A high temperature resistant thermal isolation pressure sensor
By using a multi-layer sleeve structure and heat insulation and heat absorption materials, the stability problem of silicon piezoresistive pressure sensors under instantaneous high temperature environments has been solved, achieving stable measurement performance at high temperatures and simplifying assembly, thus reducing costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-06-17
- Publication Date
- 2026-03-27
AI Technical Summary
Existing silicon piezoresistive pressure sensors cannot operate stably under instantaneous high temperature environments, and their internal electronic components and pressure cores are easily damaged, leading to inaccurate measurements.
It adopts a multi-layer sleeve structure, using aerogel and phase change material for heat insulation. The external temperature is insulated by aerogel, and the phase change material absorbs and stores heat, extending the time for heat to be transferred to the sensor body. Combined with a protective layer and a simple assembly process.
Maintaining stable sensor performance under instantaneous high temperature conditions reduces costs, simplifies assembly processes, and improves assembly efficiency.
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Figure CN111780919B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application relates to the technical field of sensors, in particular to a high-temperature-resistant heat-insulating pressure sensor. BACKGROUND
[0002] Most silicon piezoresistive pressure sensors on the market have a temperature resistance of below 175 DEG C. The main reason for the temperature limitation is that the resistance, capacitance and pressure core of the sensor have a temperature resistance range of below 175 DEG C. When the pressure sensor works in a transient high-temperature environment (such as 400 DEG C / 30 min), the internal electronic components and the pressure core will be damaged, and the pressure sensor cannot perform accurate measurement. In order to solve the technical problem, the structure or the material is improved to effectively isolate the external environment temperature, so as to ensure the stability of the sensor performance. In many improvements, how to further optimize the process and reduce the cost becomes a new research hotspot. SUMMARY
[0003] The application provides a high-temperature-resistant heat-insulating pressure sensor, which can effectively isolate the external environment temperature, ensure the stability of the sensor performance, and achieve the purposes of simplifying the process or reducing the cost.
[0004] In order to solve the above technical problem, the application provides a high-temperature-resistant heat-insulating pressure sensor, which comprises a pressure mounting connector, a first sleeve connected with the pressure mounting connector to form a first containing space, a second sleeve arranged in the first containing space and connected with the pressure mounting connector to form a second containing space, a third sleeve arranged in the second containing space and connected with the pressure mounting connector to form a third containing space, a pressure sensor body arranged in the third containing space, and an electrical connector arranged at the end of the first sleeve away from the pressure mounting connector, wherein the pressure sensor body is physically connected with the electrical connector, the first sleeve and the second sleeve are arranged in a spaced mode, the inner surface of the first sleeve and the outer surface of the second sleeve are filled with aerogel, the second sleeve and the third sleeve are arranged in a spaced mode, and the inner surface of the second sleeve and the outer surface of the third sleeve are filled with a phase change material.
[0005] Preferably, the first sleeve, the second sleeve and the third sleeve are each provided with a first protective layer on the outer peripheral wall.
[0006] Preferably, the outer peripheral wall of the first sleeve is further provided with a second protective layer, the second protective layer is wrapped on the first protective layer, and the second protective layer is aluminum foil paper.
[0007] Preferably, the first protective layer is a polyimide adhesive tape.
[0008] Preferably, the high-temperature-resistant thermal-insulated pressure sensor further comprises an adapter ring clamped between the pressure mounting connector and the third sleeve, and a support frame arranged on the adapter ring close to the third sleeve, the pressure sensor body comprises a pressure sensitive element arranged on the adapter ring and a signal processing element arranged on the support frame, and an output end of the pressure sensitive element is connected with an input end of the signal processing element after passing through the adapter ring.
[0009] Preferably, the first sleeve comprises a first side wall connected with the pressure mounting connector, a second side wall connected with the first side wall, and a first cover body connected with the second side wall, the diameter of the second side wall is smaller than that of the first side wall to form a first stepped portion, the first cover body comprises an end cover and a third side wall bent and extended from the edge of the end cover towards the second side wall, the third side wall is at least partially connected with the first stepped portion, the electric connector is arranged on the end cover, and an output end of the signal processing element is connected with an input end of the electric connector after passing through the third sleeve and the second sleeve.
[0010] Preferably, the second sleeve comprises a sleeve wall connected with the pressure mounting connector and a second cover body arranged in a ring structure and spaced from the end cover, an inner periphery of the second cover body is connected with the sleeve wall, and an outer periphery of the second cover body is connected with the second side wall, and the second cover body, the inner surface of the second side wall, the inner surface of the first side wall, the pressure mounting connector and the outer surface of the sleeve wall form a first filling cavity for filling the aerogel.
[0011] Preferably, the pressure mounting connector comprises a first surface, a second surface, a third surface and a fourth surface arranged in a stepped distribution and opposite to the end cover, the first side wall is connected with the first surface, the sleeve wall is connected with the third surface, the adapter ring is clamped between the third sleeve and the fourth surface, and the first filling cavity is formed by the second surface and the inner surfaces of the first side wall, the second side wall, the second cover body and the outer surface of the sleeve wall.
[0012] Preferably, the sleeve wall comprises a fourth side wall connected with the pressure mounting connector, a fifth side wall connected with the second cover body, and a connecting portion connecting the fourth side wall and the fifth side wall, and the diameter of the fifth side wall is smaller than that of the fourth side wall.
[0013] Preferably, the third sleeve is filled with silica gel.
[0014] The beneficial effects of the present application are: the high-temperature-resistant heat-insulating pressure sensor has the advantages of effective heat insulation to the external instantaneous high-temperature environment by applying the multi-layer space and heat insulation and heat absorption material filling mode, stable performance of the pressure sensor, low cost, and the like. BRIEF DESCRIPTION OF DRAWINGS
[0015] Figure 1 is a structural schematic diagram of the high-temperature-resistant heat-insulating pressure sensor of the embodiment of the present application;
[0016] Figure 2 is Figure 1 is an exploded structural schematic diagram of the high-temperature-resistant heat-insulating pressure sensor in the embodiment;
[0017] Figure 3 is Figure 1 is a sectional structural schematic diagram along the A-A direction in the embodiment;
[0018] The drawings are as follows: high-temperature-resistant heat-insulating pressure sensor 100; first sleeve 1; first side wall 11; second side wall 12; first cover body 13; end cover 131; third side wall 132; first step portion 14; protrusion 15; second sleeve 2; sleeve wall 21; fourth side wall 211; fifth side wall 212; connecting portion 213; second step portion 214; second cover body 22; third sleeve 3; through hole 31; sealing cover 32; pressure mounting connector 4; first surface 41; second surface 42; third surface 43; fourth surface 44; fifth surface 45; pressure sensor body 5; pressure sensitive element 51; signal processing element 52; electrical connector 6; adapter ring 7; support frame 8. DETAILED DESCRIPTION
[0019] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the accompanying drawings. The preferred embodiments of the present application are shown in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the present application can be more thoroughly and completely understood.
[0020] It should be noted that when an element is referred to as being "fixed" to another element, it can be directly on the other element or there can be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there can be an intervening element.
[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
[0022] Referring to Figures 1-3 As shown in the drawings, the high-temperature-resistant heat-insulated pressure sensor 100 provided by the embodiment of the present application comprises a pressure mounting connector 4, a first sleeve 1 connected with the pressure mounting connector 4 to form a first containing space, a second sleeve 2 arranged in the first containing space and connected with the pressure mounting connector 4 to form a second containing space, a third sleeve 3 arranged in the second containing space and connected with the pressure mounting connector 4 to form a third containing space, a pressure sensor body 5 arranged in the third containing space, and an electrical connector 6 arranged at the end of the first sleeve 1 away from the pressure mounting connector 4, wherein the pressure sensor body 5 is physically connected with the electrical connector 6. Specifically, the pressure sensor body 5 and the electrical connector 6 are connected through a plurality of wire cores (not shown in the drawings), and the pressure signal measured by the pressure sensor body 5 is transmitted to the electrical connector 6 through the wire cores.
[0023] The first sleeve 1 and the second sleeve 2 are arranged in a spaced manner, and the inner surface of the first sleeve 1 and the outer surface of the second sleeve 2 are filled with aerogel (not shown in the drawings). The ambient temperature is conducted to the aerogel through the first sleeve 1, and the aerogel performs heat insulation through its extremely low thermal conductivity. The second sleeve 2 and the third sleeve 3 are arranged in a spaced manner, and the inner surface of the second sleeve 2 and the outer surface of the third sleeve 3 are filled with phase change material (not shown in the drawings). The phase change material has the function of heat storage, and when heated to the melting temperature, it undergoes a phase change from solid to liquid. During the melting process, the phase change material absorbs and stores a large amount of latent heat. Therefore, when the ambient temperature is conducted to the phase change material from the second sleeve 2, the phase change material can absorb these heat to prolong the time for the temperature to be transmitted to the pressure sensor body 5 arranged in the third containing space, so that the performance of the pressure sensor body 5 is stable in the ambient transient high-temperature environment.
[0024] The present application effectively insulates the ambient transient high-temperature environment by applying the multi-layer space and the heat-insulating and heat-absorbing material filling mode, thereby ensuring the stability of the performance of the pressure sensor body 5 and reducing the cost. Meanwhile, the high-temperature-resistant heat-insulated sensor 100 has a simple structure, which can simplify the assembly process and improve the assembly efficiency.
[0025] Optionally, the thermal conductivity of the aerogel ranges from 0.013 to 0.019 W / m·k.
[0026] In an embodiment of the present application, a first protective layer (not shown in the drawings) is wrapped on the outer peripheral wall of the first sleeve 1, the second sleeve 2 and the third sleeve 3, so as to further improve the heat insulation effect. Optionally, the first protective layer is a polyimide adhesive tape.
[0027] In another embodiment of the present invention, a second protective layer (not shown in the figure) is further provided on the outer peripheral wall of the first sleeve 1, and the second protective layer wraps around the first protective layer. Optionally, the second protective layer is aluminum foil.
[0028] For further details, please refer to Figures 2-3 As shown, in this embodiment, the high-temperature resistant and heat-insulating pressure sensor 100 further includes an adapter ring 7 sandwiched between the pressure mounting joint 4 and the third sleeve 3, and a support frame 8 disposed on the adapter ring 7 near the third sleeve 3. The pressure sensor body 5 includes a pressure-sensitive element 51 disposed on the adapter ring 7 and a signal processing element 52 disposed on the support frame 8. The output end of the pressure-sensitive element 51 passes through the adapter ring 7 and is connected to the input end of the signal processing element 52.
[0029] Optionally, the signal processing element 52 is a signal amplification circuit board, on which a signal amplification circuitry is integrated.
[0030] Specifically, in this embodiment, the third sleeve 3 is provided with a through hole 31 for filling the third sleeve 3 with silicone gel (not shown in the figure) to isolate the circuit moisture on the signal processing element 52. A sealing cap 32 is correspondingly provided on the through hole 31.
[0031] Optionally, in other embodiments of the present invention, the signal processing element 52 is provided with a temperature sensor (not shown in the figure), which is used to monitor the actual temperature value of the signal processing element 52 in real time when the external ambient temperature changes. Optionally, the temperature sensor is a PT1000.
[0032] For further details, please refer to Figures 2-3 As shown, in this embodiment, the first sleeve 1 includes a first sidewall 11 connected to the pressure mounting connector 4, a second sidewall 12 connected to the first sidewall 11, and a first cover 13 that mates with the second sidewall 12. The diameter of the second sidewall 12 is smaller than the diameter of the first sidewall 11 to form a first stepped portion 14. The first cover 13 includes an end cap 131 and a third sidewall 132 that bends and extends from the edge of the end cap 131 toward the second sidewall 12. The electrical connector 6 passes through the end cap 131, and at least a portion of the third sidewall 132 mates with the first stepped portion 14 to form a receiving space for accommodating one end of the electrical connector 6. By providing the first cover 13, the filling operation of the phase change material can be facilitated. The output end of the signal processing element 52 passes through the third sleeve 3 and the second sleeve 2 in sequence and is connected to the input end of the electrical connector 6.
[0033] Further, please refer to Figures 2-3 As shown in the figure, in the embodiment, the second sleeve 2 comprises a sleeve wall 21 connected with the pressure mounting joint 4 and a second cover 22 in the form of a ring structure, which is spaced apart from the end cover 131. The inner periphery of the second cover 22 is connected with the sleeve wall 21, and the outer periphery of the second cover 22 is connected with the second side wall 12.
[0034] The first filling cavity for filling the aerogel is formed by the outer surface of the second cover 22, the inner surface of the second side wall 12, the inner surface of the first side wall 11, the pressure mounting joint 4 and the outer surface of the sleeve wall 21. The second filling cavity for filling the phase change material is formed by the outer surface of the third sleeve 3, the adapter ring 7, the pressure mounting joint 4, the inner surface of the second sleeve 2, the inner surface of the first cover 13 and the electric connector 6.
[0035] Further, please refer to Figures 2-3 As shown in the figure, in the embodiment, the pressure mounting joint 4 comprises a first surface 41, a second surface 42, a third surface 43 and a fourth surface 44 which are arranged opposite to the end cover 131 and in a stepped distribution. The first side wall 11 is connected with the first surface 41, the sleeve wall 21 is connected with the third surface 43, and the adapter ring 7 is clamped between the third sleeve 3 and the fourth surface 44. The first filling cavity is formed by the second surface 42 and the inner surface of the first side wall 11, the inner surface of the second side wall 12, the second cover 22 and the outer surface of the sleeve wall 21.
[0036] Further, please refer to Figures 2-3 As shown in the figure, in the embodiment, the pressure mounting joint 4 further comprises a fifth surface 45 arranged opposite to the end cover 131, and the third surface 43, the fifth surface 45 and the fourth surface 44 are arranged in a stepped distribution. The second filling cavity is formed by the fifth surface 45 and the inner surface of the second sleeve 2, the inner surface of the first cover 13, the electric connector 6, the adapter ring 7 and the outer surface of the third sleeve 3.
[0037] Further, please refer to Figures 2-3 As shown in the figure, in the embodiment, the sleeve wall 21 comprises a fourth side wall 211 connected with the pressure mounting joint 4, a fifth side wall 212 connected with the second cover 22, and a connecting portion 213 connecting the fourth side wall 211 and the fifth side wall 212. The diameter of the fifth side wall 212 is smaller than that of the fourth side wall 211, so as to increase the distance between the fifth side wall 212 and the second side wall 12, thereby facilitating the filling operation of the aerogel.
[0038] For further details, please refer to Figure 3 As shown, a second stepped portion 214 is formed on the fifth sidewall 212 for engaging with the inner periphery of the second cover 22, and a protrusion 15 is formed on the second sidewall 12 for supporting the outer periphery of the second cover 22. The second stepped portion 214 and the protrusion 15 facilitate the installation of the second cover 22.
[0039] The high-temperature resistant and heat-insulating pressure sensor 100 provided in this embodiment of the invention forms a space for filling with aerogel with heat insulation function and phase change material with heat absorption function by setting a first sleeve 1, a second sleeve 2 and a third sleeve 3 that are connected to and spaced apart from the pressure mounting joint 4. The multi-layer space and the filling method of heat insulation and heat absorption materials effectively insulate against the instantaneous high temperature environment, ensuring the stability of the pressure sensor performance and low cost. At the same time, the high-temperature resistant and heat-insulating pressure sensor 100 has a simple structure, which can simplify the assembly process and improve the assembly efficiency.
[0040] The following experiment verifies the effectiveness of the high-temperature resistant, heat-insulating pressure sensor 100 provided in this embodiment against instantaneous high-temperature environments. In this embodiment, the thermal conductivity of the aerogel is 0.013–0.019 W / m·K. A PT1000 temperature sensor is provided on the signal processing element 52 to monitor the actual temperature value of the signal processing element 52 in real time when the external ambient temperature changes. The specific experimental setup is as follows: The high-temperature resistant, heat-insulating pressure sensor 100 is suspended inside a vacuum reflow oven. The temperature inside the vacuum reflow oven is set to 400°C. When the temperature reaches 400°C, the reading of the PT1000 temperature sensor, i.e., the actual temperature value of the signal processing element 52, is recorded every 2 minutes. The monitoring results are shown in Table 1 below:
[0041] Table 1 Verification of High Temperature Resistance and Thermal Insulation Effect
[0042]
[0043]
[0044] In practical applications, it is required that the temperature of the pressure sensor does not exceed 120°C within 30 minutes in an environment of instantaneous high temperature. As shown in the table above, the high-temperature resistant and heat-insulated pressure sensor provided by this invention has an internal temperature of 101.83°C after 30 minutes, meeting the requirement. Therefore, the high-temperature resistant and heat-insulated pressure sensor provided by this invention can effectively insulate against instantaneous high temperatures in the external environment, ensuring the stability of the pressure sensor's performance.
[0045] Any technical features in the above embodiments can be combined, and for the sake of brevity, not all possible combinations are described above, however, as long as the combinations do not have contradictions, they shall be considered within the scope of the present disclosure.
[0046] The above embodiments only express the preferred implementation manners of the present application, and the description is more specific and detailed, but it shall not be understood as a limitation on the patent scope of the present application. It should be noted that for those skilled in the art, some modifications and improvements can be made without departing from the inventive concept, and these shall be within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the appended claims.
Claims
1. A high temperature resistant, insulated pressure sensor, characterized in that, The pressure sensor body is physically connected with the electric connector, the first sleeve is spaced apart from the second sleeve, the inner surface of the first sleeve and the outer surface of the second sleeve are filled with aerogel, the second sleeve is spaced apart from the third sleeve, and the inner surface of the second sleeve and the outer surface of the third sleeve are filled with a phase change material; The phase change material has a heat storage function, and when heated to a melting temperature, a phase change from a solid state to a liquid state is generated, and during the melting process, the phase change material absorbs and stores a large amount of latent heat; The high-temperature-resistant heat-insulating pressure sensor further comprises an adapter ring clamped between the pressure mounting joint and the third sleeve, and a support frame arranged on the side of the adapter ring close to the third sleeve, the pressure sensor body comprises a pressure sensitive element arranged on the adapter ring and a signal processing element arranged on the support frame, and the output end of the pressure sensitive element is connected with the input end of the signal processing element after penetrating through the adapter ring.
2. The high temperature resistant, insulated pressure sensor of claim 1, wherein, The outer peripheral wall of the first sleeve, the second sleeve and the third sleeve is provided with a first protective layer.
3. The high temperature resistant, insulated pressure sensor of claim 2, wherein, The outer peripheral wall of the first sleeve is further provided with a second protective layer, the second protective layer is wrapped on the first protective layer, and the second protective layer is aluminum foil paper.
4. The high temperature resistant, insulated pressure sensor of claim 2, wherein, The first protective layer is a polyimide adhesive tape.
5. The high temperature resistant, insulated pressure sensor of claim 4, wherein, The first sleeve comprises a first side wall connected with the pressure mounting joint, a second side wall connected with the first side wall, and a first cover body connected with the second side wall in cooperation, the diameter of the second side wall is smaller than the diameter of the first side wall to form a first stepped portion, the first cover body comprises an end cover, a third side wall bent and extended from the edge of the end cover towards the second side wall, the third side wall is at least partially connected with the first stepped portion in cooperation, the electric connector is arranged on the end cover, and the output end of the signal processing element is connected with the input end of the electric connector after penetrating through the third sleeve and the second sleeve in sequence.
6. The high temperature resistant, insulated pressure sensor of claim 5, wherein, The second sleeve comprises a sleeve wall connected with the pressure mounting joint and a second cover body arranged in space with the end cover and in a ring structure, the inner periphery of the second cover body is connected with the sleeve wall, the outer periphery of the second cover body is connected with the second side wall, and the second cover body and the inner surfaces of the second side wall and the first side wall, the outer surface of the pressure mounting joint and the sleeve wall form a first filling cavity for filling the aerogel.
7. The high temperature resistant, insulated pressure sensor of claim 6, wherein, The pressure fitting comprises a first surface, a second surface, a third surface and a fourth surface arranged oppositely to the end cap and in a stepped distribution, the first side wall is connected with the first surface, the sleeve wall is connected with the third surface, the adapter ring is clamped between the third sleeve and the fourth surface, and the first filling cavity is formed by the second surface and the inner surfaces of the first side wall and the second side wall, the second cover body and the outer surface of the sleeve wall.
8. The high temperature resistant, insulated pressure sensor of claim 6, wherein, The sleeve wall comprises a fourth side wall connected with the pressure fitting, a fifth side wall connected with the second cover body, and a connecting portion connecting the fourth side wall and the fifth side wall, and the diameter of the fifth side wall is smaller than that of the fourth side wall.
9. The high temperature resistant, insulated pressure sensor of any of claims 1-8, wherein, The third sleeve is filled with silica gel.
Citation Information
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