Positioning device and positioning transport system

Abstract

The present invention provides a positioning device and a positioning transport system capable of efficiently positioning a substrate with a simple structure. The positioning device (10) of the present invention comprises: at least a pair of moving parts (100A, 100C) supported in a manner that allows them to approach and move away in a direction parallel to the substrate (F); pins (110) respectively disposed on the pair of moving parts (100A, 100C) to lock the outer periphery of the substrate (F); a support member (120) disposed between the pair of moving parts (100A, 100C) and supported by a shaft member (124) perpendicular to the substrate (F); a pair of connecting rods (130A, 130C) respectively connecting the support member (120) and the moving parts (100A, 100C); and a drive unit (140) that causes the support member (120) to rotate relative to the shaft member (124).

Description

Technical Field

[0001] The present invention relates to a positioning device for positioning a substrate and a positioning and transport system having the positioning device. Background Technology

[0002] Generally, when dividing a substrate made of a brittle material such as a glass substrate, a scribing process is performed to form scribe lines on the substrate, and a breaking process is performed to divide the substrate along the scribe lines. In the scribing process, alignment marks are pre-attached to predetermined positions on the substrate. The substrate is placed on the worktable such that the portion with the alignment marks is located at a predetermined position on the worktable.

[0003] In the substrate processing method disclosed in Patent Document 1 below, alignment marks are attached to the corners of the substrate. When the substrate is placed on a worktable, a camera mounted on the scribing head captures an image of a reference position. The image captured by the camera is output to the control unit of the scribing apparatus. The control unit determines whether the shape of the alignment mark stored in the storage unit matches the shape of the captured mark. If no mark is captured or the captured mark does not match the alignment mark, the substrate is photographed while gradually changing the imaging area to find the alignment mark.

[0004] Once the alignment mark is confirmed, the control unit corrects the starting position of the machining process based on the deviation between the camera reference position and the position of the alignment mark. Then, the engraving process begins from the corrected position.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent document 1: Japanese Patent Application Publication No. 2012-138548.

[0008] The problem the invention aims to solve

[0009] In Patent Document 1, for example, when the alignment mark is far from the camera reference position, the camera area is gradually moved while searching. In this case, because time is needed before confirming the alignment mark, the start of the scribing process is delayed, making it impossible to perform the scribing process efficiently.

[0010] Such phenomena occur when the substrate placed on the worktable is not in the correct orientation. Therefore, it is necessary to position the substrate relative to the worktable to ensure that the substrate is in the correct orientation on the worktable. Summary of the Invention

[0011] In view of this issue, the object of the present invention is to provide a positioning device and a positioning and transport system that can efficiently position a substrate through a simple structure.

[0012] Solution for solving the problem

[0013] A first aspect of the present invention relates to a positioning device. The positioning device of this aspect comprises: at least a pair of movable portions supported in a manner that allows them to approach and move away in a direction parallel to a substrate; pins respectively disposed on the pair of movable portions to lock the outer periphery of the substrate; a support member disposed between the pair of movable portions and axially supported by a shaft member perpendicular to the substrate; a pair of connecting rods respectively connecting the support member and each of the movable portions; and a drive unit that causes the support member to rotate relative to the shaft member.

[0014] According to the structure described herein, when the support member rotates in a predetermined direction via the drive unit, a pair of moving parts move simultaneously in a direction approaching each other as the support member rotates. Thus, as the pair of moving parts move, the substrate is clamped in the in-plane direction by pins disposed on each moving part. Consequently, the substrate is positioned at the midpoint between the pair of moving parts. Therefore, the positioning device according to this method can position the substrate at a predetermined position by synchronously moving a pair of moving parts via a single drive unit. Thus, efficient substrate positioning is possible with a simple structure.

[0015] In the positioning device of this method, the moving part is configured to include: a sliding member on which the pin is disposed; a connecting member disposed on the side of the support member relative to the sliding member and connected to the connecting rod; and a magnet that causes the sliding member and the connecting member to attract each other.

[0016] According to the structure described in this method, when the locating pin abuts against the substrate, the substrate becomes an obstruction, preventing the sliding member from moving further towards the substrate. On the other hand, since the connecting member is connected to the connecting rod, when the support member rotates further thereafter, the connecting member overcomes the magnetic attraction force and separates from the sliding member, moving independently towards the support member. Therefore, when the locating pin abuts against the substrate, no excessive load is applied to the substrate. Thus, damage or deformation of the substrate can be prevented.

[0017] In the positioning device involved in this method, it can be configured such that: two pins are arranged on the moving part in a direction that is separate from the moving direction of the moving part, and the moving part is provided with a plurality of groups of two holes for inserting the two pins in a way that is separate in the moving direction of the moving part, and the spacing of the holes in each group is different from each other.

[0018] According to the structure described herein, when the substrate has a pair of corners in a diagonal direction when viewed from above, the substrate can be positioned by engaging two pins disposed in each moving part at each corner of the substrate. Furthermore, since multiple sets of holes with different spacings are provided in each moving part, the spacing between the two pins can be changed by altering the holes into which the pins are inserted. For example, when the substrate size is large, a wider spacing between the two pins results in more stable substrate positioning. Therefore, based on the above structure, the substrate can be positioned more stably according to its size.

[0019] In the positioning device involved in this method, it is possible to configure a plurality of the pair of moving parts and the pair of connecting rods to be arranged at different positions around the shaft member.

[0020] According to the structure involved in this method, the substrate can be positioned by clamping it with pins at multiple different locations on the outer periphery of the substrate. Therefore, the substrate can be positioned more accurately.

[0021] In the positioning device involved in this method, it can be configured such that the two groups of the pair of moving parts and the pair of connecting rods are respectively arranged at two mutually orthogonal positions around the shaft member, and in the moving parts of each group, two pins are arranged separately in a direction that intersects the moving direction of the moving part.

[0022] According to the structure involved in this method, when the substrate is square in top view, the two pins can be engaged at the four corners of the substrate respectively. Therefore, the square substrate can be positioned properly.

[0023] A second aspect of the present invention relates to a positioning and transporting system. This positioning and transporting system includes: a positioning device for positioning a substrate; and a transporting device for transporting the substrate to the positioning device. The positioning device includes: at least one pair of moving parts supported in a manner that allows them to approach and move away in a direction parallel to the substrate; pins respectively disposed on the pair of moving parts to lock the outer periphery of the substrate; a support member disposed between the pair of moving parts and axially supported by a shaft member perpendicular to the substrate; a pair of connecting rods respectively connecting the support member and each of the moving parts; and a driving unit that rotates the support member relative to the shaft member.

[0024] Based on the structure involved in this method, the same effect as the first method is achieved.

[0025] In the positioning and transporting system of this method, the transporting device includes: a worktable on which the substrate is placed; and a transporting unit that transports the worktable. The worktable can be configured to adsorb the placed substrate by air pressure applied by an air compressor, and the transporting device can be configured to release the adsorption of the substrate while the substrate is being positioned by the positioning device, and to perform the adsorption action of the substrate based on the fact that the substrate has been positioned by the positioning device.

[0026] According to the structure involved in this method, a substrate positioned by a positioning device can be held in place by adsorption and then transported.

[0027] In this case, the positioning and transporting system can be configured such that the positioning device has a detection unit for detecting the moving position of the moving part, and the transporting device starts the adsorption action of the worktable on the substrate based on the detection by the detection unit that the moving part has moved to a position corresponding to the size of the substrate.

[0028] Invention Effects

[0029] As described above, according to the present invention, a positioning device and a positioning and transport system for efficiently positioning a substrate through a simple structure can be provided.

[0030] The effects and significance of the present invention will become clearer through the following description of the embodiments. However, the embodiments shown below are merely examples of implementing the present invention, and the present invention is not limited in any way by the contents described in the following embodiments. Attached Figure Description

[0031] Figure 1 This is a perspective view showing the structure of the positioning device involved in the embodiment.

[0032] Figure 2 This is a perspective view showing the structure of the positioning device involved in the embodiment.

[0033] Figure 3 This is a perspective view showing the structure of the positioning device involved in the embodiment.

[0034] Figure 4 This is a perspective view showing the structure of a portion of the positioning device involved in the embodiment.

[0035] Figure 5 (a) and (b) are schematic diagrams used to illustrate the operation of the positioning device involved in the embodiment.

[0036] Figure 6 (a) is a schematic diagram illustrating the operation of the positioning device according to the embodiment. Figure 6(b) is a schematic diagram showing the positional relationship between the base plate and the pin of the positioning device involved in the embodiment.

[0037] Figure 7 (a) to (c) are schematic diagrams illustrating the operation of the positioning and transport system according to the embodiments.

[0038] Figure 8 This is a block diagram representing the structure of a positioning and transportation system.

[0039] Figure 9 (a) is a flowchart showing the operation of the moving parts 100A to 100D of the positioning device. Figure 9 (b) is a flowchart showing the operation of the transport device 20. Detailed Implementation

[0040] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. For convenience, mutually orthogonal X-axis, Y-axis, and Z-axis are indicated in each figure. The XY plane is parallel to the horizontal plane, and the Z-axis direction is vertical. The positive side of the Z-axis is upward, and the negative side of the Z-axis is downward. In the following description, moving upward and downward means moving towards the positive and negative sides of the Z-axis, respectively.

[0041] <Implementation Method>

[0042] [Location-based Delivery System]

[0043] A brittle material substrate, such as a glass substrate (hereinafter referred to as "substrate F"), is formed into a final product through various processes. Such processes include, for example, dividing the mother substrate into substrates F of a specified size, forming scribe lines on the divided substrates F, and breaking the substrates F along the scribe lines. In each process, the substrate F is fed into a specified processing table, and when one process is completed, it is sent to another processing table for the next process.

[0044] The positioning and transporting system described in this embodiment will be described as a transporting system for performing the following operations: receiving a worktable on which a substrate is placed at a predetermined position, positioning the substrate F relative to the worktable, and then transporting the worktable and the substrate together to the scribing apparatus.

[0045] Examples of substrate F include resin substrates made of organic materials such as polyimide resin, polyamide resin, PET and other polyester resins, polyethylene resin, polypropylene resin and other polyolefin resins, and polystyrene resin, polyvinyl chloride resin and other polyethylene resins (including films and sheets; the same applies hereinafter). The resin substrate can be laminated with different substrates; for example, it can be a substrate in which PET, polyimide resin, and PET are laminated sequentially from the bottom layer. Other substrates include glass substrates, ceramic substrates such as low-temperature sintered ceramics or high-temperature sintered ceramics, silicon substrates, compound semiconductor substrates, sapphire substrates, and quartz substrates. Furthermore, substrate F can have thin films or semiconductor materials that are not brittle attached to or contained on its surface or internally. In this embodiment, an alumina substrate will be used as substrate F for explanation.

[0046] In this embodiment, the substrate F, which is formed into a square shape, is positioned.

[0047] The positioning and transport system has a positioning device for positioning the substrate F relative to the worktable, and a transport device for simultaneously transporting the substrate F and the worktable.

[0048] [Positioning device]

[0049] First, refer to Figures 1-4 The structure of the positioning device 10 will be described.

[0050] Figure 1 This is a perspective view showing the structure of the positioning device 10. Figure 2 This is a perspective view showing the structure of the positioning device 10.

[0051] like Figure 1 and Figure 2 As shown, the positioning device 10 has four moving parts 100A to 100D, a pin 110, a support member 120, four connecting rods 130A to 130D, a drive unit 140, and a detection unit 150. The positioning device 10 is mounted on the frame 2.

[0052] Figure 3 Viewed from the bottom (negative Z-axis side). Figure 2 A three-dimensional image. In Figure 2 and Figure 3 The frame 2 and drive unit 140 are omitted.

[0053] like Figure 2 As shown, four moving parts 100A to 100D are arranged around a shaft member 124 that supports the support member 120 (see reference). Figure 4The four moving parts 100A to 100D can be divided into two groups: moving parts 100A and 100C, and moving parts 100B and 100D. The moving parts 100A and 100C group and the moving parts 100B and 100D group are arranged in pairs. That is, the moving parts 100A and 100C are positioned relative to the shaft member 124 (see reference 124). Figure 4 The moving parts 100B and 100D are positioned symmetrically relative to the shaft member 124 (see reference). Figure 4 The moving parts 100A and 100C are arranged symmetrically. Moving parts 100B and 100D are arranged along the X-axis, and moving parts 100A and 100D are arranged along the Y-axis. That is, the positions of moving parts 100A and 100C are aligned with those of moving parts 100B and 100D via axis member 124 (see reference). Figure 4 The center is 90 degrees apart.

[0054] Since each of the four moving parts 100A to 100D is constructed in the same manner, the structure of moving part 100A will be described as representative.

[0055] The moving part 100A includes a sliding member 101, a connecting member 102, a magnet 103, and a shaft 104. The magnet 103... Figure 2 Not shown in the image, in Figure 5 (a)~ Figure 6 As shown in (a).

[0056] The sliding member 101 is a plate-shaped member formed in an L-shape. For example... Figure 2 and Figure 3 As shown, four holes 101b to 101e are formed on the bottom surface 101a of the sliding member 101. Holes 101b to 101e are stepped holes. Holes 101b to 101e can be divided into two groups: holes 101b and 101c, and holes 101d and 101e.

[0057] The groups of holes 101b and 101c are arranged in the Y-axis direction. The groups of holes 101d and 101e are also arranged in the same way. The group of holes 101b and 101c is arranged closer to the support member 120 than the group of holes 101d and 101e. In addition, the distance between holes 101d and 101e is narrower than the distance between holes 101b and 101c.

[0058] The arrangement of holes 101b to 101e is also the same at the sliding member 101 of the moving part 100C.

[0059] In the moving parts 100B and 100D, the groups of holes 101b and 101c are arranged in the X-axis direction. The groups of holes 101d and 101e are also arranged in the same way. The group of holes 101b and 101c is arranged closer to the support member 120 than the group of holes 101d and 101e. Furthermore, the distance between holes 101d and 101e is narrower than the distance between holes 101b and 101c.

[0060] Furthermore, in the side wall 101f of the sliding member 101, three magnets 103 are provided on the side of the support member 120 (see reference). Figure 5 (a)~ Figure 6 (a)

[0061] The connecting member 102 is a rectangular block component. A stepped hole is formed on the upper surface of the connecting member 102. This stepped hole is used when connected to the connecting rod 130A. The connecting member 102 is connected to the magnet 103 provided on the sliding member 101. Therefore, the connecting member 102 is formed of a component made of magnetic material.

[0062] Alternatively, it can be configured such that a sheet made of magnetic material is attached to the side of the connecting member 102, which is attracted to the magnet 103.

[0063] Alternatively, the magnet 103 can be provided at the connecting member 102. In this case, the sliding member 101 is formed of a magnetic material. Furthermore, similar to the above, it is possible to configure the sliding member 101 to have a sheet made of magnetic material attached to it, which is attracted to the magnet 103.

[0064] The sliding member 101 has two through holes in its sidewall 101f and connecting member 102. With the sliding member 101 and connecting member 102 connected via magnet 103, shafts 104 are inserted into the two holes in the sidewall 101f and connecting member 102, respectively. The negative X-axis ends of the two shafts 104 are fixed by embedding them into the two holes in the locking plate 105. The positive X-axis ends of the two shafts 104 are fixed to the base 123, described later.

[0065] Based on this structure, the sliding member 101 and the connecting member 102 can move along the axis 104 while being integrated by the magnet 103.

[0066] As described above, the moving parts 100B, 100C, and 100D have the same structure as the moving part 100A.

[0067] Two pins 110 are provided in each sliding member 101 of the moving parts 100A to 100D. For example... Figure 2 and Figure 3As shown, the two pins 110 are respectively inserted into any two of the holes 101b to 101e. In this case, the pins 110 are inserted from the lower surface side (negative Z-axis side) of the bottom part 101a of the sliding member 101.

[0068] exist Figure 2 and Figure 3 In the sliding member 101 of the moving part 100A, two pins 110 are inserted into holes 101b and 101e. In the sliding member 101 of the moving part 100B, two pins 110 are inserted into holes 101c and 101d. In each sliding member 101 of the moving parts 100C and 100D, two pins 110 are inserted into holes 101b and 101c. The effect of this arrangement of the two pins 110 will be explained below.

[0069] like Figure 2 As shown, the support member 120 is composed of a base portion 121 and a shaft portion 122 disposed at the center of the base portion 121. A hole 120a in the Z-axis direction is formed in the center of the support member 120. The hole 120a is formed by connecting circular holes of the same diameter formed in the center of the base portion 121 and the shaft portion 122 respectively.

[0070] Furthermore, the base portion 121 of the support member 120 is a plate-shaped member formed in a cross shape. In the base portion 121, a stepped hole is formed at the end of each of the four plate members arranged radially at equal intervals. This stepped hole is used for the connection between the connecting rods 130A to 130D, described later, and the support member 120.

[0071] like Figure 3 A base 123 is disposed below the support member 120. The base 123 is formed by cutting off the four corners of a rectangular plate member. A circular hole 123a is formed in the center of the base 123 in the Z-axis direction.

[0072] Furthermore, in the moving part 100B, the ends of the two shafts 104 (the ends opposite to the ends fixed to the locking plate 105) are respectively inserted into two holes formed on the side of the base 123 and fixed thereto. The side of the base 123 with these two holes is located facing the moving part 100B.

[0073] The two shafts 104 respectively provided in the moving parts 100A, 100C, and 100D are also fixed by being embedded in the holes formed at the base 123 in the same way as the shaft 104 of the moving part 100B.

[0074] Figure 4 This is a perspective view showing a part of the structure of the positioning device 10.

[0075] like Figures 2-4As shown, the shaft member 124 is inserted into the hole 120a of the support member 120 and the hole 123a of the base 123. The shaft member 124 is fixed to the support member 120 by bearings and nuts. The lower end of the shaft member 124 is fixed to the base 123 by an expansion sleeve. Based on this structure, the shaft member 124 supports the support member 120 and the base 123. The support member 120 is rotatably supported relative to the base 123 by the shaft member 124.

[0076] like Figure 2 As shown, the four connecting rods 130A to 130D are plate-shaped members formed in an arc shape. Connecting rods 130A to 130D respectively connect the four moving parts 100A to 100D to the support member 120. The assembly of connecting rods 130A and 130C, and the assembly of connecting rods 130B and 130D, surround the shaft member 124 (see reference). Figure 4 The axes are arranged in a mutually orthogonal manner.

[0077] Both ends of the connecting rods 130A to 130D are connected to the connecting member 102 and the supporting member 120 of the moving parts 100A to 100D. For example... Figure 2 and Figure 4 As shown, in the connection between the connecting rod 130A and the moving part 100A, the stepped screw 131 is inserted into the hole of the connecting rod 130A from above, and a washer passes through the shaft portion of the stepped screw 131. The threaded portion of the stepped screw 131 is inserted into the stepped hole formed on the upper surface of the connecting member 102 of the moving part 100A and is threaded and fixed.

[0078] like Figure 2 and Figure 4 As shown, in the connection between the connecting rod 130A and the support member 120, the stepped screw 132 is inserted into the hole of the connecting rod 130A from below, and a washer passes through the shaft portion of the stepped screw 132. The threaded portion of the stepped screw 132 is inserted into the stepped hole formed in the base portion 121 and is threadedly fixed.

[0079] Therefore, when the support member 120 rotates, the connecting rod 130A rotates around the stepped screw 131.

[0080] Link 130C is similarly connected to the connecting member 102 and the support member 120 of the moving part 100C.

[0081] like Figure 2 and Figure 4 As shown, in the connection between the connecting rod 130B and the moving part 100B, the stepped screw 131 is inserted into the hole of the connecting rod 130B from above, and the shaft portion of the stepped screw 131 is covered by the collar 133. The threaded portion of the stepped screw 131 is inserted into the stepped hole formed on the upper surface of the connecting member 102 of the moving part 100B and is threaded and fixed.

[0082] like Figure 2 and Figure 4 As shown, in the connection between the connecting rod 130B and the support member 120, the stepped screw 132 is inserted into the hole of the connecting rod 130B from above, and a washer passes through the shaft portion of the stepped screw 132. The threaded portion of the stepped screw 132 is inserted into the stepped hole formed in the base portion 121 and is threadedly fixed.

[0083] Therefore, when the support member 120 rotates, the connecting rod 130B rotates around the stepped screw 131.

[0084] Link 130D and link 130B are similarly connected to the connecting member 102 and the support member 120 of the moving part 100D.

[0085] As described above, in the connection between the connecting members 102 of the connecting rods 130B and 130D and the moving parts 100B and 100D, the shaft portion of the stepped screw 131 is covered by a collar 133. Therefore, the connecting rods 130B and 130D, sandwiching the support member 120, are positioned at a different height from the connecting rods 130A and 130C. Thus, when the support member 120 rotates, the connecting rods 130A to 130D can rotate independently.

[0086] Furthermore, the connecting rods 130A to 130D are formed in an arc shape. Therefore, when the support member 120 rotates about the shaft member 124, the connecting rods 130A to 130D can rotate while avoiding interference with the shaft member 124.

[0087] Furthermore, the structure for avoiding interference between connecting rods 130A to 130D and shaft member 124 is not limited to this. When connecting rods 130A to 130D rotate without interfering with shaft member 124, connecting rods 130A to 130D may not be formed in an arc shape, but in a straight shape.

[0088] Back Figure 1 The drive unit 140 includes a rotary driver 141 and gears 142 and 143. Gear 142 is mounted below the rotary driver 141. Gear 143 is configured to mesh with gear 142.

[0089] like Figure 4 As shown, gear 143 has a central hole 143a. Hole 143a is a stepped hole. Gear 143 is threaded to the upper surface of the shaft portion 122 of support member 120 by a screw (not shown). Thus, gear 143 and support member 120 are integrated. Furthermore, shaft member 124 is inserted into hole 143a of gear 143 from the positive side of Z-axis. Bearing is fitted between shaft member 124 and hole 143a.

[0090] Based on this structure, when Figure 1When the rotary drive 141 rotates, the gear 142 rotates. Then, the gear 143 meshing with the gear 142 rotates about the shaft member 124. As described above, since the support member 120 is integrated with the gear 143, the support member 120 rotates integrally with the gear 143.

[0091] Back to Figure 1 A block-shaped member 144 is provided above the gear 143. The block-shaped member 144 has a through hole in the Z-axis direction, into which the shaft member 124 is inserted and fixed (see reference). Figure 4 A rotary drive 141 is also provided in the block member 144. The side of the block member 144 is fixed to the frame 2. Thus, the positioning device 10 is mounted on the frame 2 via the block member 144.

[0092] like Figure 2 and Figure 3 As shown, the detection unit 150 has four sensors 151 to 154. Sensors 151 to 154 are provided on the holding member 155. For example, the holding member 155 disposed between the moving parts 100B and 100C is composed of three plates 155a to 155c arranged radially at equal intervals.

[0093] The plate 155a of retaining member 155 is fixed to the negative Z-axis side of base 123 by screws (not shown). Plate 155b is arranged along axis 104 provided between moving part 100B and base 123. Four sensors 151 to 154 are provided on plate 155b at a predetermined interval.

[0094] The plate 155c of the retaining member 155 is arranged along the axis 104 provided between the moving part 100C and the base 123. Four sensors 151 to 154 are provided on the plate 155c at a predetermined interval.

[0095] A retaining member 155 is also arranged between the moving parts 100A and 100D, and a detection part 150 (four sensors 151 to 154) is provided.

[0096] Sensors 151 to 154 are all used to detect the position of each connecting member 102. However, sensors 151 to 153 are set according to the size of the substrate F. For example, the outermost sensor 151 in the moving parts 100A to 100D is configured to correspond to the positions of the four corners when the positioning device 10 positions the substrate F of the largest size that can be positioned.

[0097] On the other hand, sensor 154 is located near the support member 120. Sensors 151 to 154 will be described in detail below.

[0098] [Operation of the positioning device]

[0099] Figure 5 (a)~ Figure 6 (a) is a top view schematically showing the positioning device 10 for illustrating the operation of the positioning device 10. Figure 6 (b) is in Figure 5 (b) and Figure 6 The plan view schematically shows the substrate F and pin 110 in state (a). Additionally, in... Figure 5 (a)~ Figure 6 In (a), for ease of explanation, only the moving parts 100A to 100D, the connecting rods 130A to 130D, the support member 120 and the base 123 are shown.

[0100] In addition, although Figure 5 (a)~ Figure 6 Substrate F is omitted in (a), but in the following description, it is used to describe the implementation. Figure 1 The substrate F shown is positioned in this case. In this case, the substrate F is placed on the worktable 210 (see reference). Figure 7 The state of (a)). Furthermore, the sensor described corresponding to the substrate F is based on... Figure 2 and Figure 3 The sensor 151 in the detection unit 150 described herein.

[0101] like Figure 5 As shown in (a), in the initial state, each sliding member 101 of the moving parts 100A to 100D is in contact with the locking plate 105. Figure 5 In (a), each sliding member 101 is connected to each connecting member 102 via a magnet 103. Figure 5 The positions of each connecting structural member 102 in (a) are called the “starting positions”.

[0102] from Figure 5 Starting from state (a), when the support member 120 rotates counterclockwise in the XY plane, the connecting rods 130A to 130D connected to the support member 120 also move with the rotation of the support member 120. Therefore, when the support member 120 rotates counterclockwise, the sliding members 101 and connecting members 102 of the moving parts 100A to 100D are pulled inward along the axis 104 via the connecting rods 130A to 130D. As a result, the sliding members 101 and connecting members 102 of the moving parts 100A to 100D move synchronously towards the support member 120 along the axis 104. As a result, the connecting rods 130A to 130D rotate clockwise around the stepped screw 131 in each connecting member 102.

[0103] As described above, the connecting rods 130A to 130D have the same structure and are connected to the support member 120. Furthermore, the moving parts 100A to 100D are constructed identically to each other, so that as the support member 120 rotates, the moving parts 100A to 100D move simultaneously and only by the same amount of movement toward the support member 120.

[0104] Then, when the sliding member 101 and the connecting member 102 of the moving parts 100A to 100D are located Figure 5 When in the position shown in (b), the two pins 110 respectively provided on each sliding member 101 abut against the base plate F. At this time, as shown in (b) Figure 6 As shown in (b), the four corners of the substrate F engage with two pins 110. Furthermore, the substrate F is clamped diagonally by a pair of pins 110 arranged diagonally. Therefore, the substrate F cannot move forward, backward, left, or right relative to the worktable 210 (see reference). Figure 7 (a) is positioned. Thus, the substrate F abuts against the pin 110 at the position where it is positioned, i.e. Figure 5 The position of the connecting component 102 in (b) is called the "positioning position".

[0105] At this time, constitute Figure 2 The sensor 151 of the detection unit 150 detects that the connecting member 102 is in the positioning position. As described above, the connecting member 102 being in the positioning position means that the pin 110 provided on the sliding member 101 is abutting against the substrate F. Thus, the substrate F is positioned by the pin 110. Therefore, "the connecting member 102 has reached the positioning position" means "the positioning of the substrate F has been implemented".

[0106] Therefore, by detecting the position of the connecting member 102 by the detection unit 150, it is possible to determine whether the substrate F is properly positioned.

[0107] In this embodiment, in order to detect the state of the substrate F (whether the substrate F is positioned), as shown in the following example... Figure 2 As described above, sensors 151 to 153 are positioned at locations corresponding to the dimensions of the substrate F.

[0108] Thus, when the connecting member 102 has reached the positioning position and then the support member 120 is rotated, as... Figure 6 As shown in (a), the sliding member 101 is separated from the connecting member 102. That is, because the pin 110 is provided in the sliding member 101, the substrate F becomes an obstruction, and each sliding member 101 cannot move further toward the support member 120 side, i.e., the inside of the substrate F.

[0109] On the other hand, each connecting member 102 is connected to connecting rods 130A to 130D respectively. Therefore, when the support member 120 continues to rotate, each connecting member 102 overcomes the attraction force generated by the magnet 103 and separates from each sliding member 101.

[0110] Subsequently, the connecting member 101, which has been separated from the sliding member 101, moves toward the support member 120 as the support member 120 rotates. In this embodiment, the position of the connecting member 102 that is closest to the support member 120 is referred to as the "end position".

[0111] Sensor 154 detects that the connecting member 102 is in the end position. Therefore, it is possible to ensure that the connecting member 102 properly separates from the sliding member 101 at the positioning position and reaches the end position.

[0112] After the connecting member 102 is in the final position, when the support member 120 rotates in the opposite direction (i.e., clockwise), the connecting member 102 moves to the positioning position. At this time, the connecting rods 130A to 130D move with the rotation of the support member 120.

[0113] When the connecting member 102 reaches the positioning position, the connecting member 102 is connected to the sliding member 101 via the magnet 103. This is consistent with... Figure 5 This corresponds to state (b). Then, when the support member 120 rotates, the connecting member 102 and the sliding member 101 become one and move towards the starting position. This is consistent with... Figure 5 The state corresponding to (a).

[0114] In this way, the sliding member 101 and the connecting member 102 move from the starting position to the positioning position based on the counterclockwise rotation of the support member 120. Figure 5 (a) and (b) only when the connecting structural member 102 moves from the positioning position to the ending position. Figure 6 (a) Then, the connecting member 102 moves from the end position to the positioning position again based on the clockwise rotation of the support member 120. When the connecting member 102 reaches the positioning position, it moves from the positioning position to the starting position while connected to the sliding member 101 via the magnet 103.

[0115] In addition, when the sliding member 101 and the connecting member 102 reach the positioning position, only the connecting member 102 moves from the positioning position to the end position and then moves from the end position to the positioning position again. During this process, the positioning substrate F is transported by the transport device 20, which will be described later.

[0116] [The operation of the transport device]

[0117] Next, the transport of the substrate F via the transport device 20 will be described.

[0118] Figure 7 (a) to (c) are schematic diagrams illustrating the case where the transport device 20 transports the substrate F to the positioning device 10 in the positioning transport system. Additionally, only... Figure 7 (b) omits the transportation department 200.

[0119] like Figure 7 As shown in (a), the transport device 20 includes a transport section 200, a worktable 210, and a pressure application section 220. The transport section 200 is, for example, a robotic arm. The transport section 200 transports the substrate F to a predetermined position by holding the worktable 210 and rotating or lifting the worktable 210 in the XY plane.

[0120] Multiple tiny holes are formed in the worktable 210. When negative pressure is applied to the worktable 210 from an air pressure source (not shown) through the pressure application section 220, negative pressure is applied to the substrate F through the aforementioned multiple holes. As a result, the substrate F is adsorbed onto the worktable 210.

[0121] In contrast, when positive pressure is applied to the worktable 210 from an air pressure source (not shown) through the pressure application section 220, positive pressure is applied to the substrate F through the aforementioned plurality of holes. As a result, the substrate F is released from its adhesion to the worktable 210 and can move on the worktable 210.

[0122] When the transport device 20 with the above-described structure transports the substrate F, such as Figure 7 As shown in (a), the transport unit 200 transports the worktable 210, on which the substrate F is placed, to a position directly below the positioning device 10. At this time, the pressure applying unit 200 applies negative pressure to the substrate F across the worktable 210. This is to attract the substrate F onto the worktable 210 and prevent the substrate F from moving on the worktable 210. Then, the transport unit 200 raises the worktable 210 to a predetermined position for positioning the substrate F.

[0123] like Figure 7 As shown in (b), when the worktable 210 is in a predetermined position via the transport unit 200, the substrate F is positioned by the positioning device 10. Figure 7 The arrow in (b) indicates that each sliding member 101 and each connecting member 102 of the moving parts 100A to 100D moves inward toward the substrate F and positions the substrate F by means of the pin 110.

[0124] Furthermore, at this time, positive pressure is applied to the substrate F via the pressure application unit 200 across the worktable 210. As a result, the substrate F's adhesion to the worktable 210 is released, making it possible to move the substrate F on the worktable 210 and position the substrate F. Additionally, Figure 7 The state of (b) and Figure 5 The state corresponding to (b).

[0125] like Figure 7 As shown in (c), when the positioning of the substrate F is completed, the transport unit 200 raises and lowers the worktable 210. At this time, the pressure applying unit 200 applies negative pressure to the substrate F through the worktable 210. As a result, the substrate F can be maintained in the state where it is positioned relative to the worktable 210.

[0126] also, Figure 7 When (c) occurs, in the positioning device 10, the connecting structural member 102 separates from the sliding member 101 and moves towards the end position. Figure 6 (a)). The connecting member 102 moves from the end position back to the positioning position. At the positioning position, the connecting member 102, connected to the sliding member 101 via the magnet 103 (Figure (b)), moves from the positioning position to the starting position. Figure 5 (a)

[0127] Then, the transport device 20 transports the worktable 210 to the scribing device, for example. Thus, the substrate F is scribed.

[0128] Figure 8 This is a block diagram representing the structure of the positioning and transportation system 1. For example... Figure 8 As shown, the positioning and transportation system 1 not only has the above-mentioned structure, but also has a control unit 30, an input unit 31 and an alarm unit 32.

[0129] The control unit 30 includes arithmetic processing circuits such as a CPU, and memory such as ROM, RAM, and hard disk. The control unit 30 controls each part according to the program stored in the memory.

[0130] The input unit 31, consisting of a touch panel or similar component, accepts information input by the user. The alarm unit 32, consisting of a display or speaker or similar component, alerts the user to specified information.

[0131] Figure 9 (a) is a flowchart illustrating the operation of the moving parts 100A to 100D of the positioning device 10. This control is performed by... Figure 8 The control unit 30 shown is executed. The following will be referred to as appropriate. Figure 9 The flowchart of (a) and the above Figure 5 (a)~ Figure 6 (b) explains the control of the control unit 30.

[0132] exist Figure 9 In the "Start" of flowchart (a), each connecting member 102 of the moving parts 100A to 100D is located in a state where it is connected to each sliding member 101 via the magnet 103. Figure 5 The starting position is shown in (a).

[0133] In step S11, the control unit 30 drives the drive unit 140. Specifically, the rotary driver 141 is driven forward. When the rotary driver 141 is driven forward, the gear 142 rotates, and the gear 143 rotates due to the rotation of the gear 142. As a result, the support member 120 rotates counterclockwise, and as described above, the sliding member 101 and the connecting member 102 of the moving parts 100A to 100D move from the starting position to the positioning position. When the sliding member 101 and the connecting member 102 move to the positioning position... Figure 5 When the positioning position shown in (b) is reached, the substrate F is positioned as described above.

[0134] Then, as the rotary drive 141 continues to drive forward, each connecting member 102 separates from the sliding member 101. Then, as... Figure 6 As shown in (a), the connecting member 102 moves individually to the end position.

[0135] In step S12, the control unit 30 determines whether the connecting member 102 has reached the end position. The control unit 30 makes the determination based on the detection result of the sensor 154 located at the position closest to the support member 120.

[0136] When sensor 154 detects that the connecting member 102 has reached the end position, control unit 30 determines that the connecting member 102 has reached the end position (step S12: Yes). In this case, control unit 30 stops the forward drive of rotary driver 141 (step S13).

[0137] When sensor 154 does not detect that the connecting member 102 has reached the end position, control unit 30 determines that the connecting member 102 has not reached the end position (step S12: No). Then, control unit 30 continues to drive rotary driver 141 in the forward direction.

[0138] In step S14, the control unit 30 reverse-drives the rotary driver 141. When the rotary driver 141 reverse-drives, gear 142 rotates, and gear 143 rotates due to the rotation of gear 142. As a result, the support member 120 rotates clockwise. As a result, the support member 120 rotates clockwise, and as described above, the sliding member 101 and the connecting member 102 of the moving parts 100A to 100D move from the end position to the positioning position.

[0139] When the connecting component 102 is located Figure 5 When positioned as shown in (b), the connecting member 102 and the sliding member 101 are connected via the magnet 103. Then, the connecting member 102 and the sliding member 101 move toward the starting position.

[0140] In step S15, the control unit 30 determines whether the connecting member 102 has reached the starting position. If the connecting member 102 has reached the starting position (step S15: Yes), the control unit 30 stops the reverse drive of the rotary driver 141 (step S16). Conversely, if the connecting member 102 has not reached the starting position (step S15: No), the control unit 30 continues to reverse drive the rotary driver 141.

[0141] Thus, the positioning of one substrate F is completed. If there is a substrate F that should be positioned, steps S11 to S16 are repeated.

[0142] Figure 9 (b) is a flowchart illustrating the operation of the conveying device 20. This control is provided by... Figure 8 The control unit 30 shown is executed. The following will be referred to as appropriate. Figure 9 The flowchart of (b) and the above Figure 5 (a)~ Figure 7 (c) explains the control of the control unit 30.

[0143] Figure 9 In flowchart (b), "start" refers to the state where the substrate F, which is being positioned, is placed on the worktable 210 of the transport device 20, and negative pressure is applied to the substrate F through the pressure application unit 220 across the worktable 210. Furthermore, in Figure 9 Before process (b) begins, the user... Figure 8 The input section 31 inputs the dimensions of the substrate F. Therefore, the control section 30 specifically designates a sensor from the sensors 151 to 153 of the detection section 150 that corresponds to the dimensions of the substrate F.

[0144] like Figure 9 As shown in (b), in step S21, the control unit 30 drives the transport unit 200 to transport the worktable 210 to the designated position for positioning. Figure 7 (the position of (b)).

[0145] When the substrate F is positioned at a predetermined location by the process in step S21, in step S22, the control unit 30 applies positive pressure to the substrate F by the pressure application unit 220. This releases the substrate F from its attachment to the worktable 210. Therefore, the substrate F can move on the worktable 210.

[0146] In step S23, the control unit 30 determines whether each connecting member 102 of the moving parts 100A to 100D has moved to a position corresponding to the size of the substrate F by using the detection unit 150 provided in the moving parts 100A to 100D.

[0147] In this embodiment, such as Figure 2As shown, detection units 150 are provided for each of the moving parts 100A to 100D. The control unit 30 determines whether all four detection units 150 have detected that each connecting member 102 of the moving parts 100A to 100D is in a position corresponding to the size of the substrate F. For example, if the size of the substrate F is the same as the size when the connecting member 102 is in the position of the sensor 151, the control unit 30 determines that the positioning of the substrate F is complete when all four sensors 151 have detected the connecting member 102.

[0148] For example, if the sensor 151, which corresponds to the moving part 100A among the four sensors 151, fails to detect the connecting member 102, it is possible that the connecting member 102 in the moving part 100A has separated from the magnet 103 before reaching the positioning position. In this case, because the pin 110 provided in the sliding member 101 of the moving part 100A cannot accurately lock the substrate F, the positioning of the substrate F cannot be accurately performed.

[0149] Alternatively, the sensor 151 installed in the moving part 100A may malfunction. In this case, it would be impossible to determine whether the substrate F is accurately positioned.

[0150] Based on this reasoning, when all four sensors 151 detect the connecting component 102, the control unit 30 determines that the substrate F has been positioned.

[0151] Therefore, in step S23, if the control unit 30 determines that the positioning of the substrate F is incomplete (step S23: No), the control unit 30 triggers an alarm on the alarm unit 32 (step S24). The alarm from the alarm unit 32 can be implemented, for example, by displaying "abnormal" on a display. Alternatively, an alarm can be triggered by emitting a predetermined alarm sound from the alarm unit 32. Furthermore, if the alarm unit 32 has an indicator light, the indicator light can also be illuminated to trigger an alarm.

[0152] In this case, after the user has performed checks on the positioning device 10, the substrate F is repositioned.

[0153] If the control unit 30 determines in step S23 that the positioning of the substrate F has been completed (step S23: Yes), the control unit 30 causes the pressure application unit 220 to apply negative pressure to the substrate F. As a result, the substrate F is adsorbed onto the worktable 210 (step S25).

[0154] In step S26, the control unit 30 drives the transport unit 200 to transport the substrate F to the scribing apparatus.

[0155] Thus, the positioning and transport of one substrate F is completed. Furthermore, when there is a substrate F that should be positioned and transported, the control unit 30 repeatedly executes the processing steps S21 to S26.

[0156] <Effects of the Implementation Method>

[0157] Based on the structure of this embodiment, the following effects are achieved.

[0158] like Figure 1 and Figure 2 As shown, the connecting rods 130A to 130D of the positioning device 10 are connected to the support member 120 and the moving parts 100A to 100D, respectively. In addition, two pins 110 are provided in each of the moving parts 100A to 100D.

[0159] Based on this structure, when the drive unit 140 rotates the support member 120 in a predetermined direction, the moving parts 100A to 100D move simultaneously toward the support member 120 as the support member 120 rotates. When the moving parts 100A to 100D move in this way, the substrate F is clamped in the in-plane direction by the pins 110 arranged in the moving parts 100A to 100D. Thus, the substrate F is positioned near the center of the moving parts 100A to 100D.

[0160] Therefore, by means of a single drive unit 140, the moving units 100A to 100D can be moved synchronously, thereby positioning the substrate F at a predetermined position. Thus, the substrate F can be positioned efficiently with a simple structure.

[0161] like Figure 1 , Figure 2 as well as Figure 5 As shown in (a), the sliding member 101 of each of the moving parts 100A to 100D is connected to the connecting member 102 via a magnet 103. Each connecting member 102 is connected to the connecting rods 130A to 130D.

[0162] Based on this structure, when pin 110 abuts against substrate F, substrate F becomes an obstruction, preventing each sliding member 101 from moving further towards substrate F. On the other hand, since each connecting member 102 is connected to connecting rods 130A to 130D, when the support member 120 subsequently rotates further, each connecting member 102 overcomes the attraction force generated by the magnet 103, separates from the sliding member 101, and moves individually towards the support member 120. Therefore, when pin 110 abuts against substrate F, excessive load is not applied to substrate F. Thus, damage or deformation of substrate F can be prevented.

[0163] like Figure 2 and Figure 3As shown, holes 101b to 101e are formed in the sliding member 101, and two pins 110 are respectively inserted into any two of these holes. When holes 101b to 101e are divided into groups of holes 101b and 101c and groups of holes 101d and 101e, holes 101b and 101c and holes 101d and 101e are arranged to be separated in a direction intersecting the moving directions of the moving parts 100A to 100D. Furthermore, the spacing between holes 101b and 101c is different from the spacing between holes 101d and 101e.

[0164] Based on this structure, in a top view, when the substrate F has a pair of corners in the diagonal direction, the substrate F can be positioned by engaging the corners of the substrate F with two pins 110 arranged in each sliding member 101 of the moving part 100A to 100D.

[0165] Furthermore, holes 101b to 101e are formed in each sliding member 101 of the moving parts 100A to 100D. Therefore, by changing the holes into which the pins 110 are inserted, the spacing between the two pins 110 can be changed. For example, when the size of the substrate F is large, a wider spacing between the two pins 110 results in more stable positioning of the substrate F. Therefore, with the above structure, the substrate F can be positioned more stably according to its size.

[0166] Furthermore, when using a robotic arm as a transport unit 200, when transporting the substrate F (placed on the worktable 210) to a predetermined position on the positioning device 10, the position of the pin 110 can be appropriately adjusted to prevent the arm of the transport unit 200 from interfering with the pin 110.

[0167] For example, in this embodiment, in the moving parts 100A and 100B, the holes 101b, 101c and 101d, 101e, which are arranged in a direction intersecting the moving direction of the connecting member 102, do not have the two pins 110 inserted. In this embodiment, in the sliding member 101 of the moving part 100A, the two pins 110 are inserted into the holes 101b and 101e. In the sliding member 101 of the moving part 100B, the two pins 110 are inserted into the holes 101c and 101d.

[0168] like Figure 1 , Figure 2 , Figure 4 As shown, the moving parts 100A to 100D and the connecting rods 130A to 130D are arranged at different positions around the shaft member 124.

[0169] Based on this structure, the substrate F can be positioned at multiple different locations on its outer periphery by clamping with pins 110. Therefore, the substrate F can be positioned accurately.

[0170] like Figure 1 , Figure 2, Figure 4 As shown, the groups consisting of moving parts 100A, 100C and connecting rods 130A, 130C, and the groups consisting of moving parts 100B, 100D and connecting rods 130B, 130D are arranged orthogonally to each other around the shaft member 124. Furthermore, the two pins 110 provided on the sliding members 101 of the moving parts 100A, 100C are arranged to be separated in a direction intersecting the moving direction of the moving parts 100A, 100C. The two pins 110 provided on the sliding members 101 of the moving parts 100B, 100D are similarly arranged.

[0171] Based on this structure, when the substrate F is square in top view, the two pins 110 can be engaged at the corners of the substrate F. Therefore, the square substrate F can be accurately positioned.

[0172] like Figure 7 As shown in (a) to (c), in the positioning and transporting system, the transport unit 200 of the transport device 20 transports the worktable 210, which holds the substrate F, to a predetermined position. The worktable 210 releases the substrate F from its adsorption during the positioning of the substrate F by the positioning device 10, and performs an adsorption operation on the substrate F based on the positioning of the substrate F by the positioning device 10.

[0173] Based on this structure, the substrate F positioned by the positioning device 10 maintains its positioned state and can be transported to a specified position in this state.

[0174] like Figure 2 and Figure 3 As shown, the positioning device 10 has a detection unit 150 for each connecting structural member 102 of the moving parts 100A to 100D, namely, four sensors 151 to 154.

[0175] When pin 110 abuts against substrate F, the connecting members 102 of moving parts 100A to 100D separate from sliding member 101 and move individually to the end position. In this way, the position where the connecting members 102 separate from sliding member 101 is the position where substrate F is positioned by pin 110. Therefore, if the positions of all connecting members 102 are normally detected by sensors 151 to 153 included in detection unit 150, it can be determined that substrate F has been positioned.

[0176] <Example of Change>

[0177] The embodiments of the present invention can be adapted and varied within the scope of the technical concept shown in the claims.

[0178] In the above embodiment, although a square substrate F is used, a rectangular substrate F can also be used.

[0179] In this configuration, a group of movable parts 100A and 100C is arranged along the extension of one diagonal of the substrate F, and movable parts 100B and 100D are arranged along the extension of the other diagonal. Link 130A is connected to both the movable part 100A and the support member 120. Similarly, links 130B to 130D are connected to the movable parts 100B to 100D and the support member 120, respectively.

[0180] Furthermore, the two pins 110 provided in each sliding part 101 are configured to clamp the four corners of the substrate F.

[0181] Furthermore, the substrate F can also be formed as a circle. Since the moving parts 100A to 100D are arranged radially at equal intervals around the shaft member 124, when the moving parts 100A to 100D move toward the substrate F, the pin 110 abuts against the outer periphery of the circular substrate. As a result, the circular substrate F can be accurately positioned.

[0182] Furthermore, when the substrate F is formed into a circle, since it is only necessary to make the pin 110 abut against the outer periphery of the substrate F from four directions, one pin 110 can also be provided in each sliding member 101.

[0183] Furthermore, in the above embodiment, although there are four holes for the insertion pin 110, the number can be appropriately increased.

[0184] Furthermore, in the above embodiment, four moving parts and connecting rods are provided. However, if the shape of the substrate F is square or rectangular, one pair of moving parts and one pair of connecting rods are sufficient.

[0185] In this configuration, movable parts 100A and 100C are arranged along the extension of one diagonal line of the substrate F. Correspondingly, connecting rods 130A and 130C are provided. As a result, the two corners of the substrate F (the two corners located on the diagonal line) are clamped by pins 110. Therefore, the substrate F can be accurately positioned.

[0186] Furthermore, in the above embodiment, in order to determine whether the positioning of the substrate F has been completed, three sensors 151-153 detect that the connecting member 102 is in the positioning position. These sensors can also be adjusted according to changes in the size of the substrate F.

[0187] Furthermore, in the above embodiment, although the three sensors 151 to 153 are fixed to the holding member 155, the structure for detecting the position of the connecting member 102 is not limited to this.

[0188] For example, it can also be configured such that a sliding rheostat is installed from the start position to the end position of the connecting member 102 to detect the amount of movement of the sliding contact. In this case, the sliding contact of the rheostat is connected to the connecting member 102. As the connecting member 102 moves, the sliding contact moves. Thus, the amount of movement of the connecting member 102, i.e., the amount of movement of the sliding contact, is detected.

[0189] Based on this structure, it is not necessary to set up multiple sensors. A single sliding contact can be used to detect that the connecting component 102 has reached the positioning position relative to multiple substrates F.

[0190] Furthermore, in the above embodiment, although a sensor 154 is provided for detecting that the connecting member 102 has reached the end position, if a sliding rheostat is used, it is possible to detect that the connecting member 102 has reached the end position at the same time.

[0191] Alternatively, a scale can be provided on the holding member 155, and the user can manually move the sensor 151 according to the size of the substrate F. In this case, the detection unit 150 (sensor 151) can also accurately detect the positioning position of the substrate F (the position of the connecting structure 102) according to the size of the substrate F.

[0192] Explanation of reference numerals in the attached figures

[0193] 1: Location-based delivery system;

[0194] 10: Positioning device;

[0195] 20: Transport device;

[0196] 100A~100D: Moving parts;

[0197] 101: Sliding component;

[0198] 101b~101e: Hole;

[0199] 102: Connecting structural components;

[0200] 103: Magnet;

[0201] 110: Sell;

[0202] 120: Supporting component;

[0203] 124: Shaft member;

[0204] 130A~130D: Connecting rod;

[0205] 140: Drive unit;

[0206] 150: Testing Department;

[0207] 200: Transportation Department;

[0208] 210: Workbench.

Claims

1. A positioning device, characterized in that, have: At least one pair of movable parts, which are supported in a manner that allows them to approach and move away in a direction parallel to the substrate; Pins, respectively disposed on the pair of movable parts, lock the outer periphery of the substrate; A support member, which is disposed between the pair of movable parts, is axially supported by a shaft member perpendicular to the base plate; A pair of connecting rods, which respectively connect the supporting member and each of the moving parts; as well as The drive unit causes the support member to rotate relative to the shaft member. The two pins are arranged on the moving part in a manner that separates them in a direction intersecting the moving direction of the moving part. In the moving part, a plurality of sets of two holes for inserting the two pins are provided, spaced apart in the moving direction of the moving part. The spacing between the holes in each group is different from that in the others.

2. The positioning device according to claim 1, characterized in that, The moving part has: A sliding member, which is provided with the pin; A connecting member, which is disposed on the side of the support member relative to the sliding member and connected to the connecting rod; as well as A magnet that causes the sliding member and the connecting member to attract each other.

3. The positioning device according to claim 1 or 2, characterized in that, The pair of moving parts and the pair of connecting rods are arranged in multiple positions around the shaft member.

4. The positioning device according to claim 3, characterized in that, The two sets of the pair of moving parts and the pair of connecting rods are respectively arranged at two mutually orthogonal positions around the axis member. In each of the moving parts, two pins are arranged separately in a direction that intersects the moving direction of the moving part.

5. A positioning and delivery system, characterized in that, have: Positioning device, used to position the substrate; and A transport device that transports the substrate to the positioning device. The positioning device has: At least one pair of movable parts, which are supported in a manner that allows them to approach and move away in a direction parallel to the substrate; Pins, respectively disposed on the pair of movable parts, lock the outer periphery of the substrate; A support member, which is disposed between the pair of movable parts, is axially supported by a shaft member perpendicular to the base plate; A pair of connecting rods, which respectively connect the supporting member and each of the moving parts; as well as The drive unit causes the support member to rotate relative to the shaft member. The two pins are arranged on the moving part in a manner that separates them in a direction intersecting the moving direction of the moving part. In the moving part, a plurality of sets of two holes for inserting the two pins are provided, spaced apart in the moving direction of the moving part. The spacing between the holes in each group is different from that in the others.

6. The positioning and transportation system according to claim 5, characterized in that, The conveying device has: A worktable, which holds the substrate; and The transport department, which transports the aforementioned workbench, The worktable is configured to adsorb the substrate by air pressure applied by an air compressor. During the positioning of the substrate by the positioning device, the transport device releases the substrate from adsorption, and performs the adsorption action of the substrate based on the fact that the substrate has been positioned by the positioning device.

7. The positioning and transportation system according to claim 6, characterized in that, The positioning device has a detection unit for detecting the movement position of the moving part. The conveying device initiates the adsorption action of the worktable on the substrate based on the detection unit's finding that the moving part has moved to a position corresponding to the size of the substrate.

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