Methods of testing one or more microbattery devices, and systems implementing the testing methods

Abstract

The present invention relates to a method for testing at least one energy microstorage device comprising an anode made of metallic lithium formed by electrodepositing Li + ions on a metal inert to lithium ions, said method comprising a sequence of steps during the manufacturing of said anode, said sequence comprising: a step of measuring the initial voltage OCV of the energy microstorage device; a first charging step comprising the application of a current, the measurement of the voltage and internal resistance of the device to verify the compliance of the measurements on the very low lithium layer thickness formed at the anode; a second charging stabilization step comprising the application of a current and the measurement of the voltage of the device to verify the compliance of the measurements on the low lithium layer thickness formed at the anode; a step of applying zero current and measuring the voltage to confirm the preservation of the compliance of the energy microstorage device. The present invention also relates to a system for implementing this method.

Description

Technical Field

[0001] The field of this invention is the electrical testing of electronic or technical devices (integrated circuits, sensors, basic devices (resistors, diodes, capacitors, etc.)) manufactured using microelectronics technology.

[0002] More specifically, it relates to electrical testing methods specifically designed for a particular category of energy micro-storage devices (often referred to as micro-batteries). Background Technology

[0003] Microcells are fabricated by continuously depositing the following components on a substrate: (i) a first current collector; (ii) a first electrode; (iii) an electrolyte; (iv) a second electrode; and (v) a second current collector. Encapsulation is required, either by depositing additional layers or by adding a capping layer, to protect the device from chemical reactions with oxygen and water vapor.

[0004] Generally speaking, based on the type of negative electrode (or anode) typically deposited on top of the electrolyte, microcells can be classified into three categories:

[0005] -by Li + Anodes made of ion storage materials: This typically involves oxides of transition metals (VOx, TiOx, NiOx, etc.) or crystallogenic materials (Si, Ge, C, or mixtures thereof);

[0006] - Anode made of metallic lithium: A lithium layer is deposited in metallic form on top of the collector;

[0007] - An anode made of a metal inert to lithium: Referring to J. Electrochem's article (Soc.-2000-Neudecker-517-23), this configuration is often referred to as "lithium-free." In this case, during the first charge of the battery, Li₂ flows through the electrolyte and the second current collector... + Electrodeposition of ions (originating from the cathode) forms an anode made of metallic lithium.

[0008] When integrating microcells onto a silicon substrate and using microfabrication techniques, the last configuration is the most advantageous: it provides the presence of lithium metal (which is the most efficient anode due to its energy density, potential, and cycle performance) without the drawbacks associated with its presence in the process (sensitivity to air, incompatibility with etching and photolithography solutions).

[0009] Typically, the most common and reliable classification and electrical testing protocols involve: (i) testing the microcell through multiple complete charge and discharge cycles (from full charge to full discharge); and (ii) comparing the capacity values, voltage profiles, and internal resistance with reference values.

[0010] However, this approach has several limitations: in the context of microbatteries, and more particularly in the case of “lithium-free” microbatteries, cycling causes structural changes in the active stack, in which case metallic lithium is formed, making it highly sensitive to air and difficult to reconcile during the manufacturing process.

[0011] In the case of larger batteries, the application of this method remains very rare because it requires long testing cycles, which represents a significant cost.

[0012] Classification can be based on one or more parameters of the microcells without having to cycle them. The most commonly used electrical parameters include the following:

[0013] - Open-circuit voltage, or OCV. This voltage corresponds to the voltage measured at the microcell at the end of its fabrication and before any electrical operation is performed on it. It typically gives an indication of the microcell's state of charge. This is confirmed, for example, in the case of microcells with an anode or storage anode made of metallic lithium. In the case of "lithium-free" microcells, significant variability in OCV has been observed experimentally within a single wafer and between wafers, and a correlation between OCV and state of charge is impossible, as... Figure 1 As shown in the figure, this illustrates the variation in OCV of a microcell assembly produced on a batch of seven wafers. The variability is significant both within a single wafer and between wafers.

[0014] The variability relates to the fact that no lithium-based anode is formed at this stage, and OCV measurements only provide information about the state of the electrolyte / electrode interface, having no connection to the state of charge or future electrical behavior. Therefore, this parameter is irrelevant to establishing a classification of all microcell configurations.

[0015] - Internal resistance: This corresponds to all the resistance contributions that occur within the structure of the microcell, and is the sum of the resistance of the electrolyte, the charge transfer at the electrodes, and the interfaces. In the case of "lithium-free" microcells, this parameter is irrelevant to the classification, for the same reason explained above, because no anode made of metallic lithium is formed.

[0016] The challenge of classification under such precise conditions lies in having electrical parameters that can be used to categorize microcells (including "lithium-free" microcells) without being forced to perform cycles, risking that classification can only be performed after the manufacturing process is complete. Specifically, cycle-based classification requires encapsulating the microcells, either on a wafer or after the wafer has been diced and placed in a casing, especially to avoid structural changes and air sensitivity associated with the presence of metallic lithium. Intermediate classification for reducing manufacturing costs and identifying failure modes is not feasible, which is precisely what is sought in such precise conditions.

[0017] Document US9209496 proposes a classification method that involves measuring the open-circuit voltage (OCV) of a battery, discharging it for a certain period of time, and comparing the discharge end potential with the OCV potential. Clearly, this classification method is unsuitable for "lithium-free" microcells because: (i) the OCV provides no indication of the battery's state; and (ii) discharging "lithium-free" batteries does not allow for a stable change in their potential, as the microcells are already fully discharged at the time of testing.

[0018] US6526361 proposes a classification method that involves applying multiple consecutive pulses (current or voltage pulses) to the battery, with relaxation periods between each pulse; measuring the associated voltage response; and performing classification based on this response. This approach is not suitable for "lithium-free" microcells, which assume a voltage-stable initial state.

[0019] The papers “A comparative study of sorting methods for Lithium-ion batteries” (XP032671721) by Xiaoyu Li et al. and “Fundamentals, impedance, and performance of solid-state LI-metal microbatteries” (XP012247065) by Collins John et al. disclose methods for classifying lithium-ion batteries. Summary of the Invention

[0020] In this context, and to overcome the aforementioned problems, the present invention relates to a testing method particularly suitable for "lithium-free" microcells, methods from known prior art being incompatible with "lithium-free" microcells. This method enables degradation-free and rapid testing, and can also be applied to a single device or to multiple devices being tested in parallel.

[0021] More specifically, the present invention relates to a method for testing at least one energy micro-storage device, said energy micro-storage device comprising: electrodepositing Li on a metal inert to lithium ions. + An anode made of metallic lithium formed by ions; an electrolyte; and a cathode, the method comprising a sequence of testing steps during the manufacture of the anode, the sequence including:

[0022] - Step Ph-a: Measuring the initial voltage OCV of the device in open-circuit mode to obtain the value of the initial voltage of the energy micro-storage device at time t0;

[0023] - If the initial voltage is not zero, the first charging step Ph-b includes:

[0024] o Apply a current Ib for a duration tb to charge the first part of the device for a minimum charging time, thereby forming a first lithium layer thickness at the anode;

[0025] o Measure the voltage Vb between the terminals of the device;

[0026] The determination of the internal resistance Rb is related to the charging state considered for the device;

[0027] -If the voltage Vb is within the range defined by the component-based architecture Vb min -Vb max Within, and if the resistance Rb is within the range Rb defined by the component-based architecture. min -Rb max The stabilization steps in Ph-c include:

[0028] o Continue to apply at least one current Ic for a duration tc to charge the second part of the device for a second charging time tc, thereby forming a second lithium layer thickness at the anode;

[0029] o Measure the voltage Vc between the terminals of the device;

[0030] -If the voltage Vc is within the range defined by the component-based architecture Vc min -Vc max Within this process, the Ph-d steps include:

[0031] o applies zero current for a duration td;

[0032] o Measure the voltage V between the terminals of the device over time;

[0033] o Determine the parameter Vd, where Vd = ΔV / Δt;

[0034] o If Vd is within the range defined by the component-based architecture Vd min -Vd max If the device is tested and deemed effective, then the device is considered valid.

[0035] According to some variations of the present invention:

[0036] - The first charging step includes a series of measurements of voltage Vbi during a time period Δtbi, which is spaced by time Tbi, to determine a curve Vbi as a function of time and to determine a value of voltage Vb that can be defined as the maximum value of voltage Vbi or the average value of voltage Vbi.

[0037] The resistance Rb can be determined by the ratio Vbi / Ic of the curve Vbi as a function of time t after each time tbi.

[0038] According to some variations of the invention, the time interval Δtbi is on the order of 10 seconds, and the time Tbi is on the order of 0.1 seconds.

[0039] According to some variations of the invention, the first thickness is on the order of a few nanometers, and preferably 1 to 2 nanometers.

[0040] According to some variations of the present invention:

[0041] The stabilization step includes a series of measurements of voltage Vci during a time interval Δtci, which is time Tci, to determine the value of voltage Vc, which is defined as the average value of voltage Vci.

[0042] According to some variations of the invention, the time interval Δtci is on the order of 50 seconds, and the time Tci is on the order of 1 second.

[0043] According to some variations of the invention, the second thickness is less than 10 nanometers, and preferably equal to 5 nanometers.

[0044] According to some variations of the present invention:

[0045] - The holding step includes a series of measurements of voltage Vdi during a time interval Δtdi, which is spaced by time Tdi, to determine the curve Vdi as a function of time;

[0046] - The parameter Vd is determined by the gradient of the curve Vdi as a function of time t.

[0047] According to some variations of the invention, the time interval Δtdi is on the order of 10 seconds, and the time Tdi is on the order of 1 second.

[0048] The present invention also relates to a system for testing at least one energy micro-storage device, the system implementing the testing method of the present invention, the system comprising:

[0049] - A current generator connected to the device;

[0050] - A voltmeter connected to the device;

[0051] - A controller connected to the current generator and the voltmeter.

[0052] According to some variations of the invention, the current generator is programmable, and the voltmeter is programmable.

[0053] According to some variations of the invention, the controller includes a timer, a memory, and a processor.

[0054] The present invention also relates to an assembly comprising a plurality of systems for testing energy micro-storage devices, said systems implementing the method according to the invention, each system comprising:

[0055] - A current generator, which may be programmable, is connected to the device;

[0056] - A voltmeter, which may be programmable, is connected to the device;

[0057] - Each current generator and each voltmeter is connected to the controller.

[0058] The present invention also relates to an assembly comprising multiple systems for testing energy micro-storage devices, said systems implementing the testing method according to the present invention, each system comprising:

[0059] - A current generator, which may be programmable, is connected to the device;

[0060] - A voltmeter, which may be programmable, is connected to the device.

[0061] - Each current generator and each voltmeter is connected to the same central controller.

[0062] According to some variations of the invention, the test system is such that each controller or the central controller includes a timer, a memory, and a processor.

[0063] The test system of the present invention may include a central controller, the central controller including a memory, each controller managing the test phase of each test system, recording voltage measurement results in its memory, and the central controller retrieving the measurement results to record them in its memory. Attached Figure Description

[0064] The invention will be better understood and other advantages will become apparent from the following description (which is provided non-limitingly) and with the aid of the accompanying drawings, wherein:

[0065] Figure 1 The diagram shows the variation of the OCV of a microcell assembly produced on a batch of seven wafers, or more precisely, a Henry graph, where the vertical axis is the norm function of x.

[0066] Figure 2 The evolution of the voltage across the terminals of the microcell device as a function of time is shown in all steps of the test method according to the invention.

[0067] Figure 3 A flowchart is shown, including all the successive test phases of the test method according to the present invention;

[0068] Figure 4 An example of a system according to the invention for testing multiple energy micro-storage devices is shown, each device being connected to a controller;

[0069] Figure 5 An example of a system according to the invention for testing multiple energy micro-storage devices is shown, each device being connected to the same central controller. Detailed Implementation

[0070] Generally speaking, the testing method proposed in this invention aims to overcome the aforementioned shortcomings by using non-degradable and rapid testing techniques. Advantageously, this technique can be applied to a single device or to multiple devices being tested in parallel.

[0071] The testing method of the present invention uses the test sequence described below, which links the steps together after verifying the standard in the previous step, thereby enabling the faulty device to be identified as early as possible.

[0072] Energy micro-storage devices are referred to as micro-batteries in the following text.

[0073] In the context of one example of a lithium-based microbattery, it is described as including a metal anode, which may be made of metal, such as titanium, and a solid electrolyte, which may be made of, for example, LiPON (lithium oxynitride) and a cathode, which may be made of, for example, LiCoO2.

[0074] This technique is advantageous because it applies four phases to each device under test, which are triggered one after another when verification criteria are met. The four phases described below are called the initial OCV voltage measurement phase, the charging phase, the stabilization phase, and the holding phase. Figure 2 The linking of these stages is illustrated by showing, in one example of the method described in more detail below, the evolution of the voltage across the terminals of the device under test as a function of time.

[0075] The sequence of this test phase is described in detail in the remainder of the instruction manual, and is also described by... Figure 3 The flowchart shown illustrates this sequence.

[0076] The test system is implemented on a single device, or multiple test systems can be implemented in parallel on a set of devices. According to a first variant of the invention, the module for implementing the test method of the invention can be a module specifically used to test each device Dn. Figure 4Only one of these devices Dn is shown in the diagram. These modules include a programmable current generator An, a programmable voltmeter Vn, and a controller Cn. Device Dn has an anode connection Dn-Anode and a cathode connection Dn-Cathode, generator An has a positive connection An-H and a negative connection An-L, and the voltmeter has a positive connection Vn-H and a negative connection Vn-L.

[0077] The testing method involves connecting the current generator (An-H), the voltmeter (Vn-H), and the micro-battery device (DN-Anode) together, and connecting the current generator (An-L), the voltmeter (Vn-L), and the same micro-battery device (DN-Cathode) together to perform micro-battery device testing. This basic system can be repeated multiple times to test multiple devices.

[0078] Each basic system can be driven by a controller Cn, which includes a processor Pn, a timer Crn, and a memory Mn. This controller is connected to each voltmeter Vn and each current generator An and becomes an integral part of the system, as in... Figure 4 As shown; in this configuration, all controllers Cn of the multiple test systems are connected to the central controller Cc to drive all test systems. The advantage of this configuration is that the algorithm used exhibits greater flexibility and is easier to implement.

[0079] According to another variant of the invention, multiple systems can be driven by a central controller Cc, which includes a timer Crc and a memory Mc connected to all voltmeters Vn and all current generators An, such as Figure 5 As shown.

[0080] The control module can therefore be provided by a central controller or by a set of separate controllers. In either case, the controller used contains characteristic times in its memory Mn or Mc, which are the characteristic times used by voltmeter Vn to perform voltage measurements and by timer Crn or timer Crc to perform time measurements. The controller used records these times and voltage measurements in its memory Mn or Mc.

[0081] If only a central controller Cc exists, it manages the test sequences of multiple test systems and records the measurement results in its memory Mc; if there is a controller Cn associated with each test system, each controller manages the test sequence for each test system, records the measurement results in its memory Mn, and then the central controller recovers all the measurement results and records them in its memory Mc.

[0082] The test method according to the invention begins with a first phase, Ph-a, which includes measuring the initial voltage OCV of each device using a voltmeter Vn connected to each device. Each of these measurements is recorded in the memory Mn of each controller Cn in each system, or in the memory Mc of the central controller Cc. This first phase makes it possible, for example, to obtain the parameter OCV (open-circuit voltage) of each device based on this voltage measurement at time t0. In the case of "lithium-free" microcells, only measurements with values ​​equal to zero are useful, as this represents a fault in short-circuit mode and makes it possible to stop testing of the problematic component. Continuing to... Figure 3 The flowchart in Ph-a illustrates this first stage, which may be decisive and stop testing of the faulty device.

[0083] Next, during the second stage, known as the charging phase Ph-b, each current generator An connected to each device Dn applies a current Ib to each device starting at time t0. This current makes it possible to charge even the smallest part of the device, which has the effect of not damaging the device. More specifically, this operation involves triggering Li... + The migration of ions and the formation of a continuous nanometer-thickness (e.g., from 1 to 2 nm) of lithium at the anode, thus transforming the “lithium-free” configuration into a metallic lithium configuration without affecting the structure of the component, makes it possible to ensure the relevance to the posterior classification and the possibility of performing this classification at any time during the manufacturing process.

[0084] This second stage makes it possible, for example, to obtain the parameter Vb by extracting the maximum voltage obtained from measurements recorded during this stage. If the voltage Vb lies within the range defined by the component-based architecture... bmin -V bmax Within this range, the component is considered compliant. (Interval V) bmin -V bmax This range is primarily defined by the redox pair involved, and more specifically by the potential of the cathode (or positive electrode) relative to an electrode made of metallic lithium. For example, in the case of a cathode made of LiCoO2, this range would correspond to 3.85–3.89 V, while in the case of a cathode made of Li4Ti5O2, it would correspond to 3.85–3.89 V. 12 If manufactured correctly, this range will correspond to 1.4-1.6V. Continuing... Figure 3 The flowchart in the Ph-b stage illustrates this second stage, which can be decisive and makes it possible to continue or stop testing if a device that does not meet the expected values ​​is considered non-compliant.

[0085] Next, during the third stage, known as the stabilization phase Ph-c, the charging phase Ph-b continues at predetermined intervals, such as 50 seconds at 1-second intervals, during which each current generator An connected to each device Dn continues to apply a current Ic (which can be equal to Ib) to each device Dn. This step aims to adjust the thickness of the nanolithium layer according to the requirements of electrical testing. Several thicknesses may be beneficial. The maximum sufficient thickness can typically be less than 10 nm, and preferably less than 5 nm. It should be noted that the total thickness of the metallic lithium used in a complete cycle corresponds to 5000 nm, and the proportion used for testing is approximately 1 / 1000.

[0086] This constitutes the main benefit of this method, which makes it possible to perform decisive tests from the formation of the lithium metal electrode, without having to complete the manufacturing process in order to test the micro battery device.

[0087] This third stage makes it possible, for example, to obtain the parameter Vc by extracting the average of the voltage values ​​obtained from measurements recorded during this stage. If the parameter Vc lies within the range defined by the component-based architecture... cmin -V cmax Within this scope, the component is considered compliant. cmin -V cmax The determination of this value is essentially related to the theoretical change in the microcell potential after injecting a charge corresponding to Ic× time. This amount is very low (less than 0.1% of the total charge that the microcell can store), and in the case of a functional microcell, the value V is... cmin -V cmax AND value V bmin -V bmax They are essentially similar (+ / -10%). In the case of non-functional microcells, the difference between the two potential ranges will be greater. This continues... Figure 3 The flowchart in Ph-c illustrates this third stage, which can be decisive and makes it possible to continue or stop testing if a device that does not meet the expected values ​​is considered non-compliant.

[0088] Other parameters can be considered during this phase, such as the gradient or delta V. The value of the gradient (V) cmin -V cmax The formula ) / Ic makes it possible to estimate the internal resistance of the microcell under such precise charging conditions, and in the same way, V cmin and V cmax The difference or ratio V between them cmin / V cmaxInformation about the charging kinetics of the microcell can be provided. Next, in a fourth stage called the retention phase Ph-d, each current generator applies zero current, and the processes of stages Ph-b and Ph-c continue for predetermined periods of 10 seconds, for example, with 1-second intervals. This fourth stage makes it possible, for example, to obtain the parameter Vd by extracting the gradient (derivative) of the curve of voltage versus time obtained from measurements recorded during this stage. If the parameter Vd lies within the interval V defined by the component-based architecture... dmin -V dmax If it is included, then the component is considered compliant. Figure 3 The Ph-d stage in the flowchart illustrates this fourth stage, which makes it possible to conclude that the device under test is compliant. This stage enables the evaluation of the microcell's kinetics and relaxation magnitude after the previous charging stage. Ideally, relaxation is limited to a potential drop equal to Ic × Rint (internal resistance), which is very low given the low current Ic used.

[0089] Ideally: Vb = Vc = Vd

[0090] Statistical laws can also be used to process all previously obtained parameters in order to characterize multiple elements.

[0091] The testing method according to the invention is advantageous because it enables the acquisition of a set of parameters characterizing multiple devices in 1 minute and 10 seconds (if using the exemplary predetermined values ​​given in stages Ph-a to Ph-d) on the device currently being manufactured (directly on the wafer), without damaging the device, and subsequently enables the completion of the manufacturing steps.

Claims

1. A method for testing at least one energy microstorage device, the energy microstorage device comprising: anodes made of metallic lithium formed by electrodepositing Li + ions on a metal that is inert to lithium ions; electrolyte; and a cathode, the method comprising a sequence of test steps during the manufacturing of the anode, the sequence comprising: a step of measuring (Ph-a) the initial voltage (OCV) of the device in open circuit mode to obtain at time t0 the value of the initial voltage of the energy microstorage device; if the initial voltage is not zero, a first charging step (Ph-b) comprising: applying a current Ib for a duration tb so as to charge the device, thereby forming a first lithium layer thickness at the anode; measuring the voltage Vb between the terminals of the device; determining the internal resistance Rb; If the voltage Vb lies within an interval Vb min -Vb max defined by the component-based architecture, and if the resistance Rb lies within an interval Rb min -Rb max defined by the component-based architecture, then the stabilizing step (Ph-c) comprises: continuing to apply at least one current Ic for a duration tc so as to charge the device, thereby forming a second lithium layer thickness at the anode; measuring the voltage Vc between the terminals of the device; If the voltage Vc lies in an interval Vc min -Vc max defined based on the component-based architecture, then the holding step (Ph-d) comprises: performing a zero current application for a duration td; measuring the voltage V between the terminals of the device over time; Determine the parameter Vd, where Vd = V / t; If Vd lies within the interval Vd min -Vd max then the device is tested as valid.

2. The method according to claim 1, wherein: said first charging step comprises a series of measurements of the voltage Vbi during a period of time separated by a time Tbi to determine a curve Vbi as a function of time and to determine a value of the voltage Vb which can be defined as the maximum value of the voltage Vbi or the average value of the voltage Vbi; the resistance Rb is determined after each time Tbi by the ratio Vbi / Ib of the curve Vbi as a function of time t.

3. The method of claim 2, wherein, The time period tbi is of the order of 10 seconds, the time Tbi is of the order of 0.1 seconds.

4. The method of claim 1, wherein, The first lithium layer thickness is of the order of a few nanometers.

5. The method according to any one of claims 2 to 4, wherein: Said step of stabilizing comprises a series of measurements of the voltage Vci during time periods separated by a time Tci a series of measurements of the voltage Vci during time periods separated by a time Tci to determine a value of the voltage Vc defined as the average of said voltages Vci.

6. The method of claim 5, wherein, The time period tci is of the order of 50 seconds, the time Tci is of the order of 1 second.

7. The method of any one of claims 1 to 4, wherein, The second lithium layer thickness is less than 10 nanometers.

8. The method according to any one of claims 1 to 4, wherein: the holding step comprises a series of measurements of the voltage Vdi during a period At di separated by times Tdi to determine a curve Vdi as a function of time; the parameter Vd is determined by the gradient of the curve Vdi as a function of time t.

9. The method of claim 8, wherein, The time period tdi is of the order of 10 seconds, the time Tdi is of the order of 1 second.

10. A system for testing at least one energy microstorage device, said system implementing the method for testing at least one energy microstorage device according to any one of claims 1 to 9, said energy microstorage device comprising: anodes made of metallic lithium formed by electrodepositing Li + ions on a metal that is inert to lithium ions; electrolyte; and a cathode, the method comprising a sequence of test steps during the manufacturing of the anode, the sequence comprising: a step of measuring (Ph-a) the initial voltage (OCV) of the device in open circuit mode to obtain at time t0 the value of the initial voltage of the energy microstorage device; if the initial voltage is not zero, a first charging step (Ph-b) comprising: applying a current Ib for a duration tb so as to charge the device, thereby forming a first lithium layer thickness at the anode; measuring the voltage Vb between the terminals of the device; determining the internal resistance Rb; If the voltage Vb lies within an interval Vb min -Vb max defined by the component-based architecture, and if the resistance Rb lies within an interval Rb min -Rb max defined by the component-based architecture, then the stabilizing step (Ph-c) comprises: continuing to apply at least one current Ic for a duration tc so as to charge the device, thereby forming a second lithium layer thickness at the anode; measuring the voltage Vc between the terminals of the device; If the voltage Vc lies in an interval Vc min - Vc max defined based on the component-based architecture, then the holding step (Ph-d) comprises: performing a zero current application for a duration td; measuring the voltage V between the terminals of the device over time; Determine the parameter Vd, where Vd = V / t; If Vd lies in the interval Vd min -Vd max then the device is tested as valid; the system comprises: a current generator connected to the device; a voltmeter connected to the device; a controller connected to the current generator and to the voltmeter.

11. The system of claim 10, wherein, The current generator is programmable and the voltmeter is programmable.

12. The system of any one of claims 10 and 11, wherein, The controller comprises a timer, a memory and a processor.

13. An assembly of a plurality of systems for testing energy microstorage devices (Dn), the systems implementing the method according to any one of claims 1 to 9, each system comprising: programmable current generator (An) connected to said device (Dn); programmable voltmeter (Vn) connected to said device (Dn); each current generator (An) and each voltmeter (Vn) are connected to a controller (Cn).

14. Assembly according to claim 13, wherein said controller (Cn) comprises a timer, a memory and a processor.

15. An assembly consisting of a plurality of systems for testing energy micro storage devices (Dn), said systems implementing the method for testing at least one energy micro storage device according to any one of claims 1 to 9, said energy micro storage device comprising: anodes made of metallic lithium formed by electrodepositing Li + ions on a metal that is inert to lithium ions; electrolyte; and a cathode, said method comprising a sequence of test steps during the manufacturing of said anode, said sequence comprising: a step of measuring (Ph-a) the initial voltage (OCV) of said device in open circuit mode to obtain at time to the value of said initial voltage of said energy micro-reserve device; if said initial voltage is not zero, a first charging step (Ph-b) comprising: applying a current Ib for a time tb so as to charge said device, thereby forming a first lithium layer thickness at said anode; measuring the voltage Vb between the terminals of said device; determining the internal resistance Rb; If the voltage Vb lies within an interval Vb min -Vb max defined by the component-based architecture, and if the resistance Rb lies within an interval Rb min -Rb max defined by the component-based architecture, then the stabilizing step (Ph-c) comprises: continuing to apply at least one current Ic for a time tc so as to charge said device, thereby forming a second lithium layer thickness at said anode; measuring the voltage Vc between the terminals of said device; If the voltage Vc lies in an interval Vc min -Vc max defined based on the component-based architecture, then the holding step (Ph-d) comprises: performing a zero current application for a time td; measuring the voltage V between the terminals of said device over time; Determine the parameter Vd, where Vd = V / t; If Vd lies in the interval Vd min -Vd max defined by the component-based architecture, the device is tested as valid; each system comprises: a programmable current generator (An) connected to said device (Dn); a programmable voltmeter (Vn) connected to said device (Dn), each current generator (An) and each voltmeter (Vn) are connected to the same central controller (Cc).

16. The assembly of claim 15, wherein, said central controller comprises a timer, a memory and a processor.

17. Assembly according to claim 15, wherein said central controller (Cc) comprises a memory (Mc), each system further comprising a controller (Cn) connected to said central controller (Cc), each controller (Cn) managing the test phases of each test system, recording the voltage measurements in its memory (Mn), said central controller recovering said measurements so as to record them in its memory (Mc).

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