Composite workpiece and method of manufacture, apparatus and use thereof

Abstract

The invention relates to a composite workpiece, a method of manufacturing the composite workpiece, an augmented reality eyeglass comprising the composite workpiece and a use of the composite workpiece.

Description

Technical Field

[0001] This invention relates to a composite workpiece, a method for manufacturing the composite workpiece, augmented reality glasses including the composite workpiece, and the use of the composite workpiece. Background Technology

[0002] Augmented reality (AR) is a highly active technology field serving multiple application areas, including entertainment, healthcare, education, architecture, and transportation (to name just a few). Unlike the related virtual reality field, AR typically focuses on tightly integrating multimedia information with real-world sensory input by selectively overlaying digital images onto the viewing window of glasses.

[0003] The viewing window of these glasses is typically made from a wafer with a special structure for guiding light or images. These structures are formed by applying an imprinting process to an untreated wafer. However, during the imprinting process, the forces acting on the wafer are relatively large, which can cause individual wafers to break, resulting in high production costs.

[0004] Therefore, the object of the present invention is to provide an apparatus that overcomes the disadvantages of the prior art, and in particular, makes the wafer imprinting process safer, more reliable and more efficient. Summary of the Invention

[0005] According to a first aspect, the above-mentioned objective is achieved by the present invention, wherein a composite workpiece is provided. The composite workpiece includes: a substrate body, such as, in particular, a wafer; and at least one first coating group;

[0006] The substrate body includes at least one first surface and at least one second surface;

[0007] Wherein, at least a portion of the first surface of the substrate body is convex, at least a portion of the second surface of the substrate body is concave, and wherein, due to the curvature of the first and second surfaces, the composite workpiece, particularly the substrate body, has an arc, the absolute value of which is between 0.1 μm and 50 μm; and

[0008] The first coating group is applied to at least a portion of the first surface of the substrate body.

[0009] Therefore, the present invention is based on a surprising discovery that by providing a first coating group on the side of the substrate body (e.g., a wafer) that is convex due to curvature, the strength of the substrate body to resist forces acting on its concave side can be significantly improved due to the first coating group.

[0010] This, in turn, greatly enhances the resistance of the composite workpiece, allowing it to better withstand the impact of the stamping press during the stamping process. Consequently, the risk of substrate breakage during stamping is significantly reduced. Simultaneously, this results in lower scrap rates and more efficient manufacturing processes, leading to lower overall production costs. Even greater forces can be applied without concern about damaging or destroying the substrate. Furthermore, greater forces can be applied to the substrate during the production of these structures, making their formation more reliable and ultimately improving product quality.

[0011] For example, these structures can be produced using nanoimprint lithography (NIL). To do this, a polymer or another plastic can be spin-coated onto a second surface, preferably covering the entire second surface. The polymer is then pressed into the surface using a punch press, thereby imprinting a lattice structure. The structure can then be cured using a UV process.

[0012] Furthermore, this significantly improves safety. This is because during the stamping process, it is less likely to cause inconspicuous initial damage to the composite workpiece, whereas even when a relatively small force is applied to the substrate material, such initial damage can be the cause of subsequent breakage of the substrate.

[0013] Therefore, chips can be produced more efficiently, reliably, and with higher quality, from which eyeglass windows for augmented reality glasses can be cut.

[0014] This finding is particularly surprising because even with the first coating group exhibiting compressive stress, a beneficial effect of the coated substrate body on resisting forces acting on the second surface can be observed. Conversely, compressive stress would cause tensile stress at the interface of the substrate body, especially when glass is used as the substrate body. However, according to conventional understanding, tensile stress would reduce the surface strength of the substrate body. But by applying the first coating group to the convex surface of the substrate body or wafer, as long as the curvature remains within the aforementioned limits, the resistance to forces acting on the concave surface increases, which is contrary to previous understanding and conventional practice.

[0015] Clearly, on the one hand, there are the inherent unfavorable compressive and tensile stresses in the first coating group and the substrate body, according to conventional thinking; on the other hand, there is the curvature. The combination of these two aspects gives the composite workpiece an overall favorable strength characteristic, which is used to manufacture the lens of augmented reality glasses.

[0016] In other words, in the composite workpiece described in this invention, the overall strength resistance of the composite workpiece to forces acting on the second surface is improved. That is, when subjected to a corresponding external force, the fracture resistance of the composite workpiece increases. The inventors of this application believe that this can be attributed to a change in the strength characteristics of the first surface, which is the result of the synergistic effect of the interaction between the first coating group and the substrate body, and the causal factor of curvature. In particular, the surface strength of the substrate body is also conceivable here.

[0017] When performing surface strength measurements (e.g., via a "ring-to-ring" test), it has been found that if the coating of the first surface of the substrate results in the composite workpiece having a higher surface strength on the coated side than the uncoated substrate or higher than the strength of the still uncoated second surface of the substrate, the surface strength will be significantly higher.

[0018] In this application, the "ring-on-ring" method is preferably carried out in accordance with European standard EN1288-5:2000, particularly according to its part 5. Here, preferably, a load ring with a radius of 6 mm and a support ring with a radius of 30 mm are used.

[0019] Preferably, in the "ring-on-ring" method, the quasi-static force increases continuously and slowly, particularly at a rate of 1 Newton per second.

[0020] Therefore, the strength can be measured by the "ring-on-ring" test method, that is, the surface strength of, for example, the first and / or second surfaces of the substrate body.

[0021] Therefore, the compressive stress present in the first coating group appears to be harmless; on the contrary, according to the inventors' experiments, as long as the coating group has been applied to a convex surface, this compressive stress even seems to lead to a more favorable overall strength value. Thus, it is precisely the structure of these interrelated variables—compressive stress (compressive stress in the first coating group, wherein, preferably, it is assumed that the compressive stress is uniform throughout the first coating group), tensile stress (tensile stress in the substrate body, particularly tensile stress on its first surface), and bow—that has a surprisingly positive effect on the strength of the composite workpiece.

[0022] This makes the composite workpiece described in this invention particularly suitable for manufacturing lenses for augmented reality glasses. This is because, if a preferred surface of the substrate body (i.e., the first surface) is coated accordingly, and the curvature of the composite workpiece is within a certain range, the substrate body will have greater resistance to the forces exerted by the embossing press on the opposing surface (i.e., the second surface).

[0023] Furthermore, relatively thin substrates can also be used to fabricate augmented reality glasses due to their significantly improved strength.

[0024] Preferably, the bow is measured according to SEMI 3D12-0315 2015.

[0025] In one embodiment, a first coating group is applied directly or indirectly to at least a portion of a first surface. When applied directly, the first coating group is in direct contact with the first surface. When applied indirectly, the first coating group is not in direct contact with the first surface. In the case of indirect application, for example, one or more intermediate layers may be provided, specifically sandwiched entirely or partially between the first surface and at least a portion of the first coating group. Optionally, the first coating group is applied directly or indirectly to a portion of the first surface.

[0026] In one embodiment, the substrate body includes at least one first main surface, which includes a first surface as a surface. In one embodiment, the substrate body alternatively or additionally includes at least one second main surface, which is preferably opposite to the first main surface, and the second main surface includes a second surface as a surface. In another alternative or additional embodiment, the substrate body includes at least one side surface, preferably connecting the first and second main surfaces to each other and / or extending the side surface around an exterior, and the side surface includes at least one third surface as a surface, wherein, in particular, the side surface of the substrate body is chamfered, preferably chamfered on both sides.

[0027] In one embodiment, the composite workpiece, particularly the substrate body, has a wafer-like shape or is formed in a wafer-like form. Preferably, the first coating group extends along the thickness direction of the wafer on the substrate body. Optionally, each layer further includes a sublayer.

[0028] In one embodiment, the composite workpiece is an optical composite workpiece, and more particularly an optical layered composite workpiece.

[0029] Therefore, the composite workpiece described in this invention is sometimes particularly suitable as a raw material for manufacturing spectacle lenses in diffractive eyewear technology, especially spectacle lenses for augmented reality glasses.

[0030] The present invention is particularly preferred whether the PVD coating is provided as the first coating group on the substrate body, or when the substrate body is very thin, particularly thinner than 1.5 mm and / or thicker than 0.1 μm, and / or when the strength of the substrate body (e.g., a substrate body made particularly of glass) is not negatively affected, particularly not reduced, despite the presence of the coating group. Preferably, the strength is thus at least unchanged or preferably increased.

[0031] Alternatively or additionally, the first coating group may also be provided with the following characteristics:

[0032] It includes an anti-reflective coating, wherein, in particular, the anti-reflective coating includes titanium;

[0033] It includes: (a) Si3N4, ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, SnO2, indium tin oxide, ZnO2, AlN, a mixed oxide containing at least one of these, a mixed nitride containing at least one of these, or a mixed oxide nitride containing at least one of these; (b) ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, or a mixed oxide containing at least one of these; and / or (c) SiO2, MgF2, and a mixed oxide containing SiO2 and another oxide, preferably a mixed oxide containing SiO2;

[0034] It is coated or can be coated onto the substrate body by vapor deposition and / or sputtering processes;

[0035] It is amorphous; and / or

[0036] Its thickness is less than or equal to 400nm, less than or equal to 350nm, less than or equal to 300nm, less than or equal to 250nm, less than or equal to 200nm, less than or equal to 150nm, less than or equal to 100nm or less than or equal to 50nm, and / or greater than or equal to 50nm, greater than or equal to 100nm, greater than or equal to 150nm, greater than or equal to 200nm, greater than or equal to 250nm or greater than or equal to 300nm;

[0037] Only the first surface of the substrate body is coated with the first coating group;

[0038] and / or

[0039] The second surface of the substrate body is not coated with the first coating group.

[0040] By providing a first coating group as an anti-reflective coating, not only can the strength of the composite workpiece be improved, but its suitability as a raw material for lenses in augmented reality glasses can also be enhanced. This is because in this field, it is generally required that one side of the lens is non-reflective, thereby enabling improved (especially non-reflective) overlay of data superimposed on an external image.

[0041] Preferably, the first coating group can be applied or can be applied to the first surface by a PVD process.

[0042] Surprisingly, it has been recognized that, particularly for PVD-based coatings (e.g., evaporation, ion-assisted evaporation, and sputtering processes), when the process is properly controlled, the coating exhibits low compressive stress (thus generating small tensile stress in the substrate material) while simultaneously increasing the surface strength of the substrate material, especially the surface strength of the first and / or second surfaces. Therefore, such coatings are preferably used in the first coating group.

[0043] In an exemplary first coating group, the strength (i.e., particularly the surface strength) of the coated first surface of the substrate body can thereby be increased by at least 1.1 times, particularly at least 1.5 times, preferably at least 2 times, and preferably at least 4 times. Alternatively or additionally, the strength can thereby be increased by up to 5 times, preferably up to 4 times, and preferably up to 3 times. Alternatively or additionally, the strength can be increased by 1.1 to 5 times, particularly 1.1 to 4 times, preferably 1.2 to 3 times or 1.2 to 2 times.

[0044] Preferably, the aforementioned multiple is considered relative to the uncoated substrate body or even the uncoated second surface of the substrate body.

[0045] Therefore, for forces acting on the second surface, the increase in the substrate bulk resistance strength can be achieved by an equal multiple.

[0046] Here, "PVD" refers to Physical Vapor Deposition. This is an existing technology for coating optical systems and therefore does not require further explanation here.

[0047] By employing a PVD process to produce the first coating group, preferably taking into account the process controls described herein, it is advantageous to obtain coatings with low compressive stress. This is because these coatings exhibit compressive stress. This compressive stress, in turn, causes tensile stress in the substrate at the interface. By forming a correspondingly low bow, the composite workpiece described in this invention can be readily obtained in this way.

[0048] Furthermore, PVD technology is well-suited for achieving precise single-layer coatings and multi-layer coating arrays. This characteristic is particularly advantageous for anti-reflective coatings.

[0049] Surprisingly, the argon content in the primary deposited material of the first coating group leads to an additional increase in the surface strength of the second surface, while also resulting in relatively low compressive stress. Therefore, by controlling the argon content, it is also advantageous to fine-tune the compressive stress in the first coating group. In this case, it has been found that an argon content of no more than 10% by weight, preferably less than 5% by weight, and more preferably less than 2% by weight, is particularly preferred.

[0050] Applying the first coating group only to the first surface or not applying the first coating group to the second surface is highly beneficial for increasing the strength of the resistance to forces acting on the second surface.

[0051] Here, the first coating group preferably has low compressive stress, so that the substrate body does not deform or only undergoes small (further) deformation thanks to the first coating group. Surprisingly, it turns out that when the compressive stress of the coating group causes the substrate body to deform (further), and when the first coating group is still applied to the convex curved surface, the substrate body can better withstand the forces acting on the second surface, provided the curvature is appropriate.

[0052] Preferably, the first coating group does not produce curvature or only produces small additional curvature in the composite workpiece, especially in the substrate body, that is, the curvature of the coated substrate body is at most slightly increased compared to the uncoated substrate body.

[0053] Preferably, the first coating group is suitable for reducing the reflection of incident light on the coated first surface.

[0054] Preferably, the first coating group does not cause degradation of light propagation in the substrate.

[0055] Preferably, the first coating group covers at least 80% of the surface area of ​​the first surface, more preferably at least 90%, more preferably at least 95%, more preferably at least 99%, and most preferably the entire first surface.

[0056] Preferably, the first coating group comprises one or more coatings. Preferably, the first coating group is prepared as a stack of coatings, which are preferably arranged as a stack of coplanar coatings.

[0057] Preferably, the thickness of the first coating group can be determined perpendicular to the first surface.

[0058] Preferably, the first coating group can produce a low reflectivity region.

[0059] Preferably, the low reflectivity region extends between 450 nm and 650 nm. Specifically, relative to the first coating group, the maximum reflectivity in the 450 nm to 650 nm range preferably does not exceed 50% of the maximum reflectivity of the uncoated substrate body in the 450 nm to 650 nm range, preferably does not exceed 40%, and more preferably does not exceed 30%.

[0060] The maximum reflectivity in the range of 450 nm to 650 nm is preferably less than 5%, preferably less than 4%, more preferably less than 3%, more preferably less than 2%, more preferably less than 1.5%, and more preferably less than 1.1%.

[0061] Preferably, the low reflectivity region covers a wide wavelength range. Preferably, there exists a region with a width of at least 175 nm, more preferably at least 200 nm, more preferably at least 225 nm, and even more preferably at least 250 nm, in which the difference between the maximum and minimum reflectivity is less than 1%.

[0062] Preferably, the low reflectivity region is flat. The value of the maximum reflectivity in the 450nm to 650nm range minus the minimum reflectivity in the 450nm to 650nm range is preferably less than 1.5%, more preferably less than 1.0%, and most preferably less than 0.8%.

[0063] Preferably, the first coating group is amorphous. Preferably, the first coating group is composed of amorphous materials. Preferably, the first coating group is non-crystalline. Preferably, the first coating group is non-long-range ordered. Preferably, the first coating group does not have columnar growth. Preferably, the first coating group does not have porous growth. Preferably, the first coating group does not have textured growth. Preferably, the crystalline component included in the first coating group, by volume, does not exceed 25%, preferably not more than 10%, more preferably not more than 5%. In one aspect of this embodiment, the first coating group does not contain crystalline material. In one aspect of this embodiment, the first coating group does not have columnar growth. In one aspect of this embodiment, the first coating group does not have porous growth. In one aspect of this embodiment, the first coating group does not have textured growth. Preferably, the presence of columnar and textured growth can be determined by examining the cross-section using a scanning electron microscope. Preferably, the presence of crystalline material can be determined by Raman spectroscopy.

[0064] Alternatively or additionally, the substrate body may include glass;

[0065] and / or

[0066] The thickness of the substrate body:

[0067] Less than or equal to 2mm, less than or equal to 1.5mm, less than or equal to 1mm, or less than or equal to 0.5mm;

[0068] 0.05 mm or greater than or equal to, 0.07 mm or greater than or equal to, 0.1 mm or greater than or equal to, 0.3 mm or greater than or equal to, 0.5 mm or greater than or equal to, or 1 mm or greater than or equal to;

[0069] and / or

[0070] Between 0.05mm and 2mm, between 0.07mm and 2mm, between 0.1mm and 2mm, between 0.3mm and 2mm, between 0.3mm and 1.5mm, or between 0.3mm and 1mm.

[0071] In the application of augmented reality glasses, the aforementioned thickness of the substrate body is particularly preferred in order to achieve high strength.

[0072] Preferably, the substrate body may be made of or comprise glass. In one embodiment, the glass for the substrate body is preferably niobium phosphate glass. In one embodiment, the glass for the substrate body is preferably lanthanum borate glass. In one embodiment, the glass for the substrate body is preferably bismuth oxide glass. In one embodiment, the glass for the substrate body is preferably silicate-based glass.

[0073] Preferably, the glass group can be one or more selected from niobium phosphate glass, lanthanum borate glass, bismuth oxide glass, and silicate glass. The silicate glass type preferably includes one or more of the following: TiO2, La2O3, Bi2O3, Gd2O3, Nb2O5, Y2O3, Yb2O3, Ta2O5, WO3, GeO2, Ga2O3, ZrO2, BaO, SrO, ZnO, Cs2O, and PbO.

[0074] Preferably, the silicate-based glass comprises at least 30% by weight of SiO2, more preferably at least 40% by weight of SiO2, and even more preferably at least 50% by weight of SiO2. Preferably, the silicate glass comprises at least 80% by weight of SiO2, more preferably at least 70% by weight of SiO2, and even more preferably at least 60% by weight of SiO2. Preferably, the silicate glass comprises 30 to 80% by weight of SiO2, more preferably 40 to 70% by weight of SiO2, and even more preferably 50 to 60% by weight of SiO2. Preferably, the silicate-based glass comprises one or more selected from TiO2, La2O3, Bi2O3, Gd2O3, Nb2O5, Y2O3, Yb2O3, Ta2O5, WO3, GeO2, Ga2O3, ZrO2, BaO, SrO, ZnO, Cs2O, and PbO, with a total amount preferably at least 20% by weight, more preferably at least 30% by weight, more preferably at least 40% by weight, and even more preferably at least 50% by weight. Preferably, the silicate-based glass comprises one or more selected from TiO2, La2O3, Bi2O3, Gd2O3, Nb2O5, Y2O3, Yb2O3, Ta2O5, WO3, GeO2, Ga2O3, ZrO2, BaO, SrO, ZnO, Cs2O, and PbO, with a total amount up to 70% by weight.

[0075] Alternatively, as an alternative or additional location, the following can also be set:

[0076] The strength of the coated first surface of the substrate body, in particular the surface strength, is greater than or equal to the strength of the uncoated second surface of the substrate body.

[0077] The second surface can withstand a greater force than the first surface;

[0078] and / or

[0079] The strength of the first and / or second surface of the substrate body is greater than or equal to 100MPa, 150MPa, 200MPa or 250MPa and / or less than or equal to 1000MPa, 500MPa, 400MPa, 300MPa or 200MPa.

[0080] The strength of the substrate body, particularly the strength of the second surface and the strength of the coated first surface, can be determined, for example, by using the aforementioned "ring-on-ring" test method.

[0081] In particular, in the application of augmented reality glasses, it is especially preferred that the surface strength of the first surface is greater than or equal to 100 MPa, and particularly greater than or equal to 200 MPa, 300 MPa or 400 MPa, so that the embossing press can be applied to the second surface with sufficient force to create a structure on the second surface.

[0082] This is because forces (such as those from an embossing press) act on the second surface, but are ultimately received by the first surface. Therefore, the strength of the first surface (i.e., surface strength) is an important criterion. In this invention, the aforementioned strength can be advantageously designed based on the interaction of the first coating group, the curved substrate body, and the curvature.

[0083] Alternatively or additionally, the first coating group may be provided with compressive stress in at least a portion of its area, wherein, preferably, the compressive stress is:

[0084] Less than or equal to 100 MPa, less than or equal to 70 MPa, less than or equal to 50 MPa, less than or equal to 30 MPa, less than or equal to 20 MPa, or less than or equal to 10 MPa;

[0085] Greater than or equal to 1 MPa, greater than or equal to 10 MPa, greater than or equal to 20 MPa, greater than or equal to 30 MPa, greater than or equal to 50 MPa, greater than or equal to 70 MPa, or greater than or equal to 100 MPa;

[0086] and / or

[0087] It is between 10 MPa and 50 MPa, particularly between 15 MPa and 40 MPa, preferably between 15 MPa and 30 MPa, more preferably between 15 MPa and 25 MPa or between 20 MPa and 30 MPa.

[0088] In the field of augmented reality glasses applications, the aforementioned compressive stress in the first coating group is particularly preferred to achieve a particularly preferred strength value for the composite workpiece, especially the second surface.

[0089] For example, interferometry can be used to measure the deformation of the substrate before and after the first coating layer is applied, thereby assessing and / or determining the compressive stress present in the first coating layer. For example, the "Stoney" formula can be used to achieve this objective.

[0090] However, the positive or negative curvature of the composite workpiece or substrate body is also a suitable metric. The additional curvature after coating, compared to the curvature of the uncoated substrate body, is also a qualitative and / or quantitative metric for the compressive or tensile stress in the first coating group. Preferably, for the purposes of this invention, the "Stoney" formula can be used to determine the stress in each case. The coating group is most effective when the curvature after coating is comparable to that of the uncoated substrate. This is because it is generally expected that coated surfaces, especially when the coating group selectively exhibits compressive stress, will not become more robust. Conversely, it is conventionally expected that glass surfaces coated with the coating group have lower strength, where the coating group exhibits compressive stress.

[0091] Alternatively, an additional landmass can be used to set the bow angle:

[0092] ≥0.3μm, ≥0.5μm, ≥1μm, ≥5μm, ≥15μm, ≥20μm, ≥25μm, ≥30μm, ≥35μm, ≥40μm, or ≥45μm;

[0093] Less than or equal to 50 μm, less than or equal to 45 μm, less than or equal to 40 μm, less than or equal to 35 μm, less than or equal to 30 μm, less than or equal to 25 μm, less than or equal to 20 μm, less than or equal to 15 μm, less than or equal to 10 μm, less than or equal to 5 μm, less than or equal to 3 μm, less than or equal to 2 μm, less than or equal to 1 μm, less than or equal to 0.7 μm, or less than or equal to 0.3 μm;

[0094] and / or

[0095] Between 0.1μm and 40μm, between 0.1μm and 30μm, between 0.1μm and 20μm, between 0.1μm and 10μm, between 0.3μm and 7μm, between 0.3μm and 6μm, between 0.3μm and 5μm, or between 0.3μm and 4μm.

[0096] In the application of augmented reality glasses, the aforementioned curvature is particularly preferred in order to achieve high strength.

[0097] Alternatively or additionally, the following relationships may be set for the Young's modulus E of the substrate material, the Poisson's ratio v of the substrate material, the radius of curvature R of the composite workpiece (especially the substrate), the thickness D of the substrate, the thickness d of the first coating group, and the compressive stress S in the first coating group:

[0098]

[0099] Preferably, the Young's modulus is between 40 GPa and 160 GPa, more preferably between 85 GPa and 130 GPa; and / or the Poisson's ratio is between 0.15 and 0.35, more preferably between 0.2 and 0.3.

[0100] In the application of augmented reality glasses, when the variables of the composite material and its components satisfy the above-mentioned relationship, the strength characteristics of the substrate against forces acting on the second surface can be improved. Therefore, variables can be appropriately selected according to the above settings to obtain particularly beneficial products.

[0101] In a preferred embodiment, for one or more variables in the variable group consisting of Young's modulus E of the substrate body material, Poisson's ratio v of the substrate body material, radius of curvature R of the composite workpiece (especially the substrate body), thickness D of the substrate body, thickness d of the first coating group, and stress (e.g., compressive stress) S in the first coating group, the value ranges of these variables mentioned in the corresponding locations in the specification can be used.

[0102] For example, if HfO2 is used instead of TiO2 with suitable process parameters, tensile stress and / or adjustable tensile stress are preferably also present in the first coating group. Based on previous understanding, the tensile stress in the first coating group is related to the compressive stress in the substrate body, which in turn has a positive impact on the surface strength of the substrate body (especially glass).

[0103] Therefore, based on the above relationship, it is particularly easy to determine a suitable glass for use as the substrate body. Thus, if a particular glass is used as the substrate body, for given other variables, it is very easy to use this relationship to check whether the glass is available and / or how the variables must be adjusted to enable the use of the preferred glass as the substrate body.

[0104] Here, preferably, the radius of curvature R of the composite workpiece, especially the radius of curvature R of the substrate body, is determined relative to the second surface of the composite workpiece.

[0105] Alternatively or additionally, the radius of curvature can also be determined based on the bow using the following relationship:

[0106]

[0107] Therefore, given the diameter "X" of the substrate and the preferred assumption that it is an arc, the radius of curvature "R" used in the "Stoney" formula can be calculated from the "bow".

[0108] Alternatively, or additionally, the following settings can also be made:

[0109] Polish the second surface;

[0110] Polish the first surface;

[0111] The first surface of the substrate body is convex at least within the region of the first coating group;

[0112] and / or

[0113] The second surface of the substrate body is concave at least within the area of ​​the first coating group.

[0114] If the second surface is polished, these structures can be applied to the substrate with particular reliability.

[0115] It has been found that, in order to achieve particularly good strength to resist forces acting on the second surface, it is especially advantageous to specifically place the first coating group in the raised areas of the first surface. For example, the first coating group may also be placed only in the raised areas of the first surface. Preferably, the first surface is convex everywhere, and the entire first surface is coated with the first coating group.

[0116] Preferably, the area of ​​the second surface is concave, wherein the first coating group is directly opposite the first surface, thus achieving particularly good strength. Therefore, preferably, the second surface is concave everywhere.

[0117] Alternatively or additionally, tensile stress may be provided at least in a portion of a depth region of the substrate body, at least within and / or at least below the first surface, preferably at a depth up to two or three times the thickness of the first coating group; wherein the absolute value of the tensile stress particularly corresponds approximately to the compressive stress of the first coating group and / or is between 1 MPa and 100 MPa.

[0118] In particular, for forces acting on the second surface, the corresponding tensile stress actually helps to increase the strength of the composite workpiece, which is contrary to the expectation that tensile stress would reduce the strength of the substrate body.

[0119] Alternatively or additionally, the composite workpiece, particularly the substrate body, may be provided with a circular or elliptical cut surface on at least one cutting plane, wherein, in particular, the maximum diameter of the cut surface is:

[0120] Less than or equal to 500mm, less than or equal to 300mm, less than or equal to 200mm, less than or equal to 150mm;

[0121] and / or

[0122] 50mm or greater than or equal to, 100mm or greater than or equal to, 150mm or greater than or equal to, 200mm or greater than or equal to, or 300mm or greater than or equal to.

[0123] For example, the cutting plane may lie in a plane substantially parallel to the first and / or second surfaces. "Substantially parallel" here preferably means that the curvature of the two surfaces caused by the camber is ignored to a certain extent, for example, warpage is also ignored. This is because the deviation between the first and / or second surfaces caused by camber, warpage, and / or other effects and the flat or parallel first and second surfaces is significantly smaller than the thickness of the substrate, for example, by two, three, four, or even more orders of magnitude.

[0124] Alternatively or additionally, the composite workpiece may also include a second coating group, wherein at least a portion of the second surface of the substrate body is coated with the second coating group, wherein, in particular, the second coating group has the following characteristics:

[0125] It is UV-curable, has an optical refractive index adapted to the material of the substrate body, and / or contains plastics, particularly polymers;

[0126] and / or

[0127] It includes and / or forms at least one structure, such as preferably a lattice structure, which is particularly applied to or can be applied to the substrate body by at least part of nanoimprint lithography.

[0128] The second coating group is applied only to the second surface of the substrate body;

[0129] and / or

[0130] The second coating group is not coated on the first surface of the substrate body.

[0131] By applying a second coating to the second surface, structures can be easily formed on composite workpieces using a stamping tool. In a sense, the stamping press can be easily modified to form the desired structure, such as a lattice structure.

[0132] This is very effective and can provide a very wide range of pre-processed composite workpieces, but still offers a great deal of design freedom for the final desired structure.

[0133] Therefore, polymers are also particularly suitable as materials for the second coating group.

[0134] The stamping tool used to apply force to the substrate, particularly the second surface, can be used, for example, as part of the nanoimprint lithography process described further above. Thus, this method for forming structures can be used particularly effectively and reliably to fabricate the aforementioned composite workpieces.

[0135] In one embodiment, the second coating group is applied directly or indirectly to at least a portion of the second surface. When applied directly, the second coating group is in direct contact with the second surface. When applied indirectly, the second coating group is not in direct contact with the second surface. In the case of indirect application, for example, one or more intermediate layers may be provided, specifically sandwiched entirely or partially between the second surface and at least a portion of the second coating group. Optionally, the second coating group is applied both directly and indirectly to portions of the second surface.

[0136] Applying the second coating group only to the second surface or not to the first surface yields very good results for increasing strength.

[0137] According to a second aspect, the present invention achieves the above-mentioned objective by providing a plurality of composite workpieces according to the first aspect of the present invention, wherein the number of said composite workpieces is particularly between 2 and 1,000,000, preferably 25, 50, 100, 500, 1,000 or 10,000.

[0138] Therefore, the advantages of the composite workpieces according to the present invention can also be applied to the entire production line in which multiple composite workpieces can be connected in series and / or in parallel for further processing.

[0139] Alternatively or additionally, it may be configured such that when a force of 100 Newtons is applied to the second surface of each substrate body, the failure probability of the composite workpiece is less than or equal to 1%, preferably less than or equal to 0.5% or 0.1%.

[0140] It has been found that most composite workpieces have a particularly low probability of failure.

[0141] Here, preferably, the failure probability can be determined using a Weibull distribution. For this purpose, the forces acting on a portion of the second surface of the composite workpiece up to and including damage (particularly fracture) can be determined. This can be achieved, for example, by using a "ring-on-ring" test method, as described above. For instance, the Weibull limit is 67%, and / or a 67% fracture probability is considered.

[0142] Preferably, for composite workpieces, the force corresponding to 67% of the Weibull limit, i.e., the Weibull force, is greater than 500 Newtons, preferably greater than 600 Newtons, and more preferably greater than 700 Newtons. Alternatively or additionally, the Weibull force is less than 2000 Newtons, preferably less than 1500 Newtons, preferably less than 1000 Newtons, preferably less than 800 Newtons, and preferably less than 700 Newtons. Alternatively or additionally, the Weibull force is between 500 Newtons and 2000 Newtons, preferably between 600 Newtons and 1500 Newtons, and preferably between 600 Newtons and 1000 Newtons.

[0143] For example, if the breaking force is determined for 1,000 composite workpieces, and 2 of them break when a force of 100 Newtons is applied, then the probability of breakage or fracture at 100 Newtons is 2 / 1,000 × 100% = 2 / 10% = 0.2% = 2‰.

[0144] According to a third aspect, in order to achieve this objective, the present invention provides a method for producing a composite workpiece according to the first aspect of the present invention, the method comprising:

[0145] Provide a substrate body, particularly one made of glass and / or a substrate body according to the first aspect of the invention;

[0146] Applying a coating assembly, particularly a first coating assembly according to the first aspect of the invention, to the surface of the substrate body, particularly to the first surface according to the first aspect of the invention; and

[0147] During the application of the coating group to the surface of the substrate body, the temperature of the substrate body is maintained at less than or equal to 200°C, at least temporarily or continuously.

[0148] Given thermal expansion, controlling the substrate temperature has proven particularly advantageous. This is because the substrate, especially if made of glass, will expand further due to its large coefficient of thermal expansion. If the substrate overheats, the curvature will become excessive. By controlling the substrate temperature, a particularly durable composite workpiece can be obtained.

[0149] The low compressive stress in the first coating group proved to be particularly advantageous.

[0150] Therefore, one way to solve the above problem is to reduce or even minimize the compressive stress generated in the first coating layer. This can be achieved through various process parameters during the manufacturing of the composite workpiece. For example, it has been found to some extent that the coating layer temperature is an effective and very easily controlled parameter. Most substrates, especially glass, have a coefficient of thermal expansion (CTE) of up to 20 × 10⁻⁶ in the temperature range of 20°C to 300°C. -6 / K, preferably between 3×10 -6 / K to 16×10 -6 Between / K, preferably between 7×10 -6 / K to 12×10 -6 Between / K.

[0151] The "coefficient of thermal expansion" or "CTE" refers to the average linear coefficient of thermal expansion over a temperature range of 20°C to 300°C, which can be determined according to DIN ISO 7991:1987.

[0152] If the CTE of the coating assembly is inconsistent with that of the substrate (especially the glass), residual stress will result from the difference in CTE when the coated substrate cools from the process temperature to ambient temperature. Therefore, a sufficiently high process temperature should be selected during coating, for example, at least 130°C, up to 300°C, and / or between 140°C and 200°C, to obtain a well-functioning coating assembly with sufficient density / low porosity and low absorbance, i.e., an ideally fully stoichiometric oxide.

[0153] In one embodiment, the first surface of the substrate bulk is strengthened by chemical interactions in the interface region with the first coating group. Mixing regions may be generated by the diffusion and / or kinetic energy of deposited atoms, and / or may be driven by chemical interactions, wherein each chemical interaction may generate compressive stress and / or cause defect healing due to the addition of chemical bonds. Optionally, the penetration depth and intensity of this reaction can be controlled by the chemical composition of the substrate bulk, the chemical and / or physical surface properties of the substrate bulk (such as roughness and / or leaching zones resulting from polishing processes), and / or the energy, ionization state, and / or chemical composition of the coating material particles of the first coating group.

[0154] For example, the process can be designed as follows:

[0155] The curvature, or arc length, of a substrate body (particularly a wafer) with a diameter of 200 mm and a thickness of 700 μm, made of, for example, N-SF6 material, is measured. Based on the measurement results, the arc length is, for example, approximately 2 μm. Subsequently, the wafer is cleaned, for example, in a deionized water bath at 45°C, with ultrasonic assistance at, for example, 130 kHz, for, for, for, 250 seconds. The cleaned wafer is then dried in air at 60°C, for, for, for, 500 seconds. After this treatment, the surface is essentially free of particles.

[0156] For coating, the wafer is placed on a support of the vapor deposition cap of the Leybold APS1104 vacuum coating system, where the coating assembly is applied to the convex surface of the wafer in this case. The apparatus is further equipped with a suitable evaporation material to enable the production of layers containing SiO2 and TiO2:SiO2 and Ti3O5. After closing the chamber door, the process chamber is evacuated. Once a reference pressure, such as 1 × 10⁻⁶, is reached... -3 The coating process begins at point 1. To do this, the substrate heating device is first turned on, and the substrate temperature is selected (e.g., 150°C). Once this temperature is reached, the anti-reflective system begins deposition. A first TiO2 layer is deposited, with a thickness of, for example, 19 nm. Next, a SiO2 layer with a thickness of, for example, 35 nm is deposited, followed by a TiO2 layer with a thickness of, for example, 25 nm, and finally a SiO2 layer with a thickness of, for example, 109 nm. The coating rate is... The ion energy of the ion source is 50 eV.

[0157] After the coating process is completed, the substrate heating device is turned off and the process chamber is ventilated. After removing the coated substrate body (such as the wafer), the curvature is measured again. This time, it provides a value of, for example, 5 μm, where the type of flexure has not changed, i.e., the layer is still disposed on a convex surface.

[0158] Alternatively, the additional curvature resulting from the coating array can now be converted into layer stress using the Stoney formula. For this purpose, for example, based on a (hypothetically) perfectly flat substrate body, the radius of curvature caused by the coating array can be determined using wafer geometry. In the current case, this would result in a lamination stress of approximately 32 MPa.

[0159] The method may further include post-processing steps on the substrate body. For example, one or more dicing processes may be employed. Particularly preferably, the method includes one or more polishing processes, particularly selected from grinding, lapping, and polishing. This is particularly advantageous for achieving very low total thickness variation (TTV). Furthermore, the surface roughness can be specifically adjusted.

[0160] According to the fourth aspect, in order to achieve the stated objective, the present invention provides an augmented reality glasses comprising at least one composite workpiece or at least one blank thereof according to the first aspect of the present invention.

[0161] According to the fifth aspect, in order to achieve the stated objective, the present invention proposes the use of the composite workpiece or at least one blank thereof according to the first aspect of the present invention in augmented reality glasses.

[0162] For example, the blank can be obtained by a very common method of cutting, sawing, and / or breaking down a composite workpiece into multiple individual parts. A blank is simply one such individual component. For example, the lenses of augmented reality glasses may include or be composed of such individual components or blanks.

[0163] More settings

[0164] coating

[0165] The term "coating group" here preferably refers to the first coating group.

[0166] Preferably, the coating group comprises one or more coatings. Preferably, the coating group is arranged in a stacked manner, wherein each coating extends parallel to the front surface.

[0167] Preferably, the coating has a chemical composition that does not undergo internal changes, or undergoes smooth and continuous changes within it; preferably, it does not undergo internal changes. Preferably, the coating has a uniform chemical composition or a smoothly and continuously changing chemical composition; preferably, it has a uniform chemical composition. Preferably, the coating has a chemical composition in which the maximum local weight percentage of a certain element is less than 1.2 times, preferably less than 1.1 times, and more preferably less than 1.05 times, the minimum weight percentage of that element. This is preferred for any element.

[0168] Preferably, the coating has a refractive index that does not undergo internal variation, or undergoes a smooth and continuous variation within it, preferably without internal variation. Preferably, the coating has a uniform refractive index or a smoothly and continuously varying refractive index, preferably with a uniform refractive index. Preferably, the maximum local refractive index of the coating is less than 1.2 times the minimum local refractive index, preferably less than 1.1 times, and more preferably less than 1.05 times.

[0169] Preferably, the coating has a constant thickness across its lateral extension. Preferably, the ratio of the minimum thickness to the maximum thickness of the coating is between 1:1 and 1:1.1, more preferably between 1:1 and 1:1.05, and even more preferably between 1:1 and 1:1.01.

[0170] In one embodiment, the coating group comprises one or more Group A coatings. The refractive index of the Group A coating is at least 1.7. Preferably, the refractive index of the Group A coating is between 1.70 and 2.60, more preferably between 1.80 and 2.60, more preferably between 1.90 and 2.50, and even more preferably between 1.95 and 2.45. Preferably, the refractive index of the Group A coating is at least 1.80, more preferably at least 1.90, and even more preferably at least 1.95. Preferably, the refractive index of the Group A coating is up to 2.60, more preferably up to 2.50, and even more preferably up to 2.45. Preferably, the materials used to form the Group A coating are selected from Si3N4, ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, SnO2, indium tin oxide, ZnO2, AlN, mixed oxides containing at least one of these, mixed nitrides containing at least one of these, and mixed oxide nitrides containing at least one of these. Preferably, the materials used to form the Group A coating are selected from ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, and mixed oxides containing at least one of these. In one aspect of this embodiment, the coating is made of ZrO2 or HfO2, preferably ZrO2. In one aspect of this embodiment, the coating is made of ZrO2, TiO2, or Nb2O5, preferably TiO2 or Nb2O5. Preferably, the mixed oxides include TiO2 / SiO2, Nb2O5 / SiO2, and ZrO2 / Y2O3. Preferably, the mixed nitride is AlSiN. Preferably, the mixed oxide nitride is AlSiON.

[0171] In one embodiment, the composite workpiece, particularly a coating group such as a first coating group, comprises two or more group A coatings, wherein at least one pair of group A coatings is composed of different materials. In another embodiment, the composite workpiece, particularly a coating group such as a first coating group, comprises two or more group A coatings, wherein all group A coatings are composed of the same material.

[0172] In one embodiment, the coating group includes one or more Group B coatings. The refractive index of the Group B coating is at least 1.7. Preferably, the refractive index of the Group B coating is between 1.37 and 1.60, more preferably between 1.37 and 1.55, and more preferably between 1.38 and 1.50. Preferably, the refractive index of the Group B coating is at least 1.37, more preferably at least 1.38. Preferably, the refractive index of the Group B coating is up to 1.60, more preferably up to 1.55, and more preferably up to 1.50.

[0173] Preferably, the material used to prepare the Group B coating is selected from SiO2, MgF2, and mixed oxides containing SiO2 and another oxide, preferably mixed oxides containing SiO2. In this case, preferably, the mixed oxide includes SiO2 and Al2O3. In this case, preferably, the mixed oxide includes SiO2 in a content of 50 to 98 wt%, more preferably 60 to 95 wt%, more preferably 70 to 93 wt%. In this case, preferably, the mixed oxide includes SiO2 in a content of up to 98 wt%, more preferably up to 95 wt%, more preferably up to 93 wt%. In this case, preferably, the mixed oxide includes SiO2 in a content of at least 50 wt%, more preferably at least 60 wt%, more preferably at least 70 wt%. In this case, preferably, the mixed oxide includes SiO2 in a content of 50 to 98 wt%, more preferably 60 to 95 wt%, more preferably 70 to 93 wt%, and further includes Al2O3 in a content of 2 to 50 wt%, more preferably 5 to 40 wt%, more preferably 7 to 30 wt%.

[0174] In one embodiment, the composite workpiece, particularly a coating group such as a first coating group, includes two or more group B coatings, wherein at least one pair of group B coatings is composed of different materials. In another embodiment, the layered optical composite material includes two or more group B coatings, wherein all group B coatings are composed of the same material.

[0175] In some embodiments, the coating structure is described as type A and type B regions, wherein type A regions have a high refractive index and type B regions have a low refractive index. So-called needle-like layers, with a thickness of 5 nm or less, do not affect the property of a region as a type A or type B region. These regions are characterized by coatings with a thickness greater than 5 nm.

[0176] The thickness of these needle-like layers can be as thin as 1 nanometer. These needle-like layers can be as thin as an atomic monolayer.

[0177] The following observations are optionally marked as particularly preferred:

[0178] ● The coating can be uniformly applied to the entire surface, such as the first surface of the substrate, thus affecting the curvature of the substrate. Therefore, the stress in the coating can be calculated using the Stoney formula by comparing the curvature before and after coating.

[0179] ● The curvature after coating may differ from that of the uncoated substrate (such as glass), indicating the presence of some residual stress.

[0180] ● By using the “Stoney formula”, it may be found that the stress of a pure anti-reflective coating group is only 20 to 30 MPa.

[0181] ● Compared to the standard coating group, the absolute value of the bow may be very small, for example, it may be more than 10 orders of magnitude smaller.

[0182] ● Applications with single-sided coating may have little or no additional warpage, which demonstrates that the coating process can minimize stress introduction.

[0183] ● Single-sided coating may contribute very little to the curvature, which demonstrates that the coating process can minimize stress introduction.

[0184] Young's modulus

[0185] Surprisingly, it has been found that high-strength substrates can be obtained by increasing Young's modulus. Preferably, the substrate of the present invention, especially glass, has a Young's modulus between 40 GPa and 160 GPa, for example, between 70 GPa and 150 GPa, between 80 GPa and 140 GPa, between 90 GPa and 100 GPa, between 40 GPa and 100 GPa, between 40 GPa and 110 GPa, between 100 GPa and 140 GPa, between 120 GPa and 160 GPa, between 40 GPa and 80 GPa, or between 85 GPa and 130 GPa.

[0186] Size and shape

[0187] Preferably, at a wavelength of 450 nm, the refractive index n of the substrate is between 1.45 and 2.45, more preferably between 1.50 and 2.40, even more preferably between 1.55 and 2.35, even more preferably between 1.60 and 2.30, even more preferably between 1.65 and 2.25, even more preferably between 1.70 and 2.20, for example, it can be between 1.75 and 2.15, 1.80 and 2.10, 1.85 and 2.05, 1.86 and 2.04, 1.87 and 2.03, 1.88 and 2.02, 1.89 and 2.01, or 1.90 and 2.10. Particularly preferably, at a wavelength of 450 nm, the refractive index n of the substrate is between 1.70 and 2.10.

[0188] Preferably, the substrate body of the present invention is a glass wafer. The substrate body can be a rectangular glass wafer, for example, its length can be between 40 mm and 1250 mm, and its width between 30 mm and 750 mm. However, preferably, the substrate body is not rectangular, but circular, particularly a circular glass wafer. A circular glass wafer can also be described as a disk-shaped glass wafer. Particularly preferably, the substrate body is a disk-shaped glass wafer, preferably with a diameter between 100 mm and 500 mm, more preferably between 120 mm and 450 mm, more preferably between 140 mm and 400 mm, more preferably between 160 mm and 350 mm, more preferably between 180 mm and 325 mm, and more preferably between 200 mm and 300 mm. Particularly preferably, the diameter is about 200 mm or about 300 mm. Preferably, the diameter of the substrate body is at least 100 mm, at least 120 mm, at least 140 mm, at least 160 mm, at least 180 mm, or at least 200 mm. Preferably, the diameter of the substrate body is at most 500 mm, more preferably at most 450 mm, more preferably at most 400 mm, more preferably at most 350 mm, more preferably at most 325 mm, and more preferably at most 300 mm.

[0189] Preferably, the substrate body is a glass wafer, particularly a planar glass wafer, such as a planar waveguide. Preferably, the substrate body has two main surfaces. Preferably, the main surfaces have approximately the same surface area. Preferably, for each main surface, particularly the first and / or second surface, its surface area (especially the area of ​​the respective first and second surfaces) is between 1,000 mm². 2 Up to 1,000,000 mm 2 Between, more preferably between 3,000 mm 2 Up to 750,000 mm 2 Between, more preferably between 5,000 mm 2 Up to 500,000 mm 2 Between, for example, between 10,000 mm 2 Up to 400,000mm 2 Between, between 20,000mm 2 Up to 300,000 mm 2 Between, between 30,000mm 2 Up to 200,000mm 2 Between, between 40,000mm 2 Up to 150,000 mm 2 Between, between 50,000 mm 2 Up to 125,000mm 2 Between, or between 60,000 mm2 Up to 100,000mm 2 between.

[0190] Preferably, the thickness d of the substrate body is between 0.10 mm and 2.0 mm, more preferably between 0.15 mm and 1.5 mm, even more preferably between 0.20 mm and 1.2 mm, even more preferably between 0.25 mm and 1.0 mm, even more preferably between 0.30 mm and 0.70 mm, for example between 0.40 mm and 0.60 mm. A lower thickness is advantageous in terms of the weight of the substrate body. However, it may be disadvantageous in terms of surface and geometric properties, potentially impairing total internal reflection-based light propagation, for example, by increasing optical loss and / or the dependence of optical loss on the propagation angle. Therefore, the above-mentioned range is preferred.

[0191] Preferably, the ratio of the diameter (especially the maximum diameter) to the thickness of the substrate body is between 200:1 and 2,000:1, for example between 350:1 and 1,500:1, or between 500:1 and 1,000:1.

[0192] Preferably, the substrate body of the present invention is a glass wafer, particularly a planar glass wafer, such as a planar waveguide.

[0193] Preferably, the substrate body of the present invention has low warpage, particularly less than 100 μm, more preferably less than 50 μm, and even more preferably less than 20 μm. Warpage can be greater than 1 μm, greater than 5 μm, or greater than 10 μm. Preferably, the composite workpiece of the present invention, especially the substrate body, has low camber, particularly less than 50 μm, more preferably less than 30 μm, and even more preferably less than 20 μm. Camber can be greater than 1 μm, greater than 5 μm, or greater than 10 μm. The warpage and / or camber of the composite workpiece, especially the substrate body, may be affected by the diameter and thickness of the substrate body and the coating group (such as the first coating group). Preferably, the warpage and / or camber of the composite workpiece of the present invention, especially the substrate body, is less than 0.1% of the substrate body diameter, more preferably less than 0.075% of the substrate body diameter, more preferably less than 0.05% of the substrate body diameter, more preferably less than 0.025% of the substrate body diameter, and even more preferably less than 0.01% of the substrate body diameter. The warpage and / or bow can be greater than 0.001%, 0.002%, or 0.005% of the substrate body diameter. Preferably, the warpage and bow can be determined according to SEMI3D1203152015.

[0194] Preferably, the total thickness variation (TTV) of the substrate body is less than 2 μm, more preferably less than 1.8 μm, more preferably less than 1.6 μm, more preferably less than 1.5 μm, more preferably less than 1.4 μm, more preferably less than 1.3 μm, more preferably less than 1.2 μm, more preferably less than 1.1 μm, more preferably less than 1.0 μm, more preferably less than 0.75 μm, and more preferably less than 0.5 μm. The TTV can be determined according to SEMI MF 1530GBIR. The TTV can also be determined by interferometry of the substrate body thickness distribution, for example, using an interferometer, particularly an interferometer from Zygo. In some embodiments, the TTV can be at least 0.1 μm or at least 0.2 μm. Very low TTV is particularly advantageous for substrate bodies used in AR applications. For example, low TTV can be obtained through grinding processes such as grinding, milling, and / or polishing. Therefore, the substrate body described in this invention is preferably a substrate body that has already undergone a grinding process.

[0195] Surface roughness

[0196] Preferably, the substrate body, especially the first and / or second surfaces, has a surface roughness R. q The surface roughness is between 0.1 nm and 5 nm, for example, between 0.15 nm and 3.5 nm, between 0.2 nm and 2 nm, between 0.25 nm and 1.5 nm, between 0.3 nm and 1.0 nm, or between 0.35 nm and 0.75 nm. Preferably, the surface roughness R... q Less than 5 nm, more preferably less than 3.5 nm, more preferably less than 2 nm, more preferably less than 1.5 nm, more preferably less than 1.0 nm, more preferably less than 0.75 nm, more preferably less than 0.5 nm. Low surface roughness R q It is advantageous to obtain higher strength, especially higher surface strength. Preferably, the surface roughness R is measured using white light interferometer (WLI) or atomic force microscope (AFM). q AFM is the most preferred option. In this disclosure, the term "R" is used... q "" and "RMS" can be used interchangeably. Preferably, the surface roughness R can be determined according to DIN EN ISO 4287. q .

[0197] Preferably, the substrate body, especially the first and / or second surfaces, has a surface roughness R. aThe surface roughness is between 0.1 nm and 5 nm, for example, between 0.15 nm and 3.5 nm, between 0.2 nm and 2 nm, between 0.25 nm and 1.5 nm, between 0.3 nm and 1.0 nm, or between 0.35 nm and 0.75 nm. Preferably, the surface roughness R... a Less than 5 nm, more preferably less than 3.5 nm, more preferably less than 2 nm, more preferably less than 1.5 nm, more preferably less than 1.0 nm, more preferably less than 0.75 nm, more preferably less than 0.5 nm. Low surface roughness R. a It is advantageous to obtain higher strength, especially higher surface strength. Preferably, the surface roughness R can be determined according to ISO, DIN, EN, ISO 4287. a .

[0198] Glass components

[0199] The substrate body described in this invention may include or be made of glass. The substrate body is not limited to a specific glass composition. The exemplary composition ranges shown below are merely examples.

[0200] Preferably, the amount of SiO2 in the substrate body of the present invention is between 0 wt% and 80 wt%, for example, at most 70 wt%, at most 60 wt%, or at most 15 wt%. In some embodiments, the amount of SiO2 is at least 10 wt%, at least 20 wt%, at least 30 wt%, or at least 40 wt%. In other embodiments, the amount of SiO2 is less than 20 wt%, or even less than 10 wt%.

[0201] Preferably, the amount of P2O5 in the substrate body of the present invention is between 0 wt% and 40 wt%, for example, a maximum of 30 wt%, a maximum of 5 wt%, or a maximum of 2 wt%. In some embodiments, the amount of P2O5 may be at least 10 wt%, at least 15 wt%, or at least 20 wt%. In other embodiments, the amount of P2O5 is at most 1 wt%, or at most 0.5 wt%. The substrate body of the present invention may also be free of P2O5.

[0202] Preferably, the amount of Al2O3 in the substrate body of the present invention is between 0 wt% and 25 wt%, for example, a maximum of 15 wt%, a maximum of 10 wt%, or a maximum of 5 wt%. In some embodiments, the amount of Al2O3 may be at least 0.1 wt%, at least 0.5 wt%, or at least 1 wt%. In some embodiments, the amount of Al2O3 is at most 1 wt%, or at most 0.5 wt%. The substrate body of the present invention may also be free of Al2O3.

[0203] Preferably, the amount of B2O3 in the substrate body of the present invention is between 0 wt% and 55 wt%, for example, a maximum of 45 wt%, a maximum of 35 wt%, or a maximum of 25 wt%. In some embodiments, the amount of B2O3 may be at least 1 wt%, at least 2 wt%, or at least 5 wt%. In some embodiments, the amount of B2O3 may be at most 20 wt%, at most 15 wt%, or at most 10 wt%.

[0204] The substrate body described in this invention may also be free of B2O3.

[0205] Preferably, the amount of Li2O in the substrate body of the present invention is between 0 wt% and 10 wt%, for example, at most 5 wt%, at most 2 wt%, or at most 1 wt%. In some embodiments, the amount of Li2O may be at least 0.5 wt%, at least 1 wt%, or at least 2 wt%. In other embodiments, the amount of Li2O may be at most 0.5 wt%, at most 0.2 wt%, or at most 0.1 wt%.

[0206] The substrate body described in this invention may also be free of Li2O.

[0207] Preferably, the amount of Na2O in the substrate body of the present invention is between 0 wt% and 30 wt%, for example, a maximum of 25 wt%, a maximum of 20 wt%, a maximum of 10 wt%, or a maximum of 5 wt%. In some embodiments, the amount of Na2O may be at least 1 wt%, at least 2 wt%, or at least 5 wt%. In some embodiments, the amount of Na2O is at most 2 wt%, at most 1 wt%, or at most 0.5 wt%. The substrate body of the present invention may also be free of Na2O.

[0208] Preferably, the amount of K2O in the substrate body of the present invention is between 0 wt% and 25 wt%, for example, a maximum of 20 wt%, a maximum of 10 wt%, or a maximum of 5 wt%. In some embodiments, the amount of K2O may be at least 1 wt%, at least 2 wt%, or at least 5 wt%. In some embodiments, the amount of K2O is at most 2 wt%, at most 1 wt%, or at most 0.5 wt%. The substrate body of the present invention may also be K2O-free.

[0209] Preferably, the amount of MgO in the substrate body of the present invention is between 0 wt% and 10 wt%, for example, at most 5 wt%, at most 2 wt%, or at most 1 wt%. In some embodiments, the amount of MgO may be at least 0.5 wt%, at least 1 wt%, or at least 2 wt%. In other embodiments, the amount of MgO may be at most 0.5 wt%, at most 0.2 wt%, or at most 0.1 wt%. The substrate body of the present invention may also be free of MgO.

[0210] Preferably, the amount of CaO in the substrate body of the present invention is between 0 wt% and 40 wt%, for example, a maximum of 30 wt%, a maximum of 25 wt%, or a maximum of 15 wt%. In some embodiments, the amount of CaO may be at least 1 wt%, at least 5 wt%, or at least 10 wt%. In some embodiments, the amount of CaO is at most 10 wt%, at most 5 wt%, or at most 1 wt%. The substrate body of the present invention may also be free of CaO.

[0211] Preferably, the amount of SrO in the substrate body of the present invention is between 0 wt% and 25 wt%, for example, a maximum of 15 wt%, a maximum of 10 wt%, or a maximum of 5 wt%. In some embodiments, the amount of SrO may be at least 0.5 wt%, at least 1 wt%, or at least 2 wt%. In some embodiments, the amount of SrO is at most 2 wt%, at most 1 wt%, or at most 0.5 wt%. The substrate body of the present invention may also be free of SrO.

[0212] Preferably, the amount of BaO in the substrate body of the present invention is between 0 wt% and 55 wt%, for example, a maximum of 30 wt%, a maximum of 20 wt%, or a maximum of 10 wt%. In some embodiments, the amount of BaO may be at least 1 wt%, at least 5 wt%, or at least 10 wt%. In some embodiments, the amount of BaO is at most 5 wt%, at most 2 wt%, or at most 1 wt%. The substrate body of the present invention may also be free of BaO.

[0213] Preferably, the amount of ZnO in the substrate body of the present invention is between 0 wt% and 30 wt%, for example, a maximum of 20 wt%, a maximum of 15 wt%, or a maximum of 10 wt%. In some embodiments, the amount of ZnO may be at least 1 wt%, at least 2 wt%, or at least 5 wt%. In some embodiments, the amount of ZnO is at most 5 wt%, at most 2 wt%, or at most 1 wt%. The substrate body of the present invention may also be free of ZnO.

[0214] Preferably, the amount of La2O3 in the substrate body of the present invention is between 0 wt% and 55 wt%, for example, a maximum of 50 wt%, a maximum of 40 wt%, or a maximum of 20 wt%. In some embodiments, the amount of La2O3 may be at least 5 wt%, at least 10 wt%, or at least 20 wt%. In some embodiments, the amount of La2O3 may be at most 10 wt%, at most 5 wt%, or at most 1 wt%. The substrate body of the present invention may also be free of La2O3.

[0215] Preferably, the amount of Gd2O3 in the substrate body of the present invention is between 0 wt% and 20 wt%, for example, a maximum of 15 wt%, a maximum of 10 wt%, or a maximum of 5 wt%. In some embodiments, the amount of Gd2O3 may be at least 1 wt%, at least 2 wt%, or at least 5 wt%. In some embodiments, the amount of Gd2O3 may be at most 5 wt%, at most 2 wt%, or at most 1 wt%. The substrate body of the present invention may also be free of Gd2O3.

[0216] Preferably, the amount of Y2O3 in the substrate body of the present invention is between 0 wt% and 20 wt%, for example, a maximum of 15 wt%, a maximum of 10 wt%, or a maximum of 5 wt%. In some embodiments, the amount of Y2O3 may be at least 0.1 wt%, at least 0.2 wt%, or at least 0.5 wt%. In some embodiments, the amount of Y2O3 may be at most 2 wt%, at most 1 wt%, or at most 0.5 wt%. The substrate body of the present invention may also be free of Y2O3.

[0217] Preferably, the amount of ZrO2 in the substrate body of the present invention is between 0 wt% and 20 wt%, for example, a maximum of 15 wt%, a maximum of 10 wt%, or a maximum of 5 wt%. In some embodiments, the amount of ZrO2 may be at least 1 wt%, at least 2 wt%, or at least 5 wt%. In some embodiments, the amount of ZrO2 is at most 7.5 wt%, at most 5 wt%, or at most 2.5 wt%. The substrate body of the present invention may also be free of ZrO2.

[0218] Preferably, the amount of TiO2 in the substrate body of the present invention is between 0 wt% and 35 wt%, for example, a maximum of 30 wt%, a maximum of 20 wt%, or a maximum of 15 wt%. In some embodiments, the amount of TiO2 may be at least 2 wt%, at least 5 wt%, or at least 10 wt%. In some embodiments, the amount of TiO2 is at most 10 wt%, at most 7.5 wt%, or at most 5 wt%. The substrate body of the present invention may also be free of TiO2.

[0219] Preferably, the amount of Ta2O5 in the substrate body of the present invention is between 0 wt% and 30 wt%, for example, a maximum of 25 wt%, a maximum of 17.5 wt%, or a maximum of 10 wt%. In some embodiments, the amount of Ta2O5 may be at least 1 wt%, at least 2 wt%, or at least 5 wt%. In some embodiments, the amount of Ta2O5 may be at most 5 wt%, at most 2 wt%, or at most 1 wt%. The substrate body of the present invention may also be free of Ta2O5.

[0220] Preferably, the amount of Nb2O5 in the substrate body of the present invention is between 0 wt% and 55 wt%, for example, a maximum of 35 wt%, a maximum of 20 wt%, or a maximum of 15 wt%. In some embodiments, the amount of Nb2O5 may be at least 2 wt%, at least 5 wt%, or at least 10 wt%. In some embodiments, the amount of Nb2O5 may be at most 10 wt%, at most 5 wt%, or at most 2 wt%. The substrate body of the present invention may also be free of Nb2O5.

[0221] Preferably, the amount of WO3 in the substrate body of the present invention is between 0 wt% and 10 wt%, for example, a maximum of 7.5 wt%, a maximum of 5 wt%, or a maximum of 2 wt%. In some embodiments, the amount of WO3 may be at least 0.1 wt%, at least 0.2 wt%, or at least 0.5 wt%. In some embodiments, the amount of WO3 is at most 1 wt%, at most 0.5 wt%, or at most 0.2 wt%.

[0222] The substrate body described in this invention may also be free of WO3.

[0223] Preferably, the amount of Bi2O3 in the substrate body of the present invention is between 0 wt% and 65 wt%, for example, a maximum of 50 wt%, a maximum of 20 wt%, or a maximum of 10 wt%. In some embodiments, the amount of Bi2O3 may be at least 1 wt%, at least 2 wt%, or at least 5 wt%. In some embodiments, the amount of Bi2O3 may be at most 5 wt%, at most 1 wt%, or at most 0.1 wt%.

[0224] The substrate body described in this invention may also be free of Bi2O3.

[0225] Preferably, the amount of F in the substrate body of the present invention is between 0 wt% and 45 wt%, for example, at most 25 wt%, at most 10 wt%, or at most 5 wt%. In some embodiments, the amount of F may be at least 0.1 wt%, at least 0.5 wt%, or at least 1 wt%. In some embodiments, the amount of F is at most 2 wt%, at most 1 wt%, or at most 0.1 wt%. The substrate body of the present invention may also be free of F.

[0226] Preferably, the amount of GeO2 in the substrate body of the present invention is between 0 wt% and 20 wt%, for example, a maximum of 15 wt%, a maximum of 10 wt%, or a maximum of 5 wt%. In some embodiments, the amount of GeO2 may be at least 0.1 wt%, at least 0.5 wt%, or at least 1 wt%. In some embodiments, the amount of GeO2 is at most 2 wt%, at most 1 wt%, or at most 0.1 wt%. The substrate body of the present invention may also be free of GeO2.

[0227] Preferably, the amount of PbO in the substrate body of the present invention is between 0 wt% and 80 wt%, for example, a maximum of 70 wt%, a maximum of 50 wt%, or a maximum of 20 wt%. In some embodiments, the amount of PbO may be at least 1 wt%, at least 2 wt%, or at least 5 wt%. In some embodiments, the amount of PbO is at most 5 wt%, at most 1 wt%, or at most 0.1 wt%. In particular, considering its toxicity and environmental hazards, the substrate body of the present invention is preferably free of PbO.

[0228] Preferably, the substrate body of the present invention comprises (or is substantially composed of) the following components within the indicated range (in weight %).

[0229] Components Content (by weight %) <![CDATA[SiO2]]> 0-80 <![CDATA[P2O5]]> 0-40 <![CDATA[Al2O3]]> 0-25 <![CDATA[B2O3]]> 0-55 <![CDATA[Li2O]]> 0-10 <![CDATA[Na2O]]> 0-25 <![CDATA[K2O]]> 0-25 MgO 0-10 CaO 0-30 SrO 0-25 BaO 0-55 ZnO 0-30 <![CDATA[La2O3]]> 0-55 <![CDATA[Gd2O3]]> 0-20 <![CDATA[Y2O3]]> 0-20 <![CDATA[ZrO2]]> 0-20 <![CDATA[TiO2]]> 0-35 <![CDATA[Ta2O5]]> 0-30 <![CDATA[Nb2O5]]> 0-55 <![CDATA[WO3]]> 0-10 <![CDATA[GeO2]]> 0-20 <![CDATA[Bi2O3]]> 0-65 PbO 0-80 F 0-45

[0230] More preferably, the substrate body of the present invention comprises (or is substantially composed of) the following components within the indicated range (in weight %).

[0231] Components Content (by weight %) <![CDATA[SiO2]]> 0-80 <![CDATA[P2O5]]> 0-30 <![CDATA[Al2O3]]> 0-15 <![CDATA[B2O3]]> 0-55 <![CDATA[Li2O]]> 0-10 <![CDATA[Na2O]]> 0-25 <![CDATA[K2O]]> 0-25 MgO 0-5 CaO 0-30 SrO 0-10 BaO 0-55 ZnO 0-30 <![CDATA[La2O3]]> 0-55 <![CDATA[Gd2O3]]> 0-20 <![CDATA[Y2O3]]> 0-20 <![CDATA[ZrO2]]> 0-20 <![CDATA[TiO2]]> 0-35 <![CDATA[Ta2O5]]> 0-30 <![CDATA[Nb2O5]]> 0-55 <![CDATA[WO3]]> 0-10 <![CDATA[GeO2]]> Basically contains <![CDATA[Bi2O3]]> Basically contains PbO 0-70 F 0-25

[0232] More preferably, the substrate body of the present invention comprises (or is substantially composed of) the following components within the indicated range (in weight %).

[0233] Components Content (by weight %) <![CDATA[SiO2]]> 0-80 <![CDATA[P2O5]]> 0-5 <![CDATA[Al2O3]]> 0-10 <![CDATA[B2O3]]> 0-45 <![CDATA[Li2O]]> 0-10 <![CDATA[Na2O]]> 0-20 <![CDATA[K2O]]> 0-20 MgO 0-5 CaO 0-30 SrO 0-10 BaO 0-55 ZnO 0-30 <![CDATA[La2O3]]> 0-55 <![CDATA[Gd2O3]]> 0-20 <![CDATA[Y2O3]]> 0-20 <![CDATA[ZrO2]]> 0-20 <![CDATA[TiO2]]> 0-35 <![CDATA[Ta2O5]]> 0-30 <![CDATA[Nb2O5]]> 0-35 <![CDATA[WO3]]> 0-10 <![CDATA[GeO2]]> Basically contains <![CDATA[Bi2O3]]> Basically contains PbO Basically contains F 0-5

[0234] More preferably, the substrate body of the present invention comprises (or is substantially composed of) the following components within the indicated range (in weight %).

[0235] Components Content (by weight %) <![CDATA[SiO2]]> 0-60 <![CDATA[P2O5]]> 0-2 <![CDATA[Al2O3]]> 0-5 <![CDATA[B2O3]]> 0-45 <![CDATA[Li2O]]> 0-10 <![CDATA[Na2O]]> 0-10 <![CDATA[K2O]]> 0-10 MgO 0-5 CaO 0-30 SrO 0-10 BaO 0-30 ZnO 0-30 <![CDATA[La2O3]]> 0-55 <![CDATA[Gd2O3]]> 0-20 <![CDATA[Y2O3]]> 0-20 <![CDATA[ZrO2]]> 0-15 <![CDATA[TiO2]]> 0-20 <![CDATA[Ta2O5]]> 0-25 <![CDATA[Nb2O5]]> 0-20 <![CDATA[WO3]]> 0-5 <![CDATA[GeO2]]> Basically contains <![CDATA[Bi2O3]]> Basically contains PbO Basically contains F Basically contains

[0236] More preferably, the substrate body of the present invention comprises (or is substantially composed of) the following components within the indicated range (in weight %).

[0237] Components Content (by weight %) <![CDATA[SiO2]]> 0-15 <![CDATA[P2O5]]> Basically contains <![CDATA[Al2O3]]> Basically contains <![CDATA[B2O3]]> 0-45 <![CDATA[Li2O]]> Basically contains <![CDATA[Na2O]]> Basically contains <![CDATA[K2O]]> Basically contains MgO Basically contains CaO 0-15 SrO 0-5 BaO 0-10 ZnO 0-30 <![CDATA[La2O3]]> 0-55 <![CDATA[Gd2O3]]> 0-20 <![CDATA[Y2O3]]> 0-20 <![CDATA[ZrO2]]> 0-10 <![CDATA[TiO2]]> 0-15 <![CDATA[Ta2O5]]> 0-10 <![CDATA[Nb2O5]]> 0-15 <![CDATA[WO3]]> 0-5 <![CDATA[GeO2]]> Basically contains <![CDATA[Bi2O3]]> Basically contains PbO Basically contains F Basically contains

[0238] Alternatively or additionally, the substrate may include rare earth metal oxides such as Yb₂O₃, CeO₂, Nd₂O₃, Lu₂O₃, or Gd₂O₃, in a content of 0 to 5 mol%, thereby enhancing the glass substrate with magnetic, photonic, or optical properties. Preferably, the glass substrate does not contain the aforementioned components.

[0239] Alternatively or additionally, the glass of the substrate body described in this invention may also include some transition metal oxides, such as Fe2O3, CoO, NiO, V2O5, MnO2, CuO, Cr2O3, or mixtures of two or more thereof, wherein they can be used as colorants to give the glass specific optical or photonic functions, such as color filters or light converters. Attached Figure Description

[0240] Other features and advantages of the invention will become more apparent from the following description, in which preferred embodiments of the invention will be explained with reference to the illustrative drawings.

[0241] In the attached image:

[0242] Figure 1 A cross-sectional view of the composite workpiece according to the first aspect of the present invention is shown;

[0243] Figure 2 The determination is shown Figure 1 A schematic diagram of the curvature of the composite workpiece shown;

[0244] Figure 3 A graph showing the determined curvature of a composite workpiece comprising a plurality of composite workpieces according to a second aspect of the invention is shown; and

[0245] Figure 4 A graph showing determined strength values ​​for composite workpieces according to and without the invention is presented. Detailed Implementation

[0246] Figure 1 A cross-sectional view of the composite workpiece 1 according to the first aspect of the present invention is shown.

[0247] The composite workpiece 1 is placed on a flat subsurface 3. The composite workpiece 1 includes a substrate body 5 and a first coating group 7. The first surface 9 of the substrate body 1 is coated with the first coating group 7 over its entire surface.

[0248] from Figure 1 As can be seen from the cross-sectional view, the first surface 9 is convex and curved. The second surface 11 of the substrate body 1 is disposed opposite to the first surface 9 and is concave and curved.

[0249] Due to the curvature of the first surface 9 and the second surface 11, the composite workpiece 1 has an arc, thus preventing complete contact with the secondary surface 3. The arc ranges from 0.1 μm to 50 μm.

[0250] Figure 2 The bow angle has already been shown in the diagram.

[0251] and Figure 1 compared to, Figure 2The composite workpiece 1 in the middle has been rotated 180°, so now the convex side is facing up.

[0252] Compared to the hypothetical median surface 15 of the assumed non-curved composite workpiece 1, the median surface 13 of the composite workpiece 1 includes an arc 17, which is measured according to SEMI 3D12-0315 2015.

[0253] In this case, subsurface 3 is a three-point reference plane.

[0254] For clarity, Figure 2 The substrate body 5 and the first coating group 7 of the composite workpiece 1 are not clearly shown.

[0255] Figure 3 The diagram shows the determined values ​​of the camber for 30 composite workpieces. Each composite workpiece can be as follows: Figure 1 The composite workpiece 1 shown.

[0256] Here, the determined camber ranges from 2 μm to 6.2 μm. The average camber of all 30 composite workpieces tested was 3.9 μm, and this average value is marked with a horizontal line in the figure.

[0257] Figure 4 The strength values ​​determined for different composite workpieces are shown.

[0258] For each composite workpiece, the strength of one surface of the composite workpiece can be determined by the ring-on-ring test method.

[0259] For the first group of multiple composite workpieces, the dotted lines in the figure, acting as regression lines, are obtained from the various measured values ​​of intensity, represented by circles. Each of these composite workpieces is a composite workpiece according to the present invention. Here, the force acts on the second surface (concave curved surface), that is, on the surface opposite to the first surface coated with the first coating group.

[0260] For the second group of multiple composite workpieces, the solid line, as a regression line, is obtained from the various measured values ​​of intensity, represented by squares. Each of these composite workpieces is a composite workpiece according to the present invention. Here, the force acts on the first surface (a convex curved surface), i.e., the surface coated with the first coating group (and thus opposite to the uncoated second surface).

[0261] For the third group of multiple composite workpieces, the dashed lines, acting as regression lines, are obtained from individual measurements of intensity represented by triangles. Each of these composite workpieces is not a composite workpiece according to the invention, but rather comprises a curved substrate body without the first coating group. Force is applied to the second surface (concave curved surface), i.e., the surface opposite the uncoated first surface.

[0262] For the strength of composite workpieces (such as the composite workpiece according to the present invention), the fracture force in Newtons, marked on the horizontal axis of the figure, is a very good comparative metric. Figure 4 The vertical axis also shows the failure probability as a percentage.

[0263] Therefore, it can be read like this. Figure 4 For a given force, it is possible to Figure 4 Read the probability of failure of the composite workpiece. In this case, the force is the failure force.

[0264] As can be seen from the figure, when a force is applied to the second surface of the composite workpiece according to the present invention (referring to the circle), its intensity is significantly higher than when a force is applied to the first surface of the composite workpiece according to the present invention (referring to the square) or to the second surface of a composite workpiece not described in the present invention (referring to the triangle). In other words, when a force is applied to the first surface of the composite workpiece according to the present invention or to the second surface of a composite workpiece not described in the present invention, the composite workpiece will break even with a relatively small force.

[0265] Therefore, for example, as can be seen from the figure, for a force of approximately 180 Newtons, when this force is applied to the second surface of the composite workpiece according to the present invention, the failure probability of the composite workpiece is almost 2%.

[0266] On the other hand, when the same force is applied to the first surface of the composite workpiece according to the present invention or the second surface of the composite workpiece not according to the present invention, the failure probability is almost 50%.

[0267] This means that if the composite workpiece is the composite workpiece according to the invention, and a force of 180 Newtons is applied to the side opposite to the coated side, only 2 out of 100 such composite workpieces will break. When the force is applied to the coated side, or when the uncoated group of coatings is applied to the concave surface, half of the composite workpieces will break.

[0268] In various embodiments of the invention, the features disclosed above in the specification, drawings and claims may be essential to the invention individually or in any combination thereof.

[0269] Figure Labels

[0270] 1 Composite workpiece

[0271] 3rd surface

[0272] 5. Substrate Body

[0273] 7 Coating Group

[0274] 9 Surface

[0275] 11 Surface

[0276] 13 Middle Surface

[0277] 15 Intermediate Surface

[0278] 17 Bow degree

Claims

1. A composite workpiece, comprising: Substrate body; and at least one first coating group; The substrate body includes at least one first surface and at least one second surface; Wherein, at least a portion of the first surface of the substrate body is convex, at least a portion of the second surface of the substrate body is concave, and wherein, due to the curvature of the first and second surfaces, the composite workpiece has an arc, the absolute value of which is between 0.1 µm and 50 µm; and Wherein, at least a portion of the first surface of the substrate body is coated with the first coating group. Among them, the Young's modulus E of the substrate material, the Poisson's ratio v of the substrate material, the radius of curvature R of the composite workpiece, the thickness D of the substrate, the thickness d of the first coating group, and the compressive stress S of the first coating group satisfy the following relationship: Wherein, the value of Young's modulus is between 40 GPa and 160 GPa; and / or the value of Poisson's ratio is between 0.15 and 0.

35.

2. The composite workpiece according to claim 1, wherein, The substrate is a wafer.

3. The composite workpiece according to claim 1, wherein, The substrate body has the aforementioned curvature.

4. The composite workpiece according to claim 1, wherein, The radius of curvature is the radius of curvature of the substrate body.

5. The composite workpiece according to claim 1, wherein, The value of the Young's modulus is between 85 GPa and 130 GPa; and / or the value of the Poisson's ratio is between 0.2 and 0.

3.

6. The composite workpiece according to any one of claims 1 to 5, in, The first coating group is characterized by: (i) It includes an anti-reflective coating; (ii) It includes: (a) Si3N4, ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, SnO2, indium tin oxide, ZnO2, AlN, mixed oxides containing at least two of the oxides of ZrO2, Ta2O5, HfO2, Nb2O5, TiO2, SnO2, indium tin oxide and ZnO2, mixed nitrides containing Si3N4 and AlN, or containing ZrO2, Ta2O5, HfO2, Nb2O5, (a) a mixture of at least one oxide of TiO2, SnO2, indium tin oxide and ZnO2 and at least one nitride of Si3N4 and AlN; (b) a mixture of ZrO2, Ta2O5, HfO2, Nb2O5, TiO2 or containing at least two of ZrO2, Ta2O5, HfO2, Nb2O5, TiO2; and / or (c) SiO2, MgF2 and a mixture of SiO2 and any one of the oxides; (iii) It is coated onto the substrate body by vapor deposition or sputtering process; (iv) It is amorphous; and / or (v) Its thickness is less than or equal to 400 nm and greater than or equal to 50 nm; Only the first surface of the substrate body is coated with the first coating group; and / or The first coating group is not coated on the second surface of the substrate body.

7. The composite workpiece according to claim 6, wherein, The anti-reflective coating includes titanium.

8. The composite workpiece according to any one of claims 1 to 5, wherein, The first coating group includes a mixed oxide comprising SiO2 and any one of the oxides.

9. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is less than or equal to 350 nm.

10. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is less than or equal to 300 nm.

11. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is less than or equal to 250 nm.

12. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is less than or equal to 200 nm.

13. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is less than or equal to 150 nm.

14. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is less than or equal to 100 nm.

15. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is greater than or equal to 100 nm.

16. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is greater than or equal to 150 nm.

17. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is greater than or equal to 200 nm.

18. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is greater than or equal to 250 nm.

19. The composite workpiece according to claim 6, wherein, The thickness of the first coating group is either greater than or equal to 300 nm.

20. The composite workpiece according to any one of claims 1 to 5, in, The substrate body includes glass; and / or The thickness of the substrate body is between 0.05 mm and 2 mm.

21. The composite workpiece according to claim 20, wherein, The thickness of the substrate body is less than or equal to 1.5 mm.

22. The composite workpiece according to claim 20, wherein, The thickness of the substrate body is less than or equal to 1 mm.

23. The composite workpiece according to claim 20, wherein, The thickness of the substrate body is less than or equal to 0.5 mm.

24. The composite workpiece according to claim 20, wherein, The thickness of the substrate body is greater than or equal to 0.07 mm.

25. The composite workpiece according to claim 20, wherein, The thickness of the substrate body is greater than or equal to 0.1 mm.

26. The composite workpiece according to claim 20, wherein, The thickness of the substrate body is greater than or equal to 0.3 mm.

27. The composite workpiece according to claim 20, wherein, The thickness of the substrate body is greater than or equal to 0.5 mm.

28. The composite workpiece according to claim 20, wherein, The thickness of the substrate body is greater than or equal to 1 mm.

29. The composite workpiece according to claim 20, wherein, The thickness of the substrate body is between 0.3 mm and 1.5 mm.

30. The composite workpiece according to claim 20, wherein, The thickness of the substrate body is between 0.3 mm and 1 mm.

31. The composite workpiece according to any one of claims 1 to 5, (i) where, The strength of the coated first surface of the substrate body is greater than or equal to the strength of the uncoated second surface of the substrate body; (ii) wherein the force on the second surface is greater than that on the first surface; and / or (iii) wherein the strength of the first and / or second surface of the substrate body is greater than or equal to 100 MPa and less than or equal to 1000 MPa.

32. The composite workpiece according to claim 31, wherein, The strength mentioned is the surface strength.

33. The composite workpiece according to claim 31, wherein, The strength of the first and / or second surfaces of the substrate body is greater than or equal to 150 MPa.

34. The composite workpiece according to claim 31, wherein, The strength of the first and / or second surfaces of the substrate body is greater than or equal to 200 MPa.

35. The composite workpiece according to claim 31, wherein, The strength of the first and / or second surfaces of the substrate body is greater than or equal to 250 MPa.

36. The composite workpiece according to claim 31, wherein, The strength of the first and / or second surfaces of the substrate body is less than or equal to 500 MPa.

37. The composite workpiece according to claim 31, wherein, The strength of the first and / or second surfaces of the substrate body is less than or equal to 400 MPa.

38. The composite workpiece according to claim 31, wherein, The strength of the first and / or second surfaces of the substrate body is less than or equal to 300 MPa.

39. The composite workpiece according to claim 31, wherein, The strength of the first and / or second surfaces of the substrate body is less than or equal to 200 MPa.

40. The composite workpiece according to any one of claims 1 to 5, wherein, At least some areas of the first coating group are under compressive stress.

41. The composite workpiece according to claim 40, wherein, The compressive stress is less than or equal to 100 MPa and greater than or equal to 1 MPa.

42. The composite workpiece according to claim 41, wherein, The compressive stress is less than or equal to 70 MPa.

43. The composite workpiece according to claim 41, wherein, The compressive stress is less than or equal to 50 MPa.

44. The composite workpiece according to claim 41, wherein, The compressive stress is less than or equal to 30 MPa.

45. The composite workpiece according to claim 41, wherein, The compressive stress is less than or equal to 20 MPa.

46. ​​The composite workpiece according to claim 41, wherein, The compressive stress is less than or equal to 10 MPa.

47. The composite workpiece according to claim 41, wherein, The compressive stress is greater than or equal to 10 MPa.

48. The composite workpiece according to claim 41, wherein, The compressive stress is greater than or equal to 20 MPa.

49. The composite workpiece according to claim 41, wherein, The compressive stress is greater than or equal to 30 MPa.

50. The composite workpiece according to claim 41, wherein, The compressive stress is greater than or equal to 50 MPa.

51. The composite workpiece according to claim 41, wherein, The compressive stress is greater than or equal to 70 MPa.

52. The composite workpiece according to claim 41, wherein, The compressive stress is between 10 MPa and 50 MPa.

53. The composite workpiece according to claim 41, wherein, The compressive stress is between 15 MPa and 40 MPa.

54. The composite workpiece according to claim 41, wherein, The compressive stress is between 15 MPa and 30 MPa.

55. The composite workpiece according to claim 41, wherein, The compressive stress is between 15 MPa and 25 MPa.

56. The composite workpiece according to claim 41, wherein, The compressive stress is between 20 MPa and 30 MPa.

57. The composite workpiece according to any one of claims 1 to 5, in, The curvature is between 0.1µm and 50µm.

58. The composite workpiece according to claim 57, wherein, The bow angle is greater than or equal to 0.3µm.

59. The composite workpiece according to claim 57, wherein, The curvature is greater than or equal to 0.5µm.

60. The composite workpiece according to claim 57, wherein, The bow angle is greater than or equal to 1µm.

61. The composite workpiece according to claim 57, wherein, The bow angle is greater than or equal to 5µm.

62. The composite workpiece according to claim 57, wherein, The bow angle is greater than or equal to 15µm.

63. The composite workpiece according to claim 57, wherein, The bow angle is greater than or equal to 20µm.

64. The composite workpiece according to claim 57, wherein, The bow angle is greater than or equal to 25µm.

65. The composite workpiece according to claim 57, wherein, The bow angle is greater than or equal to 30µm.

66. The composite workpiece according to claim 57, wherein, The bow angle is greater than or equal to 35µm.

67. The composite workpiece according to claim 57, wherein, The bow angle is greater than or equal to 40µm.

68. The composite workpiece according to claim 57, wherein, The bow angle is greater than or equal to 45µm.

69. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 45µm.

70. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 40µm.

71. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 35µm.

72. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 30µm.

73. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 25µm.

74. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 20µm.

75. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 15µm.

76. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 10µm.

77. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 5µm.

78. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 3µm.

79. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 2µm.

80. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 1µm.

81. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 0.7µm.

82. The composite workpiece according to claim 57, wherein, The bow angle is less than or equal to 0.3µm.

83. The composite workpiece according to claim 57, wherein, The curvature is between 0.3µm and 7µm.

84. The composite workpiece according to claim 57, wherein, The curvature is between 0.3µm and 6µm.

85. The composite workpiece according to claim 57, wherein, The curvature is between 0.3µm and 5µm.

86. The composite workpiece according to claim 57, wherein, The curvature is between 0.3µm and 4µm.

87. The composite workpiece according to any one of claims 1 to 5, in, Polish the second surface; Among these steps, the first surface is polished; Wherein, the first surface of the substrate body is convex at least in the region of the first coating group; and / or The second surface of the substrate body is concave at least within the region of the first coating group.

88. The composite workpiece according to any one of claims 1 to 5, in, Tensile stress exists at least in a portion of the substrate body within the first surface and / or at least in a depth region below the first surface, wherein the absolute value of the tensile stress approximately corresponds to the compressive stress of the first coating group and / or is between 1 MPa and 100 MPa.

89. The composite workpiece according to any one of claims 1 to 5, wherein, Tensile stress exists in at least a portion of the substrate body at a depth of at least two or three times the thickness of the first coating group, wherein the absolute value of the tensile stress roughly corresponds to the compressive stress of the first coating group and / or is between 1 MPa and 100 MPa.

90. The composite workpiece according to any one of claims 1 to 5, in, The composite workpiece has a circular or elliptical cutting surface on at least one cutting plane.

91. The composite workpiece according to any one of claims 1 to 5, in, The substrate body has a circular or elliptical cut surface on at least one cutting plane.

92. The composite workpiece according to claim 90, wherein, The maximum diameter of the cut surface is less than or equal to 500 mm and greater than or equal to 50 mm.

93. The composite workpiece according to claim 92, wherein, The maximum diameter of the cut surface is less than or equal to 300 mm.

94. The composite workpiece according to claim 92, wherein, The maximum diameter of the cut surface is less than or equal to 200 mm.

95. The composite workpiece according to claim 92, wherein, The maximum diameter of the cut surface is less than or equal to 150 mm.

96. The composite workpiece according to claim 92, wherein, The maximum diameter of the cut surface is greater than or equal to 100 mm.

97. The composite workpiece according to claim 92, wherein, The maximum diameter of the cut surface is greater than or equal to 150 mm.

98. The composite workpiece according to claim 92, wherein, The maximum diameter of the cut surface is greater than or equal to 200 mm.

99. The composite workpiece according to claim 92, wherein, The maximum diameter of the cut surface is greater than or equal to 300 mm.

100. The composite workpiece according to any one of claims 1 to 5, in, The composite workpiece further includes a second coating group, wherein at least a portion of the second surface of the substrate body is coated with the second coating group.

101. The composite workpiece according to claim 100, wherein, The second coating group has the following characteristics: (i) It is UV-cured, has an optical refractive index adapted to the material of the substrate body, and / or contains plastic; and / or (ii) It includes and / or forms at least one structure, said structure being applied to the substrate body; Only the second surface of the substrate body is coated with the second coating group; and / or The second coating group is not coated on the first surface of the substrate body.

102. The composite workpiece according to claim 101, wherein, The second coating group contains a polymer.

103. The composite workpiece according to claim 101, wherein, The structure is a lattice structure.

104. The composite workpiece according to claim 101, wherein, The structure is applied to the substrate at least in part by nanoimprint lithography.

105. Multiple composite workpieces, among which, The composite workpiece is the composite workpiece according to any one of claims 1 to 104.

106. The plurality of composite workpieces according to claim 105, wherein, The number of the composite workpieces is between 2 and 1,000,000.

107. The plurality of composite workpieces according to claim 106, wherein the number of composite workpieces is 25, 50, 100, 500, 1,000 or 10,000.

108. The plurality of composite workpieces according to any one of claims 105 to 107, in, When a force of 100 Newtons is applied to the second surface of each substrate body, the failure probability of the composite workpiece is less than or equal to 1%.

109. The plurality of composite workpieces according to claim 108, wherein, The failure probability is less than or equal to 0.5%.

110. The plurality of composite workpieces according to claim 108, wherein, The failure probability is less than or equal to 0.1%.

111. A method for manufacturing a composite workpiece according to any one of claims 1 to 104, comprising: - Provide substrate body; - Apply the coating group to the surface of the substrate body; as well as - During the application of the coating group to the surface of the substrate body, the temperature of the substrate body is maintained at less than or equal to 200°C, at least temporarily or continuously.

112. The method according to claim 111, wherein, The substrate body is made of glass and / or is a substrate body according to any one of claims 1 to 104.

113. The method according to claim 111, wherein, The coating group is a first coating group according to any one of claims 1 to 104, and the coating group is applied to a first surface according to any one of claims 1 to 104.

114. An augmented reality glasses comprising at least one composite workpiece according to any one of claims 1 to 104 or at least one blank comprising the composite workpiece according to any one of claims 1 to 104.

115. Use of the composite workpiece according to any one of claims 1 to 104, or at least one blank of the composite workpiece according to any one of claims 1 to 104, in augmented reality glasses.

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