Article handling equipment

Abstract

The present invention appropriately obtains information indicating the state of an article carrier for determining a maintenance period. An article handling device (100) includes a plurality of article carriers (3) that travel along a travel path (1) to carry articles, and a control device that controls the operation of the article carriers (3). The travel path (1) of the article handling device (100) includes a path (K) set in an inspection area (E) for causing a target carrier (3T) to travel. The target carrier is designated as an inspection target from among the plurality of article carriers (3). The target carrier is equipped with sensors that detect the actions of the vehicle that is traveling. The control device controls the plurality of article carriers (3) such that only one target carrier exists in the inspection area, and causes the target carrier to travel in a predetermined inspection travel mode in the inspection area. The control device obtains inspection data based on the detection results of the sensors from the target carrier that is traveling in the inspection travel mode.

Description

Technical Field

[0001] The present invention relates to an article handling device including a control device and a plurality of article carriers. The plurality of article carriers travel along a predetermined travel path to handle articles, and the control device controls the operation of the article carriers. Background Art

[0002] Preferably, on the basis of appropriately maintaining an article handling device including article carriers traveling along a travel path, the degree of consumption of the article carriers is grasped. Japanese Patent Application Laid-Open No. 2018-132332 discloses an inspection system for inspecting the degree of wear of the wheels of an article carrier. The inspection system includes identification marks unique to each wheel provided on the respective side surfaces of a plurality of wheels, and a photographing device that photographs an overall image of the traveling wheels from the side of the travel path. Based on the photographed image data, the degree of wear of the wheels is inspected, and the individual identification of the wheels to be inspected is performed by means of the identification marks.

[0003] The above-described inspection system can appropriately inspect the wear of the wheels. However, since the article carriers carrying articles travel under various travel conditions, there are cases where the posture of the wheels and the like also differ due to the actions of the traveling article carriers. Therefore, there is a possibility of unevenness in the inspection results. Therefore, preferably, it is possible to make the conditions consistent and appropriately inspect the state of the article carrier for determining the maintenance period. Summary of the Invention

[0004] In view of the above background, it is desirable to appropriately obtain information indicating the state of an article carrier for determining the maintenance period.

[0005] The article handling device in view of the above includes a control device and a plurality of article carriers. The plurality of article carriers travel along a predetermined travel path to handle articles, and the control device controls the operation of the article carriers. The feature is that the travel path includes a path set in an inspection area for causing a target carrier to travel. The target carrier is designated as an inspection target from among the plurality of article carriers. The target carrier includes a sensor that detects the action of the own vehicle while traveling. The control device controls the plurality of article carriers so that only one target carrier exists in the inspection area, and causes the target carrier to travel in a predetermined inspection travel mode in the inspection area. The control device obtains inspection data based on the detection result of the sensor from the target carrier that is traveling in the inspection travel mode.

[0006] According to this solution, the actions of the object carrier traveling in a preset inspection traveling mode are detected by means of sensors, and the control device acquires the inspection data obtained by the sensors. Therefore, the states of the article carriers can be acquired under the same conditions. Since only one object carrier is controlled to exist in the inspection area, the object carrier can travel on the path set in the inspection area in the preset inspection traveling mode without being affected by other article carriers. That is, according to this solution, information indicating the state of the article carrier for determining the maintenance period can be appropriately acquired.

[0007] Further features and advantages of the article handling equipment will become apparent from the following description of exemplary and non-limiting embodiments with reference to the accompanying drawings. Description of the Drawings

[0008] Figure 1 is a top view of the article handling equipment.

[0009] Figure 2 is a side view of the article carrier.

[0010] Figure 3 is a front view of the article carrier.

[0011] Figure 4 is a diagram showing the actions of the article carrier traveling straight at the bifurcation section.

[0012] Figure 5 is a diagram showing the actions of the article carrier bifurcating at the bifurcation section.

[0013] Figure 6 is a diagram schematically showing an example of the inspection area.

[0014] Figure 7 is a block diagram showing an example of the structure of the article handling equipment. Detailed Embodiment

[0015] Hereinafter, embodiments of the article handling equipment will be described based on the accompanying drawings. As Figure 1 and Figure 7 shown, the article handling equipment 100 includes a traveling guide rail 2 provided along a traveling path 1, a plurality of article carriers 3 that travel along the traveling path 1 to carry articles W, and an equipment controller H (control device) that controls the operation of the article carriers 3. In the present embodiment, as the article carrier 3, a ceiling carrier that travels while suspending and supporting the article W by suspending and supporting on a traveling guide rail 2 suspended from the ceiling as described later (refer to Figure 2 , Figure 3 etc.) is exemplified. In addition, in the present embodiment, the article carrier 3 carries a FOUP (Front Opening Unified Pod) that houses semiconductor wafers as the article W. AsFigure 1 As shown, the article handling device 100 includes a plurality of article handling units P that perform various processes on semiconductor wafers. The article carrier 3 transports the article W to the plurality of article handling units P.

[0016] Hereinafter, the direction along the travel path 1 will be referred to as the path long side direction X, and the direction orthogonal to the path long side direction X when viewed in the vertical direction Z will be referred to as the path width direction Y for explanation. In addition, in the travel path 1, the travel direction of the article carrier 3 (the direction in which the article carrier 3 travels) will be referred to as the downstream side, and the opposite side thereof will be referred to as the upstream side for explanation.

[0017] As Figure 1 shown, the travel path 1 includes a single annular main path 1P, a plurality of annular sub-paths 1S, and connection paths 1N that connect the main path 1P and the sub-paths 1S. The sub-paths 1S are each formed annularly via a plurality of article handling units P and are connected to the main path 1P at the branch portion 1c and the merging portion 1d. The connection paths 1N include a branching connection path 1N for the branch portion 1c and a merging connection path 1N for the merging portion 1d. The branching connection path 1N for the branch portion 1c causes the article carrier 3 to branch and travel from the main path 1P to the sub-path 1S, and the merging connection path 1N for the merging portion 1d causes the article carrier 3 to merge and travel from the sub-path 1S to the main path 1P. The article carrier 3 travels along the same circumferential direction (clockwise in the present embodiment) on the main path 1P and the plurality of sub-paths 1S. In addition, Figure 1 the travel direction of the article carrier 3 is indicated by an arrow.

[0018] As Figure 3 shown, the travel guide 2 is composed of a pair of left and right guide portions 7. As Figure 2 and Figure 3 shown, the article carrier 3 includes a travel portion 9 that travels on the travel guide 2 suspended and supported from the ceiling, a main body portion 10 that is located below the travel guide 2 and is suspended and supported by the travel portion 9, and a power receiving portion 12 that non-contactingly receives driving power from a power supply line 11 disposed along the travel path 1. The main body portion 10 is equipped with a support mechanism 13 that is vertically movable and supports the article W in a suspended state.

[0019] The traveling unit 9 includes a first traveling unit 9F and a second traveling unit 9R arranged in the front-rear direction of the article carrier 3. The first traveling unit 9F and the second traveling unit 9R have the same structure, and hereinafter, when there is no need for special distinction, they will be described only as the traveling unit 9. The traveling unit 9 is provided with a traveling motor 14 and a pair of left and right traveling wheels 15 that are rotationally driven by the traveling motor 14. The pair of left and right traveling wheels 15 roll on the upper surface of the traveling guide rail 2 (a pair of left and right guide rail portions 7). In addition, in the traveling unit 9, a guide wheel 16 that rotates around a longitudinal axis along the vertical direction Z (around the vertical axis) is provided. Two guide wheels 16 are arranged in the front-rear direction on one side, left or right, of the traveling unit 9, and are respectively arranged on the left and right of the traveling unit 9. That is, each traveling unit 9 is provided with four guide wheels 16. The guide wheels 16 roll on the mutually facing side surfaces of the pair of left and right guide rail portions 7. The guide wheels 16 come into contact with the traveling guide rail 2 at a plurality of positions spaced apart in the path longitudinal direction X (the direction along the traveling path 1).

[0020] In the first traveling unit 9F and the second traveling unit 9R, coupling shafts 19 are respectively provided in a state of protruding downward from the lower ends of the traveling wheels 15. The coupling shaft 19 of the first traveling unit 9F and the main body portion 10 are rotatably connected around a longitudinal axis along the vertical direction Z. The coupling shaft 19 of the second traveling unit 9R and the main body portion 10 are also rotatably connected around a longitudinal axis along the vertical direction Z. That is, the first traveling unit 9F and the second traveling unit 9R can rotate independently around different longitudinal axes.

[0021] The article carrier 3 is rotationally driven by the traveling motor 14 via the traveling wheels 15 of the traveling unit 9. The guide wheels 16 of the traveling unit 9 are guided by the pair of guide rail portions 7, and while the position in the path width direction Y is restricted, it travels along the traveling path 1. In addition, the article carrier 3 can travel along the traveling path 1 even on a curved path such as a curved path 1b, a branch portion 1c, and a merging portion 1d by swinging the first traveling unit 9F and the second traveling unit 9R relative to the main body portion 10 around the longitudinal axis.

[0022] As Figures 3 - 5 shown, at the branch portion 1c of the traveling path 1, a guide rail 4 having a T-shaped cross-sectional shape when viewed in the traveling direction of the article carrier 3 is provided. In addition, in the article carrier 3, a guide auxiliary wheel 17 that rotates around a longitudinal axis along the vertical direction Z (around the vertical axis) is provided. Two guide auxiliary wheels 17 are arranged in the front-rear direction so as to be movable in the left-right direction at the center of the traveling unit 9. The guide auxiliary wheels 17 are configured to be able to change positions to the right and left compared to the guide rail 4 disposed at the center in the path width direction Y of the pair of left and right guide rail portions 7, and rotate in contact with the right side surface or the left side surface of the guide rail 4. The carrier controller 31 causes the guide auxiliary wheels 17 to be as Figures 3 - 5It moves in the vehicle body width direction (path width direction Y) as shown.

[0023] As Figure 4 shown, when the article carrier 3 goes straight without branching at the branch portion 1c, the carrier controller 31 positions the guide auxiliary wheel 17 on the side of the first guide surface 41 of the guide rail 4 (left side toward the traveling direction). Thereby, the traveling unit 9 is guided in a state where the first guide surface 41 of the guide rail 4 abuts on the guide auxiliary wheel 17. As Figure 4 shown, when going straight at the branch portion 1c, the traveling guide rail 2 on the left or right side (here, the right side) of the pair of guide rail portions 7 is interrupted, but the guide rail 4 supports the load via the guide auxiliary wheel 17 to guide and support it. Thereby, it is possible to prevent the traveling unit 9 from coming off the traveling guide rail 2 on the left or right side (here, the left side) that is not interrupted, and the article carrier 3 can travel straight at the branch portion 1c.

[0024] As Figure 5 shown, when the article carrier 3 branches at the branch portion 1c, the carrier controller 31 positions the guide auxiliary wheel 17 on the side of the second guide surface 42 of the guide rail 4 (right side toward the traveling direction). Thereby, the traveling unit 9 is guided in a state where the second guide surface 42 of the guide rail 4 abuts on the guide auxiliary wheel 17. As Figure 5 shown, when branching at the branch portion 1c, the traveling guide rail 2 on the left or right side (here, the left side) of the pair of guide rail portions 7 is interrupted, but the guide rail 4 supports the load via the guide auxiliary wheel 17 to guide and support it. Thereby, it is possible to prevent the traveling unit 9 from coming off the traveling guide rail 2 on the left or right side (here, the right side) that is not interrupted, and the article carrier 3 can branch and travel at the branch portion 1c.

[0025] In the above description, the traveling and branching methods of the article carrier 3 at the branch portion 1c have been described, but the same applies to the merging portion 1d.

[0026] As Figure 7 shown, the article carrier 3 includes a carrier controller 31, a communication unit 32, an actuator group A, and a sensor group S. The sensor group S includes an unillustrated code reader that reads a position mark indicating position information arranged along the traveling path 1, an unillustrated rotary encoder that detects the traveling distance of the article carrier 3 based on the rotation amount of the traveling wheels 15, an unillustrated obstacle sensor that detects other article carriers 3 or obstacles in the traveling direction, and the like. The actuator group A includes a traveling motor 14 that drives the traveling wheels 15, an unillustrated actuator that moves the guide auxiliary wheel 17 in the vehicle body width direction (path width direction Y), an unillustrated actuator that raises and lowers the support mechanism 13, and the like.

[0027] The carrier controller 31 determines the position of the article carrier 3 on the travel path 1 based on the detection results of the code reader and the rotary encoder. The position information of each article carrier 3 is transmitted wirelessly to the equipment controller H and other article carriers 3. The equipment controller H controls the travel of the article carrier 3 of the article handling equipment 100 based on the position information of each article carrier 3. The carrier controller 31 transports the article W based on the transport instruction from the equipment controller H. The carrier controller 31 autonomously travels the article carrier 3 that suspends and supports the article W based on the transport instruction, the position information of its own vehicle, the position information of other vehicles, the detection results of the obstacle sensor, etc.

[0028] As described above, in the article carrier 3, there are components such as the traveling wheels 15, guide wheels 16, and guide auxiliary wheels 17 that are worn due to contact with the traveling guide rail 2 and the guide rail 4, and actuators such as the traveling motor 14 that are consumed as the article carrier 3 travels. In addition, the bearings of the axles that support the traveling wheels 15, guide wheels 16, guide auxiliary wheels 17, etc. may also be consumed or damaged. For example, if the bearing is damaged, the rotational resistance increases. Therefore, it is preferable to perform regular maintenance such as inspection and part replacement on the article carrier 3. It is also possible to determine the time for maintenance, but it is not necessarily the case that each article carrier 3 is maintained at an appropriate time. Therefore, preferably, the state of each part of the article carrier 3 is detected, and maintenance such as part replacement and adjustment is performed according to the state of the article carrier 3.

[0029] Therefore, in the article handling equipment 100 of the present embodiment, inspection data is collected from the article carrier 3 that actually transports the article W, and the time for maintenance such as part replacement and adjustment is determined based on the inspection data. At this time, it is possible to make a determination by comparing the normal reference value and the inspection data, or it is also possible to make a determination based on so-called big data that accumulates a plurality of inspection data. Here, the article carrier 3 that is the object of extracting the inspection data is called the target carrier 3T. The target carrier 3T is equipped with a sensor (for example, the vibration sensor S1) that detects the movement of its own vehicle during travel. The target carrier 3T is the article carrier 3 designated as the inspection object by the equipment controller H from among a plurality of article carriers 3. In addition, it may be a method in which all article carriers 3 can be designated as the target carrier 3T, or it may be a method in which a part of all article carriers 3 can be designated as the target carrier 3T.

[0030] In addition, as Figure 1 and Figure 6As shown, the travel path 1 includes a path K set in an inspection area E for the designated object carrier 3T to travel. The equipment controller H controls multiple item carriers 3 such that only one object carrier 3T exists in the inspection area E. When there is another item carrier 3 (other vehicle) in front of the present vehicle among the item carriers 3, in order to avoid collision, the travel speed may be decreased or the vehicle may temporarily stop and standby. Figure 6 As shown by the reference numeral "3a" in the figure, when there is another vehicle in front of the object carrier 3T and the object carrier 3T decreases its travel speed or temporarily stops as described above, it is not suitable for inspection travel, and there is a possibility that the equipment controller H cannot obtain appropriate inspection data. However, in the present embodiment, the travel of multiple item carriers 3 is controlled such that only one object carrier 3T exists in the inspection area E. Therefore, the object carrier 3T can travel in a manner suitable for inspection without affecting other vehicles in front of the present vehicle.

[0031] In addition, the equipment controller H causes the object carrier 3T to travel in a pre-specified inspection travel mode in the inspection area E. The equipment controller H obtains inspection data based on the detection results of sensors (such as the vibration sensor S1) from the object carrier 3T that is traveling in the inspection travel mode. As described above, it is controlled such that there is no item carrier 3 (other vehicle) other than the object carrier 3T in the inspection area E, so the object carrier 3T can travel in the specified inspection travel mode without affecting other vehicles. Since the object carrier 3T travels in the specified inspection travel mode without affecting other vehicles, the equipment controller H can obtain highly reproducible inspection data.

[0032] Here, the sensor that detects the action of the present vehicle that is traveling in the object carrier 3T detects at least one of the torque of the travel motor 14 that causes the object carrier 3T to travel, the rotational speed of the travel wheels 15 of the object carrier 3T, or a rotating member linked to the travel wheels 15, and the vibration of the object carrier 3T.

[0033] For example, when the friction force of the travel wheels 15, guide wheels 16, guide assist wheels 17, etc. becomes large due to wear, there may be a case where the rotational resistance becomes large and the travel motor 14 requires a large torque. The magnitude of the torque can be detected by a torque sensor or can be detected based on the magnitude of the current flowing in the drive circuit of the travel motor 14, etc. In addition, the method for detecting the magnitude of the torque is not limited to using a torque sensor, and it can also be a method calculated by a servo driver that controls the travel motor 14 in the carrier controller 31.

[0034] In addition, when the diameter of the traveling wheel 15 decreases due to wear or the like, the traveling distance is different even at the same rotational speed. For example, as described above, when position markers indicating position information are arranged along the traveling path 1, the traveling distance can be detected based on the position markers. By comparing this traveling distance with the traveling distance based on the rotational speed, the wear state of the traveling wheel 15 can be determined. Therefore, a sensor (such as a rotational sensor like a rotary encoder) for detecting the rotational speed of the traveling wheel 15 can be used as a sensor for detecting movement. In addition, not limited to detecting the rotational speed of the traveling wheel 15, it can also be a sensor for detecting the rotational speed of a rotating component provided in the power transmission path from the traveling motor 14 to the traveling wheel 15. Furthermore, a code reader for reading the position markers can also be included in the sensor for detecting movement.

[0035] In addition, when the traveling wheel 15, the guide wheel 16, the guide auxiliary wheel 17, etc. are consumed due to wear or the like, there may be a situation where the stability of the article carrier 3 collapses and the vibration of the traveling article carrier 3 increases. By detecting the magnitude of the vibration with the vibration sensor S1, the equipment controller H can thus determine the degree of consumption of the traveling wheel 15, the guide wheel 16, the guide auxiliary wheel 17, etc. Therefore, the vibration sensor S1 serves as a sensor for detecting movement.

[0036] However, the above mainly illustrates a method for determining the wear state of the parts of the article carrier 3. However, not limited to such a method, the state of the rotary encoder can also be diagnosed based on the difference between the position of the article carrier 3 based on the detection result of the rotary encoder and the position of the article carrier 3 based on the detection result of the code reader. In addition, the difference between the designated stop position on the traveling path 1 and the actual stop position of the article carrier 3 can be used as inspection data to diagnose the sensitivity of sensors such as the code reader and other stop position detection sensors (not shown).

[0037] As described above, the traveling wheel 15 rolls on the upper surface of the traveling guide rail 2, and the guide wheel 16 rolls on the side surface of the traveling guide rail 2. That is, the traveling wheel 15 and the guide wheel 16 are in contact with the traveling guide rail 2 throughout the entire traveling path 1 except for a part within the branch portion 1c and the merging portion 1d. On the other hand, the guide auxiliary wheel 17 rolls on the side surface of the guide rail 4. Since the guide rail 4 is provided at the branch portion 1c and the merging portion 1d, the guide auxiliary wheel 17 is in contact with the guide rail 4 only at a part of the traveling path 1, specifically, only at the branch portion 1c and the merging portion 1d. Therefore, preferably, the inspection area E includes the branch portion 1c where the path K bifurcates into multiple paths and the merging portion 1d where multiple paths K merge. In addition, the shape of the path K other than the branch portion 1c and the merging portion 1d is not limited to a straight line and may be a curve. Therefore, preferably, the inspection area E includes a linear path (straight path 1a) and a curved path (curved path 1b).

[0038] Figure 1 The manner in which the inspection area E summarized into one includes the straight path 1a, the curved path 1b, the bifurcation section 1c, and the confluence section 1d is illustrated. However, the inspection area E may also be arranged in multiple parts. For example, it may be that the first inspection area E including only the straight path 1a, the second inspection area E including only the curved path 1b, the third inspection area E including the bifurcation section 1c, and the fourth inspection area E including the confluence section 1d are separately arranged.

[0039] In addition, in Figure 1 and Figure 6 the manner in which, in addition to the path K (normal path K1) along which the article carrier 3 travels for carrying the article W, a path K (inspection path K2) for inspection is also provided is illustrated. However, it may be that all or part of the inspection path K2 is provided by also using the normal path K1. For example, in the manner illustrated in Figure 1 and Figure 6 even in the case where the inspection path K2 is provided separately from the normal path K1, the bifurcation section 1c from the normal path K1 to the inspection path K2 and the confluence section 1d from the inspection path K2 to the normal path K1 can be shared by the normal path K1 and the inspection path K2.

[0040] In addition, the inspection traveling mode is set to include acceleration, deceleration, and constant-speed traveling. For example, when accelerating and decelerating, the frictional force between the traveling guide rail 2 and the traveling wheels 15 also has an impact. Depending on the degree of consumption of the traveling wheels 15, there are cases where the traveling wheels 15 slip. By setting the inspection traveling mode to include not only constant-speed traveling but also acceleration and deceleration, the equipment controller H can obtain appropriate inspection data.

[0041] In addition, as Figure 1 and Figure 6 shown, in the present embodiment, the inspection area E is set to include one of the two paths K (inspection path K2) arranged in parallel in the same direction as the traveling direction of the article carrier 3. By setting the inspection area E in this way, in Figure 6 the article carrier 3 shown by the reference numeral "3b", for example, the article carrier 3 that is not designated as the target carrier 3T can travel along the normal path K1, and the target carrier 3T can travel along the parallel inspection path K2. The target carrier 3T can travel along the inspection path K2 based on the inspection traveling mode without being affected by other vehicles. In addition, on the normal path K1 parallel to the inspection path K2, other article carriers 3 can travel for carrying the article W, so a decrease in the carrying efficiency of the article handling equipment 100 is also suppressed.

[0042] As Figure 6As shown, when the inspection path K2 and the normal path K1 are provided in parallel, the bifurcation section 1c from the normal path K1 to the inspection path K2 and the merging section 1d from the inspection path K2 to the normal path K1 include both the inspection path K2 and the normal path K1. Therefore, the inspection area E (inspection path K2) can be arranged in parallel with the parallel section F of the normal path K1 including the bifurcation section 1c and the merging section 1d as shown in Figure 6 shown.

[0043] However, as described above, there is a possibility that multiple or all of the plurality of article carriers 3 are designated as the target carrier 3T. In the present embodiment, the weight (carrying weight) of the article W being carried is a common specified value as a condition for being designated as the target carrier 3T. Thus, the equipment controller H can collect inspection data with consistent conditions.

[0044] Since the FOUP as the article W houses semiconductor wafers, for example, the weight of the FOUP full of semiconductor wafers, the weight of the FOUP not housing semiconductor wafers (empty FOUP), or the weight of the FOUP housing a specified number of semiconductor wafers can be set as the specified value of the carrying weight. For example, preferably, as the most stringent condition for the travel of the article carrier 3, the weight of the FOUP full of semiconductor wafers, which is the heaviest carrying weight, is set as the specified value. In addition, the carrying weight also includes the state where the article carrier 3 does not support the article W, that is, zero. The equipment controller H designates the article carrier 3 carrying the article W with the specified carrying weight as the target carrier 3T with the condition that the carrying weight is the specified value.

[0045] As Figure 7 shown, the article carrier 3 includes a communication unit 32 capable of wireless communication with the equipment controller H. The inspection data obtained by the carrier controller 31 from the sensor group S is wirelessly transmitted from the communication unit 32 to the equipment controller H. That is, the target carrier 3T includes the carrier controller 31 as a detection result acquisition unit for acquiring inspection data and the communication unit 32 as an inspection data transmission unit for transmitting inspection data, and the communication unit 32 wirelessly transmits the inspection data to the equipment controller H. The equipment controller H can successively receive the inspection data for accumulation.

[0046] In addition, as Figure 7As shown, the object carrier 3T may also be provided with a detection result storage unit 33, and the aforementioned detection result storage unit 33 is composed of a storage medium such as a memory that stores the inspection data obtained by the carrier controller 31. In this case, the communication unit 32 may also periodically transmit the inspection data accumulated in the detection result storage unit 33 to the equipment controller H. In addition, it may also be that the inspection data accumulated in the detection result storage unit 33 is transmitted to the equipment controller H through a wired connection with the equipment controller H. Or, the inspection data may also be transmitted via a memory card or the like that can be loaded and unloaded with respect to the object carrier 3T and the equipment controller H. In addition, when the detection result storage unit 33 is detachable from the object carrier 3T, the equipment controller H may also connect the detection result storage unit 33 removed from the object carrier 3T to the equipment controller H to obtain the inspection data.

[0047] 〔Other Embodiments〕

[0048] Hereinafter, other embodiments will be described. In addition, the structures of the respective embodiments described below are not limited to being applied separately, and can also be combined and applied with the structures of other embodiments as long as there is no contradiction.

[0049] (1) In the above content, as the article carrier 3, an overhead carrier traveling in a state of being suspended and supported on the traveling guide rail 2 is illustrated for explanation, but the article carrier 3 may also be a carrier traveling in a state of being placed and supported on the guide rail. Or, the article carrier 3 may also be a carrier traveling on a path (such as the ground) composed of other than the guide rail.

[0050] (2) In the above content, a method in which the inspection path K2 includes a straight path 1a, a curved path 1b, a branch portion 1c, and a merging portion 1d as the path K in one or more inspection areas E is illustrated. That is, a method in which the inspection path K2 includes all of these shaped paths K is illustrated. However, the inspection path K2 may also be configured to include at least one of them. In addition, in addition to the branch portion 1c and the merging portion 1d, when the traveling path 1 includes an intersection (not shown) where two paths K intersect, the inspection path K2 may include the intersection.

[0051] (3) In the above content, a method in which the equipment controller H designates the article carrier 3 as the object carrier 3T on the condition that the carrying weight is a specified value is illustrated. However, the equipment controller H may also designate the object carrier 3T regardless of the carrying weight. For example, based on the position of the article carrier 3 on the traveling path 1 (position relative to the inspection path K2). In addition, when designating the object carrier 3T regardless of the carrying weight, the carrying weight may also be obtained as inspection data.

[0052] (4)In the above content, a method of transmitting inspection data to the device controller H is illustrated. However, it is not limited to this method, and the transmission destination of the inspection data may also be a data server or the like that is separately provided other than the device controller H.

[0053] (5)In the above content, a method of setting the inspection travel mode to include acceleration, deceleration, and constant-speed travel is illustrated. However, it is not limited to this method. For example, it may also be set to inspect that the travel mode is only constant-speed travel.

[0054] 〔Outline of the Embodiment〕

[0055] Hereinafter, a brief description will be given of the outline of the article handling device described above.

[0056] As one mode, it is an article handling device, and the article handling device includes a control device and a plurality of article handling vehicles. The plurality of article handling vehicles travel along a specified travel path to handle articles. The control device controls the operation of the article handling vehicles. It is characterized in that the travel path includes a path set in an inspection area for the target handling vehicle to travel. The target handling vehicle is designated as an inspection target from the plurality of article handling vehicles. The target handling vehicle is provided with a sensor for detecting the action of the vehicle itself that is traveling. The control device controls the plurality of article handling vehicles so that only one of the target handling vehicles exists in the inspection area, and the target handling vehicle travels in a predetermined inspection travel mode in the inspection area. The control device obtains inspection data based on the detection result of the sensor from the target handling vehicle that is traveling in the inspection travel mode.

[0057] According to this solution, the action of the target handling vehicle traveling in a predetermined inspection travel mode is detected by the sensor, and the control device obtains the inspection data obtained by the sensor. Therefore, the state of the article handling vehicle can be obtained under the same conditions. Since only one target handling vehicle is controlled to exist in the inspection area, the target handling vehicle can travel in a predetermined inspection travel mode on the path set in the inspection area without being affected by other article handling vehicles. That is, according to this solution, information indicating the state of the article handling vehicle for determining the maintenance period can be appropriately obtained.

[0058] In addition, preferably, the sensor detects at least one of the torque of the motor that causes the target handling vehicle to travel, the rotational speed of the wheels of the target handling vehicle or the rotating member linked to the wheels, and the vibration of the target handling vehicle.

[0059] By detecting the torque and rotational speed, the control device can judge the consumption degree of the wheels and the motor. In addition, by detecting the vibration, the control device can judge the uneven wear of the wheels, the loosening of the rotating member, etc.

[0060] In addition, preferably, in the aforementioned inspection area, including a linear path, a curved path, a bifurcation section where the path bifurcates into a plurality of paths, and a confluence section where a plurality of paths merge, the aforementioned inspection traveling mode includes acceleration, deceleration, and constant-speed traveling.

[0061] According to this solution, in the inspection area, paths of various types are included. Thus, inspection data on the situation of traveling on various paths can be obtained. In addition, the inspection traveling mode includes various traveling states. Thus, inspection data on the situation of various traveling modes can be obtained.

[0062] In addition, preferably, the aforementioned inspection area is set to include one of two paths that are arranged in parallel with the traveling direction of the aforementioned article carrier being the same direction.

[0063] According to this solution, for example, the object carrier bifurcates from a normal path to an inspection path and travels on the inspection path, and it is easy to return to the normal path again. In addition, it is difficult for the path used for carrying articles to be blocked due to the traveling of the object carrier, thereby preventing other article carriers from carrying articles. Therefore, according to this solution, it is possible to suppress a decrease in the utilization efficiency of the article carriers of the article handling equipment while appropriately obtaining inspection data.

[0064] In addition, preferably, the aforementioned article carrier sets the weight of the article being carried as the carrying weight, and the aforementioned control device designates the aforementioned article carrier as the aforementioned object carrier on the condition that the aforementioned carrying weight is a specified value.

[0065] According to this solution, by making the conditions regarding the carrying weight of the object carrier consistent, it becomes easy to compare the inspection data of multiple object carriers with each other. In addition, based on the inspection data of multiple object carriers, it is also easy to determine the overall tendency of the article carriers.

[0066] In addition, preferably, the aforementioned object carrier includes a detection result acquisition unit that acquires the aforementioned inspection data, and an inspection data transmission unit that transmits the aforementioned inspection data, and the aforementioned inspection data transmission unit wirelessly transmits the aforementioned inspection data to the aforementioned control device.

[0067] According to this solution, the control device can sequentially acquire inspection data from the object carrier. In addition, the object carrier does not need to have a storage device with a large capacity for storing inspection data accumulated multiple times.

[0068] Explanation of Reference Numerals

[0069] 1: Traveling Path

[0070] 1a: Straight Path (Linear Path)

[0071] 1b: Curved path (curvilinear path)

[0072] 1c: Bifurcation part

[0073] 1d: Confluence part

[0074] 3: Article carrier

[0075] 3T: Object carrier

[0076] 14: Travel motor (motor for moving the object carrier)

[0077] 15: Travel wheel (wheel of the object carrier)

[0078] 32: Communication unit (inspection data transmission unit)

[0079] 100: Article handling equipment

[0080] E: Inspection area

[0081] H: Equipment controller (control device)

[0082] K: Path

[0083] S: Sensor group (sensor for detecting the movement of the vehicle in motion)

[0084] S1: Vibration sensor (sensor for detecting the movement of the vehicle in motion)

[0085] W: Article

Claims

1. An article handling device, the article handling device having a control device and a plurality of article handling vehicles, the plurality of article handling vehicles traveling along a prescribed traveling path to handle articles, the control device controlling the operation of the article handling vehicles, characterized in that, the traveling path includes a path set in an inspection area for the object handling vehicle to travel, the object handling vehicle being designated as an inspection object from among the plurality of article handling vehicles, the object handling vehicle is equipped with a sensor for detecting the actions of the vehicle itself while traveling, the control device controls the plurality of article handling vehicles such that only one object handling vehicle exists in the inspection area and causes the object handling vehicle to travel in a pre-specified inspection traveling mode in the inspection area, the control device obtains inspection data based on the detection results of the sensor from the object handling vehicle traveling in the inspection traveling mode.

2. The article handling device according to claim 1, characterized in that, the sensor detects at least one of the torque of the motor that causes the object handling vehicle to travel, the rotational speed of the wheels of the object handling vehicle or a rotating member linked to the wheels, and the vibration of the object handling vehicle.

3. The article handling device according to claim 1, characterized in that, in the inspection area, there are included a linear path, a curved path, a bifurcation portion where the path bifurcates into a plurality of paths, and a confluence portion where a plurality of paths merge, the inspection traveling mode includes acceleration, deceleration, and constant-speed traveling.

4. The article handling device according to claim 1, characterized in that, the inspection area is set to include one of two paths that are arranged in parallel with the traveling directions of the article handling vehicles being the same direction.

5. The article handling device according to claim 1, characterized in that, the article handling vehicle sets the weight of the article being handled as the handling weight, the control device designates the article handling vehicle as the object handling vehicle on the condition that the handling weight is a prescribed value.

6. The article handling device according to any one of claims 1 to 5, characterized in that, the object handling vehicle is equipped with a detection result acquisition unit for acquiring the inspection data and an inspection data transmission unit for transmitting the inspection data, the inspection data transmission unit wirelessly transmits the inspection data to the control device.

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