An electromagnet deflection structure for electron gun of vacuum coating machine

Abstract

The present invention discloses an electromagnet deflection structure for an electron gun of a vacuum coating machine, which belongs to the technical field of vacuum coating machine equipment, and aims to solve the problem that it is difficult for existing equipment to accurately adjust the electron beam position and position drift. The structure includes an electron gun body and an electron gun head assembly, wherein the electron gun body includes an electron gun base, a main pole shoe is provided on the electron gun base, an electromagnet assembly is provided on the electron gun base, and the electromagnet assembly includes an iron core, an energized coil is wound on the iron core, a wire slot hole is provided on the iron core, and the lead wire of the energized coil passes through the wire slot hole, fixing screw holes are provided at both ends of the iron core, and fixing screws are also provided, the fixing screws pass through the main pole shoe and are threadedly connected with the fixing screw holes, the lead wire passes through the main pole shoe hole and the lead wire locking nut in turn, and is led out of the vacuum chamber through a flexible bellows and an electrical connector to be electrically connected to a precision constant current source, and an electromagnet protective cover is installed on the main pole shoe. The present invention is applicable to the electron gun of a vacuum coating machine.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum coating machine equipment, and in particular relates to an electromagnet deflection structure for an electron gun of a vacuum coating machine. Background Art

[0002] In fact, with the rapid development of science and technology, vacuum coating technology has been widely used. When vacuum coating thin films, the position of the thermal electron beam generated by the electron gun in the vacuum chamber bombarding the evaporated material should be stable for a long time. It is particularly important for high-end optical coating and is also an important factor to ensure the repeatability of the manufactured products. The traditional method is to install a piece of neodymium iron boron permanent magnet at the same position of the electromagnet to control the position of the forward and backward deflection of the thermal electron beam. As a result, due to the characteristics of the permanent magnet material itself, it will be affected by the external temperature and the size of the magnetic force. The electron gun itself works in a high-temperature environment. Therefore, the position of the thermal electron beam will inevitably undergo thermal "drift". In addition, the permanent magnet controls the position of the thermal electron beam by increasing or decreasing the short magnetic piece to control the size of the magnetic field force. Therefore, it is particularly difficult to accurately adjust the position of the electron beam. Summary of the invention

[0003] The purpose of the present invention is to provide an electromagnet deflection structure for an electron gun of a vacuum coating machine, so as to solve the problem that it is difficult to accurately adjust the electron beam position and the position drift problem of the existing equipment.

[0004] The technical solution adopted by the present invention is as follows:

[0005] An electromagnet deflection structure for an electron gun of a vacuum coating machine comprises an electron gun body and an electron gun head assembly mounted on the electron gun body, the electron gun body comprising an electron gun base, main pole shoes are arranged at both ends of the upper surface of the electron gun base, main pole shoes are provided with main pole shoe holes, an electromagnet assembly is arranged on the upper surface of the electron gun base between the main pole shoes, the electromagnet assembly comprises an iron core, an energized coil is wound around the iron core, a wire passing slot hole is arranged at one end of the iron core, a lead wire of the energized coil passes through the wire passing slot hole, four fixing screw holes are arranged at both ends of the iron core, and fixing screws are also arranged, the fixing screws pass through the main pole shoes and are threadedly connected to the fixing screw holes at both ends of the iron core, the lead wire passes through the main pole shoe hole and the lead wire locking nut fixed on the main pole shoe in turn, and is led out of the vacuum chamber through a flexible bellows and an electrical connector and is electrically connected to a precision constant current source, and an electromagnet protective cover is installed on the main pole shoe through a fixing screw.

[0006] Furthermore, electromagnet wire-passing shields are provided on both sides of the main pole shoe, and the electromagnet wire-passing shields are fixed to the main pole shoe by fastening screws.

[0007] Furthermore, the iron core is an iron core made of high magnetic permeability material.

[0008] Furthermore, the energized coil is a high temperature resistant energized coil.

[0009] Furthermore, the electron gun main body also includes water hole plugging plates arranged on both sides of the electron gun base, and an inlet and outlet water head is also installed on the electron gun base. A third auxiliary pole shoe is installed on the upper surface of the main pole shoe, and a first auxiliary pole shoe is installed between the third auxiliary pole shoes. A second auxiliary pole shoe is also installed on the third auxiliary pole shoe, and a gun head cover is also installed on the first auxiliary pole shoe. A cooling wire package box is installed on the side of the main pole shoe away from the electromagnet assembly, and an XY scanning coil fixing bracket is installed on the cooling wire package box. An XY coil outlet locking nut is also installed on the XY scanning coil fixing bracket, a gun head anti-fouling cover is provided on the main pole shoe at the lower side of the cooling wire package box, an anti-fouling cover is also installed on the third auxiliary pole shoe, and a water hole plug is provided on the inner side of the main pole shoe.

[0010] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0011] 1. In the present invention, the electron gun body is used to fix the XY deflection coil, fix the gun head assembly, and fix the electromagnet assembly to achieve uniform distribution of the magnetic field, and cool the main pole shoe, the first auxiliary pole shoe, the second auxiliary pole shoe, the third auxiliary pole shoe, the cooling electromagnet assembly, and the cooling XY deflection coil. The electron gun head assembly is used to generate thermal electrons, and bombardment and evaporation of the coating material is completed under the guidance of the magnetic field force. The electromagnet assembly is composed of a coil of high-temperature resistant wires wound around an iron core of a high-permeability material, and the head and tail of the coil are led out with lead wires. A precision program-controlled constant current source is added to generate a constant magnetic field on the electromagnet. A controllable magnetic field force is applied to the thermal electron beam generated by the electron gun head assembly through the main pole shoe, the first auxiliary pole shoe, the second auxiliary pole shoe, and the third auxiliary pole shoe, so that the thermal electron beam is deflected to a specified position. When in use, the precision constant current source outside the vacuum chamber is turned on, and the current of the constant current source is adjusted to change the magnetic field force to change the front and rear displacement of the thermal electron beam generated by the electron gun head assembly, so as to change the front and rear position of the thermal electron beam reaching the target. Since the working of the electromagnet is determined by the size of the current flowing through it, which is independent of the temperature change of the outside world, and the destination position of the thermal electrons can be precisely adjusted by adjusting the current of the precision programmable constant current source without the need for adjustment through a short magnetic sheet, the magnetic field force of the electromagnet can work flexibly and stably for a long time under the control of the precision constant current source without changing, effectively solving the problem of the difficulty of accurately adjusting the electron beam position and position drift in existing equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and should not be regarded as limiting the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative work, among which:

[0013] Figure 1 It is a structural schematic diagram of the electromagnet assembly of the present invention;

[0014] Figure 2 It is a schematic diagram of the installation position of the electromagnet assembly of the present invention;

[0015] Figure 3 The overall structural intention of the present invention;

[0016] Markings in the figure: 1-electron gun base, 2-electromagnet protective cover, 3-cooling wire package box, 4-gun head cover, 5-XY scanning coil fixing bracket, 6-anti-fouling cover, 7-gun head anti-fouling cover, 8-water inlet and outlet, 9-water hole plug, 10-XY coil outlet locking nut, 11-water hole plug, 12-main pole shoe, 13-first auxiliary pole shoe, 14-second auxiliary pole shoe, 15-third auxiliary pole shoe, 16-electron gun head assembly, 201-iron core, 202-powered coil, 203-lead wire, 204-wire slot hole, 205-fixing screw hole, 301-electromagnet wire shield, 302-lead wire locking nut, 303-main pole shoe hole, 401-fixing screw, 402-fastening screw, 403-fixing screw. DETAILED DESCRIPTION

[0017] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0018] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0019] It should be noted that reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0020] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the invented product is usually placed when in use. They are only simplified descriptions for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the descriptions, and cannot be understood as indicating or implying relative importance.

[0021] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0022] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] An electromagnet deflection structure for an electron gun of a vacuum coating machine comprises an electron gun body and an electron gun head assembly mounted on the electron gun body, the electron gun body comprising an electron gun base, main pole shoes are arranged at both ends of the upper surface of the electron gun base, main pole shoes are provided with main pole shoe holes, an electromagnet assembly is arranged on the upper surface of the electron gun base between the main pole shoes, the electromagnet assembly comprises an iron core, an energized coil is wound around the iron core, a wire passing slot hole is arranged at one end of the iron core, a lead wire of the energized coil passes through the wire passing slot hole, four fixing screw holes are arranged at both ends of the iron core, and fixing screws are also arranged, the fixing screws pass through the main pole shoes and are threadedly connected to the fixing screw holes at both ends of the iron core, the lead wire passes through the main pole shoe hole and the lead wire locking nut fixed on the main pole shoe in turn, and is led out of the vacuum chamber through a flexible bellows and an electrical connector and is electrically connected to a precision constant current source, and an electromagnet protective cover is installed on the main pole shoe through a fixing screw.

[0024] Furthermore, electromagnet wire-passing shields are provided on both sides of the main pole shoe, and the electromagnet wire-passing shields are fixed to the main pole shoe by fastening screws.

[0025] Furthermore, the iron core is an iron core made of high magnetic permeability material.

[0026] Furthermore, the energized coil is a high temperature resistant energized coil.

[0027] Furthermore, the electron gun main body also includes water hole plugging plates arranged on both sides of the electron gun base, and an inlet and outlet water head is also installed on the electron gun base. A third auxiliary pole shoe is installed on the upper surface of the main pole shoe, and a first auxiliary pole shoe is installed between the third auxiliary pole shoes. A second auxiliary pole shoe is also installed on the third auxiliary pole shoe, and a gun head cover is also installed on the first auxiliary pole shoe. A cooling wire package box is installed on the side of the main pole shoe away from the electromagnet assembly, and an XY scanning coil fixing bracket is installed on the cooling wire package box. An XY coil outlet locking nut is also installed on the XY scanning coil fixing bracket, a gun head anti-fouling cover is provided on the main pole shoe at the lower side of the cooling wire package box, an anti-fouling cover is also installed on the third auxiliary pole shoe, and a water hole plug is provided on the inner side of the main pole shoe.

[0028] During the implementation of the present invention, the electron gun body completes fixing the XY deflection coil, fixing the gun head assembly, fixing the electromagnet assembly, completing the uniform distribution of the magnetic field, and cooling the main pole shoe, the first auxiliary pole shoe, the second auxiliary pole shoe, the third auxiliary pole shoe, cooling the electromagnet assembly, and cooling the XY deflection coil. The electron gun head assembly is used to generate thermal electrons, and bombards and evaporates the coating material under the guidance of the magnetic field force. The electromagnet assembly is composed of an energized coil wound with high-temperature resistant high-temperature wires on an iron core of a high-permeability material, and the head and tail of the energized coil are led out with lead wires. A precision program-controlled constant current source is added to generate a constant magnetic field on the electromagnet. A controllable magnetic field force is applied to the thermal electron beam generated by the electron gun head assembly through the main pole shoe, the first auxiliary pole shoe, the second auxiliary pole shoe, and the third auxiliary pole shoe, so that the thermal electron beam is deflected to a specified position. When in use, the precision constant current source outside the vacuum chamber is turned on, and the current size of the constant current source is adjusted to change the magnetic field force to change the front and rear displacement of the thermal electron beam generated by the electron gun head assembly, so that the front and rear position of the thermal electron beam reaching the target can be changed. Since the working of the electromagnet is determined by the size of the current flowing through it, which is independent of the temperature change of the outside world, and the destination position of the thermal electrons can be precisely adjusted by adjusting the current of the precision programmable constant current source without the need for adjustment through a short magnetic sheet, the magnetic field force of the electromagnet can work flexibly and stably for a long time under the control of the precision constant current source without changing, effectively solving the problem of the difficulty of accurately adjusting the electron beam position and position drift in existing equipment.

[0029] Example 1

[0030] An electromagnet deflection structure for an electron gun of a vacuum coating machine comprises an electron gun body and an electron gun head assembly mounted on the electron gun body, the electron gun body comprising an electron gun base, main pole shoes are arranged at both ends of the upper surface of the electron gun base, main pole shoes are provided with main pole shoe holes, an electromagnet assembly is arranged on the upper surface of the electron gun base between the main pole shoes, the electromagnet assembly comprises an iron core, an energized coil is wound around the iron core, a wire passing slot hole is arranged at one end of the iron core, a lead wire of the energized coil passes through the wire passing slot hole, four fixing screw holes are arranged at both ends of the iron core, and fixing screws are also arranged, the fixing screws pass through the main pole shoes and are threadedly connected to the fixing screw holes at both ends of the iron core, the lead wire passes through the main pole shoe hole and the lead wire locking nut fixed on the main pole shoe in turn, and is led out of the vacuum chamber through a flexible bellows and an electrical connector and is electrically connected to a precision constant current source, and an electromagnet protective cover is installed on the main pole shoe through a fixing screw.

[0031] Example 2

[0032] On the basis of Example 1, electromagnet wire-passing shields are further provided on both sides of the main pole shoe, and the electromagnet wire-passing shields are fixed to the main pole shoe by fastening screws.

[0033] Example 3

[0034] Based on the above embodiment, the iron core is an iron core made of high magnetic permeability material.

[0035] Example 4

[0036] On the basis of the above embodiment, the energized coil is a high temperature resistant energized coil.

[0037] Example 5

[0038] On the basis of the above embodiments, the electron gun main body also includes water hole plugging plates arranged on both sides of the electron gun base, and the electron gun base is also equipped with an inlet and outlet water head, a third auxiliary pole shoe is installed on the upper surface of the main pole shoe, a first auxiliary pole shoe is installed between the third auxiliary pole shoes, a second auxiliary pole shoe is also installed on the third auxiliary pole shoe, and a gun head cover is also installed on the first auxiliary pole shoe, a cooling wire package box is installed on the side of the main pole shoe away from the electromagnet assembly, an XY scanning coil fixing bracket is installed on the cooling wire package box, an XY coil outlet locking nut is also installed on the XY scanning coil fixing bracket, a gun head anti-fouling cover is provided on the main pole shoe at the lower side of the cooling wire package box, an anti-fouling cover is also installed on the third auxiliary pole shoe, and a water hole plug is provided on the inner side of the main pole shoe.

[0039] The above are embodiments of the present invention.

[0040] The foregoing describes various preferred embodiments of the present invention. Unless the preferred implementation modes in various preferred embodiments are obviously self-contradictory or based on a certain preferred implementation mode, various preferred implementation modes can be arbitrarily superimposed and used in combination. The embodiments and specific parameters in the embodiments are only for clearly describing the verification process of the invention, and are not intended to limit the patent protection scope of the present invention. The patent protection scope of the present invention shall still be based on its claims. All equivalent structural changes made using the contents of the specification and drawings of the present invention should be included in the protection scope of the present invention.

Claims

1. An electromagnet deflection structure for an electron gun of a vacuum coating machine, characterized in that: The invention comprises an electron gun body and an electron gun head assembly (16) mounted on the electron gun body, wherein the electron gun body comprises an electron gun base (1), main pole shoes (12) are arranged at both ends of the upper surface of the electron gun base (1), and main pole shoe holes (303) are opened on the main pole shoes (12), and an electromagnet assembly is arranged between the main pole shoes (12) on the upper surface of the electron gun base (1), and the electromagnet assembly comprises an iron core (201), an energized coil (202) is wound around the iron core (201), and a wire slot hole (203) is opened at one end of the iron core (201). 04), the lead wire (203) of the energized coil (202) passes through the wire slot hole (204), four fixing screw holes (205) are opened at both ends of the iron core (201), and fixing screws (401) are also provided, and the fixing screws (401) pass through the main pole shoe (12) and are threadedly connected with the fixing screw holes (205) at both ends of the iron core (201), and the lead wire (203) passes through the main pole shoe hole (303) and the lead wire locking nut (302) fixed on the main pole shoe (12) in turn, and is led out to the true The air chamber is electrically connected to a precision constant current source, an electromagnet protective cover (2) is installed on the main pole shoe (12) by means of fixing screws (403), the electron gun body further comprises water hole plugging plates (11) arranged on both sides of the electron gun base (1), an inlet and outlet water head (8) is also installed on the electron gun base (1), a third auxiliary pole shoe (15) is installed on the upper surface of the main pole shoe (12), a first auxiliary pole shoe (13) is installed between the third auxiliary pole shoes (15), a second auxiliary pole shoe (14) is also installed on the third auxiliary pole shoe (15), and the first auxiliary pole shoe (13) is also provided with a gun head cover plate (4), a cooling wire package box (3) is provided on the side of the main pole shoe (12) away from the electromagnet assembly, an XY scanning coil fixing bracket (5) is provided on the cooling wire package box (3), an XY coil outlet locking nut (10) is also provided on the XY scanning coil fixing bracket (5), a gun head anti-fouling cover (7) is provided on the main pole shoe (12) at the lower side of the cooling wire package box (3), an anti-fouling cover plate (6) is also provided on the third auxiliary pole shoe (15), and a water hole plug (9) is provided on the inner side of the main pole shoe (12).

2. The electromagnet deflection structure for an electron gun of a vacuum coating machine according to claim 1, characterized in that: Electromagnet wire-passing shields (301) are also provided on both sides of the main pole shoe (12), and the electromagnet wire-passing shields (301) are fixed to the main pole shoe (12) by means of fastening screws (402).

3. The electromagnet deflection structure for an electron gun of a vacuum coating machine according to claim 1, characterized in that: The iron core (201) is an iron core made of a high magnetic permeability material.

4. The electromagnet deflection structure for an electron gun of a vacuum coating machine according to claim 1, characterized in that: The energized coil (202) is a high temperature resistant energized coil.

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