processing device

Abstract

This invention provides a processing apparatus that can suppress the increase of the area for displaying numeric keys and improve the operability of inputting multiple digits. The processing apparatus includes: a holding table; a processing unit for processing a workpiece held by the holding table; an operation panel for inputting processing conditions; and a control unit for controlling the operation panel. The control unit causes the operation panel to display multiple input fields corresponding to multiple items included in the processing conditions. When one of the multiple input fields is selected, the control unit causes the numeric keys to be displayed. When the numeric key is selected, the control unit causes the digit-distinguishing numeric keys to be displayed. The digit-distinguishing numeric keys correspond to multiple values ​​containing digits input via the numeric keys in different positions. When the digit-distinguishing numeric key is selected, the control unit inputs the value of the selected digit-distinguishing numeric key to the input field.

Description

Technical Field

[0001] This invention relates to a processing apparatus. Background Technology

[0002] When setting processing conditions for a processing apparatus equipped with a touch panel, the operator inputs the processing conditions by operating the touch panel. At this time, the operator inputs specified information (numerical values, strings, etc.) to the processing apparatus by touching the input keys included in the input section (numeric keypad, keyboard, etc.) displayed on the touch panel. For example, Patent Document 1 discloses a processing apparatus equipped with an operation panel, which is provided with digit setting keys for setting numerical values.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2001-84015

[0004] However, in conventional processing devices, the input keys displayed on the touch panel are densely arranged with narrow intervals. When the input value has many digits, the operator may sometimes input incorrect information. Furthermore, when incorrect information is input to the touch panel, the processing device may process the workpiece under unexpected processing conditions, resulting in poor processing. In addition, the processing conditions of the processing device are set to digits from below the decimal point to above 10. Therefore, when multiple digit setting keys are always displayed as in the processing device of Patent Document 1, the following problem exists: the number keys for inputting values ​​become smaller, reducing the operability of input. Summary of the Invention

[0005] Therefore, the object of the present invention is to provide a processing apparatus that can suppress the increase of the area for displaying numeric keys and can suppress erroneous input when inputting multiple digits.

[0006] According to one aspect of the present invention, a processing apparatus is provided, comprising: a holding table for holding a workpiece; a processing unit for processing the workpiece held by the holding table; an operation panel for inputting processing conditions; and a control unit for controlling the operation panel, wherein the control unit causes the operation panel to display a plurality of input fields corresponding to a plurality of items included in the processing conditions; when one of the plurality of input fields is selected, the control unit causes numeric keys to be displayed; when the numeric key is selected, the control unit causes a plurality of digit-distinguishable numeric keys to be displayed, the plurality of digit-distinguishable numeric keys corresponding to a plurality of values ​​containing digits input by the numeric keys in different positions; when the digit-distinguishable numeric key is selected, the control unit inputs the value of the selected digit-distinguishable numeric key to the input field.

[0007] Preferably, in the processing apparatus, the digit distinguishing key is selected by a swipe operation starting from the key.

[0008] Preferably, in the processing apparatus, the control unit has a range setting unit that sets a range of values ​​that can be input into the multiple input fields, and the control unit displays only the digit-differentiated numeric keys that fall within the range set by the range setting unit.

[0009] Preferably, the processing apparatus also includes a digital storage unit that stores multiple input fields in association with the digits of values ​​previously entered into the multiple input fields. When an input field is selected, the control unit displays only the digit-sensitive numeric keys that match the digits stored in the digital storage unit.

[0010] The processing apparatus of this application has the following effects, for example: it can suppress the numeric keys of the input value from becoming smaller and reduce the operability of the input, and it can improve the operability of inputting multiple digits. Attached Figure Description

[0011] Figure 1 This is a perspective view showing an example of the structure of the processing apparatus according to the embodiment.

[0012] Figure 2 This is a diagram illustrating an example of the functional structure of the processing apparatus according to an embodiment.

[0013] Figure 3 This is a diagram illustrating an example of displaying device data in an embodiment.

[0014] Figure 4 This is a diagram illustrating an example of input processing for the input field in an implementation method.

[0015] Figure 5 This is a diagram illustrating another example of input processing for the input field in the implementation method.

[0016] Figure 6 This is a diagram illustrating yet another example of input processing for the input field in the implementation method.

[0017] Figure 7 This is a flowchart illustrating an example of the processing steps for input handling of the processing apparatus according to an embodiment.

[0018] Figure 8 This is a diagram illustrating an example of digital data in an implementation method.

[0019] Figure 9 This is a diagram used to illustrate a variation of the input processing for the input field in the implementation method.

[0020] Figure 10 This is a perspective view schematically showing a structural example of the processing apparatus of the first modified embodiment.

[0021] Figure 11This is a perspective view schematically showing a structural example of the processing apparatus of the second modified embodiment.

[0022] Label Explanation

[0023] 1: Processing device; 10: Chuck worktable; 12: Imaging unit; 20: Processing unit; 30: Touch panel (operation panel); 31: Display unit; 32: Input unit; 40: Control unit; 41: Display control unit; 42: Range setting unit; 50: Memory; 100: Workpiece unit; 101: Workpiece; 500: Equipment data; 501: Input field; 510: Digital data; 511: Digital information. Detailed Implementation

[0024] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the constituent elements described below include contents that are readily conceived by those skilled in the art and substantially the same. Additionally, the structures described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications to the structure can be made without departing from the spirit of the present invention.

[0025] [Implementation Method]

[0026] The processing apparatus 1 according to an embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a perspective view showing an example of the structure of the processing apparatus 1 according to the embodiment. Figure 2 This is a diagram illustrating an example of the functional structure of the processing apparatus 1 according to an embodiment.

[0027] like Figure 1 As shown, the processing apparatus 1 of the embodiment has a main body 2 that is a box-shaped shell. (As shown...) Figure 1 As shown, the processing apparatus 1 includes a chuck table 10, a processing unit 20, a touch panel 30, and a control unit 40. The control unit 40 is electrically connected to the chuck table 10, the processing unit 20, and the touch panel 30.

[0028] The workpiece 101, which is the object of processing in the processing apparatus 1, is, for example, a disc-shaped semiconductor wafer or optical device wafer formed of silicon, sapphire, gallium arsenide, etc. The workpiece 101 is supported in the opening of the annular frame 102 by means of adhesive tape 103, thereby forming a workpiece unit 100 including the workpiece 101.

[0029] The chuck table 10 holds the workpiece unit 100 using the holding surface 11. The chuck table 10 is connected to a suction source (not shown) and holds the workpiece unit 100 by suction through negative pressure provided from the suction source. The chuck table 10 can move along the X-axis direction via the X-axis moving unit 22 (described later) and can rotate around the Z-axis via a rotation drive source (not shown).

[0030] In this embodiment, such as Figure 2 As shown, the processing device 1 also includes an imaging unit 12, a drive unit 14, and a Z-axis movement unit 15. The control unit 40 is electrically connected to the imaging unit 12, the drive unit 14, and the Z-axis movement unit 15.

[0031] like Figure 1 and Figure 2 As shown, the imaging unit 12 is an electron microscope equipped with an image sensor such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor). The imaging unit 12 captures an image of the front side of the workpiece 101 held on the holding surface of the chuck stage 10. The imaging unit 12 is integrated into a housing supported by the machining unit 20 and is configured to move in the Z-axis direction via a Z-axis movement unit 15 composed of a ball screw, nut, pulse motor, etc. The imaging unit 12 may, for example, have a light source that illuminates the front side of the workpiece 101 held on the holding surface of the chuck stage 10.

[0032] The machining unit 20 processes the workpiece 101 held by the chuck table 10. The machining unit 20 is, for example, a pair of cutting units, each equipped with a cutting tool. The cutting tools of each pair of cutting units are positioned opposite each other in the Y-axis direction and rotate around the Y-axis. The machining unit 20 performs cutting on the workpiece 101 using the rotating cutting tools. The machining unit 20 can move along the Y-axis direction via the Y-axis moving unit 27 and along the Z-axis direction via the Z-axis moving unit 15. The Y-axis moving unit 27, which moves the imaging unit 12 or the machining unit 20 relative to the holding surface of the chuck table 10 in the Y-axis direction, is composed of a ball screw, nut, pulse motor, etc., and together with the X-axis moving unit 22, constitutes the drive unit 14.

[0033] The machining device 1 moves the chuck table 10 and the machining unit 20 relative to each other via the X-axis moving unit 22, the Y-axis moving unit 27 and the Z-axis moving unit 15, thereby machining the workpiece 101 held by the chuck table 10.

[0034] Furthermore, the processing unit 20 included in the processing apparatus 1 is not limited to a cutting unit that uses a cutting tool to cut the workpiece 101. In addition, the processing unit 20 may be, for example, a grinding unit that uses a grinding wheel or the like to grind the same workpiece 101, a grinding unit that uses a grinding pad or the like to polish the same workpiece 101, or a laser processing unit that uses a laser beam to irradiate the same workpiece 101 to perform laser processing.

[0035] like Figure 1 As shown, the touch panel 30 is provided on the main body 2 with its display surface facing outwards. The touch panel 30 is positioned on the housing of the processing apparatus 1 in a location that is easy to observe and operate. Under the control of the control unit 40, the touch panel 30 displays an image of the front of the workpiece 101 captured by the imaging unit 12, various information required for processing, and receives input operations required for processing from the operator. In this embodiment, the touch panel 30 is an example of an operation panel.

[0036] like Figure 2 As shown, the touch panel 30 includes: a display unit 31 that displays various information related to the processing apparatus 1; and an input unit 32 that receives various operation inputs related to the processing apparatus 1 from the operator, such as setting inputs for processing conditions. The display unit 31 may be, for example, a display device such as a liquid crystal display or an organic EL display. The input unit 32 may be, for example, a touch screen that specifies the contact position and coordinates of an object on the display surface of the display device.

[0037] In this embodiment, an example of a touch panel 30 being an output unit for outputting information is described, but it is not limited to this. For example, the output unit can be implemented by electronic devices such as speakers or communication devices.

[0038] like Figure 2 As shown, the processing apparatus 1 includes a memory 50. The memory 50 stores programs that implement various processing functions performed by the control unit 40, as well as data used for processing based on those programs. The memory 50 is electrically connected to the control unit 40. The memory 50 can be implemented using an HDD (Hard Disk Drive) or semiconductor memory, etc. The memory 50 can also be used as a temporary working area when the processor of the control unit 40 executes commands described in the control program.

[0039] Furthermore, in this embodiment, the processing apparatus 1 is described with a memory 50, but the processing apparatus 1 is not limited to this. For example, the memory 50 can be a storage device accessible to the processing apparatus 1, such as an external computer or electronic device, or other processing apparatus 1.

[0040] The memory 50 can store various types of data, such as device data 500 and digital data 510. The device data 500 includes, for example, data for displaying input fields that allow the operator to set processing conditions for the workpiece 101. The device data 500 is prepared according to each type of device. For example, device types are managed using device serial numbers. The device data 500 is displayed on the touch panel 30, for example, as a device data screen with multiple input fields. The device data 500 associates the input fields with the values ​​or default values ​​entered into those input fields. When the control unit 40 is instructed with the device serial number, the values ​​of the settings associated with that device serial number are entered into the input fields.

[0041] The digital data 510 includes data that digitally associates the input fields of the device data 500, etc., with multiple values ​​previously entered into those input fields. The digital data 510 also includes data indicating the range of values ​​that can be entered into the input fields. The memory 50 that stores the digital data 510 functions as a digital storage unit. Furthermore, in this embodiment, the case where the digital data 510 is different from the device data 500 is described, but the digital data 510 is not limited to this. The digital data 510 may be included within the device data 500.

[0042] Furthermore, in this embodiment, the input processing for the values ​​in the input fields shown in the device data 500 is described, but the processing in the processing apparatus 1 is not limited to this. For example, the present invention can be applied in the processing when an operator inputs values ​​in multiple input fields such as alignment data, cleaning data, transport data, and cut inspection data.

[0043] The control unit 40 controls the various mechanisms (X-axis movement unit 22, Y-axis movement unit 27, and Z-axis movement unit 15) that drive the machining device 1. The control unit 40 controls each part of the machining device 1 to achieve machining processing. For example, the control unit 40 controls each part of the machining device 1, including the chuck table 10 and the machining unit 20, according to machining conditions set by the operator, thereby achieving machining processing of the workpiece 101.

[0044] The control unit 40 includes: an arithmetic processing unit such as a CPU (Central Processing Unit); a storage device such as ROM (Read Only Memory) or RAM (Random Access Memory); and an input / output interface device. The control unit 40 is a computer capable of executing control programs for controlling the aforementioned components according to a series of processing steps performed by the processing apparatus 1, using the aforementioned devices.

[0045] The control unit 40 controls all operations of the processing apparatus 1 according to the processing conditions set by the operator via the input section 32 of the touch panel 30. The control unit 40 includes a display control section 41 and a range setting section 42. The control unit 40 executes programs to realize the functions and roles of each part.

[0046] The display control unit 41 controls the display of the display unit 31 on the touch panel 30. The display control unit 41 displays multiple input fields corresponding to multiple items included in the processing conditions of the workpiece 101 on the touch panel 30. When one of these input fields is selected, the display control unit 41 displays the numeric keypad. The display control unit 41 detects gestures based on the contact detected by the input unit 32, the position of the touch panel 30 where the contact is detected, and changes in the detected contact position. Gestures are operations performed by the operator on the touch panel 30. The display control unit 41 detects gestures such as touch, tap, long touch, release, and flick.

[0047] When the number key is selected via a first gesture, the display control unit 41 inputs the value shown by the number key into the input field. The first gesture includes, for example, touch or tap. When the number key is selected via a second gesture, the display control unit 41 displays multiple digit-differentiated number keys corresponding to multiple values ​​containing the number input via the number key in different digit positions. The second gesture includes, for example, long press or swipe. For example, when the number key "1" is selected, the display control unit 41 displays digit-differentiated number keys showing values ​​such as "0.1", "0.01", "10", and "100" containing the selected number "1" in different digit positions. That is, each digit-differentiated number key indicates multiplying the number selected by the number key by 10. n The value obtained by (n is a positive or negative integer).

[0048] Additionally, the display control unit 41 can display the digit distinguishing key via a first gesture. In this case, when the number key is selected by a first gesture including touching, tapping, pressing, or swiping, the digit distinguishing key is displayed near the selected number key.

[0049] Next, when the operator performs a second gesture—sliding the contact point onto a numeric keypad while touching the touch panel 30 and then stopping the contact on the numeric keypad—the display control unit 41 inputs the numeric keypad value into the input field. Conversely, when the operator performs a second gesture—stopping the contact on a numeric keypad without sliding it onto it—the display control unit 41 inputs the numeric keypad value into the input field.

[0050] When a digit distinguishing key is selected, the display control unit 41 inputs the value of the selected digit distinguishing key into the input field. The display control unit 41 detects the selection of a digit distinguishing key by a swipe operation from the number keys to the digit distinguishing key. Therefore, the processing device 1 can enable the operator to select a digit distinguishing key through continuous swipe operations from the number keys to the digit distinguishing key, thus improving the operability of the digit distinguishing key. As a result, the processing device 1 does not need to constantly display the digit distinguishing key, so the size of the number keys does not become smaller, and input errors can be prevented.

[0051] The range setting unit 42 sets the range of values ​​that can be entered into multiple input fields. For example, when setting the range of values ​​that can be entered into the input fields, the range setting unit 42 associates information showing the range of values ​​with the items in the input fields of the device data 500. For example, if the input fields can be entered with values ​​from 1 to 5000, the range setting unit 42 associates information showing that the input fields can be entered within the range of 1 to 5000 with the input fields. Furthermore, the display control unit 41 only displays the numeric keypad that displays values ​​within the range set by the range setting unit 42 near the numeric keypad.

[0052] The above describes a structural example of the processing apparatus 1 according to this embodiment. Furthermore, using... Figure 1 and Figure 2 The structure described above is only one example, and the structure of the processing apparatus 1 in this embodiment is not limited to this example. The functional structure of the processing apparatus 1 in this embodiment can be flexibly modified according to specifications and applications.

[0053] (Example of input processing in the input field)

[0054] Next, an example of the input processing performed by the processing apparatus 1 of the embodiment will be described. Figure 3 This is a diagram illustrating an example of displaying device data 500 in an embodiment. Figure 4 This is a diagram illustrating an example of input processing for the input field in an implementation method. Figure 5 and Figure 6 This is a diagram illustrating another example of input processing for the input field in the implementation method.

[0055] Figure 3 The device data 500 shown is displayed as a device data screen on the display unit 31 of the touch panel 30 under the control of the control unit 40. The device data 500 has multiple input fields 501. These multiple input fields 501 are configured to allow input of values ​​entered through operator input. Figure 3In one example, the equipment data 500 has multiple input fields 501 corresponding to various items such as "spindle speed," "tool height," "feed rate," "indexing," "workpiece shape and size," and "thickness." The control unit 40 controls the display section 31 of the touch panel 30 in a manner that displays the input keys 600 for operator input near the equipment data 500. For example, the control unit 40 can display the input keys 600 when the operator selects any of the multiple input fields 501, or it can always display the input keys 600.

[0056] The input key unit 600 has multiple numeric keys 610 and multiple operation keys 620. The multiple numeric keys 610 are keys for the operator to input numerical values ​​from "0" to "9". The multiple operation keys 620 are, for example, keys for the operator to select commands such as confirm, move, delete, shift, etc.

[0057] exist Figure 3 In one example shown, the operator selects the input field 501 corresponding to the "band" in the "thickness" item of the device data 500. In this case, the control unit 40 displays the input key 600 together with the device data 500 and controls the display section 31 of the touch panel 30 in the manner that the display state when the input field 501 is selected is obtained.

[0058] exist Figure 4 In scenario 1001, the control unit 40 displays device data 500 (not shown) and input key 600 on the display unit 31. The operator's finger touches the position of the number key 610 ("9") on the touch panel 30. Then, as shown in scenario 1002, the operator immediately removes their finger from the position of the number key 610 ("9"). In this case, the control unit 40 detects the touch operation on the number key 610 ("9") via the touch panel 30. The control unit 40 recognizes that the number key 610 ("9") has been selected, inputs the value shown by the number key 610 ("9") into the input field 501, and updates the display of device data 500. Thus, the processing apparatus 1 displays to the operator device data 500 for which the value of "9" has been entered into the input field 501 corresponding to the "strip" item in the "thickness" category.

[0059] exist Figure 5 As shown in case 1001, such as Figure 4As shown, the control unit 40 displays device data 500 (not shown) and input key 600 on the display unit 31. The operator maintains contact with the numeric key 610 ("9") on the touch panel 30 for a predetermined time or longer. This predetermined time includes, for example, a time set to determine whether to display the digit distinguishing key 630. When the control unit 40 detects a long press operation on the numeric key 610 ("9") via the input unit 32, it controls the display unit 31 to display multiple digit distinguishing key 630s, as shown in example 1010. Furthermore, when the control unit 40 detects a touch operation on the numeric key 610 ("9") via the input unit 32, it can control the display unit 31 to display multiple digit distinguishing key 630s.

[0060] exist Figure 5 In one example, the control unit 40 displays multiple place value keys 630 on either side of the number key 610 for the number "9". These multiple place value keys 630 are, for example, multiple keys corresponding to multiple values ​​of the number "9" input via the number key 610 that exist in different place values. For example, the multiple place value keys 630 include four keys for place values ​​below the decimal point for "0.9", "0.09", "0.009", and "0.0009", and four keys for place values ​​of integers "90", "900", "9000", and "90000". The place value keys 630 for "0.9", "0.09", "0.009", and "0.0009" overlap with the number keys 610 for "8", "5", and "2", displayed in a column along the number keys 610. The number keys 630 for distinguishing digits "90", "900", "9000", and "90000" overlap with the number keys 610 for "+ / -", ".", and "0", and are displayed in a column along the number keys 610. The multiple number keys 630 can be preset according to each input field 501, or the range of input values ​​can be set according to each input field 501 via the range setting unit 42.

[0061] Next, in scenario 1011, the operator slides their finger, while still in contact with the touch panel 30, from the numeric keypad 610 indicating "9" to the digit keypad 630 indicating "9000". Then, in scenario 1012, the operator removes their finger from the touch panel 30 from the digit keypad 630 indicating "9000". The control unit 40, via the input unit 32, detects the series of operations performed by the operator from scenario 1011 to scenario 1012 as a swipe operation on the digit keypad 630 indicating "9000". In this case, the control unit 40 recognizes that the digit keypad 630 indicating "9000" has been selected, inputs the value indicated by the digit keypad 630 indicating "9000" into the input field 501, and updates the display of the device data 500. Thus, the processing apparatus 1 displays to the operator the device data 500 indicating that the value of "9000" has been input into the input field 501 corresponding to the "strip" item in the "thickness" category. Similarly, the processing device 1 can also display multiple digit-distinguishing digit keys 630 for the number keys 610 from "1" to "8".

[0062] For example, if the operator inputs "7500" into input field 501, they first tap the number key 610 for "7" to input the value "7". Then, if the operator presses and holds the number key 610 for "5" to display the digit marker key 630 for "500", they tap the digit marker key 630 for "500" to input the value "7500" into input field 501. Thus, by using only two operations—a tap and a tap following a long press—the operator can input a four-digit "7500" into input field 501. In other words, when inputting "7500" into input field 501, the processing device 1 reduces the number of operations to two compared to using the number keys 610 for "7", "5", "0", and "0", thereby improving input efficiency.

[0063] For example, when an operator enters "0.0125" into input field 501, they first press and hold the number key "1" 610. When the number key "0.01" indicating the place value is displayed 630, the operator lightly taps the number key "0.01" 630, thus entering the value "0.01" into input field 501. Then, the operator taps the number key "2" 61 and the number key "5" 610, thus entering the value "0.0125" into input field 501. Therefore, the operator can enter "0.0125" to four decimal places into input field 501 through three operations: a long press followed by a light tap and two light taps. That is, when the processing device 1 inputs "0.0125" into the input field 501, it can reduce the number of operations to three compared to the five operations required for the number keys 610 for ".", "0", "1", "2", and "5", thus improving the efficiency of the input operation.

[0064] As described above, when a multi-digit value is input into the input field 501, the processing device 1 can reduce the number of operations required for the number keys 610 by displaying the digit-differentiable numeric keys 630, thus suppressing erroneous input. For example, when the processing device 1 displays multiple number keys 610 on the touch panel 30 with a narrower spacing and is densely arranged, it can suppress erroneous input by reducing the number of operations required for the number keys 610. As a result, when a large number of digits are input, the processing device 1 can reduce the number of operations compared to performing multiple operations on the number keys 610 alone, thus suppressing erroneous input and improving operability. In addition, the processing device 1 displays the digit-differentiable numeric keys 630 overlapping with the number keys 610, so that even when the multiple number keys 610 displayed on the display unit 31 are densely arranged with a narrower spacing, multiple digit-differentiable numeric keys 630 can still be displayed.

[0065] Furthermore, the processing device 1 does not always display the multiple digit-differentiable numeric keys 630 on the input key section 600. Instead, it displays them only when a selection is made after continuous contact with the numeric keys 610 for a predetermined period of time, allowing selection to be made by a light touch. As a result, the processing device 1 does not need to reduce the size of the displayed keys, thus further suppressing operator error input.

[0066] Furthermore, in this embodiment, the case where the processing device 1 displays multiple digit-differentiable numeric keys 630 on the left and right sides has been described, but it is not limited to this. For example, as long as the processing device 1 displays the digit-differentiable numeric keys 630 in a position adjacent to the numeric keys 610, it can be configured to display multiple digit-differentiable numeric keys 630 in any position such as up, down, left, right, or diagonally above or below the numeric keys 610. For example, the processing device 1 can be configured to display the digit-differentiable numeric keys 630 in a manner that overlaps with a portion of the numeric key 610 selected by the operator.

[0067] For example, in processing apparatus 1, the range setting unit 42 sets a range from 1 to 5000 as the range of values ​​that can be input into the input field 501. In this case, processing apparatus 1 can limit the number of keys on the digit distinguishing numeric keypad 630.

[0068] exist Figure 6 In scenario 1101, the control unit 40 displays device data 500 (not shown) and input keys 600 on the display unit 31. The operator maintains contact with the numeric key 610 ("5") on the touch panel 30 for a specified time or longer. When the control unit 40 detects a long press operation on the numeric key 610 ("5") via the input unit 32, it determines the digit-differentiated numeric key 630 to be displayed based on the range of values ​​that can be input from the input field 501. For example, the control unit 40 determines the three digit-differentiated numeric key 630s "50", "500", and "5000" that fall within the range of 1 to 5000. As shown in scenario 1102, the control unit 40 controls the display unit 31 in a manner where the three digit-differentiated numeric key 630s "50", "500", and "5000" are displayed around the numeric key 610 ("5").

[0069] Furthermore, for example, suppose the input range for the "thickness" input field 501 is set to 0.01 to 5.00 mm via the range setting unit 42. In this case, when the processing device 1 detects that the numeric key 310 has been selected for more than a predetermined time, it can display the two digit-differentiated numeric keys 630, "0.09" and "0.9", which fall within the range, around the numeric key 310 of the "9". As a result, the processing device 1 allows the operator to select the digit-differentiated numeric key 630 that can input the number of digits into the input field 501, thus further suppressing erroneous input into the input field 501.

[0070] (Input processing in the input field)

[0071] Next, an example of the input processing steps performed by the processing apparatus 1 of the embodiment will be described. Figure 7 This is a flowchart illustrating an example of the processing steps of the input processing apparatus 1 according to an embodiment. Figure 7The processing steps shown are implemented by the control unit 40 of the processing device 1 executing the program. Figure 7 The processing steps shown are performed when the display device data is 500.

[0072] like Figure 7 As shown, the control unit 40 of the processing apparatus 1 displays the device data 500 on the touch panel 30 (step 2001). The control unit 40 controls the display unit 31 of the touch panel 30, for example, to display the device data 500 having multiple input fields 501. Thus, the display unit 31 displays the device data screen having multiple input fields 501. When the processing in step 2001 ends, the control unit 40 causes the processing to proceed to step 2002.

[0073] The control unit 40 determines whether the input field 501 has been selected (step 2002). For example, if the contact position of an object on the display surface provided by the input section 32 of the touch panel 30 is the position of the input field 501 of the device data screen, the control unit 40 determines that the input field 501 has been selected. If the control unit 40 determines that the input field 501 has not been selected (no in step 2002), the process proceeds to step 2015, which will be described later. Alternatively, if the control unit 40 determines that the input field 501 has been selected (yes in step 2002), the process proceeds to step 2003.

[0074] The control unit 40 displays the numeric keys 610 on the touch panel 30 (step 2003). For example, the control unit 40 displays the input key section 600 described above, thereby displaying multiple numeric keys 610 in an operable manner. When the processing in step 2003 ends, the control unit 40 causes the processing to proceed to step 2004.

[0075] The control unit 40 determines whether the number key 610 has been selected for a predetermined time or longer (step 2004). For example, if the contact position of an object on the display surface provided by the input section 32 of the touch panel 30 is at the position of the number key 610 for a predetermined time or longer, the control unit 40 determines that the number key 610 has been selected. If the control unit 40 determines that the number key 610 has been selected for a predetermined time or longer (yes in step 2004), the process proceeds to step 2005.

[0076] The control unit 40 determines the digit-differentiated numeric key 630 corresponding to the numeric key 610 (step 2005). For example, if the range of values ​​that can be input to the corresponding input field 501 is not set by the range setting unit 42, the control unit 40 determines a plurality of digit-differentiated numeric keys 630 that are preset to the numeric key 610. For example, if the range of values ​​that can be input to the corresponding input field 501 is set by the range setting unit 42, the control unit 40 determines the digit-differentiated numeric key 630 that falls within the range. When the processing in step 2005 ends, the control unit 40 causes the processing to proceed to step 2006.

[0077] The control unit 40 causes the digit-differentiable numeric keys 630 to be displayed near the numeric keys 610 (2006). For example, the control unit 40 controls the display unit 31 to display multiple digit-differentiable numeric keys 630 near the numeric key 610 selected by the operator. When the processing in step 2006 ends, the control unit 40 causes the processing to proceed to step 2007.

[0078] The control unit 40 determines whether a confirmation operation of the digit key 630 has been detected (step 2007). For example, if a swipe operation on the digit key 630 is detected by means of the input unit 32, the control unit 40 determines that a confirmation operation of the digit key 630 has been detected. If the control unit 40 determines that a confirmation operation of the digit key 630 has been detected (yes in step 2007), the process proceeds to step 2008.

[0079] The control unit 40 inputs the value of the digit distinguishing key 630 into the input field 501 (step 2008). For example, the control unit 40 determines that the value of the digit distinguishing key 630 for the confirmation operation has been detected, inputs the value into the input field 501, and updates the display content of the display unit 31. When the processing of step 2008 ends, the control unit 40 causes the processing to proceed to step 2013, which will be described later.

[0080] Furthermore, if the control unit 40 determines that no confirmation operation of the digit distinguishing key 630 is detected (No in step 2007), the process proceeds to step 2009. The control unit 40 determines whether the erasure conditions of the digit distinguishing key 630 are met (step 2009). The erasure conditions of the digit distinguishing key 630 include, for example, detecting any of the following operations: the operator's finger leaves the touch panel 30; selecting another number key 610; selecting another input field 501; etc. If the control unit 40 detects any such operation, it determines that the erasure conditions of the digit distinguishing key 630 are met. If the control unit 40 determines that the erasure conditions of the digit distinguishing key 630 are not met (No in step 2009), the process returns to the previously described step 2007 and continues processing. Alternatively, if the control unit 40 determines that the erasure conditions of the digit distinguishing key 630 are met (Yes in step 2009), the process proceeds to step 2010.

[0081] The control unit 40 erases the displayed digit distinguishing key 630 (step 2010). For example, the control unit 40 controls the display unit 31 to erase multiple digit distinguishing key 630s that are displayed near the number key 610 selected by the operator. As a result, the display unit 31 becomes a state where multiple digit distinguishing key 630s are erased and only the number key 610 is displayed. When the process of step 2010 ends, the control unit 40 causes the process to proceed to step 2013, which will be described later.

[0082] Furthermore, if the control unit 40 determines that the numeric key 610 has not been selected for a specified period of time (no in step 2004), the process proceeds to step 2011. The control unit 40 determines whether a confirmation operation of the numeric key 610 has been detected (step 2011). For example, if the control unit 40 detects a touch operation on the numeric key 610 via the input unit 32, it determines that a confirmation operation of the numeric key 610 has been detected. If the control unit 40 determines that no confirmation operation of the numeric key 610 has been detected (no in step 2011), the process proceeds to step 2013, which will be described later.

[0083] Furthermore, if the control unit 40 determines that a confirmation operation has been detected by the numeric key 610 (yes in step 2011), the process proceeds to step 2012. The control unit 40 inputs the value of the numeric key 610 into the input field 501 (step 2012). For example, if the control unit 40 determines that a confirmation operation has been detected by the numeric key 610, it inputs the value into the input field 501 and updates the display content of the display unit 31. When the processing in step 2012 ends, the control unit 40 proceeds to step 2013.

[0084] The control unit 40 determines whether the erasure conditions for the numeric key 610 are met (step 2013). The erasure conditions for the numeric key 610 include, for example, detecting any of the following operations: the operator's finger leaves the touch panel 30; deselecting the input field 501; etc. If any such operation is detected, the control unit 40 determines that the erasure conditions for the numeric key 610 are met. If the control unit 40 determines that the erasure conditions for the numeric key 610 are not met (no in step 2013), the process proceeds to step 2015, described later. Alternatively, if the control unit 40 determines that the erasure conditions for the numeric key 610 are met (yes in step 2013), the process proceeds to step 2014.

[0085] The control unit 40 erases the numeric keys 610 displayed on the touch panel 30 (step 2014). For example, the control unit 40 causes the display unit 31 to erase the input key unit 600, thereby erasing multiple numeric keys 610. When the processing in step 2014 ends, the control unit 40 causes the processing to proceed to step 2015.

[0086] The control unit 40 determines whether to erase the device data 500 (step 2015). For example, if the control unit 40 detects a save operation, end operation, or other similar operation of the device data 500 via the input unit 32, it determines that the device data 500 should be erased. If the control unit 40 determines that the device data 500 has not been erased (no in step 2015), it returns the process to the previously described step 2002 and continues processing. Alternatively, if the control unit 40 determines that the device data 500 has been erased (yes in step 2015), it proceeds to step 2016.

[0087] The control unit 40 saves the input value in the input field 501 and erases the device data 500 (step 2016). For example, the control unit 40 controls the touch panel 30 to store the device data 500 reflecting the value input to the input field 501 in the memory 50 and erase the displayed device data 500. As a result, the display unit 31 erases the displayed device data screen. When the control unit 40 finishes processing in step 2016, it ends the process. Figure 7 The processing steps are shown.

[0088] (A variation of input processing)

[0089] Next, an example will be described where the number of digit distinguishing numeric keys 630 displayed changes based on the value previously entered in the input field 501. Figure 8 This is a diagram illustrating an example of digital data 510 in an embodiment. Figure 9 This is a diagram used to illustrate a variation of the input processing for the input field in the implementation method.

[0090] like Figure 8 As shown, the digital data 510 is data that associates digital information 511 with the input fields 501 respectively. The memory 50 storing the digital data 510 functions as a digital storage unit. The digital data 510 is updated by the control unit 40, for example, when the input value of the input field 501 is changed. The digital data 510 has multiple pieces of digital information 511. The digital information 511 contains information indicating the number of digits or the value of a past value that was entered into the input field 501. For example, the digital information 511 contains information indicating that the first time it was "20", the second time it was "22", etc. In this case, the digital information 511 indicates that there is a high probability that a two-digit value was entered into the input field 501. For example, the digital information 511 contains information indicating that the first time it was "3 digits", the second time it was "2 digits", etc. In this case, the digital information 511 indicates that there is a high probability that a value from 3 digits to 2 digits was entered into the input field 501. In addition, the digit data 510 stores the number of digits of any number of input values, such as the three most recent ones, and updates it whenever the input value is updated, so that only the digits corresponding to the three most recent inputs can be displayed.

[0091] exist Figure 9 In scenario 1201, the control unit 40 displays device data 500 (not shown) and input key 600 on the display unit 31. The operator maintains contact with the numeric key 610 ("5") on the touch panel 30 for a predetermined time or longer. When the control unit 40 detects a long press operation on the numeric key 610 ("5") via the input unit 32, it extracts digit information 511 corresponding to the input field 501 from the digit data 510. In this case, the digit information 511 shows "3 digits" the first time and "2 digits" the second time. The control unit 40 determines the digit-differentiated numeric key 630 to be displayed based on the extracted digit information 511. For example, the control unit 40 determines the two digit-differentiated numeric key 630s ("50" and "500") with 3 or fewer digits. The control unit 40 controls the display unit 31 so that the two digit-differentiated numeric key 630s ("50" and "500") are positioned to the left and above the numeric key 610 ("5"), as shown in scenario 1202.

[0092] Therefore, the processing device 1 can display only the digit-differentiated numeric keys 630 that are within the range that can be input into the input field 501 and that correspond to the digit information 511 showing past input results of the input field 501. As a result, the processing device 1 only displays the digit-differentiated numeric keys 630 based on the number of digits previously input into the input field 501, thus preventing the selection of incorrect digit-differentiated numeric keys 630 and further suppressing erroneous input to the input field 501.

[0093] Furthermore, the aforementioned variation of the input processing can be achieved through... Figure 7 The processing steps shown in step 2005 involve adding or replacing the digit distinguishing number key 630 determined based on the digit information 511.

[0094] Furthermore, the processing apparatus 1 of the above-described embodiments can combine the technical concepts of input processing and modified examples.

[0095] [First Variation]

[0096] The processing apparatus 1 of the first modified embodiment described above will be described below. Figure 10 This is a perspective view schematically showing the structure of the processing apparatus 1 in the first modified embodiment. Furthermore, in the following embodiments, the same reference numerals are used for the same parts, thus omitting repeated descriptions. Additionally, in... Figure 10 In one example shown, for the sake of simplicity, the processing device 1 omits the aforementioned main body 2.

[0097] like Figure 10 As shown, the processing apparatus 1 of the first variation of the embodiment is a laser processing apparatus that irradiates a workpiece 101 with a laser beam. The processing apparatus 1, as a basic structure, includes a chuck table 10, a processing unit 20, a touch panel 30, and a control unit 40. The processing apparatus 1 also includes an image capture unit 12, a drive unit 14, and a Z-axis movement unit 15. The processing unit 20 replaces the aforementioned cutting tool with a laser irradiation unit 5.

[0098] The laser irradiation unit 5 includes, for example, an oscillator, an intensity adjustment unit (attenuator), a polarization direction setting unit, a reflector element, and a focusing lens. The laser irradiation unit 5 is controlled by the control unit 40.

[0099] The processing apparatus 1 processes a workpiece 101, which is divided by a spacer channel serving as a predetermined dividing line, along the spacer channel. For example, the processing apparatus 1 irradiates a laser beam with a wavelength that is transmissible to the workpiece 101, continuously forming a modified layer (modified region) inside the workpiece 101 along the spacer channel. Furthermore, the processing apparatus 1 may function to apply an external force along the spacer channel, whose intensity is reduced by the formation of this modified layer, thereby dividing the workpiece 101. Additionally, for example, the processing apparatus 1 irradiates a laser beam with a wavelength that is absorptive to the workpiece 101, forming a cutting groove on the front surface of the workpiece 101 along the spacer channel. The cutting groove can be a depth that partially cuts the workpiece 101 or a depth that fully cuts it.

[0100] The above describes the structural example of the processing apparatus 1 in the first modified example of this embodiment. Furthermore, using... Figure 10The structure described above is only one example, and the structure of the processing apparatus 1 in the first modified example of this embodiment is not limited to this example. The functional structure of the processing apparatus 1 in the first modified example of this embodiment can be flexibly modified according to specifications and applications.

[0101] Figure 10 In the processing apparatus 1 shown, the aforementioned input key section 600 is displayed on the touch panel 30. For example, if the operator holds the position of their finger touching the numeric key 610 of the number "8" on the touch panel 30 for a specified time or more, the control unit 40, upon detecting a long press operation on the numeric key 610 of the number "8" via the input section 32, controls the touch panel 30 to display multiple digit-differentiable numeric keys 630.

[0102] Multiple digit distinguishing number keys 630, for example, become keys that distinguish the digits of the number key 610 for the number "8". Multiple digit distinguishing number keys 630, for example, include four keys that distinguish the digits below the decimal point, such as "0.8", "0.08", "0.008" and "0.0008", and four keys that distinguish the digits of integers, such as "80", "800", "8000" and "80000".

[0103] When the processing device 1 detects a light touch operation from the numeric keypad 610 ("8") to the digit distinguishing keypad 630 ("800"), it inputs the value indicated by the digit distinguishing keypad 630 ("800") into the input field 501 and updates the display of the device data 500. Thus, the processing device 1 displays to the operator device data 500 showing that the value "800" has been input into the input field 501 corresponding to the "strip" item in the "thickness" category.

[0104] Thus, the processing apparatus 1 of the first modification, like the embodiment described above, does not require multiple operations of the numeric keypad 610, thereby helping to prevent the operator from accidentally inputting data into the input field 501. As a result, when the number of digits input is large, the processing apparatus 1 can reduce the number of operations compared to operating the numeric keypad 610 multiple times, thus suppressing accidental input and improving operability.

[0105] [Second Variation]

[0106] The processing apparatus 1 of the second variation of the above embodiment will be described below. Figure 11 This is a perspective view schematically showing the structure of the processing apparatus 1 in the second modified embodiment. Furthermore, in the following embodiments, the same reference numerals are used for the same parts, thereby omitting repeated descriptions. Additionally, in... Figure 11 In one example shown, for the sake of simplicity, the processing device 1 omits the aforementioned main body 2.

[0107] like Figure 11 As shown, the processing apparatus 1 of the second variation of the embodiment is a grinding apparatus for grinding workpieces housed in boxes 91 and 92. The processing apparatus 1 has a basic structure including a chuck worktable 10, a processing unit 20, a touch panel 30, and a control unit 40. The processing unit 20 has a grinding unit instead of the cutting tool, laser irradiation unit, etc. mentioned above.

[0108] The processing unit 20 includes, for example, a grinding wheel 25 having a grinding tool 21 arranged in a ring; a spindle 23; and a servo motor 24. The grinding wheel 25 is mounted on the lower end of the spindle 23 and rotates as the spindle 23 rotates. The spindle 23 supports the grinding wheel 25 so that it can rotate about a rotation axis (not shown) that is substantially parallel to the Z-axis direction parallel to the vertical direction. The servo motor 24 functions as a rotational drive source that provides rotational power to the spindle 23.

[0109] The processing apparatus 1 uses a chuck table 10 to hold a workpiece unit 100 containing a disc-shaped workpiece such as a semiconductor wafer, and a grinding wheel 25 with a grinding tool 21 arranged in a ring rotates while pressing the workpiece unit 100 through a feed mechanism, thereby grinding the workpiece.

[0110] The above describes the structural example of the processing apparatus 1 in the second modification of this embodiment. Furthermore, using... Figure 11 The structure described above is only one example, and the structure of the processing apparatus 1 in the second variation of this embodiment is not limited to this example. The functional structure of the processing apparatus 1 in the second variation of this embodiment can be flexibly modified according to specifications and applications.

[0111] Figure 11 The processing apparatus 1 shown displays the aforementioned input key section 600 on the touch panel 30. For example, if the operator holds the position of their finger touching the numeric key 610 ("1") on the touch panel 30 for a specified time or longer, the control unit 40, upon detecting a long press operation on the numeric key 610 ("1") via the input section 32, controls the touch panel 30 to display multiple digit-differentiable numeric keys 630.

[0112] Multiple digit distinguishing number keys 630, for example, become keys that distinguish the digits of the number key 610 for "1". Multiple digit distinguishing number keys 630, for example, include four keys for digit distinguishing digits below the decimal point such as "0.1", "0.01", "0.001" and "0.0001", and four keys for digit distinguishing integers such as "10", "100", "1000" and "10000".

[0113] When the processing device 1 detects a light touch operation from the numeric keypad 610 ("1") to the digit-differentiating numeric keypad 630 ("10000"), it inputs the value indicated by the digit-differentiating numeric keypad 630 into the input field 501 and updates the display of the device data 500. Thus, the processing device 1 displays to the operator device data 500 showing that the value "10000" has been entered into the input field 501 corresponding to the "band" in the "thickness" item.

[0114] Thus, the processing apparatus 1 in the second modification, like the embodiment described above, does not require multiple operations of the numeric keypad 610, thereby helping to prevent the operator from accidentally inputting data into the input field 501. As a result, when the number of digits input is large, the processing apparatus 1 can reduce the number of operations compared to operating the numeric keypad 610 multiple times, thus suppressing accidental input and improving operability.

[0115] Furthermore, the first and second modifications of the embodiments can apply the technical concept of the processing apparatus 1 of the above-described embodiments.

[0116] In the above-described embodiments, the first modification, and the second modification, the following situations were described: when the operator presses and holds down the number key 610, the processing device 1 displays the digit distinguishing number key 630 around the number key 610, but is not limited to this. For example, the processing device 1 may be configured such that when the operator touches the number key 610, the digit distinguishing number key 630 is displayed around the number key 610. In this case, when the operator removes their finger or other contact object from the number key 610, the processing device 1 inputs the value shown on the number key 610 into the input field 501. Furthermore, when the operator performs a light swipe operation while keeping their finger or other contact object touching the touch panel 30, moving it to the digit distinguishing number key 630 and releasing the contact, the processing device 1 inputs the digit distinguishing value shown on the digit distinguishing number key 630 into the input field 501.

Claims

1. A processing apparatus comprising: The worktable holds the workpiece in place. The processing unit processes the workpiece held by the holding table; The operation panel, where processing conditions are input; and The control unit controls the operation panel. in, The control unit causes the operation panel to display multiple input fields corresponding to the multiple items included in the processing conditions. When one of the multiple input fields is selected, the control unit displays the numeric keypad. When a numeric key is selected, the control unit displays a plurality of digit-distinguishable numeric keys corresponding to the selected numeric key. These digit-distinguishable numeric keys correspond to multiple numerical values ​​that contain the digits entered via the numeric key in different positions. When a digit-differentiating key is selected, the control unit inputs the value of the selected digit-differentiating key into the input field. The control unit has a range setting unit that sets the range of values ​​that can be input into the multiple input fields. The control unit only displays the digit-differentiated key within the range set by the range setting unit.

2. The processing apparatus according to claim 1, wherein, The digit distinguishes the number keys by swiping them.

3. A processing apparatus comprising: The worktable holds the workpiece in place. The processing unit processes the workpiece held by the holding table; The operation panel, where processing conditions are input; and The control unit controls the operation panel. in, The control unit causes the operation panel to display multiple input fields corresponding to the multiple items included in the processing conditions. When one of the multiple input fields is selected, the control unit displays the numeric keypad. When a numeric key is selected, the control unit displays a plurality of digit-distinguishable numeric keys corresponding to the selected numeric key. These digit-distinguishable numeric keys correspond to multiple numerical values ​​that contain the digits entered via the numeric key in different positions. When a digit-differentiating key is selected, the control unit inputs the value of the selected digit-differentiating key into the input field. The processing apparatus also includes a digital storage unit that associates and stores the multiple input fields with the digits of values ​​previously entered into the multiple input fields. When an input field is selected, the control unit only displays the digit-differentiated numeric keys that match the digits stored in the digit storage unit.

4. The processing apparatus according to claim 3, wherein, The digit distinguishes the number keys by swiping them.

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