Photodetection devices and electronic devices

Abstract

The present invention relates to a light detection device and an electronic device. The light detection device may include: a plurality of pixels, the plurality of pixels including: a first pixel, the first pixel including a first color filter, the first color filter being configured to transmit light in a first wavelength range; and a second pixel, the second pixel including a second color filter, the second color filter being configured to transmit light in a second wavelength range, a first light shielding film surrounding the second color filter in a plan view, wherein the first wavelength range is different from the second wavelength range, and wherein in the plan view, the area of ​​the first color filter is larger than the area of ​​the second color filter.

Description

[0001] The present application is a divisional application of a patent application with application number 201580045391.1 and application date of August 21, 2015, and invention name of “Solid-state imaging device, imaging apparatus and electronic device”. Technical Field

[0002] The present invention relates to a solid-state imaging device, an imaging apparatus, and an electronic device. In particular, the present invention relates to a solid-state imaging device, an imaging apparatus, and an electronic device that can reduce color mixing caused by white (W) pixels without reducing the sensitivity obtained by the W pixels when a color filter including the W pixels is used. Background Art

[0003] In solid-state imaging devices such as charge coupled devices (CCDs) and complementary metal oxide semiconductor (CMOS) image sensors, the pixel size is gradually reduced while the number of pixels is increased to improve resolution performance. When the pixel size is reduced to a certain extent, the sensitivity characteristics of each pixel will decrease, and it will be difficult to obtain the necessary sensitivity.

[0004] Therefore, the following technology is known: in addition to ordinary red (R), green (G), and blue (B) pixels, sensitivity is increased by arranging pixels that transmit light in the entire visible light region (hereinafter, referred to as white (W) pixels) (for example, refer to patent documents 1 and 2).

[0005] Reference List

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Laid-Open No. 2009-26808

[0008] Patent Document 2: Japanese Patent Application Laid-Open No. 2009-81169 Summary of the invention

[0009] Technical issues

[0010] Generally, color mixing is more likely to occur in a solid-state imaging device including a W pixel than in a solid-state imaging device of a Bayer array. Since there are multiple light paths that may cause color mixing, it is not easy to find a certain light path. However, as one of such possible paths, there is a path that allows light to penetrate from a portion above the inter-pixel light shielding film in a color filter (hereinafter also referred to as CF) of a W pixel to a CF of an R pixel, a G pixel, or a B pixel (hereinafter also referred to as an RGB pixel).

[0011] Now, an obvious difference between a solid-state imaging device including W pixels and a solid-state imaging device of a Bayer array is that in a solid-state imaging device of a Bayer array, even when light that has passed through a CF is incident on a CF of a different color, only a small amount of light will pass through the CF of a different color due to the large difference in spectral characteristics.

[0012] In contrast, since light passing through the CF of the W pixel includes all wavelength components, when such light is incident on the RGB pixels, the light having passed through the CF of the W pixel transmits through any CF of the RGB pixels having respective corresponding spectral characteristics.

[0013] Therefore, color mixing, which is one of the important factors that deteriorate image quality, is more likely to occur in a solid-state imaging device including W pixels.

[0014] The present invention has been made in view of the above-mentioned contents. In particular, the present invention aims to reduce color mixing in a solid-state imaging device including a W pixel without reducing sensitivity.

[0015] Technical Solution

[0016] According to one aspect of the present invention, a solid-state imaging device includes: an optical filter configured to extract and transmit white light and light of multiple specific wavelengths as incident light itself, pixel by pixel; and an inter-pixel shading film configured to shield light from adjacent pixels in the optical filter, pixel by pixel, wherein the inter-pixel shading film in a pixel that transmits white light is thinner than the inter-pixel shading film in a pixel that transmits light of another specific wavelength.

[0017] The shorter the wavelength of the light of the other specific wavelength is, the thicker the inter-pixel light shielding film of the pixel that transmits the light of the other specific wavelength can be.

[0018] The plurality of specific wavelengths of light may include red light, green light, and blue light.

[0019] The inter-pixel light-shielding film in the pixel for the red light may be thinner than the inter-pixel light-shielding film in the pixel for the green light, and the inter-pixel light-shielding film in the pixel for the green light may be thinner than the inter-pixel light-shielding film in the pixel for the blue light.

[0020] The plurality of specific wavelengths of light may include yellow light, magenta light, and cyan light.

[0021] The inter-pixel light-shielding film in the pixel for the yellow light may be thinner than the inter-pixel light-shielding film in the pixel for the magenta light, and the inter-pixel light-shielding film in the pixel for the magenta light may be thinner than the inter-pixel light-shielding film in the pixel for the cyan light.

[0022] The plurality of specific wavelengths of light may include red light and green light.

[0023] The inter-pixel light-shielding film in the pixel for the red light may be thinner than the inter-pixel light-shielding film in the pixel for the green light.

[0024] The plurality of specific wavelengths of light may include red light and blue light.

[0025] The inter-pixel light-shielding film in the pixel for the red light may be thinner than the inter-pixel light-shielding film in the pixel for the blue light.

[0026] The plurality of specific wavelengths of light may include green light and blue light.

[0027] The inter-pixel light-shielding film in the pixel for the green light may be thinner than the inter-pixel light-shielding film in the pixel for the blue light.

[0028] Among pixels that transmit the plurality of specific wavelengths of light and are adjacent to pixels that transmit the white light, an inter-pixel light shielding film disposed at a position adjacent to the pixel that transmits the white light may be thicker than inter-pixel light shielding films at other positions.

[0029] In a pixel that transmits light of a plurality of specific wavelengths and is adjacent to a pixel that transmits the white light, the longer the wavelength of the transmitted specific wavelength light is, the thinner the inter-pixel light shielding film arranged at a position adjacent to the pixel that transmits the white light can be.

[0030] An imaging device according to one aspect of the present invention includes: an optical filter configured to extract and transmit white light as incident light itself and light of multiple specific wavelengths on a pixel-by-pixel basis; and an inter-pixel shading film configured to shield light from adjacent pixels in the optical filter on a pixel-by-pixel basis, wherein the inter-pixel shading film in a pixel that transmits white light is thinner than the inter-pixel shading film in a pixel that transmits light of another specific wavelength.

[0031] An electronic device according to one aspect of the present invention includes: an optical filter, which is configured to extract and transmit white light as incident light itself and light of multiple specific wavelengths on a pixel-by-pixel basis; and an inter-pixel shading film, which is configured to shield light from adjacent pixels in the optical filter on a pixel-by-pixel basis, wherein the inter-pixel shading film in a pixel that transmits white light is thinner than the inter-pixel shading film in a pixel that transmits light of another specific wavelength.

[0032] According to one aspect of the present invention, the filter extracts and transmits white light as incident light itself and light of multiple specific wavelengths pixel by pixel, and the inter-pixel light shielding film shields light from adjacent pixels in the filter pixel by pixel. The inter-pixel light shielding film in the pixel that transmits white light is thinner than the inter-pixel light shielding film in the pixel that transmits light of another specific wavelength.

[0033] Beneficial Effects

[0034] According to an aspect of the present invention, color mixing can be reduced without reducing sensitivity in a solid-state imaging device including W pixels. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is a diagram for explaining the principle of color mixing.

[0036] Figure 2 is a diagram showing an exemplary configuration of a first embodiment of a color filter to which the present invention is applied.

[0037] Figure 3 is a diagram showing an exemplary configuration of a second embodiment of a color filter to which the present invention is applied.

[0038] Figure 4 : is a diagram showing an exemplary configuration of a third embodiment of a color filter to which the present invention is applied.

[0039] Figure 5 : is a diagram showing an exemplary configuration of a fourth embodiment of the color filter to which the present invention is applied.

[0040] Figure 6 : is a diagram showing an exemplary configuration of a fifth embodiment of the color filter to which the present invention is applied.

[0041] Figure 7 : is a diagram showing an exemplary configuration of a sixth embodiment of the color filter to which the present invention is applied.

[0042] Figure 8 : is a diagram showing an exemplary configuration of a seventh embodiment of the color filter to which the present invention is applied.

[0043] Fig. 9 : is a diagram showing an exemplary configuration of an eighth embodiment of the color filter to which the present invention is applied.

[0044] Fig.10 : is a diagram showing an exemplary configuration of a ninth embodiment of the color filter to which the present invention is applied.

[0045] Fig.11 is a diagram showing an exemplary configuration of a tenth embodiment of a color filter to which the present invention is applied.

[0046] Fig.12is a diagram showing an exemplary configuration of an eleventh embodiment of a color filter to which the present invention is applied.

[0047] Fig.13 is a diagram showing an exemplary configuration of a twelfth embodiment of the color filter to which the present invention is applied.

[0048] Fig.14 : is a diagram showing an exemplary configuration of an imaging apparatus serving as an electronic device to which the solid-state imaging device according to the present invention is applied. DETAILED DESCRIPTION

[0049] The principle of color mixing

[0050] Figure 1 The left part shows the structure of a solid-state imaging device including a color filter (hereinafter may also be referred to as CF) of a Bayer array. Figure 1 The right part shows the structure of a solid-state imaging device including CF (as CF including W pixels) in which W pixels are arranged in a checkerboard pattern. Note that Figure 1 The upper left and upper right parts both show the color arrangement pattern of CF and the lower left and lower right parts show the side cross-section. In addition, in the color arrangement pattern of CF in the upper left part, the arrangement colors represented as GB and GR respectively represent G pixels whose adjacent pixels in the horizontal direction are B pixels and G pixels whose adjacent pixels in the horizontal direction are R pixels. When there is no particular need to distinguish between the two, GB and GR are simply referred to as G pixels.

[0051] In solid-state imaging devices, such as Figure 1 As shown in the left and right parts of the figure, the color filter (CF) 11 and the light receiving part 12 are arranged sequentially from the direction of the incident light in the upper part of the figure. In addition, for the incident light, the CF 11 extracts and transmits the light of the predetermined wavelength pixel by pixel according to the corresponding arrangement color. The light receiving part 12 outputs a pixel signal according to the amount of the received light pixel by pixel. The CF 11 includes an inter-pixel shielding film 11a pixel by pixel, and a part of the inter-pixel shielding film 11a is arranged close to the part in contact with the CF 11. The inter-pixel shielding film 11a shields the light of the CF 11 from the adjacent pixel.

[0052] For CFs arranged in a Bayer array, such as Figure 1 As shown in the left part, when it is assumed that a green (G) pixel is at the center of the side cross section, for example, adjacent pixels are a red (R) pixel and a blue (B) pixel.

[0053] When it is assumed that the green (G) pixel is at the center of the side section and its adjacent pixels are the R pixel and the B pixel, there may be light that passes through the inter-pixel light shielding film 11a. Figure 1As indicated by the arrows on the left, light between adjacent pixels that passes through the inter-pixel light shielding film 11 a can enter the pixel, but will not pass through the pixel due to different spectral characteristics.

[0054] In contrast, CF 11 includes, for example, Figure 1 The right part of FIG. 1 shows white (W) pixels arranged in a white checkerboard pattern and when the W pixel is assumed to be at the center, the adjacent pixels may be red (R), green (G) or blue (B). Since white light includes light of all wavelengths, Figure 1 As indicated by the arrow in the right part of , light that has passed through the inter-pixel light shielding film 11a between adjacent pixels passes through the adjacent pixels. This causes color mixing. This is one of the principles of the main factors that cause color mixing in a solid-state imaging device including W pixels.

[0055] First embodiment

[0056] Therefore, in a solid-state imaging device including four types of pixels, namely W, R, G, and B pixels, the inter-pixel light shielding film in the RGB pixels is thicker than the inter-pixel light shielding film in the W pixels. In this way, while suppressing the decrease in sensitivity of the W pixels, color mixing can be reduced by shielding the incident light entering the R, G, and B pixels from the W pixels.

[0057] Note that, hereinafter, the light shielding film between the W pixel and the R pixel is referred to as the light shielding film 11r, the light shielding film between the W pixel and the B pixel is referred to as the light shielding film 11b, and the light shielding film between the W pixel and the G pixel is referred to as the light shielding film 11g. Figure 2 The thick black lines around each pixel are shown in the figure.

[0058] More specifically, in Figure 2 In the configuration, the centers of the light shielding films 11r, 11g, and 11b in the thickness direction are offset toward the centers of the R, G, and B pixels, respectively. In this configuration, when it is assumed that the light shielding films are formed at positions adjacent to the respective corresponding adjacent pixels of the W, R, G, and B pixels, the light shielding films in the W pixels are thinner than the light shielding films in the R, G, and B pixels. Therefore, it is possible to shield the incident light entering the R, G, and B pixels from the W pixels without making the opening area of ​​the W pixels too small.

[0059] against Figure 2 The respective widths of the light shielding films 11r, 11g, and 11b need to take into account the influence of color mixing from the W pixel and vignetting (brightness difference between the center and surrounding parts of the pixel) caused by the light shielding films 11r, 11g, and 11b of the RGB pixels themselves. In this case, the thickness of each of the light shielding films 11r, 11g, and 11b preferably corresponds to the light shielding film 11g adjacent to the G pixel having the highest sensitivity.

[0060] In addition, although making all the shading films 11r, 11g and 11b thicker can reduce the color mixing caused by the W pixel, this will cause the sensitivity of the W pixel to decrease. The effect of setting the CF 11 including the W pixel is to increase the brightness and improve the sensitivity. However, if the inter-pixel shading film in the W pixel is too thick, the sensitivity will decrease. Therefore, this problem also needs to be considered. For this reason, the center position of the shading film 11r, 11g and 11b in the thickness direction is offset toward the respective center positions of the RGB pixels. Therefore, any of the shading films 11r, 11g and 11b can also be constructed so that the shading films 11r, 11g and 11b are completely located in the R, G and B pixels respectively, and there is no shading film in the W pixel. In this way, color mixing can be suppressed while suppressing the reduction in the sensitivity of the W pixel.

[0061] Alternatively, another possible method is to make the light shielding films 11r, 11g, and 11b higher in the height direction. However, in this case, the characteristics of the incident angle will deteriorate and the vignetting effect will increase. Therefore, this problem also needs to be considered.

[0062] Second embodiment

[0063] The above describes an example of suppressing sensitivity reduction by making the light shielding film thinner in the W pixel and making the light shielding film thicker in the R, G, and B pixels in the pixels adjacent to the W pixel. However, the thickness of the light shielding film in the R, G, and B pixels can be changed according to the wavelength of the color of the adjacent pixel.

[0064] Figure 3 An exemplary configuration of the CF 11 is shown, in which the thickness of the light shielding film 11 a is adjusted according to the wavelengths of RGB pixels of adjacent pixels.

[0065] Generally, the longer the wavelength, the smaller the refractive index becomes, and it is more difficult to achieve light collection. Therefore, the probability of vignetting caused by the light shielding film 11a between adjacent pixels increases in the order of colors with larger wavelengths (red>green>blue). Therefore, by setting the thickness of the light shielding films 11r, 11g, and 11b to increase in the order of 11r<11g<11b, it is possible to suppress the occurrence of color mixing while taking into account the influence of vignetting.

[0066] Note that for the degree of vignetting effect, it is also necessary to consider the effect of the device structure, such as the distance between the on-chip lens (OCL) and the CF 11 and the curvature of the OCL. However, the trend is that the longer the wavelength, the more obvious the vignetting effect. Therefore, depending on the device structure, the center position of the inter-pixel shading film 11r between the W pixel and the R pixel in the width direction can be located at the midpoint between the center position of the W pixel and the center position of the R pixel, so that the thickness of the shading film is the same in these two pixels.

[0067] Third embodiment

[0068] The example of the CF 11 including R, G, and B pixels is described above. However, as long as the CF 11 includes a W pixel, the CF 11 may include other colors. For example, the CF 11 may include white, yellow, magenta, and cyan (WYMC) pixels.

[0069] Figure 4 An example of a CF 11 including WYMC pixels is shown. Figure 4 As shown, the light shielding film 11y is arranged between the W pixel and the yellow (Y) pixel. The light shielding film 11m is arranged between the W pixel and the magenta (M) pixel. The light shielding film 11c is arranged between the W pixel and the cyan (C) pixel. More specifically, the center positions of the light shielding films 11y, 11m and 11c in the thickness direction are offset toward the center of the Y, M and C pixels, respectively, in the thickness direction. In this configuration, when it is assumed that the light shielding film is formed at a position adjacent to each adjacent pixel of the W, Y, M and C pixels, the light shielding film in the W pixel is thinner than the light shielding film in the Y, M and C pixels. Therefore, it is possible to shield the incident light entering the Y, M and C pixels from the W pixel without making the opening area of ​​the W pixel too small. Therefore, it is possible to suppress the occurrence of color mixing while suppressing the reduction in the sensitivity of the W pixel.

[0070] Note that since the light shielding films 11y, 11m, and 11c are configured to shield light incident from the W pixel onto the YMC pixel, the influence of vignetting needs to be considered for the thickness of the light shielding films 11y, 11m, and 11c. In this case, preferably, the thickness of the light shielding films 11y, 11m, and 11c matches the thickness of the light shielding film 11y in the Y pixel having the highest sensitivity.

[0071] Fourth embodiment

[0072] In the CF 11 including WYMC pixels, similarly, the thickness of the light shielding film between each pixel corresponds to the wavelength.

[0073] Figure 5 An example of the CF 11 including WYMC pixels is shown, in which the thickness of the light shielding film between each pixel corresponds to the wavelength.

[0074] More specifically, as described above, generally, the longer the wavelength, the smaller the refractive index becomes, and it is more difficult to achieve light collection. Therefore, the vignetting effect caused by the inter-pixel light shielding film is enhanced in the order of yellow (yellow light: mainly including red and green) > magenta (magenta light: mainly including red and blue) > cyan (cyan light: mainly including green and blue) including many long-wavelength components. Therefore, the thickness is set in the order of light shielding film 11y ≤ light shielding film 11m ≤ light shielding film 11c.

[0075] Note that for the extent of the vignetting effect, it is also necessary to consider the effect according to the device structure such as the distance between the on-chip lens (OCL) and the CF and the curvature of the OCL. However, the trend is that the longer the wavelength, the more obvious the vignetting effect. Therefore, depending on the device structure, the center position of the inter-pixel shading film 11y between the W pixel and the Y pixel in the width direction can be located at the midpoint between the center position of the W pixel and the center position of the Y pixel, so that the thickness for these two pixels is the same. Note that in this case, depending on the color arrangement pattern, when the Y pixel and the M pixel are adjacent to each other, the thickness of the shading film 11ym (not shown) between the pixels can be the same in the two pixels, and when the M pixel and the C pixel are adjacent to each other, the thickness of the shading film 11mc (not shown) between the pixels can be the same in the two pixels.

[0076] Fifth embodiment

[0077] The above describes the construction of the CF 11 having four color pixels including WRGB pixels or WYMC pixels. However, as long as the CF 11 includes W pixels, there are other feasible color arrangement patterns. For example, by setting the light shielding film in a similar manner, a CF 11 having three color pixels including WRG pixels can also obtain a similar effect.

[0078] Figure 6 An example of the CF 11 having three color pixels including WRG pixels is shown.

[0079] More specifically, if Figure 6 As shown, the center positions of the inter-pixel light shielding film 11r between the W pixel and the R pixel and the inter-pixel light shielding film 11g between the W pixel and the G pixel in the thickness direction are offset toward the center position of the R pixel and the center position of the G pixel, respectively. In this case, the influence of color mixing caused by the W pixel and vignetting caused by the respective light shielding films 11r and 11g of the R pixel and the G pixel should also be considered for the width of the light shielding films 11r and 11g. In addition, in this case, it is also preferable that the thickness of the light shielding films 11r and 11g matches the light shielding film 11g of the G pixel having the highest sensitivity.

[0080] Sixth embodiment

[0081] The above description is made of the CF 11 having three color pixels including WRG pixels, in which the thickness of the light shielding films 11r and 11g is the same. However, the thickness may correspond to the wavelength of the color of the pixel adjacent to the W pixel.

[0082] Figure 7 An example of the CF 11 having three color pixels including WRG pixels is shown, in which the thicknesses of the light shielding films 11r and 11g correspond to the wavelength of the color of the pixel adjacent to the W pixel.

[0083] More specifically, generally, the longer the wavelength, the smaller the refractive index, and the more difficult it is to achieve light collection. Therefore, the effect of vignetting caused by the inter-pixel shading films 11r and 11g will increase in the order of increasing wavelength (red>green). Therefore, the thickness of the inter-pixel shading films 11r and 11g is set to increase in the order of shading film 11r<shading film 11g. The longer the wavelength of the color of the pixel adjacent to the W pixel, the stronger the effect of vignetting. Therefore, depending on the device structure, the center position of the inter-pixel shading film 11r between the W pixel and the R pixel in the thickness direction can be located at the midpoint between the center position of the W pixel and the center position of the R pixel, so that the width in the W pixel and the R pixel is the same.

[0084] Seventh embodiment

[0085] The above describes the construction of the CF 11 having three color pixels including WRG pixels. However, as long as the CF 11 includes W pixels, there are other feasible color arrangement patterns. For example, by setting the light shielding film in a similar manner, the CF 11 having three color pixels including WRB pixels can also obtain a similar effect.

[0086] Figure 8 An example of the CF 11 having three color pixels including WRB pixels is shown.

[0087] More specifically, if Figure 8 As shown, the center positions of the inter-pixel light shielding film 11r between the W pixel and the R pixel and the inter-pixel light shielding film 11b between the W pixel and the B pixel in the thickness direction are offset toward the center position of the R pixel and the center position of the B pixel, respectively. In this case, the influence of color mixing caused by the W pixel and vignetting caused by the respective light shielding films 11r and 11r of the R pixel and the B pixel should also be considered for the width of the light shielding films 11r and 11b. In addition, in this case, it is also preferable that the thickness of the light shielding films 11r and 11b matches the light shielding film 11r of the R pixel having the highest sensitivity.

[0088] Eighth embodiment

[0089] The above description is made of the CF 11 having three color pixels including the WRB pixel, in which the thickness of the light shielding films 11r and 11b is the same. However, the thickness may correspond to the wavelength of the color of the pixel adjacent to the W pixel.

[0090] Fig. 9 An example of the CF 11 having three color pixels including the W and R pixels is shown, in which the thicknesses of the light shielding films 11 r and 11 b correspond to the wavelength of the color of the pixel adjacent to the W pixel.

[0091] More specifically, generally, the longer the wavelength, the smaller the refractive index, and the more difficult it is to achieve light collection. Therefore, the effect of vignetting caused by the inter-pixel shading films 11r and 11b will increase in the order of increasing wavelength (red>blue). Therefore, the thickness of the inter-pixel shading films 11r and 11b is set to increase in the order of shading film 11r<shading film 11b. The longer the wavelength of the color of the pixel adjacent to the W pixel, the stronger the effect of vignetting. Therefore, depending on the device structure, the center position of the inter-pixel shading film 11r between the W pixel and the R pixel in the thickness direction can be located at the midpoint between the center position of the W pixel and the center position of the R pixel, so that the width in the W pixel and the R pixel is the same.

[0092] Ninth embodiment

[0093] The above describes the construction of the CF 11 having three color pixels including WRB. However, as long as the CF 11 includes W pixels, there are other feasible color arrangement patterns. For example, by setting a light shielding film in a similar manner, a CF 11 having three color pixels including WGB pixels can also obtain a similar effect.

[0094] Fig.10 An example of the CF 11 having three color pixels including WGB pixels is shown.

[0095] More specifically, if Fig.10 As shown, the center positions of the inter-pixel light shielding film 11g between the W pixel and the G pixel and the inter-pixel light shielding film 11b between the W pixel and the B pixel in the thickness direction are offset toward the center position of the G pixel and the center position of the B pixel, respectively. In this case, the influence of color mixing caused by the W pixel and vignetting caused by the respective light shielding films 11g and 11b of the G pixel and the B pixel should also be considered for the width of the light shielding films 11g and 11b. In addition, in this case, it is also preferable that the thickness of the light shielding films 11g and 11b matches the light shielding film 11g of the G pixel having the highest sensitivity.

[0096] Tenth embodiment

[0097] The above description is made of the CF 11 having three color pixels including WGB pixels, in which the thickness of the light shielding films 11g and 11b is the same. However, the thickness may correspond to the wavelength of the color of the pixel adjacent to the W pixel.

[0098] Fig.11 An example of the CF 11 having three color pixels including W, G, and B pixels is shown, in which the thicknesses of the light shielding films 11 g and 11 b correspond to the wavelength of the color of the pixel adjacent to the W pixel.

[0099] More specifically, generally, the longer the wavelength, the smaller the refractive index, and it is more difficult to achieve light collection. Therefore, the effect of vignetting caused by the inter-pixel shading films 11g and 11b will increase in the order of increasing wavelength (green>blue). Therefore, the thickness of the inter-pixel shading films 11g and 11b is set to increase in the order of shading film 11g<shading film 11b. The longer the wavelength of the color of the pixel adjacent to the W pixel, the stronger the vignetting effect. Therefore, depending on the device structure, the center position of the inter-pixel shading film 11g between the W pixel and the G pixel in the thickness direction can be located at the midpoint between the center position of the W pixel and the center position of the G pixel, so that the width of the pixel in the W pixel and the G pixel is the same.

[0100] Eleventh Embodiment

[0101] The above describes an example of arranging the light shielding film between any pixels. However, as long as it can shield the light entering the RGB pixel or YMC pixel from the W pixel, the light shielding film can be constructed only between pixels adjacent to the W pixel according to the color arrangement pattern of the pixels.

[0102] Fig.12 The upper part shows an example of a pixel array in units of 4 pixels × 4 pixels: the top row from the left is R pixels, W pixels, R pixels, W pixels; the second row is G pixels, B pixels, G pixels, B pixels; the third row is R pixels, W pixels, R pixels, W pixels; and the fourth row is G pixels, B pixels, G pixels, B pixels.

[0103] exist Fig.12 In the upper part of , the light shielding film 11b is arranged between the W pixel and the B pixel. The light shielding film 11r is arranged between the W pixel and the R pixel. The light shielding film is provided between the other pixels to the same extent as the W pixel side.

[0104] In addition, Fig.12 The lower portion shows an example of a pixel array in units of 4 pixels × 4 pixels: the top row from the left is W pixels, B pixels, W pixels, G pixels; the second row is R pixels, G pixels, R pixels, W pixels; the third row is W pixels, B pixels, G pixels, B pixels; and the fourth row is G pixels, W pixels, R pixels, W pixels.

[0105] exist Fig.12 In the lower part, similarly, a light shielding film 11b is arranged between the W pixel and the B pixel. A light shielding film 11r is arranged between the W pixel and the R pixel. A light shielding film 11g is arranged between the W pixel and the G pixel. A light shielding film is provided between other pixels to the same extent as the W pixel side.

[0106] Note that for Fig.12 For the lower part, the inter-pixel shading width may be different in each pixel of the same color. In this case, correction can be performed by applying different gains between the same colors. More specifically, for Fig.12 For the two R pixels in the second row at the bottom, for the left R pixel, the light shielding film 11r is arranged on three of the four surrounding sides. In contrast, for the right R pixel, the light shielding film 11r is arranged on both sides. Therefore, Fig.12 The two R pixels in the second row at the bottom have different sensitivities. Therefore, by applying different gains to such pixels, they can be corrected so that the pixels are considered and processed as having the same sensitivity.

[0107] exist Fig.12 In the upper and lower structures of the embodiment, the center of any of the light shielding films 11r, 11g, and 11b in the thickness direction is offset toward the center of the adjacent corresponding pixel in the direction opposite to the W pixel of the corresponding pixel pair. In this way, in any structure, color mixing caused by the W pixel due to light incident on the adjacent RGB pixels can be suppressed without reducing the sensitivity of the W pixel.

[0108] Twelfth Embodiment

[0109] In the above, an example is described in which the light shielding film is configured only between pixels adjacent to the W pixel according to the color arrangement pattern of the pixels. However, the light shielding film may be configured so that the thickness corresponds to the wavelength of the color of the pixel adjacent to the W pixel.

[0110] Fig.13 The upper part shows an example of a pixel array in units of 4 pixels × 4 pixels: the top row from the left is W pixels, B pixels, W pixels, G pixels; the second row is R pixels, G pixels, R pixels, W pixels; the third row is W pixels, B pixels, G pixels, B pixels; and the fourth row is G pixels, W pixels, R pixels, W pixels.

[0111] also, Fig.13The middle portion shows an example of a pixel array in units of 4 pixels by 4 pixels: the top row from the left is G pixels, W pixels, R pixels, W pixels; the second row is W pixels, G pixels, W pixels, B pixels; the third row is R pixels, W pixels, G pixels, W pixels; and the fourth row is W pixels, B pixels, W pixels, G pixels.

[0112] in addition Fig.13 The lower portion shows an example of a pixel array in units of 4 pixels by 4 pixels: the top row from the left is G pixels, W pixels, R pixels, W pixels; the second row is W pixels, G pixels, W pixels, R pixels; the third row is B pixels, W pixels, G pixels, W pixels; and the fourth row is W pixels, B pixels, W pixels, G pixels.

[0113] exist Fig.13 In any of the above, the light shielding film 11b is arranged between the W pixel and the B pixel. The light shielding film 11r is arranged between the W pixel and the R pixel. The light shielding film 11g is arranged between the W pixel and the G pixel. The light shielding film is provided between the other pixels to the same extent as the W pixel side.

[0114] In addition, the longer the wavelength, the smaller the refractive index becomes, and it is more difficult to achieve light collection and the vignetting effect is enhanced. Therefore, the thicknesses of the light shielding films 11r, 11g, and 11b are set in the order of light shielding film 11r≤light shielding film 11g≤light shielding film 11b. In this way, the influence of color mixing caused by W pixels can be reduced while suppressing the reduction in brightness sensitivity.

[0115] Note that for Fig.13 For any case of , the shading width between pixels in the same color may be different, and therefore the sensitivity may also be different. In this case, correction can be performed by applying different gains between the same colors. More specifically, for example, for Fig.13 For the two B pixels in the third row at the top, the light shielding film 11b is arranged on two sides of the four surrounding sides for the B pixel at the left. In contrast, for the B pixel at the right, the light shielding film 11b is arranged on three sides. Therefore, Fig.13 The two B pixels in the third row from the top have different sensitivities. Therefore, by applying different gains to such pixels, they can be corrected so that the pixels are considered and processed as having the same sensitivity.

[0116] In any case, by applying the present invention described above, it is possible to reduce the influence of color mixture caused by the W pixel while suppressing the decrease in luminance sensitivity.

[0117] Note that although the above description is directed to the W pixel, the above description can also be applied to pixels such as yellow pixels having spectral characteristics similar to those of the W pixel and pixels mainly having a relatively high contribution to the luminance signal.

[0118] Application Examples of Electronic Devices

[0119] The above-described solid-state imaging device can be applied to various electronic devices such as imaging devices including digital cameras and digital video cameras, mobile phones including an imaging function, or other devices including an imaging function.

[0120] Fig.14 is a block diagram showing an exemplary configuration of an imaging device serving as an electronic device to which the present invention is applied.

[0121] Fig.14 The illustrated imaging apparatus 201 includes an optical system 202, a shutter device 203, a solid-state imaging device 204, a drive circuit 205, a signal processing circuit 206, a monitor 207, and a memory 208. The imaging apparatus 201 is capable of capturing still images and moving images.

[0122] The optical system 202 includes one or more lenses. The optical system 202 guides light (incident light) from a subject to the solid-state imaging device 204 and forms an image on a light receiving surface of the solid-state imaging device 204.

[0123] The shutter device 203 is arranged between the optical system 202 and the solid-state imaging device 204 , and controls a light irradiation period and a light shielding period to the solid-state imaging device 204 according to control of the drive circuit 205 .

[0124] The solid-state imaging device 204 includes the above-mentioned solid-state imaging device 41. According to the light that forms an image on the light receiving surface via the optical system 202 and the shutter device 203, signal charges are accumulated for a certain time on the solid-state imaging device 204. The signal charges accumulated on the solid-state imaging device 204 are transferred according to the drive signal (timing signal) provided from the drive circuit 205. The solid-state imaging device 204 may be configured as a single chip by itself, or may be configured as a part of a camera module packaged together with the optical system 202, the signal processing circuit 206, and the like.

[0125] The driving circuit 205 outputs a driving signal that controls the transfer operation of the solid-state imaging device 204 and the shutter operation of the shutter device 203 to drive the solid-state imaging device 204 and the shutter device 203 .

[0126] The signal processing circuit 206 performs various signal processing on the signal charge output from the solid-state imaging device 204. The image (image data) obtained by the signal processing of the signal processing circuit 206 is supplied to the monitor 207 for display or supplied to the memory 208 for storage (recording).

[0127] In the imaging device 201 configured as described above, the image quality can be improved by applying the solid-state imaging device described above as the solid-state imaging device 204 , which can suppress the occurrence of color mixing while suppressing a decrease in sensitivity.

[0128] In addition, the embodiments of the present invention are not limited to the above-described embodiments, and various modifications may be made without departing from the gist of the present invention.

[0129] Furthermore, the present invention can also be constructed as follows.

[0130] (1) A solid-state imaging device, comprising:

[0131] an optical filter configured to extract and transmit white light as incident light itself and light of a plurality of specific wavelengths on a pixel-by-pixel basis; and

[0132] an inter-pixel light-shielding film configured to shield light from adjacent pixels in the optical filter on a pixel-by-pixel basis,

[0133] The thickness of the inter-pixel light shielding film in the pixel that transmits the white light is thinner than the thickness of the inter-pixel light shielding film in the pixel that transmits light of another specific wavelength.

[0134] (2) The solid-state imaging device according to (1), wherein

[0135] The shorter the wavelength of the light of the other specific wavelength is, the thicker the inter-pixel light shielding film in the pixel that transmits the light of the other specific wavelength is.

[0136] (3) The solid-state imaging device according to (1) or (2), wherein

[0137] The plurality of specific wavelengths of light include red light, green light, and blue light.

[0138] (4) The solid-state imaging device according to (3), wherein

[0139] The thickness of the inter-pixel shading film in the pixel for the red light is thinner than the thickness of the inter-pixel shading film in the pixel for the green light, and the thickness of the inter-pixel shading film in the pixel for the green light is thinner than the thickness of the inter-pixel shading film in the pixel for the blue light.

[0140] (5) The solid-state imaging device according to any one of (1) to (4), wherein

[0141] The plurality of specific wavelengths of light include yellow light, magenta light, and cyan light.

[0142] (6) The solid-state imaging device according to (5), wherein

[0143] The thickness of the inter-pixel shading film in the pixel for the yellow light is thinner than the thickness of the inter-pixel shading film in the pixel for the magenta light, and the thickness of the inter-pixel shading film in the pixel for the magenta light is thinner than the thickness of the inter-pixel shading film in the pixel for the cyan light.

[0144] (7) The solid-state imaging device according to any one of (1) to (6), wherein

[0145] The plurality of specific wavelengths of light include red light and green light.

[0146] (8) The solid-state imaging device according to (7), wherein

[0147] The thickness of the inter-pixel light-shielding film in the pixel for the red light is thinner than the thickness of the inter-pixel light-shielding film in the pixel for the green light.

[0148] (9) The solid-state imaging device according to any one of (1) to (8), wherein

[0149] The plurality of specific wavelengths of light include red light and blue light.

[0150] (10) The solid-state imaging device according to (9), wherein

[0151] The thickness of the inter-pixel light-shielding film in the pixel for the red light is thinner than the thickness of the inter-pixel light-shielding film in the pixel for the blue light.

[0152] (11) The solid-state imaging device according to any one of (1) to (10), wherein

[0153] The plurality of specific wavelengths of light include green light and blue light.

[0154] (12) The solid-state imaging device according to (11), wherein

[0155] The thickness of the inter-pixel light-shielding film in the pixel for the green light is thinner than the thickness of the inter-pixel light-shielding film in the pixel for the blue light.

[0156] (13) The solid-state imaging device according to any one of (1) to (12), wherein

[0157] Among pixels that transmit light of the plurality of specific wavelengths and are adjacent to the pixel that transmits the white light, the thickness of the inter-pixel light shielding film arranged at a position adjacent to the pixel that transmits the white light is thicker than the thickness of the inter-pixel light shielding film at other positions.

[0158] (14) The solid-state imaging device according to (13), wherein

[0159] In the pixels that transmit the plurality of specific wavelengths of light and are adjacent to the pixel that transmits the white light, the longer the wavelength of the transmitted specific wavelength of light, the thinner the inter-pixel light shielding film arranged at the position adjacent to the pixel that transmits the white light.

[0160] (15) An imaging device, comprising:

[0161] an optical filter configured to extract and transmit white light as incident light itself and light of a plurality of specific wavelengths on a pixel-by-pixel basis; and

[0162] an inter-pixel light-shielding film configured to shield light from adjacent pixels in the optical filter on a pixel-by-pixel basis,

[0163] The thickness of the inter-pixel light shielding film in the pixel that transmits the white light is thinner than the thickness of the inter-pixel light shielding film in the pixel that transmits light of another specific wavelength.

[0164] (16) An electronic device, comprising:

[0165] an optical filter configured to extract and transmit white light as incident light itself and light of a plurality of specific wavelengths on a pixel-by-pixel basis; and

[0166] an inter-pixel light-shielding film configured to shield light from adjacent pixels in the optical filter on a pixel-by-pixel basis,

[0167] The thickness of the inter-pixel light shielding film in the pixel that transmits the white light is thinner than the thickness of the inter-pixel light shielding film in the pixel that transmits light of another specific wavelength.

[0168] Reference numerals list

[0169] 11 Color filter (CF)

[0170] 11a, 11r, 11g, 11b, 11y, 11m, 11c Light-shielding film

[0171] 13 Light receiving part

Claims

1. A light detection device, comprising: A plurality of pixels, the plurality of pixels comprising: a first pixel comprising a first color filter configured to transmit light of a first wavelength range; and a second pixel, the second pixel including a second color filter configured to transmit light in a second wavelength range, the first light shielding film surrounding the second color filter in a plan view, wherein the first wavelength range is different from the second wavelength range, Wherein, in the plan view, the area of ​​the first color filter is larger than the area of ​​the second color filter.

2. The light detection device according to claim 1, wherein: The light in the first wavelength range is white light.

3. The light detection device according to claim 2, wherein: The light in the second wavelength range is at least one of red light, green light, and blue light.

4. The light detection device according to claim 2, wherein: The light in the second wavelength range is at least one of yellow light, magenta light, and cyan light.

5. The light detection device according to claim 3, wherein: The plurality of pixels further include a third pixel including a third color filter configured to transmit light in a third wavelength range, and the second light shielding film surrounds the third color filter in the plan view.

6. The light detection device according to claim 5, wherein: The plurality of pixels further include a fourth pixel including a fourth color filter configured to transmit light in a fourth wavelength range, and the third light shielding film surrounds the fourth color filter in the plan view.

7. The light detection device according to claim 6, wherein: The plurality of pixels further include a fifth pixel including a fifth color filter configured to transmit light in a fifth wavelength range, and a fourth light shielding film surrounds the fifth color filter in the plan view.

8. The light detection device according to claim 7, wherein: In the plan view, the second pixel, the third pixel, the fourth pixel, and the fifth pixel surround the first pixel.

9. The light detection device according to claim 8, wherein: In the plan view, the area of ​​the first color filter is an area surrounded by the first light-shielding film, the second light-shielding film, the third light-shielding film, and the fourth light-shielding film.

10. The light detection device according to claim 9, wherein: The light of the second wavelength range is red light, the light of the third wavelength range and the light of the fifth wavelength range are green light, and the light of the fourth wavelength range is blue light.

11. The light detection device according to claim 10, wherein: In the plan view, the area of ​​the first color filter is larger than the area of ​​the third color filter, and in the plan view, the area of ​​the first color filter is larger than the area of ​​the fourth color filter.

12. The light detection device according to claim 11, wherein An area of ​​the first color filter is larger than an area of ​​the second color filter, and an area of ​​the second color filter is larger than an area of ​​the third color filter.

13. A light detection device, comprising: A plurality of pixels, the plurality of pixels comprising: a first pixel comprising a first color filter configured to transmit light of a first wavelength range; a second pixel comprising a second color filter configured to transmit light of a second wavelength range; and The first light shielding film, wherein the first wavelength range is different from the second wavelength range, Wherein, in a plan view, a first edge of the first shading film is located in the first color filter, and a second edge of the first shading film is located in the second color filter, and in a cross-sectional view, a first distance between the first edge and a boundary between the first color filter and the second color filter is greater than a second distance between the second edge and the boundary.

14. The light detection device according to claim 13, wherein: The light in the first wavelength range is at least one of red light, green light, blue light and white light.

15. The light detection device according to claim 13, wherein: The light in the second wavelength range is at least one of red light, green light, blue light and white light.

16. The light detection device according to claim 13, wherein: The first edge of the first light shielding film is attached to a portion of the first color filter, and the second edge of the first light shielding film is attached to a portion of the second color filter.

17. The light detection device according to claim 16, wherein: The first color filter is adjacent to the second color filter.

18. The light detection device according to claim 13, wherein: The first light shielding film is disposed above the light receiving portion.

19. The light detection device according to claim 18, wherein: The light receiving unit outputs a pixel signal according to the amount of light.

20. An electronic device, comprising: Optical system; Signal processing circuit; as well as A light detecting device, wherein the light detecting device is the light detecting device according to any one of claims 13-19.

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