Display substrate, manufacturing method thereof and display device

Abstract

The display substrate, the manufacturing method thereof and the display device provided by the present disclosure comprise: a substrate substrate; a light-emitting material layer located above the substrate substrate; a plurality of first super-surface mirror structures located between the light-emitting material layer and the substrate substrate, the plurality of first super-surface mirror structures being used for converting the emitted light of the light-emitting material layer into light of at least one color; and a plurality of organic light detectors located between the light-emitting material layer and the substrate substrate, the organic light detectors being arranged at the gaps of the first super-surface mirror structures.

Description

Technical Field

[0001] This disclosure relates to the field of display technology, and in particular to a display substrate, a method for manufacturing the substrate, and a display device. Background Technology

[0002] With the continuous development of science and technology, fingerprint recognition technology has gradually been applied to people's daily lives. Fingerprint recognition technology identifies individuals by comparing the valleys and ridges of different fingerprints. Generally, fingerprint recognition technology can be divided into optical fingerprint recognition technology, capacitive fingerprint recognition technology, and ultrasonic fingerprint recognition technology. Among these, optical touch recognition technology has a relatively large recognition range and relatively low cost, making it favored by major panel manufacturers. Summary of the Invention

[0003] In view of this, the present disclosure provides a display substrate, a method for manufacturing the same, and a display device, which increase the amount of signal of fingerprint reflected light received by the organic photodetector by increasing the area of ​​the organic photodetector, thereby improving the sensitivity of fingerprint recognition.

[0004] Therefore, the display substrate provided in this embodiment includes:

[0005] Substrate;

[0006] A light-emitting material layer is located on the substrate.

[0007] Multiple first metasurface mirror structures are located between the light-emitting material layer and the substrate, and the multiple first metasurface mirror structures are used to convert the emitted light of the light-emitting material layer into light of at least one color;

[0008] Multiple organic photodetectors are located between the luminescent material layer and the substrate, and the organic photodetectors are disposed in the gap of the first metasurface mirror structure.

[0009] In some embodiments, in the display substrate provided in the present disclosure, the plurality of metasurface mirror structures are arranged in an array, and each three adjacent columns of the first metasurface mirror structures form a group;

[0010] The column gap width between two adjacent columns of the first metasurface mirror structure within a group is smaller than the group gap width between two adjacent groups of the first metasurface mirror structure.

[0011] The organic photodetector is disposed at the inter-group gap of the first metasurface mirror structure.

[0012] In some embodiments, in the display substrate provided in the present disclosure, the gap width between two adjacent first metasurface mirror structures is the same.

[0013] The organic photodetector is disposed in all the gaps of the first metasurface mirror structure.

[0014] In some embodiments, in the display substrate provided in this disclosure, the plurality of first metasurface mirror structures include a plurality of first sub-metasurface mirror structures, a plurality of second sub-metasurface mirror structures, and a plurality of third sub-metasurface mirror structures; wherein...

[0015] The plurality of first sub-metasurface mirror structures are used to convert the emitted light from the luminescent material layer into light of a first color, the plurality of second sub-metasurface mirror structures are used to convert the emitted light from the luminescent material layer into light of a second color, and the plurality of third sub-metasurface mirror structures are used to convert the emitted light from the luminescent material layer into light of a third color.

[0016] In some embodiments, in the display substrate provided in the present disclosure, the first sub-metasurface mirror structure includes a plurality of first nanostructures, the second sub-metasurface mirror structure includes a plurality of second nanostructures, and the third sub-metasurface mirror structure includes a plurality of third nanostructures.

[0017] The heights of the first nanostructure, the second nanostructure, and the third nanostructure are approximately the same.

[0018] Each of the first sub-metamirror structures has a first spacing between two adjacent first nanostructures, each of the second sub-metamirror structures has a second spacing between two adjacent second nanostructures, and each of the third sub-metamirror structures has a third spacing between two adjacent third nanostructures, wherein the first spacing, the second spacing, and the third spacing are different.

[0019] In some embodiments, in the display substrate provided in the present disclosure, the wavelengths of the first color, the second color, and the third color decrease sequentially, while the first spacing, the second spacing, and the third spacing increase sequentially.

[0020] In some embodiments, in the display substrate provided in the present disclosure, the light emitted by the light-emitting material layer is white light, the first color light is red light, the second color light is green light, and the third color light is blue light;

[0021] The height of the first nanostructure, the height of the second nanostructure, and the height of the third nanostructure are greater than or equal to 75 nm and less than or equal to 85 nm.

[0022] The first spacing is greater than or equal to 150nm and less than or equal to 170nm, the second spacing is greater than or equal to 230nm and less than or equal to 250nm, and the third spacing is greater than or equal to 350nm and less than or equal to 380nm.

[0023] In some embodiments, the display substrate provided in the present disclosure further includes a plurality of second metasurface mirror structures, the plurality of second metasurface mirror structures being located between the layer containing the plurality of organic photodetectors and the substrate, and the orthographic projection of the plurality of second metasurface mirror structures on the substrate substantially coincides with the orthographic projection of the plurality of organic photodetectors on the substrate;

[0024] The second metasurface mirror structure is used to receive and modulate the fingerprint reflected light passing through the organic photodetector, and reflect the modulated fingerprint reflected light back into the organic photodetector so that the modulated fingerprint reflected light resonates within the organic photodetector.

[0025] In some embodiments, in the display substrate provided in the present disclosure, each second metasurface mirror structure includes a plurality of fourth nanostructures, wherein the height of the fourth nanostructure is greater than or equal to 60 nm and less than or equal to 200 nm, the diameter of the fourth nanostructure is greater than or equal to 80 nm and less than or equal to 200 nm, and the spacing between two adjacent fourth nanostructures in each second metasurface mirror structure is greater than or equal to 100 nm and less than or equal to 400 nm.

[0026] In some embodiments, in the display substrate provided in the present disclosure, both the first metasurface mirror structure and the second metasurface mirror structure include an imprint adhesive layer and a metal layer located on the side of the imprint adhesive layer away from the substrate.

[0027] The imprinted adhesive layers contained in different first metasurface mirror structures are independent of each other, while the metal layers contained in all first metasurface mirror structures are integrally formed;

[0028] The imprinted adhesive layers contained in different second metasurface mirror structures are independent of each other, while the metal layers contained in all second metasurface mirror structures are integrally formed.

[0029] In some embodiments, in the display substrate provided in the present disclosure, the materials of the first metasurface mirror structure and the second metasurface mirror structure are both metal.

[0030] Based on the same inventive concept, this disclosure provides a display device including the display substrate provided in the above-described embodiments of this disclosure.

[0031] Based on the same inventive concept, this disclosure provides a method for manufacturing the above-mentioned display substrate, including:

[0032] Provide a substrate;

[0033] Multiple first metasurface mirror structures and multiple organic photodetectors located in the gaps between the first metasurface mirror structures are formed on the substrate.

[0034] A light-emitting material layer is formed over the entire surface of the layers containing the plurality of first metasurface mirror structures and the plurality of organic photodetectors.

[0035] In some embodiments, the fabrication method provided in this disclosure includes forming a plurality of first metasurface mirror structures and a plurality of organic photodetectors located at the gaps between the first metasurface mirror structures on the substrate, specifically comprising:

[0036] A metal material layer is formed on the substrate.

[0037] Multiple organic photodetectors are formed on the metal material layer;

[0038] The metal material layer at the gap of the organic photodetector is etched to form at least one first metasurface mirror structure. Each first metasurface mirror structure includes multiple nanostructures. The heights of the nanostructures contained in different first metasurface mirror structures are approximately the same, but the spacing is different.

[0039] In some embodiments, the fabrication method provided in this disclosure includes forming a plurality of first metasurface mirror structures and a plurality of organic photodetectors located at the gaps between the first metasurface mirror structures on the substrate, specifically comprising:

[0040] A mask plate with multiple nanostructures on its surface is provided, wherein the multiple nanostructures form at least one nanostructure array, and the nanostructures contained in different nanostructure arrays have approximately the same height but different spacing.

[0041] An imprinting adhesive layer with a thickness greater than the height of the nanostructure is formed on the substrate, and the imprinting adhesive layer is imprinted using the mask, so that the plurality of nanostructures are transferred onto the imprinting adhesive layer.

[0042] After curing the imprinted adhesive layer and ashing the imprinted adhesive layer at the gaps between the nanostructure arrays, the multiple nanostructures are retained.

[0043] A metal layer is deposited on the layer containing the plurality of nanostructures to form at least one first metasurface mirror structure, and each first metasurface mirror structure is configured to correspond to one of the nanostructure arrays.

[0044] Multiple organic photodetectors are formed at positions corresponding to the gaps in the first metasurface mirror structure on the metal layer.

[0045] The beneficial effects of this disclosure are as follows:

[0046] The display substrate, its fabrication method, and display device provided in this disclosure include: a substrate; a light-emitting material layer located on the substrate; a plurality of first metasurface mirror structures located between the light-emitting material layer and the substrate, the plurality of first metasurface mirror structures being used to convert the emitted light from the light-emitting material layer into light of at least one color; and a plurality of organic photodetectors located between the light-emitting material layer and the substrate, the organic photodetectors being disposed at the gaps between the first metasurface mirror structures. In this disclosure, the first metasurface mirror structures below the light-emitting material layer can convert the emitted light from the light-emitting material layer into light of at least one color to achieve image display. This eliminates the need for a pixel delimiting layer, thereby saving a significant amount of space for fabricating the organic photodetectors. This allows for a larger area of ​​the organic photodetectors, enabling them to receive more fingerprint-reflected light, thereby increasing the intensity of the received fingerprint-reflected light and enhancing the sensitivity of fingerprint recognition. Attached Figure Description

[0047] Figure 1 This is a schematic diagram of a display substrate provided in an embodiment of the present disclosure;

[0048] Figure 2 For along Figure 1 A cross-sectional view of the central I-II line;

[0049] Figure 3 For along Figure 1 Another cross-sectional view of the central I-II line;

[0050] Figure 4 This is a schematic diagram of another structure of a display substrate provided in an embodiment of this disclosure;

[0051] Figure 5 For along Figure 4 A cross-sectional view of line III-IV in the middle;

[0052] Figure 6 For along Figure 4 Another cross-sectional view of the middle III-IV line;

[0053] Figure 7 A schematic diagram of the first sub-metasurface mirror structure, the second sub-metasurface mirror structure, and the third sub-metasurface structure provided in the embodiments of this disclosure;

[0054] Figure 8 A schematic diagram of the structure including an organic photodetector and a second metasurface mirror provided for embodiments of this disclosure;

[0055] Figure 9 A flowchart illustrating the fabrication of metasurface mirror structures using etching methods, provided in this embodiment of the disclosure;

[0056] Figure 10 A flowchart illustrating the fabrication of a metasurface mirror structure using a transfer method, as provided in this embodiment of the disclosure;

[0057] Figure 11 for Figure 8 The production process flowchart. Detailed Implementation

[0058] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. It should be noted that the dimensions and shapes of the figures in the drawings do not reflect actual proportions and are only intended to illustrate the content of this disclosure. Furthermore, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout the drawings.

[0059] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar terms used in this disclosure and the claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as “inner,” “outer,” “upper,” and “lower” are used only to indicate relative positional relationships, and these relative positional relationships may change accordingly when the absolute position of the described object changes.

[0060] In recent years, organic light-emitting diode (OLED) displays have gradually attracted more attention as a new type of flat panel display product. They have excellent characteristics such as active light emission, high brightness, high resolution, wide viewing angle, fast response speed, small thickness, low power consumption, flexibility, wide operating temperature range, and relatively simple structure and manufacturing process, and have broad application prospects.

[0061] To protect user information security, organic light-emitting diode (OLED) display devices in related technologies incorporate in-screen fingerprint recognition. Specifically, both the OLED and the organic photodetector (OPD) are placed within an opening in the pixel boundary layer (PDL). The OLED serves as both the display light source and the fingerprint recognition light source, while the OPD enables fingerprint recognition. However, because the pixel boundary layer occupies space, the space available for the OPD is limited, which is not conducive to fingerprint recognition.

[0062] To at least address the aforementioned problems in related technologies, embodiments of this disclosure provide a display substrate, such as... Figure 1 and Figure 2 As shown, it includes:

[0063] Substrate 101;

[0064] A light-emitting material layer 102 is located on the substrate 101;

[0065] Multiple first metasurface mirror structures 103 are located between the light-emitting material layer 102 and the substrate 101. The multiple first metasurface mirror structures 103 are used to convert the emitted light from the light-emitting material layer 102 into light of at least one color.

[0066] Multiple organic photodetectors 104 are located between the light-emitting material layer 102 and the substrate 101, and the organic photodetectors 104 are disposed in the gap of the first metasurface mirror structure 103.

[0067] Metasurface mirror structures are based on the phase abrupt changes at the interface obtained when electromagnetic waves are scattered on planar microstructures. They fully utilize the degree of freedom of the "arrangement order" of artificial microstructures to achieve effective control over the amplitude, phase, polarization, and wavefront distribution of electromagnetic waves. When light is incident on an interface, if a phase gradient exists at the interface, the refraction and projection of light no longer obey Snell's law. Metasurfaces alter the phase gradient at the interface by changing the subwavelength morphology of the medium, thereby controlling the phase of light and resulting in phenomena such as light deflection, focusing, and polarization conversion.

[0068] Based on this, in the display substrate provided in the embodiments of this disclosure, the emitted light from the light-emitting material layer 102 can be converted into light of at least one color by the first metasurface mirror structure 103 below the light-emitting material layer 102 to achieve image display. This eliminates the need for a pixel delimiting layer, saving significant space for the fabrication of the organic photodetector 104. This allows the organic photodetector 104 to have a larger area, enabling it to receive more reflected fingerprint light, thereby increasing the intensity of the received reflected fingerprint light, enhancing the sensitivity of fingerprint recognition, and obtaining a clear fingerprint image.

[0069] In some embodiments, in the display substrate provided in the present disclosure, such as Figure 1As shown, multiple metasurface mirror structures are arranged in an array, with every three adjacent columns of first metasurface mirror structures 103 forming a group. Within a group, the column gap d1 between two adjacent columns of first metasurface mirror structures 103 is smaller than the group gap d2 between two adjacent groups of first metasurface mirror structures 103. An organic photodetector 104 is positioned at the group gap d2 of the first metasurface mirror structures 103. By setting the first metasurface mirror structures 103 to have a smaller column gap d1 within a group, and a larger group gap d2 between groups, this arrangement allows the organic photodetector 104 to be positioned at the larger group gap d2, effectively increasing the area of ​​the organic photodetector 104 and improving fingerprint recognition performance.

[0070] In some embodiments, in the display substrate provided in the present disclosure, such as Figure 4 As shown, the first metasurface mirror structure 103 can be uniformly distributed, that is, the gap d width of any two adjacent first metasurface mirror structures 103 is the same (i.e., it may be exactly the same, or it may be approximately the same within the error range caused by factors such as process or measurement). At this time, the organic photodetector 104 can be set at all the gaps of the first metasurface mirror structure 103 so as to maximize the area of ​​the organic photodetector 104.

[0071] In some embodiments, in the display substrate provided in the present disclosure, such as Figures 1 to 6 As shown, in order to achieve color image display, the multiple first metasurface mirror structures 103 may include multiple first sub-metasurface mirror structures 31, multiple second sub-metasurface mirror structures 32, and multiple third sub-metasurface mirror structures 33; wherein, the multiple first sub-metasurface mirror structures 31 are used to convert the emitted light of the light-emitting material layer 102 into light of a first color, the multiple second sub-metasurface mirror structures 32 are used to convert the emitted light of the light-emitting material layer 102 into light of a second color, and the multiple third sub-metasurface mirror structures 33 are used to convert the emitted light of the light-emitting material layer 102 into light of a third color.

[0072] In some embodiments, such as Figure 1 and Figure 4As shown, multiple first sub-metasurface mirror structures 31, multiple second sub-metasurface mirror structures 32, and multiple third sub-metasurface mirror structures 33 can be arranged in an array. Each column includes either a first sub-metasurface mirror structure 31, a second sub-metasurface mirror structure 32, or a third sub-metasurface mirror structure 33. Furthermore, each group of first sub-metasurface mirror structures 103 can include a column of first sub-metasurface mirror structures 31, a column of second sub-metasurface mirror structures 32, and a column of third sub-metasurface mirror structures 33. Of course, in specific implementations, the multiple first sub-metasurface mirror structures 31, multiple second sub-metasurface mirror structures 32, and multiple third sub-metasurface mirror structures 33 can be arranged in other ways, which are not specifically limited here.

[0073] In some embodiments, in the display substrate provided in the present disclosure, such as Figure 2 , Figure 3 , Figures 5 to 7 As shown, the first sub-metamirror structure 31 may include multiple first nanostructures n1, the second sub-metamirror structure 32 may include multiple second nanostructures n2, and the third sub-metamirror structure 33 may include multiple third nanostructures n3. Optionally, the multiple nanostructures contained in each first metamirror structure 103 may be arranged in an array, and the array arrangement may be a square array. In some embodiments, the heights of the first nanostructures n1, the second nanostructures n2, and the third nanostructures n3 are approximately the same (i.e., they may be exactly the same, or they may be within the error range caused by factors such as process or measurement); there is a first spacing d3 between two adjacent first nanostructures n1 in each first sub-metamirror structure 31, a second spacing d4 between two adjacent second nanostructures n2 in each second sub-metamirror structure 32, and a third spacing d5 between two adjacent third nanostructures n3 in each third sub-metamirror structure 33, wherein the first spacing d3, the second spacing d4, and the third spacing d5 are different. Different first spacing d3, second spacing d4, and third spacing d5 allow the first sub-metasurface mirror structure 31, the second sub-metasurface mirror structure 32, and the third sub-metasurface mirror structure 33 to convert the emitted light from the luminescent material layer 102 into light of different colors, thereby achieving color image display. Furthermore, for ease of fabrication, the heights of the first nanostructure n1, the second nanostructure n2, and the third nanostructure n3 are set to be approximately the same in this disclosure.

[0074] In some embodiments, in the display substrate provided in the present disclosure, the wavelengths of the first color light, the second color light, and the third color light decrease sequentially, and correspondingly, the first spacing, the second spacing, and the third spacing increase sequentially; that is, there is a negative correlation between the spacing of the nanostructures contained in the first metasurface mirror structure 103 and the wavelength of the light converted by the first metasurface mirror structure 103.

[0075] In some embodiments, in the display substrate provided in the present disclosure, the emitted light of the light-emitting material layer 102 can be white light W, the first color light is red light R, the second color light is green light G, and the third color light is blue light B; correspondingly, the height of the first nanostructure n1, the height of the second nanostructure n2, and the height of the third nanostructure n3 are greater than or equal to 75nm and less than or equal to 85nm, for example, 80nm; the first spacing d3 is greater than or equal to 150nm and less than or equal to 170nm, for example, 160nm; the second spacing d4 is greater than or equal to 230nm and less than or equal to 250nm, for example, 240nm; and the third spacing d5 is greater than or equal to 350nm and less than or equal to 380nm, for example, 365nm.

[0076] Optionally, such as Figure 2 , Figure 3 , Figure 5 and Figure 6 As shown, the light-emitting material layer 102 may include a red light material layer 21, a green light material layer 22, and a blue light material layer 23 stacked together, wherein the green light material layer 22 is located between the red light material layer 21 and the blue light material layer 23. In some embodiments, the red light material layer 21 may be located between the green light material layer 22 and the blue light material layer 23, or the blue light material layer 23 may be located between the red light material layer 21 and the green light material layer 22; this is not limited here. In addition, the light-emitting material layer 102 may also be a single-layer structure made of white light material; this is not specifically limited here.

[0077] In some embodiments, in the display substrate provided in the present disclosure, such as Figure 8 As shown, it may also include multiple second metasurface mirror structures 105, which are located between the layer containing the multiple organic photodetectors 104 and the substrate 101. The orthographic projections of the multiple second metasurface mirror structures 105 on the substrate 101 are approximately coincident with the orthographic projections of the multiple organic photodetectors 104 on the substrate 101. The second metasurface mirror structures 105 are used to receive and modulate the fingerprint reflected light transmitted through the organic photodetectors 104, and reflect the modulated fingerprint reflected light back into the organic photodetectors 104, so that the modulated fingerprint reflected light resonates within the organic photodetectors 104, thereby improving the absorption efficiency of the organic photodetectors 104 for the fingerprint reflected light and enhancing the fingerprint recognition effect.

[0078] In some embodiments, in the display substrate provided in the present disclosure, such as Figure 8As shown, each second metasurface mirror structure 105 includes a plurality of fourth nanostructures n4. Optionally, the plurality of fourth nanostructures n4 contained in each second metasurface mirror structure 105 can be arranged in an array. The height of the fourth nanostructure n4 is greater than or equal to 60 nm and less than or equal to 200 nm, for example, 130 nm. The diameter of the fourth nanostructure n4 is greater than or equal to 80 nm and less than or equal to 200 nm, for example, 140 nm. The spacing between two adjacent fourth nanostructures n4 in each second metasurface mirror structure 105 is greater than or equal to 100 nm and less than or equal to 400 nm, for example, 250 nm.

[0079] When each second metasurface mirror structure 105 satisfies the above parameters, a phase abrupt change can occur in the fingerprint reflected light that passes through the organic photodetector 104 and illuminates the second metasurface mirror structure 105. This phase abrupt change can be superimposed with the optical path length caused by the cavity length of the organic photodetector 104 to form a final phase difference. This ensures that the phase difference between the emitted light and the incident light from the upper electrode 41 of the organic photodetector 104 is an odd multiple of π. This enhances the reflected light from the upper electrode 41 and weakens the transmitted light, causing the fingerprint reflected light to be repeatedly reflected within the cavity of the organic photodetector 104 (i.e., the space between the upper electrode 41 and the lower electrode 42). This facilitates the full absorption of the fingerprint reflected light by the organic photodetector layer 43 located between the upper electrode 41 and the lower electrode 42, thereby greatly increasing the absorption efficiency, improving the device performance of the organic photodetector 104, and achieving better fingerprint recognition results. In some embodiments, the organic photodetector layer 43 includes, but is not limited to, a hole injection layer (HIL), a hole transport layer (HIL), an electron blocking layer (EBL), an active layer, a hole blocking layer (HBL), an electron transport layer (ETL), and an electron injection layer (EIL).

[0080] In some embodiments, in the display substrate provided in the present disclosure, such as Figure 4 and Figure 6 As shown, both the first metamirror structure 103 and the second metamirror structure 105 include an imprinted adhesive layer S1 and a metal layer S2 located on the side of the imprinted adhesive layer S1 away from the substrate 101; this is equivalent to using the imprinted adhesive layer S1 to fabricate each nanostructure and forming the metal layer S2 on the nanostructure, so that the metamirror structure has a reflective function; furthermore, the imprinted adhesive layers S1 contained in different first metamirror structures 103 are independent of each other, and the metal layers S2 contained in all first metamirror structures 103 are integrally formed; the imprinted adhesive layers S1 contained in different second metamirror structures 105 are independent of each other, and the metal layers S2 contained in all second metamirror structures 105 are integrally formed. In some embodiments, such as Figure 2 , Figure 5 and Figure 8As shown, the materials of the first metasurface mirror structure 103 and the second metasurface mirror structure 105 can both be metals, that is, each nanostructure is made of metal materials. Compared with the scheme of making nanostructures entirely of metal materials, the scheme of making nanostructures by combining an imprinted adhesive layer S1 with a metal layer S2 has a lower cost.

[0081] In some embodiments, the first nanostructure n1, the second nanostructure n2, the third nanostructure n3, and the fourth nanostructure n4 provided in this disclosure can be microstructures such as nanopillars, nanowires, and nanorings, and are not specifically limited herein. The metallic material can be aluminum, silver, molybdenum, etc., and is not specifically limited herein.

[0082] In some embodiments, in the display substrate provided in the present disclosure, such as Figure 2 , Figure 3 , Figure 5 and Figure 6 As shown, it may further include: an anode 106 and a cathode 107 located on the upper and lower sides of the light-emitting material layer 102. The material of the anode 106 may be a transparent conductive material such as indium tin oxide (ITO), and the material of the cathode 107 may be magnesium / silver. Furthermore, to ensure the flatness of the anode 106 film layer, a first planarization layer 108 may be provided between the layer containing the anode 106 and the layer containing the first metasurface mirror structure 103. To ensure the stability of the light-emitting material, an encapsulation layer 109 may be provided above the cathode 107, and this encapsulation layer 109 may include a first inorganic encapsulation layer, an organic encapsulation layer, and a second inorganic encapsulation layer stacked together. Additionally, as... Figure 8 As shown, in order to ensure the flatness of the film layer of the lower electrode 42, a second planarization layer 110 can be provided between the layer where the lower electrode 42 is located and the layer where the second metasurface mirror structure 105 is located. Optionally, the substrate 101 provided in this embodiment can be a drive backplane (BP) with drive circuitry to drive the light-emitting device (including the anode 106, the light-emitting material layer 102, and the cathode 107) and the organic photodetector 104 respectively through different drive circuits.

[0083] Based on the same inventive concept, this disclosure provides a method for manufacturing the above-mentioned display substrate. Since the principle of this manufacturing method in solving the problem is similar to that of the above-mentioned display device in solving the problem, the implementation of the manufacturing method provided in this disclosure can refer to the implementation of the above-mentioned display device provided in this disclosure, and repeated details will not be described again.

[0084] The method for manufacturing the display substrate provided in this embodiment may include the following steps:

[0085] A substrate 101 is provided;

[0086] A plurality of first metasurface mirror structures 103 and a plurality of organic photodetectors 104 located at the gaps between the first metasurface mirror structures 103 are formed on the substrate 101.

[0087] A first planarization layer 108 and an anode 106 are sequentially formed on the layer containing multiple first metasurface mirror structures 103 and multiple organic photodetectors 104;

[0088] A light-emitting material layer 102 is formed on the entire surface of the layer where the anode 106 is located, and a cathode 107 and an encapsulation layer 109 are formed sequentially on the light-emitting material layer 102.

[0089] In some embodiments, in the manufacturing method described above provided in the embodiments of this disclosure, such as Figure 9 As shown, a plurality of first metasurface mirror structures 103 and a plurality of organic photodetectors 104 located at the gaps between the first metasurface mirror structures 103 are formed on the substrate 101, which can be implemented in the following manner:

[0090] A metal material layer S is formed on the substrate 101;

[0091] Multiple organic photodetectors 104 are formed on the metal material layer S. A portion of the metal material layer S can serve as the lower electrode 42 of the organic photodetector 104, or as a transfer electrode connecting the driving electrode and the lower electrode 42 of the organic photodetector 104. No specific limitation is made here.

[0092] The metal material layer S at the gap of the organic photodetector 104 is etched to form at least one first metasurface mirror structure 103. Each first metasurface mirror structure 103 includes multiple nanostructures. The heights of the nanostructures contained in different types of first metasurface mirror structures 103 are approximately the same, but the spacing is different.

[0093] As can be seen from the above implementation method, the material of each first metasurface mirror structure 103 is metal, and multiple nanostructures contained in each first metasurface mirror structure 103 are obtained through etching process.

[0094] In some embodiments, in the manufacturing method described above provided in the embodiments of this disclosure, such as Figure 10 As shown, a plurality of first metasurface mirror structures 103 and a plurality of organic photodetectors 104 located at the gaps between the first metasurface mirror structures 103 are formed on the substrate 101, and can also be fabricated in the following manner:

[0095] A mask M with multiple nanostructures on its surface is provided. The multiple nanostructures form at least one nanostructure array. The nanostructures contained in different nanostructure arrays have approximately the same height but different spacing.

[0096] An imprinting adhesive layer S1 with a thickness greater than the height of the nanostructure is formed on the substrate 101, and a mask plate M is used to imprint the imprinting adhesive layer S1, so that multiple nanostructures are transferred onto the imprinting adhesive layer S1.

[0097] After curing the imprinted adhesive layer S1 and ashing the imprinted adhesive layer S1 at the gaps of the nanostructure array, multiple nanostructures are retained.

[0098] A metal layer S2 is deposited on multiple nanostructure layers (a portion of the metal layer S2 can serve as the lower electrode 42 of the organic photodetector 104, or as a transfer electrode connecting the driving electrode and the lower electrode 42 of the organic photodetector 104, which is not specifically limited here), forming at least one first metasurface mirror structure 103, and each first metasurface mirror structure 103 is correspondingly set with a nanostructure array.

[0099] Multiple organic photodetectors 104 are formed at the corresponding positions of the gaps in the first metasurface mirror structure 103 on the metal layer S2.

[0100] As can be seen from the above implementation method, the material of each first metasurface mirror structure 103 includes an imprinted adhesive layer S1 and a metal layer S2, and multiple nanostructures contained in each first metasurface mirror structure 103 are obtained through a transfer process.

[0101] In some embodiments, in the display substrate provided in the present disclosure, after a substrate 101 is provided, and before a plurality of first metasurface mirror structures 103 and a plurality of organic photodetectors 104 located at the gaps between the first metasurface mirror structures 103 are formed on the substrate 101, such as Figure 11 As shown, it may further include: forming multiple second metasurface mirror structures 105 by photolithography or transfer printing, and forming a second planarization layer 110 on the layer where the multiple second metasurface mirror structures 105 are located. The specific fabrication process of the multiple second metasurface mirror structures 105 can be referred to the above. Figure 9 and Figure 10 The details regarding the formation of multiple first metasurface mirror structures 103 are not elaborated here.

[0102] It should be noted that, in the fabrication method provided in the embodiments of this disclosure, the patterning processes involved in forming each layer structure may include not only some or all of the processes such as deposition, photoresist coating, masking, exposure, development, etching, and photoresist stripping, but may also include other processes, depending on the actual pattern formed during the fabrication process, and are not limited here. For example, a post-baking process may be included after development and before etching.

[0103] The deposition process can be chemical vapor deposition, plasma-enhanced chemical vapor deposition, or physical vapor deposition, and is not limited here; the mask used in the masking process can be a half-tone mask, a single-slit mask, or a gray-tone mask, and is not limited here; the etching can be dry etching or wet etching, and is not limited here.

[0104] Based on the same inventive concept, this disclosure also provides a display device, including the display substrate described in the embodiments of this disclosure. Since the principle by which this display device solves the problem is similar to that of the display substrate, the implementation of the display device provided in the embodiments of this disclosure can refer to the embodiments of the display substrate, and repeated details will not be described again.

[0105] In some embodiments, the display device provided in this disclosure can be any product or component with display functionality, such as a mobile phone, tablet computer, television, monitor, laptop computer, digital photo frame, navigator, smartwatch, fitness wristband, or personal digital assistant. This display device includes, but is not limited to, components such as a radio frequency unit, network module, audio output & input unit, sensor, display unit, user input unit, interface unit, memory, processor, and power supply. Furthermore, those skilled in the art will understand that the above structure does not constitute a limitation on the display device provided in this disclosure. In other words, the display device provided in this disclosure may include more or fewer of the aforementioned components, or combine certain components, or have different component arrangements.

[0106] Although preferred embodiments of the present disclosure have been described, those skilled in the art can make various modifications and variations to the embodiments of the present disclosure without departing from the spirit and scope of the present disclosure. Therefore, the present disclosure is also intended to include such modifications and variations if they fall within the scope of the claims of the present disclosure and their equivalents.

Claims

1. A display substrate, characterized in that, include: Substrate; A light-emitting material layer is located on the substrate. The light emitted by the light-emitting material layer is white light, the first color light is red light, the second color light is green light, and the third color light is blue light. Multiple first metasurface mirror structures are located between the light-emitting material layer and the substrate. These first metasurface mirror structures convert the emitted light from the light-emitting material layer into light of at least one color. Each first metasurface mirror structure includes multiple first sub-metasurface mirror structures, multiple second sub-metasurface mirror structures, and multiple third sub-metasurface mirror structures. Each first sub-metasurface mirror structure includes multiple first nanostructures, each second sub-metasurface mirror structure includes multiple second nanostructures, and each third sub-metasurface mirror structure includes multiple third nanostructures. The heights of the first nanostructures, the second nanostructures, and the third nanostructures are specified. The height of the structure is greater than or equal to 75 nm and less than or equal to 85 nm. There is a first spacing between two adjacent first nanostructures in each first sub-metamirror structure, a second spacing between two adjacent second nanostructures in each second sub-metamirror structure, and a third spacing between two adjacent third nanostructures in each third sub-metamirror structure. The first spacing is greater than or equal to 150 nm and less than or equal to 170 nm, the second spacing is greater than or equal to 230 nm and less than or equal to 250 nm, and the third spacing is greater than or equal to 350 nm and less than or equal to 380 nm. Multiple organic photodetectors are located between the light-emitting material layer and the substrate, and the organic photodetectors are disposed in the gap of the first metasurface mirror structure; Multiple second metasurface mirror structures are provided, which modulate the fingerprint reflection light passing through the organic photodetector, causing the modulated fingerprint reflection light to resonate within the organic photodetector.

2. The display substrate as described in claim 1, characterized in that, The multiple metasurface mirror structures are arranged in an array, with each group consisting of three adjacent columns of the first metasurface mirror structures. The column gap width between two adjacent columns of the first metasurface mirror structure within a group is smaller than the group gap width between two adjacent groups of the first metasurface mirror structure. The organic photodetector is disposed at the inter-group gap of the first metasurface mirror structure.

3. The display substrate as described in claim 1, characterized in that, The gap width between two adjacent first metasurface mirror structures is the same; The organic photodetector is disposed in all the gaps of the first metasurface mirror structure.

4. The display substrate as described in claim 1, characterized in that, The plurality of first sub-metasurface mirror structures are used to convert the emitted light from the luminescent material layer into light of a first color, the plurality of second sub-metasurface mirror structures are used to convert the emitted light from the luminescent material layer into light of a second color, and the plurality of third sub-metasurface mirror structures are used to convert the emitted light from the luminescent material layer into light of a third color.

5. The display substrate as described in claim 4, characterized in that, The heights of the first nanostructure, the second nanostructure, and the third nanostructure are approximately the same. The first spacing, the second spacing, and the third spacing are different.

6. The display substrate as described in claim 5, characterized in that, The wavelengths of the first color, the second color, and the third color decrease sequentially, while the first spacing, the second spacing, and the third spacing increase sequentially.

7. The display substrate according to any one of claims 1 to 6, characterized in that, The plurality of second metasurface mirror structures are located between the layer containing the plurality of organic photodetectors and the substrate, and the orthographic projection of the plurality of second metasurface mirror structures on the substrate roughly coincides with the orthographic projection of the plurality of organic photodetectors on the substrate.

8. The display substrate as described in claim 7, characterized in that, Each of the second metasurface mirror structures includes a plurality of fourth nanostructures, wherein the height of the fourth nanostructure is greater than or equal to 60 nm and less than or equal to 200 nm, the diameter of the fourth nanostructure is greater than or equal to 80 nm and less than or equal to 200 nm, and the spacing between two adjacent fourth nanostructures in each of the second metasurface mirror structures is greater than or equal to 100 nm and less than or equal to 400 nm.

9. The display substrate as described in claim 7, characterized in that, Both the first metasurface mirror structure and the second metasurface mirror structure include an imprinted adhesive layer and a metal layer located on the side of the imprinted adhesive layer away from the substrate. The imprinted adhesive layers contained in different first metasurface mirror structures are independent of each other, while the metal layers contained in all first metasurface mirror structures are integrally formed; The imprinted adhesive layers contained in different second metasurface mirror structures are independent of each other, while the metal layers contained in all second metasurface mirror structures are integrally formed.

10. The display substrate as claimed in claim 7, characterized in that, Both the first metasurface mirror structure and the second metasurface mirror structure are made of metal.

11. A display device, characterized in that, Includes the display substrate as described in any one of claims 1 to 10.

12. A method for manufacturing a display substrate as described in any one of claims 1 to 10, characterized in that, include: Provide a substrate; Multiple first metasurface mirror structures and multiple organic photodetectors located in the gaps between the first metasurface mirror structures are formed on the substrate. A light-emitting material layer is formed over the entire surface of the layers containing the plurality of first metasurface mirror structures and the plurality of organic photodetectors.

13. The manufacturing method as described in claim 12, characterized in that, A plurality of first metasurface mirror structures and a plurality of organic photodetectors located at the gaps between the first metasurface mirror structures are formed on the substrate, specifically including: A metal material layer is formed on the substrate. Multiple organic photodetectors are formed on the metal material layer; The metal material layer at the gap of the organic photodetector is etched to form at least one first metasurface mirror structure. Each first metasurface mirror structure includes multiple nanostructures. The heights of the nanostructures contained in different first metasurface mirror structures are approximately the same, but the spacing is different.

14. The manufacturing method as described in claim 12, characterized in that, A plurality of first metasurface mirror structures and a plurality of organic photodetectors located at the gaps between the first metasurface mirror structures are formed on the substrate, specifically including: A mask plate with multiple nanostructures on its surface is provided, wherein the multiple nanostructures form at least one nanostructure array, and the nanostructures contained in different nanostructure arrays have approximately the same height but different spacing. An imprinting adhesive layer with a thickness greater than the height of the nanostructure is formed on the substrate, and the imprinting adhesive layer is imprinted using the mask, so that the plurality of nanostructures are transferred onto the imprinting adhesive layer. After curing the imprinted adhesive layer and ashing the imprinted adhesive layer at the gaps between the nanostructure arrays, the multiple nanostructures are retained. A metal layer is deposited on the layer containing the plurality of nanostructures to form at least one first metasurface mirror structure, and each first metasurface mirror structure is configured to correspond to one of the nanostructure arrays. Multiple organic photodetectors are formed at positions corresponding to the gaps in the first metasurface mirror structure on the metal layer.

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