High-voltage power supply control system with adjustable balance
By designing a high-voltage power control system, the problem that the external high-voltage power supply of the electrostatic eliminator is difficult to adjust online, and the balance adjustment of the electrostatic eliminator under different loads is achieved to meet user needs, especially in the production of semiconductors and electronic components.
Patent Information
- Application Number
- CN202210047157.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-01-17
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2042-01-17
AI Technical Summary
The existing external high-voltage power supply of electrostatic eliminators is difficult to achieve online adjustment of balance, resulting in the unsatisfactory effect of eliminating static electricity under different loads and cannot meet user needs.
A high-voltage power control system including high-voltage leakage magnetic transformer, balance adjustment module, detection module, central processing module, display module, control module, feedback module and compensation module is designed to realize real-time adjustment and balance control of the output voltage through detection and feedback mechanisms.
The online adjustment of the balance of the electrostatic eliminator under different loads is achieved to achieve the effect of static elimination satisfactory for the user, especially in the environment where the electrostatic elimination is high in the production of semiconductor and electronic components.
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Figure CN114200996B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of static electricity elimination, and particularly to a high-voltage power supply control system with adjustable balance degree. Background Art
[0002] The existing external high-voltage power supply of static eliminators is difficult to achieve online adjustment of the balance degree, which is determined by the magnetic-electric conversion characteristics of the transformer. In order to achieve an ideal static electricity elimination effect and good balance degree for the static eliminator, generally, the balance degree of the static eliminator is adjusted by the method of fixed bucking in the second half cycle. And due to different loads, the effects are not the same, not ideal, and the balance degree is not good, failing to meet the user satisfaction. Summary of the Invention
[0003] According to an embodiment of the present invention, there is provided a high-voltage power supply control system with adjustable balance degree, including:
[0004] A high-voltage leakage magnetic transformer, which is connected to an external load and is used for voltage conversion;
[0005] A balance adjustment module, which is connected to the high-voltage leakage magnetic transformer and is used for adjusting the bias of the output voltage;
[0006] A detection module, which is connected to the high-voltage leakage magnetic transformer and is used for detecting the output voltage;
[0007] A central processing module, which is connected to the detection module and is used for data processing;
[0008] A display module, which is connected to the central processing module and is used for data display;
[0009] A control module, which is connected to the balance adjustment module and the central processing module;
[0010] A feedback module, which is connected to the high-voltage leakage magnetic transformer, the central processing module and the balance adjustment module;
[0011] A compensation module, which is connected to the high-voltage leakage magnetic transformer;
[0012] A power supply, which is connected to the balance adjustment module, the detection module, the central processing module, the display module, the control module and the feedback module.
[0013] Furthermore, the balance adjustment module includes:
[0014] A DC bias generator, which is connected to the high-voltage leakage magnetic transformer, the control module, the power supply and the feedback module;
[0015] An oscillator, which is connected to the high-voltage leakage magnetic transformer, the feedback module and the power supply.
[0016] Further, the detection module includes:
[0017] A high-voltage sampler, which is connected to the high-voltage magnetic leakage transformer;
[0018] An A / D converter, which is connected to the high-voltage sampler, the central processing module, and the power supply.
[0019] Further, the detection module further includes:
[0020] An overload and short-circuit detector, which is connected to the high-voltage magnetic leakage transformer, the central processing module, and the power supply.
[0021] Further, the central processing module includes: an MCU, and the MCU is connected to the detection module, the display module, the control module, the power supply, and the feedback module.
[0022] Further, the display module includes: a display panel, and the display panel is connected to the central processing module and the power supply.
[0023] Further, the control module includes: a control panel, and the control panel is connected to the balance adjustment module, the central processing module, and the power supply.
[0024] Further, the feedback module includes:
[0025] A D / A converter, which is connected to the central processing module and the power supply;
[0026] An oscillation bias voltage unit, which is connected to the D / A converter, the balance adjustment module, and the power supply;
[0027] A high-voltage feedback unit, which is connected to the oscillation bias voltage unit, the high-voltage magnetic leakage transformer, and the power supply.
[0028] Further, the compensation module includes:
[0029] An LC compensation network, which is connected to the high-voltage magnetic leakage transformer.
[0030] Further, it further includes: a remote control interface, and the remote control interface is connected to the central processing module and the power supply.
[0031] According to the high-voltage power supply control system with adjustable balance degree in the embodiment of the present invention, this case changes the problem that it is difficult to achieve online adjustment of the balance degree of the external high-voltage power supply of the existing static eliminator, thereby solving the problem of online adjustment of the static elimination balance degree of the static eliminator under different loads, and achieving a satisfactory static elimination effect for users. Especially in environments with high requirements for static elimination balance degree in industries such as semiconductor and electronic component production, it plays a key role in large-load static elimination.
[0032] It is to be understood that both the foregoing general description and the following detailed description are exemplary and intended to provide further explanation of the claimed technology. BRIEF DESCRIPTION OF THE DRAWINGS
[0033] Figure 1 FIG. is a block diagram of a high-voltage power supply control system with adjustable balance according to an embodiment of the present invention. DETAILED DESCRIPTION
[0034] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings to further illustrate the present invention.
[0035] First, in combination with Figure 1 A high-voltage power supply control system with adjustable balance according to an embodiment of the present invention will be described, which is used to adjust the balance of the high-voltage power supply and has a wide range of application scenarios.
[0036] As Figure 1 shown, the high-voltage power supply control system with adjustable balance according to the embodiment of the present invention includes a high-voltage magnetic leakage transformer 1, a balance adjustment module, a detection module, a central processing module, a display module, a control module, a feedback module, a compensation module, and a power supply 10.
[0037] Specifically, as Figure 1 shown, in this embodiment, the high-voltage magnetic leakage transformer 1 is connected to an external load for voltage conversion. The load can be an electrostatic eliminator to achieve the conversion from low voltage 24V to high voltage 7.5KV. The balance adjustment module is connected to the high-voltage magnetic leakage transformer 1 for adjusting the bias of the output voltage. The detection module is connected to the high-voltage magnetic leakage transformer 1 for detecting the output voltage. The central processing module is connected to the detection module for data processing. The display module is connected to the central processing module for data display. The control module is connected to the balance adjustment module and the central processing module for system operation, stop, voltage increase, voltage decrease, voltage setting, and ion balance adjustment processing. The feedback module is connected to the high-voltage magnetic leakage transformer 1, the central processing module, and the balance adjustment module. The compensation module is connected to the high-voltage magnetic leakage transformer 1. The compensation module is used to output the frequency compensation of the high-voltage magnetic leakage transformer 1 to correct its waveform to be close to a sine wave. The power supply 10 is connected to the balance adjustment module, the detection module, the central processing module, the display module, and the control module. The power supply 10 is externally connected to 220V alternating current and is used to generate corresponding DC working voltages for the balance adjustment module, the detection module, the central processing module, the display module, and the control module to ensure the operation of the system.
[0038] Further, as Figure 1As shown in the figure, in this embodiment, the balance adjustment module includes: a DC bias generator 21 and an oscillator 22. The DC bias generator 21 is connected to the high-voltage magnetic leakage transformer 1, the power supply 10, the control module, and the feedback module. The DC bias generator 21 is used to adjust the bias of the high voltage output by the high-voltage magnetic leakage transformer 1 to adjust the ion balance. The oscillator 22 is connected to the high-voltage magnetic leakage transformer 1, the feedback module, and the power supply 10. The oscillator 22 generates a vibration amplitude of 50HZ. The oscillator 22 is used to output the excitation source of the primary coil of the high-voltage magnetic leakage transformer 1. Among them, the power supply 10 provides +24V voltage for both the DC bias generator 21 and the oscillator 22.
[0039] Further, as Figure 1 shown in the figure, in this embodiment, the detection module includes: a high-voltage sampler 31 and an A / D converter 32. The high-voltage sampler 31 is connected to the high-voltage magnetic leakage transformer 1. The high-voltage sampler 31 is used to sample the high voltage output by the high-voltage magnetic leakage transformer 1 and transmit it to the A / D converter 32. The A / D converter 32 is connected to the high-voltage sampler 31, the central processing module, and the power supply 10. The power supply 10 provides ±12V voltage for the A / D converter 32. The A / D converter 32 performs the conversion from analog signal to digital signal and provides it to the MCU 41 for comparison and calculation.
[0040] Further, as Figure 1 shown in the figure, in this embodiment, the detection module further includes: an overload and short-circuit detector 33. The overload and short-circuit detector 33 is connected to the high-voltage magnetic leakage transformer 1, the central processing module, and the power supply 10, and is used for circuit protection. When abnormal conditions such as overload and short circuit are detected, the signal is transmitted to the MCU 41 for protection processing. Among them, the power supply 10 provides +5V voltage for the overload and short-circuit detector 33.
[0041] Further, as Figure 1 shown in the figure, in this embodiment, the central processing module includes: an MCU 41. The MCU 41 is connected to the detection module, the display module, the control module, the power supply 10, and the feedback module. The power supply 10 provides +5V voltage for the MCU 41. The MCU 41 is used for system control to implement functions such as calculation and comparison.
[0042] Further, as Figure 1 shown in the figure, in this embodiment, the display module includes: a display panel 51. The display panel 51 is connected to the central processing module and the power supply 10. The power supply 10 provides +5V voltage for the display panel 51. The display panel 51 is used to display the output voltage, fault code, and working status.
[0043] Further, as Figure 1As shown in the figure, in this embodiment, the control module includes: a control panel 61, which is connected to the balance adjustment module, the central processing module, and the power supply 10. The power supply 10 provides a +5V voltage for the control panel 61. The control panel 61 is used for system operation, stop, voltage increase, voltage decrease, voltage setting, and ion balance degree adjustment processing.
[0044] Further, as Figure 1 shown in the figure, in this embodiment, the feedback module includes: a D / A converter 71, an oscillation bias voltage unit 72, and a high-voltage feedback unit 73. The D / A converter 71 is connected to the central processing module and the power supply 10. The D / A converter 71 is used for converting digital signals to analog signals. The set voltage is converted into an analog quantity by the digital quantity given by the MCU 41 through the D / A converter 71 to control the bias voltage of the oscillator. The oscillation bias voltage unit 72 is connected to the D / A converter 71, the balance adjustment module, and the power supply 10. The oscillation bias voltage unit 72 is used to output the working voltage for the oscillator 22. The high-voltage feedback unit 73 is connected to the oscillation bias voltage unit 72, the high-voltage leakage magnetic transformer 1, and the power supply 10, and is used for high-voltage sampling to control the excitation signal input to the high-voltage transformer. Among them, the power supply 10 provides a +5V voltage for the D / A converter 71, and the power supply 10 provides a +24V voltage for both the oscillation bias voltage unit 72 and the high-voltage feedback unit 73.
[0045] Further, as Figure 1 shown in the figure, in this embodiment, the compensation module includes: an LC compensation network 81, which is connected to the high-voltage leakage magnetic transformer 1 and is used for outputting the frequency compensation of the high-voltage leakage magnetic transformer 1 to correct its waveform to be close to a sine wave.
[0046] Further, as Figure 1 shown in the figure, in this embodiment, the high-voltage power supply control system with adjustable balance degree of the embodiment of the present invention further includes: a remote control interface 91, which is connected to the central processing module and the power supply 10 and is used for remote control of the system. Among them, the power supply 10 provides a 5V voltage for the remote control interface 91.
[0047] In use, the output bias is generated by the DC bias generator 21 and superimposed on the high voltage output by the high voltage leakage magnetic transformer 1. The magnitude of the bias is adjusted and controlled through the control panel 61. To achieve adjustable amplitude of the output voltage of the high voltage leakage magnetic transformer 1, it is accomplished by utilizing the transmission characteristics of the transformer to map and control the amplitude of the input stage, which is completed by the oscillating bias voltage unit 72 and the oscillator 22. The output voltage command issued by the MCU 41, along with the feedback signal from the D / A converter 71 and the high voltage feedback unit 73, determines the amplitude of the oscillator 22, that is, controls the excitation signal applied to the primary of the high voltage leakage magnetic transformer 1, thereby controlling the output voltage. When the high voltage leakage magnetic transformer 1 outputs voltage, the output voltage can be collected by the high voltage sampler 31 and sent to the MCU 41 through the A / D converter 32 to detect the stability of the output voltage, and is displayed through the display panel 51. In case of overload or short circuit, it is sent to the MCU 41 through the overload short circuit detector 33 to turn off the high voltage output, realizing closed-loop control.
[0048] As described above, with reference to Figure 1 The high voltage power supply control system with adjustable balance according to the embodiment of the present invention has been described. This case changes the problem that it is difficult to achieve online adjustment of the balance degree of the existing external high voltage power supply of the static eliminator, thereby solving the problem of online adjustment of the static elimination balance degree of the static eliminator under different loads and achieving a satisfactory static elimination effect for users. Especially in environments with high requirements for static elimination balance degree in industries such as semiconductor and electronic component production, it plays a key role in static elimination for large loads.
[0049] It should be noted that in this specification, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, the elements defined by the statement "comprising..." do not exclude the existence of additional identical elements in the process, method, article or device including the elements.
[0050] Although the content of the present invention has been introduced in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the present invention. After those skilled in the art have read the above content, various modifications and substitutions to the present invention will be obvious. Therefore, the protection scope of the present invention should be defined by the appended claims.
Claims
1. A high-voltage power supply control system with adjustable balance, characterized in that, Comprising: A high-voltage leakage magnetic transformer, which is connected to an external load and used for voltage conversion; A balance adjustment module, which is connected to the high-voltage leakage magnetic transformer and used for adjusting the bias of the output voltage; A detection module, which is connected to the high-voltage leakage magnetic transformer and used for detecting the output voltage; A central processing module, which is connected to the detection module and used for data processing; A display module, which is connected to the central processing module and used for data display; A control module, which is connected to the balance adjustment module and the central processing module; A feedback module, which is connected to the high-voltage leakage magnetic transformer, the central processing module and the balance adjustment module; A compensation module, which is connected to the high-voltage leakage magnetic transformer; A power supply, which is connected to the balance adjustment module, the detection module, the central processing module, the display module, the control module and the feedback module; The balance adjustment module comprises: A DC bias generator, which is connected to the high-voltage leakage magnetic transformer, the control module, the power supply and the feedback module; An oscillator, which is connected to the high-voltage leakage magnetic transformer, the feedback module and the power supply; The detection module comprises: A high-voltage sampler, which is connected to the high-voltage leakage magnetic transformer; An A / D converter, which is connected to the high-voltage sampler, the central processing module and the power supply.
2. The high-voltage power supply control system with adjustable balance as claimed in claim 1, wherein, The detection module further comprises: An overload and short-circuit detector, which is connected to the high-voltage leakage magnetic transformer, the central processing module and the power supply.
3. The high-voltage power supply control system with adjustable balance as claimed in claim 1, wherein, The central processing module comprises: an MCU, which is connected to the detection module, the display module, the control module, the power supply and the feedback module.
4. The high-voltage power supply control system with adjustable balance as described in claim 1, characterized in that, The display module comprises: a display panel, which is connected to the central processing module and the power supply.
5. The high-voltage power supply control system with adjustable balance as claimed in claim 1, wherein The control module comprises: a control panel, which is connected to the balance adjustment module, the central processing module and the power supply.
6. The high-voltage power supply control system with adjustable balance as claimed in claim 1, wherein The feedback module comprises: A D / A converter, which is connected to the central processing module and the power supply; An oscillation bias voltage unit, which is connected to the D / A converter, the balance adjustment module and the power supply; A high-voltage feedback unit, which is connected to the oscillation bias voltage unit, the high-voltage leakage magnetic transformer and the power supply.
7. The high-voltage power supply control system with adjustable balance as described in claim 1, characterized in that, The compensation module comprises: An LC compensation network, which is connected to the high-voltage leakage magnetic transformer.
8. The high-voltage power supply control system with adjustable balance as claimed in claim 1, wherein, It further comprises: a remote control interface, which is connected to the central processing module and the power supply.
Citation Information
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