Inspection fixtures and inspection devices

Abstract

The present invention provides an inspection fixture and inspection device that easily simplify the structure of multiple contact elements flexing in the same direction. The inspection fixture includes: a plurality of rod-shaped contact elements (Pr); a first support (311) supporting one end of the plurality of contact elements (Pr); and a second support (312) supporting the other end of the plurality of rod-shaped contact elements (Pr). The first support (311) includes opposing support plates (B2), which are disposed opposite to the second support (312) and are formed with a plurality of through holes (E2H) for the plurality of contact elements (Pr) to pass through. The cross-section of each through hole (E2H) has an elliptical shape in which the major axis extends in a predetermined specific direction along the surface direction of the opposing support plate (B2).

Description

Technical Field

[0001] The present invention relates to an inspection fixture including a contact element and an inspection apparatus using the inspection fixture. Background Technology

[0002] Previously, a probe card was known, comprising: a support member having an upper support hole and a lower support hole, the upper and lower support holes respectively positioning and supporting the upper and lower parts of a wire probe; and a flexible guide film that flexes in one direction to support the middle part of the wire probe (see, for example, Patent Document 1). The lower support hole of the support member is formed in a first base plate and a second base plate that are stacked together.

[0003] [Existing technical documents]

[0004] [Patent Literature]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2012-103125 Summary of the Invention

[0006] [The problem the invention aims to solve]

[0007] In Patent Document 1, in addition to positioning and supporting the upper and lower support members of the linear probe respectively, a guide membrane that flexes in one direction to support the middle part of the linear probe is also required.

[0008] The purpose of this invention is to provide an inspection fixture and inspection device that can easily simplify the structure of multiple contact elements flexing in the same direction.

[0009] [Technical means to solve the problem]

[0010] An example of the inspection fixture of the present invention includes: a plurality of rod-shaped contacts; a first support portion supporting one end of the plurality of contacts; and a second support portion supporting the other end of the plurality of contacts. The first support portion includes opposing support plates disposed opposite to each other relative to the second support portion and having a plurality of through holes through which the plurality of contacts are inserted. The cross-section of each through hole has an elliptical shape in which the major axis extends in a predetermined specific direction along the surface direction of the opposing support plates.

[0011] Furthermore, an example of the inspection fixture of the present invention includes: a plurality of rod-shaped contacts; a first support portion supporting one end of the plurality of contacts; and a second support portion supporting the other end of the plurality of contacts. The first support portion includes opposing support plates, which are disposed opposite to the second support portion and are isolated from each other. The opposing support plates are formed with a plurality of through holes through which the plurality of contacts are inserted. The cross-section of each through hole has an elongated shape in a predetermined specific direction along the surface direction of the opposing support plates. The inner wall of one end of each through hole in the predetermined specific direction contacts the contacts inserted into the through holes at two points or two lines.

[0012] An example of the inspection apparatus of the present invention includes: the inspection fixture; and an inspection processing unit that performs inspection of the object based on an electrical signal obtained by bringing the contact member into contact with an inspection point provided on the object to be inspected.

[0013] [The effects of the invention]

[0014] This type of inspection fixture and inspection device can easily simplify the structure that allows multiple contact parts to flex in the same direction. Attached Figure Description

[0015] Figure 1 This is a conceptual diagram illustrating, in a general sense, an example of the structure of an inspection device 1 using an inspection fixture 3 according to an embodiment of the present invention.

[0016] Figure 2 This is observed from the front end of the contact element Pr. Figure 1 The plan view of the inspection fixture 3 is shown.

[0017] Figure 3 yes Figure 2 The end face view of line III-III of the inspection fixture 3 is shown.

[0018] Figure 4 yes Figure 2 The end face view of the IV-IV line of the inspection fixture 3 is shown.

[0019] Figure 5 This is a plan view of the opposing support plate B2 viewed from the Z direction after removing the second support part 312 and the spacer S from the inspection fixture 3.

[0020] Figure 6 It means Figure 5 A plan view of a modified example of the opposing support plate B2 shown.

[0021] Figure 7 This is an explanatory diagram showing an example of the state in which the inspection fixture 3 is abutted against the substrate 100.

[0022] Figure 8This is an enlarged view of the through hole B2H of the opposing support plates B2 and B2a and the contact element Pr.

[0023] Figure 9 It means Figure 8 Explanatory diagram of a modified example of the through hole B2H shown.

[0024] Figure 10 This is an explanatory diagram showing an example of a polygonal through-hole B2H.

[0025] Figure 11 This is a conceptual illustration of the behavior of the plate PL when the contact Pr is pressed in.

[0026] Figure 12 This is an enlarged illustration of the through hole PLH formed on the plate PL and the contact element Pr.

[0027] Figure 13 This is a conceptual diagram illustrating the behavior of the plate PL when the pressed load of the contact Pr is released.

[0028] Figure 14 This is an enlarged illustration of the through hole PLH formed on the plate PL and the contact element Pr.

[0029] Figure 15 This is an enlarged end view showing the area near the through hole B2H of the opposing support plate B2.

[0030] [Explanation of Symbols]

[0031] 1: Inspection device

[0032] 3, 3U, 3D: Inspection fixtures

[0033] 4, 4U, 4D: Inspection Department

[0034] 6: Substrate fixing device

[0035] 7: Isolation and retention components

[0036] 8: Inspection and Processing Department

[0037] 31: Supporting components

[0038] 33: Slippery layer

[0039] 34: Bottom layer

[0040] 100: Substrate (object to be inspected)

[0041] 311: First Support Section

[0042] 312: Second Support Section

[0043] 321: Base plate

[0044] A, A2, A3, C1, D, E1, E2: Support plates

[0045] H, AH, A2H, A3H, B2H, C1H, DH, E1H, E2H: Through holes

[0046] B: Isolation Block

[0047] B2, B2a: Opposite support plates

[0048] C1, D, E1, E2: Support plates

[0049] Dxe, Dxo, Dye, Dyo: Distance

[0050] H1, H2: Chamfered areas

[0051] H3: Through-hole body

[0052] H4: Large diameter part

[0053] Le: Even number sequence

[0054] Lo: Odd number sequence

[0055] Lxo, Lyo: Straight lines

[0056] P: Contact position

[0057] P1: First Area

[0058] P2: Second Area

[0059] PL: board

[0060] PLH: Through-hole

[0061] Pr: Contact element

[0062] r1: radius

[0063] r2: radius of curvature

[0064] S: Spacer

[0065] T: End

[0066] X, Y, Z: Direction Detailed Implementation

[0067] Hereinafter, embodiments of the present invention will be described based on the accompanying drawings. Furthermore, structures labeled with the same symbols in each figure represent the same structure, and their descriptions are omitted. To indicate the orientation of each figure, the XYZ orthogonal coordinate axes are appropriately shown. Figure 1 The inspection device 1 shown is an apparatus for inspecting a substrate 100, which is an example of an object to be inspected.

[0068] The substrate 100 may be, for example, a printed wiring substrate, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display or a plasma display, a semiconductor substrate, and a packaging substrate or film carrier for semiconductor packaging, etc. In addition, the object to be inspected is not limited to the substrate, for example, it may be an electronic component such as a semiconductor element (integrated circuit (IC)). In addition, any object that is subject to electrical inspection can be inspected.

[0069] Figure 1 The inspection apparatus 1 shown includes an inspection unit 4U, an inspection unit 4D, a substrate fixing device 6, and an inspection processing unit 8. The substrate fixing device 6 is configured to fix the substrate 100, which is to be inspected, in a predetermined position. The inspection units 4U and 4D include an inspection fixture 3U and an inspection fixture 3D. The inspection units 4U and 4D, through a drive mechanism (not shown), can move the inspection fixture 3U and the inspection fixture 3D along three mutually orthogonal axes X, Y, and Z, and can rotate the inspection fixture 3U and the inspection fixture 3D about the Z-axis.

[0070] Inspection unit 4U is located above the substrate 100, which is fixed to the substrate fixing device 6. Inspection unit 4D is located below the substrate 100, which is fixed to the substrate fixing device 6. Inspection units 4U and 4D are configured to be able to attach and detach inspection fixtures 3U and 3D for inspecting the circuit patterns formed on the substrate 100. Hereinafter, inspection units 4U and 4D will be collectively referred to as inspection unit 4.

[0071] Inspection fixtures 3U and 3D each include: a plurality of contact elements Pr; a support member 31 that holds the front ends of the plurality of contact elements Pr toward the substrate 100; and a base plate 321. The base plate 321 has electrodes that are in contact with and conductively connected to the rear ends of each contact element Pr. Inspection units 4U and 4D include connection circuits (not shown), which electrically connect the rear ends of each contact element Pr to the inspection processing unit 8 via the electrodes of the base plate 321, or switch the connection.

[0072] The contact Pr is a so-called wire probe comprising a single component having a generally rod-shaped form. Multiple through holes supporting the contact Pr are formed in the support member 31. Each through hole is arranged to correspond to the position of an inspection point set on the wiring pattern of the substrate 100 to be inspected. This allows the front end of the contact Pr to contact an inspection point on the substrate 100. Inspection points may include, for example, wiring patterns, solder pads, solder bumps, connection terminals, through holes, and vias.

[0073] Inspection fixtures 3U and 3D are identical except that they are oriented vertically in opposite directions to the mounting directions of inspection units 4U and 4D. Hereinafter, inspection fixtures 3U and 3D will be collectively referred to as inspection fixture 3. Inspection fixture 3 can be replaced according to the substrate 100 to be inspected.

[0074] The inspection processing unit 8 includes, for example, a power supply circuit, a voltmeter, an ammeter, and a microcomputer. The inspection processing unit 8 controls a drive mechanism (not shown) to move and position the inspection units 4U and 4D, causing the front ends of each contact Pr to contact each inspection point on the substrate 100. This electrically connects each inspection point to the inspection processing unit 8. In this state, the inspection processing unit 8 supplies inspection current or voltage to each inspection point on the substrate 100 via each contact Pr of the inspection fixture 3, and performs inspections of the substrate 100, such as checking for open circuits or short circuits, based on the voltage or current signals obtained from each contact Pr. Alternatively, the inspection processing unit 8 may also measure the impedance of the object under inspection based on the voltage or current signals obtained from each contact Pr by supplying alternating current or voltage to each inspection point.

[0075] Reference Figure 2 , Figure 3 , Figure 4 The support member 31 includes: a first support portion 311 supporting the rear end of the contact member Pr; a second support portion 312 supporting the front end of the contact member Pr; an isolation retaining member 7 that isolates the first support portion 311 and the second support portion 312 from each other; and a spacer S.

[0076] The first support portion 311 is formed by stacking opposing support plates B2, C1, D, E1, and E2 along the Z direction. The opposing support plates B2, C1, D, E1, and E2 are stacked sequentially from the side closest to the second support portion 312. That is, the opposing support plate B2 is positioned facing the second support portion 312, and the plate closest to the second support portion 312 among the plurality of plates constituting the first support portion 311 is designated as the opposing support plate B2.

[0077] Alternatively, the first support portion 311 may also include an opposing support plate B2. Furthermore, the first support portion 311 may also include four or fewer plates or six or more plates containing opposing support plates B2.

[0078] In the opposing support plate B2, through holes B2H are formed for supporting each contact element Pr. In support plates C1, D, E1, and E2, through holes C1H, DH, E1H, and E2H are formed for supporting each contact element Pr.

[0079] The rear end of the contact Pr is inserted into through holes B2H, C1H, DH, E1H, and E2H. Thus, the rear end of the contact Pr is supported by the first support portion 311.

[0080] Reference Figure 3 , Figure 4 On the outer periphery of the opposing support plate B2, there are stacked roughly rectangular frame-shaped spacers S.

[0081] The second support portion 312 is constructed by stacking support plates A, A2, and A3. Support plates A, A2, and A3 are stacked sequentially from the side furthest from the first support portion 311. Through holes AH, A2H, and A3H for supporting each contact element Pr are formed in support plates A, A2, and A3. Alternatively, the second support portion 312 may also include two or fewer, or four or more, support plates.

[0082] The front end of the contact member Pr is inserted into the through holes AH, A2H, and A3H. Thus, the front end of the contact member Pr is supported by the second support portion 312.

[0083] A generally rectangular cylindrical isolation retaining member 7 extends from the outer periphery of the support plate A3. The support plate A3 and the isolation retaining member 7 are integrally formed. Thus, the support plate A3 and the isolation retaining member 7 constitute the isolation block B. Alternatively, the support plate A3 and the isolation retaining member 7 can also be independent entities.

[0084] The end face of the isolation retaining member 7 is mounted on the side of the second support portion 312 of the spacer S. Thus, the opposing support plates B2 and A3, i.e., the first support portion 311 and the second support portion 312, are separated by a distance equal to the sum of the length of the isolation retaining member 7 in the Z direction and the thickness of the spacer S, and are thus held in a parallel manner. Support plates A, A2, A3, B2, C1, D, E1, and E2 are held in parallel.

[0085] In addition, the spacer S is a component used to fine-tune the spacing between the first support 311 and the second support 312, and the inspection fixture 3 may not include the spacer S.

[0086] Furthermore, the isolation retaining member 7 is not limited to a rectangular cylindrical member. The isolation retaining member can be any member that isolates the first support portion 311 and the second support portion 312 from each other. For example, a rod-shaped support column can also be used as the isolation retaining member.

[0087] Through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H are respectively arranged perpendicularly to each of the support plates A, A2, A3, B2, C1, D, E1, and E2, so that the same contact element Pr can be inserted through them. Regarding each of the corresponding through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H, the position of each through hole is offset in the X direction relative to the vertical (Z direction), so that the contact element Pr is tilted relative to the vertical (Z direction) of each plate.

[0088] Therefore, each contact Pr is supported at an angle in the same direction (X) relative to the Z direction. The front end of each contact Pr protrudes from the support plate A without contacting the substrate 100. Hereinafter, through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H will be collectively referred to as through holes H. Furthermore, through holes H may also be inclined relative to the perpendicular direction of each plate.

[0089] Reference Figure 5 The cross-sectional shape of the through hole B2H of the opposing support plate B2 along the surface direction of the opposing support plate B2 is elliptical.

[0090] Multiple through holes B2H are distributed in a first region P1 and a second region P2, which are roughly rectangular in shape and extend along the Y direction. The Y direction corresponds to one example of the first direction, and the X direction corresponds to one example of the second direction.

[0091] Each through hole B2H has an elliptical shape with its major axis extending along the X direction. The X direction corresponds to an example of a specific direction along the surface direction of the opposing support plate B2. The direction of the major axis of each through hole B2H is consistent with the X direction. That is, the specific direction is the X direction (second direction).

[0092] Through holes B2H are arranged at equal intervals in the first region P1 and the second region P2. The distance between the first region P1 and the second region P2 is larger than the spacing between the through holes B2H in the same region.

[0093] Multiple through holes B2H are arranged in odd-numbered columns Lo and even-numbered columns Le that extend parallel to each other along the Y direction (first direction). Each through hole B2H in the even-numbered column Le is located between straight lines Lxo in the X direction (second direction) that pass through the center of each through hole B2H in the odd-numbered column Lo.

[0094] In each odd-numbered column Lo, the distance Dyo between the centers of adjacent through holes B2H along the Y direction (first direction) is shorter than the distance Dxo between the centers of adjacent through holes B2H in the odd-numbered column Lo along the X direction (second direction). In each even-numbered column Le, the distance Dye between the centers of adjacent through holes B2H along the Y direction (first direction) is shorter than the distance Dxe between the centers of adjacent through holes B2H in the even-numbered column Le along the X direction (second direction).

[0095] Figure 6 In the opposing support plates B2a shown, the major axis of each through hole B2H is aligned with the Y direction. That is, Figure 6 In the example shown, the specific direction is the Y direction (the second direction), and the X direction is equivalent to the first direction.

[0096] Multiple through holes B2H are arranged in odd-numbered columns Lo and even-numbered columns Le that extend parallel to each other along the X direction (first direction). Each through hole B2H in the even-numbered column Le is located between each straight line Lyo in the Y direction (second direction) that passes through the center of each through hole B2H in the odd-numbered column Lo.

[0097] In each odd-numbered column Lo, the distance Dxo between the centers of adjacent through holes B2H along the X direction (first direction) is equal to the distance Dyo between the centers of adjacent through holes B2H in the odd-numbered column Lo along the Y direction (second direction). Similarly, in each even-numbered column Le, the distance Dxe between the centers of adjacent through holes B2H along the X direction (first direction) is equal to the distance Dye between the centers of adjacent through holes B2H in the even-numbered column Le along the Y direction (second direction).

[0098] Figure 6 In the example shown, the contact Pr is tilted in the Y direction. The position of the through hole H of each plate is offset in the Y direction relative to the Z axis, so that the contact Pr is tilted in the Y direction relative to the Z direction.

[0099] Figure 5 The opposing support plates B2 shown satisfy the following conditions: the direction of the major axis of each through hole B2H is consistent with the X direction; the distance between the centers Dyo of the through holes B2H adjacent along the Y direction (first direction) in each odd-numbered column Lo is shorter than the distance between the centers Dxo of the through holes B2H adjacent along the X direction (second direction); and the distance between the centers Dye of the through holes B2H adjacent along the Y direction (first direction) in each even-numbered column Le is shorter than the distance between the centers Dxe of the through holes B2H adjacent along the X direction (second direction).

[0100] As a result, compared to those that do not meet this condition Figure 6 The opposing support plates B2a satisfy this condition. Figure 5 The opposing support plate B2 shown increases the adjacent spacing of the contact members Pr in the direction of their tilt and deflection (X direction in opposing support plate B2, Y direction in opposing support plate B2a). By increasing the adjacent spacing of the contact members Pr in the direction of their deflection, opposing support plate B2 reduces the likelihood of the contact members Pr coming into contact with each other compared to opposing support plate B2a.

[0101] Figure 5 In the opposing support plate B2 shown, the through holes B2H are arranged in a Z-shape in five rows along the X direction (a specific direction) and in a Z-shape in twenty rows along the Y direction (a third direction) within the first region P1. Similarly, the through holes B2H are arranged in a Z-shape in five rows along the X direction (a specific direction) and in a Z-shape in twenty rows along the Y direction (a third direction) within the second region P2.

[0102] That is, in the first region P1 and the second region P2, where the through holes B2H are arranged at equal intervals, the number of columns of through holes B2H corresponding to the X direction (a specific direction) is less than the number of columns of through holes B2H corresponding to the Y direction (a third direction). Furthermore, the through holes B2H are not limited to the example of a zigzag arrangement; they can also be arranged in a straight line, i.e., a grid pattern, relative to the X and Y directions. Moreover, an example is shown where two regions with equally spaced through holes B2H are shown, but there can also be one, or even three or more such regions.

[0103] As described above, the position of each through hole H is deviated from the direction of the vertical line (Z direction) towards the X direction (specific direction), so the deviation direction of the through hole H is along the X direction (specific direction) with the fewer columns of through holes H.

[0104] When the inspection fixture 3 is brought into contact with the substrate 100 for inspection purposes, such as Figure 7 As shown, the front end of each contact member Pr is pressed into the second support portion 312. At this time, each contact member Pr is supported at an angle in the same direction in the X direction, and thus flexes in the X direction to absorb the amount of pressing in the contact member Pr.

[0105] Here, the deflection direction of the contact Pr is along the long axis of the through hole B2H, i.e., the X direction (a specific direction). Therefore, the tilting direction of the contact Pr and the deflection direction of the contact Pr are also the X direction with fewer rows of through holes H.

[0106] When contact element Pr flexes, the likelihood of adjacent contact elements Pr coming into contact with each other along the flexing direction increases. However, in inspection fixture 3, each contact element Pr flexes along the X direction (a specific direction) with fewer columns of through hole B2H, so the likelihood of contact elements Pr coming into contact with each other is reduced compared to the case where they flex along the Y direction (a third direction) with more columns of through hole B2H.

[0107] Alternatively, it can also be used as follows: Figure 6 As shown in the case of the opposing support plate B2a, the long axis direction of the through hole B2H, i.e., the specific direction, is not necessarily along the direction with the fewer rows of through holes B2H. Figure 6 (The middle is the X direction).

[0108] Reference Figure 8 Each contact element Pr has a cylindrical shape with a radius of r1. The radius of curvature r2 of the two ends T of the cross-section of the through hole B2H along the major axis (specific direction) is smaller than the radius r1 of each contact element Pr. As a result, the inner wall of one end of the through hole B2H along the major axis (specific direction) contacts the contact element Pr at two contact positions P.

[0109] At this point, if the contact element Pr is inclined within the through hole B2H, then the contact element Pr contacts the inner wall of the through hole B2H at two points. If the contact element Pr extends within the through hole B2H along the Z direction, i.e., the axial direction of the through hole B2H, then the contact element Pr contacts the inner wall of the through hole B2H along two lines.

[0110] Thus, since the radius of curvature r2 of the two ends T of the through hole B2H is smaller than the radius r1 of each contact element Pr, the contact element Pr can contact the inner wall of the through hole B2H at two points or along two lines. By having the contact element Pr contact the inner wall of the through hole B2H at two points or along two lines, the movement of the contact element Pr towards the minor axis direction of the through hole B2H (the direction orthogonal to a specific direction) can be reduced.

[0111] Furthermore, when the radius of curvature r2 of the two ends T of the through hole B2H is smaller than the radius r1 of each contact element Pr, and the even-numbered columns Le of the through holes B2H are arranged between the straight lines Lxo passing through the centers of the odd-numbered columns Lo of the through holes B2H—a so-called serrated configuration—the following effect can be obtained. That is, in this case, compared to the case where the through holes have an oblong cross-sectional shape including a pair of parallel lines and a pair of semicircles are arranged in a serrated configuration, even when the center positions of the holes are the same, the spacing between the obliquely adjacent through holes B2H becomes wider. As a result, the wall thickness between the through holes B2H can be maintained, while the adjacent spacing of the through holes B2H can be easily narrowed.

[0112] Furthermore, the cross-sectional shape of the through hole B2H is not necessarily limited to an ellipse. The contact element Pr is supported at an angle relative to the perpendiculars of the opposing support plates B2 and B2a. Therefore, the contact element Pr only contacts one of the two ends T. Thus, for example, as... Figure 9As shown, it can also be in the shape described below, that is, the radius of curvature r2 of one end T on the side contacted by the contact member Pr is smaller than the radius r1 of each contact member Pr.

[0113] Moreover, for example, Figure 10 As shown, the cross-sectional shape of the through hole B2H can also be polygonal. Regarding... Figure 10 The polygonal through-hole B2H shown can also be used with Figure 9 Similarly, in the through hole B2H shown, only one end T of the side contacted by the contact member Pr is polygonal.

[0114] That is, the cross-section of the through hole B2H only needs to have the shape described below, namely, it has a strip shape in a specific direction along the surface direction of the opposing support plates B2 and B2a, and the inner wall of one end of the through hole B2H in the specific direction contacts the contact member Pr inserted into each through hole B2H at two points or two lines. If each through hole B2H has this shape, the contact member Pr contacts the inner wall of the through hole B2H at two points or two lines, which reduces the movement of the contact member Pr toward the minor axis direction of the through hole B2H.

[0115] Furthermore, because the cross-sectional shape of each through-hole B2H has an elliptical or elongated shape in a specific direction, the deflection direction of each contact Pr can easily become consistent. As a result, the deviation in the amount of deflection of each contact Pr in the direction orthogonal to the specific direction is reduced, thus making it easier to narrow the spacing of the through-holes H relative to the direction orthogonal to the specific direction. Furthermore, it eliminates the need for a guide film that supports the middle portion of multiple contacts in a unidirectional deflection, as described in Patent Document 1, thus simplifying the structure of the inspection fixture.

[0116] Reference Figure 3 , Figure 4 Support plates A, A2, A3, isolation retaining member 7, spacer S, opposing support plates B2 (B2a), C1, D, E1, and E2 contain insulating materials such as resin. The bending strength of opposing support plate B2 (B2a) is greater than that of support plates C1, D, E1, and E2. Opposing support plate B2 (B2a) may, for example, contain materials such as ceramics or fine ceramics.

[0117] The bending strength of opposing support plates B2 and B2a can be evaluated, for example, according to Japanese Industrial Standards (JIS) R 1601 "Test method for room temperature bending strength of fine ceramics" or International Organization for Standardization (ISO) 14704. The bending strength of support plates C1, D, E1, and E2 can be evaluated, for example, according to JIS K 7171 "Plastics - Method for determination of bending properties" or ISO 178.

[0118] The method for evaluating the bending strength of each plate is as follows. When the plate is placed into the inspection fixture, two points where the predetermined contact element passes through the through hole of the support plate, and two points where the opposing support plate and the stack of support plates face each other, are designated as external fulcrums. The approximate center of these two external fulcrums is designated as the load point. If the plate shape has an opening larger than the pressure head of the load tester located at the approximate center of the two external fulcrums, making it impossible to apply the load of the load tester, then the point where the load is applied to the plate near the approximate center of the two external fulcrums can be designated as the load point. The stroke of the load tester is measured when a specified load is applied to the load point to a degree that will not damage the plate. It can be assessed that the smaller the stroke, the stronger the bending strength. The specified load can be any value and is not constrained by the measurement conditions in the specifications. Regardless of the specifications regarding the shape, size, surface roughness, etc., of the test piece, the bending strength can be evaluated directly based on its shape and size without processing the plate. Regardless of the specified number of test pieces in the specifications, only one plate is required for evaluating bending strength.

[0119] The bending strength of opposing support plates B2 and B2a is greater than that of support plates C1, D, E1, and E2. As a result, the deflection of support plates C1, D, E1, and E2 is reduced by the opposing support plates B2 and B2a, thereby alleviating the stress applied to the support portion of the support contact member.

[0120] The following explains the mechanism by which stress is applied to the support portion of the support contact in an inspection fixture where the bending strength of opposing support plates B2 and B2a is not high.

[0121] Specifically, such as Figure 11 As shown, when the inspection fixture is pressed against the object to be inspected and the contact member Pr is pressed in and bent, the plate PL is pressed and bent by the bent contact member Pr. More specifically, as Figure 12As shown, the flexed contact Pr is stuck to the opening edge of the through hole PLH of the contact plate PL and is forcefully pressed into the plate PL.

[0122] In this state, when the inspection fixture leaves the object being inspected and the contact part Pr attempts to return to its original position, as follows: Figure 13 As shown, plate PL is stretched and flexed in the opposite direction by contact element Pr. More specifically, the flexed contact element Pr is forcefully pressed against the inner wall of the through hole PLH. Therefore, as Figure 14 As shown, a large frictional force is generated between the contact element Pr and the through hole PLH. When the contact element Pr returns to its original position, it stretches the plate PL, which then deflects in the opposite direction. In this way, the deflection of the plate PL applies stress to the support portion supporting the contact element Pr, i.e., the plate PL.

[0123] On the other hand, the inspection fixture 3 includes opposing support plates B2 and B2a, which have a bending strength greater than that of support plates C1, D, E1, and E2. Therefore, the deflection of opposing support plates B2 and B2a is reduced, and the deflection of support plates C1, D, E1, and E2 is suppressed by opposing support plates B2 and B2a. Consequently, the reduced deflection of opposing support plates B2 and B2a, as well as support plates C1, D, E1, and E2, makes it easier to alleviate the stress applied to the support portions of the support contact Pr, namely opposing support plates B2, B2a, C1, D, E1, and E2.

[0124] Reference Figure 15 The opening edges of the through holes B2H in the opposing support plates B2 and B2a are chamfered, forming chamfered portions H1 and H2, respectively. The portion of the inner surface of the through hole B2H, excluding the chamfered portions H1 and H2, is defined as the through hole body portion H3. That is, the inner surface of the through hole B2H includes the through hole body portion H3 and the chamfered portions H1 and H2. In the opposing support plates B2 and B2a, for example, coaxial with the through hole B2H, a large-diameter portion H4, larger than the diameter of the through hole B2H, is connected to the through hole B2H.

[0125] When the contact element Pr deflects, most of the load applied to the first support portion 311 due to the deflection is applied to the chamfered portion H1 of the through hole B2H of the opposing support plates B2 and B2a. Therefore, the frictional force rubbed by the contact element Pr is greatest in the through hole B2H among the through holes B2H, C1H, DH, E1H, and E2H.

[0126] Therefore, by chamfering the chamfered portions H1 and H2 of the through holes B2H in the opposing support plates B2 and B2a, the possibility of scratching the contact member Pr due to friction with the chamfered portions H1 and H2 can be reduced. The chamfer can be a rounded surface to make the corner rounded, a square surface with the corner obliquely cut off, or various other chamfer shapes.

[0127] Furthermore, the opening edges of the through holes H in the support plates other than opposing support plates B2 and B2a can also be chamfered. Similar to the through hole B2H, the through holes H in each plate can also connect the large-diameter portion and the small-diameter portion. In this case, it is preferable that the opening edge of the small-diameter portion of the through hole H is chamfered.

[0128] Furthermore, preferably, a coating layer, i.e., a slip layer 33, for reducing friction is formed on the inner surface of each through hole H of the opposing support plates B2, B2a, A, A2, A3, C1, D, E1, and E2 in the inspection fixture 3. Figure 15 As shown, the sliding layer 33 may also be formed on the entire surface of each plate, including the inner surface of each through hole H. However, since the contact member Pr does not contact the portion outside the inner surface of each through hole H, the sliding layer 33 may not be formed on the portion outside the inner surface of each through hole H.

[0129] Furthermore, the slip layer 33 only needs to be formed on at least one of the through hole body portion H3 and the chamfer portion H1 on the inner surface of each through hole H.

[0130] The thickness of the sliding layer 33 is, for example, set to approximately 1 μm. The coefficient of friction of the sliding layer 33 relative to the contact element Pr is less than the coefficient of friction of the bottom portion 34 of the sliding layer 33 in each plate. The sliding layer 33 can be formed, for example, by vapor deposition of a material with a low coefficient of friction. Regarding the magnitude of the coefficient of friction, it is sufficient to compare either the dynamic coefficient of friction with each other or the static coefficient of friction with each other.

[0131] As the material for the slip layer 33, for example, a p-xylene-based polymer can be used, preferably an insulating material with a low coefficient of friction such as Parylene (registered trademark), fluorine, polyester, or acrylic.

[0132] By forming a slip layer 33 on the inner surface of the through hole H, the friction between the through hole H and the contact Pr can be reduced.

[0133] Furthermore, the contact member Pr deflects on the second support portion 312 side of the opposing support plates B2 and B2a. Therefore, the friction between the chamfered portion H1 on the second support portion 312 side and the contact member Pr is greater than the friction between the chamfered portion H2 on the support plate C1 side and the contact member Pr. Consequently, Figure 15The example shown is that both chamfered portions H1 and H2 are chamfered, but it is also possible that only the chamfered portion H1 on the side of the second support portion 312, which has greater friction with the contact member Pr, is chamfered.

[0134] Alternatively, the chamfered portions H1 and H2 of the through holes B2H in the opposing support plates B2 and B2a may not be chamfered.

[0135] Furthermore, the contact element Pr deflects on the second support portion 312 side of the opposing support plates B2 and B2a. Therefore, the contact pressure between the through holes B2H of the opposing support plates B2 and B2a and the contact element Pr tends to be greater than the contact pressure between the through holes H of the other support plates and the contact element Pr, easily generating friction. Therefore, it is sufficient to form a sliding layer 33 at least on the inner surface of each through hole B2H of the opposing support plates B2 and B2a; it is not necessary to form a sliding layer 33 on the other plates.

[0136] Furthermore, preferably, the through holes H of the plates other than support plate A and support plate E2 have the same shape as the through holes B2H of the opposing support plates B2 and B2a. However, when the contact member Pr deflects, the load applied to the through holes B2H of the opposing support plates B2 and B2a due to deflection is greater than the load applied to the through holes H of the other plates. Therefore, the shape of the through holes H of the support plates other than opposing support plates B2 and B2a can also be different from the shape of the through holes B2H, for example, it can also be a cross-sectional circular shape.

[0137] The through holes H of support plates A and E2 can also have the same shape as the through holes B2H of opposing support plates B2 and B2a. However, from the viewpoint of positioning the end of the contact Pr to the inspection point and the electrode respectively, it is more preferable that the through holes H of support plates A and E2 have a circular or square cross-section.

[0138] Furthermore, the positions of the through holes H in each plate may not necessarily be offset, and the contact member Pr is not limited to the example of being supported at an angle. Moreover, the opposing support plates B2 and B2a are not limited to examples where the bending strength is stronger than that of support plates C1, D, E1, and E2.

[0139] That is, an example of the inspection fixture of the present invention includes: a plurality of rod-shaped contacts; a first support portion supporting one end of the plurality of contacts; and a second support portion supporting the other end of the plurality of contacts. The first support portion includes opposing support plates, which are disposed opposite to each other relative to the second support portion and are formed with a plurality of through holes for the plurality of contacts to be inserted. The cross-section of each through hole has an elliptical shape in which the major axis extends in a predetermined specific direction along the surface direction of the opposing support plates.

[0140] According to this structure, rod-shaped contacts are inserted into through holes with an elliptical cross-section, and the major axis of the ellipse of each through hole is aligned with a specific direction. As a result, the deflection direction of each contact easily aligns with the specific direction. Therefore, without using a guide film that flexes in one direction to support the middle portion of multiple contacts, as described in Patent Document 1, it is easy to align the deflection direction of each contact, thus simplifying the structure of the inspection fixture.

[0141] Furthermore, preferably, the plurality of contacts have a cylindrical shape, and the radii of curvature at both ends of the cross section in the specific direction are smaller than the radii of each contact.

[0142] According to this structure, the inner wall of one end of the through hole along its long axis (i.e., a specific direction) contacts the contact element at two points or along two lines. As a result, the movement of each contact element towards a direction orthogonal to the specific direction can be reduced.

[0143] Furthermore, an example of the inspection fixture of the present invention includes: a plurality of rod-shaped contacts; a first support portion supporting one end of the plurality of contacts; and a second support portion supporting the other end of the plurality of contacts. The first support portion includes opposing support plates, which are disposed opposite to the second support portion and are isolated from each other. The opposing support plates are formed with a plurality of through holes through which the plurality of contacts are inserted. The cross-section of each through hole has an elongated shape in a predetermined specific direction along the surface direction of the opposing support plates. The inner wall of one end of each through hole in the predetermined specific direction contacts the contacts inserted into the through holes at two points or two lines.

[0144] According to this structure, rod-shaped contacts are inserted into through holes having a cross-sectional shape that is elongated in a specific direction, and the elongated direction of the cross-sectional shape of each through hole is aligned with the specific direction. As a result, the deflection direction of each contact easily aligns with the specific direction. Therefore, without using a guide film that flexes in one direction to support the middle portion of multiple contacts as described in Patent Document 1, it is easy to align the deflection directions of each contact, thus simplifying the structure of the inspection fixture. Furthermore, the inner wall of one end of each through hole in the specific direction contacts the contact inserted into each through hole at two points or along two lines. As a result, the movement of each contact in a direction orthogonal to the specific direction can be reduced.

[0145] Furthermore, preferably, the plurality of through holes are arranged in odd-numbered columns and even-numbered columns that extend parallel to each other along a predetermined first direction, with each through hole in the even-numbered columns located between straight lines passing through the center of each through hole in the odd-numbered columns and perpendicular to the first direction.

[0146] Based on this structure, the contacts can be configured in a so-called serrated arrangement. As a result, it is easy to narrow the spacing between the contacts.

[0147] Furthermore, preferably, the distance between the centers of the through holes adjacent to each other along the first direction in each odd-numbered column is shorter than the distance between the centers of the through holes adjacent to each other along the second direction, and the distance between the centers of the through holes adjacent to each other along the first direction in each even-numbered column is shorter than the distance between the centers of the through holes adjacent to each other along the second direction, wherein the specific direction is the second direction.

[0148] According to this structure, the direction in which the contact element easily flexes, i.e., the specific direction, is the second direction. Furthermore, the center-to-center distance between adjacent through holes along the second direction is longer than the center-to-center distance between adjacent through holes along the first direction. As a result, the adjacent spacing of the contact elements in the direction of flexure is greater than in the direction orthogonal to the flexure direction. By increasing the adjacent spacing of the contact elements in the direction of flexure, the possibility of the contact elements contacting each other due to flexure is reduced.

[0149] Furthermore, preferably, the opening edge of each through hole on the side of the second support portion is chamfered.

[0150] The contact member flexes between the first support portion and the second support portion. Specifically, the contact member flexes on the second support portion side of the opposing support plate, located on the side of the second support portion of the first support portion. Consequently, the load caused by the contact member's flexure is easily applied to the opening edges of the through holes on the second support portion side of the opposing support plate. According to this structure, the opening edges of the through holes on the second support portion side of the opposing support plate, where the load is easily applied, are chamfered, thus reducing friction between the opening edges of the through holes and the contact member.

[0151] Furthermore, it is preferable to form a sliding layer for reducing friction on the inner surface of each through hole, wherein the coefficient of friction of the sliding layer relative to the contact member is smaller than the coefficient of friction of the bottom layer of the sliding layer in the opposing support plate.

[0152] This structure reduces friction between the contact element and the inner surface of each through hole.

[0153] Furthermore, preferably, the opening edge of each through hole on the second support side is provided as a chamfered portion, and a sliding layer for reducing friction is formed in the portion of the inner surface of each through hole including the chamfered portion other than the chamfered portion, i.e., the through hole body portion and at least one of the chamfered portion. The coefficient of friction of the sliding layer relative to the contact member is smaller than the coefficient of friction of the bottom layer portion of the sliding layer in the opposing support plate.

[0154] According to this structure, friction between at least one of the through hole body and the chamfered portion and the contact element can be reduced.

[0155] Furthermore, preferably, the first support portion includes a support plate located on the opposite side of the opposing support plate to the second support portion, and the opposing support plate has a stronger bending strength than the support plate.

[0156] According to this structure, the first support portion includes opposing support plates and a support plate. The contact element flexes significantly between the first and second support portions, therefore the opposing support plate closer to the second support portion is most susceptible to the force generated by the flexure of the contact element. By making the opposing support plate, which is most susceptible to the force generated by the flexure of the contact element, strong bending strength is achieved, thereby easily reducing the stress applied to the first support portion.

[0157] Furthermore, preferably, the first support portion includes a support plate located on the opposite side of the opposing support plate to the second support portion. The support plate has a plurality of through holes, which correspond to a plurality of through holes in the opposing support plate for insertion of the same contact element. Regarding the corresponding through holes in the opposing support plate, the positions of the through holes in the opposing support plate and the through holes in the support plate are offset relative to the direction of the vertical line, so that the contact element is tilted relative to the vertical line of the opposing support plate. The direction of the offset is along the specific direction.

[0158] Based on this structure, the contact element can be easily tilted in a specific direction and supported by the opposing support plates and the through holes in the support plates.

[0159] Furthermore, preferably, the plurality of through holes are arranged in multiple columns along the specific direction and in multiple columns along a third direction intersecting the first direction, and in the region where the through holes are arranged at equal intervals, the number of columns arranged along the specific direction is less than the number of columns arranged along the third direction.

[0160] According to this structure, the number of rows of contacts arranged along the specific direction in which the contacts are more easily flexed is less than the number of rows in the third direction in which the contacts are less easily flexed. Therefore, the contacts are more easily flexed in the direction with fewer rows of through holes, i.e., fewer rows of contacts, and thus the probability of the contacts coming into contact with each other is reduced compared to the case where they flex along the third direction with more rows.

[0161] An example of the inspection apparatus of the present invention includes: the inspection fixture; and an inspection processing unit that performs inspection of the object based on an electrical signal obtained by bringing the contact member into contact with an inspection point provided on the object to be inspected.

[0162] Based on this structure, the structure of the inspection fixture used for inspection can be easily simplified.

Claims

1. An inspection fixture, characterized in that, include: Multiple rod-shaped contact elements; The first support portion supports one end side of the plurality of contact members; as well as The second support portion supports the other end of the plurality of contact members. The first support portion includes opposing support plates, which are disposed opposite to the second support portion and are isolated from each other, and have a plurality of through holes for the insertion of the plurality of contact elements. The cross-section of each through hole has an elliptical shape with its major axis extending in a predetermined specific direction along the surface direction of the opposing support plates. The plurality of contact elements have a cylindrical shape. The radius of curvature at both ends of the cross section in the specified direction is smaller than the radius of each contact element.

2. The inspection fixture according to claim 1, characterized in that... The plurality of through holes are arranged in odd-numbered columns and even-numbered columns that extend parallel to each other along a predetermined first direction. The through holes in the even-numbered columns are located between straight lines that pass through the centers of the through holes in the odd-numbered columns and are orthogonal to the first direction.

3. The inspection fixture according to claim 2, characterized in that... The distance between the centers of the through holes adjacent to each other along the first direction in each of the odd-numbered columns is shorter than the distance between the centers of the through holes adjacent to each other along the second direction. The distance between the centers of the through holes adjacent to each other along the first direction in each of the even-numbered columns is shorter than the distance between the centers of the through holes in each of the even-numbered columns adjacent to each other along the second direction. The specific direction is the second direction.

4. The inspection fixture according to claim 1, characterized in that... The opening edges on the second support side of each through hole are chamfered.

5. The inspection fixture according to claim 1, characterized in that... A slip layer for reducing friction is formed on the inner surface of each through hole. The coefficient of friction of the sliding layer relative to the contact element is smaller than the coefficient of friction of the bottom layer portion of the sliding layer in the opposing support plate.

6. The inspection fixture according to claim 4, characterized in that... The opening edge on the second support side of each through hole is provided as a chamfered edge. A slip layer for reducing friction is formed on at least one of the inner surfaces of each through hole, excluding the chamfered portion, namely the through hole body portion and the chamfered portion. The coefficient of friction of the sliding layer relative to the contact element is smaller than the coefficient of friction of the bottom layer portion of the sliding layer in the opposing support plate.

7. The inspection fixture according to any one of claims 1 to 6, characterized in that... The first support portion includes a support plate located on the side of the opposing support plate opposite to the second support portion. The bending strength of the opposing support plate is greater than that of the support plate.

8. The inspection fixture according to any one of claims 1 to 6, characterized in that... The first support portion includes a support plate located on the side of the opposing support plate opposite to the second support portion. The support plate has multiple through holes, which correspond to multiple through holes in the opposing support plates to allow the same contact element to pass through. Regarding the corresponding through holes in the opposing support plates, the positions of the through holes in the opposing support plates and the through holes in the support plates are offset relative to the direction of the vertical line, so that the contact member is tilted relative to the vertical line of the opposing support plates. The direction of the deviation is along the specific direction.

9. The inspection fixture according to claim 2 or 3, characterized in that... The plurality of through holes are arranged in multiple columns along the specific direction and in multiple columns along a third direction intersecting the first direction. In the region where the through holes are arranged at equal intervals, the number of columns arranged along the specific direction is less than the number of columns arranged along the third direction.

10. An inspection device, characterized in that, include: The inspection fixture as described in any one of claims 1 to 6; as well as The inspection processing unit performs inspection of the object based on an electrical signal obtained by bringing the contact member into contact with an inspection point provided on the object to be inspected.

11. An inspection device, characterized in that, include: The inspection fixture as described in claim 7; as well as The inspection processing unit performs inspection of the object based on an electrical signal obtained by bringing the contact member into contact with an inspection point provided on the object to be inspected.

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