A parallel complex bridge combined lever type large stroke three-degree-of-freedom precision micro-positioning platform

Abstract

The present invention discloses a parallel compound-bridge combined lever type large-stroke three-degree-of-freedom precision micro-positioning platform, which includes a fixed platform. Three compound-bridge combined levers are circumferentially arranged on the fixed platform. A moving platform is installed on the compound-bridge combined levers through a biaxial flexible hinge. The compound-bridge combined lever is provided with a compound-bridge displacement amplification mechanism, and a piezoelectric ceramic driver is arranged in the compound-bridge displacement amplification mechanism. The whole platform is formed by paralleling three completely identical compound-bridge combined lever type displacement amplification mechanisms in an equilateral triangle. The overall size of the platform is relatively small and it has a greater bearing capacity. The compound-bridge combined lever type displacement amplification mechanism has greater stiffness and amplification ratio compared with the traditional displacement amplification mechanism. A novel biaxial flexible hinge is adopted to replace the traditional ball hinge, so that the displacement amplification mechanism and the ball hinge can be integrally processed, reducing the assembly clearance error. It has the advantages of large stroke, high motion resolution, no need for lubrication, no heat and noise generation.

Description

Technical Field

[0001] The present invention relates to the technical field of micropositioning, and specifically to a large-stroke three-degree-of-freedom precision micropositioning platform with a secondary amplification compound bridge combined lever type. Background Art

[0002] In recent years, micropositioning technology has played an increasingly important role in fields such as microelectronics manufacturing, biomedical engineering, optics, microassembly, and ultra-precision machining. And micromachinery actuation technology is the key technology to realize micropositioning. The micropositioning platform must meet the requirements of high positioning accuracy, working stroke, load-bearing capacity, and small volume. However, problems such as the large volume and small stroke of the existing multi-degree-of-freedom micropositioning platforms limit the application scenarios of the multi-degree-of-freedom micropositioning platforms. Therefore, researching micropositioning platforms with large strokes, large load-bearing capacities, and high precision is a current hot topic. Summary of the Invention

[0003] The purpose of the present invention is to provide a parallel compound bridge combined lever type large-stroke three-degree-of-freedom precision micropositioning platform, which has the advantages of large stroke, large load-bearing capacity, small volume, simple structure, and no need for lubrication, and has a wide range of application scenarios compared with traditional multi-degree-of-freedom micropositioning platforms.

[0004] To achieve the above purpose, the present invention provides the following technical solution: A parallel compound bridge combined lever type large-stroke three-degree-of-freedom precision micropositioning platform, including a fixed platform, on which three compound bridge combined levers are circumferentially arranged. A moving platform is installed on the compound bridge combined levers through a biaxial flexible hinge. The compound bridge combined lever is provided with a compound bridge displacement amplification mechanism, and a piezoelectric ceramic actuator is arranged in the compound bridge displacement amplification mechanism.

[0005] Preferably, the compound bridge combined lever

[0006] includes an L-shaped lower support rod, an upper support lever, and a connecting hinge. The connecting hinge connects the L-shaped lower support rod and the upper support lever; the compound bridge displacement amplification mechanism is arranged between the L-shaped lower support rod, the upper support lever, and the connecting hinge;

[0007] The connecting hinge is arranged on the lower side wall at one end of the upper support lever, and the biaxial flexible hinge is arranged on the upper side wall at the other end of the upper support lever.

[0008] Preferably, the compound bridge displacement amplification mechanism includes

[0009] inner convex blocks. A piezoelectric ceramic actuator is connected between a pair of the inner convex blocks by interference fit;

[0010] Double-layer long-arm flexible hinge, the double-layer long-arm flexible hinge connecting a pair of the inner convex blocks; the lower-layer long-arm flexible hinge in the double-layer long-arm flexible hinge is installed on the L-shaped lower support rod, and the upper-layer long-arm flexible hinge in the double-layer long-arm flexible hinge is installed on the upper support lever through a straight-arm flexible hinge.

[0011] Preferably, the double-layer long-arm flexible hinge is an eight-long-arm flexible hinge.

[0012] Preferably, the fixed platform and the compound bridge combined lever are connected through a fixed platform connection block;

[0013] A moving platform connection block is provided between the double-axis flexible hinge and the moving platform.

[0014] Compared with the prior art, the beneficial effects of the present invention are: the combined lever part of the overall platform adopts three completely identical compound bridge combined lever type displacement amplification mechanisms connected in parallel in an equilateral triangle, the overall size of the platform is smaller and it has a greater bearing capacity.

[0015] The compound bridge combined lever type displacement amplification mechanism has a greater stiffness and amplification ratio compared with the traditional displacement amplification mechanism. And by cooperating it with the lever mechanism, the displacement can be amplified twice, so as to achieve the effect of large-stroke positioning.

[0016] A novel double-axis flexible hinge is adopted to replace the traditional ball hinge, so that the displacement amplification mechanism and the ball hinge can be integrally processed, reducing the assembly clearance error.

[0017] While reducing the occupied space, it has the advantages of large stroke, high motion resolution, no need for lubrication, no heat and noise generation. Description of the Drawings

[0018] Figure 1 It is a structural schematic diagram of the parallel compound bridge combined lever type large-stroke three-degree-of-freedom precision micro-positioning platform of the present invention.

[0019] Figure 2 It is a three-dimensional view of the parallel compound bridge combined lever type large-stroke three-degree-of-freedom precision micro-positioning platform of the present invention.

[0020] Figure 3 It is a schematic diagram of the compound bridge combined lever part of the parallel compound bridge combined lever type large-stroke three-degree-of-freedom precision micro-positioning platform of the present invention.

[0021] 1. Moving platform; 2. Double-axis flexible hinge; 3. Compound bridge combined lever; 4. Piezoelectric ceramic actuator; 5. Fixed platform; 6. Straight-arm flexible hinge; 7. Compound bridge displacement amplification mechanism; 8. Inner convex block; 9. Moving platform connection block; 10. Fixed platform connection block; 11. Double-layer long-arm flexible hinge. Detailed Embodiment

[0022] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0023] Please refer to Figures 1-3 , the present invention provides a technical solution: a parallel composite bridge combined lever type large-stroke three-degree-of-freedom precision micro-positioning platform, including a fixed platform 5, on which three composite bridge combined levers 3 are circumferentially arranged to form an equilateral triangle. A moving platform 1 is installed on the composite bridge combined lever 3 through a biaxial flexible hinge 2. The composite bridge combined lever 3 is provided with a composite bridge displacement amplification mechanism 7, and a piezoelectric ceramic actuator 4, with the model of RP150 / 10x10 / 58 stacked piezoelectric ceramic actuator, is arranged in the composite bridge displacement amplification mechanism 7. By adjusting the input displacements of the three piezoelectric ceramic actuators 4, the moving platform 1 can realize Z-direction movement, X-direction rotation, and Y-direction rotation.

[0024] The composite bridge combined lever 3 includes an L-shaped lower support rod, an upper support lever, and a connecting hinge. The connecting hinge connects the L-shaped lower support rod and the upper support lever, and the connecting hinge can also be selected as a straight-arm flexible hinge; the composite bridge displacement amplification mechanism 7 is arranged between the L-shaped lower support rod, the upper support lever, and the connecting hinge. The connecting hinge is arranged on the lower side wall at one end of the upper support lever, and the biaxial flexible hinge 2 is arranged on the upper side wall at the other end of the upper support lever. After the composite bridge displacement amplification mechanism 7 undergoes an initial displacement, through the lever principle, the part lifted by the biaxial flexible hinge 2 can be amplified secondarily, so the amplification ratio increases exponentially, thereby achieving the effect of increasing the stroke displacement.

[0025] The composite bridge displacement amplification mechanism 7 includes an inner convex block 8. The piezoelectric ceramic actuator 4 is connected between a pair of inner convex blocks 8 through interference fit. After the piezoelectric ceramic actuator 4 is started, its displacement in the left and right directions will directly act on the inner convex blocks 8 on both sides.

[0026] The double-layer long-arm flexible hinge 11 connects a pair of inner convex blocks 8; the lower-layer long-arm flexible hinge in the double-layer long-arm flexible hinge 11 is installed on the L-shaped lower support rod, and the upper-layer long-arm flexible hinge in the double-layer long-arm flexible hinge 11 is installed on the upper support lever through the straight-arm flexible hinge 6. At the same time, the double-layer long-arm flexible hinge 11 is preferably eight long-arm flexible hinges, and the eight long-arm flexible hinges are symmetrically arranged. When the electro-ceramic actuator 4 separates to both sides, its input displacement will act on the inner convex block 8, and the input displacement is initially amplified by the compound bridge displacement amplification mechanism 7. The compound bridge displacement amplification mechanism 7 is connected to the upper support lever through the straight-arm flexible hinge 6, and the input displacement amplified by the compound bridge displacement amplification mechanism 7 is amplified again by the upper support lever as a lever, thus realizing secondary amplification. By adjusting the input displacements of the three piezoelectric ceramic actuators 4, the moving platform can achieve Z-direction movement, X-direction rotation, and Y-direction rotation. By designing the compound bridge displacement amplification mechanism 7 into a compound hinge structure, the stiffness of the displacement amplification mechanism is enhanced, thereby improving the bearing capacity and dynamic output performance of the platform. The compound hinge structure forms a certain angle with the inner convex block 8, which can enable the inner convex block 8 to provide an additional pre-tightening force for the piezoelectric ceramic actuator 4.

[0027] The fixed platform 5 and the compound bridge combined lever 3 are connected by the fixed platform connection block 10; a moving platform connection block 9 is provided between the biaxial flexible hinge 2 and the moving platform 1.

[0028] The biaxial flexible hinge 2, the straight-arm flexible hinge 6, and the compound bridge displacement amplification mechanism 7 are all of integral structure and convenient for processing.

[0029] The parallel compound bridge combined lever type large-stroke three-degree-of-freedom precision micro-positioning platform has a specific assembly sequence. Specifically, first, three piezoelectric ceramics are respectively assembled on three compound bridge combined lever type displacement amplification mechanisms by interference fit, then the compound bridge combined lever type displacement amplification mechanisms are respectively fixed on the fixed platform by screws in an equilateral triangle arrangement, and finally, the compound bridge combined lever type displacement amplification mechanisms are connected to the moving platform by three screws to realize the overall assembly of the platform. Finally, the three-degree-of-freedom movement of the platform is realized by adjusting the output displacements of the three piezoelectric ceramics. The compound bridge combined lever type displacement amplification mechanism of the platform is composed of a compound bridge displacement amplification mechanism and a lever displacement amplification mechanism in series, and a new type of biaxial flexible hinge is used to integrally process the compound bridge combined lever type displacement amplification mechanism, so that the platform has the advantages of large stroke, large stiffness, large bearing capacity, and no need for lubrication, and has a wider application range for traditional micro-positioning platforms.

[0030] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirits of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A parallel complex bridge combined lever type large stroke three-degree-of-freedom precision micro-positioning platform, characterized in that: it includes a fixed platform (5), on which three complex bridge combined levers (3) are circumferentially arranged. A moving platform (1) is installed on the complex bridge combined lever (3) through a biaxial flexible hinge (2). The complex bridge combined lever (3) is provided with a complex bridge displacement amplification mechanism (7), and a piezoelectric ceramic actuator (4) is arranged in the complex bridge displacement amplification mechanism (7); the complex bridge combined lever (3) includes an L-shaped lower support rod, an upper support lever and a connecting hinge, and the connecting hinge connects the L-shaped lower support rod and the upper support lever; the complex bridge displacement amplification mechanism (7) is arranged between the L-shaped lower support rod, the upper support lever and the connecting hinge; the connecting hinge is arranged on the lower side wall at one end of the upper support lever, and the biaxial flexible hinge (2) is arranged on the upper side wall at the other end of the upper support lever; the complex bridge displacement amplification mechanism (7) includes inner convex blocks (8), and a piezoelectric ceramic actuator (4) is connected between a pair of the inner convex blocks (8) by interference fit; a double-layer long-arm flexible hinge (11), and the double-layer long-arm flexible hinge (11) connects a pair of the inner convex blocks (8); the lower-layer long-arm flexible hinge in the double-layer long-arm flexible hinge (11) is installed on the L-shaped lower support rod, and the upper-layer long-arm flexible hinge in the double-layer long-arm flexible hinge (11) is installed on the upper support lever through a straight-arm flexible hinge (6); the double-layer long-arm flexible hinge (11) is composed of eight long-arm flexible hinges; the fixed platform (5) and the complex bridge combined lever (3) are connected by a fixed platform connecting block (10); a moving platform connecting block (9) is arranged between the biaxial flexible hinge (2) and the moving platform (1); the biaxial flexible hinge (2), the straight-arm flexible hinge (6) and the complex bridge displacement amplification mechanism (7) are all of integral structure.

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