. Alternatively, the length of the first auxiliary support unit 332 is greater than or equal to half the length of the first support unit 312.

[0038] The first auxiliary fastening element 83 is inserted into the first auxiliary support unit 332 and connected (e.g., locked or snapped) to the corresponding rear pillar 14, such that the first auxiliary support unit 332 contacts the corresponding rear pillar 14. That is, the length of the first auxiliary fastening element 83 is slightly greater than the length of the first auxiliary support unit 332. In other embodiments, the rear pillar 14 may be omitted, and therefore, the first auxiliary fastening element 83 may be directly connected (e.g., locked or snapped) to the rear cover portion 25. Furthermore, it is understood that the first auxiliary fastening element 83 may be omitted, and the outer peripheral surface of the rear end of the first auxiliary support unit 332 may be threaded and directly locked to the corresponding rear pillar 14. Alternatively, the rear end of the first auxiliary support unit 332 may be directly snapped to the corresponding rear pillar 14. In other embodiments, the rear pillar 14 may be omitted, and therefore, the first auxiliary support unit 332 may be directly connected (e.g., locked or snapped) to the rear cover portion 25.

[0039] The second set of support frames 32 is located below the first set of support frames 31 and is arranged parallel to the first set of support frames 31. The second set of support frames 32 has multiple second support units 321 and multiple second support units 322, wherein one of the second support units 322 is supported by at least one second support unit 321. The second support units 321 and the second support units 322 are respectively located on both sides of the accommodating space 27 for supporting the carrier 72. Figure 8 ).like Figure 2 and Figure 4 As shown, the first support unit 311 and the second support unit 321, located on the same side, are arranged at intervals.

[0040] In this embodiment, the second load-bearing unit 321 and the second support unit 322 are substantially the same in material, size, and structure as the first load-bearing unit 311 and the first support unit 312, respectively. The second load-bearing unit 321 comprises four second load-bearing units 321, each located on each side pillar 12. Each second load-bearing unit 321 is generally a block structure, and its material may include metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)). Figure 2As shown, similar to the first support unit 321, each second support unit 321 has a first end, a second end, a support surface, and a support through hole. The first end of the second support unit 321 can be connected or attached to the side support column 12 by means of locking, snapping, welding, or bonding. In an embodiment, the side support column 12 can be omitted, therefore, the first end of the second support unit 321 can contact or be attached to the left cover portion 23 and the right cover portion 24. The second end of the second support unit 321 is suspended relative to the first end. The support surface is the top surface of the second end. The support surface of the second support unit 321 is substantially coplanar and is used to support the carrier 72 ( Figure 8 The bottom surface of the second support unit 321 is located on both the left and right sides. The bearing through hole extends through the second end of the second support unit 321 from front to back, so that the second support unit 322 can pass through and support the second support unit 322.

[0041] In one embodiment, the second support unit 322 includes two second support units 322, each of which is supported by bearing through holes of two second bearing units 321, and one end of which is connected to the corresponding rear support column 14. Each second support unit 322 is generally cylindrical. Each second support unit 322 includes a hollow cylinder and a covering layer, wherein the covering layer covers the outer peripheral surface of the hollow cylinder. The hollow cylinder may be made of metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)), and the covering layer may be made of plastic (e.g., polyvinyl chloride, PVC). In other embodiments, each second support unit 322 may be a solid cylinder, and the covering layer may be omitted.

[0042] like Figure 2 and Figure 4 As shown, each of the second fastening elements 82 is inserted into each of the second support units 322 and connected (e.g., locked or snapped) to the corresponding rear pillar 14, such that the second support unit 322 contacts the corresponding rear pillar 14. That is, the length of the second fastening element 82 is slightly greater than the length of the second support unit 322. In other embodiments, the rear pillar 14 may be omitted, and therefore, the second fastening element 82 may be directly connected (e.g., locked or snapped) to the rear cover portion 25. Furthermore, it is understood that the second fastening element 82 may be omitted, and the outer peripheral surface of the rear end of the second support unit 322 may be threaded and directly locked to the corresponding rear pillar 14. Alternatively, the rear end of the second support unit 322 may be directly snapped to the corresponding rear pillar 14. In other embodiments, the rear pillar 14 may be omitted, and therefore, the second support unit 322 may be directly connected (e.g., locked or snapped) to the rear cover portion 25.

[0043] The second auxiliary support frame 34 is arranged parallel to the middle of the second set of support frames 32. That is, the second auxiliary support frame 34 is located in the middle of the two second support units 321 on both sides, and is parallel to the second support units 321. Figure 2 and Figure 4 As shown, the second auxiliary support frame 34 has a second auxiliary support unit 342 for supporting the carrier 72. Figure 8 The second auxiliary support unit 342 is located at the middle of the bottom surface of the support unit 322. In one embodiment, one end of the second auxiliary support unit 342 is connected to the corresponding rear support column 14. The second auxiliary support unit 342 is generally cylindrical. Similar to the second support unit 322, the second auxiliary support unit 342 also includes a hollow cylinder and a covering layer, wherein the covering layer covers the outer peripheral surface of the hollow cylinder. The hollow cylinder can be made of metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)), and the covering layer can be made of plastic (e.g., polyvinyl chloride, PVC). In other embodiments, the second auxiliary support unit 342 can be a solid cylinder, and the covering layer can be omitted. In one embodiment, the length of the second auxiliary support unit 342 is greater than or equal to half the length of the carrier 72. Alternatively, the length of the second auxiliary support unit 342 is greater than or equal to half the length of the second support unit 322.

[0044] like Figure 2 As shown, the second auxiliary fastening element 84 is inserted into the second auxiliary support unit 342 and connected (e.g., locked or snapped) to the corresponding rear pillar 14, such that the second auxiliary support unit 342 contacts the corresponding rear pillar 14. That is, the length of the second auxiliary fastening element 84 is slightly greater than the length of the second auxiliary support unit 342. In other embodiments, the rear pillar 14 may be omitted, and therefore, the second auxiliary fastening element 84 may be directly connected (e.g., locked or snapped) to the rear cover portion 25. Furthermore, it is understood that the second auxiliary fastening element 84 may be omitted, and the outer peripheral surface of the rear end of the second auxiliary support unit 342 may be threaded and directly locked to the corresponding rear pillar 14. Alternatively, the rear end of the second auxiliary support unit 342 may be directly snapped to the corresponding rear pillar 14. In other embodiments, the rear pillar 14 may be omitted, and therefore, the second auxiliary support unit 342 may be directly connected (e.g., locked or snapped) to the rear cover portion 25.

[0045] like Figure 1 , Figure 2 and Figure 4As shown, the base frame 5 is located at the bottom of the housing 2. In an embodiment, the base frame 5 is a sheet-like structure that is connected (e.g., locked or snapped) to the frame strip 11 at the bottom of the main frame 10 and adjacent to the lower cover portion 22. The base frame 5 has at least a groove (including a first groove 51, a second groove 52, and a third groove 53). Each of the grooves (including the first groove 51, the second groove 52, and the third groove 53) is defined by a protruding structure. The protruding structure is formed by bending the sheet-like body. The base frame 5 can be made of metal (e.g., aluminum, aluminum alloy, or steel (stainless steel)). Figure 2 As shown, the lower cover portion 22 has at least one through hole 221 corresponding to the groove (including the first groove 51, the second groove 52 and the third groove 53), so that the groove (including the first groove 51, the second groove 52 and the third groove 53) can be exposed in the lower cover portion 22.

[0046] like Figure 2 As shown, the static dissipation element 4 includes at least one first static dissipation element 41 and at least one second static dissipation element 42. The first static dissipation element 41 and the second static dissipation element 42 are sheet-like structures, and their material includes a highly conductive metal, such as copper. A portion of the static dissipation element 4 (i.e., the first static dissipation element 41) is located on the side support 12, and a portion of the static dissipation element 4 (i.e., the first static dissipation element 41) is located on the rear support 14, such that the first static dissipation element 41 is electrically connected to the first support unit 311 and the second support unit 321. The second static dissipation element 42 is located on the frame strip 11 at the bottom of the base frame 5 and the main frame 10; that is, the pattern of the second static dissipation element 42 corresponds to the frame strip 11 at the bottom of the base frame 5 and the main frame 10. The first static dissipation element 41 is connected to the second static dissipation element 42, such that the first static dissipation element 41 is electrically connected to the at least one groove (including the first groove 51, the second groove 52 and the third groove 53) by the second static dissipation element 42.

[0047] In use, the at least one groove (including the first groove 51, the second groove 52, and the third groove 53) is used to interact with a metal device (including the first metal device 61, the second metal device 62, and the third metal device 63). Figure 10 Electrical connection to dissipate the load-bearing structure 3 and the carrier 72 ( Figures 7 to 9 The static electricity of the bearing structure 3 and the carrier 72. Figures 7 to 9The static electricity can be dissipated via the static electricity dissipation element 4 (including the first static electricity dissipation element 41 and the second static electricity dissipation element 42) and the metal device (including the first metal device 61, the second metal device 62 and the third metal device 63). Figure 10 The static electricity is transmitted to the outside. Therefore, static electricity will not remain on the carrier 72. Figures 7 to 9 Furthermore, the design of the aforementioned load-bearing structure 3 can support a larger-sized carrier 72. Figures 7 to 9 For example, carriers larger than 600mm*600mm 72 ( Figures 7 to 9 ).

[0048] Figure 5 show Figure 4 The diagram shows a partial assembly of the carrier transport cabin 1, viewed from below, with the main frame 10 omitted. Figure 5 As shown, the bottom of the main frame 10 further includes multiple connecting strips 11a for connecting the frame strips 11 on the left and right sides. The size of the base frame 5 is slightly smaller than the bottom of the main frame 10. Therefore, a portion of the base frame 5 is connected (e.g., locked or latched) to the frame strips 11 at the bottom of the main frame 10, and a portion of the base frame 5 is connected (e.g., locked or latched) to the connecting strips 11a at the bottom of the main frame 10. However, in other embodiments, the size of the base frame 5 is approximately equal to the bottom of the main frame 10, and the entire base frame 5 is connected (e.g., locked or latched) to the frame strips 11 at the bottom of the main frame 10; therefore, the connecting strips 11a can be omitted. In embodiments, the base frame 5 can be embedded in the frame strips 11 at the bottom of the main frame 10, or the base frame 5 can be embedded in the lower cover portion 22.

[0049] Figure 6 show Figure 5 The diagram shows a partial assembly of the carrier transport chamber 1, viewed from below, with the electrostatic dissipation element 4 attached. Figure 6As shown, a portion of the static dissipation element 4 (i.e., the first static dissipation element 41) is attached to the side support 12, and a portion of the static dissipation element 4 (i.e., the first static dissipation element 41) is attached to the rear support 14, such that the first static dissipation element 41 is electrically connected to the first support unit 311 and the second support unit 321. Furthermore, another portion of the static dissipation element 4 (i.e., the second static dissipation element 42) is attached to the base frame 5 and the frame strip 11 at the bottom of the main frame 10. The first static dissipation element 41 is connected (physically or electrically) to the second static dissipation element 42, such that the first static dissipation element 41 is electrically connected to the at least one groove (including the first groove 51, the second groove 52, and the third groove 53) by the second static dissipation element 42. Because the materials of the first static dissipation element 41 and the second static dissipation element 42 contain highly conductive metals, such as copper, with a resistance of less than 1 ohm (Ω), static dissipation can be accelerated.

[0050] Figure 7 show Figure 1 The diagram shows a top view of the carrier transfer chamber 1 in use, omitting the upper cover portion 21, and the carrier 72 is placed in the carrier transfer chamber 1. The carrier 72 (e.g., a semiconductor wafer) has a rectangular structure, and its dimensions can be 600mm*600mm or larger, for example, 600mm*600mm or 620mm*615mm. The left and right sides of the carrier 72 are supported by the bearing surfaces 3113 of the first bearing unit 311. The middle part of the carrier 72 is supported by the first auxiliary support unit 332 of the first auxiliary bearing frame 33. As shown in the figure, the length L1 of the first auxiliary support unit 332 is greater than or equal to half the length L2 of the carrier 72. In an embodiment, the threaded ends of the first fixing element 81 and the first auxiliary fixing element 83 can be locked into the interior of the rear support column 14 or penetrate through the rear support column 14.

[0051] Figure 8 show Figure 1 The diagram shows a front view of the carrier transfer chamber 1 in its operational state, omitting the front cover portion 26, and showing the carrier 72 placed within the carrier transfer chamber 1. Figure 8 As shown, one carrier 72 is supported by the first set of support frames 31 (including the first support unit 311 and the first support unit 312) and the first auxiliary support unit 332 of the first auxiliary support frame 33, while the other (lower) carrier 72 is supported by the second set of support frames 32 (including the second support unit 321 and the second support unit 322) and the second auxiliary support unit 342 of the second auxiliary support frame 34. The two carriers 72 are substantially parallel. Figure 8 In the illustrated embodiment, the carrier transfer chamber 1 can carry six carriers 72. Furthermore, in this embodiment, the top of the first auxiliary support unit 332 of the first auxiliary carrier frame 33 is substantially coplanar with the plane formed by the bearing surfaces 3113 of the first bearing units 311 on the left and right sides. However, in another embodiment, the top of the first auxiliary support unit 332 of the first auxiliary carrier frame 33 may be slightly lower than the plane formed by the bearing surfaces 3113 of the first bearing units 311 on the left and right sides.

[0052] Figure 9 show Figure 1 The diagram shows a side view of the carrier transfer chamber 1 in use, omitting the right side cover portion 24, and with the carrier 72 placed inside the carrier transfer chamber 1. Figure 9 As shown, when the carrier 72 is placed in the carrier transfer chamber 1, the front cover portion 26 covers the receiving space 27 of the housing 2, making the receiving space 27 a substantially enclosed space to reduce dust particles. In this embodiment, the number of 0.5μm-sized dust particles per square inch on each carrier 72 is less than 30.

[0053] Figure 10 This is a front-view perspective view of the loader port 6. The loader port 6 has a support platform 60 and at least one metal device (including a first metal device 61, a second metal device 62, and a third metal device 63). The at least one metal device (including the first metal device 61, the second metal device 62, and the third metal device 63) is located on the support platform 60 and protrudes from the upper surface of the support platform 60. The at least one metal device (including the first metal device 61, the second metal device 62, and the third metal device 63) is connected to a grounding line (not shown). The first groove 51, the second groove 52, and the third groove 53 of the carrier transfer chamber 1 correspond to the first metal device 61, the second metal device 62, and the third metal device 63, respectively. When the carrier transfer chamber 1 is placed on the upper surface of the carrier platform 60, the first metal device 61, the second metal device 62, and the third metal device 63 can respectively pass through at least one through hole 221 of the lower cover portion 22 and be inserted into the first groove 51, the second groove 52, and the third groove 53, and contact the sheet-like protruding structures located in the first groove 51, the second groove 52, and the third groove 53. Therefore, the first metal device 61, the second metal device 62, and the third metal device 63 can be electrically connected to the base frame 5 and the static dissipation element 4 to dissipate static electricity from the carrier structure 3 and the carrier 72. Figures 7 to 9 The static electricity of the bearing structure 3 and the carrier 72. In the embodiment, the bearing structure 3 and the carrier 72 ( Figures 7 to 9 Electrostatic discharge (ESD) at a resistance of 10 5 Ω~10 8 In the case of Ω, it can be reduced to 50 volts (V) or lower.

[0054] Figure 11 show Figure 6 The diagram shows the electrostatic dissipation path of the carrier transport chamber 1. Figure 11 As shown, a portion of the static dissipation element 4 (i.e., the first static dissipation element 41) is attached to the side support 12, and a portion of the static dissipation element 4 (i.e., the first static dissipation element 41) is attached to the rear support 14, such that the first static dissipation element 41 is electrically connected to the first support unit 311 and the second support unit 321. The second static dissipation element 42 is attached to the base frame 5 and the frame strip 11 at the bottom of the main frame 10. The first static dissipation element 41 is connected (physically or electrically) to the second static dissipation element 42, such that the first static dissipation element 41 is electrically connected to the at least one groove (including the first groove 51, the second groove 52, and the third groove 53) through the second static dissipation element 42. When the carrier 72 is placed in the carrier transfer chamber 1, and the carrier transfer chamber 1 is placed on the support platform 60 at the loading port 6 ( Figure 10 When the upper surface of the support structure 3 and the carrier 72 is exposed, the first metal device 61, the second metal device 62 and the third metal device 63 can be electrically connected to the base frame 5 and the static dissipation element 4. Therefore, the static electricity of the support structure 3 and the carrier 72 can be dissipated by the first metal device 61, the second metal device 62 and the third metal device 63 via the static dissipation element 4 (including the first static dissipation element 41 and the second static dissipation element 42), as shown by the hypothetical static dissipation path 64 in the figure.

[0055] Figure 12 This diagram shows an exploded perspective view of a carrier transport chamber 1a according to some embodiments of the present invention. Figure 12 The carrier transport cabin 1a and Figures 1 to 6 The carrier transport cabin 1 is largely the same as the carrier transport cabin 1, except for the structure of the support structure 3a. The support structure 3a includes a first set of support frames 31a, a first auxiliary support frame 33a, a second set of support frames 32a, a first auxiliary support frame 34a, the side support column 12, the rear support column 14, and the fixing element 8. The first set of support frames 31a of the support structure 3a is similar to... Figures 1 to 6The first set of support frames 31 of the load-bearing structure 3 is substantially the same, except that the first set of support frames 31a further includes at least a first rear support unit 313. The first auxiliary support frame 33a of the load-bearing structure 3a is similar to... Figures 1 to 6 The first auxiliary support frame 33 of the load-bearing structure 3 is substantially the same, except that the first auxiliary support frame 33a further includes at least a first rear auxiliary support unit 333. The second set of support frames 32a of the load-bearing structure 3a is similar to... Figures 1 to 6 The second set of support frames 32 of the load-bearing structure 3 is substantially the same, except that the second set of support frames 32a further includes at least a second rear support unit 323. The second auxiliary support frame 34a of the load-bearing structure 3a is similar to... Figures 1 to 6 The second auxiliary support frame 34 of the aforementioned support structure 3 is substantially the same, except that the second auxiliary support frame 34a further includes at least a second rear auxiliary support unit 343. In the embodiment, the first rear support unit 313, the first rear auxiliary support unit 333, the second rear support unit 323, and the second rear auxiliary support unit 343 are all made of the same material and have the same structure (their material is the same as that of the first support unit 311), and can all be connected or attached to the rear support column 14 by means of locking, snapping, welding, or bonding. In addition, the first fixing element 81, the second fixing element 82, the first auxiliary fixing element 83, and the second auxiliary fixing element 84 are respectively inserted into the first rear support unit 313, the second rear support unit 323, the first rear auxiliary support unit 333, and the second rear auxiliary support unit 343, and connected (e.g., locked or snapped) to the corresponding rear support column 14.

[0056] Figure 13 show Figure 12 The diagram shows a partially enlarged and exploded view of the carrier transport chamber 1a. (See attached image.) Figure 13 As shown, the first rear support unit 313 has a first end 3131, a second end 3132, a support surface 3133, and a support through hole 3134. The first end 3131 of the first rear support unit 313 defines a slot 3135, and can be connected or attached to the rear support column 14 by means of locking, snapping, welding, or bonding. The second end 3132 of the first rear support unit 313 is suspended relative to the first end 3131. The support surface 3133 is the top surface of the second end 3132. The support surface 3133 of the first rear support unit 313 is substantially coplanar and is used to support the carrier 72 ( Figure 14The bearing through hole 3134 extends through the first rear bearing unit 313 from front to back, allowing the first support unit 312 to pass through and support the first support unit 312. In an embodiment, the top of the bearing through hole 3134 is very close to the bearing surface 3133; or, the top of the bearing through hole 3134 is flush with the bearing surface 3133.

[0057] Figure 14 show Figure 12 The diagram shows a top view of the carrier transfer chamber 1a in use, omitting the top cover 21, with the carrier 72 placed inside the carrier transfer chamber 1a. The left and right sides of the bottom surface of the carrier 72 are supported by the bearing surfaces 3113 of the first bearing unit 311. The left and right sides of the bottom surface at the rear end of the carrier 72 are supported by the bearing surfaces 3133 of the first rear bearing unit 313. The middle portion of the carrier 72 is supported by the first auxiliary support unit 332 of the first auxiliary bearing frame 33a and / or the first rear auxiliary bearing unit 333.

[0058] Figure 15 show Figure 12 The diagram shows a side view of the carrier transfer chamber 1a in use, omitting the right side cover portion 24, with the carrier 72 placed in the carrier transfer chamber 1a. The first fixing element 81 and the second fixing element 82 are respectively inserted into the first rear support unit 313 and the second rear support unit 323, and connected (e.g., locked or snapped) to the corresponding rear support column 14.

[0059] Figure 16 This diagram shows an exploded perspective view of the carrier transport chamber 1b according to some embodiments of the present invention. Figure 17 show Figure 16 A partially enlarged schematic diagram of the carrier transport cabin 1b. Figure 16 The carrier transport cabin 1b and Figure 12 The carrier transport cabin 1a is largely the same as the carrier transport cabin 1a, except for the structure of the support structure 3b. The support structure 3b includes a first set of support frames 31b, a first auxiliary support frame 33b, a second set of support frames 32b, a first auxiliary support frame 34b, the side support column 12, the rear support column 14, and the fixing element 8. The first set of support frames 31b of the support structure 3b is similar to... Figure 12The first set of support frames 31a of the support structure 3a is substantially the same, except that the support structure 3b further includes at least a first connecting portion 35 and at least a second connecting portion 36. The first support unit 311 of the first set of support frames 31b, the second support unit 321 of the second set of support frames 32b, and the support unit below them, located on the same side and in the same row, are connected together by the first connecting portion 35. In an embodiment, the first support unit 311, the second support unit 321, the support unit below them, and the first connecting portion 35, located on the same side and in the same row, are integrally formed. Furthermore, the first rear support unit 313 of the first set of support frames 31b, the second rear support unit 323 of the second set of support frames 32b, and the rear support unit below them, located on the same side and in the same row, are connected together by the second connecting portion 36. In an embodiment, the first rear support unit 313, the second rear support unit 323, the rear support unit below them, and the second connecting portion 36, located on the same side and in the same row, are integrally formed. Similarly, the first rear auxiliary support unit 333 of the first auxiliary support frame 33b, the second rear auxiliary support unit 343 of the second auxiliary support frame 34b, and the rear auxiliary support unit below them, located on the same side and in the same row, are connected together by the second connecting part 36. In the embodiment, the first rear auxiliary support unit 333, the second rear auxiliary support unit 343, the rear auxiliary support unit below them, and the second connecting part 36 located on the same side and in the same row are integrally formed.

[0060] Figure 18 show Figure 16 The diagram shows a front view of the carrier transfer chamber 1b in its operational state, omitting the front cover portion 26, and showing the carrier 72 placed within the carrier transfer chamber 1b. Figure 18 As shown, the first connecting part 35 and the first end of the bearing unit (including, for example, the first bearing unit 311, the second bearing unit 321 and the bearing unit below it) located on the same side and in the same row are coplanar and connected (for example, locked, latched or adhered) to the corresponding side support 12.

[0061] Figure 19 show Figure 16 The diagram shows a side view of the carrier transfer chamber 1b in its operational state, omitting the right side cover portion 24, and with the carrier 72 placed within the carrier transfer chamber 1b. Figure 19As shown, the second connecting portion 36 and the rear support unit (including, for example, the first rear support unit 333, the second rear support unit 343, and the rear support unit below them) located on the same side and in the same row are connected together (e.g., locked, latched, or adhered) to the corresponding rear support column 14. It can be understood that the second connecting portion 36 and the rear auxiliary support unit (including, for example, the first rear auxiliary support unit 333, the second rear auxiliary support unit 343, and the rear auxiliary support unit below them) located on the same side and in the same row are connected together (e.g., locked, latched, or adhered) to the corresponding rear support column 14.

[0062] Unless otherwise specified, spatial descriptions such as "above," "below," "upward," "left," "right," "downward," "top," "bottom," "vertical," "horizontal," "side," "higher," "lower," "upper," "above," and "below" are indications of orientation relative to what is shown in the figures. It should be understood that the spatial descriptions used herein are for illustrative purposes only, and actual implementations of the structures described herein may be arranged in space in any orientation or manner, provided that the advantages of the embodiments of the invention are not deviated from by such arrangement.

[0063] As used herein, the terms “approximately,” “generally,” “roughly,” and “about” are used to describe and account for small variations. When used in conjunction with an event or situation, the terms may refer to a situation where the event or situation has clearly occurred or is very close to occurring. For example, when used in conjunction with a numerical value, the terms may refer to a range of variation less than or equal to ±10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, if the difference between two values ​​is less than or equal to ±10% of the average of the values ​​(e.g., less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%), then the two values ​​can be considered "substantially" the same.

[0064] If the displacement between two surfaces is no greater than 5 μm, 2 μm, 1 μm, or 0.5 μm, then the two surfaces can be considered coplanar or substantially coplanar.

[0065] Unless the context clearly specifies otherwise, as used herein, the singular terms “a / an” and “the” may include multiple references. In the description of some embodiments, providing a component “on” another component may cover a situation where the preceding component is directly on the following component (e.g., in physical contact with the following component) and a situation where one or more intervening components are located between the preceding and following components.

[0066] As used herein, the terms “conductive,” “electrically conductive,” and “electrical conductivity” refer to the ability to conduct electric current. Conductive materials generally indicate those that exhibit minimal or zero resistance to the flow of electric current. One measure of conductivity is Siemens per meter (S / m). Typically, conductive materials have a conductivity greater than about 10. 4 S / m (e.g., at least 10) 5 S / m or at least 10 6 A material is defined as having an electrical conductivity (S / m). The electrical conductivity of a material can sometimes vary with temperature. Unless otherwise specified, the electrical conductivity of a material is measured at room temperature.

[0067] Additionally, quantities, ratios, and other values ​​are sometimes presented in range format in this document. It should be understood that such range format is used for convenience and brevity, and should be flexibly interpreted to include not only values ​​explicitly specified as range limits, but also all individual values ​​or subranges covered within that range, as if each value and subrange were explicitly specified.

[0068] Although the invention has been described and illustrated with reference to specific embodiments thereof, such descriptions and illustrations are not limiting. Those skilled in the art will understand that various changes and substitutions may be made without departing from the true spirit and scope of the invention as defined by the appended claims. Illustrations need not be drawn to scale. Due to manufacturing processes and limitations, artistic representations of the invention may differ from actual devices. Other embodiments of the invention may exist that are not specifically described. This specification and drawings should be considered illustrative rather than limiting. Modifications may be made to adapt particular circumstances, materials, compositions, methods, or procedures to the objectives, spirit, and scope of the invention. All such modifications are intended to fall within the scope of the appended claims. Although the methods disclosed herein have been described with reference to specific operations performed in a particular order, it should be understood that these operations may be combined, subdivided, or rearranged to form equivalent methods without departing from the teachings of the invention. Therefore, unless specifically indicated herein, the order and grouping of operations are not limitations of the invention.

Claims

1. A carrier transport cabin, comprising at least: The shell defines the space it contains; A support structure is located within the accommodating space. The support structure includes a first set of support frames, which have multiple first support units and multiple first support units. The first support units and the first support units are located on opposite sides of the accommodating space to support a carrier. Each first support unit has a support through hole that extends through the first support unit from front to back, allowing the first support unit to pass through and support the first support unit. The first set of support frames further includes at least a first rear support unit attached to the rear support column of the support structure. The first rear bearing unit has a bearing through hole and a bearing surface; the bearing through hole of the first rear bearing unit extends through the first rear bearing unit from front to back, so as to allow the first support unit to pass through and support the first support unit; The bearing surface of the first rear bearing unit is used to bear the carrier; The top end of the bearing through hole of the first rear bearing unit is very close to the bearing surface of the first rear bearing unit, or the top end of the bearing through hole of the first rear bearing unit is flush with the bearing surface of the first rear bearing unit. as well as Multiple static dissipation elements are electrically connected to the first load-bearing unit to dissipate static electricity from the load-bearing structure.

2. The carrier transport chamber according to claim 1 further includes a base frame located at the bottom of the housing and having at least one groove; wherein the static dissipation element includes a first static dissipation element and a second static dissipation element, the first static dissipation element being electrically connected to the first carrier unit, the second static dissipation element being located on the base frame, wherein the first static dissipation element is electrically connected to the at least one groove by the second static dissipation element, wherein the base frame is adjacent to the lower cover portion of the housing, the lower cover portion having at least one through hole corresponding to the at least one groove, such that the at least one groove is exposed in the lower cover portion.

3. The carrier transport chamber according to claim 2, wherein the first static dissipation element and the second static dissipation element are made of copper, and wherein the first static dissipation element and the second static dissipation element are sheet-like structures.

4. The carrier transport cabin according to claim 2, further comprising a main frame, the main frame including a plurality of frame strips to provide structural strength of the carrier transport cabin, wherein the shell is attached to the main frame to define the receiving space, wherein the second static dissipation element is located on the frame strips at the bottom of the base frame and the main frame, the pattern of the second static dissipation element corresponding to the frame strips at the bottom of the base frame and the main frame.

5. The carrier transport chamber according to claim 1, wherein the carrier structure further comprises a plurality of side pillars, the first carrier unit is connected to the side pillars, and a portion of the electrostatic dissipation element is located on the side pillars.

6. The carrier transport cabin according to claim 1, wherein one end of each of the first support units is connected to the corresponding rear support column, and a portion of the electrostatic dissipation element is located on the rear support column.

7. The carrier transport cabin according to claim 1, wherein the carrier structure further includes an auxiliary carrier frame located in the middle of the first carrier units on both sides and parallel to the first carrier units.

8. The carrier transport cabin according to claim 7, wherein the auxiliary carrier frame has an auxiliary support unit, the length of which is greater than or equal to half the length of the carrier.

9. The carrier transport cabin according to claim 1, wherein the shell and the bearing structure are made of aluminum alloy or steel, and wherein the plurality of static dissipation elements are made of copper.

10. The carrier transfer chamber according to claim 1, wherein the carrier structure further comprises a second set of carrier frames arranged parallel to the first set of carrier frames, the second set of carrier frames having a plurality of second carrier units and a plurality of second support units, wherein one second support unit is supported by at least one second carrier unit, the second carrier units and the second support units are respectively located on both sides of the accommodating space, wherein, The first and second load-bearing units, located on the same side, are integrally formed.

11. The carrier transfer chamber according to claim 1, wherein the carrier structure further comprises a second set of carrier frames arranged parallel to the first set of carrier frames, the second set of carrier frames having a plurality of second carrier units and a plurality of second support units, wherein one second support unit is supported by at least one second carrier unit, the second carrier units and the second support units are respectively located on both sides of the accommodating space, wherein, The first and second bearing units, located on the same side, are arranged at intervals.

12. The carrier transport chamber according to claim 10 or 11, wherein the electrostatic dissipation element is electrically connected to the second carrier unit.

13. The carrier transport cabin according to claim 1, wherein each of the first support units comprises a hollow cylinder and a covering layer, wherein the covering layer covers the outer peripheral surface of the hollow cylinder, the hollow cylinder is made of metal, and the covering layer is made of plastic.

14. The carrier transport cabin according to claim 13, wherein the carrier structure further comprises a plurality of first fixing elements, each of the first fixing elements being located within each of the first support units for fixing the first support unit to the housing, wherein the length of the first fixing element is greater than the length of the first support unit.

15. The carrier transport cabin according to claim 14, wherein the first fixing element is a screw, which is locked to the corresponding rear support column, such that the first support unit contacts the corresponding rear support column.

16. The carrier transport cabin according to claim 15, wherein the first end of the first rear-side bearing unit defines a slot that can be engaged with the rear support column.

17. The carrier transport cabin according to claim 16, wherein the bearing through hole of the first bearing unit is aligned with the bearing through hole of the first rear bearing unit and the hole of the rear support column.

18. The carrier transport cabin according to claim 17, wherein the hole of the rear support is disposed within the slot.

19. The carrier transport cabin according to claim 1, wherein the first rear-side support unit has a first end and a second end, the first rear-side support unit further having an inclined surface connecting the top surface of the first end and the top surface of the second end, the direction facing the inclined surface being the axial direction of the first support unit.

20. The carrier transport cabin according to claim 19, wherein the first carrier unit has a first end and a second end, the first carrier unit further having an inclined surface connecting the top surface of the first end and the top surface of the second end, the direction facing the inclined surface being the radial direction of the first support unit.

21. The carrier transport chamber according to claim 20, wherein the inclined surface of the first rear bearing unit faces the first side surface of the carrier, the inclined surface of the first bearing unit faces the second side surface of the carrier, and the first side surface of the carrier is perpendicular to the second side surface of the carrier.

22. The carrier transport cabin according to claim 1, wherein the carrier structure further includes a first auxiliary carrier frame located in the middle of the first carrier units on both sides, the first auxiliary carrier frame having a first auxiliary support unit, the top of the first auxiliary support unit being higher than the top of the first support unit.

23. The carrier transport chamber according to claim 22, wherein the carrier contacts the first auxiliary support unit but does not contact the first support unit.

24. The carrier transport cabin according to claim 22, wherein the top end of the first auxiliary support unit is coplanar with the bearing surface of the first support unit and the bearing surface of the first rear bearing unit.

25. The carrier transport cabin according to claim 22, wherein the length of the first auxiliary support unit is less than the length of the first support unit.

26. The carrier transport cabin according to claim 25, wherein the length of the first support unit is greater than the length of the carrier.

27. The carrier transport cabin according to claim 26, wherein the extending direction of the first auxiliary support unit is parallel to the extending direction of the first support unit.

28. The carrier transport cabin according to claim 1, wherein the first support unit transmits the force on the bearing surface of the first rear bearing unit and the force on the bearing surface of the first bearing unit.

29. The carrier transport chamber according to claim 1, wherein the force on the bearing surface of the first bearing unit can be simultaneously distributed to the side cover portion and the rear cover portion of the housing.

30. The carrier transport cabin according to claim 29, wherein the force on the bearing surface of the first bearing unit can be borne simultaneously by the side cover portion and the rear cover portion.

31. The carrier transport cabin according to claim 1, wherein each of the first support units is a solid cylinder.

32. A carrier transport cabin, comprising at least: The shell, which defines the containing space; and A supporting structure, located within the accommodating space, comprises: The first set of support frames has multiple first support units and multiple first support units, wherein the first support units and the first support units are respectively located on both sides of the accommodating space for supporting the carrier, wherein each first support unit has a support through hole, and the support through hole of the first support unit extends through the first support unit from front to back for the first support unit to pass through and support the first support unit, wherein the first set of support frames further includes at least a first rear support unit attached to the rear support column of the support structure; The first rear bearing unit has a bearing through hole and a bearing surface; the bearing through hole of the first rear bearing unit extends through the first rear bearing unit from front to back, so as to allow the first support unit to pass through and support the first support unit; The bearing surface of the first rear bearing unit is used to bear the carrier; The top end of the bearing through hole of the first rear bearing unit is very close to the bearing surface of the first rear bearing unit, or the top end of the bearing through hole of the first rear bearing unit is flush with the bearing surface of the first rear bearing unit. as well as An auxiliary support frame is arranged parallel to the middle of the first set of support frames. The auxiliary support frame has an auxiliary support unit for assisting in supporting the carrier.

33. The carrier transport cabin according to claim 32, wherein the length of the auxiliary support unit is greater than or equal to half the length of the carrier.

34. The carrier transport chamber according to claim 32 further comprises a plurality of static dissipation elements and a base frame, the base frame being located at the bottom of the housing and having at least one groove; wherein the static dissipation elements include a first static dissipation element and a second static dissipation element, the first static dissipation element being electrically connected to the first carrier unit, the second static dissipation element being located on the base frame, wherein the first static dissipation element is electrically connected to the at least one groove by the second static dissipation element, wherein the base frame is adjacent to the lower cover portion of the housing, the lower cover portion having at least one through hole corresponding to the at least one groove, such that the at least one groove is exposed in the lower cover portion.

35. The carrier transport chamber according to claim 34, wherein the first static dissipation element and the second static dissipation element are made of copper, and wherein the first static dissipation element and the second static dissipation element are sheet-like structures.

36. The carrier transfer chamber according to claim 32, wherein the carrier structure further comprises a second set of carrier frames arranged parallel to the first set of carrier frames, the second set of carrier frames having a plurality of second carrier units and a plurality of second support units, wherein one second support unit is supported by at least one second carrier unit, the second carrier units and the second support units are respectively located on both sides of the accommodating space, wherein, The first and second load-bearing units, located on the same side, are integrally formed.

37. The carrier transfer chamber according to claim 32, wherein the carrier structure further comprises a second set of carrier frames arranged parallel to the first set of carrier frames, the second set of carrier frames having a plurality of second carrier units and a plurality of second support units, wherein one second support unit is supported by at least one second carrier unit, the second carrier units and the second support units are respectively located on both sides of the accommodating space, wherein, The first and second bearing units, located on the same side, are arranged at intervals.

38. The carrier transport chamber according to claim 32, wherein the housing includes an upper cover portion, a lower cover portion, a left cover portion, a right cover portion, a rear cover portion, and a front cover portion to define the receiving space.

39. The carrier transport cabin according to claim 32, wherein the first support unit is a hollow cylinder, and the bearing structure further includes a plurality of first fixing elements, each of the first fixing elements being located within each of the first support units for fixing the first support unit to the shell, wherein the length of the first fixing element is greater than the length of the first support unit.

40. The carrier transport cabin of claim 39, wherein the first fastening element is inserted into the first rear-side bearing unit and connected to the corresponding rear support column.

41. The carrier transport cabin according to claim 40, wherein the first fixing element is a screw, which is locked to the corresponding rear support column, such that the first support unit contacts the corresponding rear support column.

42. The carrier transport cabin according to claim 41, wherein the first end of the first rear bearing unit defines a slot that can be engaged with the rear support column.

43. The carrier transport cabin according to claim 32, wherein each of the first support units comprises a hollow cylinder and a covering layer, wherein the covering layer covers the outer peripheral surface of the hollow cylinder, the hollow cylinder is made of metal, and the covering layer is made of plastic.

44. The carrier transport cabin according to claim 32, wherein the auxiliary support frame has an auxiliary support unit, the top of the auxiliary support unit being higher than the top of the first support unit.

45. The carrier transport cabin according to claim 44, wherein the top end of the auxiliary support unit is coplanar with the bearing surface of the first support unit and the bearing surface of the first rear bearing unit.

Images