Processing equipment

Abstract

A processing apparatus is provided, enabling simple and accurate input of processing conditions. The processing apparatus includes: a chuck table for holding the workpiece; a processing unit for processing the workpiece held by the chuck table; a touch panel for inputting processing conditions; and a control unit for controlling the touch panel. The control unit causes the touch panel to display multiple input fields corresponding to multiple items included in the processing conditions. When one of the input fields is selected, a copy and paste button is displayed on the touch panel. When the copy button is selected, the information entered into an input field is copied; when the paste button is selected, pre-copied information is entered into an input field.

Description

Technical Field

[0001] The present invention relates to a processing apparatus for a touch panel having input processing conditions. Background Technology

[0002] Multiple semiconductor device chips, each containing a device, are manufactured by dicing a semiconductor wafer in which devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed. Furthermore, a package substrate is formed by encapsulating the multiple semiconductor device chips mounted on a substrate with a sealing material (molding resin), and packaged devices are manufactured by dicing this package substrate.

[0003] In the dicing of semiconductor wafers or packaging substrates, for example, a cutting device is used. The cutting device has a chuck table that holds the workpiece and a cutting unit equipped with an annular cutting tool that cuts the workpiece. By causing the cutting tool to cut into the workpiece held by the chuck table, the workpiece is cut and diced.

[0004] Furthermore, in recent years, with the miniaturization and thinning of electronic devices, semiconductor device chips or packaged devices also require thinning. Therefore, methods are used to thin semiconductor wafers or packaged substrates before dicing. In the thinning of semiconductor device chips or packaged devices, for example, grinding apparatuses that use grinding wheels to grind the workpiece are used.

[0005] In the aforementioned machining apparatuses such as cutting or grinding devices, a touch panel is sometimes provided as a user interface. This touch panel displays an operation screen for operating the machining apparatus, an image of the workpiece being processed, etc. The operator of the machining apparatus then uses the touch panel to input processing conditions, etc., into the machining apparatus (see Patent Document 1).

[0006] Patent Document 1: Japanese Patent Application Publication No. 2009-117776

[0007] As described above, when setting the processing conditions of a processing apparatus equipped with a touch panel, the operator inputs the processing conditions by operating the touch panel. At this time, the operator inputs the prescribed information (numerical value, string, etc.) into the processing apparatus by touching the input keys included in the input section (number keys, keyboard, etc.) displayed on the touch panel.

[0008] However, when the input keys on a touch panel are densely spaced with narrow intervals, frequent input via these keys can easily lead to errors. Furthermore, when the input value has many digits or the string has many characters, the operator may sometimes enter incorrect information. When incorrect information is entered into the touch panel, the workpiece may be processed under undesirable conditions, resulting in defects.

[0009] Furthermore, the machining conditions input into the machining apparatus include multiple items. For example, the machining conditions of a cutting apparatus that uses a cutting tool to cut a workpiece include items such as the cutting tool's rotational speed, the cutting tool's depth of cut into the workpiece, and the machining feed rate, and the values ​​of each item are set separately according to the machining content. In addition, the cutting apparatus stores multiple machining conditions corresponding to various workpieces.

[0010] Furthermore, when setting machining conditions, sometimes the values ​​of multiple items are set to be the same. For example, in a so-called facing twin-spindle cutting device where a pair of cutting tools are arranged facing each other, sometimes the rotational speed or depth of cut of the two cutting tools is set to be the same. In addition, among the multiple machining conditions stored in the cutting device, sometimes only specific items (machining feed rate, etc.) are changed uniformly.

[0011] In this situation, the operator needs to repeatedly operate the touch panel of the cutting device and input the same information into multiple input fields. Therefore, there are problems such as the time and effort required to set processing conditions, and reduced operational efficiency. Summary of the Invention

[0012] The present invention was made in view of this problem, and its object is to provide a processing apparatus that allows for simple and accurate input of processing conditions.

[0013] According to one aspect of the present invention, a processing apparatus is provided, comprising: a chuck table for holding a workpiece; a processing unit for processing the workpiece held by the chuck table; a touch panel for inputting processing conditions; and a control unit for controlling the touch panel, wherein the control unit causes the touch panel to display a plurality of input fields corresponding to a plurality of items included in the processing conditions; when one of the plurality of input fields is selected, a copy processing key and a paste processing key are displayed on the touch panel; when the copy processing key is selected, information input into the input field is copied; when the paste processing key is selected, pre-copied information is input into the input field.

[0014] Furthermore, preferably, when a particular input field is selected, a transcription key is also displayed on the touch panel. When the transcription key is selected, the information entered in that input field is transferred to other input fields. Additionally, preferably, the control unit causes the touch panel to also display an input section having an information input field and multiple input keys for inputting information into multiple input fields. This input section functions as a calculator; when the copy key is selected while the input field is selected, and the paste key is selected while the information input field is selected, the information entered in that input field is transferred to that information input field. Furthermore, preferably, the control unit causes the touch panel to also display an input section having an information input field and multiple input keys for inputting information into multiple input fields. This input section functions as a calculator; when the transcription key is selected, the information entered in that input field is transferred to that information input field.

[0015] Furthermore, preferably, when an input field is selected, one or more history keys are displayed on the touch panel. These history keys display information previously entered into the input field, and when a history key is selected, the information displayed at that selected history key is entered into the input field. Additionally, preferably, the selection of the copy and paste keys is performed via a swipe operation.

[0016] In one aspect of the processing apparatus of the present invention, when one of the multiple input fields displayed on the touch panel is selected, a copy and paste key are displayed on the touch panel. Then, by selecting the copy and paste key, information can be input into the input field through copy and paste operations. Thus, processing conditions can be input into the processing apparatus simply and accurately. Attached Figure Description

[0017] Figure 1 This is a perspective view showing the processing device.

[0018] Figure 2 This is a screenshot showing the processing condition settings.

[0019] Figure 3 This is a screenshot showing the processing condition settings screen when the input field is selected.

[0020] Figure 4 This is a screenshot showing the processing condition setting screen where the input field of the input section has been selected.

[0021] Figure 5 This is a block diagram illustrating an example of the structure of a control unit.

[0022] Label Explanation

[0023] 11: Workpiece; 13: Belt; 15: Frame; 2: Machining device; 4: Base; 4a: Opening; 4b: Opening; 6: Box holding table; 8: Box; 10: Moving mechanism; 10a: Moving worktable; 12: Dustproof and drip-proof cover; 14: Chuck worktable (holding worktable); 14a: Holding surface; 16: Fixture; 18: Guide rail; 20: First support structure; 22: Rail; 24: Moving mechanism; 26: Holding unit; 26a: Holding mechanism; 28: Rail; 30: Moving mechanism; 32: Holding unit; 34: Second support structure; 36a, 36b: Moving mechanism; 38a, 38b: Machining unit; 40: Cutting tool; 42: Imaging unit (photograph) 44: Cleaning unit; 46: Rotary table; 48: Nozzle; 50: Cover; 52: Touch panel; 54: Warning light; 56: Control unit (control section); 70: Processing condition setting screen; 72: Input field (name input field); 74a, 74b: Input field (speed input field); 76: Input field (shape input field); 78: Input field (dimension input field); 78a: Input field (diameter input field); 78b: Input field (length input field); 78c: Input field (width input field); 80: Input field (workpiece thickness input field); 82: Input field (with thickness input field); 84: Input field (height input field); 84a: Input field (first height input field) ); 84b: Input field (2nd height input field); 86: Input field (speed input field); 88: Input field (indexing amount input field); 88a: Input field (1st indexing amount input field); 88b: Input field (2nd indexing amount input field); 90: Input field (automatic descent input field); 92a, 92b: Input field (specification length input field); 94a, 94b: Input field (descent amount input field); 96: Input field (automatic setting input field); 98: Input field (timing input field); 100a, 100b: Input field (cutting distance input field); 102a, 102b: Input field (cutting line count input field); 110: Input section; 112: Input field (information input field) ); 114: Operation bar; 116: Input key; 118: Toggle key; 120: Clipboard area; 122: Buffer area; 130: Input key; 132: End key; 140: Copy processing key; 142: Paste processing key; 144: History transfer processing key; 146: Transfer processing key; 150: Copy processing key; 152: Paste processing key; 154: Transfer processing key; 156: Buffered transfer processing key; 200: Processing unit; 202: Display control unit; 204: Copy / Paste processing unit; 206: Transfer processing unit; 208: Calculation unit; 210: Storage unit; 212: History storage unit; 214: Temporary data storage unit. Detailed Implementation

[0024] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. First, an example of the structure of the processing apparatus of this embodiment will be described. Figure 1 This is a perspective view showing the machining device 2. The machining device 2 is a cutting device that performs cutting operations on the workpiece 11.

[0025] The processing apparatus 2 has a base 4 that supports the various components constituting the processing apparatus 2. An opening 4a is formed at the front corner of the base 4, and a box holding platform 6, which is raised and lowered by a lifting mechanism (not shown), is disposed inside the opening 4a. A box 8 capable of holding multiple workpieces 11 is disposed on the box holding platform 6. Furthermore, in... Figure 1 The outline of box 8 is represented by a dashed line.

[0026] The workpiece 11 is, for example, a silicon wafer formed in the shape of a disk. The workpiece 11 is divided into multiple regions by pre-defined dicing lines (cutting tracks) arranged in a crisscross pattern, and devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed on the front side of each region. When the workpiece 11 is cut and divided along the pre-defined dicing lines using the processing apparatus 2, multiple device chips, each having a device, are manufactured.

[0027] A circular strip 13, made of resin or the like and with a diameter larger than that of the workpiece 11, is attached to the back side of the workpiece 11. A frame 15, with a circular opening in the center larger than that of the workpiece 11, is attached to the outer periphery of the strip 13. The workpiece 11 is stored in the box 8 while supported by the frame 15 via the strip 13.

[0028] Furthermore, there are no restrictions on the material, shape, structure, or size of the workpiece 11. For example, the workpiece 11 can also be a wafer made of materials other than silicon, such as semiconductors, ceramics, resins, or metals. In addition, there are no restrictions on the type, number, shape, structure, size, or arrangement of devices formed on the workpiece 11, and it is also possible not to form any devices on the workpiece 11.

[0029] Alternatively, the workpiece 11 can be stored in the box 8 without being supported by the frame 15 or without the adhesive tape 13. Furthermore, the workpiece 11 can also be a CSP (Chip Size Package) substrate, a QFN (Quad Flat Non-leaded package) substrate, or other packaging substrates.

[0030] To the side of opening 4a, a rectangular opening 4b is formed with its length direction along the X-axis (front-back direction, machining feed direction). Inside opening 4b is a ball screw type moving mechanism 10 and a dustproof and drip-proof cover 12 covering a part of the moving mechanism 10. In addition, the moving mechanism 10 has a moving worktable 10a, which moves along the X-axis.

[0031] A chuck table (holding table) 14 for holding the workpiece 11 is provided on the movable worktable 10a. In addition, the upper surface of the holding table 14 forms a holding surface 14a for holding the workpiece 11. The holding surface 14a is connected to a suction source (not shown) such as an ejector via a suction path (not shown) formed inside the chuck table 14.

[0032] The chuck table 14 moves along the X-axis direction (machining feed) via the moving mechanism 10. Furthermore, the chuck table 14 is connected to a rotary drive source (not shown) such as an electric motor and rotates about a rotation axis that is approximately parallel to the Z-axis direction (vertical direction, up and down direction). Additionally, multiple clamps 16 are provided around the chuck table 14, which hold and fix the frame 15 supporting the workpiece 11.

[0033] A pair of guide rails 18 are provided on the upper side of the opening 4b. These guide rails 18 maintain a state that is approximately parallel to the Y-axis direction (left-right direction, indexing feed direction) while moving closer to and further away from each other. Each pair of guide rails 18 has a support surface from the lower support frame 15 and a side surface that is approximately perpendicular to the support surface and contacts the outer periphery of the frame 15. The pair of guide rails 18 clamp the frame 15 along the X-axis direction and align the workpiece 11.

[0034] A portal-shaped first support structure 20 is arranged above the base 4, spanning the opening 4b. A rail 22 is fixed along the Y-axis on the front surface side (guide rail 18 side) of the first support structure 20. A retaining unit 26 is connected to the rail 22 via a moving mechanism 24.

[0035] The holding unit 26 contacts, for example, the upper surface of the frame 15 to hold it in place. Additionally, the holding unit 26 is raised and lowered via the moving mechanism 24 and moves along the track 22 in the Y-axis direction. The holding unit 26 holds the frame 15, which is aligned by a pair of guide rails 18, and transports the frame 15 to the chuck table 14.

[0036] Furthermore, a holding mechanism 26a for holding the frame 15 is provided on the opening 4a side of the holding unit 26. When the frame 15 housed in the box 8 is held by the holding mechanism 26a, the frame 15 is pulled out of the box 8 onto a pair of guide rails 18 by moving the holding unit 26 along the Y-axis. Conversely, when the frame 15 positioned on the pair of guide rails 18 is held by the holding mechanism 26a, the frame 15 is housed in the box 8 by moving the holding unit 26 along the Y-axis.

[0037] Additionally, a track 28 is fixed along the Y-axis direction on the front surface side of the first support structure 20. A holding unit 32 is connected to this track 28 via a moving mechanism 30. The holding unit 32 contacts, for example, the upper surface of the frame 15 to hold the frame 15 in place. Furthermore, the holding unit 32 is raised and lowered by the moving mechanism 30 and moves along the track 28 in the Y-axis direction.

[0038] A portal-shaped second support structure 34 is arranged behind the first support structure 20, spanning the opening 4b. A pair of ball screw-type moving mechanisms 36a and 36b are fixed to both ends of the front surface side (first support structure 20 side) of the second support structure 34. Furthermore, a machining unit 38a is fixed to the lower part of the moving mechanism 36a, and a machining unit 38b is fixed to the lower part of the moving mechanism 36b. The machining units 38a and 38b are cutting units that cut the workpiece 11 using an annular cutting tool 40.

[0039] The position of the machining unit 38a in the Y-axis and Z-axis directions is adjusted by moving the machining unit 38a along the Y-axis and Z-axis directions using the moving mechanism 36a. Similarly, the position of the machining unit 38b in the Y-axis and Z-axis directions is adjusted by moving the machining unit 38b along the Y-axis and Z-axis directions using the moving mechanism 36b.

[0040] Machining units 38a and 38b each have a cylindrical housing, inside which a cylindrical spindle (not shown) is housed. The front end (one end) of the spindle protrudes to the outside of the housing, and a rotation drive source (not shown), such as an electric motor, is connected to the base end (the other end) of the spindle. Furthermore, an annular cutting tool 40 is mounted on the front end of the spindle.

[0041] The cutting tool 40 is a machining tool that cuts into the workpiece 11 to perform cutting. It is formed by fixing abrasive grains made of diamond or the like using a bonding material. For example, the cutting tool 40 may be an electroformed wheel hub tool with a cutting edge having abrasive grains fixed by nickel plating or the like, or a ring-shaped tool (washer tool) consisting of abrasive grains fixed by a cutting edge made of a bonding material made of metal, ceramic, resin, or the like. Furthermore, there are no restrictions on the materials of the abrasive grains and the bonding material contained in the cutting tool, and they can be appropriately selected according to the material of the workpiece 11 and the content of the cutting operation.

[0042] Imaging units (cameras) 42 are respectively provided adjacent to processing units 38a and 38b to capture images of the workpiece 11 held on the chuck table 14. The images acquired by the imaging units 42 are used, for example, for the alignment of the workpiece 11 held by the chuck table 14 with the processing units 38a and 38b.

[0043] With the workpiece 11 positioned on the chuck table 14 with the belt 13 in between and the frame 15 fixed by the clamp 16, when negative pressure from the suction source is applied to the holding surface 14a, the workpiece 11 is attracted and held by the chuck table 14 with the belt 13 in between. Then, while supplying cutting fluid to the workpiece 11, the cutting tool 40 mounted on the machining unit 38a or machining unit 38b is rotated and cuts into the workpiece 11, thereby cutting the workpiece 11.

[0044] In addition, Figure 1 The image shows an example of a so-called facing twin-spindle type cutting device, in which the machining apparatus 2 has two sets of machining units 38a and 38b and a pair of cutting tools arranged facing each other. However, the number of machining units provided in the machining apparatus 2 may also be one set.

[0045] A cleaning unit 44 is arranged on the side of opening 4b (opposite to opening 4a). The cleaning unit 44 has a rotary table 46 that holds the workpiece within a cylindrical cleaning space. The rotary table 46 is connected to a rotary drive source (not shown) that rotates the rotary table 46 at a predetermined speed.

[0046] A nozzle 48 is disposed above the rotary table 46, which supplies a cleaning fluid (e.g., a mixture of water and air) to the workpiece 11 held by the rotary table 46. The workpiece 11 is cleaned by supplying fluid from the nozzle 48 to the workpiece 11 while the rotary table 46 holding the workpiece 11 is rotated.

[0047] After processing in processing units 38a and 38b, the workpiece 11 is transferred by holding unit 32 to cleaning unit 44 for cleaning. Then, the workpiece 11 is transferred by holding unit 26 to a pair of guide rails 18. After being aligned by the pair of guide rails 18, holding unit 26 uses holding mechanism 26a to hold frame 15 and store the workpiece 11 in box 8.

[0048] A cover 50 is provided on the base 4 to cover the various components of the processing device 2. Figure 1 In the diagram, the outline of the cover 50 is represented by dashed lines. Additionally, a touch panel 52 serving as a user interface is provided on the side of the cover 50. The touch panel 52 functions as a display unit (display device) for displaying specified information, and also as an input unit (input device) for inputting information into the processing device 2.

[0049] A warning light 54 is provided on the upper surface of the cover 50. The warning light 54 illuminates or flashes, for example, when an abnormality occurs in the processing device 2, to notify the operator of the abnormality.

[0050] Each component of the processing apparatus 2 (casing holding table 6, moving mechanism 10, chuck table 14, fixture 16, a pair of guide rails 18, moving mechanism 24, holding unit 26, moving mechanism 30, holding unit 32, moving mechanisms 36a, 36b, processing unit 38a, 38b, imaging unit 42, cleaning unit 44, touch panel 52, warning light 54, etc.) is connected to the control unit (control unit) 56. The control unit 56, composed of a computer or the like, controls the operation of each component of the processing apparatus 2.

[0051] When processing the workpiece 11 using the processing device 2, the processing conditions are first determined and then input into the processing device 2. The processing conditions are input by the operator operating the touch panel 52. Specifically, a screen for setting processing conditions (processing condition setting screen) is displayed on the touch panel 52, and the operator inputs the processing conditions by touching the touch panel 52 while referring to the processing condition setting screen.

[0052] Figure 2 This is a screenshot showing the processing condition setting screen 70 displayed on the touch panel 52. When setting the processing conditions of the processing device 2, the control unit 56 (see reference...) Figure 1 The touch panel 52 displays the processing condition setting screen 70. The processing condition setting screen 70 contains multiple items included in the processing conditions.

[0053] In addition, the processing condition setting screen 70 includes multiple input fields corresponding to the various items included in the processing conditions. Information (numerical values, strings, etc.) specifying the items for the processing conditions is entered in these input fields.

[0054] Specifically, the machining condition setting screen 70 includes the following in its left-hand area: an input field (name input field) 72, which is used to input and display the machining condition name (data name); input fields (speed input fields) 74a and 74b, which are used to input and display the spindle speeds of the machining units 38a and 38b (the speeds of the cutting tools 40 mounted on the machining units 38a and 38b); an input field (shape input field) 76, which is used to input and display the shape of the workpiece 11; an input field (size input field) 78, which is used to input and display the size of the workpiece 11; an input field (workpiece thickness input field) 80, which is used to input and display the thickness of the workpiece 11; and an input field (band thickness input field) 82, which is used to input and display the thickness of the band 13 pasted on the workpiece 11.

[0055] For example, input field 76 can contain the string "ROUND" indicating that the workpiece 11 is circular when viewed from above, or the string "SQUARE" indicating that the workpiece 11 is rectangular (square) when viewed from above. Furthermore, input field 78 includes an input field (diameter input field) 78a for inputting and displaying the diameter of the workpiece 11 when it is circular. Additionally, when the workpiece 11 is rectangular (square), input field 78 includes an input field (length input field) 78b for inputting and displaying the length of the workpiece 11, and an input field (width input field) 78c for inputting and displaying the width of the workpiece 11.

[0056] Furthermore, the machining condition setting screen 70 includes the following in the area on its right side: an input field (height input field) 84, which is input and displays the height (depth of cut) of the cutting tool 40 relative to the chuck table 14 (workpiece 11); an input field (speed input field) 86, which is input and displays the machining feed speed; and an input field (indexing input field) 88, which is input and displays the interval (interval of the dividing predetermined line) of the area of ​​the workpiece 11 cut by the cutting tool 40, i.e., the indexing value.

[0057] Input field 84 includes: input field (first height input field) 84a, which is used to input and display the height of the cutting tool 40 (first cutting tool) mounted on machining unit 38a; and input field (second height input field) 84b, which is used to input and display the height of the cutting tool 40 (second cutting tool) mounted on machining unit 38b. Additionally, input field 88 includes: input field (first indexing amount input field) 88a, which is used to input and display the indexing value in the first horizontal direction; and input field (second indexing amount input field) 88b, which is used to input and display the indexing value in the second horizontal direction, which is perpendicular to the first horizontal direction.

[0058] Below the input field 88 is an input field (automatic descent input field) 90. This input field 90 is used to input and display the conditions for automatically lowering the height of the cutting tool 40 during the machining of the workpiece 11. When machining the workpiece 11 with the cutting tool 40, wear occurs on the outer periphery of the cutting tool 40, and the diameter of the cutting tool 40 gradually decreases. Therefore, during machining, sometimes automatic descent is performed to lower the cutting tool 40 based on the amount of wear. The conditions for this automatic descent are input and displayed in the input field 90.

[0059] Input field 90 includes: input field (specification length input field) 92a, which is used to input and display the reference value (specification length) of the cutting distance of the cutting tool 40 (first cutting tool) mounted on machining unit 38a relative to the workpiece 11; and input field (descent amount input field) 94a, which is used to input and display the descent distance (descent amount) of the first cutting tool relative to the specified length. Additionally, input field 90 includes: input field (specification length input field) 92b, which is used to input and display the reference value (specification length) of the cutting distance of the cutting tool 40 (second cutting tool) mounted on machining unit 38b relative to the workpiece 11; and input field (descent amount input field) 94b, which is used to input and display the descent distance (descent amount) of the second cutting tool relative to the specified length.

[0060] During the cutting of workpiece 11 using the first cutting tool, when the cutting distance of the first cutting tool to workpiece 11 is greater than or equal to the value input into input field 92a, the first cutting tool descends by an amount equivalent to the distance (descent amount) input into input field 94a. Similarly, during the cutting of workpiece 11 using the second cutting tool, when the cutting distance of the second cutting tool to workpiece 11 is greater than or equal to the value input into input field 92b, the second cutting tool descends by an amount equivalent to the distance (descent amount) input into input field 94b.

[0061] Additionally, an input field (automatic setting input field) 96 is displayed below the input field 90, where the conditions for implementing automatic setting are entered and displayed. Automatic setting is an operation that detects the wear amount (reduction in diameter) of the cutting tool 40 when the cutting amount of the cutting tool 40 on the workpiece 11 reaches a predetermined amount, and adjusts the height of the cutting tool 40 according to the wear amount.

[0062] Input field 96 includes an input field (timing input field) 98 for inputting and displaying the timing for implementing automatic settings. For example, input field 98 may contain the string "after cutting" indicating that the automatic setting mode is allowed to be implemented at the end of the processing of a workpiece 11, or the string "during cutting" indicating that the automatic setting mode is also allowed to be implemented during the processing of a workpiece 11.

[0063] The conditions for implementing automatic settings are specified by the distance the cutting tool 40 cuts the workpiece 11 or the number of cuts (cutting lines) the cutting tool 40 cuts the workpiece 11. Specifically, input field 96 includes: input field (cutting distance input field) 100a, which is used to input and display the reference value of the cutting distance of the cutting tool 40 (first cutting tool) mounted on machining unit 38a; and input field (cutting lines input field) 102a, which is used to input and display the reference value of the number of cutting lines of the first cutting tool. In addition, input field 96 includes: input field (cutting distance input field) 100b, which is used to input and display the reference value of the cutting distance of the cutting tool 40 (second cutting tool) mounted on machining unit 38b; and input field (cutting lines input field) 102b, which is used to input and display the reference value of the number of cutting lines of the second cutting tool.

[0064] During the cutting of workpiece 11 using the first cutting tool, if the cutting distance of the first cutting tool is greater than or equal to the cutting distance pre-entered in input field 100a, or the number of cutting lines of the first cutting tool is greater than or equal to the number of cutting lines pre-entered in input field 102a, the automatic setting of the first cutting tool is performed when the time for input in input field 98 arrives. Specifically, the consumption (diameter) of the first cutting tool is detected, and the height of the first cutting tool is changed according to the consumption. The changed height of the first cutting tool is input in input field 84a. The automatic setting of the second cutting tool is also performed in the same sequence.

[0065] Furthermore, there are no restrictions on the method for detecting the consumption of the cutting tool 40. For example, a detector such as a transmission-type photoelectric sensor can be installed in the machining apparatus 2, and this detector can be used to detect the consumption of the cutting tool 40 (the amount of reduction in diameter). In addition, the height of the modified cutting tool 40 can be automatically set according to the consumption of the cutting tool 40, or it can be set by the operator according to the consumption.

[0066] During the machining of the workpiece 11, either automatic descent or automatic setting can be implemented, or both can be implemented. When automatic descent and automatic setting are used together, the amount of descent of the cutting tool 40 is appropriately adjusted based on the actual wear of the cutting tool 40 through automatic setting, and the time required for automatic setting is shortened through automatic descent.

[0067] Additionally, the processing condition setting screen 70 includes an input section 110 in its lower area. This input section 110 is used when inputting information into the various input fields included in the processing condition setting screen 70. The input section 110 includes: an input field (information input field) 112, which is used to input and display numerical values, strings, and other information; and an operation bar 114, used to input information into the various input fields included in the processing condition setting screen 70. The operation bar 114 consists of multiple input keys 116 for information input.

[0068] exist Figure 2 The image shows the state where the number keys are displayed in the operation bar 114 and values ​​can be entered into the input field. When one of the input fields included in the processing condition setting screen 70 is selected (active state), the desired value is entered into the active input field by operating the operation bar 114.

[0069] Near the input section 110, there is a switch key 118 for switching the display of the operation bar 114. When the switch key 118 is selected, the display of the operation bar 114 switches from the number keys to the keyboard. This allows the user to input strings such as letters in the input field.

[0070] Furthermore, when number keys are displayed in the operation bar 114, the input unit 110 also functions as a calculator for performing arithmetic operations. Specifically, when a value is entered in the input bar 112, the desired arithmetic operations are performed on the value entered in the input bar 112 by operating the input key 116 of the operation bar 114.

[0071] A clipboard area 120 for storing and displaying arbitrary information is provided on the left side of the input section 110. This clipboard area 120 includes multiple buffer areas 122 in which arbitrary information (numerical values, strings, etc.) entered into the input field 112 is copied and stored. Specific examples of how to use the buffer areas 122 will be described later.

[0072] Additionally, an input key 130 and an end key 132 are provided at the right end of the processing condition setting screen 70. The input key 130 is a processing key used to confirm the information entered into each input field. The end key 132 is a processing key used to confirm all the information entered into the processing condition setting screen 70 and close the processing condition setting screen 70.

[0073] When setting the processing conditions of the processing device 2, a processing condition setting screen 70 is displayed on the touch panel 52, and the operator operates the processing condition setting screen 70. The operation of the processing condition setting screen 70 is performed through touch operation of the touch panel 52. For example, the input field or key is selected by tapping the area of ​​the touch panel 52 that displays the input field or key.

[0074] When inputting information into the input fields included in the processing condition setting screen 70, the input field containing the information to be input is selected and activated, and numerical values ​​or strings are entered using the input keys 116 of the operation bar 114. However, for example, when the input keys 116 are densely arranged with narrow intervals, input errors are prone to occur. In addition, when the number of digits in the numerical value to be entered or the number of characters in the string is large, the operator may sometimes enter incorrect information.

[0075] Furthermore, when setting machining conditions, sometimes the same value or string is entered into multiple input fields. For example, for a pair of cutting tools 40 mounted on machining device 2, when the automatic descent and automatic setting conditions are set to be the same, the same value is entered into input fields 92a, 92b, 94a, 94b, 100a, 100b, 102a, and 102b respectively. Moreover, for example, when uniformly changing the machining feed rate for multiple machining conditions, it is necessary to repeatedly enter the specified machining feed rate into input field 86 for all machining conditions. Thus, when using the input key 116 of operation bar 114 to enter the same information into multiple input fields, the input operation takes time and effort.

[0076] Here, in the processing apparatus 2 of this embodiment, when an input field is selected, copy and paste keys are displayed around the input field. Furthermore, by operating these copy and paste keys, information can be entered into the input field without using the input key 116 on the operation field 114. This allows for simple and accurate input of processing conditions and reduces the frequency of using the input key 116 to input information.

[0077] Figure 3 This is a screenshot of the processing condition setting screen 70, showing the state of an input field being selected. Figure 3As an example, the state of input field 92a with the input specification length selected for automatic decrease is shown.

[0078] When the operator taps the area of ​​the touch panel 52 displaying the input field 92a, the input field 92a is selected and becomes active (selected state), allowing the operator to input values ​​into the input field 92a. Then, with the input field 92a selected, the operator can tap the input key 116 of the operation bar 114 displayed at the bottom of the processing condition setting screen 70 to input the desired value into the input field 92a.

[0079] On the other hand, when the operator continuously touches (long presses, long touches) the area of ​​the touch panel 52 displaying the input field 92a for a certain period of time, a copy processing key 140, a paste processing key 142, multiple history transfer processing keys 144, and a transfer processing key 146 are displayed around the input field 92a. For example, as Figure 3 As shown, the copy key 140 is adjacent to the input field 92a and displayed above the input field 92a; the paste key 142 is adjacent to the input field 92a and displayed below the input field 92a; the multiple history transfer key 144 is adjacent to the input field 92a and displayed to the left of the input field 92a; and the transfer key 146 is adjacent to the input field 92a and displayed to the right of the input field 92a.

[0080] Furthermore, the display method of the copy processing key 140, paste processing key 142, history transfer processing key 144, and transfer processing key 146 is not limited. For example, these keys can also be displayed when a tap or double-click operation is performed on the area displaying the input field 92a. Additionally, the copy processing key 140, paste processing key 142, history transfer processing key 144, and transfer processing key 146 can also have a color different from the background color or the color of the input field on the processing condition setting screen 70. This emphasizes the display of the keys.

[0081] The copy processing key 140 is an execution key used to perform the process of copying and temporarily storing information (data) entered into the input field. Specifically, when the copy processing key 140 is selected, the value entered into the active input field 92a is copied and temporarily stored.

[0082] The paste processing key 142 is an execution key used to input (paste) information (data) that has been pre-copied and temporarily stored through the selection of the copy processing key 140 into the input field. Specifically, when the paste processing key 142 is selected, the pre-copied value is input into the active input field 92a. For example, if a value that has been pre-copied into input field 92b through the selection of the copy processing key 140, the same value as that in input field 92b is entered into input field 92a.

[0083] When the information entered into multiple input fields is the same, after copying the information in one input field by selecting the copy processing key 140, the other input fields can be activated by selecting the paste processing key 142, thereby allowing information to be entered into the other input fields. This reduces the frequency of inputting information by operating the input keys 116 of the operation bar 114. As a result, the information input process is simplified, and input errors are less likely to occur.

[0084] The history processing keys 144 display information (historical information, historical data) previously entered into the selected input field. Figure 3 The image shows an example where five history processing keys 144 display values ​​previously entered into input field 92a. For instance, the five history processing keys 144 are arranged vertically along the processing condition setting screen 70, with newer historical information displayed at the top.

[0085] The history processing key 144 is an execution key used to input the information displayed by the history processing key 144 into the input field. Specifically, when one of the multiple history processing keys 144 is selected, the information displayed by the selected history processing key 144 is input into the active input field 92a.

[0086] When the history transfer processing key 144 is used, the value previously entered into the input field 92a can be re-entered into the input field 92a without operating the input key 116 of the operation field 114. Thus, for example, it is possible to perform the operation of restoring the value of a changed specification length simply and reliably. Furthermore, the number of history transfer processing keys 144 displayed around the selected input field is unlimited and can be set to any number of more than one.

[0087] The transfer processing key 146 is an execution key used to perform the process of transferring information (data) entered into the selected input field to other input fields. Specifically, when the transfer processing key 146 is selected, the value entered into the active input field 92a is transferred (transferred) to other designated input fields.

[0088] By selecting the transcribing key 146, the value entered in input field 92a can be copied to other input fields without performing the operation of input key 116 on input unit 110, the selection of the copy key 140 and paste key 142. This simplifies the input process and reduces the likelihood of input errors. Here, as an example, we will explain the case where the transcribing key 146 is used to execute the process of inputting information from the active input field into input field 112 of input unit 110.

[0089] Furthermore, while the example given above illustrates the case where input field 92a was selected, the copy processing key 140, paste processing key 142, history transfer processing key 144, and transfer processing key 146 are also displayed when other input fields included in the processing condition setting screen 70 are selected. Therefore, copy processing, paste processing, and history transfer processing can be performed on information entered into any input field. Additionally, information entered into any input field can be transferred to other input fields.

[0090] Furthermore, there are no restrictions on how the copy key 140, paste key 142, history key 144, and transfer key 146 are selected. For example, when the copy key 140, paste key 142, history key 144, and transfer key 146 are displayed, the key can be selected by tapping one of the keys.

[0091] Additionally, after long-pressing an input field to display the copy key 140, paste key 142, history key 144, and history key 146, you can also select a key by flicking your finger in the direction of the desired key while keeping your finger in contact with the touch panel 52. When using the flick operation, you can quickly select the desired key and are less likely to make a selection error.

[0092] When a value is transferred in the input field 112 of the input unit 110, arithmetic operations can be performed on that value. Specifically, the input unit 110 also functions as a calculator, and by operating the input key 116 displayed in the operation bar 114, the desired calculation can be performed on the value input into the input field 112.

[0093] For example, when the operations of transferring the thickness of the workpiece 11 input into the input field 80 to the input field 112 by selecting the transfer processing key 146, selecting the input key 116 to perform addition processing, and transferring the thickness of the strip 13 input into the input field 82 to the input field 112 by selecting the transfer processing key 146, the addition processing of the thickness of the workpiece 11 and the thickness of the strip 13 is performed, and the calculation result is displayed in the input field 112.

[0094] However, the operator can also directly input the desired value in the input field 112 of the input unit 110. When the operator touches the area of ​​the touch panel 52 that displays the input field 112, the input field 112 is selected and becomes active, allowing the operator to input a value in the input field 112. In this state, the desired value can be input in the input field 112 by operating the input key 116 of the operation bar 114.

[0095] Figure 4 This is a screenshot of the processing condition setting screen 70 showing the state of the input field 112 of the input unit 110. Here, when the operator continuously touches (long-presses) the area of ​​the touch panel 52 displaying the input field 112 for a certain period of time, a copy processing key 150, a paste processing key 152, a transfer processing key 154, and multiple buffered transfer processing keys 156 are displayed around the input field 112. For example, as... Figure 4 As shown, the copy key 150 is adjacent to the input field 112 and displayed above the input field 112; the paste key 152 is adjacent to the input field 112 and displayed below the input field 112; the transcribing key 154 is adjacent to the input field 112 and displayed to the right of the input field 112; and the buffered transcribing key 156 is adjacent to the input field 112 and displayed to the left of the input field 112.

[0096] Furthermore, there are no restrictions on how the copy processing key 150, paste processing key 152, transfer processing key 154, and buffered transfer processing key 156 are displayed. For example, these keys can also be displayed when a tap or double-click is performed on the area where the input field 112 is displayed. Additionally, the copy processing key 150, paste processing key 152, transfer processing key 154, and buffered transfer processing key 156 can also have a color different from the background color or the color of the input field on the processing condition setting screen 70. This emphasizes the display of the keys.

[0097] The copy key 150 and the paste key 152 respectively have the same functions as... Figure 3 The copy key 140 and paste key 142 shown have the same function. That is, when the copy key 150 is selected, the information entered into the input field 112 is copied. Similarly, when the paste key 152 is selected, the previously copied information is entered into the input field 112. Additionally, the transcribing key 154 has the same function as... Figure 3 The transcription processing key 146 shown has the same function. That is, when the transcription processing key 154 is selected, the information entered into the input field 112 is entered (transcribed) into other input fields.

[0098] Furthermore, the input field that serves as the destination for the information transferred via the transfer processing key 154 can be freely selected. For example, when transferring a value entered into input field 112 to input field 92a, first, input field 92a is designated by tapping it. Then, when the transfer processing key 154 is displayed and selected, the value entered into input field 112 is transferred to input field 92a.

[0099] Multiple buffer transfer processing keys 156 are execution keys used to perform the process of transferring information (data) entered into input field 112 to buffer area 122. The multiple buffer transfer processing keys 156 are arranged in the same number as the buffer area 122 (in...). Figure 4 (5 in total) are displayed, and are displayed in a manner that overlaps with or is adjacent to the buffer area 122 respectively.

[0100] When a buffer transcription processing key 156 is selected, the information entered into the input field 112 is transcribed and displayed in the buffer area 122 corresponding to the selected buffer transcription processing key 156. Thus, information such as frequently used numerical values ​​or strings is stored in the buffer area 122.

[0101] Additionally, if you long-press the buffer area 122, a copy button 150 and a paste button 152 will appear around the buffer area 122. Therefore, you can use the copy and paste functions to transfer the information entered into the buffer area 122 to any other input field.

[0102] However, there are no restrictions on the method of transferring information from the buffer area 122. For example, first, you can select an input field as the destination for transferring information into the buffer area 122, and then long press the buffer area 122 to transfer the information from the buffer area 122 to the input field of the destination.

[0103] As described above, multiple buffer areas 122 are provided in the clipboard area 120 so that specified information can be stored in the buffer areas 122, thereby enabling frequently used numerical values ​​or strings to be quickly entered into other input fields.

[0104] The aforementioned processing condition setting screen 70, displayed on the touch panel 52, is controlled by the control unit 56 of the processing device 2 (see reference). Figure 1 To control it. Figure 5 This is a block diagram showing an example of the structure of the control unit 56.

[0105] The control unit 56 includes a processing unit 200, which performs calculations and other processing required for controlling the processing apparatus 2; and a storage unit 210, which stores various data, programs, etc., used by the processing unit 200. The processing unit 200 is configured, for example, to include a processor such as a CPU (Central Processing Unit), and the storage unit 210 is configured, for example, to include a memory such as RAM (Random Access Memory). The processing unit 200 and the storage unit 210 are interconnected via a bus.

[0106] exist Figure 5The functional structure of the processing unit 200 and the storage unit 210 is shown in the figure. Specifically, the processing unit 200 includes: a display control unit 202 that controls the display of the touch panel 52; and a copy / paste processing unit 204 that executes the processing condition setting screen 70 (see reference) displayed on the touch panel 52. Figure 2 , Figure 3 , Figure 4 The copy and paste processing is performed on the processing condition setting screen 70; the transfer processing unit 206 performs the transfer processing of information performed on the processing condition setting screen 70; and the calculation unit 208 performs the calculation processing (calculator-based arithmetic operations) performed on the input unit 110 of the processing condition setting screen 70.

[0107] In addition, the storage unit 210 includes: a history storage unit 212, which stores information (data) previously entered into each input field included in the processing condition setting screen 70; and a temporary data storage unit 214, which temporarily stores information (data) copied on the processing condition setting screen 70.

[0108] The following describes a specific example of the operation of the control unit 56. Here, we will specifically focus on the selected... Figure 3 The copy key 140, paste key 142, history key 144, and note key 146 shown are as follows: Figure 4 The actions of the copy processing key 150, paste processing key 152, transcribing key 154, and buffer transcribing key 156 are described in detail.

[0109] When setting the processing conditions of the processing device 2, the display control unit 202 causes the touch panel 52 to display the processing condition setting screen 70. Then, when a long press is made on one of the input fields included in the processing condition setting screen 70 (for example, input field 92a, see...), the user can access the processing condition setting screen. Figure 3 When the input field 92a is in use, the display control unit 202 displays the copy processing key 140, the paste processing key 142, the multiple history transfer processing key 144, and the transfer processing key 146 around the input field 92a.

[0110] Furthermore, the information (historical information) displayed on the multiple historical record processing keys 144 is pre-stored in the historical storage unit 212 within the storage unit 210. The display control unit 202 accesses the historical storage unit 212 and reads the historical information, and displays the historical information on the historical record processing keys 144.

[0111] When the copy processing key 140 is selected on the processing condition setting screen 70, the data (values) entered into the input field 92a is input into the copy / paste processing unit 204. Then, the copy / paste processing unit 204 accesses the temporary data storage unit 214 and stores the data in the temporary data storage unit 214.

[0112] On the other hand, when the paste processing key 142 is selected on the processing condition setting screen 70, the copy / paste processing unit 204 accesses the temporary data storage unit 214 and reads the previously copied data from the temporary data storage unit 214. Then, it performs the process of inputting the read data into the input field 92a.

[0113] When a history transfer processing key 144 is selected on the processing condition setting screen 70, the transfer processing unit 206 performs the process of inputting the information displayed on the selected history transfer processing key 144 into the input field 92a. Additionally, when a transfer processing key 146 is selected on the processing condition setting screen 70, the transfer processing unit 206 performs the process of inputting (transferring) the information entered into the input field 92a into other input fields (e.g., input field 112 of the input unit 110).

[0114] When performing a specified arithmetic operation on the value input into the input field 112, the operator operates the input key 116 included in the operation bar 114 of the input unit 110 to specify the operation content. Then, the calculation unit 208 performs the specified operation and performs the process of inputting the operation result into the input field 112.

[0115] Additionally, if you press and hold the input field 112 of the input unit 110, the display control unit 202 will display the copy processing key 150, the paste processing key 152, the transfer processing key 154, and multiple buffered transfer processing keys 156 around the input field 112 (see reference). Figure 4 ).

[0116] Then, when the copy processing key 150 is selected on the processing condition setting screen 70, the data (values) entered into the input field 112 is input into the copy / paste processing unit 204. Then, the copy / paste processing unit 204 accesses the temporary data storage unit 214 and stores the data in the temporary data storage unit 214.

[0117] On the other hand, if the paste processing key 152 is selected on the processing condition setting screen 70, the copy / paste processing unit 204 accesses the temporary data storage unit 214 and reads the previously copied data from the temporary data storage unit 214. Then, it performs the process of inputting the read data into the input field 112.

[0118] When the transfer processing key 154 is selected on the processing condition setting screen 70, the transfer processing unit 206 performs the process of transferring the information entered into the input field 112 to other input fields. Furthermore, the input field for the transfer destination is specified by the operator. Additionally, when a buffer transfer processing key 156 is selected on the processing condition setting screen 70, the transfer processing unit 206 performs the process of transferring the information entered into the input field 112 to the buffer area 122 corresponding to the selected buffer transfer processing key 156.

[0119] Additionally, when the buffer area 122 is pressed and held, the display control unit 202 displays the copy processing key 150 and the paste processing key 152 around the selected buffer area 122. Then, when the copy processing key 150 or the paste processing key 152 is selected, the copy / paste processing unit 204 performs the copy processing or paste processing as described above.

[0120] Then, after entering the desired information into all the input fields included in the processing condition setting screen 70, the operator selects the end button 132. As a result, the processing conditions are determined, and the display control unit 202 closes the processing condition setting screen 70. Then, the processing unit 200 controls the operation of each component of the processing apparatus 2 according to the determined processing conditions.

[0121] Furthermore, the above description explains the case where information entered into input field 92a is transferred to input field 112 of input unit 110 by selecting the transfer processing key 146. However, this transfer can also be performed using the copy processing key 140 (see [reference]). Figure 3 ) and paste processing key 152 (see reference) Figure 4 The selection process is as follows: Specifically, with input field 92a selected, the copy processing key 140 is selected; then, with input field 112 of input section 110 selected, the paste processing key 152 is selected. This transfers the information entered in input field 92a into input field 112.

[0122] As described above, in the processing apparatus 2 of this embodiment, when one of the multiple input fields displayed on the touch panel is selected, copy and paste keys are displayed around the selected input field. Then, by selecting these copy and paste keys, information can be input into the input field via copy and paste instead of using the input keys 116 on the operation bar 114. This allows for simple and accurate input of processing conditions into the processing apparatus 2.

[0123] Furthermore, in this embodiment, the processing apparatus 2 is described as a cutting apparatus having processing units 38a and 38b (cutting units) for cutting the workpiece 11, but the type of processing apparatus 2 is not limited. For example, the processing apparatus 2 may also be a grinding apparatus having a processing unit (grinding unit) for grinding the workpiece 11 using a grinding wheel with multiple grinding tools fixed thereon, a grinding apparatus having a processing unit (grinding unit) for grinding the workpiece 11 using a grinding pad, a laser processing apparatus having a processing unit (laser irradiation unit) for processing the workpiece 11 by irradiation with a laser beam, etc.

[0124] When the processing device 2 is a grinding device, a processing condition setting screen is displayed on the touch panel 52, which allows input of various items included in the processing conditions of the grinding process (target value of the thickness of the workpiece 11 (finished thickness), rotation speed of the grinding wheel, rotation speed of the chuck table, descent speed of the grinding wheel (speed at which the grinding wheel is pressed onto the workpiece 11), supply amount and temperature of the processing fluid, etc.).

[0125] In addition, when the processing device 2 is a grinding device, a processing condition setting screen is displayed on the touch panel 52, which allows input of various items included in the grinding processing conditions (target value of the thickness of the workpiece 11 (finished thickness), rotation speed of the grinding pad, rotation speed of the chuck table, descent speed of the grinding pad (speed at which the grinding pad is pressed onto the workpiece 11), amount and temperature of the processing fluid, etc.).

[0126] In addition, when the processing device 2 is a laser processing device, a processing condition setting screen is displayed on the touch panel 52, which allows input of various items included in the laser processing conditions (laser beam irradiation conditions (wavelength, power, spot diameter, repetition frequency, position of the focus point, etc.), processing feed speed and direction, etc.).

[0127] In addition, the structure and method of the above-described embodiments can be appropriately modified and implemented without departing from the purpose of the present invention.

Claims

1. A processing apparatus having: a chuck table that holds a workpiece; a processing unit that processes the workpiece held by the chuck table; a touch panel that inputs a processing condition; and a control unit that controls the touch panel, characterized in that the control unit causes the touch panel to display a plurality of input fields corresponding to a plurality of items included in the processing condition, displays a copy processing key and a paste processing key on a periphery of one of the input fields when the one of the input fields is long-pressed, copies information input into the one of the input fields when the copy processing key is selected, inputs the information previously copied into the one of the input fields when the paste processing key is selected, further displays a transfer processing key on the touch panel when the one of the input fields is selected, inputs the information input into the one of the input fields into the other of the input fields when the transfer processing key is selected, causes the touch panel to further display an input section having an information input field and a plurality of input keys for inputting information into the plurality of input fields and functioning as a calculator, and inputs the information input into the one of the input fields into the information input field and performs a desired operation on a value input into the information input field by the input section when the transfer processing key is selected.

2. The processing apparatus according to claim 1, characterized in that the information input into the one of the input fields is input into the information input field when the paste processing key is selected in a state in which the information input field is selected after the copy processing key is selected in a state in which the one of the input fields is selected.

3. The processing apparatus according to claim 1 or 2, characterized in that one or a plurality of history transfer processing keys that display information previously input into the one of the input fields are further displayed on the touch panel when the one of the input fields is selected, and the information displayed in the selected history transfer processing key is input into the one of the input fields when the history transfer processing key is selected.

4. The processing apparatus according to claim 1 or 2, characterized in that selection of the copy processing key and the paste processing key is performed by a flick operation. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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