Systems for enhancing plasma spectral intensity and reproducibility and methods of use thereof

Abstract

The application relates to the technical field of plasma equipment, in particular to a system for enhancing plasma spectrum intensity and repeatability and a use method thereof, and aims to solve the problem of low energy of plasma formed on a sample surface, which leads to low plasma spectrum intensity and repeatability. The system comprises a shell with a containing cavity, a laser, a spectrum detector, an image collector and a plasma energy increaser, the shell has multiple different shell walls, the shell walls are provided with through holes communicating between the outside and the containing cavity, the laser, the image collector and the spectrum detector are respectively arranged at the through holes of the different shell walls, and are respectively used for generating plasma on a sample surface, collecting images of the plasma and detecting spectra of the plasma, and the plasma energy increaser arranged on the shell can increase the energy of the plasma, thereby enhancing the spectrum intensity and repeatability of the plasma.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of plasma equipment, in particular to a system for enhancing plasma spectrum intensity and repeatability and a method for using the same. BACKGROUND

[0002] Plasma is a state of matter consisting of a neutral gas containing a significant number of free electrons and ions, which is widely present in the universe and is often regarded as the fourth state of matter, known as the plasma state.

[0003] Laser Induced Breakdown Spectroscopy (LIBS) technology forms a plasma on the surface of a sample by focusing a pulsed laser on the surface of the sample, and then analyzes the plasma emission spectrum to determine the material composition and content of the sample. In related technologies, a LIBS system includes a laser emitting device, a sample clamping device, an image acquisition device, and a spectrometer. The laser emitting device emits pulsed laser light to the surface of the sample to form a plasma. The image acquisition device and the spectrometer respectively acquire an image and a spectrum of the plasma after the pulsed laser is focused on the surface of the sample. The material composition and content of the sample are determined by analyzing the acquired image and spectrum of the plasma.

[0004] However, the energy of the plasma formed on the surface of the sample is low, resulting in low plasma spectrum intensity and repeatability. SUMMARY

[0005] The present application provides a system for enhancing plasma spectrum intensity and repeatability and a method for using the same, aiming to solve the problem of low energy of the plasma formed on the surface of the sample, resulting in low plasma spectrum intensity and repeatability.

[0006] To achieve the above-mentioned purpose, in a first aspect, the present application provides a system for enhancing plasma spectrum intensity and repeatability, comprising a shell, a laser, a spectrum detector, an image acquisition device, and a plasma energy increaser. The plasma energy increaser is installed in the shell, and the shell has a receiving cavity inside. The shell has a plurality of different shell walls, and the shell walls are provided with through holes communicating between the outside and the receiving cavity. At least one of the through holes of the shell wall is a sample delivery port.

[0007] The laser, the spectrum detector, and the image acquisition device are respectively installed at the through holes of different shell walls.

[0008] The system for enhancing the intensity and repeatability of plasma spectrum provided by the application comprises a shell with a containing cavity, a laser, a spectrum detector, an image collector and a plasma energy increaser, the shell has a plurality of different shell walls, the shell walls are provided with through holes for communication between the outside and the containing cavity, the through hole on at least one shell wall is a sample delivery port, and the sample is delivered into the containing cavity through the sample delivery port, the laser, the image collector and the spectrum detector are respectively installed at the through holes of different shell walls and are respectively used for generating plasma on the surface of the sample, collecting the image of the plasma and detecting the spectrum of the plasma, and the plasma energy increaser added on the shell can increase the energy of the plasma, thereby enhancing the intensity and repeatability of the spectrum of the plasma.

[0009] In the system for enhancing the intensity and repeatability of plasma spectrum, optionally, the system further comprises a sample clamping mechanism, the sample clamping mechanism comprises an operating member, a clamping connecting member and a sample clamping member, and the sample clamping member is used for clamping the sample to be measured.

[0010] The sample clamping member is located in the containing cavity, the operating member is located outside the containing cavity, the first end of the clamping connecting member is connected with the sample clamping member, and the second end of the clamping connecting member passes through the sample delivery port and is connected with the operating member.

[0011] In the system for enhancing the intensity and repeatability of plasma spectrum, optionally, the plasma energy increaser comprises a magnetic field adjuster, and the magnetic field adjuster is installed in the containing cavity of the shell.

[0012] The magnetic field adjuster comprises a magnet mounting member, two magnets, two adjusting members and two magnet clamping members, the two magnet clamping members are respectively located on the opposite sides of the magnet mounting member, the two magnets are respectively clamped in the two magnet clamping members, and the two adjusting members are respectively arranged close to the two magnet clamping members and are used for adjusting the distance between the two magnet clamping members.

[0013] The two magnets are respectively located on the opposite sides of the sample clamping member.

[0014] In the system for enhancing the intensity and repeatability of plasma spectrum, optionally, the plasma energy increaser comprises an auxiliary laser, and the auxiliary laser is installed at the through hole of the shell wall.

[0015] The laser emission time of the auxiliary laser lags behind the laser emission time of the laser.

[0016] In the system for enhancing the intensity and repeatability of plasma spectrum, optionally, the auxiliary laser and the laser are installed at the same through hole, and the laser light path of the auxiliary laser is parallel to or coincides with the laser light path of the laser.

[0017] Or, the auxiliary laser and the laser are respectively installed at different through holes, and the laser light path of the auxiliary laser is perpendicular to the laser light path of the laser.

[0018] In the system for enhancing the intensity and repeatability of plasma spectrum, optionally, the plasma energy increaser comprises a vacuum regulator, and the vacuum regulator is installed at the through hole of the shell wall.

[0019] The vacuum regulator has a suction end, and the suction end is in communication with the through hole.

[0020] In the system for enhancing the intensity and repeatability of plasma spectrum, optionally, the system further comprises a light emitter, and a light emitting end of the light emitter faces one of the through holes on the shell wall.

[0021] And / or, the system further comprises a viewing window, and the viewing window is arranged at another through hole on the shell wall.

[0022] In the system for enhancing the intensity and repeatability of plasma spectrum, optionally, the system further comprises a gas regulator, and the gas regulator comprises a multi-way valve and a plurality of gas chambers, the multi-way valve has a plurality of gas inlets and one gas outlet, the plurality of gas inlets of the multi-way valve are in one-to-one correspondence with the plurality of gas chambers, and the gas outlet of the multi-way valve is in communication with one of the through holes on the shell wall.

[0023] In the system for enhancing the intensity and repeatability of plasma spectrum, optionally, the system further comprises a driving mechanism, and the driving mechanism comprises a three-coordinate axis moving workbench and a fixed clamping piece, and the fixed clamping piece is connected to a movement output end of the three-coordinate axis moving workbench.

[0024] The sample clamping mechanism further comprises a telescopic assembly, and the telescopic assembly comprises a first mounting piece, a flexible piece and a second mounting piece connected in sequence, the first mounting piece is connected to the shell wall, and the second mounting piece is connected to the fixed clamping piece and the operating piece respectively.

[0025] In a second aspect, the application provides a use method of a system for enhancing the intensity and repeatability of plasma spectrum, and the use method is applied to the system for enhancing the intensity and repeatability of plasma spectrum, and the use method comprises the following steps.

[0026] Placing a sample to be tested in a containing cavity of the system for enhancing the intensity and repeatability of plasma spectrum;

[0027] Emitting laser to a surface of the sample to be tested and forming plasma;

[0028] Increasing the energy of the plasma by using a plasma energy increaser;

[0029] Obtaining an image of the plasma and determining a spectrum of the plasma.

[0030] The use method of the system for enhancing plasma spectrum intensity and repeatability provided in the application comprises the following steps: placing a sample to be measured in a containing cavity of the system for enhancing plasma spectrum intensity and repeatability, emitting laser to the surface of the sample to be measured and forming plasma, increasing the energy of the plasma by using a plasma energy increaser, acquiring an image of the plasma, and determining the spectrum of the plasma, wherein the energy of the plasma is increased by the plasma energy increaser, and then the spectrum intensity and repeatability of the plasma are enhanced.

[0031] The configuration of the application and other application purposes and beneficial effects thereof will be more apparent and easy to understand through the description of the preferred embodiments in combination with the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can also be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0033] Figure 1 A schematic diagram of the system for enhancing plasma spectrum intensity and repeatability provided in the embodiments of the application;

[0034] Figure 2 A partial structure schematic diagram of the system for enhancing plasma spectrum intensity and repeatability provided in the embodiments of the application;

[0035] Figure 3 A partial structure schematic diagram of the system for enhancing plasma spectrum intensity and repeatability provided in the embodiments of the application; Figure 2 A side view of the system for enhancing plasma spectrum intensity and repeatability provided in the embodiments of the application;

[0036] Figure 4 A partial structure schematic diagram of the system for enhancing plasma spectrum intensity and repeatability provided in the embodiments of the application; Figure 3 An A-A cross-sectional view of the system for enhancing plasma spectrum intensity and repeatability provided in the embodiments of the application;

[0037] Figure 5 An assembly diagram of the magnetic field adjuster and the sample clamping mechanism of the system for enhancing plasma spectrum intensity and repeatability provided in the embodiments of the application;

[0038] Figure 6 A structure schematic diagram of the sample clamping mechanism of the system for enhancing plasma spectrum intensity and repeatability provided in the embodiments of the application;

[0039] Figure 7 A flowchart of the use method of the system for enhancing plasma spectrum intensity and repeatability provided in the embodiments of the application.

[0040] REFERENCE SIGNS

[0041] 100 - housing; 110 - accommodating cavity;

[0042] 120 - through hole; 130 - observation window;

[0043] 140 - end cover; 141 - through hole;

[0044] 150 - cover body; 160 - base;

[0045] 170 - top cover; 180 - light-transmitting cover;

[0046] 190 - light-transmitting flange; 200 - laser;

[0047] 300 - spectrum detector; 400 - image collector;

[0048] 410 - first image collector; 420 - second image collector;

[0049] 500 - plasma energy increaser; 510 - magnetic field adjuster;

[0050] 511 - magnet mounting member; 512 - magnet;

[0051] 513 - adjuster; 514 - magnet clamping member;

[0052] 515 - mounting seat; 520 - auxiliary laser;

[0053] 530 - vacuum adjuster; 531 - suction end;

[0054] 600 - sample clamping mechanism; 610 - operating member;

[0055] 620 - clamping connecting member; 630 - sample clamping member;

[0056] 640 - first mounting member; 650 - flexible member;

[0057] 660 - second mounting member; 700 - driving mechanism;

[0058] 710 - three-coordinate axis moving workbench; 711 - first direction adjuster;

[0059] 712 - second direction adjuster; 713 - third direction adjuster;

[0060] 714 - guide rail; 715 - first direction fine adjuster;

[0061] 716 - second direction fine adjuster; 720 - fixed clamping member;

[0062] 800 - light emitter; 900 - gas regulator. DETAILED DESCRIPTION

[0063] Plasma is a state of matter consisting mainly of free electrons and charged ions, which exists widely in the universe, is often regarded as the fourth state of matter, and is called plasma state, or "super-gaseous state", also known as "plasma body". Laser-induced breakdown spectroscopy (LIBS) technology forms plasma on the surface of a sample by focusing an ultrashort pulse laser, and then analyzes the emission spectrum of the plasma to determine the material composition and content of the sample. The energy density of the ultrashort pulse laser after focusing is high, and it can excite any state of matter (solid, liquid, gas) sample to form plasma. In principle, LIBS technology can analyze any state of matter sample. In the related art, a LIBS system includes a laser emitting device, a sample clamping device, an image acquisition device, and a spectrometer. The laser emitting device emits pulsed laser to the surface of the sample to form plasma. The image acquisition device and the spectrometer acquire the image and the spectrum of the plasma, respectively. The material composition and content of the sample are determined by analyzing the acquired image and spectrum of the plasma. However, the plasma formed on the surface of the sample is excited by a single pulse. The excitation energy of the single pulse is low, so that the energy obtained by the plasma is low. There are fewer particles in the plasma that absorb energy to produce radiation light, resulting in low spectral intensity of the plasma. The ratio of the produced radiation light to the randomly collided particles is low, which increases the spectral fluctuation of the plasma, resulting in low spectral repeatability of the plasma.

[0064] Based on the above technical problems, the present application provides a system for enhancing the spectral intensity and repeatability of plasma and a method for using the same. The system includes a shell having a receiving cavity, a laser, a spectrum detector, an image collector, and a plasma energy increaser. The shell has a plurality of different shell walls. The shell walls are provided with through holes communicating between the outside and the receiving cavity. The through holes in at least one shell wall are sample delivery ports. The sample is delivered into the receiving cavity through the sample delivery ports. The laser, the image collector, and the spectrum detector are respectively installed at the through holes of different shell walls, and are respectively used to generate plasma on the surface of the sample, collect the image of the plasma, and detect the spectrum of the plasma. By additionally providing the plasma energy increaser on the shell, the energy of the plasma can be increased, and the spectral intensity and repeatability of the plasma can be enhanced.

[0065] In order to make the objects, technical solutions and advantages of the present application clearer, the following will be combined with the preferred embodiments of the present application and the accompanying drawings to further specifically describe the technical solutions in the embodiments of the present application. In the accompanying drawings, the same or similar notations represent the same or similar components or components with the same or similar functions. The described embodiments are part of the embodiments of the present application, rather than all the embodiments of the present application. The embodiments described below by referring to the accompanying drawings are exemplary and are intended to explain the present application, and cannot be understood as a limitation of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application. The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0066] Figure 1 A schematic diagram of the system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiments of the present application. Figure 2 A schematic diagram of the system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiments of the present application. Figure 3 A schematic diagram of the system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiments of the present application. Figure 2 A side view of the system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiments of the present application. Figure 4 A schematic diagram of the system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiments of the present application. Figure 3 An A-A sectional view of the system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiments of the present application. Figure 5 An assembly diagram of the magnetic field adjuster and the sample clamping mechanism of the system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiments of the present application. Figure 6 A schematic diagram of the sample clamping mechanism of the system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiments of the present application.

[0067] Referring to FIG. 1, Figures 1 to 6 The system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiments of the present application comprises a shell 100, a laser 200, a spectrum detector 300, an image collector 400 and a plasma energy increaser 500. The plasma energy increaser 500 is installed on the shell 100. The shell 100 has a containing cavity 110 inside. The shell 100 has multiple shell walls with different directions. The shell walls are provided with through holes 120 which communicate the outside with the containing cavity 110. At least one of the through holes 120 on the shell walls is a sample delivery port. The laser 200, the spectrum detector 300 and the image collector 400 are respectively installed at the through holes 120 of the different shell walls.

[0068] The system for enhancing the intensity and repeatability of plasma spectrum provided by the application comprises a shell 100 with a containing cavity 110, a laser 200, a spectrum detector 300, an image collector 400 and a plasma energy increaser 500, the shell 100 has multiple different shell walls, the shell walls are provided with through holes 120 for communicating the outside with the containing cavity 110, the through holes 120 on at least one shell wall are sample delivery ports, and the sample is delivered into the containing cavity 110 through the sample delivery ports, the laser 200, the image collector 400 and the spectrum detector 300 are respectively installed at the through holes 120 of different shell walls, and are respectively used for generating plasma on the surface of the sample, collecting the image of the plasma and detecting the spectrum of the plasma, the energy of the plasma can be increased by additionally arranging the plasma energy increaser 500 on the shell 100, so as to enhance the intensity and repeatability of the spectrum of the plasma.

[0069] It should be noted that, in use, the sample to be measured is delivered into the containing cavity 110 through the sample delivery ports on the shell 100, the pulsed laser is emitted to the surface of the sample by the laser 200 to form plasma, the flame image of the plasma is collected by the image collector 400, the spectrum of the plasma is detected by the spectrum detector 300, and the material composition and content of the sample are determined by analyzing the flame image and the spectrum of the plasma. In order to analyze the flame image more comprehensively and accurately, the image collector 400 can comprise a first image collector 410 and a second image collector 420, the first image collector 410 is opposite to the excited surface of the sample to be measured, and is used for shooting the flame image of the front of the plasma, and the second image collector 420 is opposite to the side of the sample to be measured, and is used for shooting the flame image of the side of the plasma. For example, the first image collector 410 and the second image collector 420 can be cameras, video recorders or other devices with photographing functions, which are not limited in the embodiment.

[0070] After the pulsed laser of the laser 200 reaches the sample to be tested in the containing cavity 110, the sample near the light spot is heated, vaporized and forms a plasma, the particles in the plasma absorb energy to produce radiation, and then the plasma gradually cools down. The plasma only exists in a high-energy state, so the lifetime is extremely short. Due to the low input energy of single-pulse excitation, the energy of the formed plasma is low, the proportion of particles in the plasma that produce radiation by excitation and random collision is low, resulting in poor spectral intensity and repeatability of the plasma. Increasing the energy of the plasma can make more particles in the plasma absorb energy to produce radiation, thereby enhancing the spectral intensity of the plasma; increasing the energy of the plasma can also increase the proportion of particles that produce radiation by random collision, reduce the spectral fluctuation of the plasma, and thereby enhance the spectral repeatability of the plasma. Among them, increasing the energy of the plasma can be regarded as increasing the temperature of the plasma in the present application, which will not be described below.

[0071] As an implementable embodiment, the sample clamping mechanism 600 is further included, which comprises an operating member 610, a clamping connecting member 620 and a sample clamping member 630. The sample clamping member 630 is used for clamping the sample to be tested and is located in the containing cavity 110. The operating member 610 is located outside the containing cavity 110. The first end of the clamping connecting member 620 is connected with the sample clamping member 630, and the second end of the clamping connecting member 620 passes through the sample delivery port and is connected with the operating member 610.

[0072] It should be noted that the sample to be tested located in the containing cavity 110 is clamped by the sample clamping mechanism 600, so that the sample to be tested has a determined working position in the containing cavity 110. When the sample to be tested is excited by pulsed laser, it is beneficial to improve the generation speed and uniformity of the surface plasma of the sample to be tested. When collecting the flame image of the plasma, it is beneficial to avoid image distortion caused by the uncertain position of the sample to be tested. When collecting and detecting the spectrum of the plasma, it is beneficial to obtain a relatively stable spectrum, which can make the detection of the material composition and content of the sample to be tested more accurate.

[0073] Specifically, the sample clamping mechanism 600 comprises an operating member 610, a clamping connecting member 620 and a sample clamping member 630. The sample clamping member 630 is located in the containing cavity 110 and is used for clamping the sample to be tested. The operating member 610 is located outside the containing cavity 110 and is used for changing the relative position of the sample to be tested and the shell 100. One end of the clamping connecting member 620 is connected with the sample clamping member 630, and the other end is connected with the operating member 610. Rotating the operating member 610 can drive the clamping connecting member 620 to clamp the sample to be tested to realize synchronous rotation, thereby changing the installation angle of the sample to be tested in the containing cavity 110.

[0074] As an implementable embodiment, the plasma energy increaser 500 comprises a magnetic field adjuster 510 installed in the accommodating cavity 110 of the shell 100, the magnetic field adjuster 510 comprises a magnet mounting piece 511, two magnets 512, two adjusting pieces 513 and two magnet clamping pieces 514, the two magnet clamping pieces 514 are respectively located on opposite sides of the magnet mounting piece 511, the two magnets 512 are respectively clamped in the two magnet clamping pieces 514, and the two adjusting pieces 513 are respectively arranged close to the two magnet clamping pieces 514 and used for adjusting the distance between the two magnet clamping pieces 514, and the two magnets 512 are respectively located on opposite sides of the sample clamping piece 630.

[0075] It should be noted that the plasma energy increaser 500 comprises the magnetic field adjuster 510, the energy of the plasma is increased by the magnetic field adjuster 510, the magnetic field adjuster 510 is installed in the accommodating cavity 110 of the shell 100, a magnetic field can be generated on both sides of the plasma, and then the plasma is located in the magnetic field. The laser 200 emits pulsed laser to the sample surface, so that the local (focal region) of the sample is heated, vaporized and forms a plasma. Since the charged ions in the plasma are subjected to the Lorentz force in the magnetic field and perform cyclotron motion, the diffusion of the plasma is limited, the gas volume is reduced under the condition that the injected laser energy of the system is unchanged, the energy obtained by the plasma is increased, more particles in the plasma can absorb energy to produce radiation, and then the spectral intensity of the plasma is enhanced. The proportion of the generated radiation and the particles subjected to random collision can be increased, the spectral fluctuation of the plasma is reduced, and then the spectral repeatability of the plasma is enhanced. The method for increasing the energy of the plasma by the magnetic field adjuster 510 in the embodiment of the application is defined as a static magnetic field confinement method.

[0076] Specifically, the magnetic field adjuster 510 comprises the magnet mounting piece 511, the two magnets 512, the two adjusting pieces 513 and the two magnet clamping pieces 514, the two magnet clamping pieces 514 are respectively installed on opposite sides of the magnet mounting piece 511, each magnet clamping piece 514 clamps one magnet 512, the two adjusting pieces 513 are respectively arranged close to the two magnet clamping pieces 514 and used for adjusting the distance between the two magnet clamping pieces 514, and then the size of the magnetic field strength is changed. By arranging the two magnets 512 on opposite sides of the sample clamping piece 630, the magnetic field can act on the plasma generated on the surface of the sample to be tested to increase the energy of the plasma. By reducing the distance between the two magnets 512, the magnetic field strength acting on the plasma can be increased, and then the energy of the plasma is increased. Exemplarily, the magnetic field can be a uniform magnetic field, and the two magnets are magnets with opposite polarities.

[0077] The magnetic field adjuster 510 further comprises a mounting seat 515, the magnet mounting member 511 is mounted on the mounting seat 515, and the mounting seat 515 is mounted on the shell 100. In a possible implementation, the adjusting member 513 can be a screw rod, a threaded hole is formed on the magnet mounting member 511, a first end of the screw rod is rotationally connected with the magnet clamping member 514, a second end of the screw rod passes through the threaded hole and is threadedly connected with the magnet mounting member 511, the first end of the screw rod and the second end of the screw rod are two opposite ends, and the magnetic field intensity is adjusted by rotating the screw rod. In another possible implementation, the adjusting member 513 can also be a telescopic rod, the telescopic rod comprises a fixed part and a movable part, a mounting hole is formed on the magnet mounting member 511, the fixed part of the telescopic rod is fixedly connected in the mounting hole, and the movable part of the telescopic rod is connected with the magnet mounting member 511, and the magnetic field intensity is adjusted by relative telescopic movement of the fixed part and the movable part.

[0078] As an implementable embodiment, the plasma energy increaser 500 comprises an auxiliary laser 520, the auxiliary laser 520 is mounted at the through hole 120 of the shell wall, and the laser emission time of the auxiliary laser 520 lags behind the laser emission time of the laser 200.

[0079] It should be noted that the plasma energy increaser 500 comprises the auxiliary laser 520, the energy of the plasma is increased by the auxiliary laser 520, the auxiliary laser 520 is mounted at the through hole 120 of the shell wall, and the second pulse laser is conveniently emitted to the plasma. The laser emission time of the auxiliary laser 520 lags behind the laser emission time of the laser 200. The first pulse laser is emitted to the sample surface by the laser 200 to heat, vaporize and form the plasma, in the process of forming the plasma, the second pulse laser is emitted to the plasma by the auxiliary laser 520 to heat the plasma again, the energy of the plasma is increased, the lifetime of the plasma is prolonged, more particles in the plasma absorb energy to produce radiation light, and the spectral intensity of the plasma is enhanced; meanwhile, the proportion of the radiation light and the particles in random collision is increased, the spectral fluctuation of the plasma is reduced, and the spectral repeatability of the plasma is enhanced.

[0080] In the embodiment of the present application, the method of increasing the plasma temperature by the auxiliary laser 520 is defined as a double-pulse excitation method. The double-pulse excitation method forms the plasma by emitting the first pulse laser to the sample surface by the laser 200, and emits the second pulse laser to the surface of the plasma by the auxiliary laser 520 in the process of forming the plasma to increase the energy of the plasma.

[0081] As an implementable embodiment, the auxiliary laser 520 is installed at the same through hole 120 as the laser 200, and the laser light path of the auxiliary laser 520 is parallel to or coincides with the laser light path of the laser 200.

[0082] It should be noted that, by arranging the laser light path of the auxiliary laser 520 to be parallel to or coincide with the laser light path of the laser 200, the two lasers can act on the same surface of the sample to be measured, thereby increasing the energy of the plasma. Specifically, the auxiliary laser 520 and the laser 200 can be installed in parallel and at the same horizontal level, so that the laser light paths of the auxiliary laser 520 and the laser 200 are parallel. The auxiliary laser 520 and the laser 200 can be installed in parallel and at the same horizontal level, and a light coupling device is arranged in the laser emission direction of the auxiliary laser 520 and the laser 200, which couples the laser light paths of the laser 520 and the laser 200 by using the light coupling device, thereby realizing the coincidence (coaxiality) of the laser light paths of the laser 520 and the laser 200. For example, the light coupling device can include one or more lenses. In the embodiment of the present application, the method of increasing the energy of the plasma by coaxially exciting the plasma by the auxiliary laser 520 and the laser 200 is defined as the coaxial double-pulse excitation method.

[0083] In another possible implementation, the auxiliary laser 520 and the laser 200 are installed at different through holes 120, respectively, and the laser light path of the auxiliary laser 520 is perpendicular to the laser light path of the laser 200.

[0084] It should be noted that, by arranging the laser light path of the auxiliary laser 520 to be perpendicular to the laser light path of the laser 200, the two lasers can act on two mutually perpendicular surfaces of the sample to be measured, thereby increasing the energy of the plasma. In the embodiment of the present application, the method of increasing the energy of the plasma by exciting the plasma by the auxiliary laser 520 and the laser 200 perpendicularly is defined as the perpendicular double-pulse excitation method.

[0085] As an implementable embodiment, the plasma energy increaser 500 includes a vacuum regulator 530, which is installed at the through hole 120 of the shell wall, and the vacuum regulator 530 has an exhaust end 531 that communicates with the through hole 120.

[0086] It should be noted that the plasma energy increaser 500 includes the vacuum regulator 530, which increases the energy of the plasma by being arranged, and the vacuum regulator 530 has the exhaust end 531 that communicates with the through hole 120, which is beneficial to extract the gas in the containing cavity 110 by installing the vacuum regulator 530 at the through hole 120 of the shell wall. In the embodiment of the present application, the method of increasing the energy of the plasma by the vacuum regulator 530 is defined as the vacuum cavity pressure reduction method.

[0087] It should be further noted that the system for enhancing the intensity and repeatability of the plasma spectrum when heating the sample to be measured by laser satisfies the following energy conservation relationship:

[0088] AE L0 = pV (E v + cAT) (1)

[0089] In formula (1), E L0 represents the energy of the laser injection system, A represents the absorption constant of the vaporized substance, p represents the density of the vaporized substance, V represents the volume of the vaporized substance, E v represents the vaporization enthalpy, c represents the specific heat capacity of the vaporized substance, and AT represents the temperature difference between the vaporization temperature and the room temperature. Laser heating causes the substance around the sample to be measured to vaporize, and the gas expands while the temperature rises. The vaporized substance is the plasma.

[0090] The heating and excitation process of the plasma will push the surrounding air to form a high-density air layer and absorb the subsequent laser energy, resulting in a decrease in the energy absorbed and utilized by the plasma. By extracting the gas in the containing cavity 110 through the vacuum regulator 530, the consumption of the input energy of the system by the air layer can be reduced, the energy of the plasma can be increased, and the spectrum intensity and repeatability of the plasma can be enhanced. However, according to formula (1), by extracting the gas in the containing cavity 110 through the vacuum regulator 530, the pressure of the gas in the containing cavity 110 is reduced, which will increase the vapor diffusion volume of the plasma and thus reduce the plasma temperature (energy). The experiment found that as the gas in the containing cavity 110 is continuously reduced, the air pressure in the containing cavity 110 gradually decreases, but the energy of the plasma first gradually increases and then gradually decreases. Therefore, the use of the vacuum cavity pressure reduction method by the system is not the higher the vacuum degree, the better the enhancement effect on the plasma.

[0091] As an implementable embodiment, the system further comprises a light emitter 800, and the light emitting end of the light emitter 800 faces one through hole 120 on the shell wall.

[0092] It should be noted that by arranging the light emitter 800 and making the light emitting end of the light emitter 800 face one through hole 120 on the shell wall, the sample to be measured can be positioned. In a possible implementation, the light emitter 800 can be a laser pen, and the laser pen can emit red light. The outgoing light ray of the laser pen is directed towards the central axis of the shell 100 and is at the same horizontal height as the center of the sample to be measured. During the process of feeding the sample to be measured into the containing cavity 110, if the red light forms a light spot at the center of the sample to be measured, it indicates that the sample to be measured is installed in place. If the red light does not form a light spot on the sample to be measured or the light spot is not at the center of the sample to be measured, it indicates that the sample to be measured is not installed in place. At this time, the position of the sample to be measured needs to be adjusted until the sample to be measured is installed in place.

[0093] In a possible implementation, the observation window 130 is further included, and the observation window 130 is arranged in another through hole 120 on the shell wall.

[0094] It should be noted that, by arranging the observation window 130 in the through hole 120 on the shell wall, whether the sample to be measured is successfully placed in the accommodating cavity 110 can be observed through the observation window 130, and whether the sample to be measured is clamped in the working position can also be observed through the observation window 130, thereby ensuring that the pulsed laser emitted by the laser 200 can excite and form a plasma on the surface of the sample to be measured.

[0095] As an implementable embodiment, the gas regulator 900 is further included, and the gas regulator 900 includes a multi-way valve and a plurality of gas chambers. The multi-way valve has a plurality of gas inlets and one gas outlet. The plurality of gas inlets of the multi-way valve are in one-to-one correspondence with the plurality of gas chambers, and the gas outlet of the multi-way valve is in communication with one through hole 120 on the shell wall.

[0096] It should be noted that, by connecting the gas regulator 900 to the shell 100, the gas composition in the accommodating cavity 110 can be changed. When detecting the sample to be measured containing elements such as N, S, and C that are easily affected by air, in order to ensure the detection accuracy, the sample to be measured needs to be placed in a vacuum environment for detection to avoid the influence of elements in the air on the accuracy of the detection result. Since the vacuum cavity decompression method is not the higher the vacuum degree, the better the enhancement effect of the plasma, when detecting the sample to be measured containing elements such as N, S, and C, the air in the accommodating cavity 110 should be replaced with inert gas or gas without detection elements, so that the accommodating cavity 110 is in the vacuum degree with the best plasma enhancement effect, thereby more greatly enhancing the spectral intensity and repeatability of the plasma.

[0097] Specifically, the gas regulator 900 can include a multi-way valve and a plurality of gas chambers. Different gases can be stored in each gas chamber. The multi-way valve has a plurality of gas inlets and one gas outlet. The plurality of gas inlets are in one-to-one correspondence with the plurality of gas chambers, and the gas outlet is in communication with one through hole 120 on the shell wall. The gas in the gas chamber can enter the accommodating cavity 110 through the multi-way valve. In a possible implementation, the opening and closing state and the opening degree of all gas inlets and the gas outlet of the multi-way valve can be changed, thereby realizing control of the type of gas entering the accommodating cavity 110 and the ratio of different gases.

[0098] As an implementable embodiment, the driving mechanism 700 is further included, the driving mechanism 700 includes a three-coordinate axis moving workbench 710 and a fixed clamping piece 720, the fixed clamping piece 720 is connected to the movement output end of the three-coordinate axis moving workbench 710, and the sample clamping mechanism 600 further includes a telescopic assembly, the telescopic assembly includes a first mounting piece 640, a flexible piece 650 and a second mounting piece 660 connected in sequence, the first mounting piece 640 is connected with the shell wall, and the second mounting piece 660 is connected with the fixed clamping piece 720 and the operating piece 610 respectively.

[0099] It should be noted that, as shown in Figure 2 The driving mechanism 700 is set up, the driving mechanism 700 includes a three-coordinate axis moving workbench 710 and a fixed clamping piece 720, the fixed clamping piece 720 is connected to the movement output end of the three-coordinate axis moving workbench 710, the three-coordinate axis moving workbench 710 includes a guide rail 714, a first direction adjusting piece 711, a second direction adjusting piece 712 and a third direction adjusting piece 713, the first direction adjusting piece 711 is installed at the movement output end of the guide rail 714, the third direction adjusting piece 713 is installed at the movement output end of the first direction adjusting piece 711, and the second direction adjusting piece 712 is installed at the movement output end of the third direction adjusting piece 713.

[0100] Wherein, rotating the first direction adjusting piece 711 can drive the fixed clamping piece 720 to move along the X-axis direction, rotating the second direction adjusting piece 712 can drive the fixed clamping piece 720 to move along the Y-axis direction, and rotating the third direction adjusting piece 713 can drive the fixed clamping piece 720 to move along the Z-axis direction, the Z-axis direction being the feeding direction of the sample. Exemplarily, the first direction adjusting piece 711, the second direction adjusting piece 712 and the third direction adjusting piece 713 can be micrometers, and can be controlled by electricity and / or manually. As shown in Figure 3 In a possible implementation, the three-coordinate axis moving workbench 710 can further include a first direction fine adjusting piece 715 and a second direction fine adjusting piece 716, and exemplarily, the first direction fine adjusting piece 715 and the second direction fine adjusting piece 716 can be micrometers. When the three-coordinate axis moving workbench 710 simultaneously includes the direction adjusting piece and the direction fine adjusting piece, the direction adjusting piece can be controlled by electricity for rapid movement of the fixed clamping piece 720, and the direction fine adjusting piece can be controlled manually for accurate adjustment of the position of the fixed clamping piece 720. A scale is arranged on the guide rail 714, which can display the feeding distance of the fixed clamping piece 720, and can also reflect whether the sample to be measured reaches the working position.

[0101] Specifically, the sample clamping mechanism 600 further comprises a telescopic assembly having a closed cavity inside, and the closed cavity is in communication with the accommodating cavity 110. The telescopic assembly comprises a first mounting member 640, a flexible member 650 and a second mounting member 660 connected in sequence. The first mounting member 640 is connected with the shell wall and is used to be fixedly installed with the shell 100. The second mounting member 660 is detachably fixedly connected with the fixed clamping member 720, and the second mounting member 660 is driven to move synchronously by the movement of the fixed clamping member 720. The second mounting member 660 is rotationally connected with the operating member 610, and the second mounting member 660 is rotated around the Z-axis by rotating the operating member 610. Specifically, the first mounting member 640 can be a flange plate, the flexible member 650 can be a vacuum bellows, and the second mounting member 660 can be a hollow pipe with one end blocked. The operating member 610 can be a manual rotary disc, and can also be an electric rotary disc.

[0102] As an implementable embodiment, the shell 100 comprises an end cover 140, a cover body 150 and a base 160. The cover body 150 is arranged on the base 160, and the end cover 140 is covered on the cover body 150. The cover body 150 is a hollow structure, the outer wall surface of the cover body 150 is an octagonal prism, and the inner wall surface of the cover body 150 is a cylindrical surface. The end cover 140, the cover body 150 and the base 160 enclose the accommodating cavity 110.

[0103] Specifically, the end cover 140 is provided with a through hole 141 in communication with the accommodating cavity 110 and the outside. A top cover 170 is arranged on the top of the end cover 140 and covers the through hole 141 of the end cover 140. By arranging the detachable top cover 170 on the end cover 140, the magnetic field regulator 510 located in the accommodating cavity 110 can be adjusted, so as to change the strength of the magnetic field. At least one through hole 120 in communication with the accommodating cavity 110 and the outside is arranged on each wall surface of the octagonal prism outer wall surface of the cover body 150.

[0104] In a possible implementation manner, referring to Figure 1 It is shown that the cover body 150 is respectively connected with the sample clamping mechanism 600, the observation window 130, the second image collector 420, the spectrum detector 300, the laser 200 and the first image collector 410, the vacuum regulator 530 and the light emitter 800, the auxiliary laser 520 and the gas regulator 900 in the through holes 120 distributed along the clockwise direction. Among them, the laser 200 and the first image collector 410 are located on the same wall surface of the cover body 150, and the vacuum regulator 530 and the light emitter 800 are located on the same wall surface of the cover body 150.

[0105] In another possible implementation manner, referring to Figure 2 and Figure 3As shown, the laser 200, the spectrum detector 300, the first image collector 410, the second image collector 420, the auxiliary laser 520 and the light emitter 800 can also not be connected with the through hole 120 on the cover 150, but be arranged outside the cover 150 and have a certain spacing with the cover 150, but need to be directed to the through hole 120, at this time, in order to ensure the sealing of the containing cavity and the light transmittance of the through hole 120, a light-transmitting cover 180 or a light-transmitting flange 190 can be arranged in the through hole 120, so that the laser 200 can emit pulsed laser to the surface of the sample to be measured in the containing cavity 110, the spectrum detector 300 can collect and detect the spectrum of the plasma, the first image collector 410 can collect the front view of the plasma flame, the second image collector 420 can collect the side view of the plasma flame, the auxiliary laser 520 can secondarily heat the plasma during the formation of the plasma, and the light emitter 800 can emit an indicating red light for positioning the sample to be measured.

[0106] Figure 7 The flowchart of the method for using the system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiment of the application.

[0107] With reference to Figure 7 As shown, the method for using the system for enhancing the intensity and repeatability of plasma spectrum provided by the embodiment of the application is applied to the system for enhancing the intensity and repeatability of plasma spectrum described above, and the method for using includes the following steps.

[0108] S1, placing a sample to be measured in a containing cavity of the system for enhancing the intensity and repeatability of plasma spectrum.

[0109] It should be noted that the sample to be measured can be transported into the containing cavity 110 by the three-coordinate-axis moving workbench 710, and the working position of the sample to be measured in the containing cavity 110 can be adjusted.

[0110] S2, emitting laser to the surface of the sample to be measured and forming plasma.

[0111] It should be noted that the sample to be measured can be transported into the containing cavity 110 by the three-coordinate-axis moving workbench 710, and the working position of the sample to be measured in the containing cavity 110 can be adjusted.

[0112] S3, increasing the energy of the plasma by using a plasma energy increaser.

[0113] It should be noted that the method of increasing the energy of the plasma by the plasma energy increaser can include one or more of the double-pulse excitation method, the static magnetic field confinement method and the vacuum cavity pressure reduction method. For different detection targets (e.g., detection of different elements in a sample), different plasma energy enhancement methods can be used, i.e., one or a combination of the double-pulse excitation method, the static magnetic field confinement method and the vacuum cavity pressure reduction method is used to achieve the best plasma energy enhancement effect. It is not that the more enhancement methods used, the better the enhancement effect of the plasma energy.

[0114] S4, acquiring an image of the plasma and determining a spectrum of the plasma.

[0115] It should be noted that the image of the plasma can be acquired by the image collector 400 to acquire the morphological characteristics (e.g., volume, brightness, etc.) of the flame of the plasma when one or a combination of the double-pulse excitation method, the static magnetic field confinement method and the vacuum cavity pressure reduction method is used, and to perform comparative analysis thereon. The spectrum of the plasma can be acquired and detected by the spectrum detector 300 to acquire the spectral line intensity and fluctuation when one or a combination of the double-pulse excitation method, the static magnetic field confinement method and the vacuum cavity pressure reduction method is used, and to perform comparative analysis thereon.

[0116] The use method of the system for enhancing the spectrum intensity and repeatability of plasma provided in the present application includes placing a sample to be detected in the containing cavity 110 of the system for enhancing the spectrum intensity and repeatability of plasma, emitting laser to the surface of the sample to be detected and forming plasma, increasing the energy of the plasma by the plasma energy increaser 500, acquiring an image of the plasma, and determining a spectrum of the plasma. By increasing the energy of the plasma by the plasma energy increaser 500, more particles in the plasma can absorb energy to transition and generate radiation, thereby enhancing the spectrum intensity of the plasma. Increasing the energy of the plasma can also increase the proportion of radiation and randomly colliding particles, reduce the spectrum fluctuation of the plasma, and thereby enhance the spectrum repeatability of the plasma.

[0117] The present application uses five plasma energy increasing methods, i.e., single-pulse excitation method, double-pulse excitation method, static magnetic field confinement method, vacuum cavity pressure reduction method, combination of double-pulse excitation method and static magnetic field confinement method, and combination of double-pulse excitation method and static magnetic field confinement method, to respectively perform experiments on the spectrum intensity and repeatability of soil samples. The experimental results are shown in Table 1.

[0118] Table 1: Average characteristic spectral line intensity and relative standard deviation under five plasma energy increasing methods

[0119]

[0120] In Table 1, Pb 405.78 nm, Fe 406.33 nm, and V 413.19 nm respectively represent three elements in the sample and the wavelength of the characteristic spectrum of the element. SP represents a single pulse excitation method, DP represents a double pulse excitation method, Mag represents a static magnetic field constraint method, Vac-DP-Mag represents a combination of a vacuum cavity pressure reduction method, a double pulse excitation method, and a static magnetic field constraint method, DP-Mag represents a combination of a double pulse excitation method and a static magnetic field constraint method, Avg represents the average spectral line intensity of the characteristic spectrum, RSD represents the relative standard deviation, which is the ratio of the standard deviation of the spectral line intensity to the average spectral line intensity, and is used to reflect the volatility of the spectrum. The greater the RSD, the greater the volatility of the spectrum, and the lower the repeatability of the spectrum. Conversely, the smaller the RSD, the smaller the volatility of the spectrum, and the higher the repeatability of the spectrum.

[0121] As can be seen from Table 1, compared with the use of SP, the use of DP-Mag enhances the Avg of the Pb element in the soil by 3.17 times, and the enhancement effect of the spectral intensity is the most significant compared with the other four methods. The RSD of the Pb element in the soil decreases from 22.3% to 17.09%, and the volatility of the spectrum is the smallest compared with the other four methods, that is, the enhancement effect of the repeatability of the spectrum is the most significant.

[0122] Compared with the use of SP, the use of Mag enhances the Avg of the Fe element in the soil by 1.48 times, and the enhancement effect of the spectral intensity is the most significant compared with the other four methods. The RSD of the Fe element in the soil decreases from 18.03% to 5.57%, and the volatility of the spectrum is the smallest compared with the other four methods, that is, the enhancement effect of the repeatability of the spectrum is the most significant.

[0123] Compared with the use of SP, the use of Vac-DP-Mag enhances the Avg of the V element in the soil by 3.71 times, and the enhancement effect of the spectral intensity is the most significant compared with the other four methods. The RSD of the V element in the soil decreases from 23.6% to 2.25%, and the volatility of the spectrum is the smallest compared with the other four methods, that is, the enhancement effect of the repeatability of the spectrum is the most significant.

[0124] It can be seen that different methods should be used to enhance the intensity and repeatability of the plasma spectrum for different detection targets (such as the detection of different elements in the sample), that is, one or a combination of the double pulse excitation method, the static magnetic field constraint method, and the vacuum cavity pressure reduction method should be used to achieve the best enhancement effect of the intensity and repeatability of the plasma spectrum. The more enhancement methods used, the better the enhancement effect of the intensity and repeatability of the plasma spectrum.

[0125] In the description of the embodiments of the present application, it should be understood that, unless specifically defined and limited otherwise, the terms "mount", "connect", "connection" should be interpreted broadly, for example, can be fixedly connected, can be indirectly connected through an intermediate medium, can be internal communication of two elements or interaction relationship of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. The terms "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specified.

[0126] The terms "first", "second", "third", "fourth" and the like in the description of the present application and claims and the above drawings are used to distinguish similar objects, and do not necessarily indicate a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not necessarily limit to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0127] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A system for enhancing plasma spectral intensity and reproducibility, comprising: The system comprises a shell, a laser, a spectrum detector, an image collector, a gas regulator, a magnetic field regulator, an auxiliary laser and a vacuum regulator, the shell has a containing cavity inside, the shell has a plurality of different shell walls, a plurality of through holes are formed on the shell walls to communicate the outside with the containing cavity, and at least one of the through holes on the shell walls is a sample delivery port; The magnetic field regulator comprises a magnet mounting member, two magnets, two adjusting members and two magnet clamping members, the two magnets are respectively located on opposite sides of the sample to be measured, the two magnets are respectively clamped in the two magnet clamping members, the two adjusting members are respectively arranged close to the two magnet clamping members to adjust the distance between the two magnet clamping members, and the adjusting member is a screw rod or a telescopic rod. The system further comprises a light coupling device, which is located at the laser emission direction of the auxiliary laser and the laser, and is used for coupling the laser and the laser light path of the auxiliary laser. The gas regulator comprises a multi-way valve and a plurality of gas chambers, the multi-way valve has a plurality of gas inlets and one gas outlet, the plurality of gas inlets of the multi-way valve are in one-to-one correspondence with the plurality of gas chambers, and the gas outlet of the multi-way valve is in communication with one of the through holes on the shell wall; all the gas inlets and the gas outlet of the multi-way valve can change the opening and closing state and the opening degree. The magnetic field regulator is installed in the containing cavity, the gas regulator, the auxiliary laser, the vacuum regulator, the laser, the spectrum detector and the image collector are respectively installed at the through holes of different shell walls; when the sample to be measured comprises lead Pb element, the auxiliary laser and the magnetic field regulator participate in the work of enhancing the intensity and repeatability of plasma spectrum; When the sample to be measured comprises iron Fe element, the magnetic field regulator participates in the work of enhancing the intensity and repeatability of plasma spectrum; When the sample to be measured comprises vanadium V element, the vacuum regulator, the auxiliary laser and the magnetic field regulator participate in the work of enhancing the intensity and repeatability of plasma spectrum.

2. The system for enhancing the intensity and reproducibility of plasma spectroscopy of claim 1, wherein, Further comprising a sample clamping mechanism, the sample clamping mechanism comprises an operating member, a clamping connecting member and a sample clamping member, and the sample clamping member is used for clamping the sample to be measured; The sample clamping member is located in the containing cavity, the operating member is located outside the containing cavity, the first end of the clamping connecting member is connected with the sample clamping member, and the second end of the clamping connecting member penetrates through the sample delivery port and is connected with the operating member.

3. The system for enhancing the intensity and reproducibility of plasma spectroscopy of claim 2, wherein, The two magnet clamping members are respectively located on opposite sides of the magnet mounting member, and the two magnets are respectively located on opposite sides of the sample clamping member.

4. The system for enhancing the intensity and reproducibility of plasma spectroscopy of claim 3, wherein, The laser emission time of the auxiliary laser lags behind the laser emission time of the laser.

5. The system for enhancing the intensity and repeatability of plasma spectrum according to claim 4, wherein When the auxiliary laser and the laser are respectively installed at different through holes, the laser light path of the auxiliary laser is perpendicular to the laser light path of the laser.

6. The system for enhancing the intensity and reproducibility of plasma spectroscopy of claim 5, wherein, The vacuum regulator has a gas suction end, and the gas suction end is in communication with the through hole.

7. The system for enhancing the intensity and reproducibility of plasma spectroscopy of any of claims 1-6, wherein, The light emitting end of the light emitting device faces one of the through holes on the shell wall; And / or, the observation window is arranged on another through hole on the shell wall.

8. The system for enhancing the intensity and reproducibility of plasma spectroscopy of any one of claims 2-6, wherein, The driving mechanism comprises a three-coordinate axis moving workbench and a fixed clamping piece, and the fixed clamping piece is connected to the movement output end of the three-coordinate axis moving workbench; The sample clamping mechanism further comprises a telescopic assembly, which comprises a first mounting piece, a flexible piece and a second mounting piece connected in sequence, the first mounting piece is connected with the shell wall, and the second mounting piece is connected with the fixed clamping piece and the operating piece respectively.

9. A method of using a system for enhancing plasma spectral intensity and reproducibility, characterized by, The use method is applied to the system for enhancing the intensity and repeatability of plasma spectrum as claimed in any one of claims 1-8, and comprises: Placing the sample to be tested in the accommodating cavity of the system for enhancing the intensity and repeatability of plasma spectrum; Emitting laser to the surface of the sample to be tested and forming plasma; Increasing the energy of the plasma by using a plasma energy increaser; Obtaining the image of the plasma and determining the spectrum of the plasma.

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