A piezoelectric micro pump support structure and gas control device

Abstract

The present invention belongs to the technical field of fluid delivery equipment, and specifically relates to a piezoelectric micropump support structure and a gas control device. A piezoelectric micropump support structure includes a piezoelectric micropump, including a resonance plate, a piezoelectric vibrator and an electrode assembly. The resonance plate and the piezoelectric vibrator are stacked in sequence, and the side of the piezoelectric vibrator away from the resonance plate is connected to the electrode assembly; a bottom plate is connected to the end of the piezoelectric micropump away from the resonance plate, and the gap between the two forms an air inlet cavity, and the bottom plate supports and constrains the piezoelectric micropump. A gas control device includes a piezoelectric micropump support structure; an outer shell cover is arranged on the outside of the piezoelectric micropump, and is sealed and connected to the electrode assembly to form an air outlet cavity, and an air outlet through hole connected to the air outlet cavity is formed on the outer shell. The technical problem that the piezoelectric micropump in the prior art needs to be connected to the peripheral support part through a circumferentially extending connection part, and the support part is laminated and fixed, which greatly increases the volume of the piezoelectric pump.

Description

Technical Field

[0001] The invention belongs to the technical field of fluid conveying equipment, and in particular relates to a piezoelectric micro pump supporting structure and a gas control device. Background Art

[0002] Micro fluid pumps have a wide range of application needs in the fields of medicine and biology, fine chemicals, aerospace, micro-electromechanical systems, etc. Nowadays, as the electronic products of application targets generally have a trend of miniaturization, this also requires micro fluid pumps to be more miniaturized while ensuring their output capacity (output pressure and output flow) or to improve their output capacity without enlarging.

[0003] At present, the main types of gas micro pumps are electromagnetic diaphragm pumps driven by motor cam mechanisms, piezoelectric diaphragm pumps driven by piezoelectric vibrators, and micro pumps using squeeze film effect. Piezoelectric diaphragm pumps are diaphragm pumps that apply alternating voltage to piezoelectric elements to bend and deform the diaphragm. They have the advantages of simple structure, light weight, and low power consumption.

[0004] For example, the patent document with the publication number CN101490419B discloses a piezoelectric pump, and specifically discloses: a plurality of arc-shaped slits are formed on the diaphragm, a circular piezoelectric element is bonded to the center of the circular area of ​​the diaphragm, a cantilever beam is formed between adjacent slits, the cantilever beam connects the piezoelectric element bonding area and the outer frame together, and the piezoelectric element bonding area produces bending deformation. The patent document with the publication number CN102597520B discloses a fluid pump, and specifically discloses: an annular beam is provided between the vibration plate and the vibration support frame, the annular beam is connected to the vibration plate and the vibration support frame respectively through two connecting parts, the vibration plate is bonded to the piezoelectric ceramic, and the vibration plate produces bending deformation. The piezoelectric vibrator and / or the vibration component corresponding thereto in the above two technical solutions use radial support, and there is an outer frame or a support frame distributed on the periphery of the bending deformation area, which is approximately distributed in the same plane, thereby increasing the peripheral size and directly increasing the volume of the piezoelectric pump. Summary of the invention

[0005] The purpose of the present invention is to solve the technical problem that the piezoelectric micro pump in the prior art needs to be connected to the peripheral supporting part through the circumferentially extending connecting part, and the supporting part is laminated and fixed, which greatly increases the volume of the piezoelectric pump. The present invention provides a piezoelectric micro pump supporting structure and a gas control device. The technical solution of the present invention is as follows:

[0006] A piezoelectric micropump support structure comprises: a piezoelectric micropump, the piezoelectric micropump comprising a resonance plate, a piezoelectric vibrator and an electrode assembly, the resonance plate and the piezoelectric vibrator are stacked in sequence, and the side of the piezoelectric vibrator away from the resonance plate is connected to the electrode assembly; a bottom plate, the bottom plate is connected to the end of the piezoelectric micropump away from the resonance plate, and the gap between the two forms an air intake cavity, and the bottom plate supports and constrains the piezoelectric micropump.

[0007] The piezoelectric micropump support structure of the present invention is connected to the bottom of the piezoelectric micropump by setting the bottom of the piezoelectric micropump to be connected to the base plate. Compared with the piezoelectric micropump in the prior art having a circumferentially extending connecting portion and a laminated and fixed supporting portion, the piezoelectric micropump support structure of the present invention greatly reduces or eliminates the structure of the connecting portion and the supporting portion, reduces the circumferential size of the overall structure, and is conducive to the miniaturization of the piezoelectric pump.

[0008] According to an embodiment of the present invention, the base plate supports the piezoelectric micro pump by being connected to the electrode assembly.

[0009] According to an embodiment of the present invention, two electrodes are formed on the electrode assembly, and the two electrodes are fixedly connected to two conductive electrodes of the two piezoelectric elements respectively, and the two electrodes are insulated from each other.

[0010] According to one embodiment of the present invention, the piezoelectric vibrator includes a stacked vibration plate and a piezoelectric element, the piezoelectric element is configured as a flanged type, the piezoelectric element includes a substrate, and two conductive electrodes of the piezoelectric element extend to the same surface of the substrate to be fixedly connected to the two electrodes of the electrode assembly.

[0011] According to one embodiment of the present invention, a through hole is formed in the middle of the substrate, one of the conductive electrodes is flanged from the through hole or the outer edge of the substrate from the first side of the substrate to the second side of the substrate, and the other conductive electrode is arranged on the second side of the substrate, and the two conductive electrodes are insulated and matched.

[0012] According to one embodiment of the present invention, the two conductive electrodes are matched in the form of coaxial rings on the second surface of the substrate, and the two electrodes on the electrode assembly are also arranged on the electrode plate in the form of coaxial rings; or, the center point of the conductive electrode with the flange is offset from the axis, and the electrode assembly includes an insulating layer and two electrodes, the insulating layer is stacked between the piezoelectric element and the two electrodes, and two avoidance holes are opened on the insulating layer, and the connecting ends of the two electrodes pass through the two avoidance holes respectively to be electrically connected to the two conductive electrodes.

[0013] According to an embodiment of the present invention, the base plate is connected to the piezoelectric micropump via a support member to support the piezoelectric micropump, and an air inlet cavity is formed between the piezoelectric micropump, the support member and the base plate.

[0014] According to one embodiment of the present invention, the support member is located at the inner periphery of the electrode assembly, a first protrusion is formed between the first surface of the support member and the piezoelectric vibrator, a second protrusion is formed between the second surface of the support member and the bottom plate, and the first protrusion and the second protrusion have different sizes.

[0015] According to an embodiment of the present invention, a protrusion is formed on the outer periphery of the end surface of the resonance plate away from the piezoelectric vibrator, and a recess is formed on the inner periphery of the protrusion.

[0016] According to one embodiment of the present invention, the resonance plate or the protrusion thereon is connected to the piezoelectric vibrator via a connecting part, and the connecting part is an elastic connecting part, and the connecting part is connected to any position of the piezoelectric vibrator; or, the connecting part is a rigid connecting part, and the connecting part is connected to a node of the piezoelectric vibrator or a position near the node where there is no vibration or very little vibration.

[0017] According to an embodiment of the present invention, air outlet holes are distributed on the connecting portion, and air inlet holes are provided on the piezoelectric vibrator, and the air inlet holes correspond to the recessed portion.

[0018] According to an embodiment of the present invention, the air inlet hole is coaxially arranged with the resonance plate, and a groove is arranged around the air inlet hole on the surface of the vibration plate close to the resonance plate.

[0019] A gas control device comprises: a piezoelectric micropump supporting structure, wherein an air inlet through hole is formed on the bottom plate, and the air inlet through hole is connected to the air inlet cavity; a shell, wherein the shell cover is arranged outside the piezoelectric micropump and is sealed and connected to the electrode assembly to form an air outlet cavity, and an air outlet through hole is formed on the shell and is connected to the air outlet cavity.

[0020] A gas control device comprises: a piezoelectric micropump supporting structure, wherein an air inlet through hole is formed on the bottom plate, and the air inlet through hole is connected to the air inlet cavity; a shell, wherein the shell cover is arranged outside the piezoelectric micropump and is sealed and connected to the electrode assembly to form an air outlet cavity, and an air outlet through hole connected to the air outlet cavity is formed on the shell, and the protrusion is supported by the shell.

[0021] According to an embodiment of the present invention, the top surface of the protrusion is connected to the inner top surface of the shell.

[0022] According to one embodiment of the present invention, the protrusion is supported by the outer shell through a connecting plate, the connecting plate is supported by the side wall of the outer shell or the connecting plate is connected to the inner top surface of the outer shell through a third protrusion so that there is a gap between the connecting plate and the inner top surface of the outer shell, and the protrusion is connected to the connecting plate.

[0023] Based on the above technical solution, the present invention has the following technical effects:

[0024] 1. The piezoelectric micropump support structure of the present invention is connected to the bottom of the piezoelectric micropump by setting the bottom of the piezoelectric micropump to be connected to the bottom plate. Compared with the piezoelectric micropump in the prior art having a radially extending connecting portion and a laminated and fixed supporting portion, the piezoelectric micropump support structure of the present invention greatly reduces or eliminates the structure of the connecting portion and the supporting portion, reduces the circumferential size of the overall structure, and is conducive to the miniaturization of the piezoelectric pump;

[0025] 2. The piezoelectric micropump support structure of the present invention comprises a piezoelectric element and a vibration plate connected as a whole to form a piezoelectric vibrator, the vibration plate is connected to a resonance plate or a protrusion thereon to constrain the resonance plate, and each component of the piezoelectric micropump is connected to each other. During operation, the vibration plate bends and deforms together with the piezoelectric element, and the resonance plate is also deformed under the drive of the vibration plate to realize the air intake and exhaust of the piezoelectric micropump. During the air intake and exhaust process, no deviation or separation occurs between the components.

[0026] 3. The piezoelectric micropump support structure of the present invention supports the piezoelectric element, the vibration plate and the resonance plate by connecting the electrode assembly to the bottom plate, and the electrode assembly plays the role of electrical connection and support. The two electrodes on the electrode assembly are fixedly connected to the two conductive electrodes of the piezoelectric element. In order to ensure that the electrode assembly plays a supporting role, the electrode assembly is set to be plate-shaped, and the piezoelectric element is set to be flanged. The two conductive electrodes of the piezoelectric element extend to the same surface of the substrate. The two electrodes on the electrode assembly are conveniently fixedly connected to the two conductive electrodes, and the electrode assembly can support the piezoelectric element. Furthermore, a conductive electrode is arranged from a through hole in the middle of the substrate or a flange on the outer peripheral surface of the substrate to the same surface as another conductive electrode, so that the electrode assembly can be ensured to have a sufficient bearing surface to bear the piezoelectric element, vibration plate and resonance plate thereon; the two conductive electrodes on the electrode assembly are arranged corresponding to the two electrodes, which can be conveniently connected to form an electrical connection; the fixed connection between the conductive electrode and the electrode can also prevent the two from being offset or separated; in addition, the piezoelectric micropump can be arranged to be connected to the bottom plate through a support member, and the electrode assembly does not need to play a supporting role. Specifically, a through hole is provided in the middle of the electrode assembly, and the support member is located at the inner periphery of the electrode assembly and is respectively connected to the piezoelectric vibrator and the bottom plate, and protrusions are formed between the support member and the piezoelectric vibrator, and between the support member and the bottom plate, so that there is a gap between the piezoelectric vibrator and the support member. Regardless of whether the support member is an elastic support member or a rigid support member, when the piezoelectric vibrator vibrates, the non-connected surface of the piezoelectric element and the support member will not collide, and the vibration deformation of the piezoelectric vibrator will not be affected;

[0027] 4. The piezoelectric micropump support structure of the present invention is provided with a resonance plate connected to the piezoelectric vibrator through a connection part. When the connection part is an elastic connection part, the connection part can be deformed with the vibration of the piezoelectric vibrator. The connection position between the connection part and the piezoelectric vibrator is not required, but the connection position is preferably a position where there is no vibration or very little vibration at or near the node of the piezoelectric vibrator; when the connection part is a rigid connection part, the connection part cannot be deformed with the vibration of the piezoelectric vibrator. The connection position between the connection part and the piezoelectric vibrator must be a position where there is no vibration or very little vibration at or near the node of the piezoelectric vibrator, so as not to affect the vibration deformation of the piezoelectric vibrator and the resonance plate. A protrusion is formed on the resonance plate, and a concave part is formed on the inner periphery of the protrusion. The rigidity of the connection part and the concave part area is small. Under the action of the piezoelectric element, the resonance plate can be equivalent to a two-degree-of-freedom vibration system. When the piezoelectric vibrator bends and deforms in a direction away from the resonance plate, the outer periphery of the resonance plate with greater rigidity deforms in a direction close to the bending deformation of the vibrator, and the concave part on the resonance plate deforms in a direction away from the bending deformation of the vibrator, and the piezoelectric micropump is inhaled. During the intake process, the outer circumference of the resonance plate with greater rigidity deforms in the direction close to the bending deformation of the piezoelectric vibrator, and the outer circumference of the resonance plate fits more closely with the piezoelectric vibrator, resulting in less reverse leakage when inhaling gas; when the piezoelectric vibrator bends and deforms in the direction close to the resonance plate, the outer circumference of the resonance plate with greater rigidity deforms in the direction away from the bending deformation of the vibrator, and the concave portion on the resonance plate deforms in the direction close to the bending deformation of the vibrator, and the piezoelectric micropump is exhausted. During the exhaust process, the concave portion deforms in the direction close to the bending deformation of the piezoelectric vibrator, and the center of the piezoelectric vibrator fits more closely with the concave portion of the resonance plate, the air intake hole is completely closed, and there is less reverse leakage when exhausting gas, so that the output pressure of the piezoelectric micropump can be increased dramatically. In addition, the connection part and the concave part have small rigidity, which can increase the amplitude. The increase in amplitude can increase the amount of gas inhaled and discharged, thereby increasing the output flow rate of the piezoelectric micropump. This can make up for the defect of low energy conversion efficiency caused by the miniaturization of the piezoelectric micropump, so that the piezoelectric micropump can be miniaturized while improving the output flow rate and output pressure of the piezoelectric micropump, that is, the energy conversion efficiency;

[0028] 5. The gas control device of the present invention comprises a piezoelectric micropump support structure and a housing. The housing covers the outside of the piezoelectric micropump and is sealed and connected to the electrode assembly. The piezoelectric micropump does not need to be circumferentially connected to the housing. The cavity formed by the housing and the bottom plate can be divided into an air inlet cavity and an air outlet cavity. The gas control device has a small volume and a good gas delivery effect.

[0029] 6. In the gas control device of the present invention, the piezoelectric vibrator is supported by the bottom plate, and the protrusion on the resonance plate is supported by the outer shell, that is, both ends of the piezoelectric micropump are supported, which further improves the stability of the piezoelectric micropump in the outer shell; in addition, the protrusion can be directly connected to the inner top surface of the outer shell, or connected to the side wall or the inner top surface of the outer shell through a connecting plate, so that the protrusion can be supported by the outer shell; the connecting plate is further arranged to be an elastic connecting plate, and there is a gap between the connecting plate and the inner top surface of the outer shell. Then, the connecting plate will not affect the vibration deformation of the piezoelectric micropump while supporting the piezoelectric micropump. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is a cross-sectional view of a piezoelectric micropump support structure according to a first embodiment of the present invention;

[0031] Figure 2 is a schematic diagram of the structure of the resonance plate and its upper connecting part;

[0032] Figure 3-7 A schematic diagram of the structure of a replacement solution for a resonance plate and a connection portion thereon;

[0033] Figure 8 is a cross-sectional view of a protrusion on a resonance plate;

[0034] Figure 9-11 A schematic diagram of a structure of an alternative solution for protrusions on a resonance plate;

[0035] Fig.12 It is a schematic diagram of the structure of a piezoelectric vibrator;

[0036] Fig.13 is a schematic diagram of the structure of the vibration plate;

[0037] Fig.14 A schematic diagram of the structure of a replacement solution for a vibration plate;

[0038] Fig.15 is a schematic diagram of the structure of a piezoelectric element;

[0039] Fig.16 for Fig.15 AA section view;

[0040] Fig.17 This is the state diagram of the piezoelectric micro pump when it is intake;

[0041] Fig.18 This is the state diagram of the piezoelectric micro pump when exhausting;

[0042] Fig.19 is a cross-sectional view of a gas control device;

[0043] Fig. 20 This is an exploded view of the gas control device;

[0044] Fig.21 It is a reverse exploded view of the gas control device;

[0045] Fig. 22 It is a structural schematic diagram of a piezoelectric element according to a second embodiment of the present invention;

[0046] Fig.23 for Fig. 22 BB cross-section diagram;

[0047] Fig.24 is a schematic structural diagram of an electrode assembly of Example 2;

[0048] Fig.25 A schematic diagram of the structure of an electrode plate of an electrode assembly;

[0049] Fig.26 is a schematic diagram of the structure of two electrodes of the electrode assembly;

[0050] Fig. 27 is a schematic structural diagram of a piezoelectric element according to a third embodiment of the present invention;

[0051] Fig.28 for Fig. 27 CC profile of ;

[0052] Fig.29 is a cross-sectional view of a gas control device according to a fourth embodiment of the present invention;

[0053] Fig.30 is a schematic structural diagram of a first plate;

[0054] Fig.31 is a schematic structural diagram of a second plate;

[0055] Fig.32 is a structural schematic diagram of the third plate;

[0056] Fig.33 is a cross-sectional view of a gas control device according to a fifth embodiment of the present invention;

[0057] Fig.34 The state diagram of the piezoelectric micro pump when the protrusion on the resonance plate is connected by a rigid part;

[0058] Fig.35 The state diagram of the piezoelectric micro pump when exhausting when the protrusion on the resonance plate is connected by a rigid part;

[0059] Fig.36 is a cross-sectional view of a gas control device according to a sixth embodiment of the present invention;

[0060] Figure 37-41 A structural schematic diagram of a replacement solution for a connecting plate;

[0061] Fig.42is a cross-sectional view of a gas control device according to a seventh embodiment of the present invention;

[0062] Fig.43 is a cross-sectional view of a gas control device according to an eighth embodiment of the present invention;

[0063] Wherein: 1-resonance plate; 11-connecting part; 111-first connecting part; 1111-first connecting arm; 1112-air outlet; 112-second connecting part; 12-protrusion; 121-first flow groove; 13-recess; 2-piezoelectric vibrator; 21-vibration plate; 211-first through hole; 212-groove; 213-second flow groove; 22-piezoelectric element; 221-base; 2211-through hole; 222-first conductive electrode; 223-second conductive electrode; 224-insulating area; 3-electrode assembly; 31-electrode plate; 311-second through hole; 32-first electrode; 33-second electrode; 34-insulating layer; 341- The third through hole; 342-avoidance hole; 35-first plate; 351-first plate body; 352-first external terminal; 353-first power supply terminal; 36-second plate; 361-second plate body; 362-second external terminal; 363-second power supply terminal; 37-third plate; 4-bottom plate; 41-air inlet through hole; 42-air inlet cavity; 43-second protrusion; 5-shell; 51-upper cover; 511-air outlet through hole; 52-support side plate; 53-air outlet cavity; 6-support member; 7-first protrusion; 8-connecting plate; 81-outer plate body; 82-inner plate body; 83-second connecting arm; 84-flow hole; 9-third protrusion. DETAILED DESCRIPTION

[0064] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0065] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0066] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0067] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0068] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0069] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0070] Embodiment 1

[0071] like Figure 1-21 As shown, this embodiment provides a piezoelectric micropump support structure, including a piezoelectric micropump and a bottom plate 4, the bottom of the piezoelectric micropump is connected to the bottom plate 4, the gap between the piezoelectric micropump and the bottom plate 4 forms an air inlet cavity 42, and the bottom plate 4 supports and constrains the piezoelectric micropump from below the piezoelectric micropump. This avoids the disadvantage that the piezoelectric micropump in the prior art is connected to the peripheral supporting part through the circumferentially arranged connecting part, and the supporting part is laminated and fixed, which increases the circumferential volume of the piezoelectric micropump.

[0072] The piezoelectric micropump includes a resonance plate 1, a piezoelectric vibrator 2 and an electrode assembly 3. The piezoelectric vibrator 2 includes a vibration plate 21 and a piezoelectric element 22. The resonance plate 1, the vibration plate 21 and the piezoelectric element 22 are stacked in sequence. The side of the piezoelectric element 22 away from the vibration plate 21 is connected to the electrode assembly 3. The piezoelectric element 22 and the vibration plate 21 are connected as a whole. The resonance plate 1 is connected to the vibration plate 21 through a connecting portion 11 to constrain the resonance plate 1.

[0073] The resonance plate 1 is in the shape of a plate, which may be circular, square or other polygonal shapes. In this embodiment, the outer contour of the resonance plate 1 is circular. The resonance plate 1 is made of elastic material. The resonance plate 1 is connected to the vibration plate 21 through the connection part 11. The connection part 11 is annular, one end of which is connected to the resonance plate 1, and the other end is connected to the vibration plate 21. Figure 2 As shown, the connection part 11 includes a first connection part 111 and a second connection part 112, the first connection part 111 is located at the inner periphery of the second connection part 112 and is fixedly connected or integrally formed with the second connection part 112, the first connection part 111 is used to connect with the resonance plate 1, and the second connection part 112 is used to connect with the piezoelectric vibrator 2. Specifically, the first connection part 111 includes at least two first connection arms 1111, the at least two first connection arms 1111 are evenly distributed in the circumferential direction, an air outlet 1112 is formed between two adjacent first connection arms 1111, and the second connection part 112 is in a circular ring shape. The connecting part 11 can be an elastic connecting part or a rigid connecting part. When the connecting part 11 is an elastic connecting part, the first connecting arm 1111 can be connected to any position of the resonance plate 1, and the outer end of the connecting part 11 can be connected to any position of the vibration plate 21, preferably connected to a node of the vibration plate 21 or a position near the node where there is no vibration or very little vibration; when the connecting part 11 is a rigid connecting part, the first connecting arm 1111 is preferably connected to the outer peripheral wall of the resonance plate 1, and the outer end of the connecting part 11 is connected to a node of the vibration plate 21 or a position near the node where there is no vibration or very little vibration.

[0074] As an alternative technical solution for the connecting portion 11, the first connecting arm 1111 of the connecting portion 11 can be Figure 2 In addition to the radially extending structure, it can also be in other forms such as S-type, double S-type, T-type, etc. Figure 3-5In addition, the connecting portion 11 may not be a closed ring, but may be discrete. The connecting portion 11 is provided with at least two, at least two first connecting arms 1111 are evenly arranged, and there are at least two second connecting portions 112, and at least two second connecting portions 112 correspond to the first connecting arms 1111 in a one-to-one manner. Figure 6 In addition, the connecting portion 11 may also include only the first connecting portion 111, that is, include at least two first connecting arms 1111, as shown in FIG. Figure 7 As shown, two ends of at least two first connecting arms 1111 are respectively connected to the resonance plate 1 and the vibration plate 21 , and the circumferential gap between two adjacent first connecting arms 1111 can form an air outlet 1112 .

[0075] In order to increase the energy conversion efficiency of the piezoelectric micropump, a protrusion 12 is provided on the surface of the resonance plate 1 away from the piezoelectric vibrator 2. The protrusion 12 can be integrally formed with the resonance plate 1, or can be separately provided and then fixedly connected. The protrusion 12 can be circular, square or other polygonal shapes. In this embodiment, the protrusion 12 is annular and is provided close to the circumferential edge of the resonance plate 1. The inner periphery of the protrusion 12 forms a recessed portion 13. The recessed portion 13 can be circular, square or other polygonal shapes. In this embodiment, the recessed portion is circular. Since the stiffness of the connection portion 12 and the recessed portion 13 is small, the piezoelectric micropump can form a two-degree-of-freedom vibration system; in addition, the two-degree-of-freedom vibration system can have a higher natural frequency under low stiffness and low mass, so that the sound generated by the vibration is farther away from the audible range of the human ear, thereby effectively eliminating the audible noise of the human ear; secondly, the connection portion has a small stiffness and has a vibration isolation effect. When the resonance plate resonates, the high-frequency vibration has little effect on other components of the piezoelectric micropump, avoiding collision when the piezoelectric micropump contacts the outside world, and no other noise is generated. Preferably, the protrusion 12 , the resonance plate 1 and the connecting portion 11 are coaxially arranged. Alternatively, the first connecting arm 1111 of the connecting portion 11 may also be connected to the protrusion 12 .

[0076] As an alternative technical solution for the protrusion 12, Fig. 9 As shown, the protrusion 12 may be in a circular shape with a groove formed in the middle, and the opening side of the groove of the protrusion 12 is connected to the resonance plate 1. In this way, the rigidity of the resonance plate 1 corresponding to the groove of the protrusion 12 is small, and the piezoelectric micropump can still form a two-degree-of-freedom vibration system.

[0077] As an alternative technical solution for the protrusion 12, Figure 10-11As shown, the protrusion 12 is in a circular shape with a groove formed in the middle, and one side of the groove opening of the protrusion 12 is connected to the resonance plate 1. A first flow groove 121 extends from the outer periphery of the groove opening of the protrusion 12, and the first flow groove 121 extends radially from the groove opening to the outer peripheral surface of the protrusion 12. When there are more than two first flow grooves 121, the more than two first flow grooves 121 are evenly distributed along the circumferential direction. In addition, when the protrusion 12 is annular, the connection surface where the protrusion 12 is connected to the resonance plate 1 may also be distributed with flow grooves.

[0078] The piezoelectric vibrator 2 includes a vibration plate 21 and a piezoelectric element 22. The vibration plate 21 is arranged close to the resonance plate 1. The piezoelectric element 22 is stacked on a side of the vibration plate 21 away from the resonance plate 1. The piezoelectric element 22 and the vibration plate 21 can be circular, square or other polygonal plate structures. In this embodiment, the vibration plate 21 and the piezoelectric element 22 are both circular plate structures. One or more air inlets are arranged at or near the center of the piezoelectric vibrator 2. In this embodiment, one air inlet is arranged. The air inlet specifically includes a through hole 2211 and a first through hole 211 that are interconnected. The through hole 2211 is arranged on the piezoelectric element 22, and the first through hole 211 is arranged on the vibration plate 21. The through hole 2211 and the first through hole 211 are connected to form the air inlet of the piezoelectric vibrator 2. Preferably, the periphery of the vibration plate 21 is connected to the periphery of the resonance plate 1, the outer diameter of the piezoelectric element 22 is smaller than the outer diameter of the vibration plate 21, the aperture of the through hole 2211 is smaller than the aperture of the first through hole 211, and the through hole 2211 is coaxially connected to the first through hole 211. Preferably, the through hole 2211 is arranged in the middle of the piezoelectric element 22, and the first through hole 211 is arranged in the middle of the vibration plate 21.

[0079] A groove 212 is formed on the end surface of the vibration plate 21 near the resonance plate 1 around the first through hole 211. The groove 212 may be in a ring, polygon, or other special-shaped shapes. Preferably, the groove 212 is in a ring shape and is coaxially arranged with the first through hole 221. In order to ensure that the piezoelectric micropump does not leak during operation and to ensure stable transmission of the gas, preferably, the inner diameter of the groove 212 is not greater than the outer diameter of the resonance plate 1, and the outer diameter of the groove 212 is not less than the outer diameter of the resonance plate 1.

[0080] As a preferred technical solution of this embodiment, a second flow groove 213 is further extended from the side where the opening of the groove 212 is located, and the second flow groove 213 extends from the outer edge of the opening of the groove 212 to the outer peripheral surface of the vibration plate 21. By providing the second flow groove 213 connected to the groove 212, the air outlet 1112 may not be provided on the connecting portion 11 of the resonance plate 1, and the air flow in the piezoelectric micro pump can be discharged from the second flow groove 213.

[0081] An electrode assembly 3 is provided at one end of the piezoelectric vibrator 2 away from the resonance plate 1. On the one hand, the electrode assembly 3 can supply power to the piezoelectric element 22. On the other hand, the electrode assembly 3 can be connected to the bottom plate 4 to support the resonance plate 1 and the piezoelectric vibrator 2 thereon. In this embodiment, in order to ensure that the electrode assembly 3 plays the role of both support and power supply, the structures of the electrode assembly 3 and the piezoelectric element 22 are configured accordingly. Specifically, the piezoelectric element 22 is configured as a flanged type so that the two conductive electrodes of the piezoelectric element 22 are located on the same surface of the piezoelectric element 22 to be connected to the electrode assembly 3. The piezoelectric element 22 includes a substrate 221, a through hole 2211 is opened on the substrate 221, a first conductive electrode 222 is arranged on the second surface of the substrate 221, and a second conductive electrode 223 is flanged from the first surface of the substrate 221 from the through hole 2211 to the second surface of the substrate 221, and the first conductive electrode 222 and the second conductive electrode 223 are insulated from each other. Preferably, the first conductive electrode 222 is in a circular ring shape, and the flanged portion of the second conductive electrode 223 flanged to the second surface of the substrate 221 is also in a circular ring shape, and the flanged portion of the second conductive electrode 223 is located at the inner periphery of the first conductive electrode 222, and an annular insulating region 224 is formed between the second conductive electrode 223 and the first conductive electrode 222. In this embodiment, the insulating region 224 is a radial gap in the shape of a circular ring, and in addition, an insulating material may be filled between the two conductive electrodes to achieve the effect of preventing the two conductive electrodes from being connected to each other.

[0082] Correspondingly, the electrode assembly 3 includes an electrode plate 31, and two electrodes are formed on one surface of the electrode plate 31 close to the piezoelectric element 22, namely a first electrode 32 and a second electrode 33, and the two electrodes are arranged corresponding to the two conductive electrodes. In this embodiment, a second through hole 311 is arranged in the middle of the electrode plate 31, and the second through hole 311 is arranged coaxially with the first air inlet hole. The first electrode 32 and the second electrode 33 are both annular, and the first electrode 32 is located at the outer periphery of the second electrode 33. The radial clearance between the first electrode 32 and the second electrode 33 is matched to insulate the two electrodes. Preferably, the axis of the first electrode 32, the axis of the second electrode 33 and the axis of the second through hole 311 are arranged coaxially, the aperture of the second through hole 311 and the through hole 2211 are the same, and the inner diameter of the second electrode 33 is equal to the inner diameter of the second through hole 311. When the electrode plate 31 is flexibly supported, the connection position between it and the piezoelectric vibrator 2 can be set at any position without affecting the vibration of the piezoelectric vibrator 2; when the electrode plate 31 is rigidly supported, the connection position between it and the piezoelectric vibrator 2 needs to be set at a position at or near a node of the piezoelectric vibrator 2 where there is no vibration or very little vibration.

[0083] The first electrode 32 is fixedly connected to the first conductive electrode 222, and the second electrode 33 is fixedly connected to the flange portion of the second conductive electrode 223. The corresponding electrodes and conductive electrodes can be fixedly connected by bonding or welding. The fixed connection between the two can form an electrical connection on the one hand, and on the other hand, the piezoelectric element 22 and the vibration plate 21 and the resonance plate 1 thereon can be constrained on the electrode assembly 3.

[0084] The side of the electrode plate 31 away from the piezoelectric element 22 is fixedly connected to the bottom plate 4. Specifically, the middle of the side of the bottom plate 4 facing the electrode plate 31 is concave, the electrode plate 31 is flat, the plate surface of the electrode plate 31 is fixedly connected to the periphery of the bottom plate 4, an air inlet cavity 42 is formed between the electrode plate 31 and the bottom plate 4, and an air inlet through hole 41 connected to the air inlet cavity 42 is opened on the bottom plate 4. By setting the middle of the side of the bottom plate 4 facing the electrode plate 31 to be concave, on the one hand, the air inlet cavity 42 can be formed; on the other hand, space can be reserved for the electrode plate 31 to bend and deform with the piezoelectric element 22.

[0085] During the operation of the piezoelectric micropump of this embodiment, the area corresponding to the connecting portion 11 and the recessed portion 13 on the resonance plate 1 has low stiffness and is prone to deformation. The resonance plate 1 is equivalent to a two-degree-of-freedom vibration system, and the natural frequency of the system is ω 1 ,ω 2 :

[0086]

[0087] Where: k 1 is the equivalent stiffness of the connection, m 1 is the equivalent mass of the connecting part and the resonance plate except the corresponding part of the concave part, k 2 is the equivalent stiffness of the concave part corresponding to the resonance plate, m 2 is the equivalent mass of the resonant plate corresponding to the concave portion.

[0088] When the external driving frequency is ω 2 When , the resonance plate 1 resonates, and the vibration mode is the main vibration mode of higher frequency, such as Figure 17-18 At this time, the bending directions of the protrusion 12 and the recess 13 are opposite, when the protrusion 12 moves upward, the recess 13 bends downward; when the protrusion 12 moves downward, the recess 13 bends upward.

[0089] When the external driving frequency is ω 2When the piezoelectric vibrator 2 bends and deforms in a direction away from the resonance plate 1, the protrusion 12 deforms in a direction close to the piezoelectric vibrator 2, and the recessed portion 13 deforms in a direction away from the piezoelectric vibrator 2, and the piezoelectric micropump inhales gas; when the piezoelectric vibrator 2 bends and deforms in a direction close to the resonance plate 1, the protrusion 13 deforms in a direction away from the piezoelectric vibrator 2, and the recessed portion 13 deforms in a direction close to the piezoelectric vibrator 2, and the piezoelectric micropump discharges gas; the two processes alternately reciprocate to form a continuous outflow.

[0090] This embodiment further provides a gas control device, including the above-mentioned piezoelectric micropump support structure, and also includes a shell 5, the shell 5 is covered on the outside of the piezoelectric micropump and is sealed and connected to the electrode assembly 3.

[0091] The housing 5 includes an upper cover 51 and a supporting side plate 52, which can be separately provided or integrally formed. The lower end of the supporting side plate 52 is sealedly connected to the upper surface of the electrode plate 31 of the electrode assembly 3, and the upper end of the first supporting side plate 52 is sealedly connected to the upper cover 51. An air outlet cavity 53 is formed between the housing 5 and the electrode plate 31, and an air outlet through hole 511 is provided on the housing 5. Preferably, the air outlet through hole 511 is provided on the upper cover 51.

[0092] Based on the above structure, the working process of the gas control device of this embodiment is as follows: external gas enters the air inlet cavity 42 from the air inlet hole 41 on the bottom plate 4, and when the piezoelectric vibrator 2 bends and deforms toward the bottom plate 4, the protrusion 12 deforms in the direction of bending and deforming close to the piezoelectric vibrator 2, and the recessed portion 13 of the resonance plate 1 deforms in the direction of bending and deforming away from the piezoelectric vibrator 2, and the piezoelectric micro pump inhales gas from the air inlet cavity 42; when the piezoelectric vibrator 2 bends and deforms in the direction of bending and deforming close to the resonance plate 1, the protrusion 12 deforms in the direction of bending and deforming away from the piezoelectric vibrator 2, and the recessed portion 13 deforms in the direction of bending and deforming close to the piezoelectric vibrator 2, and the gas in the piezoelectric micro pump is discharged to the air outlet cavity 53, and then discharged through the air outlet hole 511. The continuous operation of the piezoelectric micro pump can form a continuous outflow from the air outlet hole 511.

[0093] The piezoelectric micropump support structure and gas control device of this embodiment can greatly reduce the volume of the piezoelectric micropump by greatly reducing or eliminating the circumferential connecting part and the laminated fixing part of the piezoelectric micropump; the two-degree-of-freedom vibration system of the piezoelectric micropump makes up for the defect of low energy conversion efficiency caused by the miniaturization of the piezoelectric micropump, so that the piezoelectric micropump can be miniaturized while improving the output flow and output pressure of the piezoelectric micropump, that is, the energy conversion efficiency.

[0094] Embodiment 2

[0095] like Figure 22-26 As shown, this embodiment is basically the same as the first embodiment, except that the structures of the piezoelectric element 22 and the electrode assembly 3 are different.

[0096] In this embodiment, the first conductive electrode 222 of the piezoelectric element 22 is disposed on the second surface of the substrate 221, and the second conductive electrode 223 is flanged from the through hole 2211 on the first surface of the substrate 221 to the second surface of the substrate 221. The flanged portion of the second conductive electrode 223 on the second surface of the substrate 221 is arranged away from the axis, and an insulating region 224 is formed between the flanged portion of the second conductive electrode 223 and the first conductive electrode 222. Fig. 22 As shown, the flange portion of the second conductive electrode 223 is in a horseshoe shape.

[0097] The electrode assembly 3 is a stacked structure, and the electrode assembly 3 includes an insulating layer 34, a third through hole 341 is provided in the middle of the insulating layer 34, and avoidance holes 342 are provided on both sides of the third through hole 341. The first electrode 32 and the second electrode 33 are fixedly assembled on the side of the insulating layer 34 away from the piezoelectric element 22, and the connection ends of the first electrode 32 and the second electrode 33 are respectively electrically connected to the two conductive electrodes through the two avoidance holes 342. In addition to the connection between the electrodes, the piezoelectric element 22 can also be fixedly connected to the insulating layer 34 to increase the stability of the connection.

[0098] Embodiment 3

[0099] like Figure 27-28 As shown, this embodiment is basically the same as the second embodiment, except that the arrangement of the two conductive electrodes on the piezoelectric element 22 is different.

[0100] In this embodiment, the first conductive electrode 222 of the piezoelectric element 22 is configured on the second surface of the substrate 221, and the second conductive electrode 223 is flanged from the first surface of the substrate 221 from the outer peripheral surface of the substrate 221 to the second surface of the substrate 221. The flanged portion of the second conductive electrode 223 on the second surface of the substrate 221 is set away from the axis, and an insulating area 224 is formed between the flanged portion of the second conductive electrode 223 and the first conductive electrode 222.

[0101] Embodiment 4

[0102] like Figure 29-32 As shown, this embodiment is basically the same as the first embodiment, except that the electrode assembly 3 does not support the resonance plate 1 and the piezoelectric vibrator 2 thereon, and a support member 6 is additionally provided in this embodiment to support the piezoelectric micro pump.

[0103] Specifically, the electrode assembly 3 is a stacked plate-like structure. The electrode assembly 3 includes a first plate 35, a third plate 37, and a second plate 36 stacked in sequence. The first plate 35 includes a first plate body 351. A large through hole is formed in the middle of the first plate body 351. A first external terminal 352 extends from the outer edge of the first plate body 351, and a first power supply terminal 353 extends from the inner edge. The second plate 36 includes a second plate body 361. A large through hole is formed in the middle of the second plate body 361. A second external terminal 362 extends from the outer edge of the second plate body 361, and a second power supply terminal 363 extends from the inner edge. A large through hole is formed in the middle of the third plate 37. When the three plates are stacked, the three through holes are connected to each other and the aperture is larger than the outer diameter of the piezoelectric vibrator 2. The three plates have the same appearance. In this embodiment, the three plates are all square. After stacking, the two external terminals are staggered with each other, and the two power supply terminals are staggered with each other.

[0104] The piezoelectric micropump is supported on the bottom plate 4 through the support member 6. The support member 6 is located at the inner periphery of the electrode assembly 3, and is connected to the bottom plate 4 and the piezoelectric vibrator 2, respectively. In this embodiment, the support member 6 is annular, and the first surface of the support member 6 is connected to the piezoelectric element 22 of the piezoelectric vibrator 2 through the first protrusion 7, and the second surface of the support member 6 is connected to the bottom plate 4 through the second protrusion 43. Preferably, the first protrusion 7 and the second protrusion 43 are both annular, the first protrusion 7 is arranged near the inner end of the support member 6, and the second protrusion 43 is arranged near the outer end of the support member 6. The first protrusion 7 can be integrally formed with the piezoelectric element 22 and then connected to the support member 6; or the first protrusion 7 is integrally formed with the support member 6 and then connected to the piezoelectric element 22; or the first protrusion 7 is arranged separately, and its two surfaces are connected to the piezoelectric element 22 and the support member 6, respectively. Similarly, the second protrusion 43 can be integrally formed with the support member 7 or the bottom plate 4, or can be arranged separately. By providing the support member 6 , the support member 6 , the base plate 4 , the piezoelectric element 22 and the two protrusions surround and form an air intake cavity 42 .

[0105] When the support member 6 is an elastic member, the support member 6 can be connected to any position of the piezoelectric element 22; when the support member 6 is a rigid member, the support member 6 needs to be connected to a node of the piezoelectric element 22 or a position near the node where there is no vibration or very little vibration.

[0106] Embodiment 5

[0107] like Figure 33-35 As shown, the structure of the gas control device of this embodiment is basically the same as that of the first embodiment, except that the protrusion 12 at the upper end of the piezoelectric micropump is also supported.

[0108] In this embodiment, the surface of the protrusion 12 away from the resonance plate 1 is directly connected to the inner top surface of the upper cover 51 of the housing 5, which plays a role in stably supporting the piezoelectric micro pump. The location of the gas outlet hole 511 is changed. Since the protrusion 12 is connected to the upper cover 51, the gas outlet hole 511 can be set on the supporting side plate 52, or the gas outlet hole 511 can be set on the upper cover 51 and located at the outer periphery of the protrusion 12, so as to facilitate the gas in the gas outlet cavity 53 to be discharged from the gas outlet hole 511.

[0109] like Figure 34-35 As shown, when the protrusion 12 is rigidly supported by the upper cover 51, the stiffness of the area of ​​the resonance plate 1 corresponding to the recessed portion 13 is relatively small, and bending deformation occurs under the excitation of the piezoelectric vibrator 2. When the vibration of the area of ​​the resonance plate 1 corresponding to the recessed portion 13 is 90 degrees out of phase with the vibration of the piezoelectric vibrator 2, the volume change rate is maximum. The working principle is: when the piezoelectric vibrator 2 bends and deforms in a direction away from the resonance plate 1, the area of ​​the resonance plate 1 corresponding to the recessed portion 13 is deformed in a bending deformation direction away from the piezoelectric vibrator 2, and the piezoelectric micropump inhales gas; when the piezoelectric vibrator 2 bends and deforms in a direction close to the resonance plate 1, the area of ​​the resonance plate 1 corresponding to the recessed portion 13 is deformed in a bending deformation direction close to the piezoelectric vibrator 2, and the piezoelectric micropump discharges gas, and the two processes alternately reciprocate to form a continuous outflow.

[0110] In addition to the first embodiment, the above-mentioned distinguishing structure can also be applied to the gas control devices in other embodiments to enhance the stable support of the piezoelectric micro pump.

[0111] Embodiment 6

[0112] like Figure 36-41 As shown, the structure of this embodiment is basically the same as that of the fifth embodiment, except that the protrusion 12 is connected to the housing 5 via the connecting plate 8. The connecting plate 8 is supported by the housing 5, and the protrusion 12 is connected to the connecting plate 8.

[0113] Specifically, the outer periphery of the connecting plate 8 is stacked and fixed between the upper cover 51 and the supporting side plate 52. A larger groove is opened in the middle of the upper cover 51 so that there is a distance between the connecting plate 8 and the bottom of the groove. The connecting plate 8 is an elastic connecting plate, so that the connecting plate 8 will not affect the vibration deformation of the piezoelectric micropump.

[0114] As a preferred technical solution of this embodiment, the connecting plate 8 includes an outer plate body 81 and an inner plate body 82 with radial clearance fit, and the outer plate body 81 and the inner plate body 82 are connected as a whole through a second connecting arm 83. There are at least two second connecting arms 83, and at least two second connecting arms 83 are evenly distributed circumferentially, and a flow hole 84 is formed between two adjacent second connecting arms 83. The airflow discharged through the air outlet hole 1112 can flow through the flow hole 84 to between the connecting plate 8 and the upper cover 51, and then be discharged through the air outlet hole 511 on the upper cover 51. Preferably, the outer plate body 81 is a square with the same shape as the outer shell 5, and the inner plate body 82 can be a square, round or other polygonal plate.

[0115] As an alternative technical solution of the connecting plate 8, the second connecting arm 83 in the connecting plate 8 can be Fig.37 In addition to the radially extending structure, it can also be in other forms such as S-type, double S-type, T-type, etc. Figure 38-41 shown.

[0116] In addition, the connecting plate 8 can also be configured as an integral plate shape without providing the flow holes 84 , and the gas discharge can also be achieved by providing the gas outlet holes 511 on the supporting side plates 52 .

[0117] Embodiment 7

[0118] like Fig.42 As shown, this embodiment is basically the same as the sixth embodiment, except that the connection structure between the connecting plate 8 and the housing 5 is different. In this embodiment, the connecting plate 8 can be accommodated in the housing 5. The connecting plate 8 is connected to the upper cover 51 in the housing 5 through the third protrusion 9.

[0119] Specifically, the connecting plate 8 may be in a square, circular or other polygonal shape, the size of the connecting plate 8 is larger than the size of the protrusion 12, the third protrusion 9 is located on the side of the connecting plate 8 away from the protrusion 12, the first surface of the third protrusion 9 is connected to the connecting plate 8, and the second surface of the third protrusion 9 is connected to the upper cover 51. Preferably, the third protrusion 9 is annular, and the inner diameter of the third protrusion 9 is not less than the outer diameter of the protrusion 12. Through the third protrusion 9, a gap can be provided between the connecting plate 8 and the upper cover 51, leaving space for the connecting plate 8 to deform with the piezoelectric micro pump.

[0120] In this embodiment, a flow hole is formed on the connecting plate 8 at a radial position between the protrusion 12 and the third protrusion 9, and a plurality of air outlet holes 511 may be formed on the upper cover 51. At least one air outlet hole 511 may be arranged on the center line of the upper cover 51, and at least one air outlet hole 511 is arranged close to the supporting side plate 52 to ensure the discharge of airflow.

[0121] Embodiment 8

[0122] like Fig.43As shown, this embodiment is basically the same as the fourth embodiment, except that the piezoelectric micro pump is directly supported on the base plate 4.

[0123] In this embodiment, the piezoelectric vibrator 2 is connected to the bottom plate 4 via the protrusion 43, and the connection position is a node of the piezoelectric vibrator or a position near the node where there is no vibration or little vibration. The protrusion 43 can be integrally formed with the piezoelectric element 22 or the bottom plate 4, or can be set separately.

[0124] In addition, the structures of the piezoelectric elements and electrode assemblies and the number of electrodes in the above embodiments can be designed in specific shapes and numbers according to actual needs.

[0125] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in this field without departing from the purpose of the present invention.

Claims

1. A piezoelectric micropump support structure, characterized in that: include: A piezoelectric micropump, the piezoelectric micropump comprising a resonance plate (1), a piezoelectric vibrator (2) and an electrode assembly (3), the resonance plate (1) and the piezoelectric vibrator (2) being stacked in sequence, and the electrode assembly (3) being connected to a side of the piezoelectric vibrator (2) away from the resonance plate (1); The resonance plate (1) is in the shape of a circular plate. A protrusion (12) is formed on the outer peripheral portion of the end surface of the resonance plate (1) away from the piezoelectric vibrator (2). The inner periphery of the protrusion (12) forms a recessed portion (13). The resonance plate (1) or the protrusion (12) thereon is connected to the piezoelectric vibrator (2) via a connecting portion (11). The connecting portion (11) extends along or substantially along the radial direction of the resonance plate (1). The first end of the connecting portion (11) is connected to the resonance plate (1). The second end of the connecting portion (11) is connected to the vibration plate (21). The connecting portion (11) is an elastic connecting portion. The connecting portion (11) is connected to any position of the piezoelectric vibrator (2); or the connecting portion (11) is a rigid connecting portion. The connecting portion (11) is connected to a node of the piezoelectric vibrator (2) or a position near a node where there is no vibration or very little vibration. The connecting portion (11) is provided with air outlet holes (1112). A piezoelectric vibrator, comprising a vibration plate (21) and a piezoelectric element (22) both of which are stacked and have a circular plate-like structure, the vibration plate (21) being arranged close to the resonance plate (1), the piezoelectric element (22) being stacked and arranged on a side of the vibration plate (21) away from the resonance plate (1), at least one air inlet hole being arranged at or near the center of the piezoelectric vibrator (2), the air inlet hole comprising a through hole (2211) and a first through hole (211) that are interconnected, the through hole (2211) being arranged on the piezoelectric element (22), the first through hole (211) being arranged on the vibration plate (21), the through hole (2211) and the first through hole (211) being connected to form an air inlet hole of the piezoelectric vibrator (2), the air inlet hole corresponding to the recessed portion (13), the air inlet hole being arranged coaxially with the resonance plate (1), and a groove (212) being arranged around the air inlet hole on the surface of the vibration plate (21) close to the resonance plate (1); A bottom plate (4), the bottom plate (4) being connected to a side of the piezoelectric micropump away from the resonance plate (1), and a gap therebetween forming an air intake cavity (42), an air intake through hole (41) being formed on the bottom plate (4), the air intake through hole (41) being in communication with the air intake cavity (42), and the bottom plate (4) supporting and constraining the piezoelectric micropump.

2. A piezoelectric micropump support structure according to claim 1, characterized in that: The base plate (4) is connected to the electrode assembly (3) to support the piezoelectric micro pump.

3. A piezoelectric micropump support structure according to claim 2, characterized in that: Two electrodes (32, 33) are formed on the electrode assembly (3); the two electrodes (32, 33) are respectively fixedly connected to the two conductive electrodes (222, 223) of the piezoelectric vibrator (2); and the two electrodes (32, 33) are insulated from each other.

4. A piezoelectric micropump support structure according to claim 3, characterized in that: The piezoelectric vibrator (2) comprises a stacked vibration plate (21) and a piezoelectric element (22), the piezoelectric element (22) being configured as a flanged type, the piezoelectric element (22) comprising a substrate (221), and two conductive electrodes (222, 223) of the piezoelectric element (22) extending to the same surface of the substrate (221) to be fixedly connected to the two electrodes (32, 33) of the electrode assembly (3).

5. A piezoelectric micropump support structure according to claim 4, characterized in that: A through hole (2211) is formed in the middle of the substrate (221); one of the conductive electrodes is flanged from the first surface of the substrate (221) from the through hole (2211) or the outer edge of the substrate (221) to the second surface of the substrate (221); another conductive electrode is arranged on the second surface of the substrate (221); and the two conductive electrodes (222, 223) are insulated and matched.

6. A piezoelectric micropump support structure according to claim 5, characterized in that: The two conductive electrodes (222, 223) are matched in the form of coaxial rings on the second surface of the substrate (221), and the two electrodes (32, 33) on the electrode assembly (3) are also arranged in the form of coaxial rings on the electrode plate (31); or, the center point of the conductive electrode arranged with the flange is offset from the axis, and the electrode assembly (3) comprises an insulating layer (34) and two electrodes (32, 33), the insulating layer (34) is stacked between the piezoelectric element (22) and the two electrodes (32, 33), and two avoidance holes (342) are opened on the insulating layer (34), and the connection ends of the two electrodes (32, 33) pass through the two avoidance holes (342) to be electrically connected to the two conductive electrodes (222, 223).

7. A piezoelectric micro pump support structure according to claim 1, characterized in that: The base plate (4) is connected to the piezoelectric micropump via a support member (6) to support the piezoelectric micropump, and an air intake cavity is formed between the piezoelectric micropump, the support member (6) and the base plate (4).

8. A piezoelectric micro pump support structure according to claim 7, characterized in that: The support member (6) is located at the inner periphery of the electrode assembly (3), a first protrusion (7) is formed between the first surface of the support member (6) and the piezoelectric vibrator (2), a second protrusion (43) is formed between the second surface of the support member (6) and the base plate (4), and the first protrusion (7) and the second protrusion (43) have different sizes.

9. A gas control device, characterized in that: include: The piezoelectric micropump support structure according to any one of claims 1 to 8; A shell (5) is disposed outside the piezoelectric micropump and is sealed and connected to the electrode assembly (3) to form an air outlet cavity (53). An air outlet through hole (511) communicating with the air outlet cavity is formed on the shell (5).

10. A gas control device, characterized in that: include: The piezoelectric micropump support structure according to any one of claims 1 to 8; A shell, wherein the shell (5) is disposed outside the piezoelectric micropump and is sealed and connected to the electrode assembly (3) to form an air outlet cavity, and an air outlet through hole (511) communicating with the air outlet cavity is formed on the shell (5), and the protrusion (12) is supported by the shell (5).

11. A gas control device according to claim 10, characterized in that: The top surface of the protrusion (12) is connected to the inner top surface of the outer shell (5).

12. A gas control device according to claim 10, characterized in that: The protrusion (12) is supported by the outer shell (5) via a connecting plate (8), the connecting plate (8) is supported by a side wall of the outer shell (5), or the connecting plate (8) is connected to an inner top surface of the outer shell (5) via a third protrusion (9) so that a gap exists between the connecting plate (8) and the inner top surface of the outer shell (5), and the protrusion (12) is connected to the connecting plate (8).

Images