Scanning antenna

Abstract

The present invention discloses a scanning antenna, belonging to the technical field of wireless communication. The scanning antenna includes a first substrate and a second substrate which are oppositely arranged, and a liquid crystal layer located between the first substrate and the second substrate; it further includes a feed signal access end and a plurality of phase shifter units. The plurality of phase shifter units are connected to each other, and each phase shifter unit is connected to the feed signal access end. The electrical lengths between at least two phase shifter units and the feed signal access end are different. The present invention can not only achieve one-dimensional beam scanning, but also has good scanning effect. It is not necessary to independently apply a bias voltage to each phase shifter unit, which can greatly simplify the setting of the bias voltage lines, is beneficial to reducing the manufacturing cost and the wiring difficulty, and can be applied to scenarios such as along high-speed railways and subways.

Description

Technical Field

[0001] The present invention relates to the field of wireless communication technologies, and more specifically, to a scanning antenna. Background Art

[0002] Based on the anisotropic characteristics of liquid crystal molecules, a liquid crystal antenna uses an electrical signal to control the arrangement of liquid crystal molecules, thereby changing the microwave dielectric parameters of each phase shifter unit, so as to control the phase of the microwave signal in each unit, and finally realize the control of the radiation beam direction of the antenna. According to the beam scanning dimension, it can be divided into one-dimensional scanning and two-dimensional scanning antennas, and can be applied to scenarios such as satellite communication and 5G millimeter-wave base stations.

[0003] In existing two-dimensional scanning liquid crystal antennas, it is usually necessary to apply an independent bias voltage to each phase shifter unit to drive the corresponding liquid crystal molecules to deflect, so as to realize the independent phase control of each phase shifter unit. Therefore, it is necessary to set relatively complex bias circuits and a relatively high-cost drive circuit control board. When the scale of the antenna array increases, the complexity and cost increase exponentially. And in order to prevent the bias voltage from crosstalking between phase shifters, it is usually necessary to couple the feeding power distribution network and the phase shifter, which inevitably introduces coupling loss. However, for specific application scenarios, such as along high-speed railways and subways, a two-dimensional beam scanning antenna with complex technology and high cost is not required, and only a one-dimensional beam scanning antenna is needed.

[0004] Therefore, providing a scanning antenna that can achieve one-dimensional beam scanning, does not require a complex bias circuit, has no coupling loss, and has a relatively low antenna cost is a technical problem that needs to be solved urgently by those skilled in the art. Summary of the Invention

[0005] In view of this, the present invention provides a scanning antenna to achieve one-dimensional beam scanning while solving the problems of relatively complex setting of the antenna bias circuit, high manufacturing cost, and coupling loss in the prior art.

[0006] The present invention discloses a scanning antenna, including: a first substrate and a second substrate arranged opposite to each other, and a liquid crystal layer located between the first substrate and the second substrate; it further includes a feeding signal access end and a plurality of phase shift units, the plurality of phase shift units are connected to each other, each phase shift unit is connected to the feeding signal access end, and the electrical lengths between at least two phase shift units and the feeding signal access end are different.

[0007] Compared with the prior art, the scanning antenna provided by the present invention has at least achieved the following beneficial effects:

[0008] In the scanning antenna of the present invention, each phase shifter unit is interconnected. Only one bias voltage line is required to supply the same bias voltage signal to all phase shifter units. By changing the overall liquid crystal permittivity through the bias voltage signal, since the overall liquid crystal permittivity in the scanning antenna is changed, at this time, the length of the feeding path needs to be set. That is, although the phase shifter units of the present invention are connected together, the electrical lengths of at least two phase shifter units to the feeding signal access end are different. The different electrical lengths can be understood as the different lengths of the two phase shifter units respectively connected to the feeding signal access end. Then, the physical path lengths of the microwave signals fed into each radiator are inconsistent, showing an arithmetic relationship, that is, an initial phase difference is given to each microwave signal, making the phase difference adjustable, and finally beam scanning is achieved. The present invention only needs to apply the same bias voltage to each phase shifter unit, without independently applying a bias voltage to each phase shifter unit. Therefore, the setting of the bias voltage line is greatly simplified. In theory, only one bias voltage line needs to be set on the metal layer where the phase shifter unit is located, and the design difficulty and cost of the liquid crystal bias control circuit are also greatly reduced. The present invention only needs to apply the same bias voltage to each phase shifter unit, without independently applying a bias voltage to each phase shifter unit. Therefore, a direct connection can be made between the feeding signal access end and each phase shifter unit, and problems such as coupling loss and reduction of the working bandwidth can be avoided. The present invention can not only achieve one-dimensional beam scanning, but also has good scanning effect, which is beneficial to reducing the manufacturing cost and the wiring difficulty, and can be applied to scenarios such as along high-speed railways and subways.

[0009] Of course, any product implementing the present invention does not necessarily need to achieve all the above-mentioned technical effects simultaneously.

[0010] Other features and advantages of the present invention will become clear through the following detailed description of the exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The drawings incorporated in and constituting a part of this specification illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

[0012] Figure 1 is a schematic plan view of a scanning antenna provided by an embodiment of the present invention;

[0013] Figure 2 is Figure 1 a schematic cross-sectional view taken along the line A-A' in

[0014] Figure 3 is Figure 2 a schematic view of the structure of one side surface of the first substrate facing the second substrate in

[0015] Figure 4 is Figure 2A schematic structural diagram of one side surface of the second substrate facing the first substrate;

[0016] Figure 5 is Figure 2 A schematic structural diagram of one side surface of the second substrate away from the first substrate;

[0017] Figure 6 Another schematic plan view of the scanning antenna provided by an embodiment of the present invention;

[0018] Figure 7 is Figure 6 A schematic cross-sectional structural diagram in the direction of B-B';

[0019] Figure 8 Another schematic plan view of the scanning antenna provided by an embodiment of the present invention;

[0020] Figure 9 is Figure 8 A schematic cross-sectional structural diagram in the direction of C-C';

[0021] Figure 10 is Figure 9 A schematic structural diagram of one side surface of the first substrate facing the second substrate;

[0022] Figure 11 is Figure 9 A schematic structural diagram of one side surface of the second substrate facing the first substrate;

[0023] Figure 12 is Figure 9 A schematic structural diagram of one side surface of the second substrate away from the first substrate;

[0024] Figure 13 is Figure 9 Another schematic structural diagram of one side surface of the first substrate facing the second substrate;

[0025] Figure 14 is Figure 9 Another schematic structural diagram of one side surface of the first substrate facing the second substrate;

[0026] Figure 15 Another schematic plan view of the scanning antenna provided by an embodiment of the present invention;

[0027] Figure 16 is Figure 15 A schematic structural diagram of one side surface of the first substrate facing the second substrate;

[0028] Figure 17 Another schematic plan view of the scanning antenna provided by an embodiment of the present invention;

[0029] Figure 18 is Figure 17 a schematic structural diagram of one side surface of the first substrate facing the second substrate in

[0030] Figure 19 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0031] Figure 20 is Figure 19 a schematic structural diagram of one side surface of the first substrate facing the second substrate in

[0032] Figure 21 is Figure 19 a schematic cross-sectional structural diagram in the D-D' direction in

[0033] Figure 22 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0034] Figure 23 is Figure 22 a schematic structural diagram of one side surface of the first substrate facing the second substrate in

[0035] Figure 24 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0036] Figure 25 is Figure 24 a schematic structural diagram of one side surface of the first substrate facing the second substrate in

[0037] Figure 26 is Figure 24 a schematic structural diagram of one side surface of the second substrate facing the first substrate in

[0038] Figure 27 is Figure 24 a schematic structural diagram of one side surface of the second substrate away from the first substrate in

[0039] Figure 28 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0040] Figure 29 is Figure 28 a schematic structural diagram of one side surface of the first substrate facing the second substrate in

[0041] Figure 30 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0042] Figure 31 is Figure 30 a schematic structural diagram of one side surface of the first substrate facing the second substrate in

[0043] Figure 32 is Figure 30 a schematic structural view of one side surface of the second substrate facing the first substrate in

[0044] Figure 33 is Figure 30 a schematic structural view of one side surface of the second substrate away from the first substrate in

[0045] Figure 34 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0046] Figure 35 is Figure 34 a schematic cross-sectional view in the E-E' direction in

[0047] Figure 36 is Figure 34 a schematic structural view of one side surface of the first substrate facing the second substrate in

[0048] Figure 37 is Figure 34 a schematic structural view of one side surface of the second substrate facing the first substrate in

[0049] Figure 38 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0050] Figure 39 is Figure 38 a schematic cross-sectional view in the F-F' direction in

[0051] Figure 40 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0052] Figure 41 is Figure 40 a schematic structural view of one side surface of the second substrate facing the first substrate in

[0053] Figure 42 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0054] Figure 43 is Figure 42 a schematic structural view of one side surface of the second substrate facing the first substrate in

[0055] Figure 44 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0056] Figure 45 is Figure 44 a schematic structural view of one side surface of the second substrate facing the first substrate in

[0057] Figure 46 It is another schematic plan view of the scanning antenna provided by the embodiment of the present invention;

[0058] Figure 47 is Figure 46 a schematic sectional view taken along the direction of G-G' in Detailed implementation manners

[0059] Now, various exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be noted that: unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and values set forth in these embodiments do not limit the scope of the present invention.

[0060] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way a limitation on the present invention or its application or use.

[0061] Technologies, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods and devices should be regarded as part of the specification.

[0062] In all the examples shown and discussed herein, any specific values should be construed as merely exemplary and not as limitations. Therefore, other examples of the exemplary embodiments may have different values.

[0063] It should be noted that: like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0064] Please refer to Figures 1 - 2 , Figure 1 which is a schematic plan view of the scanning antenna provided by the embodiment of the present invention, Figure 2 is Figure 1 a schematic sectional view taken along the direction of A-A' in Figure 1 (it can be understood that, for the sake of clearly showing the structure of this embodiment, Figure 2 transparency filling is performed in

[0065] It further includes a feed signal access terminal 40 and a plurality of phase shifter units 50. The plurality of phase shifter units 50 are connected to each other, and each phase shifter unit 50 is connected to the feed signal access terminal 40. The electrical lengths between at least two phase shifter units 50 and the feed signal access terminal 40 are different. It can be understood that in the figures of this embodiment, only an example where the scanning antenna 000 includes three phase shifter units 50 is taken for illustration, which does not represent the actual quantity. During specific implementation, the quantity of the phase shifter units 50 can be set according to actual requirements.

[0066] Specifically, the scanning antenna 000 in this embodiment can be a one-dimensional beam scanning antenna. A one-dimensional scanning antenna means that the beam scanning direction of the antenna only realizes planar scanning along one dimension. The scanning antenna 000 in this embodiment includes a first substrate 10 and a second substrate 20 arranged opposite to each other, and a liquid crystal layer 30 located between the first substrate 10 and the second substrate 20. Optionally, the liquid crystal layer 30 can be encapsulated between the first substrate 10 and the second substrate 20 through a sealant 60. The scanning antenna 000 further includes a feed signal access terminal 40 and a plurality of phase shifter units 50. The plurality of phase shifter units 50 are connected to each other. Optionally, the plurality of phase shifter units 50 can be arranged in sequence along the same direction (as Figure 1 shown), and the plurality of phase shifter units 50 can also be arranged in an array (not shown in the drawings). This embodiment does not specifically limit the arrangement manner of the plurality of phase shifter units 50. During specific implementation, it can be selected and set according to actual requirements. The phase shifter unit 50 in this embodiment is a wave transmission structure and can be a microstrip line for transmitting microwave signals. Each phase shifter unit 50 is connected to the feed signal access terminal 40, and microwave signals are fed through the feed signal access terminal 40. Optionally, the feed signal access terminal 40 can be connected to a radio frequency connector (not shown in the figure), and this radio frequency connector can be welded on the first substrate 10 or the second substrate 20, as long as it can finally be connected to the phase shifter unit 50 to realize the feeding of microwave signals.

[0067] In this embodiment, the electrical lengths between at least two phase shifter units 50 and the feed signal access terminal 40 are set to be different. The different electrical lengths can be understood as the lengths of the two phase shifter units 50 respectively connected to the feed signal access terminal 40 are different, and the distances between the two phase shifter units 50 and the feed signal access terminal 40 in the actual layout space can be the same or different. As Figure 1 shown in the illustrated embodiment, the plurality of phase shifter units 50 include a first phase shifter unit 50A and a second phase shifter unit 50B. Among them, both the first phase shifter unit 50A and the second phase shifter unit 50B are connected to Figure 1It is connected to the feed signal access terminal 40 on the left side in the [device]. The electrical length between the first phase shifter unit 50A and the feed signal access terminal 40 is L, and the electrical length between the second phase shifter unit 50B and the feed signal access terminal 40 is 2L. From the perspective of the actual layout space, the distance between the first phase shifter unit 50A and the feed signal access terminal 40 is also different from the distance between the second phase shifter unit 50B and the feed signal access terminal 40. Optionally, in specific implementation, the actual spatial distance between the first phase shifter unit 50A and the feed signal access terminal 40 can also be set to be the same as the actual spatial distance between the second phase shifter unit 50B and the feed signal access terminal 40. This embodiment does not limit this here.

[0068] Optionally, please refer to Figures 1 - 2 、 Figures 3 - 5 , Figure 3 is Figure 2 a schematic structural diagram of one side surface of the first substrate facing the second substrate in the [device], Figure 4 is Figure 2 a schematic structural diagram of one side surface of the second substrate facing the first substrate in the [device], Figure 5 is Figure 2 a schematic structural diagram of one side surface of the second substrate away from the first substrate in the [device]. The scanning antenna of this embodiment may further include a radiator 01 and a metal ground layer 02. The radiator 01 and the metal ground layer 02 jointly complete the beam scanning work with the phase shifter unit 50 of the wave transmission structure. As Figure 1 shown, a plurality of radiation holes 02K may be opened on the metal ground layer 02. Only one straight microstrip line is taken as an example for the microstrip lines of each phase shifter unit 50 for illustration. The radiator 01 may be a block-shaped radiation patch. Among them, the radiator 01 may be disposed on the upper surface of the second substrate 20 (i.e., the side surface of the second substrate 20 away from the first substrate 10), and the metal ground layer 02 may be disposed on the lower surface of the second substrate 20 (i.e., the side surface of the second substrate 20 facing the first substrate 10), and the positions of the radiation holes 02K correspond to those of the radiator 01. The radiation holes 02K can couple the microwave signals transmitted on the microstrip lines of each phase shifter unit 50 to the radiator 01. The radiator 01 is mainly used to radiate the microwave signals. The phase shifter unit 50 of this embodiment may be disposed on the upper surface of the first substrate 10 (i.e., the side surface of the first substrate 10 facing the second substrate 20), so that there is a liquid crystal layer 30 between the phase shifter unit 50 of the microstrip line and the metal ground layer 02.

[0069] Since beam scanning needs to be achieved, first, there must be a certain phase difference between the microwaves of adjacent phase shifters 50. Second, the implementation of this phase difference is achieved by changing the dielectric constant of the dielectric on the microstrip line between adjacent phase shifters 50. When the liquid crystal molecules of the liquid crystal layer 30 change from the lying state to the vertical state under the action of the bias voltage, their dielectric constant changes from ε1 to ε2, where ε1 is the dielectric constant of the liquid crystal molecules in the lying state, and ε2 is the dielectric constant of the liquid crystal molecules in the vertical state. Then, the phase difference between adjacent phase shifters 50 changes from to Thus, the beam pointing angle of the scanning antenna 000 changes from θ1 to θ2. To make the beam scanning angle of the scanning antenna 000 symmetric, it is generally desired that when the liquid crystal molecules of the liquid crystal layer 30 are in the intermediate state between the lying and vertical states, the radiation beam angle of the scanning antenna 000 is also in the vertical state, that is, the beam is in the non-scanned state. This state requires the phase difference between adjacent phase shifters 50 to be an integer multiple of 2π.

[0070] When the scanning antenna 000 provided in this embodiment performs one-dimensional beam scanning, the distance between adjacent phase shifters 50 is L. When the liquid crystal molecules of the liquid crystal layer 30 are in the intermediate state between the lying and vertical states, the square root of its dielectric constant is where ε1 is the dielectric constant of the liquid crystal molecules in the lying state, and ε2 is the dielectric constant of the liquid crystal molecules in the vertical state. Through the design of different electrical lengths between at least two phase shifters 50 of this embodiment to the feed signal access end 40, the phase difference between adjacent two phase shifters 50 is 2mπ at this time, where m is a positive integer; when the liquid crystal molecules are in the lying state, their dielectric constant is ε1, and the phase difference between adjacent phase shifters 50 at this time is When the liquid crystal molecules are in the vertical state, their dielectric constant is ε2, and the phase difference between adjacent phase shifters 50 at this time is Therefore, at this time, only by adjusting the bias voltage, the phase difference between adjacent phase shifters 50 can be made to change between and Finally, beam scanning is achieved.

[0071] In this embodiment, the phase shifter units 50 are connected together. Only one bias voltage line is required to supply the same bias voltage signal to all the phase shifter units 50. By changing the overall liquid crystal dielectric constant through the bias voltage signal, since what is changed is the overall liquid crystal dielectric constant in the scanning antenna 000, at this time, it is necessary to set the length of the feeding path. That is, although the phase shifter units 50 in this embodiment are connected together, the electrical lengths of at least two phase shifter units 50 to the feeding signal access end 40 are different, or it can be understood that the electrical lengths of the phase shifter units 50 to the feeding signal access end 40 are different, then the physical path lengths of the microwave signals fed into each radiator 01 are inconsistent, presenting an arithmetic progression relationship, that is, an initial phase difference is given to each path of microwave signals, making this phase difference adjustable, and finally beam scanning is achieved.

[0072] For the conventional liquid crystal antennas in the prior art, the physical lengths of the microstrip lines of the phase shifter units are designed to be equal in length, and they are connected in parallel to the feeding point with equal path lengths. Therefore, for each radiation unit, before the microwave signal reaches the radiation unit, the physical path lengths it travels are the same. To achieve phase shifting, an independent bias voltage needs to be applied to each phase shifter unit to change the dielectric constant of the liquid crystal medium corresponding to each phase shifter unit, and finally the phase difference of each path of microwave signals is achieved. Because an independent bias voltage needs to be applied to each phase shifter unit, the required bias line network setting is relatively complex. Moreover, the design of the liquid crystal bias control circuit is also relatively complex and the cost is high. The scanning antenna 000 provided in this embodiment, through the setting of the feeding path, makes the electrical lengths of the phase shifter units 50 fed from the feeding signal access end 40 different, then the physical path lengths of the microwave signals reaching the radiator 01 are inconsistent, presenting an arithmetic progression relationship, that is, an initial phase difference is given to each path of microwave signals. By changing the overall liquid crystal dielectric constant with the bias voltage applied through one bias voltage line, this phase difference can be adjusted, and finally beam scanning is achieved. In this embodiment, only the same bias voltage needs to be applied to the phase shifter units 50, and there is no need to apply an independent bias voltage to each phase shifter unit 50. Therefore, the setting of the bias voltage line is greatly simplified. In theory, only one bias voltage line needs to be set on the metal layer where the phase shifter units 50 are located, and then the design difficulty and cost of the liquid crystal bias control circuit are also greatly reduced.

[0073] For conventional liquid crystal antennas in the prior art, in order to prevent crosstalk of the bias voltage between phase shifter units, microwave signals need to be transmitted between the feeding power divider network and the phase shifter units through a coupled connection method and cannot be directly connected. Therefore, there is inevitably a certain coupling loss between the feeding power divider network and the phase shifter units, and this coupling method usually reduces the working bandwidth of the microwave signal. For the scanning antenna 000 provided in this embodiment, the same bias voltage can be applied to each phase shifter unit 50, and there is no need to independently apply a bias voltage to each phase shifter unit 50. Therefore, the feeding signal access end 40 and each phase shifter unit 50 can be directly connected, and the above problems of coupling loss and reduced working bandwidth can be avoided.

[0074] For the scanning antenna 000 provided in this embodiment, since multiple phase shifter units 50 are connected to each other, only one bias voltage line is required to apply a bias voltage between the phase shifter units 50 of the microstrip line structure and the metal ground layer 02, without a complex bias circuit. And since each phase shifter unit 50 is connected to the feeding signal access end 40, there is no coupling loss between the feeding power divider network and the phase shifter units. It can not only achieve one-dimensional beam scanning, but also has a good scanning effect, which is beneficial to reducing the manufacturing cost and the wiring difficulty, and can be applied to scenarios such as along high-speed railways and subways.

[0075] It can be understood that Figures 1 - 5 only exemplarily shows the structures, shapes and installation positions that the phase shifter unit 50, the radiator 01 and the metal ground layer 02 can include, but is not limited thereto. It can also be other installation structures that can achieve the scanning function. This embodiment does not limit this, and only needs to satisfy the ability to achieve one-dimensional beam scanning. The feeding signal access end 40 on the left side of the phase shifter unit 50 in the figure of this embodiment can be connected to a radio frequency connector (not shown in the figure), and the radio frequency connector accesses a microwave signal transmitter to directly provide microwave signals for each phase shifter unit 50. Optionally, the feeding signal access end 40 can also be on one side of the second substrate 20, and then the high-frequency signal is coupled to the phase shifter unit 50 of the microstrip line structure of the first substrate 10 through a coupling method.

[0076] In some alternative embodiments, please refer to Figure 6 and Figure 7 . Figure 6 is another schematic plan view of the scanning antenna provided by the embodiment of the present invention. Figure 7 is Figure 6 A schematic cross-sectional structure view in the B-B' direction of Figure 6 (it can be understood that, for the sake of clearly showing the structure of this embodiment, Figure 6 is filled with transparency). In this embodiment, the scanning antenna 000 further includes a load 70. One ends of multiple interconnected phase shifter units 50 are connected to the feeding signal access end 40, and the other ends of multiple interconnected phase shifter units 50 are connected to the load 70.

[0077] In this embodiment, it is explained that a plurality of interconnected phase-shifting units 50 are further connected to a load 70. Optionally, the input ends of the plurality of interconnected phase-shifting units 50 can be connected to the feed signal access terminal 40, and the output ends of the plurality of interconnected phase-shifting units 50 can be connected to the load 70. The load 70 can be a wave-absorbing device structure. Matching the load 70 at the output ends of the plurality of interconnected phase-shifting units 50 can completely consume the microwaves reaching the tail of the phase-shifting unit 50 (microstrip line structure) without reflecting back to the previous part of the phase-shifting unit 50 (microstrip line structure). The load 70 can be a phase-matched wave-absorbing material or a matched circuit structure, and this embodiment does not limit this.

[0078] In some alternative embodiments, please refer to Figures 8 - 12 , Figure 8 which is another schematic plan view of the scanning antenna provided by the embodiment of the present invention. Figure 9 is Figure 8 a schematic cross-sectional structure view in the C-C' direction of Figure 8 (it can be understood that, for clearly showing the structure of this embodiment, Figure 10 is Figure 9 a schematic structure view of one side surface of the first substrate facing the second substrate in Figure 11 is Figure 9 a schematic structure view of one side surface of the second substrate facing the first substrate in Figure 12 is Figure 9 a schematic structure view of one side surface of the second substrate away from the first substrate in this embodiment. In this embodiment, the phase-shifting unit 50 includes a first conductive part 101, and the first conductive part 101 is disposed on one side of the first substrate 10 facing the second substrate 20;

[0079] One side of the second substrate 20 facing the first substrate 10 includes a second conductive part 201, and the second conductive part 201 includes a plurality of through holes 201K;

[0080] One side of the second substrate 20 away from the first substrate 10 includes a plurality of third conductive parts 202. The orthographic projection of the third conductive parts 202 on the second substrate 20 overlaps with the orthographic projection of the through holes 201K on the second substrate 20, and the orthographic projection of the first conductive part 101 on the second substrate 20 is located between the orthographic projections of two adjacent third conductive parts 202 on the second substrate 20; wherein,

[0081] The feed signal received by the feed signal access terminal 40 is transmitted to the first conductive part 101, and the first conductive part 101 couples the signal to the third conductive part 202 through the through holes 201K of the second conductive part 201.

[0082] Optionally, the first conductive part 101 is a microstrip line for wave transmission function, the second conductive part 201 is a whole-surface structure, the second conductive part 201 is grounded, and the third conductive part 202 is a block structure.

[0083] This embodiment explains that the scanning antenna 000 can be a three-layer metal conductive structure disposed on the first substrate 10 and the second substrate 20. Among them, a phase shifter unit 50 is disposed on the side of the first substrate 10 facing the second substrate 20. The phase shifter unit 50 can include a first conductive part 101 of a microstrip line structure; the side of the second substrate 20 facing the first substrate 10 includes a second conductive part 201 for grounding signals. The second conductive part 201 can be a structure disposed on the surface of the second substrate 20 as a whole. A plurality of through holes 201K are formed on the second conductive part 201, and the through holes 201K are used to radiate signals out; the side of the second substrate 20 away from the first substrate 10 includes a plurality of block-shaped third conductive parts 202. The third conductive parts 202 are used as radiation patches to radiate microwave signals out. The setting positions of the third conductive parts 202 correspond to the setting positions of the through holes 201K, that is, the orthographic projection of the third conductive part 202 on the second substrate 20 overlaps with the orthographic projection of the through hole 201K on the second substrate 20, and the orthographic projection of the first conductive part 101 of the microstrip line structure on the second substrate 20 is located between the orthographic projections of two adjacent third conductive parts 202 on the second substrate 20, forming a phase shifter unit 50. For the scanning antenna 000 provided in this embodiment, only one bias voltage line is required to apply a bias voltage between the first conductive part 101 and the second conductive part 201 of the microstrip line structure, without a complex bias circuit. And since each phase shifter unit 50 is connected to the feed signal access end 40, there is no coupling loss between the feed power distribution network and the phase shifter unit. It can not only achieve one-dimensional beam scanning, but also has a good scanning effect, which is beneficial to reducing the manufacturing cost and the wiring difficulty. And since the third conductive part 202 as the radiation patch is located on the side of the second substrate 20 away from the first substrate 10 and there is no liquid crystal material below it, when the liquid crystal dielectric constant is changed by the bias voltage, the radiation performance of the third conductive part 202 is not greatly affected, which is beneficial to improving the scanning performance.

[0084] In some alternative embodiments, please continue to refer to Figures 1 - 5 、 Figures 8 - 12 In this embodiment, the shape of the orthographic projection of the through hole 201K formed on the second conductive part 201 on the second substrate 20 includes one of a strip shape and an H shape.

[0085] This embodiment explains that the shape of the orthographic projection of the through hole 201K for coupling the microwave signal transmitted on the microstrip line of each phase shifter unit 50 to the radiation patch on the second substrate 20 can be Figure 1 and Figure 4 the strip shape shown, or can also be Figure 8 andFigure 11 In a schematic H shape, in this embodiment, the shape of the orthographic projection of the through hole 201K onto the second substrate 20 is set to an H shape, which can facilitate the adjustment and improve the efficiency of the first conductive part 101 of the microstrip line to transmit microwave signals to the third conductive part 202 through the through hole 201K on the second conductive part 201, and is beneficial to improving the scanning performance.

[0086] In some alternative embodiments, please refer to Figures 8 - 12 and Figure 13 , Figure 14 , Figure 13 is Figure 9 Another schematic structural diagram of the surface of the first substrate facing the second substrate in Figure 14 is Figure 9 Another schematic structural diagram of the surface of the first substrate facing the second substrate in . In this embodiment, the first conductive part 101 includes one of a linear shape, a curved shape, and a broken line shape.

[0087] This embodiment further explains that the shape of each first conductive part 101 used as a microstrip line can be a linear shape as shown in Figure 10 , or a curved shape as shown in Figure 13 , or a broken line shape as shown in Figure 14 . This embodiment does not make specific limitations on this, and only needs to satisfy that the electrical lengths of the first conductive parts 101 fed from the feed signal access end 40 to the phase shifter unit 50 are different, so that the physical path lengths of the microwave signals reaching the third conductive part 202 of the radiation patch are inconsistent and show an arithmetic progression relationship, that is, an initial phase difference is given to each microwave signal, and then only by changing the overall liquid crystal dielectric constant with the bias voltage applied through a bias voltage line, the phase difference can be adjusted, and finally the beam scanning of the scanning antenna 000 in this embodiment can be realized. It can be understood that this embodiment is only an example to illustrate the shapes that the first conductive part 101 can include, but is not limited to this. During specific implementation, the shape of the first conductive part 101 used as a microstrip line can also include other slow-wave structures such as defected ground structures and composite left-handed and right-handed structures, and can also be other shapes, which are not elaborated in this embodiment.

[0088] Optionally, please refer to Figure 15 and Figure 16 , Figure 15 is another planar structural diagram of the scanning antenna provided by the embodiment of the present invention (it can be understood that, for the sake of clearly showing the structure of this embodiment, Figure 15 is filled with transparency in Figure 16 is Figure 15 A schematic structural diagram of the surface of the first substrate facing the second substrate in . In this embodiment, the first conductive part 101 is in a serpentine bent shape.

[0089] In this embodiment, the first conductive part 101 is arranged in a zigzag shape, a curved shape, or a serpentine bent shape, which can increase the length of the first conductive part 101 acting on the microstrip line. The formula for the phase shift amount is where λ0 is the wavelength of the microwave signal in vacuum, which can be understood as a constant; L is the physical length of the microstrip line between adjacent phase shift units 50; ε e is the effective dielectric constant, which is related to the state of the liquid crystal. Since the dielectric change range of the liquid crystal molecules in the liquid crystal layer 30 in this embodiment is fixed, that is, the change amount of ε e is also fixed. Therefore, to achieve a larger phase shift amount, the physical length L of the microstrip line between adjacent phase shift units 50 can be increased. By arranging the first conductive part 101 in a zigzag shape, a curved shape, or a serpentine bent shape, the length of the microstrip line between adjacent phase shift units 50 can be further increased, and thus a larger phase shift amount can be achieved, which is beneficial to improving the scanning effect of the scanning antenna 000.

[0090] In some alternative embodiments, please continue to refer to Figure 15 and Figure 16 . In this embodiment, in the direction parallel to the plane of the first substrate 10, a plurality of first conductive parts 101 are arranged in sequence and connected to each other in the same direction, and the electrical lengths of adjacent two first conductive parts 101 are equal.

[0091] This embodiment explains that the electrical lengths between at least two phase shift units 50 (the first conductive part 101) and the feed signal access end 40 are different. When a plurality of phase shift units 50 are connected to each other, in the direction parallel to the plane of the first substrate 10, a plurality of first conductive parts 101 can be arranged in sequence and connected in series in the same direction. At this time, the electrical lengths of any adjacent two first conductive parts 101 respectively connected to the feed signal access end 40 are different, and the actual spatial distances between these two first conductive parts 101 and the feed signal access end 40 are also different. As Figure 15 and Figure 16 shown, adjacent two phase shift units 50 include a first phase shift unit 50A and a second phase shift unit 50B. Among them, both the first phase shift unit 50A and the second phase shift unit 50B are connected to the Figure 15 and Figure 16 feed signal access end 40 on the left side. The electrical length between the first phase shift unit 50A and the feed signal access end 40 is L, and the electrical length between the second phase shift unit 50B and the feed signal access end 40 is 2L. From the perspective of the actual layout space, the physical distance between the first phase shift unit 50A and the feed signal access end 40 is also different from the physical distance between the second phase shift unit 50B and the feed signal access end 40.

[0092] In this embodiment, it is also set that the electrical lengths of two adjacent phase-shifting units 50 (the first conductive part 101) are equal. Although the electrical lengths of any two adjacent first conductive parts 101 connected to the feed signal access terminal 40 respectively are different, that is Figure 15 and Figure 16 the electrical length between the first phase-shifting unit 50A and the feed signal access terminal 40 in

[0093] is different from the electrical length between the second phase-shifting unit 50B and the feed signal access terminal 40, and the distances between different first phase-shifting units 50A and the feed signal access terminal 40 and the physical paths between the second phase-shifting unit 50B and the feed signal access terminal 40 are also different. However, by setting the electrical lengths of two adjacent first conductive parts 101 to be equal, the phase difference during the beam scanning process can be ensured to be the same, which is beneficial to improving the scanning effect.

[0093] In some alternative embodiments, please refer to Figure 17 and Figure 18 [[ID=eleven]], Figure 17 which is another schematic plan view of the scanning antenna provided by the embodiment of the present invention (it can be understood that, for clearly showing the structure of this embodiment, Figure 17 is filled with transparency in Figure 18 is Figure 17 a schematic structural view of one side surface of the first substrate facing the second substrate in

[0094] In this embodiment, the scanning antenna 000 includes multiple rows of phase-shifting units 50H. Multiple first conductive parts 101 are arranged in sequence and connected to each other along the first direction X to form a row of phase-shifting units 50H. Multiple rows of phase-shifting units 50H are arranged in sequence along the second direction Y. Among them, in the direction parallel to the plane where the first substrate 10 is located, the first direction X and the second direction Y intersect; optionally, in this embodiment, an example is given with the first direction X and the second direction Y being perpendicular to each other in the direction parallel to the plane where the first substrate 10 is located;

[0094] One end of each row of phase-shifting units 50H is connected to the feed signal access terminal 40.

[0095] This embodiment explains that each phase-shifting unit 50 in the scanning antenna 000 can also have a structure in which microwave signals are fed in a series-parallel hybrid manner, that is, the scanning antenna 000 can include multiple rows of phase-shifting units 50H. Multiple first conductive parts 101 in each row of phase-shifting units 50H are arranged in sequence and connected to each other along the first direction X to form a row of phase-shifting units 50H, and multiple rows of phase-shifting units 50H are arranged in sequence along the second direction Y. Finally, one end of each row of phase-shifting units 50H is connected to Figure 17 and Figure 18It is connected to the feed signal access terminal 40 on the left side. Since the gain of the scanning antenna 000 is proportional to the total number of radiation units, in this embodiment, each phase shifter unit 50 in the scanning antenna 000 is designed as a planar array structure, that is, each phase shifter unit 50 is a hybrid design of series and parallel connections. The number of phase shifter units 50 in the planar array structure is larger than that in the linear array structure, so its gain is greater. In order to improve the antenna gain in this embodiment, the antenna is designed in the form of a planar array. At the feed signal access terminal 40, a power divider 100 (to achieve one signal for multiple functions) can be used to distribute the microwave signal to the phase shifter units 50 of each phase shifter unit row 50H, so that while achieving one-dimensional beam scanning, the gain of the entire scanning antenna 000 can also be improved.

[0096] Optionally, in this embodiment Figure 17 and Figure 18 only take the middle position of the four phase shifter unit rows 50H of the feed signal access terminal 40 in the second direction Y as an example, that is, the four phase shifter unit rows 50H are symmetric on both sides of the feed signal access terminal 40, which can help reduce the phase difference between different phase shifter unit rows 50H in the second direction Y and is beneficial to better achieve one-dimensional beam scanning in the first direction X.

[0097] Further optionally, as Figure 17 and Figure 18 shown, when the feed signal access terminal 40 of this embodiment is connected to each phase shifter unit row 50H, an adjustment load 80 can be added between the feed signal access terminal 40 and some phase shifter unit rows 50H to adjust the electrical length from the phase shifter unit row 50H to the feed signal access terminal 40, so that by setting the size of the adjustment load 80, the phase difference between different phase shifter unit rows 50H in the second direction Y can be further reduced, and the effect of the scanning antenna can be increased.

[0098] It can be understood that this embodiment only takes three connected first conductive parts 101 included in each phase shifter unit row 50H and the scanning antenna 000 including four phase shifter unit rows 50H arranged in sequence along the second direction Y as an example for schematic illustration, but is not limited to this quantity. During specific implementation, the number of phase shifter unit rows 50H and first conductive parts 101 in the scanning antenna 000 can be selected and set according to actual needs, which will not be elaborated in this embodiment. This embodiment only takes each first conductive part 101 as a serpentine bent shape as an example for illustration, but is not limited to this shape, and can also be a microstrip line structure of other shapes, which will not be elaborated in this embodiment.

[0099] In some alternative embodiments, please refer to Figure 19 , Figure 20 and Figure 21 , ​is another schematic diagram of the planar structure of the scanning antenna provided in an embodiment of the present invention (it can be understood that in order to clearly illustrate the structure of this embodiment, ​ ), ​ yes ​ A structural schematic diagram of the surface of the first substrate facing the second substrate, ​ yes ​ A schematic cross-sectional structure diagram along the D-D' direction in the middle. In this embodiment, a dielectric layer 90 is further included between the first substrate 10 and the second substrate 20. The orthographic projection of the dielectric layer 90 onto the first substrate 10 overlaps with the orthographic projection of the feed signal access terminal 40 onto the first substrate 10, and the orthographic projection of the feed signal access terminal 40 onto the first substrate 10 does not overlap with the orthographic projection of the liquid crystal layer 30 onto the first substrate 10.

[0100] The medium layer 90 includes air and / or solid medium.

[0101] This embodiment explains that the electrical lengths between each phase shift unit row 50H and the feed signal input terminal 40 are different when they are electrically connected. ​ and ​ The electrical length between one phase shifter row 50H1 and the feed signal access terminal 40 is greater than the electrical length between another phase shifter row 50H2 and the feed signal access terminal 40. The difference in electrical length can easily cause a phase difference. Therefore, in order to prevent a phase difference from occurring between the phase shifter rows 50H connected in parallel, this embodiment further includes a dielectric layer 90 between the first substrate 10 and the second substrate 20 at the position of the feed signal access terminal 40, that is, the orthographic projection of the dielectric layer 90 onto the first substrate 10 overlaps with the orthographic projection of the feed signal access terminal 40 onto the first substrate 10. Optionally, the power divider 100 (which realizes multi-function signal transmission) connecting the feed signal access terminal 40 to each phase shifter row 50H also includes a dielectric layer 90; wherein the orthographic projection of the feed signal access terminal 40 onto the first substrate 10 overlaps with the orthographic projection of the liquid crystal layer 3. 0 onto the first substrate 10, the projections are non-overlapping. The material of the dielectric layer 90 can be a low-loss material, such as air, a solid dielectric, or a mixture of air and solid dielectrics. This embodiment does not impose any specific restrictions on this, and only requires that the dielectric layer 90 be a low-loss material. Optionally, the material of the dielectric layer 90 can exclude the sealant 60. Because the material of the sealant 60 has a large signal loss, the sealant 60 should be avoided at the position of the power divider 100 connecting the feed signal access terminal 40 and each phase shift unit row 50H. This is beneficial for enhancing antenna gain and avoiding signal loss. In this embodiment, by providing the dielectric layer 90 in the area corresponding to the feed signal access terminal 40 and the power divider 100, the liquid crystal molecules of the liquid crystal layer 30 are prevented from appearing in this area, thereby preventing phase differences between the phase shift unit rows 50H in a parallel relationship and improving the scanning effect of the antenna.

[0102] Optionally, continue to refer to ​ , each phase shifter unit 50 in the scanning antenna 000 can also be a structure for feeding microwave signals in a series-parallel hybrid manner, that is, the scanning antenna 000 can include multiple phase shifter unit rows 50H. Multiple first conductive parts 101 in each phase shifter unit row 50H are arranged in sequence and connected to each other along the first direction X to form a phase shifter unit row 50H, and multiple phase shifter unit rows 50H are arranged in sequence along the second direction Y. Finally, when one end of each phase shifter unit row 50H is connected to the feed signal access terminal 40 on the left side in the figure, the other end of each phase shifter unit row 50H can be connected to a load 70. The load 70 can be a wave-absorbing device structure. In each phase shifter unit row 50H, matching the load 70 at the output ends of multiple interconnected phase shifter units 50 can completely consume the microwave reaching the tail of each phase shifter unit row 50H without reflecting back to the previous part of the phase shifter units 50 (microstrip line structure). The load 70 can be a matching wave-absorbing material or a matching circuit structure, and this embodiment does not limit this.

[0103] In some alternative embodiments, please refer to ​ and ​ , ​ is another schematic plan view of the scanning antenna provided by the embodiment of the present invention (it can be understood that, for clearly showing the structure of this embodiment, ​ transparency filling is performed), ​ is ​ a schematic structural view of one side surface of the first substrate facing the second substrate in . In this embodiment, the scanning antenna 000 includes at least two first conductive parts 101, and the straight-line distances from the positions where the two first conductive parts 101 are located to the feed signal access terminal 40 are equal;

[0104] The electrical lengths of the two first conductive parts 101 from the feed signal access terminal 40 are different.

[0105] This embodiment explains that in the layout space, the physical distances from different phase shifter units 50 in the scanning antenna 000 to the feed signal access terminal 40 can be set to be equal or approximately equal, that is, the scanning antenna 000 includes at least two first conductive parts 101, and the two first conductive parts 101 are respectively connected to the feed signal access terminal 40, where the positions where the two first conductive parts 101 (the first conductive parts 101A and 101B in the figure) are located (it can be understood as ​ and ​The straight-line distances from the M1 point and the M2 point in it (the M1 point is the theoretical geometric center point of the position where the first conductive part 101A is located, and the M2 point is the theoretical geometric center point of the position where the first conductive part 101B is located) to the feed signal access end 40 are equal, both being K1. The electrical lengths of the two first conductive parts 101 to the feed signal access end 40 can be set differently. For example, by increasing the length of the electrical connection line between one of the first conductive parts 101 and the feed signal access end 40, the electrical lengths of the adjacent two first conductive parts 101 to the feed signal access end 40 can be made different. At least two first conductive parts 101 in this embodiment can be understood as a parallel structure. Taking two first conductive parts 101 as an example, one end of each of the two first conductive parts 101 is respectively connected to the feed signal access end 40. Optionally, one end of the two first conductive parts 101 can be connected to the feed signal access end 40 through a power divider 100 (to achieve the function of one signal transmitting multiple functions). Specifically in implementation, the electrical lengths of the adjacent two first conductive parts 101 themselves can be the same, and the electrical connection line branch in the power divider 100 connected to one first conductive part 101A can be partially bent (such as ​ shown), so as to achieve different electrical lengths between the adjacent two first conductive parts 101 and the feed signal access end 40, and then a certain phase difference can be achieved between the adjacent two phase shift units 50 (that is, the two first conductive parts 101A and the first conductive part 101B). Then, by changing the overall liquid crystal dielectric constant with the bias voltage applied through a bias voltage line connected to both phase shift units 50, the phase difference can be adjusted, and finally beam scanning can be realized.

[0106] Optionally, the difference in the electrical lengths of the two first conductive parts 101 in this embodiment to the feed signal access end 40 can be reflected as ​ and ​ the different transmission path lengths from the adjacent two first conductive parts 101 to the feed signal access end 40 as shown in. Thus, the electrical lengths of the adjacent two first conductive parts 101 (the first conductive parts 101A and 101B) themselves can be set to be the same, both in the shape of a serpentine bend with the same electrical length. Only by setting the lengths of the electrical connection lines between the adjacent two first conductive parts 101 and the feed signal access end 40 to be different, the different transmission paths of the two first conductive parts 101 to the feed signal access end 40 can be satisfied, and the phase difference between the adjacent two phase shift units 50 can be realized.

[0107] It can be understood that the shapes of the first conductive parts 101 in the figures of this embodiment are only for illustrative purposes. Specifically in implementation, the shape of the first conductive part 101 includes but is not limited to the above shapes, and can also be the phase shift unit 50 structures of other shapes.

[0108] In some alternative embodiments, please refer to ​ , ​Another schematic diagram of the planar structure of the scanning antenna provided by the embodiment of the present invention (it can be understood that, for clearly showing the structure of this embodiment, ​ transparency filling is performed in ​ is ​ a schematic diagram of the structure of one side surface of the first substrate facing the second substrate in ​ is ​ a schematic diagram of the structure of one side surface of the second substrate facing the first substrate in ​ is ​ a schematic diagram of the structure of one side surface of the second substrate away from the first substrate in this embodiment, which explains that in the layout space, the physical distances from different phase shift units 50 in the scanning antenna 000 to the feed signal access end 40 can be set to be equal or approximately equal, that is, the scanning antenna 000 includes at least two first conductive parts 101. As ​ shown, taking four first conductive parts 101 as an example, the four first conductive parts 101 are respectively connected to the feed signal access end 40, and at least two adjacent first conductive parts 101 (the first conductive parts 101C and 101D in the figure) are located (it can be understood as ​ and ​ the points M3 and M4 in, the point M3 is the theoretical geometric center point of the position where the first conductive part 101C is located, and the point M4 is the theoretical geometric center point of the position where the first conductive part 101D is located) to the straight-line distance of the feed signal access end 40 is equal, both are K2, and the electrical lengths of two adjacent first conductive parts 101 to the feed signal access end 40 can be set to be different. For example, by increasing the length of the electrical connection line between one of the first conductive parts 101 and the feed signal access end 40, the electrical lengths of the two adjacent first conductive parts 101 to the feed signal access end 40 can be made different. In this embodiment, taking the parallel connection of four first conductive parts 101 as an example, one ends of the four first conductive parts 101 are respectively connected to the feed signal access end 40. Optionally, one ends of the four first conductive parts 101 can be connected to the feed signal access end 40 through a power divider 100 (realizing the function of one signal transmitting multiple functions). Specifically in implementation, the electrical lengths of two adjacent first conductive parts 101 themselves can be different. As ​ shown, the shapes of any two adjacent first conductive parts 101 are different, and their own electrical lengths are also different. The electrical length of the first conductive part 101C itself is less than the electrical length of the first conductive part 101D itself, and also by partially bending the electrical connection line branch of the power divider 100 corresponding to one first conductive part 101 (such as ​As shown, the electrical lengths between two adjacent first conductive parts 101 and the feed signal access end 40 can be made different, so that a certain phase difference can be achieved between the two adjacent phase shift units 50 (i.e., the two first conductive parts 101). Then, by changing the overall liquid crystal dielectric constant with a bias voltage applied through a bias voltage line connected to all four phase shift units 50, the phase difference can be adjusted, and finally beam scanning can be realized.

[0109] Optionally, the different electrical lengths of the four first conductive parts 101 to the feed signal access end 40 in this embodiment can be reflected as ​ and ​ the different transmission path lengths between two adjacent first conductive parts 101 and the feed signal access end 40 as shown in. Thus, the electrical lengths of the two adjacent first conductive parts 101 (first conductive parts 101C and 101D) themselves can be set to be different, and the lengths of the electrical connection lines between the two adjacent first conductive parts 101 and the feed signal access end 40 are also different, so as to satisfy the different transmission paths of the two first conductive parts 101 to the feed signal access end 40 and achieve the phase difference between the two adjacent phase shift units 50.

[0110] It can be understood that the shape of the first conductive part 101 in the figure of this embodiment is only an example for illustration. In actual implementation, the shape of the first conductive part 101 includes but is not limited to the above shape, and can also be the phase shift unit 50 structure of other shapes.

[0111] In some alternative embodiments, please refer to ​ , ​ which is another schematic plan view of the scanning antenna provided by the embodiment of the present invention (it can be understood that, for clearly showing the structure of this embodiment, ​ transparency filling is performed in). ​ is ​ a schematic view of the structure of one side surface of the first substrate facing the second substrate in. In this embodiment, the different electrical lengths of the two first conductive parts 101 to the feed signal access end 40 can be reflected as ​ and ​ the same transmission path lengths of the two first conductive parts 101 to the feed signal access end 40 as shown in, but the shapes of the orthographic projections of the two first conductive parts 101 on the first substrate 10 are different (such as the first conductive parts 101E and 101F in ​ and ​ ). Thus, the electrical lengths of the two adjacent first conductive parts 101 themselves can be set to be different, while the lengths of the electrical connection lines between the two adjacent first conductive parts 101 and the feed signal access end 40 are the same, and the same can also satisfy the same transmission path lengths of the two first conductive parts 101 to the feed signal access end 40 to achieve the phase difference between the two adjacent phase shift units 50.

[0112] It should be noted that, in this embodiment, ​ and ​ only two shapes of the orthographic projections of the two first conductive parts 101 on the first substrate 10 are exemplarily drawn, including but not limited to this shape. In specific implementation, the shapes of the orthographic projections of the two first conductive parts 101 on the first substrate 10 can also be other two different shapes. For example, the microstrip line shape of one first conductive part 101 is a serpentine bend shape, and the microstrip line shape of the other first conductive part 101 is a defected ground shape (not shown in the figure). This embodiment does not make specific limitations, and in specific implementation, it can be selected and set according to actual needs.

[0113] In some alternative embodiments, please refer to ​ , ​ which is another schematic plan view of the scanning antenna provided by the embodiment of the present invention (it can be understood that, for clearly showing the structure of this embodiment, ​ is filled with transparency), ​ is ​ a schematic structural view of one side surface of the first substrate facing the second substrate in ​ is ​ a schematic structural view of one side surface of the second substrate facing the first substrate in ​ is ​ a schematic structural view of one side surface of the second substrate away from the first substrate in this embodiment. The feed signal access terminal 40 is connected with at least two first branch structures 1001, each first branch structure 100 is connected with at least two second branch structures 1002, and each second branch structure 1002 is connected with at least two first conductive parts 101; optionally, ​ and ​ take the example that each second branch structure 1002 is connected with four first conductive parts 101 for illustration;

[0114] The multiple first conductive parts 101 are arranged in an array. Optionally, the linear distances from the positions of adjacent two first conductive parts 101 to the feed signal access terminal 40 are equal;

[0115] The electrical lengths of at least two first conductive parts 101 from the feed signal access terminal 40 are different.

[0116] In this embodiment, it is explained that when the feed signal access terminal 40 is connected in parallel with a plurality of first conductive parts 101, the power divider 100 (realizing the function of one signal being divided into multiple functions) disposed between the feed signal access terminal 40 and the plurality of first conductive parts 101 can be a T-shaped power divider structure, that is, at least two first branch structures 1001 (which can be understood as the primary branches of the power divider 100) are connected to the feed signal access terminal 40, and at least two second branch structures 1002 (which can be understood as the secondary branches of the power divider 100, ​ and ​ in which it is taken as an example that each second branch structure 1002 is connected to four first conductive parts 101 for illustration; when the number of the first conductive parts 101 is larger, tertiary branches, quaternary branches, etc. can be further provided, which are not specifically limited in this embodiment), and in this embodiment, it is taken as an example that each second branch structure 1002 is connected to four first conductive parts 101 for illustration. Through the setting of the power divider 100 with multiple branches in this embodiment, the plurality of first conductive parts 101 are arranged in an array structure. Optionally, the feed signal access terminal 40 of this embodiment can be disposed at a position close to the geometric center of the first substrate 10 (such as ​ shown), so that the linear distances from the positions where two adjacent first conductive parts 101 are located (such as the first conductive parts 101G and 101H in ​ ) to the feed signal access terminal 40 are equal, that is, the physical distances from the positions where each first conductive part 101 is located to the feed signal access terminal 40 in the layout space are equal, while among the plurality of first conductive parts 101, the electrical lengths of the two adjacent first conductive parts 101 to the feed signal access terminal 40 are different. Optionally, one end of each first conductive part 101 can be connected to the first branch structure 1001 of the power divider 100 through the second branch structure 1002 of the power divider 100, and be respectively connected to the feed signal access terminal 40 through the first branch structure 1001. In specific implementation, the electrical lengths of two adjacent first conductive parts 101 among the plurality of first conductive parts 101 can be the same or different ( ​ in which it is taken as an example that the electrical lengths of two adjacent first conductive parts 101 are different for illustration), and then by partially bending the first branch structure 1001 of the electrical connection line of the power divider 100 with a first conductive part 101 (such as ​ and ​As shown, the electrical lengths between two adjacent first conductive parts 101 and the feed signal access terminal 40 can be made different, so that a certain phase difference can be achieved between the two adjacent phase shift units 50 (i.e., two adjacent different first conductive parts 101). Then, the overall liquid crystal dielectric constant is changed by a bias voltage applied through a bias voltage line connected to all the phase shift units 50, making the phase difference adjustable, and finally beam scanning is achieved. Since the gain of the scanning antenna 000 is proportional to the total number of radiation units, in this embodiment, each phase shift unit 50 (each first conductive part 101) in the scanning antenna 000 is designed in an array arrangement structure, that is, while all the phase shift units 50 are in parallel, they are also arranged in an array. The number of phase shift units 50 arranged in an array is larger than that in a linear array structure, so its gain is greater. In order to increase the antenna gain in this embodiment, the antenna is designed in an array arrangement form. At the feed signal access terminal 40, a power divider 100 (which can achieve one signal for multiple functions) can be used to distribute the microwave signal to each first conductive part 101 connected in parallel, so that while beam scanning can be achieved, the gain of the entire scanning antenna 000 can also be increased.

[0117] In some alternative embodiments, please refer to ​ , ​ which is another schematic plan view of the scanning antenna provided by the embodiment of the present invention, ​ is ​ a schematic cross-sectional view in the E - E' direction of ​ (it can be understood that for clearly showing the structure of this embodiment, ​ transparency filling is performed in ​ ), ​ is ​ a schematic view of the surface of the first substrate facing the second substrate in

[0118] The side of the first substrate 10 facing the second substrate 20 includes a second conductive part 201;

[0119] The side of the second substrate 20 facing the first substrate 10 further includes a third conductive part 202, and the third conductive part 202 is directly connected to the first conductive part 101; where

[0120] The feed signal received by the feed signal access terminal 40 is transmitted to the first conductive part 101, and the first conductive part 101 directly transmits the signal to the third conductive parts 202 at different positions.

[0121] Optionally, the second conductive part 201 is a whole-surface structure, and the second conductive part 201 is grounded; the third conductive part 202 is a block structure.

[0122] This embodiment explains that the scanning antenna 000 can be a two-layer metal conductive structure arranged on the first substrate 10 and the second substrate 20. Among them, the second conductive part 201 with a whole-surface structure is arranged on the side of the first substrate 10 facing the second substrate 20 and is grounded as the metal ground layer; the first conductive part 101 (phase shifter unit 50) and the third conductive part 202 of the microstrip line structure for wave transmission function are both arranged on the side of the second substrate 20 facing the first substrate 10. Among them, the third conductive part 202 is a block structure and can be used as a radiation patch to radiate microwave signals. The third conductive part 202 is directly connected to the first conductive part 101. When the feed signal received by the feed signal access terminal 40 is transmitted to the first conductive part 101, through the direct connection between the third conductive part 202 and the first conductive part 101, the first conductive part 101 directly transmits the signal to the third conductive parts 202 at different positions, realizing the radiation of microwave signal energy. The scanning antenna 000 set in this embodiment also only needs one bias voltage line to apply a bias voltage between the first conductive part 101 of the microstrip line structure and the second conductive part 201 of the metal ground layer, without a complex bias circuit. It can not only realize one-dimensional beam scanning, which is beneficial to reducing the manufacturing cost and the wiring difficulty, but also the direct connection between the first conductive part 101 of the microstrip line structure and the third conductive part 202 of the radiation patch can avoid the coupling loss when the radiation patch and the microstrip line are arranged on different metal conductive layers, and only metal conductive layers are arranged on one side of the first substrate 10 and one side of the second substrate 20, so the manufacturing process is simpler and the cost is lower.

[0123] Optionally, the scanning antenna 000 further includes a load 70. One end of the direct connection between the first conductive part 101 of the microstrip line structure and the third conductive part 202 of the radiation patch is connected to the feed signal access terminal 40, and the other end of the direct connection between the first conductive part 101 of the microstrip line structure and the third conductive part 202 of the radiation patch is connected to the load 70. The load 70 can be a wave-absorbing device structure, which can completely consume the microwave reaching the tail of the phase shifter unit 50 (microstrip line structure) without reflecting back to the previous part of the phase shifter unit 50 (microstrip line structure). The load 70 can be a matching wave-absorbing material or a matching circuit structure, and this embodiment does not limit this.

[0124] In some alternative embodiments, please refer to ​ and ​ ,​ Another schematic diagram of the planar structure of the scanning antenna provided by the embodiment of the present invention, ​ is ​ a schematic cross-sectional structure diagram in the F-F' direction in ​ (it can be understood that, for the sake of clearly showing the structure of this embodiment,

[0125] transparency filling is performed in

[0126] In this embodiment, the scanning antenna 000 further includes a first dielectric layer 901 between the first substrate 10 and the second substrate 20. The positive projection of the first dielectric layer 901 on the first substrate 10 overlaps with the positive projection of the third conductive part 202 on the first substrate 10, and the positive projection of the first dielectric layer 901 on the first substrate 10 does not overlap with the positive projection of the liquid crystal layer 30 on the first substrate 10;

[0127] The first dielectric layer 901 includes air or / and solid dielectric.

[0128] In some alternative embodiments, please continue to refer to​ , ​ , ​ , in this embodiment, the first conductive part 101 includes one of a straight shape, a curved shape, and a broken line shape.

[0129] This embodiment further explains that the shape of each first conductive part 101 used as a microstrip line can be a straight shape, or can also be a curved shape (specifically, reference can be made to the corresponding embodiments above ​ and ​ for understanding), or can also be a broken line shape as shown in ​ . This embodiment does not make specific limitations on this. It only needs to satisfy that the electrical lengths of the first conductive parts 101 fed from the feed signal access end 40 to the phase shifter unit 50 are different, so that the physical path lengths of the microwave signals reaching the third conductive part 202 of the radiation patch are inconsistent and show an arithmetic relationship, that is, an initial phase difference is given to each microwave signal, and then only by changing the overall liquid crystal dielectric constant through the bias voltage applied by a bias voltage line, the phase difference can be adjusted, and finally the beam scanning of the scanning antenna 000 in this embodiment can be realized. It can be understood that this embodiment is only an example to illustrate the shapes that the first conductive part 101 can include, but is not limited thereto. In specific implementation, the shape of the first conductive part 101 used as a microstrip line can also include other slow-wave structures such as defected ground structures and composite left-handed and right-handed structures, and can also be other shapes, which are not elaborated in this embodiment.

[0130] Optionally, as shown in ​ , ​ , ​ , the first conductive part 101 is in a serpentine bent shape. In this embodiment, the first conductive part 101 in a broken line shape, a curved shape, and a serpentine bent shape is provided, which can realize the growth of the first conductive part 101 acting as a microstrip line. By further increasing the microstrip line length between adjacent phase shifter units 50, a larger phase shift amount can be realized, which is beneficial to improving the scanning effect of the scanning antenna 000.

[0131] Further optionally, as shown in ​ , the directly connected structure of the first conductive part 101 and the third conductive part 202 can be: a plurality of first conductive parts 101 and a plurality of third conductive parts 202 are arranged in sequence and connected to each other in the same direction, one first conductive part 101 is located between two adjacent third conductive parts 202, one end of the first conductive part 101 is connected to one third conductive part 202, and the other end of the first conductive part 101 is connected to another third conductive part 202.

[0132] Further optionally, as shown in ​ , ​ is another schematic plan view of the scanning antenna provided by the embodiment of the present invention, ​ is​ A schematic structural diagram of one side surface of the second substrate facing the first substrate. In this embodiment, the structure of the direct connection between the first conductive part 101 and the third conductive part 202 can also be: a plurality of first conductive parts 101 are arranged in sequence and connected to each other in the same direction; a branch line 1010 is included between two adjacent first conductive parts 101, and the third conductive part 202 is connected to the first conductive part 101 through the branch line 1010. One end of the branch line 1010 is connected to the first conductive part 101 at a position between two adjacent first conductive parts 101, and the other end of the branch line 1010 is connected to the third conductive part 202.

[0133] It can be understood that this embodiment does not specifically limit the structure of the direct connection between the first conductive part 101 and the third conductive part 202 on one side surface of the second substrate 20 facing the first substrate 10. During specific implementation, any one of the connection methods in the above embodiments can be adopted, as long as it satisfies that both the first conductive part 101 and the third conductive part 202 are arranged on one side surface of the second substrate 20 facing the first substrate 10 and the direct connection between the first conductive part 101 and the third conductive part 202.

[0134] In some alternative embodiments, please refer to ​ 、 ​ 、 ​ , ​ is another schematic plan view of the scanning antenna provided by the embodiment of the present invention (it can be understood that, for clearly showing the structure of this embodiment, ​ transparency filling is performed in ​ ), ​ is a schematic structural diagram of one side surface of the second substrate facing the first substrate, ​ is another schematic plan view of the scanning antenna provided by the embodiment of the present invention (it can be understood that, for clearly showing the structure of this embodiment, ​ transparency filling is performed in ​ ), ​ is a schematic structural diagram of one side surface of the second substrate facing the first substrate. In this embodiment, the scanning antenna 000 includes a plurality of rows of phase shift units 50H. A plurality of first conductive parts 101 are arranged in sequence and connected to each other along the first direction X to form a row of phase shift units 50H. A plurality of rows of phase shift units 50H are arranged in sequence along the second direction Y. Among them, in a direction parallel to the plane where the first substrate 10 is located, the first direction X and the second direction Y intersect; optionally, in this embodiment, an example is given with the first direction X and the second direction Y being perpendicular to each other in a direction parallel to the plane where the first substrate 10 is located;

[0135] One end of each row of phase shift units 50H is connected to the feed signal access end 40.

[0136] This embodiment explains that each phase shifter unit 50 in the scanning antenna 000 can also have a structure for feeding microwave signals in a series-parallel hybrid manner, that is, the scanning antenna 000 can include multiple phase shifter unit rows 50H. A plurality of first conductive parts 101 in each phase shifter unit row 50H are arranged in sequence along the first direction X and are connected to each other to form a phase shifter unit row 50H. And a plurality of phase shifter unit rows 50H are arranged in sequence along the second direction Y, and finally one end of each phase shifter unit row 50H is connected to ​ the feed signal access terminal 40 on the left side in. Since the gain of the scanning antenna 000 is proportional to the overall number of radiation units, in this embodiment, each phase shifter unit 50 in the scanning antenna 000 is designed as a planar array structure, that is, each phase shifter unit 50 is a hybrid design of series and parallel. The number of phase shifter units 50 in the planar array structure is larger than that in the linear array structure, so its gain is larger. In order to improve the antenna gain in this embodiment, the antenna is designed in the form of a planar array. At the feed signal access terminal 40, a power divider 100 (to achieve one signal for multiple functions) can be used to distribute the microwave signal to the phase shifter units 50 of each phase shifter unit row 50H, so that while realizing one-dimensional beam scanning, the gain of the entire scanning antenna 000 can also be improved.

[0137] Optionally, in this embodiment of ​ only the middle position of the four phase shifter unit rows 50H of the feed signal access terminal 40 in the second direction Y is taken, that is, the four phase shifter unit rows 50H are symmetric with respect to both sides of the feed signal access terminal 40, which is beneficial to reducing the phase difference between different phase shifter unit rows 50H in the second direction Y and is beneficial to better realizing one-dimensional beam scanning in the first direction X.

[0138] Further optionally, as ​ shown, when the feed signal access terminal 40 of this embodiment is connected to each phase shifter unit row 50H, an adjustment load 80 can be added between the feed signal access terminal 40 and some phase shifter unit rows 50H to adjust the electrical length from the phase shifter unit row 50H to the feed signal access terminal 40, so that by setting the size of the adjustment load 80, the phase difference between different phase shifter unit rows 50H in the second direction Y can be further reduced, and the effect of the scanning antenna can be increased.

[0139] Optionally, the other end of each phase shifter unit row 50H can be connected to a load 70. The load 70 can be a wave-absorbing device structure. In each phase shifter unit row 50H, matching the load 70 at the output ends of the multiple interconnected phase shifter units 50 can completely consume the microwave reaching the tail of each phase shifter unit row 50H without reflecting back to the previous part of the phase shifter units 50 (microstrip line structure). The load 70 can be a matching wave-absorbing material or a matching circuit structure, and this embodiment does not limit this.

[0140] It can be understood that in this embodiment, only an example is given where each phase shift unit row 50H includes three connected first conductive parts 101, a third conductive part 202 is connected between every two adjacent first conductive parts 101, and the scanning antenna 000 includes four phase shift unit rows 50H arranged in sequence along the second direction Y. However, it is not limited to this quantity. During specific implementation, the quantities of the phase shift unit rows 50H and the first conductive parts 101 in the scanning antenna 000 can be selected and set according to actual requirements, which will not be elaborated in this embodiment. In this embodiment, only an example is given where each first conductive part 101 is in a serpentine bent shape. However, it is not limited to this shape and can also be a microstrip line structure of other shapes, which will not be elaborated in this embodiment.

[0141] In some alternative embodiments, please refer to ​ and ​ , ​ which is another schematic plan view of the scanning antenna provided by the embodiment of the present invention. ​ is ​ a schematic cross-sectional view in the direction of G-G' in (It can be understood that for clearly showing the structure of this embodiment, ​ transparency filling is performed in ). In this embodiment, a second dielectric layer 902 is further included between the first substrate 10 and the second substrate 20. The positive projection of the second dielectric layer 902 on the first substrate 10 overlaps with the positive projection of the feed signal access end 40 on the first substrate 10, and the positive projection of the feed signal access end 40 on the first substrate 10 does not overlap with the positive projection of the liquid crystal layer 30 on the first substrate 10.

[0142] The second dielectric layer 902 includes air or / and solid dielectric.

[0143] This embodiment explains that due to the different electrical lengths of the electrical connection lines between each phase shift unit row 50H when electrically connected to the feed signal access end 40, such as ​ and ​The electrical length between a phase shift unit row 50H1 in [the relevant context] and the feed signal access terminal 40 is greater than the electrical length between another phase shift unit row 50H2 and the feed signal access terminal 40. The difference in electrical length is likely to cause a phase difference. Therefore, in order to prevent a phase difference from occurring between the phase shift unit rows 50H with a parallel relationship, in this embodiment, a second dielectric layer 902 is further included at the position of the feed signal access terminal 40 between the first substrate 10 and the second substrate 20, that is, the orthographic projection of the second dielectric layer 902 on the first substrate 10 overlaps with the orthographic projection of the feed signal access terminal 40 on the first substrate 10. Optionally, the second dielectric layer 902 is also included at the position of the power splitter 100 (realizing the function of one signal transmitting multiple functions) where the feed signal access terminal 40 is connected to each phase shift unit row 50H; among them, the orthographic projection of the feed signal access terminal 40 on the first substrate 10 does not overlap with the orthographic projection of the liquid crystal layer 30 on the first substrate 10. The material of the second dielectric layer 902 can be a low-loss material, such as air, or a solid dielectric, or it can also be a mixed material of air and a solid dielectric. This embodiment does not make specific limitations on this, and only needs to satisfy that the second dielectric layer 902 is a low-loss material; optionally, the material of the second dielectric layer 902 can exclude the frame adhesive 60. Since the material of the frame adhesive 60 has a large signal loss, the frame adhesive 60 should be avoided at the position of the power splitter 100 where the feed signal access terminal 40 is connected to each phase shift unit row 50H, which is beneficial to enhancing the antenna gain and avoiding signal loss. In this embodiment, a first dielectric layer 901 is provided in the area corresponding to the third conductive part 202 of the radiation patch, so that the liquid crystal molecules of the liquid crystal layer 30 are avoided from appearing in the area where the radiation patch is located. Thus, while avoiding the liquid crystal dielectric change from affecting the resonance frequency of the radiation patch, a second dielectric layer 902 is also provided in the area corresponding to the feed signal access terminal 40 and the power splitter 100, so that the liquid crystal molecules of the liquid crystal layer 30 are avoided from appearing in this area, thereby preventing a phase difference from occurring between the phase shift unit rows 50H with a parallel relationship and improving the scanning effect of the antenna.

[0144] As can be seen from the above embodiments, the scanning antenna provided by the present invention has at least achieved the following beneficial effects:

[0145] In the scanning antenna of the present invention, each phase shifter unit is interconnected. Only one bias voltage line is required to supply the same bias voltage signal to all phase shifter units. By changing the overall liquid crystal permittivity through the bias voltage signal, since what is changed is the overall liquid crystal permittivity in the scanning antenna, at this time, it is necessary to set the length of the feeding path. That is, although the phase shifter units of the present invention are connected together, the electrical lengths from at least two phase shifter units to the feeding signal access end are different. The different electrical lengths can be understood as the lengths of the two phase shifter units respectively connected to the feeding signal access end are different. Then, the physical path lengths of the microwave signals fed into each radiator are inconsistent and present an arithmetic progression relationship, that is, an initial phase difference is given to each microwave signal, making the phase difference adjustable, and finally beam scanning is achieved. The present invention only needs to apply the same bias voltage to each phase shifter unit, without independently applying a bias voltage to each phase shifter unit. Therefore, the setting of the bias voltage line is greatly simplified. In theory, only one bias voltage line needs to be set on the metal layer where the phase shifter unit is located, and the design difficulty and cost of the liquid crystal bias control circuit are also greatly reduced. The present invention only needs to apply the same bias voltage to each phase shifter unit, without independently applying a bias voltage to each phase shifter unit. Therefore, the feeding signal access end and each phase shifter unit can be directly connected, which can avoid problems such as coupling loss and reduction of the working bandwidth. The present invention can not only achieve one-dimensional beam scanning, but also has a good scanning effect, which is beneficial to reducing the manufacturing cost and the wiring difficulty, and can be applied to scenarios such as along high-speed railways and subways.

[0146] Although some specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are only for illustration and not for limiting the scope of the present invention. Those skilled in the art should understand that the above embodiments can be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A scanning antenna, characterized in that, Comprising: A first substrate and a second substrate disposed opposite to each other, and a liquid crystal layer located between the first substrate and the second substrate; It further includes a feed signal access terminal and a plurality of phase shift units. The plurality of phase shift units are connected to each other, each phase shift unit is connected to the feed signal access terminal, and the electrical lengths between at least two of the phase shift units and the feed signal access terminal are different; The phase shift unit includes a first conductive portion, and the first conductive portion is disposed on a side of the first substrate facing the second substrate; A side of the second substrate facing the first substrate includes a second conductive portion, and the second conductive portion includes a plurality of through holes; A side of the second substrate away from the first substrate includes a plurality of third conductive portions. A positive projection of the third conductive portion on the second substrate overlaps a positive projection of the through hole on the second substrate, and a positive projection of the first conductive portion on the second substrate is located between positive projections of two adjacent third conductive portions on the second substrate; wherein, A feed signal received by the feed signal access terminal is transmitted to the first conductive portion, and the first conductive portion couples the signal to the third conductive portion through the through hole of the second conductive portion.

2. The scanning antenna according to claim 1, characterized in that, The scanning antenna further includes a load. One end of the plurality of interconnected phase shift units is connected to the feed signal access terminal, and the other end of the plurality of interconnected phase shift units is connected to the load.

3. The scanning antenna according to claim 1, wherein The second conductive portion is a whole surface structure, the second conductive portion is a ground signal, and the third conductive portion is a block structure.

4. The scanning antenna according to claim 1, characterized in that, A shape of a positive projection of the through hole on the second substrate includes one of a strip shape and an H shape.

5. The scanning antenna according to claim 1, characterized in that, The first conductive portion includes one of a straight shape, a curved shape, and a broken line shape.

6. The scanning antenna according to claim 1, characterized in that, The first conductive portion is in a serpentine bent shape.

7. The scanning antenna according to claim 1, characterized in that, In a direction parallel to a plane where the first substrate is located, the plurality of first conductive portions are arranged in sequence in the same direction and are connected to each other, and the electrical lengths of two adjacent first conductive portions are equal.

8. The scanning antenna according to claim 1, wherein The scanning antenna includes a plurality of phase shift unit rows. The plurality of first conductive portions are arranged in sequence in a first direction and are connected to each other to form one phase shift unit row. The plurality of phase shift unit rows are arranged in sequence in a second direction. Among them, in a direction parallel to a plane where the first substrate is located, the first direction and the second direction intersect; One end of each phase shift unit row is connected to the feed signal access terminal.

9. The scanning antenna according to claim 8, wherein A dielectric layer is further included between the first substrate and the second substrate. A positive projection of the dielectric layer on the first substrate overlaps a positive projection of the feed signal access terminal on the first substrate, and a positive projection of the feed signal access terminal on the first substrate does not overlap a positive projection of the liquid crystal layer on the first substrate; The dielectric layer includes air or / and solid dielectric.

10. The scanning antenna according to claim 1, wherein The scanning antenna includes at least two of the first conductive portions, and the straight-line distances from positions where the two first conductive portions are located to the feed signal access terminal are equal; The electrical lengths of the two first conductive portions to the feed signal access terminal are different.

11. The scanning antenna according to claim 10, wherein, The transmission path lengths of the two first conductive portions to the feed signal access terminal are different.

12. The scanning antenna according to claim 10, characterized in that, The transmission path lengths of the two first conductive parts to the feed signal access end are the same, and the shapes of the positive projections of the two first conductive parts on the first substrate are different.

13. The scanning antenna according to claim 1, wherein At least two first branch structures are connected to the feed signal access end, at least two second branch structures are connected to each first branch structure, and at least two of the first conductive parts are connected to each second branch structure; A plurality of the first conductive parts are arranged in an array, and the linear distances from the positions where each first conductive part is located to the feed signal access end are equal; The electrical lengths of at least two of the first conductive parts to the feed signal access end are different.

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