An integrated test device for probe detection tooling and working method thereof

Abstract

The present invention discloses an integrated test device for a probe detection tool and a working method thereof, comprising a detection mechanism and a main control terminal, wherein the detection mechanism comprises a mechanical part fatigue detection component and a probe performance test component; the mechanical part fatigue test component comprises a tool mounting seat and a matching reciprocating pressurizing mechanism, wherein the reciprocating pressurizing mechanism comprises a pressurizing workpiece mounted on the tool mounting seat and a numerically controlled reciprocating drive device connected to the pressurizing workpiece; the probe performance test component comprises a probe electrical performance test component, wherein the probe electrical performance test component comprises a tool fixture and an electrical performance test module mounted on the tool fixture, wherein the electrical performance test module comprises a numerically controlled lifting and interfering probe mounted above the tool fixture and a conducting circuit matched with the lifting and interfering probe. The advantages of the present invention are that the detection equipment is miniaturized and the detection process is integrated, thereby effectively improving the detection efficiency and reducing the detection cost.

Description

Technical Field

[0001] The invention relates to the field of probe detection processing, in particular to an integrated testing device of a probe detection tooling and a working method thereof. Background Art

[0002] The essence of a series of modern technologies after the Second Industrial Revolution is based on integrated circuits and chip technology. With the development of modern technology, whether it is digital terminals of computers and mobile phones or former civilian mechanical equipment such as automobiles and home appliances, the performance of these equipment needs to rely on basic chip technology progress. Based on this factor, in contemporary industry, the demand for chips has increased exponentially, and with it, the demand for chip testing industry necessary for chip production has also increased steadily. In the chip testing operation, the most basic and indispensable workpiece is the chip probe testing tooling. In order to ensure the smooth progress of chip testing, the strength and quality of the probe testing tooling must be strictly controlled. At present, the quality inspection of tooling is mostly carried out by professional testing agencies. The high cost, cumbersome handover process and slow circulation process have become the chronic problems in the field of tooling quality inspection.

[0003] To solve this problem, it is necessary to miniaturize traditional testing equipment and integrate the testing process so that testing and production can be kept in the same scene, thereby achieving efficient and convenient testing of tooling quality. Summary of the invention

[0004] Purpose of the invention: The purpose of the present invention is to provide an integrated test device and a working method of a probe detection tooling in view of the deficiencies in the prior art.

[0005] Technical solution: The integrated test device of the probe detection tooling described in the present invention comprises a detection mechanism and a main control terminal, wherein the detection mechanism comprises a mechanical part fatigue detection component and a probe performance test component;

[0006] A mechanical part fatigue test assembly, comprising a first base, a tooling mounting seat mounted on the first base, and a matching reciprocating pressurizing mechanism, wherein the reciprocating pressurizing mechanism comprises a pressurizing workpiece mounted on the tooling mounting seat and a numerically controlled reciprocating drive device connected to the pressurizing workpiece, wherein the numerically controlled reciprocating drive device is connected to a main control terminal;

[0007] A probe performance test assembly, including a probe electrical performance test assembly, the probe electrical performance test assembly including a second base, a fixture mounted on the second base, and an electrical performance test module mounted on the fixture, the electrical performance test module including a numerically controlled lifting and interfering probe mounted above the fixture and a conducting circuit coordinated with the lifting and interfering probe, the numerically controlled lifting and interfering probe being connected to a main control terminal;

[0008] The pressurized workpiece includes a transmission frame and a contact plate mounted on the bottom surface of the transmission frame, and the numerically controlled reciprocating drive device includes a pressurized servo motor mounted on the top of the first base and a pressurized transmission screw connected between the power end of the pressurized servo motor and the transmission frame;

[0009] The numerically controlled lifting and interfering probe comprises a probe body and a probe driving device connected between the probe body and the second base, wherein the probe driving device comprises a probe servo motor mounted on the top of the second base and a probe transmission screw connected between the power end of the probe servo motor and the probe body;

[0010] The conduction circuit includes an electric pen device hung on the second base;

[0011] The fixture includes an X-axis clamp block and a Y-axis clamp block that are engaged with each other and a conductive plate arranged in the central area of ​​the fixture. The X-axis clamp block and the Y-axis clamp block are both connected to a tightening adjustment arm, and the X-axis clamp block and the Y-axis clamp block clamp the conductive plate.

[0012] Preferably, the main control terminal is provided with a fatigue test control module and a probe lifting control module, the fatigue test control module is connected to the pressurized servo motor, and the probe lifting control module is connected to the probe servo motor.

[0013] Preferably, the probe electrical performance test assembly also includes a visual inspection device, which includes a high-power optical microscope lens and a high-definition display matched therewith. A horizontal suspension is installed on the side wall of the second base, and the high-power optical microscope lens and the high-definition display are connected to the second base through the horizontal suspension.

[0014] A working method of an integrated test device for a probe detection tool comprises the following steps:

[0015] S1. The probe test fixture to be tested is loaded onto the fixture mounting seat, and the fatigue test control module on the main control terminal is adjusted to set the stress parameter value and the number of repeated tests required for the compressive fatigue test of the probe test fixture to be tested. After the preset parameters are entered, they are fed back to the pressurizing servo motor, and the pressurizing servo motor performs reciprocating pressurizing action, and drives the pressurized workpiece to perform reciprocating motion through the pressurizing transmission screw, so that the contact plate repeatedly presses the probe test fixture to be tested, so as to realize the compressive fatigue test requirements for the mechanical part of the probe test fixture;

[0016] S2. After the compression fatigue test is completed, the probe detection tooling is unloaded from the tooling mounting seat and transferred to the tooling fixture, the probe lifting control module on the main control terminal is adjusted, and the descending process of the probe body is set to control the external stress of the probe body in the probe test tooling to test the probe part. Then the control parameters are sent to the probe servo motor, and the probe servo motor works to drive the probe body to descend and complete the compression through the probe transmission screw;

[0017] S3. Adjust and tighten the adjusting arm to control the X-axis clamp and the Y-axis clamp to clamp the probe test fixture to be tested. Then, use the two ends of the electric pen device to connect the probe body and the conductive plate respectively, and observe the reading feedback of the electric pen device to determine whether the probe part in the probe test fixture to be tested still maintains a complete connected state after the fatigue test, thereby completing the inspection of the probe test fixture to be tested.

[0018] Compared with the prior art, the present invention has the following beneficial effects: (1) the detection equipment is miniaturized and the detection process is integrated, which effectively improves the detection efficiency and reduces the detection cost;

[0019] (2) The main control mechanical components in the mechanical fatigue test assembly and the probe performance test assembly are connected to the main control terminal, and visual control is achieved by setting up the fatigue test control module and the probe lifting control module, thereby achieving fine control and automated operation of the detection process, facilitating the overall detection process management and the summary and analysis of the detection results, and also facilitating the subsequent configuration of the entire set of equipment on the assembly line for automated assembly line testing. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the general assembly structure of an integrated test device of a probe detection tooling and an integrated test device in a working method thereof of the present invention;

[0021] Figure 2 It is a structural schematic diagram of a mechanical part fatigue test assembly in an integrated test device of a probe detection tooling and a working method thereof of the present invention;

[0022] Figure 3 It is a structural schematic diagram of a probe performance test component in an integrated test device of a probe detection tooling and a working method thereof of the present invention;

[0023] Figure 4 The present invention is a schematic structural diagram of a tool fixture in an integrated testing device of a probe detection tool and a working method thereof.

[0024] In the figure: 1. first base; 2. tooling mounting seat; 3. reciprocating pressure mechanism; 31. pressure workpiece; 311. transmission frame; 312. contact plate; 32. CNC reciprocating drive device; 321. pressure servo motor; 322. pressure transmission screw; 4. second base; 5. tooling fixture; 51. X-axis clamp; 52. Y-axis clamp; 53. conduction plate; 54. tightening adjustment arm; 6. electrical performance test module; 61. conduction circuit; 62. CNC lifting and contact probe; 621. probe body; 622. probe drive device; 6221. probe servo motor; 6222. probe transmission screw; 7. main control terminal; 8. visual inspection device. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0027] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection, an electrical connection, or a communication connection; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] The technical solution of the present invention is described in detail with specific embodiments below. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described in detail in some embodiments.

[0029] An integrated test device for a probe detection tooling includes a detection mechanism and a main control terminal 7. The detection mechanism includes a mechanical part fatigue detection component and a probe performance test component. The specific device structure is referenced Figure 1 As shown, the description is as follows:

[0030] The mechanical part fatigue test assembly includes a first base 1, a tooling mounting seat 2 mounted on the first base 1, and a matching reciprocating pressurizing mechanism 3, the reciprocating pressurizing mechanism 3 includes a pressurizing workpiece 31 mounted on the tooling mounting seat 2 and a numerically controlled reciprocating drive device 32 connected to the pressurizing workpiece 31, and the numerically controlled reciprocating drive device 32 is connected to the main control terminal 7;

[0031] The probe performance test assembly includes a probe electrical performance test assembly, which includes a second base 4, a fixture 5 installed on the second base 4, and an electrical performance test module 6 mounted on the fixture 5. The electrical performance test module 6 includes a numerically controlled lifting and interfering probe 62 mounted above the fixture 5 and a conducting circuit 61 cooperating with the lifting and interfering probe. The numerically controlled lifting and interfering probe 62 is connected to the main control terminal 7.

[0032] refer to Figure 2 As shown, the specific structure of the pressure workpiece 31 and the CNC reciprocating drive device 32 is as follows: the pressure workpiece 31 includes a transmission frame 311 and a resistance plate 312 installed on the bottom surface of the transmission frame 311, and the CNC reciprocating drive device 32 includes a pressure servo motor 321 mounted on the top of the first base 1 and a pressure transmission screw 322 connected between the power end of the pressure servo motor 321 and the transmission frame 311. The combination of the pressure transmission screw 322 and the pressure servo motor 321 is used as the CNC reciprocating drive device 32. Compared with the use of a hydraulic cylinder, a uniform reciprocating motion rate can be applied to the pressure workpiece 31, making the overall compressive fatigue test more controllable.

[0033] refer to Figure 3 As shown, the specific structure of the CNC lifting and interfering probe 62 is as follows: the CNC lifting and interfering probe 62 includes a probe body 621 and a probe driving device 622 connected between the probe body 621 and the second base 4, and the probe driving device 622 includes a probe servo motor 6221 mounted on the top of the second base 4 and a probe transmission screw 6222 connected between the power end of the probe servo motor 6221 and the probe body 621.

[0034] The conducting circuit 61 includes an electric pen device mounted on the second base 4 .

[0035] refer to Figure 4As shown, the specific structure of the fixture 5 is as follows: the fixture 5 includes an X-axis clamp block 51 and a Y-axis clamp block 52 that are engaged with each other and a conductive plate 53 disposed in the center area of ​​the fixture 5. The X-axis clamp block 51 and the Y-axis clamp block 52 are both connected to a tightening adjustment arm 54, and the X-axis clamp block 51 and the Y-axis clamp block 52 clamp the conductive plate 53. The screw-in adjustment arm is used as an adjustment device for the X-axis clamp block 51 and the Y-axis clamp block 52, and the minute progress of the X-axis clamp block 51 and the Y-axis clamp block 52 can be magnified to the number of rotations of the screw-in adjustment arm, thereby achieving the need for fine adjustment.

[0036] The main control terminal 7 is provided with a fatigue test control module and a probe lifting control module, the fatigue test control module is connected to the pressurized servo motor 321, and the probe lifting control module is connected to the probe servo motor 6221. The main control mechanical components in the mechanical fatigue test assembly and the probe performance test assembly are connected to the main control terminal 7, and visual control is achieved by setting the fatigue test control module and the probe lifting control module, thereby achieving fine control and automated operation of the detection process, facilitating the overall detection process control and the summary and analysis of the detection results, and also facilitating the subsequent configuration of the entire set of equipment on the assembly line for automated assembly line detection.

[0037] The probe electrical performance test assembly also includes a visual inspection device 8, which includes a high-power optical microscope lens and a high-definition display matched therewith. A horizontal suspension is installed on the side wall of the second base 4, and the high-power optical microscope lens and the high-definition display are connected to the second base 4 through the horizontal suspension. The visual inspection device 8 composed of the high-power optical microscope lens and the high-definition display matched therewith can perform visual inspection on the surface of the probe contact part after the probe detection tooling is loaded on the tooling fixture 5 to identify tiny scratch damage.

[0038] The working method of using the integrated test device of the probe detection tooling provided by the technical solution to perform performance testing on the probe detection tooling is as follows:

[0039] S1. The probe test tooling to be tested is loaded onto the tooling mounting seat 2. The fatigue test control module on the main control terminal 7 is adjusted to set the stress parameter value and the number of repeated tests required for the compressive fatigue test of the probe test tooling to be tested. After the preset parameters are entered, they are fed back to the pressurizing servo motor 321. The pressurizing servo motor 321 performs a reciprocating pressurizing action, and drives the pressurizing workpiece 31 to perform a reciprocating motion through the pressurizing transmission screw 322, so that the contact plate 312 repeatedly presses the probe test tooling to be tested, so as to realize the compressive fatigue test requirements for the mechanical part of the probe test tooling;

[0040] S2. After the compression fatigue test is completed, the probe detection tooling is unloaded from the tooling mounting seat 2 and transferred to the tooling fixture 5. The probe lifting control module on the main control terminal 7 is adjusted, and the descending process of the probe body 621 is set to control the external stress of the probe body 621 in the probe test tooling to test the probe part. Then the control parameters are sent to the probe servo motor 6221, and the probe servo motor 6221 works to drive the probe body 621 to descend and complete the compression through the probe transmission screw 6222;

[0041] S3. Adjust and tighten the adjusting arm 54 to control the X-axis clamp 51 and the Y-axis clamp 52 to clamp the probe test fixture to be tested. Then, use the two ends of the electric pen device to connect the probe body 621 and the conductive plate 53 respectively, and observe the reading feedback of the electric pen device to determine whether the probe part in the probe test fixture to be tested still maintains a complete connected state after the fatigue test, thereby completing the inspection of the probe test fixture to be tested.

[0042] In the use environment of the probe test tooling, in order to simulate the actual use scenario of the chip, it is also necessary to test the weather resistance of special chips in the field environment, including weather resistance in extreme high temperature environment, extremely low humidity environment and high humidity environment. In order to test such environmental performance, the probe test tooling needs to be loaded in the corresponding simulated environment for chip testing. To meet this requirement, the probe test tooling as a product itself must also adapt to the extreme environment of the test site. Therefore, it is also necessary to test the weather resistance of the tooling itself. To achieve this function, we can set up a corresponding simulated environmental atmosphere on the detection mechanism. In order to avoid destructive damage to the detection mechanism itself caused by the extreme environment, the simulation cabin adapted to the simulated environmental atmosphere can be respectively set up on the first base 1 and the second base 4.

[0043] In the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first feature is in direct contact with the second feature, or the first feature and the second feature are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature. In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example.

[0044] Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples without contradicting each other.

[0045] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An integrated test device for a probe detection tool, comprising a detection mechanism and a main control terminal, characterized in that: The detection mechanism includes a mechanical part fatigue detection component and a probe performance test component; A mechanical part fatigue test assembly, comprising a first base, a tooling mounting seat mounted on the first base, and a matching reciprocating pressurizing mechanism, wherein the reciprocating pressurizing mechanism comprises a pressurizing workpiece mounted on the tooling mounting seat and a numerically controlled reciprocating drive device connected to the pressurizing workpiece, wherein the numerically controlled reciprocating drive device is connected to a main control terminal; A probe performance test assembly, including a probe electrical performance test assembly, the probe electrical performance test assembly including a second base, a fixture mounted on the second base, and an electrical performance test module mounted on the fixture, the electrical performance test module including a numerically controlled lifting and interfering probe mounted above the fixture and a conducting circuit coordinated with the lifting and interfering probe, the numerically controlled lifting and interfering probe being connected to a main control terminal; The pressurized workpiece includes a transmission frame and a contact plate mounted on the bottom surface of the transmission frame, and the numerically controlled reciprocating drive device includes a pressurized servo motor mounted on the top of the first base and a pressurized transmission screw connected between the power end of the pressurized servo motor and the transmission frame; The numerically controlled lifting and interfering probe comprises a probe body and a probe driving device connected between the probe body and the second base, wherein the probe driving device comprises a probe servo motor mounted on the top of the second base and a probe transmission screw connected between the power end of the probe servo motor and the probe body; The conduction circuit includes an electric pen device hung on the second base; The fixture includes an X-axis clamp block and a Y-axis clamp block that are engaged with each other and a conductive plate arranged in the central area of ​​the fixture. The X-axis clamp block and the Y-axis clamp block are both connected to a tightening adjustment arm, and the X-axis clamp block and the Y-axis clamp block clamp the conductive plate.

2. The integrated test device of the probe detection tooling according to claim 1, characterized in that: The main control terminal is provided with a fatigue test control module and a probe lifting control module. The fatigue test control module is connected to the pressurizing servo motor, and the probe lifting control module is connected to the probe servo motor.

3. The integrated test device of the probe detection tooling according to claim 1, characterized in that: The probe electrical performance test assembly also includes a visual inspection device, which includes a high-power optical microscope lens and a high-definition display matched therewith. A horizontal suspension is installed on the side wall of the second base, and the high-power optical microscope lens and the high-definition display are connected to the second base through the horizontal suspension.

4. The working method of the integrated test device of the probe detection tooling according to claims 1 to 3, characterized in that: The following steps are involved: S1. The probe test fixture to be tested is loaded onto the fixture mounting seat, and the fatigue test control module on the main control terminal is adjusted to set the stress parameter value and the number of repeated tests required for the compressive fatigue test of the probe test fixture to be tested. After the preset parameters are entered, they are fed back to the pressurizing servo motor, and the pressurizing servo motor performs reciprocating pressurizing action, and drives the pressurized workpiece to perform reciprocating motion through the pressurizing transmission screw, so that the contact plate repeatedly presses the probe test fixture to be tested, so as to realize the compressive fatigue test requirements for the mechanical part of the probe test fixture; S2. After the compression fatigue test is completed, the probe detection tooling is unloaded from the tooling mounting seat and transferred to the tooling fixture, the probe lifting control module on the main control terminal is adjusted, and the descending process of the probe body is set to control the external stress of the probe body in the probe test tooling to test the probe part. Then the control parameters are sent to the probe servo motor, and the probe servo motor works to drive the probe body to descend and complete the compression through the probe transmission screw; S3. Adjust and tighten the adjusting arm to control the X-axis clamp and the Y-axis clamp to clamp the probe test fixture to be tested. Then, use the two ends of the electric pen device to connect the probe body and the conductive plate respectively, and observe the reading feedback of the electric pen device to determine whether the probe part in the probe test fixture to be tested still maintains a complete connected state after the fatigue test, thereby completing the inspection of the probe test fixture to be tested.

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