Substrate container system

Abstract

A substrate container system includes a container body and a rear cover. The container body has a bottom surface, a front opening through which a substrate can pass, and a rear opening opposite to the front opening, wherein the width of the rear opening is smaller than the width of the front opening. The rear cover covers the rear opening and is sealingly engaged with the container body. The rear cover includes a first air intake structure that bends and extends under the bottom surface of the container body during assembly, and the first air intake structure includes an air intake port that faces downward and is opposite to the bottom surface of the container body.

Description

Technical Field

[0001] This application claims priority to Taiwan Patent Application No. 108124813, filed on July 13, 2019, which is incorporated herein by reference and made a part of this specification.

[0002] The present disclosure relates to a transportable container suitable for preventing environmental pollution of fragile articles such as wafers during storage, conveyance, and transportation, and particularly to a container system capable of uniformly distributing purging gas within the container system. Background Art

[0003] In modern semiconductor manufacturing processes, precision workpieces (e.g., wafers, reticles / masks) undergo multiple processes in multiple process apparatuses before they can be fabricated into integrated circuits. Wafers are typically transported or conveyed from the facility where they are manufactured to another location for further processing of the wafers at that location. The movement of such precision devices is typically accomplished using dedicated substrate containers (e.g., front opening unified pods, FOUPs).

[0004] FOUPs are typically used to accommodate 300 mm or 450 mm wafers between multiple process stations. Conventionally, a FOUP has a housing that defines an open interior space, and the housing has a plurality of shelves for holding a plurality of wafers spaced apart from each other. Moreover, the housing defines a front opening that can be covered by a front door member that incorporates a sealing member and a latch mechanism to establish an airtight engagement between the door and the housing.

[0005] Ideally, during the loading or unloading of the substrate (e.g., when the front door is removed and the interior is exposed), it is necessary to control environmental contaminants (e.g., air / dust / moisture) that invade the substrate container. Even if the surrounding environment is a cleanroom, when environmental contaminants invade the container, it will have an adverse effect on the productivity of the substrate disposed therein. To this end, a purging device is incorporated into the carrier box system to support the purging process during loading / unloading of the box. Summary of the Invention

[0006] One aspect of the present disclosure provides a substrate container system, including a container body and a rear cover. The container body has a bottom surface, a front opening through which a substrate can pass, and a rear opening opposite to the front opening, wherein the width of the rear opening is smaller than the width of the front opening. The rear cover covers the rear opening and is hermetically engaged with the container body. The rear cover includes a first air intake structure, which extends bendedly under the bottom surface of the container body during assembly, and the first air intake structure includes an air intake port opposite to and facing downward the bottom surface of the container body.

[0007] One aspect of the present disclosure provides a substrate container system, including a container body, a rear cover, and a first air guiding channel. The container body has a bottom surface, a front opening through which a substrate can pass, and a rear opening opposite to the front opening, wherein the container body is configured to receive a filtering component, and the filtering component covers the rear opening of the container body. The rear cover is hermetically engaged with the container body, wherein the rear cover and the filtering component jointly define a buffer chamber. The first air guiding channel extends along the height direction of the rear cover. The first air guiding channel has an outlet, and the outlet is connected to the buffer chamber. Description of the Drawings

[0008] To understand the features described above in this case in detail, a more specific description of the present case as briefly described above can be provided with reference to the embodiments. Some embodiments are illustrated in the accompanying drawings. However, it should be noted that the accompanying drawings only illustrate the typical embodiments of the present case and thus are not considered to limit the scope of the present case, because the present case may admit other equivalent embodiments.

[0009] Figure 1 An isometric view of a substrate container system according to some embodiments of the present disclosure is shown;

[0010] Figure 2 An isometric view of a rear cover for a substrate container system according to some embodiments of the present disclosure is shown;

[0011] Figure 3 A cross-sectional view of a substrate container system according to some embodiments of the present disclosure is shown;

[0012] Figures 4 to 6 Isometric views of rear covers for a substrate container system according to some embodiments of the present disclosure are respectively shown;

[0013] Figure 7a An isometric view of a container body for a substrate container system according to some embodiments of the present disclosure is shown;

[0014] Figure 7b is Figure 7a a partial enlarged view of;

[0015] Figure 7c Shows an isometric view of a filter assembly disposed on a substrate container system according to some embodiments of the present disclosure;

[0016] Figure 7d is Figure 7c a partially enlarged view of;

[0017] Figure 7e Shows an isometric view of a substrate container system according to some embodiments of the present disclosure;

[0018] Figure 8 Shows an isometric view of a sealing member for a substrate container system according to some embodiments of the present disclosure;

[0019] Figure 9a Shows an isometric view of a rear cover for a substrate container system according to some embodiments of the present disclosure;

[0020] Figure 9b Shows a cross-sectional view of a rear cover for a substrate container system according to some embodiments of the present disclosure;

[0021] Figure 10 Shows a perspective view of a substrate container system according to some embodiments of the present disclosure;

[0022] Figure 11 Shows a cross-sectional view of a substrate receiving system according to some embodiments of the present disclosure;

[0023] Figure 12 Shows a perspective view of a substrate container system according to some embodiments of the present disclosure;

[0024] Figure 13 Shows a cross-sectional view of a substrate receiving system according to some embodiments of the present disclosure;

[0025] Figure 14 Shows a perspective view of a substrate container system according to some embodiments of the present disclosure;

[0026] Figure 15 Shows a cross-sectional view of a substrate receiving system according to some embodiments of the present disclosure;

[0027] Figure 16 Shows a cross-sectional view of a rear cover for a substrate container system according to some embodiments of the present disclosure;

[0028] Figure 17 Shows a partial cross-sectional view of a substrate container system according to some embodiments of the present disclosure;

[0029] and

[0030] Figure 18Shows experimental data using a substrate container system according to some embodiments of the present disclosure.

[0031] However, it should be noted that the drawings only show exemplary embodiments of the present disclosure and should not be considered as limiting its scope, as the present disclosure may allow other equivalent embodiments.

[0032] It should be noted that these drawings are intended to illustrate the general characteristics of the methods, structures, and / or materials used in certain example embodiments and supplement the written description provided below. However, these drawings are not drawn to scale and may not accurately reflect the precise structural or performance characteristics of any given embodiment and should not be construed as defining or limiting the range of values or characteristics covered by the example embodiments. For example, for clarity, the relative thickness and position of layers, regions, and / or structural elements may be reduced or enlarged. The use of like or identical reference numerals in the various drawings is intended to indicate the presence of like or identical elements or features.

[0033] Description of Main Element Symbols

[0034]

[0035]

[0036]

[0037]

[0038] Detailed Description

[0039] The following detailed description will further illustrate the present invention in conjunction with the above-mentioned drawings.

[0040] The present disclosure will now be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the present disclosure are shown. However, the present disclosure may be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. Rather, these exemplary embodiments are provided so that the present disclosure will be thorough and complete and will fully convey the scope of the present disclosure to those skilled in the art. Throughout the text, like reference numerals refer to like elements.

[0041] The terms used herein are for the purpose of describing particular exemplary embodiments only and are not intended to limit the present disclosure. As used herein, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include the plural forms as well. Further, when used herein, "comprises" and / or "comprising" or "includes" and / or "including" or "has" and / or "having", integers, steps, operations, components and / or components, but do not preclude the presence or addition of one or more other features, regions, integers, steps, operations, components, components and / or their groups.

[0042] Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. Further, unless explicitly defined herein, such as those defined in a general dictionary, terms should be interpreted as having a meaning consistent with their meaning in the relevant art and the content of this disclosure, and will not be interpreted as idealized or overly formal meanings.

[0043] Exemplary embodiments will be described in conjunction with Figures 1 to 18 the accompanying drawings. The detailed description will describe the present disclosure with reference to the accompanying drawings, wherein the depicted elements are not necessarily shown to scale, and through several views, the same or similar reference numerals denote the same or similar elements.

[0044] Figure 1An isometric view of a substrate container system 100 according to some embodiments of the present disclosure is shown. For simplicity and clarity of illustration, some details / sub-components of the exemplary system are not explicitly labeled / shown in this figure. In some embodiments, the substrate container system includes a front opening unified pod (FOUP). The exemplary container system 100 defines a front opening 111 (obscured in the current view), which allows substrates (e.g., wafers, photomasks, or other semiconductor manufacturing-related workpieces) to pass through. In some embodiments, the front opening may be wider than the substrate. In the illustrated embodiment, the substrate container system 100 includes a container body 110 adapted to accommodate substrates and a rear cover 120 configured to enclose the rear portion of the container body 110. In some embodiments, the container body is a single component integrally formed by techniques such as injection molding. The container body 100 also defines a rear opening 113 opposite the front opening 113, which may be covered (and ultimately sealed) by the rear cover 120. The rear opening allows purified gas to flow into the interior of the container body. In the exemplary embodiment, the width of the rear opening 113 (e.g., in the x-axis direction) is less than the width of the front opening 111. For example, the container body 110 of the illustrated embodiment includes a front flange 115 adjacent to its front face (on which the front opening 111 is formed), and has an outer shape that gradually widens towards its front port (e.g., opening 111). In the exemplary figure, the wider front face of the container body 110 accommodates the wider front opening 111 compared to the narrower rear opening 113.

[0045] In some embodiments, the container body 110 is configured to receive a filter element (e.g., filter assembly 130) at its back surface, and the filter element is configured to cover the rear opening 113. For example, the container body 110 also includes a pair of flange portions 112 that can receive the filter assembly 130. In the exemplary embodiment, the flange portions 112 are along the width direction of the rear cover 120 (e.g., Figure 1The x-directions shown in the figure are respectively arranged adjacent to the rear opening 113 (for example, extending from the two side walls 117 of the container body 110 towards the center of the rear opening 113). Specifically, the inner edges 112a of the flange portion 112 jointly define the rear opening 113 and are configured to provide physical support for the filter assembly 130 so that the filter assembly 130 can be evenly held. At the same time, the filter assembly 130 in the illustrated embodiment includes a filter plate 131 and a frame 132 surrounding the filter plate 131, and the filter plate 131 has a sufficient planar size to cover the rear opening 113. In the illustrated embodiment, the frame 132 is configured to establish a sealed engagement with the inner edge 112a of the flange portion 112 during assembly. In some embodiments, the filter assembly (e.g., the filter element 130) includes a porous material. In some embodiments, the filter assembly may be integrally formed from a porous sintered material. In some embodiments, the porous sintered material can be manufactured by sintering particulate materials. Suitable materials may include ceramic materials and polymer-based materials such as High-density polyethylene (HDPE), Polytetrafluoroethylene (PTFE), Ultra-high molecular weight polyethylene (UHMW), Nylon 6 (N6), Polypropylene (PP), Polyvinylidene fluoride (PVDF), Polyethersulfone (PES), and combinations thereof.

[0046] In some embodiments, the body (e.g., the container body 110) is configured to engage a rear cover to enclose the rear opening and the filter assembly. In an exemplary embodiment, the rear cover 120 includes a generally flat main portion that is configured to be mounted on the flange portion 112 at the back of the container body 110. For example, the laterally symmetric flange portion 112 may be provided with a plurality of fastening members 116 (e.g., threaded holes) that correspond to a plurality of fasteners 124 (e.g., screws). In this way, the rear cover 120 can be coupled to the flange portion 112 of the container body 110 by fasteners (e.g., 124). In some embodiments (e.g., Figure 17 the illustrated embodiment), the fastening mechanism (e.g., member 116) may be arranged at other positions of the container body 110 (e.g., at a position close to the flange portion). For example, in some embodiments, the fastening mechanism may be arranged on the side wall 117 of the container body 110 instead of on its back.

[0047] In some embodiments, the rear cover 120 includes at least one air intake structure 121 configured to engage with an external purification device so as to be able to receive purified gas into the interior of the container system. In some embodiments, the air intake structure 121 may be an extension integrally formed with the rear cover 120 (e.g., extending from a flat portion of the rear cover 120 covering the filter member). In the illustrated embodiment, the air intake structure 121 includes an air intake port for connecting the purification device (e.g., the downward-facing port 121a).

[0048] The system 100 may further include a sealing member (e.g., member 140) configured to maintain a predetermined level of airtightness between the rear cover 120 and the container body 110. In some embodiments, the sealing member (e.g., member 140) includes a double-ring configuration and is disposed between the rear cover 120 and the container body 110. For example, the exemplary sealing member 140 is shown in the figure as including a first sealing ring portion (outer sealing ring portion) 141 configured to be disposed between the rear cover 120 and the container body 110. In the illustrated embodiment, the shape of the first sealing ring portion 141 is shown in the figure as corresponding to the outer edge region 112b of the flange portion 112 and is configured to establish a sealed engagement along the outer edge region 112b. In some embodiments, the first sealing ring portion 141 may further have a section configured to strengthen the sealed engagement between the air intake structure (e.g., the inlet 121) and the container body (e.g., the body 110). For example, the first sealing ring portion 141 may be provided with a curved ring section that extends between the bottom surface of the container body 110 and the air intake structure 121 during assembly (e.g., bent approximately 90 degrees from the plane defined by the rear cover 120) to maintain airtightness around the air intake port (e.g., the air intake port 121a). In the illustrated embodiment, the first sealing ring portion 140 includes a main section 141a and two curved sections 141b bent from the main section 141a (e.g., corresponding to a pair of downward-facing air intake ports 121a).

[0049] In some embodiments, a sealing member (e.g., member 140) may be configured to be capable of sealing between a filtering member (e.g., member 130) and a container body (e.g., body 110). For example, the sealing member 140 shown in the current drawing further includes a second sealing ring portion (inner sealing ring portion) 142, which is disposed between the filtering assembly 130 and the container body 110. In some embodiments, the first and second sealing ring portions 141, 142 are integrally connected (e.g., integrally formed as a single gasket member through the same molding process). In the illustrated embodiment, the first and second sealing ring portions 141, 142 share a common segment 144. In some embodiments, the second ring sealing portion may be a separate component and not integrally connected to the first sealing ring portion. In the illustrated embodiment, the sealing member 140 further includes a plurality of third sealing ring portions 143, which are configured to be wound around fastening members (e.g., members 116, 124) to ensure a sealed engagement at the joint area between the body (e.g., body 110) and the back plate (e.g., back cover 120). In some embodiments, the first and third ring portions are integrally connected.

[0050] Figure 2 An isometric view of a back cover for a substrate container system according to some embodiments of the present disclosure is shown. In the illustrated embodiment, the back cover 220 includes a pair of inlet structures. For example, the exemplary back cover 220 is provided with a first air inlet structure 221 and a second air inlet structure 222, each air inlet structure having a downward air inlet port 221a / 222a. The first and second air inlet structures 221, 222 are arranged substantially symmetrically in the width direction of the back cover 220 (e.g., Figure 2 the x direction shown in the figure).

[0051] The back cover 220 includes an inner surface 223, which faces the container body (e.g., container body 110) during assembly. In some embodiments, the back cover 220 covers the rear opening of the container body and establishes a sealed engagement with the container body during assembly. For example, in the illustrated embodiment, a sealing lip 224 is formed at the periphery of the inner surface 223 to directly contact the outer sealing ring (e.g., the first sealing ring portion 141) of the sealing member during assembly.

[0052] In some embodiments, the air inlet structure may further include at least one guiding portion, which is configured to guide the air inlet port to the correct position / direction on the bottom surface of the container body (e.g., body 110), so as to ensure that during the docking process, the air inlet port (e.g., port 221a / b) is aligned with the air outlet port of an external purification device. For example, the illustrated air inlet structure 221 is provided with a pair of guiding portions 221b (e.g., having an annular profile), which are arranged near the port 221a.

[0053] Figure 3Shows a cross-sectional view of a substrate container system 300 in accordance with some embodiments of the present disclosure. For example, the cross-section shown may reflect a cross-section taken, for example, in the Figure 1 y-z plane shown.

[0054] As Figure 3 shown, the container body 310 has a bottom surface 314. In assembly, the intake structure (e.g., intake structure 321) of the rear cover 320 (shown in dark shading for ease of identification) extends curvilinearly below the bottom surface 314. The intake port 321a is configured to face in a direction opposite to the bottom surface 314 of the container body 310.

[0055] The container body 310 also defines a front opening 311 and a rear opening (e.g., 112) opposite the front opening 311. The shape and size of the front opening 311 are designed to allow the payload (e.g., substrate) of the container to pass through. In some embodiments, the assembled filter assembly 330 has a gas release surface 331 that has a curved profile (e.g., shown more clearly in Figure 9b and Figure 13 ). In some embodiments, the curved gas release surface (e.g., surface 331) is configured to extend through the rear opening (e.g., rear opening 113) into the interior of the container body 310.

[0056] In some operating scenarios, purified gas can be provided to the interior of the system

[0057] 100 through the intake port 321a, pass through the filter assembly 330, and then be discharged from the system 300 through the suction holes (e.g., suction hole 714a shown in FIG. 7) formed in the bottom surface 314.

[0058] Figure 4 Shows an isometric view of an exemplary rear cover for a substrate container system in accordance with some embodiments of the present disclosure. The exemplary rear cover 420 is also provided with a pair of partition structures 425 extending in the height direction (e.g., z-direction).

[0059] The partition structures 425 may form a gas guiding channel that extends along the height direction (e.g., z-direction) of the rear cover 420 and is in fluid communication with the downward-facing inlet structure (e.g., intake structures 221 / 222). For example, in assembly, the pair of partition structures 425 of the rear cover 420 are respectively adjacent to the rear opening (e.g., 313) in the width direction (e.g., x-direction) of the rear cover 420 and are further configured to contact the filter assembly (e.g., in the inner edge region 112a of the flange portion 112 and along Figure 1 the frame 132 in). At the same time, the rear cover 420 is at least partially in contact with a pair of flange portions of the container body (e.g.,Figure 1 The flange portion 112) therein overlaps. Moreover, a sealing engagement between the exemplary rear cover 420 and the main body (e.g., the container main body 110) can be established along the outer edge region of the flange portion (e.g., the outer edge region 112b). In this way, a pair of air guiding channels connecting the intake structures (e.g., the intake structures 221 / 222) can be formed in the overlapping region between the rear cover 420 and the flange portion of the container main body (e.g., the flange portion 112). In some embodiments, the flange portion (e.g., the flange portion 112) is completely covered by the rear cover 420, so the width of the air guiding channel can be substantially equal to the width of the flange portion (e.g., the flange portion 112).

[0060] The rear cover 420 and the filter assembly (e.g., the filter assembly 130) can jointly form a buffer chamber, and the buffer chamber is connected to the air guiding channel through an outlet (e.g., the outlet 425c, which will be described in more detail below). For example, the pair of partition structures 425 laterally divide the rear cover 420 into three regions. The region between the pair of partition structures 425 of the rear cover 420 can jointly form a buffer chamber with the rear surface of the filter assembly (e.g., the filter assembly 130).

[0061] In an exemplary embodiment, each partition structure 425 is provided with an outlet 425c at approximately the middle of the height of the rear cover 420. In an exemplary embodiment, the outlet 425c is arranged at approximately the middle (relative to the center of the outlet 425c) between the top end 425t and the bottom end 425b of the partition structure 425. In this embodiment, the purified gas can be provided from the intake port (e.g., 221a) to the buffer chamber through the outlet 425c provided in the middle part (e.g., along the height / z - direction) of the air guiding channel. The sintered porous structure in the filter assembly (e.g., the assembly 130) helps to regulate the gas flowing through it, so as to keep the pressure inside the buffer chamber at a stable value during the purification operation. For example, when the pressure of the intake air (e.g., from the intake ports 221a / 222a) reaches a certain threshold, the filter assembly will allow the air flow to pass through. When sufficient internal pressure is established in the buffer chamber (e.g., the chamber formed between the rear cover 120 and the filter assembly 130), the filter assembly will evenly distribute the purified gas into the interior of the main body (e.g., the main body 110) in a regulated manner.

[0062] Figure 5 and Figure 6 respectively show isometric views of exemplary rear covers for a substrate container system according to some embodiments of the present disclosure.

[0063] Referring to Figure 5, each partition structure 525 of the exemplary rear cover 520 has three outlets 525c disposed therein. The outlets 525c in the opposing partition structures 525 are disposed in a substantially laterally symmetric manner (e.g., along the x-axis).

[0064] Referring to Figure 6 , each partition structure 625 of the exemplary rear cover 620 is provided with one outlet 625c. However, the outlets 625c are designed to be arranged in a substantially asymmetric manner laterally (e.g., in the x-axis direction). For example, a plurality of outlets 625c are respectively formed at the top and bottom along the height of the rear cover 620 (e.g., along the z-axis).

[0065] It has been observed that the arrangement of the outlets (e.g., position and number) may affect the air flow distribution in the container body (e.g., body 110). In addition, during the loading / unloading operation during purification, an appropriate arrangement of the outlets helps to reduce the air intrusion from around the container body into the interior of the container body. In some operating scenarios, the purification gas can be symmetrically introduced into the buffer chamber through two outlets 425c (e.g., substantially arranged in the middle of the height of the rear cover 420) to reach the geometric center of the rear cover 420. It has been found that such an arrangement helps to mitigate the intrusion of ambient air during the front door disassembly process when payload is loaded / unloaded from the interior of the container.

[0066] Figure 7a Illustrated is the installation configuration of the sealing member for a substrate container system according to some embodiments of the present disclosure (e.g., the sealing members 140 / 840 respectively shown in Figure 1 and Figure 8 ) isometric view. Figure 7b Illustrated is Figure 7a The enlarged area view of.

[0067] In the illustrated embodiment, the first groove structure (e.g., outer groove 717) is disposed along the outer periphery (e.g., region 712b) of a pair of flange portions (e.g., flange portions 712) of the container body, while the second groove structure (e.g., inner groove 718) is disposed along the inner edge 712a of the flange portion 712. For example, the exemplary container body 710 includes a first annular groove structure (outer annular groove structure) 717, which forms a ring to accommodate an outer sealing ring (e.g., the first sealing ring portion 141).

[0068] In some embodiments, notches 717a corresponding to a plurality of fasteners 716 are further provided on the inner periphery of the first annular groove structure 717, thereby allowing an additional sealing ring (e.g., the third sealing ring portion 143) to surround each fastener 716.

[0069] In the illustrated embodiment, the first groove structure 717 further includes a bottom section 717b that defines a partially enclosed annular pattern on the bottom surface 714 (as Figure 7b shown). Accordingly, a curved section (e.g., section 141b) of the outer sealing ring (e.g., sealing ring 140) can be positioned within the bottom section 717b of the first groove structure 717, whereby the curved section of the sealing ring (e.g., section 141b) can be held below the bottom surface 714 of the container body 710. Additionally, the bottom surface 714 is provided with a pair of vent holes (e.g., through holes 714a). On the other hand, no through holes are provided at the location of the enclosed annular pattern area (bottom section 717b) of the bottom surface 714.

[0070] The container body 710 further includes a second groove structure (inner groove structure) 718 surrounding the rear opening 713, which is configured to receive the inner sealing ring (e.g., the second sealing ring portion 142). Upon assembly, this arrangement enables the filter assembly (e.g., filter assembly 130) to establish a sealed engagement with the container body 710 around the rear opening 713.

[0071] In some embodiments, the second groove structure 718 may further be provided with a plurality of notches 718a and a plurality of posts 718b respectively disposed within the notches 718a, and the posts 718b are used to position / hold the filter element (e.g., filter member 130).

[0072] Figure 7c An isometric view of a filter assembly 730 adapted within a substrate container system in accordance with some embodiments of the present disclosure is shown. Figure 7d Shown is Figure 7c a partial enlarged view of

[0073] The exemplary filter assembly 730 includes a filter plate 731 and a ring frame 732. In some embodiments, the filter assembly 730 is further provided with a plurality of anchoring rings 733 extending outward from the ring frame 732. The anchoring rings 733 may be symmetrically arranged along the width direction (e.g., the x - direction) of the filter assembly 730. Upon assembly, the ring frame 732 physically contacts the inner sealing ring (e.g., the second sealing ring portion 142) thereunder, and the anchoring rings 733 can engage with the posts 718b through the notches 718a of the second groove structure 718. Upon assembly, this arrangement can restrict the lateral movement of the filter assembly 730, thereby further ensuring the sealed engagement between the ring frame 732 and the container body 710. In some embodiments, the anchoring rings 733 are integrally formed with the ring frame 732 of the filter assembly 730.

[0074] Figure 7eShows an isometric view of a substrate container system 700 in an assembled state according to some embodiments of the present disclosure. When assembled, the first / second intake structures 721 / 722 of the rear cover 720 bend and extend under the bottom surface 714 of the container body 710 and cover the curved section of the seal ring assembly (e.g., section 141b). Thus, the curved section (e.g., section 141b) is disposed between the bottom surface 714 and the intake structure 721 to ensure airtightness around the intake port. In addition, the openings of a pair of intake ports 721a, 722a face downward (e.g., in the z direction) relative to the bottom surface 714.

[0075] Figure 8 Shows a perspective view of a seal assembly 840 for a substrate container system according to some embodiments of the present disclosure. The exemplary seal assembly 840 includes a first seal ring portion (outer seal ring portion) 841, a second seal ring portion (inner seal ring portion) 842, and a plurality of third seal ring portions (auxiliary seal ring portions) 843. In addition, the seal assembly 840 has an out-of-plane bending configuration.

[0076] In the example shown, a pair of substantially symmetric main segments 841a (and a shared sub-segment 841g) of the first seal ring portion 841 together define a plane P81. The second seal ring portion (inner seal ring portion) 842, which is shown in the figure as generally extending in the same plane P81, is generally surrounded by the first seal ring portion (outer seal ring portion) 841. At the same time, the shared segment 841g (of the outer seal ring portion), which extends in the width direction (e.g., along the x-axis direction), is where the inner and outer seal ring portions (e.g., the first and second seal ring portions 841, 842) are integrally joined. In addition, the first seal ring portion 841 includes a pair of substantially symmetric out-of-plane segments (curved segments) 841b that bend and extend towards a plane P42 that is substantially orthogonal to plane P41.

[0077] As shown in the exemplary embodiment, each curved segment 841b includes two neck segments 841d that are separately disposed along the width direction (e.g., the x-axis direction) and are respectively joined to the main segment 841a at a bending angle of approximately 90 degrees. The gap 841c formed between the pair of neck segments 841d is opposite to the shared segment 841g. The curved segment 841b generally forms a ring that lies on a plane P82 (substantially orthogonal to plane P81) and is configured to surround and enclose a downward-facing intake port (e.g., the aforementioned intake port 421a).

[0078] The third seal ring portion 843 is substantially in-plane with the main segment 841a (i.e., substantially lies in plane P81), and is integrally connected to the inner circumference of the first seal ring portion 841 and extends inwardly towards the second seal ring portion 842.

[0079] Figure 9a An isometric view of an exemplary rear cover for a substrate container system according to some embodiments of the present disclosure is shown.

[0080] In some embodiments, the rear cover 920 includes a pair of partition structures 925 extending along the height direction of the rear cover 920 (e.g., along the z-axis). In some embodiments, an outlet (opening) 925c is formed in the partition structure 925. In some embodiments, the outlet 925c is disposed substantially in the middle along the height of the rear cover 920 (e.g., along the z-axis). In the illustrated embodiment, the two partition structures 925 are also connected to each other by an upper bridging partition structure 927a and a bottom bridging partition structure 927b.

[0081] In some embodiments, the partition structure (e.g., structure 925 or 927a / b) may include a plurality of substantially concentric rib structures. For example, the illustrated partition structure 925 includes a pair of rib structures 925a, 925b that are substantially concentrically arranged.

[0082] In addition, a plurality of ribs 928 extending along the width direction (e.g., along the Figure 9a illustrated x-axis) are further provided on the inner surface 923 of the rear cover 920, and are configured to enhance the structural strength of the rear cover 920. In some embodiments, the rear cover 920 further includes a plurality of fins 926 that are separately arranged and intersect the rib structures 925a / b of the partition structure 925, respectively.

[0083] In the illustrated embodiment, the outlet 925c is divided by fins 926 that are perpendicular to the partition structure 925 (e.g., along the width direction of the rear cover). In this way, the fins 926 can serve as air guides and direct the gas passing through the outlet 925c towards the center of the rear cover 920.

[0084] Figure 9b A cross-sectional view of the rear cover (e.g., along the Figure 9a section line L9 shown in) according to some embodiments of the present disclosure is shown, and the rear cover is coupled to a filter assembly for a substrate container system.

[0085] In the illustrated embodiment, the rib structure 925a of the partition structure physically contacts the filter assembly 930 and defines the boundary of an air chamber (obscured from the current view; indicated by the dashed line 960) between the rear cover 920 and the filter assembly 930. In the illustrated embodiment, the outlet 925c is jointly defined by the rib structure 925a and the filter assembly 930 and is divided by the fins 926.

[0086] Figure 10 A perspective view of an assembled substrate container system 1000 according to some embodiments of the present disclosure is shown. Figure 11Shows a regional cross-sectional view of an assembled substrate container system 1100 according to some embodiments of the present disclosure. Figure 11 May be a cross-sectional view taken from a plane parallel to the plane P10 shown. Figure 10

[0087] In the illustrated embodiment, the rear cover 1120 and the container body 1110 jointly define an air guiding channel 1116 extending along the height direction of the rear cover. The air intake structure 1121 is connected to the air guiding channel 1116. The air guiding channel 1116 extends on the bottom surface 1113 of the container body 1110 (e.g., along the y direction). Thus, when a purification device (not shown) is in a state of being connected to the air intake port 1121a, the path of the gas released from the purification device (e.g., Figure 11 as shown by the arrow in) changes direction within the air guiding channel 1116 (e.g., near the bottom surface 1114 of the container body 1110 and the bent and extended air intake structure 1121 of the rear cover 1120). In some embodiments, a similar second air guiding channel may be provided on the rear cover 1120. In some embodiments, multiple air guiding channels may be arranged in a substantially mirror-symmetrical manner on the rear cover of the container system, such as Figure 2 or as shown in FIG. 4.

[0088] Figure 12 Shows a perspective view of an assembled substrate container system 1200 according to some embodiments of the present disclosure. Figure 13 Shows a regional cross-sectional view of an assembled substrate container system according to some embodiments of the present disclosure. Figure 13 May be a cross-sectional view taken from a plane parallel to the plane P12 shown. Figure 12

[0089] In Figure 13 , an exemplary rear cover 1320 is shown in the figure as being joined to the container body 1310, thereby forming a sealed joint between the filter assembly 1330 and the container body 1310. In the illustrated embodiment, the filter assembly 1330 is disposed on an inner sealing ring 1342 (e.g., inner sealing ring portion), the inner sealing ring 1342 is embedded in the container body 1310 (e.g., on the flange portion 1312), and the partition structure 1325 (e.g., outer rib 1325b) of the rear cover 1320 is configured to exert pressure on the filter assembly 1330 (e.g., along the frame 1332 of the filter assembly 1330). In this way, a sealed joint between the container body 1310 and the filter assembly 1330 can be ensured. A sealing lip 1324 is provided on the outer periphery of the rear cover 1320, which is configured to establish physical contact with an outer sealing ring (e.g., the first sealing ring portion 1341), and the outer sealing ring is disposed on the flange portion 1312 of the container body 1310.

[0090] ​​In addition, the partition structure 1325 (e.g., the inner rib 1325a) of the rear cover 1320 is illustrated as being in physical contact with the filter assembly 1330, thereby serving as a structural partition between the air guide channels 1351 / 1352 and the buffer chamber 1360. The buffer chamber 1360 is in fluid communication with the air guide channels 1351 / 1352 via an outlet formed in the partition structure (e.g., the outlet 925c shown in FIG. 9). The structural profiles and arrangements of the air guide channels 1351, 1352 are substantially symmetric along the width direction of the rear cover 1320 (e.g., Figure 13 the x direction shown in

[0091] Thus, during loading / unloading of the container, the purified air flow can be symmetrically guided into the buffer chamber through two outlets (e.g., the outlet 926). Figure 13 The gas release surface 1331 of the filter assembly 1330 is configured to extend into the rear opening 1313 defined between the flange portions 1312 of the container body 1310. For example, the gas release surface 1331 is configured to face the interior of the container body 1310 and extend beyond the boundary of the opening defined by the flange portions 1312. Accordingly, the surface area of the gas release surface 1331 is larger than the planar projection of the rear opening 1313. In this way, the purified gas released from the gas release surface 1331 (indicated by the

[0092] Figure 14 arrows in Figure 15 FIG. 11) can be released at a wider release angle. In some embodiments, the gas release surface 1331 has a curved cross-sectional profile (e.g., parabolic) extending toward the interior of the container body 1310. Figure 15 may be a cross-sectional view taken from a plane parallel to the plane P14 shown in Figure 14 FIG. 17.

[0093] In some embodiments, the rear cover of the container system may be further provided with a plurality of fins configured to hold the filter assembly received in the container system. For example, the rear cover 1520 is further provided with a fin member 1526 (e.g., comparable to the fin 926 depicted with reference to FIG. 9), and the fin member 1526 forms an L-shaped corner 1526a that is configured to tightly contact the inner edge 1531a of the frame 1531 of the filter assembly 1530, thereby laterally restricting the filter assembly 1530.

[0094] Figure 16A cross-sectional view of an exemplary rear cover for a substrate container system according to some embodiments of the present disclosure is shown. In some embodiments, the rear cover of the container system may have an independent air guide channel. For example, the exemplary rear cover 1620 includes two tubular structures 1629, and each tubular structure 1629 forms an air guide channel 1651 that is fluidly connected to the intake structures 1621 / 1622 respectively.

[0095] Figure 17 A partial cross-sectional view of a substrate container system according to some embodiments of the present disclosure is shown. For example, Figure 17 may be Figure 15 a partially enlarged cross-sectional view within the dashed box shown.

[0096] In the illustrated embodiment, the rear cover 1720 is further provided with a wall 1727 that extends from the inner surface 1723 of the rear cover 1720 to the partition structure 1725 along the width direction of the rear cover 1720 (e.g., along the x direction). In the illustrated embodiment, the wall 1727, the inner surface 1723, and the partition structure 1725 constitute a tubular structure that defines the air guide channel 1751. In some embodiments, the rear cover 1720 may be mounted on the side wall 1719 of the container body 1710, and a buffer chamber 1760 is formed beside the air guide channel 1751.

[0097] Referring to Figure 18 , which shows Figure 4 experimental data of the humidity level inside the substrate container system shown changing over time.

[0098] Specifically, the container body is configured to receive twenty-five substrates and is continuously purified within the ten unit time periods shown (e.g., from zero to ten on the time axis). For experimental purposes, multiple test substrates configured with multiple sensors (e.g., 3 in this example, represented by the slots 1 / 13 / 25 that carry them) are loaded into the container body. Each test substrate is provided with 5 sensors, which are arranged at different positions (e.g., represented by the identifiers B / C / F / L / R). Then the front door is installed, thereby sealing the front opening of the container system.

[0099] The purification process starts at time zero, during which one or more purification gases are provided into the interior of the container system (e.g., through the gas port 221a). As a result, it is observed that the humidity level inside the container system drops significantly during the initial period (e.g., from approximately 40% to essentially 0 at the third time unit mark).

[0100] Subsequently, at the middle of the time period (e.g., at the 5th tick along the time axis), the front door that seals the front opening of the system is removed. It is observed that properly arranging the gas outlet (e.g., outlet 425c) in the gas guiding channel helps prevent external gas from entering the container system from the surrounding environment, thereby ensuring / maintaining a low moisture content in the container system even during the loading / loading process.

[0101] Accordingly, one aspect of the present disclosure provides a substrate container system including a container body and a rear cover. The container body has a bottom surface, a front opening through which a substrate can pass, and a rear opening opposite to the front opening, wherein the width of the rear opening is smaller than the width of the front opening. The rear cover covers the rear opening and is sealingly engaged with the container body. The rear cover includes a first air intake structure that, when assembled, extends bendably under the bottom surface of the container body, and the first air intake structure includes an air intake port that faces downward and is opposite to the bottom surface of the container body.

[0102] In some embodiments, the rear cover further includes a second air intake structure, wherein the first air intake structure and the second air intake structure are arranged substantially symmetrically along the width direction of the rear cover.

[0103] In some embodiments, the container body is configured to receive a filter assembly that covers the rear opening of the container body.

[0104] In some embodiments, each of the first air intake structure and the second air intake structure is connected to a gas guiding channel that extends along the height direction of the rear cover.

[0105] In some embodiments, the gas guiding channel has an outlet that is substantially arranged at the middle portion along the height of the rear cover.

[0106] In some embodiments, the rear cover and the filter assembly jointly define a buffer chamber that is connected to the gas guiding channel through the outlet.

[0107] In some embodiments, the rear cover includes a pair of partition structures that extend along the height direction and are respectively adjacent to the rear opening along the width direction; the outlet of the gas guiding channel is formed in the partition structures.

[0108] In some embodiments, the container body further includes a pair of flange portions that are opposite to the front opening and are respectively arranged adjacent to the rear opening along the width direction; the rear cover at least partially overlaps with the flange portions, wherein the gas guiding channel is formed in the overlapping region between the rear cover and the flange portions.

[0109] In some embodiments, the system further includes a filtering component having a gas release surface that extends through the rear opening towards the container body.

[0110] In some embodiments, the system further includes a sealing member having a first sealing ring portion disposed between the rear cover and the container body; the first sealing ring portion includes a section that extends curvedly between the bottom surface of the container body and the first air intake structure.

[0111] In some embodiments, the sealing member further includes a second sealing ring portion disposed between the filtering component and the container body.

[0112] Accordingly, one aspect of the present disclosure provides a substrate container system including a container body, a rear cover, and a first air guiding channel. The container body has a bottom surface, a front opening through which a substrate can pass, and a rear opening opposite to the front opening, wherein the container body is configured to receive a filtering component that covers the rear opening of the container body. The rear cover is sealingly engaged with the container body, wherein the rear cover and the filtering component jointly define a buffer chamber. The first air guiding channel extends along the height direction of the rear cover. The first air guiding channel has an outlet that is connected to the buffer chamber.

[0113] In some embodiments, the outlet is generally disposed in the middle portion along the height of the rear cover.

[0114] In some embodiments, the rear cover includes a pair of separating structures extending along the height direction, the pair of separating structures being respectively adjacent to the rear opening along the width direction; the outlet of the first air guiding channel is formed in the separating structures.

[0115] In some embodiments, the container body further includes a pair of flange portions opposite to the front opening and disposed respectively adjacent to the rear opening along the width direction; the rear cover at least partially overlaps with the flange portions, wherein the air guiding channel is formed in the overlapping region between the rear cover and the flange portions.

[0116] In some embodiments, the system further includes a second air guiding channel, wherein the first air guiding channel and the second air guiding channel are arranged substantially symmetrically along the width direction of the rear cover.

[0117] In some embodiments, the rear cover further includes a first air intake structure that extends curvedly below the bottom surface of the container body during assembly; the first air intake structure connects the first air guiding channel and includes a downward-facing air intake port that faces the bottom surface of the container body.

[0118] In some embodiments, the system further includes a filtering component having a gas release surface, wherein the area of the gas release surface is greater than the area of the rear opening.

[0119] In some embodiments, the system further includes a sealing member having a first sealing ring portion disposed between the rear cover and the container body; the first sealing ring portion includes a section that extends curvedly between the bottom surface of the container body and the first air intake structure.

[0120] In some embodiments, the sealing member further includes a second sealing ring portion disposed between the filtering component and the container body.

[0121] The embodiments shown and described above are merely examples. Therefore, many such details are not shown or described. Even though many features and advantages of the present technology, as well as details of structure and function, have been set forth in the foregoing description, the disclosure is illustrative only, and can be changed in details, particularly in terms of shape, size, and arrangement of various parts within the scope of principles, up to and including the full scope determined by the broad meaning of the terms used in the claims. Thus, it will be understood that the above embodiments can be modified within the scope of the claims.

Claims

1. A substrate container system, characterized in that, Comprising: A container body having a bottom surface, a front opening through which a substrate can pass, and a rear opening opposite to the front opening, wherein the width of the rear opening is smaller than the width of the front opening, and the container body is configured to receive a filter assembly that covers the rear opening of the container body; and A rear cover that covers the rear opening and engages with the container body in a sealed manner, wherein the rear cover and the filter assembly jointly define a buffer chamber; An air guide channel that extends along the height direction of the rear cover, wherein the air guide channel has an outlet that is connected to the buffer chamber; Wherein the rear cover includes a pair of partition structures that extend along the height direction and are respectively adjacent to the rear opening along the width direction, the partition structures form the side walls of the air guide channel, and the outlet of the air guide channel is formed in the partition structures, and the outlet communicates the air guide channel with the buffer chamber through the partition structures; Wherein the rear cover includes a first air intake structure that is connected to the air guide channel, and when assembled, the first air intake structure extends bendably under the bottom surface of the container body, and the first air intake structure includes an air intake port that faces downward and is opposite to the bottom surface of the container body, and a purified gas is provided into the buffer chamber from the air intake port.

2. The substrate container system according to claim 1, wherein, The rear cover further includes a second air intake structure, wherein the first air intake structure and the second air intake structure are arranged substantially symmetrically along the width direction of the rear cover.

3. The substrate container system according to claim 2, wherein Each of the first air intake structure and the second air intake structure is connected to the air guide channel.

4. The substrate container system according to claim 3, wherein The outlet is arranged in the middle part along the height of the rear cover.

5. The substrate container system according to claim 4, wherein Among them, The container body further includes a pair of flange portions that are opposite to the front opening and are respectively arranged adjacent to the rear opening along the width direction; Wherein the rear cover at least partially overlaps with the flange portions, and the air guide channel is formed in the overlapping area between the rear cover and the flange portions.

6. The substrate container system according to claim 1, wherein, The filter assembly has a gas release surface that extends toward the container body through the rear opening.

7. The substrate container system according to claim 1, wherein, Further comprising A sealing member having a first sealing ring portion that is arranged between the rear cover and the container body; Wherein the first sealing ring portion includes a section that extends bendably between the bottom surface of the container body and the first air intake structure.

8. The substrate container system according to claim 7, wherein The sealing member further includes a second sealing ring portion that is arranged between the filter assembly and the container body.

9. A substrate container system, characterized in that, Comprising: A container body having a bottom surface, a front opening through which a substrate can pass, and a rear opening opposite to the front opening, wherein the container body is configured to receive a filter assembly that covers the rear opening of the container body; A rear cover that engages with the container body in a sealed manner, wherein the rear cover and the filter assembly jointly define a buffer chamber; and A first air guide channel extends along the height direction of the rear cover. Wherein, the first air guide channel has an outlet, and the outlet is connected to the buffer chamber; Wherein, the rear cover includes a pair of partition structures extending along the height direction. The pair of partition structures are respectively adjacent to the rear opening along the width direction. The partition structures form the side walls of the first air guide channel. The outlet of the first air guide channel is formed in the partition structures. The outlet communicates the first air guide channel with the buffer chamber through the partition structures.

10. The substrate container system according to claim 9, wherein, The outlet is arranged in the middle part along the height of the rear cover.

11. The substrate container system according to claim 9, wherein, Among them, The container body further includes a pair of flange portions, which are opposite to the front opening and are respectively arranged adjacent to the rear opening along the width direction; Wherein, the rear cover at least partially overlaps with the flange portions, and the air guide channel is formed in the overlapping area between the rear cover and the flange portions.

12. The substrate container system according to claim 9, wherein, It further includes a second air guide channel, wherein the first air guide channel and the second air guide channel are arranged substantially symmetrically along the width direction of the rear cover.

13. The substrate container system according to claim 9, wherein, Among them, The rear cover further includes a first air inlet structure, which extends bendedly under the bottom surface of the container body during assembly; and Wherein, the first air inlet structure is connected to the first air guide channel and includes a downward-facing air inlet port, and the air inlet port faces the bottom surface of the container body.

14. The substrate container system according to claim 9, wherein It further includes a filtering component, which has a gas release surface, and the area of the gas release surface is larger than the area of the rear opening.

15. The substrate container system according to claim 13, wherein, It further includes A sealing member having a first sealing ring portion, and the first sealing ring portion is arranged between the rear cover and the container body; Wherein, the first sealing ring portion includes a section, and the section extends bendedly between the bottom surface of the container body and the first air inlet structure.

16. The substrate container system according to claim 15, wherein The sealing member further includes a second sealing ring portion, and the second sealing ring portion is arranged between the filtering component and the container body.

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