Card removal device

Abstract

The present invention provides a card retrieval device, which includes: a fixed bracket and a card retrieval assembly; the card retrieval assembly includes a first guide rail and an insertion rod, the insertion rod is movably connected to the first guide rail along the axial direction of the first guide rail; the insertion rod is used to move along the axial direction of the first guide rail to penetrate the handle of the probe card; the fixed bracket includes a second guide rail arranged at an angle to the first guide rail, the card retrieval assembly is movably connected to the second guide rail along the axial direction of the second guide rail; the card retrieval assembly is used to move along the axial direction of the second guide rail after the insertion rod penetrates the handle, so as to drive the probe card to move along the axial direction of the second guide rail. With such a configuration, after the insertion rod penetrates the handle of the probe card, the card retrieval assembly moves along the axial direction of the second guide rail to drive the probe card to move along the axial direction of the second guide rail and separate from the base, effectively solving the problem of damage to the limit pins and the probe card caused by easy tilting when manually extracting the probe card.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a card taking device. Background Art

[0002] The existing card retrieval operation requires manual extraction by on-site personnel. During the card retrieval process, due to the friction between the device's limit pin and the probe card, a certain amount of force is required when lifting it upward, which can easily cause the probe card to tilt due to uneven force, causing the limit pin to deform under force and affecting its use. Summary of the Invention

[0003] The object of the present invention is to provide a card removal device to solve the problem that the limit pins and the probe card are easily damaged due to tilting when the probe card is manually removed.

[0004] In order to achieve the above-mentioned object, the present invention provides a card-taking device, comprising: a fixing bracket and a card-taking assembly;

[0005] The card removal assembly includes a first guide rail and an insertion rod, wherein the insertion rod is movably connected to the first guide rail along the axial direction of the first guide rail; the insertion rod is used to move along the axial direction of the first guide rail to penetrate the handle of the probe card;

[0006] The fixed bracket includes a second guide rail arranged at an angle to the first guide rail, and the card removal assembly is movably connected to the second guide rail along the axial direction of the second guide rail;

[0007] The card taking assembly is used to move along the axial direction of the second guide rail after the insertion rod penetrates the handle, so as to drive the probe card to move along the axial direction of the second guide rail.

[0008] Optionally, the card retrieval assembly further includes a first slider, which is movably disposed on the first guide rail along the axial direction of the first guide rail. One end of the insertion rod is connected to the first slider, and the other end of the insertion rod is a free end, which is used to penetrate the handle of the probe card.

[0009] Optionally, the card removal assembly further includes a first limiting member connected to the first guide rail; the first limiting member is used to connect to the insertion rod after passing through the handle to limit the radial displacement of the insertion rod along the first guide rail.

[0010] Optionally, the card-retrieving device further includes a force-applying assembly, which is connected to the card-retrieving assembly and is used to drive the card-retrieving assembly to move axially along the second guide rail.

[0011] Optionally, the fixed bracket includes a plurality of mutually parallel second guide rails, and the card removal assembly further includes a first connecting cross bar and a plurality of second sliders, wherein the second sliders are movably disposed on the second guide rails along an axial direction of the second guide rails, and the second sliders correspond one-to-one to the second guide rails; and the plurality of second sliders are connected by the first connecting cross bar;

[0012] The first guide rail is connected to the first connecting cross bar or the second sliding block.

[0013] Optionally, the card taking assembly further includes a second limiter connected to the card taking assembly, and the second limiter is used to abut against the base of the probe card to limit the movement of the card taking assembly toward the base.

[0014] Optionally, the fixed bracket further includes a fixing member, and at least the top end of the second guide rail is connected to the fixing member, and the fixing member is used to abut against the card removal assembly to limit the axial movement stroke of the card removal assembly along the second guide rail.

[0015] Optionally, the bottom end of the second guide rail is connected to the fixing member, and the fixing member is used to abut against the base of the probe card to limit the movement stroke of the card removal assembly toward the base.

[0016] Optionally, the fixing bracket further includes a second connecting cross bar, and the fixing members located at the top end of the second guide rail are connected via the second connecting cross bar.

[0017] Optionally, the axial direction of the first guide rail and the axial direction of the second guide rail are perpendicular to each other.

[0018] To sum up, the card picking device provided by the present invention includes: a fixed bracket and a card picking assembly; the card picking assembly includes a first guide rail and an insertion rod, and the insertion rod is movably connected to the first guide rail along the axial direction of the first guide rail; the insertion rod is used to move along the axial direction of the first guide rail to penetrate the handle of the probe card; the fixed bracket includes a second guide rail arranged at an angle to the first guide rail, and the card picking assembly is movably connected to the second guide rail along the axial direction of the second guide rail; the card picking assembly is used to move along the axial direction of the second guide rail after the insertion rod penetrates the handle, so as to drive the probe card to move along the axial direction of the second guide rail.

[0019] With this configuration, after the insertion rod penetrates the probe card handle, the card removal assembly moves axially along the second guide rail, driving the probe card to move axially along the second guide rail, completing the separation of the probe card from the base. Because the probe card continues to move axially along the second guide rail during separation, deformation of the probe card due to uneven force is effectively avoided, thereby extending the service life of the probe card and the stop pins. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic diagram of a probe card according to an embodiment of the present invention;

[0021] Figure 2 Schematic diagram of a limit pin according to an embodiment of the present invention;

[0022] Figure 3 is a schematic diagram of a card retrieval device according to an embodiment of the present invention;

[0023] Figure 4 1 is a schematic diagram of a card retrieval process of a card retrieval device according to an embodiment of the present invention;

[0024] Figure 5 2 is a diagram showing the positional relationship between the insertion rod and the first limiting member according to an embodiment of the present invention.

[0025] Wherein, the accompanying drawings are marked as follows:

[0026] 10-Card removal assembly; 20-Fixed bracket; 30-Probe card; 101-Insertion rod; 102-First guide rail; 103-First slider; 104-First limiter; 105-Force-applying assembly; 106-Second slider; 107-First connecting crossbar; 108-Second limiter; 201-Second guide rail; 202-Fixed member; 203-Second connecting crossbar; 301-Handle; 302-Limiting foot; 303-Base. DETAILED DESCRIPTION

[0027] To make the objects, advantages, and features of the present invention more clearly apparent, the present invention is further described below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale. They are only used to conveniently and clearly assist in illustrating the purposes of the embodiments of the present invention. In addition, the structures shown in the drawings are often part of the actual structure. In particular, different drawings may need to illustrate different focuses and sometimes use different scales.

[0028] As used in this specification, the singular forms "a", "an", and "the" include plural referents, the term "or" is generally used to include "and / or", the term "several" is generally used to include "at least one", and the term "at least two" is generally used to include "two or more". In addition, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features specified as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" and "proximal end" and "distal end" generally refer to two corresponding parts, which include not only endpoints, and the terms "mounted", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication between two elements or the interaction relationship between two elements. In addition, as used in this specification, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements may be direct or indirect through an intermediate element, and it cannot be understood as indicating or implying a spatial positional relationship between the two elements, that is, one element may be in any orientation such as inside, outside, above, below or to one side of another element, unless otherwise clearly indicated in the content. The terms "upper", "lower", "top" and "bottom" are generally relative positional relationships arranged in the direction of gravity; the terms "vertical" and "vertical direction" generally refer to the direction of gravity, which is generally perpendicular to the ground, and "horizontal" and "horizontal plane direction" generally refer to the direction parallel to the ground; for ordinary technicians in this field, the specific meanings of the above terms in this specification can be understood according to specific circumstances.

[0029] The object of the present invention is to provide a card removal device to solve the problem that the limit pins and the probe card are easily damaged due to tilting when the probe card is manually removed.

[0030] The following description is given with reference to the accompanying drawings.

[0031] Please refer to Figure 1 and Figure 2 , which shows a probe card 30 and its base 303. The probe card 30 has positioning holes arranged along the axial direction, and the base 303 has limiting pins 302 arranged along the axial direction. When the probe card 30 and the base 303 are in the assembled state, the limiting pins 302 are inserted into the positioning holes. The inventors found that if Figures 1 to 2As shown, the existing card removal operation is generally performed manually by on-site personnel. Due to the friction between the limit pin 302 located on the base 303 and the probe card 30, when the on-site personnel grasp the handle 301 of the probe card 30 and lift the probe card 30 upward, the probe card 30 is often tilted due to uneven force, thereby causing the limit pin 302 and / or the probe card 30 to deform, affecting the service life of the base 303 and the probe card 30.

[0032] Based on the above research, please refer to Figure 3 and Figure 4 The present invention provides a card-taking device, which includes: a fixed bracket 20 and a card-taking assembly 10; the card-taking assembly 10 includes a first guide rail 102 and an insertion rod 101, the insertion rod 101 is movably connected to the first guide rail 102 along the axial direction of the first guide rail 102; the insertion rod 101 is used to move along the axial direction of the first guide rail 102 to penetrate the handle 301 of the probe card 30; the fixed bracket 20 includes a second guide rail 201 arranged at an angle to the first guide rail 102, the card-taking assembly 10 is movably connected to the second guide rail 201 along the axial direction of the second guide rail 201; the card-taking assembly 10 is used to move along the axial direction of the second guide rail 201 after the insertion rod 101 penetrates the handle 301, so as to drive the probe card 30 to move along the axial direction of the second guide rail 201. It should be noted that the extension direction of the second guide rail 201 should be roughly the same as the extension direction of the limiting foot 302. Figure 3 and Figure 4 In the example shown, the second guide rail 201 extends vertically, and the vertical here is not limited to being strictly perpendicular to the horizontal plane. The extension direction of the second guide rail 201 may have a certain deviation angle from the direction perpendicular to the horizontal plane. For example, if the deviation angle is in the range of 0°-5°, it should be understood that the second guide rail 201 extends vertically.

[0033] With this configuration, on-site personnel first move the insertion rod 101 axially along the first guide rail 102 until it penetrates the handle 301. They then drive the card removal assembly 10 axially along the second guide rail 201, moving the probe card 30 along with it to complete the card removal operation. Compared to existing card removal operations, the present invention ensures that the probe card 30 maintains its direction of motion throughout the entire card removal process, preventing tilting due to uneven force, which would affect the service life of the probe card 30 and the stop pins 302.

[0034] For further information, please refer to Figure 3 and Figure 5The card removal assembly 10 further includes a first slider 103, which is movably disposed on the first guide rail 102 along the axial direction of the first guide rail 102. One end of the insertion rod 101 is connected to the first slider 103, and the other end of the insertion rod 101 is a free end, which is used to penetrate the handle 301 of the probe card 30. It should be noted that Figure 3 and Figure 5 In the illustrated example, the outer contour of the insertion rod 101 is L-shaped, so the insertion rod 101 can be directly connected to the handle 301. In other embodiments, the outer contour of the insertion rod 101 can also be other shapes, such as a straight line, etc., then a transition connecting rod needs to be provided to complete the connection with the handle 301, but the present invention is not limited to this.

[0035] Furthermore, the card retrieval assembly 10 also includes a first limiting member 104, which is connected to the first guide rail 102; the first limiting member 104 is used to connect to the insertion rod 101 after passing through the handle 301 to limit the radial displacement of the insertion rod 101 along the first guide rail 102.

[0036] Preferably, Figure 3 and Figure 5 As shown, the first guide rail 102 is a cylindrical member, which can minimize friction loss during movement. Accordingly, the first slider 103 is also configured as a matching annular member. Similarly, the insertion rod 101 is also a cylindrical member, and accordingly, the first stopper 104 is also configured as a matching annular member. Of course, in some other embodiments, the first guide rail 102 and the insertion rod 101 can also be members of other shapes, and accordingly, the first slider 103 and the first stopper 104 should also be configured as matching members. Those skilled in the art can configure them according to actual circumstances, and the present invention is not limited to this.

[0037] Please refer to Figure 3 The card taking device further includes a force applying component 105, which is connected to the card taking component 10 and is used to drive the card taking component 10 to move along the axial direction of the second guide rail 201. Figure 3 In the example shown, the force-applying component 105 is connected to the first guide rail 102 through a connecting rod. The setting of the connecting rod can further reduce the influence of the direction of the force applied by the on-site personnel on the force-applying component 105 on the force condition of the probe card 30, so that the force on the probe card 30 is uniform and tilting is avoided. Of course, in other embodiments, the connection between the force-applying component 105 and the first guide rail 102 can also be completed through other connecting parts, and the present invention is not limited to this.

[0038] Please continue to refer to Figure 3The fixing bracket 20 includes a plurality of second guide rails 201 parallel to each other. The card taking assembly 10 also includes a first connecting cross bar 107 and a plurality of second sliders 106. The second sliders 106 are movably arranged on the second guide rail 201 along the axial direction of the second guide rail 201. The second sliders 106 correspond to the second guide rail 201 one by one. The plurality of second sliders 106 are connected by the first connecting cross bar 107. The first guide rail 102 is connected to the first connecting cross bar 107 or the second sliders 106. It should be noted that in Figure 3 In the illustrated example, there are four second guide rails 201, and accordingly, there are four first connecting crossbars 107 and second sliders 106, with the first connecting crossbars 107 enclosing a rectangle. In other embodiments, the number of second guide rails 201 may be three, five, or even more, and accordingly, the number of first connecting crossbars 107 and second sliders 106 may be a corresponding number. The shape of the connection between the first connecting crossbar 107 and the second slider 106 may be, for example, a triangle or a star. Those skilled in the art may configure the number of second guide rails 201, first connecting crossbars 107, and second sliders 106 based on the size and shape of the probe card 30 and the base 303, and the present invention is not limited thereto.

[0039] Optional, in Figure 3 In the illustrated example, the plurality of second sliders 106 are located on the same plane. Accordingly, the first connecting cross bar 107 sequentially connects the second sliders 106 and is also located on the same plane. In some other embodiments, the plurality of second sliders 106 may also be located on different planes, which is not limited to the present invention.

[0040] Further, such as Figures 3 and 4 As shown, the card taking assembly 10 further includes a second limiter 108, which is connected to the card taking assembly 10 and is used to abut against the base 303 of the probe card 30 to limit the movement of the card taking assembly 10 toward the base 303. Figure 1 and Figure 2 In the illustrated example, the second stopper 108 is connected to the first connecting crossbar 107. Of course, in other embodiments, the second stopper 108 may also be connected to the second slider 106, and the present invention is not limited thereto. Figure 4 As shown, when the second limiting member 108 abuts against the base 303 , the card removal assembly 10 is at the lower limit position. At this time, the insertion rod 101 should be flush with the handle 301 to facilitate the insertion of the insertion rod 101 into the handle 301 .

[0041] like Figure 3As shown, the fixing bracket 20 further includes a fixing member 202, to which at least the top end of the second guide rail 201 is connected. The fixing member 202 is configured to abut against the card ejection assembly 10 to limit the axial movement of the card ejection assembly 10 along the second guide rail 201. With this configuration, when the card ejection assembly 10 moves axially along the second guide rail 201 to the top end of the second guide rail 201, the fixing member 202 can limit the movement of the card ejection assembly 10. This not only facilitates the movement of the probe card 30 to a suitable position for removal, but also prevents the card ejection assembly 10 from falling out of the second guide rail 201.

[0042] Furthermore, the bottom end of the second guide rail 201 can also be connected to the fixing member 202. The fixing member 202 connected to the bottom end of the second guide rail 201 is used to abut against the base 303 to limit the movement of the card removal assembly 10 toward the base 303. In this configuration, when the card removal assembly 10 moves axially along the second guide rail 201 to the bottom end of the second guide rail 201, the fixing member 202 can limit the movement of the card removal assembly 10, allowing the insertion rod 101 to descend to a suitable position and move axially along the first guide rail 102 and penetrate into the handle 301. It should be noted that the second limiter 108 and the fixing member 202 at the bottom end of the second guide rail 201 can be provided selectively or simultaneously.

[0043] Furthermore, the fixing bracket 20 further includes a second connecting crossbar 203, through which the fixing member 202 at the top end of the second guide rail 201 is connected. The second connecting crossbar 203 can limit the radial displacement of the fixing member 202 along the second guide rail 201, thereby forming a stable structure for the fixing bracket 20. In some other embodiments, the fixing member 202 at the bottom end of the second guide rail 201 can also be connected via the second connecting crossbar 203 to achieve the same displacement restriction function, and the present invention is not limited to this.

[0044] Please continue to refer to Figure 3 Optionally, the axial direction of the first guide rail 102 is perpendicular to the axial direction of the second guide rail 201. Figure 1 In the illustrated example, the axial direction of the first guide rail 102 extends in a direction parallel to the horizontal plane, and the axial direction of the second guide rail 201 extends in a direction perpendicular to the horizontal plane. Of course, in some other embodiments, depending on the different assembly angles of the probe card 30 and the base 303, the axial direction of the first guide rail 102 may have a certain deviation angle from the direction parallel to the horizontal plane, and accordingly, the axial direction of the second guide rail 201 may also have a certain deviation angle from the direction perpendicular to the horizontal plane. Those skilled in the art may configure it according to actual conditions, and the present invention is not limited to this.

[0045] The following combination Figures 1 to 5 The example shown further illustrates the principle of use of the card removal device provided in this embodiment. When the probe card 30 and the base 303 are in a mutually assembled state (the state at this time is as shown in FIG. Figure 4 As shown), a downward force is applied to the force-applying assembly 105 to drive the card-taking assembly 10 to move along the axial direction of the second guide rail 201 to a position close to the fixing member 202 at the bottom end of the second guide rail 201 (the state at this time is as shown in FIG. Figure 2 As shown), at this time, the first slider 103 is driven to move axially along the first guide rail 102 to drive the insertion rod 101 to pass through the handle 301 and connect with the first limit member 104, and then an upward force is applied to the force-applying assembly 105 to drive the card-taking assembly 10 to drive the probe card 30 to move axially along the second guide rail 201 until the probe card 30 is completely separated from the base 303.

[0046] In summary, the card picking device provided in the embodiment of the present invention includes: a fixed bracket and a card picking assembly; the card picking assembly includes a first guide rail and an insertion rod, and the insertion rod is movably connected to the first guide rail along the axial direction of the first guide rail; the insertion rod is used to move along the axial direction of the first guide rail to penetrate the handle of the probe card; the fixed bracket includes a second guide rail arranged at an angle to the first guide rail, and the card picking assembly is movably connected to the second guide rail along the axial direction of the second guide rail; the card picking assembly is used to move along the axial direction of the second guide rail after the insertion rod penetrates the handle, so as to drive the probe card to move along the axial direction of the second guide rail.

[0047] With this configuration, after the insertion rod penetrates the probe card handle, the card removal assembly moves axially along the second guide rail, driving the probe card to move axially along the second guide rail, completing the separation of the probe card from the base. Because the probe card continues to move axially along the second guide rail during separation, deformation of the probe card due to uneven force is effectively avoided, thereby extending the service life of the probe card and the stop pins.

[0048] The above description is only a description of the preferred embodiments of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A card removal device, characterized in that: include: Fixed bracket and card removal assembly; The card removal assembly includes a first guide rail and an insertion rod, wherein the insertion rod is movably connected to the first guide rail along the axial direction of the first guide rail; the insertion rod is used to move along the axial direction of the first guide rail to penetrate the handle of the probe card; The fixed bracket includes a second guide rail arranged at an angle to the first guide rail, and the card removal assembly is movably connected to the second guide rail along the axial direction of the second guide rail; The card removal assembly is used to move along the axial direction of the second guide rail after the insertion rod penetrates the handle, so as to drive the probe card to move along the axial direction of the second guide rail; The card removal assembly further includes a first slider, the first slider being movably disposed on the first guide rail along an axial direction of the first guide rail, one end of the insertion rod being connected to the first slider, and the other end of the insertion rod being a free end, the free end being used to penetrate the handle of the probe card; The card removal assembly further includes a first limiting member connected to the first guide rail; the first limiting member is used to connect to the insertion rod after passing through the handle to limit the radial displacement of the insertion rod along the first guide rail; The card taking device further includes a force applying assembly, which is connected to the card taking assembly and is used to drive the card taking assembly to move axially along the second guide rail; The fixing bracket includes a plurality of second guide rails parallel to each other, and the card removal assembly further includes a first connecting cross bar and a plurality of second sliders, wherein the second sliders are movably arranged on the second guide rails along the axial direction of the second guide rails, and the second sliders correspond to the second guide rails one by one; the plurality of second sliders are connected by the first connecting cross bar; The first guide rail is connected to the first connecting cross bar or the second sliding block; The card taking assembly further includes a second limiting member connected to the card taking assembly, and the second limiting member is used to abut against the base of the probe card to limit the movement of the card taking assembly toward the base.

2. The card removal device according to claim 1, wherein: The fixing bracket further includes a fixing member, and at least the top end of the second guide rail is connected to the fixing member, and the fixing member is used to abut against the card taking assembly to limit the axial movement of the card taking assembly along the second guide rail.

3. The card removal device according to claim 2, wherein: The bottom end of the second guide rail is connected to the fixing member, and the fixing member is used to abut against the base of the probe card to limit the movement stroke of the card removal assembly toward the base.

4. The card removal device according to claim 2, wherein: The fixing bracket further includes a second connecting cross bar, and the fixing members located at the top end of the second guide rail are connected via the second connecting cross bar.

5. The card removal device according to claim 1, wherein: The axial direction of the first guide rail and the axial direction of the second guide rail are perpendicular to each other.

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