Substrate flipping apparatus and substrate flipping method

Abstract

The present application provides a substrate flipping device and a substrate flipping method with improved reliability. A substrate flipping device (1) that flips a substrate (10) is provided with a pair of belts (12), a pair of grippers (14), a rotation drive section (22) that rotates the pair of grippers (14) and the pair of belts (12) together, and a control section (8) that rotates the pair of grippers (14) and the pair of belts (12) by the rotation drive section (22) while the substrate (10) is held by the pair of grippers (14) in a state where the substrate (10) is not in contact with the pair of belts (12), thereby flipping the substrate (10).

Description

TECHNICAL FIELD

[0001] The present application relates to a substrate turnover device and a substrate turnover method. BACKGROUND

[0002] For example, there is a substrate turnover device that turns over a substrate (for example, Patent Literature 1). The substrate turnover device of Patent Literature 1 is provided with a pair of belt conveyors for carrying a substrate, and turns over the substrate in a state where the substrate is sandwiched by the belt conveyors. Both surfaces of the substrate after being turned over are subjected to prescribed processing.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT LITERATURE

[0005] Patent Literature 1: Japanese Patent No. 4664940 SUMMARY

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] However, in the structure of Patent Literature 1, there is a case where a pulley engaged with the belt conveyors, a gear rotate unnecessarily in conjunction with a turning motion of the substrate, and thus a malfunction occurs in the substrate turnover device. Therefore, it can be said that there is room for improvement in terms of improvement of reliability of the substrate turnover device.

[0008] Therefore, an object of the present application is to solve the problems described above, and to provide a substrate turnover device and a substrate turnover method that can improve reliability.

[0009] SOLUTION TO THE PROBLEM

[0010] In order to achieve the object described above, a substrate turnover device according to the present application turns over a substrate, wherein the substrate turnover device is provided with: a pair of belts having a first belt and a second belt that are disposed opposite to each other, and carrying the substrate by either one of the belts; a pair of grippers having a first gripper and a second gripper that have end portions at positions different from each other in a width direction of the pair of belts, and raising the end portions of either one of the grippers to lift the substrate supported by the belt, and thereby sandwiching and holding the substrate by the end portions of the first gripper and the second gripper; a rotation drive section that rotates the pair of grippers and the pair of belts together; and a control section that rotates the pair of grippers and the pair of belts by the rotation drive section in a state where the substrate is held by the pair of grippers at a position not in contact with the pair of belts, and thereby turns over the substrate.

[0011] Further, the substrate flipping method of the present application flips a substrate, wherein the substrate flipping method includes the steps of: carrying the substrate with a first belt of a pair of belts having the first belt and a second belt disposed opposite to each other; raising the end portion of a first gripper of a pair of grippers having the first gripper and a second gripper to lift the substrate supported on the first belt from the first belt, the first gripper and the second gripper having end portions at positions different from each other in a width direction of the pair of belts; abutting the substrate lifted by the first gripper against the end portion of the second gripper to grip and hold the substrate with the end portion of the first gripper and the end portion of the second gripper; and rotating the pair of grippers together with the pair of belts in a state where the substrate is held by the pair of grippers at a position not in contact with the pair of belts to flip the substrate.

[0012] Effects of Invention

[0013] According to the present application, it is possible to improve the reliability of a substrate flipping device. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is a perspective view of a substrate flipping device of Embodiment 1.

[0015] Figure 2 is a perspective view of a substrate flipping portion of one side of a substrate flipping device of Embodiment 1.

[0016] Figure 3 is a perspective view of a substrate flipping portion of the other side of a substrate flipping device of Embodiment 1.

[0017] Figure 4 is a perspective view of a flipping portion of Embodiment 1.

[0018] Figure 5 is a perspective view of a flipping portion of Embodiment 1 in a state where grippers are omitted.

[0019] Figure 6 is a schematic view showing a longitudinal section of a belt, a gripper, and a frame of Embodiment 1.

[0020] Figure 7 is a perspective view of a pair of grippers of Embodiment 1.

[0021] Figure 8 is a perspective view showing a belt driving portion and a frame driving portion of Embodiment 1 schematically.

[0022] Figure 9 is a flowchart for explaining a substrate flipping method of Embodiment 1.

[0023] Figure 10A are various explanatory diagrams when the steps are executed according to the flowchart of Figure 14

[0024] Figure 10B are various explanatory diagrams when the steps are executed according to the flowchart of Figure 14

[0025] Figure 10C are various explanatory diagrams when the steps are executed according to the flowchart of Figure 14

[0026] Figure 10D are various explanatory diagrams when the steps are executed according to the flowchart of Figure 14

[0027] Figure 10E are various explanatory diagrams when the steps are executed according to the flowchart of Figure 14

[0028] Figure 10F are various explanatory diagrams when the steps are executed according to the flowchart of Figure 14

[0029] Figure 11 is a front view showing a schematic structure of the substrate flipping device of Embodiment 2.

[0030] Figure 12 is a side view showing a schematic structure of the substrate flipping device of Embodiment 2.

[0031] Figure 13A are various schematic diagrams for explaining the substrate flipping method of Embodiment 2.

[0032] Figure 13B are various schematic diagrams for explaining the substrate flipping device of Embodiment 2.

[0033] Figure 13C are various schematic diagrams for explaining the substrate flipping device of Embodiment 2.

[0034] Figure 14 is a schematic diagram showing a pawl portion selectively engaged with the first gear 70.

[0035] BRIEF DESCRIPTION OF THE DRAWINGS

[0036] ​​​​​​1 substrate flipping device; 2, 2A, 2B carrying section; 4, 4A, 4B flipping section; 6 processing section; 8 control section; 10 substrate; 12 belt; 12A belt (first belt); 12B belt (second belt); 14 holder; 14A holder (first holder); 14B holder (second holder); 16 frame; 18 belt driving section; 18A belt driving section (first belt driving section); 18B belt driving section (second belt driving section); 20 holder driving section; 20A holder driving section (first holder driving section); 20B holder driving section (second holder driving section); 22 frame driving section (rotary driving section); 24A, 24B narrow width portion (end portion); 26A, 26B wide width portion; 27A, 27B belt wheel; 28A, 28B pinion; 29 space; 30 large gear; 32 belt; 34 fastening link portion; 36 belt; 38 rotary shaft; 48 first main surface; 50 second main surface; 60 substrate flipping device; 62A first belt; 62B second belt; 64A first belt wheel; 64B second belt wheel; 66A first belt wheel shaft; 66B second belt wheel shaft; 68 frame; 70 first gear; 72 second gear; 74 first motor; 76 second motor; 78 fixing member; 80 first rotary shaft; 82 second rotary shaft; 84 claw portion; H1 first height position; H2 second height position; H3 third height position; X carrying direction (length direction); Y width direction; Z height direction; P, PI, P2 rotation direction; Q rotation direction; R rotation direction. DETAILED DESCRIPTION

[0037] According to a first aspect of the present application, there is provided a substrate flipping device that flips a substrate, wherein the substrate flipping device includes: a pair of belts including a first belt and a second belt disposed opposite each other and carrying the substrate by either one of the belts; a pair of holders including a first holder and a second holder having end portions at positions different from each other in a width direction of the pair of belts, and elevating the end portions of either one of the holders to lift the substrate supported by the belt, thereby clamping and holding the substrate by the end portions of the first holder and the second holder; a rotary driving section that rotates the pair of holders and the pair of belts together; and a control section that rotates the pair of holders and the pair of belts by the rotary driving section while the substrate is held by the pair of holders at a position not in contact with the pair of belts, thereby flipping the substrate.

[0038] According to such a structure, since the substrate is flipped over in a state not in contact with the belts, the substrate can be flipped over while the state of the belts is free. Thus, unnecessary rotation of the belts can be prevented, and the reliability of the substrate flipping device can be improved by suppressing malfunction thereof.

[0039] According to a second aspect of the present application, there is provided the substrate flipping device according to the first aspect, wherein the substrate flipping device further includes a processing section that performs processing on a main surface of the substrate, and the control section performs processing on a first main surface of the substrate using the processing section in a state where the substrate is held by the pair of holders at a first height position not in contact with the pair of belts before flipping over the substrate. According to such a structure, by performing processing on the first main surface in a state where the substrate is held by the holders, the substrate can be processed while being positioned with high accuracy, and thus the processing accuracy of the substrate can be improved.

[0040] According to a third aspect of the present application, there is provided the substrate flipping device according to the second aspect, wherein the control section performs processing on a second main surface of the substrate on the side opposite to the first main surface using the processing section in a state where the flipped-over substrate is held by the pair of holders. According to such a structure, by performing processing on the second main surface in a state where the substrate is held by the holders, the substrate can be processed while being positioned with high accuracy, and thus the processing accuracy of the substrate can be improved.

[0041] According to a fourth aspect of the present application, there is provided the substrate flipping device according to the third aspect, wherein the flipped-over substrate is held by the pair of holders at a second height position lower than the first height position, the control section raises the end portions of the pair of holders in contact with the substrate held at the second height position, thereby holding the substrate at a third height position not in contact with the pair of belts, and the control section performs the processing on the second main surface of the substrate using the processing section in a state where the substrate is held at the third height position. According to such a structure, even in a case where the holding height of the substrate is lowered due to flipping over of the substrate, by raising the first and second holders, the holding height of the substrate can be adjusted and processing on the substrate can be performed.

[0042] According to a fifth aspect of the present application, there is provided the substrate flipping device according to the fourth aspect, wherein the first height position and the third height position are the same. According to such a structure, the upper surface height of the substrate being processed can be kept constant.

[0043] According to a sixth aspect of the present invention, there is provided a substrate flipping method of flipping a substrate, the substrate flipping method comprising: carrying the substrate with a first belt of a pair of belts having the first belt and a second belt disposed opposite to each other; raising an end portion of a first gripper of a pair of grippers having the first gripper and a second gripper to lift the substrate supported on the first belt from the first belt, the first gripper and the second gripper having end portions at positions different from each other in a width direction of the pair of belts; bringing the substrate lifted by the first gripper into abutment with the end portion of the second gripper to grip and hold the substrate with the end portion of the first gripper and the end portion of the second gripper; and rotating the pair of grippers together with the pair of belts in a state where the substrate is held by the pair of grippers at a position not in contact with the pair of belts to flip the substrate.

[0044] According to such a method, the same effects as the substrate flipping apparatus of the first aspect can be obtained.

[0045] According to a seventh aspect of the present invention, there is provided the substrate flipping method according to the sixth aspect, further comprising: processing a first main surface of the substrate in a state where the substrate is held by the pair of grippers at a first height position not in contact with the pair of belts before the step of flipping the substrate. According to such a method, the same effects as the substrate flipping apparatus of the second aspect can be obtained.

[0046] According to an eighth aspect of the present invention, there is provided the substrate flipping method according to the seventh aspect, further comprising: processing a second main surface of the substrate on a side opposite to the first main surface in a state where the flipped substrate is held by the pair of grippers. According to such a method, the same effects as the substrate flipping apparatus of the third aspect can be obtained.

[0047] According to a ninth aspect of the present invention, there is provided the substrate flipping method according to the eighth aspect, wherein the flipped substrate is held at a second height position lower than the first height position, the substrate flipping method further comprising: raising the end portions of the pair of grippers in contact with the substrate held at the second height position to hold the substrate at a third height position not in contact with the pair of belts, the processing of the second main surface of the substrate being performed in a state where the substrate is held at the third height position. According to such a method, the same effects as the substrate flipping apparatus of the fourth aspect can be obtained.

[0048] According to a tenth aspect of the present application, there is provided the substrate flipping method according to the ninth aspect, wherein the first height position and the third height position are the same. According to such a method, the same effects as the substrate flipping apparatus according to the fifth aspect can be obtained.

[0049] Embodiments of a substrate flipping apparatus and a substrate flipping method using the same according to the present application will be described below with reference to the accompanying drawings. The present application is not limited to the specific structures of the following embodiments, and structures obtained based on the same technical idea are also included in the present application.

[0050] (Embodiment 1)

[0051] First, the structure of the substrate flipping apparatus 1 will be described with reference to Figures 1-3 The structure of the substrate flipping apparatus 1 will be described. Figure 1 is a perspective view of the substrate flipping apparatus 1 according to Embodiment 1, Figure 2 is a perspective view of a substrate flipping portion on one side of the substrate flipping apparatus 1, Figure 3 is a perspective view of a substrate flipping portion on the other side of the substrate flipping apparatus 1.

[0052] Figure 1 The substrate flipping apparatus 1 shown in FIG. 1 is provided with a carrying portion 2, a flipping portion 4, a processing portion 6, and a control portion 8.

[0053] The carrying portion 2 is a member for carrying in or carrying out the substrate 10. The carrying portion 2 has a function of carrying the substrate 10 to the flipping portion 4 in a carrying direction X or a function of carrying the substrate 10 out of the flipping portion 4 in the carrying direction X. In a case where the substrate 10 is carried in from the carrying portion 2 to the flipping portion 4, the substrate 10 is carried out to the side opposite to the carrying portion 2 by the flipping portion 4. On the other hand, in a case where the substrate 10 is carried in from the side opposite to the carrying portion 2 to the flipping portion 4, the substrate 10 is carried out to the side opposite to the flipping portion 4 by the carrying portion 2. The carrying direction X is a direction along the surface of the substrate 10 and is orthogonal to the width direction Y of the substrate 10. In Figure 1 In FIG. 2, the state where the substrate 10 is carried in to the flipping portion 4 is shown. The illustration of the substrate 10 will be omitted as appropriate hereafter. Figure 2

[0054] As shown in FIG. 3, the carrying portion 2 is provided with a pair of carrying portions 2A, 2B. The carrying portions 2A, 2B each have a belt, and one of the carrying portions 2A supports one side in the width direction Y of the substrate 10, and the other of the carrying portions 2B supports the other side in the width direction Y of the substrate 10. Figures 1-3

[0055] ​​The flipping section 4 is a component that holds and flips the substrate 10 transferred from the transport section 2. By flipping the substrate 10, both sides of the substrate 10 can be processed. Like the transport section 2, the flipping section 4 has a pair of flipping sections 4A and 4B. One flipping section 4A supports one side of the substrate 10 in the width direction Y, and the other flipping section 4B supports the other side of the substrate 10 in the width direction Y.

[0056] The flipping unit 4 rotates the substrate 10 along the rotation direction R while the substrate 10 is held between the upper and lower parts by a pair of flipping units 4A and 4B, thereby flipping the substrate 10. The rotation direction R is the rotation direction with the width direction Y of the substrate 10 as the central axis. The detailed structure of the flipping unit 4 will be described later.

[0057] The processing unit 6 is a component that processes the substrate 10 held by the flipping unit 4. The processing performed by the processing unit 6 includes, for example, laser processing such as printing barcodes on the main surface of the substrate 10, and automatic optical inspection (AOI) to check the component mounting status of the substrate 10. That is, the substrate flipping device 1 can be a laser marking machine, an automatic optical inspection device, or a component mounting device for mounting components onto the substrate 10.

[0058] The control unit 8 is a component used to control the various components of the substrate flipping device 1. The control unit 8 is electrically connected to each component of the substrate flipping device 1. For example, the control unit 8 is configured to have a microcomputer.

[0059] The aforementioned processing unit 6 and control unit 8 are in Figure 1 Simplified representation. Additionally, in Figure 2 From now on, the illustrations of the processing unit 6 and the control unit 8 will be omitted as appropriate.

[0060] Next, use Figure 4 The detailed structure of the flipping part 4 will be explained in the following figures. It should be noted that the pair of flipping parts 4A and 4B are symmetrical, so the flipping part 4B of the pair of flipping parts 4A and 4B will be used as the representative of the flipping part 4 in the explanation.

[0061] Figure 4 This is a perspective view showing the flipping part 4 (4B). Figure 5 This is a perspective view showing the flipping part 4 with the clamp 14 omitted.

[0062] like Figure 4 , Figure 5 As shown, the flipping part 4 includes a pair of straps 12 and a pair of clamps 14. Figure 4 ), frame 16, a pair of drive units 18 ( Figure 5 ), clamp drive unit 20 ( Figure 5 ) and the frame driver 22.

[0063] Belt 12 is a component that transports the substrate 10 transported from the aforementioned transport unit 2 along the transport direction X and positions it in a predetermined position. Belt 12 has a pair of belts 12A and 12B, which are arranged at intervals in the height direction Z. Figure 4 , Figure 5 The image shows a configuration where tape 12A is on the bottom and tape 12B is on the top. Later, tape 12A may be referred to as "first tape 12A" and tape 12B as "second tape 12B".

[0064] When conveyor belt 12 transports substrate 10, conveyor belt 12A, located on the lower side, supports substrate 10 while transporting substrate 10 in the transport direction X. Conveyor belt 12B, located on the upper side, does not contact substrate 10 and does not assist in the transport of substrate 10 by conveyor belt 12A. When flipped over and conveyor belt 12B is located on the lower side, conveyor belt 12B supports and transports substrate 10 in place of conveyor belt 12A.

[0065] A pair of belts 12A and 12B does not have the function of adjusting the spacing in the height direction Z, and the spacing between belts 12A and 12B is constant.

[0066] The clamp 14 is a component for clamping and holding the substrate 10. The clamp 14 has a pair of clamps 14A and 14B, which are arranged at a distance from each other in the height direction Z. Figure 4 The image shows a configuration where gripper 14A is positioned below and gripper 14B is positioned above. From now on, gripper 14A may be referred to as "first gripper 14A" and gripper 14B as "second gripper 14B".

[0067] A pair of grippers 14A and 14B are configured to adjust their spacing in the height direction Z, and grippers 14A and 14B are each capable of moving in the height direction Z. In Embodiment 1, grippers 14A and 14B are configured to stop at three different height positions. In Embodiment 1, a "retreat position" is defined as the position furthest from each other, a "protruding position" is defined as the position closest to each other, and an "intermediate position" is defined in between. Grippers 14A and 14B are each capable of independently moving to and stopping at each position.

[0068] With the substrate 10 supported by the lower band 12A, when the lower clamp 14A is raised, the clamp 14A lifts the substrate 10. The lifted substrate 10 is held by a pair of clamps 14A and 14B, thereby keeping the substrate 10 in a position where it does not contact the pair of bands 12A and 12B.

[0069] like Figure 5As shown, a belt drive unit 18 is provided as a component to drive the belt 12 to rotate. The belt drive unit 18 has a pair of belt drive units 18A and 18B. Belt drive unit 18A drives the belt 12A to rotate, and belt drive unit 18B drives the belt 12B to rotate. Belt drive units 18A and 18B are each composed of multiple pulleys, multiple gears, a belt for rotating the pulleys and gears, and a motor for rotating the belt. Belt drive units 18A and 18B can use any structure as long as they can drive the belts 12A and 12B to rotate. In Embodiment 1, the motors (not shown) of belt drive units 18A and 18B are fixed to a fixed part (non-flipping part) in the substrate flipping device 1 that does not perform a flipping operation. The motor does not flip along with the flipping operation of the substrate 10.

[0070] A pair of belts 12A and 12B are supported on the frame 16 via belt drive units 18A and 18B.

[0071] like Figure 5 As shown, a gripper drive unit 20 is provided as a component that drives the gripper 14 along the height direction Z. The gripper drive unit 20 has a pair of gripper drive units 20A and 20B. The gripper drive unit 20A drives the gripper 14A linearly, and the gripper drive unit 20B drives the gripper 14B linearly. The gripper drive units 20A and 20B are each configured to include a working cylinder capable of stopping at multiple positions (three positions in Embodiment 1). The gripper drive units 20A and 20B can use any structure as long as they can drive the grippers 14A and 14B respectively along the height direction Z.

[0072] A pair of grippers 14A and 14B are supported on the frame 16 via gripper drive units 20A and 20B.

[0073] The frame 16 is a component that integrally supports a pair of belts 12A and 12B and a pair of clamps 14A and 14B. The frame 16 has a shape that extends in the length direction along the transport direction X, and a belt drive part 18 is engaged at the center in the length direction, and clamp drive parts 20 are engaged at both ends in the length direction.

[0074] A frame drive unit 22 is also connected to the frame 16. The frame drive unit 22 is a rotation drive unit that rotates the frame 16 in the rotation direction R. By using the frame drive unit 22 to rotate the frame 16 in the rotation direction R, the pair of belts 12A and 12B supported on the frame 16 and the pair of clamps 14A and 14B rotate as a whole, and the substrate 10 held by the pair of clamps 14A and 14B is flipped.

[0075] Next, use Figure 6 as well as Figure 7 The positional relationship between belts 12A and 12B and grippers 14A and 14B is explained.

[0076] Figure 6 is a schematic view showing a longitudinal section of the belt 12, the gripper 14, and the frame 16. Figure 7 is a perspective view of a pair of grippers 14A, 14B. In Figure 6 , the state where both of the grippers 14A, 14B are located at the "retracted position" is exemplified.

[0077] As shown in Figure 6 , Figure 7 , the grippers 14A, 14B each have a narrow portion 24A, 24B and a wide portion 26A, 26B as portions different in length (width) in the width direction Y.

[0078] The narrow portions 24A, 24B are portions narrower in width with respect to the wide portions 26A, 26B, and correspond to end portions of the grippers 14A, 14B. The "narrow portion" can also be referred to as the "end portion". The narrow portions 24A, 24B are each disposed at a position shifted in the width direction Y with respect to the pair of belts 12A, 12B. By moving the grippers 14A, 14B in the height direction Z, it is possible to bring the narrow portions 24A, 24B into contact with the main face of the substrate 10. In Figure 6 , the state where neither of the narrow portions 24A, 24B is in contact with the main face of the substrate 10 is shown.

[0079] By setting the portions of the grippers 14A, 14B in contact with the main face of the substrate 10 as the narrow portions 24A, 24B, it is possible to reduce the dead space of the substrate 10 due to contact with the grippers 14A, 14B. Thereby, it is possible to perform processing over a larger range of the substrate 10.

[0080] The wide portions 26A, 26B are portions wider in width with respect to the narrow portions 24A, 24B, and have the gripper driving portions 20A, 20B connected thereto. By providing such wide portions 26A, 26B, it is possible to improve the strength of the grippers 14A, 14B. Also, by connecting the wide portions 26A, 26B with the gripper driving portions 20A, 20B, it is possible to firmly connect the grippers 14A, 14B with the gripper driving portions 20A, 20B.

[0081] As shown in Figure 7 , the grippers 14A, 14B each have a shape extending in the length direction in the conveyance direction X similarly to the frame 16. The narrow portions 24A, 24B have a shape continuous in the length direction, and with respect thereto, the wide portions 26A, 26B have a shape with the central portion in the length direction missing. In the space 29 missing in the wide portions 26A, 26B, the pulleys of the belt driving portion 18, the belts 12A, 12B, and the like of the belt driving portion 18 are disposed (not shown). Figure 5). Thus, it is possible to configure the belt drive 18 while effectively utilizing the space.

[0082] Next, the relationship between the belt drive 18 and the frame drive 22 will be described. Figure 8 The relationship between the belt drive 18 and the frame drive 22 will be described.

[0083] Figure 8 is a perspective view schematically showing the belt drive 18 and the frame drive 22.

[0084] As shown in Figure 8 , the belt drive 18 includes pulleys 27A, 27B, pinions (first gears) 28A, 28B, a large gear (second gear) 30, and a belt 32.

[0085] The pulleys 27A, 27B are pulleys that are engaged with the belts 12A, 12B, respectively. The pinions 28A, 28B are gears that rotate integrally with the pulleys 27A, 27B, respectively. The large gear 30 is a gear that is engaged with both the pinions 28A, 28B. The belt 32 is a belt that rotates the large gear 30, and is driven to rotate by a motor that is not shown.

[0086] The pulley 27A and the pinion 28A constitute a belt drive 18A, and the pulley 27B and the pinion 28B constitute a belt drive 18B.

[0087] According to the above-described structure, the large gear 30 rotates due to the rotational drive of the belt 32, and transmits the rotational force to the pinions 28A, 28B that are engaged with the large gear 30, respectively, so that the pulleys 27A, 27B rotate in synchronization. The pair of belts 12A, 12B are simultaneously rotated by the rotation of the pulleys 27A, 27B, and one of the belts 12A, 12B is brought into contact with the substrate 10, so that the substrate 10 is carried in the carrying direction X.

[0088] The frame drive 22 is provided as a structure coaxial with the large gear 30 of the belt drive 18. As shown in Figure 8 , the frame drive 22 includes a fastening link 34, a belt 36, and a rotating shaft 38.

[0089] The fastening link 34 is a portion for fastening and linking the rotating shaft 38 to the frame 16. The rotational force of the rotating shaft 38 is transmitted to the frame 16 via the fastening link 34.

[0090] The belt 36 is a belt for rotating the rotating shaft 38 and the fastening link 34, and is driven to rotate by a working cylinder or the like that is not shown. The rotating shaft 38 is a rod-shaped member engaged with the belt 36, and the fastening link 34 is connected to a front end portion of the rotating shaft 38.

[0091] The rotation shaft 38 is disposed inside the belt 32 of the belt driving section 18 and the large gear 30, and is disposed coaxially with the large gear 30. The rotation shaft 38 is not engaged with each component of the belt driving section 18 in the rotation direction, so that the rotation force of the rotation shaft 38 is not transmitted to the belt driving section 18. Similarly, each component of the belt driving section 18 is not engaged with the frame driving section 22, so that the rotation force of the belt driving section 18 is not transmitted to the frame driving section 22. In this way, the belt driving section 18 and the frame driving section 22 can be disposed coaxially, and they can be independently operated.

[0092] Using Figure 9 and Figures 10A-10F A substrate flipping method of flipping the substrate 10 using the substrate flipping apparatus 1 having the above-described structure, and a method of performing a predetermined process on the main surface of the substrate 10 while flipping the substrate 10 will be described.

[0093] Figure 9 is a flowchart for describing the method. Figure 9 Each step shown in the flowchart of Figures 10A-10F is executed by the control section 8, for example. Figure 9 is each explanatory view when each step is executed in accordance with the flowchart of Figures 10A-10F is a schematic view in which the frame 16, the gripper driving sections 20A and 20B are omitted.

[0094] As shown in Figure 9 , the control section 8 first carries in the substrate 10 to the flipping section 4 (S1). Specifically, the substrate 10 is carried in the carrying direction X using the carrying section 2 shown in Figures 1-3 , and is handed over to the flipping section 4. The flipping section 4 that receives the substrate 10 carries the substrate 10 in the carrying direction X and positions the substrate 10 at a predetermined position in a state in which the substrate 10 is supported from below by the belt 12A disposed on the lower side as shown in Figure 10A . In the state shown in Figure 10A , the first main surface 48 of the substrate 10 faces the upper side, and the second main surface 50 faces the lower side.

[0095] Note that the switching of the heights of the grippers 14A and 14B is performed before the step S1. Specifically, the lower gripper 14A is disposed at the retreat position, and the upper gripper 14B is disposed at the intermediate position (refer to Figure 10A ).

[0096] The control section 8 raises the lower gripper 14A to grip the substrate 10 (S2). Specifically, as shown in Figure 10AAs indicated by arrow A1, the lower clamp 14A is raised by the drive of the clamp drive unit 20A. This causes the end of the clamp 14A, i.e., the narrow portion 24A, to abut against the second main surface 50 of the substrate 10. In this state, the clamp 14A is further raised, thereby... Figure 10B As shown, the first main surface 48 of the substrate 10 abuts against the narrow portion 24B of the clamp 14B located on the upper side. The clamp 14A is positioned in a protruding position, thereby clamping and holding the substrate 10 by a pair of clamps 14A and 14B. The substrate 10 is held at a height position H1 that does not contact the pair of clamps 12A and 12B.

[0097] The control unit 8 processes the first main surface 48 of the substrate 10 (S3). Specifically, while the substrate 10 is held by a pair of clamps 14A and 14B, the control unit 8 processes the first main surface 48 of the substrate 10. Figure 1 The processing unit 6 shown performs a prescribed process on the first main surface 48 of the substrate 10 located below (refer to arrow A2). The prescribed process can be any process such as laser processing for printing barcodes, automatic optical inspection, etc.

[0098] The control unit 8 flips the substrate 10 (S4). Specifically, after processing of the first main surface 48 is completed, the frame 16 is rotated in the rotation direction R using the aforementioned frame drive unit 22, thereby flipping the substrate 10. The substrate 10 is flipped while being held in a position by a pair of clamps 14A and 14B that does not contact the pair of straps 12A and 12B.

[0099] According to this substrate flipping method, unlike the case where the substrate 10 is flipped while being held by a pair of belts 12A and 12B, the pulleys and gears (belt drive unit 18) engaged with belts 12A and 12B do not rotate along with the flipping of the substrate 10. This prevents unnecessary rotation of the pulleys and gears from causing positional displacement of the substrate 10. As a result, malfunctions of the substrate flipping device 1 can be prevented, thereby improving the reliability of the substrate flipping device 1.

[0100] Figure 10C The flipped state is shown. The vertical positions of the pair of straps 12A and 12B and the pair of clamps 14A and 14B are reversed. Specifically, strap 12A and clamp 14A are positioned on the upper side, and strap 12B and clamp 14B are positioned on the lower side. For the flipped substrate 10, the second main surface 50 is positioned on the upper side, the first main surface 48 is positioned on the lower side, and they are held at the second height position H2 by the pair of clamps 14A and 14B. The second height position H2 in Embodiment 1 is a position lower than the first height position H1.

[0101] The control unit 8 releases the upper clamp 14A from the substrate 10 (S5). Specifically, as shown...Figure 10C The upper gripper 14A is raised using the gripper driving section 20A as indicated by an arrow A3. Thereby, as indicated by an arrow A4, the narrow portion 24A of the upper gripper 14A is brought into contact with the second main surface 50 of the substrate 10, and the substrate 10 is raised by the upper gripper 14A. As a result, as indicated by an arrow A5, the second main surface 50 of the substrate 10 is brought into contact with the narrow portion 24A of the lower gripper 14B. In the state indicated by an arrow A6, the lower gripper 14B is disposed at the protruding position, and the substrate 10 is held by the pair of grippers 14A, 14B at the third height position H3 that is not in contact with the pair of belts 12A, 12B. The third height position H3 is higher than the second height position H2, and is set to the same height position as the first height position Hl in the embodiment 1. Note that the case where the first height position Hl and the third height position H3 are the same height position is not limited to the case where they are completely the same, but also includes the case where there is a slight error. Figure 10D

[0102] The lower gripper 14B is raised using the gripper driving section 20B as indicated by an arrow A4. Thereby, the substrate 10 is raised by the gripper 14B, and the second main surface 50 of the substrate 10 is brought into contact with the narrow portion 24A of the upper gripper 14A as indicated by an arrow A5. In the state indicated by an arrow A6, the narrow portion 24A of the upper gripper 14A is brought into contact with the second main surface 50 of the substrate 10, and the upper gripper 14A is disposed at the intermediate position and released from the substrate 10. Figure 10D Figure 10E Figure 10E

[0103] The second main surface 50 of the substrate 10 is processed by the control section 8 (S7). Specifically, as in step S3, in the state where the substrate 10 is held by the pair of grippers 14A, 14B, the second main surface 50 of the substrate 10 located below is subjected to a prescribed processing using the processing section 6 (refer to an arrow A5). The prescribed processing can be the same processing as in step S3, or can be different processing.

[0104] The upper gripper 14A and the lower gripper 14B are released from the substrate 10 by the control section 8 (S8). Specifically, as indicated by an arrow A6, the lower gripper 14B is lowered using the gripper driving section 20B. Thereby, the contact of the narrow portion 24A of the upper gripper 14A with the second main surface 50 of the substrate 10 is released, and a state where the substrate 10 is supported only by the lower gripper 14B is obtained. The lower gripper 14B is further lowered, and as indicated by an arrow A7, a state where the first main surface 48 of the substrate 10 is supported by the belt 12B is obtained. The contact of the lower gripper 14B with the first main surface 48 of the substrate 10 is also released, and a state where the substrate 10 is supported only by the belt 12B is obtained. The gripper 14B is disposed at the retreat position, and the pair of grippers 14A, 14B is released from the substrate 10. Figure 10E Figure 10F

[0105] ​​​​​​The control section 8 carries out the substrate 10 from the inversion section 4 (S9). Specifically, the belt 12B that supports the substrate 10 is rotated using the belt driving section 18, and the substrate 10 is carried in the carrying direction X. Thus, the substrate 10 is carried out from the inversion section 4.

[0106] According to the above-described flow, a processed substrate 10 that has been processed on both the first main surface 48 and the second main surface 50 while being inverted can be manufactured. In particular, in step S4, the substrate 10 is inverted while being held by the pair of grippers 14A, 14B in a state in which the substrate 10 is not in contact with the pair of belts 12A, 12B. Thus, the pulleys and the gears of the belt driving section 18 that are engaged with the belts 12 do not rotate in conjunction with the inversion of the substrate 10, and the malfunction of the substrate inversion apparatus 1 can be suppressed, and thus the reliability of the substrate inversion apparatus 1 can be improved.

[0107] In addition, in the above-described structure, a motor (not shown) that drives the carrying belts 12A, 12B is fixed to a fixed section (non-inversion section) of the substrate inversion apparatus 1 that does not perform the inversion operation. Thus, compared with a case in which the motor is fixed to the inversion section of the substrate inversion apparatus 1 that performs the inversion operation, the weight of the inversion section can be reduced, and thus the substrate inversion time can be shortened. In addition, compared with a case in which the motor is fixed to another location outside the substrate inversion apparatus, the clutch structure of the motor and the belt driving section is not necessary, and the clutch operation that accompanies this is not necessary, and thus the substrate inversion time can also be shortened.

[0108] As described above, in the substrate inversion apparatus 1 of Embodiment 1 and the substrate inversion method using the same, the control section 8 carries the substrate 10 using the belt 12A of the pair of belts 12 that are disposed opposite each other (S1). The control section 8 also raises the end portion of the gripper 14A of the pair of grippers 14 having the grippers 14A, 14B, and thus lifts the substrate 10 supported by the belt 12A from the belt 12A, and the grippers 14A, 14B have end portions (narrow portions 24A, 24B) at positions different from the pair of belts 12 in the width direction Y (S2). The control section 8 also brings the substrate 10 lifted by the gripper 14A into contact with the end portion of the second gripper 14B, and thus clamps and holds the substrate 10 using the end portion of the gripper 14A and the end portion of the gripper 14B (S2). The control section 8 also rotates the pair of grippers 14 and the pair of belts 12 together in a state in which the substrate 10 is held by the pair of grippers 14 at a position not in contact with the pair of belts 12, and thus inverts the substrate 10 (S4).

[0109] According to such a structure and method, the substrate 10 can be flipped over while the state of the belt 12 is made free by flipping over the substrate 10 in a state not in contact with the belt 12. Thus, unnecessary rotation of the belt 12 is prevented, so that malfunction of the substrate flipping device 1 can be suppressed, and thus the reliability of the substrate flipping device 1 can be improved.

[0110] In addition, in the substrate flipping device 1 of Embodiment 1 and the substrate flipping method using the same, the control section 8 performs processing of the first main surface 48 of the substrate 10 in a state where the substrate 10 is held at the first height position H1 not in contact with the pair of belts 12 by the pair of holders 14 before flipping over the substrate 10 (S3).

[0111] According to such a structure and method, processing of the first main surface 48 is performed in a state where the substrate 10 is held by the holders 14, so that the substrate 10 can be processed while being positioned with high accuracy, and thus the processing accuracy of the substrate 10 can be improved.

[0112] In addition, in the substrate flipping device 1 of Embodiment 1 and the substrate flipping method using the same, the control section 8 performs processing of the second main surface 50 of the substrate 10 on the side opposite to the first main surface 48 in a state where the flipped-over substrate 10 is held by the pair of holders 14 (S7).

[0113] According to such a structure and method, processing of the second main surface 50 is performed in a state where the substrate 10 is held by the holders 14, so that the substrate 10 can be processed while being positioned with high accuracy, and thus the processing accuracy of the substrate 10 can be improved.

[0114] In addition, in the substrate flipping device 1 of Embodiment 1 and the substrate flipping method using the same, the flipped-over substrate 10 is held at the second height position H2 lower than the first height position H1 (S4). The control section 8 also raises the end portions of the pair of holders 14 in contact with the substrate 10 held at the second height position H2, and thus holds the substrate 10 at the third height position H3 not in contact with the pair of belts 12 (S5, S6). The control section 8 performs processing of the second main surface 50 of the substrate 10 in a state where the substrate 10 is held at the third height position H3 (S7).

[0115] According to such a structure and method, even in a case where the holding height of the substrate 10 is lowered due to flipping over of the substrate 10, the holding height of the substrate 10 can be adjusted and processing of the substrate 10 can be performed by raising the holders 14A, 14B.

[0116] Further, in the substrate flipping device 1 of Embodiment 1 and the substrate flipping method using the substrate flipping device 1, the first height position H1 is the same as the third height position H3.

[0117] According to such a structure and method, it is possible to keep the upper surface height of the substrate 10 being processed constant.

[0118] (Embodiment 2)

[0119] A substrate flipping device of Embodiment 2 and a substrate flipping method using the substrate flipping device will be described. Note that in Embodiment 2, mainly points different from Embodiment 1 will be described, and the description overlapping with Embodiment 1 will be omitted.

[0120] In Embodiment 2, the substrate is flipped in a state where the substrate is gripped by a pair of belts, unlike Embodiment 1.

[0121] Figure 11 is a front view showing the outline structure of the substrate flipping device 60 of Embodiment 2, Figure 12 is a side view showing the outline structure of the substrate flipping device 60 of Embodiment 2.

[0122] As shown in Figure 11 , Figure 12 , the substrate flipping device 60 of Embodiment 2 includes a first belt 62A, a second belt 62B, a first pulley 64A (not shown in Figure 12 ), a second pulley 64B (not shown in Figure 12 ), a first pulley shaft 66A, a second pulley shaft 66B, a frame 68, a first gear 70, a second gear 72, a first motor 74 (not shown in Figure 11 ), a second motor 76, and a fixing member 78.

[0123] The first belt 62A and the second belt 62B are belts that carry a substrate (not shown) in the carrying direction X. The first belt 62A and the second belt 62B respectively rotate to carry the substrate in the carrying direction X in a state where the substrate is gripped between the first belt 62A and the second belt 62B. In Figure 12 , the first belt 62A and the second belt 62B are omitted from the illustration.

[0124] The first pulley 64A is a pulley engaged with the first belt 62A. The second pulley 64B is a pulley engaged with the second belt 62B. In Figure 11 , the first pulley 64A and the second pulley 64B are omitted from the illustration.

[0125] The first pulley shaft 66A is a shaft that is combined with the first pulley 64A, and the second pulley shaft 66B is a shaft that is combined with the second pulley 64B. The first pulley shaft 66A and the second pulley shaft 66B both pass through the frame 68 in a rotatable state. As shown by a broken line in FIG. 1, the first pulley shaft 66A and the second pulley shaft 66B are connected by a belt in a synchronous rotation manner. Figure 11

[0126] The frame 68 is a member that supports the first pulley shaft 66A and the second pulley shaft 66B so as to be rotatable. As shown in FIG. 1, the frame 68 has a first rotation shaft 80 at a central position thereof, and the first rotation shaft 80 is connected to the first motor 74. Figure 11 Figure 12

[0127] The first motor 74 is a motor for driving the frame 68 to rotate in a rotation direction P with the first rotation shaft 80 as a center. The first motor 74 can be fixed to the fixing member 78 or a member different from the fixing member 78.

[0128] The first pulley shaft 66A has the first gear 70 connected thereto. The first gear 70 is a gear that rotates in synchronization with the first pulley 64A via the first pulley shaft 66A, and is engaged with the second gear 72. The first gear 70 of the embodiment 2 is a gear having a smaller diameter than the second gear 72.

[0129] The second gear 72 is a gear having a larger diameter than the first gear 70, and is connected to the second motor 76.

[0130] The second motor 76 is a motor for driving the second gear 72 to rotate in a rotation direction Q. The second motor 76 has a second rotation shaft 82 connected to the second gear 72, and rotates the second gear 72 with the second rotation shaft 82 as a center. As shown in FIG. 1, the second rotation shaft 82 is provided at a position different from the first rotation shaft 80. Figure 11

[0131] The fixing member 78 is a member that fixes at least the second motor 76, and other members such as the first motor 74 are fixed as needed. The second rotation shaft 82 of the second motor 76 passes through the fixing member 78 in a rotatable state.

[0132] ​​​​According to the above-described structure, when the second motor 76 drives the second gear 72 to rotate in the rotational direction Q, the first gear 70 engaged with the second gear 72 rotates, the first pulley 64A rotates via the first pulley shaft 66A, and thus the first belt 62A engaged with the first pulley 64A rotates. In addition, the second pulley shaft 66B also rotates in synchronization with the rotation of the first pulley shaft 66A, and thus the second pulley 64B rotates via the second pulley shaft 66B, and thus the second belt 62B engaged with the second pulley 64B rotates. In this way, the first belt 62A and the second belt 62B can be caused to rotate in synchronization, and thus the substrate can be transported in the transport direction X in a state in which the substrate is arranged between the first belt 62A and the second belt 62B.

[0133] If the first motor 74 is driven in a state in which the substrate is clamped between the first belt 62A and the second belt 62B, the substrate can be inverted. The use Figures 13A-13C will be described.

[0134] Figures 13A-13C is a variety of overview diagrams for explaining a substrate inversion method of inverting a substrate using the substrate inversion apparatus 60 of Embodiment 2.

[0135] As Figure 13A shown, when the first gear 70 is located at the first rotational position engaged with the second gear 72, the frame 68 is caused to rotate about the first rotational axis 80 in the rotational direction PI using the first motor 74. Along with the rotation of the frame 68, the supported members supported to the frame 68 rotate integrally. The supported members include the first pulley shaft 66A, the second pulley shaft 66B, the first belt 62A, the second belt 62B, and the first gear 70, and on the other hand, do not include the second gear 72, the first motor 74, and the second motor 76.

[0136] Figure 13B shows a state halfway through the rotation. The supported members including the first gear 70 rotate about the first rotational axis 80 together with the frame 68, and in relation to this, the position of the second gear 72 does not change. As Figure 13B shown, the engagement of the first gear 70 with the second gear 72 is released, and the first gear 70 pivots to a position away from the second gear 72.

[0137] Figure 13C shows a state in which the inversion is completed. As Figure 13C shown, the upper and lower positions of the supported members rotating together with the frame 68 are reversed. Specifically, the first belt 62A and the first pulley shaft 66A are located on the lower side, and the second belt 62B and the second pulley shaft 66B are located on the upper side. The substrate clamped by the belts 62A and 62B is inverted. A prescribed process can be performed on the main surface of the substrate after the inversion.

[0138] As Figure 13CAs shown, the first gear 70 is located at the same position as... Figure 13A The first gear 70 engages with the second gear 72 at a different position than the first rotational position.

[0139] First gear 70 Figure 13A , Figure 13C The position shown engages with the second gear 72, in contrast to which the first gear 70 is in... Figure 13B The movement between the first and second rotational positions shown does not engage with the second gear 72. According to this substrate flipping method, the first gear 70, the second gear 72, and other gears, as well as various pulleys, do not rotate with the substrate flipping, thereby preventing unnecessary rotation of the gears and pulleys. Therefore, malfunctions of the substrate flipping device 60 can be suppressed in the same way as in the substrate flipping device 1 of Embodiment 1, thereby improving the reliability of the substrate flipping device 60.

[0140] When the substrate is removed Figure 13C The second rotational position shown is towards Figure 13A When the first rotational position shown is flipped in the opposite direction, the first motor 74 is used to rotate the frame 68 in the opposite direction to the aforementioned rotational direction P1, i.e., rotational direction P2. The first gear 70 also rotates in a state where it is disengaged from the second gear 72 during the movement from the second rotational position toward the first rotational position.

[0141] As described above, the substrate flipping device 60 and substrate flipping method of Embodiment 2 include: a first pulley 64A that engages with a first belt 62A for transporting substrates; a first gear 70 that rotates integrally with the first pulley 64A; a frame 68 that supports the first pulley 64A and the first gear 70 so that they can rotate, and is configured to rotate around a position different from the first pulley 64A and the first gear 70; a second gear 72 that meshes with the first gear 70; a first motor 74 that drives the frame 68 to rotate; and a second motor 76 that drives the second gear 72 to rotate. The first motor 74 and the second motor 76 are fixed to a fixing member 78, which is different from the frame 68. The first gear 70 can rotate between a first rotational position and a second rotational position that meshes with the second gear 72 at different positions, accompanying the rotation of the frame 68 driven by the first motor 74, and can move away from the second gear 72 during the rotation between the first rotational position and the second rotational position.

[0142] According to this structure and method, when the substrate is flipped by the first motor 74, the meshing state of the first gear 70 and the second gear 72 is disengaged, thus preventing the pulleys and gears from unnecessarily rotating along with the substrate flipping. This prevents malfunctions of the substrate flipping device 60, thereby improving its reliability.

[0143] Furthermore, similar to Embodiment 1, the second motor 76, which drives belts 62A and 62B, is fixed to a fixing member 78 of the substrate flipping device 60 that is a fixing part that does not perform flipping operations. Therefore, compared to the case where the second motor 76 is fixed to the flipping part of the substrate flipping device 60 that performs flipping operations, the weight of the flipping part can be reduced, thereby shortening the substrate flipping time. Additionally, compared to the case where the second motor 76 is fixed to a location outside the substrate flipping device, there is no need for a clutch structure between the second motor 76 and the belt drive unit, and no need for the accompanying clutch operation, thus also shortening the substrate flipping time.

[0144] It should be noted that it is also possible to do as follows: Figure 14 As shown, a claw 84 is provided that selectively engages with the first gear 70. The claw 84 is a component that selectively engages with the first gear 70 when the belts 62A and 62B, pulleys 64A and 64B that hold the substrate during the flipping operation, and the first gear 70 are in a free state. By engaging the claw 84 with the first gear 70, which has been disengaged from the second gear 72, positional displacement of the first gear 70 during substrate flipping can be suppressed. Therefore, positional displacement of the belts 62A and 62B can be suppressed, thereby suppressing positional displacement of the substrate.

[0145] The present invention has been described above using embodiments 1 and 2, but the present invention is not limited to embodiments 1 and 2. For example, in embodiment 1, if using... Figure 10F As explained, the case where the substrate 10 is removed from the flipping section 4 while it is flipped over has been described, but this is not a limitation. It is also possible to remove it from the flipping section 4... Figure 10F The state shown causes the substrate 10 to be further flipped, returning to Figure 10A Based on the state shown, the substrate 10 is removed.

[0146] Furthermore, in Embodiment 2, the case where the diameter of the first gear 70 is smaller than the diameter of the second gear 72 was described, but the size relationship of the gears is not limited to this. As long as the structure allows the first gear 70 to approximately abut against the second gear 72 in the orthogonal direction of the tangent when rotated 180 degrees, gears 70 and 72 of any diameter can be used.

[0147] The present application is fully described in reference to the drawings and in connection with the preferred embodiments, but various modifications, alterations, and permutations of these embodiments can be made and will be apparent to those skilled in the art. Such modifications, alterations, and permutations should be construed as falling within the scope of the present application as set forth in the following claims. Additionally, the various elements of the embodiments can be combined, rearranged, and / or adapted in various ways without departing from the scope or spirit of the present application.

[0148] Note that, by appropriately combining any of the various modified examples of the above-described embodiments, the effects possessed by the respective modified examples can be obtained.

[0149] Industrial Applicability

[0150] The present application can be applied to any substrate flipping device and substrate flipping method using the same.

Claims

1. A substrate flipping device, which flips a substrate, wherein, The substrate flipping device includes: A pair of belts having a first belt and a second belt disposed opposite to each other, and the substrate being transported by either belt; A pair of clamps, having a first clamp and a second clamp, the first clamp and the second clamp having ends at positions different in the width direction from the pair of straps, and the pair of clamps causing the end of either clamp to rise, lifting the substrate supported by the strap, thereby clamping and holding the substrate by means of the end of the first clamp and the end of the second clamp; A rotary drive unit that causes the pair of clamps and the pair of belts to rotate together; Control Department; and The processing unit performs processing on the main surface of the substrate inside the substrate flipping device. The control unit, while holding the substrate in a position where it does not contact the pair of straps using the pair of clamps, uses the rotation drive unit to rotate the pair of clamps and the pair of straps, thereby flipping the substrate. Before or after flipping the substrate, the control unit processes the main surface of the substrate using the processing unit while holding the substrate at a height position that does not contact the pair of straps using the pair of clamps.

2. The substrate flipping device according to claim 1, wherein, Before flipping the substrate, the control unit processes the first main surface of the substrate using the processing unit while holding the substrate at a first height position without contacting the pair of grippers using the pair of grippers, and processes the second main surface of the substrate on the side opposite to the first main surface using the processing unit while holding the flipped substrate using the pair of grippers.

3. The substrate flipping device according to claim 2, wherein, The flipped substrate is held at a second height position, lower than the first height position, by the pair of clamps. The control unit raises the ends of the pair of clamps that are in contact with the substrate held at the second height position, thereby holding the substrate at a third height position where it is not in contact with the pair of straps. The control unit uses the processing unit to perform the processing on the second main surface of the substrate while holding the substrate at the third height position.

4. The substrate flipping device according to claim 3, wherein, The first height position is the same as the third height position.

5. A substrate flipping method, wherein, The substrate flipping method includes the following steps: The substrate is transported using the first belt of a pair of belts having a first belt and a second belt arranged opposite to each other; The end of the first clamp, which has a first clamp and a second clamp, is raised to lift the substrate supported on the first belt, thereby lifting the substrate from the first belt. The first clamp and the second clamp have ends at positions different from the pair of belts in the width direction. The substrate, which has been lifted by the first clamp, comes into contact with the end of the second clamp, thereby clamping and holding the substrate using the ends of the first and second clamps. While holding the substrate in a position where it does not contact the pair of straps using the pair of clamps, the pair of clamps and the pair of straps are rotated together, thereby flipping the substrate. as well as Before or after flipping the substrate, while holding the substrate at a height position that does not contact the pair of straps using the pair of clamps, the main surface of the substrate is processed inside the substrate flipping device using the processing unit.

6. The substrate flipping method according to claim 5, wherein, The substrate flipping method performs the following steps: before flipping the substrate, while holding the substrate at a first height position without contacting the pair of clamps, the processing unit processes the first main surface of the substrate; and while holding the flipped substrate with the pair of clamps, the processing unit processes the second main surface of the substrate on the side opposite to the first main surface.

7. The substrate flipping method according to claim 6, wherein, The substrate, after being flipped, is held at a second height position below the first height position. The substrate flipping method performs the following steps: raising the ends of the pair of grippers that are in contact with the substrate held at the second height position, thereby holding the substrate at a third height position where it is not in contact with the pair of grippers. The processing of the second main surface of the substrate is performed while the substrate is held at the third height position.

8. The substrate flipping method according to claim 7, wherein, The first height position is the same as the third height position.

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