An electrolyte transfer tank in nitrogen trifluoride production

Abstract

The invention discloses an electrolyte transfer tank in nitrogen trifluoride production, comprising a tank body, a plurality of mounting slots are arranged in the bottom wall of the tank body, each mounting slot is provided with an electric heating wire for heating the electrolyte in the tank body, and the electric heating wire is electrically connected to a control mechanism; a motor is arranged on the upper end surface of the tank body, and a stirring mechanism for stirring the electrolyte is arranged in the tank body; the rotating shaft of the motor passes through the tank body and is connected to the stirring mechanism to provide power for the stirring mechanism; a plurality of mutually interconnected heating water pipes are embedded in the wall of the tank body, and the heating water pipes are connected to a hot water circulation supply component arranged outside the tank body; the hot water circulation supply component is connected to a motor that provides the required power through a first transmission component. The invention can automatically heat the electrolyte in the tank body when the temperature is low, and can also keep the electrolyte warm through hot water circulation.

Description

Technical Field

[0001] The invention relates to the technical field of nitrogen trifluoride preparation, and in particular to an electrolyte transfer tank in nitrogen trifluoride production. Background Art

[0002] Nitrogen trifluoride is used as an excellent plasma etching gas in the microelectronics industry. The production of nitrogen trifluoride requires an electrolyte, which necessitates the use of an electrolyte transfer tank in nitrogen trifluoride production.

[0003] The electrolyte transfer tank is mainly used for normal electrolyte transfer in nitrogen trifluoride production, or for temporary storage of electrolyte in case of sudden leakage in the electrolytic cell, to prevent environmental pollution and reduce production losses. At the same time, the temperature of the existing electrolyte needs to be maintained during transportation to avoid heat loss and electrolyte solidification. Therefore, an electrolyte transfer tank with good thermal insulation performance is needed to meet this condition in nitrogen trifluoride production. Summary of the Invention

[0004] In view of this, the present invention provides an electrolyte transfer tank for nitrogen trifluoride production, which can automatically heat the electrolyte in the tank when the temperature is low, and can also keep the electrolyte warm through hot water circulation.

[0005] In order to solve the above technical problems, the present invention is implemented as follows.

[0006] An electrolyte transfer tank for nitrogen trifluoride production includes a tank body, through which a feed pipeline, a liquid outlet pipeline, and a vent valve are provided; an anti-corrosion layer is provided on the inner sidewall of the tank body; an insulation layer is provided on the outer sidewall of the tank body; a plurality of mounting slots are provided in the bottom wall of the tank body, each mounting slot is provided with a heating wire for heating the electrolyte in the tank body, and the heating wire is electrically connected to a control mechanism;

[0007] The upper end surface of the tank body is provided with a motor, and the tank body is provided with a stirring mechanism for stirring the electrolyte; the rotating shaft of the motor passes through the tank body and is connected to the stirring mechanism to provide power for the stirring mechanism;

[0008] A plurality of interconnected heating water pipes are embedded in the wall of the tank body, and the heating water pipes are connected to a hot water circulation supply component arranged outside the tank body; the hot water circulation supply component is connected to a motor that provides the required power through a first transmission component.

[0009] Preferably, the control mechanism includes a controller and a temperature sensor disposed in the tank; the temperature sensor, the controller and the heating wire are electrically connected and connected in series with a power supply.

[0010] Preferably, the stirring mechanism comprises a power box fixedly connected to the tank body, wherein the power box is provided with a second gear and two first gears meshing with the second gear;

[0011] The output shaft of the motor is coaxially fixedly connected to the second gear; the two first gears are coaxially fixedly connected to a power shaft respectively; the motor output shaft and the two power shafts all pass through the power box, and the three shafts are evenly arranged in the space inside the tank body; stirring blades are provided on the two power shafts and the output shaft of the motor.

[0012] Preferably, the hot water circulation supply component includes a water tank, a water pumping mechanism and a heating device; the water tank is connected to the water pumping mechanism through a water inlet pipe, the water pumping mechanism is connected to the heating device through a water outlet pipe, and the hot water output pipe of the heating device is connected to the inlet of the heating water pipe in the tank body; the outlet of the heating water pipe is connected to the water tank through a connecting pipe; the power input shaft of the water pumping mechanism is connected to the motor through the first transmission component.

[0013] Preferably, the water pumping mechanism includes a mounting cylinder and a piston sealingly and slidingly connected in the mounting cylinder; one side of the mounting cylinder is connected to the water tank through the water inlet pipe, and the other side is connected to the heating device through the water outlet pipe; a one-way valve is provided in both the water inlet pipe and the water outlet pipe; the rod of the piston is connected to the power input shaft through a second transmission assembly.

[0014] Preferably, the water pump mechanism further comprises a mounting plate, on which a shaft mounting block and the mounting cylinder are fixedly mounted; the power input shaft passes through the shaft mounting block and is rotatable; a worm is fixedly connected to the power input shaft;

[0015] Three mutually meshing gears are rotatably mounted on the mounting plate. The gear in the middle is called the third gear, and the two gears on the left and right are called the fourth gears. The third gear is coaxially fixedly connected to a worm wheel that cooperates with the worm. The two fourth gears are coaxially fixedly connected to a half gear respectively.

[0016] The rod of the piston extends out of the mounting cylinder and is fixedly connected to a toothed plate, which is engaged with two half gears; the two half gears face the same direction and are engaged with the toothed plate alternately.

[0017] Preferably, the first transmission assembly includes two pulleys fixedly connected to the motor output shaft and the power input shaft, and the two pulleys are connected by a belt.

[0018] Preferably, the feed pipeline is penetrated through the upper end surface of the trough body, and a solenoid valve is arranged in the feed pipeline; the air release valve is penetrated through the upper end of the trough body, and the liquid outlet pipeline is penetrated through the right side wall of the trough body; the bottom of the trough body is connected to the base.

[0019] Preferably, a diaphragm pump is installed on the liquid outlet pipeline.

[0020] Preferably, one end of the heating wire in the installation groove is fixedly connected to a fixing block.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] 1. By setting up a control mechanism and heating wires, when the temperature of the electrolyte in the tank is low, the temperature sensor automatically senses it, and then the controller controls multiple heating wires to energize to achieve the temperature increase of the electrolyte.

[0023] 2. By setting up a stirring mechanism, when the motor rotates, the two power shafts also rotate, thereby causing multiple stirring blades to rotate, stirring the electrolyte in the tank body, making the heat absorption inside the electrolyte more uniform.

[0024] 3. By setting up anti-corrosion layer and thermal insulation layer, the electrolyte is prevented from corroding the tank body, which greatly increases the service life of the tank body. At the same time, the setting of the thermal insulation layer prevents the rapid loss of heat of the electrolyte and realizes the insulation of the electrolyte.

[0025] 4. By setting up a water pump mechanism, the water in the water tank can be pumped into the heating device, then into the water pipe, and finally back to the water tank, realizing the circulation of hot water and further increasing the thermal insulation effect of the tank body.

[0026] 5. By setting up the first transmission mechanism and the second transmission mechanism, the stirring power can be shared with the water pump mechanism, thereby saving power resources and making the overall linkage stronger. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the main structure of an electrolyte transfer tank in nitrogen trifluoride production proposed by the present invention;

[0028] Figure 2 This is a schematic top view of the interior of an electrolyte transfer tank in nitrogen trifluoride production proposed by the present invention;

[0029] Figure 3 This is an enlarged schematic diagram of the structure of position A of an electrolyte transfer tank in nitrogen trifluoride production proposed by the present invention;

[0030] Figure 4 This is an enlarged schematic diagram of the structure at position B of the electrolyte transfer tank in nitrogen trifluoride production proposed by the present invention.

[0031] In the figure: 1 tank body, 2 base, 3 feed pipeline, 4 vent valve, 5 liquid outlet pipeline, 6 anti-corrosion layer, 7 insulation layer, 8 motor, 9 mounting plate, 10 shaft mounting block, 11 power input shaft, 12 heating water pipe, 13 mounting cylinder, 15 mounting groove, 16 heating wire, 17 fixing block, 18 power shaft, 19 first gear, 20 second gear, 21 stirring blade, 22 piston, 23 water tank, 24 heating device, 25 worm gear, 26 worm, 27 third gear, 28 fourth gear, 29 half gear, 30 tooth plate, 31 pulley, 32 belt, 33 temperature sensor, 34 controller, 35 diaphragm pump. DETAILED DESCRIPTION

[0032] The present invention is described in detail below with reference to the accompanying drawings and embodiments.

[0033] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly attached to the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0034] Reference Figure 1-4 , an electrolyte transfer tank for nitrogen trifluoride production, comprising a tank body 1; a base 2 can be installed on the bottom surface of the tank body 1 and fixed to the ground through the base 2 to ensure the stability of the tank body.

[0035] The tank body 1 is provided with a feed line 3, a liquid outlet line 5, and a vent valve 4. In this embodiment, the feed line 3 is provided through the upper end surface of the tank body 1, and a solenoid valve is installed in the feed line 3. The vent valve 4 is provided through the upper end of the tank body 1, and the liquid outlet line 5 is provided through the right side wall of the tank body 1. A diaphragm pump 35 is installed on the liquid outlet line 5.

[0036] An anti-corrosion layer 6 is provided on the inner wall of the tank body 1, and a thermal insulation layer 7 is provided on the outer wall of the tank body 1. By providing the anti-corrosion layer 6 and the thermal insulation layer 7, the electrolyte is prevented from corroding the tank body 1, which greatly increases the service life of the tank body 1. At the same time, the provision of the thermal insulation layer 6 prevents the rapid loss of heat of the electrolyte, thereby achieving thermal insulation of the electrolyte.

[0037] A plurality of mounting slots 15 are provided in the bottom wall of the tank body 1. Each mounting slot 15 is provided with a heating wire 16 for heating the electrolyte in the tank body 1. The heating wire 16 is electrically connected to the control mechanism. Preferably, one end of the heating wire 16 in the mounting slot 15 is against the inner end face of the tank body, and the other end is fixedly connected to a fixing block 17 for fixing the position of the heating wire. The control mechanism includes a controller 34 and a temperature sensor 33 provided in the tank body 1; the controller 34 can be installed on the base 2. The temperature sensor 33, the controller 34 and the heating wire 16 are electrically connected and connected in series with a power supply. By providing the control mechanism and the heating wire, when the temperature of the electrolyte in the tank body 1 is low, the temperature sensor 33 automatically senses it, and then the controller 34 controls the power supply to the multiple heating wires 16 to increase the temperature of the electrolyte.

[0038] The upper end of the tank 1 is provided with a motor 8. The upper end of the tank 1 can be provided with an L-shaped plate, and the motor 8 can be mounted on the inner sidewall of the L-shaped plate. A stirring mechanism for stirring the electrolyte is provided within the tank 1; the rotating shaft of the motor 8 extends through the tank 1 and connects to the stirring mechanism, providing power for the stirring mechanism.

[0039] The stirring mechanism includes a power box fixedly connected to the tank body 1, which is provided with a second gear 20 and two first gears 19 that mesh with the second gear 20. The output shaft of the motor 8 is coaxially fixedly connected to the second gear 20; the two first gears 19 are each coaxially fixedly connected to a power shaft 18; the output shaft of the motor 8 and the two power shafts 18 all pass through the power box, and the three shafts are evenly arranged in the space within the tank body 1; the two power shafts 18 and the output shaft of the motor 8 are each equipped with stirring blades 21. By providing a stirring mechanism, when the motor 8 rotates, the two power shafts 18 also rotate, thereby causing the multiple stirring blades 21 to rotate, stirring the electrolyte in the tank body 1 and making the heat absorption within the electrolyte more uniform.

[0040] The hot water circulation supply assembly includes a water tank 23, a water pumping mechanism, and a heating device 24. The water tank 23 is connected to the water pumping mechanism via an inlet pipe, which in turn is connected to the heating device 24 via an outlet pipe. The hot water output pipe of the heating device 24 is connected to the inlet of the heating water pipe 12 within the tank body. The outlet of the heating water pipe 12 is connected to the water tank 23 via a connecting pipe. The power input shaft 11 of the water pumping mechanism is connected to the motor 8 via the first transmission assembly. The water pumping mechanism pumps water from the water tank 23 into the heating device 24, then into the water pipe 12, and finally back into the water tank 23, thereby circulating the hot water and further enhancing the thermal insulation effect of the tank body 1.

[0041] The water pumping mechanism includes a mounting cylinder 13 and a piston 22 sealingly and slidingly connected to the mounting cylinder 13; for the space below the piston 22 in the mounting cylinder 13, one side of the space is connected to the water tank 23 through the water inlet pipe, and the other side is connected to the heating device 24 through the water outlet pipe; both the water inlet pipe and the water outlet pipe are provided with a one-way valve; the rod of the piston 22 is connected to the power input shaft 11 through the second transmission assembly, and the power input shaft 11 is connected to the first transmission assembly.

[0042] The water pumping mechanism further includes a mounting plate 9, on which a rotating shaft mounting block 10 and the mounting cylinder 13 are fixedly mounted. The power input shaft 11 passes through the rotating shaft mounting block 10 and is rotatable. A worm 26 is fixedly connected to the power input shaft 11. Three mutually meshing gears are rotatably mounted on the mounting plate 9. The gear located in the middle is called the third gear 27, and the two gears located on the left and right are called the fourth gear 28. The third gear 27 is coaxially connected to the worm wheel 25 that cooperates with the worm 26. The two fourth gears 28 are each coaxially connected to a half gear 29. The rod of the piston 22 extends out of the mounting cylinder and is fixedly connected to a toothed plate 30, which meshes with the two half gears 29. The two half gears 29 face the same direction and mesh alternately with the toothed plate 30.

[0043] A mounting plate 9 is fixedly connected to the left side of the trough body 1, a mounting block 10 is fixedly connected to the mounting plate 9, a rotating shaft 11 passes through and rotatably connected to the mounting block 10, a plurality of cooling water pipes 12 that are interconnected are embedded in the wall of the trough body 1, a mounting cylinder 13 is fixedly connected to the side wall of the mounting plate 9, a water pumping mechanism for circulating water in the water pipe 12 is provided in the mounting cylinder 13, a transmission shaft 14 is rotatably connected to the mounting plate 9, a first transmission mechanism for providing power required for the water pumping mechanism is provided on the transmission shaft 14, a second transmission mechanism for providing power required for the water pumping mechanism is provided on the output shaft of the motor 8, a plurality of mounting grooves 15 are provided in the bottom wall of the trough body 1, and a plurality of mounting grooves 15 are each provided with a heating wire 16 for heating the electrolyte in the trough body 1, a plurality of heating wires 16 are fixedly connected to a fixing block 17, and a control mechanism for starting the heating wire 16 is provided in the trough body 1. In a preferred embodiment, the first transmission assembly includes two pulleys 31 fixedly connected to the output shaft of the motor 8 and the power input shaft 11, and the two pulleys 31 are connected by a belt 32. By providing the first transmission mechanism and the second transmission mechanism, the stirring power is shared with the water pump mechanism, thereby saving power resources and enhancing the overall linkage.

[0044] When the present invention is used, electrolyte is first added to the tank body 1 through the feed line 3. At this time, the temperature of the electrolyte is relatively low, and the temperature sensor 33 senses it. The model of the temperature sensor 33 here is DS18B20, which causes the controller 34 to work, thereby energizing and heating the multiple heating wires 16, thereby heating the electrolyte. Then, the motor 8 is turned on, and the output shaft of the motor 8 rotates to drive the second gear 20 to rotate, thereby driving the two first gears 19 meshing with it to rotate, thereby rotating the two power shafts 18, and causing the output shaft of the motor 8 and the multiple stirring blades 21 on the power shaft 18 to rotate for stirring, so that the heating is more uniform. The anti-corrosion layer 6 inside the tank body 1 prevents the electrolyte from corroding the tank body 1, and the thermal insulation layer 7 outside the tank body 1 prevents heat loss and solidification of the electrolyte.

[0045] As the output shaft of the motor 8 rotates, the pulley 31 at the right end rotates, and the pulley 31 at the left end rotates through the belt 32, causing the rotating shaft 11 to rotate, and then the worm 26 rotates. The rotation of the worm 26 causes the worm wheel 25 to rotate, which causes the transmission shaft 14 to rotate, causing the third gear 27 to rotate, and then drives the two fourth gears 28 to rotate, causing the two support shafts to rotate, causing the two half gears 29 to rotate. The rotation of the two half gears 29 causes the gear plate 30 to reciprocate up and down. The up and down reciprocating motion of the gear plate 30 causes the piston 22 to reciprocate up and down, thereby pumping water in the water tank 23 into the mounting cylinder 13, and then into the heating device 24. After being heated by the heating device 24, it enters the water pipe 12, realizing a water bath insulation. Then the water in the water pipe 12 returns to the water tank 23, realizing the circulation of hot water. In this process, the two one-way valves prevent water from flowing back. When the electrolyte needs to be used, the diaphragm pump 35 is opened to pump the electrolyte into the electrolytic cell.

[0046] The above specific embodiments merely illustrate the design principles of the present invention. The shapes and names of the components described herein may vary and are not limiting. Therefore, those skilled in the art may modify or substitute equivalents for the technical solutions described in the above embodiments. Such modifications and substitutions, without departing from the inventive spirit and technical solutions of the present invention, shall fall within the scope of protection of the present invention.

Claims

1. An electrolyte transfer tank for nitrogen trifluoride production, comprising a tank body (1), characterized in that: A feed pipeline (3), a liquid outlet pipeline (5) and a venting valve (4) are provided through the tank body (1); an anti-corrosion layer (6) is provided on the inner wall of the tank body (1); a heat-insulating layer (7) is provided on the outer wall of the tank body (1); a plurality of mounting grooves (15) are provided in the bottom wall of the tank body (1), each mounting groove (15) is provided with a heating wire (16) for heating the electrolyte in the tank body (1), and the heating wire (16) is electrically connected to a control mechanism; The upper end surface of the tank body (1) is provided with a motor (8), and a stirring mechanism for stirring the electrolyte is provided inside the tank body (1); the rotating shaft of the motor (8) passes through the tank body (1) and is connected to the stirring mechanism, thereby providing power for the stirring mechanism; A plurality of mutually interconnected heating water pipes (12) are embedded in the wall of the tank body (1), and the heating water pipes (12) are connected to a hot water circulation supply component arranged outside the tank body (1); the hot water circulation supply component is connected to a motor (8) that provides required power through a first transmission component; The hot water circulation supply assembly comprises a water tank (23), a water pumping mechanism and a heating device (24); the water tank (23) is connected to the water pumping mechanism via a water inlet pipe, the water pumping mechanism is connected to the heating device (24) via a water outlet pipe, the hot water output pipe of the heating device (24) is connected to the inlet of the heating water pipe (12) in the tank body; the outlet of the heating water pipe (12) is connected to the water tank (23) via a connecting pipe; the power input shaft (11) of the water pumping mechanism is connected to the motor (8) via the first transmission assembly; The water pump mechanism comprises a mounting tube (13) and a piston (22) sealingly and slidably connected in the mounting tube (13); one side of the mounting tube (13) is connected to the water tank (23) through the water inlet pipe, and the other side is connected to the heating device (24) through the water outlet pipe; both the water inlet pipe and the water outlet pipe are provided with a one-way valve; the rod of the piston (22) is connected to the power input shaft (11) through a second transmission assembly; The water pump mechanism further comprises a mounting plate (9), on which a rotating shaft mounting block (10) and the mounting cylinder (13) are fixedly mounted; the power input shaft (11) passes through the rotating shaft mounting block (10) and is rotatable; a worm (26) is fixedly connected to the power input shaft (11); Three mutually meshing gears are rotatably mounted on the mounting plate (9), the gear in the middle is called the third gear (27), and the two gears on the left and right are called the fourth gear (28); the third gear (27) is coaxially fixedly connected to a worm wheel (25) matched with the worm (26); the two fourth gears (28) are coaxially fixedly connected to a half gear (29) respectively; The rod of the piston (22) extends out of the mounting tube and is fixedly connected to a toothed plate (30), and the toothed plate (30) is meshed with two half gears (29); the two half gears (29) face the same direction and mesh with the toothed plate (30) alternately; The first transmission assembly comprises two pulleys (31) fixedly connected to the output shaft of the motor (8) and the power input shaft (11), and the two pulleys (31) are connected via a belt (32).

2. The electrolyte transfer tank in nitrogen trifluoride production according to claim 1, characterized in that: The control mechanism comprises a controller (34) and a temperature sensor (33) arranged in the tank body (1); the temperature sensor (33), the controller (34) and the heating wire (16) are electrically connected and connected in series with a power source.

3. The electrolyte transfer tank in nitrogen trifluoride production as claimed in claim 1, characterized in that: The stirring mechanism comprises a power box fixedly connected to the tank body (1), wherein a second gear (20) and two first gears (19) meshing with the second gear (20) are arranged in the power box; The output shaft of the motor (8) is coaxially fixedly connected to the second gear (20); the two first gears (19) are coaxially fixedly connected to a power shaft (18) respectively; the output shaft of the motor (8) and the two power shafts (18) all pass through the power box, and the three shafts are evenly arranged in the space inside the tank body (1); stirring blades (21) are provided on the two power shafts (18) and the output shaft of the motor (8).

4. The electrolyte transfer tank in nitrogen trifluoride production as claimed in claim 1, characterized in that: The feed pipeline (3) is provided through the upper end surface of the tank body (1), and a solenoid valve is provided in the feed pipeline (3); the air release valve (4) is provided through the upper end of the tank body (1), and the liquid outlet pipeline (5) is provided through the right side wall of the tank body (1); and the bottom of the tank body (1) is connected to the base (2).

5. The electrolyte transfer tank in nitrogen trifluoride production as claimed in claim 1, characterized in that: A diaphragm pump (35) is installed on the liquid outlet pipeline (5).

6. The electrolyte transfer tank in nitrogen trifluoride production as claimed in claim 1, characterized in that: One end of the heating wire (16) in the installation groove (15) is fixedly connected to a fixing block (17).

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