Mask assembly, device for manufacturing a display device, and method for manufacturing a display device

Abstract

A mask assembly, an apparatus for manufacturing a display device, and a method of manufacturing a display device are provided. The mask assembly includes a mask frame and a plurality of mask sheets, wherein: the mask frame includes a frame body portion and a plurality of partition members, the frame body portion is disposed at an outer portion of the mask frame, and the plurality of partition members divide an interior of the frame body portion into a plurality of openings, and the partition members disposed in a first direction among the plurality of partition members are connected to the partition members disposed in a second direction; the plurality of mask sheets are disposed on a top surface of the mask frame, are coupled to the mask frame, and include at least one pattern opening, and the plurality of mask sheets are separated from each other in the first direction.

Description

[0001] Cross - reference to related applications

[0002] This application claims the priority and benefit of Korean Patent Application No. 10 - 2019 - 0127871, filed with the Korean Intellectual Property Office on October 15, 2019, the entire disclosure of which is incorporated herein by reference. Technical field

[0003] Aspects of the embodiments relate to a mask assembly, an apparatus for manufacturing a display device, and a method of manufacturing a display device. Background art

[0004] Mobile electronic devices are widely used. As mobile electronic devices, in addition to miniaturized electronic devices such as mobile phones, tablet personal computers (PCs) have recently been widely used.

[0005] To support various functions, mobile electronic devices include a display device for providing visual information such as images to a user. Recently, as components for driving the display device have been miniaturized, the portion occupied by the display device in an electronic device has gradually increased, and a structure that can be bent from a flat state into a structure having an angle (e.g., a predetermined angle) is also being developed.

[0006] The display device may include an intermediate layer having an organic light - emitting layer. In this case, the sharpness of an image displayed by the display device may be determined by the precision of the pattern arrangement of the intermediate layer. Summary of the invention

[0007] Generally, the display of a precise image may depend on the precision of formation of each layer of the display device. In this case, how precisely the organic light - emitting layer is arranged corresponding to the pixel electrode may be important. According to aspects of embodiments of the present disclosure, a mask assembly, an apparatus for manufacturing a display device in which an intermediate layer having a precise pattern is formed, and a method of manufacturing the display device are provided.

[0008] Other aspects will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the presented embodiments of the disclosure.

[0009] According to one or more embodiments, a mask assembly includes a mask frame and a plurality of mask sheets, wherein: the mask frame includes a frame body portion and a plurality of partition members, the frame body portion is disposed at an outer portion of the mask frame, and the plurality of partition members divide an interior of the frame body portion into a plurality of openings, and the partition members disposed in a first direction among the plurality of partition members are connected to the partition members disposed in a second direction; the plurality of mask sheets are disposed on a top surface of the mask frame, are coupled to the mask frame, and include at least one pattern opening, and the plurality of mask sheets are separated from each other in the first direction.

[0010] The plurality of partition members may include a first partition member and a second partition member, wherein the first partition member is connected to the frame body portion and is disposed in the first direction, and the second partition member is connected to the frame body portion and the first partition member and is disposed in the second direction.

[0011] A side surface of at least one of the plurality of partition members may be tapered.

[0012] A width of one of a top surface and a bottom surface of at least one of the plurality of partition members may be less than a width of the other of the top surface and the bottom surface of the at least one partition member.

[0013] According to one or more embodiments, an apparatus for manufacturing a display device includes a chamber, a mask assembly, and a deposition source, wherein a display substrate is disposed in the chamber, the mask assembly is disposed inside the chamber to face the display substrate, and the deposition source is disposed inside the chamber to face the mask assembly and supply a deposition material to the display substrate, wherein the mask assembly includes a mask frame and a plurality of mask sheets, wherein: the mask frame includes a frame body portion and a plurality of partition members, the frame body portion is disposed at an outer portion of the mask frame, and the plurality of partition members divide an interior of the frame body portion into a plurality of openings, and the partition members disposed in a first direction among the plurality of partition members are connected to the partition members disposed in a second direction; the plurality of mask sheets are disposed on a top surface of the mask frame, are coupled to the mask frame, and include at least one pattern opening, and the plurality of mask sheets are separated from each other in the first direction.

[0014] The plurality of partition members may include a first partition member and a second partition member, wherein the first partition member is connected to the frame body portion and is disposed in the first direction, and the second partition member is connected to the frame body portion and the first partition member and is disposed in the second direction.

[0015] A side surface of at least one of the plurality of partition members may be tapered.

[0016] A width of one of a top surface and a bottom surface of at least one of the plurality of partition members may be less than a width of the other of the top surface and the bottom surface of the at least one partition member.

[0017] According to one or more embodiments, a method of manufacturing a display device includes: arranging a mask frame including a frame body portion disposed at an outer portion of the mask frame and a plurality of partition members that divide an interior of the frame body portion into a plurality of openings, with the partition members arranged in a first direction and the partition members arranged in a second direction being connected to each other; arranging a first mask sheet member on the mask frame, the first mask sheet member including a first blocking portion and a first pattern portion in which at least one first pattern opening is arranged; fixing the first blocking portion and the first pattern portion to the mask frame; removing the first blocking portion; arranging a second mask sheet member including a second blocking portion and a second pattern portion such that the first pattern portion corresponds to the second blocking portion and the second pattern portion corresponds to the first blocking portion, with at least one second pattern opening arranged in the second pattern portion; fixing the second blocking portion and the second pattern portion to the mask frame; and removing the second blocking portion.

[0018] The method may further include stretching the first mask sheet member in a longitudinal direction of the first mask sheet member.

[0019] The method may further include stretching the second mask sheet member in a longitudinal direction of the second mask sheet member.

[0020] A side surface of at least one of the plurality of partition members may be tapered.

[0021] A width of one of a top surface and a bottom surface of at least one of the plurality of partition members may be less than a width of the other of the top surface and the bottom surface of at least one of the partition members.

[0022] The first pattern portion and the second pattern portion may be arranged in a row in the first direction.

[0023] The first pattern portion may include a plurality of first pattern portions, and the first mask sheet member may be fixed to the mask frame such that the plurality of first pattern portions are adjacent to each other in the second direction.

[0024] The second pattern portion may include a plurality of second pattern portions, and the second mask sheet member may be fixed to the mask frame such that the plurality of second pattern portions are adjacent to each other in the second direction.

[0025] The first mask sheet member may be fixed to the mask frame by welding.

[0026] The second mask sheet member may be fixed to the mask frame by welding.

[0027] The above and other aspects, features, and advantageous effects of specific embodiments of the present disclosure will become more apparent from the following description, drawings, and claims.

[0028] Aspects of embodiments of the present disclosure may be implemented by a system, a method, a computer program, or a combination of a system, a method, and / or a computer program. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and other aspects, features, and advantages of specific embodiments of the present disclosure will become more apparent from the following description in conjunction with the drawings, in which:

[0030] Figure 1 is a cross-sectional view of an apparatus for manufacturing a display device according to an embodiment;

[0031] Figure 2 is a plan view of a display device according to an embodiment;

[0032] Figure 3 is Figure 2 a cross-sectional view of the display device taken along line A-A';

[0033] Figure 4 is Figure 1 a perspective view of the mask assembly shown in ;

[0034] Figure 5 is Figure 4 a cross-sectional view of the mask assembly taken along line V-V';

[0035] Figure 6 is Figure 4 a cross-sectional view of the mask assembly taken along line VI-VI';

[0036] Figure 7 is according to an embodiment of Figure 4 a cross-sectional view of the first mask sheet member taken along line B-B';

[0037] Figure 8 is a cross-sectional view of the first mask sheet member taken along a line corresponding to line B-B' of Figure 4 according to another embodiment;

[0038] Figures 9 to 14 is a plan view showing a method of manufacturing the mask assembly shown in Figure 4 according to an embodiment; and

[0039] Figure 15 is a plan view of a display device manufactured by using an apparatus for manufacturing a display device according to an embodiment. DETAILED DESCRIPTION

[0040] Reference will now be made in more detail to some embodiments, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout. In this regard, the presented embodiments may have different forms and should not be construed as limited to the description set forth herein. Accordingly, the following description is presented by way of example only to illustrate aspects of the present disclosure. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Throughout the present disclosure, the expression "at least one of a, b, and c" indicates only a, only b, only c, both a and b, both a and c, both b and c, all of a, b, and c, or variants thereof.

[0041] In this document, some embodiments are described in more detail with reference to the accompanying drawings. In the drawings, like reference numerals are assigned to like or corresponding elements, and repeated descriptions of these elements are omitted.

[0042] It will be understood that although the terms "first", "second", etc. may be used herein to describe various components, these components should not be limited by these terms. These terms are used to distinguish one component from another.

[0043] Unless the context clearly dictates otherwise, as used herein, the singular forms "a", "an", and "the" are also intended to include the plural forms.

[0044] It will also be understood that the terms "comprises" and / or "comprising", as used herein, specify the presence of the stated features or components, but do not preclude the presence or addition of one or more other features or components.

[0045] It will be understood that when a layer, region, or component is referred to as being "formed on" another layer, region, or component, the layer, region, or component may be formed directly or indirectly on the other layer, region, or component. That is, for example, there may be one or more intervening layers, regions, or components.

[0046] For ease of illustration, the dimensions of the elements in the drawings may be exaggerated. In other words, since the dimensions and thicknesses of the components in the drawings may be arbitrarily shown for the convenience of illustration, the following embodiments are not limited thereto.

[0047] In the following examples, the X-axis, Y-axis, and Z-axis are not limited to the three axes of a rectangular coordinate system and may be interpreted in a broader sense. For example, the X-axis, Y-axis, and Z-axis may be perpendicular to each other, or may represent different directions that are not perpendicular to each other.

[0048] When a specific embodiment can be implemented differently, the specific process order can be executed differently from the described order. For example, two consecutively described processes can be executed substantially simultaneously or in an order opposite to the described order.

[0049] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the exemplary embodiments of the inventive concept belong. It will also be understood that terms, such as those defined in a commonly used dictionary, should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0050] Figure 1 is a cross-sectional view of an apparatus 100 for manufacturing a display device according to an embodiment.

[0051] Figure 2 is a plan view of a display device 20 according to an embodiment; and Figure 3 is along Figure 2 a cross-sectional view of the display device 20 taken along line A-A'.

[0052] Referring to Figures 1 to 3 , an apparatus 100 for manufacturing a display device according to an embodiment includes a chamber 110, a magnetic force generator 120, a first support member 131, a second support member 132, a vision unit 140, a mask assembly 200, a deposition source 160, and a pressure regulator 170.

[0053] The chamber 110 may include a space therein, and a part of the chamber 110 may include an opening. A gate valve 110A may be installed at the opening of the chamber 110 to selectively open / close the opening of the chamber 110.

[0054] The magnetic force generator 120 may be fixed to the chamber 110. In this case, the magnetic force generator 120 may include at least one of an electromagnet and a permanent magnet to selectively generate a magnetic field. The magnetic force generator 120 may closely attach the mask assembly 200 to the display substrate D.

[0055] The first support member 131 may support the display substrate D. In this case, the first support member 131 may support the display substrate D in various ways. For example, the first support member 131 may include an electrostatic chuck or an adhesive chuck. In an embodiment, the first support member 131 and the magnetic force generator 120 may be provided as one body or one unit. In an embodiment, the first support member 131 may include a frame or a clamping portion. The frame supports the display substrate D by placing a part of the display substrate D on the frame, and the clamping portion fixes the display substrate D by clamping a part of the display substrate D. However, the first support member 131 is not limited thereto and may include any suitable device that can support the display substrate D. Herein, for ease of description, the case where the first support member 131 includes a clamping portion for clamping the display substrate D will be described in more detail.

[0056] The mask assembly 200 may be placed on the second support member 132 and supported by the second support member 132. In an embodiment, the second support member 132 may finely adjust the mask assembly 200 in at least two different directions.

[0057] The vision unit 140 may capture the positions of the display substrate D and the mask assembly 200. In an embodiment, the display substrate D and the mask assembly 200 may be aligned by moving at least one of the display substrate D and the mask assembly 200 based on the image captured by the vision unit 140.

[0058] The mask assembly 200 may include a mask frame 220 and a mask sheet 210. In an embodiment, the mask frame 220 may include a frame body portion 221, a first partition member 222, and a second partition member 223. The mask sheet 210 may include a first mask sheet 211 and a second mask sheet 212. The deposition material may be inserted into or included in the deposition source 160 and then may be evaporated. In an embodiment, the deposition source 160 may include a heater 160A, and the deposition material may be evaporated by the heat applied from the heater 160A.

[0059] The deposition source 160 may be formed in any of various types. For example, the deposition source 160 may be a point deposition source in which its inlet is formed in a circular shape and the deposition material is discharged through the inlet. In an embodiment, the deposition source 160 may be a linear deposition source that is formed to be long and in which a plurality of inlets are provided, or one inlet in the shape of a long cavity is provided. Herein, for ease of description, the case where the deposition source 160 is arranged to face a point of the mask assembly 200 and is provided as a point deposition source will be described in more detail.

[0060] The pressure regulator 170 may be connected to the chamber 110 to adjust the internal pressure of the chamber 110 to atmospheric pressure or a vacuum. In an embodiment, the pressure regulator 170 may include a connecting pipe 171 and a pressure regulating pump 172. The connecting pipe 171 is connected to the chamber 110, and the pressure regulating pump 172 is disposed on the connecting pipe 171.

[0061] A method of manufacturing a display device by using the apparatus 100 for manufacturing a display device is described. A display substrate D is manufactured and prepared.

[0062] The pressure regulator 170 may maintain the interior of the chamber 110 in an atmospheric pressure state. The gate valve 110A is opened, and then the display substrate D and the deformed and calibrated mask assembly 200 may be inserted into the chamber 110. In an embodiment, a separate robotic arm, baffle, etc. may be provided inside or outside the chamber 110 to transfer the display substrate D and the mask assembly 200.

[0063] The pressure regulator 170 may maintain the interior of the chamber 110 to be similar to a vacuum or substantially a vacuum. In an embodiment, at least one of the first support member 131 and the second support member 132 may be operated to adjust the interval between the display substrate D and the mask assembly 200 to a specific interval (e.g., a predetermined interval). The vision unit 140 may photograph the display substrate D and the mask assembly 200 to finely drive the first support member 131 and the second support member 132, finely adjust at least one of the display substrate D and the mask assembly 200, and align the display substrate D and the mask assembly 200.

[0064] The heater 160A may be operated to supply the deposition material from the deposition source 160 to the mask assembly 200. The deposition material passing through the mask assembly 200 may be deposited on the display substrate D in a pattern (e.g., a predetermined pattern).

[0065] When performing the above process, at least one of the deposition source 160 and the display substrate D may perform a linear motion. In another embodiment, the deposition may be performed while both the deposition source 160 and the display substrate D are stationary. Herein, for ease of description, the case where the deposition is performed while both the deposition source 160 and the display substrate D are stationary will be described in more detail.

[0066] The deposition material supplied from the deposition source 160 as described above may pass through the mask assembly 200 and be deposited on the display substrate D, thereby forming at least one layer of the intermediate layer 28B. Then, the display device 20 may be manufactured by sequentially disposing the counter electrode 28C and the thin film encapsulation layer E on the intermediate layer 28B.

[0067] In the display device 20, a display area DA and a non-display area NDA outside the display area DA may be defined on a substrate 21. An emission part may be disposed in the display area DA, and power lines (not shown) may be disposed in the non-display area NDA. A pad unit C may be disposed in the non-display area NDA.

[0068] In an embodiment, the display device 20 may include a display substrate D and a packaging member (not shown). In an embodiment, the display substrate D may include a substrate 21, a thin-film transistor TFT, a passivation layer 27, and a pixel electrode 28A. In another embodiment, the display substrate D may include at least one of a substrate 21, a thin-film transistor TFT, a passivation layer 27, a pixel electrode 28A, and an intermediate layer 28B. In an embodiment, the packaging member may include a packaging substrate (not shown) facing the substrate 21 and a sealing member (not shown) disposed between the substrate 21 and the packaging substrate. In an embodiment, an organic light-emitting diode 28 disposed on the substrate 21 may be sealed by the sealing member and the packaging substrate. In another embodiment, the packaging member may include a thin-film encapsulation layer E. Herein, for ease of description, the case where the display substrate D includes a substrate 21, a thin-film transistor TFT, a passivation layer 27, and a pixel electrode 28A will be described in more detail. In addition, for ease of description, the case where the packaging member includes a thin-film encapsulation layer E will be described in more detail.

[0069] The substrate 21 may include glass or a polymer resin. In an embodiment, the polymer resin may include polyethersulfone, polyacrylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyarylate, polyimide, polycarbonate, or cellulose acetate propionate. In an embodiment, the substrate 21 including the polymer resin may be flexible, rollable, or bendable. In an embodiment, the substrate 21 may have a multilayer structure including a layer having the above polymer resin and an inorganic layer (not shown).

[0070] The thin-film transistor TFT may be formed on the substrate 21, the passivation layer 27 may be formed to cover the thin-film transistor TFT, and the organic light-emitting diode 28 may be formed on the passivation layer 27.

[0071] A buffer layer 22 including an organic compound and / or an inorganic compound may be further formed on the substrate 21. The inorganic compound may include SiO x (x≥1) and SiN x (x≥1).

[0072] An active layer 23 arranged in a pattern (e.g., a predetermined pattern) is formed on the buffer layer 22, and then the active layer 23 is buried by the gate insulating layer 24. The active layer 23 includes a source region 23A, a drain region 23C, and a channel region 23B between the source region 23A and the drain region 23C.

[0073] The active layer 23 may include any one of a variety of materials. For example, the active layer 23 may include an inorganic semiconductor material such as amorphous silicon or crystalline silicon. As another example, the active layer 23 may include an oxide semiconductor. As another example, the active layer 23 may include an organic semiconductor material. Herein, for ease of description, the case where the active layer 23 includes amorphous silicon will be mainly described in more detail.

[0074] In an embodiment, the active layer 23 may be formed by forming an amorphous silicon layer on the buffer layer 22, crystallizing the amorphous silicon layer into a polysilicon layer, and patterning the polysilicon layer. Depending on the type of thin film transistor TFT (such as a driving thin film transistor (not shown) and a switching thin film transistor (not shown)), the source region 23A and the drain region 23C of the active layer 23 may be doped with impurities.

[0075] A gate electrode 25 is formed on the top surface of the gate insulating layer 24, and an interlayer insulating layer 26 that buries the gate electrode 25 is formed, where the gate electrode 25 corresponds to the active layer 23.

[0076] Contact holes H1 are formed in the interlayer insulating layer 26 and the gate insulating layer 24, and then source electrodes 27A and drain electrodes 27B are formed on the interlayer insulating layer 26 to contact the source region 23A and the drain region 23C through the contact holes H1, respectively.

[0077] A passivation layer 27 is formed on the thin film transistor TFT, and a pixel electrode 28A of the organic light emitting diode 28 is formed on the passivation layer 27. The pixel electrode 28A is in contact with the source electrode 27A of the thin film transistor TFT through a through hole H2 formed in the passivation layer 27. The passivation layer 27 may include an inorganic material and / or an organic material, and includes a single layer or two or more layers. The passivation layer 27 may be formed as a planarization layer having a flat top surface regardless of whether the underlying layer is curved, or may be formed to curve along the curvature of the underlying layer. In an embodiment, the passivation layer 27 includes a transparent insulator to achieve a resonance effect.

[0078] After the pixel electrode 28A is formed on the passivation layer 27, a pixel defining layer 29 is formed to cover the pixel electrode 28A and the passivation layer 27. The pixel defining layer 29 includes an organic material and / or an inorganic material. A part of the pixel defining layer 29 is open to expose the pixel electrode 28A.

[0079] The intermediate layer 28B and the counter electrode 28C are formed at least on the pixel electrode 28A. In an embodiment, the counter electrode 28C may be formed on the entire surface of the display substrate D. In this case, the counter electrode 28C may be formed on the intermediate layer 28B and the pixel defining layer 29. Herein, for convenience of description, the case where the counter electrode 28C is formed on the intermediate layer 28B and the pixel defining layer 29 will be described in more detail.

[0080] In an embodiment, the pixel electrode 28A serves as an anode electrode, and the counter electrode 28C serves as a cathode electrode. However, the polarities of the pixel electrode 28A and the counter electrode 28C may be reversed.

[0081] The pixel electrode 28A is insulated from the counter electrode 28C through the intermediate layer 28B. The pixel electrode 28A and the counter electrode 28C may apply different voltages to the intermediate layer 28B to allow light to be emitted from the organic light-emitting layer.

[0082] The intermediate layer 28B may include an organic light-emitting layer. As another example, the intermediate layer 28B may include an organic light-emitting layer and may further include at least one of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer. However, the present disclosure is not limited thereto, and the intermediate layer 28B may include an organic light-emitting layer and may further include any one of a plurality of functional layers (not shown).

[0083] In an embodiment, the intermediate layer 28B may be provided as a plurality of intermediate layers. The plurality of intermediate layers 28B may constitute the display area DA. In this case, the plurality of intermediate layers 28B may be separated from each other within the display area DA.

[0084] One unit pixel may include a plurality of sub-pixels, and each sub-pixel emits light having a different color. For example, the plurality of sub-pixels may include sub-pixels that emit red light, green light, and blue light respectively, or may include sub-pixels that emit red light, green light, blue light, and white light (not shown). Each sub-pixel may include the pixel electrode 28A, the intermediate layer 28B, and the counter electrode 28C described above.

[0085] The device 100 for manufacturing a display device may form different layers on the display substrate D. For example, the device 100 for manufacturing a display device may form at least one layer of the intermediate layer 28B above the display substrate D. For example, the device 100 for manufacturing a display device may form at least one of an organic light-emitting layer, a hole injection layer, a hole transport layer, an electron injection layer, an electron transport layer, and a functional layer.

[0086] In an embodiment, the thin film encapsulation layer E may include a plurality of inorganic layers, or may include an inorganic layer and an organic layer.

[0087] The organic layer of the thin film encapsulation layer E may include polymer-based materials. The polymer-based materials may include polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polyimide, sulfonated polyethylene, polyoxymethylene, polyarylate, hexamethyldisiloxane, acrylic resins (e.g., polymethyl methacrylate, polyacrylic acid, etc.), or combinations thereof.

[0088] In an embodiment, the inorganic layer of the thin film encapsulation layer E may include at least one inorganic insulating material among aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, and silicon oxynitride.

[0089] The outermost layer of the thin film encapsulation layer E exposed to the outside may include an inorganic layer to prevent or substantially prevent moisture transfer to the organic light emitting diode 28.

[0090] In an embodiment, the thin film encapsulation layer E may include at least one sandwich structure in which at least one organic layer is disposed between at least two inorganic layers. As another example, the thin film encapsulation layer E may include at least one sandwich structure in which at least one inorganic layer is disposed between at least two organic layers. As another example, the thin film encapsulation layer E may include at least one sandwich structure in which at least one organic layer is disposed between at least two inorganic layers and at least one sandwich structure in which at least one inorganic layer is disposed between at least two organic layers.

[0091] In an embodiment, the thin film encapsulation layer E may sequentially include a first inorganic layer, a first organic layer, and a second inorganic layer from above the organic light emitting diode 28.

[0092] As another example, the thin film encapsulation layer E may sequentially include a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, and a third inorganic layer from above the organic light emitting diode 28.

[0093] As another example, the thin film encapsulation layer E may sequentially include a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, a third inorganic layer, a third organic layer, and a fourth inorganic layer from above the organic light emitting diode 28.

[0094] In an embodiment, a metal halide layer including LiF may be additionally disposed between the organic light emitting diode 28 and the first inorganic layer. The metal halide layer may prevent or substantially prevent the organic light emitting diode 28 from being damaged when the first inorganic layer is formed by a sputtering method.

[0095] In an embodiment, the area of the first organic layer may be smaller than the area of the second inorganic layer, and the area of the second organic layer may be smaller than the area of the third inorganic layer.

[0096] When the inorganic layer is provided as a plurality of inorganic layers, the inorganic layers may be deposited to be in direct contact with each other in the edge region of the display device 20 and prevent or substantially prevent the organic layer from being exposed to the outside.

[0097] Accordingly, the display device 20 can display a fine image.

[0098] Figure 4 is a perspective view of the mask assembly 200; Figure 5 is along Figure 4 is a cross-sectional view of the mask assembly 200 taken along line V-V'; and Figure 6 is along Figure 4 is a cross-sectional view of the mask assembly 200 taken along line VI-VI'.

[0099] Referring to Figures 4 to 6 , the mask assembly 200 may include a mask frame 220 and a mask sheet 210.

[0100] The mask frame 220 may include a frame body portion 221 and partitions 222 and 223.

[0101] In an embodiment, the frame body portion 221 may include a plurality of frames connected to each other. In an embodiment, the plurality of frames may be configured in a quadrilateral shape. The frame body portion 221 may include a frame opening in its central portion. In an embodiment, the frame opening of the frame body portion 221 may have a quadrilateral shape. For example, the frame opening (not shown) of the frame body portion 221 may have a rectangular shape or a square shape. In an embodiment, the boundary of the frame body portion 221 may have a quadrilateral shape, and the boundary of the frame body portion 221 may have a long side and a short side. For example, the long side of the frame body portion 221 may be arranged in the Figure 4 X direction of Figure 4 and the short side of the frame body portion 221 may be arranged in the Figure 4 Y direction of

[0102] As shown in Figure 4 , the plane defined by the X direction and the Y direction may be perpendicular to the thickness direction (i.e., the Z direction) of the mask assembly 200.

[0102] The partitions 222 and 223 may be disposed in the frame opening of the frame body portion 221 to divide the frame opening of the frame body portion 221 into a plurality of openings 221-1. The partitions 222 and 223 may be provided as a plurality of partitions such that the partitions 222 and 223 are arranged in a first direction and a second direction, where the first direction and the second direction are different directions. The partitions 222 and 223 may include a first partition 222 and a second partition 223, where the first partition 222 is arranged in a first direction (e.g., Figure 4 the Y direction ofFigure 4 It is arranged in the X direction). In an embodiment, the first partition member 222 and the second partition member 223 may be integrally formed with the frame body portion 221. The first partition member 222 and the second partition member 223 may be arranged to intersect and connect with each other. The mask frame 220 may be manufactured by milling, casting, etc.

[0103] The first partition member 222 and the second partition member 223 may support the frame body portion 221 to prevent or substantially prevent deformation of the mask frame 220. The opening 221-1 formed by the first partition member 222 and the second partition member 223 may correspond to the display area of the display device, where each of the first partition member 222 and the second partition member 223 divides the frame opening of the frame body portion 221. The first partition member 222 and the second partition member 223 may divide the frame opening of the frame body portion 221 into a plurality of openings 221-1, and guide the deposition material such that the deposition material corresponds to a plurality of display areas through one mask assembly 200.

[0104] In an embodiment, the side surface of at least one of the first partition member 222 and the second partition member 223 may be tapered. Herein, for ease of description, the case where the side surfaces of the first partition member 222 and the second partition member 223 are tapered will be described in more detail.

[0105] In an embodiment, the width of one of the top surface and the bottom surface of the first partition member 222 may be smaller than the width of the other of the top surface and the bottom surface of the first partition member 222. In an embodiment, the width of the top surface of the first partition member 222 may be greater than the width of the bottom surface of the first partition member 222. In this case, the top surface of the first partition member 222 may be the surface arranged on the Figure 5 top portion (or the surface of the first partition member 222 facing the Figure 1 display substrate D), and the bottom surface of the first partition member 222 may be the surface arranged on the Figure 5 bottom portion (or the surface of the first partition member 222 facing the Figure 1 deposition source 160). In addition, the width of the first partition member 222 may be measured in a direction (e.g., the Figure 4 Y direction) perpendicular to the longitudinal direction of the first partition member 222 (e.g., the Figure 4 X direction).

[0106] The second separator 223 may be formed to be the same as or similar to the first separator 222. In an embodiment, the width of the top surface of the second separator 223 may be greater than the width of the bottom surface of the second separator 223. In this case, the side surface of the second separator 223 may be inclined from the top surface of the second separator 223 to the bottom surface of the second separator 223. The angle formed by the side surface of the second separator 223 and the bottom surface of the second separator 223 may be an obtuse angle greater than 90°, and the angle formed by the side surface of the second separator 223 and the top surface of the second separator 223 may be an acute angle less than 90° and greater than 0°.

[0107] The number of the first separators 222 and the number of the second separators 223 may vary according to the number of the openings 221-1. For example, in an embodiment, the first separators 222 may be provided as a plurality of first separators, and the second separator 223 may be provided as one second separator. In this case, the openings 221-1 may be provided as two openings in the first direction and at least three openings in the second direction. In another embodiment, one first separator 222 may be provided, and a plurality of second separators 223 may be provided. In this case, the openings 221-1 may be provided as at least three openings in the first direction and two openings in the second direction. In another embodiment, both the first separators 222 and the second separators 223 may be provided as a plurality of separators. In this case, the openings 221-1 may be provided as at least three openings in each of the first direction and the second direction. In another embodiment, one first separator 222 and one second separator 223 may be provided. In this case, the openings 221-1 may be provided as two openings in each of the first direction and the second direction. Herein, for the sake of convenience of description, the case where the first separators 222 are provided as a plurality of first separators and the second separator 223 is provided as one second separator will be described in more detail.

[0108] The plurality of first separators 222 may be separated from each other in the second direction. In this case, each first separator 222 may be disposed between two adjacent first mask sheets 211 among the plurality of first mask sheets 211.

[0109] The mask sheet 210 may include a first mask sheet 211 and a second mask sheet 212 disposed on the mask frame 220.

[0110] In an embodiment, at least one of the first mask sheet 211 and the second mask sheet 212 may block at least one of the plurality of openings 221-1. For example, in the case where the openings 221-1 are arranged in at least three openings in the first direction, at least one of the first mask sheet 211 and the second mask sheet 212 may block two or more of the at least three openings 221-1 arranged in the first direction. In another embodiment, in the case where the openings 221-1 are arranged in at least two openings in the second direction, at least one of the first mask sheet 211 and the second mask sheet 212 may block two or more of the at least two openings 221-1 arranged in the second direction. Herein, for ease of description, the case where each of the first mask sheet 211 and the second mask sheet 212 blocks one of the plurality of openings 221-1 will be described in more detail.

[0111] In an embodiment, the first mask sheet 211 and the second mask sheet 212 may be arranged in a row in the first direction. For example, the first mask sheet 211 and the second mask sheet 212 may be arranged in a row in the short side direction of the frame body portion 221 (e.g., Figure 4 the Y direction). In an embodiment, the first mask sheet 211 and the second mask sheet 212 may be provided as a plurality of mask sheets. In an embodiment, the plurality of first mask sheets 211 may be arranged in a row in the second direction, and the plurality of second mask sheets 212 may be arranged in a row in the second direction. For example, the plurality of first mask sheets 211 may each be arranged adjacent to each other in the long side direction of the frame body portion 221 (e.g., Figure 4 the X direction), and the plurality of second mask sheets 212 may each be arranged adjacent to each other in the long side direction of the frame body portion 221. In an embodiment, since the first mask sheet 211 is the same as or similar to the second mask sheet 212, the first mask sheet 211 will be mainly described in more detail below.

[0112] The first mask sheet 211 is arranged and fixed on the top surface of the mask frame 220. In an embodiment, the first mask sheet 211 may be fixed to the mask frame 220 by the tension applied thereto.

[0113] The first mask sheet 211 may be formed in a rod shape or a bar shape. In an embodiment, the first mask sheet 211 may include a plurality of first mask sheets 211. Each first mask sheet 211 may be arranged on the mask frame 220 such that the short side direction of the frame body portion 221 coincides with the longitudinal direction of the first mask sheet 211. The plurality of first mask sheets 211 may be arranged adjacent to each other. The plurality of first mask sheets 211 may be arranged adjacent to each other in the long side direction of the frame body portion 221. At least one first pattern opening 211-1 may be arranged in the first mask sheet 211. In an embodiment, in the case where a plurality of first pattern openings 211-1 are provided, the plurality of first pattern openings 211-1 are separated from each other, and each first pattern opening 211-1 may be uniformly or substantially uniformly arranged on the entire surface of the first mask sheet 211. Similar to the first mask sheet 211, at least one second pattern opening 212-1 may be arranged in the second mask sheet 212.

[0114] In an embodiment, one first mask sheet 211 may correspond to one opening 221-1. In another embodiment, at least two first mask sheets 211 may correspond to one opening 221-1. Herein, for the sake of convenience of description, the case where one first mask sheet 211 corresponds to one opening 221-1 will be mainly described in more detail.

[0115] In an embodiment, the first mask sheet 211 may be fixed to the mask frame 220 by the tension applied to the first mask sheet 211. For example, two opposite ends of the first mask sheet 211 may be respectively fixed to the frame body portion 221 and the second partition member 223. In another embodiment, in the case where a plurality of second partition members 223 are provided, two opposite ends of the first mask sheet 211 may be respectively fixed to adjacent second partition members 223. Herein, for the sake of convenience of description, the case where two opposite ends of the first mask sheet 211 are respectively fixed to the frame body portion 221 and the second partition member 223 will be mainly described in more detail.

[0116] In an embodiment, the first mask sheet 211 and the second mask sheet 212 are separated from each other and fixed to the mask frame 220 to prevent or substantially prevent the first mask sheet 211 and the second mask sheet 212 from sagging due to the weights of the first mask sheet 211 and the second mask sheet 212.

[0117] In addition, when heat is applied to the frame body portion 221 through the first partition member 222 and the second partition member 223, the first partition member 222 and the second partition member 223 may minimize the deformation of the frame body portion 221, or may reduce the deformation of the frame body portion 221.

[0118] In an embodiment, the first mask sheet 211 can be mounted by fixing the first mask sheet member 211A to the mask frame 220. The first mask sheet member 211A can include a first pattern portion 211A-1 and a first blocking portion 211A-2, and the first pattern opening 211-1 can be disposed in the first pattern portion 211A-1. In an embodiment, the first mask sheet 211 can be formed by fixing a part of the first pattern portion 211A-1 to the mask frame 220 and then removing the first blocking portion 211A-2. The second mask sheet 212 can be formed by using a method similar to the method of forming the first mask sheet 211.

[0119] Therefore, deformation of the mask assembly 200 due to external heat can be minimized or reduced. In addition, deformation of the mask assembly 200 due to the weight of each mask sheet can be minimized or reduced.

[0120] In the case of manufacturing a plurality of display devices by using a single mother material, since deformation of the mask assembly 200 can be minimized or reduced, the size of the mask assembly 200 can be increased to correspond to the size of the mother material.

[0121] Figure 7 is a cross-sectional view of an embodiment of the first mask sheet member 211A taken along line B-B'. Figure 4

[0122] Referring to Figure 7 , the first mask sheet member 211A can be fixed to a mask frame (not shown) to constitute the first mask sheet 211. In an embodiment, the first mask sheet member 211A can include a first blocking portion 211A-2 and a first pattern portion 211A-1. At least one first pattern opening 211-1 can be disposed in the first pattern portion 211A-1. The first blocking portion 211A-2 can be a region in which the first pattern opening 211-1 is not disposed. In an embodiment, the first blocking portion 211A-2 can have a plate shape without an opening therein. In an embodiment, the thickness of the first blocking portion 211A-2 can be equal to the thickness of the first pattern portion 211A-1, and the top surface of the first blocking portion 211A-2 and the top surface of the first pattern portion 211A-1 can be disposed in the same plane, and the bottom surface of the first blocking portion 211A-2 and the bottom surface of the first pattern portion 211A-1 can be disposed in the same plane.

[0123] In an embodiment, the first cutting line CL can be between the first blocking portion 211A-2 and the first pattern portion 211A-1. In this case, a groove or a dotted line serving as a reference for the first cutting line CL can be formed.

[0124] ​After the first mask sheet member 211A is fixed to the mask frame 220, the first cutting line CL can be used as a reference line for separating the first shielding portion 211A-2 from the first pattern portion 211A-1. In an embodiment, a laser can be irradiated onto the first cutting line CL, or a physical force such as from a cutting wheel can be applied to the first cutting line CL.

[0125] Figure 8 is a cross-sectional view taken along a line corresponding to the line B-B' of the first mask sheet member 211A' according to another embodiment. Figure 4 of.

[0126] Referring to Figure 8 , the first mask sheet member 211A' can include a first shielding portion 211A-2' and a first pattern portion 211A-1'. In an embodiment, the first pattern portion 211A-1' can be the same as the first pattern portion 211A-1 described with reference to Figure 7 , and the first pattern opening 211-1' can be arranged in the first pattern portion 211A-1'.

[0127] The first shielding portion 211A-2' can be connected to the first pattern portion 211A-1' and formed integrally with the first pattern portion 211A-1'. In an embodiment, the first cutting line CL can be formed or arranged between the first shielding portion 211A-2' and the first pattern portion 211A-1'.

[0128] The thickness T1 of the first light-shielding portion 211A-2' may be different from the thickness T2 of the first pattern portion 211A-1'. In an embodiment, the thickness T1 of the first light-shielding portion 211A-2' may be less than the thickness T2 of the first pattern portion 211A-1'. In an embodiment, the top surface of the first light-shielding portion 211A-2' and the top surface of the first pattern portion 211A-1' may be disposed in different planes, and the bottom surface of the first light-shielding portion 211A-2' and the bottom surface of the first pattern portion 211A-1' may be disposed in the same plane. In another embodiment, the top surface of the first light-shielding portion 211A-2' and the top surface of the first pattern portion 211A-1' may be disposed in the same plane, and the bottom surface of the first light-shielding portion 211A-2' and the bottom surface of the first pattern portion 211A-1' may be disposed in different planes. In another embodiment, the top surface of the first light-shielding portion 211A-2' and the top surface of the first pattern portion 211A-1' may be disposed in different planes, and / or the bottom surface of the first light-shielding portion 211A-2' and the bottom surface of the first pattern portion 211A-1' may be disposed in different planes. Herein, for ease of description, the case where the top surface of the first light-shielding portion 211A-2' and the top surface of the first pattern portion 211A-1' are disposed in the same plane and the bottom surface of the first light-shielding portion 211A-2' and the bottom surface of the first pattern portion 211A-1' are disposed in different planes will be described in more detail.

[0129] In an embodiment, when the thickness T1 of the first light-shielding portion 211A-2' is different from the thickness T2 of the first pattern portion 211A-1', when the first mask sheet member 211A' is tensioned, the entire surface of the first mask sheet member 211A' may be deformed uniformly or substantially uniformly. That is, if the first pattern opening is disposed in the first pattern portion, the first pattern portion may be deformed more than the first light-shielding portion. However, as described above, in the embodiment where the thickness T1 of the first light-shielding portion 211A-2' is less than the thickness T2 of the first pattern portion 211A-1', since the first light-shielding portion 211A-2' is more easily deformed, when the first mask sheet member 211A' is tensioned, the first light-shielding portion 211A-2' may be deformed in a manner similar to that of the first pattern portion 211A-1'.

[0130] Figures 9 to 14 is a plan view showing a method of manufacturing a mask assembly (such as, Figure 4 the mask assembly 200 shown in

[0131] Referring to Figure 9, a mask frame 220 is manufactured and prepared, and then the first mask sheet member 211A can be arranged and fixed on the mask frame 220. In an embodiment, the side surface of at least one of the first partition member 222 and the second partition member 223 of the mask frame 220 can be manufactured into a tapered shape.

[0132] The first mask sheet member 211A can be arranged on the mask frame 220, wherein the first mask sheet member 211A is tensioned in the longitudinal direction of the first mask sheet member 211A (e.g., the first direction, the short side direction of the frame body portion 221).

[0133] In an embodiment, one first mask sheet member 211A can be arranged on the mask frame 220. In another embodiment, a plurality of first mask sheet members 211A can be arranged on the mask frame 220, and at the same time, the plurality of first mask sheet members 211A are tensioned simultaneously (e.g., synchronously). For the sake of convenience of description, the case where a plurality of first mask sheet members 211A can be arranged on the mask frame 220 simultaneously (e.g., synchronously) and the plurality of first mask sheet members 211A are tensioned simultaneously will be described in more detail.

[0134] In an embodiment, although not shown in Figure 9 , the two opposite ends of the first mask sheet member 211A can be clamped and extracted by using a clamping portion or the like.

[0135] Although in Figure 9 , a plurality of first mask sheet members 211A are shown arranged on a part of the mask frame 220, but in an embodiment, the plurality of first mask sheet members 211A can be arranged to cover the entire surface of the mask frame 220. Herein, for the sake of convenience of description, the case where the plurality of first mask sheet members 211A are arranged on a part of the mask frame 220 will be described in more detail.

[0136] When arranging the first mask sheet member 211A, the first pattern portion 211A-1 can be arranged to correspond to the opening 221-1 of the frame body portion 221, and the first shielding portion 211A-2 can be arranged to correspond to another opening 221-1 of the frame body portion 221. In an embodiment, a cutting line (not shown) arranged between the first shielding portion 211A-2 and the first pattern portion 211A-1 can be arranged on the second partition member 223. The first partition member 222 can be arranged between the adjacent first mask sheet members 211A.

[0137] Refer to Figure 10, the first mask sheet member 211A is fully arranged, and then the first mask sheet member 211A can be fixed to the mask frame 220 by welding. In an embodiment, one end of the first pattern portion 211A-1 is welded to the frame body portion 221, and the second partition 223 can be welded between the first pattern portion 211A-1 and the first shielding portion 211A-2. In an embodiment, the first welding point or the first welding line P1 can be arranged on the first pattern portion 211A-1, and the second welding point or the second welding line P2 can be arranged between the first pattern portion 211A-1 and the first shielding portion 211A-2.

[0138] In an embodiment, the first pattern portion 211A-1 and the first shielding portion 211A-2 can be arranged to shield different openings 221-1.

[0139] Refer to Figure 11 , the first mask sheet member 211A is fixed to the mask frame 220, and then the first shielding portion 211A-2 can be separated from the first pattern portion 211A-1. In an embodiment, although not shown in Figure 11 , a part of the first mask sheet member 211A can be removed along a cutting line (not shown) between the first shielding portion 211A-2 and the first pattern portion 211A-1 by using a laser or a cutting wheel to separate the first shielding portion 211A-2 from the first pattern portion 211A-1.

[0140] Refer to Figure 12 , the first mask sheet 211 can be formed by removing the first shielding portion 211A-2 from the first mask sheet member 211A and only leaving the first pattern portion 211A-1.

[0141] In this case, the first mask sheet 211 is fixed, and then the second mask sheet 212 can be fixed to the mask frame 220 by arranging the second mask sheet member 212A.

[0142] The second mask sheet member 212A can be arranged on the mask frame 220. The second shielding portion 212A-2 can be arranged to correspond to the first mask sheet 211, and the second pattern portion 212A-1 can be arranged to correspond to the opening 221-1 on which the first mask sheet 211 is not arranged. In an embodiment, in a plan view, the second mask sheet member 212A can completely shield the first mask sheet 211. Similar to the first mask sheet member 211A, the second mask sheet member 212A can be arranged under tension.

[0143] Refer to Figure 13, the second mask sheet member 212A is disposed on the mask frame 220, and then the second mask sheet member 212A can be fixed to the mask frame 220.

[0144] In an embodiment, one end of the second pattern portion 212A-1 is welded to the frame body portion 221, and the second partition member 223 can be welded between the second pattern portion 212A-1 and the second shielding portion 212A-2. In an embodiment, the welding method can be performed by using laser or arc welding.

[0145] In an embodiment, the third welding point or welding line P3 can be disposed on the second pattern portion 212A-1, and the fourth welding point or welding line P4 can be disposed between the second pattern portion 212A-1 and the second shielding portion 212A-2. In an embodiment, the fourth welding point P4 may not overlap with the second welding point P2.

[0146] Referring to Figure 14 , the second mask sheet member 212A is fixed to the mask frame 220, and then the second pattern portion 212A-1 can be completely fixed to the mask frame 220 by removing the second shielding portion 212A-2. In this case, the second pattern portion 212A-1 may be the second mask sheet 212.

[0147] One end of the first mask sheet 211 disposed on the second partition member 223 may be in contact with or separated from one end of the second mask sheet 212 disposed on the second partition member 223. In an embodiment, since the second welding point P2 does not overlap with the fourth welding point P4, the first mask sheet 211 and the second mask sheet 212 may not be suspended from the second partition member 223.

[0148] The above process can be repeatedly performed so that all the openings 221-1 of the mask frame 220 are blocked.

[0149] Figure 15 is a plan view of a display device manufactured by using a device for manufacturing a display device according to an embodiment (such as, Figure 1 the device 100 shown in

[0150] Referring to Figure 15 , a display device (not shown) can be manufactured by stacking Figure 3 the corresponding layers shown in Figure 3 on a mother substrate MS. In an embodiment, one display device can be manufactured using one mother substrate MS. In another embodiment, multiple display devices can be manufactured using one mother substrate MS. In this case, multiple display devices can be manufactured by stacking Figure 3 the corresponding layers shown in Figure 3 in a plurality of separated regions and separating these regions from each other.

[0151] In an embodiment, the mother substrate MS may include a cell region PA, a first non-deposition region NPA1, a second non-deposition region NPA2, and a third non-deposition region NPA3. Corresponding layers are stacked in the cell region PA, and the non-deposition regions NPA1, NPA2, and NPA3 surround the cell region PA.

[0152] In an embodiment, the Figure 3 corresponding layers described above may be stacked in the cell region PA on the mother substrate MS, and other separate layers except for the encapsulation member may not be arranged in the first non-deposition region NPA1, the second non-deposition region NPA2, and the third non-deposition region NPA3. In another embodiment, the Figure 3 corresponding layers described above may be stacked in the cell region PA on the mother substrate MS. Other separate layers Figure 3 except for the encapsulation member and the pad unit may not be arranged in the first non-deposition region NPA1, the second non-deposition region NPA2, and the third non-deposition region NPA3.

[0153] In an embodiment, the first non-deposition region NPA1, the second non-deposition region NPA2, and the third non-deposition region NPA3 may be connected to each other. In addition, the first non-deposition region NPA1 and the second non-deposition region NPA2 may be arranged in the third non-deposition region NPA3 to divide the mother substrate MS within the third non-deposition region NPA3 into a plurality of cell regions PA. Then, at least one of the first non-deposition region NPA1 and the second non-deposition region NPA2 may be separated, so as to separate the plurality of cell regions PA from each other. In this case, the first non-deposition region NPA1 may correspond to the first partition member (not shown) described above, and the second non-deposition region NPA2 may correspond to the second partition member (not shown) described above.

[0154] Figure 3 The layers other than the substrate 21 shown in

[0155] A method of manufacturing a plurality of display devices by using the mother substrate MS is described. In an embodiment, one side of the mother substrate MS is cleaned by using a cleaning liquid, and then the Figure 3 layers other than the substrate 21 shown in

[0156] A pixel electrode (not shown) is formed on the mother substrate MS, and then at least one layer of an intermediate layer (not shown) may be formed by using the device 100 for manufacturing the display device shown in Figure 1 In an embodiment, useFigure 4 The mask assembly 200 shown in [reference], and the intermediate layer may not be formed in the first non-deposition area NPA1, the second non-deposition area NPA2, and the third non-deposition area NPA3. In addition, when forming the intermediate layer on the mother substrate MS, a device for manufacturing another display device may arrange a counter electrode (not shown) and a packaging member. In this case, as described above, a plurality of cell areas PA may be arranged on the mother substrate MS.

[0157] A plurality of display devices can be manufactured by forming a touch electrode layer, a protective layer, etc. on the packaging member and then cutting the mother substrate MS. In an embodiment, the mother substrate MS can be cut along a second cutting line WCL that passes through the centers of the first non-deposition area NPA1 and the second non-deposition area NPA2. The second cutting line WCL can be arranged or formed between adjacent cell areas PA. In an embodiment, the cut mother substrate MS can include one cell area PA, and unnecessary portions can be removed from the cut mother substrate MS, or the cut mother substrate MS itself can be used as a substrate.

[0158] In the case of forming at least one layer of the intermediate layer, at least one layer of the intermediate layer formed in the cell area PA may have a fine pattern. In an embodiment, the mask assembly for forming at least one layer of the intermediate layer may include a first mask sheet and a second mask sheet so as to minimize or reduce the deformation of each mask sheet. Since the mask assembly can prevent or substantially prevent the deformation of the mask frame, the deposition material can be deposited on the mother substrate MS as a fine pattern.

[0159] The mask assembly according to an embodiment can prevent or substantially prevent the mask sheet from sagging when the mask assembly is used for large-area deposition. The device for manufacturing a display device and the method for manufacturing a display device according to an embodiment can manufacture a high-resolution display device by depositing the deposition material as a fine pattern.

[0160] It should be understood that the embodiments described herein should be considered to be of a descriptive nature and not for the purpose of limitation. The description of a feature or aspect within each embodiment should generally be considered applicable to other similar features or aspects in other embodiments. Although one or more embodiments have been described with reference to the accompanying drawings, those of ordinary skill in the art will understand that various changes in form and detail can be made therein without departing from the spirit and scope as set forth by the appended claims.

Claims

1. A method of manufacturing a display device, the method comprising: Arranging a mask frame, the mask frame including a frame body portion and a plurality of partition members, the frame body portion being arranged at an outer portion of the mask frame, and the plurality of partition members dividing an interior of the frame body portion into a plurality of openings, the partition members arranged in a first direction among the plurality of partition members being connected to the partition members arranged in a second direction; Arranging a first mask sheet member on the mask frame, the first mask sheet member including a first blocking portion and a first pattern portion, at least one first pattern opening being arranged in the first pattern portion; Fixing the first blocking portion and the first pattern portion to the mask frame; Removing the first blocking portion; Arranging a second mask sheet member including a second blocking portion and a second pattern portion such that the first pattern portion corresponds to the second blocking portion and the second pattern portion corresponds to the first blocking portion, at least one second pattern opening being arranged in the second pattern portion; Fixing the second blocking portion and the second pattern portion to the mask frame; And Removing the second blocking portion.

2. The method according to claim 1, further comprising stretching the first mask sheet member in a longitudinal direction of the first mask sheet member; and Stretching the second mask sheet member in a longitudinal direction of the second mask sheet member.

3. The method according to claim 1 or 2, wherein The partition member arranged in the first direction is connected to the frame body portion; And The partition member arranged in the second direction is connected to the frame body portion.

4. The method according to claim 1 or 2, wherein A side surface of at least one of the plurality of partition members is tapered.

5. The method according to claim 1 or 2, wherein, A width of one of a top surface and a bottom surface of at least one of the plurality of partition members is smaller than a width of the other of the top surface and the bottom surface of the at least one partition member.

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