Preparation method and stripping device of flexible display device

Abstract

The present invention relates to a method for preparing a flexible display device and a stripping device, the preparation method comprising the following steps: preparing a flexible display device on a carrier substrate to obtain a device to be stripped; destroying the adhesive force between the flexible display device and the carrier substrate of the device to be stripped, so that the flexible display device and the carrier substrate are in a non-adhesive contact state; placing the flexible display device and the carrier substrate in a contact state on a separation platform, and positioning the flexible display device between the carrier substrate and the separation platform; bending at least a portion of the separation platform in a direction away from the flexible display device, so that the flexible display device is synchronously bent and separated from the carrier substrate; and removing the carrier substrate. The present invention utilizes the bending of the separation platform to pre-separate a portion of the flexible display device from the carrier substrate, thereby reducing the difficulty of separating the flexible display device from the carrier substrate and improving the reliability and efficiency of the stripping process.

Description

Technical Field

[0001] The present invention relates to the field of display technology, and in particular to a preparation method and a manufacturing device for a flexible display device. Background Art

[0002] In recent years, the development of flexible display (Flexible Display) and foldable display (Foldable Display) technologies has been rapid. They are the focus of domestic and foreign universities and research institutes, and are also key technologies that display companies and terminal manufacturers are competing to deploy. With the continuous development of production processes and technologies, the forms of flexible displays are becoming more and more diverse. While the screen size is increasing, the display quality is also continuously improving. Terminal manufacturers have also launched flexible and foldable terminal products. Flexible displays use flexible substrate materials as device carrier substrates, and require that the electrode layer, TFT matrix, display device and packaging layer have a certain bending radius to achieve flexibility, including electronic paper, flexible liquid crystal display and flexible organic electroluminescent display devices. Compared with ordinary displays, flexible displays have many advantages: light weight, small size, thinness, and easy to carry; high and low temperature resistance, impact resistance, and earthquake resistance are stronger, and can adapt to a wider working environment; can be rolled, and the appearance is more aesthetically pleasing; the roll-to-roll production process using printing technology is more cost-effective; low power consumption and more energy-saving; organic materials are more green and environmentally friendly.

[0003] At present, flexible display products are mainly produced by S2S (sheet to sheet) production process, with glass substrate as carrier, combined with flexible substrate attachment and removal methods. Attachment and removal is to attach the flexible substrate to the hard carrier substrate to prepare the display device, and then peel off the hard substrate after the display device is prepared to take out the flexible display device. This method does not affect the production accuracy of the display device, and the production equipment and process are similar to those of the traditional TFT-LCD, and no major adjustments are required, so it is closer to mass production application in the short term. The attachment and removal process can be roughly divided into two categories: one is laser lift-off technology (LLO: Laser Lift-Off), which uses laser to directly act on the interface between the plastic substrate and the carrier, and uses high-energy laser to destroy the bonding force between the plastic substrate and the carrier to separate them; the other is mechanical lift-off technology (MLO: Mechanical Lift-Off), which uses the different bonding forces between the special release layer and the plastic substrate and the carrier, and separates them by cutting and removing the part with strong edge bonding. The laser lift-off process is used in the production of flexible displays and has been mass-produced and applied on flexible OLED mobile phones, but there are still problems such as low peeling efficiency. Summary of the invention

[0004] Based on this, it is necessary to provide a method for preparing a flexible display device with high peeling efficiency.

[0005] A method for preparing a flexible display device comprises the following steps:

[0006] Preparing a flexible display device to be peeled off on a carrier substrate;

[0007] Destroying the adhesive force between the to-be-peeled flexible display device and the carrier substrate, so that the to-be-peeled flexible display device and the carrier substrate are in a non-adhesive or partially non-adhesive contact state;

[0008] Placing the flexible display device to be peeled off and the carrier substrate in the contact state on a separation platform, and positioning the flexible display device to be peeled off between the carrier substrate and the separation platform;

[0009] bending at least a portion of the separation platform in a direction away from the to-be-peeled flexible display device, so that the to-be-peeled flexible display device is synchronously bent and separated from the carrier substrate;

[0010] The carrier substrate is removed.

[0011] The method for preparing a flexible display device of the present invention, after destroying the adhesive force between the flexible display device to be peeled off and the carrier substrate, places the flexible display device to be peeled off and the carrier substrate on a separation platform, and makes the flexible display device to be peeled off fit with the separation platform, and then bends at least a portion of the separation platform in a direction away from the flexible display device to be peeled off, so that the flexible display device to be peeled off can be partially separated from the carrier substrate, which is conducive to air penetration, breaking the vacuum state between the flexible display device to be peeled off and the carrier substrate, and there is no adhesive force between the flexible display device to be peeled off and the carrier substrate, and the flexible display device to be peeled off and the carrier substrate can be naturally separated, and the carrier substrate can be easily removed later. The present invention uses the bending of the separation platform to pre-separate the flexible display device to be peeled off partially from the carrier substrate, which reduces the difficulty of separating the flexible display device to be peeled off from the carrier substrate, improves the reliability and efficiency of the peeling process, and does not have the problem of flexible binding.

[0012] In one embodiment, the step of destroying the adhesive force between the flexible display device to be peeled off and the carrier substrate comprises:

[0013] The flexible display device to be peeled off is placed on an air flotation platform, and the flexible display device to be peeled off is located between the carrier substrate and the air flotation platform, and a laser is scanned on the interface between the flexible display device to be peeled off and the carrier substrate to destroy the adhesion between the flexible display device to be peeled off and the carrier substrate.

[0014] In one embodiment, after the step of destroying the adhesive force between the flexible display device to be peeled off and the carrier substrate, the following steps are also included:

[0015] The flexible display device to be peeled off and the carrier substrate in the contact state are suspended on the air floating platform, and moved to the separation platform in the suspended state.

[0016] In one embodiment, before at least a portion of the separation platform is bent in a direction away from the flexible display device to be peeled off, the separation platform is vacuum-adsorbed to the flexible display device to be peeled off.

[0017] In one embodiment, the separation platform includes a main body and a bending portion connected to each other, the bending portion can be bent relative to the main body, and the step of bending at least a portion of the separation platform in a direction away from the flexible display device to be peeled off includes:

[0018] The bending portion is bent in a direction away from the to-be-peeled flexible display device, so that the to-be-peeled flexible display corresponding to the bending portion is bent synchronously with the bending portion.

[0019] In one of the embodiments, the bending angle of the bending portion of the separation platform in a direction away from the flexible display device to be peeled off is 2° to 3°.

[0020] In one embodiment, the length of the inclined surface formed by the bending portion of the separation platform after bending is 10 mm to 20 mm.

[0021] The present invention also provides a stripping device, which comprises:

[0022] The separation platform comprises a main body portion and a bending portion which are connected to each other, and the bending portion can be bent relative to the main body portion.

[0023] In one embodiment, the stripping device further comprises:

[0024] An air flotation platform is disposed adjacent to the separation platform.

[0025] In one embodiment, the stripping device further comprises:

[0026] A laser peeling mechanism, which is used to perform laser scanning to destroy the adhesive force between the flexible display device to be peeled off and the carrier substrate;

[0027] A robot arm is used to drive the flexible display device to be peeled off and / or the carrier substrate to move between the air floating platform and the separation platform.

[0028] In one embodiment, the separation platform is provided with a plurality of blowing holes and a plurality of vacuum adsorption holes, the plurality of blowing holes are distributed in at least one row on the separation platform, and the plurality of vacuum adsorption holes are distributed in at least one row on the separation platform.

[0029] In one embodiment, a plurality of purge holes are distributed in the edge area of ​​the air flotation platform, and a plurality of purge holes and a plurality of air suction holes are distributed in the middle area of ​​the air flotation platform;

[0030] wherein the plurality of purge holes distributed in the edge region are distributed in at least one row;

[0031] Among the multiple purge holes and the multiple air suction holes distributed simultaneously in the middle area, the multiple purge holes are distributed in at least one row, and the multiple air suction holes are distributed in at least one row. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 Schematic diagram of the mismatch problem in the flexible binding process;

[0033] Figure 2 This is a schematic diagram of the problem of flexible display devices falling off during transportation;

[0034] Figure 3 is a schematic diagram of preparing a flexible display device according to an embodiment;

[0035] Figure 4 Schematic diagram of the structure of an air floating platform according to an embodiment, A is a top view, and B is a side view;

[0036] Figure 5 is a schematic diagram of a laser lift-off process according to an embodiment;

[0037] Figure 6 is a schematic diagram of a handling process of a flexible display device according to an embodiment;

[0038] Figure 7 is a schematic diagram of a bending process of a separation platform according to an embodiment;

[0039] Figure 8 FIG. 1 is a schematic diagram of a process of removing a carrier substrate according to an embodiment of the present invention.

[0040] Description of reference numerals:

[0041] 10: separation platform; 11: main body; 12: bending part; 13: blowing hole; 14: vacuum adsorption hole; 20: air flotation platform; 21: purge hole; 22: suction hole; 23: air flow balance area; 24: blowing area; 30: robot; 200: flexible display device to be peeled off; 210: carrier substrate; 201: flexible substrate; 202: water and oxygen barrier layer; 203: TFT array; 204: device functional layer; 205: thin film packaging; 206: polarizer; 207: binding terminal; 208: flip chip film. DETAILED DESCRIPTION

[0042] In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively below, and preferred embodiments of the present invention are provided. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items. In addition, any method and material similar or equivalent to the described content can be applied to the present invention.

[0044] A method for preparing a flexible display device according to an embodiment of the present invention comprises the following steps S1 to S5:

[0045] S1. Preparing a flexible display device to be peeled off on a carrier substrate;

[0046] S2, destroying the adhesive force between the to-be-peeled flexible display device and the carrier substrate, so that the to-be-peeled flexible display device and the carrier substrate are in a non-adhesive or partially non-adhesive contact state;

[0047] S3, placing the flexible display device to be peeled off and the carrier substrate in the above-mentioned contact state on a separation platform, and making the flexible display device to be peeled off be located between the carrier substrate and the separation platform;

[0048] S4, bending at least a portion of the separation platform in a direction away from the flexible display device to be peeled off, so that the flexible display device to be peeled off is synchronously bent and separated from the carrier substrate;

[0049] S5. Remove the carrier substrate.

[0050] The current laser lift-off process is used in the production of flexible OLED displays. There are two main solutions for process development based on the G6 generation production line: 1. First, laser lift-off the G6-sized flexible device as a whole, then divide it according to the panel size, and then perform IC bonding; 2. First, divide the G6-sized flexible device according to the panel size, then perform IC bonding on a single panel, and finally perform laser lift-off on a single panel. However, if Figure 1 As shown, the first laser lift-off process has a mismatch problem of flexible binding. Figure 2 As shown in the figure, in the process from laser scanning to flexible device separation, there is a high risk of falling off during transportation and carrier substrate slippage. Once the G6 size flexible device falls off, all panels are lost and the yield is zero. Although the second laser peeling process does not have the problem of flexible binding, it is less efficient. When a single panel is transported, there is also a risk of flexible devices falling off, which seriously affects the process yield.

[0051] The method for preparing a flexible display device of the present invention, after destroying the adhesive force between the flexible display device to be peeled off and the carrier substrate, places the flexible display device to be peeled off and the carrier substrate on a separation platform, and makes the flexible display device to be peeled off fit with the separation platform, and then bends at least a portion of the separation platform in a direction away from the flexible display device to be peeled off, so that the flexible display device to be peeled off can be partially separated from the carrier substrate, which is conducive to air penetration, breaking the vacuum state between the flexible display device to be peeled off and the carrier substrate, and there is no adhesive force between the flexible display device to be peeled off and the carrier substrate, and the flexible display device to be peeled off and the carrier substrate can be naturally separated, and the carrier substrate can be easily removed later. The present invention uses the bending of the separation platform to pre-separate the flexible display device to be peeled off partially from the carrier substrate, which reduces the difficulty of separating the flexible display device to be peeled off from the carrier substrate, improves the reliability and efficiency of the peeling process, and does not have the problem of flexible binding.

[0052] It can be understood that the flexible display device to be peeled off and the carrier substrate can be placed on the separation platform and then the adhesive force between the two can be destroyed, or the adhesive force between the two can be destroyed before being moved to the separation platform.

[0053] In a specific example, the step of destroying the adhesion between the flexible display device to be peeled off and the carrier substrate includes: placing the flexible display device to be peeled off on an air flotation platform, and making the flexible display device to be peeled off between the carrier substrate and the air flotation platform, and laser scanning the interface between the flexible display device to be peeled off and the carrier substrate to destroy the adhesion between the flexible display device to be peeled off and the carrier substrate.

[0054] In a specific example, after the step of destroying the adhesive force between the flexible display device to be peeled off and the carrier substrate, the following step is also included: suspending the flexible display device to be peeled off and the carrier substrate in the above-mentioned contact state on the air flotation platform, and moving to the separation platform in the suspended state. In this way, the suspension of the flexible display device to be peeled off is achieved by controlling the vacuum adsorption and air purge gas flow of the air flotation platform respectively, and the flexible display device to be peeled off and the carrier substrate are transferred and transported in the suspended state, which can improve the problem of the flexible display device to be peeled off falling off during the device transportation process. Optionally, in the suspended state, a robot is used to clamp the flexible display device to be peeled off and the carrier substrate for transfer and transportation, which can improve the problem of relative slippage between the flexible display device to be peeled off and the carrier substrate during transportation.

[0055] In a specific example, before at least a portion of the separation platform is bent away from the flexible display device to be peeled, the separation platform is vacuum-adsorbed to the flexible display device to be peeled. In this way, the flexible display device to be peeled and the carrier substrate can be separated more easily and remain stable during the separation process.

[0056] In a specific example, the separation platform includes a connected main body and a bending portion, the bending portion can be bent relative to the main body, and the step of bending at least a portion of the separation platform in a direction away from the flexible display device to be peeled off includes: bending the bending portion in a direction away from the flexible display device to be peeled off, so that the flexible display to be peeled off corresponding to the bending portion is bent synchronously with the bending portion.

[0057] In a specific example, the angle of the bending portion of the separation platform bending away from the flexible display device to be peeled is 2° to 3°. Optionally, the length of the inclined surface formed by the bending portion of the separation platform (from the top of the inclined surface to the bottom of the inclined surface) is 10mm to 20mm.

[0058] Optionally, the substrate of the flexible display device is polyimide (PI). In a specific example, the substrate of the flexible display device is colored polyimide, and the laser energy of the laser scanning is 120 mj / cm 2 ~160mj / cm 2 , preferably 145mj / cm 2 In a specific example, the substrate of the flexible display device is transparent polyimide, and the laser energy of the laser scanning is 180mj / cm 2 ~220mj / cm 2 .

[0059] In a specific example, removing the carrier substrate includes the following steps: sucking the carrier substrate, and then rotating and vertically rising it away from the flexible display device, that is, slowly lifting one end by 2° to 3° and vertically rising by 3mm to 5mm, waiting for 1s to 2s, then lifting it by 3° to 5° and vertically rising by 5mm to 8mm, waiting for 1 to 2s, and then vertically lifting it at a speed of 3mm / s to 5mm / s until the carrier substrate is completely separated from the flexible display device.

[0060] In a specific example, preparing a flexible display device on a carrier substrate includes the following steps: coating a flexible substrate solution on the carrier substrate, then performing high vacuum drying and high temperature heating to form a flexible substrate with uniform thickness, then making a water and oxygen barrier layer and a TFT array (such as Oxide-TFT, LTPS TFT) on the flexible substrate, then preparing a device functional layer, and performing thin film packaging to complete the preparation of the flexible display device, and then attaching film materials such as polarizers and color filters and flexible chip-on-film bonding (COF bonding). It can be understood that the method steps for preparing a flexible display device on a carrier substrate are not limited to this.

[0061] like Figure 7 As shown, the stripping device according to one embodiment of the present invention includes a separation platform 10 , and the separation platform 10 includes a main body portion 11 and a bending portion 12 connected to each other, and the bending portion 12 can be bent relative to the main body portion 11 .

[0062] It can be understood that the bending portion 12 can be located at the end of the separation platform 10 or at the center of the separation platform 10; the number of the bending portions 12 can be one or more; the shape of the bending portion 12 can be square, annular or irregular. Figure 7 In the illustrated embodiment, there are two bending portions 12 , which are respectively connected to two opposite ends of the main body 11 .

[0063] In a specific example, the separation platform 10 is provided with a plurality of blowing holes 13 and a plurality of vacuum adsorption holes 14. In this way, in the process of bending the bending portion 12 of the separation platform 10 in a direction away from the flexible display device to be peeled off, the separation platform 10 can vacuum adsorb the flexible display device to be peeled off, so that the flexible display device to be peeled off and the carrier substrate are more easily separated and remain stable during the separation process.

[0064] Optionally, the diameter of the blowing hole 13 and the vacuum adsorption hole 14 is 0.2mm to 0.6mm. In a specific example, a plurality of blowing holes 13 and vacuum adsorption holes 14 are provided on the separation platform 10, and the plurality of blowing holes 13 are distributed in at least one column on the separation platform 10, and the plurality of vacuum adsorption holes 14 are distributed in at least one column on the separation platform 10. For example, they can be distributed in at least one column in a direction parallel to the side of the separation platform 10. Furthermore, the distance between adjacent blowing holes 13 or adjacent vacuum adsorption holes 14 in each column is 3mm to 6mm, specifically, 3mm, 4mm, 5mm or 6mm.

[0065] In a specific example, a plurality of blowing holes 13 are distributed in multiple columns on the separation platform 10, and a plurality of vacuum adsorption holes 14 are distributed in multiple columns on the separation platform 10, and multiple columns of blowing holes 13 and multiple columns of vacuum adsorption holes 14 are staggered, that is, a column of blowing holes 13 and a column of vacuum adsorption holes 14 are arranged alternately in turn. The spacing between adjacent columns is 3mm to 6mm, that is, the spacing between a column of blowing holes 13 and an adjacent column of vacuum adsorption holes 14 is 3mm to 6mm. Specifically, it can be 3mm, 4mm, 5mm or 6mm. Optionally, multiple blowing holes 13 and vacuum adsorption holes 14 are distributed in multiple rows and columns on the separation platform 10. Among them, columns and rows should be understood in a broad sense, rather than simply understood as vertical. For example, based on the formed column, the formed row can be at a certain angle to the column, for example, 30°, 45°, 60°, 90°, etc.

[0066] Optionally, the diameters of the blowing holes 13 and the vacuum adsorption holes 14 of the main body 11 are larger than those of the bending portion 12, and the distances between adjacent blowing holes 13 or adjacent vacuum adsorption holes 14 in each column and the spacing between adjacent columns are larger than those of the bending portion 12, that is, the pore diameter of the bending portion 12 is smaller and the density is higher, which helps to keep the flexible display device to be peeled off stable during the separation process.

[0067] In a specific example, if Figure 4 As shown, the stripping device further includes an air flotation platform 20, which is disposed adjacent to the separation platform 10. Specifically, the air flotation platform 20 is provided with a plurality of purge holes 21 and air suction holes 22, and the edge area of ​​the air flotation platform 20 is only distributed with purge holes 21 to form an air blowing area 24, and the middle area of ​​the air flotation platform 20 is distributed with both the purge holes 21 and the air suction holes 22 to form an air flow balance area 23, so that when the flexible display device to be stripped is suspended, its edge is mainly subjected to an upward purge airflow, thereby preventing the edge of the flexible display device to be stripped from being separated from the carrier substrate during transportation. The edge area is disposed around the middle area.

[0068] Optionally, the diameters of the purge holes 21 and the air suction holes 22 are 0.2 mm to 0.6 mm. In a specific example, the multiple purge holes 21 distributed in the edge area are distributed in at least one row on the air flotation platform 20; among the multiple purge holes 21 and the multiple air suction holes 22 distributed simultaneously in the middle area, the multiple purge holes 21 are distributed in at least one row on the air flotation platform 20, and the multiple air suction holes 22 are distributed in at least one row on the air flotation platform 20. Furthermore, the distance between adjacent purge holes 21 or adjacent air suction holes 22 in each row is 3 mm to 6 mm, specifically, 3 mm, 4 mm, 5 mm or 6 mm.

[0069] In a specific example, a plurality of purge holes 21 are distributed in multiple columns on the air flotation platform 20, and a plurality of suction holes 22 are distributed in multiple columns on the air flotation platform 20. The multiple columns of purge holes 21 and the multiple columns of suction holes 22 in the air flow balance area 23 are staggered. The spacing between adjacent columns is 3mm to 6mm, that is, the spacing between a column of purge holes 21 and an adjacent column of suction holes 22 is 3mm to 6mm. Specifically, it can be 3mm, 4mm, 5mm or 6mm. Optionally, a plurality of purge holes 21 and suction holes 22 are distributed in multiple rows and columns on the air flotation platform 20. Among them, columns and rows should be understood in a broad sense, rather than simply understood as vertical. For example, based on the formed column, the formed row can be at a certain angle to the column, for example, 30°, 45°, 60°, 90°, etc. More specifically, a purge hole 21 is provided at the center of four adjacent suction holes 22.

[0070] In a specific example, if Figure 6 As shown, the peeling device also includes a laser peeling mechanism (not shown) and a manipulator 30, the laser peeling mechanism is used to destroy the adhesive force between the flexible display device to be peeled and the carrier substrate, and the manipulator 30 is used to drive the flexible display device to be peeled and / or the carrier substrate to move between the air flotation platform 20 and the separation platform 10. Optionally, the laser peeling mechanism includes one or more of a 308nm excimer laser and a 405nm semiconductor laser. Optionally, the manipulator 30 has a variety of structures such as a clamping structure and a suction cup structure, which is easy to use.

[0071] Example 1

[0072] This embodiment takes a flexible AMOLED display device as an example, and adopts a process solution of first performing IC bonding and then laser peeling.

[0073] Step 1: Flexible AMOLED device preparation

[0074] like Figure 3As shown, the PI solution is coated on the entire carrier substrate 210 by slit coating process, and then dried in high vacuum and heated at high temperature to form a flexible substrate 201 with uniform thickness. A water and oxygen barrier layer 202 and a TFT array 203 (such as Oxide-TFT, LTPS TFT) are made on the flexible substrate 201. Flexible substrate materials with different temperature resistance can be selected according to different TFT process temperatures.

[0075] Next, the device functional layer 204 is prepared by a printing process or an evaporation process, and a thin film package 205 is formed to complete the preparation of the AMOLED display device. Then, the polarizer 206, color filter and other film materials are attached and the flexible flip chip film is bound (including the binding terminal 207 and the flip chip film 208).

[0076] Step 2: Flexible AMOLED device handling

[0077] The flexible AMOLED device is placed on the receiving platform with the front side facing upwards. The ejector pin of the receiving platform rises. The five-axis robot lifts up and vacuum-sucks the carrier substrate 210 from one side, and then flips the θ axis 180° in the transport channel. The flexible display device is placed on the laser lift-off device with one side facing downwards. Figure 4 The air flotation platform 20 is shown. The air flotation platform 20 is turned on, and the appropriate vacuum gas flow and air purge flow are set according to the size and weight of the flexible device. The five-axis manipulator vacuum is turned off, and the flexible display device is suspended on the air flotation platform 20. The vacuum gas flow of the air flotation platform gradually increases, and the gas flow of the air purge gradually decreases. The flexible display device slowly descends to the air flotation platform 20 due to the influence of gravity and vacuum airflow, and the air flotation platform 20 firmly vacuums the flexible display device.

[0078] Step 3: Laser Lifting

[0079] The LLO (laser lift-off technology) device CCD is aligned with the flexible display device and the required laser focal plane and laser energy density are set. Figure 5 As shown, the laser cutting head (cutter) is set to the required width according to the actual size of the long side of the flexible display device, and the high-energy laser line beam (line beam) penetrates the carrier substrate 210 and focuses on the interface between the flexible substrate 201 and the carrier substrate 210, and scans the entire surface of the flexible display device. The PI material absorbs the laser energy, the bond between the PI substrate and the glass is destroyed, and the PI material itself is decomposed and carbonized, accompanied by the release of a small amount of gas, so that the flexible substrate 201 and the carrier substrate 210 are completely separated. After the entire surface of the flexible display device is scanned, the flexible substrate 201 and the carrier substrate 210 have no adhesion.

[0080] Different lasers are selected according to the absorption degree of PI materials to lasers of different wavelengths, such as 308nm excimer laser and 405nm semiconductor laser. In addition, the laser energy required for colored PI stripping is about 120-160mj / cm 2 The laser energy required for colorless and transparent PI peeling is about 180-220 mj / cm 2 .

[0081] Step 4: Air-floating transport of flexible display devices

[0082] like Figure 6 As shown in the figure, after the laser LLO process is completed, the vacuum gas flow of the air flotation platform 20 gradually decreases, and the air purge gas flow gradually increases, and the flexible display device 200 is suspended on the air flotation platform 20 using the vacuum and purge airflows. The edge of the flexible display device 200 is mainly affected by the vertical upward purge airflow, which prevents the edge of the flexible display device 200 from being separated from the carrier substrate 210. The vertical upward purge airflow of other parts of the flexible display device 200 is slightly larger than the vacuum airflow, which offsets the overall gravity of the flexible display device 200, ensuring that the flexible display device 200 is suspended. At the same time, through the hole distribution of the vacuum airflow and the purge airflow, as well as the flow rate adjustment, it is ensured that the flexible display device 200 maintains a certain level during the suspension process.

[0083] The robot 30 gently clamps the flexible display device 200 and the carrier substrate 210, and slowly moves forward to transfer the flexible display device 200 and the carrier substrate 210 to the separation platform 10 along the air floating platform 20. Figure 7 As shown, the separation platform 10 is composed of a main body 11 and a bending portion 12. The bending portion 12 can be bent downward in a fan shape to form a wedge-shaped area at a certain angle. The effect of gas suspension avoids the problem of the flexible display device 200 and the carrier substrate 210 falling off during transportation, and the clamping of the robot 30 improves the problem of relative slippage between the flexible display device 200 and the carrier substrate 210 during transportation.

[0084] Step 5: Separation of the flexible display device from the carrier substrate

[0085] like Figure 7 As shown, the manipulator 30 stops clamping, the purge airflow of the separation platform 10 gradually decreases, the vacuum airflow gradually increases, the flexible display device slowly falls to the separation platform 10, and vacuum absorbs the flexible display device 200. The bending portions 12 at both ends of the separation platform 10 are fan-shaped and bent downward to form a wedge-shaped area of ​​2° to 3°, with a slope length of 10mm to 20mm. The flexible display device 200 is vacuum absorbed, and the flexible display device 200 in this area is naturally separated from the carrier substrate 210 while the bending portions 12 at both ends of the separation platform 10 are bent.

[0086] Then as Figure 8 As shown, the separation platform 10 turns off the vacuum airflow, waits for 5s to 10s, and the air penetrates into the interface between the flexible display device 200 and the carrier substrate 210 along the wedge surface. The carrier substrate 210 is sucked by the manipulator 30, and then the manipulator 30θ axis rotates and rises vertically, slowly lifting the short side of the carrier substrate 210 by 2° to 3°, vertically rising by 3mm to 5mm, waiting for 1 to 2s, and then lifting it by 3° to 5°, vertically rising by 5mm to 8mm, waiting for 1s to 2s, and then the manipulator 30 vertically rises at a speed of 3mm / s until the carrier substrate 210 is completely separated from the flexible display device 200, and then the back support film is attached to complete the entire process of the flexible display device 200. The bending parts 12 at both ends of the separation platform 10 are bent to form a wedge-shaped area, which partially separates the flexible display device 200 from the carrier substrate 210, which is conducive to air penetration. The flexible display device 200 and the carrier substrate 210 after laser scanning have no adhesive force and can be naturally separated. The robot 30 can easily remove the carrier substrate 210.

[0087] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0088] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A method for preparing a flexible display device, characterized in that: The following steps are involved: Preparing a flexible display device to be peeled off on a carrier substrate; Destroying the adhesive force between the to-be-peeled flexible display device and the carrier substrate, so that the to-be-peeled flexible display device and the carrier substrate are in a non-adhesive or partially non-adhesive contact state; Placing the flexible display device to be peeled off and the carrier substrate in the contact state on a separation platform, and positioning the flexible display device to be peeled off between the carrier substrate and the separation platform; bending at least a portion of the separation platform in a direction away from the to-be-peeled flexible display device, so that the to-be-peeled flexible display device is synchronously bent and separated from the carrier substrate; removing the carrier substrate; The separation platform comprises a main body and a bending portion connected to each other, the bending portion can be bent relative to the main body, and the step of bending at least a portion of the separation platform in a direction away from the flexible display device to be peeled off comprises: The bending portion is bent in a direction away from the to-be-peeled flexible display device, so that the to-be-peeled flexible display corresponding to the bending portion is bent synchronously with the bending portion.

2. The preparation method according to claim 1, characterized in that: The step of destroying the adhesive force between the flexible display device to be peeled off and the carrier substrate comprises: The flexible display device to be peeled off is placed on an air flotation platform, and the flexible display device to be peeled off is located between the carrier substrate and the air flotation platform, and a laser is scanned on the interface between the flexible display device to be peeled off and the carrier substrate to destroy the adhesion between the flexible display device to be peeled off and the carrier substrate.

3. The preparation method according to claim 2, characterized in that: After the step of destroying the adhesive force between the flexible display device to be peeled off and the carrier substrate, the following steps are also included: The flexible display device to be peeled off and the carrier substrate in the contact state are suspended on the air floating platform, and moved to the separation platform in the suspended state.

4. The preparation method according to claim 1, characterized in that: Before bending at least a portion of the separation platform in a direction away from the flexible display device to be peeled off, the separation platform is made to vacuum absorb the flexible display device to be peeled off.

5. The preparation method according to claim 1, characterized in that: The bending angle of the bending portion of the separation platform in the direction away from the flexible display device to be peeled off is 2° to 3°; and / or The length of the inclined surface formed by the bending portion of the separation platform after bending is 10 mm to 20 mm.

6. A stripping device based on the preparation method according to any one of claims 1 to 5, characterized in that: include: The separation platform comprises a main body portion and a bending portion which are connected to each other, and the bending portion can be bent relative to the main body portion.

7. The stripping device according to claim 6, characterized in that Also includes: An air flotation platform is disposed adjacent to the separation platform.

8. The stripping device according to claim 7, characterized in that Also includes: A laser peeling mechanism, which is used to perform laser scanning to destroy the adhesive force between the flexible display device to be peeled off and the carrier substrate; A robot arm is used to drive the flexible display device to be peeled off and / or the carrier substrate to move between the air floating platform and the separation platform.

9. The stripping device according to any one of claims 6 to 8, characterized in that: The separation platform is provided with a plurality of air blowing holes and a plurality of vacuum adsorption holes. The plurality of air blowing holes are distributed in at least one row on the separation platform, and the plurality of vacuum adsorption holes are distributed in at least one row on the separation platform.

10. The stripping device according to claim 7, characterized in that A plurality of purge holes are distributed in the edge area of ​​the air flotation platform, and a plurality of purge holes and a plurality of air suction holes are distributed in the middle area of ​​the air flotation platform; wherein the plurality of purge holes distributed in the edge region are distributed in at least one row; Among the multiple purge holes and the multiple air suction holes distributed simultaneously in the middle area, the multiple purge holes are distributed in at least one row, and the multiple air suction holes are distributed in at least one row.

Images